Information processing apparatus, information processing method, and substrate processing apparatus

Abstract

To provide a technique capable of easily grasping a process step having a time variation from a process log of one or more substrate processing apparatuses that have executed the same process.SOLUTION: The information processing apparatus includes an acquisition part configured to acquire a process log for each execution of a process of one or more substrate processing apparatuses that execute the same process including a plurality of process steps according to a recipe, an analysis part configured to analyze a process step having a time change as a time change step by comparing step times taken for the same process step based on the process log, and a display control part configured to display information on the time change step.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to an information processing apparatus, an information processing method, and a substrate processing apparatus. [Background technology]

[0002] Conventionally, substrate processing apparatuses monitor data during operation and detect abnormalities. On the other hand, it is important to reduce the number of situations in which the substrate processing apparatus is stopped upon detection of an abnormality and to improve the productivity of the substrate processing apparatus. For example, Patent Document 1 proposes a technology in which an operator or the like grasps the status of an operating substrate processing apparatus and takes appropriate measures before an abnormality is detected. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2023-134074 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that can easily identify process steps that vary over time from process logs of one or more substrate processing apparatuses that have executed the same process. [Means for solving the problem]

[0005] One aspect of the present disclosure is an information processing device having an acquisition unit that acquires a process log for each execution of the same process including multiple process steps in one or more substrate processing devices that execute the process according to a recipe, an analysis unit that compares step times taken for the same process steps based on the process logs and analyzes the process steps that vary in time as time-varying steps, and a display control unit that displays information related to the time-varying steps. [Effects of the Invention]

[0006] According to the present disclosure, it is possible to easily grasp process steps that vary over time from process logs of one or more substrate processing apparatuses that have executed the same process. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a configuration diagram of an example of a substrate processing system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating a hardware configuration of an example of a computer. [Figure 3] FIG. 2 is a functional block diagram illustrating an example of a worker terminal according to the present embodiment. [Figure 4] 10 is a flowchart showing an example of a processing procedure for displaying information about time-varying steps in the substrate processing system of the present embodiment. [Figure 5] 10 is a flowchart showing an example of a processing procedure of step S12. [Figure 6] FIG. 10 is an example screen image including information about time-varying steps. [Figure 7] FIG. 10 is an example screen image including information about time-varying steps. [Figure 8] FIG. 10 is an example screen image including information about time-varying steps. [Figure 9] FIG. 10 is an example screen image including information about time-varying steps. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0009] <System configuration> 1 is a configuration diagram of an example of a substrate processing system 1 according to this embodiment. The substrate processing system 1 shown in FIG. 1 includes a substrate processing apparatus 10, an apparatus controller 12, a server apparatus 16, and an operator terminal 18.

[0010] The substrate processing apparatus 10 and the apparatus controller 12 are installed in the manufacturing factory 2. The server apparatus 16 and the operator terminal 18 may be installed in the manufacturing factory 2 or may be installed outside the manufacturing factory 2. The operator terminal 18 is an information processing terminal operated by an operator such as an operator in charge of the apparatus or an operator in charge of analysis of the substrate processing apparatus 10 installed in the manufacturing factory 2. The operator terminal 18 is, for example, a PC (Personal Computer) or a smartphone.

[0011] The substrate processing apparatus 10, apparatus controller 12, server apparatus 16, and operator terminal 18 shown in FIG. 1 are communicably connected via networks 20 and 22 such as the Internet or a LAN (Local Area Network).

[0012] The substrate processing apparatus 10 is an apparatus that performs processes such as film formation, etching, or ashing, and processes substrates such as semiconductor wafers. The substrate processing apparatus 10 is, for example, a semiconductor manufacturing apparatus, a heat treatment apparatus, or a film formation apparatus.

[0013] The substrate processing apparatus 10 receives control commands according to, for example, a recipe from the apparatus controller 12 and executes a process. The process includes multiple process steps. For example, the recipe is set to divide the process into multiple process steps (sections). The substrate processing apparatus 10 is equipped with multiple sensors, such as a temperature sensor for measuring temperature and a pressure sensor for measuring pressure.

[0014] The substrate processing apparatus 10 may be equipped with an apparatus controller 12, or may not be equipped with an apparatus controller 12 as long as it is communicatively connected. Furthermore, although the apparatus controller 12 shown in FIG. 1 is provided for each substrate processing apparatus 10, it may be provided for each of a plurality of substrate processing apparatuses 10.

[0015] The equipment controller 12 outputs control commands for controlling control components of the substrate processing apparatus 10 in accordance with the recipe, thereby causing the substrate processing apparatus 10 to execute a process including a plurality of process steps in accordance with the recipe.

[0016] The equipment controller 12 has a function of a man-machine interface that receives instructions for the substrate processing apparatus 10 from an operator and provides the operator with information related to the substrate processing apparatus 10. The equipment controller 12 receives sensor values ​​output from a plurality of sensors installed in the substrate processing apparatus 10. The sensors include a temperature sensor, a pressure sensor, and a flow rate sensor.

[0017] The equipment controller 12 may also store a process log for each run of a process performed according to a recipe. The process log includes the time (step time) required for a process step performed by the substrate processing apparatus 10. The process log also includes the contents of the recipe, sensor data of the substrate processing apparatus 10 when the process is performed according to the recipe, and result data.

[0018] The server device 16 may also receive and store information about a plurality of substrate processing apparatuses 10 in one or more manufacturing factories 2. For example, the server device 16 receives and stores process logs of a plurality of substrate processing apparatuses 10 in one or more manufacturing factories 2.

[0019] The server device 16 may have a man-machine interface function for providing information about the substrate processing apparatus 10 to an operator using a web application or the like. The server device 16 may also have a man-machine interface function for displaying information about time-varying steps, which will be described later, using a web application or the like.

[0020] The worker terminal 18 may also receive and store information related to a plurality of substrate processing apparatuses 10 in one or more manufacturing factories 2. For example, the worker terminal 18 receives and stores process logs of a plurality of substrate processing apparatuses 10 in one or more manufacturing factories 2. The worker terminal 18 may have a man-machine interface function for displaying information related to the substrate processing apparatuses 10 using a web application or the like. The worker terminal 18 may also have a man-machine interface function for displaying information related to time-varying steps, which will be described later, using a web application or the like.

[0021] The equipment controller 12 and the server device 16 may display information related to the substrate processing apparatus 10 and information related to the time-varying steps described below on the operator terminal 18. The equipment controller 12, the server device 16, and the operator terminal 18 shown in FIG. 1 are an example of an information processing apparatus according to this embodiment.

[0022] 1 is just one example, and it goes without saying that there are various system configurations depending on the application and purpose. The division of the equipment into the equipment controller 12, server device 16, and operator terminal 18 shown in Fig. 1 is just one example. Various configurations are possible, such as a configuration in which at least two of the equipment controller 12, server device 16, and operator terminal 18 are integrated, or a configuration in which they are further separated.

[0023] <Hardware configuration> The equipment controller 12, server device 16, and operator terminal 18 of the substrate processing system 1 shown in Fig. 1 are realized by, for example, a computer (information processing device) having a hardware configuration shown in Fig. 2. Fig. 2 is a hardware configuration diagram of an example of a computer.

[0024] 2 includes an input device 501, an output device 502, an external I / F (interface) 503, a RAM (random access memory) 504, a ROM (read only memory) 505, a CPU (central processing unit) 506, a communication I / F 507, and an HDD (hard disk drive) 508, all of which are interconnected by a bus B. The input device 501 and the output device 502 may be connected and used when necessary.

[0025] The input device 501 is a keyboard, mouse, touch panel, etc., and is used by the operator to input various operation signals. The output device 502 is a display, etc., and displays the results of processing by the computer 500. The communication I / F 507 is an interface that connects the computer 500 to the network 20 or 22. The HDD 508 is an example of a non-volatile storage device that stores programs and data.

[0026] The external I / F 503 is an interface with an external device. The computer 500 can read and / or write data from and to a recording medium 503a such as an SD (Secure Digital) memory card via the external I / F 503. The ROM 505 is an example of a non-volatile semiconductor memory (storage device) that stores programs and data. The RAM 504 is an example of a volatile semiconductor memory (storage device) that temporarily stores programs and data.

[0027] The CPU 506 is a computing device that controls the entire computer 500 and realizes its functions by reading programs and data from storage devices such as the ROM 505 and HDD 508 onto the RAM 504 and executing the processes.

[0028] The equipment controller 12, server device 16, and operator terminal 18 in FIG. 1 can realize various functions described below by executing programs on a computer 500 having the hardware configuration shown in FIG.

[0029] <Functional configuration> In the following, an example will be described in which the information processing device that processes the process logs of one or more substrate processing apparatuses 10 is the operator terminal 18. Note that the information processing device that processes the process logs of one or more substrate processing apparatuses 10 may be the equipment controller 12 or the server device 16.

[0030] The operator terminal 18 of the substrate processing system 1 according to this embodiment is realized by, for example, the functional blocks shown in Fig. 3. Fig. 3 is a functional block diagram showing an example of the operator terminal 18 according to this embodiment. Note that the functional block diagram of Fig. 3 omits illustration of components that are not necessary for explaining this embodiment.

[0031] The worker terminal 18 in Figure 3 realizes an acquisition unit 30, a data storage unit 32, an analysis unit 34, a screen data generation unit 36, an input acceptance unit 38, and a display control unit 40 by executing a program for the worker terminal 18.

[0032] The acquiring unit 30 acquires a process log for each run of one or more substrate processing apparatuses 10 that have executed the same process including multiple process steps according to a recipe. The acquiring unit 30 may acquire the process log of the substrate processing apparatus 10 from the substrate processing apparatus 10 itself, from the apparatus controller 12, or from the server apparatus 16. The process log of the substrate processing apparatus 10 acquired by the acquiring unit 30 includes, for example, the step time for each run of the one or more substrate processing apparatuses 10 that have executed the process according to the recipe. The acquiring unit 30 stores the acquired process log of the substrate processing apparatus 10 in the data storage unit 32.

[0033] The input receiving unit 38 receives various operations from the worker. For example, the operations received from the worker include an operation to launch an app, various operations for the launched app, etc. The input receiving unit 38 notifies the analysis unit 34 and the display control unit 40 of the contents of the various operations received from the worker.

[0034] The analysis unit 34 compares the step times taken for the same process steps based on the process logs for each run of the substrate processing apparatus 10 stored in the data storage unit 32, and analyzes process steps with time fluctuations as time-varying steps.

[0035] The step time taken for the same process step is the step time taken for the same process step in different Runs included in the process log of one substrate processing apparatus 10. Furthermore, the step time taken for the same process step may be the step time taken for the same process step included in the process logs of multiple substrate processing apparatuses 10.

[0036] The step times taken for the same process steps included in the process logs of the substrate processing apparatuses 10 that executed the same process according to a recipe will be the same or similar, unless there are factors such as machine differences, failures, or malfunctions. Therefore, the analysis unit 34 compares the step times taken for the same process steps based on the process logs for each run of one or more substrate processing apparatuses 10, and analyzes process steps with variations in step times (time fluctuations) as time-varying steps.

[0037] The analysis unit 34 may analyze a time-varying process step as a time-varying step if the difference in step time taken for the same process step is equal to or greater than a specific time. The time-varying step may be, for example, a process step that starts execution according to a recipe and then is completed when the status of the substrate processing apparatus 10 reaches a specific condition.

[0038] Process steps that are completed when the situation of the substrate processing apparatus 10 reaches a specific condition include, for example, a step of waiting for vacuuming, a step of waiting for temperature stabilization, a step of waiting for pressure stabilization, or a step of waiting for the wafer to cool down to a certain temperature.

[0039] The screen data generation unit 36 ​​generates screen data including information about the time-varying steps based on the analysis result by the analysis unit 34. The display control unit 40 causes the output device 502 to display the screen data including information about the time-varying steps.

[0040] For example, the display control unit 40 collects the step times taken for the time-varying steps for each Run and displays them in a comparable manner. The display control unit 40 may collect the step times taken for the time-varying steps for each time-varying step and display them in a comparable manner. The display control unit 40 may display the distribution of the step times taken for the time-varying steps for each time-varying step and each substrate processing apparatus 10 in a comparable manner. Examples of screen images that the display control unit 40 displays on the output device 502 will be described later.

[0041] The functional block diagram in Fig. 3 is an example. At least some of the functional blocks in Fig. 3 may be provided in a computer 500 other than the operator terminal 18. For example, the data storage unit 32, the analysis unit 34, and the screen data generation unit 36 ​​may be provided in the server device 16 or the equipment controller 12.

[0042] <Processing> The substrate processing system 1 of this embodiment processes the process logs of one or more substrate processing apparatuses 10 and displays information about time-varying steps, for example, in the procedure shown in Fig. 4. Fig. 4 is a flowchart showing an example of a processing procedure for displaying information about time-varying steps in the substrate processing system 1 of this embodiment. The processing shown in the flowchart of Fig. 4 may be performed by the equipment controller 12, by the substrate processing apparatus 10 equipped with the equipment controller 12, by the server device 16, or by the operator terminal 18. Here, an example performed by the operator terminal 18 shown in Fig. 3 will be described.

[0043] In step S10, the acquisition unit 30 of the operator terminal 18 acquires process logs for each run of one or more substrate processing apparatuses 10 that performed the same process including multiple process steps according to a recipe, and stores the process logs in the data storage unit 32.

[0044] In step S12, the analysis unit 34 of the operator terminal 18 reads out the process log for each run of the substrate processing apparatus 10 stored in the data storage unit 32. Based on the read-out process log, the analysis unit 34 compares the step times taken for the same process steps, and analyzes the process steps with time fluctuations as time-varying steps.

[0045] The process of step S12 is performed, for example, according to the procedure shown in Fig. 5. Fig. 5 is a flowchart showing an example of the process procedure of step S12.

[0046] In step S20, the analysis unit 34 selects one unselected process step from the process log acquired in step S10. Note that the process log acquired in step S10 is a process log for each run of one or more substrate processing apparatuses 10 that performed the same process according to a recipe.

[0047] In step S22, the analysis unit 34 acquires, for each run, the step time required for the process step selected in step S20 from the process log for each run of one or more substrate processing apparatuses 10.

[0048] In step S24, the analysis unit 34 compares the step times for each Run acquired in step S22 and calculates the difference in step time. For example, the analysis unit 34 calculates the difference in step time as the difference between the maximum and minimum values ​​of the step time acquired in step S22. Note that other calculation methods may be used to calculate the difference in step time.

[0049] In step S26, the analysis unit 34 determines whether the difference in step time calculated in step S24 is equal to or greater than a specific time (e.g., 5 seconds). If the difference in step time calculated in step S24 is equal to or greater than the specific time, the analysis unit 34 performs the process of step S28. In step S28, the analysis unit 34 analyzes the one process step selected in step S20 as a time-varying step. Note that if the difference in step time calculated in step S24 is not equal to or greater than the specific time, the analysis unit 34 skips the process of step S28.

[0050] In step S30, the analysis unit 34 determines whether there are any unselected process steps in the process log acquired in step S10. If there are any unselected process steps in the process log acquired in step S10, the analysis unit 34 returns to the processing of step S20. If there are no unselected process steps in the process log acquired in step S10, the analysis unit 34 ends the processing of the flowchart shown in FIG.

[0051] According to the processing of the flowchart in FIG. 5, from among the process steps included in the process log acquired in step S10, process steps whose step time difference is equal to or greater than a specific time can be analyzed (selected) as time-varying steps.

[0052] 4, the screen data generation unit 36 ​​generates screen data including information about the time-varying steps selected in step S12. The display control unit 40 causes the output device 502 to display the screen data including information about the time-varying steps, for example, as shown in FIGS.

[0053] Fig. 6 is an example screen image diagram including information about time-varying steps. Screen 1000 shown in Fig. 6 is an example screen that displays the step times required for the time-varying steps collected for each run for comparison. Screen 1000 includes a field 1002 for setting the difference in the specific time used in step S26 of Fig. 5, and a display field 1004 that displays the step times required for the time-varying steps collected for each run for comparison.

[0054] Display field 1004 shows an example in which the time-varying steps selected in step S12 are "STAB," "SVAC," and "ATM." Display field 1004 displays the step times required for the time-varying steps "STAB," "SVAC," and "ATM" as stacked bar graphs (stacked bar graphs) for "Run 1," "Run 2," and "Run 3." The time-varying steps may include at least one of the following in the substrate processing apparatus 10: the transfer time for transferring wafers from a hermetically sealed container (FOUP) to a boat; the time from loading the boat into the processing vessel until the temperature stabilizes; the time for depressurizing the processing vessel from atmospheric pressure to process pressure; and the time for heating the processing vessel from the loading temperature to the process temperature.

[0055] According to the screen 1000 of Fig. 6, time variation steps selected from the process steps included in the process log can be visualized and displayed for each run so that they can be compared. Furthermore, the screen 1000 of Fig. 6 may be visualized and displayed so that the time variation steps of runs executed at different times can be compared. By referring to the screen 1000 that visualizes and displays the time variation steps of runs executed at different times so that they can be compared, the operator can confirm the time when the time variation step occurred.

[0056] 6, the operator can identify the time-varying steps. The operator can also compare the step times of the time-varying steps for each run. The operator can also compare the total step times of the time-varying steps for each run.

[0057] As a result, the operator can easily understand the time variation steps by referring to the display field 1004, and can easily find the adjustment target of the substrate processing apparatus 10 according to the time variation steps.

[0058] Fig. 7 is an example screen image diagram including information about time-varying steps. A screen 1000 shown in Fig. 7 is an example screen that displays the step times required for the time-varying steps for each substrate processing apparatus 10 in a comparable manner. The screen 1000 in Fig. 7 includes a field 1002 for setting a difference in a specific time used in step S26 in Fig. 5, and a display field 1004 for displaying the step times required for the time-varying steps for each substrate processing apparatus 10 in a comparable manner.

[0059] Display field 1004 shows an example in which the time-varying steps selected in step S12 are "STAB," "SVAC," and "ATM." Display field 1004 also displays the step times required for the time-varying steps "STAB," "SVAC," and "ATM" as stacked bar graphs for substrate processing apparatuses "SIN-01," "SIN-02," and "SIN-03." "SIN-01," "SIN-02," and "SIN-03" are examples of identification information for identifying substrate processing apparatus 10.

[0060] 7, the time-varying steps selected from the process steps included in the process log can be visualized and displayed for each substrate processing apparatus 10 so that they can be compared between the substrate processing apparatuses 10. Furthermore, the operator can identify the time-varying steps by referring to the display field 1004 in FIG. 7. Furthermore, the operator can compare the step times of the time-varying steps between the substrate processing apparatuses 10. Furthermore, the operator can compare the total step times of the time-varying steps between the substrate processing apparatuses 10.

[0061] As a result, by referring to the display field 1004 in Fig. 7, the operator can easily understand the time-varying steps while comparing the step times of the time-varying steps between the substrate processing apparatuses 10. Furthermore, by referring to the display field 1004 in Fig. 7, the operator can easily recognize the substrate processing apparatus 10 having the shortest step time of the time-varying steps.

[0062] The substrate processing apparatus 10 with the shortest step time of the time-varying step has higher productivity than the other substrate processing apparatuses 10. Therefore, an operator can improve the productivity of multiple substrate processing apparatuses 10 that are performing the same process according to a recipe by adjusting the other substrate processing apparatuses 10 so as to fill the gap with the substrate processing apparatus 10 with the shortest step time of the time-varying step.

[0063] Fig. 8 is an example screen image diagram including information about time-varying steps. A screen 1000 shown in Fig. 8 is an example screen that displays the step times required for the time-varying steps, grouped by type of time-varying step, for comparison.

[0064] Screen 1000 in FIG. 8 includes a field 1002 for setting the difference in the specific time used in step S26 in FIG. 5, and a display field 1006 for displaying the step times required for the time-varying steps in a comparative manner, collected by type of time-varying step.

[0065] 8 shows an example in which the types of time-varying steps selected in step S12 are "STAB," "SVAC," and "ATM." In addition, display field 1006 displays the step times of the time-varying step types "STAB," "SVAC," and "ATM" in bar graphs for each run of substrate processing apparatuses "SIN-01," "SIN-02," and "SIN-03."

[0066] 8, the time-varying steps identified by the Run and the substrate processing apparatus 10 can be visualized and displayed for each type of time-varying step so that time-varying steps selected from the process steps included in the process log can be compared. Furthermore, by referring to the display field 1006 in FIG. 8, the operator can identify a combination of the substrate processing apparatus 10 and the Run with the shortest step time for each type of time-varying step.

[0067] As a result, the operator can easily understand the time variation steps while comparing the step times of the time variation steps between combinations of the substrate processing apparatus 10 and the Runs by referring to the display field 1006 in Fig. 8. Furthermore, the operator can easily recognize the combination of the substrate processing apparatus 10 and the Run with the shortest step time of the time variation step by referring to the display field 1006 in Fig. 8.

[0068] 9 is an example of a screen image including information about time-varying steps. A screen 1000 in FIG. 9 is an example of a screen that displays the distribution of step times required for the time-varying steps in a comparable manner for each type of time-varying step and each substrate processing apparatus 10.

[0069] The screen 1000 of FIG. 9 includes a field 1002 for setting the difference in the specific time used in step S26 of FIG. 5, and a display field 1008 for displaying the distribution of the step times required for the time-varying steps in a comparable manner for each type of time-varying step and each substrate processing apparatus 10.

[0070] A display field 1008 in Fig. 9 shows an example in which the types of time-varying steps selected in step S12 are "STAB," "SVAC," and "ATM." Display field 1008 also displays the step times of the time-varying step types "STAB," "SVAC," and "ATM" for each substrate processing apparatus "SIN-01" and "SIN-02" in a box-and-whisker plot. The box-and-whisker plot in Fig. 9 graphically represents the distribution of the step times of the time-varying steps using the maximum, minimum, and quartiles of the step times of the time-varying steps.

[0071] According to the screen 1000 of Figure 9, the distribution of step times of time-varying steps of the substrate processing apparatus 10 for, for example, the past 10 runs can be visualized and displayed for each type of time-varying step and each substrate processing apparatus 10, so that the distribution of step times of the time-varying steps can be compared.

[0072] As a result, by referring to the display field 1008 in Fig. 9, the operator can easily compare the distribution of step times of the time-varying steps between types of time-varying steps and between substrate processing apparatuses 10. For example, by referring to the display field 1008 in Fig. 9, the operator can identify a substrate processing apparatus 10 with good performance for each type of time-varying step, and adjust other substrate processing apparatuses 10 to fill the gap with the identified substrate processing apparatus 10.

[0073] 6 to 9 to improve the productivity of the substrate processing apparatus 10 that performs mass production using the same process and recipe. Also, the operator can use the screen 1000 in Fig. 6 to 9 for inspection at the time of start-up when a new substrate processing apparatus 10 is added to a plurality of substrate processing apparatuses 10 that perform mass production using the same process and recipe.

[0074] 6 to 9 may display all of the time-varying steps, or may display a portion of the time-varying steps selected from all of the time-varying steps. For example, if there are a large number of time-varying steps, the time-varying steps may be narrowed down to those with step time lengths up to a predetermined rank (for example, the top 10) and displayed.

[0075] According to this embodiment, it is possible to provide a technique that makes it easy to understand process steps that vary over time from the process logs of one or more substrate processing apparatuses 10 that have executed the same process.

[0076] Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the present invention. [Explanation of symbols]

[0077] 1. Substrate Processing System 10. Substrate processing equipment 12 Equipment Controller 16 Server equipment 18 Worker terminal 20, 22 Network 30 Acquisition Department 32 Data storage unit 34 Analysis Department 36 Screen data generation unit 38 Input reception section 40 Display control unit

Claims

1. an acquisition unit that acquires a process log for each execution of a same process including a plurality of process steps in one or more substrate processing apparatuses that have executed the process according to a recipe; an analysis unit that compares step times taken for the same process step based on the process log and analyzes the process step having time fluctuation as a time-varying step; a display control unit that displays information about the time-varying step; An information processing device having the above.

2. the analysis unit analyzes the process step having time fluctuation to be the time-varying step if a difference in step time taken for the same process step is equal to or greater than a specific time.

2. The information processing device according to claim 1.

3. the display control unit collects the step times required for the time-varying steps for each execution of the process and displays them in a comparable manner.

3. The information processing device according to claim 1.

4. the display control unit collects and displays the step times required for the time-varying steps for each of the substrate processing apparatuses so as to be comparable.

3. The information processing device according to claim 1.

5. the display control unit collects the step times required for the time-varying steps by type of the time-varying steps and displays them in a comparable manner.

3. The information processing device according to claim 1.

6. the display control unit displays a distribution of step times taken for the time-varying steps for each type of the time-varying step and for each substrate processing apparatus in a comparable manner.

3. The information processing device according to claim 1.

7. The time-varying step is a process step that is completed when a state of the substrate processing apparatus reaches a specific condition after execution according to the recipe is started.

3. The information processing device according to claim 1.

8. The time varying step includes at least one of a transfer time for transferring wafers from a sealed container to a boat in the substrate processing apparatus, a time from when the boat is loaded into a processing vessel until the temperature is stabilized, a time from when the pressure inside the processing vessel is reduced from atmospheric pressure to a process pressure, and a time from when the temperature inside the processing vessel is increased from a loading temperature to a process temperature.

3. The information processing device according to claim 1.

9. The information processing device acquiring a process log for each execution of a same process including a plurality of process steps in one or more substrate processing apparatuses that have executed the process according to a recipe; comparing step times taken for the same process step based on the process log, and analyzing the process step having time fluctuation as a time-varying step; displaying information about the time-varying steps; An information processing method comprising:

10. an acquisition unit that acquires a process log for each execution of a same process including a plurality of process steps in one or more substrate processing apparatuses that have executed the process according to a recipe; an analysis unit that compares step times taken for the same process step based on the process log and analyzes the process step having time fluctuation as a time-varying step; a display control unit that displays information about the time-varying step; A substrate processing apparatus having:

Images