Inkjet apparatus

Abstract

To provide an ink jet apparatus capable of reducing the residual vibration of a diaphragm generated at the time of emitting ink.SOLUTION: A liquid ejecting head includes a partition wall that partitions a pressure chamber that stores ink to be ejected from a nozzle, a diaphragm that presses the pressure chamber, a first piezoelectric element that presses a portion of the diaphragm corresponding to the pressure chamber, a second piezoelectric element that is disposed at a portion of the diaphragm corresponding to the partition wall, and a first vibration damping portion that is provided between the first piezoelectric element and the second piezoelectric element and comes into contact with the diaphragm to reduce residual vibration of the diaphragm.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to inkjet devices. [Background technology]

[0002] In recent years, printed electronics, which involves forming electronic devices on demand using inkjet printing, has become increasingly popular.

[0003] The production of electronic devices requires the conversion of a wide variety of materials into inks, and active development is underway to develop piezoelectrically driven inkjet heads that are capable of stably ejecting a wide variety of inks.

[0004] For example, in the inkjet device described in Patent Document 1, a piezoelectric element (PZT: lead zirconate titanate) is deformed when a voltage is applied, which deforms a diaphragm and presses a pressure chamber to eject ink. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-232290 Summary of the Invention [Problem to be solved by the invention]

[0006] However, residual vibration occurs in the diaphragm when ink is ejected. To eject ink stably, the next ink ejection must be performed after the residual vibration of the diaphragm has subsided. This poses the problem of unstable high-frequency ejection, which ejects ink in short cycles.

[0007] Non-limiting examples of the present disclosure contribute to providing an inkjet device that can reduce residual vibration of a diaphragm that occurs when ink is ejected. [Means for solving the problem]

[0008] An inkjet device according to one embodiment of the present disclosure includes a partition wall separating pressure chambers that store ink ejected from nozzles, a diaphragm that presses the pressure chambers, a first piezoelectric element that presses a portion of the diaphragm that corresponds to the pressure chambers, a second piezoelectric element that is disposed on a portion of the diaphragm that corresponds to the partition wall, and a first vibration damping section that is disposed between the first piezoelectric element and the second piezoelectric element and that contacts the diaphragm to reduce residual vibration of the diaphragm. [Effects of the Invention]

[0009] According to an embodiment of the present disclosure, it is possible to provide an inkjet device capable of reducing residual vibration of a diaphragm that occurs when ink is ejected.

[0010] Further advantages and benefits of an embodiment of the present disclosure will become apparent from the specification and drawings. Such advantages and / or benefits may be provided by some of the embodiments and features described in the specification and drawings, respectively, but not necessarily all of them may be provided to obtain one or more identical features. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic diagram showing the appearance of an inkjet device according to a first embodiment; [Figure 2] FIG. 1 is an exploded perspective view showing the appearance of an inkjet head according to a first embodiment; [Figure 3] FIG. 1 is a diagram illustrating an example of the configuration of a discharge head according to a first embodiment. [Figure 4] FIG. 1 is a diagram showing an example of an XZ cross section of a discharge head according to a first embodiment. [Figure 5] FIG. 10 is a diagram showing an example of a YZ cross section of a discharge head according to a second embodiment. [Figure 6] FIG. 10 is a diagram showing an example of a YZ cross section of a discharge head according to a third embodiment. [Figure 7] FIG. 10 is a diagram showing an example of an XZ cross section of a discharge head according to a fourth embodiment. [Figure 8] FIG. 10 is a diagram showing an example of a YZ cross section of a discharge head according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings as appropriate. However, more detailed explanation than necessary may be omitted. For example, detailed explanation of already well-known matters or redundant explanation of substantially identical configurations may be omitted. This is to avoid unnecessary redundancy in the following explanation and to facilitate understanding by those skilled in the art.

[0013] The accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present disclosure, and are not intended to limit the subject matter described in the claims.

[0014] First Embodiment The inkjet device 1 will be described with reference to Fig. 1. Fig. 1 is a plan view of the inkjet device 1 according to the first embodiment. As shown in Fig. 1, the widthwise direction of the inkjet device 1 is the X direction, the lengthwise direction is the Y direction, and the direction perpendicular to the X and Y directions is the Z direction.

[0015] The inkjet device 1 includes a base 2, a guide 3, a conveying table 4, a gate-shaped gantry 5 as an example of a support member, a line head 6, and a drive unit 8.

[0016] The base 2 is configured as a rectangular parallelepiped having a rectangular planar shape that is long in the scanning direction.

[0017] The guide 3 is fixed to the upper surface of the base 2 along the longitudinal direction (Y direction) of the base 2, i.e., along the scanning direction. As an example, the guide 3 is made of a member having a rectangular parallelepiped shape with a rectangular cross section along a direction perpendicular to the scanning direction.

[0018] The conveying table 4 has a rectangular shape, and its lower surface (the surface on the -Z side) contacts the guide 3. The conveying table 4 is guided by the guide 3 and conveyed in the scanning direction of the base 2. A printing object 7 such as a substrate is placed on the conveying table 4.

[0019] The gantry 5 has a gate-like shape and is fixed to a predetermined position, for example, a middle position, of the base 2 so as to straddle the base 2 in the short direction in a plan view (when viewed from the +Z side).

[0020] The line head 6 is an example of an ejection head, and is supported by the gantry 5. The line head 6 ejects ink toward the conveying table 4 in synchronization with the timing at which the conveying table 4 passes under the line head 6. The ink is applied to an application area of ​​a printing target 7 placed on the conveying table 4.

[0021] 1, two types of line heads 6 are arranged on each side of the gantry 5, but only one line head 6 may be arranged on the gantry 5, or two gantries 5 may be arranged with a total of four line heads 6 arranged on each side of each gantry 5. The number and arrangement of the line heads 6 may be changed depending on the processing to be performed by the line heads 6 on the printing object 7.

[0022] In addition, in order to drive the conveying table 4 in the scanning direction, at least one driving unit 8 is arranged on the base 2 along the scanning direction and connected to the conveying table 4, making it possible to drive and convey the conveying table 4 in the scanning direction.

[0023] 1, as an example of the drive unit 8, two drive units 8 are arranged on the base 2 along the scanning direction near both ends of the inkjet device 1 in the short side direction. Each drive unit 8 may be a linear motor, or may be a ball screw connected to a rotary motor, etc. In this configuration, a drive unit 8 using a linear motor is shown as an example.

[0024] The discharge head 20 will be described with reference to Fig. 2. Fig. 2 is an exploded perspective view showing the appearance of the discharge head 20 according to the first embodiment. As shown in Fig. 2, the longitudinal direction of the discharge head 20 is the X direction, the lateral direction is the Y direction, and the direction perpendicular to the X direction and Y direction is the Z direction.

[0025] As shown in FIG. 2, the ejection head 20 includes a nozzle plate 21, a flow path plate 22, a diaphragm 23, a housing 24, and a pressure fluctuation unit 25.

[0026] The nozzle plate 21 is disposed so that its plate surface is perpendicular to the Z direction. The nozzle plate 21 is made of a stainless steel plate formed by, for example, etching or press working. The thickness of the stainless steel plate is, for example, 100 micrometers. Nozzles 34 that eject ink are formed in the nozzle plate 21 along the Y direction.

[0027] The flow path plate 22 has a rectangular parallelepiped shape and is disposed on the +Z side of the nozzle plate 21 so that its plate surface is perpendicular to the Z direction. The flow path plate 22 is sandwiched between the diaphragm 23 and the nozzle plate 21. The flow path plate 22 is a laminate of stainless steel plates formed by, for example, etching or press working. The thickness of each stainless steel plate is, for example, 10 to 100 micrometers, and the number of laminated layers is, for example, 3 to 10.

[0028] The diaphragm 23 is disposed on the +Z side of the flow path plate 22 so that its plate surface is perpendicular to the Z direction. The diaphragm 23 is sandwiched between the housing 24 and the flow path plate 22. The diaphragm 23 is, for example, a thin film having a thickness of 5 to 50 micrometers, and is produced by, for example, electroplating a nickel alloy.

[0029] The housing 24 has a rectangular parallelepiped shape and is disposed on the +Z side of the diaphragm 23. The housing 24 has a thickness of 1 centimeter in the Z direction, for example. The housing 24 is produced by cutting an alloy steel such as stainless steel.

[0030] The pressure fluctuation unit 25 is housed in the housing 24, and generates pressure fluctuations by pressurizing the ink stored in the pressure chamber 33. The pressure fluctuation unit 25 has, for example, a control board on which a control IC or the like is mounted, and the control board individually controls the voltages applied to the piezoelectric elements 38a and 38b shown in FIG.

[0031] The nozzle plate 21 and the flow path plate 22, the flow path plate 22 and the diaphragm 23, the diaphragm 23 and the housing 24, and the diaphragm 23 and the pressure fluctuation unit 25 are each bonded and fixed with an adhesive. For example, an epoxy adhesive having thermosetting properties is used as the adhesive. The adhesives used to bond the respective components may be the same adhesive or different adhesives. For example, a rubber adhesive and an epoxy adhesive may be used in combination.

[0032] The schematic configuration of the ejection head 20 will be described with reference to Fig. 3. Fig. 3 is a diagram showing an example of the configuration of the ejection head 20 according to the first embodiment.

[0033] The ejection head 20 has an ink supply channel 31 , an ink discharge channel 32 , a pressure chamber 33 , a nozzle 34 , a partition wall 35 , an ink inlet channel 36 , and an ink outlet channel 37 .

[0034] The ink supply flow path 31 and the ink discharge flow path 32 are arranged along the X direction of the ejection head 20. The ink supply flow path 31 and the ink discharge flow path 32 are also arranged to face each other in the Y direction of the ejection head 20.

[0035] The pressure chamber 33 is disposed between the ink supply channel 31 and the ink discharge channel 32. A plurality of pressure chambers 33 are disposed in the X direction.

[0036] The ink supplied to the ink supply flow path 31 is supplied to the pressure chamber 33 via the ink inlet flow path 36 that communicates with the pressure chamber 33 by the negative pressure that is generated in the pressure chamber 33 when the piezoelectric elements 38a and 38b contract from their expanded state. Some of the ink supplied to the pressure chamber 33 is ejected from the nozzle 34 by the pressure applied to the pressure chamber 33 due to the expansion of the piezoelectric elements 38a and 38b, and the remainder is discharged to the ink discharge flow path 32 via the ink outlet flow path 37 that communicates with the pressure chamber 33. The ink in the ink discharge flow path 32 is supplied again to the ink supply flow path 31.

[0037] The nozzles 34 are through holes provided in the nozzle plate 21, and communicate the inside and outside of the pressure chambers 33. The nozzles 34 are provided corresponding to the pressure chambers 33. Furthermore, ink is ejected from the nozzles 34 in the −Z direction.

[0038] Furthermore, in the Y direction, the nozzle 34 is provided on the ink outlet flow path 37 side (+Y side) of the pressure chamber 33. This configuration is effective for smoothly ejecting ink from the nozzle 34 and discharging ink to the ink outlet flow path 37.

[0039] A plurality of partition walls 35 are arranged in the X direction. The partition walls 35 separate the pressure chambers 33 that store the ink ejected from the nozzles 34.

[0040] The schematic configuration of the discharge head 20 in an XZ cross section will be described with reference to Fig. 4. Fig. 4 is a diagram showing an example of an XZ cross section of the discharge head 20 according to the first embodiment (for example, a cross section taken along line AA in Fig. 3).

[0041] The pressure chamber 33 is composed of a nozzle plate 21, a partition wall 35, and a diaphragm 23. The nozzle plate 21 constitutes the lower (-Z side) wall of the pressure chamber 33. The partition wall 35 constitutes the left (+X side) and right (-X side) walls of the pressure chamber 33. The diaphragm 23 constitutes the upper (+Z side) wall of the pressure chamber 33.

[0042] A plurality of piezoelectric elements 38a and 38b are arranged alternately in the X direction. Piezoelectric element 38a (first piezoelectric element) is arranged in a portion of diaphragm 23 corresponding to pressure chamber 33. Piezoelectric element 38a presses the portion corresponding to pressure chamber 33 via diaphragm 23.

[0043] The piezoelectric element 38b (second piezoelectric element) is disposed in a portion of the diaphragm 23 that corresponds to the partition wall 35. The piezoelectric element 38b supports the portion that corresponds to the partition wall 35 via the diaphragm 23.

[0044] The base 39 fixes a plurality of piezoelectric elements 38a and 38b arranged in the X direction on the side opposite to the diaphragm 23. For example, the base 39 has the same composition as the piezoelectric elements 38a and 38b, and is molded integrally with the piezoelectric elements 38a and 38b.

[0045] The vibration damping section 40 (first vibration damping section) is provided between the piezoelectric element 38a and the piezoelectric element 38b, and is in contact with the diaphragm 23 to reduce residual vibration of the diaphragm 23 that occurs when ink is ejected from the inkjet device 1. The vibration damping section 40 may also be called a vibration absorbing section, a vibration mitigating section, a damper, or the like.

[0046] 4, when the width of the vibration damping section 40 in the X direction is Wd and the height in the Z direction is Hd, Wd is preferably 10 micrometers or more and 200 micrometers or less, and Hd is preferably 0.01 micrometers or more and 5 millimeters or less.

[0047] This configuration can reduce the residual vibration of the diaphragm 23 when ink is ejected, thereby shortening the time it takes for the residual vibration of the diaphragm 23 to settle down, allowing the inkjet device 1 to eject ink stably at high frequency.

[0048] <Second embodiment> A schematic configuration of the discharge head 20 according to the second embodiment in a YZ cross section will be described with reference to Fig. 5. Fig. 5 is a diagram showing an example of a YZ cross section of the discharge head 20 according to the second embodiment (for example, a BB cross section in Fig. 3).

[0049] In this embodiment, the vibration damping portion 41a (second vibration damping portion) and the vibration damping portion 41b (third vibration damping portion) are each disposed on the +Z side near both ends of the pressure chamber 33 in the Y direction.

[0050] The vibration damping section 41a is provided on the ink supply flow path 31 side that supplies ink to the pressure chamber 33 of the piezoelectric element 38a, and is in contact with the diaphragm 23 to reduce residual vibration of the diaphragm 23 that occurs near the ink inlet flow path 36 when the inkjet device 1 ejects ink.

[0051] The vibration damping section 41b is provided on the ink discharge flow path 32 side that discharges ink from the pressure chamber 33 of the piezoelectric element 38a, and is in contact with the diaphragm 23 to reduce residual vibration of the diaphragm 23 that occurs near the ink outlet flow path 37 when ink is discharged from the inkjet device 1. The vibration damping section 41b is also positioned so that its own center D in the X direction is misaligned with the center N of the nozzle 34 in the X direction.

[0052] The ink supply flow path 31 and the ink inlet flow path 36 are connected via a hole 31a formed in the diaphragm 23, and ink supplied to the ink supply flow path 31 passes through the ink inlet flow path 36 via the hole 31a and is supplied to the pressure chamber 33.

[0053] The ink discharge flow path 32 and the ink outlet flow path 37 are connected via a hole 32a formed in the diaphragm 23, and ink discharged from the pressure chamber 33 to the ink outlet flow path 37 passes through the ink discharge flow path 32 via the hole 32a and is discharged from the ejection head 20.

[0054] Residual vibrations occurring in the diaphragm 23 are large near both ends of the pressure chamber 33 in the Y direction due to reflection of pressure waves inside the pressure chamber 33 that are generated when ink is ejected from the inkjet device 1. In other words, the residual vibrations of the diaphragm 23 are large near the ink inlet flow path 36 located at one end of the pressure chamber 33 and near the ink outlet flow path 37 located at the other end of the pressure chamber 33.

[0055] Since the vibration attenuation portions 41a and 41b are arranged in correspondence with the portions of the diaphragm 23 where the residual vibration is large, the residual vibration of the diaphragm 23 can be efficiently reduced.

[0056] Furthermore, the residual vibration of the diaphragm 23 is greater near the ink outlet flow path 37, which is closer to the nozzle 34 from which ink is ejected, than near the ink inlet flow path 36, of both ends of the pressure chamber 33 in the Y direction.

[0057] Therefore, the vibration damping portion 41b is located closer to the nozzle 34 than the vibration damping portion 41a, and the Y-direction width Lout of the vibration damping portion 41b in the Y direction (first direction) in which the vibration damping portion 41b faces the vibration damping portion 41a is greater than the Y-direction width Lin of the vibration damping portion 41a (Lout>Lin).

[0058] The width Lin of the vibration damping portion 41a is preferably 10 micrometers or more and 200 micrometers or less, and the width Lout of the vibration damping portion 41b is preferably 20 micrometers or more and 400 micrometers or less.

[0059] In the second embodiment, the vibration damping units 41a and 41b are each disposed near both ends of the pressure chamber 33 in the Y direction. This makes it possible to efficiently reduce residual vibration of the diaphragm 23 near the ink inlet flow path 36 and the ink outlet flow path 37 that are connected to the pressure chamber 33 and where large residual vibrations are likely to occur.

[0060] <Third embodiment> A schematic configuration of the ejection head 20 according to the third embodiment in a YZ cross section will be described with reference to Fig. 6. Fig. 6 is a diagram showing an example of a YZ cross section of the ejection head 20 according to the third embodiment (for example, a BB cross section in Fig. 3).

[0061] In the third embodiment, unlike the second embodiment, the vibration damping portion 41b is disposed so that its own center D in the Y direction coincides with the center N of the nozzle 34 in the Y direction.

[0062] In the third embodiment, the center D of the vibration damping section 41b and the center N of the nozzle 34 coincide in the Y direction, so that residual vibration of the diaphragm 23 near the ink outlet flow path 37, which tends to increase due to ink ejection, can be efficiently reduced.

[0063] <Fourth embodiment> A schematic configuration of the ejection head 20 according to the fourth embodiment in an XZ cross section will be described with reference to Figures 7 and 8. Figure 7 is a diagram showing an example of the XZ cross section of the ejection head 20 according to the fourth embodiment (for example, a cross section taken along line AA in Figure 4). Figure 8 is a diagram showing an example of the YZ cross section of the ejection head 20 according to the fourth embodiment (for example, a cross section taken along line BB in Figure 3).

[0064] In the fourth embodiment, the pressure chamber 33 is formed so that its width in the X direction is longer than in the past. Specifically, the width Wi of the pressure chamber 33 in the X direction is equal to or greater than the height Hi of the pressure chamber 33 in the Z direction. In other words, the ratio (Wi / Hi) of the width Wi of the pressure chamber 33 in the X direction (second direction) in which the piezoelectric element 38a and the piezoelectric element 38b face each other to the height Hi of the pressure chamber 33 is 1 or greater. This makes the resonance period of the pressure chamber 33 longer than in the past, and allows the inkjet device 1 to eject more ink in one ejection.

[0065] 7, the width Wd of the vibration damping section 40 in the X direction is taken as Wd, and the height Hd of the vibration damping section 40 in the Z direction is taken as Hd. The width Wd of the vibration damping section 40 is preferably 10 micrometers or more and 200 micrometers or less. The height Hd of the vibration damping section 40 is preferably 0.01 micrometers or more and 5 millimeters or less.

[0066] 7, the width of the pressure chamber 33 in the X direction is Wi and the height of the pressure chamber 33 in the Z direction is Hi, the width Wi of the pressure chamber 33 is preferably 50 micrometers or more and 700 micrometers or less. The height Hi of the pressure chamber 33 is preferably 50 micrometers or more and 500 micrometers or less.

[0067] Furthermore, the ratio (Wi / Wd) of the width Wi of the pressure chamber 33 to the width Wd of the vibration damping section 40 is preferably 4 or more and 20 or less. Furthermore, the ratio of the width Wi of the pressure chamber 33 to the height Hi of the pressure chamber 33 is preferably 1 or more and 5 or less.

[0068] 8, the width Lin in the Y direction of the vibration damping section 41a is preferably 10 micrometers or more and 200 micrometers or less, and the width Lout of the vibration damping section 41b is preferably 20 micrometers or more and 400 micrometers or less.

[0069] Furthermore, it is preferable that the ratio (Lout / Lin) of the width Lout of the vibration attenuation portion 41b to the width Lin of the vibration attenuation portion 41a is 1 or more and 5 or less.

[0070] In the fourth embodiment, the pressure chamber 33 is formed to have a larger volume, and therefore the area of ​​the diaphragm 23 that deforms when the inkjet device 1 ejects ink is larger than in the past. As a result, the inkjet device 1 can reduce the amount of deformation of the diaphragm 23 when ink is ejected. This reduces the residual vibration of the diaphragm 23, and the effect of the vibration damping units 40, 41a, and 41b in reducing the residual vibration is enhanced.

[0071] The vibration damping portion 41b may be configured to be disposed so that its center D in the Y direction coincides with the center N of the nozzle 34 in the Y direction. In this case, the vibration damping portions 40, 41a, 41b can further efficiently reduce the residual vibration of the diaphragm 23.

[0072] <Summary of the embodiment> As described above, the inkjet device of this embodiment comprises a partition wall separating pressure chambers that store ink ejected from nozzles, a diaphragm that presses the pressure chambers, a first piezoelectric element that presses a portion of the diaphragm that corresponds to the pressure chambers, a second piezoelectric element that is arranged on a portion of the diaphragm that corresponds to the partition wall, and a first vibration damping section that is provided between the first piezoelectric element and the second piezoelectric element and that comes into contact with the diaphragm to reduce residual vibration of the diaphragm.

[0073] This configuration makes it possible to efficiently reduce residual vibration of the diaphragm 23 that occurs when ink is ejected from the inkjet device 1. This shortens the time it takes for the residual vibration of the diaphragm 23 to settle, enabling the inkjet device 1 to eject ink stably at high frequency.

[0074] The vibration damping portions 40, 41a, and 41b include, for example, an elastomer material (liquid fluorine, silicone, urethane, epoxy, etc.). The vibration damping portions 40, 41a, and 41b are manufactured by, for example, two-component adhesive, room temperature curing, UV curing, or heat curing (100°C or less). The characteristics of the vibration damping portion 40 are, for example, a penetration of 70 (JIS K-2220, 1 / 4 cone) and a viscosity of 3 Pa.s, and it is preferable that the penetration be 20 to 200 and the viscosity be 50 Pa.s.

[0075] In the above-described embodiments, the notation "... part" used for each component may be replaced with other notations such as "... assembly," "... device," "... unit," or "... module."

[0076] Although the embodiments have been described above with reference to the drawings, the present disclosure is not limited to such examples. It is clear that a person skilled in the art can conceive of various modifications or alterations within the scope of the claims. It is understood that such modifications or alterations also fall within the technical scope of the present disclosure. Furthermore, the components of the embodiments may be combined in any manner without departing from the spirit of the present disclosure. [Industrial Applicability]

[0077] The present disclosure is useful as an inkjet device. [Explanation of symbols]

[0078] 1. Inkjet device 2 bases 3 Guide 4 Transport table 5 Gantry 6 Line Head 7 Printing material 8 Drive unit 20 Discharge head 21 Nozzle plate 22 Flow path plate 23 Diaphragm 24 Housing 25 Pressure fluctuation section 31 Ink supply channel 32 Ink discharge channel 33 Pressure Chamber 34 nozzles 35 Bulkhead 36 Ink inlet channel 37 Ink outlet channel 38a Piezoelectric element 38b Piezoelectric element 39 Base 40 Vibration damping section 41a Vibration damping section 41b Vibration damping section

Claims

1. a partition wall separating pressure chambers that store ink to be ejected from the nozzles; a diaphragm that presses the pressure chamber; a first piezoelectric element that presses a portion of the diaphragm that corresponds to the pressure chamber; a second piezoelectric element disposed at a portion of the diaphragm corresponding to the partition wall; a first vibration attenuation portion provided between the first piezoelectric element and the second piezoelectric element and in contact with the diaphragm to reduce residual vibration of the diaphragm; An inkjet device comprising:

2. a second vibration attenuator provided on an ink supply flow path side of the first piezoelectric element that supplies ink to the pressure chamber, the second vibration attenuator being in contact with the diaphragm to reduce residual vibration of the diaphragm; a third vibration attenuator provided on an ink discharge flow path side of the first piezoelectric element, the third vibration attenuator being in contact with the diaphragm to reduce residual vibration of the diaphragm; Further provided with The inkjet device according to claim 1 .

3. the third vibration damping portion is provided closer to the nozzle than the second vibration damping portion, a width of the third vibration damping portion in a first direction in which the third vibration damping portion faces the second vibration damping portion is larger than a width of the second vibration damping portion; The inkjet device according to claim 2 .

4. a center of the third vibration damping portion in the first direction coincides with a center of the nozzle in the first direction; The inkjet device according to claim 3 .

5. a ratio of a width of the pressure chamber to a height of the pressure chamber in a second direction in which the first piezoelectric element and the second piezoelectric element face each other is equal to or greater than 1; The inkjet device according to claim 1 .

6. the first vibration damping portion includes an elastomeric material; The inkjet device according to claim 1 .

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