Parts replacement device

Abstract

To facilitate replacement of consumable parts.SOLUTION: A component transport device for transporting a consumable component includes a component storage part, a container, a robot arm, and a moving mechanism. The component housing unit houses a consumable component before use and a consumable component after use. The container includes an opening connected to the processing device and a gate valve configured to open and close the opening, and accommodates the component accommodating unit. The robot arm is provided in the container, has an end effector at a tip end, carries out the used consumable part from the processing device through the opening, stores the used consumable part in the part storage part, takes out the unused consumable part from the part storage part, and carries the unused consumable part into the processing device through the opening. The movement mechanism has a power source and moves the part transporting device.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] Various aspects and embodiments of the present disclosure relate to workpiece handling devices and processing systems. [Background technology]

[0002] Inside a processing apparatus for processing substrates are consumable parts that wear out as substrate processing continues. When the amount of wear of such consumable parts exceeds a predetermined amount, they are replaced with unused consumable parts. To replace the consumable parts, substrate processing in the processing apparatus is stopped, and the container of the processing apparatus is opened to the atmosphere. Then, the used consumable parts are manually removed and new consumable parts are installed. The container is then closed again, a vacuum is drawn inside the container, and substrate processing resumes.

[0003] In this way, replacing consumable parts requires the inside of the processing equipment to be vented to the atmosphere, which requires vacuuming the processing equipment after replacing the consumable parts, resulting in a long downtime for processing. In addition, some consumable parts are large, so manual replacement can take a long time.

[0004] To avoid this, a replacement station is known that includes unused consumable parts and a replacement handler for replacing the consumable parts (see, for example, Patent Document 1 below). In such a replacement station, the processing equipment and the replacement station are connected, and after the inside of the replacement station is evacuated, a shutoff valve between the processing equipment and the replacement station is opened. The replacement handler in the replacement station then removes the used consumable parts from the processing equipment and replaces them with unused consumable parts loaded in the replacement station. This makes it possible to replace consumable parts without exposing the inside of the processing equipment to the atmosphere, thereby reducing processing downtime. Furthermore, because the replacement of consumable parts is performed by the replacement handler rather than by human hands, the replacement of consumable parts can be completed in a short time. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2017-85072 Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure provides a parts carrier and processing system that can facilitate replacement of consumable parts. [Means for solving the problem]

[0007] One aspect of the present disclosure is a part transporting device for transporting consumable parts, comprising a part storage unit, a container, a robot arm, and a moving mechanism. The part storage unit stores unused and used consumable parts. The container has an opening connected to a processing device and a gate valve for opening and closing the opening, and houses the part storage unit. The robot arm is provided within the container and transports used consumable parts from the processing device through the opening and stores them in the part storage unit, and removes unused consumable parts from the part storage unit and transports them into the processing device through the opening. The moving mechanism has a power source and moves the part transporting device. [Effects of the Invention]

[0008] Various aspects and embodiments of the present disclosure may facilitate replacement of consumable parts. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a system configuration diagram illustrating an example of a processing system according to an embodiment of the present disclosure. [Figure 2] FIG. 2 is a diagram illustrating an example of a processing device according to the first embodiment. [Figure 3] FIG. 3 is a diagram showing an example of the upper surface of the lower electrode. [Figure 4] FIG. 4 is a diagram illustrating an example of the lower surface of the edge ring. [Figure 5]FIG. 5 is an enlarged view showing an example of the shape of the opening of the recess. [Figure 6] FIG. 6 is an enlarged cross-sectional view showing an example of the shape of the recessed and protruding portions. [Figure 7] FIG. 7 is an enlarged cross-sectional view showing another example of the shape of the recesses and protrusions. [Figure 8] FIG. 8 is an enlarged cross-sectional view showing another example of the shape of the recesses and protrusions. [Figure 9] FIG. 9 is a diagram illustrating an example of a part conveying device according to the first embodiment. [Figure 10] FIG. 10 is a diagram showing an example of how the cassette is removed. [Figure 11] FIG. 11 is an enlarged cross-sectional view showing an example of a connection portion between the processing device and the part carrying device in the first embodiment. [Figure 12] FIG. 12 is an enlarged cross-sectional view showing an example of a connection portion between the processing device and the part carrying device in the first embodiment. [Figure 13] FIG. 13 is a block diagram illustrating an example of a control device. [Figure 14] FIG. 14 is a diagram illustrating an example of the reservation table. [Figure 15] FIG. 15 is a diagram for explaining an example of timing for replacing the edge ring. [Figure 16] FIG. 16 is a flowchart showing an example of the process of the control device when the part carrying device is moved to the position of the processing device that is the target of replacing a consumable part. [Figure 17] FIG. 17 is a flowchart showing an example of the process of the control device when controlling a processing device that is a target for replacing a consumable part and a part transport device connected to that processing device. [Figure 18] FIG. 18 is a flowchart showing an example of processing by the part conveying device. [Figure 19] FIG. 19 is a diagram illustrating an example of a processing device according to the second embodiment. [Figure 20] FIG. 20 is a diagram illustrating an example of a part conveying device according to the second embodiment. [Figure 21]FIG. 21 is an enlarged cross-sectional view showing an example of a connection portion between a processing device and a component conveying device in the second embodiment. [Figure 22] FIG. 22 is a diagram for explaining an example of the timing of replacing consumable parts in the third embodiment. [Figure 23] FIG. 23 is a diagram for explaining an example of a method for replacing an edge ring in the fourth embodiment. [Figure 24] FIG. 24 is a diagram illustrating an example of a part conveying device according to the fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of a part carrying device and a processing system will be described in detail with reference to the drawings. Note that the disclosed part carrying device and processing system are not limited to the following embodiments.

[0011] In mass production, substrates are processed using multiple processing equipment, and consumable parts are replaced in processing equipment installed in different locations. Therefore, the replacement station carrying the unused consumable parts must be moved to the location of the processing equipment where the consumable parts need to be replaced.

[0012] Some large consumable parts weigh several kilograms. Furthermore, the robotic arms used to replace such large consumable parts may weigh anywhere from several tens to several hundred kilograms. Therefore, the entire replacement station used to replace consumable parts is likely to weigh several hundred kilograms or more. It would be difficult for an operator to move such a heavy replacement station to the location of the processing equipment where the consumable part needs to be replaced.

[0013] Therefore, the present disclosure provides a technique that can facilitate replacement of consumable parts.

[0014] (First embodiment) [Configuration of processing system 10] 1 is a system configuration diagram showing an example of a processing system 10 according to an embodiment of the present disclosure. In the embodiment, the processing system 10 includes a control device 20, a plurality of processing groups 30, and a plurality of part conveying devices 50. The control device 20 communicates with and controls each of the processing groups 30 and each of the part conveying devices 50.

[0015] Each processing group 30 includes a vacuum transfer chamber 31, a plurality of processing devices 40-1 to 40-6, a plurality of load lock chambers 32, and an atmospheric transfer chamber 33. In the following description, the processing devices 40-1 to 40-6 will be collectively referred to as processing device 40 when they are not distinguished from one another.

[0016] A plurality of processing devices 40 and a plurality of load lock chambers 32 are connected to the vacuum transfer chamber 31. In this embodiment, six processing devices 40 are connected to the vacuum transfer chamber 31, but five or fewer processing devices 40 may be connected to the vacuum transfer chamber 31, or seven or more processing devices 40 may be connected to the vacuum transfer chamber 31. Furthermore, in this embodiment, two load lock chambers 32 are connected to the vacuum transfer chamber 31, but one load lock chamber 32 may be connected to the vacuum transfer chamber 31, or three or more load lock chambers 32 may be connected to the vacuum transfer chamber 31.

[0017] Each processing apparatus 40 performs processing such as etching or film formation on a substrate in a low-pressure environment. Each processing apparatus 40 is provided with consumable parts that are consumed depending on the processing performed on the substrate. Each processing apparatus 40 is separated from the vacuum transfer chamber 31 by a gate valve 400. Each processing apparatus 40 is also provided with a gate valve 401 for carrying out used consumable parts and carrying in new consumable parts. Each processing apparatus 40 may be apparatuses that perform the same process in a manufacturing process, or apparatuses that perform different processes.

[0018] Each load lock chamber 32 has gate valves 320 and 321, which switch the internal pressure from a predetermined vacuum level to atmospheric pressure or from atmospheric pressure to a predetermined vacuum level. The load lock chamber 32 and the vacuum transfer chamber 31 are separated by the gate valve 320. The load lock chamber 32 and the atmospheric transfer chamber 33 are also separated by the gate valve 321.

[0019] A robot arm 310 is disposed within the vacuum transfer chamber 31. The interior of the vacuum transfer chamber 31 is maintained at a predetermined vacuum level. In this embodiment, the robot arm 310 removes an unprocessed substrate from the load lock chamber 32, which has been depressurized to a predetermined vacuum level, and transfers it into one of the processing devices 40. The robot arm 310 also removes a processed substrate from the processing device 40 and transfers it into another processing device 40 or the load lock chamber 32.

[0020] An atmospheric transfer chamber 33 is connected to the load lock chamber 32. A robot arm 330 is provided inside the atmospheric transfer chamber 33. The atmospheric transfer chamber 33 is also provided with a plurality of load ports 331 to which containers (e.g., FOUPs: Front Opening Unified Pods) capable of accommodating a plurality of unprocessed or processed substrates are connected. The robot arm 330 removes unprocessed substrates from the containers connected to the load port 331 and transfers them into the load lock chamber 32. The robot arm 330 also removes processed substrates from the load lock chamber 32 and transfers them into the container connected to the load port 331. The atmospheric transfer chamber 33 may also be provided with an alignment unit that adjusts the orientation of the substrate removed from the container connected to the load port 331.

[0021] Each part transport device 50 has a used consumable part and a robot arm inside, and moves to the position of the processing device 40 that has the consumable part that needs to be replaced in response to instructions from the control device 20. The part transport device 50 is connected to the processing device 40 that has the consumable part that needs to be replaced via a gate valve 401. After the inside of the part transport device 50 is evacuated, the gate valve 401 is opened and the used consumable part is exchanged for a new consumable part by the robot arm.

[0022] [Configuration of processing device 40] 2 is a diagram showing an example of a processing apparatus 40 according to the first embodiment. In this embodiment, the processing apparatus 40 includes a chamber 41, a gas supply unit 44, an RF (Radio Frequency) power supply unit 45, and an exhaust system 46.

[0023] The chamber 41 has a support 42 and an upper electrode showerhead assembly 43. The support 42 is disposed in a lower region of a processing space 41s in the chamber 41. The upper electrode showerhead assembly 43 is disposed above the support 42 and can function as part of the top plate of the chamber 41.

[0024] The support 42 is configured to support the substrate W in the processing space 41s. In this embodiment, the support 42 includes a lower electrode 421 and an electrostatic chuck 422. The lower electrode 421 is an example of a base member. The electrostatic chuck 422 is disposed on the lower electrode 421 and is configured to support the substrate W on the upper surface of the electrostatic chuck 422. An edge ring 423 is provided on the upper surface of the peripheral portion of the lower electrode 421. The edge ring 423 is disposed on the upper surface of the peripheral portion of the lower electrode 421 so as to surround the electrostatic chuck 422 and the substrate W. The upper surface of the electrostatic chuck 422 is an example of a mounting surface. The support 42 is an example of a mounting table. The edge ring 423 is an example of a consumable part.

[0025] Through holes for passing lift pins 47 are formed in the bottom of the chamber 41, the lower electrode 421, and the electrostatic chuck 422. The lift pins 47 are raised and lowered by a drive unit 470 when loading and unloading the substrate W. This allows the substrate W loaded into the chamber 41 to be received from the robot arm 310 and placed on the electrostatic chuck 422, and the processed substrate W can be handed over to the robot arm 310 and unloaded from the chamber 41.

[0026] Furthermore, through holes are formed in the bottom of chamber 41 and lower electrode 421 to allow lift pins 48 to pass through. Lift pins 48 are raised and lowered by drive unit 480 when replacing edge ring 423. This allows used edge ring 423 to be handed over to the robot arm of component conveying device 50 and removed from chamber 41, and allows unused edge ring 423 to be received from the robot arm of component conveying device 50 and placed on lower electrode 421.

[0027] 3 is a diagram showing an example of the upper surface of the lower electrode 421. A region 4210 on the upper surface of the lower electrode 421 (the surface on which the electrostatic chuck 422 is disposed) is provided with a plurality of through holes 4211 through which the lift pins 47 pass, and the electrostatic chuck 422 is disposed therein. A region 4212 surrounding the region 4210 is provided with a plurality of through holes 4213 through which the lift pins 48 pass and a plurality of protrusions 4214 used to position the edge ring 423, and the edge ring 423 is disposed therein. In this embodiment, the plurality of protrusions 4214 are disposed on a circumference centered on the central axis X of the substrate W placed on the electrostatic chuck 422.

[0028] 4 is a diagram showing an example of the lower surface of the edge ring 423. A plurality of recesses 4230 are provided on the lower surface of the edge ring 423 (the surface in contact with the lower electrode 421). In this embodiment, the plurality of recesses 4230 are arranged on a circumference centered on the central axis X of the substrate W placed on the electrostatic chuck 422. In this embodiment, three recesses 4230 are formed on the lower surface of the edge ring 423. Note that, as long as a plurality of recesses 4230 are formed on the lower surface of the edge ring 423, two or four or more recesses 4230 may be formed.

[0029] FIG. 5 is an enlarged view showing an example of the shape of the opening of the recess 4230. In this embodiment, the opening of the recess 4230 is, for example, as shown in FIG. 5, an elongated hole-like shape having a width ΔW1 in the circumferential direction of a circle centered on the central axis X and a width ΔW2 in the radial direction of the circle centered on the central axis X. The width ΔW1 is the width of the protrusion 4214 in the circumferential direction of the circle centered on the central axis X plus a design clearance. The width ΔW2 is wider than the width ΔW1. In this embodiment, the recess 4230 is disposed in the edge ring 423 so that the major axis of the opening is oriented along the radial direction of the circle centered on the central axis X.

[0030] As a result, by placing the edge ring 423 on the lower electrode 421 so that the convex portion 4214 is inserted into the concave portion 4230, the central axis of the edge ring 423 can be made to substantially coincide with the central axis X of the substrate W placed on the electrostatic chuck 422. Furthermore, even if the edge ring 423 thermally expands during processing of the substrate W, it is possible to suppress misalignment between the central axis of the edge ring 423 and the central axis X of the substrate W placed on the electrostatic chuck 422.

[0031] The opening of the recess 4230 may be inclined, as shown in FIG. 6 . FIG. 6 is an enlarged cross-sectional view showing an example of the shape of the recess 4230 and the protrusion 4214. The recess 4230 has a first sidewall 4230a extending in the depth direction of the recess 4230 and a first inclined portion 4230b whose width increases from the first sidewall 4230a toward the opening of the recess 4230. This allows the edge ring 423 to be placed on the lower electrode 421 so that the protrusion 4214 is inserted into the recess 4230, even if the positions of the recess 4230 and the protrusion 4214 are slightly misaligned when the edge ring 423 is placed on the lower electrode 421. This allows the central axis of the edge ring 423 to be easily aligned with the central axis X of the substrate W placed on the electrostatic chuck 422.

[0032] The inclination may be formed on the protrusion 4214 side, as shown in FIG. 7, for example. FIG. 7 is an enlarged cross-sectional view showing another example of the shapes of the recess 4230 and the protrusion 4214. The protrusion 4214 of the lower electrode 421 is provided with a second side wall 4214b extending from the base of the protrusion 4214 in the protruding direction of the protrusion 4214, and a second inclined portion 4214a in which the width of the protrusion 4214 narrows as it extends from the second side wall 4214b toward the tip of the protrusion 4214. The inclination may be formed on both the recess 4230 and the protrusion 4214, as shown in FIG. 8, for example. FIG. 8 is an enlarged cross-sectional view showing another example of the shapes of the recess 4230 and the protrusion 4214.

[0033] In this embodiment, the lower electrode 421 is provided with the convex portion 4214 and the edge ring 423 is provided with the concave portion 4230, but the disclosed technology is not limited to this. As long as a concave portion is provided on one of the lower electrode 421 and the edge ring 423 and a convex portion is provided on the other at opposing positions on the lower electrode 421 and the edge ring 423, the concave portion may be provided on the lower electrode 421 and the convex portion may be provided on the edge ring 423.

[0034] In addition, in the present embodiment, the opening of the recess 4230 provided in the edge ring 423 has a shape of an elongated hole, but the disclosed technology is not limited to this. For example, the opening of the recess 4230 provided in the edge ring 423 may have a shape of a groove extending in the radial direction of a circle centered on the central axis X. In this case, the convex portion 4214 of the lower electrode 421 may be a protrusion extending in the radial direction of a circle centered on the central axis X, and may have a shape corresponding to the shape of the opening of the recess 4230.

[0035] Returning to FIG. 2 , the upper electrode showerhead assembly 43 is configured to supply one or more gases from a gas supply unit 44 into the processing space 41s. In this embodiment, the upper electrode showerhead assembly 43 includes an electrode support unit 43d and an upper electrode 43e. The electrode support unit 43d has a gas inlet 43a and a gas diffusion chamber 43b, and supports the upper electrode 43e on its lower surface. The gas supply unit 44 and the gas diffusion chamber 43b are in fluid communication with each other via the gas inlet 43a. The electrode support unit 43d and the upper electrode 43e are formed with a plurality of gas outlets 43c, and the gas diffusion chamber 43b and the processing space 41s are in fluid communication with each other via the plurality of gas outlets 43c. In this embodiment, the upper electrode showerhead assembly 43 is configured to supply one or more gases from the gas inlet 43a into the processing space 41s via the gas diffusion chamber 43b and the plurality of gas outlets 43c.

[0036] The gas supply unit 44 includes multiple gas sources 440a-440c, multiple flow rate controllers 441a-441c, and multiple valves 442a-442c. The gas source 440a is, for example, a processing gas source, the gas source 440b is, for example, a cleaning gas source, and the gas source 440c is, for example, an inert gas source. In this embodiment, the inert gas is, for example, nitrogen gas. The flow rate controllers 441a-441c may include, for example, mass flow controllers or pressure-controlled flow rate controllers. The gas supply unit 44 may also include one or more flow rate modulation devices that modulate or pulse the flow rates of one or more processing gases.

[0037] The RF power supply 45 is configured to supply RF power, e.g., one or more RF power sources, to one or more electrodes, such as the lower electrode 421, the upper electrode showerhead assembly 43, or both the lower electrode 421 and the upper electrode showerhead assembly 43. In this embodiment, the RF power supply 45 includes two RF generators 450a and 450b and two matching circuits 451a and 451b. The RF power supply 45 in this embodiment is configured to supply a first RF power from the RF generator 450a to the lower electrode 421 via the matching circuit 451a. The RF spectrum encompasses a portion of the electromagnetic spectrum ranging from 3 Hz to 3000 GHz. For electronic material processes such as semiconductor processes, the frequency of the RF spectrum used for plasma generation is preferably within the range of 100 kHz to 3 GHz, more preferably 200 kHz to 150 MHz. For example, the frequency of the first RF power may be within the range of 27 MHz to 100 MHz.

[0038] Furthermore, the RF power supply unit 45 in this embodiment is configured to supply second RF power from an RF generating unit 450b to the lower electrode 421 via a matching circuit 451b. For example, the frequency of the second RF power may be within a range of 400 kHz to 13.56 MHz. Alternatively, the RF power supply unit 45 may have a DC (Direct Current) pulse generating unit instead of the RF generating unit 450b.

[0039] Furthermore, although not shown, other embodiments are contemplated herein. For example, in an alternative embodiment of the RF power supply 45, an RF generator may be configured to supply a first RF power to the lower electrode 421, and another RF generator may be configured to supply a second RF power to the lower electrode 421. Yet another RF generator may be configured to supply a third RF power to the upper electrode showerhead assembly 43. In addition, in another alternative embodiment, a DC voltage may be applied to the upper electrode showerhead assembly 43. Furthermore, in various embodiments, the amplitude of one or more RF powers (i.e., the first RF power, the second RF power, etc.) may be pulsed or modulated. Amplitude modulation may include pulsing the amplitude of the RF power between an on state and an off state or between multiple different on states. Furthermore, phase matching of the RF powers may be controlled, and the phase matching of the amplitude modulation of multiple RF powers may be synchronized or asynchronous.

[0040] The exhaust system 46 is connected to, for example, an exhaust port 41e provided at the bottom of the chamber 41 via a pressure control valve 460. The pressure control valve 460 is an example of a second pressure control unit. The exhaust system 46 may include a vacuum pump such as a pressure valve, a turbomolecular pump, a roughing pump, or a combination thereof. A pipe 462 is connected between the pressure control valve 460 and the exhaust system 46 via a valve 461a. The pipe 462 is connected to the space outside the gate valve 401. The gas exhausted by the exhaust system 46 is exhausted from an exhaust port of the exhaust system 46 to an exhaust gas treatment system that treats the exhaust gas. The pipe 462 is also connected to an exhaust port of the exhaust system 46 via a valve 461b.

[0041] [Parts transport device 50] FIG. 9 is a diagram showing an example of a component transport device 50 according to the first embodiment. The component transport device 50 includes a container 51, a cassette 52, multiple robot arms 53a to 53b, and a moving mechanism 54. The container 51 has an opening 511 connected to the processing device 40, a gate valve 512 that opens and closes the opening 511, and a lid 510. The container 51 houses the cassette 52 and multiple robot arms 53a to 53b. The gate valve 512 is an example of an on-off valve. In the following description, the multiple robot arms 53a to 53b will be collectively referred to as robot arm 53 when there is no need to distinguish between them.

[0042] The cassette 52 accommodates a plurality of edge rings 423 before use. The cassette 52 is an example of a component storage unit. The cassette 52 also accommodates used edge rings 423 that have been replaced with the pre-used edge rings 423. The cassette 52 is placed on a stage 521, which is raised and lowered by a drive unit 522. This allows each robot arm 53 to remove the edge rings 423, which are arranged vertically in the cassette 52, from the cassette 52. When all the edge rings 423 in the cassette 52 have become used edge rings 423, the lid 510 is opened, as shown in FIG. 10 , for example, and the cassette 52 is removed from the container 51 and replaced with a cassette 52 that accommodates a plurality of pre-used edge rings 423. FIG. 10 illustrates an example of how the cassette 52 is removed.

[0043] The robot arm 53a has an end effector 530a at the tip of the arm, and uses the end effector 530a to remove the edge ring 423 before use from the cassette 52. The robot arm 53b carries the edge ring 423 after use out of the processing device 40 through the opening 511 and stores it in the cassette 52. The robot arm 53a then carries the edge ring 423 before use into the processing device 40 through the opening 511. Note that, hereinafter, the end effectors 530a and 530b will be collectively referred to as the end effector 530 when there is no need to distinguish between them.

[0044] As described above, in this embodiment, separate end effectors are provided: end effector 530a used to transport the edge ring 423 before use, and end effector 530b used to transport the edge ring 423 after use. This prevents the edge ring 423 before use from being contaminated by reaction by-products or the like that peel off from the edge ring 423 after use.

[0045] In this embodiment, the end effector 530a used to transport the edge ring 423 before use and the end effector 530b used to transport the edge ring 423 after use are moved by separate robot arms. However, the disclosed technology is not limited to this. As long as the end effector used to transport the edge ring 423 before use and the end effector used to transport the edge ring 423 after use are provided separately, these two end effectors may be provided at the tip of a single robot arm.

[0046] In this embodiment, the end effector 530b of the robot arm 53b supports the lower surface of the edge ring 423 when the used edge ring 423 is carried out of the processing device 40. This makes it possible to prevent reaction by-products and the like adhering to the edge ring 423 from adhering to the end effector 530a.

[0047] In this embodiment, the robot arm 53a sequentially removes the unused edge rings 423 that are arranged vertically in the cassette 52, starting from the bottom. In this embodiment, the robot arm 53b stores the used edge ring 423 in the storage location of the cassette 52 that has become vacant by removing the unused edge ring 423. As a result, the used edge ring 423 is stored lower than the unused edge ring 423 in the cassette 52. This prevents reaction by-products and the like that peel off from the used edge ring 423 from falling and adhering to the unused edge ring 423.

[0048] Note that the space in which the edge rings 423 are accommodated may be partitioned for each edge ring 423 accommodated in the cassette 52. This prevents reaction by-products and the like peeled off from the used edge ring 423 from falling and adhering to the edge ring 423 before use, regardless of the location in the cassette 52 in which the used edge ring 423 is accommodated.

[0049] The moving mechanism 54 has a main body 540 and wheels 541. A power source such as a battery, a power source, a steering mechanism, and the like are provided inside the main body 540. The wheels 541 rotate using the power source inside the main body 540, and move the component transport device 50 in a direction controlled by the steering mechanism inside the main body 540. Note that the moving mechanism 54 may move the component transport device 50 by a method other than the wheels 541, such as a walking type, as long as it can move the component transport device 50.

[0050] The part carrying device 50 also includes a communication unit 550, a control unit 551, a memory unit 552, a sensor 553, and an exhaust device 554. The exhaust device 554 is an example of a first pressure control unit. The communication unit 550 is, for example, a wireless communication circuit, and performs wireless communication with the control device 20. The sensor 553 senses the surroundings of the part carrying device 50 and outputs the sensing results to the control unit 551. In this embodiment, the sensor 553 is, for example, an image sensor, and takes an image of the surroundings of the part carrying device 50 and outputs it to the control unit 551. The sensor 553 is an example of a first sensor.

[0051] Exhaust device 554 is connected to the space within container 51 via valve 556a and piping 555. Exhaust device 554 sucks gas from the space within container 51 via valve 556a and piping 555 and discharges the sucked gas to the outside of component carrier device 50 via exhaust port 557. This reduces the pressure within container 51 to a predetermined vacuum level, thereby reducing moisture and other contaminants adhering to edge ring 423 before use. Furthermore, because the pressure within container 51 can be made lower than the pressure within processing equipment 40, when component carrier device 50 is connected to processing equipment 40 and gate valve 512 is opened, a gas flow from processing equipment 40 to container 51 can be generated. This prevents particles within container 51 from entering processing equipment 40.

[0052] Furthermore, the pipe 555 is connected via a valve 556b to an exhaust port 557. When the cassette 52 is replaced, the valve 556b is opened and the space inside the container 51 is returned to atmospheric pressure.

[0053] The memory unit 552 is a read-only memory (ROM), a hard disk drive (HDD), a solid state drive (SSD), or the like, and stores data, programs, and the like used by the control unit 551. The control unit 551 is a processor such as a central processing unit (CPU) or a digital signal processor (DSP), and controls the entire part transport device 50 by reading and executing the programs in the memory unit 552.

[0054] The control unit 551 controls the moving mechanism 54 using the sensing result of the sensor 553, for example, to move the part carrying device 50 to the position of the processing device 40 instructed by the control device 20.

[0055] Also provided within the container 51 is a cleaning unit 56 for cleaning the end effector 530b of the robot arm 53b. The cleaning unit 56 cleans the end effector 530b used to transport the used edge ring 423, for example, by high-pressure gas purging or ice blasting. By cleaning the end effector 530b after transporting the used edge ring 423, it is possible to prevent particles adhering to the end effector 530b from the used edge ring 423 from scattering into the space within the container 51.

[0056] A positional deviation detection sensor 57 is provided near the opening 511 of the container 51 to detect a positional deviation of the edge ring 423 when the edge ring 423 passes through the opening 511 before use. Alternatively, the positional deviation detection sensor 57 may be provided near the gate valve 401 of the processing apparatus 40. The positional deviation detection sensor 57 is an example of a second sensor. In this embodiment, the positional deviation detection sensor 57 is, for example, a light-shielding sensor. The amount of positional deviation of the edge ring 423 detected by the positional deviation detection sensor 57 is output to the control unit 551. The control unit 551 adjusts the position of the edge ring 423 by controlling the robot arm 53a to correct the deviation detected by the positional deviation detection sensor 57. The control unit 551 then controls the robot arm 53a to place the edge ring 423, whose position has been adjusted, on the lift pins 48 protruding from the lower electrode 421. This allows the convex portion 4214 of the lower electrode 421 to be inserted into the concave portion 4230 of the edge ring 423 when the lift pin 48 is lowered, and the edge ring 423 can be accurately positioned at a predetermined position within the processing device 40.

[0057] [Connection between processing device 40 and part conveying device 50] 11 and 12 are enlarged cross-sectional views showing an example of a connection portion between processing equipment 40 and component conveying device 50 in the first embodiment. In this embodiment, a convex portion 410 is provided on the side of chamber 41 of processing equipment 40 to which component conveying device 50 is connected. In addition, a concave portion 513 having a shape corresponding to convex portion 410 is provided on the side of container 51 of component conveying device 50 to which processing equipment 40 is connected. When processing equipment 40 and component conveying device 50 are connected, convex portion 410 and concave portion 513 fit together as shown in FIG. 12, for example, to support alignment of processing equipment 40 and component conveying device 50.

[0058] Furthermore, a sealing member 514 such as an O-ring is disposed on the side of container 51 of component conveying device 50 so as to surround opening 511. This enhances the airtightness of space 60 surrounded by chamber 41, gate valve 401, container 51, and gate valve 512. After processing device 40 and component conveying device 50 are connected, gas in space 60 is exhausted via pipe 462, thereby reducing the pressure in space 60 to a predetermined vacuum level. This reduces the pressure in space 60, further strengthening the connection between processing device 40 and component conveying device 50. When processing device 40 and component conveying device 50 are to be disconnected, valve 461b of processing device 40 is opened to return the pressure in space 60 to atmospheric pressure.

[0059] It is preferable that the convex portion 410 and the concave portion 513 are provided with an inclined portion like the convex portion 4214 of the lower electrode 421 and the concave portion 4230 of the edge ring 423 .

[0060] [Configuration of control device 20] 13 is a block diagram showing an example of the control device 20. The control device 20 includes a storage unit 21, a control unit 22, a wireless communication unit 23, and a wired communication unit 24. The wireless communication unit 23 is, for example, a wireless communication circuit, and performs wireless communication with each part conveying device 50 via an antenna 25. The wired communication unit 24 is, for example, a network interface card (NIC) or the like, and performs communication with each processing group 30. The control device 20 may also perform wireless communication with each processing group 30.

[0061] The storage unit 21 is a ROM, HDD, SSD, or the like, and stores data, programs, and the like used by the control unit 22. The storage unit 21 stores a reservation table 210, for example, as shown in FIG.

[0062] FIG. 14 is a diagram showing an example of the reservation table 210. The reservation table 210 stores a component ID, a processing device ID, a replacement date and time, an RF cumulative time, a next replacement time, and a component carrier ID. The component ID is information for identifying each edge ring 423. The processing device ID is information for identifying the processing device 40 to which the edge ring 423 identified by the corresponding component ID is attached. The replacement date and time is the date and time when the edge ring 423 was replaced. The RF cumulative time is information indicating the cumulative time of processing performed in the processing device 40 using RF power. The next replacement time is the date and time when the edge ring 423 will next be replaced. The component carrier ID is information for identifying the component carrier device 50 that is reserved to replace the edge ring 423 identified by the corresponding component ID.

[0063] The control unit 22 is a processor such as a CPU or a DSP, and controls the entire control device 20 by reading and executing the programs in the storage unit 21.

[0064] [Timber for replacing consumable parts] 15 is a diagram illustrating an example of the replacement timing of the edge ring 423. The control unit 22 of the control device 20 estimates the replacement time t1 of each edge ring 423 and registers the estimated replacement time t1 in the "next replacement time" field in the reservation table 210. If processing has not yet been performed on the substrate W after the edge ring 423 has been replaced, the control device 20 registers the standard replacement time t1 estimated from the "replacement date and time" of the edge ring 423 in the "next replacement time" field.

[0065] On the other hand, when processing is performed on the substrate W after the edge ring 423 has been replaced, the control device 20 registers the replacement time t1 estimated from the "replacement date and time" and "RF accumulated time" of the edge ring 423 in the "next replacement date" field. The control unit 22 estimates the date and time at which the "RF accumulated time" will reach a predetermined value, for example, from the trend of change in the "RF accumulated time" from the "replacement date and time," and registers the estimated date and time in the "next replacement date" field. The control unit 22 updates the "next replacement date" every time the "RF accumulated time" is updated, for example. The step of estimating the replacement date of the edge ring 423 is an example of a first estimation step.

[0066] In this embodiment, the control unit 22 estimates the replacement time t1 of the edge ring 423 based on the "RF accumulated time," but the disclosed technology is not limited to this. For example, the control unit 22 may estimate the replacement time t1 of the edge ring 423 based on at least one of the "RF accumulated time," "RF accumulated power," "recipe accumulated time," "change in weight of consumable parts," and "change in dimensions of consumable parts." The "RF accumulated power" is the product of the processing time performed in the processing device 40 using RF power and the value of that power. The "recipe accumulated time" is the accumulated time of a specific processing recipe that causes particularly high wear of consumable parts.

[0067] Furthermore, for each edge ring 423, the control unit 22 identifies the timing t2 at which processing of substrates W in the processing apparatus 40 finally ends in the period before the "next replacement time." In this embodiment, the control unit 22 determines the end of processing for each lot of substrates W. This makes it possible to avoid significant changes in the processing environment within a lot. As another example, the control unit 22 may determine the end of processing for each substrate W.

[0068] After completing the processing at timing t2, processing apparatus 40 prepares for replacing edge ring 423 during preparation time ΔT1. Preparation time ΔT1 is the time required for replacing gases in processing apparatus 40, adjusting the pressure in processing apparatus 40, and stabilizing the temperature of edge ring 423. Controller 22 identifies timing t3, which is the time when preparation time ΔT1 has elapsed since timing t2, as the timing when edge ring 423 can be replaced. The process of identifying replacement possible timing t3 is an example of an identifying process.

[0069] In order for the edge ring 423 to be replaced at the replacement possible timing t3, preparations for replacing the edge ring 423 must be made after the component conveying device 50 is connected to the processing device 40. The preparation time ΔT2 is the time required for the pressure in the space 60 (see FIG. 12 ) between the gate valve 401 and the gate valve 512 to be reduced to a predetermined pressure. The control unit 22 estimates the preparation time ΔT2. The preparation time ΔT2 is an example of a first preparation time. The process of estimating the preparation time ΔT2 is an example of a third estimation process.

[0070] In order for preparation for replacing the edge ring 423 to be complete at the replacement possible timing t3, the component carrier 50 must have completed movement to the location of the processing equipment 40 at timing t4, which is a preparation time ΔT2 before the replacement possible timing t3. The movement time ΔT3 is the time required for the component carrier 50 to move to the location of the processing equipment 40 where the edge ring 423 needs to be replaced. The control unit 22 estimates the movement time ΔT3. The movement time ΔT3 is an example of a first movement time. The process of estimating the movement time ΔT3 is an example of a second estimation process. The component carrier 50 only needs to start moving before timing t5, which is the movement time ΔT3 before timing t4. The control unit 22 manages the positions of each processing equipment 40 and each component carrier 50, and can estimate the time required for each component carrier 50 to move to the location of each processing equipment 40.

[0071] The control unit 22 calculates the time t before the timing t5 that is counted back from the replacement possible timing t3 by the total time of the preparation time ΔT2 and the movement time ΔT3. p The replacement instruction is transmitted to the component transport device 50, thereby instructing the component transport device 50 to replace the edge ring 423. The step of transmitting the replacement instruction is an example of a transmitting step.

[0072] Furthermore, in order to replace the edge ring 423 at the replacement enable timing t3, the pressure inside the component carrier device 50 must be reduced to a predetermined pressure. The pressure adjustment time ΔT4 is the time required for the pressure inside the container 51 to be reduced to the predetermined pressure. Therefore, the component carrier device 50 must start adjusting the pressure inside the component carrier device 50 before timing t6, which is the pressure adjustment time ΔT4 before the replacement enable timing t3.

[0073] Here, immediately after the cassette 52 has been replaced or if the edge ring 423 has not been replaced for some time, the pressure inside the component conveying device 50 will be higher than the predetermined pressure, and the pressure adjustment time ΔT4 will be long. On the other hand, immediately after the edge ring 423 has been replaced, the pressure inside the component conveying device 50 will be close to the predetermined pressure, and the pressure adjustment time ΔT4 will be short. Therefore, the timing of timing t5 and t6 will differ depending on the state of the component conveying device 50.

[0074] From the above, it is necessary to instruct the component transport device 50 to replace the edge ring 423 of the processing device 40 before the earlier of the timings t5 and t6 before the replacement time of the edge ring 423. Therefore, the control unit 22 instructs the component transport device 50 to replace the edge ring 423 of the processing device 40 at the timing t p and the timing t is earlier than the timings t5 and t6. p In this case, the component conveying device 50 is instructed to replace the edge ring 423 of the processing device 40. This makes it possible to shorten the downtime of the processing device 40 for replacing the edge ring 423, and to suppress a decrease in production efficiency due to the replacement of the edge ring 423.

[0075] [Processing of the control device 20] 16 is a flowchart showing an example of the processing of the control device 20 when the part carrying device 50 is moved to the position of the processing device 40 that is the target for replacing a consumable part. The processing shown in FIG. 16 is realized by the control unit 22 of the control device 20 executing a program read from the storage unit 21. The control device 20 controls the multiple processing devices 40 and the part carrying devices 50.

[0076] First, the control unit 22 refers to the reservation table 210 to identify edge rings 423 for which replacement is not reserved (S100). For example, the control unit 22 identifies edge rings 423 for which a component ID is not associated with a component carrier ID as edge rings 423 for which replacement is not reserved. The control unit 22 then determines whether or not there is an edge ring 423 among the identified edge rings 423 for which replacement will arrive within a predetermined time ΔT0 from the current time (S101). If there is no edge ring 423 for which replacement will arrive within the time ΔT0 from the current time (S101: No), the control unit 22 again executes the processing shown in step S100.

[0077] On the other hand, if there is an edge ring 423 whose replacement time will arrive within a time ΔT0 from the current time (S101: Yes), the control unit 22 identifies the movement start timing (S102). The movement start timing is the earlier of timing t5 and timing t6.

[0078] Next, the control unit 22 selects one component carrier 50 that is closest to the location of the processing device 40 that requires replacement of the edge ring 423 (S103). In step S103, not only the linear distance between the processing device 40 and the component carrier 50 but also the length of the path along which the component carrier 50 moves to the location of the processing device 40 is taken into consideration. Then, the control unit 22 refers to the reservation table 210 in the storage unit 21 and determines whether the component carrier ID of the component carrier 50 selected in step S103 is registered in the reservation table 210 (S104).

[0079] If the component carrying device ID is not registered in the reservation table 210 (S104: No), the control unit 22 executes the following process. That is, the control unit 22 registers the component carrying device ID of the selected component carrying device 50 in the reservation table 210 in association with the component ID of the edge ring 423 determined in step S101 to be due for replacement within time ΔT0 (S106). As a result, the selected component carrying device 50 is reserved for replacement of the edge ring 423 determined in step S101 to be due for replacement within time ΔT0.

[0080] Next, the control unit 22 transmits a replacement instruction to the selected component transport device 50 to instruct the replacement of the edge ring 423 (S107). The replacement instruction includes information such as the location information of the processing device 40 that requires the replacement of the edge ring 423 and the component ID of the edge ring 423. Then, the control unit 22 again executes the process shown in step S100.

[0081] On the other hand, if the part carrying device ID is already registered in the reservation table 210 (S104: Yes), that is, if the part carrying device 50 selected in step S103 has already been reserved, the control unit 22 executes the following process. That is, the control unit 22 extracts from the reservation table 210 the "next replacement time" associated with the part carrying device ID determined in step S104 to be registered in the reservation table 210. If the part carrying device ID is associated with multiple "next replacement times," the control unit 22 extracts the latest "next replacement time" among them.

[0082] Then, the control unit 22 determines whether the movement start timing identified in step S102 is later in time than the extracted "next replacement time" (S105). If the movement start timing is later in time than the "next replacement time" (S105: Yes), the component transporting device 50 can replace the current edge ring 423 after the replacement of the already reserved edge ring 423 is completed. Therefore, the control unit 22 executes the process shown in step S106.

[0083] On the other hand, if the movement start timing is earlier than the "next replacement time" (S105: No), the selected component transport device 50 cannot start moving to the processing equipment 40 having the edge ring 423 that needs to be replaced until replacement of the other edge rings 423 is completed. Therefore, the control unit 22 instructs the component transport device 50 that is next closest to the position of the processing equipment 40 that needs to replace the edge ring 423, among the other component transport devices 50, to replace the edge ring 423.

[0084] For example, the control unit 22 determines whether there are any other unselected component carrier devices 50 (S108). If there are any other unselected component carrier devices 50 (S108: Yes), the control unit 22 selects the component carrier device 50 that is next closest to the position of the processing device 40 that requires replacement of the edge ring 423 (S109). Then, the control unit 22 again executes the process shown in step S104.

[0085] On the other hand, if all component carriers 50 have been selected (S108: No), the control unit 22 refers to the reservation table 210 and selects the component carrier 50 that will finish replacing the edge ring 423 earliest (S110). Then, the control unit 22 executes the process shown in step S106.

[0086] FIG. 17 is a flowchart showing an example of the processing of the control device 20 when controlling a processing device 40 that is a target for replacing a consumable part and a part transport device 50 connected to that processing device 40. FIG. 17 illustrates the processing of the control device 20 when controlling one processing device 40 that is a target for replacing a consumable part and one part transport device 50 connected to that processing device 40. Note that the processing of the control device 20 when controlling another processing device 40 that is a target for replacing a consumable part and another part transport device 50 connected to that processing device 40 is also executed in the same manner as the flowchart illustrated in FIG. 17. The processing shown in FIG. 17 is realized by the control unit 22 of the control device 20 executing a program read from the memory unit 21. The control device 20 controls multiple processing devices 40 and part transport devices 50.

[0087] First, the control unit 22 determines whether or not a process using RF power has been executed in the processing device 40 (S120). If a process using RF power has not been executed (S120: No), the control unit 22 executes the process shown in step S120 again.

[0088] On the other hand, if processing using RF power has been performed (S120: Yes), the control unit 22 updates the "RF accumulated time" associated with the processing device ID of the processing device 40 on which processing using RF power has been performed in the reservation table 210 (S121). Then, the control unit 22 estimates the "next replacement time" for the edge ring 423 for which the "RF accumulated time" has been updated, and updates the "next replacement time" associated with the "component ID" of the edge ring 423 with the estimated "next replacement time" (S122). As a result, the "next replacement time" for the edge ring 423 is updated according to the actual processing time using RF power.

[0089] Next, the control unit 22 determines whether or not the processing of the last lot before the replacement time of the consumable part has been completed based on the updated "next replacement time" (S123). If the processing of the last lot before the replacement time of the consumable part has not been completed in the processing device 40 (S123: No), the control unit 22 executes the processing shown in step S120 again.

[0090] On the other hand, when processing of the last lot before the replacement time of the consumable part is completed in processing device 40 (S123: Yes), control unit 22 causes processing device 40 that has completed processing of the lot to clean the inside of chamber 41 (S124). This removes reaction by-products and the like adhering to edge ring 423 after use, and makes it possible to prevent reaction by-products and the like from scattering when edge ring 423 is unloaded.

[0091] Note that the cleaning in step S124 may be performed after the edge ring 423 is moved away from the lower electrode 421 to which the edge ring 423 was attached by lifting the edge ring 423 with the lift pins 48. This makes it possible to remove reaction by-products and the like that are attached not only to the top surface of the edge ring 423 but also to the side surfaces of the edge ring 423 and the top surface of the lower electrode 421 to which the edge ring 423 was attached.

[0092] Next, the pressure inside chamber 41 of processing device 40 where the processing of the lot has been completed is adjusted (S125). In step S125, the gas inside chamber 41 is exhausted and an inert gas is supplied into chamber 41. Then, the pressure inside chamber 41 is controlled to a predetermined pressure P1.

[0093] Next, the control unit 22 determines whether or not a connection notification has been received from the part carrying device 50 (S126). Note that, by the process illustrated in Fig. 16, one part carrying device 50 has moved to the position of the processing device 40 whose consumable part is to be replaced. If a connection notification has not been received from the part carrying device 50 (S126: No), the control unit 22 executes the process shown in step S126 again.

[0094] On the other hand, if a connection notification is received from the component transport device 50 (S126: Yes), the control unit 22 controls the exhaust system 46 and the valve 461a of the processing device 40 to exhaust gas from the space 60 at the connection portion between the processing device 40 and the component transport device 50 (S127). This reduces the pressure in the space 60 at the connection portion between the processing device 40 and the component transport device 50 to a predetermined pressure P2. In this embodiment, the pressure P2 is lower than the pressure P1. The control unit 22 then transmits a gate open request to the component transport device 50 that sent the connection notification, requesting that the gate valve 512 of the component transport device 50 be opened (S128).

[0095] Next, the control unit 22 determines whether or not a gate open notification indicating that the gate valve 512 has been opened has been received from the part conveying device 50 (S129). If the gate open notification has not been received (S129: No), the control unit 22 executes the process shown in step S129 again.

[0096] On the other hand, if the gate open notification has been received (S129: Yes), the control unit 22 controls the processing device 40 to lift the edge ring 423 with the lift pins 48 and open the gate valve 401 (S130). Then, the control unit 22 transmits an exchange start instruction to the component transport device 50 to instruct the start of exchange of the edge ring 423 (S131).

[0097] After the replacement start instruction is transmitted in step S131, the component carrier device 50 replaces the edge ring 423. At this time, the control unit 22 may control the processing device 40 to clean the inside of the chamber 41 of the processing device 40 during the period from when the used edge ring 423 is carried out until when the unused edge ring 423 is carried in. This allows reaction by-products and the like that peel off from the edge ring 423 and fall into the processing device 40 when the used edge ring 423 is carried out to be removed before the unused edge ring 423 is carried in.

[0098] Next, the control unit 22 determines whether or not a replacement completion notification has been received from the part carrying device 50 (S132). If a replacement completion notification has not been received from the part carrying device 50 (S132: No), the control unit 22 executes the process shown in step S132 again.

[0099] On the other hand, if a replacement completion notice is received from the component conveying device 50 (S132: Yes), the control unit 22 controls the processing device 40 to close the gate valve 401 (S133). Then, the control unit 22 sends a replacement confirmation notice to the component conveying device 50 (S134). Then, the control unit 22 controls the exhaust system 46 and the valve 461a of the processing device 40 to stop exhausting gas from the space 60 at the connection portion between the processing device 40 and the component conveying device 50 (S135). Then, the control unit 22 opens the valve 461b of the processing device 40 to return the pressure in the space 60 at the connection portion between the processing device 40 and the component conveying device 50 to atmospheric pressure.

[0100] Next, the control unit 22 deletes the record in the reservation table 210 that includes the "component ID" of the replaced edge ring 423 after use. Then, the control unit 22 creates a new record in the reservation table 210 that includes the "component ID" of the used edge ring 423 and the replaced edge ring 423 before use (S136). In the newly created record, the identification information of the processing device 40 in which the edge ring 423 has been replaced is registered in the "processing device ID" field, the current date and time is registered in the "replacement date and time" field, and 0 is registered in the "RF accumulated time" field. The "component transport device ID" field is left blank.

[0101] Then, the control unit 22 estimates the replacement time of the replaced edge ring 423 before use and registers the estimated replacement time in the "next RF accumulated time" of the newly created record (S137).Then, the control unit 22 executes the process shown in step S120 again.

[0102] [Processing of parts transport device 50] 18 is a flowchart showing an example of processing of part conveying device 50. The processing shown in FIG. 18 is realized by control unit 551 executing a program read from storage unit 552. Note that, apart from the processing exemplified in FIG. 18, control unit 551 receives a replacement instruction via communication unit 550 and stores the received replacement instruction in storage unit 552.

[0103] First, control unit 551 determines whether or not there is an unprocessed replacement instruction by referring to storage unit 552 (S200). If there is no unprocessed replacement instruction (S200: No), control unit 551 executes the process shown in step S200 again.

[0104] If there is an unprocessed replacement instruction (S200: Yes), the control unit 551 starts moving the component carrier 50 to the position of the processing device 40 corresponding to the position information included in the replacement instruction (S201). Step S201 is an example of a starting step. The control unit 551 controls the movement mechanism 54 using, for example, the sensing result from the sensor 553, to move the component carrier 50 to the position of the processing device 40 corresponding to the position information included in the replacement instruction. The control unit 551 also controls the exhaust device 554 and the valve 556 to start exhausting gas from the container 51 of the component carrier 50, thereby starting adjustment of the pressure inside the container 51 (S202).

[0105] Next, the control unit 551 determines whether the component conveying device 50 is connected to the processing device 40 based on the sensing result of the sensor 553 (S203). If the component conveying device 50 is not connected to the processing device 40 (S203: No), the control unit 551 executes the process shown in step S203 again.

[0106] On the other hand, if the component transporting device 50 is connected to the processing device 40 (S203: Yes), the control unit 551 transmits a connection notification to the control device 20 via the communication unit 550 (S204). Then, the control unit 551 controls the robot arm 53a to remove the unused edge ring 423 from the cassette 52 (S205).

[0107] Next, the control unit 551 determines whether or not a gate open request has been received from the control device 20 via the communication unit 550 (S206). If a gate open request has not been received (S206: No), the control unit 551 executes the process shown in step S206 again.

[0108] On the other hand, if a gate open request has been received (S206: Yes), the control unit 551 determines whether the pressure P inside the container 51 of the component conveying device 50 has reached a predetermined pressure P2 (S207). The pressure P2 is the same as the pressure P2 inside the space 60 (see FIG. 12) of the connection portion, which is adjusted after the processing device 40 and the component conveying device 50 are connected. If the pressure P has not reached the pressure P2 (S207: No), the control unit 551 again executes the process shown in step S207. Step S207 is an example of a preparation step.

[0109] Here, when replacing edge ring 423, the pressure inside chamber 41 of processing device 40 is controlled to P1, and the pressure inside space 60 at the connection between processing device 40 and component carrier device 50 and inside container 51 of component carrier device 50 are controlled to P2, which is lower than pressure P1. As a result, when gate valve 401 of processing device 40 and gate valve 512 of component carrier device 50 are opened, a gas flow occurs from inside chamber 41 of processing device 40 to inside container 51 of component carrier device 50. This prevents particles inside component carrier device 50 from entering processing device 40.

[0110] If the difference between the pressure P1 inside the processing device 40 and the pressure P2 at the connection between the processing device 40 and the component transport device 50 and inside the component transport device 50 is too small, particles inside the component transport device 50 may enter the processing device 40. On the other hand, if the difference between the pressure P1 and the pressure P2 is too large, particles may be stirred up inside the component transport device 50. Therefore, the difference between the pressure P1 and the pressure P2 is set to, for example, 10 [Pa] or more and 10 4 It is preferable that the pressure is not more than [Pa].

[0111] If the pressure P is equal to the pressure P2 (S207: Yes), the control unit 551 opens the gate valve 512 (S208). Then, the control unit 551 determines whether or not a replacement start instruction has been received from the control device 20 via the communication unit 550 (S209). If the replacement start instruction has not been received (S209: No), the control unit 551 executes the process shown in step S209 again.

[0112] On the other hand, if an exchange start instruction has been received (S209: Yes), the control unit 551 controls the robot arm 53b to insert the end effector 530b into the processing device 40 and receive the used edge ring 423 lifted by the lift pins 48 (S210). Then, the control unit 551 controls the robot arm 53b to retract the end effector 530b into the component transport device 50 and store the used edge ring 423 in the cassette 52. Step S210 is an example of a storing step.

[0113] Next, the control unit 551 controls the robot arm 53a to insert the end effector 530a carrying the unused edge ring 423 into the processing device 40 and transfer the unused edge ring 423 to the lift pins 48 (S211). Then, the control unit 551 controls the robot arm 53a to retract the end effector 530a into the component transport device 50. The unused edge ring 423 is placed on the lower electrode 421 by lowering the lift pins 48. Step S211 is an example of a loading step.

[0114] Next, the control unit 551 closes the gate valve 512 (S212). Step S212 is an example of a closing step. Then, the control unit 551 transmits a replacement completion notification to the control device 20 via the communication unit 550 (S213).

[0115] Next, the control unit 551 controls the robot arm 53b so that the end effector 530b moves to the vicinity of the cleaning unit 56, and controls the cleaning unit 56 so that it cleans the end effector 530b (S214).

[0116] Next, the control unit 551 determines whether or not a replacement confirmation notification has been received from the control device 20 via the communication unit 550 (S215). If a replacement confirmation notification has not been received (S215: No), the control unit 551 executes the process shown in step S215 again.

[0117] On the other hand, when a replacement confirmation notification is received (S215: Yes), the control unit 551 determines whether or not any unused edge rings 423 remain in the cassette 52 (S216). The control unit 551 determines whether or not any unused edge rings 423 remain in the cassette 52, for example, based on the number of edge rings 423 accommodated in the cassette 52 and the number of replacements.

[0118] If an unused edge ring 423 remains in the cassette 52 (S216: Yes), the control unit 551 executes the process shown in step S200 again. On the other hand, if an unused edge ring 423 does not remain in the cassette 52 (S216: No), the control unit 551 controls the moving mechanism 54 to move the component transport device 50 to a cassette 52 replacement location. Then, the cassette 52 in the component transport device 50 is replaced with the cassette 52 containing the unused edge ring 423 (S217). Then, the control unit 551 executes the process shown in step S200 again.

[0119] In this embodiment, when there are no unused edge rings 423 remaining in the cassette 52, the component transport device 50 moves to a cassette 52 replacement location and replaces the cassette 52, but the disclosed technology is not limited to this. For example, an AGV (Automated Guided Vehicle) or the like may transport the cassette 52 containing the unused edge rings 423 to the location of the component transport device 50 and replace the cassette 52.

[0120] Furthermore, when cassette 52 is replaced, the pressure inside container 51 of component transport device 50 becomes atmospheric pressure, and it takes time to reduce the pressure to the pressure P2 at the time of replacing edge ring 423. Therefore, when cassette 52 is replaced, control unit 551 preferably controls exhaust device 554 to exhaust gas from inside container 51 and reduce the pressure inside container 51 to the pressure P2 at the time of replacing edge ring 423. This allows component transport device 50 to more quickly start replacing edge ring 423 when a replacement instruction is received from control device 20.

[0121] The first embodiment has been described above. As described above, the component transport device 50 in this embodiment includes a container 51, a cassette 52, a robot arm 53, and a moving mechanism 54. The cassette 52 stores unused and used consumable parts. The container 51 has an opening 511 connected to the processing device 40 and a gate valve 512 that opens and closes the opening 511, and stores the cassette 52. The robot arm 53 is provided inside the container 51 and has an end effector 530 at its tip. The robot arm 53 transports used consumable parts from the processing device 40 through the opening 511 and stores them in the cassette 52. The robot arm 53 also removes unused consumable parts from the cassette 52 and transports them into the processing device 40 through the opening 511. The moving mechanism 54 has a power source and moves the component transport device 50. This facilitates replacement of the edge ring 423.

[0122] Furthermore, the part carrying device 50 in the above-described embodiment includes a communication unit 550, a control unit 551, and a sensor 553. The communication unit 550 communicates wirelessly with the control device 20 that controls the part carrying device 50. The sensor 553 senses the surroundings of the part carrying device 50. The control unit 551 controls the movement mechanism 54 using the sensing results of the sensor 553, thereby moving the part carrying device 50 to the position of the processing device 40 instructed by the control device 20. This makes it possible to easily move the part carrying device 50.

[0123] In the above embodiment, two end effectors, end effector 530a and end effector 530b, are provided at the tip of robot arm 53. One end effector, end effector 530a, is used to transport consumable parts before use, and the other end effector, end effector 530b, is used to transport consumable parts after use. This prevents the consumable parts before use from being contaminated by reaction by-products that peel off from the consumable parts after use.

[0124] In the above embodiment, the consumable part is the edge ring 423, and the end effector 530b transports the edge ring 423 by supporting the lower surface of the used edge ring 423. This makes it possible to prevent reaction by-products adhering to the edge ring 423 from adhering to the end effector 530a.

[0125] In the above embodiment, a cleaning unit 56 for cleaning the end effector 530b is provided in the container 51. This makes it possible to prevent reaction by-products adhering to the end effector 530b from scattering into the component conveying device 50 as particles.

[0126] In the above embodiment, the cassette 52 accommodates a plurality of unused and used consumable parts arranged vertically, with the used consumable parts accommodated below the unused consumable parts, thereby preventing reaction by-products peeled off from the used consumable parts from falling and adhering to the unused consumable parts.

[0127] In the above embodiment, the cassette 52 can be removed from the container 51 of the part transport device 50 while still containing the consumable parts. This allows the cassette 52 containing unused consumable parts to be easily replaced with the cassette 52 containing used consumable parts.

[0128] In the above embodiment, opening 511 of part transport device 50 is provided with positional deviation detection sensor 57 that detects a positional deviation of a used consumable part when the used consumable part passes through opening 511. Robot arm 53a carries the used consumable part into processing device 40 so as to correct the positional deviation of the used consumable part detected by positional deviation detection sensor 57. This allows robot arm 53a to accurately place the used consumable part at a predetermined position within processing device 40.

[0129] Furthermore, part transport device 50 in the above-described embodiment is provided with exhaust device 554 that exhausts gas from inside container 51. This allows the pressure inside container 51 to be reduced to a predetermined vacuum level, thereby reducing moisture and other substances adhering to consumable parts before use.

[0130] The processing system 10 in the above-described embodiment includes a processing device 40 having consumable parts and processing substrates W, a component transport device 50 transporting the consumable parts, and a control device 20 controlling the processing device 40 and the component transport device 50. The component transport device 50 includes a container 51, a cassette 52, a robot arm 53, and a moving mechanism 54. The cassette 52 stores unused and used consumable parts. The container 51 has an opening 511 connected to the processing device 40 and a gate valve 512 that opens and closes the opening 511, and stores the cassette 52. The robot arm 53 is provided inside the container 51 and transports used consumable parts from the processing device 40 through the opening 511 and stores them in the cassette 52. The robot arm 53 also removes unused consumable parts from the cassette 52 and transports them into the processing device 40 through the opening 511. The moving mechanism 54 has a power source and moves the component transport device 50. This facilitates replacement of consumable parts in the processing device 40.

[0131] Furthermore, in the above-described embodiment, the processing apparatus 40 includes a support unit 42 having a mounting surface on which a substrate W is placed. The consumable part is an edge ring 423 provided on the upper surface of the support unit 42 so as to surround the mounting surface. A recess 4230 is provided on at least one of the upper surface of the support unit 42 and the lower surface of the edge ring 423, and a protrusion 4214 to be inserted into the recess 4230 is provided on at least the other of the upper surface of the support unit 42 and the lower surface of the edge ring 423. Thus, by placing the edge ring 423 on the lower electrode 421 so that the protrusion 4214 of the lower electrode 421 is inserted into the recess 4230 of the edge ring 423, it is possible to align the lower electrode 421 and the edge ring 423 with high precision.

[0132] Furthermore, in the above-described embodiment, the recess 4230 is provided with a first sidewall 4230a extending in the depth direction of the recess 4230 and a first inclined portion 4230b that widens the width of the recess 4230 from the first sidewall 4230a toward the opening of the recess 4230. As a result, when the edge ring 423 is placed on the lower electrode 421, even if the positions of the recess 4230 of the edge ring 423 and the protrusion 4214 of the lower electrode 421 are slightly misaligned, the protrusion 4214 can be inserted into the recess 4230.

[0133] Furthermore, in the above-described embodiment, the convex portion 4214 is provided with a second side wall portion 4214b extending from the base of the convex portion 4214 in the protruding direction, and a second inclined portion 4214a in which the width of the convex portion 4214 narrows as it progresses from the second side wall portion 4214b to the tip of the convex portion 4214. As a result, when the edge ring 423 is placed on the lower electrode 421, the convex portion 4214 is inserted into the recessed portion 4230 even if the positions of the recessed portions 4230 of the edge ring 423 and the convex portion 4214 of the lower electrode 421 are slightly misaligned.

[0134] In the above embodiment, the total number of recesses 4230 provided on at least one of the upper surface of the support portion 42 and the lower surface of the edge ring 423 is two or more. The opening of the recess 4230 is shaped as an elongated hole having a major axis along the radial direction of a circle centered on the central axis X of the substantially disk-shaped substrate W placed on the support portion 42. This allows the protrusions 4214 of the lower electrode 421 to be inserted into the recesses 4230 of the edge ring 423 when the edge ring 423 is placed on the lower electrode 421. This allows the central axis of the edge ring 423 to be approximately aligned with the central axis X of the substrate W placed on the electrostatic chuck 422.

[0135] (Second embodiment) In the first embodiment, an exhaust device 554 is provided inside the component transporting device 50, and the gas inside the component transporting device 50 is exhausted to the outside of the component transporting device 50 by the exhaust device 554, thereby reducing the pressure inside the component transporting device 50. In contrast, in the present embodiment, the gas inside the component transporting device 50 is exhausted by the exhaust system 46 of the processing device 40 when the component transporting device 50 is connected to the processing device 40. This eliminates the need for the exhaust device 554 inside the component transporting device 50, allowing the component transporting device 50 to be made more compact. Note that the system configuration of the processing system 10 in this embodiment is similar to the system configuration of the processing system 10 in the first embodiment described using FIG. 1, and therefore a description thereof will be omitted.

[0136] [Configuration of processing device 40] Fig. 19 is a diagram showing an example of a processing device 40 according to the second embodiment. Note that, except for the points described below, components in Fig. 19 that are given the same reference numerals as those in Fig. 2 have the same or similar functions as those in Fig. 2, and therefore descriptions thereof will be omitted.

[0137] A pipe 462 connected between the pressure control valve 460 and the exhaust system 46 branches into a pipe 462a and a pipe 462b. When the valve 461a is opened, gas can be exhausted by the exhaust system 46 through the pipes 462a and 462b.

[0138] Furthermore, a pipe 443 is provided on the side of chamber 41 on which gate valve 401 is provided. Pipe 443 is connected to valves 442a to 442c via valve 442d. By closing valves 442a and 442b and opening valves 442c and 442d, an inert gas can be supplied into pipe 443 at a flow rate controlled by flow rate controller 441c.

[0139] [Configuration of part transport device 50] Fig. 20 is a diagram showing an example of a part conveying device 50 according to the second embodiment. Note that, except for the points described below, components in Fig. 20 that are given the same reference numerals as those in Fig. 9 have the same or similar functions as those in Fig. 9, and therefore descriptions thereof will be omitted.

[0140] The pipe 555 is disposed between the side surface of the container 51 on which the gate valve 512 is provided and the space inside the container 51, and the pipe 555 is provided with a valve 556. In this embodiment, the part conveying device 50 is not provided with an exhaust device 554. The pipe 555 is an example of an exhaust port.

[0141] Furthermore, a pipe 560 is provided on the side surface of the container 51 on the side where the gate valve 512 is provided. The pipe 560 is connected to a cleaning unit 56. A valve 561 is provided on the pipe 560.

[0142] [Connection between processing device 40 and part conveying device 50] Fig. 21 is an enlarged cross-sectional view showing an example of a connection portion between the processing device 40 and the part conveying device 50 in the second embodiment. Note that, except for the points described below, components in Fig. 21 that are given the same reference numerals as those in Fig. 11 have the same or similar functions as those in Fig. 11, and therefore description thereof will be omitted.

[0143] Opening 462c of pipe 462b and opening 555a of pipe 555 are formed in positions that face each other when processing equipment 40 and component conveying device 50 are connected. In addition, sealing member 516 such as an O-ring is arranged on the side surface of container 51 of component conveying device 50 so as to surround opening 555a. This allows pipe 462b and pipe 555 to communicate airtightly when processing equipment 40 and component conveying device 50 are connected.

[0144] After the processing device 40 and the component conveying device 50 are connected, the valve 461a of the processing device 40 is opened and the gas is exhausted by the exhaust system 46, whereby the gas inside the container 51 of the component conveying device 50 can be exhausted via the pipes 462b and 555. This allows the pressure inside the container 51 to be reduced without providing an exhaust device 554 inside the component conveying device 50, thereby enabling the component conveying device 50 to be made smaller.

[0145] Furthermore, opening 443a of pipe 443 and opening 560a of pipe 560 are formed in positions that face each other when processing equipment 40 and component conveying device 50 are connected. Furthermore, sealing member 515 such as an O-ring is arranged on the side surface of container 51 of component conveying device 50 so as to surround opening 560a. This allows pipe 443 and pipe 560 to communicate airtightly when processing equipment 40 and component conveying device 50 are connected.

[0146] After the replacement of the edge ring 423 is completed, while the processing device 40 and the component conveying device 50 are connected, the valves 442a and 442b of the processing device 40 are closed, the valves 442c and 442d are opened, and the valve 561 of the component conveying device 50 is opened. This causes an inert gas to be supplied to the cleaning unit 56 of the component conveying device 50. The cleaning unit 56 cleans the end effector 530b by high-pressure gas purging using the inert gas supplied via the piping 560. This eliminates the need to provide an inert gas supply source within the component conveying device 50, allowing the component conveying device 50 to be made more compact.

[0147] The second embodiment has been described above. As described above, the component conveying device 50 in this embodiment includes a pipe 560 for introducing a purge gas for purging and cleaning the end effector 530a into the cleaning unit 56. When the component conveying device 50 is connected to the processing device 40, the pipe 560 is connected to the gas supply unit 44 of the processing device 40. This eliminates the need to provide a purge gas supply source within the component conveying device 50, allowing the component conveying device 50 to be made more compact.

[0148] Furthermore, component conveying device 50 in the above-described embodiment includes piping 555 for exhausting gas from container 51, which is connected to exhaust system 46 of processing device 40 when component conveying device 50 is connected to processing device 40. This allows the pressure inside container 51 to be reduced without providing exhaust device 554 inside component conveying device 50, thereby enabling component conveying device 50 to be made smaller.

[0149] (Third embodiment) The component transport device 50 in the first and second embodiments replaces one type of consumable part, the edge ring 423. In contrast, the component transport device 50 in this embodiment replaces multiple types of consumable parts. Examples of the multiple types of consumable parts include the edge ring 423 and the upper electrode 43e.

[0150] The cassette 52 stores both unused and used consumable parts for multiple types of consumable parts. In this embodiment, the spaces within the cassette 52 for storing consumable parts are partitioned by type. This prevents reaction by-products and the like adhering to used consumable parts of a specific type from falling onto unused consumable parts of other types within the cassette 52, even when a specific type of consumable part is frequently replaced. Note that consumable parts may be stored in separate cassettes 52 for each type, and separate cassettes 52 for each type may be stored within the part transport device 50.

[0151] Here, different types of consumable parts may have different replacement cycles. Therefore, the replacement times of different types of consumable parts often do not coincide. When the replacement times do not coincide, a process may be stopped to replace a consumable part, and after the process is resumed, the process may be stopped again shortly to replace another consumable part. In this case, if the replacement times of multiple consumable parts are close, replacing the multiple consumable parts while the process is stopped can shorten the process downtime and improve production efficiency.

[0152] 22 is a diagram for explaining an example of the timing of replacing consumable parts in the third embodiment. In this embodiment, the short replacement period LT short Replacement time for the first consumable part t s and long replacement cycle long Replacement time for the second consumable part t l The time difference ΔLT is the replacement period LT short If it is shorter than t, it is time to replace it. s Both the first consumable part and the second consumable part are replaced at the replacement period LT. short is an example of the first replacement period, and the replacement period LT long is an example of the second replacement period.

[0153] For example, the control device 20 may determine the replacement time t s and the replacement time for the second consumable part t l The time difference ΔLT between short If the time is shorter than t, the replacement time for the first consumable part is s In the replacement instruction based on the above, the replacement of the second consumable part is also instructed. This makes it possible to shorten the downtime of processing and improve production efficiency.

[0154] When replacing different types of consumable parts during a single processing stoppage, it is preferable to replace consumable parts installed in a higher position before replacing consumable parts installed in a lower position. For example, the control device 20 instructs the part transport device 50 to replace the first or second consumable part, whichever is installed in a higher position within the processing device 40, first. This prevents reaction by-products and the like that have peeled off from the used consumable part from falling onto the previously replaced, unusable consumable part when carrying out the used consumable part.

[0155] (Fourth embodiment) The part transport device 50 in the first to third embodiments is connected to a processing device 40 that requires replacement of consumable parts, and replaces the consumable parts in that processing device 40. In contrast, the part transport device 50 in this embodiment remains connected to one processing device 40 when the time to replace consumable parts is approaching in multiple processing devices 40, and replaces the consumable parts in the other processing devices 40 via the vacuum transfer chamber 31. This makes it possible to shorten the downtime of the processing system 10 due to replacement of consumable parts.

[0156] 23 is a diagram illustrating an example of a method for replacing an edge ring 423 in the fourth embodiment. Fig. 23 illustrates an example in which the edge ring 423 of a processing device 40-1 and the edge ring 423 of a processing device 40-2 are replaced via the processing device 40-1. The processing device 40-1 is an example of a first processing device, and the processing device 40-2 is an example of a second processing device.

[0157] In this embodiment, the control device 20 estimates the travel time required for the component conveying device 50 to travel from the position of the processing device 40-1 to the position of the processing device 40-2 based on the position information of the processing device 40-1 and information on the route that the component conveying device 50 can travel. The travel time required for the component conveying device 50 to travel from the position of the processing device 40-1 to the position of the processing device 40-2 is an example of the second travel time.

[0158] Furthermore, the control device 20 estimates the preparation time required for the component conveying device 50, which has moved to the position of the processing device 40-2, to be ready to replace the edge ring 423 inside the processing device 40-2. The preparation time required for the component conveying device 50, which has moved to the position of the processing device 40-2, to be ready to replace the edge ring 423 inside the processing device 40-2 is an example of the second preparation time.

[0159] Furthermore, the control device 20 estimates the replacement time required to replace the edge ring 423 in the processing device 40-2 via the processing device 40-1 and the vacuum transfer chamber 31. If the total time of the estimated travel time and preparation time is longer than the estimated replacement time, the control device 20 instructs the component transport device 50 to replace the edge ring 423 in the processing device 40-2 via the processing device 40-1 and the vacuum transfer chamber 31. This makes it possible to shorten the downtime of the processing system 10 due to replacement of consumable parts.

[0160] 23, edge ring 423 in processing device 40-2, which is located opposite processing device 40-1 across vacuum transfer chamber 31, is replaced via processing device 40-1 and vacuum transfer chamber 31, but the disclosed technology is not limited to this. For example, processing device 40 in which edge ring 423 is replaced via processing device 40-1 and vacuum transfer chamber 31 may be processing device 40 other than processing device 40-2, such as processing device 40-4.

[0161] Furthermore, when the edge ring 423 of another processing apparatus 40 is replaced via the processing apparatus 40, it is preferable to replace the edge ring 423 of the other processing apparatus 40 before replacing the edge ring 423 of the processing apparatus 40 to which the component carrier device 50 is connected. For example, when the total time of the estimated travel time and preparation time is longer than the estimated replacement time, the control device 20 instructs the component carrier device 50 to replace the edge ring 423 in the processing apparatus 40-2 before replacing the edge ring 423 in the processing apparatus 40-1. This prevents reaction by-products and the like peeled off from a used edge ring 423 carried out from another processing apparatus 40 from falling onto the unused edge ring 423 attached to the processing apparatus 40 to which the component carrier device 50 is connected.

[0162] (Fifth embodiment) In the part transport device 50 according to the first to fourth embodiments, when a consumable part is replaced, gas is exhausted and the pressure is reduced inside the container 51 that houses the cassette 52 and the robot arm 53. In contrast, in the present embodiment, the space that houses the robot arm 53 inside the container 51 is airtightly separated from the space that houses the cassette 52 by a gate valve, and the gas inside the space that houses the robot arm 53 is exhausted. This makes it possible to reduce the space that is depressurized when a consumable part is replaced, and shorten the time required to depressurize the pressure to a predetermined level.

[0163] Fig. 24 is a diagram showing an example of a part conveying device 50 according to the fifth embodiment. Note that, except for the points described below, components in Fig. 24 that are given the same reference numerals as those in Fig. 9 have the same or similar functions as those in Fig. 9, and therefore descriptions thereof will be omitted.

[0164] Within the vessel 51, a space 51a accommodating the robot arms 53a and 53b and a space 51b accommodating the cassette 52 are hermetically separated by a gate valve 517. When the edge ring 423 is replaced, the gate valve 517 is opened, and the robot arm 53a removes the edge ring 423 from the cassette 52 before use. The robot arm 53a then retreats into the space 51a, and the gate valve 517 is then closed. The gas within the space 51a is then exhausted by the exhaust device 554. Closing the gate valve 517 reduces the space to be exhausted by the exhaust device 554, thereby shortening the time required to reduce the pressure to a predetermined level. Within the vessel 51, the space 51a separated by the gate valves 512 and 517 is an example of a load lock chamber.

[0165] Then, after the pressure inside space 51a is reduced to a predetermined pressure, gate valve 512 is opened and the edge ring 423 is replaced. After the replacement of the edge ring 423 is completed and gate valve 512 is closed, the pressure inside space 51a is returned to atmospheric pressure and gate valve 517 is opened. Then, the used edge ring 423 is placed in cassette 52 by robot arm 53b.

[0166] Then, after robot arm 53b retreats into space 51a, gate valve 517 is closed again. Then, gas is exhausted from space 51a by exhaust device 554, and end effector 530b is cleaned by cleaning unit 56. By keeping gate valve 517 closed while end effector 530b is being cleaned, particles scattered during cleaning can be prevented from adhering to unused edge ring 423 housed in cassette 52.

[0167] [others] The technology disclosed in this application is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist thereof.

[0168] For example, in the first and third to fifth embodiments described above, the part carrying device 50 starts evacuating the container 51 after receiving a replacement instruction from the control device 20, but the disclosed technology is not limited to this. For example, the part carrying device 50 may control the pressure inside the container 51 so that the pressure inside the container 51 becomes a predetermined pressure P2 even before receiving a replacement instruction. This allows the part carrying device 50 to start replacing the consumable part more quickly when receiving a replacement instruction from the control device 20.

[0169] Furthermore, in the first and third to fifth embodiments described above, the gas exhausted by the exhaust device 554 is discharged to the outside of the component conveying device 50 through the exhaust port 557, but the disclosed technology is not limited to this. For example, the exhaust port 557 may be connected to a device for treating the exhaust gas provided outside the component conveying device 50 by a flexible hose. This promotes recycling of the gas exhausted from the component conveying device 50.

[0170] Furthermore, in the first and third to fifth embodiments described above, the inside of container 51 of component conveying device 50 may be connected via a flexible hose to an exhaust device provided outside component conveying device 50, and the gas inside container 51 may be exhausted by the exhaust device. This eliminates the need to provide exhaust device 554 inside component conveying device 50, and allows component conveying device 50 to be made smaller.

[0171] Furthermore, in the second embodiment described above, the gas inside the container 51 of the component conveying device 50 is exhausted by the exhaust system 46 of the processing device 40, but the disclosed technology is not limited to this. For example, when the processing device 40 and the component conveying device 50 are connected, the exhaust port 557 of the component conveying device 50 may be connected to the exhaust port of the exhaust system 46. In this case, the gas exhausted by the exhaust device 554 of the component conveying device 50 is exhausted to the exhaust port of the exhaust system 46. This promotes recycling of the gas exhausted from the component conveying device 50.

[0172] In addition, in the above-mentioned fifth embodiment, the gas in the space 51a separated by the gate valves 512 and 517 may be exhausted by the exhaust system 46 in the processing device 40 after the processing device 40 and the part conveying device 50 are connected, as in the second embodiment, for example.

[0173] Furthermore, in each of the above-described embodiments, the control device 20 controls each processing device 40 and each part carrier device 50 with respect to the replacement of consumable parts, but the disclosed technology is not limited to this. For example, the control function related to the replacement of consumable parts may be realized by having one of the multiple part carrier devices 50 serve as a representative part carrier device 50. In this case, the representative part carrier device 50 controls each processing device 40 with respect to the replacement of consumable parts, manages its status, etc., via the control device 20. Furthermore, the representative part carrier device 50 may control each of the other part carrier devices 50, manage its status, etc., by communicating directly with each of the other part carrier devices 50 without going through the control device 20.

[0174] Furthermore, in the above-described embodiment, the same component transport device 50 transports used consumable parts out of the processing device 40 and transports unused consumable parts into the processing device 40. However, the disclosed technology is not limited to this. For example, a component transport device 50 that transports used consumable parts out of the processing device 40 and a component transport device 50 that transports unused consumable parts into the processing device 40 may be separately provided. In this way, both unused and used consumable parts are not stored in the component transport device 50, which prevents the unused edge ring 423 from being contaminated by reaction by-products, etc., that peel off from the used edge ring 423.

[0175] In this case, the component carrier 50 that carries the used consumable parts into the processing equipment 40 may be connected to the vacuum transfer chamber 31 or the atmospheric transfer chamber 33. The component carrier 50 connected to the vacuum transfer chamber 31 delivers the used consumable parts to the robot arm 310 in the vacuum transfer chamber 31. The robot arm 310 carries the received used consumable parts into the processing equipment 40 in which the consumable parts need to be replaced. The component carrier 50 connected to the atmospheric transfer chamber 33 delivers the used consumable parts to the robot arm 330 in the atmospheric transfer chamber 33. The robot arm 330 carries the used consumable parts into the load lock chamber 32. The used consumable parts carried into the load lock chamber 32 are carried by the robot arm 310 in the vacuum transfer chamber 31 into the processing equipment 40 in which the consumable parts need to be replaced. When the component carrier 50 is connected to the atmospheric transfer chamber 33, there is no need to provide an exhaust device in the component carrier 50 that carries the used consumable parts, and the component carrier 50 can be made smaller.

[0176] Furthermore, in each of the above-described embodiments, when the part transporting device 50 is connected to the processing device 40, the battery in the moving mechanism 54 may be charged by power supplied from the processing device 40.

[0177] Furthermore, in each of the above-described embodiments, the part carrying device 50 autonomously moves the part carrying device 50 to the position of the processing device 40 instructed by the control device 20 by controlling the movement mechanism 54 using the sensing results from the sensor 553. However, the disclosed technology is not limited to this. For example, the part carrying device 50 may be moved by operation by the user. In this case, the part carrying device 50 may notify the user of the position of the processing device 40 instructed by the control device 20 and the movement route thereof by displaying it on a display device or the like.

[0178] It should be noted that the disclosed embodiments are illustrative in all respects and should not be considered limiting. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0179] W substrate 10 Processing System 20 Control device 210 Reserved Table 30 Processing Groups 31 Vacuum transfer chamber 32 Load Lock Chamber 33 Atmospheric Transfer Chamber 40 Processing equipment 41 Chamber 42 Support part 421 Lower electrode 4214 Convex part 422 Electrostatic Chuck 423 Edge Ring 4230 Recess 43 Upper electrode showerhead assembly 44 Gas supply section 45 RF power supply section 46 Exhaust system 50 Parts transport device 51 Container 52 cassettes 53 Robot Arm 530 End Effector 54 Moving mechanism 553 Sensors 554 Exhaust system 56 Cleaning unit 57 Position deviation detection sensor

Claims

1. A component replacement device that can be connected to a plasma processing apparatus, A container having a parts transport port and a flow path, The container comprises at least one parts replacement robot, A first gate valve that opens and closes the aforementioned parts transport port, Equipped with, The container is capable of fluid connection to an external exhaust system via the flow path when the component replacement device is connected to the plasma processing apparatus. The at least one parts replacement robot is configured to transport parts through the parts transport port when the parts replacement device is connected to the plasma processing device. Parts replacement device.

2. The container has a side facing the plasma processing apparatus when connected to the plasma processing apparatus, The aforementioned side surface has the component transport port and the exhaust port which is in fluid communication with the flow path, The component replacement device according to claim 1, wherein the container is fluidly connected to an external exhaust device via the flow path and the exhaust port when the component replacement device is connected to the plasma processing device.

3. The parts exchange device according to claim 2, further comprising a first sealing member arranged to surround the parts transport opening.

4. The parts replacement device according to claim 2 or 3, further comprising a second sealing member arranged to surround the exhaust port.

5. The parts replacement device according to any one of claims 1 to 4, further comprising an alignment portion that engages with the side wall of the plasma processing apparatus.

6. The external exhaust system is provided in the plasma processing apparatus, the component replacement apparatus according to any one of claims 1 to 5.

7. The at least one parts replacement robot is After removing the first consumable part from the plasma processing apparatus, The second consumable part is brought into the plasma processing apparatus. A parts replacement device according to any one of claims 1 to 6, configured as described above.

8. The at least one parts replacement robot, A first parts replacement robot for transporting a first consumable part from the plasma processing apparatus to the container, A second parts replacement robot for transporting the second consumable parts from the container to the plasma processing apparatus, The parts replacement device according to claim 7, comprising:

9. The at least one parts replacement robot, A robot arm having a first end effector for the first consumable part and a second end effector for the second consumable part, The parts replacement device according to claim 7.

10. The parts replacement device according to any one of claims 1 to 9, further comprising a moving mechanism.

11. A communication unit that receives instructions for replacing parts, A first sensor that senses the surroundings, A control unit moves the parts replacement device by controlling the moving mechanism based on the parts replacement instruction and the sensing results from the first sensor, The parts replacement device according to claim 10, further comprising:

12. Further comprising a second sensor provided at the parts transport port, The parts replacement device according to any one of claims 1 to 11, wherein the second sensor includes a second sensor that detects a displacement of the position of the first consumable part as the first consumable part passes over it.

13. The parts replacement device according to claim 12, wherein the at least one parts replacement robot is configured to correct the displacement of the first consumable parts detected by the second sensor.

14. The parts replacement device according to any one of claims 1 to 5, further comprising a parts storage section within the container for storing parts to be replaced by the at least one parts replacement robot.

15. A first space in which at least one parts replacement robot is located, A space different from the first space, a second space in which the component housing is located, A second gate valve that airtightly separates the first space and the second space, The parts replacement device according to claim 14, comprising:

16. The component replacement device according to claim 1, wherein the component includes an edge ring.

17. A component replacement device that can be connected to a substrate processing device, A container having a parts transport port and a flow path, A parts replacement robot placed inside the aforementioned container, A first gate valve that opens and closes the aforementioned parts transport port, Equipped with, The container is capable of fluid connection to an external exhaust device via the flow path, The parts replacement robot is configured to transport parts through the parts transport port when the parts replacement device is connected to the substrate processing device. Parts replacement device.

Images