Systems and methods for safely storing, separating, and recycling components from exhaust gases and waste liquids

Abstract

The present invention discloses a filtering cartridge for storing and separating gases from chamber exhaust gases. The present invention further discloses a method for separating gaseous waste streams from waste liquids based on physical properties such as polarity, thermal stability, molecular weight, and size. Harmful components from the waste liquids can be safely stored and recycled, and high-pressure storage of gases is avoided; they are stored at subatmospheric pressure.

Description

[Technical Field]

[0001] FIELD OF THE INVENTION The present invention relates generally to storage and recycling systems for various fluids. More particularly, the present invention relates to systems and methods for storing waste liquids, gases, or other fluids, separating components from the mixture to recover valuable molecules from the waste stream, and delivering the separated components from the system. [Background technology]

[0002] Various industrial processes and applications, such as the production of semiconductor materials, require reliable sources of gases such as chlorine, bromine, iodine, and fluorine. Due to toxicity and safety concerns, many of these gases and compounds must be carefully stored and handled in industrial process equipment. Furthermore, cryopump assemblies within storage and delivery systems are installed to deliver gases from the system at high pressure and purity, but the sudden release of the high-pressure cylinders used to store and transport these gases poses serious dangers, even death, to assembly workers. Therefore, to avoid accidents, these gases must be stored at reduced pressure. Additionally, there are concerns about separating and recycling valuable components from waste streams. Reduced pressure storage significantly improves the safety of component storage and dispensing operations. The following prior art was referenced: US5518528A relates to an adsorption-desorption apparatus for storing and dispensing a gas selected from the group consisting of hydride gases, halide gases, and organometallic Group V gaseous compounds, in which the gas to be dispensed is adsorbed on a physical adsorbent medium and selectively dispensed by pressure differential desorption of the adsorbed gas from the adsorbent material. A cryopumped gas storage and delivery system is also disclosed for delivering high-purity gases at high pressures. This prior art can simply handle pure gases, such as hydrides, to be stored and dispensed, and does not tolerate impurities at the ppm level. US8858685B2 relates to a gas storage and distribution system using a monolithic carbon adsorbent. The pyrolytic monolithic carbon physical adsorbent is characterized by at least one of the following properties: (a) The packing density measured for arsine gas at 25°C and 650 torr pressure is greater than 400 grams of arsine per liter of adsorbent; (b) at least 30% of the total porosity of the adsorbent comprises slit-like pores having a size ranging from about 0.3 to about 0.72 nanometers, and at least 20% of the total porosity comprises micropores having a diameter of <2 nanometers; and (c) has a bulk density of about 0.80 to about 2.0 grams per cubic centimeter, preferably 0.9 to 2.0 grams per cubic centimeter; This prior art also only deals with the adsorption of specific gases and not their storage or separation from the exhaust chamber. JP5015181B2 relates to a fluid storage and dispensing system including a container for holding a fluid at a desired pressure. The container has a pressure regulator set to a predetermined pressure. The pressure regulator may be internally or externally located, single-stage or multi-stage, and is associated with a port on the container. A dispensing assembly including a flow control means, such as a valve, is placed in gas / vapor flow communication with the regulator, and opening of the valve affects the dispensing of the gas / vapor from the container. This prior art only describes controlling the flow of gas from the storage system. EP 1569738B1 relates to a fluid storage and dispensing apparatus comprising a fluid storage and dispensing vessel having an interior volume containing a physical adsorbent for adsorptively retaining a fluid thereon and from which the fluid can be desorbed for dispensing from the vessel, and a dispensing assembly coupled to the vessel for dispensing the desorbed fluid from the vessel. Although this prior art involves a physical adsorbent, it is primarily concerned with the storage and accurate dispensing of "certain" specific fluids. JP4279191B2 relates to a gas compound storage and delivery system. It is an adsorption and desorption device for storing and dispensing boron trifluoride, which is a storage and dispensing vessel that holds a solid-phase physical sorption medium having an adsorption affinity for boron trifluoride, and is constructed and arranged to selectively flow boron trifluoride into and out of the vessel. This prior art describes a storage and release system in which a laser system that utilizes a fluid as an excitation medium for stimulated luminescence is supplied with the fluid from an adsorbent-based fluid storage and dispensing system coupled in a fluid supply relationship. There are a variety of gas storage and distribution devices available, but some drawbacks are apparent. There is a need for recyclable systems and methods, particularly storage and distribution systems. There is a need for systems and methods, particularly storage and distribution systems, that can separate fluids and gases based on physical properties such as polarity, thermal stability, and molecular weight. There is a need for systems and methods, particularly storage and distribution systems, that store, separate, and safely recover gases and other valuable components from waste streams. There is a need for systems and methods, particularly storage and dispensing systems, that allow for customization of the system based on the input mixture and that allow for separation of multiple fluids. Additionally, these types of systems utilize alumina, silane, and monolithic carbon adsorbents as gas storage media, providing high surface area and resulting in greater gas adsorption. The information disclosed in the Background section of this disclosure is intended to enhance understanding of the general background of the present invention and should not be construed as an admission or in any way suggesting that this information forms prior art already known to those skilled in the art.

[0003] The primary object of the present invention is to provide a safe storage and recycling system for gases and liquid waste. Another object of the present invention is to provide a recyclable gas evacuation and drainage system configured to separate gases and components from the exhaust gas based on physical properties such as polarity, thermal stability, molecular weight, etc. Summary of the Invention

[0004] The present invention seeks to overcome the problems encountered in the prior art and discloses a recyclable system for storing mixtures of toxic liquids, gases, or other fluids, separating valuable components from the mixture, and delivering gases or clean fluids from the system. In at least one embodiment, the present invention provides an essentially recyclable storage and distribution system that can separate fluids (liquids, gases) based on the fluid's physical properties (polarity, thermal stability, dielectric constant, viscosity, surface tension, molecular weight, molecular size, etc.). In at least one embodiment of the present invention, the present invention provides a system for storing, separating, and safely recovering fluids and other valuable components from waste streams, which is customizable based on the input mixture and capable of separating multiple fluids via the process of the present invention. In at least one embodiment of the present invention, the present invention provides a recyclable gas extraction and drainage system and the ability to separate gases, water, and fluids based on physical and / or chemical properties. In another embodiment of the present invention, the present invention provides a system and method that can also separate toxic by-products from the fluid and send them for treatment. In accordance with an embodiment of the present invention, the present invention discloses a method for separating waste streams based on physical properties such as polarity, thermal stability, dielectric constant, viscosity, surface tension, molecular weight, and molecular size. In another embodiment of the present invention, the present invention discloses a safe exhaust gas storage system, in which toxic gases are safely stored and recycled. In an exemplary embodiment of the present invention, the present invention discloses a system where the apparatus for separation is in the form of a cylinder or serpentine column with loops based on the requirement. In another embodiment of the present invention, the present invention discloses a system that can use electrostatic precipitators or bulk electrolyzer based devices with a separation process based on an electrostatic charging mechanism. In yet another embodiment of the present invention, the present invention discloses a system that can be both thermal and cryogenic based on the properties of the gas being stored. In yet another embodiment of the present invention, the separation process of the present invention is based on the physical and chemical properties of the toxins. In another embodiment of the present invention, the present invention discloses a system wherein the coating of the column is selected from materials such as, but not limited to, alumina, silica, liquid silane, monolithic carbon adsorbent and combinations thereof. In yet another embodiment of the present invention, the present invention discloses a system where the input can be a gas mixture or a liquid, based on temperature and pressure. In yet another embodiment of the present invention, the present invention discloses a system wherein the mobile phase for separation of gases is selected from the group such as carrier gas, push gas, polar mobile phase for separating non-polar mixtures, and combinations thereof based on the requirement. The foregoing summary is illustrative and is not intended to be in any way limiting. In addition to the exemplary aspects, embodiments, and features described above, further aspects, embodiments, and features will become apparent by reference to the drawings and the following detailed description. According to the present invention, there is provided a system for safely storing, separating and recycling components from exhaust gases and waste liquids, said system comprising: - a storage tank configured to elute the fluid to be separated and / or purged; - a filtering cartridge fluidly coupled to said storage tank for receiving said eluted fluid to be separated and / or purged, o The filtering cartridge achieves separation and / or purging of the fluids based on polarity, thermal stability, dielectric constant, viscosity, surface tension, molecular weight, molecular size, o said filtering cartridge achieves separation and / or purging of said fluid by a process selected from the group of processes consisting of physical adsorption processes and chemical adsorption processes, The filtering cartridge comprises: - a hollow tubular casing having an inlet for receiving a fluid for separation and an outlet for discharging the separated fluid, with a molecular filter therebetween, said molecular filter defining a fluid flow path such that said eluted fluid passes through said molecular filter, said molecular filter comprising at least a substrate and at least a defined pathway lined with said substrate, said molecular filter being selected from the group of molecular filters consisting of: o Spiral pipe filled with substrate, o a substrate block with multiple internal serpentine channels; o Multiple stacked porous substrate blocks, o A plurality of spherical substrate beads, and o Porous substrate block. In at least one embodiment, the filtering cartridge inlet and the filtering cartridge outlet are coaxial with a hollow therebetween. In at least one embodiment, the spiral pipe is filled with a substrate having an internal flow path for fluid flow configured in a direction extending between the inlet and the outlet. In at least one embodiment, the substrate block has an internal flow path for fluid flow configured in a direction extending between the inlet and the outlet. In at least one embodiment, the stacked porous substrate blocks have an internal flow path for fluid flow configured in a direction extending between the inlet and the outlet. In at least one embodiment, the plurality of spherical substrate beads have an internal flow path for fluid flow configured in a direction extending between the inlet and the outlet. In at least one embodiment, the porous substrate block has an internal flow path for fluid flow configured in a direction extending between the inlet and the outlet. In at least one embodiment, the substrate comprises at least one of ceramic, carbon, polymer, and / or combinations thereof, and the substrate has a predefined pore size in the range of 1 to 60 Å, the pore size being sufficient to allow penetration of molecules of the fluid to be separated. In at least one embodiment, the substrate is an extruded ceramic matrix and / or carbon block. In at least one embodiment, the system includes a negative pressure applicator fluidly coupled to the filtering cartridge. In at least one embodiment, the system includes a carrier gas applicator in which gas is introduced from a pressurized cylinder and flow-controlled using a mass flow controller. In at least one embodiment, the substrate comprises adsorbent layers of the same or different materials packed into a column or spiral tube packed with the selected adsorbent through which fluid flows in and out. In at least one embodiment, to achieve physical adsorption, the filtering cartridge is jacketed with a heat exchanger to control the temperature of the molecular filter and, optionally, connected to a vacuum pump to regulate the pressure that facilitates fluid separation, wherein: - The gases selectively adsorb onto the molecular filter at low temperatures and desorb at high temperatures; and the gases desorb with a change in pressure or increasing negative pressure at the outlet. In at least one embodiment, to achieve chemisorption, the filtering cartridge includes active molecules injected onto a molecular filter to assist in chemisorption reactions for gas separation, the active molecules adapted to undergo chemisorption-type reactions with unwanted exhaust gases to allow recycling of the remaining unadsorbed gases. In at least one embodiment, a carrier gas applicator is fluidly coupled to the filtering cartridge, wherein the molecular filter is polar in nature and the carrier gas is non-polar in nature. In at least one embodiment, the substrate is at least one of an inorganic metal oxide, nitride, carbide material, carbon, polymeric material, metal oxide or advanced carbon material such as zeolite or alumina beads, or polymeric material such as polyacrylate-polyalcohol beads, polydimethylsiloxane beads, poly(methyl methacrylate) microspheres (PMMA), divinylbenzene beads, polyethylene glycol granules or polyethylene glycol (PEG), and combinations thereof. In at least one embodiment, to achieve chemisorption, the filtering cartridge (600) includes active molecules injected onto the molecular filter to aid in the chemisorption reaction for gas separation, the active molecules being adapted to undergo a chemisorption-type reaction with the exhaust gas to allow for the recycling of unadsorbed gas, the active molecules being at least one of oxidizing agents such as thiosulfate, permanganate, phosphoric acid, ferrous sulfate, metal hydroxides, iodides, bicarbonates, amines, and certain metal oxides such as calcium oxide, and combinations thereof. In at least one embodiment - the substrate is packed into a helical pipe passing between an inlet and an outlet, the helical pipe or flow path allowing for maximum flow path of the fluids for separation; and - The substrate is solid filled or lined with a liquid and a porous matrix. In at least one embodiment - the substrate is in the form of a block having a plurality of serpentine hollow passages formed therein; - each of said serpentine paths is configured as a longitudinal flow path made up of different sections that are connected to one another but arranged in a staggered pattern to form a plurality of parallel-running gas flow paths; and - Each staggered section is connected to the section preceding it and the section following it. In at least one embodiment - the substrate comprises a plurality of porous substrate blocks stacked on one another and adapted to be disposed in a stacked manner within the hollow casing; and The gas flow passages defined by the pores of each of the porous substrate blocks are interconnected when the blocks are stacked and extend between the inlet and outlet of the hollow casing. In at least one embodiment The substrate is configured in the form of a plurality of spherical beads packed within the hollow casing to extend between the inlet and the outlet, the beads being made of ceramic and / or carbon and of different sizes to have a high surface area and increase packing density, and functioning for fluid storage and separation. In at least one embodiment - the substrate is a porous substrate block having internal hollow channels configured to allow gas to pass therethrough, the porous substrate block being adapted to be placed within the hollow casing such that the internal hollow channels extend in a direction from the inlet towards the outlet, such that gas entering the inlet enters the internal hollow channels and an adsorption process occurs as the gas travels towards the outlet. [Brief explanation of the drawings]

[0005] It should be noted, however, that the accompanying drawings illustrate only typical embodiments of the present invention and are therefore not to be considered limiting of its scope, as the present invention may admit of other equally effective embodiments. The detailed description will be described with reference to the accompanying drawings, in which the leftmost digit(s) of a reference number identifies the figure in which the reference number first appears. The same numbers are used throughout the figures to refer to like features and components. Some embodiments of systems or methods according to embodiments of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which: FIG. 1 is a perspective view illustrating a gas storage and recycle system for process gas effluent separation and purification according to one embodiment of the present invention; FIG. 2A illustrates a gas storage and recycling system according to an embodiment of the present invention; and FIG. 2B is a flow diagram of a method of using the gas storage and recycling system of FIG. 2B in accordance with one embodiment of the present invention; and 3A, 3B, 3C, 3D, and 3E show different embodiments of the substrate within the filtering cartridge of the system of FIG. 2A. The figures depict embodiments of the present invention for purposes of example only. Those skilled in the art will readily recognize from the following description that alternative embodiments of the structures and methods illustrated herein may be employed without departing from the principles of the disclosure set forth herein. Detailed Description of the Accompanying Drawings

[0006] While embodiments of the present disclosure are amenable to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and described below. It is to be understood, however, that it is not intended to limit the disclosure to the particular forms disclosed, but on the contrary, the disclosure is intended to cover all modifications, equivalents, and alternatives falling within the scope of the present disclosure. Moreover, the phraseology and terminology employed herein is for the purpose of description only and not of limitation. As used in this disclosure, the terms "comprises," "comprising," or other variations thereof are intended to cover a non-exclusive inclusion, such that a device, apparatus, system, assembly, or method consisting of a list of components or a sequence of steps does not include only those components or steps, but may include other components or steps not expressly listed or inherent in such device, assembly, or apparatus. In other words, one or more elements or steps in a system or apparatus or process preceded by "comprises...a" or "comprising...of" does not, without more constraints, exclude the presence of other elements or additional elements or steps in the system or apparatus or process, as the case may be. In accordance with the present invention, a system and method are provided for safely storing, separating, and recycling components from emissions and waste liquids. A primary object of the present invention is to provide a recyclable system and method for storing toxic liquid, gas, and / or fluid mixtures, separating the liquid, gas, and / or fluid from the mixture, and delivering the liquid, gas, and / or fluid from the system and method. Please refer to FIG. 1, which shows a perspective view of a gas storage and recycling system for separation and purification of process gas effluent, according to an embodiment of the present invention. Step 101: A mixed fluid is provided from a process chamber. Step 500: In the process, a mixture of unused process fluids and by-products is eluted from a storage and separation chamber. The chamber can be in the form of a cylinder or spiral pipe assembly (500a), where the toxins are temporarily "concentrated" in the cylinder or spiral pipe assembly, and the "filtered gas or effluent" is sent for reuse or discharge. Once the toxins have concentrated to a predetermined threshold, negative pressure (500b) and elevated temperature are then applied to the cylinder or spiral pipe assembly. Alternatively, a suitable push gas eluent (500c) is introduced. Steps 501a, 501b, 501c: Toxins and / or unused process molecules come out in "chunks" or "blocks" when detected by the detector (500d). In these atmospheric pressure chambers, the main interactions are adsorption, absorption, and selective elution. FIG. 2A is a diagram illustrating a gas storage and recycling system according to an embodiment of the present invention. FIG. 2B is a flow diagram of a method and use of the gas storage and recycling and system of FIG. 2B, according to an embodiment of the present invention. In one embodiment, the present invention discloses a system and method for removing dust and solid deposits by installing an electrostatic precipitator, such as an air filter or a HEPA filter, in step 201 . Additionally, step 202 causes a waste mixture of unused process gases and by-products to flow from the process chamber (500a) into a storage tank. As in step 203, in the storage tank, the storage can be in the form of a chamber or directly stored in a column. As shown in FIG. 2A, the filtering cartridge (600) is fluidly coupled to a storage tank to receive the fluid mixture to be separated. The filtering cartridge (600), which forms the inventive concept of the present invention, is further described in the following paragraphs. Furthermore, as shown in FIG. 2B, the gas mixture in the exhaust gas is separated in the filtering cartridge (600) based on changes in polarity, thermal stability, dielectric constant, viscosity, surface tension, molecular weight, molecular size, and other properties of the fluids through a process of physical or chemical adsorption, depending on the type of fluid in the exhaust gas being separated. The separated fluids are stored in a storage tank or external cylinder (500f) for further use or returned to the process chamber. In another embodiment, according to step 204, the mobile phase for gas separation is selected based on requirements from a group such as carrier gas, push gas, polar mobile phase for separating non-polar and polar mixtures, and combinations thereof. The amount of carrier gas that purges the analytes through one gram of sorbent at a specific temperature is called the breakthrough volume. Breakthrough volume data is important to ensure that the analytes of interest are not purged from the storage bed during toxin collection, but only during dispensing. In one embodiment, separation of the effluent is based on a change in temperature: as the temperature increases, the physical and chemical properties of water favor the separation of dissolved and dispersed components. In one embodiment, separation is based on changes in polarity, dielectric constant, viscosity, surface tension, and many other properties, including the solubility of analytes that are insoluble in these highly polar solvents at room temperature. In one embodiment, the storage medium must have suitable properties such as aqueous stability, thermal stability, selectivity for mixtures of compounds with different polarities, etc. In one embodiment, a number of storage and separation media based on silica, carbon, polymers or metal oxides can be used in the process of the present invention. Step 205: In one embodiment, a separator column is used to separate the gaseous mixture into components. Step 206: In one embodiment, the separated fluids are eluted in "chunks" or "blocks" based on retention time. The fluid "blocks" can be further stored. Optionally, a detector (500d) is used for gas identification and quantification. 3A, 3B, 3C, 3D, and 3E show different embodiments of the substrate within the filter cartridge of the system of FIG. 2A. See Figure 3, which shows the product evolution in a storage and separation tank / chamber with adsorbent layers of the same or different material packed into columns or spiral tubes packed with the selected adsorbent, through which the gas flows in and out. The adsorbent may be packed in bulk or coated onto a column. a) An extruded ceramic and / or carbon block component with a serpentine path within the storage and separation tank / chamber. Fluid passes through the ceramic matrix and is adsorbed and retained by the ceramic block. This construction dramatically increases the path length of the incoming fluid, optimizing eluent retention time. High molecular weight and covalently bound components take longer to elute when push gas or negative pressure is applied. The special construction allows for maximum gas retention and concentration in a small overall chamber volume. Similarly, molecules can be separated based on pore size. b) Helical (hollow or solid) pipes or channels allow for maximum flow path for the gas mixture for separation within the tank / chamber. Here, hollow or solid pipes are packed or lined with an adsorbent that aids in the separation of the gas components. By helicalizing the pipes, the overall volume and space required for the chamber is managed. As the fluid mixture passes through the solid-packed or lined liquid and porous matrix, it is forced to traverse a long path length, effectively adsorbing, concentrating, and separating the contaminants. c) Thin porous carbon or ceramic laminated blocks for storing and separating gases in a tank / chamber. In this case, the materials are stacked in thin strips, which can be the same or different materials, allowing for good separation of fluids at interfaces or solid blocks. Fluid flow benefits from interfaces where maximum adsorption occurs at the edge sites, and the structural materials can be varied and customized to separate and store gas streams. d) Blocks packed with high surface area ceramic or carbon spheres of different sizes to increase packing density and act as storage and separation tanks / chambers. The spaces between the spheres and the surfaces of the spheres provide very high partitioning of fluids, allowing for efficient separation. These act as active sites for chemisorption of fluids at low temperatures, which are then released, for example, by temperature-programmed desorption at higher temperatures. This material has a flow rate of 10 STP cm per gram. 3It can adsorb more than 1000 sq ft of dry CO2 and can be regenerated by heating. This material can be used, for example, as a scrubber for carbon dioxide from industrial gas streams. The porous block defines flow paths for inlet and outlet gases within the storage and separation tank / chamber; contaminants are trapped in the ceramic layer where adsorption occurs, and the purified fluid is collected from the outer wall of the chamber. This is a very unique design; fluids are forced into the block using pressure, where they are concentrated and separated. This process can be regulated not only by pressure but also by temperature. It is also possible to use liquids for separation; in this case, the temperature of the water must be increased due to the reduced polarity of water. The filtering cartridge (600) will now be described in detail in conjunction with Figures 3(a) to 3(e) of the accompanying drawings. According to an embodiment of the present invention, as shown in Figure 3(a), the filtering cartridge (600) includes a hollow tubular casing (505) having an inlet (510) for receiving a fluid for separation and an outlet (515) for discharging the separated fluid. The inlet (510) and the outlet (515) are coaxial with a hollow space therebetween. The filtering cartridge (600) further includes at least one molecular filter (600) disposed within the hollow tubular casing (505) between the inlet (510) and the outlet (515), forming a gas flow path through the at least one molecular filter (600). Different configurations of the gas flow path are contemplated, and according to different embodiments of the molecular filter (600), the gas flow path may be configured as any of the following: - A spiral pipe filled with the substrate (shown in Figure 3(a)), - a substrate block with multiple meandering paths inside (shown in Figure 3(b)), - Multiple stacked porous substrate blocks (shown in Figure 3(c)), - a plurality of spherical substrate beads (shown in Figure 3(d)), and - Porous substrate blocks (shown in Figure 3(e)), each having internal flow channels configured in a direction extending between an inlet (510) and an outlet (515). The rationale for each is as follows: [Table 2] Typically, the molecular filter (600) is made from a high surface area substrate comprising at least one of ceramic, carbon, polymer, and / or combinations thereof, where the substrate has a predefined pore size. In at least one embodiment of the present invention, the predefined pore size is sufficient to allow the entry of gas molecules to be separated. Furthermore, the size of the molecular filter ranges from 1 to 60 Å. Furthermore, the substrate of the molecular filter is an extruded ceramic and / or carbon block with flow channels formed into it, creating a tortuous and / or long flow path so that fluid passes through the ceramic matrix and is adsorbed and retained by the ceramic block. This structure significantly increases the flow path length of the inlet fluid, optimizing the retention time of the effluent. High molecular weight components and covalently bonded components take longer to elute when push gas or negative pressure is applied. The special structure allows for maximum retention and concentration of gas in a small overall volume chamber. Similarly, molecules can also be separated based on pore size. In at least one embodiment of the present invention, the molecular filter in the filtering cartridge has adsorbent layers of the same or different materials packed into a column or spiral tube filled with the selected adsorbent through which gas flows in and out. The adsorbent may be packed in bulk or coated onto a column. As explained above, the purpose of configuring the gas flow channels is to provide a long path for gas to flow for interaction with different adsorption media to enable gas separation. As is evident from the different embodiments, the gas flow channels can be configured as serpentine (Figure 3b), spiral (Figure 3a), or with multiple adsorption layers (Figure 3c) to enable effective absorption. In one embodiment of the present invention, the adsorption process for separating gases is physisorption or chemisorption depending on the type of gas in the exhaust gas to be separated. For separation by the physical adsorption process, the cartridge is jacketed with a heat exchanger, which controls the temperature of the molecular filter, and is optionally connected to a vacuum pump to adjust the pressure at which the gas can be separated. Generally, gases selectively adsorb onto the molecular filter at low temperatures and desorb at high temperatures. Similarly, they tend to desorb when the pressure changes or when the negative pressure at the outlet increases. For separation by a chemisorption process, the filtering cartridge (600) optionally includes active molecules injected onto the molecular filter (600) to aid in the chemisorption reaction for separation of the gases. The active molecules are adapted to undergo a chemisorption-type reaction with the exhaust gases so that the unadsorbed gases can be recycled to the process chamber. Typically, a carrier gas applicator (500c) is fluidly coupled to the filtering cartridge (600). The carrier gas improves desorption of adsorbed components. The molecular filter can be polar and the carrier gas (if used) can be non-polar. Polar molecules bind better to the molecular filter, so polar molecules from the exhaust gas are eluted last. If the molecular filter is non-polar and the carrier gas (if used) is polar, non-polar (hydrophobic) molecules tend to adsorb to the molecular filter, and polar gas molecules are eluted first. In one embodiment of the present invention, the hollow casing is typically made from an inert material such as stainless steel, fiber-reinforced composites, plastics, and combinations thereof. For certain corrosive gases, such as those containing fluorine, the cartridge may be lined with plastic or FRC. Furthermore, in another embodiment of the present invention, the substrate of the molecular filter (600) is at least one of inorganic metal oxides, nitrides, carbide materials, carbon, polymeric materials, zeolites, metal oxides such as alumina beads, or advanced carbon materials, or polymeric materials such as polyacrylate-polyalcohol beads, polydimethylsiloxane beads, poly(methyl methacrylate) microspheres (PMMA), divinylbenzene beads, polyethylene glycol granules or polyethylene glycol (PEG), and combinations thereof. In yet another embodiment of the present invention, the active molecules injected onto the molecular filter (600) are at least one of oxidizers such as thiosulfate, permanganate, phosphate, ferrous sulfate, metal hydroxides, iodides, bicarbonates, amines, and certain metal oxides such as calcium oxide, and combinations thereof. The present invention contemplates that the length of the gas flow path can be selectively varied depending on the gas separation requirements, i.e., different substrates can be selected within the molecular filter depending on the type of gas being separated. In particular, as shown in Figure 3(a), the substrate can be packed into a spiral pipe (520) passing between an inlet (510) and an outlet (515). The spiral pipe or channel allows for maximum flow path for the gas mixture for separation. The hollow and solid pipes are filled or lined with adsorbents to aid in the separation of the gas components. The advantage of using a spiral pipe is that the overall volume and space required to contain the chamber are controlled. As the fluid mixture passes through the solid-filled or lined liquid and porous matrix, it is forced to traverse a long path length, effectively adsorbing, concentrating, and separating contaminants. The substrate can be packed and packed into the spiral pipe to allow unlimited flow of the gas mixture through the spiral pipe. As the wastewater or gas mixture passes through the spiral pipe, it interacts with and is adsorbed by the packed substrate. In particular, as shown in FIG. 3(b), the substrate is in the form of a block (523) having a plurality of internal serpentine hollow passages (525, 530, 535) configured therein. Each serpentine passage (525, 530, 535) is configured as a longitudinal flow path made up of distinct, connected but staggered sections (525a, 525b, 525c) to form a plurality of parallel gas flow paths. Each staggered section (525a, 525b, 525c) is connected to the preceding and succeeding sections. For example, the first staggered section (525b) is connected to the second preceding staggered section (525a) and the third succeeding staggered section (525c). Furthermore, the block 523 is adapted to be disposed within the hollow casing (505) in such a way that each of the serpentine paths (525, 530, 535) extends from the inlet (510) towards the outlet (515), and when the gas mixture enters the inlet (510), it passes through the staggered section of each of the serpentine hollow paths (525, 530, 535) to interact with the substrate, resulting in the process of adsorption. In particular, as shown in FIG. 3(c), gas flow paths can be configured using multiple porous substrate blocks (540, 545, 550) stacked on top of one another and adapted to be arranged in a stacked manner within the hollow casing (505). In this embodiment, the gas flow paths are configured by the pores of each of the porous substrate blocks (540, 545, 550) interconnecting when the blocks are stacked together, extending between the inlet (510) and outlet (515) of the hollow casing (505). In one embodiment, the substrate blocks (540, 545, 550) can be porous carbon and / or ceramic, and the substrates can be stacked in thin strips, which can be the same or different materials to allow for good partitioning of fluids across the interfaces and solid blocks. Fluid flow benefits from interfaces where maximum adsorption occurs at edge sites, and the structural materials can be varied and customized to separate and store gas streams. In particular, as shown in Figure 3(d), the substrate is configured in the form of a plurality of spherical beads (555, 560) packed within a hollow casing (505) extending between an inlet (510) and an outlet (515). The beads (555, 560) may be of different sizes and made of ceramic and / or carbon, with a high surface area to increase packing density and function for gas storage and separation. The sphere surfaces and the spaces between them provide a very high portioning of fluids, resulting in efficient separation. These serve as active sites for chemisorption of fluids at low temperatures, which are then released by temperature-programmed desorption at higher temperatures. For example, molecular filters can be used with a flow rate of 10 STP cm per gram. 3 It can adsorb more than 10 ... In particular, as shown in FIG. 3(e), the gas flow path can be constructed using a separate porous substrate block (565) having internal hollow channels (570, 575) configured to allow gas to pass therethrough. The porous substrate block (565) is adapted to be positioned within the hollow casing (505) so that the internal hollow channels (570, 575) extend from the inlet (510) toward the outlet (515). Gas entering the inlet (505) enters the internal hollow channels (570, 575), where an adsorption process occurs as the gas moves toward the outlet (515). The substrate block can also be made of ceramic, such that contaminants are captured in the ceramic layer where adsorption occurs, and the purified fluid is collected from the outer wall of the chamber. This is a highly unique design, as fluids are forced through the block using pressure to concentrate and separate. In one embodiment of the method implemented in the system for gas separation, an air filter such as a HEPA filter or an electrostatic precipitator is installed to remove dust and solid deposits. Furthermore, a waste mixture consisting of unused process gas and by-products flows from the process chamber (500a) into a storage tank. The storage tank stores the mixture in the form of a chamber or directly in a column. A filtering cartridge (600) fluidly coupled to the storage tank receives the mixture of gases to be separated through an inlet (510). Furthermore, the mixture of gases in the exhaust gas is separated through the molecular filter of the filtering cartridge, which separates the gases based on changes in polarity, dielectric constant, viscosity, surface tension, and other properties of the gases through physical or chemical adsorption processes, depending on the type of gas in the exhaust gas to be separated. The molecular filter of the filtering cartridge is a column or spiral tube filled with a selected adsorbent, with adsorbent layers of the same or different materials packed into it, through which the gases flow in and out. The adsorbent may be packed in bulk or coated on a column. The separated gas is stored in a storage tank or eluted from the outlet (515) and stored in an external cylinder (115) for further use or sent back to the process chamber. In one embodiment, the storage and separation chambers in the system can have different combinations for gas separation and storage as required. In one embodiment of the present invention, the invention relates to providing a recyclable fluidic system capable of separating toxins based on physical properties. Molecules of interest in this invention can be separated from waste liquids by increasing the temperature of the water, which results in a decrease in the polarity of the water, which in turn may result in tunable parameters such as the dielectric constant, surface tension, viscosity, etc., which decrease with increasing water temperature, resulting in better separation. According to an embodiment of the present invention, the present invention discloses a method for separating gases based on their physical properties such as polarity, thermal stability, molecular weight, etc. According to an embodiment of the present invention, the present invention discloses a system for safely storing exhaust gases, in which harmful components are safely stored and recycled. High pressure storage of gases is avoided and they are stored at sub-atmospheric pressure. In an exemplary embodiment of the present invention, the present invention discloses a system where the apparatus for separation is in the form of a cylinder or serpentine column with loops based on the requirement. According to an embodiment of the present invention, the present invention discloses a system capable of entry devices based on electrostatic precipitators or bulk electrolyzers with a separation process based on a charge separation mechanism. According to an embodiment of the present invention, the present invention discloses a system that can be both thermal and cryogenic based on the properties of the gas being stored. According to an embodiment of the present invention, the separation process of the present invention is based on physical and chemical properties. According to embodiments of the present invention, the present invention provides a system for the safe storage, separation and dispersion of gas and fluid effluents, which is customizable based on the input mixture and is capable of separating multiple gases via the process of the present invention. In accordance with an embodiment of the present invention, the present invention discloses a system in which the coating of the column is selected from materials such as, but not limited to, alumina, silica, liquid silane, monolithic carbon adsorbent, molecular sieves, and combinations thereof. According to an embodiment of the present invention, the present invention discloses a system in which the input can be a gas mixture or even a liquid, based on temperature and pressure. According to an embodiment of the present invention, the present invention discloses a method wherein the mobile phase for separation of gases is selected from the group such as carrier gas, push gas, polar mobile phase for separating non-polar mixtures and polar mixtures, and combinations thereof based on the requirement. In one embodiment, separation is based on increasing temperature, as the physical and chemical properties of water favor separation of dissolved and dispersed components as the temperature increases. In one embodiment, separation is based on changes in polarity, dielectric constant, viscosity, surface tension, and many other properties, including changes in the solubility of analytes that are insoluble in these highly polar solvents at room temperature. In one embodiment, the storage medium must have suitable properties such as aqueous stability, thermal stability, selectivity for mixtures of compounds with different polarities, etc. In one embodiment, a number of storage and separation media based on silica, carbon, polymers or metal oxides can be used. In one embodiment, the addition of an acid or pH adjusting compound to the mobile phase may aid in the selective separation and recycling of components (Figures 1 and 2). The amount of carrier gas required to purge an analyte through one gram of sorbent at a specific temperature is called the breakthrough volume. Breakthrough volume data is important to ensure that the analyte of interest is not purged from the storage bed during toxin collection, but only during dispensing. This data can also be used to remove light volatiles, such as solvents, that have entrained in the sorbent. Example 1: In a system with a breakthrough rate of 1.0 liter per gram, toxins should not be purged with more than 500 mL of gas during storage. Briefly, breakthrough volume is defined as the calculated volume of carrier gas per gram of adsorbent resin that causes analyte molecules to migrate from the front to the back of the adsorbent bed. The term "breakthrough volume" is also known as retention volume or specific retention volume. Breakthrough volume is typically expressed in liters per gram. While retention times depend on system parameters, retention times for an example gas mixture are shown here (Table 1) to illustrate how separation occurs for compounds with different polarities. [Table 1] The filter used was a Type 3c filter, which uses an extruded block of advanced carbon adsorbent material, which allows lighter hydrocarbons to elute faster than bulkier hydrocarbons. Example 2: Another example of filter 3d uses a granular adsorbent made of a polymer of poly(styrene-co-divinylbenzene) where the separation of molecules is based on hydrophobic interactions. In an experiment conducted to obtain pure fluorine gas, it was necessary to remove small amounts of metal and organic impurities. Technical Advantages

[0007] In accordance with the advantages of the present invention over existing scrubbers, the present invention represents a major change in the field of safe storage of exhaust gases and separation of gases from gas mixtures. The present invention comprises a storage chamber with a high surface area coating material selected from the group consisting of activated carbon, silica, alumina, other metal oxides, and combinations thereof for safe storage and minimal waste. The substrate may be coated with an active material such as an inorganic salt based on the selective removal of fluid. Furthermore, gases in the process chamber are very expensive and therefore wasteful, but can be recovered using the system of the present invention, addressing the waste issue. Furthermore, carbon can be added to provide mechanical stability to the material. Advantages of the present invention: - Recover unused process gases and by-products. - Refining emissions into pure process gases that can be reused, reducing emissions. The technical advantages of this invention are as follows: The present invention provides recyclable storage and distribution systems that can separate fluids and gases based on physical properties such as polarity, thermal stability, and molecular weight. Thus, the present invention provides a system for storing, separating, and safely recovering gases and other valuable components from waste streams, which is customizable based on the input mixture, and which allows for the separation of multiple fluids by the process of the present invention. It will be further understood that the functions or structures of multiple components or steps may be combined into a single component or step, or that the functions or structures of a single step or component may be divided into multiple steps or components. The present invention contemplates all such combinations. Unless otherwise stated, the dimensions and shapes of the various structures depicted herein are not intended to limit the invention, and other dimensions and shapes are possible. Additionally, while a feature of the invention may be described in the context of only one of the illustrated embodiments, such feature may be combined with one or more other features of other embodiments for any given application. It will also be understood from the above that the creation of the unique structures herein and their operation also constitute methods in accordance with the invention. The invention also encompasses intermediate and final products resulting from the practice of the methods herein. The use of "comprising" or "including" also contemplates embodiments that "consist essentially" or "consist of" the referenced features. While embodiments of the present invention have been described in terms that specify structural features, it should be understood that the invention is not necessarily limited to the particular features described. Rather, the specific features and methods are disclosed as embodiments for the present invention. Numerous modifications and adaptations of the systems / components of the present invention will be apparent to those skilled in the art, and it is therefore intended by the appended claims to cover all such modifications and adaptations that fall within the scope of the present invention.

Claims

1. A system for safely storing, separating and recycling components from exhaust gases and waste liquids, comprising: a storage tank configured to elute the fluid to be separated and / or purged; - a filtering cartridge (600) fluidly coupled to said storage tank for receiving said eluted fluid to be separated and / or purged; o said filtering cartridge (600) achieves separation and / or purging of said fluids based on polarity, thermal stability, dielectric constant, viscosity, surface tension, molecular weight, molecular size; the filtering cartridge (600) achieves separation and / or purging of the fluid by a process selected from the group consisting of physical adsorption processes and chemical adsorption processes; The filling cartridge (600) - a hollow tubular casing (505) having an inlet (510) for receiving a fluid for separation and an outlet (515) for discharging the separated fluid, with a molecular filter (600) therebetween, said molecular filter (600) defining a fluid flow path for said eluted fluid to pass through said molecular filter (600), said molecular filter comprising at least a substrate and at least a defined pathway aligned with said substrate, said molecular filter being selected from the group of molecular filters consisting of: o Spiral pipe filled with substrate (Fig. 3a), o Substrate blocks with multiple internal meandering paths (Fig. 3b), o Multiple stacked porous substrate blocks (Fig. 3c), o Multiple spherical substrate beads (Figure 3d), and o Porous substrate block (Fig. 3e).

2. 2. The system of claim 1, wherein the inlet (510) of the filtering cartridge (600) and the outlet (515) of the filtering cartridge (600) are coaxial with a hollow therebetween.

3. 2. The system of claim 1, wherein the spiral pipe (FIG. 3a) is filled with a substrate having internal flow paths for fluid flow configured in a direction extending between the inlet (510) and the outlet (515).

4. 2. The system of claim 1, wherein the block of substrate (FIG. 3b) has an internal flow path for fluid flow configured in a direction extending between the inlet (510) and the outlet (515).

5. 10. The system of claim 1, wherein the stacked plurality of (FIG. 3c) porous substrate blocks have internal flow paths for fluid flow configured in a direction extending between the inlet (510) and the outlet (515).

6. 2. The system of claim 1, wherein the plurality of (FIG. 3d) spherical substrate beads have internal flow paths for fluid flow configured in a direction extending between the inlet (510) and the outlet (515).

7. 10. The system of claim 1, wherein the porous substrate block (FIG. 3e) has internal fluid flow paths configured in a direction extending between the inlet (510) and the outlet (515).

8. 10. The system of claim 1, wherein the substrate comprises at least one of ceramic, carbon, polymer, and / or combinations thereof, and the substrate has a predefined pore size in the range of 1 to 60 Å, the pore size being sufficient to allow penetration of molecules of a fluid to be separated.

9. 10. The system of claim 1, wherein the substrate is an extruded ceramic matrix and / or carbon block.

10. 10. The system of claim 1, wherein the system includes a negative pressure applicator fluidly coupled to the filtering cartridge (600).

11. 10. The system of claim 1, further comprising a carrier gas applicator (500c) in which gas is introduced from a pressurized cylinder and flow-controlled using a mass flow controller.

12. 10. The system of claim 1, wherein the substrate comprises adsorbent layers of the same or different materials packed into a column or spiral tube packed with the selected adsorbent through which fluid flows in and out.

13. 10. The system of claim 1, wherein, to achieve physical adsorption, the filtering cartridge (600) is jacketed with a heat exchanger to control the temperature of the molecular filter, and optionally connected to a vacuum pump to regulate the pressure that facilitates fluid separation; - The gases selectively adsorb onto the molecular filter at low temperatures and desorb at high temperatures; and the gases desorb with a change in pressure or increasing negative pressure at the outlet.

14. 10. The system of claim 1, wherein to achieve chemical adsorption, the filtering cartridge (600) includes active molecules injected onto a molecular filter (600) to assist in chemical adsorption reactions for gas separation, the active molecules adapted to undergo chemical adsorption-type reactions with unwanted exhaust gases to allow recycling of remaining unadsorbed gases.

15. 10. The system of claim 1, wherein a carrier gas applicator (500c) is fluidly coupled to the filtering cartridge (600), wherein the molecular filter (600) is polar and the carrier gas is non-polar.

16. 10. The system of claim 1, wherein the substrate is at least one of an inorganic metal oxide, a nitride, a carbide material, carbon, a polymeric material, a metal oxide such as a zeolite or alumina bead, or an advanced carbon material, or a polymeric material such as polyacrylate-polyalcohol beads, polydimethylsiloxane beads, poly(methyl methacrylate) microspheres (PMMA), divinylbenzene beads, polyethylene glycol granules or polyethylene glycol (PEG), and combinations thereof.

17. 10. The system of claim 1, wherein to achieve chemical adsorption, the filtering cartridge (600) includes active molecules injected onto the molecular filter (600) to aid in chemical adsorption reactions for gas separation, the active molecules being adapted to undergo chemical adsorption-type reactions with the exhaust gas to allow recycling of unadsorbed gas, the active molecules being at least one of oxidizers such as thiosulfate, permanganate, phosphoric acid, ferrous sulfate, metal hydroxides, iodides, bicarbonates, amines, and certain metal oxides such as calcium oxide, and combinations thereof.

18. 10. The system of claim 1, - the substrate is packed into a helical pipe (520) passing between an inlet (510) and an outlet (515), the helical pipe or channel allowing maximum flow path of the fluids for separation; and - The substrate is solid filled or lined with a liquid and a porous matrix.

19. 10. The system of claim 1, - the substrate is in the form of a block (523) having a plurality of serpentine hollow passages (525, 530, 535) arranged therein; - each of said serpentine paths (525, 530, 535) is configured as a longitudinal flow path made up of different sections (525a, 525b, 525c) that are connected to one another but arranged in a staggered pattern to form a plurality of parallel-running gas flow paths; and Each staggered section (525a, 525b, 525c) is connected to the section preceding it and the section following it.

20. 10. The system of claim 1, - the substrate comprises a plurality of porous substrate blocks (540, 545, 550) stacked on top of one another and adapted to be arranged in a stacked manner within the hollow casing (505); and - the gas flow paths defined by the pores of each of the porous substrate blocks (540, 545, 550) are interconnected when the blocks are stacked on top of each other and extend between the inlet (510) and outlet (515) of the hollow casing (505).

21. 10. The system of claim 1, - the substrate is configured in the form of a plurality of spherical beads (555, 560) packed in a hollow casing (505) extending between an inlet (510) and an outlet (515), the beads (555, 560) having a high surface area and made of ceramic and / or carbon of different sizes to increase packing density, and functioning for fluid storage and separation.

22. 10. The system of claim 1, - said substrate is a porous substrate block (565) having internal hollow channels (570, 575) configured to allow gas to pass therethrough, said porous substrate block (565) adapted to be placed within a hollow casing such that the internal hollow channels (570, 575) extend in a direction from the inlet (510) towards the outlet (515), such that gas entering at the inlet (505) enters the internal hollow channels (570, 575) and an adsorption process occurs as the gas travels towards the outlet (515).

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