Spring force mechanism and method of making same

Abstract

To provide a miniaturized spring force applying mechanism.SOLUTION: The spring force applying mechanism 100 includes a platform 2, a first inclination mechanism 3A, and a second inclination mechanism 3B. The first inclination mechanism 3A and the second inclination mechanism 3B are provided on the support surface 1 and are aligned in the lateral direction. The first tilting mechanism 3A and the second tilting mechanism 3B support the platform 2 from below at a first intersection 35 and a second intersection 36. An elastic body 43 is provided between a first connection part provided on the first arm 41 and a second connection part provided on the second arm 42. When a load is applied to the platform 2, an elastic force is generated by expansion and contraction of the elastic body 43 in a state in which the first differential angle α 1 and the second differential angle α 2 are maintained.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a spring force application mechanism that achieves quasi-zero stiffness. [Background technology]

[0002] For example, Quasi Zero Stiffness, a vibration isolation technology that reduces the natural frequency to the utmost, is attracting attention. Laser interferometers used in gravitational wave observations are required to eliminate ground vibrations to the utmost extent, and Quasi Zero Stiffness technology is widely used. However, most of these technologies are difficult to adjust and have an extremely narrow range of use, so they are not yet available for general use.

[0003] Conventionally, the natural frequency has been lowered by using the state just before buckling of spring materials with nonlinear characteristics.

[0004] However, in reality, it is difficult to maintain stability due to the addition of external disturbances or unexpected amplitudes, so some kind of control has been added, and what is originally an inexpensive passive technology has become an expensive technology.

[0005] More specifically, to achieve sufficient vibration isolation performance, the spring constant of the elastic spring needs to be small, making it a so-called soft spring. However, if such a soft spring is used to support the mounting base on the foundation, the spring deflection will also be large. Furthermore, in order to maintain the function of the device, the mounting base must be spaced a certain distance from the foundation, so if a soft spring is used in the direction of isolation, it is necessary to use a long and large spring in that direction to account for the spring deflection. For this reason, realizing a vertical isolation mechanism would result in an isolating device that is large, especially in the height direction.

[0006] On the other hand, the space between the foundation and the object to be isolated from vibration is often limited, and even if the isolation device has the vertical isolation performance described above, it may be difficult to introduce it in a large isolation device, making it impractical.

[0007] To avoid the increase in size of such isolating devices, Patent Document 1 below proposes using a lever to magnify the displacement of the spring body several times relative to the vertical displacement of the mounting base, thereby reducing the height of the spring body while using a soft spring. However, in this isolating device, the extension direction of the spring body is set vertically, so even if such a lever is used, the height of the spring body that can be used is limited at most to the gap dimension in the acting direction between the foundation and the mounting base, and the natural frequency of the entire system is about 1 Hz. Therefore, while an isolating device configured as in Patent Document 1 is somewhat effective in preventing the device from becoming larger, it is insufficient in terms of the essential effect of isolating vibration.

[0008] The following Patent Document 2 attempts to solve this problem. As described in Patent Document 1, only lever-type structures were known that use springs that expand and contract in the vertical direction. However, by arranging the springs at an angle and adding a differential angle so that the point of application of the spring force is at an angle different from the support angle of the link and rotates synchronously with the link, it is possible to change the support characteristics of the structure from positive to negative. The links are configured to form a parallelogram, so the supported object is maintained in equilibrium with the foundation. A crank with a fixed differential angle is arranged, sharing the rotational pair element at one end of the pair link. One end of the spring that exerts the support force is attached to the movable end, and the other end (the other end) is fixed to a reference point on the foundation. This mechanism makes it possible to achieve a vertical natural period of 4 to 5 seconds, which was previously unrealizable. However, one end of the spring must be fixed to the foundation, and it is difficult to make the length of the crank arm longer than the length of the link, which means that a large spring force must be prepared to support the load. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-140981 [Patent Document 2] Japanese Patent Application Laid-Open No. 2015-10612 Summary of the Invention [Problem to be solved by the invention]

[0010] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a spring force application mechanism and a manufacturing method thereof that can achieve a sufficiently low natural frequency, for example, even for vibrations in the direction of movement between the support surface and the platform, thereby increasing the vibration isolation effect, and that can be made small enough to be easily introduced even when the space between the support surface and the platform is limited, and that can reduce the required spring force and the number of spring bodies, etc., thereby reducing costs.

[0011] In other words, there is room for miniaturization of the seismic isolation device described in Patent Document 1 and the vibration suppression device described in Patent Document 2. The present invention has been made to solve the above problems, and has an object to provide a miniaturized spring force application mechanism and a manufacturing method thereof. [Means for solving the problem]

[0012] The problem is solved by using a spring loading mechanism that applies a horizontal spring force to the tilt mechanism by connecting the supports with a spring, and by using the lever action of the tilt mechanism to apply a spring force in the direction of the motion axis of the platform and the support surface.

[0013] Here, it can be thought of as a virtual arm attached to a hinge at the fulcrum of the spring of the tilting member. This concept includes the possibility that the arm and the tilting member move together as a unit, or that the arm may be a separate part connected to the tilting member so as to transmit force when the arm rotates.

[0014] In this structure, when the distance between the support surface and the platform surface changes, the inclined members on the same plane rotate in inverse synchronization, and the arms connected to each hinge also rotate in inverse synchronization while maintaining the differential angle. The relative displacement of the fulcrums of the opposing arms caused by the rotation of the arms can cause the elastic body (spring body) to expand and contract in the horizontal direction, i.e., perpendicular to the axis of motion. Furthermore, the force generated by the horizontal expansion and contraction of the elastic body acts in a direction that opposes the rotation of the inclined members, and becomes stronger as the angle of the inclined members changes, so that the platform always returns to its equilibrium position.

[0015] In other words, in the present invention, the horizontal force generated by the elastic body is passed through the first and second inclined members to generate a spring force that supports the platform from the support surface. Unlike Patent Document 2, in which one end of the spring is connected to the support surface, this invention can generate twice the support force in the direction of the movement axis, and the displacement of the spring body relative to the displacement in the direction of the movement axis is also doubled. Of course, as in Patent Document 2, the spring constant in the direction of the axis of motion can be made a positive value with a small absolute value by changing the way the differential angle is given.

[0016] The present invention differs from the conventional cantilever spring mechanism of Patent Document 2 in that a positive spring constant can be obtained in the direction of the axis of motion with a smaller spring body. The reason for this will now be qualitatively explained.

[0017] The support force generated in the direction of the axis of motion is due to the magnitude of the horizontal force generated by the expansion and contraction of the elastic body in the second direction and the transmission of torque due to the distance to the center of rotation. However, this torque transmission is affected by the magnitude of the differential angle. More specifically, if the differential angle is zero, the inclined member and the spring fulcrum move in exactly the same way. As the angle becomes smaller, the spring torque generated by the elastic member also becomes smaller, reducing the component acting as support force in the direction of the axis of motion, resulting in a large negative spring. On the other hand, if the differential angle of the spring fulcrum is set to 60 degrees or more, the spring torque acts in an increasing direction, resulting in a positive spring. Therefore, by selecting a differential angle such that the increase or decrease in the transmission force due to the rotation of the inclined member is equal to the increase or decrease in the spring torque due to the rotation of the spring fulcrum, it is possible to achieve extremely small spring characteristics (quasi-zero stiffness) in which the support force hardly changes with link movement.

[0018] The magnitude of the supporting force at this time is determined by the spring torque and transmission rate at the platform's reference position. Conventionally, the spring torque at this time would be the spring force (spring constant x fulcrum displacement) with one side fixed to the foundation multiplied by the arm length, but in this application, both ends of the spring become the supporting force of the pair of opposing tilt mechanisms, so the object can be held in place with a spring that is half the size of a conventional spring.

[0019] The length of the arm is limited by the range of motion of the device, and is therefore shorter than the length of the tilting material. This causes the spring force to be compressed by the lever, but this allows for a spring characteristic that is close to linear.

[0020] In other words, the object is supported in the direction of the axis of motion with a spring that is smaller than conventional springs that expand and contract in a direction perpendicular to the axis of motion, eliminating the need to provide a separate spring that expands and contracts in the direction of the axis of motion.The distance between the base and the mounting base in the direction of the axis of motion can be made small, and the natural period in the direction of the axis of motion can be set to be longer than, for example, 3 seconds, which is sufficient to provide vibration isolation characteristics.

[0021] For these reasons, the spring loading mechanism of the present invention can be configured to have sufficient vibration isolation characteristics in the direction of the movement axis, while still providing sufficient seismic isolation performance even in earthquakes with large vibration components in the direction of the movement axis, and can be made small with a small number of parts, making it easy to introduce even in cases where the distance between the support surface and the platform is limited or where introduction costs are not high. The relationship between the support surface and the platform is not limited to the vertical direction, but the axis of movement may be set horizontally or at an angle.

[0022] In addition, while the inclined member in the above configuration was a single-joint member, it may be folded back on the same plane to form a second inclined member, with both ends fixed in parallel positions to the support surface and platform, and hinges provided at the folding points to form a three-joint inclined member that can expand and contract in the direction of the motion axis. By doing so, it is possible to create a spring loading mechanism with both ends of the inclined member fixed in position, and to configure a device without a slide mechanism.

[0023] So far, we have explained an example of a first inclined member and a second inclined member facing each other, with the axis of symmetry being a virtual line segment in the direction of the axis of motion, but it is also possible to add a third inclined member to create a star shape with rotational symmetry of 120 degrees, and arrange the springs in a triangle shape. There is no limit to the number of inclined members as long as the balance of the support force is maintained with respect to the axis of symmetry. Of course, the above devices may be arranged in a triangle or diamond shape to form a spring force applying mechanism. In this arrangement, no parallel holding mechanism is required.

[0024] The elastic element (spring body) that generates the spring force can be a tension spring or a compression spring using a coil spring, but since the effect of the supporting force of the inclined material changes depending on the direction of the spring force, a V-shaped arrangement is used in the case of a tension spring, while a V-shaped arrangement is used in the case of a compression spring. In the case of claim 3, the tension spring is <> and the compression spring is ><.

[0025] The springs used in this application can be of any type as long as they are elastic elements, and can be pneumatic cylinders other than coil springs or disc springs, or artificial muscle-like rubber actuators, or hydraulic cylinders with accumulators, or a mixture of these.

[0026] [Configuration 7] A spring force applying mechanism according to Configuration 7 of the present invention includes a platform, a first tilting mechanism, and a second tilting mechanism. The platform is spaced apart from a support surface and is movable relative to the support surface. The first tilting mechanism and the second tilting mechanism are provided on the support surface and aligned laterally. The first tilting mechanism includes a first tilting member and a first arm. The first arm is connected to the first tilting member at a first intersection at a first differential angle. The second tilting mechanism includes a second tilting member and a second arm. The second arm is connected to the second tilting member at a second intersection at a second differential angle. The first tilting mechanism and the second tilting mechanism support the platform from below at the first intersection and the second intersection. An elastic body is provided between a first connection portion provided on the first arm and a second connection portion provided on the second arm. When a load is applied to the platform, an elastic force is generated by expansion and contraction of the elastic body while the first differential angle and the second differential angle are maintained.

[0027] [Configuration 8] In the spring force applying mechanism according to configuration 7, the first differential angle and the second differential angle are substantially the same angle.

[0028] [Configuration 9] In the spring force application mechanism described in Configuration 7 or 8, when the ratio is 1.0 when the load steadily applied to the platform and the elastic force of the elastic body are balanced and in a state of equilibrium, and when the ratio is 1.0, the downward displacement in the vertical direction is 0, and when another load is applied in addition to the steadily applied load, the downward displacement in the vertical direction is -200 mm, and when the downward displacement in the vertical direction fluctuates from more than 0 mm to -200 mm, the ratio increases in the range of more than 1.0 to 1.05 or less.

[0029] [Configuration 10] In the spring force applying mechanism according to any one of Configurations 7 to 9, the first tilting mechanism includes a first support portion. The first support portion is movable on a support surface. The first tilting member is supported by the first support portion. The second tilting mechanism includes a second support portion. The second support portion is movable on the support surface. The second tilting member is supported by the first support portion.

[0030] [Configuration 11] In the spring force applying mechanism according to any one of Configurations 7 to 9, the first tilting mechanism includes a third support portion, a third inclined member, and a third intersection. The third support portion is fixed to the support surface. The third inclined member is connected to the third support portion and is rotatable about the third support portion. The third intersection connects the first inclined member and the third inclined member in a bending manner. The second tilting mechanism includes a fourth support portion, a fourth inclined member, and a fourth intersection. The fourth support portion is fixed to the support surface. The fourth inclined member is connected to the fourth support portion and is rotatable about the fourth support portion. The fourth intersection connects the second inclined member and the fourth inclined member in a bending manner.

[0031] [Configuration 12] In the spring force application mechanism according to any one of Configurations 7 to 11, in one embodiment of the present invention, the first tilt mechanism and the second tilt mechanism constitute a part of a plurality of tilt mechanisms, each of which is arranged radially around a virtual point as viewed from the vertical direction.

[0032] [Configuration 13] The spring force applying mechanism according to any one of Configurations 7 to 12, further comprising a plurality of supports connected to the platform for maintaining the platform's orientation in the lateral direction.

[0033] [Configuration 14] In the spring force applying mechanism according to any one of Configurations 7 to 13, two first tilting mechanisms are connected to each other and arranged side by side in the horizontal direction, and two second tilting mechanisms are connected to each other and arranged side by side in the horizontal direction.

[0034] [Configuration 15] In the spring force applying mechanism according to any one of configurations 7 to 14, the elastic body is an actuator whose elastic force can be changed and controlled.

[0035] [Configuration 16] In the method for manufacturing a spring force applying mechanism according to Configuration 16 of the present invention, the spring force applying mechanism includes a platform, a first tilting mechanism, and a second tilting mechanism. The platform is spaced apart from a support surface and is movable relative to the support surface. The first tilting mechanism and the second tilting mechanism are arranged on the support surface and are aligned laterally. The first tilting mechanism includes a first tilting member and a first arm. The first arm is connected to the first tilting member at a first intersection at a first differential angle. The second tilting mechanism includes a second tilting member and a second arm. The second arm is connected to the second tilting member at a second intersection at a second differential angle. The first tilting mechanism and the second tilting mechanism support the platform from below at the first intersection and the second intersection. An elastic body is provided between a first connection portion provided on the first arm and a second connection portion provided on the second arm. When a load is applied to the platform, an elastic force is generated by expansion and contraction of the elastic body while the first differential angle and the second differential angle are maintained. In the manufacturing method of the spring force application mechanism, the ratio is set to 1.0 when the load steadily applied to the platform and the elastic force of the elastic body are balanced to reach an equilibrium state, and when the ratio is 1.0, the downward displacement in the vertical direction is 0, and when a different load is applied in addition to the steadily applied load, the downward displacement in the vertical direction is -200 mm, and the angles of the first differential angle and the second differential angle and the reaction force of the elastic body are set so that the ratio when the downward displacement in the vertical direction exceeds 0 mm and fluctuates to -200 mm is in the range of 1.0 to 1.05.

[0036] [Configuration 17] In the method for manufacturing a spring force applying mechanism according to Configuration 16, the first differential angle and the second differential angle are set to be approximately the same angle. [Effects of the Invention]

[0037] As described above, according to the spring force application mechanism and manufacturing method of the present invention, the rotational movement of the inclined member acts as a lever to increase the horizontal expansion and contraction of the elastic body, thereby enabling the support characteristics of the mounting base in the direction of the motion axis to be expressed by a positive spring constant with a small absolute value. Therefore, since the platform can be supported only by the inclined member and the arm, there is no need to provide a separate spring body extending in the direction of the motion axis, and the distance between the support surface and the platform can be configured to be small in the direction of the motion axis.

[0038] Furthermore, according to the present invention, it is possible to provide a miniaturized spring force applying mechanism and a method for manufacturing the same. [Brief explanation of the drawings]

[0039] [Figure 1] 1 is a schematic diagram showing a vibration isolating device using a spring force applying mechanism according to a first embodiment of the present invention. [Figure 2] 4 is a graph showing the relationship of normalized load characteristics at differential angles of 0 degrees, 60 degrees, and 120 degrees in the spring force applying mechanism of the first embodiment. [Figure 3] 10 is a schematic diagram showing a modified example of the vibration isolating device using the spring force applying mechanism according to the first embodiment, in which a compression spring is used. FIG. [Figure 4] FIG. 10 is a schematic diagram showing a vibration isolating device using a spring force applying mechanism according to a second embodiment of the present invention. [Figure 5A] FIG. 10 is a schematic front view showing a vibration isolating device using a spring force applying mechanism according to a third embodiment of the present invention. [Figure 5B] FIG. 10 is a schematic top view showing a vibration isolating device using a spring force applying mechanism according to a third embodiment of the present invention. [Figure 6] FIG. 10 is a schematic diagram showing a vibration isolating device using a spring force applying mechanism according to a fourth embodiment of the present invention. [Figure 7] FIG. 10 is a schematic diagram showing a vibration isolating device using a spring force applying mechanism according to a fifth embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0040] <Description of the Configuration of the First Embodiment> A vibration suppression device according to a first embodiment of the present invention will be described with reference to FIGS.

[0041] The spring force applying mechanism of the first embodiment is a spring force applying mechanism 100 used to effectively isolate, for example, minute to large vibration components in the vertical direction. This spring force applying mechanism 100 is configured between a support surface 1 such as a floor or the ground, and a platform 2 that is provided at a predetermined distance from the support surface 1 in the vertical direction (motion axis direction) and on which a precision machine is mounted.

[0042] 1, the spring force applying mechanism 100 is composed of a tilting mechanism 3 that maintains the platform 2 at a predetermined height relative to the support surface 1, a spring mechanism 4 that applies a supporting force to the tilting mechanism 3 to support the platform 2 relative to the support surface 1, and a guide that maintains the vertical movement of the platform 2 parallel. Furthermore, as is clear from FIG. 1, no spring or the like extending vertically is provided to connect the support surface 1 serving as the base and the platform 2, and the platform 2 is supported only by the supporting force of the tilting mechanism 3. In the following description, a state in which the platform 2 is not vibrating and is substantially stationary at a reference position vertically spaced from the support surface 1 will be referred to as an equilibrium state.

[0043] First, we will explain the tilting mechanism 3. The tilting mechanism 3 is configured to be expandable and contractible in the vertical direction, and hinges 35 and 36 are fixed to the platform 2 to change the angle of the tilting members 31 and 32, thereby changing the distance between the mounting base and the foundation. In addition, tilting members are arranged in opposite directions at a certain distance apart, with an imaginary line segment V drawn in the direction of the motion axis as the axis of symmetry. However, since these two pairs of tilting mechanisms 3 cannot maintain the parallelism between the base and the mounting table, linear guides 51 and 52 are added to the four corners as shown in Figure 1 to prevent tilting. However, the parallelism maintaining mechanism is not limited to this.

[0044] The inclined member 31 has one end rotatably attached to the platform 2 and the other end rotatably attached to the support surface 1 by a hinged slider 44 and a hinge 35, and is inclined so as to form a predetermined inclination angle θ0+θ with respect to an imaginary line H extending in the horizontal direction (the horizontal direction perpendicular to the direction of movement). Here, θ0 is the angle in the equilibrium state, and θ is the angle of variation from the equilibrium state.

[0045] The inclined member 32 is also rotatably attached at one end to the support surface 1 side and at the other end to the platform 2 side by a hinged slider 45 and a hinge 36, and is arranged so that it forms the same inclination angle θ0+θ as the inclined member 31, inverted from the virtual straight line H.

[0046] Next, we will explain the spring mechanism 4. The spring mechanism 4 is configured to expand and contract an elastic body that is installed so that its main expansion direction is the horizontal direction, and to transmit the force generated by this expansion and contraction to the inclined member 3.

[0047] That is, the spring mechanism 4 is composed of a crank arm 41 provided so as to form a predetermined differential angle α with respect to the tilting member 31 on the imaginary plane on which the tilting mechanism 3 is configured, and a crank arm 42 provided so as to form an inverted differential angle α with respect to the oppositely facing link 36, and a spring body 43 which is an elastic body provided to connect between the crank arms 41, 42 and to expand and contract mainly in the horizontal direction by the rotational movement of the crank arms 41, 42. The spring body 43 is attached in a pre-elongated state so as to function as a tension spring, and balances the load with the horizontal axial force P.

[0048] The crank arms 41, 42 have their base ends connected to the hinges 35, 36 and the platform 2, but the same effect can be achieved by turning them upside down around hinged sliders 44, 45 provided on the support surface 1 side as the center of rotation and rotatably maintaining the differential angle α formed with the inclined members 32, 31.

[0049] The spring body 43 is connected to the tip of the arm at a distance d from the imaginary line H, and the pretension F of the spring in the equilibrium state is k is F k This generates a torque of ×d and balances with the load P through the arm.

[0050] <Explanation of Operation of First Embodiment> The operation of the spring force applying mechanism 100 configured in this manner will be described with reference to FIG.

[0051] 1 approaches the support surface 1 and the distance therebetween decreases, the inclined members 31, 32 and the crank arms 41, 42 rotate in a direction that decreases the inclination angle θ0 while maintaining the differential angle α. At this time, the spring body 43 stretches, generating a pulling force in a direction that increases the inclination angle θ0 as it tries to return to its original position. Therefore, a moment that returns the position is generated at the rotation center of the crank arms 41, 42, and a force that returns the distance between the support surface 1 and the platform 2, which are connected to the hinge and the hinged slider, is applied.

[0052] Therefore, when the arm moves up or down from the equilibrium state, the spring 43 expands or contracts horizontally in accordance with the rotation of the arm, exerting a force in the direction of the axis of movement to return the arm to the equilibrium state. Also, the movement of the inclined member at this time is such that the hinged sliders 44 and 45 slide horizontally, but the position of the paired elements fixed to the platform 2 does not change.

[0053] The inclined members 31 and 32 each function as a single-joint link with a link length la, and their relationship with the length lb of the crank arms 41 and 42 forms a kind of lever mechanism. That is, the spring force Fk input to the tip of the crank arms 41 and 42 is balanced with the load P as described above. At this time, the crank arms 41 and 42 are set so that the arm length lb is shorter than la of the inclined members 31 and 32, and therefore the spring force is transmitted from the balance of torque to the transmission rate β(θ0)=lb·sin(θ0+α) / (la·cosθ0)=d / (la·cosθ0) It is transmitted in a reduced form as follows.

[0054] At this time, the load P is P=2β(θ0)·Fk This relationship indicates that the action of the spring body is doubled compared to the conventional technique in Patent Document 2, as described above.

[0055] <Explanation of Effects of First Embodiment> Next, Figure 2 shows the results of calculations using the model shown in Figure 1 to determine the relationship between the vertical displacement of the platform 2, which represents the vertical spring characteristic of the spring force application mechanism 100 configured as described above, and the vertical load on the spring force application mechanism 100. The horizontal axis in Figure 2 represents the vertical displacement of the device in mm. A vertical displacement of 0 represents an equilibrium state in which the weight of the platform 2 and the supporting force via the inclined plane 3 are balanced, with a vertically upward direction being positive. Figure 2 shows that when the differential angle α is 60 degrees or less, the system exhibits a negative spring characteristic, in which the load decreases as the height is lowered. Furthermore, when the differential angle α is 60 degrees or more, the system exhibits a positive spring characteristic, and increasing the angle increases the inclination. A positive spring characteristic indicates that the spring load increases as the spring is pushed in, while a negative spring characteristic indicates that the spring load decreases. A differential angle of 0 degrees exhibits a negative spring characteristic. At 60 degrees, the natural frequency is a small value of 0.26 Hz, achieving quasi-zero stiffness. The soft spring characteristic, the goal of this invention, is achieved with a large stroke. The vertical axis is the normalized support load, with the natural load being 1.

[0056] As shown in the graph in Figure 2, the load characteristics of the device can be made to have either positive or negative spring characteristics by changing the differential angle α. The load at the equilibrium point is normalized to 1. If the deflection of the spring in the equilibrium state is δ(θ0) and the fluctuating deflection is δ(θ), the support load is given by the following formula (1), and the normalized support load normalized by the equilibrium support load 2kβ(θ0)δ(θ0) is given by the following formula (2). Note that in the formula, θα = θ0 + α.

number

[0057] As shown in the graph of Figure 2, if the differential angle α in the spring force application mechanism 100 of the first embodiment is approximately 60 degrees or more, a positive spring characteristic can be obtained using only the inclined material 3 and the spring mechanism 4, without using a spring body that expands and contracts in the vertical direction. To summarize the above, the transmissibility β can be adjusted by the ratio of the lengths of the arms and the inclined members, the proportion of the force generated by the spring that acts in the vertical direction can be adjusted, and the differential angle α can determine whether the vertical spring characteristic of the device itself exhibits negative or positive spring characteristics. Furthermore, once the spring deflection δ is determined, the normalized load is given by β(θ) × δ(θ) from the above equation (2), so by adjusting at least these three parameters, the spring force application mechanism 100 of the first embodiment can adjust the vertical support characteristics to be most favorable as vibration isolation characteristics.

[0058] Thus, according to the spring force application mechanism 100 of the first embodiment, the spring mechanism 4 expands and contracts the horizontally arranged spring body 42 using the crank arm 41 which rotates in synchronization with the first inclined member 31 while maintaining the differential angle α in response to the vertical displacement of the platform 2. Therefore, the vertical support characteristics of the platform 2 provided by the tilting mechanism 3 can be made equivalent to that of a soft vertical spring required for vertical vibration isolation performance, and the support characteristics can be made to have a positive spring constant.

[0059] Therefore, while obtaining ideal vertical vibration isolation characteristics, the spring force applying mechanism 100 can be configured with only the tilting mechanism 3 and the spring mechanism 4, without providing a separate vertical spring connecting the support surface 1 and the platform 2. In other words, since there is no need to secure space to allow for a large amount of spring deflection in the vertical direction, the vertical size of the spring force applying mechanism 100 can be configured to be compact. For this reason, the spring force applying mechanism 100 of the first embodiment can be easily introduced even in applications where the separation distance between the support surface 1 and the platform 2 is limited to a small distance.

[0060] Furthermore, since the platform 2 can be supported by the tilting mechanism 3 by providing only the spring body 43 extending horizontally, the configuration is simplified and the number of parts can be reduced compared to conventional mechanisms in which spring bodies are provided in both the vertical and horizontal directions, making it easier to keep the manufacturing costs and price of the spring force application mechanism 100 low. Furthermore, although the explanation so far has been based on the assumption that a tension spring is used, when a compression spring is used, the same effect can be obtained by arranging the tilt mechanism 3 and the spring mechanism 4 so that they intersect at the vertical axis V, as shown in Figure 3. Also, in the example of Figure 3, the base points of the crank arms 41 and 42 are on the platform 2, but they may be reversed upside down with respect to the support surface 1.

[0061] <Description of the Configuration of the Second Embodiment> Next, a spring force applying mechanism 100 according to a second embodiment of the present invention will be described with reference to Fig. 4. Note that the same reference numerals will be used for members corresponding to those that appeared in the description of the first embodiment (the same applies hereinafter). In addition, in FIG. 4, a diagram simulating a linear guide is drawn as the horizontal holding mechanism, but there are various alternative methods for this horizontal holding mechanism, although they are not shown. The hinges 33 and 34 on the support surface side have a structure in which the rotational pair includes a translatory pair. The translatory pair can take various forms, such as a linear guide or a bearing. To reduce friction, it is also possible to use something like an air-floating slider. Of course, it is also possible to place the hinges 35 and 36 on the support surface 1 side, in which case the pair elements of the hinges 33 and 34 must be located on the platform 2 side and have a mechanism for sliding in the second direction on the underside of the mounting base.

[0062] The vibration isolator 100 of the second embodiment differs from the spring force application mechanism 100 of the first embodiment in that the tilt mechanism 3 is formed as a pair link. Therefore, it is not necessary to slide one side of the tilt member horizontally to expand and contract in the direction of the movement axis.

[0063] More specifically, as shown in Figure 4, if the base ends of the crank arms 41 and 42 are fixed to the platform 2 with hinges 35 and 36, which are rotational pairs, the inclined member is inverted within the same plane on the slide surface and folded back to form a second inclined member, and the joint on the slide surface is hinged, and the inverted platform 2 serves as the support surface and the second inclined member is hinged, forming a three-joint inclined member, and as in the first embodiment above, a force can be applied in the vertical direction by arranging a spring body 43 that connects the first tilt mechanism and the inverted second tilt mechanism to each other.

[0064] <Explanation of Effects of Second Embodiment> If the ratio of the length of the crank arms 41, 42 to the inclined material is set to the same as in the first embodiment, the transmission rate of the spring force will not change, so if the length of the single-joint link of the three-joint inclined material is set to la / 2, the same mechanical effect as in the first embodiment can be obtained.

[0065] Furthermore, a parallelism-maintaining mechanism is required, just as in the first embodiment, but here air spring support devices with a level-maintaining function are placed at the four corners of the platform. This allows the platform to move up and down while maintaining parallelism with the support surface, and the spring force application mechanism acts. In this case, if the differential angle of the force application mechanism is set to 60 degrees or less to give it negative spring characteristics, it acts to weaken the stiffness of the air spring, allowing it to have a lower natural frequency than the air spring's original natural frequency. In other words, it is possible to utilize the support force of the air spring while eliminating its spring stiffness, and to create a high-performance Quasi Zero Stiffness vibration isolation system with ideal vibration isolation characteristics in the vertical direction.

[0066] <Description of the configuration of the third embodiment> Next, a spring force applying mechanism 100 of a third embodiment will be described with reference to Figures 5A and 5B. The spring force applying mechanism 100 of the third embodiment is a modification of the first embodiment, and constitutes a vibration suppression device in which three three-joint tilt mechanisms formed by the tilting members 31, 32 and the crank arms 41, 42 are arranged axially symmetrically at 120 degrees with respect to the virtual line segment V in the first direction, and the outer peripheries of the paired elements at the tip ends of adjacent crank mechanisms are connected by elastic elements so that they are equidistant from the virtual line segment V, thereby applying a supporting force in the first direction. 5A and 5B show an example in which three three-joint tilt mechanisms are used and tension springs are used. Of course, a configuration using four three-joint tilt mechanisms and four spring bodies 43, arranged axially symmetrically at 90-degree intervals, may also be used, and there is no limit to the number as long as they are axially symmetric. Also, although FIGS. 5A and 5B show a case in which tension springs are used, compression springs may also be used, or the three-joint tilt mechanism of the second embodiment may also be used.

[0067] Furthermore, if such an arrangement is adopted, a parallel holding mechanism is not required. If the link-crank mechanism is one body, it has degrees of freedom in the first and second directions, but if three bodies are arranged axially symmetrically as in the third embodiment, the second direction of each is restricted and the device only has degrees of freedom in the first direction. In this case, each rotation pair element is subjected to shearing force, which can cause strength problems, so in some cases it is sufficient to increase the length of the pair element and the width of the link.

[0068] The spring body 43 is attached in a state where it is stretched in advance so that it acts as a tension spring. In this case, two springs act on one crank arm at an angle of 30 degrees. If the spring force of one body is Fk, the axial force P in the first direction is

number

[0069] <Explanation of Effects of the Third Embodiment> Although the action of the spring force is slightly different in this way, the relationship between the differential angle α and the transmissibility β remains unchanged, and the vibration isolator 100 of the third embodiment can achieve the same effects as the first and second embodiments.

[0070] Other embodiments (fourth and fifth embodiments) of the parallel holding mechanism will be described below.

[0071] Figure 6 shows a fourth embodiment in which the spring body 43, which is arranged parallel to the support surface 1, is replaced with an actuator whose spring force can be variably controlled. The hinge and slider are spring force applying mechanisms configured on the same plane, and are arranged in two parallel pairs to balance gravity and keep the platform parallel. In this case, by using air-levitation sliders, horizontal and vertical vibration isolation can be achieved simultaneously in three dimensions. By injecting compressed air into the slider, an air-levitation slider forms a pressure vessel inside the slider, allowing it to support the load while floating slightly and gliding along the support surface.

[0072] In the first and second embodiments, a mechanism is required to keep the posture of the platform 2 parallel and to constrain the degrees of freedom other than in the first direction, and although a proposal using linear guides and air springs in parallel has been shown, by assembling a link mechanism in the form of a parallelogram as in the fifth embodiment shown in Fig. 7, the support surface 1 and platform 2 will move in parallel. If these are used orthogonally, the platform 2 will move up and down along the motion axis even if the load is eccentric.

[0073] In the above-described embodiments, the spring body 43 made of a coil spring is illustrated in the schematic diagram as an example of the elastic body, but the elastic body used in the present invention may be any elastic body other than a coil spring as long as it exerts a force corresponding to displacement. Furthermore, as long as it functions as an elastic body, it may be a disc spring or rubber, a pneumatic cylinder, a rubber actuator, or a hydraulic cylinder with an accumulator, and these may be used alone or in combination.

[0074] In addition, various modifications and combinations of the embodiments may be made as long as they do not go against the spirit of the present invention.

[0075] (Details of the spring force applying mechanism according to each embodiment) The spring force applying mechanisms according to the above-described embodiments will be described in detail below. In the following description of the embodiments, the same or corresponding parts in the drawings will be given the same reference numerals, and description thereof will not be repeated.

[0076] In the following description, the term "lateral direction" refers to a horizontal direction perpendicular to the vertical direction, and a direction that is inclined relative to the horizontal direction. In Figures 1, 3, 4, 5A, 6, and 7, the "lateral direction" refers to the left-right direction, and the "vertical direction" refers to the up-down direction.

[0077] (Details of the first embodiment) 1, a vibration isolator according to a first embodiment of the present invention is a device that suppresses vibrations when an object (not shown), such as a precision machine, is placed on top of the device. The vibration isolator includes a spring force application mechanism 100.

[0078] The spring force applying mechanism 100 is provided on a support surface 1. The support surface 1 is a floor or the ground. The support surface 1 is a flat surface. The support surface 1 extends on a plane that intersects with the vertical direction. The support surface 1 extends on a plane that is aligned with the horizontal direction.

[0079] The spring force applying mechanism 100 includes a platform 2, a plurality of tilting mechanisms 3, and a plurality of supports 51 and 52.

[0080] The platform 2 is a flat plate on which an object is placed. The platform 2 extends on a plane that intersects with the vertical direction. The platform 2 is provided at a vertical interval from the support surface 1. The platform 2 is provided so as to be positioned approximately parallel to the horizontal direction with respect to the support surface 1. The platform 2 may be inclined from the horizontal direction.

[0081] The platform 2 is movable relative to the support surface 1. The platform 2 is movable in the vertical direction. Note that, when the platform 2 is inclined from the horizontal direction, the platform 2 may be movable while inclined from the vertical direction.

[0082] The multiple tilting mechanisms 3 support the platform 2 from below. The multiple tilting mechanisms 3 include a first tilting mechanism 3A and a second tilting mechanism 3B. The first tilting mechanism 3A and the second tilting mechanism 3B are provided on the support surface 1. The first tilting mechanism 3A and the second tilting mechanism 3B support the platform 2 from below and are aligned side by side.

[0083] The first tilting mechanism 3A includes a first intersection 35, a first tilting member 31, a first arm 41, and a first support portion 44.

[0084] The first node 35 is fixed to the platform 2. The first tilting mechanism 3A supports the platform 2 from below at the first node 35. The first node 35 is formed of a member having the function of, for example, a hinge or a bearing. The first node 35 rotates the first tilting member 31 and the first arm 41 on an imaginary plane that includes the vertical direction and the direction in which the first tilting member 31 and the first arm 41 extend.

[0085] The first inclined member 31 is provided so as to be inclined with respect to the platform 2. In an equilibrium state described below, the first inclined member 31 is inclined at an inclination angle θ0 with respect to the platform 2.

[0086] The first inclined member 31 is a support member formed, for example, by combining a plurality of plate-like members. The first inclined member 31 extends in an inclined direction from the platform 2. One end of the first inclined member 31 is connected to a first intersection 35. The other end of the first inclined member 31 is supported on the support surface 1 and is rotatable around the first intersection 35.

[0087] The first arm 41 is provided at an incline with respect to the platform 2. The first arm 41 is a support member formed, for example, by combining a plurality of plate-like members. The first arm 41 extends in an inclined direction from the platform 2. The extending directions of the first inclined member 31 and the first arm 41 may be different from each other or may be the same.

[0088] The first arm 41 has a first end E1 and a second end E2. The first end E1 is connected to the first intersection 35. The second end E2 is located on the opposite side of the first end E1. The first arm 41 is connected to the first ramp member 31 at a first differential angle α1, with the first intersection 35 as the center. The first arm 41 is rotatable about the first intersection 35 while maintaining the first differential angle α1 with respect to the first ramp member 31.

[0089] The first support part 44 is movable on the support surface 1. The first support part 44 is, for example, a slider member that has the function of a hinge or a bearing and is movable laterally. The other end of the first inclined member 31 is supported by the first support part 44. When the first support part 44 moves laterally on the support surface 1, the first inclined member 31 rotates around the first support part 44.

[0090] The second tilting mechanism 3B includes a second intersection 36, a second tilting member 32, a second arm 42, and a second support portion 45.

[0091] The second node 36 is fixed to the platform 2. The second tilting mechanism 3B supports the platform 2 from below at the second node 36. The second node 36 is configured by a member having the function of, for example, a hinge or a bearing. The second node 36 rotates the second tilting member 32 and the second arm 42 on an imaginary plane that includes the vertical direction and the direction in which the second tilting member 32 and the second arm 42 extend.

[0092] The second inclined member 32 is provided at an incline with respect to the platform 2. In an equilibrium state described below, the second inclined member 32 is inclined at an inclination angle θ0 with respect to the platform 2. The second inclined member 32 is, for example, a support member made up of a combination of multiple plate-like members. The second inclined member 32 extends in an inclined direction from the platform 2.

[0093] One end of the second inclined member 32 is connected to the second intersection 36. The other end of the second inclined member 32 is supported on the support surface 1 and is rotatable around the second intersection 36.

[0094] The second arm 42 is provided at an incline with respect to the platform 2. The second arm 42 is a support member formed, for example, by combining a plurality of plate-like members. The second arm 42 extends in an inclined direction from the platform 2. The extending directions of the second inclined member 32 and the second arm 42 may be different from each other or may be the same.

[0095] The second arm 42 has a third end E3 and a fourth end E4. The third end E3 is connected to the second intersection 36. The fourth end E4 is located on the opposite side of the third end E3. The second arm 42 is connected to the second ramp member 32 at a second differential angle α2, with the second intersection 36 as the center. The second arm 42 is rotatable about the second intersection 36 while maintaining the second differential angle α2 with respect to the second ramp member 32.

[0096] The second support part 45 is movable on the support surface 1. The second support part 45 is, for example, a slider member that has the function of a hinge or a bearing and is movable laterally. The other end of the second ramp member 32 is supported by the second support part 45. When the second support part 45 moves laterally on the support surface 1, the second ramp member 32 rotates around the second support part 45.

[0097] The first differential angle α1 and the second differential angle α2 are substantially the same angle. The first differential angle α1 and the second differential angle α2 can be set to various angles depending on the load of an object placed on the platform 2, the elastic force of the elastic body 43, etc. Note that, for example, when the platform 2 is inclined in a direction intersecting the horizontal direction, the first differential angle α1 and the second differential angle α2 may be different from each other.

[0098] An elastic body 43 is provided between a first connection portion provided on the first arm 41 and a second connection portion provided on the second arm 42. In this embodiment, the first connection portion is the second end E2. In this embodiment, the second connection portion is the fourth end E4.

[0099] The elastic body 43 is provided along the lateral direction. The elastic body 43 is provided along the approximately horizontal direction. The elastic body 43 is connected to the first tilting mechanism 3A and the second tilting mechanism 3B. The elastic body 43 is a tension spring. The elastic body 43 is also a coil spring.

[0100] The elastic body 43 is not limited to a coil spring, and may be any elastic body that exerts a force corresponding to a displacement, such as a disc spring, rubber, a pneumatic cylinder, a rubber actuator, or a hydraulic cylinder with an accumulator, or may be configured as a single one of these or a combination thereof.

[0101] The elastic body 43 includes a fifth end E5 and a sixth end E6. The fifth end E5 is connected to the first connecting portion (second end E2) of the first arm 41. The sixth end E6 is connected to the second connecting portion (fourth end E4) of the second arm 42.

[0102] The first tilting mechanism 3A, the second tilting mechanism 3B, and the elastic body 43 are arranged in mirror symmetry in the horizontal direction about an imaginary plane (a plane extending perpendicular to the paper surface in FIG. 1) passing through the imaginary perpendicular line V. This allows the platform 2 to be supported uniformly by the first tilting mechanism 3A and the second tilting mechanism 3B.

[0103] The multiple supports 51, 52 are provided at the lateral ends of the spring force applying mechanism 100. The multiple supports 51, 52 are, for example, linear guides. The multiple supports 51, 52 are configured to allow the platform 2 to move in the vertical direction while maintaining the angular relationship between the support surface 1 and the platform 2 in the lateral direction. Note that the mechanism for maintaining the angular relationship between the support surface 1 and the platform 2 in the lateral direction is not limited to a linear guide.

[0104] (Operation of each configuration) When a load is applied to platform 2, the behavior of each component is as follows.

[0105] When a load is applied to the platform 2, an elastic force is generated by expansion and contraction of the elastic body 43 while the first differential angle α1 and the second differential angle α2 are maintained. In this embodiment, when a load is applied to the platform 2, the first inclined member 31 rotates around the first intersection 35 relative to the platform 2. The second inclined member 32 rotates around the second intersection 36 relative to the platform 2. Each of the first inclined member 31 and the second inclined member 32 rotates within the angle range of inclination angle θ0 + θ.

[0106] As a result, while the first differential angle α1 and the second differential angle α2 are maintained, the distance between the second end E2 of the first arm 41 and the fourth end E4 of the second arm 42 changes, and an elastic force is generated due to expansion and contraction of the elastic body 43. As a result, a force component along the vertical direction of the elastic force generated in the elastic body 43 acts on the first arm 41 and the second arm 42, and the first tilting mechanism 3A and the second tilting mechanism 3B support the platform 2.

[0107] 2, the horizontal axis of the graph represents the vertical displacement of the platform 2. Positive values ​​represent upward displacement in the vertical direction, and negative values ​​represent downward displacement in the vertical direction.

[0108] The vertical axis of the graph represents the relationship between the load applied to the spring force applying mechanism 100 and the elastic force of the elastic body 43, normalized by a ratio. Specifically, a load is steadily applied to the platform 2 when an object is placed on it. This load balances with the elastic force of the elastic body 43, and the platform 2 stops at a specific position in the vertical direction. The point at which this steadily applied load and the elastic force of the elastic body 43 balance is normalized by a ratio and calculated as 1.0. When this ratio is 1.0 and the vertical displacement of the platform 2 is 0, this state is referred to as an "equilibrium state." In this embodiment, the steadily applied load is, for example, 6.0 kg.

[0109] In Figure 2, if the boundary line (the dotted line in Figure 2) is where the displacement on the horizontal axis is 0 or the ratio on the vertical axis is 1.0, the linear slope will be positive in the upper right region and the lower left region of the graph. For example, in the upper right region of the graph, if the displacement becomes negative, the ratio on the vertical axis will increase. This indicates that when a different load (e.g., a load due to vibration) is applied downward to platform 2 in addition to the steadily applied downward load, the elastic force of elastic body 43 becomes greater than the sum of these loads, and a force urging platform 2 upward is generated by the elastic force of elastic body 43.

[0110] In the lower left region of the graph, contrary to the upper right region of the graph, when a load is applied upward to platform 2 in addition to the load that is steadily applied downward, the elastic force of elastic body 43 becomes smaller than the sum of these loads, and a force that urges platform 2 downward is exerted by the elastic force of elastic body 43. Thus, the upper right region and the lower left region of the graph are regions where the spring constant of spring force applying mechanism 100 takes a positive value and functions as a "positive spring."

[0111] On the other hand, in the lower right and upper left regions of the graph, the linear slope is negative. In the negative slope region, the greater the vertical displacement, the weaker the repulsive force of the elastic body 43. In other words, when the load applied to the platform 2 in the vertical direction increases, the repulsive force of the elastic body 43 decreases, and the displacement of the platform 2 becomes negative (the height of the platform 2 decreases).

[0112] Specifically, in the lower right region of the graph, when the displacement becomes negative, the ratio of the vertical axis decreases. This is because when the vertical displacement becomes negative and platform 2 moves vertically downward, elastic body 43 extending in the horizontal direction stretches, and the extension directions of first arm 41 and second arm 42 that transmit the elastic force of elastic body 43 gradually approach the horizontal direction.

[0113] As a result, an elastic force caused by elastic body 43 trying to contract is applied to first arm 41 and second arm 42, and the vertical component of the force applied to first arm 41 and second arm 42 becomes smaller, so the vertical force generated by elastic body 43 gradually becomes smaller, which indicates that the elastic force (spring reaction force) decreases as a load is applied vertically downward to platform 2.

[0114] The upper left region of the graph functions in the opposite way to the lower right region of the graph. Thus, the lower right and upper left regions of the graph are regions where the spring constant of the spring force applying mechanism 100 takes a negative value and functions as a "negative spring." When the spring force applying mechanism 100 functions as a negative spring, the repulsive force from the elastic body 43 against the load decreases compared to when it is in a positive spring state, and it behaves in a way that attempts to absorb fluctuations in the load.

[0115] Regardless of whether the spring is positive or negative, the smaller the spring constant (the smaller the linear slope in FIG. 2), the lower the elastic force (spring reaction force) of the elastic body 43 when a load is applied to the platform 2, and therefore the lower the natural frequency of the elastic body 43. Therefore, in order to improve the vibration isolation performance of the vibration isolation device, a smaller spring constant is desirable.

[0116] In this embodiment, the spring force applying mechanism 100 can be in either a positive spring state or a negative spring state by adjusting the first differential angle α1 and the second differential angle α2.

[0117] When the spring force applying mechanism 100 is in a positive spring state, even if a load is applied to the platform 2, the elastic force of the elastic body 43 will repel the load and return the position of the platform 2 upward so as to return to an equilibrium state, so there is no need to separately provide an elastic body such as a compression spring that is arranged to extend in the vertical direction in the configuration of the spring force applying mechanism 100.

[0118] When the spring force applying mechanism 100 is in a negative spring state, the vertical elastic force from the elastic body 43 decreases as the load is applied to the platform 2, and therefore the platform 2 moves vertically downward as the load increases. For this reason, it is necessary to provide the spring force applying mechanism 100 with an elastic body such as a compression spring that is arranged to stretch in the vertical direction.

[0119] In this embodiment, it is desirable that the spring force applying mechanism 100 be in a slightly positive spring state. Specifically, when the load steadily applied to the platform 2 and the elastic force of the elastic body 43 are balanced and in an equilibrium state, the ratio is set to 1.0, and when the ratio is 1.0, the downward displacement in the vertical direction is set to 0, and when a different load is applied in addition to the steadily applied load, the downward displacement in the vertical direction is set to -200 mm, and when the downward displacement in the vertical direction exceeds 0 mm and fluctuates to -200 mm, the ratio increases in the range of more than 1.0 and not more than 1.05.

[0120] The range of this ratio is more preferably greater than 1.0 and not greater than 1.024, and even more preferably greater than 1.0 and not greater than 1.002. In this embodiment, for example, the load characteristics are preferably such that the slope is approximately linear when the differential angle α (first differential angle α1 and second differential angle α2) shown in FIG. 2 is 60°. The angles of the first differential angle α1 and the second differential angle α2, and the reaction force of the elastic body 43 are set so that the ratio is in the range of 1.0 or greater and 1.05 or less when the downward displacement in the vertical direction varies from greater than 0 mm to -200 mm.

[0121] As described above, if the spring force applying mechanism 100 is in a slightly positive spring state, the natural frequency decreases, ensuring vibration isolation performance, and the platform 2 tends to return to a position where the displacement in the equilibrium state is zero. This eliminates the need to provide a separate elastic body such as a compression spring that is provided to extend in the vertical direction. As a result, the spring force applying mechanism 100 can be made smaller while still ensuring vibration isolation performance.

[0122] (Details of the Modification of the First Embodiment) As shown in Fig. 3, the elastic body 43 in this modification is a compression spring. The first inclined member 31 and the second inclined member 32 are arranged to intersect with each other. When a load is applied to the platform 2 and it moves vertically downward, the first support portion 44 and the second support portion 45 move away from each other on the support surface 1 while maintaining the first differential angle α1 and the second differential angle α2. As a result, the elastic body 43 is compressed and deformed in the lateral direction by the first arm 41 and the second arm 42.

[0123] In this modification, similar to the first embodiment, the spring force applying mechanism 100 is configured to be in a slightly positive spring state by adjusting the angles of the first differential angle α1 and the second differential angle α2. In this modification, the first inclined member 31 and the second inclined member 32 are arranged to intersect with each other, so that the first support portion 44 and the second support portion 45 do not spread too much in the lateral direction, which contributes to the miniaturization of the spring force applying mechanism 100.

[0124] In the spring force applying mechanism 100 of this embodiment, compared to a cantilever support configuration in which one tilt mechanism is supported by an elastic body, the first tilt mechanism 3A and the second tilt mechanism 3B, which are arranged side by side in the horizontal direction, are each supported at both ends of the elastic body 43 extending in the horizontal direction, so that the elastic force generated in the elastic body 43 can be doubled and applied to the platform 2. As a result, compared to a cantilever support configuration, even if the tilt mechanism 3 and the elastic body 43 are made smaller, the elastic force for supporting the platform 2 can be ensured, so the tilt mechanism 3 and the elastic body 43 can be made smaller, and the spring force applying mechanism 100 can be made more compact.

[0125] In the spring force applying mechanism 100 and its manufacturing method according to this embodiment, by making the first differential angle α1 and the second differential angle α2 substantially constant, it is possible to make the characteristics of supporting the platform 2 in the first tilting mechanism 3A and the second tilting mechanism 3B uniform and prevent the posture of the platform 2 from being disturbed. When the platform 2 is provided along the horizontal direction, it is possible to easily maintain the horizontal state of the platform 2.

[0126] In the spring force applying mechanism 100 and its manufacturing method according to this embodiment, the normalized ratio when the downward displacement in the vertical direction varies from more than 0 mm to -200 mm is increased in the range of more than 1.0 to 1.05, thereby putting the spring force applying mechanism 100 into a slightly positive spring state and returning the platform 2 to an equilibrium state, so that the spring force applying mechanism 100 can be configured without providing any additional structure for supporting the platform 2 in the vertical direction other than the first tilting mechanism 3A, the second tilting mechanism 3B, and the elastic body 43. As a result, the configuration of the spring force applying mechanism 100 can be simplified and made smaller.

[0127] In the spring force application mechanism 100 of this embodiment, by providing a first support part 44 and a second support part 45 that are movable on the support surface 1, the first tilting mechanism 3A and the second tilting mechanism 3B can be configured with a simpler structure than the three-joint structure of the tilting mechanism described later.

[0128] In the spring force applying mechanism 100 of this embodiment, the elastic body 43, and the first node 35, the second node 36, the first arm 41, and the second arm 42 that support the elastic body 43 are each connected directly or indirectly to the platform 2. This makes it easier to position the members that support the platform 2 (the first node 35 and the second node 36) closer to the center of the device in the lateral direction. As a result, compared to a configuration in which the elastic body and the members that fix the elastic body are connected directly or indirectly to the support surface 1 and the support points of the platform 2 are positioned at both ends in the lateral direction (a configuration in which the first tilting mechanism 3A, the second tilting mechanism 3B, and the elastic body 43 of this embodiment are inverted upside down), by positioning the support points of the platform 2 closer to the center in the lateral direction, it is possible to suppress deflection of the platform 2 at the center of the platform 2.

[0129] (Details of the second embodiment) As shown in FIG. 4, each of the first tilting mechanism 3A and the second tilting mechanism 3B in this embodiment has a three-joint structure including three intersections and support portions in total.

[0130] The first tilting mechanism 3A includes a first intersection 35, a first tilting member 31, a first arm 41, a third support portion 33, a third tilting member 46, and a third intersection 37.

[0131] The third support part 33 is fixed to the support surface 1. The third support part 33 is a member that functions as, for example, a hinge or a bearing. The third support part 33 rotates the third slope member 46 on an imaginary plane that includes the vertical direction and the direction in which the third slope member 46 extends.

[0132] The third inclined member 46 is provided so as to be inclined with respect to the support surface 1. In the equilibrium state, the third inclined member 46 is inclined with respect to the support surface 1 at an angle equivalent to the inclination angle θ0 at which the first inclined member 31 is inclined with respect to the platform 2.

[0133] The third inclined member 46 is a support member formed, for example, by combining a plurality of plate-like members. The third inclined member 46 extends in an inclined direction from the support surface 1. One end of the third inclined member 46 is connected to the third support part 33. The third inclined member 46 is rotatable around the third support part 33.

[0134] The third intersection 37 is configured by a member having the function of, for example, a hinge or a bearing. The third intersection 37 connects the first inclined member 31 and the third inclined member 46 in a bent manner. The first inclined member 31 and the third inclined member 46 are arranged so as to be aligned in the vertical direction.

[0135] The second tilting mechanism 3B includes a second intersection 36, a second tilting member 32, a second arm 42, a fourth support portion 34, a fourth tilting member 47, and a fourth intersection 38.

[0136] The fourth support part 34 is fixed to the support surface 1. The fourth support part 34 is a member that functions as a hinge or a bearing. The fourth support part 34 rotates the fourth sloped member 47 on an imaginary plane that includes the vertical direction and the direction in which the fourth sloped member 47 extends.

[0137] The fourth inclined member 47 is provided so as to be inclined with respect to the support surface 1. In the equilibrium state, the fourth inclined member 47 is inclined with respect to the support surface 1 at an angle equivalent to the inclination angle θ0 at which the second inclined member 32 is inclined with respect to the platform 2.

[0138] The fourth inclined member 47 is a support member formed, for example, by combining a plurality of plate-like members. The fourth inclined member 47 extends in an inclined direction from the support surface 1. One end of the fourth inclined member 47 is connected to the fourth support part 34. The fourth inclined member 47 is rotatable around the fourth support part 34.

[0139] The fourth intersection 38 is configured by a member having the function of a hinge or a bearing. The fourth intersection 38 connects the second inclined member 32 and the fourth inclined member 47 so as to bend them. The second inclined member 32 and the fourth inclined member 47 are arranged so as to be aligned in the vertical direction.

[0140] In the first tilting mechanism 3A, the first intersection 35 and the third support portion 33, as well as the first tilting material 31 and the third tilting material 46, are arranged in mirror symmetry with respect to an imaginary plane extending horizontally and passing through the third intersection 37.

[0141] In the second tilting mechanism 3B, the second intersection 36 and the fourth support portion 34, as well as the second tilting material 32 and the fourth tilting material 47, are arranged in mirror symmetry with respect to an imaginary plane extending horizontally and passing through the fourth intersection 38.

[0142] The multiple supports 51, 52 stand upright from the support surface 1 at both ends of the spring force applying mechanism 100. The multiple supports 51, 52 are connected to the platform 2. The multiple supports 51, 52 maintain the orientation of the platform 2 in the lateral direction. Specifically, the multiple supports 51, 52 have air springs 53, 54 provided between their columnar portions. The orientation of the platform 2 in the lateral direction is maintained by the air springs.

[0143] In the spring force application mechanism 100 of this embodiment, compared to the first embodiment, by providing a third intersection 37 that connects the first inclined material 31 and the third inclined material 46 in a bending manner, and a fourth intersection 38 that connects the second inclined material 32 and the fourth inclined material 47 in a bending manner, it is possible to prevent the inclined materials from extending laterally, and therefore the spring force application mechanism 100 can be made smaller in the lateral direction.

[0144] In the spring force applying mechanism 100 of this embodiment, the position of the platform 2 can be prevented from being disturbed by providing a plurality of supports 51, 52. When the platform 2 is provided along the horizontal direction, it is possible to easily maintain the horizontal state of the platform 2.

[0145] (Details of the third embodiment) As shown in FIGS. 5A and 5B, the plurality of tilting mechanisms 3 in this embodiment include a first tilting mechanism 3A, a second tilting mechanism 3B, and a third tilting mechanism 3C.

[0146] The configurations of the first tilting mechanism 3A and the second tilting mechanism 3B are the same as those in the second embodiment. The third tilting mechanism 3C has the same configuration as the first tilting mechanism 3A or the second tilting mechanism 3B. Three elastic bodies 43 connect the first tilting mechanism 3A, the second tilting mechanism 3B, and the third tilting mechanism 3C to each other.

[0147] The first tilting mechanism 3A, the second tilting mechanism 3B, and the third tilting mechanism 3C are each arranged radially around the imaginary point VP as the center when viewed from the vertical direction. The first tilting mechanism 3A, the second tilting mechanism 3B, and the third tilting mechanism 3C are each arranged at intervals of 120°. The number of tilting mechanisms 3 may be four or more. When four or more tilting mechanisms are provided, it is desirable that the multiple tilting mechanisms 3 are each arranged radially around the imaginary point VP at equal intervals.

[0148] In the spring force applying mechanism 100 of this embodiment, when viewed from the vertical direction, the multiple tilting mechanisms 3 are arranged radially around the imaginary point VP, with the imaginary point VP as the center, so that vibration isolation performance can be exerted at various positions on an imaginary plane that intersects with the vertical direction. When the platform 2 is provided along the horizontal direction, vibration isolation performance can be exerted at various positions on the horizontal plane of the platform 2.

[0149] (Details of the Fourth Embodiment) 6, the spring force applying mechanism 100 includes a first tilting mechanism 3A, a second tilting mechanism 3B, a first connecting body 61, a second connecting body 62, and an elastic body 43. The first connecting body 61 is a member that connects the platform 2 and the first support portion 44. The second connecting body 62 is a member that connects the platform 2 and the second support portion 45.

[0150] The vertical heights of the intersections or support portions of the first tilting mechanism 3A, the second tilting mechanism 3B, the first connecting body 61, and the second connecting body 62 fixed to the platform 2 are approximately the same. The vertical heights of the support portions of the first tilting mechanism 3A, the second tilting mechanism 3B, the first connecting body 61, and the second connecting body 62 fixed to the first supporting portion 44 or the second supporting portion 45 are approximately the same. This makes it possible to stabilize the angular relationship of the platform 2 with respect to the supporting surface 1. When the platform 2 is provided along the horizontal direction, it is possible to easily maintain the horizontal state of the platform 2.

[0151] The elastic body 43 is an actuator whose elastic force can be changed and controlled. The elastic body 43 functions like a compression spring. When a load is applied to the platform 2 and it moves vertically downward, the first support portion 44 and the second support portion 45 move away from each other on the support surface 1 while maintaining the first differential angle α1 and the second differential angle α2. As a result, the elastic body 43 is compressed and deformed in the lateral direction by the first arm 41 and the second arm 42.

[0152] By introducing compressed air into the first support section 44 and the second support section 45, they are air-levitated from the support surface 1 and can move on the support surface 1. This air-levitation allows for freedom of movement in any direction, so vibration isolation in both the lateral and vertical directions can be performed three-dimensionally.

[0153] In the spring force application mechanism 100 of this embodiment, the elastic body 43 is configured by an actuator that can change and control the elastic force, so that even if there is a fluctuation in the load applied to the platform 2, the elastic force of the elastic body 43 can be changed accordingly to absorb vibrations.

[0154] (Details of the fifth embodiment) As shown in FIG. 7, the spring force applying mechanism 100 includes two first tilting mechanisms 3A, two second tilting mechanisms 3B, a first connecting member 48, and a second connecting member 49.

[0155] Two first tilting mechanisms 3A are connected to each other and arranged side by side in the horizontal direction, and two second tilting mechanisms 3B are connected to each other and arranged side by side in the horizontal direction.

[0156] The first connecting member 48 is a member extending in the horizontal direction. The first connecting member 48 connects the third nodes 37 of each of the two first tilting mechanisms 3A. The second connecting member 49 is a member extending in the horizontal direction. The second connecting member 49 connects the fourth nodes 38 of each of the two second tilting mechanisms 3B.

[0157] With the above-described configuration, in the two first tilting mechanisms 3A, the combination of the first tilting member 31 and the first connecting member 48, and the combination of the third tilting member 46 and the first connecting member 48, each form a side of a parallelogram when viewed from a direction perpendicular to the plane of the paper in Figure 7. In the two second tilting mechanisms 3B, the combination of the second tilting member 32 and the second connecting member 49, and the combination of the fourth tilting member 47 and the second connecting member 49, each form a side of a parallelogram when viewed from a direction perpendicular to the plane of the paper in Figure 7. As a result, when a load is applied to the platform 2 and it moves vertically downward, the two first tilting mechanisms 3A and the two second tilting mechanisms 3B act to maintain the shape of the parallelogram, and the platform 2 can be maintained parallel to the support surface 1.

[0158] In the spring force applying mechanism of this embodiment, by increasing the number of each of the first tilting mechanisms 3A and the second tilting mechanisms 3B, it is possible to increase the number of positions at which the platform 2 is supported by the first tilting mechanisms 3A and the second tilting mechanisms 3B, thereby stabilizing the angular relationship of the platform 2 with respect to the support surface 1. When the platform 2 is provided along the horizontal direction, it is possible to easily maintain the horizontal state of the platform 2.

[0159] In the above-described embodiment, the configuration in which each of the inclined members or each of the arms is connected to other components at each end has been disclosed, but this configuration is not limiting. Each of the inclined members or each of the arms may be connected to other components at an intermediate position or the like other than the end.

[0160] It should be noted that the above-described embodiments disclosed herein are illustrative in all respects and are not intended to be limiting. Therefore, the technical scope of the present disclosure should not be interpreted solely by the above-described embodiments. Furthermore, all modifications within the scope and meaning equivalent to the claims are included. In the description of the above-described embodiments, combinable configurations may be combined with each other. [Explanation of symbols]

[0161] 1 Support surface, 2 Platform, 3 Tilting mechanism, 3A First tilting mechanism, 3B Second tilting mechanism, 3C Third tilting mechanism, 4 Spring mechanism, 31 First tilting member (tilting member), 32 Second tilting member (tilting member), 33 Third support part (hinge, etc.), 34 Fourth support part (hinge, etc.), 35 First intersection (hinge, etc.), 36 Second intersection (hinge, etc.), 37 Third intersection (hinge, etc.), 38 Fourth intersection (hinge, etc.), 41 First arm (crank arm), 42 Second arm (crank arm), 43 Elastic body (spring body, etc.), 44 First support part (hinged slider, etc.), 45 Second support part (hinged slider, etc.), 46 Third tilting member, 47 Fourth tilting member, 48 First connecting member, 49 Second connecting member, 51, 52 Support, 53, 54 air spring, 61 first connecting body, 62 second connecting body, 100 spring force applying mechanism, E1 first end, E2 second end (first connecting part), E3 third end, E4 fourth end (second connecting part), E5 fifth end, E6 sixth end, H rotation center base point of tilting member, d vertical distance of spring from base point, P vertical force of spring, Fk horizontal elastic force of spring, la effective length of tilting member, lb arm length of spring support, V virtual perpendicular line, VP virtual point, α differential angle, α1 first differential angle, α2 second differential angle, θ0 equilibrium point tilt angle.

Claims

1. A spring force application mechanism comprising two sets of tilting mechanisms, each of which comprises a platform arranged parallel to a support surface and movable in a direction perpendicular to the surface, and a tilting member connected by a hinge to the platform so that it can rotate at a certain tilt angle, and the other end of the tilting member is connected by a hinge to a slider that is in contact with the support surface and can slide, and the pairs of pairs are arranged symmetrically in the same plane parallel to the movement axis, and both tilting members are spaced a certain distance from the hinge on the platform side of the tilting member so that they can be restrained by a spring stretched parallel to the support surface, and spring fulcrums are provided at symmetrical positions on both tilting members so that they rotate together with the tilting members while maintaining a certain angular difference from the angle between the platform and the tilting members, and a spring is connected between the fulcrums to apply a horizontal spring force to the tilting mechanism, and the lever action of the tilting member applies a spring force in the direction of the movement axis of the support surface and the platform.

2. 2. The spring force applying mechanism of claim 1, A spring force application mechanism characterized in that a plurality of tilting mechanisms connected by the hinges to the platform, which is movable at a distance from the support surface, are arranged radially at angles around the axis of movement, and the spring supports provided on the tilting members are connected by the required number of spring bodies parallel to the support surface to apply a horizontal spring force, and the spring force is applied in the direction of the axis of movement by the lever action of the tilting members.

3. The spring force applying mechanism according to claim 1 or 2, A spring loading mechanism characterized in that the platform and the tilting mechanism are inverted upside down on the sliding surface of the slider and folded symmetrically to form a second platform and tilting mechanism, hinges attached to the slider are connected as common revolute pairs, and the inverted platform is used as a support surface to form a three-joint tilting mechanism, and spring bodies are respectively arranged between the spring fulcrums arranged in the tilting mechanism.

4. The spring force applying mechanism according to claim 1 or 2, The spring loading mechanism is characterized in that the horizontality of the platform can be maintained by arranging elastic bodies with variable stiffness functions in parallel.

5. The spring force applying mechanism according to claim 1 or 2, A spring loading mechanism characterized by using a double-link tilting mechanism in which two tilting mechanisms are arranged parallel to each other on the same plane, with each mechanism offset from the other, and links are added to connect each hinge in parallel to provide a parallel maintenance function.

6. The spring force applying mechanism according to claim 1 or 2, A spring force applying mechanism characterized in that the spring body arranged parallel to the support surface is an actuator that can changeably control the spring force.

7. a platform spaced apart from a support surface and movable relative to the support surface; a first tilting mechanism and a second tilting mechanism provided on the support surface and arranged side by side in a lateral direction; the first tilting mechanism includes a first tilting member and a first arm connected to the first tilting member at a first intersection at a first differential angle; the second tilting mechanism includes a second tilting member and a second arm connected to the second tilting member at a second intersection at a second differential angle; the first tilting mechanism and the second tilting mechanism support the platform from below at the first intersection and the second intersection, an elastic body is provided between a first connection portion provided on the first arm and a second connection portion provided on the second arm, a spring force application mechanism that, when a load is applied to the platform, generates an elastic force by expansion and contraction of the elastic body while maintaining the first differential angle and the second differential angle.

8. The spring force application mechanism according to claim 7 , wherein the first differential angle and the second differential angle are substantially the same angle.

9. When the ratio when the load steadily applied to the platform and the elastic force of the elastic body are balanced and in an equilibrium state is set to 1.0, and when the ratio is 1.0, the downward displacement in the vertical direction is set to 0, and when another load is applied in addition to the steadily applied load, the downward displacement in the vertical direction is set to -200 mm, 9. The spring force applying mechanism according to claim 7, wherein the ratio increases in a range of more than 1.0 and not more than 1.05 when the downward displacement in the vertical direction varies from more than 0 mm to −200 mm.

10. the first tilting mechanism includes a first support portion movable on the support surface, the first inclined member is supported by the first support portion, the second tilting mechanism includes a second support portion that is movable on the support surface, 9. The spring force applying mechanism according to claim 7, wherein the second inclined member is supported by the second support portion.

11. The first tilting mechanism is a third support portion fixed to the support surface; a third inclined member connected to the third support portion and rotatable about the third support portion; a third intersection point that connects the first inclined material and the third inclined material in a bending manner; The second tilting mechanism is a fourth support portion fixed to the support surface; a fourth inclined member connected to the fourth support portion and rotatable about the fourth support portion; 9. The spring force application mechanism according to claim 7, further comprising a fourth intersection point that connects the second inclined member and the fourth inclined member in a bending manner.

12. the first tilt mechanism and the second tilt mechanism constitute a part of a plurality of tilt mechanisms; 9. The spring force applying mechanism according to claim 7, wherein each of the plurality of tilting mechanisms is arranged radially around an imaginary point as viewed from the vertical direction, with the imaginary point as the center.

13. The spring force application mechanism according to claim 7 or 8, further comprising a plurality of supports connected to the platform for maintaining the orientation of the platform in the lateral direction.

14. two of the first tilting mechanisms are connected to each other and arranged side by side in the horizontal direction; 9. The spring force application mechanism according to claim 7, wherein two of the second tilting mechanisms are connected to each other and arranged side by side in the lateral direction.

15. 9. The spring force applying mechanism according to claim 7, wherein the elastic body is an actuator that can change and control the elastic force.

16. a platform spaced apart from a support surface and movable relative to the support surface; a first tilting mechanism and a second tilting mechanism provided on the support surface and arranged side by side in a lateral direction; the first tilting mechanism includes a first tilting member and a first arm connected to the first tilting member at a first intersection at a first differential angle; the second tilting mechanism includes a second tilting member and a second arm connected to the second tilting member at a second intersection at a second differential angle; the first tilting mechanism and the second tilting mechanism support the platform from below at the first intersection and the second intersection, an elastic body is provided between a first connection portion provided on the first arm and a second connection portion provided on the second arm, a method for manufacturing a spring force application mechanism, wherein when a load is applied to the platform, an elastic force is generated by expansion and contraction of the elastic body while the first differential angle and the second differential angle are maintained, When the ratio when the load steadily applied to the platform and the elastic force of the elastic body are balanced and in an equilibrium state is set to 1.0, and when the ratio is 1.0, the downward displacement in the vertical direction is set to 0, and when another load is applied in addition to the steadily applied load, the downward displacement in the vertical direction is set to -200 mm, a manufacturing method for a spring force application mechanism, wherein the angles of the first differential angle and the second differential angle, and the reaction force of the elastic body are set so that the ratio is in the range of 1.0 or more and 1.05 or less when the downward displacement in the vertical direction varies from more than 0 mm to -200 mm.

17. The method for manufacturing a spring force application mechanism according to claim 16 , wherein the first differential angle and the second differential angle are set to be substantially the same angle.

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