System and method for recycling treatment of integrated circuit LSR wastewater

Abstract

To provide a recycling treatment system and method for integrated circuit LSR wastewater.SOLUTION: The wastewater treatment system includes a collection pond, a pH adjustment pond, a first intermediate water pond, a multimedia filter, a carbon-based filter, a first heat exchanger, a second intermediate water pond, a cation exchange tower, an anion exchange tower, a water supply pond, a microfiltration filter, and a second heat exchanger in order according to a process flow. The wastewater treatment system and method have high efficiency, a simple system structure, a small site area, and no secondary pollution to the environment, and are convenient for large-scale industrial promotion and application. In particular, two layers of light filter media are arranged in the multimedia filter, so that the filtering effect is better, the large-resistance drainage system is saved, the carbon-based material in the carbon-based filter can activate the persulfate, the hot wastewater can activate the persulfate, a synergistic effect can be generated, and the efficiency of decomposing the organic matter is higher when the dosage of the persulfate is reduced.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to the field of water treatment technology, and more particularly to an integrated circuit LSR wastewater recycling treatment system and method. [Background technology]

[0002] Conventional integrated circuit factories are typically equipped with plasma water washing local scrubber equipment (LSR equipment) to remove PFC greenhouse gases, as well as toxic and harmful gases such as CF4, NF3, SF6, C2F6, CHF3, and CH2F2, used or generated during wafer processes such as dry etch, thin film, and diffusion for integrated circuits. Nitrogen gas is ionized into plasma by the action of a strong electric current, and the resulting high-temperature flame breaks down exhaust gases, which are then finally subjected to two stages of water washing before being released into the atmosphere. Chemicals in the exhaust gas dissolve in water, generating LSR wastewater.

[0003] In conventional integrated circuit factories, LSR wastewater is usually discharged into a wastewater pond and treated together with other wastewater to meet the standards before being discharged. LSR wastewater accounts for approximately 10-15% of the total wastewater volume, and the volume is large. Compared to other wastewaters, the total organic carbon (TOC), conductivity, and fluoride ion (F) of LSR wastewater are - The water used in the LSR equipment does not have high requirements for water quality indicators such as conductivity, fluoride ions, and suspended solids (SS), and the total organic carbon (TOC) must be less than 5 mg / l, conductivity less than 100 μm / cm, and fluoride ions (F). - It is sufficient to meet the requirements of <5mg / l, suspended solids <1mg / l, and pH 7-10. To conserve water resources, the most economical and rational method is to specially collect and treat LSR wastewater and supply it to the LSR plant. Summary of the Invention [Problem to be solved by the invention]

[0004] The objective of the present invention is to provide a treatment system and method for integrated circuit LSR wastewater, which has high treatment efficiency, a simple system configuration, a small site area, no secondary pollution to the environment, and is convenient for large-scale popularization and application in industrialization. [Means for solving the problem]

[0005] To achieve the above objectives, in light of the characteristics of high temperature and low major pollutant index of LSR wastewater, and in addition to the requirements for major pollutant index of LSR plant water, the present invention provides the following technical solution:

[0006] The integrated circuit LSR wastewater reuse treatment system of the present invention comprises: A collection pond that receives wastewater discharged from the LSR device and adjusts the water volume; a pH adjustment pond located downstream of the collection pond, connected to the collection pond, and configured to adjust the pH of the wastewater; a first intermediate water reservoir located downstream of the pH adjustment reservoir and connected to the pH adjustment reservoir; a multimedia filter located downstream of the first intermediate water reservoir and connected to the first intermediate water reservoir, for removing colloidal particles and suspended solids in the wastewater having a particle diameter of more than 0.5 μm; a carbon-based filter located downstream of the multimedia filter and connected to the multimedia filter, for decomposing organic matter in the wastewater; a first heat exchanger located downstream of the carbon-based filter and connected to the carbon-based filter for exchanging heat with the wastewater; a second intermediate water reservoir located downstream of the first heat exchanger and connected to the first heat exchanger; a cation exchange tower located downstream of the second intermediate water reservoir and connected to the second intermediate water reservoir for removing cations in the wastewater; an anion exchange tower located downstream of the cation exchange tower and connected to the cation exchange tower for removing anions in the wastewater; a water supply reservoir located downstream of the anion exchange column and connected to the anion exchange column; a microfiltration filter located downstream of the water supply reservoir and connected to the water supply reservoir, for removing impurity particles having a particle diameter of greater than 0.1 μm from the wastewater to obtain recyclable water; a second heat exchanger located downstream of the microfiltration filter and connected to the microfiltration filter, for exchanging heat with water to meet the required temperature of the water used in the LSR device, in that order according to the process flow.

[0007] Furthermore, the pH adjustment pond adjusts the pH of the wastewater by adding an acid or alkali, and the pH of the wastewater in the pH adjustment pond is set to 9-10.

[0008] Furthermore, the method by which the multimedia filter removes colloidal particles and suspended solids in wastewater with a particle size larger than 0.5 μm is by adding a coagulant to the pipe connecting the first intermediate water reservoir and the multimedia filter.

[0009] Furthermore, the multimedia filter contains a light filter material whose density is lighter than that of water, and the light filter material is a particle filter material and a fiber filter material arranged in this order from bottom to top, and the density of the particle filter material is smaller than that of the fiber filter material.

[0010] Furthermore, the flocculant is polyaluminum chloride, Furthermore, the particulate filter medium is a polystyrene particulate material, and the fiber filter medium is a fiber bundle filter medium.

[0011] Furthermore, the polystyrene particle material has a particle diameter of 0.5 to 3.0 mm and a density of 0.05 to 0.10 g / cm 3 The filter layer is made of polystyrene foam particles with a height of 0.5 to 1.5 m.

[0012] Furthermore, the fiber bundle filter medium is a polypropylene fiber bundle filter medium having a packing height of 0.5 to 1.5 m and a packing coefficient of 0.15 to 0.35.

[0013] However, in the present invention, particle filter media and fiber filter media are both commercially available products or manufactured by conventional methods, so the present invention will not be described in detail.In the present invention, the packing coefficient of the polypropylene fiber bundle filter media refers to the ratio between the actual volume of the polypropylene fiber bundle filter media in the polypropylene fiber bundle filter media filter layer and the total volume of the entire light filter media filter layer.Generally, it is expressed as a percentage, and indicates the packing degree of the polypropylene fiber bundle filter media in the entire light filter media.In the present invention, by selecting the particle size, density and layer height of the polystyrene foam particles, and the packing height and packing coefficient of the fiber bundle filter media, particle filter media can be placed in the lower layer, and fiber filter media can be placed in the upper layer.

[0014] Furthermore, a bottom water supply system is provided at the bottom of the multimedia filter body, and the bottom water supply system is a porous annular pipe network with equally spaced holes at the top, one end of the bottom water supply system is connected to the drain end of the water supply pipe of the multimedia filter, the water supply end of the water supply pipe is connected to the drain pipe of the first intermediate water reservoir, and a water supply pipe motor valve is provided on the water supply pipe.

[0015] Furthermore, the other end of the bottom water supply system is connected to the filter backwash drain pipe of the multimedia filter, and the filter backwash drain pipe is provided with a backwash drain pipe motor valve.

[0016] Furthermore, particle filter material and fiber filter material are provided above the bottom water supply system in this order from bottom to top, with the lower particle filter material having a lower density than the upper fiber filter material, and a blocking net is provided above the fiber filter material, with the fiber filter material being fixed to the blocking net.

[0017] Furthermore, a top drainage system is provided above the blocking net and at the top of the can body, and the top drainage system is a porous annular pipe network with equally spaced holes at the bottom, one end of the top drainage system is connected to the water supply end of the drain pipe of the multimedia filter, the drain pipe is provided with a drain motor valve, and the drain end of the drain pipe is connected to the water supply pipe of the carbon-based filter.

[0018] Furthermore, the porous annular pipe network includes a circular ring pipe, a main horizontal pipe, and a main vertical pipe, the main horizontal pipe and the main vertical pipe are arranged vertically, the intersections of which are connected and located at the centers of the circular ring pipes, and both ends of the main horizontal pipe and the main vertical pipe are connected to the circular ring pipe.

[0019] Furthermore, the porous annular pipe network includes a plurality of secondary vertical pipes arranged parallel to the main vertical pipe and perpendicular to the main horizontal pipe, with both ends connected to the annular pipe and all intersections with the main horizontal pipes connected to the annular pipe.

[0020] Furthermore, the carbon-based filter decomposes organic matter in wastewater by injecting persulfate into the pipe connecting the multimedia filter and the carbon-based filter, by providing a carbon-based material in the carbon-based filter, and by setting the temperature of the wastewater entering the carbon-based filter to 40 to 70°C.

[0021] Furthermore, a third heat exchanger is further provided between the multimedia filter and the carbon-based filter to ensure the temperature of the wastewater entering the carbon-based filter.

[0022] Furthermore, when a third heat exchanger is provided, the drain end of the multimedia filter drain pipe is connected to the water supply pipe of the third heat exchanger.

[0023] Furthermore, the persulfate is peroxymonosulfate (PMS) or peroxodisulfate (PDS), and the dosage is 1 to 30 mg / L; Furthermore, the carbon-based material is activated carbon particles or biological activated carbon particles, Furthermore, the LSR wastewater is wastewater obtained by washing exhaust gas burned in a combustion furnace with water, and has a temperature of 40 to 70°C.

[0024] The present invention provides a method for recycling LSR wastewater from integrated circuits, comprising: Step S01 in which wastewater from the LSR device enters a collection pond; Step S02: drainage from the collection pond enters a pH adjustment pond and acid or alkali is added to the pH adjustment pond; Step S03 in which the wastewater from the pH adjustment pond enters the first intermediate water pond; Step S04: The wastewater from the first intermediate water reservoir is pressurized by a water pump and flows into the multimedia filter, and a coagulant is introduced into a pipe connecting the first intermediate water reservoir and the multimedia filter; Step S05: The wastewater from the multimedia filter enters the carbon-based filter, and persulfate is introduced into the pipe connecting the multimedia filter and the carbon-based filter; Step S06: the wastewater from the carbon-based filter enters a first heat exchanger; Step S07 in which the wastewater from the first heat exchanger enters the second intermediate water reservoir; Step S08: The discharged water from the second intermediate water reservoir is pressurized by a water pump and enters the cation exchange tower; Step S09 in which the wastewater from the cation exchange tower enters the anion exchange tower; Step S10 in which the wastewater from the anion exchange tower enters the feedwater reservoir; Step S11: the wastewater from the water supply reservoir is pressurized by a water pump and enters the microfiltration filter; Step S12 in which the wastewater from the microfiltration filter enters a second heat exchanger; and step S13 of supplying the wastewater from the second heat exchanger to the LSR device.

[0025] Further, the method further includes a step S14 of cleaning the particle filter medium and the fiber filter medium of the multimedia filter; In the cleaning method, the water supply pipe motor valve of the water supply pipe and the drain pipe motor valve of the drain pipe are closed, and the backwash drain pipe motor valve of the backwash drain pipe is opened. The water stored in the space above the interception net flows downward toward the particle filter material and fiber filter material due to the action of gravity. The colloidal particles and fine suspensions in the particle filter material and fiber filter material flow downward together with the backwash water, enter the bottom water supply system through the top hole of the bottom water supply system, and are discharged through the backwash drain pipe. The backwash water is discharged into the drainage equipment. After the backwashing of the particle filter material and fiber filter material is completed, the backwash drain motor valve is closed, the drain pipe motor valve of the drain pipe is opened, and the water supply pipe motor valve of the water supply pipe is opened to start the next cycle of filtration.

[0026] Furthermore, the first heat exchanger adjusts the temperature of the waste water to 30 to 40°C, and the second heat exchanger adjusts the water temperature to 25°C.

[0027] Furthermore, in step S05, a third heat exchanger is further provided between the multimedia filter and the carbon-based filter to adjust the temperature of the wastewater that has entered the carbon-based filter to 50 to 60°C.

[0028] The principle of the present invention mainly includes the principle of multimedia filter filtration and the principle of decomposing organic matter by a carbon-based filter.

[0029] The filtering principle of multimedia filters is as follows. Particle filter media and fiber filter media each have their own filtering characteristics. Particle filter media are characterized by deep filtration, while fiber filter media are characterized by high filtration accuracy. These two types of filter media are combined in a single filter device. The density of the lower particle filter media is lower than that of the upper layer, and the particle filter media layer generates an upward buoyancy, compressing the upper fiber filter layer, thereby forming a special two-layer combined filter media structure. During filtration, raw water first passes through the particle filter media, which removes colloidal particles and fine suspended solids with a particle size larger than 1 μm. Then, it enters the fiber filter media, which removes colloidal particles and fine suspended solids with a particle size larger than 0.5 μm, improving water purification. During backwashing, the water accumulated in the space above the interceptor screen lengthens the filtration layers of the particle filter media and fiber filter media under the effect of gravity, thereby cleaning them.

[0030] The principle of organic matter decomposition by the carbon-based filter is as follows: Before the wastewater enters the carbon-based filter, persulfate is added to the pipe connecting the multimedia filter and the carbon-based filter. Persulfate is a compound of peroxymonosulfate (PMS) (HSO5 - ) and peroxodisulfate PDS (SO8 2-), and persulfates contain OO bonds and are derivatives of H2O2. The jagged edges, surface defects, and delocalized π electrons on the surface of carbon-based materials have high reactivity, and oxygen-containing functional groups on the surface of carbon-based materials, such as ketohydroxyl groups, hydroxyl groups, and carboxyl groups, combine with PMS or PDS to form -C=OHO-OSO3, which further promotes the cleavage of OO bonds and produces persulfate radicals, SO4 - The persulfate radical (PDS) or the persulfate radical and the hydroxyl radical OH (PMS) can be generated. The radicals can mineralize organic matter to CO2 and H2O or convert it into small organic molecules. LSR wastewater is wastewater obtained by high-temperature combustion of exhaust gas in a combustion furnace and then washing with water. The temperature of the wastewater is high, typically 40-70°C. The thermal energy generated by the high-temperature wastewater breaks the O-O bond in the persulfate, generating the persulfate radical SO4 - It can generate persulfate radicals (PDS) or persulfate radicals and hydroxyl radicals (OH) (PMS). The radicals can mineralize organic matter into CO2 and H2O or convert it into small organic molecules, thereby achieving the decomposition of organic matter in wastewater. Carbon-based materials can activate persulfates, and hot wastewater can activate persulfates. The two create a synergistic effect, reducing the amount of persulfate input and improving the efficiency of decomposition of organic matter. [Effects of the Invention]

[0031] Compared with the prior art, the present invention has the following beneficial effects:

[0032] 1) The carbon-based filter employed in the integrated circuit LSR wastewater reuse treatment system of the present invention has the function of decomposing organic matter. The carbon-based material can activate persulfate, and the hot wastewater can activate the persulfate. The two can generate a synergistic effect, and the reduction of the input amount of persulfate results in higher efficiency in decomposing organic matter.

[0033] 2) The persulfate employed by the integrated circuit LSR wastewater reuse treatment system of the present invention does not cause secondary pollution to the environment, is inexpensive, readily available, non-toxic and harmless, and easy to use.

[0034] 3) The carbon-based filter adopted by the integrated circuit LSR wastewater reuse treatment system of the present invention has a disinfection function. The radicals generated by the activation of persulfate can inactivate bacteria and microorganisms, thereby disinfecting the wastewater. This eliminates the need to add disinfectants such as sodium hypochlorite before the multimedia filter as in the conventional process, making it low-carbon and environmentally friendly.

[0035] 4) The multimedia filter adopted by the integrated circuit LSR wastewater reuse treatment system of the present invention has better filtering effect, saves the large resistance drainage system, saves the backwash water pump, and reduces operating costs.

[0036] 5) The multimedia filter employed by the integrated circuit LSR wastewater reuse treatment system of the present invention cleverly combines two types of filter media, each with a density lighter than water. The lower particle filter media has a lower density than the upper fiber filter media. The buoyancy of the lower particle filter media and the upward thrust of the water flow during filtration combine to press against the upper fiber filter media. Different filtration speeds generate different thrusts, allowing for adjustments of filtration speed and the pressure exerted by the lower filter media on the upper filter media to meet the needs of wastewater quality. Because the fiber filter media is soft, the fiber filter media layer is compressible, allowing the packing coefficient of the upper fiber filter media to be adjusted according to the filtration speed. Within a certain range, the higher the packing coefficient, the denser the fiber filter media arrangement and the higher the filtration efficiency. Because the fiber filter media are densely packed during filtration, particles from the lower particle filter media do not penetrate the fiber filter layer. When the filter media is backwashed, the strong downward water flow causes both layers of filter media to be stretched downward by the water, so that the positions of the upper and lower filter media remain relatively unchanged, and the particle filter media in the lower layer do not enter the fibrous filter media.Compared with conventional ultrafiltration, disc filters, and quartz sand filters, the multimedia filter of the present invention can perform high-grade filtration, reduce the turbidity of the wastewater, and correspondingly reduce the organic matter and salt content in the water.Furthermore, it can reduce the organic matter load of the subsequent carbon-based filter, reduce the amount of persulfate input, and reduce the ion load of the anion ion exchange tower, reduce the amount of acid-alkali chemicals used during filter media backwashing, and save operating costs.

[0037] 6) In the integrated circuit LSR wastewater recycling treatment system of the present invention, the carbon-based filter can use expired activated carbon in the activated carbon filter basin in the pure water treatment process of the integrated circuit factory, allowing for secondary reuse of waste.

[0038] 7) The integrated circuit LSR wastewater reuse treatment method of the present invention is convenient for large-scale industrial popularization and application. [Brief explanation of the drawings]

[0039] In order to more clearly explain the technical solutions in the embodiments of the present application, the following will briefly describe the drawings that need to be used in specific embodiments. Obviously, the drawings in the following description are only some of the embodiments described in the present invention, and those skilled in the art can also obtain other drawings based on these drawings. [Figure 1] 1 is a process flow chart of the integrated circuit LSR wastewater reuse treatment system of the present invention. [Figure 2] 1 is a structural schematic diagram of the multimedia filter of the integrated circuit LSR wastewater reuse treatment system of the present invention; [Figure 3] 1 is a structural schematic diagram of the bottom water supply system and top drainage system of the multimedia filter of the integrated circuit LSR wastewater reuse treatment system of the present invention. [Figure 4] FIG. 1 is a curve diagram of the decomposition effect of TOC in water by three systems: water at 60°C, a carbon-based material, and water + carbon-based material at 60°C, with different dosages of peroxymonosulfate in Comparative Example 1 of the present invention. [Figure 5] 1 is another flowchart of the integrated circuit LSR wastewater reuse treatment system process of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0040] In order to further understand the present invention, preferred embodiments of the present invention will be described below. It should be understood that these descriptions are intended to further illustrate the features and advantages of the present invention and are not intended to be limitations on the scope of the claims of the present invention.

[0041] The quality of LSR wastewater differs from the typical characteristics of other wastewaters. First, the temperature is high, with the outlet temperature of the LSR device usually ranging from 40 to 70°C. Second, compared to other types of wastewater from integrated circuits, the main indicators of contaminants, such as total organic carbon (TOC) (<80 mg / l), electrical conductivity (<1200 μm / cm), and F - (<100mg / l) and SS (<10mg / l) values ​​are not high.

[0042] In conventional integrated circuit factories, LSR wastewater is usually discharged into a wastewater pond and treated with other wastewater to meet standards before being discharged. Some integrated circuit factories reuse LSR wastewater by treating it through processes such as filtration and salt removal. The amount of LSR wastewater is large, accounting for 10-15% of the total wastewater in the entire factory. The water requirements for the LSR equipment are not high, with total organic carbon (TOC) < 5 mg / l, conductivity < 100 μm / cm, F - The requirements for LSR wastewater treatment are only required to be met: <5 mg / L, SS <1 mg / L, and pH 7-10. To conserve water resources, the most economical and rational method is to collect and treat LSR wastewater in a dedicated manner and then supply the water to the LSR plant. After the wastewater is treated by the wastewater reuse treatment system of the present invention, it can meet the above requirements.

[0043] As shown in Figures 1 and 2, the integrated circuit LSR wastewater reuse treatment system of the present invention includes a collection pond 1, a pH adjustment pond 2, a first intermediate water pond 3, a multimedia filter 4, a carbon-based filter 5, a first heat exchanger 6, a second intermediate water pond 7, a cation exchange tower 8, an anion exchange tower 9, a water supply pond 10, a microfiltration filter 11, and a second heat exchanger 12, arranged in this order according to the process flow.

[0044] Wastewater discharged from the LSR system flows sequentially into collection pond 1 and pH regulation pond 2. Acid or alkali is added to pH regulation pond 2 to adjust the pH of the wastewater, bringing the pH of the wastewater discharged from pH regulation pond 2 to 9-10. The wastewater from pH regulation pond 2 flows into first intermediate water pond 3, where it is pressurized by a water pump and enters multimedia filter 4. Before entering multimedia filter 4, a flocculant is added into multimedia filter 4's water supply pipe 403. The flocculant causes suspended particles in the wastewater to aggregate and grow larger, forming flocs. The wastewater flows from water supply pipe 403 into bottom water supply system 402 (a porous annular pipe network with evenly spaced holes at the top), flows out through the holes at the top of bottom water supply system 402, and is filtered upward through particle filter media 405 and fiber filter media 406, removing colloidal particles and fine suspended matter with particle diameters larger than 0.5 μm. The filtered wastewater passes through the interception mesh 407, enters the top drainage system 408 through holes at the bottom of the top drainage system 408 (a porous annular pipe network with holes evenly spaced at the bottom), and is discharged through the drain pipe 409. After filtering for a certain period of time, the colloidal particles and fine suspended matter in the particulate filter medium 405 and the fiber filter medium 406 increase, which deteriorates the quality of the wastewater, and the particulate filter medium 405 and the fiber filter medium 406 need to be backwashed. The water supply pipe motor valve 411 of the water supply pipe 403 and the drain pipe motor valve 410 of the drain pipe 409 are closed, and the backwash drain pipe motor valve 412 of the backwash drain pipe 404 is opened. The water stored in the space above the blocking net 407 flows downward toward the particulate filter material 405 and the fiber filter material 406 due to the action of gravity, the filtration layers of the particulate filter material 405 and the fiber filter material 106 are stretched, and the colloidal particles and fine suspensions in the particulate filter material 405 and the fiber filter material 406 flow downward together with the backwash water, enter the bottom water supply system 402 through the hole at the top of the bottom water supply system 402, and are discharged from the backwash drain pipe 404. The backwash water is then discharged to the drainage equipment. After backwashing of the particle filter medium 405 and the fiber filter medium 406 is completed, the backwash drain motor valve 412 is closed, the drain pipe motor valve 410 of the drain pipe 409 is opened, and the water supply pipe motor valve 411 of the water supply pipe 403 is opened to start filtration for the next filtration cycle. The wastewater from the multimedia filter 4 enters the carbon-based filter 5, and before entering the carbon-based filter 5, 1 to 30 mg / L of persulfate is added to the piping connecting the multimedia filter 4 and the carbon-based filter 5.The carbon-based material can activate persulfates, and hot wastewater (LSR wastewater is wastewater obtained by high-temperature combustion in a combustion furnace and then washing with water; the wastewater temperature is high, typically 40-70°C) can activate persulfates, generating strong oxidizing radicals such as persulfate ions, which efficiently decompose organic molecules. The radicals also inactivate bacteria and microorganisms, thereby disinfecting the wastewater. The wastewater from the carbon-based filter 5 enters the first heat exchanger 6, which heat exchanges the water to 25°C. The wastewater from the first heat exchanger 6 enters the second intermediate water tank 7, which is pressurized by a water pump and enters the cation exchange tower 8, where it is exchanged with a strong acidic cation resin to remove cations from the wastewater. The wastewater from the cation exchange tower 8 enters the anion exchange tower 9, where it is exchanged with a strong alkaline anion resin to remove anions from the wastewater. The wastewater from the anion exchange tower 9 enters a water supply reservoir 10, and the wastewater from the water supply reservoir 10 is pressurized by a water pump and enters a microfiltration filter 11. The microfiltration filter 11 removes impurity particles in the water with a particle diameter larger than 0.1 μm. The wastewater from the microfiltration filter 11 enters a second heat exchanger 12, which heat-exchanges the water to a temperature required for the LSR device, for example, 25°C.

[0045] In order to further ensure the working performance and service life of the resin, the first heat exchanger 6 can exchange heat with water at a temperature of 30 to 40°C.

[0046] As shown in Figure 3, the porous annular pipe network of the present invention includes a circular pipe, a main horizontal pipe, a main vertical pipe, and multiple sub-vertical pipes. The main horizontal pipe and the main vertical pipe are arranged vertically, with their intersections connected and located at the center of the circular pipe, and both ends of the main horizontal pipe and the main vertical pipe are connected to the circular pipe. The multiple sub-vertical pipes are arranged parallel to the main vertical pipe and perpendicular to the main horizontal pipe, with both ends connected to the circular pipe and all intersections with the main horizontal pipe connected. The multiple sub-vertical pipes are generally symmetrical with respect to the main vertical pipe. For the bottom water supply system 402, the holes of the porous annular pipe network are located at the top, and for the top water supply system 408, the holes of the porous annular pipe network are located at the bottom.

[0047] The integrated circuit LSR wastewater reuse treatment process method of the present invention includes the steps of: wastewater from the LSR device entering a collection pond 1; wastewater from the collection pond 1 entering a pH adjustment pond 2 and adding an acid or alkali to the pH adjustment pond 2; wastewater from the pH adjustment pond 2 entering a first intermediate water pond 3; wastewater from the first intermediate water pond 3 being pressurized by a water pump and entering a multimedia filter 4; adding a coagulant into the pipe connecting the first intermediate water pond 3 and the multimedia filter 4; wastewater from the multimedia filter 4 entering a carbon-based filter 5 and adding a persulfur compound into the pipe connecting the multimedia filter 4 and the carbon-based filter 5. The process includes the steps of introducing an acid salt, introducing the wastewater from the carbon-based filter 5 into the first heat exchanger 6, introducing the wastewater from the first heat exchanger 6 into the second intermediate water tank 7, pressurizing the wastewater from the second intermediate water tank 7 with a water pump and introducing it into the cation exchange tower 8, introducing the wastewater from the cation exchange tower 8 into the anion exchange tower 9, introducing the wastewater from the anion exchange tower 9 into the water supply reservoir 10, pressurizing the wastewater from the water supply reservoir 10 with a water pump and introducing it into the microfiltration filter 11, introducing the wastewater from the microfiltration filter 11 into the second heat exchanger 12, and supplying the wastewater from the second heat exchanger 12 to the LSR device.

[0048] As shown in Figure 5, in order to further improve the effect of water treatment, the integrated circuit LSR wastewater reuse treatment system of the present invention further includes a third heat exchanger 13 between the multimedia filter 4 and the carbon-based filter 5. The wastewater from the multimedia filter 4 enters the third heat exchanger 13, and the wastewater from the third heat exchanger 13 enters the carbon-based filter 5. Persulfate is injected into the piping connecting the third heat exchanger 13 and the carbon-based filter 5.

[0049] Terms used in the present invention generally have the meanings commonly understood by those skilled in the art unless otherwise specified.

[0050] In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to examples.

[0051] In the following examples, various processes and methods not described in detail are conventional methods well known in the art. Materials, reagents, devices, machinery, equipment, etc. used in the following examples are commercially available unless otherwise specified.

[0052] Comparative Example 1 In this example, the TOC decomposition rates were compared for different amounts of persulfate in three systems: persulfate activated with water at 60°C, persulfate activated with a carbon-based material, and persulfate co-activated with water at 60°C and a carbon-based material. This demonstrated that persulfate co-activated with water at 60°C and a carbon-based material has a synergistic effect on TOC decomposition.

[0053] Test equipment: raw water tank, carbon filter, chemical feeder.

[0054] Test process: Method 1: Raw water with a certain TOC concentration was placed in a raw water tank and entered a carbon-based filter. Before entering the filter, peroxymonosulfate was added to the piping connecting the raw water tank and the carbon-based filter, and the raw water was discharged after passing through the carbon-based filter. Method 2: Raw water with a certain TOC concentration at 60°C was placed in a raw water tank and entered the carbon-based filter. The raw water was discharged after passing through the carbon-based filter. Method 3: Raw water with a certain TOC concentration at 60°C was placed in a raw water tank and entered the carbon-based filter. Before entering the carbon-based filter, peroxymonosulfate was added to the piping connecting the raw water tank and the carbon-based filter, and the raw water was discharged after passing through the carbon-based filter.

[0055] Test parameters: TOC 5mg / l, volume of water treated with carbon-based filter 1m 3 / h, peroxymonosulfate dosage 5mg / l, 10mg / l, 15mg / l, 20mg / l, 25mg / l, 30mg / l, respectively.

[0056] Test steps: Plan 1: The water to be treated with a TOC content of 5 mg / L is placed in a raw water tank, and the pH of the solution is adjusted to 9-10 using an acid or alkali, and the solution is stirred uniformly. Using a chemical feeder, 5 mg / L, 10 mg / L, 15 mg / L, 20 mg / L, 25 mg / L, and 30 mg / L of peroxymonosulfate were fed into the piping connecting the raw water tank and the carbon filter. The water passes through a carbon-based filter Water samples treated with the carbon-based filter were taken and the reaction was stopped using Na2SO3 at a concentration of 500 mg / L as a quenching agent.

[0057] The TOC concentrations in the treated water samples were measured.

[0058] Plan 2: The raw water tank is charged with water to be treated, with a temperature of 60°C and a TOC content of 5 mg / L. The pH of the solution is adjusted to 9-10 using an acid or alkali, and the solution is stirred uniformly. The water passes through a carbon-based filter Water samples treated with the carbon-based filter were collected and the reaction was stopped using Na2SO3 at a concentration of 500 mg / L as a quenching agent.

[0059] The TOC concentrations in the treated water samples were measured.

[0060] Plan 3: The raw water tank is charged with water to be treated, the temperature of which is 60°C and the TOC content of which is 5 mg / L. The pH of the solution is adjusted to 9-10 using an acid or alkali, and the solution is stirred uniformly. Using a chemical feeder, 5 mg / L, 10 mg / L, 15 mg / L, 20 mg / L, 25 mg / L, and 30 mg / L of peroxymonosulfate were fed into the piping connecting the raw water tank and the carbon filter. The water passes through a carbon-based filter Water samples treated with the carbon-based filter were taken and the reaction was stopped using Na2SO3 at a concentration of 500 mg / L as a quenching agent.

[0061] The TOC concentrations in the treated water samples were measured.

[0062] The decomposition effects of TOC in water using three systems, namely, water at 60°C, carbonaceous material, and water + carbonaceous material at 60°C, are shown in Table 1, and the change in the decomposition effect with the dosage of peroxymonosulfate is shown in Figure 4. C0 is the initial concentration of TOC in the solution, and C is the concentration after treatment.

[0063] [Table 1]

[0064] 4, when peroxymonosulfate was added, 60°C water alone and a carbonaceous material alone had a certain decomposition effect on TOC, but the effect was significantly improved when 60°C water + carbonaceous material was added, with the TOC removal rate reaching 97% when the amount added was 30 mg / L. This comparative example confirmed that when peroxymonosulfate was added in the present invention, the provided hot wastewater at 60°C and the carbonaceous material had a synergistic effect, generating radicals to rapidly decompose TOC in water, thereby improving the decomposition effect of the method.

[0065] Comparative Example 2 The test of this comparative example was the same as that of Comparative Example 1, except that the TOC content in the raw water was 75 mg / L. In this comparative example, the decomposition effects of different systems on TOC in water are shown in Table 2.

[0066] [Table 2]

[0067] As can be seen from the combination of Tables 1 and 2, the carbon-based filter of the present invention had similar treatment effects on raw water with high or low TOC concentrations.

[0068] Example 1 LSR wastewater quality from a semiconductor factory: TOC 5mg / l, temperature 55℃, conductivity 1200 μs / cm, F- 110mg / l, turbidity 12NTU, pH 2~11. Wastewater enters collection pond 1, and the wastewater from collection pond 1 flows into pH adjustment pond 2. Acid or alkali is added to adjust the water pH to 9. The wastewater from pH adjustment pond 2 flows into first intermediate water pond 3. The wastewater from first intermediate water pond 3 is pressurized by a water pump and enters multimedia filter 4. Before the wastewater enters multimedia filter 4, a coagulant called polyaluminum chloride is added to the pipe connecting first intermediate water pond 3 and multimedia filter 4 to coagulate and grow suspended particles in the wastewater, forming flocs. The wastewater enters bottom water supply system 402 through water supply pipe 403, flows out through the top holes of bottom water supply system 402, and is filtered by passing through polystyrene foam particle filter media and fiber bundle filter media in ascending order. Because the density of the particle filter media is smaller than that of the fiber filter media, colloidal particles and fine suspended matter with particle diameters larger than 0.5 μm are removed from the water. The filtered wastewater passed through the interceptor mesh 407, entered the top drainage system 408 through the holes at the bottom of the system, and was discharged through the drain pipe 409. The effluent turbidity of the multimedia filter 4 was less than 0.1 NTU, and the filter reduced the effluent turbidity and also reduced the organic matter in the water, such as F. - The content of salts and other elements also decreased by a certain amount. After filtration for a certain period of time, the colloidal particles and fine suspended solids in the two layers of filter media increased, causing the quality of the wastewater to deteriorate and necessitating backwashing of the filter media. The water supply pipe motor valve 411 on water supply pipe 403 and the drain pipe motor valve 410 on drain pipe 409 were closed, and the backwash drain pipe motor valve 412 on backwash drain pipe 404 was opened. The water stored in the space above the filter net 407 flowed downward toward the filter media due to gravity, and the colloidal particles and fine suspended solids in the filter media flowed downward along with the water, entered bottom water supply system 402 through the holes at the bottom of bottom water supply system 402, and were discharged through backwash drain pipe 404. The backwash water was then discharged to the drainage system. After the backwashing of the filter media was completed, the backwash drain motor valve 412 was closed, the drain pipe motor valve 410 of the drain pipe 409 was opened, and the water supply pipe motor valve 411 of the water supply pipe 403 was opened, and the next cycle of filtration was started.

[0069] The wastewater passed through the multimedia filter 4 and into the carbon-based filter 5. Before entering the carbon-based filter 5, 17 mg / L of peroxymonosulfate was added to the piping connecting the multimedia filter 4 and the carbon-based filter 5. The carbon-based material activated the persulfate, generating strong oxidizing radicals such as persulfate ions, which efficiently decomposed organic molecules. The radicals also inactivated bacteria and microorganisms, thereby disinfecting the wastewater. The wastewater from the carbon-based filter 5 entered the first heat exchanger 6, which then heat-exchanged the water to a temperature of 25°C. The wastewater from the first heat exchanger 6 entered the second intermediate water tank 7, which was pressurized by a water pump and entered the cation exchanger 8. The filling material in the cation exchanger 8 was a strongly acidic cation resin, which decomposed the sodium in the water. + , K. + , Ca 2+ and Mg 2+ Cations such as H + The wastewater from the cation exchange tower 8 enters the anion exchange tower 9, and the packing material in the anion exchange tower 9 converts the Cl in the water into - , SO4 2- , HCO3 - , CO3 2- The wastewater from the anion exchange tower 9 flows into a water supply reservoir 10, which is pressurized by a water pump and passes into a microfiltration filter 11. The microfiltration filter 11 removes impurity particles in the water with a particle size of more than 0.1 μm. The wastewater from the microfiltration filter 11 then flows into a second heat exchanger 12, which heat-exchanges the water to the temperature of 25°C required for the LSR system.

[0070] According to test measurements, after being treated with the process of the present invention, the water quality index is: temperature 25°C, conductivity <100μs / cm, F - The results were <5 mg / l, turbidity <1 NTU, and pH 9-10, meeting the feedwater quality requirements of the LSR system.

[0071] Example 2 The integrated circuit LSR wastewater reuse treatment system and method of this embodiment are the same as those of Example 1, and the LSR wastewater quality is: TOC 73 mg / l, wastewater temperature of the device 75°C, conductivity 1150 μs / cm, F - The differences were: pH 95 mg / L, SS 8.5 mg / L, pH 7-8, and peroxymonosulfate dosage 27 mg / L.

[0072] The polystyrene foam particle material has a particle size of 2.0 mm and a density of 0.074 g / cm 3 The polystyrene foam particle material filtration layer had a height of 0.75 m, and the fiber bundle filter medium was a polypropylene fiber bundle filter medium with a packing height of 0.75 m and a packing factor of 0.3.

[0073] The wastewater entered the third heat exchanger 13 from the multimedia filter 4, which adjusted the wastewater temperature to 50-60°C, and the wastewater from the third heat exchanger 13 entered the carbon-based filter 5. Before entering the carbon-based filter, peroxymonosulfate was added to the piping connecting the third heat exchanger 13 and the carbon-based filter 6. The first heat exchanger 6 adjusted the wastewater temperature to 40°C.

[0074] According to test measurements, after being treated with the process of the present invention, the water quality index was TOC 4.0 mg / l, temperature 25°C, conductivity 75 μs / cm, F - The results were 4 mg / l, SS 0.7 mg / l, and pH 9-10, which met the feedwater quality requirements of the LSR system.

[0075] Example 3 The integrated circuit LSR wastewater reuse treatment system and method of this embodiment are the same as those of Example 2, and the polystyrene foam particle material has a particle diameter of 2.5 mm and a density of 0.073 g / cm 3 The difference was that the height of the filtration layer of the polystyrene foam particle material was 0.55 m, and the fiber bundle filter medium was a polypropylene fiber bundle filter medium with a packing height of 0.55 m and a packing factor of 0.25.

[0076] According to the test measurement, after being processed by the process of the present invention, the water quality indicators are TOC 4.5 mg / l, temperature 25 °C, conductivity 79 μs / cm, F - 4.2 mg / l, SS 0.85 mg / l, pH 9 - 10, meeting the feed water quality requirements of the LSR device.

[0077] Example 4 The integrated circuit LSR wastewater reuse treatment system and method of this example are the same as those in Example 2, with the particle size of the polystyrene foam particle material being 1.5 mm and the density being 0.075 g / cm 3 and the height of the filtration layer of the polystyrene foam particle material being 1.2 m. The fiber bundle filter material is a polypropylene fiber bundle filter material with a filling height of 1.2 m and a filling coefficient of 0.35, which is different in this regard.

[0078] According to the test measurement, after being processed by the process of the present invention, the water quality indicators are TOC 4.2 mg / l, temperature 25 °C, conductivity 77 μs / cm, F - 4.2 mg / l, SS 0.9 mg / l, pH 9 - 10, meeting the feed water quality requirements of the LSR device.

[0079] Comparative Example 1 The integrated circuit LSR wastewater reuse treatment system and method of this comparative example are the same as those in Example 2. The pH of the wastewater is adjusted by the acid or alkali introduced into the pH adjustment tank (2), and the pH of the drained water from the pH adjustment tank (2) is made 8 < pH < 9, which is different in this regard.

[0080] According to the measurement, when 8 < pH < 9, the water quality indicators of the drained water are TOC 12 mg / l, temperature 25 °C, conductivity 82 μs / cm, F - 4.5 mg / l, SS 0.95 mg / l, pH 8 - 9, not meeting the feed water quality requirements of the LSR device.

[0081] Comparative Example 1 shows that compared with Example 2, the value of TOC after treatment is higher. In the present invention, when the pH of the drained water from the pH adjustment tank is 9 - 10, the treatment effect of organic substances is better.

[0082] Comparative Example 2 The integrated circuit LSR wastewater reuse treatment system and method of this comparative example was the same as that of Example 2, except that only polystyrene foam particle material was added to the multimedia filter.

[0083] According to test measurements, after treatment with the process of this comparative example, the water quality index was TOC 4.8 mg / l, temperature 25°C, conductivity 92 μs / cm, F - The pH was 9-10 and the SS value was high, which did not meet the water quality requirements of the LSR system.

[0084] Comparative Example 3 The integrated circuit LSR wastewater recycling treatment system and method of this comparative example was the same as that of Example 2, except that only fiber bundle filter media was added to the multimedia filter.

[0085] According to test measurements, after treatment with the process of this comparative example, the water quality index was TOC 4.9 mg / l, temperature 25°C, conductivity 97 μs / cm, F - The SS values ​​were high and did not meet the water quality requirements of the LSR system.

[0086] Combining Comparative Examples 2 and 3 with Example 2, it was found that the use of the multimedia filter of the present invention provided a better filtering effect.

[0087] Comparative Example 4 The integrated circuit LSR wastewater recycling treatment system and method of this comparative example were the same as those of Example 2, except that the packing factor of the polypropylene fiber bundle filter medium was 0.1.

[0088] According to test measurements, the water quality indexes treated by the process of this comparative example were TOC 6.5 mg / l, temperature 25°C, conductivity 98 μs / cm, F -The TOC and SS values ​​were high, with values ​​of 5 mg / L, 3.5 mg / L SS, and a pH of 9-10, and did not meet the feedwater quality requirements for the LSR system. The foregoing merely describes some exemplary embodiments of the present invention, and it will be apparent to those skilled in the art that the described embodiments can be modified in various different ways without departing from the spirit and scope of the present invention. Accordingly, the above drawings and descriptions are exemplary in nature and should not be construed as limiting the scope of the claims of the present invention. [Explanation of symbols]

[0089] 1 collection pond, 2 pH adjustment pond, 3 first intermediate water pond, 4 multimedia filter, 5 carbon-based filter, 6 first heat exchanger, 7 second intermediate water pond, 8 cation exchange tower, 9 anion exchange tower, 10 water supply pond, 11 microfiltration filter, 12 second heat exchanger, 13 third heat exchanger, 401 Boiler body, 402 Bottom water supply system, 403 Water supply pipe, 404 Backwash drain pipe, 405 Particle filter medium, 406 Fiber filter medium, 407 Blocking net, 408 Top drain system, 409 Drain pipe, 410 Drain pipe motor valve, 411 Water supply pipe motor valve, 412 Backwash drain pipe motor valve.

Claims

1. 1. An integrated circuit LSR wastewater reuse treatment system comprising: a collection pond for receiving wastewater discharged from the LSR device and adjusting the amount of water; a pH adjustment pond located downstream of the collection pond, connected to the collection pond, and configured to adjust the pH of the wastewater; a first intermediate water reservoir located downstream of the pH adjustment reservoir and connected to the pH adjustment reservoir; a multimedia filter located downstream of the first intermediate water reservoir and connected to the first intermediate water reservoir, for removing colloidal particles and suspended solids in the wastewater having a particle diameter of more than 0.5 μm; a carbon-based filter located downstream of the multimedia filter and connected to the multimedia filter, for decomposing organic matter in the wastewater; a first heat exchanger located downstream of the carbon-based filter and connected to the carbon-based filter for exchanging heat with the wastewater; a second intermediate water reservoir located downstream of the first heat exchanger and connected to the first heat exchanger; a cation exchange tower located downstream of the second intermediate water reservoir and connected to the second intermediate water reservoir for removing cations from the wastewater; an anion exchange tower located downstream of the cation exchange tower and connected to the cation exchange tower for removing anions in the wastewater; a water supply reservoir located downstream of the anion exchange column and connected to the anion exchange column; a microfiltration filter located downstream of the water supply reservoir and connected to the water supply reservoir, for removing impurity particles having a particle diameter of greater than 0.1 μm from the wastewater to obtain recyclable water; a second heat exchanger located downstream of the microfiltration filter and connected to the microfiltration filter, for heat exchange with water to meet the water temperature requirements of the LSR device, in order according to the process flow.

2. The integrated circuit LSR wastewater reuse treatment system according to claim 1, characterized in that the pH adjustment pond adjusts the pH of the wastewater by adding acid or alkali, and the pH of the wastewater from the pH adjustment pond is 9 to 10.

3. The multimedia filter removes colloidal particles and suspended solids in wastewater having a particle size of more than 0.5 μm by:

2. The integrated circuit LSR wastewater reuse treatment system according to claim 1, wherein a coagulant is added to a pipe connecting the first intermediate water reservoir and the multimedia filter.

4. The integrated circuit LSR wastewater reuse treatment system of claim 3, characterized in that the multimedia filter is provided with a light filter material whose density is lighter than that of water, the light filter material being a particle filter material and a fiber filter material arranged in order from bottom to top, and the density of the particle filter material is lower than that of the fiber filter material.

5. the flocculant is polyaluminum chloride; and / or the particulate filter medium is a polystyrene particulate material; The integrated circuit LSR wastewater reuse treatment system according to claim 4, wherein the fiber filter material is a fiber bundle filter material.

6. The polystyrene particle material has a particle diameter of 0.5 to 3.0 mm and a density of 0.05 to 0.10 g / cm ３ 6. The integrated circuit LSR wastewater reuse treatment system according to claim 5, wherein the filter layer is made of polystyrene foam particle material with a height of 0.5-1.5 m.

7. The integrated circuit LSR wastewater reuse treatment system according to claim 5, characterized in that the fiber bundle filter material is a polypropylene fiber bundle filter material with a filling height of 0.5-1.5m and a filling coefficient of 0.15-0.

35.

8. The integrated circuit LSR wastewater reuse treatment system of claim 3, characterized in that a bottom water supply system is provided at the bottom of the multimedia filter body, the bottom water supply system being a porous annular pipe network with equally spaced holes at the top, one end of the bottom water supply system being connected to the drain end of the water supply pipe of the multimedia filter, the water supply end of the water supply pipe being connected to the drain pipe of the first intermediate water reservoir, and the water supply pipe being provided with a water supply pipe motor valve.

9. The integrated circuit LSR wastewater reuse treatment system of claim 8, wherein the other end of the bottom water supply system is connected to the filter backwash drain pipe of the multi-media filter, and the filter backwash drain pipe is provided with a backwash drain pipe motor valve.

10. The integrated circuit LSR wastewater reuse treatment system of claim 8, characterized in that the bottom water supply system is provided with a particle filter material and a fiber filter material in order from bottom to top, the lower particle filter material has a lower density than the upper fiber filter material, and a blocking net is provided above the fiber filter material, and the fiber filter material is fixed to the blocking net.

11. The integrated circuit LSR wastewater reuse treatment system of claim 10, characterized in that a top drainage system is provided above the blocking net and at the top of the can body, the top drainage system being a porous annular pipe network with equally spaced holes at the bottom, one end of the top drainage system being connected to the water supply end of the drain pipe of the multimedia filter, the drain pipe being provided with a drain motor valve, and the drain end of the drain pipe being connected to the water supply pipe of the carbon-based filter.

12. The porous annular pipe network includes a circular pipe, a main horizontal pipe, and a main vertical pipe; The integrated circuit LSR wastewater reuse treatment system according to any one of claims 8 to 11, characterized in that the main horizontal pipe and the main vertical pipe are arranged vertically, their intersections are connected and located at the center of the annular pipe, and both ends of the main horizontal pipe and the main vertical pipe are connected to the annular pipe.

13. The porous annular pipe network is 13. The integrated circuit LSR wastewater reuse treatment system of claim 12, further comprising a plurality of sub-vertical pipes arranged parallel to the main vertical pipe and perpendicular to the main horizontal pipe, each of which is connected to the annular pipe at both ends and connected to the main horizontal pipe at all intersections.

14. The carbon-based filter decomposes organic matter in wastewater in the following manner: Injecting persulfate into a pipe connecting the multimedia filter and the carbon-based filter; a carbon-based material is provided within the carbon-based filter; 2. The integrated circuit LSR wastewater recycling treatment system according to claim 1, wherein the temperature of the wastewater entering the carbon-based filter is 40 to 70°C.

15. 15. The integrated circuit LSR wastewater reuse treatment system of claim 14, further comprising a third heat exchanger between the multimedia filter and the carbon-based filter.

16. the persulfate is peroxymonosulfate or peroxodisulfate, and the dosage is 1 to 30 mg / L; and / or the carbon-based material is activated carbon particles or biological activated carbon particles; And / or, the LSR wastewater is wastewater obtained by washing exhaust gas burned in a combustion furnace, and has a temperature of 40 to 70°C.

17. A process method for recycling integrated circuit LSR wastewater using the recycling treatment system for integrated circuit LSR wastewater according to any one of claims 1 to 16, comprising: Step S01 in which wastewater from the LSR device enters a collection pond; Step S02: drainage from the collection pond enters a pH adjustment pond, and acid or alkali is added to the pH adjustment pond; Step S03 in which the wastewater from the pH adjustment pond enters the first intermediate water pond; Step S04: The wastewater from the first intermediate water reservoir is pressurized by a water pump and flows into the multimedia filter, and a coagulant is introduced into a pipe connecting the first intermediate water reservoir and the multimedia filter; Step S05: The wastewater from the multimedia filter enters the carbon-based filter, and persulfate is introduced into a pipe connecting the multimedia filter and the carbon-based filter; Step S06: the wastewater from the carbon-based filter enters the first heat exchanger; Step S07 in which the wastewater from the first heat exchanger enters the second intermediate water reservoir; Step S08: The discharged water from the second intermediate water reservoir is pressurized by a water pump and enters the cation exchange tower; Step S09: the wastewater from the cation exchange tower enters the anion exchange tower; Step S10: the wastewater from the anion exchange tower enters the water supply reservoir; Step S11: The wastewater from the water supply reservoir is pressurized by a water pump and enters the microfiltration filter; Step S12 in which the wastewater from the microfiltration filter enters a second heat exchanger; and step S13 of supplying the wastewater from the second heat exchanger to an LSR device.

18. 18. The integrated circuit LSR wastewater reuse treatment process method according to claim 17, which employs the integrated circuit LSR wastewater reuse treatment system according to claim 5, comprising: The method further includes a step S14 of cleaning the particle filter media and fiber filter media of the multimedia filter; The cleaning method includes: closing the water supply pipe motor valve of the water supply pipe and the drain pipe motor valve of the drain pipe, and opening the backwash drain pipe motor valve of the backwash drain pipe; the water stored in the upper space of the interceptor net flows downward toward the particle filter material and the fiber filter material due to the action of gravity; the colloidal particles and suspended matter in the particle filter material and the fiber filter material flow downward together with the backwash water, enter the bottom water supply system through the top hole of the bottom water supply system, and are discharged through the backwash drain pipe; the backwash water is discharged into the drainage equipment; after the backwashing of the particle filter material and the fiber filter material is completed, closing the backwash drain motor valve, opening the drain pipe motor valve of the drain pipe, and opening the water supply pipe motor valve of the water supply pipe, and starting the next cycle of filtration.

19. 18. The integrated circuit LSR wastewater reuse treatment process of claim 17, wherein the second heat exchanger adjusts the water temperature to 25°C.

20. 18. The integrated circuit LSR wastewater reuse treatment process method of claim 17, wherein in step S05, a third heat exchanger is further installed between the multimedia filter and the carbon-based filter to adjust the temperature of the wastewater entering the carbon-based filter to 50-60°C.

Images