Positioning partition plate and planar array type micro-needle structure

Abstract

The present application provides a positioning partition plate and a planar array type micro-needle structure. The positioning partition plate includes at least two comb-shaped structural members, and the comb-shaped structural members are arranged in a stacked manner to form a plurality of micro-needle holes for the bioelectrodes of the micro-needles to pass through. This positioning partition plate plays a role in positioning, guiding, and fixing during the implantation of the planar array type micro-needles, can realize the accurate implantation of the micro-needles, can be withdrawn after the micro-needles are completely implanted, and does not cause damage to the organs and tissues of the human body.

Description

Technical Field

[0001] This application belongs to the technical field of neural microelectrodes for brain - machine interfaces, and particularly relates to a positioning partition plate and a planar array - type micro - needle structure.

Background Art

[0002] In a nerve interface, brain signals are collected via electrodes. Among them, the electrodes include forms such as invasive and non - invasive types. The brain signals collected by invasive electrodes are more accurate and more reliable. However, during the specific use of the conventional invasive micro - needle structure, the operation of installing the invasive micro - needle is difficult. Due to operation limitations, it is impossible to accurately realize the accurate installation of the micro - needle and avoid the displacement phenomenon of the target tissue.

[0003] Moreover, many of the conventional invasive micro - needle structures are single - type electrodes. For example, the Michigan electrode and Utah electrode with a hard - needle structure, and the polyimide electrode with a soft - needle structure. However, a hard needle (rigid needle) cannot perform adaptive deformation along with the expansion and contraction of blood vessels during implantation, which may cause certain damage to tissues. On the other hand, the soft - needle structure is prone to deformation during implantation and requires the use of external devices to assist implantation, and there are problems such as complex structure and low efficiency. At present, the functions of hard needles or soft needles are relatively single, that is, they only have a recording function and do not have a stimulating effect. More importantly, the amplitude of the brain's electrical signals is small, the frequency range is low, and it is easily affected by noise interference, and the extraction of brain electrical signals by conventional technologies is not accurate either.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The object of this application is to provide a positioning partition plate and a planar array - type micro - needle structure that can solve at least some of the drawbacks existing in the prior art.

Means for Solving the Problem

[0005] In order to achieve the above object, the present invention adopts the following technical solutions.

[0006] The positioning partition plate includes at least two comb-shaped structural members, and the comb-shaped structural members are stacked on each other and form a plurality of micro-needle holes for the bioelectrodes of the micro-needles to pass through.

[0007] Furthermore, the comb-shaped structural member includes a connecting plate and a plurality of comb teeth formed on the connecting plate. Each of the comb teeth is connected to the connecting plate at equal intervals side by side. The comb teeth of the comb-shaped structural member are stacked on each other and form a plurality of micro-needle holes arranged in an array.

[0008] Furthermore, the interval between the comb teeth of the comb-shaped structural member is slightly larger than the width or the thickness of the bioelectrode of the micro-needle.

[0009] The present application further provides a planar array type micro-needle structure, which includes the above-mentioned positioning partition plate and at least one micro-needle assembly. The micro-needle assembly includes a micro-needle body, an integrated circuit chip, and a micro-strip line. The integrated circuit chip is provided on the substrate of the micro-needle body. One end of the micro-strip line and the integrated circuit chip are fixed and electrically connected, and the bioelectrode of each micro-needle body passes through the micro-needle hole of the positioning partition plate.

[0010] Furthermore, the micro-needle body includes a hard needle and a soft needle. The hard needle has a hard needle substrate and at least one hard-needle bioelectrode formed on the hard needle substrate. The soft needle has a soft needle substrate and at least one soft-needle bioelectrode formed on the soft needle substrate. The soft-needle bioelectrode and the hard-needle bioelectrode are correspondingly fixed via a first fixing member. The soft needle substrate and the hard needle substrate are fixed via a second fixing member. The integrated circuit chip and the soft needle substrate are electrically connected by a flip-chip method.

[0011] Furthermore, the first fixing member is a plurality of hook structures arranged at intervals in the length direction of the hard-needle bioelectrode. The hook structure has a first portion and a second portion. The two ends of the second portion are respectively connected to the first portion and the surface of the hard-needle bioelectrode. The first portion is parallel to the surface of the hard-needle bioelectrode. The soft-needle bioelectrode is located between the first portion and the surface of the hard-needle bioelectrode. The second portion and the surface of the hard-needle bioelectrode form a preset angle.

[0012] Furthermore, an opening for the hook structure to pass through is provided at a position corresponding to the hook structure on the soft-needle bioelectrode. A hook detachment structure for the hook structure to detach from the soft needle is provided in the opening. The hook detachment structure is a hook detachment portion extending from the edge of the opening into the opening. The interval between the hook detachment portions is smaller than the width of the hook structure. The hook detachment portions are symmetrically arranged with respect to the axis of the opening. There is a gap between the side edge of the hook detachment portion and the corresponding side edge of the opening.

[0013] Furthermore, the second fixing member is a plurality of pin structures arranged on the hard needle base at intervals in the width direction of the hard needle. The pin structure is composed of a large-diameter upper cylinder and a small-diameter lower cylinder on the same axis. A pin hole is formed in the soft needle base at a position corresponding to the pin structure. A plurality of centrosymmetric patterns are provided on the soft needle base on the outside along the edge of the pin hole. The diameter of the upper cylinder of the pin structure is larger than the diameter of the pin hole.

[0014] Furthermore, connection vias are provided at both ends of the integrated circuit chip, and a plurality of the integrated circuit chips are assembled integrally by a restraint structure that penetrates the connection vias located on the same side.

[0015] Furthermore, the microstrip line includes a bus line and a plurality of branch lines connected to the bus line. One end of each branch line and one end of each integrated circuit chip are fixedly corresponded by a flip-chip method.

[0016] Compared with the prior art, the beneficial effects of the present application are as follows.

[0017] (1) The positioning partition plate provided by the present application plays a role of positioning, guiding and fixing during the implantation of the planar array type micro needle, can realize the accurate implantation of the micro needle, can be withdrawn after the micro needle is completely implanted, and will not damage the human organs and tissues.

[0018] (2) The planar array type micro needle structure provided by the present application realizes the real-time, rapid and accurate extraction and stimulation of nerve signals by directly flip-chip bonding the micro needle array and the integrated circuit chip, so as to reduce the transmission loss and noise signals to the greatest extent, and can ensure stable signal transmission without loss.

[0019] (3) The planar array type micro-needle structure as provided by the present application designs the micro-needle body in the form of a composite structure of a hard needle and a soft needle, introduces the soft needle into the tissue using the hard needle, and further withdraws the hard needle, thereby avoiding the drawbacks when only the hard needle or the soft needle is adopted.

[0020] (4) The planar array type micro-needle structure as provided by the present application patterns a hook detachment structure on the soft needle bioelectrode of the soft needle, and grows a hook structure at the corresponding position of the hard needle. By using the hook structure, the soft needle can be introduced and implanted. On the other hand, the hard needle and the soft needle can be well fixed to prevent movement between them and reduce the risk of warping of the soft needle.

[0021] (5) The planar array type micro-needle structure as provided by the present application patterns a centrosymmetric pattern on the substrate of the soft needle, and grows a pin structure at the corresponding position of the hard needle, thereby well fixing the hard needle and the soft needle, preventing movement between them, and guaranteeing the stability and accuracy of the implantation of the soft needle.

[0022] Hereinafter, the present application will be described in more detail in connection with the drawings.

Brief Description of the Drawings

[0023]

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Mode for Carrying Out the Invention

[0024] Hereinafter, in combination with the accompanying drawings in the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described. It is obvious that the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the present invention.

[0025] In the description of the present application, the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is the orientation or positional relationship shown based on the drawings, and is only for the convenience of description and simplification of the description of the present application, and it should not be understood as suggesting or implying that the device or element it refers to must have a specific orientation and must be configured or operated in a specific orientation. Therefore, it should not be understood as a limitation to the present application.

[0026] In addition, in the description of this application, unless otherwise clearly specified or limited, it is necessary to explain that the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a removable connection, a contact connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific situation.

[0027] The terms "first" and "second" are only used for the purpose of description, and should not be understood as presenting or implying relative importance, or implicitly specifying the number of technical features presented. Therefore, the features limited by "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise limited, "plural" means two or more.

[0028] Example 1: As shown in Figure 1, this example provides a positioning partition plate, which includes at least two comb-shaped structural members. The comb-shaped structural members are stacked and arranged with each other to form a plurality of micro-needle holes 3 for the bioelectrodes of the micro-needles to pass through. During actual use, the positioning partition plate is used in combination with the micro-needles. The micro-needles include at least one bioelectrode, and the bioelectrode passes through the corresponding micro-needle holes 3 on the positioning partition plate to fix and position the micro-needles.

[0029] In addition, the number of micro-needle holes 3 may be one or a plurality, specifically determined by the number of bioelectrodes included in the micro-needles. The distribution pattern of the micro-needle holes 3 may be an array distribution or a staggered distribution, specifically determined by the distribution pattern of the bioelectrodes included in the micro-needles, and is not specifically limited here.

[0030] Specifically, in this embodiment, the comb-shaped structure member includes a connection plate 1 and a plurality of comb teeth 2 formed on the connection plate 1. Each of the comb teeth 2 is connected to the connection plate 1 in parallel at equal intervals. The comb teeth 2 of the comb-shaped structure member are laminated on each other to form a plurality of micro-needle holes 3 arranged in an array. Further, the interval between the comb teeth 2 of the comb-shaped structure member is slightly larger than the width of the bioelectrode of the micro-needle or the thickness of the body electrode of the micro-needle, so that the bioelectrode of the micro-needle can move up and down without wobbling between the comb teeth. By using the comb tooth structure to fix and position the micro-needles from both the width direction and the thickness direction of the bioelectrode, accurate implantation of the micro-needles is realized. After the micro-needles are completely implanted, the positioning partition plate can be easily extracted without damaging the organs and tissues of the human body.

[0031] Example 2: As shown in FIG. 2, this embodiment provides a planar array type micro-needle structure, which includes the above-mentioned positioning partition plate 8 and at least one micro-needle assembly. The micro-needle assembly includes a micro-needle body 5, an integrated circuit chip 7, and a micro-strip line 4. The integrated circuit chip 7 is provided on the substrate of the micro-needle body 5. One end of the micro-strip line 4 and the integrated circuit chip 7 are fixed and electrically connected. The bioelectrode 9 of each micro-needle body 5 passes through the corresponding micro-needle hole 3 on the positioning partition plate 8. In this embodiment, in the process of implanting this planar array type micro-needle structure into the tissue, the positioning partition plate 8 is used to position and guide the implantation of each bioelectrode 9, so as to realize the accurate implantation of the micro-needles. By designing to integrate the micro-needle body 5 and the integrated circuit chip 7, on-site collection and stimulation of nerve signals are realized, and accordingly, the functionality of the nerve interface is optimized, and the clinical needs can be better met.

[0032] In a preferred embodiment, as shown in FIGS. 3, 4 and 7, the micro-needle body 5 includes a hard needle 10 and a soft needle 11. The hard needle 10 has a hard needle substrate 19 and at least one hard needle bioelectrode 14 formed on the hard needle substrate 19. The soft needle 11 has a soft needle substrate 20 and at least one soft needle bioelectrode 15 formed on the soft needle substrate 20. The soft needle bioelectrode 15 and the hard needle bioelectrode 14 are correspondingly fixed via a first fixing member 13. The soft needle substrate 20 and the hard needle substrate 19 are fixed via a second fixing member 12. Preferably, as shown in FIG. 11, the integrated circuit chip 7 and the soft needle substrate 20 are electrically connected by a flip-chip method. Among them, the hard needle 10 has a certain rigidity and can be implanted into the soft tissue of a human body or an animal. For example, the hard needle 10 can be made of a silicon material. The soft needle 11 has a certain flexibility. For example, the soft needle 11 can be made of materials such as silicon nitride, polysilicon, and silicon carbide. In this embodiment, since the hard needle 10 has a certain rigidity, the soft needle 11 is laid flat on the upper surface of the hard needle 10, and the hard needle 10 and the soft needle 11 are fixed using the first fixing member 13 and the second fixing member 12. In this way, the hard needle 10 can move the soft needle 11 and be implanted into the soft tissue of a human body or an animal together with it, and it can be ensured that no displacement occurs between the hard needle 10 and the soft needle 11. After the soft needle 11 is implanted into the tissue, the hard needle 10 is pulled out, the hard needle 10 and the soft needle 11 are separated, and the soft needle 11 remains in the implanted tissue, effectively avoiding the disadvantages caused by using only the hard needle or the soft needle.

[0033] In a preferred embodiment, as shown in FIGS. 4, 5, and 6, the first fixing member 13 is a plurality of hook structures 16 arranged at intervals in the longitudinal direction of the hard needle bioelectrode 14. The hook structure 16 has a first portion and a second portion. Both ends of the second portion are respectively connected to the first portion and the surface of the hard needle bioelectrode 14. The first portion is parallel to the surface of the hard needle bioelectrode 14. The soft needle bioelectrode 15 is located between the first portion and the surface of the hard needle bioelectrode 14, and the second portion and the surface of the hard needle bioelectrode 14 form a preset angle. Accordingly, an opening 17 for the hook structure 16 to pass through is provided at a position corresponding to the hook structure 16 on the soft needle bioelectrode 15, and a hook detachment structure for the hook structure 16 to detach from the soft needle 11 is provided in the opening 17. Specifically, the first portion, the second portion of the hook structure 16, and the surface of the hard needle bioelectrode 14 form a slot, and the slot faces the tip of the hard needle 10. The hook detachment structure is provided at an end of the opening 17 away from the tip of the soft needle 11. When fabricating the micro needle body in which the hard needle 10 and the soft needle 11 are combined, first, a sacrificial layer with a certain thickness is grown on the surface of the hard needle 10, then the soft needle 11 is grown on the surface of the sacrificial layer, an opening 17 is formed in the soft needle bioelectrode 15 of the soft needle 11, a hook detachment structure is patterned on the soft needle 11, then the second portion of the hook structure 16 is grown at the position of the opening 17, and finally the first portion of the hook structure 16 is grown. Next, the sacrificial layer between the hard needle 10 and the soft needle 11 is released. Thereby, a part of the soft needle bioelectrode 15 at the edge of the opening 17 is pushed into the hook structure 16. When the hard needle 10 is implanted into the tissue, the soft needle 11 is moved and implanted together with the hard needle 10 using this hook structure 16.When reaching the implantation site, pull the hard needle 10 backward. When the hook structure on the hard needle bioelectrode 14 contacts the hook detachment structure at the rear end of the opening 17, the hook detachment structure disengages the hook detachment structure 16 from the soft needle bioelectrode 15, releasing the fixation between the soft needle bioelectrode 15 and the hard needle bioelectrode 14. The hard needle 10 is withdrawn, and the purpose of leaving the soft needle 11 in the tissue is achieved.

[0034] Preferably, as shown in FIG. 6, the hook detachment structure is two hook detachment portions 18 extending from the edge of the opening 17 into the opening 17. The two hook detachment portions 18 are symmetrically arranged with respect to the axis of the opening. There is a gap between the two hook detachment portions 18, and this gap is smaller than the width of the second portion of the hook structure 16. There is a gap between the side edge of the hook detachment portion and the corresponding side edge of the opening so that the hook detachment portion can be warped upward and pressed from both sides. When pulling out the hard needle 10, pull the hard needle 10 backward. When the hook structure 16 contacts this hook detachment portion 18, the hook detachment portion 18 slowly warps upward, so that the hook structure 16 exits downward from the opening 17. Preferably, by making the two hook detachment portions 18 and the soft needle bioelectrode 15 an integrally formed structure, in the process of the two hook detachment portions 18 opening upward, the second portion of the hook structure 16 presses the hook detachment portion 18, causing the hook detachment portion 18 to warp upward in the backward withdrawal direction of the hard needle 10. Thereby, the area of the opening 17 is expanded, and the hook structure 16 detaches from the soft needle 11 from the opening 17. Since the soft needle 11 and the hook detachment portion 18 are made of an elastic material, when the hard needle 10 detaches from the soft needle 11, the warped portion of the hook detachment portion 18 drops and returns to its original shape.

[0035] Preferably, as shown in FIGS. 4 to 6, in order to increase the strength of the hook structure 16, the first part and the second part of the hook structure 16 are integrally formed. In the process of separating the hard needle 10 from the soft needle 11, to facilitate the detachment of the hook structure 16 from the opening 17 and to avoid the first part affecting the hook detachment part 18 in the process of the hook structure 16 pressing the hook detachment part 18, the bottom surface of the second part in this embodiment abuts against the surface of the hard needle bioelectrode 14, the top surface of the second part abuts against the bottom surface of the first part, and the bottom surface of the second part is larger than the top surface of the second part.

[0036] Preferably, in this embodiment, the angle between the second part of the hook structure 16 and the surface of the hard needle bioelectrode 14 is set to an acute angle so that the hard needle 10 can be easily detached from the soft needle 11. That is, in the direction away from the tip of the hard needle 10, it is avoided that the first part exceeds the end of the second part, and it is facilitated for the second part of the hook structure 16 to press the hook detachment part 18 and warp the hook detachment part 18 upward.

[0037] In a preferred embodiment, as shown in FIGS. 7, 8, and 9, the second fixing member 12 is a plurality of pin structures 21 arranged on the hard needle base body 19 at intervals in the width direction of the hard needle 10. The pin structure 21 is composed of a large-diameter upper cylinder and a small-diameter lower cylinder on the same axis. A pin hole 23 is formed in the soft needle base body 20 at a position corresponding to the pin structure 21. A plurality of centrosymmetric patterns 22 are provided on the soft needle base body 20 on the outside along the edge of the pin hole 23. For example, the centrosymmetric pattern 22 in the pattern in this embodiment may be a petal-shaped structure. The diameter of the upper cylinder of the pin structure 21 is larger than the diameter of the pin hole 23. When making the micro-needle body, after growing the soft needle 11 on the hard needle 10, a pin hole 23 is formed in the soft needle base body 20, the centrosymmetric pattern 22 is patterned, and the pin structure 21 is grown at the position of the pin 23. Since the diameter of the upper cylinder of the pin structure 21 is larger than the diameter of the pin hole 23, the upper cylinder presses a part of the soft needle structure at the edge of the pin hole 23 to fix the soft needle 11 and ensure that no displacement occurs between the hard needle 10 and the soft needle 11. After the hard needle 10 moves the soft needle 11 and implants it into the tissue together, by pulling the hard needle 10 downward until the pin structure 21 completely exits, the upper cylinder of the pin structure 21 applies a certain downward force to the soft needle 11, causing the centrosymmetric pattern 22 of the soft needle 11 to bend and deform to a certain extent. Subsequently, by pulling the hard needle 10 backward to withdraw the hook structure 16 on the hard needle 10, the hard needle 10 and the soft needle 11 are completely separated, the hard needle 10 is pulled out, and the soft needle 11 remains in the tissue.

[0038] In this embodiment, the center point of the centrosymmetric pattern 22 coincides with the center point of the pin hole 23.

[0039] According to the improved technical solution, as shown in FIG. 12, connection vias are provided at both ends of the integrated circuit chip 7, and a plurality of the integrated circuit chips are assembled integrally by a restraint structure that penetrates the connection vias located on the same side. The restraint structure may be a steel pin 6, but is not limited thereto. In order to connect and fix a plurality of integrated circuit chips 7 after drilling holes and passing the steel pins 6 through them, compared with the conventional TSV process, such a connection method of the integrated circuit chips in this embodiment can be realized more easily and has high reliability.

[0040] Regarding the connection method between the microstrip line 4 and the plurality of integrated circuit chips 7, in this embodiment, as shown in FIG. 10, the microstrip line 4 includes a bus line 24 and a plurality of branch lines 25 connected to the bus line 24. One end of each branch line 25 and one end of each integrated circuit chip 7 are fixedly connected in a one-to-one correspondence by a flip-chip method. By directly flip-chip bonding the microstrip line 4 to each integrated circuit chip 7, on-site collection and stimulation of nerve signals are realized, and stable and lossless transmission of signals is ensured.

[0041] The above examples are merely illustrative of the present application and do not constitute a limitation on the protection scope of the present application. All designs identical or similar to the present application fall within the protection scope of the present application.

Description of Reference Numerals

[0042] 1 Connection plate 2 Comb teeth 3 Microneedle holes 4 Microstrip line 5 Microneedle body 6 Steel pin 7 Integrated circuit chip 8 Positioning partition plate 9 Bioelectrode 10 Hard needle 11 Soft needle 12 Second fixing member 13 First fixing member 14 Hard needle biological electrode 15 Soft needle biological electrode 16 Hook structure 17 Opening 18 Hook detachment part 19 Hard needle substrate 20 Soft needle substrate 21 Pin structure 22 Centrosymmetric pattern 23 Pin hole 24 Bus line 25 Branch line

Claims

1. Comprising at least two comb-shaped structural members, wherein the comb-shaped structural members are stacked and arranged with respect to each other, and form a plurality of micro-needle holes through which the bioelectrodes of the micro-needles pass. A positioning partition plate characterized by the above.

2. The comb-shaped structural member includes a connection plate and a plurality of comb teeth formed on the connection plate, each of the comb teeth being connected to the connection plate in an equidistant arrangement, wherein the comb teeth of the comb-shaped structural member are stacked with respect to each other and form a plurality of micro-needle holes arranged in an array. The positioning partition plate according to claim 1, characterized by the above.

3. The distance between the comb teeth of the comb-shaped structural member is slightly larger than the width or thickness of the bioelectrode of the micro-needle. The positioning partition plate according to claim 2, characterized by the above.

4. A planar array type micro-needle structure including the positioning partition plate according to any one of claims 1 to 3 and at least one micro-needle assembly, wherein the micro-needle assembly includes a micro-needle body, an integrated circuit chip, and a micro-strip line, the integrated circuit chip is provided on the substrate of the micro-needle body, one end of the micro-strip line and the integrated circuit chip are fixed and electrically connected, and the bioelectrode of each micro-needle body passes through the micro-needle hole of the positioning partition plate. A planar array type micro-needle structure characterized by the above.

5. The micro-needle body includes a hard needle and a soft needle, the hard needle has a hard needle substrate and at least one hard needle bioelectrode formed on the hard needle substrate, the soft needle has a soft needle substrate and at least one soft needle bioelectrode formed on the soft needle substrate, the soft needle bioelectrode and the hard needle bioelectrode are correspondingly fixed via a first fixing member, the soft needle substrate and the hard needle substrate are fixed via a second fixing member, and the integrated circuit chip and the soft needle substrate are electrically connected by a flip-chip method. The planar array type micro-needle structure according to claim 4, characterized by the above.

6. The first fixing member is a plurality of hook structures arranged at intervals in the longitudinal direction of the hard needle bioelectrode. The hook structure has a first portion and a second portion. Both ends of the second portion are respectively connected to the first portion and the surface of the hard needle bioelectrode. The first portion is parallel to the surface of the hard needle bioelectrode. The soft needle bioelectrode is located between the first portion and the surface of the hard needle bioelectrode, and the second portion and the surface of the hard needle bioelectrode form a preset angle. The planar array type microneedle structure according to claim 5, characterized in that.

7. An opening for the hook structure to pass through is provided in the soft needle bioelectrode at a position corresponding to the hook structure. A hook detachment structure for the hook structure to detach from the soft needle is provided in the opening. The hook detachment structure is a hook detachment portion extending from the edge of the opening into the opening. The interval between the hook detachment portions is smaller than the width of the hook structure. The hook detachment portions are symmetrically arranged with respect to the axis of the opening, and there is a gap between the side edges of the hook detachment portions and the corresponding side edges of the opening. The planar array type microneedle structure according to claim 6, characterized in that.

8. The second fixing member is a plurality of pin structures arranged on the hard needle substrate at intervals in the width direction of the hard needle. The pin structure is composed of a coaxial upper cylindrical column with a large diameter and a lower cylindrical column with a small diameter. A pin hole is formed in the soft needle substrate at a position corresponding to the pin structure. A plurality of centrosymmetric patterns are provided on the outside along the edge of the pin hole in the soft needle substrate. The diameter of the upper cylindrical column of the pin structure is larger than the diameter of the pin hole. The planar array type microneedle structure according to claim 5, characterized in that.

9. Connection vias are provided at both ends of the integrated circuit chip, and a plurality of the integrated circuit chips are assembled together by a restraint structure passing through the connection vias located on the same side. The planar array type microneedle structure according to claim 4, characterized in that.

10. The microstrip line includes a bus line and a plurality of branch lines connected to the bus line, and one end of each of the branch lines and each of the integrated circuit chips are fixedly corresponded in a flip-chip manner. The planar array type micro needle structure according to claim 4, characterized in that.

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