Fine metal mask that prevents deformation defects and removes protruding residues, and its manufacturing method

Abstract

This invention discloses a fine metal mask that prevents deformation defects and removes protruding residue by cutting the area between the short side of the mask sheet portion and the mask scrap portion using a laser cutting method, thereby not only preventing deformation defects in the mask sheet portion but also improving product quality by removing residue from the protruding portions of the mask sheet portion.

Description

[Technical Field]

[0001] The present invention relates to a fine metal mask that prevents deformation defects and removes protruding residue, and a manufacturing method thereof. More specifically, the present invention relates to a fine metal mask that prevents deformation defects and removes protruding residue, and a manufacturing method thereof, in which the area between the short side of the mask sheet portion and the mask scrap portion is cut using a laser cutting method, which not only prevents deformation defects in the mask sheet portion, but also removes protruding residue from the mask sheet portion, thereby improving product quality. [Background technology]

[0002] Display devices are generally used in a variety of devices, including not only small devices such as smartphones and tablet PCs, but also large devices such as TVs, monitors, and public displays (PDs).

[0003] In recent years, there has been an increasing demand for ultra-high resolution (UHD) displays with a pixel per inch (PPI) of 500 or more, and high-resolution display devices are being applied to both small and large devices. As a result, there has been growing interest in technologies that can realize low power consumption and high resolution.

[0004] Commonly used display devices can be broadly classified into LCDs (Liquid Crystal Displays) and OLEDs (Organic Light Emitting Diodes) depending on their driving methods. LCDs are display devices that use liquid crystals (LCDs) and have a structure in which a light source, such as a CCFL (Cold Cathode Fluorescent Lamp) or an LED (Light Emitting Diode), is placed below the LCDs. LCDs are display devices that use liquid crystals placed above the light sources to adjust the amount of light emitted from the light sources.

[0005] On the other hand, OLED is a display device driven by organic materials, which does not require a separate light source, and the organic materials themselves act as a light source, allowing it to be driven with low power. OLED can also express an infinite contrast ratio, has a response speed about 1,000 times faster than LCD, and has a superior viewing angle, making it a display device that can replace LCD.

[0006] In particular, organic materials contained in the light-emitting layer of an OLED display device can be deposited on a substrate using a fine metal mask (FMM), and the deposited organic materials can be formed into patterns corresponding to the mask pattern holes formed in the fine metal mask to function as pixels.

[0007] In conventional fine metal masks, a trim line is formed along with a cutting line during the process of forming mask panel holes in a mask sheet, and then the mask scrap is removed from the mask sheet by an operator removing the mask scrap via the trim line.

[0008] However, conventional fine metal masks have a problem in that the mask scraps are forcibly removed from the mask sheet, and physical force is applied to the mask sheet during the process of removing the mask scraps, causing deformation defects in the mask sheet.

[0009] A related prior art document is Korean Patent Publication No. 10-2016-0076008 (published on June 30, 2016), which describes a mask frame assembly, a deposition apparatus including the same, and a method for manufacturing an organic light-emitting display device using the same. Summary of the Invention [Problem to be solved by the invention]

[0010] The object of the present invention is to provide a fine metal mask that prevents deformation defects and removes protruding residue by cutting the area between the short side of the mask sheet portion and the mask scrap portion using a laser cutting method, which not only prevents deformation defects in the mask sheet portion but also removes residue from the protruding portions of the mask sheet portion, thereby improving product quality. [Means for solving the problem]

[0011] In order to achieve the above object, a fine metal mask that prevents deformation defects and removes protruding residues according to an embodiment of the present invention includes a rectangular mask sheet portion having long and short sides; a mask scrap portion that surrounds the outside of the mask sheet portion; cutting lines that are formed along boundary portions of the long sides of the mask sheet portion and the mask scrap portion on both sides and are disposed on each of the long sides of the mask sheet portion; and laser cut lines that are connected to the long side ends of the cutting lines and are formed by laser cutting between the boundary portions of the mask scrap portion and the short sides of the mask sheet portion. The cutting lines are formed along the boundary portions of the long sides of the mask sheet portion and the mask scrap portion, respectively, and have a horizontal portion having a length longer than the long sides of the mask sheet portion on both sides, and a vertical portion extending vertically from the horizontal portion and in the direction of the short sides of the mask sheet portion, the long sides of the mask sheet portion having a first length, and the cutting lines have a second length longer than the first length, thereby removing protruding areas protruding outside the cutting lines, and the side walls of the short sides of the mask sheet portion are exposed to the outside by the vertical portions of the cutting lines.

[0012] The cutting lines are formed by etching in the shape of rectangular holes, and have a width of 1 μm to 10 mm.

[0013] The laser cut lines are removed by laser cutting using an ultrashort pulse laser, so that the cut surfaces of the laser cut lines are formed smoothly, and no deformation defects occur in the mask sheet portion.

[0014] When the mask sheet portion and the mask scrap portion are laser-cut along the laser cutting line, no scrap exists in the mask sheet portion cut by the laser cutting.

[0015] In order to achieve the above object, a method for manufacturing a fine metal mask that prevents deformation defects and removes protruding residues according to an embodiment of the present invention includes the steps of: (a) preparing a metal mask sheet including a rectangular mask sheet portion having long and short sides, a mask scrap portion surrounding the outside of the mask sheet portion, and cutting lines formed along the long side boundaries of both sides of the mask sheet portion and the mask scrap portion and disposed on both long sides of the mask sheet portion; (b) aligning a laser cutting device above and spaced apart from the metal mask sheet; and (c) using the laser cutting device to cut the short sides of the mask sheet portion connected to the long side ends of the cutting lines and the mask scrap portion. and separating the mask sheet portion from the mask strap portion by laser-cutting the boundary portion of the wrap portion, wherein the cutting lines are formed along the boundary portions of the long sides of the mask sheet portion and the mask scrap portion, respectively, and have horizontal portions having lengths longer than the long sides of the mask sheet portion on both sides, and vertical portions extending vertically from the horizontal portions and in the direction of the short sides of the mask sheet portion, wherein the long sides of the mask sheet portion have a first length, and the cutting lines have a second length longer than the first length, thereby removing protruding regions protruding outside the cutting lines, and the vertical portions of the cutting lines expose the side walls of the short sides of the mask sheet portion to the outside.

[0016] In the step (a), the cutting lines are formed by etching in the shape of rectangular holes, and have a width of 1 μm to 10 mm.

[0017] In the above step (c), the laser cutting is performed using an ultrashort pulse laser, so that the cut surface of the laser cut line formed between the short side of the mask sheet portion and the boundary portion of the mask scrap portion is formed smoothly, and no deformation defects occur in the mask sheet portion.

[0018] In the step (c), when the mask sheet portion and the mask scrap portion are laser-cut along the laser cutting line, no scrap exists in the mask sheet portion cut by the laser cutting.

[0019] In the step (c), an ultrashort pulse laser such as a femtosecond or picosecond pulse laser is used for the laser cutting. [Effects of the Invention]

[0020] The fine metal mask and its manufacturing method according to the present invention, which prevent deformation defects and remove the remaining protruding portions, design the cutting line to be the same length as or longer than the long side of the mask sheet portion, eliminate the protruding area that protrudes outside the cutting line corresponding to the long side of the mask sheet portion, and remove the mask scrap portion from the mask sheet portion by cutting between the short side of the mask sheet portion and the mask scrap portion using laser cutting.

[0021] As a result, the fine metal mask and its manufacturing method according to the present invention, which prevent deformation defects and remove the remaining protrusions, not only makes it possible to precisely cut the mask sheet portion by removing the boundary between the short side of the mask sheet portion and the mask scrap portion by laser cutting using an ultrashort pulse laser, but also eliminates the risk of physical force being applied to the mask sheet portion, preventing deformation defects from occurring in the mask sheet portion.

[0022] Furthermore, in the fine metal mask and manufacturing method thereof that prevent deformation defects and remove residual protrusions according to embodiments of the present invention, the cut surface of the laser cut line is formed smoothly by laser cutting using an ultrashort pulse laser, so that when mask scrap portions are removed from mask sheet portions using conventional methods, residual protrusions that occur on the edges of the mask sheet portion can be removed, thereby improving product quality. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 1 is a plan view showing a fine metal mask in a state before normal scrap is removed. [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II' in FIG. [Figure 3] FIG. 1 is a plan view showing a fine metal mask after removal of normal scrap. [Figure 4] 1 is a plan view showing a fine metal mask according to an embodiment of the present invention in which deformation defects have been prevented and protruding residues have been removed before scrap is removed. FIG. [Figure 5] 5 is a cross-sectional view taken along line VV' in FIG. 4. FIG. [Figure 6] FIG. 10 is a schematic diagram for explaining a laser cutting process. [Figure 7] 1 is a plan view showing a fine metal mask according to an embodiment of the present invention in which deformation defects are prevented and protruding residues are removed after scrap is removed. FIG. [Figure 8] FIG. 10 is a plan view showing a fine metal mask according to a modified example of the present invention, which prevents deformation defects and removes residual material from protruding portions. [Figure 9] FIG. 10 is a plan view showing a fine metal mask according to another modification of the present invention, which prevents deformation defects and removes residual protrusions. [Figure 10] 1 is a process flow diagram illustrating a method for manufacturing a fine metal mask that prevents deformation defects and removes protruding residues according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0024] The advantages and features of the present invention, as well as methods for achieving them, will become clearer with reference to the following detailed examples in conjunction with the accompanying drawings. However, the present invention is not limited to the examples disclosed below, and may be embodied in various different forms. However, these examples are provided to complete the disclosure of the present invention and to fully convey the scope of the invention to those skilled in the art to which the present invention pertains, and the present invention is defined only by the scope of the claims. The same reference numerals refer to the same elements throughout the specification.

[0025] Hereinafter, a fine metal mask that prevents deformation defects and removes protrusion residues according to a preferred embodiment of the present invention and a method for manufacturing the same will be described in detail with reference to the accompanying drawings.

[0026] FIG. 1 is a plan view showing a fine metal mask in a state before normal scrap is removed, and FIG. 2 is a cross-sectional view taken along line II-II' in FIG.

[0027] As shown in FIGS. 1 and 2, the fine metal mask 1 in the state before the normal scrap is removed includes a mask sheet portion 20, a mask scrap portion 40, a cutting line 60, and a trim line 50.

[0028] At this time, the mask sheet portion 20 is placed in the mask area (MA) of the fine metal mask 1, and the mask scrap portion 40 is placed in the scrap area (SA) of the fine metal mask 1.

[0029] The mask sheet portion 20 is formed in a rectangular shape having long and short sides, and the mask scrap portion 40 is arranged so as to surround the outside of the mask sheet portion 20.

[0030] The cutting lines 60 are formed along the long side boundary portions on both sides of the mask sheet portion 20 and the mask scrap portion 40, respectively.

[0031] The trim lines 50 are formed to protrude from the cutting line 60 to the mask scrap portion 40 and are formed on the edge portions on both sides of the mask sheet portion 20. As a result, the mask sheet portion 20 has a first length (L1), and the cutting line 60 has a second length (L2) that is shorter than the mask sheet portion 20.

[0032] In a normal fine metal mask 1, the cutting lines 60 and trim lines 50 may be formed together in the process of forming the mask pattern holes 25 in the mask sheet portion 20 by an etching process.

[0033] In this way, in the case of a normal fine metal mask 1, in the process of forming the mask panel holes 25 in the mask sheet portion 20, the trim line 50 is formed together with the cutting line 60, and then the mask scrap portion 40 is removed from the mask sheet portion 20 by an operator removing the mask scrap portion 40 via the trim line 50.

[0034] However, with a normal fine metal mask 1, when the mask scrap portion 40 is forcibly removed from the mask sheet portion 20 and the mask scrap portion 40 is removed, physical force is applied to the mask sheet portion 20, which is likely to cause deformation defects in the mask sheet portion 20.

[0035] Furthermore, if the mask scrap portion 40 is forcibly removed from the mask sheet portion 20 along the trim line 50, there is a high risk that scrap, which is the remnant of the protrusion (45 in Figure 3), will be present in the protruding portion 27 of the mask sheet portion 20, which may cause product defects.

[0036] On the other hand, FIG. 3 is a plan view showing the fine metal mask after the normal scrap has been removed.

[0037] As shown in FIG. 3, after scrap removal, it can be seen that a protruding residue 45 remains in the protruding portion 27 of the mask sheet portion 20 where the trim line 50 was formed in the normal fine metal mask 1.

[0038] Furthermore, in the case of a typical fine metal mask 1, when the mask scrap portion is forcibly removed from the mask sheet portion 20 and the mask scrap portion is removed, physical force is applied to the mask sheet portion 20, which is likely to cause deformation defects in the mask sheet portion 20.

[0039] To solve this problem, a fine metal mask according to an embodiment of the present invention, which prevents deformation defects and removes the remaining protruding portions, has cutting lines designed to a length corresponding to the long sides of the mask sheet portion, eliminating the protruding areas that protrude outside the cutting lines corresponding to the long sides of the mask sheet portion, and laser cutting is performed between the short sides of the mask sheet portion and the mask scrap portion to remove the mask scrap portion from the mask sheet portion.

[0040] As a result, the fine metal mask according to the embodiment of the present invention, which prevents deformation defects and removes residual material from the protruding portions, can not only prevent deformation defects of the mask sheet portion by cutting the area between the short side of the mask sheet portion and the mask scrap portion using a laser cutting method, but also improves product quality by removing residual material from the protruding portions of the mask sheet portion.

[0041] This will be described in more detail below with reference to the accompanying drawings.

[0042] FIG. 4 is a plan view showing a fine metal mask according to an embodiment of the present invention in which deformation defects have been prevented and protruding residues have been removed before scrap removal, and FIG. 5 is a cross-sectional view taken along line V-V' in FIG. 4.

[0043] Referring to Figures 4 and 5, a fine metal mask 100 that prevents deformation defects and removes protruding residues according to an embodiment of the present invention includes a mask sheet portion 120, a mask scrap portion 140, a cutting line 160, and a laser cut line 180.

[0044] At this time, the mask sheet portion 120 is placed in the mask area (MA) of the fine metal mask 100, and the mask scrap portion 140 is placed in the scrap area (SA) of the fine metal mask 100.

[0045] The mask sheet portion 120 may be formed in a rectangular shape having long and short sides. Although the mask sheet portion 120 generally has a rectangular shape, it is not necessarily limited to this, and it is clear that the shape can be variously modified.

[0046] The mask sheet portion 120 may be made of materials such as SUS300, SUS400, Invar, Ni alloy, etc., in order to minimize deformation of the fine metal mask 100 in the high temperature environment of the organic deposition process.

[0047] The mask sheet portions 120 have an upper surface and a lower surface opposite the upper surface, and may have at least one mask pattern hole 125 penetrating the upper and lower surfaces.

[0048] In this case, the mask pattern holes 125 may be arranged to penetrate the upper and lower surfaces of the mask sheet unit 120 for each cell, or may be arranged to penetrate only a portion of the upper and lower surfaces of the mask sheet unit 120 for each cell.

[0049] The mask scrap portions 140 are arranged so as to surround the outside of the mask sheet portion 120. At this time, the mask scrap portions 140 are dummy areas designed for manufacturing the mask sheet portion 120 into a specific shape. These mask scrap portions 140 are to be cut and removed from the mask sheet portion 120 by laser cutting.

[0050] The cutting lines 160 are formed along the boundary portions of the long sides of the mask sheet portion 120 and the mask scrap portion 140, respectively, and have lengths corresponding to the long sides of the mask sheet portion 120. Thus, the long sides of the mask sheet portion 120 have a first length (L1), and the cutting lines 160 have a second length (L2) that is the same as the first length (L1).

[0051] In this way, in the present invention, the cutting line 160 has a length corresponding to each of the long sides of the mask sheet portion 120, and more preferably has the same length, so that it is possible to eliminate protruding areas that protrude outside the cutting line 160 corresponding to the long sides of the mask sheet portion 120.

[0052] These cutting lines 160 form gaps that separate the long sides of the fine metal mask sheet 100 at a regular interval from the cutting lines 160, thereby preventing the long sides of the mask sheet portion 120 from being deformed or damaged due to contact even if sagging occurs in the mask sheet portion 120.

[0053] For this reason, the cutting lines 160 are preferably formed by etching in the shape of rectangular holes, and the width (W) of the cutting lines 160 is preferably 1 μm to 10 mm.

[0054] The laser cut line 180 is formed by laser cutting between the short side of the mask sheet portion 120 connected to the end of the long side of the cutting line 160 and the boundary portion of the mask scrap portion 140 .

[0055] In this case, the laser cutting is preferably performed using an ultrashort pulse laser such as a femtosecond or picosecond pulse laser, but is not necessarily limited to this. Therefore, any laser having a wavelength band that can precisely cut the mask sheet portion can be used without particular limitations. In this way, when laser cutting is performed using an ultrashort pulse laser, it may be possible to precisely cut the mask sheet portion 120 made of a metal material in a short time.

[0056] Therefore, when the boundary portion between the short side of the mask sheet portion 120 and the mask scrap portion 140 of the fine metal mask 100 of the present invention is removed by laser cutting using an ultrashort pulse laser, not only can the fine metal mask 100 be cut precisely, but there is also no risk of physical force being applied to the mask sheet portion 120, so deformation defects of the mask sheet portion 120 do not occur.

[0057] Furthermore, in the fine metal mask 100 of the present invention, the cut surface of the laser cut line 180 is formed smoothly by laser cutting using an ultrashort pulse laser, so that there is no risk of protruding residue remaining on the edge of the mask sheet portion 120 during the process of removing the mask scrap portion 140 from the mask sheet portion 120 by laser cutting, thereby improving product quality.

[0058] FIG. 6 is a schematic diagram for explaining the laser cutting process, and will be explained in conjunction with FIG.

[0059] As shown in Figures 4 and 6, the laser processing apparatus 200 includes a laser generating unit 210, an optical unit 220 that processes the laser beam (LB) generated by the laser generating unit 210, a reflector 230 that reflects the laser beam (LB) processed by the optical unit 220 toward the fine metal mask 100, and a focusing lens 240 that focuses the laser beam (LB) reflected by the reflector 230 and irradiates it between the short side of the mask sheet portion 120 and the boundary portion of the mask scrap portion 140.

[0060] The laser generating unit 210 generates an ultrashort pulse laser, which may include a femtosecond or picosecond laser. In this way, by performing laser processing using an ultrashort pulse laser, it is possible to precisely cut the fine metal mask 100 made of a metal material in a short time.

[0061] The optical unit 220 may include a half-wave plate, a polarizing plate, etc. for processing the laser beam (LB) generated by the laser generating unit 210. The optical unit 220 includes various optical systems and can change the laser beam (LB) in various ways depending on processing conditions.

[0062] A CCD camera 250 may be installed above and spaced apart from the reflector 230. These CCD cameras 250 photograph the processing status of the fine metal mask 100 in real time.

[0063] The focusing lens 240 serves to focus the laser beam (LB) deflected by the reflector 230 onto the fine metal mask 100 .

[0064] In this way, in the present invention, the laser processing device 200 is aligned above and spaced apart from the fine metal mask 100, and then the laser beam (LB) generated from the laser processing device 200 is irradiated along the area between the short side of the mask sheet portion 120 connected to the end of the long side of the cutting line 160 and the boundary portion of the mask scrap portion 140, thereby performing laser cutting and forming the laser cut line 180.

[0065] In this way, when laser cutting is performed by locally irradiating an ultrashort pulse laser only to the boundary portion between the short side of the mask sheet portion 120 connected to the long side end of the cutting line 160 and the mask scrap portion 140, the cut surface of the laser cut line 180 that perpendicularly intersects the upper and lower surfaces of the mask sheet portion 120 is formed smoothly.

[0066] Therefore, when the mask sheet part 120 and the mask scrap part 140 are laser cut, scraps, which are remains of the protruding parts, do not exist on the mask sheet part 120 cut by laser cutting.

[0067] Meanwhile, FIG. 7 is a plan view showing a fine metal mask after scrap removal according to an embodiment of the present invention, which prevents deformation defects and removes residual protrusions.

[0068] As shown in FIG. 7, the fine metal mask 100 according to the embodiment of the present invention, which prevents deformation defects after scrap removal and removes protruding residues, shows that no scrap, which is the remnants of the protruding portions, is present at the edge of the mask sheet portion 120 after scrap removal.

[0069] Furthermore, in the fine metal mask 100 according to the embodiment of the present invention, which prevents deformation defects after scrap removal and removes the remaining protrusions, the boundary between the short side of the mask sheet portion 120 and the mask scrap portion is removed by laser cutting using an ultrashort pulse laser, which not only makes it possible to precisely cut the fine metal mask 100, but also prevents deformation defects from occurring in the mask sheet portion 120 because there is no risk of physical force being applied to the mask sheet portion 120.

[0070] FIG. 8 is a plan view showing a fine metal mask according to a modification of the present invention, which prevents deformation defects and removes residual material from the protruding portions.

[0071] As shown in FIG. 8, the fine metal mask 100 according to a modified example of the present invention, which prevents deformation defects and removes protruding residue, is substantially similar to the embodiment of the present invention in terms of the mask sheet portion 120, mask scrap portion 140, and laser cut line 160, except for the cutting line 160. Therefore, a redundant description will be omitted and only the differences will be described.

[0072] According to a modified example of the present invention, the cutting lines 160 are formed along the boundary portions of the long sides of the mask sheet portion 120 and the mask scrap portion 140, respectively, and have lengths longer than the long sides of the mask sheet portion 120. Thus, the long sides of the mask sheet portion 120 have a first length (L1), and the cutting lines 160 have a second length (L2) longer than the first length (L1).

[0073] In this way, in one modified example of the present invention, the cutting line 160 has a length longer than the long sides of the mask sheet portion 120 on both sides, so that not only can the protruding area that protrudes outside the cutting line 160 corresponding to the long sides of the mask sheet portion 120 be eliminated, but even if sagging occurs in the mask sheet portion 120 due to the expansion of the gap area of ​​the cutting line 160, there is no risk of the long sides of the mask sheet portion 120 being deformed or damaged by contact.

[0074] FIG. 9 is a plan view showing a fine metal mask according to another modification of the present invention, which prevents deformation defects and removes residual material from the protruding portions.

[0075] As shown in FIG. 9, the fine metal mask 100 according to another modification of the present invention, which prevents deformation defects and removes protruding residue, has a mask sheet portion 120, a mask scrap portion 140, and a laser cut line 180, excluding the cutting line 160, which are substantially similar to those of the embodiment of the present invention. Therefore, a redundant description will be omitted and only the differences will be described.

[0076] According to another variation of the present invention, the cutting line 160 is formed along the boundary portions of the long sides of the mask sheet portion 120 and the mask scrap portion 140, respectively, and has a horizontal portion 162 having a length longer than the long sides of the mask sheet portion 120, and a vertical portion 164 extending vertically from the horizontal portion 162 and in the direction of the short side of the mask sheet portion 120.

[0077] As a result, the long sides of the mask sheet portion 120 have a first length (L1), and the cutting lines 160 have a second length (L2) that is longer than the first length (L1). Furthermore, the cutting lines 160 have vertical portions 164 that expose the side walls of the short sides of the mask sheet portion 120 to the outside.

[0078] Thus, in another variant of the present invention, the cutting line 160 has a horizontal portion 162 that is longer than the long sides of the mask sheet portion 120 on both sides, and a vertical portion 164 that extends vertically from the horizontal portion 162. This not only eliminates the protruding area that protrudes outside the cutting line 160 corresponding to the long sides of the mask sheet portion 120, but also exposes the side walls of the short sides of the mask sheet portion 120 to the outside, thereby further expanding the gap area of ​​the cutting line 160. Therefore, even if sagging occurs in the mask sheet portion 120, there is no risk of the long sides of the mask sheet portion 120 being deformed or damaged due to contact.

[0079] Furthermore, another variation of the present invention is that by designing the cutting line 160 having a horizontal portion 162 and a vertical portion 164, the cutting area of ​​the mask sheet portion 120 is reduced during laser cutting using an ultrashort pulse laser, thereby significantly reducing the laser cutting time.

[0080] The fine metal mask according to the embodiment of the present invention described above, which prevents deformation defects and removes protruding residues, has a cutting line designed to be the same length as or longer than the long side of the mask sheet portion, eliminating the protruding area that protrudes outside the cutting line corresponding to the long side of the mask sheet portion, and then laser cutting is performed between the short side of the mask sheet portion and the mask scrap portion to remove the mask scrap portion from the mask sheet portion.

[0081] As a result, the fine metal mask according to the embodiment of the present invention prevents deformation defects and removes the remaining protrusions by removing the boundary between the short side of the mask sheet portion and the mask scrap portion by laser cutting using an ultrashort pulse laser, which not only makes it possible to cut the mask sheet portion precisely, but also eliminates the risk of physical force being applied to the mask sheet portion, preventing deformation defects from occurring in the mask sheet portion.

[0082] Furthermore, the fine metal mask according to the embodiment of the present invention, which prevents deformation defects and removes residual protrusions, has a smooth cut surface along the laser cut line formed by laser cutting using an ultrashort pulse laser. Therefore, when removing mask scraps from a mask sheet using conventional methods, residual protrusions that occur on the edges of the mask sheet can be removed, thereby improving product quality.

[0083] Hereinafter, a method for manufacturing a fine metal mask that prevents deformation defects and removes protruding residues according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[0084] FIG. 10 is a process flow diagram showing a method for manufacturing a fine metal mask according to an embodiment of the present invention, which prevents deformation defects and removes residual material from protruding portions.

[0085] As shown in FIG. 10, a method for manufacturing a fine metal mask that prevents deformation defects and removes protrusion residues according to an embodiment of the present invention includes a metal mask sheet preparation step (S110), a position alignment step (S120), and a laser cutting step (S130).

[0086] Preparing the metal mask sheet In the metal mask sheet preparation step (S110), a metal mask sheet is prepared.

[0087] These metal mask sheets include a rectangular mask sheet portion having long and short sides, a mask scrap portion surrounding the outside of the mask sheet portion, and cutting lines formed along the long side boundary portions on both sides of the mask sheet portion and the mask scrap portion, each having a length corresponding to the long sides on both sides of the mask sheet portion.

[0088] Here, the mask sheet portion has an upper surface and a lower surface opposite to the upper surface, and at least one mask pattern hole may be formed in the mask sheet portion, penetrating the upper and lower surfaces.

[0089] The mask scrap portion is arranged to surround the outside of the mask sheet portion, and is a dummy area designed for manufacturing the mask sheet portion into a specific shape.

[0090] The cutting lines are formed along the boundary portions of the long sides of the mask sheet portion and the mask scrap portion, respectively, and have lengths corresponding to the long sides of the mask sheet portion. Thus, the long sides of the mask sheet portion have a first length, and the cutting lines have a second length equal to the first length. Alternatively, the cutting lines may be formed along the boundary portions of the long sides of the mask sheet portion and the mask scrap portion, respectively, and have lengths longer than the long sides of the mask sheet portion. In this case, the long sides of the mask sheet portion may have a first length, and the cutting lines may have a second length longer than the first length.

[0091] In this way, in the present invention, the cutting lines have lengths corresponding to the long sides of the mask sheet portion on both sides, and more preferably, lengths that are the same or longer than those of the long sides of the mask sheet portion, thereby making it possible to eliminate protruding areas that protrude outside the cutting lines corresponding to the long sides of the mask sheet portion.

[0092] These cutting lines form gaps that separate the long sides of the fine metal mask sheet from the cutting lines at a fixed interval, thereby preventing deformation or damage to the long sides of the mask sheet from contacting each other even if sagging occurs in the mask sheet.

[0093] For this reason, the cutting lines are preferably formed by etching in the shape of rectangular holes, and the width of the cutting lines is preferably 1 μm to 10 mm.

[0094] Position Alignment In the positioning step (S120), a laser cutting device is positioned above and spaced apart from the metal mask sheet.

[0095] In this step, the laser cutting device is preferably attached above and spaced apart from the metal mask sheet, but is aligned so that a focusing lens that focuses the laser beam is positioned at the boundary between the short side of the mask sheet portion connected to the end of the long side of the cutting line and the mask scrap portion.

[0096] Laser cutting In the laser cutting step (S130), a laser cutting device is used to laser cut the boundary between the short side of the mask sheet part connected to the long side end of the cutting line and the mask scrap part to separate the mask sheet part from the mask strap part. These laser cuts form laser cut lines on the short side of the mask sheet part.

[0097] In this step, the laser cutting is preferably performed using an ultrashort pulse laser such as a femtosecond or picosecond pulse laser, but is not necessarily limited thereto. Therefore, any laser having a wavelength range that can precisely cut the mask sheet portion can be used without any particular limitation.

[0098] In this way, when laser cutting is performed using an ultrashort pulse laser, it may be possible to precisely cut a mask sheet portion made of a metal material in a short period of time.

[0099] Therefore, when the boundary portion between the short side of the mask sheet portion and the mask scrap portion is removed by laser cutting using an ultrashort pulse laser, the present invention not only makes it possible to precisely cut the fine metal mask, but also eliminates the risk of physical force being applied to the mask sheet portion, thereby preventing deformation defects from occurring in the mask sheet portion.

[0100] Furthermore, since the present invention uses an ultrashort pulse laser to form a smooth cut surface of the laser cut line, it is possible to remove residual protrusions that occur on the edges of the mask sheet portion when removing mask scrap portions from the mask sheet portion using conventional methods, thereby improving product quality.

[0101] This completes the method for manufacturing a fine metal mask according to the embodiment of the present invention, which prevents deformation defects and removes residual material from the protruding portions.

[0102] Although the present invention has been described above with reference to its preferred embodiments, various modifications and variations may be made by those skilled in the art. These modifications and variations are within the scope of the present invention as long as they do not deviate from the scope of the technical concept provided by the present invention. Therefore, the scope of the present invention should be determined by the following claims. [Explanation of symbols]

[0103] 100 Fine Metal Mask 120 Mask sheet section 125 Mask pattern hole 140 Mask Scrap Department 160 cutting line 180 laser cutting line MA Mask Area SA Scrap Area

Claims

1. a rectangular mask sheet portion having long and short sides; a mask scrap portion surrounding the outside of the mask sheet portion; Cutting lines are formed along the boundary portions of the long sides of the mask sheet portion and the mask scrap portion, respectively, and are disposed on the long sides of the mask sheet portion; and a laser cut line formed by laser cutting between a short side of the mask sheet portion connected to an end of a long side of the cutting line and a boundary portion of the mask scrap portion; Including, the cutting lines are formed along the boundary portions of the long sides of the mask sheet portion and the mask scrap portion, respectively, and each have a horizontal portion having a length longer than each of the long sides of the mask sheet portion, and a vertical portion extending vertically from the horizontal portion and in the direction of the short side of the mask sheet portion; The long sides of the mask sheet portion have a first length, and the cutting lines have a second length longer than the first length, thereby removing protruding regions protruding outside the cutting lines, and the cutting lines have vertical portions such that side walls of the short sides of the mask sheet portion are exposed to the outside. A fine metal mask that prevents deformation defects and removes residual material from protruding parts.

2. The cutting line is It is etched into a rectangular hole, Characterized in that it has a width of 1 μm to 10 mm, 2. A fine metal mask according to claim 1, which prevents deformation defects and removes residual protrusions.

3. The laser cut line is By removing the mask sheet by laser cutting using an ultrashort pulse laser, the cut surface of the laser cut line is formed smoothly, and no deformation defects occur in the mask sheet portion.

2. A fine metal mask according to claim 1, which prevents deformation defects and removes residual protrusions.

4. When the mask sheet portion and the mask scrap portion are laser-cut along the laser cutting line, The mask sheet portion cut by the laser cutting is free of scraps.

2. A fine metal mask according to claim 1, which prevents deformation defects and removes residual protrusions.

5. (a) preparing a metal mask sheet including a rectangular mask sheet portion having long and short sides, a mask scrap portion surrounding the outside of the mask sheet portion, and cutting lines formed along boundary portions of the long sides of both sides of the mask sheet portion and the mask scrap portion, respectively, and disposed on both long sides of the mask sheet portion; (b) aligning a laser cutting device above and spaced from the metal mask sheet; and (c) using the laser cutting device, laser cutting the boundary portion between the short side of the mask sheet portion connected to the long side end of the cutting line and the mask scrap portion to separate the mask sheet portion from the mask strap portion; the cutting lines are formed along the boundary portions of the long sides of the mask sheet portion and the mask scrap portion, respectively, and each have a horizontal portion having a length longer than each of the long sides of the mask sheet portion, and a vertical portion extending vertically from the horizontal portion and in the direction of the short side of the mask sheet portion; The long sides of the mask sheet portion have a first length, and the cutting lines have a second length longer than the first length, thereby removing protruding regions protruding outside the cutting lines, and the cutting lines have vertical portions such that side walls of the short sides of the mask sheet portion are exposed to the outside. A method for manufacturing a fine metal mask that prevents deformation defects and removes residual material from protruding portions.

6. In the above step (a), The cutting line is It is etched into a rectangular hole, Characterized in that it has a width of 1 μm to 10 mm, 6. A method for manufacturing a fine metal mask according to claim 5, wherein deformation defects are prevented and residual material from the protrusions is removed.

7. In the step (c), The laser cutting is performed using an ultrashort pulse laser, so that the cut surface of the laser cut line formed between the short side of the mask sheet portion and the boundary portion of the mask scrap portion is formed smoothly, and no deformation defects occur in the mask sheet portion.

6. A method for manufacturing a fine metal mask according to claim 5, wherein deformation defects are prevented and residual material from the protrusions is removed.

8. In the step (c), When the mask sheet portion and the mask scrap portion are laser-cut along the laser cutting line, The mask sheet portion cut by the laser cutting is free of scraps.

6. A method for manufacturing a fine metal mask according to claim 5, wherein deformation defects are prevented and residual material from the protrusions is removed.

9. In the step (c), During the laser cutting, The method is characterized by using an ultrashort pulse laser that is a femtosecond or picosecond pulse laser, 6. A method for manufacturing a fine metal mask according to claim 5, wherein deformation defects are prevented and residual material from the protrusions is removed.

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