Flow sensor system

Abstract

To provide a flow rate sensor system capable of facilitating management of a flow rate and quality of a water-soluble functional fluid at a manufacturing site.SOLUTION: The flow sensor system 200 measures a flow rate of a fluid flowing in piping P and includes a flow sensor 100 and a concentration sensor 110. A flow rate sensor 100 includes a sensor head 10 for calculating the flow rate of a fluid, and a display unit 30 connected to the sensor head 10 and supplied with power from the outside. The concentration sensor 110 is configured to be attachable to and detachable from the flow rate sensor 100 and attachable to and detachable from the pipe P or the tank T that stores the fluid, and measures the concentration of the fluid by receiving power supply from the flow rate sensor 100. The display 30 displays the concentration measured by the concentration sensor 110 together with the flow rate calculated by the sensor head 10.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a flow rate sensor system that measures the flow rate of a fluid flowing in a pipe. [Background technology]

[0002] At product manufacturing sites, fluids such as coolant liquids that cool the machining points of machine tools are supplied to the machining points through piping. At such manufacturing sites, the flow rate of the fluid must be strictly controlled to maintain the cooling efficiency of the machining points. For this reason, manufacturing sites are sometimes provided with flow rate sensors (see, for example, Patent Document 1) that are attached to piping to measure the flow rate of the fluid flowing through the piping. Furthermore, Patent Document 2 describes a sensor system that can detect flow rate and other physical quantities, including temperature, pressure, humidity, illuminance, or distance, in addition to flow rate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6453156 [Patent Document 2] Patent No. 4919702 Summary of the Invention [Problem to be solved by the invention]

[0004] Fluids such as coolants used in manufacturing sites are required to contain an appropriate balance of water and oil components in order to maintain heat exchange, lubrication, and rust prevention properties. Therefore, the inventors have discovered that it is preferable to manage not only the flow rate of the fluid but also the quality of the fluid at manufacturing sites.

[0005] Even the sensor system of Patent Document 2 cannot detect the quality of the fluid that achieves both heat exchange and lubrication. As such, in the past, no attention has been paid to configurations that facilitate fluid quality control at manufacturing sites. As a result, manufacturing site managers have had to evaluate not only the fluid flow rate but also the fluid quality several times a day.

[0006] An object of the present invention is to provide a flow rate sensor system that can facilitate management of the flow rate and quality of a fluid. [Means for solving the problem]

[0007] (1) The flow sensor system of the present invention is a flow sensor system that measures the flow rate of a fluid flowing through a pipe, and includes a flow sensor including a sensor head that calculates the flow rate of the fluid, and a display connected to the sensor head and supplied with power from an external source, and a concentration sensor that is detachable from the flow sensor and is detachable from the pipe or a tank that stores the fluid, and receives power from the flow sensor to measure the concentration of the fluid, and the display displays the concentration measured by the concentration sensor along with the flow rate calculated by the sensor head.

[0008] According to this flow sensor system, the flow rate of the fluid flowing in the pipe is calculated by the sensor head in the flow sensor, and the calculated flow rate is displayed on the display. Also, by connecting a concentration sensor to the flow sensor, the concentration sensor receives a supply of power from the flow sensor and measures the concentration of the fluid flowing in the pipe or the fluid stored in the tank. The measured concentration is displayed on the display of the flow sensor together with the flow rate.

[0009] According to this configuration, by installing the display at the production site, the user can easily recognize the flow rate and concentration of the water-soluble functional fluid from the display at the production site, which makes it easy to manage the flow rate and quality of the water-soluble functional fluid at the production site.

[0010] (2) The display may have an operation unit for receiving user input, and may be capable of switching between an individual display screen for flow rate and concentration, a list display screen, a graph display screen, and a time series display screen in response to user input to the operation unit. This configuration allows the flow rate and concentration to be displayed in various formats even when the display is relatively small. This allows the display to be easily installed at a manufacturing site. Furthermore, the flow rate and quality of the water-soluble functional fluid can be more easily managed.

[0011] (3) The flow sensor may further include a memory for storing log data indicating the flow rate and concentration measured at predetermined time intervals and the time when the flow rate and concentration were measured. In this case, when an abnormality occurs, the user can easily analyze the cause at the manufacturing site using the log data stored in the memory.

[0012] (4) The flow sensor may further include an operation unit operated to set the sensor head and a control unit that controls the operation of the sensor head based on the setting from the operation unit, the operation unit being operated to set further the concentration sensor, and the control unit further controlling the operation of the concentration sensor based on the setting from the operation unit. In this case, the user can make settings for controlling not only the flow sensor but also the concentration sensor by operating the operation unit of the flow sensor.

[0013] (5) The threshold value for the amount measured by the flow sensor or the concentration sensor may be changeable by input from the operation unit. In this case, the flow sensor system can be operated as a switch.

[0014] (6) The unit setting for the amount measured by the flow rate sensor or the concentration sensor may be changed by inputting from the operation unit, and the display may display the amount measured by the flow rate sensor or the concentration sensor in the set unit. In this case, the user can recognize the amount measured in the desired unit.

[0015] (7) At least one of the dirt detection and dry water detection by the concentration meter may be set by inputting through the operation unit, thereby enabling more appropriate management of the quality of the fluid.

[0016] (8) At least one of the display and the sensor head may be provided with an indicator light, and the lighting state of the indicator light may be controlled based on the result determined by the display or the sensor head. In this case, the user can easily recognize the result determined by the display or the sensor head by visually checking the lighting state of the indicator light.

[0017] (9) The flow sensor system may further include a temperature sensor that is detachable from the flow sensor and from the pipe or tank, and that receives power from the flow sensor to measure the temperature of the fluid. The display may also display the temperature measured by the temperature sensor. In this case, a user can further recognize the temperature of the water-soluble functional fluid from the display at the production site. This allows for more detailed management of the water-soluble functional fluid at the production site.

[0018] (10) The display may further display the calorific value of the fluid based on the flow rate calculated by the sensor head and the temperature measured by the temperature sensor. In this case, the user can further recognize the calorific value of the water-soluble functional fluid from the display at the production site. This allows for more detailed management of the water-soluble functional fluid at the production site.

[0019] (11) The flow sensor system may further include a liquid level sensor that is detachable from the flow sensor and from the tank and receives power from the flow sensor to measure the liquid level of the fluid in the tank, and the display may further display the liquid level measured by the liquid level sensor. In this case, a user can further recognize the liquid level of the water-soluble functional fluid in the tank from the display on the display at the production site. This allows for more appropriate management of the water-soluble functional fluid at the production site.

[0020] (12) The concentration sensor may store identification information, and when the flow sensor is connected to the concentration sensor, the flow sensor may acquire the identification information, identify the concentration sensor according to the acquired identification information, and supply power to the concentration sensor according to the identification of the concentration sensor. In this case, the concentration sensor can be easily operated by connecting it to the flow sensor.

[0021] (13) The display may store setting information corresponding to the identification information of the concentration sensor, and may transmit the setting to the concentration sensor when the identification information is acquired. In this case, by connecting the concentration sensor to the flow sensor, the setting can be easily configured in the concentration sensor.

[0022] (14) The settings accepted by the flow sensor include initial settings required for measurement and detailed settings required for improving measurement accuracy, and the display may prompt the user to perform the initial settings when the flow sensor is started. In this case, the user can easily perform the initial settings when the flow sensor is started.

[0023] (15) The initial setting items may include information about the diameter of the pipe or information about the material of the pipe. In this case, the flow rate can be measured more accurately based on the set diameter or material of the pipe.

[0024] (16) The detailed settings may be accepted on a setting screen displayed on the display device that is located at a deeper level than the initial setting screen. In this case, unnecessary changes to the detailed settings can be prevented.

[0025] (17) Settings required to improve measurement accuracy may be accepted from a setting screen displayed on the display as setting items for experienced users. In this case, experienced users can improve measurement accuracy by making desired settings.

[0026] (18) The setting items for experts may include changing the threshold for detecting concentration errors, so that an expert user can easily recognize whether the concentration is being measured properly.

[0027] (19) The setting items for experts may include changing the bubble detection or flow measurement principle, in which case the expert user can operate the flow sensor system appropriately depending on the environment in which the flow sensor system is used.

[0028] (20) The screen content displayed during normal operation when measuring the flow rate or concentration of a fluid may be switchable between a graph display and a numerical display of the current value. In this case, the user can recognize the measured quantity in an appropriate display mode. [Effects of the Invention]

[0029] According to the present invention, the flow rate and quality of the water-soluble functional fluid can be controlled at the manufacturing site. [Brief explanation of the drawings]

[0030] [Figure 1] 1 is a schematic diagram showing a configuration of a flow sensor system according to an embodiment of the present invention; [Figure 2] 1 is a schematic diagram showing a configuration of a flow sensor system according to an embodiment of the present invention; [Figure 3] FIG. 3 is a block diagram showing a schematic configuration of the flow sensor system of FIG. 2. [Figure 4] FIG. 4 is a side view of the flow sensor of FIG. 3. [Figure 5] FIG. 5 is a schematic cross-sectional view showing the configuration of the sensor head of FIG. 4. [Figure 6] FIG. 10 is a diagram showing a state in which the display is directly connected to the sensor head. [Figure 7] FIG. 10 is a diagram showing a state in which the display device is separated from the sensor head. [Figure 8] FIG. 2 is a block diagram showing a detailed configuration of the flow sensor system. [Figure 9]4 is a screen of a display unit showing connections in the flow sensor system of FIG. 3. [Figure 10] FIG. 10 is a diagram showing a menu screen. [Figure 11] FIG. 10 is a diagram showing a first example of a setting screen of the display device. [Figure 12] FIG. 10 is a diagram showing a second example of a setting screen of the display device. [Figure 13] FIG. 10 is a diagram showing a third example of a setting screen of the display device. [Figure 14] FIG. 10 is a diagram showing a fourth example of a setting screen of the display device. [Figure 15] FIG. 10 is a diagram showing a fifth example of a setting screen for a display device. [Figure 16] FIG. 10 is a diagram showing a sixth example of a setting screen for a display device. [Figure 17] FIG. 10 is a diagram showing a seventh example of a setting screen for a display device. [Figure 18] FIG. 13 is a diagram showing an eighth example of a setting screen for a display device. [Figure 19] FIG. 10 is a diagram showing an individual display screen of a measurement amount. [Figure 20] FIG. 10 is a diagram showing an individual display screen of a measurement amount. [Figure 21] FIG. 10 is a diagram showing an individual display screen of a measurement amount. [Figure 22] FIG. 10 is a diagram showing an individual display screen of a measurement amount. [Figure 23] FIG. 10 is a diagram showing an individual display screen of a measurement amount. [Figure 24] FIG. 10 is a diagram showing a screen displaying a list of measurement quantities. [Figure 25] FIG. 10 is a diagram showing a history screen of measurement amounts. [Figure 26] FIG. 10 is a diagram showing a history screen of measurement amounts. [Figure 27] 10 is a flowchart showing the operation of the display device. DETAILED DESCRIPTION OF THE INVENTION

[0031] (1) Outline of the flow sensor system A flow sensor system according to an embodiment of the present invention will be described below with reference to the drawings. Figs. 1 and 2 are schematic diagrams showing the configuration of a flow sensor system according to an embodiment of the present invention. Fig. 3 is a block diagram showing the general configuration of a flow sensor system 200 of Fig. 2. As shown in Figs. 1 to 3, the flow sensor system 200 is made up of a flow sensor 100, a concentration sensor 110, a temperature sensor 120, and a liquid level sensor 130, and is used at product manufacturing sites, etc. The liquid level sensor 130 is not shown in Fig. 1.

[0032] The manufacturing site is equipped with a tank T, a commercial power source 210, and a control device 220 as utility facilities. An industrial water-soluble functional fluid (hereinafter simply referred to as the fluid) is stored in the tank T. The fluid is, for example, a coolant liquid that cools the machining point of a machine tool, and contains a water component, an oil component, and a surfactant. The fluid may also be a quenching agent, a mold release agent, a cleaning liquid, a plating liquid, or the like. The fluid stored in the tank T is supplied to a processing point (for example, the machining point of a machine tool) through a pipe P, and then circulated back to the tank T.

[0033] The flow sensor 100 is attached to a pipe P and receives power from an external commercial power source 210. The flow sensor 100 also measures the flow rate of the fluid flowing through the pipe P and outputs a switching signal to a control device 220 based on the measurement result. The control device 220 is, for example, a personal computer or a programmable logic controller, and controls the machine tool. The switching signal is a binary signal for switching the control device 220 between an on state and an off state. The flow sensor 100 will be described in detail later.

[0034] Each of the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 is configured to be detachable from the flow rate sensor 100, and operates by receiving power from the flow rate sensor 100. The concentration sensor 110 is configured to be detachable from the pipe P or the tank T. The concentration sensor 110 also measures the refractive index of the fluid and converts the measured refractive index into a concentration.

[0035] The method of measuring the concentration by the concentration sensor 110 is not limited to the above example. For example, the concentration sensor 110 may measure the concentration based on the conductivity of the fluid or the pH of the fluid. Alternatively, the concentration sensor 110 may measure the concentration based on the attenuation rate of ultrasonic waves in the fluid or the speed of sound in the fluid.

[0036] The temperature sensor 120 is configured to be detachable from the pipe P or the tank T, and measures the temperature of the fluid. As will be described later, the temperature sensor 120 is made up of a head unit 121 and a relay amplifier 122. The liquid level sensor 130 is configured to be detachable from the tank T, and measures the liquid level of the fluid stored in the tank T. Hereinafter, the flow rate, concentration, temperature, or liquid level measured by sensors such as the flow rate sensor 100, concentration sensor 110, temperature sensor 120, or liquid level sensor 130 connected to the flow sensor system 200 will be collectively referred to as the measured quantity.

[0037] The sampling period for the measured quantity measured by each sensor is set to, for example, 10 seconds to 5 minutes. When the sampling period is 10 seconds, the median value during the sampling period may be set as the measured quantity. On the other hand, when the sampling period is 5 minutes, the maximum and minimum values ​​during the sampling period may be set as the measured quantity.

[0038] (2) Flow sensor Fig. 4 is a side view of the flow sensor 100 of Fig. 3. As shown in Fig. 4, the flow sensor 100 includes a sensor head 10, a clamp unit 20, and a display unit 30. Each of the sensor head 10 and the display unit 30 is rated for "IP67" according to the IP (International Protection) standard. The sensor head 10 is provided with a dustproof and waterproof structure. The sensor head 10 is attached to a pipe P and calculates the flow rate of a fluid flowing through the pipe P. In the following explanation, an example will be described in which the sensor head 10 is attached to the top surface of a pipe P that extends horizontally.

[0039] The clamp unit 20 includes an upper clamp member 21 and a lower clamp member 22. The upper clamp member 21 and the lower clamp member 22 are arranged to sandwich the pipe P and are joined to each other by a plurality of clamp fixing screws 23. In this way, the clamp unit 20 is attached to the outer peripheral surface of the pipe P. As shown by the dashed-dotted arrows in FIG. 4, two sensor fixing screws 101 are threaded into the upper surface of the upper clamp member 21 through the sensor head 10. In this way, the sensor head 10 is held by the clamp unit 20 with its lower surface in contact with the pipe P.

[0040] The display device 30 includes a housing 31, a connector 32, a control unit 33, a memory 34, an operation unit 35, a display unit 36, an indicator light 37, connection ports 38, 39, 40, and a power supply unit 41. The housing 31 has a substantially rectangular parallelepiped shape and can be attached to the top surface of the sensor head 10 as indicated by the dotted arrow in Fig. 4. The connector 32 is provided so as to be exposed from the bottom surface of the housing 31.

[0041] By attaching the housing 31 to the top surface of the sensor head 10, the connector 32 is connected to a connector 12 of the sensor head 10, which will be described later. This allows the display 30 and the sensor head 10 to communicate with each other. Meanwhile, the housing 31 can be installed on any installation surface in the manufacturing site. In this case, by connecting the housing 31 and the sensor head 10 with a cable CA shown in FIG. 7, which will be described later, the display 30 and the sensor head 10 can communicate with each other.

[0042] The control unit 33 includes, for example, a CPU (Central Processing Unit) and a storage element, and is provided inside the housing unit 31. The control unit 33 controls the operations of the memory 34, the display unit 36, and the indicator light 37. The control unit 33 also compares the flow rate calculated by the sensor head 10 with a predetermined threshold value, and generates a switching signal based on the comparison result. In other words, the flow sensor 100 operates as a flow rate switch that switches the control device 220 in Fig. 3 between an on state and an off state based on whether or not a fluid is flowing in the pipe P at a flow rate equal to or greater than the threshold value.

[0043] 3. Here, the control unit 33 can set threshold values ​​for each of the concentration, temperature, and liquid level. The control unit 33 may generate a switching signal based on the results of comparing the measured flow rate, concentration, temperature, and liquid level with the threshold values ​​corresponding to the measurement results.

[0044] The memory 34 includes, for example, a ring buffer and is provided inside the housing 31. The memory 34 sequentially stores log data in which time and measurement quantity are associated at predetermined time intervals. The log data includes instantaneous values ​​every 10 seconds and maximum and minimum values ​​over 10 minutes for each of the flow rate, temperature, concentration, liquid level, and heat quantity. The log data also includes instantaneous values ​​every 10 seconds and maximum and minimum values ​​over 10 minutes for the signal stability of each of the flow rate, concentration, and liquid level. Furthermore, the log data includes the integrated flow rate, integrated heat quantity, and various event histories. The various event histories include "error / alarm occurrence," "output switching," "span adjustment," Includes "zero point adjustment" and "unit switching."

[0045] When log data is stored in the entire storage area of ​​memory 34, the oldest stored log data is overwritten by the latest log data. Therefore, log data once stored in memory 34 is retained for a certain period of time until it is overwritten by the latest log data. In this example, seven days' worth of measured amounts every 10 seconds is retained as log data for defect analysis. Thirteen months' worth of measured amounts every 10 minutes is retained as log data for checking seasonal fluctuations. One year's worth of hourly integrated flow rates is retained as log data for usage management. In addition, 200 event histories are retained.

[0046] The operation unit 35 is provided on the top surface of the housing 31 so as to be able to accept input operations by the user. The user can input various parameters by operating the operation unit 35 while viewing the input screen displayed on the display unit 36. Parameters that can be input from the operation unit 35 include the inner diameter of the pipe P, the speed of sound in the fluid, the response time, the display resolution, the hysteresis, the zero cut flow rate, the direction of fluid flow, or the material of the pipe P. These parameters are called basic parameters. By inputting the diameter or material of the pipe P, etc., the flow rate can be measured more accurately.

[0047] Furthermore, as parameters for experts other than the basic parameters, it is also possible to input from the operation unit 35 the outer diameter of the pipe P, the thickness of the pipe P, the sound velocity in the pipe P, or the dynamic viscosity of the fluid. The parameters for experts are parameters for improving measurement accuracy. While the basic parameters are often changed, the parameters for experts rarely need to be changed once they are set. Therefore, to prevent the settings from being changed erroneously, the parameters for experts may be input from an input screen different from the input screen for the basic parameters. Some or all of the parameters may be input by selection. The input parameters are stored in the memory 34. Details of the parameters will be described later.

[0048] Furthermore, the memory 34 stores initial setting data for identifying each sensor and sending setting information to each sensor when the concentration sensor 110, the temperature sensor 120, or the liquid level sensor 130 is connected to the connection port 40. By identifying each sensor, the flow sensor 100 starts supplying power to each sensor.

[0049] Furthermore, the user can input desired threshold values ​​for each of the flow rate, concentration, temperature, and liquid level by operating the operation unit 35. Two threshold values ​​corresponding to the upper and lower limits, respectively, may be input for each measurement quantity. Multiple threshold values ​​corresponding to multiple measurement quantities may be associated and registered as a readable bank. In this case, by reading the registered bank, a series of threshold values ​​appropriate for the application of the flow sensor 100 can be input all at once.

[0050] The display unit 36 ​​includes, for example, a segment display or a dot matrix display, and is provided on the top surface of the housing unit 31. The display unit 30 is relatively small because it is placed at the manufacturing site. Therefore, the display unit 36, which is the display area of ​​the display unit 30, is also relatively small. For example, the width of the display unit 36 ​​may be equal to or smaller than the outer diameter of the pipe P. In this example, the size (diagonal length) of the display unit 36 ​​is 2 inches. Meanwhile, the maximum outer diameter of the pipe P to which the flow sensor 100 is attached is specified, for example, by the JIS standard "50A."

[0051] The display unit 36 ​​displays the measured flow rate, concentration, temperature, liquid level, etc. As described above, the screen of the display unit 36 ​​is relatively small, but by switching the display screen, it is possible to display not only individual measured quantities but also various other measured quantities, such as a list, graph, or time series display. The indicator light 37 includes, for example, multiple LEDs (light-emitting diodes) that emit light in different colors, and is provided on the top surface of the housing 31. The indicator light 37 lights up or flashes in a manner that makes it possible to identify the level of the switching signal generated by the control unit 33.

[0052] The connection port 38 includes, for example, a USB (Universal Serial Bus) port, and is provided on the side surface of the housing 31. When the connection port 38 is connected to an external information processing device via a cable (not shown), the log data stored in the memory 34 is output to the information processing device. Therefore, when an abnormality occurs, the user can easily analyze the cause from the log data displayed on the display 30, and can also analyze it in detail using the information processing device.

[0053] The connection port 39 includes, for example, an M12 port and is provided on an end surface of the housing 31. The connection port 39 is connected to the control device 220 in FIG. 3 via a cable (not shown). As a result, switching signals and the like generated by the control unit 33 are output to the control device 220. Specifically, the connection port 39 has a four-channel output section, and can output to the control device 220 via any of the output sections. The output may be a control output or an analog output.

[0054] The control output includes an instantaneous flow rate output, an integrated flow rate output, an area output, a bubble detection output, a pulse output, or an error output. The instantaneous flow rate output is the output of a switching signal related to the instantaneous flow rate, and the level of the switching signal is switched when the instantaneous flow rate falls below a threshold value set for the instantaneous flow rate. The integrated flow rate output is the output of a switching signal related to the integrated flow rate, and the level of the switching signal is switched when the integrated flow rate increases above a threshold value set for the integrated flow rate. The area output is the output of a switching signal related to the instantaneous flow rate, and the level of the switching signal is switched when the instantaneous flow rate is within the range of two threshold values ​​set for the upper and lower limits of the instantaneous flow rate.

[0055] The air bubble detection output is an output of a switching signal related to air bubbles, and when air bubbles are detected in the pipe P, the level of the switching signal is switched in one shot. In this case, the indicator light 37 lights up or flashes in a different manner than normal, thereby notifying the outside that air bubbles have been detected. In this example, the indicator light 37 lights up in green under normal conditions, and flashes in red in the event of an abnormality such as the presence of air bubbles.

[0056] The pulse output outputs a pulse corresponding to the flow rate. The error output outputs a signal indicating an error when it occurs. The analog output outputs an analog signal of the measured quantity (flow rate, temperature, concentration, liquid level, or heat quantity) measured by the sensor connected to the connector 32 or the connection port 40.

[0057] Furthermore, the connection port 39 is capable of receiving not only output to the control device 220 but also external input from the control device 220. The external inputs include an integrated flow reset input, a zero flow input, a flow zero point adjustment input, or a bank input. The integrated flow reset input is an input that resets the integrated value. The zero flow input is an input that forcibly sets the instantaneous value to zero during the period in which it is accepted. The flow zero point adjustment input is an input that adjusts the zero point of the flow rate. The bank input is an input that switches between banks consisting of multiple (four in this example) pattern threshold values.

[0058] The connection port 40 is provided on an end surface of the housing 31. The concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 shown in FIG. 3 are connected to the connection port 40 via cables (not shown). This allows the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 to be controlled by the control unit 33. The concentration, temperature, and liquid level measured by the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130, respectively, are provided to the display 30.

[0059] In the present embodiment, one connection port 40 is connected to each of the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 through the branch connector 201 in Fig. 1, but the embodiment is not limited to this. A plurality of connection ports 40 may be provided corresponding to the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130, respectively. In this case, the plurality of connection ports 40 are connected to the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 through respective cables.

[0060] The power supply unit 41 is provided inside the housing unit 31. The power supply unit 41 converts the voltage applied from the commercial power supply 210 into a voltage suitable for the ultrasonic flow sensor 100, and applies the converted voltage to the control unit 33, the memory 34, the display unit 36, and the indicator light 37. The power supply unit 41 also applies the converted voltage to each part of the sensor head 10 through the connector 32 or the cable CA. Furthermore, the power supply unit 41 applies the converted voltage to each of the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 through the cables.

[0061] (3) Sensor head 5 is a schematic cross-sectional view showing the configuration of the sensor head 10 of FIG. 4. As shown in FIG. 5, the sensor head 10 includes a housing 11, a connector 12, a control unit 13, two wedge members 14, two ultrasonic elements 15, an acoustic couplant 16, an ultrasonic shielding plate 17, and an indicator light 18. The housing 11 has a generally rectangular parallelepiped shape with an open bottom. The connector 12 is provided so as to be exposed from the top surface of the housing 11. As described above, the connector 32 of the display 30 of FIG. 4 can be connected to the connector 12.

[0062] The control unit 13 includes, for example, a CPU and a storage element, and is provided inside the housing unit 11. The control unit 13 controls the operation of the two ultrasonic elements 15 and the indicator light 18. The control unit 13 also calculates the flow rate of the fluid flowing through the pipe P based on the measurement results obtained by the operation of the ultrasonic elements 15, parameters provided by the display 30, and predetermined parameters. Furthermore, when the setting for heat quantity calculation, which will be described later, is enabled, the control unit 13 calculates the product of the calculated flow rate and the temperature measured by the temperature sensor 120 in FIG. 3 as the heat quantity.

[0063] Each wedge 14 is formed from a non-metallic material that has high rigidity and high acoustic transparency. It is also preferable that each wedge 14 be formed from a material that has high environmental resistance. In this example, each wedge 14 is formed from PPS (polyphenylene sulfide) resin and PEEK (polyether ether ketone) resin, but it may also be formed from ULTEM (registered trademark) resin. Each wedge 14 has an element coupling surface 14a facing diagonally upward and a pipe coupling surface 14b facing downward.

[0064] In the following description, when distinguishing between the two wedge materials 14, one wedge material 14 will be referred to as wedge material 14A and the other wedge material 14 will be referred to as wedge material 14B. The wedge materials 14A and 14B are attached to the opening at the bottom of the housing 11 in a state where they are arranged in the longitudinal direction of the housing 11 so that their element coupling surfaces 14a face diagonally upward and outward. This forms a space inside the housing 11 that liquids such as water and oil cannot penetrate.

[0065] Each ultrasonic element 15 is configured to be able to transmit and receive ultrasonic waves. In the following description, when distinguishing between two ultrasonic elements 15, one ultrasonic element 15 will be referred to as ultrasonic element 15A and the other ultrasonic element 15 will be referred to as ultrasonic element 15B. Ultrasonic elements 15A and 15B are joined to element joining surfaces 14a of wedge materials 14A and 14B, respectively. As a result, ultrasonic elements 15A and 15B are provided inside housing 11 at a predetermined angle relative to piping P.

[0066] The acoustic couplant 16 has a solid shape and is made of a soft elastic material such as polymer rubber or a gel-like substance. The acoustic couplant 16 is provided at the bottom of the housing 11 so as to contact the pipe coupling surface 14b of each wedge 14. The bottom surface of the acoustic couplant 16 protrudes slightly from the bottom surface of the housing 11. The acoustic couplant 16 matches the acoustic impedance of each wedge 14 and the pipe P by contacting its bottom surface with the pipe P. Therefore, it is preferable that the acoustic couplant 16 have an acoustic impedance value between the acoustic impedance value of each wedge 14 and the acoustic impedance value of the pipe P.

[0067] The ultrasonic shielding plate 17 is made of, for example, foam rubber and has a flat plate shape. The ultrasonic shielding plate 17 is arranged between the wedges 14A and 14B in an upright state so as to penetrate the acoustic couplant 16. In this case, ultrasonic components that do not pass through the piping P are prevented from being transmitted directly between the wedges 14A and 14B.

[0068] As described above, the sensor head 10 is fixed to the clamp unit 20 in Fig. 4 by the two sensor fixing screws 101. As a result, the sensor head 10 is attached to the pipe P with the acoustic couplant 16 pressed against the pipe P. In this state, the sensor head 10 operates.

[0069] In this example, the ultrasonic waves transmitted by ultrasonic element 15A pass through wedge material 14A and acoustic couplant 16 and are incident on the fluid in pipe P. After that, the ultrasonic waves that have passed through the fluid are reflected by the inner wall of pipe P, pass through acoustic couplant 16 and wedge material 14B, and are received by ultrasonic element 15B. The propagation time from when the ultrasonic waves are transmitted by ultrasonic element 15A to when they are received by ultrasonic element 15B is measured.

[0070] Furthermore, the ultrasonic waves transmitted by ultrasonic element 15B pass through wedge material 14B and acoustic couplant 16 and are incident on the fluid in pipe P. After that, the ultrasonic waves that have passed through the fluid are reflected by the inner wall of pipe P, pass through acoustic couplant 16 and wedge material 14A, and are received by ultrasonic element 15A. The propagation time from when the ultrasonic waves transmitted by ultrasonic element 15B are received by ultrasonic element 15A is measured. Based on the difference in the measured propagation times, the flow rate of the fluid flowing through pipe P is calculated.

[0071] In this embodiment, the flow rate is calculated using the measurement principle of the transit time method described above, but the embodiment is not limited to this. The flow rate may also be calculated using other measurement principles, such as the Doppler method. In the Doppler method, the flow rate is calculated by measuring the frequency shift between the transmitted ultrasonic wave and the received ultrasonic wave, and the flow rate of the fluid flowing through the pipe P is calculated based on the measured frequency shift. The flow rate may also be calculated using a combination of the transit time method and the Doppler method.

[0072] In the Doppler method, ultrasonic waves may be transmitted by ultrasonic element 15A and received by ultrasonic element 15B. Alternatively, ultrasonic waves may be transmitted by ultrasonic element 15A and received by ultrasonic element 15B. In this case, sensor head 10 does not need to include wedge material 14B, ultrasonic element 15B, and ultrasonic shielding plate 17.

[0073] The indicator light 18 includes, for example, multiple LEDs, and lights up or flashes in a manner that makes it possible to identify the level of the switching signal, similar to the indicator light 37 of the display 30. Fig. 6 is a diagram showing a state in which the display 30 is directly connected to the sensor head 10. Fig. 7 is a diagram showing a state in which the display 30 is separated from the sensor head 10. As described above, the sensor head 10 and the display 30 are provided with indicator lights 18, 37, respectively. The indicator lights 18, 37 are positioned so that they are easily visible from above, below, left, right, and the side.

[0074] Therefore, as shown in Figure 6, when the display 30 is directly connected to the sensor head 10, the user can easily identify the level of the switching signal by visually checking the indicator light 37 of the display 30 attached to the piping P via the sensor head 10.

[0075] On the other hand, by connecting the display unit 30 and the sensor head 10 with a cable CA, the display unit 30 can be separated from the sensor head 10 as shown in Fig. 7. In this state, the user can install the display unit 30 on any installation surface in the manufacturing site. Even when the display unit 30 is separated from the sensor head 10, the user can easily identify the level of the switching signal by visually checking the indicator light 18 of the sensor head 10.

[0076] (4) Detailed configuration of the flow sensor system FIG. 8 is a block diagram showing a detailed configuration of the flow sensor system 200. Below, the explanation of each part of the flow sensor system 200 will be supplemented with reference to FIG. 8. In FIG. 8, the liquid level sensor 130 is not shown. As shown in FIG. 8, the display device 30 further includes IF (interface) units 32a and 39a, an input unit 35a, a general-purpose IF unit 38a, a communication unit 40a, and a setting storage unit 42 in addition to the configuration in FIG. 4. The IF unit 32a is connected to the connector 32. The general-purpose IF unit 38a and the IF unit 39a are connected to connection ports 38 and 39, respectively.

[0077] The display device 30 receives power from the commercial power supply 210 shown in Fig. 3 via the IF unit 39a. In addition, by connecting the control device 220 and the connection port 39 with a cable capable of supplying power and enabling two-way communication, signals can be input from and output to the outside via the IF unit 39a. The input unit 35a accepts various inputs from the operation unit 35.

[0078] The display unit 36 ​​displays the measured values ​​from each sensor. The memory 34 stores the measured values ​​from each sensor as log data with the same time stamp. The memory 34 acquires the time in accordance with the time on the display unit 36, but it is also possible to acquire the time individually for each sensor and synchronize the time on the display unit 36.

[0079] The indicator light 37 lights up or flashes in a manner according to the measurement result. If multiple sensors are connected to the display 30, it is possible to set which sensor's output the indicator light 37 corresponds to. For example, if the concentration sensor 110 and the temperature sensor 120 are connected to the display 30, it is possible to set the indicator light 37 to light up when both of the respective set conditions are met, or when at least one of the conditions is met. This allows the user to understand the status of the flow sensor system 200 by the indicator light 37, even if the flow sensor system 200 includes multiple sensors.

[0080] The general-purpose IF unit 38a can output the log data stored in the memory 34 to the outside. In this embodiment, since the display device 30 is small, the capacity of the memory 34 is relatively small. Therefore, the memory 34 can only store log data for, for example, about one year, and old log data is deleted by being overwritten with new log data. Even in this case, old log data can be extracted from the general-purpose IF unit 38a before being deleted, or output to the outside for backup purposes. The setting storage unit 42 stores items that need to be set and parameters that are changed in response to input, according to the ID (identification information) of each sensor.

[0081] The cable connecting the display unit 30 and the concentration sensor 110, and the cable connecting the display unit 30 and the temperature sensor 120 are each a single signal cable. The signal cable includes a power supply line and a signal line. Power is supplied from the power supply unit 41 of the display unit 30 to the concentration sensor 110 and the temperature sensor 120 through the signal cable. In addition, signals are input and output between the communication unit 40a and the concentration sensor 110 and the temperature sensor 120 through the signal cable.

[0082] Because the flow rate sensor 100, the concentration sensor 110, and the temperature sensor 120 are disposed near liquid, it is necessary to ensure that they are waterproof. Although the concentration sensor 110 and the temperature sensor 120 require connection terminals with the display 30, it is preferable to reduce the number of connection terminals as much as possible to ensure waterproofing. In this example, as described above, each of the concentration sensor 110 and the temperature sensor 120 not only receives and inputs signals from and outputs signals to the display 30 via a single signal cable, but also receives power from the display 30, eliminating the need to provide a separate power terminal. This makes it easy to ensure waterproofing.

[0083] 4 are provided on the connector 32 and the connection ports 38 to 40 of the display device 30 to ensure waterproofing. The connection port 40 is connected to multiple sensors through a branch connector 201. This eliminates the need to provide multiple connection ports 40 on the display device 30. This makes it easy to ensure waterproofing of the display device 30.

[0084] In addition to the configuration shown in FIG. 5, the sensor head 10 includes an IF unit 12a and a temperature measurement unit 19. The IF unit 12a is connected to the connector 12. To ensure waterproofing in the sensor head 10 as well, a waterproof cover is provided on the connector 12. The temperature measurement unit 19 includes, for example, a temperature measurement element, and simply measures the temperature of the fluid. The temperature measured by the temperature measurement unit 19 is used for correcting the flow rate, etc. The control unit 13 controls the operation of the ultrasonic element 15, the indicator light 18, and the temperature measurement unit 19.

[0085] The concentration sensor 110 includes a control unit 11A, a prism 11B, an LED substrate 11C, a CMOS (complementary metal oxide semiconductor) substrate 11D, a monitor PD (photodiode) 11E, an indicator light 11F, a temperature measurement unit 11G, a memory 11H, a communication unit 11I, a power supply unit 11J, and an ID storage unit 11K. The control unit 11A includes, for example, a CPU, and controls the operations of the LED substrate 11C, the CMOS substrate 11D, the monitor PD 11E, the indicator light 11F, and the temperature measurement unit 11G.

[0086] The prism 11B is disposed so as to be in contact with the pipe P. The LED substrate 11C irradiates light onto the fluid flowing in the pipe P through the prism 11B. The CMOS substrate 11D receives light from the fluid flowing in the pipe P through the prism 11B. The refractive index of the fluid is measured based on the amount of light received by the CMOS substrate 11D. The monitor PD11E detects the amount of light from the LED substrate 11C. The amount of light detected by the LED substrate 11C is used to stabilize the amount of light from the LED substrate 11C.

[0087] The indicator light 11F includes, for example, multiple LEDs, and lights up or blinks in a manner that allows the level of the switching signal to be identified, similar to the indicator light 37 of the display 30. The temperature measurement unit 11G includes, for example, a temperature measuring element, and simply measures the temperature of the fluid. The temperature measured by the temperature measurement unit 11G is used for concentration correction, etc.

[0088] The memory 11H stores various settings, a conversion formula from refractive index to concentration, calibration information for measured concentrations, etc. The communication unit 11I inputs and outputs signals to and from the communication unit 40a of the display 30. The power supply unit 11J supplies power from the display 30 to each unit of the concentration sensor 110.

[0089] The ID storage unit 11K stores the ID of the concentration sensor 110. When power is supplied from the display device 30 through the power supply unit 11J, the communication unit 11I transmits the ID stored in the ID storage unit 11K to the display device 30 in response to an instruction from the display device 30. This causes the concentration sensor 110 to be configured based on the information stored in the setting storage unit 42 of the display device 30. The concentration sensor 110 operates in accordance with the settings made by the display device 30.

[0090] The temperature sensor 120 is composed of a head unit 121 and a relay amplifier 122. The head unit 121 includes a resistance temperature detector 12A. The relay amplifier 122 includes a control unit 12B, a constant current source 12C, a temperature conversion unit 12D, an input unit 12E, a display unit 12F, an indicator light 12G, a memory 12H, a communication unit 12I, a power supply unit 12J, and an ID storage unit 12K. The control unit 12B includes, for example, a CPU, and controls the operations of the constant current source 12C, the temperature conversion unit 12D, the display unit 12F, and the indicator light 12G.

[0091] The constant current source 12C passes a current through the resistance temperature detector 12A through two signal lines. The temperature of the fluid is detected as a voltage by the resistance temperature detector 12A. The temperature conversion unit 12D acquires the voltage detected by the resistance temperature detector 12A through two signal lines and converts it into a temperature. The input unit 12E accepts various inputs. The display unit 12F displays the measured temperature. The display content of the display unit 12F can be changed according to the input accepted by the input unit 12E. The indicator light 12G includes, for example, multiple LEDs, and lights up or blinks in a manner that makes it possible to identify the level of the switching signal, similar to the indicator light 37 of the display 30.

[0092] The memory 12H stores various settings, a voltage-to-temperature conversion formula, calibration information for the measured temperature, etc. The communication unit 12I inputs and outputs signals to and from the communication unit 40a of the display device 30. The power supply unit 12J supplies power from the display device 30 to each part of the temperature sensor 120.

[0093] The ID storage unit 12K stores the ID of the temperature sensor 120. When power is supplied from the display device 30 through the power supply unit 12J, the communication unit 12I transmits the ID stored in the ID storage unit 12K to the display device 30 in response to an instruction from the display device 30. This causes the temperature sensor 120 to be set based on the information stored in the setting storage unit 42 of the display device 30. The temperature sensor 120 operates in accordance with the setting made by the display device 30.

[0094] (5) Example of display screen Various screens displayed on the display unit 36 ​​of the display device 30 are exemplified below. Fig. 9 is a screen of the display unit 36 ​​showing the connection relationships in the flow sensor system 200 of Fig. 3. The control unit 33 of Fig. 4 authenticates the sensor connected to the connector 32 and the connection port 40, and displays the ID of the authenticated sensor on the display unit 36. In the example of Fig. 9, the sensor head 10 of the flow sensor 100 is connected to the connector 32, and the temperature sensor 120 and the concentration sensor 110 are connected to the connection port 40.

[0095] 10 is a diagram showing a menu screen. The menu screen of FIG. 10 shows the following menu items: "Current Value," "History," and "Settings" are displayed. The user can select one of the menus by operating the operation unit 35 in FIG. 4. When "Current Value" is selected, the display switches to a screen showing the measured value by the authenticated sensor in FIG. 9. "History" When "SETTINGS" is selected, the display switches to a measurement amount history screen. When "SETTINGS" is selected, the display switches to a setting screen for the display 30. Figs. 11 to 13 show initial setting items input by the user.

[0096] Fig. 11 is a diagram showing a first example of a setting screen of the display device 30. The setting screen of Fig. 11 is a screen that accepts input of initial settings for the flow sensor 100. The setting screen of Fig. 11 displays "flow direction," "pipe diameter," and "pipe type" as setting items. The user can select any of the setting items displayed on the setting screen by operating the operation unit 35 of Fig. 4. The same applies to the subsequent setting screens.

[0097] By selecting "flow direction," the direction of fluid movement is set. In the example of FIG. 11, "toward LED side" is displayed, which means that the fluid flows from the connection ports 39, 40 in FIG. 4 toward the indicator light 37. When the fluid flows in the opposite direction, "from LED side" is displayed. The direction of fluid movement may be displayed using an image or pictograph. By selecting "pipe diameter," the inner diameter of the pipe P is set. By selecting "pipe type," the material of the pipe P is set. The material of the pipe P includes, for example, metal or resin.

[0098] Fig. 12 is a diagram showing a second example of the setting screen of the display 30. Fig. 12 is a screen that accepts input of initial settings for sensors other than the flow sensor 100. The setting screen of Fig. 12 displays "calorific value calculation" as a setting item when the temperature sensor 120 is connected, and displays "probe length" as a setting item when the liquid level sensor 130 is connected. By selecting "calorific value calculation", it is set whether or not to enable calorific value calculation. By selecting "probe length", the probe length of the liquid level sensor 130 in Fig. 3 is set.

[0099] Fig. 13 is a diagram showing a third example of the setting screen of the display device 30. The setting screen of Fig. 13 displays "flow rate unit" as a setting item, and also displays "concentration unit" as a setting item when the concentration sensor 110 is connected. By selecting "flow rate unit", the unit of flow rate is set. The unit of flow rate is, for example, "L / min" or "cubic meter / hour". By selecting "Concentration unit", the unit of the flow rate is set. The concentration unit includes, for example, "%", "nD (refractive index)" or "Brix%". Here, "Brix" "Brix%" is generally a physical quantity used to measure sugar content, but when measuring concentration, "nD" is intentionally added as the initial item so that "Brix%" can be used even for concentrations other than sugar. Alternatively, you can select "Brix%." By adjusting the span of "Brix%," the unit will change to "%."

[0100] In this way, the user inputs the initial setting items exemplified in Figures 10 to 13. Once these setting items are set, they are often not changed again as long as the same measurement object is being measured. For this reason, these setting items are set as the initial settings. After the initial settings are made, the setting items are arranged in a hierarchy that makes it difficult to change the contents.

[0101] FIG. 14 is a diagram showing a fourth example of the setting screen of the display device 30. The display unit 36 ​​has a plurality of display channels (four in this example). The setting screen of FIG. 14 displays "ch1" to "ch4" as setting items corresponding to the first to fourth display channels, respectively. By selecting one of "ch1" to "ch4," the measured quantity to be displayed in the corresponding display channel is assigned. In the example of FIG. 14, the flow rate, temperature, concentration, and calorific value are assigned to the first to fourth display channels, respectively.

[0102] Fig. 15 is a diagram showing a fifth example of the setting screen of the display device 30. The setting screen of Fig. 15 displays the setting items "Detection Settings," "System Settings," "Convenient Functions," and "Initialization." By selecting "Detection Settings," detailed settings for each sensor connected to the display device 30 are made. In the initial setting items, the minimum settings required for performing measurements with each sensor have been input, but the setting screen of Fig. 15 is displayed as a screen for accepting setting items for experienced users who wish to make more detailed settings.

[0103] Selecting "System Settings" allows detailed settings of the display 30 to be made. Detailed settings of the display 30 include the lighting state of the indicator light 37, the screen orientation (upside down, portrait or landscape display), the language (Japanese, English, German, simplified or traditional Chinese, etc.), and the recording of log data or key lock method. Selecting "Convenient Functions" allows flow rate zero point adjustment, concentration teaching, or integrated flow rate reset to be performed for each sensor. Selecting "Initialization" allows restarting, setting initialization, erasing history data, initializing input / output settings, or complete initialization to be performed.

[0104] FIG. 16 is a diagram showing a sixth example of the setting screen of the display device 30. The setting screen of FIG. 16 is a screen that appears when "Detection Settings" in FIG. 15 is selected when the concentration sensor 110 is connected. The setting screen of FIG. 16 displays "Stability Warning" and "Dry Water Detection Sensitivity" as setting items. Stability levels include "OFF," "3 or less," "2 or less," and "1 or less." Selecting "Stability Warning" sets whether or not to output a warning when the concentration sensor 110 in FIG. 3 becomes unstable.

[0105] Selecting "Dry Water Detection Sensitivity" sets the detection sensitivity of dry water (a state where there is no fluid) in the concentration sensor 110. Dry water detection sensitivity includes "OFF," "Low," "Medium," and "High." If dry water is detected, if the liquid level in the tank T is low, or if the detection unit of the concentration sensor 110 is dirty, an error is displayed. If a refractive index-type concentration meter is used as the concentration sensor 110, when the water becomes dry, the amount of air in contact with the prism 11B in FIG. 8 increases, and the amount of light measured by the CMOS substrate 11D approaches the amount of light in air. This makes it possible to detect dry water.

[0106] FIG. 17 is a diagram showing a seventh example of the setting screen of the display device 30. The setting screen of FIG. 17 displays the setting items "Air bubble detection one-shot time," "Flow rate span adjustment," and "Pro mode." By selecting "Air bubble detection one-shot time," it is possible to set the timing (period) for detecting bubbles contained in the fluid, for example, when the flow rate is calculated using the Doppler method. In the example of FIG. 17, the timing for detecting bubbles is set to 1 second. By selecting "Flow rate span adjustment," it is possible to set the flow rate span.

[0107] Selecting "Pro Mode" allows you to switch between "ON" and "OFF." Turning "Pro Mode" to "ON" allows you to set parameters for experts. In the "Pro Mode" pro settings, you can set parameters for experts, such as the flow detection mode, pipe outer diameter, pipe thickness, pipe sound velocity, or kinematic viscosity. Once set, these settings are rarely changed during subsequent measurements. Furthermore, if these settings are changed accidentally, it can affect measurement accuracy. Therefore, to prevent unnecessary changes, expert-level parameter settings are set to be changeable at a deeper level than other parameters.

[0108] FIG. 18 is a diagram showing an eighth example of the setting screen of the display device 30. The setting screen of FIG. 18 is the screen that appears when "ON" is selected in "Pro mode" of FIG. 17. The setting screen of FIG. 18 displays "Flow rate detection mode" and "Pipe outer diameter input" as setting items. By selecting "Flow rate detection mode", the flow rate detection mode can be set. By selecting "Input pipe outer diameter", the outer diameter of the pipe P can be set.

[0109] The flow rate detection modes include a transit time difference mode, a Doppler mode, and a hybrid mode. The transit time difference mode is a mode that calculates the flow rate using a transit time difference method, and can accurately calculate the flow rate when the density of the gas contained in the fluid is relatively low. The Doppler mode is a mode that calculates the flow rate using a Doppler method, and can accurately calculate the flow rate when the density of the gas contained in the fluid is relatively high. The hybrid mode is a mode that calculates the flow rate using a combination of the transit time difference method and the Doppler method.

[0110] 19 to 23 are diagrams showing individual display screens for a measurement quantity. The individual display screens in FIGS. 17 to 19 are standard screens during measurement, and are displayed when measuring a measurement quantity such as a normal flow rate or concentration. As shown in FIGS. 19 to 21, in the individual display screens for a measurement quantity, an upper display area for displaying the current measurement quantity and a lower display area for displaying the threshold value for the measurement quantity are arranged vertically. The upper display areas in FIGS. 19 to 21 respectively display the current flow rate, temperature, and concentration.

[0111] The lower display area in Figure 19 displays the upper and lower thresholds for flow rate. The lower display areas in Figures 20 and 21 display the thresholds for temperature and concentration, respectively. The threshold for each measurement quantity can be set from the individual display screen for that measurement quantity.

[0112] As shown in Fig. 22, the flow rate measured by the flow sensor 100 can be displayed in the upper display area as instantaneous values, hold values, integrated values, graphs, etc., by instructing to switch the display from the state shown in Fig. 19. The hold values ​​include maximum and minimum values.

[0113] Unlike flow rate, concentration, or temperature, it is difficult for the user to determine whether the liquid level is appropriate by simply displaying the absolute value and threshold value. Therefore, although not shown, the liquid level measured by the liquid level sensor 130 can be displayed in a graph in the tank T of Fig. 3 by instructing a display switch from the standard screen corresponding to Figs. 19 to 21, as shown in the individual display screen of Fig. 23. Furthermore, as shown in Fig. 23, the relationship between the top surface of the tank T, the current liquid level, or the upper and lower limit threshold values ​​may also be displayed.

[0114] Fig. 24 is a diagram showing a list display screen of measurement quantities. In Figs. 19 to 21, only the measurement quantity from one sensor is displayed, but in the list display screen of Fig. 24, it is possible to display a list of measurement quantities from multiple connected sensors. In the list display screen of Fig. 24, flow rate, temperature, concentration, and calorific value are displayed in this order from top to bottom. The measurement quantities are displayed together with their units, so the user can easily recognize which measurement quantity corresponds to which sensor.

[0115] Numerical values ​​may be displayed so that the level of the switching signal can be identified on the individual display screens of Figures 19 to 23 and the list display screen of Figure 24. In this example, when the switching signal is at the "H" level, the numerical values ​​are displayed in white, and when the switching signal is at the "L" level, the numerical values ​​are displayed in red.

[0116] 25 and 26 are diagrams showing the measurement quantity history screen. The history screens in FIGS. 25 and 26 are screens that appear when "History" in FIG. 10 is selected. As shown in FIGS. 25 and 26, the history screens display the history of measurement quantities such as flow rate, concentration, temperature, or liquid level in a graph. The vertical axis of the graph indicates the measurement quantity, and the horizontal axis of the graph indicates the period. The period scale can be specified from, for example, one year, one month, one week, one day, one hour, or ten minutes. A ten-minute period is specified on the history screen in FIG. 25, and a one-year period is specified on the history screen in FIG. 26. Recognizing that fluid quality management is important in addition to fluid flow rate management, a one-year scale, which is longer than that of conventional flow rate sensors and measurement sensors, can also be selected.

[0117] As shown in the list display screen of Figure 24, a list of multiple measurement quantities is displayed, allowing users at the production site to easily understand the causal relationship between flow rate and liquid quality. Also, as shown in the history screens of Figures 25 and 26, the measurement quantities are displayed in chronological order, allowing users at the production site to easily analyze the cause when an abnormality occurs.

[0118] During normal use, it is possible to display only each measurement quantity. When an abnormality occurs, past history can also be checked on the display 30 located near the sensor such as the sensor head 10. This makes it possible to identify when an abnormality has occurred.

[0119] Furthermore, since not only the flow rate but also the measured quantities of concentration, temperature, or liquid level can be displayed together with the flow rate, the user can identify where an abnormality exists in the flow sensor system 200 related to the fluid being measured while looking at the display 30 of the flow sensor 100. For example, suppose that the liquid level sensor 130 is installed in a tank T of the fluid, and the sensor head 10 and concentration sensor 110 of the flow sensor 100 are installed in a pipe P through which the fluid supplied from the tank T flows. In this case, the user can identify that an abnormality exists in the tank T or the pipe P by visually checking the abnormal measured quantity displayed on the display 30.

[0120] (6) Display operation Fig. 27 is a flowchart showing the operation of the display device 30. In the flowchart of Fig. 27, steps S1 and S2 are executed by the user. The operation of the display device 30 will be explained below using the flowchart of Fig. 27. As shown in Fig. 27, first, the user connects each sensor, such as the concentration sensor 110, the temperature sensor 120, or the liquid level sensor 130, to the display device 30 (step S1). In this state, the user starts up the display device 30 (step S2).

[0121] When the display device 30 is started up in step S2, it supplies power to each sensor connected to the display device 30 in step S1 (step S3). As a result, each sensor connected to the display device 30 transmits its own ID to the display device 30. The display device 30 acquires the transmitted ID (step S4).

[0122] The display device 30 updates the display screen of the display unit 36 ​​in accordance with the ID acquired in step S4 (step S5). Specifically, a screen for accepting input of initial settings, such as those shown in Figures 11 to 14 or 16, is displayed on the display unit 36. Next, the display device 30 changes the settings of each sensor in accordance with the initial settings accepted from the screen in step S5 (step S6).

[0123] The display device 30 transmits the settings of step S6 to each sensor (step S7). As a result, each sensor performs measurement according to the settings. The display device 30 acquires a measurement amount from each sensor (step S8). The display device 30 also displays the measurement amount acquired in step S8 on the display unit 36 ​​(step S9). Furthermore, the display device 30 stores the measurement amount acquired in step S8 together with the time in the memory 34 as log data (step S10).

[0124] Thereafter, the process returns to step S8. As a result, steps S8 to S10 are repeated. In step S9, the manner in which the measured amounts are displayed can be changed as appropriate in response to the user's operation of the operation unit 35. Furthermore, it is possible to display the history of the measured amounts on the display unit 36 ​​based on the log data stored in step S10. Furthermore, it is also possible to output the log data stored in step S10 to an external information processing device via the connection port 38.

[0125] (7) Effects According to the flow sensor system 200 of this embodiment, in the flow sensor 100, which is the main sensor, the sensor head 10 calculates the flow rate of the fluid flowing in the pipe P, and the calculated flow rate is displayed on the display 30. In addition, the concentration sensor 110, which is the secondary sensor, is connected to the flow sensor 100, and receives a supply of power from the flow sensor 100, causing the concentration sensor 110 to measure the concentration of the fluid flowing in the pipe P or the fluid stored in the tank T. The measured concentration is displayed on the display 30 of the flow sensor 100, together with the flow rate.

[0126] Conventionally, concentration sensors 110 have not been given much attention as a fluid management target. With this configuration, by installing flow sensor system 200 at a manufacturing site, users can easily recognize the flow rate and concentration of the water-soluble functional fluid at the manufacturing site from the display on display 30. This makes it easy to manage the flow rate and quality of the water-soluble functional fluid at the manufacturing site.

[0127] Placing two signal lines, a power line and a communication line, for the concentration sensor 110 creates dead space in the housing. Furthermore, since the sensor is designed to measure liquid, waterproofing is necessary, but providing an interface to connect the two signal lines makes the design difficult from a waterproofing perspective. In contrast, by making the flow rate sensor 100 the primary sensor and the concentration sensor 110 the secondary sensor, using a single signal line to connect the two sensors, and receiving power from the flow rate sensor 100, it is possible to achieve both waterproofing and the ability to simultaneously grasp multiple measurement quantities.

[0128] Furthermore, by connecting the temperature sensor 120, which is a secondary sensor, to the flow rate sensor 100, power is supplied from the flow rate sensor 100, and the temperature sensor 120 measures the temperature of the fluid flowing through the pipe P or the fluid stored in the tank T. The measured temperature is further displayed on the display 30. In this case, the user can further recognize the temperature of the water-soluble functional fluid at the production site from the display on the display 30. This allows for more detailed management of the water-soluble functional fluid at the production site.

[0129] Furthermore, the calorific value of the fluid is calculated based on the flow rate measured by the flow rate sensor 100 and the temperature measured by the temperature sensor 120, and the calculated calorific value is further displayed on the display 30. In this case, the user can further recognize the calorific value of the water-soluble functional fluid at the production site from the display on the display 30. This allows for more detailed management of the water-soluble functional fluid at the production site.

[0130] Furthermore, a liquid level sensor 130, which is a secondary sensor, is connected to the flow rate sensor 100. As a result, power is supplied from the flow rate sensor 100, and the liquid level sensor 130 measures the liquid level of the fluid in the tank T. The measured liquid level is displayed on the display 30. In this case, the user can further recognize the liquid level of the water-soluble functional fluid in the tank T at the production site from the display on the display 30. This allows for more appropriate management of the water-soluble functional fluid at the production site.

[0131] Furthermore, log data indicating the above-mentioned measured quantities measured at predetermined time intervals and the times at which the measured quantities were measured is stored in the memory 34 of the flow sensor 100. In this case, when an abnormality occurs, the user can easily analyze the cause at the manufacturing site using the log data stored in the memory 34.

[0132] An operation unit 35 that is operated to set the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 is provided in the flow sensor 100. Similarly, a control unit 33 that controls the operations of the concentration sensor 110, the temperature sensor 120, and the liquid level sensor 130 is provided in the flow sensor 100. Therefore, by operating the operation unit 35 of the flow sensor 100, the user can make settings to control not only the flow sensor 100 but also the concentration sensor 110.

[0133] (8) Other embodiments In the above embodiment, the flow sensor system 200 includes the temperature sensor 120 and the liquid level sensor 130, but the embodiment is not limited to this. The flow sensor system 200 may not include one or both of the temperature sensor 120 and the liquid level sensor 130.

[0134] Furthermore, in the above embodiment, the flow rate is measured by a method using ultrasonic waves, such as a transit time method or a Doppler method, but the embodiment is not limited to this. The flow rate may be measured by other methods that do not use ultrasonic waves. For example, in an electromagnetic method, the electromotive force of the fluid is measured, and the flow rate of the fluid flowing through the pipe P is calculated based on the measured electromotive force. In addition, in a vortex method, Karman vortices generated by the flow of the fluid are measured, and the flow rate of the fluid flowing through the pipe P is calculated based on the measured Karman vortices.

[0135] (9) Correspondence between each component of the claims and each part of the embodiment Below, examples of correspondence between each component of the claims and each part of the embodiments will be described, but the present invention is not limited to the following examples. Various other elements having the configuration or function described in the claims can also be used as each component of the claims.

[0136] In the above embodiments, the piping P is an example of a piping, the flow sensor system 200 is an example of a flow sensor system, the sensor head 10 is an example of a sensor head, the display 30 is an example of a display, the flow sensor 100 is an example of a flow sensor, the tank T is an example of a tank, the concentration sensor 110 is an example of a concentration sensor, the memory 34 is an example of a memory, the operation unit 35 is an example of an operation unit, the control unit 33 is an example of a control unit, the indicator light 18 or the indicator light 37 is an example of an indicator light, the temperature sensor 120 is an example of a temperature sensor, and the liquid level sensor 130 is an example of a liquid level sensor. [Explanation of symbols]

[0137] 10...sensor head, 11, 31...housing section, 11A, 12B, 13, 33...control section, 11B...prism, 11C...LED board, 11D...CMOS board, 11E...monitor PD, 11F, 12G, 18, 37...indicator light, 11G, 19...temperature measurement section, 11H, 12H, 34...memory, 11I, 12I, 40a...communication section, 11J, 12J, 41...power supply section, 11K, 12K...ID memory section, 12A...resistance thermometer, 12a, 32a, 39a...IF section, 12C... Constant current source, 12D... temperature conversion unit, 12E, 35a... input unit, 12F, 36... display unit, 38a... general-purpose IF unit, 12, 32... connector, 14, 14A, 14B... wedge material, 14a, 14b... element coupling surface, 15, 15A, 15B... ultrasonic element, 16... acoustic couplant, 17... ultrasonic shielding plate, 20... clamp unit, 21... upper clamp member, 22... lower clamp member, 23... clamp fixing screw, 30... display, 35... operation unit, 38 to 40... connection port, 42... Setting memory unit, 100...flow rate sensor, 101...sensor fixing screw, 110...concentration sensor, 120...temperature sensor, 121...head unit, 122...relay amplifier, 130...liquid level sensor, 200...flow rate sensor system, 201...branch connector, 210...commercial power supply, 220...control device, CA...cable, P...piping, T...tank

Claims

1. A flow rate sensor system for measuring a flow rate of a fluid flowing through a pipe, a flow rate sensor including a sensor head that calculates the flow rate of the fluid, and a display that is connected to the sensor head and receives power from an external source; a concentration sensor that is detachable from the flow rate sensor and is detachable from the pipe or a tank that stores the fluid, and receives power from the flow rate sensor to measure the concentration of the fluid; The display displays the concentration measured by the concentration sensor together with the flow rate calculated by the sensor head.

2. 2. The flow sensor system of claim 1, wherein the display has an operation unit for accepting input from a user, and is capable of switching between an individual display screen for flow rate and concentration, a list display screen, a graph display screen, and a time series display screen based on input from the user to the operation unit.

3. 3. The flow sensor system according to claim 1, wherein the flow sensor further includes a memory for storing log data indicating flow rates and concentrations measured at predetermined time intervals and the times at which the flow rates and concentrations were measured.

4. The flow rate sensor an operation unit that is operated to set the sensor head; a control unit that controls the operation of the sensor head based on settings from the operation unit, the operation unit is operated to further set the concentration sensor; 4. The flow sensor system according to claim 1, wherein the control unit further controls the operation of the concentration sensor based on settings from the operation unit.

5. 5. The flow sensor system according to claim 4, wherein the threshold value setting for the amount measured by the flow sensor or the concentration sensor can be changed by input from the operation unit.

6. The setting of the unit of the amount measured by the flow rate sensor or the concentration sensor can be changed by inputting through the operation unit, 6. The flow sensor system according to claim 4, wherein the display displays the measured amount by the flow sensor or the concentration sensor in a set unit.

7. The flow sensor system according to any one of claims 4 to 6, wherein at least one of dirt detection by a concentration meter and dry water detection can be set by inputting through the operation unit.

8. At least one of the display and the sensor head is provided with an indicator light, and the lighting state of the indicator light is controlled based on the result determined by the display or the sensor head. A flow sensor system as described in any one of claims 1 to 7.

9. a temperature sensor that is detachable from the flow rate sensor and from the pipe or the tank, and receives power from the flow rate sensor to measure the temperature of the fluid; 9. The flow sensor system according to claim 1, wherein the display further displays a temperature measured by the temperature sensor.

10. 10. The flow sensor system according to claim 9, wherein the display further displays the calorific value of the fluid based on the flow rate calculated by the sensor head and the temperature measured by the temperature sensor.

11. a liquid level sensor that is detachable from the flow rate sensor and from the tank, and receives power from the flow rate sensor to measure the liquid level of the fluid in the tank; 11. The flow sensor system according to claim 1, wherein the indicator further displays the liquid level measured by the liquid level sensor.

12. the concentration sensor stores identification information; A flow sensor system as described in any one of claims 1 to 11, wherein when the flow sensor is connected to the concentration sensor, the flow sensor acquires the identification information, identifies the concentration sensor according to the acquired identification information, and supplies power to the concentration sensor according to having identified the concentration sensor.

13. The flow sensor system according to claim 12 , wherein the display stores setting information corresponding to the identification information of the concentration sensor, and transmits the setting to the concentration sensor when the identification information is acquired.

14. The settings received by the flow sensor include initial settings required for measurement and detailed settings required to improve measurement accuracy, The flow sensor system according to any one of claims 1 to 13, wherein, when the flow sensor is started up, the display on the display prompts a user to perform the initial setting.

15. The flow sensor system according to claim 14 , wherein the initial setting items include information about the diameter of the pipe or information about the material of the pipe.

16. 16. The flow sensor system according to claim 14, wherein the detailed settings are accepted on a setting screen displayed on the display device that is located at a deeper level than the initial setting screen.

17. A flow sensor system as described in any one of claims 14 to 16, wherein the settings necessary to improve measurement accuracy are accepted from a setting screen displayed on the display as setting items for experts.

18. 18. The flow sensor system according to claim 17, wherein the setting items for the expert include changing a threshold value for detecting an error in concentration.

19. 19. The flow sensor system according to claim 17, wherein the setting items for experts include changing bubble detection or flow measurement principle.

20. A flow sensor system as described in any one of claims 1 to 19, wherein the screen content displayed during normal operation when measuring the flow rate or concentration of a fluid can be switched between a graphical display and a numerical display of the current value.

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