Adjuster using torsionally stiff coupler and actuator system using same

Abstract

Disclosed is an apparatus for adjusting the position or orientation of an internal component behind a pressurized wall in a system sealed to contain a controlled internal environment, wherein a through-wall adjuster that protrudes from the system through the pressurized wall includes a bellows-type connector. Also disclosed is a lithography apparatus including the through-wall adjuster. Also disclosed is an apparatus for adjusting the position or orientation of an internal component behind a pressurized wall in a system sealed to contain a controlled internal environment, wherein rotation of a portion of the through-wall adjuster that protrudes from the system through the pressurized wall about a first axis results in rotation about a different axis within the sealed system through the use of a bellows-type coupling element.

Description

[Technical Field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS)

[0001] This application claims priority to U.S. Application No. 63 / 410,025 filed September 26, 2022 and U.S. Application No. 63 / 426,985 filed November 21, 2022, each of which is incorporated by reference in its entirety into this specification.

[0002]

[0002] The disclosed subject matter relates to a system in which the position or orientation of elements within an enclosure, such as some modules of a laser-generated light source used to perform a photolithographic integrated circuit manufacturing process, is adjusted, for example for alignment or other maintenance purposes. [Background technology]

[0003] In some systems, components are maintained in a sealed environment. The environment may be sealed to maintain desired conditions, such as gas pressure or purity, inside the sealed environment. The sealed environment may also be used to maintain a desired gas composition, such as an inert gas or a purge gas.

[0004]

[0004] In these systems, it is sometimes necessary to maintain, for example, align, components located within the sealed environment. One approach to accomplish this is to open the enclosure containing the sealed environment, perform the desired maintenance activity, and then reseal the enclosure to restore the desired conditions within the enclosure. Depending on the specific procedures and arrangements, this process can incur a significant amount of system downtime and contaminate the system. The system can also generate hazardous emissions, and therefore, it is highly desirable to have a sealed enclosure when the system is necessarily operated during alignment and maintenance adjustments. The entire process of servicing components within the sealed environment can be expedited to the extent that it can be performed within the system, i.e., without first opening, then resealing, and restoring the internal environment within the enclosure. It is in this context that the need for the disclosed subject matter arises. Summary of the Invention

[0005] The following presents a simplified summary of one or more embodiments in order to provide a basic understanding of the subject matter of this disclosure. This summary is not an extensive overview of all possible embodiments, and is not intended to identify key or critical elements of all embodiments or to delineate the scope of any or all embodiments. Its sole purpose is to present some concepts of one or more embodiments in a streamlined form as a prelude to the more detailed description that is presented later.

[0006]

[0006] According to one aspect of one embodiment, an optical element alignment mechanism is disclosed comprising: a guide having an arcuate channel having a first channel end and a second channel end; a torsionally rigid elongate member positioned at least partially within the arcuate channel so as to bend in an arc that coincides with the interior of the arcuate channel, the torsionally rigid elongate member having a first end rotatable in a first plane and a second end rotatable in a second plane substantially perpendicular to the first plane; a first mechanical coupling member coupled to the first end; and a second mechanical coupling member coupled to the second end, wherein rotation of the first mechanical coupling member in the first plane causes rotation of the second coupling member in the second plane.

[0007]

[0007] The first mechanical coupling member may include a receptacle member for torsional actuation. The second mechanical coupling member may include a protrusion for torsional actuation. The torsionally stiff elongated member may include an electroformed bellows, the bellows being flexible in degrees of freedom other than axial rotation. The torsionally stiff elongated member may include a high strength nickel alloy. The nickel alloy may include copper.

[0008]

[0008] The surface of the torsionally stiff elongate member may be plated. The guide may comprise leaded brass. The guide may comprise leaded bronze. The guide may comprise a substantially lead-free alloy. The guide may comprise a first material comprising a pure metal or a metal alloy, and the first and second mechanical coupling members may comprise a second material substantially dissimilar to the first material.

[0009] The torsionally stiff elongated member may have a substantially circular cross-section and the arcuate channel may have a substantially semicircular cross-section. The torsionally stiff elongated member may have a length in the range of about 15 mm to about 40 mm. The torsionally stiff elongated member may have a diameter in the range of about 5 mm to about 10 mm. The torsionally stiff elongated member may have a radius of curvature in the range of about 10 mm to about 25 mm. The arcuate channel may be open along at least a portion of the arcuate length of the arcuate channel.

[0010]

[0010] According to another aspect of an embodiment, a lithography apparatus is disclosed comprising: an optical pulse stretcher including a housing adapted to contain a sealed and pressurized environment and including a wall having a through-wall adjuster; an optical component positioned within the housing, at least one of a position or orientation of the optical component being adjustable by application of torque to the optical component in a first plane; and an elongated, torsionally stiff torque transmission element disposed at least partially within the housing, the elongated, torsionally stiff torque transmission element having a first end mechanically coupled to the optical component and a second end mechanically coupled to the through-wall adjuster, the elongated, torsionally stiff torque transmission element being arranged such that rotation in the second plane by operation of the through-wall adjuster applies torque to the optical component in the first plane, the first plane and the second plane being substantially orthogonal.

[0011]

[0011] The elongated, torsionally stiff, torque transmission element may comprise an electroformed bellows. The electroformed bellows may comprise a high-strength nickel alloy. The lithographic apparatus may further comprise a guide having an arcuate channel arranged to support and laterally stabilize the elongated, torsionally stiff, torque transmission element. The elongated, torsionally stiff, torque transmission element may comprise a nickel alloy, and the guide may comprise leaded brass or leaded bronze.

[0012]

[0012] The lithographic apparatus may further comprise an arcuate channel disposed along at least a portion of the length of the elongated torsionally stiff torque transmission element to limit lateral movement or buckling of the elongated torsionally stiff torque transmission element. The arcuate channel may have an open portion along at least a portion of the length of the arcuate channel. The arcuate channel and the torsionally stiff torque transmission element may be dimensioned and positioned such that the arcuate channel does not mechanically contact the torsionally stiff torque transmission element along a bellows portion of the torsionally stiff torque transmission element.

[0013]

[0013] The elongated, torsionally stiff, torque transmission element may have a substantially circular cross-section, and the arcuate channel may have a substantially semicircular cross-section, with a nominal clearance to the circular cross-section of the torsionally stiff, torque transmission element. The elongated, torsionally stiff, torque transmission element may have a length in the range of about 15 mm to about 40 mm. The elongated, torsionally stiff, torque transmission element may have a diameter in the range of about 5 mm to about 10 mm. The elongated, torsionally stiff, torque transmission element may have a radius of curvature in the range of about 10 mm to about 25 mm.

[0014] The elongated torsionally stiff torque transmission element may include a guide having an arcuate channel and a torsionally stiff elongated member positioned partially within the arcuate channel to bend in an arc that coincides with the interior of the arcuate channel, the torsionally stiff elongated member having a first end rotatable in a first plane and a second end rotatable in a second plane, the arcuate channel and the torsionally stiff elongated member separated by a clearance. The torsionally stiff torque transmission element may be substantially free of any lubricant.

[0015] The elongated, torsionally stiff, torque transmitting element may comprise only a metallic or ceramic material that does not contaminate the housing when the elongated, torsionally stiff, torque transmitting element is exposed to scattered or direct deep ultraviolet radiation. The elongated, torsionally stiff, torque transmitting element may comprise a first material and the guide may comprise a second material different from the first metal.

[0016] According to another aspect of an embodiment, an apparatus for adjusting an optical component in an optical module is disclosed, the apparatus comprising: a through-wall adjuster (TWA) including: a bellows-style connecting element having a first end and a second end; a first coupling element mechanically coupled to the first end and adapted to provide a rotational force for adjusting the optical component; and a second coupling element mechanically coupled to the second end, having an outer portion sized and configured to extend to an exterior of the optical module, the second coupling element being externally accessible and rotatable to provide the rotational force to the bellows-style connecting element. The bellows-style connecting element may comprise an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation.

[0017]

[0017] The device may further include a spherical bearing disposed within the second coupling element to allow rotation of the second coupling element while sealing the interior of the optical module. The spherical bearing may include a convex inner ring having a first contour and a concave outer ring having a second contour complementary to the first contour. The outer ring may have a concave inner surface having a second contour complementary to the first contour. The inner ring may comprise a carbon alloy bearing steel. The ring may comprise a ceramic material. The inner ring may comprise stainless steel. The inner ring may comprise a silicon nitride-alumina composite material. The outer ring may comprise a phosphor bronze alloy material.

[0018] The apparatus may further comprise an actuator mechanically coupled to the TWA and to the optical component for converting rotational force about a first axis from the TWA into rotational force about a second axis and for coupling rotational force about the second axis to the optical component, the second axis being at an angle to the first axis, the actuator comprising a curved bellows coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis. The curved bellows coupling element may comprise an electroformed bellows, the bellows being flexible in all degrees of freedom except for axial rotation.

[0019]

[0019] The device may further comprise an actuator mechanically coupled to the TWA and to the optical component for converting a rotational force from the TWA about a first axis into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, the second axis being at an angle to the first axis, and the actuator may comprise a curved, torsionally rigid elongated member positioned within an arcuate channel in the guide, the torsionally rigid elongated member having a first end rotatable about the first axis and a second end rotatable about the second axis, and the interior of the arcuate channel and the torsionally rigid elongated member are separated by a clearance.

[0020]

[0020] According to another aspect of an embodiment, a lithography apparatus is disclosed comprising: an optical pulse stretcher including a housing adapted to contain a sealed and pressurized environment and including a wall; an optical component positioned within the housing, wherein at least one of a position and an orientation of the optical component is adjustable by application of torque to the optical component in a first plane; and a through-wall adjuster (TWA) comprising a bellows connecting element having a first end and a second end, a first coupling element mechanically coupled to the first end and adapted to apply a rotational force to adjust the optical component, and a second coupling element mechanically coupled to the second end, having an outer portion sized and configured to extend to the exterior of the optical module, the second coupling element being externally accessible and rotatable to apply a rotational force to the bellows connecting element.

[0021]

[0021] The lithographic bellows coupling element may comprise an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation. The TWA may further comprise a spherical bearing disposed within the second coupling element to allow rotation of the second coupling element while limiting leakage of gas and radiation from the interior of the optical module. The spherical bearing may comprise a convex inner ring having a first contour and a concave outer ring having a second contour complementary to the first contour. The outer ring may have a concave inner surface having a second contour complementary to the first contour. The inner ring may comprise a carbon alloy bearing steel. The inner ring may comprise a ceramic material. The inner ring may comprise stainless steel. The inner ring may comprise a silicon nitride-alumina composite material. The outer ring may comprise a phosphor bronze alloy material.

[0022]

[0022] The lithographic apparatus may further comprise an actuator mechanically coupled to the TWA and to the optical component for converting a rotational force from the TWA about a first axis into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, the second axis being at an angle to the first axis, the actuator including a curved bellows-type coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis. The actuator may comprise a curved, torsionally-rigid elongated member positioned within an arcuate channel in the guide, the torsionally-rigid elongated member having a first end rotatable about the first axis and a second end rotatable about the second axis, the interior of the arcuate channel and the torsionally-rigid elongated member being separated by a clearance.

[0023] Further embodiments, features, and advantages of the subject matter of the present disclosure, as well as the structure and operation of the various embodiments, are described in detail below with reference to the accompanying drawings. [Brief explanation of the drawings]

[0024]

[0024] The accompanying drawings, which are incorporated in and form a part of this specification, illustrate the subject matter of the present disclosure and, together with the description, further serve to clarify the principles of the subject matter of the present disclosure and to enable those skilled in the art to make and use the subject matter of the present disclosure.

[0025] [Figure 1]

[0025] FIG. 1 is a diagram of a photolithography system that may benefit from implementation of certain aspects of the embodiments. [Figure 2]

[0026] 1 is a diagram of a light source for a photolithography system that may benefit from implementation of certain aspects of the embodiments. [Figure 3]

[0027] 1 is a diagram of an arrangement for in-system adjustment of optical components in a module for a photolithography system that may benefit from implementation of certain aspects of the embodiments. [Figure 4A]

[0028] 1 illustrates an isometric view of a coupling system according to an aspect of an embodiment; [Figure 4B]

[0029] FIG. 4B is a front view of the coupling system of FIG. 4A. [Figure 4C]

[0030] FIG. 12 is a front view of a guide component of a coupling system according to an aspect of an embodiment; [Figure 4D]

[0031] FIG. 1 is a front view of a torsionally stiff coupler component for a coupling system according to an aspect of an embodiment; [Figure 4E]

[0032] FIG. 4B is a cutaway view of the coupling system of FIG. 4A. [Figure 4F]

[0033] FIG. 12 is a side view of a guide component for a coupling system according to an aspect of an embodiment; [Figure 4G]

[0034] FIG. 1 is a side view of a torsionally stiff coupler component for a coupling system according to an aspect of an embodiment; [Figure 5]

[0035] 1 is an isometric view of a through-wall adjuster (TWA) according to an aspect of an embodiment; FIG. [Figure 6]

[0036] FIG. 6 is a cross-sectional view of the TWA of FIG. 5. [Figure 7]

[0037] 1A, 1B, and 1C illustrate various states of misalignment of a bellows connector. [Figure 8]

[0038] 1 is a cross-sectional view of a TWA according to an aspect of an embodiment. [Figure 9]

[0039] 1 is a cross-sectional view of an actuator system incorporating a TWA and a flexure connector according to an aspect of an embodiment. FIG.

[0026]

[0040] Further features and advantages of the present invention, as well as the structure and operation of various embodiments of the present invention, are described in detail below with reference to the accompanying drawings. It should be noted that the scope of the present disclosure is not limited to the specific embodiments expressly described herein. Such embodiments are included herein for illustrative purposes only. Additional embodiments will be apparent to those skilled in the art based on the teachings presented herein. DETAILED DESCRIPTION OF THE INVENTION

[0027]

[0041] Various embodiments are now described with reference to the drawings. Like reference numerals are used to refer to like elements throughout. In the following description, for purposes of explanation, numerous specific details are set forth in order to facilitate a thorough understanding of one or more embodiments. It will be apparent, however, that in some or all cases, any of the embodiments described below can be practiced without employing the specific design details described below. In other instances, well-known structures and devices are shown in block diagram form to facilitate describing one or more embodiments. This summary is not an extensive overview of all possible embodiments, and is not intended to identify any key or critical elements of any embodiment or to delineate the scope of any or all embodiments.

[0028]

[0042] Systems such as those described herein may be beneficial in a wide range of applications and implementations, and to provide a specific, non-limiting example for ease of explanation, one such application is in semiconductor photolithography.

[0029]

[0043] 1 , an optical system 100, including a system controller 104 and an output device controller 102, is configured with an illumination system 110 that generates a pulsed laser light beam 106. The illumination system 110 is configured with a module that includes an optical pulse stretcher (“OPuS”) 120. As described in more detail below, the OPuS 120 includes an enclosure 125 that contains a controlled atmosphere. The OPuS enclosure also houses optical components, one of which is shown as optical component 130, that are adjustable using through-wall adjusters (“TWAs”), such as TWA 135, that allow adjustment of the internal optical components without having to destroy the containment of the enclosure 125.

[0030]

[0044] Light beam 106 may be directed to an output device, such as stepper / scanner 105, which is a photolithography exposure apparatus that uses light beam 106 to pattern microelectronic features on wafer 108. In a photolithography system, components configured in illumination system 110 (as shown in FIG. 2), including OPuS 120 with optical components 130, determine parameters of light beam 106 and thereby the parameters of the microelectronic features patterned on wafer 108 by stepper / scanner 105.

[0031]

[0045] 2 is a functional block diagram of an exemplary configuration of an illumination system 110 module including an OPuS 120. The light beam 106 generated by the illumination system may be in the deep ultraviolet (DUV) range, for example, at a wavelength of 248 nanometers (nm) or 193 nm.

[0032]

[0046] 2, illumination system 110 includes a gas discharge seed laser system 260. Seed laser system 260 is configured to generate seed laser output pulses from a master oscillator (“MO”) 263. MO 263 can be configured as a chamber having a pair of electrodes (not shown), such that an electrical discharge exists between the electrodes that creates a lasing gas discharge in a lasing gas, e.g., ArF, KrF, F, and / or XeF, that produces a relatively broadband radiation.

[0033]

[0047] The resulting broadband radiation can be modified by a line narrowing module ("LNM") 262 so that a relatively ultra-narrow bandwidth and center wavelength can be selected. LNM 262 may include a grating (not shown). A master oscillator output coupler ("MO OC") 264 receives radiation from MO 263. The output of MO OC 264 can be directed to a line center analysis module ("LAM") 266, which generates output 269.

[0034]

[0048] The output 269 propagates to relay optics 265. The relay optics 265 includes an MO wavefront engineering box ("WEB") 268 and may include a multi-prism beam expander (not shown) and an optical delay path (not shown). The WEB 268 can be used to redirect the output 269 of the seed laser system 260 to a power ring amplification ("PRA") stage 270.

[0035]

[0049] The PRA stage 270 includes a beam reverser 272, a PRA laser oscillation chamber 273, and a PRA web 278. The PRA web 278 is positioned to receive the redirected output 269 of the seed laser system 260 from the MO web 268 of the relay optics 265. The PRA web 278 may include a partially reflective input / output coupler (not shown), a maximum reflectance mirror for the nominal operating wavelength, and one or more prisms. The PRA web 278 may be provided with seed beam injection and output coupling optics (not shown) so that the beam is redirected by the beam reverser 272 through the gain medium in the PRA laser oscillation chamber 273.

[0036]

[0050] The PRA laser oscillation chamber 273 includes a chamber having a pair of electrodes (not shown) between which an electric discharge can be generated, thereby generating broadband radiation.

[0037]

[0051] The laser light beam pulse output from the PRA stage 270 is directed by a PRA WEB 278 to an output subsystem 275 that measures and modifies parameters of the laser light beam before producing the final light beam 106 of the illumination system 110. The output subsystem 275 includes a bandwidth analysis module (“BAM”) 274 that receives the output of the PRA stage 270 and outputs and extracts a portion of the laser light beam pulse for metrology purposes, for example to measure bandwidth or pulse energy. The laser light beam pulse is then passed through an OPuS 120 in the output subsystem 275 to modify the light beam pulse.

[0038]

[0052] Components within OPuS 120 can be configured to convert a single output pulse into a pulse train. Secondary pulses created from the original single output pulse are delayed relative to each other so that the effective pulse length of the laser is extended and the peak pulse intensity is reduced. The resulting light beam from OPuS 120 is passed through a Complex Autoshutter Metrology Module ("CASMM") 277 or pulse energy meter within output subsystem 275 before light beam 106 is emitted from illumination system 110.

[0039]

[0053] The light beam propagating through illumination system 110 is typically at a wavelength that is absorbed by some gaseous components of air. For this reason, the path that the radiation takes through the modules in illumination system 110 is purged of air and replaced with a gas that is more transparent to DUV radiation, such as nitrogen. Nitrogen gas provides substantially lower beam attenuation than air and does not absorb short wavelength light beams like other elements in air, such as oxygen.

[0040]

[0054] Additionally, the light beam may be adversely affected by contaminants in its path, such as may be introduced by outgassing of organic lubricants within the module, and it is therefore desirable to avoid the use of such lubricants to reduce friction between two surfaces when one is moved relative to the other, as may occur during mechanical manipulation of components within the module.

[0041]

[0055] As mentioned above, optical components located within a module enclosure in which a controlled atmosphere is maintained may need to be aligned or otherwise adjusted from time to time. The controlled atmosphere of the module enclosure may be at a pressure different from the atmospheric pressure of the surrounding environment outside the enclosure. For example, the pressure of the gas within the enclosure may be 5 pounds per square inch greater than the atmospheric pressure of the surrounding environment.

[0042]

[0056] Also, as mentioned above, such adjustments can advantageously be made in-system, i.e., without the need to open and reseal the enclosure. To enable such in-system adjustments, a coupling system such as a TWA having an outer portion is used. The outer portion of the TWA is accessible by a field service engineer ("FSE") and is mechanically coupled to an inner portion located in a controlled environment behind the pressurized wall of the enclosure.

[0043]

[0057] The FSE manipulates the outer portion of the TWA to cause movement (e.g., translational, axial, or rotational) of the inner portion, which is then mechanically coupled to the component being adjusted. The net effect is that the FSE can adjust the internal component by simply manipulating the outer component, without disturbing the environment within the module.

[0044]

[0058] For some arrangements, the induced motion may be axial, i.e., inward or outward relative to the housing wall along the axis of rotation of the outer portion of the TWA. However, for other arrangements, it may be necessary to relay torque applied to the outer portion of the TWA to an internal component in a plane that is at an angle to the plane of the externally applied torque. Such arrangements require the use of a subsystem that can change the direction of the torque accordingly.

[0045]

[0059] 3, OPuS 120 includes a torque-angle transducer 350 coupled to optical component 130 by a shaft 332 within interior 326 of housing 125. It will be understood that OPuS 120 is referenced herein merely to have a concrete example for ease of explanation, and that the underlying principles apply equally to other modules within illumination system 110, as well as enclosed modules within other systems.

[0046]

[0060] 3 , housing 125 includes housing walls 323 and housing frame 322. Components of OPuS 120, including torque-angle transducer 350 and optical component 130, may be mounted and secured to housing frame 322 within interior 326. Housing 125 is hermetically sealed to allow interior 326 and components located therein, such as torque-angle transducer 350 and optical component 130, to be maintained in a controlled environment. It will be appreciated that during use, interior 326 will generally be filled with DUV radiation.

[0047]

[0061] 3 also includes a TWA 335. The TWA 335 includes an inner end 335A and an outer protruding end 335B. The outer end 335B may include structure 338 defining a socket sized and positioned to receive a mating portion of a tool inserted by the FSE. The inner end 335A of the TWA 335 may be mechanically coupled to a torque-angle transducer 350 within the sealed housing 125.

[0048]

[0062] Rotation of the TWA 335 causes rotation of the shaft 332 through the torque-angle converter 350, which also adjusts the optical component 130 coupled to the shaft 332. The torque-angle converter 350 converts torque applied in one plane to a different plane at a different angle. For example, if FIG. 3 is considered to be in the XY plane, if the TWA 335 applies (rotates) a torque in the XZ plane (i.e., about the Y axis), the torque-angle converter 350 may need to convert that torque to a torque in the YZ plane (i.e., about the X axis) to adjust the optical component 130. In the example of FIG. 3, the plane of rotation of the TWA 335 is orthogonal to the plane of rotation of the shaft 332, but a given application may require a change in the direction of the torque at an angle other than 90 degrees. Here and elsewhere, torque is used in the conventional sense of a force that tends to cause a change in the rotational motion of an object. Because the direction of torque generally coincides with the direction of rotation, these directions are used interchangeably herein.

[0049]

[0063] One possible embodiment of the torque-angle converter 350 may include a gearbox, which operates in a known manner to generate a rotational motive force in one direction in response to the application of a rotational force in another direction. However, gearboxes can be mechanically complex and may require precise manufacturing tolerances and custom parts, which can increase manufacturing costs. Gearboxes can also experience mechanical failure modes such as galling (adhesive wear), especially in the absence of lubrication. In environments such as those of concern here, lubricants generally cannot be used to mitigate such mechanical failure modes because they may outgas when exposed to deep UV radiation, contaminating the enclosed environment in which the gearbox may be located. It would be advantageous to have a mechanism that can directly redirect torque without these drawbacks.

[0050]

[0064] Thus, according to one aspect of an embodiment, a possible implementation of a torque-angle converter 450 is shown in FIGS. 4A through 4G. The design of the torque-angle converter 450 allows for highly accurate adjustment when mechanically coupled to a TWA, such as the TWA 335. The torque-angle converter 450 is not particularly expensive to manufacture because some of the components used in the torque-angle converter 450 do not need to be custom-made and can have lower manufacturing tolerances than a gearbox without adversely affecting performance. The torque-angle converter 450 can also be designed with contact surfaces made of dissimilar materials that are less likely to experience mechanical adhesion / galling between them. The torque-angle converter 450 may be implemented to be easily retrofittable to an optical system already deployed in the field, such as a deployed OPuS 120, and can be installed in place of or in addition to a gearbox. The torque-angle converter 450 can be easily installed within such a deployed optical system without requiring excessive, if any, modifications to the optical system.

[0051]

[0065] 4A , torque angle converter 450 includes a guide 440 and a torsionally stiff coupling element (“TSCE”) 480. Guide 440 includes a first end 441A and a second end 441B. Guide 440 also includes structure defining a channel 445 and a guide extension 446 positioned to define an extension of channel 445. First end 441A of guide 440 has an externally threaded mechanical coupling member 448 that mates with an internally threaded mechanical coupling member 449 in a known manner. Coupling member 448 extends from first end 441A and has a central opening aligned with channel 445.

[0052]

[0066] The TSCE 480 is comprised, in part, of a bellows-type element 485 having a first end 481A and a second end 481B. An end fitting 447 may be provided at the first end 481A, and an extension member 487 may be provided at the second end 481A. The end fitting 447 of the TSCE 480 has a socket accessible through a central opening in a coupling member 449. When the coupling member 449 is attached to the coupling member 449, the position of the fitting 447 is fixed relative to the guide 440. At the same time, the end fitting 447 can be rotated by a TWA inserted into the socket in the end fitting 449, which in turn causes rotation of the TSCE 480. This causes rotation of the extension member 487, which may be coupled to, for example, a component of an optical system to adjust some attribute of the component, such as its position or degree of rotation.

[0053]

[0067] Guide 440 may further include one or more mounting flanges 444, which can be used to secure guide 440 to a support within a housing or assembly, such as housing 125 (FIG. 3).

[0054]

[0068] 4B and 4C are front views of guide 440 with (FIG. 4B) and without (FIG. 4C) TSCE 480. First end 441A extends along the Y-axis to second end 441B. First end 441A and second end 441B of guide 440 define a channel 445 with guide inner surface 443 including first end 442A and second end 442B.

[0055]

[0069] The guide inner surface 443 of the channel 445 is configured and dimensioned so that, when the TSCE 480 is in place, the channel 445 has an overall arcuate shape corresponding to the shape of the TSCE 480 (as shown in FIGS. 4E and 4F ). When installed in its curved configuration, the TSCE 480 has a shorter, inner curved side (closer to the radius of curvature if the TSCE 480 is curved in an arc) and a longer curved side (farther from the radius of curvature if the TSCE is curved in an arc). According to one aspect of the illustrated embodiment, the channel 445 is open adjacent to the shorter (inner) curved side of the TSCE 480. In other words, the arcuate channel is configured with an open portion along at least a portion of the arcuate length of the arcuate channel. Those skilled in the art will understand that the channel 445 may be configured without an open portion, so long as there is adequate clearance between the TSCE 480 and the guide inner surface 443 in the areas where the open sides are shown in the figures.

[0056]

[0070] The arcuate shape of the channel 445 can be selected such that the first end 442A of the channel 445 is oriented to extend parallel to the Y-axis and the second end 442B is oriented to extend parallel to the Z-axis. The channel 445 can extend between the first end 442A and the second end 442B. In the illustrated embodiment, the angle θ between the first end 442A and the second end 442B is approximately 90°, thus allowing for the accommodation of a TSCE that can have a torque applied at one end in a plane that is orthogonal to the torque applied to the TSCE at the other end.

[0057]

[0071] It will be understood that references here and throughout this specification to an XYZ coordinate system are for purposes of describing relative positioning and orientation only, and not necessarily with respect to a particular or absolute frame of reference, unless the context indicates otherwise. Similarly, the use of terms such as above, below, top, bottom, etc. does not necessarily refer to a particular frame of reference, unless the context indicates otherwise.

[0058]

[0072] Coupling member 448 protrudes in the Y direction from first end 441A of guide 440 at first end 441A. Coupling member 449 may be a nut configured to receive an externally threaded member such as coupling member 448, which may be in the form of a fine pitch threaded screw.

[0059]

[0073] As previously mentioned, the concertina element 485 may be formed as a curved bellows, such as having a curved cylindrical shape (as shown in FIGS. 4E and 4G). Additionally, the first end 481A of the TSCE 480 may be oriented to extend primarily parallel to the Y-axis, and the second end 481B of the TSCE 480 may be oriented to extend primarily parallel to the Z-axis. The TSCE 480 may be arranged to extend from the first end 481A to the second end 481B. As disclosed below, the concertina element may be a bellows formed by electro-deposition.

[0060]

[0074] The electrodeposition process may use a machined mandrel, e.g., a mandrel machined from aluminum. The mandrel is then electroplated, after which the aluminum mandrel is dissolved, leaving a component made of electrodeposited nickel. The resulting component may therefore be described as electroplated. The resulting component can tolerate lateral and axial movement; that is, it has various degrees of freedom while maintaining torsional rigidity. The degrees of freedom allow the bellows to tolerate a greater degree of component misalignment than, for example, components oriented orthogonally to one another. Such bellows transmit torque with negligible windup during bending, compression, and extension. Traditionally, such bellows are used in non-aligned couplings, i.e., when one end of the bellows is bent at an angle relative to the other end of the bellows, but only at angles less than 90°. However, for the applications contemplated herein, the number of operations over the expected life of the component is sufficiently low to allow the bellows to operate at a 90° bend over its life. Such bellows may also be manufactured by hydroforming techniques, which use a special type of die forming and high pressure fluid to form metal.

[0061]

[0075] The disclosed TSCE 480 is torsionally rigid. Those skilled in the art will understand that the term "torsionally rigid" is intended to have its conventional meaning of minimal elastic windup, backlash, and hysteresis, such that rotating one end of the TSCE 480 will cause the other end of the TSCE 480 to rotate substantially the same amount. This rotational fidelity also allows the mechanism to provide tactile feedback to the FSE or other operator, allowing the FSE to qualitatively sense the amount of resistance to rotation.

[0062]

[0076] The interior of guide channel 445 is sized relative to corrugated element 485 so that there is no contact between the interior of guide channel 445 and adjacent portions of the exterior of corrugated element 485 during normal operation. For portions of TSCE 480 and guide 440 that are in sliding contact, in some applications it may be advantageous to fabricate at least the contacting portions from dissimilar metals to prevent galling and adhesive wear, particularly in the absence of oxygen. For example, the aforementioned TSCE 480 may be fabricated from a nickel alloy, and guide 440 may be fabricated from leaded brass.

[0063]

[0077] As previously mentioned, the environment in which the coupling subsystem will be located is typically bombarded with radiation, such as deep UV radiation. This radiation can cause some materials to outgas, thereby contaminating the controlled environment within the enclosure that contains them. This can disrupt the propagation of the radiation beam along its path through the enclosure. Optical components can also be damaged when such contaminants come into contact with their surfaces. Under these conditions, being able to fabricate the coupling subsystem entirely from materials, such as metals or ceramics, that do not outgas upon exposure to deep UV radiation can provide a significant advantage.

[0064]

[0078] Figures 4E-4G are cross-sectional views of guide 440 and TSCE 480. Figure 4E is a cross-sectional side view of guide 440 and TSCE 480 as viewed from the direction indicated by line 4E-4E' in Figure 4B. Figure 4F shows guide 440 without TSCE 480 as viewed from the direction indicated by line 4F-4F' in Figure 4C, and Figure 4F shows TSCE 480 separated from guide 440 as viewed from the direction indicated by line 4G-4G' in Figure 4D.

[0065]

[0079] 4E-4G illustrate the curvature of channel 445 and concertina element 485 according to one embodiment. Both channel 445 and concertina element 485 may extend in a curved shape, with a curvature angle θ of approximately 90°. The length of channel 445 from first end 442A to second end 442B may be shorter than the length of concertina element 485 extending from first end 481A to second end 481B, which may be, for example, in a range of approximately 15 mm to approximately 40 mm. A portion of second end 481B of TSCE 480 may extend primarily in the Z-direction beyond second end 442B of channel 445 and may be received within guide extension 446 extending primarily in the Z-direction from second end 442B of channel 445.

[0066]

[0080] According to another aspect of one embodiment, channel 445 is formed such that its diameter and corresponding radius are larger than the diameter and radius of concertina element 485, which may be, for example, in the range of approximately 5 mm to approximately 10 mm and the radius of curvature, for example, in the range of approximately 10 mm to approximately 25 mm. In normal operation, TSCE 480 can be rotated without concertina element 485 contacting channel 445. Channel 445 is also configured to prevent lateral movement or buckling of concertina element 485. For example, channel 445 may have a length of 20 mm, with 5 mm guide extension 446 including a 10 mm diameter, such that a concertina element 485 having a length of 25 mm and a diameter of 7 mm can be accommodated within channel 445.

[0067]

[0081] An end fitting 447 of the TSCE 480 is held within a first mechanical member 448 within the channel 445, and the first mechanical member 448 is received within a second member 449 outside the channel 445. The end fitting 447 includes a hex receptacle that can be mechanically engaged by a TWA (shown in FIG. 3) that includes a hex wrench member to enable rotation of the TSCE 480. The TSCE 480 can thus be configured to translate torque applied in one plane, for example, by the TWA 335 (FIG. 3), into a different plane to enable alignment or adjustment of a component, such as the optical component 130 (FIGS. 1-3).

[0068]

[0082] Conventional TWAs use mating threaded elements that form a kind of labyrinth seal that sufficiently isolates the internal and external environments of the component housing from each other during the alignment procedure. The small clearance between the unlubricated mating threads is sufficient to prevent significant escape of purge gas and laser radiation while preventing the ingress of excessive oxygen.

[0069]

[0083] Such conventional TWAs are designed to operate female-threaded adjusters, with the threads on each device translating equally along their axes when rotated clockwise or counterclockwise. However, using a threaded TWA in conjunction with a threadless curved bellows actuator, such as those described above, can pose several technical challenges. For example, the adjustment range of a threaded TWA is limited by the range of travel of the threads within the mechanism. Careful positioning of the threaded TWA shaft is required to achieve even a small range of adjustment.

[0070]

[0084] Additionally, the tip of the threaded TWA shaft is typically spring-loaded, applying an axial force to the bellows end fitting. While the spring force is relatively modest (on the order of 2 lb-f), in practice this load is applied across a metal-to-metal interface with a small contact area during relative motion, without lubrication. This can generate particles and unnecessary wear, potentially leading to premature failure.

[0071]

[0085] Additionally, existing TWAs have the axial and torsional stiffness to transmit actuation torque, but lack the degrees of freedom (DOF) necessary to provide flexibility to minimize loads resulting from poor fit due to component and assembly tolerances. In conventional practice, this flexibility is provided by generous clearance between components and single (1 DOF) pin joints. Therefore, the degree of flexibility in these DOFs is largely an unpredictable and variable function of component manufacturing tolerances.

[0072]

[0086] According to one aspect of one embodiment, the TWA design eliminates the need for threaded elements, reducing axial loads on the coupling, and provides five degrees of freedom to accommodate assembly alignment tolerances.

[0073]

[0087] By avoiding the use of threaded elements, there is no axial translation of the actuator shaft as the actuator rotates, meaning the TWA design does not have to accommodate axial translation of the shaft, or in other words, there is no forced axial range of movement that must be accommodated.

[0074]

[0088] FIG. 5 is an isometric view of a TWA 500 according to one aspect of an embodiment. The TWA 500 includes a bellows-style or corrugated coupler 510 having coupler end pieces 520 and 525. The coupler end piece 520 includes a protrusion 530, which may have a hexagonal cross-section, for example, to mate with a corresponding receptacle in a curved coupler such as those described above. The TWA 500 also includes a shaft portion 550 that extends through the wall of the optical module. A retaining nut 540 secures the TWA 500 to the wall of the optical module. The TWA 500 also includes an external coupler 560, which includes a structure 580 (FIG. 6) that can be used by someone outside the optical module, such as a field service engineer, to rotate the coupler 510 disposed within the optical module. The arrangement also includes a gasket 570 for sealing the TWA 500 against the outer wall of the optical module, whereby the wall is contained between the gasket 570 and a retaining nut 540 (see FIG. 8).

[0075]

[0089] Figure 6 is a cross-sectional view of the TWA 500 of Figure 5 as it might be installed in a system. Again, the TWA 500 includes a coupler 510 having coupler end pieces 520 and 525. The coupler end piece 520 is provided with a protrusion 530. The TWA 500 also includes a shaft portion 550, shown as part of the coupler end piece 525, that extends through a wall 590 of the optical module. A retaining nut 540 secures the TWA 500 to the wall of the optical module. Figure 6 also shows a structure 580 that can be rotated by a field service engineer, thereby rotating the coupler 510. The arrangement also includes a gasket 570 for sealing the TWA against the outer wall of the optical module.

[0076]

[0090] One advantage of the TWA 500 described herein is that it provides all the DOFs necessary to accommodate any type of assembly misalignment between the TWA and the components being aligned inside the optical module. Various types of misalignment can occur. For example, FIG. 7A illustrates an axial misalignment, where the rotation axis of the entire coupler 510 is displaced vertically in the figure. FIG. 7B illustrates a parallel misalignment, where the rotation axis of one portion of the coupler 510 is displaced perpendicularly relative to the rotation axis of another portion of the coupler 510. FIG. 7C illustrates an angular misalignment, where the rotation axis of one portion of the coupler 510 is at an angle relative to the rotation axis of another portion of the coupler 510. Conventional TWAs generally have difficulty accommodating these types of misalignments. However, the TWA 500 and TSCE 480 described above provide a rotation axis DOF ​​(R X ) and has torsional stiffness along the other five DOFs (three translational (X, Y, Z) and two rotational (R Y ,R Z )) bellows couplings that are flexible in the axial, parallel, and angular misalignment directions. Thus, the TWA500 and TSCE480 are torsionally stiff yet can accommodate a certain amount of axial, parallel, and angular misalignment, allowing them to transmit torque.

[0077]

[0091] One challenge in the design of a TWA is the leakage of gas and radiation during the alignment of optical elements. The internal pressure of an optical module, such as an optical pulse stretcher, can exceed atmospheric pressure by 4 to 5 PSI. Therefore, a pressure difference exists across the walls of the optical module, which tends to force the purge gas (e.g., clean, dry nitrogen) inside the optical module to escape from the optical module. Another technical challenge in the design of a TWA is the leakage of scattered radiation (DUV) through any clearances between components.

[0078]

[0092] To avoid these problems, according to one aspect of one embodiment, the TWA is designed using a spherical bearing. The spherical bearing consists of an outer ring, an inner ring, and a locking feature that captures the inner ring within the outer ring in the axial direction only. The outer surface of the inner ring and the inner surface of the outer ring form a raceway when they slide against each other. The inner and outer rings are precision fit together. The spherical bearing is also secured in place within the TWA using an interference fit. In this way, nitrogen and radiation leakage and oxygen ingress are minimized by the precision fit and interference fit between the components.

[0079]

[0093] FIG. 8 is a cross-section of a TWA 600 incorporating a spherical bearing according to one aspect of an embodiment. The TWA 600 of FIG. 8 includes many of the same components as the TWA 500 of FIGS. 5 and 6 , bearing the same reference numerals, except that the portion of the TWA 600 that extends outward through the wall of the optical module includes a spherical bearing comprised of an inner ring 620 and an outer ring 630. The inner ring 620 is convex, having a curved profile like the exterior of a circle or sphere, and the outer ring 630 is concave, having a complementary profile that curves inward like the interior of a circle or sphere. As previously mentioned, these two components are precision-fit to limit the amount of gas and / or radiation that escapes from the optical module through the exterior protrusions of the TWA 600. In some embodiments, the inner ring 620 is made of a carbon alloy bearing steel (e.g., AISI 52100). In some embodiments, the outer ring is made of a phosphor bronze alloy (e.g., C52100). The use of such dissimilar alloys reduces the torque required to induce relative rotation of these components. This eliminates or minimizes the operating load and, therefore, the need for lubrication. It is also possible to use ceramic inner rings made from silicon nitride-alumina composite (Si3N4 / Al2O3) or stainless steel such as AISI 420.

[0080]

[0094] The TWA embodiments disclosed herein are useful in combination with various types of actuators within optical modules, particularly actuators incorporating curved wave couplers, because such TWAs do not require or generate axial translation to operate. FIG. 9 is a cross-section of an adjuster arrangement using the coupler 600 of FIG. 8 in combination with an actuator incorporating a curved wave coupler, as described above. As shown in FIG. 9, the overall arrangement includes a bellows-type coupling element 510 having end pieces 520 and 525. The arrangement also includes an end cap 600 including a spherical bearing consisting of an inner ring 620 and an outer ring 630. Seal 570 is also shown. End cap 600 provides access to shaft 525, which extends through wall 700 of the optical module. Protrusion 530 mates with coupling member 449 of the actuator. The actuator includes a bellows-type element 485 and an end fitting 487 that couples to a component within the optical module that is desired to be adjusted. The bellows element 485 is disposed within the guide 440 as described above.

[0081]

[0095] The above description includes examples of multiple embodiments. Of course, it is not possible to describe every conceivable combination of components or methodologies for purposes of describing these embodiments, but those skilled in the art will recognize that many additional combinations and permutations of various embodiments are possible. Accordingly, the described embodiments are intended to embrace all such alterations, modifications, and variations that fall within the spirit and scope of the appended claims. Furthermore, the term "comprising" is intended as a transitional term when used in the claims; therefore, to the extent the term "includes" is used in either the detailed description or the claims, such term is intended to be as inclusive as "comprising." Also, although elements of described aspects and / or embodiments may be described or claimed in the singular, they are considered in the plural unless limitation to the singular is expressly stated. Additionally, all or a portion of any aspect and / or embodiment may be utilized with all or a portion of any other aspect and / or embodiment, unless otherwise specified.

[0082]

[0096] The embodiment can be further described using the following clauses. 1. A guide having an arcuate channel with a first channel end and a second channel end; a torsionally stiff elongated member positioned at least partially within the arcuate channel and having an arcuate configuration conforming to the interior of the arcuate channel, the torsionally stiff elongated member having a first end rotatable in a first plane and a second end rotatable in a second plane substantially perpendicular to the first plane; a first mechanical coupling member coupled to the first end; a second mechanical coupling member coupled to the second end; It is equipped with An optical element alignment mechanism in which rotation of a first mechanical coupling member in a first plane causes rotation of a second coupling member in a second plane. 2. The optical element alignment mechanism of clause 1, wherein the first mechanical coupling member comprises a receptacle member for torsional actuation. 3. The optical element alignment mechanism of clause 1, wherein the second mechanical coupling member comprises a protrusion for torsional actuation. 4. The optical alignment mechanism of clause 1, wherein the torsionally stiff elongated member comprises an electroformed bellows, the bellows being flexible in degrees of freedom other than axial rotation. 5. The optical alignment mechanism of clause 1, wherein the torsionally stiff elongated member comprises a high strength nickel alloy. 6. The optical alignment mechanism of clause 5, wherein the nickel alloy contains copper. 7. The optical alignment mechanism of clause 5, wherein the torsionally stiff elongated member comprises an electroformed plating. 8. An optical alignment mechanism according to clause 1, wherein the guide comprises leaded brass. 9. An optical alignment mechanism as in clause 1, wherein the guide comprises leaded bronze. 10. The optical alignment mechanism of clause 1, wherein the guide comprises a substantially lead-free alloy. 11. The optical alignment mechanism of clause 1, wherein the guide comprises a first material comprising a pure metal or metal alloy, and the first and second mechanical coupling members comprise a second material substantially dissimilar to the first material. 12. The optical element alignment mechanism of clause 1, wherein the torsionally stiff elongated member has a substantially circular cross-section and the arcuate channel has a substantially semicircular cross-section. 13. The optical element alignment mechanism of clause 1, wherein the torsionally stiff elongated member has a length within the range of about 15 mm to about 40 mm. 14. The optical element alignment mechanism of clause 1, wherein the torsionally stiff elongated member has a diameter within the range of about 5 mm to about 10 mm. 15. The optical element alignment mechanism of clause 1, wherein the torsionally stiff elongated member has a radius of curvature within a range of about 10 mm to about 25 mm. 16. The optical element alignment mechanism of clause 1, wherein the arcuate channel is open along at least a portion of the arcuate channel's arc length. 17. An optical pulse stretcher including an enclosure adapted to contain a sealed and pressurized environment and including a wall having a through-wall adjuster; an optical component positioned within the housing, wherein at least one of a position and an orientation of the optical component is adjustable by application of a torque to the optical component in a first plane; an elongated, torsionally stiff, torque transmission element disposed at least partially within the housing, the elongated, torsionally stiff, torque transmission element having a first end mechanically coupled to the optical component and a second end mechanically coupled to the through-wall adjuster, the torque transmission element being arranged such that rotation of the through-wall adjuster in the second plane applies a torque to the optical component in the first plane, the first plane and the second plane being substantially orthogonal; 1. A lithographic apparatus comprising: 18. The lithography apparatus of clause 17, wherein the elongated, torsionally stiff, torque transmitting element comprises an electroformed bellows. 19. The lithographic apparatus of clause 17, wherein the elongated, torsionally stiff torque transmitting element comprises a bellows comprising a high strength nickel alloy. 20. The lithographic apparatus of clause 17, further comprising a guide having an arcuate channel arranged to support and laterally stabilize the elongated, torsionally stiff, torque transmission element, the elongated, torsionally stiff, torque transmission element comprising a nickel alloy and the guide comprising leaded brass or leaded bronze. 21. The lithographic apparatus of clause 17, further comprising an arcuate channel disposed along at least a portion of the length of the elongated, torsionally stiff, torque transmission element to limit lateral movement or buckling of the elongated, torsionally stiff, torque transmission element. 22. The lithographic apparatus of clause 21, wherein the arcuate channel has an open portion along at least a portion of the length of the arcuate channel. 23. The lithographic apparatus of clause 21, wherein the arcuate channel and the torsionally stiff torque transmission element are sized and positioned such that the arcuate channel does not mechanically contact the torsionally stiff torque transmission element along a bellows portion of the torsionally stiff torque transmission element. 24. The lithographic apparatus of clause 21, wherein the elongated torsionally stiff torque transmission element has a substantially circular cross section and the arcuate channel has a substantially semicircular cross section and has a nominal clearance to the circular cross section of the torsionally stiff torque transmission element. 25. The lithographic apparatus of clause 17, wherein the elongated, torsionally stiff, torque transmitting element has a length in the range of about 15 mm to about 40 mm. 26. The lithographic apparatus of clause 17, wherein the elongated, torsionally stiff torque transmission element has a length within a diameter of about 5 mm to about 10 mm. 27. The lithographic apparatus of clause 17, wherein the elongated, torsionally stiff torque transmission element has a radius of curvature within the range of about 10 mm to about 25 mm. 28. A lithographic apparatus according to clause 17, wherein the elongated, torsionally stiff torque transmission element comprises a torsionally stiff elongated member positioned partially within a guide having an arcuate channel, the torsionally stiff elongated member positioned to coincide with the interior of the arcuate channel, the torsionally stiff elongated member having a first end rotatable in a first plane and a second end rotatable in a second plane, the arcuate channel and the torsionally stiff elongated member being separated by a clearance. 29. The lithographic apparatus of clause 17, wherein the elongated, torsionally stiff, torque transmitting element is substantially free of any lubricant. 30. A lithographic apparatus according to clause 17, wherein the elongated, torsion-rigid, torque-transmitting element comprises only metallic or ceramic materials that do not contaminate the housing when the elongated, torsion-rigid, torque-transmitting element is exposed to scattered or direct deep ultraviolet radiation. 31. The lithographic apparatus of clause 20, wherein the elongated, torsionally stiff, torque transmission element comprises a first material and the guide comprises a second material different from the first metal. 32. An apparatus for adjusting optical components in an optical module, comprising: a bellows-type connecting element having a first end and a second end; a first coupling element mechanically coupled to the first end and adapted to provide a rotational force for adjusting the optical component; a second coupling element mechanically coupled to the second end, the second coupling element having an outer portion sized and configured to extend to an exterior of the optical module, the second coupling element being externally accessible and rotatable to apply a rotational force to the bellows-type connection element; An apparatus comprising a through-wall adjuster (TWA) comprising: 33. The apparatus of clause 32, wherein the bellows-type connecting element comprises an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation. 34. The apparatus of clause 32, further comprising a spherical bearing disposed within the second coupling element to permit rotation of the second coupling element while sealing the interior of the optical module. 35. The apparatus of clause 34, wherein the spherical bearing comprises a convex inner ring having a first contour and an outer ring having a concave inner surface with a second contour complementary to the first contour. 36. Device of clause 35, the inner ring of which comprises carbon alloy bearing steel. 37. The device of clause 35, wherein the inner ring comprises a ceramic material. 38. Device according to clause 35, the inner ring of which is made of stainless steel. 39. The apparatus of clause 35, wherein the inner ring comprises a silicon nitride-alumina composite material. 40. The device of clause 35, wherein the outer ring comprises phosphorus bronze alloy material. 41. The apparatus of clause 32, further comprising an actuator mechanically coupled to the TWA and to the optical component for converting a rotational force about a first axis from the TWA into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, the second axis being at an angle to the first axis, the actuator comprising a curved bellows-type coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis. 42. The apparatus of clause 41, wherein the curved bellows coupling element comprises an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation. 43. The device of clause 32, further comprising an actuator mechanically coupled to the TWA and to the optical component for converting a rotational force from the TWA about a first axis into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, the second axis being at an angle to the first axis, the actuator comprising a curved, torsionally stiff elongated member positioned within an arcuate channel in the guide, the torsionally stiff elongated member having a first end rotatable about the first axis and a second end rotatable about the second axis, the interior of the arcuate channel and the torsionally stiff elongated member being separated by a clearance. 44. An optical pulse stretcher including an enclosure adapted to contain a sealed and pressurized environment and including a wall; an optical component positioned within the housing, wherein at least one of a position and an orientation of the optical component is adjustable by application of a torque to the optical component in a first plane; A through-wall adjuster (TWA), a bellows-type connecting element having a first end and a second end; a first coupling element mechanically coupled to the first end and adapted to provide a rotational force for adjusting the optical component; a second coupling element mechanically coupled to the second end, the second coupling element having an outer portion sized and configured to extend to an exterior of the optical module, the second coupling element being externally accessible and rotatable to apply a rotational force to the bellows-type connection element; TWA, which has 1. A lithographic apparatus comprising: 45. The lithography apparatus of clause 44, wherein the bellows connection element comprises an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation. 46. ​​The lithographic apparatus of clause 44, wherein the TWA further comprises a spherical bearing disposed within the second coupling element to allow rotation of the second coupling element while limiting leakage of gas and radiation from within the optical module. 47. The lithographic apparatus of clause 46, wherein the spherical bearing comprises a convex inner ring having a first contour and an outer ring having a concave inner surface having a second contour complementary to the first contour. 48. The lithography apparatus of clause 47, wherein the inner ring comprises a carbon alloy bearing steel. 49. The lithography apparatus of clause 47, wherein the inner ring comprises a ceramic material. 50. The lithography apparatus of clause 47, wherein the inner ring comprises stainless steel. 51. The lithography apparatus of clause 47, wherein the inner ring comprises a silicon nitride-alumina composite material. 52. The lithography apparatus of clause 47, wherein the outer ring comprises a phosphor bronze alloy material. 53. The lithographic apparatus of clause 44, further comprising an actuator mechanically coupled to the TWA and to the optical component for converting a rotational force about a first axis from the TWA into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, the second axis being at an angle to the first axis, and the actuator including a curved bellows coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis. 54. A lithographic apparatus according to clause 53, wherein the actuator comprises a curved, torsionally stiff elongated member positioned within an arcuate channel in the guide, the torsionally stiff elongated member having a first end rotatable about a first axis and a second end rotatable about a second axis, the interior of the arcuate channel and the torsionally stiff elongated member being separated by a clearance.

[0083]

[0097] These and other embodiments are within the scope of the following claims.

Claims

1. a guide having an arcuate channel with a first channel end and a second channel end; a torsionally stiff elongated member positioned at least partially within the arcuate channel and having an arcuate configuration that matches the interior of the arcuate channel, the torsionally stiff elongated member having a first end rotatable in a first plane and a second end rotatable in a second plane substantially perpendicular to the first plane; a first mechanical coupling member coupled to the first end; a second mechanical coupling member coupled to the second end; An optical element alignment mechanism, wherein rotation of the first mechanical coupling member in the first plane causes rotation of the second coupling member in the second plane.

2. The optical element alignment mechanism of claim 1 , wherein the first mechanical coupling member comprises a receptacle member for torsional actuation.

3. The optical element alignment mechanism of claim 1 , wherein the second mechanical coupling member comprises a protrusion for torsional actuation.

4. 2. The optical alignment mechanism of claim 1, wherein said torsionally stiff elongated member comprises an electroformed bellows, said bellows being flexible in degrees of freedom other than axial rotation.

5. The optical alignment mechanism of claim 1 , wherein the torsionally stiff elongated member comprises a high strength nickel alloy.

6. 6. The optical alignment mechanism of claim 5, wherein the nickel alloy comprises copper.

7. The optical alignment mechanism of claim 5 , wherein the torsionally stiff elongated member comprises an electroformed plating.

8. The optical alignment mechanism of claim 1 , wherein the guide comprises leaded brass.

9. The optical alignment mechanism of claim 1 , wherein the guide comprises leaded bronze.

10. The optical alignment mechanism of claim 1 , wherein the guide comprises a substantially lead-free alloy.

11. 2. The optical alignment mechanism of claim 1, wherein the guide comprises a first material comprising a pure metal or a metal alloy, and the first and second mechanical coupling members comprise a second material substantially dissimilar to the first material.

12. 2. The optical element alignment mechanism of claim 1, wherein said torsionally stiff elongated member has a substantially circular cross section and said arcuate channel has a substantially semicircular cross section.

13. 2. The optical element alignment mechanism of claim 1, wherein the torsionally stiff elongated member has a length in the range of about 15 mm to about 40 mm.

14. 2. The optical element alignment mechanism of claim 1, wherein the torsionally stiff elongated member has a diameter in the range of about 5 mm to about 10 mm.

15. 10. The optical element alignment mechanism of claim 1, wherein the torsionally stiff elongated member has a radius of curvature within a range of about 10 mm to about 25 mm.

16. The optical element alignment mechanism of claim 1 , wherein the arcuate channel is open along at least a portion of the arcuate length of the arcuate channel.

17. an optical pulse stretcher including a housing adapted to contain a sealed and pressurized environment, the housing including a wall having a through-wall adjuster; an optical component positioned within the housing, wherein at least one of a position and an orientation of the optical component is adjustable by application of a torque to the optical component in a first plane; an elongated, torsionally stiff, torque transmission element disposed at least partially within the housing, the elongated, torsionally stiff, torque transmission element having a first end mechanically coupled to the optical component and a second end mechanically coupled to the through-wall adjuster, the torque transmission element being arranged such that rotation in a second plane by manipulation of the through-wall adjuster applies the torque to the optical component in the first plane, the first plane and the second plane being substantially orthogonal; 1. A lithographic apparatus comprising:

18. The lithographic apparatus of claim 17 , wherein the elongated, torsionally stiff, torque-transmitting element comprises an electroformed bellows.

19. 18. The lithographic apparatus of claim 17, wherein the elongated, torsionally stiff, torque-transmitting element comprises a bellows comprising a high strength nickel alloy.

20. 18. The lithographic apparatus of claim 17, further comprising a guide having an arcuate channel arranged to support and laterally stabilize the elongated, torsionally stiff, torque transmission element, wherein the elongated, torsionally stiff, torque transmission element comprises a nickel alloy and the guide comprises leaded brass or leaded bronze.

21. 18. The lithographic apparatus of claim 17, further comprising an arcuate channel disposed along at least a portion of the length of the elongated, torsionally stiff, torque transmission element to limit lateral movement or buckling of the elongated, torsionally stiff, torque transmission element.

22. 22. The lithographic apparatus of claim 21, wherein the arcuate channel has an open portion along at least a portion of the length of the arcuate channel.

23. 22. The lithographic apparatus of claim 21, wherein the arcuate channel and the torsionally stiff torque transmission element are sized and positioned such that the arcuate channel does not mechanically contact the torsionally stiff torque transmission element along a bellows portion of the torsionally stiff torque transmission element.

24. 22. The lithographic apparatus of claim 21 , wherein the elongated, torsionally stiff, torque transmission element has a substantially circular cross-section, and the arcuate channel has a substantially semi-circular cross-section, with a nominal clearance to the circular cross-section of the torsionally stiff, torque transmission element.

25. The lithographic apparatus of claim 17, wherein the elongated, torsionally stiff, torque transmitting element has a length in the range of about 15 mm to about 40 mm.

26. The lithographic apparatus of claim 17, wherein the elongated, torsionally stiff, torque transmitting element has a length within a diameter of about 5 mm to about 10 mm.

27. The lithographic apparatus of claim 17, wherein the elongated, torsionally stiff, torque transmitting element has a radius of curvature in a range of about 10 mm to about 25 mm.

28. 18. The lithographic apparatus of claim 17, wherein the elongated, torsionally stiff, torque transmission element comprises a torsionally stiff elongated member positioned partially within a guide having an arcuate channel, the torsionally stiff elongated member positioned to coincide with an interior of the arcuate channel, the torsionally stiff elongated member having a first end rotatable in the first plane and a second end rotatable in the second plane, the arcuate channel and the torsionally stiff elongated member being separated by a clearance.

29. 18. A lithographic apparatus according to claim 17, wherein the elongated, torsionally stiff, torque transmitting element is substantially free of any lubricant.

30. 18. The lithographic apparatus of claim 17, wherein the elongated, torsion-stiff, torque-transmitting element comprises only metallic or ceramic materials that do not contaminate the housing when the elongated, torsion-stiff, torque-transmitting element is exposed to scattered or direct deep ultraviolet radiation.

31. 21. The lithographic apparatus of claim 20, wherein the elongated, torsionally stiff, torque transmission element comprises a first material and the guide comprises a second material different from the first material.

32. 1. An apparatus for adjusting optical components in an optical module, comprising: a bellows-type connecting element having a first end and a second end; a first coupling element mechanically coupled to the first end and adapted to provide a rotational force for adjusting the optical component; a second coupling element mechanically coupled to the second end, the second coupling element having an outer portion sized and configured to extend to an exterior of the optical module, the second coupling element being externally accessible and rotatable to apply a rotational force to the bellows-type connection element; 1. An apparatus comprising a through-wall adjuster (TWA) comprising:

33. 33. The device of claim 32, wherein the bellows-type connecting element comprises an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation.

34. 33. The apparatus of claim 32, further comprising a spherical bearing disposed within the second coupling element to allow rotation of the second coupling element while sealing the interior of the optical module.

35. 35. The apparatus of claim 34, wherein the spherical bearing comprises a convex inner ring having a first contour and an outer ring having a concave inner surface having a second contour complementary to the first contour.

36. 36. The apparatus of claim 35, wherein the inner ring comprises a carbon alloy bearing steel.

37. 36. The apparatus of claim 35, wherein the inner ring comprises a ceramic material.

38. 36. The apparatus of claim 35, wherein the inner ring comprises stainless steel.

39. 36. The apparatus of claim 35, wherein the inner ring comprises a silicon nitride-alumina composite material.

40. 36. The apparatus of claim 35, wherein the outer ring comprises a phosphor bronze alloy material.

41. 33. The device of claim 32, further comprising an actuator mechanically coupled to the TWA and the optical component for converting a rotational force about a first axis from the TWA into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, the second axis being at an angle to the first axis, and the actuator comprising a curved bellows-type coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis.

42. 42. The apparatus of claim 41, wherein the curved accordion coupling element comprises an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation.

43. 33. The device of claim 32, further comprising an actuator mechanically coupled to the TWA and the optical component for converting a rotational force about a first axis from the TWA into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, wherein the second axis is at an angle to the first axis, and the actuator comprises a curved, torsionally rigid elongated member positioned within an arcuate channel in a guide, the torsionally rigid elongated member having a first end rotatable about the first axis and a second end rotatable about the second axis, and the interior of the arcuate channel and the torsionally rigid elongated member are separated by a clearance.

44. an optical pulse stretcher including an enclosure adapted to contain a sealed and pressurized environment and including a wall; an optical component positioned within the housing, wherein at least one of a position and an orientation of the optical component is adjustable by application of a torque to the optical component in a first plane; A through-wall adjuster (TWA), a bellows-type connecting element having a first end and a second end; a first coupling element mechanically coupled to the first end and adapted to provide a rotational force for adjusting the optical component; a second coupling element mechanically coupled to the second end, the second coupling element having an outer portion sized and configured to extend to an exterior of the optical module, the second coupling element being externally accessible and rotatable to apply a rotational force to the bellows-type connection element; A TWA comprising:

1. A lithographic apparatus comprising:

45. 45. The lithographic apparatus of claim 44, wherein the bellows connecting element comprises an electroformed bellows, the bellows being flexible in all degrees of freedom except axial rotation.

46. 45. The lithographic apparatus of claim 44, wherein the TWA further comprises a spherical bearing disposed within the second coupling element to allow rotation of the second coupling element while limiting leakage of gas and radiation from inside the optical module.

47. 47. The lithographic apparatus of claim 46, wherein the spherical bearing comprises a convex inner ring having a first contour and an outer ring having a concave inner surface with a second contour complementary to the first contour.

48. 48. A lithographic apparatus according to claim 47, wherein the inner ring comprises a carbon alloy bearing steel.

49. 48. The lithographic apparatus of claim 47, wherein the inner ring comprises a ceramic material.

50. 48. The lithographic apparatus of claim 47, wherein the inner ring comprises stainless steel.

51. The lithographic apparatus of claim 47, wherein the inner ring comprises a silicon nitride-alumina composite material.

52. 48. The lithographic apparatus of claim 47, wherein the outer ring comprises a phosphor bronze alloy material.

53. 45. The lithographic apparatus of claim 44, further comprising an actuator mechanically coupled to the TWA and the optical component for converting a rotational force from the TWA about a first axis into a rotational force about a second axis and for coupling the rotational force about the second axis to the optical component, wherein the second axis is at an angle to the first axis, and the actuator includes a curved bellows-type coupling element having a first end adapted to rotate about the first axis and a second end adapted to rotate about the second axis.

54. 54. The lithographic apparatus of claim 53, wherein the actuator comprises a curved, torsionally stiff elongated member positioned within an arcuate channel in a guide, the torsionally stiff elongated member having a first end rotatable about the first axis and a second end rotatable about the second axis, the interior of the arcuate channel and the torsionally stiff elongated member being separated by a clearance.

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