Current control method and energy radiation system

Abstract

The present application relates to a current control method and an energy radiation system. The method includes steps of providing high-frequency power to each coil of a radio frequency energy radiation unit by a current control device, and adjusting a ratio of currents and / or a phase angle of currents between the high-frequency powers transmitted to each coil by the current control device. In an unfavorable state, there are performance differences in each coil due to the manufacturing process, and the magnetic induction intensities generated by each coil with the same current are different. In the current control method of the present application, by collecting the magnetic induction intensities generated by each coil with the same current, the current control device adjusts the ratio of currents and / or the phase angle between the currents output to each coil based on the differences in the magnetic induction intensities, and adjusts the ratio of currents and / or the phase angle of the currents to adjust so as to equalize the magnetic induction intensities generated by each coil, and further improve the output accuracy of the multi-coil radio frequency energy radiation unit.

Description

Technical Field

[0001] This application relates to radio frequency power supplies, and in particular, to a current control method and an energy radiation system.

Background Art

[0002] A plasma source mechanism transmits information to a certain distance away without requiring a transmission line by transmitting radio waves. The energy radiation device in the plasma source mechanism includes a plurality of coils. However, in an energy radiation device including a plurality of coils, since the manufacturing process of the coils cannot be made completely the same, the magnetic induction intensity due to the same current flowing through each coil is different, which affects the output accuracy of the plasma source mechanism. Therefore, in the realization process, the inventor has discovered that there is at least a problem that the output electromagnetic waves of the conventional plasma source mechanism are not uniform.

Summary of the Invention

Problems to be Solved by the Invention

[0003] Based on this, there is a need to provide a current control method and an energy radiation system for the problem that the output accuracy of the conventional multi-coil energy radiation structure is not high.

Means for Solving the Problems

[0004] To achieve the above object, according to one aspect, an embodiment of this application is a current control method of a plasma source mechanism used in a radio frequency energy radiation unit of a plasma source mechanism, providing high-frequency power to each coil of the radio frequency energy radiation unit by a current control device; adjusting, by the current control device, at least one of the following power parameters between the high-frequency powers transmitted to each coil, adjusting the ratio of the currents of each coil; adjusting the phase angle of the currents of each coil, and including a step of providing a current control method of a plasma source mechanism.

[0005] In one embodiment, before the step of adjusting at least one of the following power parameters between the high-frequency powers transmitted to each coil, the step of obtaining the magnetic induction intensity generated by the current flowing in each coil by a current control device; and the step of adjusting the ratio between the currents transmitted to each coil and the phase angle of the current based on each magnetic induction intensity by the current control device are further included.

[0006] In one embodiment, the current control device obtains the magnetic induction intensity generated by each coil with the same ratio of current.

[0007] In one embodiment, the current control device equalizes the magnetic induction intensities generated by each coil with the adjusted current by adjusting the ratio between the currents transmitted to each coil.

[0008] In one embodiment, the current control device includes a power supply and a multi-output matching module. In the step of adjusting the ratio of the current of each coil, the power supply outputs current to the multi-output matching module, and the multi-output matching module adjusts the ratio between the currents transmitted to each coil, shunts the current transmitted by the power supply according to the ratio, and outputs corresponding to each coil.

[0009] In one embodiment, the current control device includes a power supply and a multi-output matching module. In the step of adjusting the ratio of the current of each coil, at least one slave power supply is controlled by the master power supply to output power to each multi-output matching module, and the current transmitted by each multi-output matching module to each coil satisfies the ratio of the current.

[0010] In one embodiment, in the step of adjusting the ratio of the current of each coil, the master power supply outputs power to the first multi-output matching module. The master power source controls the slave power source to output power to the second multi-output matching module, The currents transmitted to each coil via the first multi-output matching module and the second multi-output matching module satisfy the current ratio.

[0011] In one embodiment, the current control device includes a master power source, at least one slave power source, and at least one multi-output matching module, The master power source is connected to each slave power source, and each slave power source is connected to a corresponding multi-output matching module, In the step of adjusting the current ratio of each coil, The master power source controls each slave power source to adjust the ratio between the currents output to each multi-output matching module.

[0012] In one embodiment, the current control device includes a phase shift control power source and a multi-output matching module, In the step of adjusting the phase angle of the current of each coil, The phase shift control power source modulates the phase angle of the current output to the multi-output matching module.

[0013] In one embodiment, the current control device includes a power source and a multi-output matching module, In the step of adjusting the phase angle of the current of each coil, The master power source controls the phase angle of the current output by at least one slave power source to each multi-output matching module.

[0014] In one embodiment, in the step of adjusting the phase angle of the current of each coil, The master power source outputs a first current to the first multi-output matching module, The master power source controls the slave power source to output a second current to the second multi-output matching module, and the phase angles of the second current and the first current are the same or different.

[0015] In one embodiment, the multi-output matching module includes a variable capacitance, In the step of the multi-output matching module adjusting the ratio between each current, the multi-output matching module adjusts the ratio between each output current by changing the capacitance value of the variable capacitance.

[0016] According to another aspect, an embodiment of the present application is an energy radiation system, including a radio frequency energy radiation unit and a current control device, the radio frequency energy radiation unit includes at least two coils, and each of the current control devices is connected to each coil, The current control device provides an energy radiation system used to implement the current control method of the plasma source mechanism.

[0017] In one embodiment, the current control device is further used to adjust the phase angle of the current transmitted to each coil based on each magnetic induction intensity.

Advantages of the Invention

[0018] One of the above technical solutions has the following advantages and beneficial effects.

[0019] In the current control method of the plasma source mechanism of the present application, the current control device provides high-frequency power to each coil of the radio frequency energy radiation unit, and the current control device adjusts the ratio and / or phase angle of the current between the high-frequency powers transmitted to each coil. In an unfavorable state, there are performance differences in each coil due to the manufacturing process, and the magnetic induction intensities generated by each coil with the same current are different. In the current control method of the present application, by collecting the magnetic induction intensities generated by each coil with the same current, the current control device adjusts the ratio and / or phase angle between the currents output to each coil based on the differences in each magnetic induction intensity, and by adjusting the ratio and / or phase angle of the current, the magnetic induction intensities generated by each coil are adjusted to be uniform, and further the output accuracy of the multi-coil radio frequency energy radiation unit is improved.

Brief Description of the Drawings

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Embodiments for Carrying Out the Invention

[0021] To facilitate the understanding of the present application, the present application will be described more comprehensively with reference to the related drawings below. The drawings show the optimal embodiments of the present application. However, the present application is not limited to the embodiments described in this specification and can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the disclosure content of the present application more thorough and comprehensive.

[0022] It should be noted that when one element is regarded as "connected" to another element, the other element may be directly connected to the other element, may be integrally coupled to the other element, or intermediate elements may be present at the same time. The terms "attachment", "one end", "the other end" and similar expressions used in this specification are for illustrative purposes only.

[0023] Unless otherwise defined, all technical terms and scientific terms used in this specification have the same meaning as commonly understood by those skilled in the art. The terms used in the specification of the present application are for illustrative purposes of specific embodiments only and are not intended to limit the present application. The term "and / or" used in this specification includes any and all combinations of one or more related items.

[0024] The plasma source mechanism is for radiating radio waves. The energy radiation device 2 in the plasma source mechanism includes two or more coils. Due to differences in the manufacturing process, there are performance differences among the coils. When the same current flows, there are differences in the magnetic induction intensity generated by each coil, and the output accuracy of the energy radiation device 2 is not high. To solve this problem, as shown in FIGS. 1-6, a plasma source mechanism used in a vacuum chamber device having a vacuum chamber is provided. The plasma source mechanism includes an energy radiation device 2 and a current control device 1. The energy radiation device 2 is mounted in a housing outside the vacuum chamber of the vacuum chamber device. In one example, the current control device 1 includes a power supply and a multi-output matching module 13. The power supply is connected to the multi-output matching module 13. Each output terminal of the multi-output matching module 13 is connected corresponding to a plurality of coils of the energy radiation device 2. The current provided by the current control device 1 is transmitted to the plurality of coils through the multi-output matching module 13. The plurality of coils obtain currents with the same or different ratios, and currents with the same phase angle or different phase angles. Note that the current control device 1 can adjust the ratio of the current output to the coils and can also adjust the phase angle of the current output to the coils. Specifically, the ratio of the current output to each coil may be the same or different, and the phase angle of each coil may be the same or different. Specifically, in one example, the power supply provides a first current to the multi-output matching module 13. The multi-output matching module 13 adjusts the first current to form a plurality of second currents and transmits them to the plurality of coils. The plurality of second currents are currents with the same or different ratios to each other.

[0025] In one example, as shown in FIG. 1, the current control device 1 includes one multi-output matching module 13. In another example, as shown in FIG. 2, the current control device 1 includes at least two multi-output matching modules 13, for example, two, three, four... N multi-output matching modules 13, and the specific quantity can be determined according to the actual demand. When the number of multi-output matching modules 13 is plural, the power supply provides currents with the same ratio or different ratios to each multi-output matching module 13. Similarly, when the number of multi-output matching modules 13 is plural, the multi-output matching modules 13 acquire currents with the same or different phase angles from the power supply.

[0026] The power supply 11 is used to modulate the current required by the energy emission device 2, and the multi-output matching module 13 is used to shunt the current transmitted by the power supply 11 according to a ratio. The power supply may be a single power supply or a battery pack connected with a plurality of power supplies. In one example, as shown in FIG. 3, the power supply includes a master power supply 111, at least one slave power supply 113 and at least one multi-output matching module 13. Each output terminal of the master power supply 111 is connected corresponding to the slave power supply 113, and each slave power supply 113 is connected corresponding to the multi-output matching module 13. It should be noted that when there is one multi-output matching module 13, the master power supply 111 can control the slave power supply 113 to adjust the magnitude of the current output to each multi-output matching module 13. When there are two or more multi-output matching modules 13, the master power supply 111 can control the slave power supply 113 to adjust the ratio and magnitude of the currents output to each multi-output matching module 13. Of course, in this embodiment, as shown in FIG. 3, the master power supply is connected to all the slave power supplies and some of the multi-output matching modules 13 respectively, and the slave power supply is connected to some other multi-output matching modules 13. In this example, the master power supply has the functions of controlling the slave power supply and outputting current to the multi-output matching module 13 at the same time.

[0027] For application to alternating current, since the current value in alternating current changes according to the change in the phase angle, by changing the phase angle of each current output to the multi-output matching module 13, the magnetic induction intensity of each coil is further equalized. In one example, as shown in FIG. 4, the power supply includes a master power supply and at least one slave power supply. The master power supply and the slave power supply are respectively connected to the input end of the multi-output matching module 13 and supply current, and the master power supply controls the phase angle at which each slave power supply outputs current. For example, at least one of the master power supply 111 and the slave power supply 113 is a phase shift control power supply. For example, the master power supply 111 is a phase shift control power supply, and transmits the current with the adjusted phase angle to the corresponding slave power supply 113 through the output end. The slave power supply 113 is a phase control power supply, and adjusts the phase angle of the output current after obtaining the control command of the master power supply 111. Also for example, the power supply may be directly controlled by the controller 115. As shown in FIG. 5, the power supply includes the controller 115 and at least one slave power supply. The at least one slave power supply is respectively connected to the input end of the multi-output matching module 13 and supplies current. The controller 115 adjusts the phase angle at which the at least one slave power supply outputs current. In this example, it is only necessary to ensure that one slave power supply is controlled by the controller 115 to change the phase angle of the current. Also for example, the power supply includes the controller 115 and a plurality of slave power supplies. The plurality of slave power supplies are respectively connected to the multi-output matching module 13, and the controller 115 controls the plurality of power supplies to supply currents with the same or different phase angles. In one example, the number of the multi-output matching modules 13 is single and has two or more input terminals. Each input terminal corresponds to the output terminal of a different multi-output matching module 13. The two input terminals acquire currents with the same or different phase angles from the power supply. The number of input terminals is one, two, three, four... N, and the specific number can be determined according to actual requirements. In one example, the number of output terminals of the multi-output matching module 13 is two, that is, it is a dual-output matching module. Similarly, in one example, the multi-output matching module 13 has one input terminal, and the input terminal may be connected to one output terminal of the power supply, or may be simultaneously connected to at least two output terminals of the power supply. In another example, the multi-output matching module 13 has at least two input terminals, and each input terminal may be connected in a one-to-one correspondence to the output terminal of the power supply, or may be connected to the output terminals of the power supply with a non-fixed number.

[0028] In one example, a dual-output matching module structure is provided. The dual-output matching module includes a capacitor C0, a variable capacitor C1, a variable capacitor C2, and a variable capacitor C3. One end of the capacitor C0 is connected to one end of the variable capacitor C1, the other end is connected to one end of the variable capacitor C2, one end of the variable capacitor C3 is connected to the other end of the variable capacitor C1, and the other end of the variable capacitor C3 is connected to the other end of the variable capacitor C2.

[0029] The current control device 1 adjusts the current according to the following steps, so as to make the magnetic induction intensities generated by each coil equal.

[0030] In step S1, the current control device 1 acquires the magnetic induction intensities generated by each coil of the energy radiation device 2 with the same current.

[0031] Using a magnetic induction intensity detector, the magnetic induction intensity generated by each coil with the same current can be detected. In one example, the magnetic induction intensity generated by each coil with the same current can be detected in advance and stored in the current control device 1. When it is necessary to control the energy radiation device 2 to generate radio waves, the current control device 1 calls the stored magnetic induction intensity. Further, the current control device 1 can store the magnetic induction intensities of the coils of a plurality of different energy radiation devices 2 simultaneously. In another example, the current control device 1 can detect the magnetic induction intensity in real time by a magnetic induction intensity detector, and dynamically adjust the current output to the coil according to the magnetic induction intensity obtained in real time. Note that the current control device 1 is used to transmit current to each coil and adjust the ratio between the currents transmitted to each coil.

[0032] In step S3, the current control device 1 equalizes the magnetic induction intensities generated by each coil with the adjusted current by adjusting the ratio between the currents transmitted to each coil based on each magnetic induction intensity.

[0033] The current control device 1 modulates to a total current of a magnitude corresponding to the sum of each magnetic induction intensity based on the stored magnetic induction intensity of each coil or the magnetic induction intensity obtained in real time, obtains the ratio between the currents output to each coil based on each magnetic induction intensity, shunts the total current into sub-currents transmitted to each coil according to the ratio, and transmits the sub-currents of corresponding magnitudes to the corresponding coils.

[0034] In one example, as shown in FIG. 1, the current control device 1 includes a power supply 11 and a multi-output matching module 13. Note that the number of output terminals of the multi-output matching module 13 in this example is equal to the number of coils in the energy radiation device 2, and the output terminals of the multi-output matching module 13 are connected to the coils in the energy radiation device 2 in a one-to-one correspondence. Note that the multi-output matching module 13 includes at least two output terminals.

[0035] In this example, the step in which the current control device 1 adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity includes the following steps. In step S21, the power supply 11 modulates the current output to the multi-output matching module 13 based on each magnetic induction intensity. The power supply 11 obtains the sum of each magnetic induction intensity, modulates it to a current of a magnitude corresponding to the sum of each magnetic induction intensity, and transmits this current to the multi-output matching module 13.

[0036] In step S31, the multi-output matching module 13 adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity, shunts the current transmitted by the power supply 11 according to this ratio, and outputs it corresponding to each coil. The multi-output matching module 13 processes the ratio between the currents to be output to each coil based on the difference in each magnetic induction intensity, and then shunts the current transmitted by the power supply 11 according to this ratio, and transmits the corresponding shunted current to the corresponding coil. The number of shunts is equal to the number of coils.

[0037] In another example, as shown in FIG. 2, the current control device 1 includes a power supply 11 and at least two multi-output matching modules 13. In this example, the sum of the number of output terminals connected to the energy radiation device 2 of each multi-output matching module 13 is equal to the number of coils in the energy radiation device 2, and the output terminals of the multi-output matching module 13 are connected to the coils in the energy radiation device 2 in a one-to-one correspondence.

[0038] In this example, the step in which the current control device 1 adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity includes the following steps. In step S31, the power supply 11 adjusts the ratio between the currents output to each multi-output matching module 13 based on each magnetic induction intensity. The power supply 11 obtains the sum of each magnetic induction intensity and modulates it to a total current with a magnitude corresponding to the sum of each magnetic induction intensity. The power supply 11 separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13, obtains the ratio between the currents output to each multi-output matching module 13 based on the sum of the magnetic induction intensities corresponding to each multi-output matching module 13, shunts the total current based on the ratio, and transmits the shunted current to the corresponding multi-output matching module 13. The number of shunts is equal to the number of multi-output matching modules 13.

[0039] In step S33, each multi-output matching module 13 adjusts the ratio between the currents transmitted to each coil connected to the multi-output matching module 13 based on the magnetic induction intensity of the coil connected to the multi-output matching module 13, shunts the current transmitted by the power supply 11 according to the ratio, and outputs corresponding to the coils connected to the multi-output matching module 13. Each multi-output matching module 13 obtains the ratio between the currents output to each coil connected to it based on the magnetic induction intensity of each coil connected to it, shunts the correspondingly input current at the ratio, and outputs the shunted current to the corresponding coil.

[0040] To realize that the multi-output matching module 13 can adjust the ratio between the output currents, in one example, the multi-output matching module 13 includes a variable capacitor. The variable capacitor is a capacitor whose capacitance can change under control.

[0041] In the step where the multi-output matching module 13 adjusts the ratio between each current, the multi-output matching module 13 adjusts the ratio between each output current by changing the capacitance value of the variable capacitor.

[0042] In order to ensure that the rear end of the circuit receives a sufficiently large current, in one example, as shown in FIG. 7, the current control device 1 further includes a power amplification module 15. The power amplification module 15 is used to amplify the current.

[0043] In the step of the power supply 11 adjusting the current output to the multi-output matching module 13 based on each magnetic induction intensity, the power supply 11 adjusts the current output to the power amplification module 15 based on each magnetic induction intensity, and the power amplification module 15 adjusts the current transmitted by the power supply 11 and transmits it to the multi-output matching module 13.

[0044] To more specifically understand the principle of the current control device 1 of the present application, hereinafter, the current control device 1 described in FIG. 7 will be taken as an example for explanation.

[0045] The first output terminal of the power supply 11 is connected to the power amplification module 1, and the second output terminal is connected to the power amplification module 2. The power supply 11 is based on the sum of the magnetic induction intensities of the coil 1 and the coil 2 connected to the dual-output matching module 1, and the sum of the magnetic induction intensities of the coil 1 and the coil 2 connected to the dual-output matching module 2. Based on this, the current ratio I ps1 of the current at the first output terminal of the power supply 11 and the current I ps2 at the second output terminal, i.e., I ps1 / I ps2 is adjusted, and based on this current ratio, the total current output by the power supply 11 is shunted and output, and is output to the power amplification module 1 and the power amplification module 2 respectively.

[0046] The power amplification module 1 amplifies the current I ps1 and outputs the current I1. Its output terminal is connected to the input terminal of the dual-output matching module 1. The power amplification module 2 amplifies the current I ps2 and outputs the current I2. Its output terminal is connected to the input terminal of the dual-output matching module 2.

[0047] The dual-output integration module 1 shunts the current I1 output by the power amplification module 1 based on the magnetic induction intensity of coil 1 and the magnetic induction intensity of coil 2. The first output terminal of the power amplification module 1 is connected to coil 1, and the second output terminal is connected to coil 2. The current flowing into coil 1 is I u1 , and the current flowing into coil 2 is I u2 . Let I1 = I u1 + I u2 . The dual-output integration module 2 shunts the current I2 output by the power amplification module 2 based on the magnetic induction intensity of coil 3 and the magnetic induction intensity of coil 4. The first output terminal of the power amplification module 2 is connected to coil 3, and the second output terminal is connected to coil 4. The current flowing into coil 1 is I d1 , and the current flowing into coil 2 is I d2 . Let I2 = I d1 + I d2 .

[0048] The above dual-output integration module 1 includes four capacitors C u0 , C u1 , C u2 , and C u3 . C u1 , C u2 , C u3 are variable capacitors. By adjusting the variable capacitors C u1 , C u2 , C u3 , the current ratio I u1 at the first output terminal of the dual-output integration module 1 and the current I u2 at the second output terminal of the dual-output integration module 1, i.e., I u1 / I u2 , can be adjusted.

[0049] The above dual-output integration module 2 includes four capacitors C d0 , C d1 , C d2 , and C d3 . C d1 , C d2 , C d3 are variable capacitors. C d1 , Cd2 and C d3 By adjusting, the current I at the first output terminal of the dual-output matching module 2 d1 and the current I at the second output terminal of the dual-output matching module 2 d2 and the current ratio I d1 / I d2 can be adjusted.

[0050] The coil module includes coil 1, coil 2, coil 3, and coil 4. Coil 1 is connected to the first output terminal of the dual-output matching module 1, and the current flowing through coil 1 is I u1 and coil 2 is connected to the second output terminal of the dual-output matching module 1, and the current flowing through coil 2 is I u2 and coil 3 is connected to the first output terminal of the dual-output matching module 2, and the current flowing through coil 3 is I d1 and coil 4 is connected to the second output terminal of the dual-output matching module 2, and the current flowing through coil 4 is I u2 is.

[0051] The current control device 1 of the energy radiation device 2 of the present application includes a power supply 11 and at least one multi-output matching module 13. The power supply 11 is connected to the multi-output matching module 13, and each output terminal of the multi-output matching module 13 is connected to each coil of the energy radiation device 2 in a one-to-one correspondence. In an unfavorable state, there are performance differences in each coil due to the manufacturing process, and the magnetic induction intensities generated by each coil with the same current are different. The current control device 1 of the present application adjusts the ratio between the currents output to each coil based on the differences in the magnetic induction intensities of each coil, and adjusts the current to make the magnetic induction intensities generated by each coil uniform, and further improves the output accuracy of the structure of the multi-coil energy radiation device 2.

[0052] In one embodiment, a plasma source mechanism including an energy radiation device 2 and a current control device 1 is provided. The energy radiation device 2 includes at least two coils, for example, two, three, four... N coils. The power supply 11 in the current control device 1 is connected to each coil via a multi-output matching module 13. The current control device 1 is used to obtain the magnetic induction intensity generated by each coil of the energy radiation device 2 with the same current, and based on each magnetic induction intensity, by adjusting the ratio between the currents transmitted to each coil, to equalize the magnetic induction intensity generated by each coil with the adjusted current.

[0053] Based on the number of output ports of the multi-output matching module 13, it is divided into the following two cases. In the first case, as shown in FIG. 1, the current control device 1 includes a power supply 11 and one multi-output matching module 13. The power supply 11 is connected to the multi-output matching module 13, and the multi-output matching module 13 is connected to each coil respectively. It should be noted that the number of output ends of the multi-output matching module 13 is exactly the same as the number of each coil. In the second case, as shown in FIG. 2, the current control device 1 includes a power supply 11 and at least two multi-output matching modules 13. The power supply 11 is connected to each multi-output matching module 13 respectively, and each multi-output matching module 13 is connected to the corresponding number of coils respectively. It should be noted that each multi-output matching module 13 includes at least two output ends, and the sum of the output ends of each multi-output matching module 13 is equal to the number of coils. In an example, the multi-output matching module 13 is a dual-output matching module, that is, it includes two output ends. Taking the example that the energy radiation device 2 includes four coils, the current control device 1 includes two multi-output matching modules 13, and each multi-output matching module 13 is connected to two coils respectively. That is, in this example, the multi-output matching module 13 is a dual-output matching module. Further, in this example, the winding directions of the two coils connected to the multi-output matching module 13 are opposite. In other words, of the two coils connected to one multi-output matching module 13, one coil is wound clockwise and the other coil is wound counterclockwise.

[0054] In one example, as shown in FIG. 8, the dual-output matching module includes a capacitor C0, variable capacitors C1, C2, and C3. One end of capacitor C0 is connected to one end of variable capacitor C1, and the other end is connected to one end of variable capacitor C2. One end of variable capacitor C3 is connected to the other end of variable capacitor C1, and the other end of variable capacitor C3 is connected to the other end of variable capacitor C2. By adjusting the capacitance values of variable capacitors C1, C2, and C3, the ratio of the currents output by the two output terminals of the dual-output matching module can be changed.

[0055] To ensure that the rear end of the circuit receives a sufficiently large current, the current control device 1 further includes a power amplification module 15, and the power supply 11 is connected to the multi-output matching module 13 through the power amplification module 15.

[0056] To directly detect the magnetic induction intensity, the plasma source mechanism of the present application further includes a magnetic induction intensity detector. The number of magnetic induction intensity detectors is equal to the number of coils, and the magnetic induction intensity detectors and the coils are provided in one-to-one correspondence. The magnetic induction intensity detector is connected to the current control device 1. The magnetic induction intensity detector detects the magnetic induction intensity of the corresponding coil and transmits the magnetic induction intensity to the current control device 1.

[0057] To further understand the structure of the plasma source mechanism of the present application, as shown in FIG. 7, a specific embodiment is provided for description.

[0058] The plasma source mechanism includes a power supply 11, an energy radiation device 2, a power amplification module 1, a power amplification module 2, a dual-output matching module 1, and a dual-output matching module 2. The energy radiation device 2 includes coils 1, 2, 3, and 4. The power supply 11 is connected to the power amplification module 1 and the power amplification module 2 respectively. The power amplification module 1 is connected to coils 1 and 2 respectively. The power amplification module 2 is connected to coils 3 and 4 respectively.

[0059] Based on the sum of the magnetic induction intensities of coil 1 and coil 2, and the sum of the magnetic induction intensities of coil 3 and coil 4, the power supply 11 adjusts the current ratio between the current output to the power amplification module 1 and the current output to the power amplification module 2. The dual-output matching module 1 adjusts the current ratio between the current output to coil 1 and the current output to coil 2 based on the magnetic induction intensities of coil 1 and coil 2. The dual-output matching module 2 adjusts the current ratio between the current output to coil 3 and the current output to coil 4 based on the magnetic induction intensities of coil 3 and coil 4.

[0060] In the plasma source mechanism of the present application, by adjusting the current, the magnetic induction intensity generated by each coil is adjusted, thereby improving the output accuracy and stability of the radio frequency power supply. To achieve this function, the collaborative adjustment of the multi-output matching module 13 and the power supply 11 is required, and its principle is as follows. By adjusting the adjustable capacitance C in the multi-output matching module 13, the multiple current outputs of the multi-output matching module 13 are changed, thereby making the magnetic induction intensities generated by the respective coils connected to the dual-output matching module the same. The power supply 11 adjusts the ratio of the two currents at its output terminal, and further adjusts the ratio of the currents at the respective input terminals of the dual-output matching module, thereby making the magnetic induction intensities of the coils connected to different dual-output matching modules the same.

[0061] Referring to FIGS. 9 to 19, in some other embodiments, the plasma source mechanism is for radiating radio waves. The radio frequency energy radiation unit 25 of the plasma source mechanism includes at least two coils. Due to differences in the manufacturing process, there are performance differences in each coil, and when the same current flows, there are differences in the magnetic induction intensities generated by each coil. Therefore, the output accuracy of the radio frequency energy radiation unit 25 is not high. To solve this problem, in one embodiment, as shown in FIG. 9, a current control method for the radio frequency energy radiation unit 25 is provided, and the current control method includes the following steps.

[0062] In step S1, the current control device provides high-frequency power to each coil of the radio frequency energy radiation unit 25.

[0063] The current control device can generate high-frequency power and transmit it to each coil in the radio frequency energy radiation unit 25 so that the coil can radiate an electromagnetic field with the high-frequency power.

[0064] In step S3, the current control device provides high-frequency power to each coil of the radio frequency energy radiation unit 25.

[0065] The step of adjusting at least one of the following power parameters between the high-frequency powers transmitted to each coil by the current control device includes the step of adjusting the ratio of the currents of each coil and the step of adjusting the phase angle of the currents of each coil. Note that the current control device equalizes the magnetic induction intensity generated by each coil with the adjusted current by adjusting the ratio or phase angle between the currents transmitted to each coil.

[0066] There are multiple ways to realize the adjustment of the ratio of the currents of each coil.

[0067] In one example, the current control device includes a power supply 21 and a multi-output matching module 13. In this example, in the step of realizing the adjustment of the ratio of the currents of each coil, the power supply 21 outputs a current to the multi-output matching module 13, and the multi-output matching module 13 adjusts the ratio between the currents transmitted to each coil, shunts the current transmitted by the power supply according to the ratio, and outputs it corresponding to each coil. The multi-output matching module 13 is determined according to the actual demand and, for example, there are multiple. When the number of the multi-output matching modules 13 is multiple, the power supply can provide currents with the same ratio to each multi-output matching module 13, or can also provide currents with different ratios to each multi-output matching module 13. That is, the power supply can adjust the ratio of the current output to the multi-output matching module 13 connected to it.

[0068] In one example, the current control device includes a power supply and a multi-output matching module 13. In this example, in the step of adjusting the ratio of the currents of each coil, the master power supply 111 controls at least one slave power supply 113 to output power to each multi-output matching module 13, and the current transmitted by each multi-output matching module 13 to each coil satisfies the ratio of the currents. In this example, the power supply includes a master power supply 111 and a slave power supply 113, and the master power supply 111 is connected only to the slave power supply 113. The master power supply 111 is used to control the slave power supply 113. When there are multiple slave power supplies 113, the master power supply 111 can control the ratio of the currents output by each slave power supply 113. The multi-output matching module 13 shunts the current input by the slave power supply 113 and transmits it to each coil connected thereto according to the ratio of the currents.

[0069] In one example, the current control device includes a power supply and a multi-output matching module 13. The power supply includes a master power supply 111 and a slave power supply 113. The multi-output matching module 13 includes a first multi-output matching module 13 connected to the master power supply 111 and a second multi-output matching module 13 connected to the slave power supply 113.

[0070] In the step of adjusting the ratio of the currents of each coil, the master power supply 111 outputs power to the first multi-output matching module 13, and the master power supply controls the slave power supply 113 to output power to the second multi-output matching module 13. The current transmitted to each coil through the first multi-output matching module 13 and the second multi-output matching module 13 satisfies the ratio of the currents. In this example, the master power supply 111 is not only used for control, but is also directly connected to the multi-output matching module 13 to supply power to the multi-output matching module 13.

[0071] When there are multiple power supplies and multi-output matching modules 13, the power supplies are connected to the multi-output matching modules 13 in a one-to-one, one-to-many, or a combination of two ways, and each power supply provides the multi-output matching modules 13 with currents at the same ratio or different ratios.

[0072] Note that the current control device can not only radiate high-frequency power, but also adjust the power parameters of the high-frequency power output to each coil. Specifically, the power parameters of this high-frequency power include the ratio of the current and the phase angle of the current.

[0073] In order to adjust the magnetic induction intensity generated by each coil, in one example, before the step of adjusting at least one of the following power parameters between the high-frequency powers transmitted to each coil, the following steps are further included. The current control device obtains the magnetic induction intensity generated by the current flowing in each coil. In one example, the current control device obtains the magnetic induction intensity generated by each coil with the same ratio of current.

[0074] The current control device adjusts the ratio and the phase angle of the currents transmitted to each coil based on each magnetic induction intensity.

[0075] In one example, the current control method includes the following steps. In step S5, the current control device obtains the magnetic induction intensity generated by each coil of the radio frequency energy radiation unit 25 with the same current.

[0076] Using a magnetic induction intensity detector, the magnetic induction intensity generated by each coil with the same current can be detected. In one example, the magnetic induction intensity generated by each coil with the same current can be detected in advance, and the magnetic induction intensity can be stored in the current control device. When it is necessary to control the radio frequency energy radiation unit 25 to generate radio waves, the current control device calls the stored magnetic induction intensity. Further, the current control device can store the magnetic induction intensities of the coils of a plurality of different radio frequency energy radiation units 25 simultaneously. In another example, the current control device can detect the magnetic induction intensity in real time by the magnetic induction intensity detector, and dynamically adjust the current output to the coil according to the magnetic induction intensity obtained in real time. It should be noted that the current control device is used to transmit current to each coil and adjust the ratio between the currents transmitted to each coil.

[0077] In step S6, the current control device adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity, so as to equalize the magnetic induction intensities generated by each coil with the adjusted current.

[0078] The current control device modulates to a total current of a magnitude corresponding to the sum of each magnetic induction intensity based on the stored magnetic induction intensity of each coil or the magnetic induction intensity obtained in real time, obtains the ratio between the currents output to each coil based on each magnetic induction intensity, and shunts the total current into sub-currents transmitted to each coil according to the ratio, and transmits the sub-currents of corresponding magnitudes to the corresponding coils.

[0079] In one example, as shown in FIG. 10, the current control device includes a power supply and a multi-output matching module 13. It should be noted that the number of output terminals of the multi-output matching module 13 in this example is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching module 13 are connected to the coils in the radio frequency energy radiation unit 25 in a one-to-one correspondence. It should be noted that the multi-output matching module 13 includes at least two output terminals.

[0080] In this example, the step in which the current control device adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity includes the following steps. In step S21, the power supply modulates the current output to the multi-output matching module 13 based on each magnetic induction intensity. The power supply obtains the sum of each magnetic induction intensity, modulates it to a current of a magnitude corresponding to the sum of each magnetic induction intensity, and transmits this current to the multi-output matching module 13.

[0081] In step S23, the multi-output matching module 13 adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity, shunts the current transmitted by the power supply according to this ratio, and outputs it corresponding to each coil. The multi-output matching module 13 processes the ratio between the currents to be output to each coil based on the difference in each magnetic induction intensity, and then shunts the current transmitted by the power supply according to this ratio, and transmits the corresponding shunted current to the corresponding coil. The number of shunts is equal to the number of coils.

[0082] In another example, as shown in FIG. 11, the current control device includes a power supply and at least two multi-output matching modules 13. In this example, the sum of the number of output terminals connected to the radio frequency energy radiation unit 25 of each multi-output matching module 13 is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching module 13 are connected to the coils in the radio frequency energy radiation unit 25 in a one-to-one correspondence.

[0083] In this example, the step in which the current control device adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity includes the following steps.

[0084] In step S31, the power supply adjusts the ratio between the currents output to each multi-output matching module 13 based on each magnetic induction intensity (the first current shunt in FIGS. 12 and 13). The power supply obtains the sum of each magnetic induction intensity and modulates it to a total current with a magnitude corresponding to the sum of each magnetic induction intensity. The power supply separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13, obtains the ratio between the currents output to each multi-output matching module 13 based on the sum of the magnetic induction intensities corresponding to each multi-output matching module 13, shunts the total current based on the ratio, and transmits the shunted current to the corresponding multi-output matching module 13. The number of currents to be shunted is equal to the number of multi-output matching modules 13.

[0085] In step S33, each multi-output matching module 13 adjusts the ratio between the currents transmitted to each coil connected to the multi-output matching module 13 based on the magnetic induction intensity of the coil connected to the multi-output matching module 13 (the second current shunt in FIGS. 12 and 13), shunts the current transmitted by the power supply according to the ratio, and outputs it corresponding to the coil connected to the multi-output matching module 13. Each multi-output matching module 13 obtains the ratio between the currents output to each coil connected to it based on the magnetic induction intensity of each coil connected to it, shunts the correspondingly input current at the ratio, and outputs the shunted current to the corresponding coil. Note that the first current shunt in step S31 and the second current shunt in step S33 may be used independently or in combination.

[0086] In yet another example, as shown in FIG. 14, the current control device includes a master power supply 111, at least one slave power supply 113, and at least one multi-output matching module 13. The master power supply 111 is connected to each slave power supply 113, and each slave power supply 113 is connected to a corresponding multi-output matching module 13. In this example, the master power supply 111 is used to control the slave power supply 113, and the slave power supply 113 directly transmits current to the multi-output matching module 13. The number of slave power supplies 113 can be determined according to the actual demand and the multi-output matching module 13. In one example, the slave power supply 113 may be connected to one multi-output matching module 13 or may be connected to two or more multi-output matching modules 13. The number of multi-output matching modules 13 connected to the slave power supply 113 may be equal or may not be equal.

[0087] In this example, in the step of the power supply adjusting the ratio between the currents output to each multi-output matching module 13 based on each magnetic induction intensity, the master power supply 111 controls each slave power supply 113 to adjust the ratio between the currents output to each multi-output matching module 13 based on each magnetic induction intensity (shown in FIG. 13). Note that the master power supply 111 obtains the sum of each magnetic induction intensity and modulates it to a total current with a magnitude corresponding to the sum of each magnetic induction intensity. The power supply separately obtains the sum of the magnetic induction intensities of the coils connected to each slave power supply 113, obtains the ratio between the currents output to each slave power supply 113 based on the sum of the magnetic induction intensities corresponding to each slave power supply 113, shunts the total current based on this ratio, and transmits the shunted current to the corresponding slave power supply 113. The number of shunted currents is equal to the number of slave power supplies 113. In one example, the slave power supply 113 is connected to at least two multi-output matching modules 13, separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13 connected to the slave power supply 113, obtains the ratio between the currents output to each multi-output matching module 13 connected to the slave power supply 113 based on the sum of the magnetic induction intensities corresponding to each multi-output matching module 13, shunts the current of the slave power supply 113 transmitted to the master power supply 113 based on this ratio, and transmits the shunted current to the corresponding multi-output matching module 13. The number of shunted currents is equal to the number of multi-output matching modules 13 connected to the slave power supply 113.

[0088] Note that equalizing the magnetic induction intensity generated by each coil with the adjusted current means controlling the magnetic induction intensity generated by each coil to be approximately equal, exactly equal, or within a certain range.

[0089] In one embodiment, the current control device includes a phase shift control power supply and a multi-output matching module 13. In the step of adjusting the phase angle of the current of each coil, the phase angle of the current output to the multi-output matching module 13 is modulated by a phase shift control power supply. In this example, the number of the multi-output matching modules 13 is single and has two or more input terminals, and each input terminal corresponds to the output terminal of a different multi-output matching module 13, and the two input terminals obtain currents with the same or different phase angles from the power supply. In one example, the phase shift control power supply includes a master power supply 111 and at least one slave power supply 113. The master power supply 111 and the slave power supply 113 are respectively connected to the input terminal of the multi-output matching module 13 and supply current, and the master power supply 111 controls the phase angle at which each slave power supply 113 outputs current. In another example, the phase shift control power supply includes a controller and at least one slave power supply 113. At least one slave power supply 113 is respectively connected to the input terminal of the multi-output matching module 13 and supplies current, and the controller adjusts the phase angle at which at least one slave power supply 113 outputs current. In yet another example, the phase shift control power supply includes a controller and a plurality of slave power supplies 113. The plurality of slave power supplies 113 are respectively connected to the multi-output matching module 13, and the controller controls the plurality of power supplies to provide currents with the same or different phase angles. The number of the multi-output matching modules 13 is plural, and obtains currents with the same or different phase angles from the power supply. It should be noted that the currents with the same or different phase angles are the same or provided by different power supplies.

[0090] There are multiple ways to adjust the phase angle of the current of each coil.

[0091] In one example, the power supply includes a master power supply 111 and a slave power supply 113, and the master power supply 111 is used to control the slave power supply 113 to adjust the phase angle of the current. In the step of adjusting the phase angle of the current of each coil, the master power supply 111 controls the phase angle of the current output by at least one slave power supply 113 to each multi-output matching module 13.

[0092] In one example, the power supply includes a master power supply 111 and a slave power supply 113. The master power supply 111 is not only used to control the slave power supply 113 to adjust the phase angle of the current, but also directly connected to the multi-output matching module 13 to input currents with different phase angles (shown in FIG. 15). In this example, the multi-output matching module 13 includes a first multi-output matching module 13 connected to the master power supply 111 and a second multi-output matching module 13 connected to the slave power supply 113. In the step of adjusting the phase angle of the current of each coil, the master power supply 111 outputs a first current to the first multi-output matching module 13, and controls the slave power supply 113 to output a second current to the second multi-output matching module 13 by the master power supply. The phase angles of the second current and the first current are the same or different.

[0093] In one example, one control device can be connected to the power supply, and the control device can control the power supply to adjust the phase angle of the current output to each multi-output matching module 13. In one embodiment, as shown in FIG. 16, a current control method for the radio frequency energy radiation unit 25 is provided, and the current control method includes the following steps: In step S51, the current control device obtains the magnetic induction intensity generated by each coil of the radio frequency energy radiation unit 25 with the same current. Note that step S51 is the same as step S1 of the foregoing embodiment and will not be described further here.

[0094] In step S53, the current control device adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity, and adjusts the phase angle of the current transmitted to each coil, so as to equalize the magnetic induction intensity generated by each coil with the adjusted current.

[0095] During one cycle of alternating current, the current value changes with the change of the phase angle, and thereby the magnetic induction intensity generated by the coil changes with the change of time. In the present application, the current transmitted to each coil is determined by dividing a total current according to a ratio. The waveforms of the currents transmitted to each coil are the same. If the phase angle difference of the currents transmitted to each coil is changed, the current values corresponding to different phase angles may not be equal. Therefore, the magnetic induction intensity instantaneously generated by each coil can be adjusted. For example, at a certain moment, the magnetic induction intensity generated by a certain coil is greater than that of other coils. In order to reduce the subsequent current, based on the waveform characteristics of the current, the phase angle can be adjusted forward or backward. Also, for example, at a certain moment, the magnetic induction intensity generated by a certain coil is smaller than that of other coils. In order to increase the subsequent current, based on the waveform characteristics of the current, the phase angle can be adjusted forward or backward.

[0096] In this embodiment, by combining the control of the current ratio and the control of the current phase angle, the control for further equalizing the magnetic induction intensity of the coils is strengthened. For example, the control of the current ratio is mainly used and the control of the current phase angle is adjusted as an auxiliary. Specifically, the current control device adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity, and adjusts the phase angle of the current transmitted to each said coil based on each magnetic induction intensity and the ratio. It is also possible to mainly control the phase angle of the current and adjust the control of the current ratio as an auxiliary. Specifically, the current control device adjusts the phase angle of the current transmitted to each said coil based on each magnetic induction intensity, and adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity and the phase angle. Of course, the control of the current ratio and the control of the current phase angle may be at the same level. Specifically, the current control device simultaneously adjusts the phase angle of the current transmitted to each coil and the ratio between the currents transmitted to each coil based on each magnetic induction intensity.

[0097] In one example, the current control device includes a phase shift control power supply and one multi-output matching module 13. In this example, the number of output terminals of the multi-output matching module 13 is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching module 13 are connected to the coils in the radio frequency energy radiation unit 25 in a one-to-one correspondence. Note that the multi-output matching module 13 includes at least two output terminals. The phase shift control power supply can modulate the current and adjust the phase angle of the current.

[0098] In this example, in the step of the current control device adjusting the phase angle of the current transmitted to each coil based on each magnetic induction intensity, the phase shift control power supply modulates the phase angle of the current output to the multi-output matching module 13 based on each magnetic induction intensity. The phase shift control power supply adjusts the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13 initially by adjusting the phase angle of the current of each multi-output matching module 13 based on each magnetic induction intensity.

[0099] In this example, the step of the current control device adjusting the ratio between the currents transmitted to each coil based on each magnetic induction intensity includes the step of the phase shift control power supply modulating the current output to the multi-output matching module 13 based on each magnetic induction intensity, and the step of the multi-output matching module 13 adjusting the ratio between the currents transmitted to each coil based on each magnetic induction intensity, shunting the current transmitted by the phase shift control power supply according to the ratio, and outputting the corresponding shunted current to the corresponding coil.

[0100] The phase shift control power supply obtains the sum of each magnetic induction intensity, modulates it to a current with a magnitude corresponding to the sum of each magnetic induction intensity, and transmits the current to the multi-output matching module 13. The multi-output matching module 13 processes the ratio between the currents to be output to each coil based on the difference in each magnetic induction intensity, and then shunts the current transmitted by the phase shift control power supply according to the ratio, and transmits the corresponding shunted current to the corresponding coil. The number of shunts is equal to the number of coils.

[0101] In another example, the current control device includes a phase shift control power supply and at least two multi-output matching modules 13. In this example, the sum of the number of output terminals connected to the radio frequency energy radiation unit 25 of each multi-output matching module 13 is equal to the number of coils in the radio frequency energy radiation unit 25, and the output terminals of the multi-output matching module 13 are connected to the coils in the radio frequency energy radiation unit 25 in a one-to-one correspondence. The phase shift control power supply can modulate the current and adjust the phase angle of the current.

[0102] In this example, in the step of the current control device adjusting the phase angle of the current transmitted to each coil based on each magnetic induction intensity, the phase shift control power supply modulates the phase angle of the current output to each multi-output matching module 13 based on each magnetic induction intensity. Note that the phase shift control power supply separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13, and adjusts the phase angle of the current transmitted to each multi-output matching module 13 based on the difference between the sums of the magnetic induction intensities corresponding to each multi-output matching module 13.

[0103] In this example, in the step of the current control device adjusting the ratio between the currents transmitted to each coil based on each magnetic induction intensity, the phase shift control power supply adjusts the ratio between the currents output to each multi-output matching module 13 based on each magnetic induction intensity. The multi-output matching module 13 adjusts the ratio between the currents transmitted to each coil connected to the multi-output matching module 13 based on the magnetic induction intensity of the coils connected to the multi-output matching module 13, shunts the current transmitted by the phase shift control power supply according to the ratio, and outputs corresponding to the coils connected to the multi-output matching module 13.

[0104] The phase shift control power supply obtains the sum of each magnetic induction intensity and modulates it into a total current with a magnitude corresponding to the sum of each magnetic induction intensity. The phase shift control power supply separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13, and based on the sum of the magnetic induction intensities corresponding to each multi-output matching module 13, obtains the ratio between the currents output to each multi-output matching module 13, shunts the total current based on this ratio, and transmits the shunted current to the corresponding multi-output matching module 13. The number of shunted currents is equal to the number of multi-output matching modules 13. Each multi-output matching module 13 obtains the ratio between the currents output to each coil connected thereto based on the magnetic induction intensity of each coil connected thereto, shunts the correspondingly input current at this ratio, and outputs the shunted current to the corresponding coil.

[0105] In yet another example, the current control device includes a phase shift control power supply, at least one slave power supply 113, and at least one multi-output matching module 13. The phase shift control power supply is connected to each slave power supply 113, and each slave power supply 113 is connected to the corresponding multi-output matching module 13. In this example, it includes two types of power supplies. One is the master power supply 111 that can control the slave power supply 113, modulate the current, and shunt the current. The other is the slave power supply 113 that can adjust the phase angle of the current and shunt the current. The slave power supply 113 is determined according to the actual demand and the number of multi-output matching modules 13. In one example, the slave power supply 113 may be connected to one multi-output matching module 13 or may be connected to two or more multi-output matching modules 13. The number of multi-output matching modules 13 connected to the slave power supply 113 may be equal or may not be equal.

[0106] In this example, in the step where the current control device adjusts the phase angle of the current transmitted to each coil based on each magnetic induction intensity, the master power supply 111 controls each slave power supply 113 so as to adjust the phase angle of the current transmitted to the corresponding multi-output matching module 13 based on each magnetic induction intensity. Note that the phase shift control power supply separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13, and controls the slave power supply 113 so as to adjust the phase angle of the current transmitted to each multi-output matching module 13 based on the difference between the sums of the magnetic induction intensities corresponding to each multi-output matching module 13.

[0107] In this example, in the step where the current control device adjusts the ratio between the currents output to each multi-output matching module 13 based on each magnetic induction intensity, the master power supply 111 controls each slave power supply 113 so as to adjust the ratio between the currents output to each multi-output matching module 13 based on each magnetic induction intensity. The master power supply 111 obtains the sum of each magnetic induction intensity and modulates it to the total current with a magnitude corresponding to the sum of each magnetic induction intensity. The power supply separately obtains the sum of the magnetic induction intensities of the coils connected to each slave power supply 113, obtains the ratio between the currents output to each slave power supply 113 based on the sum of the magnetic induction intensities corresponding to each slave power supply 113, shunts the total current based on this ratio, and transmits the shunted current to the corresponding slave power supply 113. The number of shunts is equal to the number of slave power supplies 113. In one example, the slave power supply 113 is connected to at least two multi-output matching modules 13, separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13 connected to the slave power supply 113, obtains the ratio between the currents output to each multi-output matching module 13 connected to the slave power supply 113 based on the sum of the magnetic induction intensities corresponding to each multi-output matching module 13, shunts the current of the slave power supply 113 transmitted to the master power supply 113 based on this ratio, and transmits the shunted current to the corresponding multi-output matching module 13. The number of shunts is equal to the number of multi-output matching modules 13 connected to the slave power supply 113.

[0108] In order to enable the multi-output matching module 13 to adjust the ratio between output currents, in one example, the multi-output matching module 13 includes a variable capacitor. The variable capacitor is a capacitor whose capacitance can be changed under control.

[0109] In the step of the multi-output matching module 13 adjusting the ratio between each current, the multi-output matching module 13 adjusts the ratio between each output current by changing the capacitance value of the variable capacitor.

[0110] In order to ensure that the rear end of the circuit receives a sufficiently large current, in one example, as shown in FIG. 17, the current control device further includes a power amplification module 15. The power amplification module 15 is used to perform an amplification process on the current.

[0111] In the step of the phase shift control power supply 21 adjusting the current output to the multi-output matching module 13 based on each magnetic induction intensity, the phase shift control power supply 21 adjusts the current output to the power amplification module 15 based on each magnetic induction intensity, and the power amplification module 15 adjusts the current transmitted by the phase shift control power supply 21 and transmits it to the multi-output matching module 13.

[0112] To more specifically understand the principle of the current control method of the present application, hereinafter, the current control system shown in FIG. 18 will be taken as an example for description.

[0113] The first output terminal of the phase shift control power supply 21 is connected to the power amplification module 1, and the second output terminal is connected to the power amplification module 2. The phase shift control power supply 21 is based on the sum of the magnetic induction intensities of coil 1 and coil 2 connected to the dual-output matching module 1 and the sum of the magnetic induction intensities of coil 1 and coil 2 connected to the dual-output matching module 2. The current I at the first output terminal of the phase shift control power supply 21 ps1 and the current I at the second output terminal ps2 and the current ratio I ps1 / I ps2Adjust it, and based on the current ratio, shunt and output the total current output by the phase shift control power supply 21, and output it to the power amplification module 1 and the power amplification module 2 respectively.

[0114] The power amplification module 1 amplifies the current I ps1 and outputs the current I1. Its output terminal is connected to the input terminal of the dual-output matching module 1. The power amplification module 2 amplifies the current I ps2 and outputs the current I2. Its output terminal is connected to the input terminal of the dual-output matching module 2.

[0115] The dual-output matching module 1 shunts the current I1 output by the power amplification module 1 based on the magnetic induction intensity of coil 1 and the magnetic induction intensity of coil 2. The first output terminal of the power amplification module 1 is connected to coil 1, and the second output terminal is connected to coil 2. The current flowing into coil 1 is I u1 and the current flowing into coil 2 is I u2 Let them be I1 = I u1 + I u2 and that's it. The dual-output matching module 2 shunts the current I2 output by the power amplification module 2 based on the magnetic induction intensity of coil 3 and the magnetic induction intensity of coil 4. The first output terminal of the power amplification module 2 is connected to coil 3, and the second output terminal is connected to coil 4. The current flowing into coil 1 is I d1 and the current flowing into coil 2 is I d2 Let them be I2 = I d1 + I d2 and that's it.

[0116] The above dual-output matching module 1 includes four capacitors C u0 C u1 C u2 and C u3 where C u1 C u2 C u3 are variable capacitors, and the variable capacitors C u1 C u2 C u3By adjusting, the current I at the first output terminal of the dual-output matching module 1 u1 and the current I at the second output terminal of the dual-output matching module 1 u2 and the current ratio I u1 / I u2 can be adjusted.

[0117] The above dual-output matching module 2 includes four capacitors C d0 , C d1 , C d2 and C d3 , where C d1 , C d2 , C d3 are variable capacitors. By adjusting the variable capacitors C d1 , C d2 , C d3 the current ratio I d1 between the current I at the first output terminal of the dual-output matching module 2 d2 and the current I at the second output terminal of the dual-output matching module 2 d1 / I d2 can be adjusted.

[0118] The above coil module includes coil 1, coil 2, coil 3 and coil 4. Coil 1 is connected to the first output terminal of the dual-output matching module 1, and the current flowing through coil 1 is I u1 , coil 2 is connected to the second output terminal of the dual-output matching module 1, and the current flowing through coil 2 is I u2 , coil 3 is connected to the first output terminal of the dual-output matching module 2, and the current flowing through coil 3 is I d1 , coil 4 is connected to the second output terminal of the dual-output matching module 2, and the current flowing through coil 4 is I u2 .

[0119] As shown in FIG. 19, it is an equivalent circuit of the current control system shown in FIG. 18, and the ratio between currents is adjusted based on the following formula.

[0120] In an unfavorable state,

Equation

[0121] In a preferred state, L1 = L2 = L, C1 = C2 = C,

Number

[0122] The magnetic field generated by coil i is

Number

[0123] In the current control method of the radio frequency energy radiation unit 25 of the present application, after the current control device obtains the magnetic induction intensity generated by each coil of the radio frequency energy radiation unit 25 with the same current, the current control device adjusts the ratio between the currents transmitted to each coil based on each magnetic induction intensity, outputs each of the adjusted currents corresponding to each coil, and equalizes the magnetic induction intensity generated by each coil with the adjusted current. In an unfavorable state, there are performance differences in each coil due to the manufacturing process, and the magnetic induction intensity generated by each coil with the same current is different. In the current control method of the present application, by collecting the magnetic induction intensity generated by each coil with the same current, the current control device adjusts the ratio between the currents output to each coil based on the difference in each magnetic induction intensity, and adjusts the current so as to equalize the magnetic induction intensity generated by each coil, and further improves the output accuracy of the structure of the multi-coil radio frequency energy radiation unit 25.

[0124] In one embodiment, as shown in FIGS. 10-15, an energy radiation system including a radio frequency energy radiation unit 25 and a current control device is provided. The radio frequency energy radiation unit 25 includes at least two coils, for example, two, three, four... N coils. The current control device is connected to each coil respectively. The current control device is used to obtain the magnetic induction intensity generated by each coil of the radio frequency energy radiation unit 25 with the same current, and based on each magnetic induction intensity, by adjusting the ratio between the currents transmitted to each coil, to equalize the magnetic induction intensity generated by each coil with the adjusted current. In one example, the current control device is further used to adjust the phase angle of the current transmitted to each coil based on each magnetic induction intensity. In another example, the current control device is further used to adjust the ratio between the currents transmitted to each coil based on each magnetic induction intensity and adjust the phase angle of the current transmitted to each coil, so as to equalize the magnetic induction intensity generated by each coil with the adjusted current. It should be noted that the current control device in this embodiment is the same as the current control device in the current control method of the present application. For details, refer to each embodiment of the current control method of the present application, and no further description will be given here.

[0125] Based on the number of output ports of the multi-output integration module 13, it is divided into the following two cases. In the first case, as shown in FIG. 10, the current control device includes a phase shift control power supply 21 and one multi-output integration module 13. The phase shift control power supply 21 is connected to the multi-output integration module 13, and the multi-output integration module 13 is connected to each coil respectively. Note that the number of output ends of the multi-output integration module 13 is exactly the same as the number of each coil. In the second case, as shown in FIG. 11, the current control device includes a phase shift control power supply 21 and at least two multi-output integration modules 13. The phase shift control power supply 21 is connected to each multi-output integration module 13 respectively, and each multi-output integration module 13 is connected to the corresponding number of coils respectively. Note that each multi-output integration module 13 includes at least two output ends, and the sum of the output ends of each multi-output integration module 13 is equal to the number of coils. In one example, the multi-output integration module 13 is a dual-output integration module, that is, it includes two output ends.

[0126] In one example, as shown in FIG. 8, the dual-output integration module includes a capacitor C0, a variable capacitor C1, a variable capacitor C2, and a variable capacitor C3. One end of the capacitor C0 is connected to one end of the variable capacitor C1, and the other end is connected to one end of the variable capacitor C2. One end of the variable capacitor C3 is connected to the other end of the variable capacitor C1, and the other end of the variable capacitor C3 is connected to the other end of the variable capacitor C2. By adjusting the capacitance values of the variable capacitor C1, the variable capacitor C2, and the variable capacitor C3, the ratio of the currents output by the two output ends of the dual-output integration module can be changed. As shown in FIG. 11, according to this ratio, the current I is divided into I1 and I2.

[0127] In order to ensure that the rear end of the circuit receives a sufficiently large current, as shown in FIG. 12, the current control device further includes a power amplification module 15, and the phase shift control power supply 21 is connected to the multi-output integration module 13 through the power amplification module 15.

[0128] To further understand the structure of the energy radiation system of the present application, as shown in FIG. 13, a specific embodiment will be provided for description.

[0129] The energy radiation system includes a phase shift control power supply 21, a radio frequency energy radiation unit 25, a power amplification module 1, a power amplification module 2, a dual output matching module 1, and a dual output matching module 2. The radio frequency energy radiation unit 25 includes a coil 1, a coil 2, a coil 3, and a coil 4. The phase shift control power supply 21 is connected to the power amplification module 1 and the power amplification module 2 respectively. The power amplification module 1 is connected to the coil 1 and the coil 2 respectively. The power amplification module 2 is connected to the coil 3 and the coil 4 respectively.

[0130] The phase shift control power supply 21 adjusts the current ratio between the current output to the power amplification module 1 and the current output to the power amplification module 2 based on the sum of the magnetic induction intensities of the coil 1 and the coil 2 and the sum of the magnetic induction intensities of the coil 3 and the coil 4. The dual output matching module 1 adjusts the current ratio between the current output to the coil 1 and the current output to the coil 2 based on the magnetic induction intensities of the coil 1 and the coil 2. The dual output matching module 2 adjusts the current ratio between the current output to the coil 3 and the current output to the coil 4 based on the magnetic induction intensities of the coil 3 and the coil 4.

[0131] In the energy radiation system of the present application, by adjusting the current, the magnetic induction intensity generated by each coil is adjusted to improve the output accuracy and stability of the radio frequency power supply. To achieve this function, the cooperative adjustment of the multi-output matching module 13 and the phase shift control power supply 21 is required, and the principle is as follows. By adjusting the adjustable capacitance C in the multi-output matching module 13, the multiple current outputs of the multi-output matching module 13 are changed, so that the magnetic induction intensities generated by the coils connected to the dual-output matching module are the same. The phase shift control power supply 21 adjusts the ratio of the two currents at its output end, and further adjusts the ratio of the currents at the input ends of the dual-output matching module, so that the magnetic induction intensities of the coils connected to different dual-output matching modules can be the same.

[0132] For the sake of brevity of description, the technical features of the above-described embodiments can be arbitrarily combined, and not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope described in this specification.

[0133] The above-described embodiments only represent some embodiments of the present application, and the description is more specific and detailed. Therefore, it cannot be understood as a limitation of the scope of the patent application. It should be pointed out that those skilled in the art can make some modifications and improvements without departing from the spirit of the present application, and these belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A method for controlling the current of a plasma source mechanism used in a radio frequency energy radiation unit of a plasma source mechanism, comprising: providing, by a current control device, high-frequency power to each coil of the radio frequency energy radiation unit; and adjusting, by the current control device, at least one of the following power parameters between the high-frequency powers transmitted to each coil, the step including adjusting the ratio of the currents of each coil and adjusting the phase angle of the current of each coil. A method for controlling the current of a plasma source mechanism, characterized by the above.

2. Before the step of adjusting at least one of the following power parameters between the high-frequency powers transmitted to each coil, acquiring, by the current control device, the magnetic induction intensity generated by the current flowing in each coil; and further comprising adjusting, by the current control device, based on each magnetic induction intensity, the ratio and the phase angle of the currents transmitted to each coil. The method for controlling the current of a plasma source mechanism according to claim 1, characterized by the above.

3. The current control device acquires the magnetic induction intensity generated by each coil with the same ratio of current. The method for controlling the current of a plasma source mechanism according to claim 2, characterized by the above.

4. The current control device adjusts the ratio of the currents transmitted to each coil to equalize the magnetic induction intensities generated by each coil with the adjusted currents. The method for controlling the current of a plasma source mechanism according to claim 1, characterized by the above.

5. The current control device includes a power supply and a multi-output matching module. In the step of adjusting the ratio of the currents of each coil, the power supply outputs current to the multi-output matching module, and the multi-output matching module adjusts the ratio of the currents transmitted to each coil, shunts the current transmitted by the power supply according to the ratio, and outputs corresponding to each coil. The method for controlling the current of a plasma source mechanism according to claim 1, characterized by the above.

6. The current control device includes a power supply and a multi-output matching module. In the step of adjusting the ratio of the currents of each coil, Control at least one slave power supply so that power is output from the master power supply to each of the multi-output matching modules, and the current transmitted by each of the multi-output matching modules to each of the coils satisfies the ratio of the currents. The method for controlling the current of the plasma source mechanism according to claim 1, characterized in that.

7. In the step of adjusting the ratio of the currents of the respective coils, Output power from the master power supply to the first multi-output matching module, Control the slave power supply so that the master power supply outputs power to the second multi-output matching module, The current transmitted to each of the coils via the first multi-output matching module and the second multi-output matching module satisfies the ratio of the currents. The method for controlling the current of the plasma source mechanism according to claim 1, characterized in that.

8. The current control device includes a master power supply, at least one slave power supply, and at least one multi-output matching module, The master power supply is connected to each of the slave power supplies, and each of the slave power supplies is connected to the corresponding multi-output matching module, In the step of adjusting the ratio of the currents of the respective coils, The master power supply controls each of the slave power supplies so as to adjust the ratio between the currents output to each of the multi-output matching modules. The method for controlling the current of the plasma source mechanism according to claim 1, characterized in that.

9. The current control device includes a phase shift control power supply and a multi-output matching module, In the step of adjusting the phase angle of the current of each of the coils, The phase shift control power supply modulates the phase angle of the current output to the multi-output matching module. The method for controlling the current of the plasma source mechanism according to claim 1, characterized in that.

10. The current control device includes a power supply and a multi-output matching module, In the step of adjusting the phase angle of the current of each of the coils, The master power supply controls the phase angle of the current output by at least one slave power supply to each of the multi-output matching modules. The method for controlling the current of the plasma source mechanism according to claim 1, characterized in that.

11. In the step of adjusting the phase angle of the current of each of the coils, Output a first current from the master power supply to the first multi-output matching module, The slave power supply is controlled by the master power supply to output a second current to the second multi-output matching module, and the phase angles of the second current and the first current are the same or different. The method for controlling the current of the plasma source mechanism according to claim 1, characterized in that.

12. The multi-output matching module includes a variable capacitance, In the step of the multi-output matching module adjusting the ratio between the currents, The multi-output matching module adjusts the ratio between the output currents by changing the capacitance value of the variable capacitance. The method for controlling the current of the plasma source mechanism according to any one of claims 1 to 11, characterized in that.

13. An energy radiation system including a radio frequency energy radiation unit and a current control device, The radio frequency energy radiation unit includes at least two coils, and each of the current control devices is connected to each of the coils, The current control device is used to implement the method for controlling the current of the plasma source mechanism according to any one of claims 1 to 12. The energy radiation system, characterized in that.

14. The current control device is further used to adjust the phase angle of the current transmitted to each of the coils based on each of the magnetic induction intensities. The energy radiation system according to claim 13, characterized in that.

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