Electron beam irradiation apparatus

Abstract

To provide an electron beam irradiation device capable of easily performing maintenance of an accelerator.SOLUTION: The electron-beam irradiating device includes an accelerator 13 for accelerating the electron-beam, a voltage converter 21 arranged on an extension of an axis L1 of the accelerator 13 and electrically connected to the accelerator 13, and a position variable mechanism 22 for changing a position of the voltage converter 21 in a direction of the axis L1 of the accelerator 13. While the interval between the transformer 21 and the accelerator 13 during normal use of the electron beam irradiation device is configured to be small, the position of the transformer 21 can be set to a position away from the accelerator 13 by the position variable mechanism 22 at the time of maintenance of the accelerator 13.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to an electron beam irradiation device. [Background technology]

[0002] An electron beam irradiation device is a device that irradiates a workpiece with an electron beam. Electron beam irradiation devices are used for purposes such as improving the properties of the material of a workpiece, adding functionality, and sterilizing / sterilizing the workpiece. Electron beam irradiation devices include an accelerator that accelerates the electron beam and a transformer electrically connected to the accelerator (see, for example, Patent Document 1). The transformer is disposed, for example, near the accelerator on an extension of the accelerator's axis. By disposing the accelerator and transformer close to each other in this way, it is possible, for example, to suppress a drop in the voltage applied to the accelerator filament, etc. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-194392 Summary of the Invention [Problem to be solved by the invention]

[0004] In the electron beam irradiation device, the transformer can get in the way when performing accelerator maintenance. Because the transformer is a relatively heavy component, it is cumbersome for a worker to lift the transformer and move it to a position where it does not get in the way while removing accelerator components. [Means for solving the problem]

[0005] [1] An electron beam irradiation device that solves the above problem includes an accelerator that accelerates an electron beam, a transformer that is arranged on an extension of the axis of the accelerator and is electrically connected to the accelerator, and a position-variable mechanism that changes the position of the transformer in the axial direction of the accelerator.

[0006] With this configuration, the distance between the transformer and the accelerator during normal use of the electron beam irradiation device is small, but when performing maintenance on the accelerator, the position of the transformer can be moved away from the accelerator using the position variable mechanism, making it easy to perform maintenance on the accelerator.

[0007] [2] In the electron beam irradiation device described in [1] above, the position variable mechanism includes a support for supporting the transformer and a jack portion for moving the support. According to this configuration, the position of the transformer can be changed by moving the support that supports the transformer with the jack portion.

[0008] [3] In the electron beam irradiation apparatus described in [2] above, the electron beam irradiation apparatus comprises a pressure vessel that houses the accelerator, the transformer, and the position variable mechanism, the pressure vessel has an inspection hatch on the side of the position variable mechanism, and the jack portion is provided at a position closer to the inspection hatch than the axis of the accelerator.

[0009] According to this configuration, the jack unit is provided in a position close to the inspection hatch of the pressure vessel, which makes it easier to access the jack unit from the inspection hatch, thereby making it easier to operate the jack unit.

[0010] [4] In the electron beam irradiation device described in [2] or [3] above, the jack unit comprises a first bolt fixed to a bracket of the accelerator, a second bolt fixed to the support, and an adjustment nut connected to each of the first bolt and the second bolt, and the jack unit is configured so that the support moves by rotating the adjustment nut.

[0011] With this configuration, the position of the transformer can be changed simply by rotating the adjustment nut. [5] In the electron beam irradiation device described in [4] above, the jack portion includes an operating jig that is detachably attached to the adjustment nut.

[0012] With this configuration, during accelerator maintenance, the operating jig can be attached to the adjusting nut, allowing the adjusting nut to be easily rotated using the operating jig. Furthermore, during normal use of the electron beam irradiation device, the operating jig can be detached from the adjusting nut. This is advantageous because it prevents the operating jig from being left in a high-voltage environment around the accelerator.

[0013] [6] In the electron beam irradiation apparatus according to any one of [1] to [5] above, the transformer is disposed vertically above the accelerator. With this configuration, the transformer, which is a relatively heavy component, needs to be moved vertically upward to move it away from the accelerator. In contrast, with the configuration including the variable position mechanism, the transformer can be raised and lowered by the variable position mechanism, which more significantly facilitates accelerator maintenance. [Effects of the Invention]

[0014] According to the electron beam irradiation apparatus of the present invention, maintenance of the accelerator can be easily performed. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a schematic diagram including an electrical configuration of an electron beam irradiation device according to an embodiment. [Figure 2] FIG. 2 is a schematic diagram showing the configuration of the electron beam irradiation device in this embodiment. [Figure 3] FIG. 3 is a schematic perspective view showing the structure around a position variable mechanism in the electron beam irradiation apparatus of the embodiment. [Figure 4] FIG. 4 is a schematic side view showing the structure around the position variable mechanism in the electron beam irradiation apparatus of the embodiment. [Figure 5] FIG. 5 is a schematic side view for explaining the operation of the electron beam irradiation device of the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0016] An embodiment of an electron beam irradiation apparatus will be described below with reference to the drawings. Note that for the sake of convenience, some of the components may be exaggerated or simplified in the drawings. Furthermore, the dimensional ratios of the various components may differ from the actual ratios.

[0017] (Electrical configuration of the electron beam irradiation device 10) The electron beam irradiation device 10 of this embodiment shown in FIG. 1 is a scanning electron beam irradiation device. The electron beam irradiation device 10 includes a filament 11 made of, for example, tungsten, which emits thermoelectrons. The acceleration tube 12 is a device that converges and accelerates the electrons emitted from the filament 11. The acceleration tube 12 of this embodiment is disposed, for example, with its tube axis oriented vertically. The acceleration tube 12 includes multiple acceleration electrodes 12a arranged side by side at equal intervals in the vertical direction. The acceleration tube 12 has a layered structure in which cylindrical glass cylinders 12b are inserted between each of the acceleration electrodes 12a. A filament 11 is installed at the upper end of the acceleration tube 12. That is, the filament 11 is integrally attached to the acceleration tube 12, and the acceleration tube 12 and the filament 11 are integrally configured as an accelerator 13. The accelerator 13 may include peripheral components (not shown) of the acceleration tube 12 and the filament 11. In the following description, the tube axis direction of the acceleration tube 12 is referred to as the axis L1 of the accelerator 13. The accelerator 13 is installed, for example, so that the axis L1 is aligned vertically.

[0018] The accelerator 13 receives power from a power supply 14. The filament 11 receives power from a filament power supply 14a of the power supply 14. The filament 11 emits electrons by heating itself based on a predetermined power supply. The filament 11 receives power from the filament power supply 14a via a transformer 21 (see FIG. 2) described below.

[0019] Each accelerating electrode 12a of the accelerating tube 12 receives power supply from an accelerating electrode power supply 14b of the power supply device 14. Based on a predetermined power supply to each location, each accelerating electrode 12a generates an electric field within the accelerating tube 12 that converges electrons emitted from the filament 11 onto the axis L1 and accelerates them downward. In other words, in the accelerating tube 12, the electric field generated in each accelerating electrode 12a generates a downward electron flow, i.e., an electron beam Eb.

[0020] A scan tube 15 is connected to the lower end of the accelerating tube 12. The accelerating tube 12 and the scan tube 15 communicate with each other through an internal space 16. In the internal space 16, the electron beam Eb travels from the accelerating tube 12 toward the scan tube 15. The scan tube 15 has a shape that widens from its upper end toward its lower end. A scan coil 17 is provided at the upper end of the scan tube 15. The scan coil 17 deflects the direction of the electron beam Eb in the internal space 16, i.e., scans the electron beam Eb, based on a predetermined power supply thereto.

[0021] An opening window 15a having, for example, a substantially rectangular shape is provided at the lower end of the scan tube 15. A window foil 18 is attached to the opening window 15a. The window foil 18 is made of, for example, a titanium-based metal foil. The window foil 18 has the function of sealing the opening window 15a while allowing the electron beam Eb to pass through. In other words, the internal space 16 spanning the accelerating structure 12 and the scan tube 15 is configured as an airtight space. A vacuum pump 19 is connected to the scan tube 15. The vacuum pump 19 creates a vacuum in the internal space 16 where the electron beam Eb is generated by its own drive.

[0022] The control unit CU controls the filament power supply 14a, the accelerating electrode power supply 14b, the scan coil 17, and the vacuum pump 19. The control unit CU adjusts the output of the electron beam Eb through the filament power supply 14a and the accelerating electrode power supply 14b, controls the scanning of the electron beam Eb through the scan coil 17, and adjusts the vacuum of the internal space 16 of the accelerating tube 12 and the scan tube 15 through the vacuum pump 19.

[0023] The electron beam Eb emitted through the window foil 18 attached to the opening window 15a is irradiated onto the irradiation object W being transported by, for example, the transport device WC. In this case, the electron beam irradiation device 10 is arranged so that the longitudinal direction of the approximately rectangular opening window 15a is oriented perpendicular to the transport direction of the transport device WC. By performing a predetermined scan of the electron beam Eb, the electron beam Eb is irradiated onto an approximately rectangular irradiation area A corresponding to the opening window 15a. The irradiation effect of the electron beam Eb onto the irradiation object W can be expected to be, for example, improvement of the material's properties, addition of functions, sterilization, etc.

[0024] (Device configuration of electron beam irradiation device 10) 2, the electron beam irradiation device 10 includes a pressure vessel 20, the accelerator 13, a transformer 21 electrically connected to the accelerator 13, and a position variable mechanism 22 that changes the position of the transformer 21 in the direction of the axis L1 of the accelerator 13. The pressure vessel 20 accommodates the power supply unit 14, the accelerator 13, the transformer 21, and the position variable mechanism 22, and is filled with insulating gas (not shown). The power supply unit 14, the accelerator 13, the transformer 21, the position variable mechanism 22, etc. are installed in an atmosphere of insulating gas.

[0025] The pressure vessel 20 is integrally constructed of a first storage section 20a that mainly houses the power supply unit 14, a second storage section 20b that mainly houses the accelerator 13, the transformer 21, and the position variable mechanism 22, and a communication passage 20c that connects the first and second storage sections 20a, 20b to each other.

[0026] An accommodation pipe 24 is disposed in the communication passage 20c, through which the power supply cable 23 is inserted to support it. The first accommodation section 20a has a shape and size corresponding to the power supply device 14, the second accommodation section 20b has a shape and size corresponding to the internal components of the accelerator 13, and the communication passage 20c has a shape and size corresponding to the accommodation pipe 24. Incidentally, by making these individual settings, it is possible to make the overall outer shape of the pressure vessel 20 small. The first and second accommodation sections 20a, 20b of the pressure vessel 20 are, for example, arranged side by side horizontally on an installation floor FLa having a horizontal surface.

[0027] A scan tube 15 is installed on the underside of the installation floor FLa on which the second housing unit 20b of the pressure vessel 20 is installed. The scan tube 15 is disposed outside the pressure vessel 20 and is connected to the accelerator 13 housed in the second housing unit 20b. A transfer floor FLb is located below the scan tube 15, and a transfer device WC is installed on the transfer floor FLb. An electron beam Eb generated by the accelerator 13 is emitted downward from the scan tube 15 and is irradiated onto an irradiation object W being transported on the transfer device WC.

[0028] The housing tube 24 is made of a conductive metal material and has, for example, a cylindrical shape. One end of the housing tube 24 is connected to the power supply device 14, and the other end of the housing tube 24 is connected to a cover 25. The cover 25 covers components located above the accelerator 13, such as the filament 11, the position variable mechanism 22, and the transformer 21. The housing tube 24 not only supports the power supply cable 23 inserted inside, but also functions to alleviate the electric field in the communication passage 20c. The power supply cable 23 electrically connects the power supply device 14 and the transformer 21.

[0029] The pressure vessel 20 has an inspection hatch 26 for performing maintenance on the internal components of the second accommodation section 20b, and a lid 27 for closing the inspection hatch 26. The inspection hatch 26 is provided in the second accommodation section 20b at a position horizontally to the side of the position variable mechanism 22. The lid 27 is detachably attached to the inspection hatch 26, for example, by bolting. With the lid 27 removed, an operator can access the position variable mechanism 22, the filament 11, and other components at the upper end of the accelerator 13 through the inspection hatch 26.

[0030] (Configuration of position variable mechanism 22) 3 and 4, the position variable mechanism 22 includes a support 31 that supports the transformer 21, a jack unit 32 that moves the support 31, and a guide unit 33. Note that Fig. 4 is a side view showing the peripheral structure of the position variable mechanism 22 as viewed from the front of the inspection hatch 26.

[0031] The support 31 is, for example, disk-shaped. The transformer 21 is placed on the upper surface of the support 31. The support 31 has a cutout portion 31a for passing the transformer 21 and a cable (not shown) connecting the transformer 21 and the filament 11 arranged below the support 31. The transformer 21 is arranged on an extension of the axis L1 of the accelerator 13. In this embodiment, the transformer 21 is arranged vertically above the accelerator 13. The support 31 of this embodiment is supported at three points, for example, by two jack portions 32 and one guide portion 33.

[0032] The accelerator 13 disposed below the support 31 includes, for example, a cylindrical flange 34 and three brackets 35 extending radially outward from the outer circumferential surface of the flange 34 about an axis L1. The filament 11 is inserted inside the flange 34. The central axis of the cylindrical flange 34 coincides with the axis L1 of the accelerator 13. Each bracket 35 is, for example, in the shape of a plate perpendicular to the axis L1. Each bracket 35 is, for example, separate from the flange 34 and attached to the flange 34. Note that each bracket 35 may also be formed integrally with the flange 34.

[0033] (Configuration of jack section 32) The position variable mechanism 22 includes, for example, two jack units 32. Each jack unit 32 has a first bolt 41, a second bolt 42, and an adjustment nut 43. Each of the first bolts 41 of the two jack units 32 is fixed to a bracket 35. Specifically, one first bolt 41 is fixed to each of two of the three brackets 35. Each first bolt 41 extends upward from the bracket 35 along the axis L1.

[0034] The second bolt 42 of each jack section 32 is fixed to the support body 31. The second bolt 42 extends downward from the support body 31 along the axis L1. The second bolt 42 has a thread direction opposite to that of the first bolt 41.

[0035] In each jack unit 32, the adjustment nut 43 is a so-called coupling nut, and is threaded onto each of the first bolt 41 and the second bolt 42. The jack unit 32 is configured so that the support body 31 is raised and lowered by rotating the adjustment nut 43. That is, when the adjustment nut 43 is rotated in the upward direction, the adjustment nut 43 moves upward relative to the first bolt 41, and the second bolt 42 moves upward relative to the adjustment nut 43. When the adjustment nut 43 is rotated in the downward direction, the adjustment nut 43 moves downward relative to the first bolt 41, and the second bolt 42 moves downward relative to the adjustment nut 43. Each adjustment nut 43 has a jig mounting hole 44 for mounting an operating jig 50. The jig mounting hole 44 penetrates the adjustment nut 43 in a direction perpendicular to the axis.

[0036] (Configuration of guide portion 33) The guide portion 33 in the position variable mechanism 22 includes an inserted portion 45, a pillar portion 46, a stopper portion 47, and a cap portion 48. The inserted portion 45 has a cylindrical shape extending along the direction of the axis L1. The inserted portion 45 is fixed to a bracket 35 different from the bracket 35 to which the second bolt 42 is fixed. The pillar portion 46 is inserted into the inserted portion 45.

[0037] The pillar portion 46 is, for example, a bolt. The pillar portion 46 is fixed to the support body 31 and extends downward from the support body 31 along the axis L1. The stopper portion 47 is, for example, a nut, and is screwed onto the pillar portion 46, which is a bolt. The stopper portion 47 can abut against the tip end 49 of the inserted portion 45 in the direction of the axis L1. When the stopper portion 47 abuts against the tip end 49 of the inserted portion 45, the pillar portion 46 cannot move further downward. In other words, the lowest position of the pillar portion 46 relative to the inserted portion 45 is determined by the position of the stopper portion 47 in the longitudinal direction of the pillar portion 46.

[0038] The cap portion 48 is configured to be connectable to the tip end 49 of the inserted portion 45. More specifically, a female thread (not shown) is formed on the inner peripheral surface of the cap portion 48, and the female thread is screwed into a male thread (not shown) formed on the outer peripheral surface of the tip end 49 of the inserted portion 45. When the cap portion 48 is connected to the tip end 49 of the inserted portion 45, the stopper portion 47 abuts upward against the cap portion 48, thereby restricting the upward movement of the stopper portion 47 and the pillar portion 46. In other words, by connecting the cap portion 48 to the tip end 49 of the inserted portion 45, the pillar portion 46 is unable to move in the direction of the axis L1 in the guide portion 33.

[0039] In the position variable mechanism 22 of this embodiment, the support body 31 is supported at three points by two jack portions 32 and one guide portion 33. When viewed from the direction of the axis L1, the positions of the two jack portions 32 and one guide portion 33 are set to correspond to the vertices of a substantially equilateral triangle centered on the axis L1.

[0040] 2, each jack unit 32 is provided at a position closer to the inspection hatch 26 in the horizontal direction than the axis L1 of the accelerator 13. Also, the guide unit 33 is provided at a position farther from the inspection hatch 26 in the horizontal direction than the axis L1 of the accelerator 13. In other words, each jack unit 32 is provided at a position closer to the inspection hatch 26 in the horizontal direction than the guide unit 33.

[0041] Each jack unit 32 includes an operating jig 50 that is detachably attached to the adjustment nut 43. Each operating jig 50 includes a rod-shaped member 51 that is inserted into the jig attachment hole 44 of the adjustment nut 43, and two nuts 52 that are coupled to both longitudinal ends of the rod-shaped member 51. For example, during maintenance of the accelerator 13, the operating jig 50 can be attached to the adjustment nut 43, and the adjustment nut 43 can be easily rotated using the operating jig 50. During normal use of the electron beam irradiation device 10, the operating jig 50 can be detached from the adjustment nut 43.

[0042] (Action of this embodiment) The operation of this embodiment will be described below. For example, the filament 11 in the accelerator 13 is a part that requires periodic maintenance such as replacement. When performing maintenance on the filament 11, first, the cover 27 is removed to open the inspection hatch 26. Each jack unit 32 in the position variable mechanism 22 is located closer to the inspection hatch 26 than the axis L1 of the accelerator 13, so that the jack units 32 can be easily accessed through the inspection hatch 26.

[0043] After opening the inspection hatch 26, as shown in FIG. 5, an operator attaches an operating jig 50 to the adjusting nut 43 of each jack section 32. Then, the operator grasps each operating jig 50 and rotates each adjusting nut 43 in the upward direction. This causes the support 31, to which each second bolt 42 is fixed, to rise, increasing the gap between the support 31 and the filament 11 and maintaining that gap. This makes it possible to easily remove the filament 11 from the accelerator 13 and move it from the inspection hatch 26 to the outside of the pressure vessel 20.

[0044] After replacing the filament 11, the worker grasps each operating jig 50 and rotates each adjusting nut 43 in the downward direction to lower the support 31 and return the support 31 and transformer 21 to their normal use positions. Then, each operating jig 50 is removed from the adjusting nut 43. Then, the cover 27 that covers the inspection hatch 26 is attached.

[0045] (Effects of this embodiment) The effects of this embodiment will be described below. (1) The electron beam irradiation device 10 includes an accelerator 13 that accelerates the electron beam Eb, a transformer 21 that is disposed on an extension of the axis L1 of the accelerator 13 and is electrically connected to the accelerator 13, and a position variable mechanism 22 that changes the position of the transformer 21 in the direction of the axis L1 of the accelerator 13. With this configuration, the distance between the transformer 21 and the accelerator 13 is small during normal use of the electron beam irradiation device 10, and yet during maintenance of the accelerator 13, the position variable mechanism 22 can be used to move the transformer 21 away from the accelerator 13, making it possible to easily perform maintenance of the accelerator 13.

[0046] (2) The position variable mechanism 22 includes a support 31 that supports the transformer 21 and a jack unit 32 that moves the support 31. With this configuration, the position of the transformer 21 can be changed by moving the support 31 that supports the transformer 21 with the jack unit 32.

[0047] (3) The electron beam irradiation device 10 includes a pressure vessel 20 that houses an accelerator 13, a transformer 21, and a position variable mechanism 22. The pressure vessel 20 has an inspection hatch 26 on the side of the position variable mechanism 22. The jack unit 32 is provided at a position closer to the inspection hatch 26 than the axis L1 of the accelerator 13. With this configuration, the jack unit 32 is provided at a position closer to the inspection hatch 26 of the pressure vessel 20, making it easier to access the jack unit 32 from the inspection hatch 26. This makes it possible to easily operate the jack unit 32.

[0048] (4) The jack unit 32 includes a first bolt 41 fixed to a bracket 35 of the accelerator 13, a second bolt 42 fixed to the support 31, and an adjustment nut 43 connected to each of the first bolt 41 and the second bolt 42. The jack unit 32 is configured so that the support 31 moves by rotating the adjustment nut 43. With this configuration, the position of the transformer 21 can be changed simply by rotating the adjustment nut 43.

[0049] (5) The jack unit 32 includes an operating jig 50 that is detachably attached to the adjustment nut 43. With this configuration, the operating jig 50 is attached to the adjustment nut 43 during maintenance of the accelerator 13, and the adjusting nut 43 can be easily rotated by the operating jig 50. Furthermore, during normal use of the electron beam irradiation device 10, the operating jig 50 can be removed from the adjusting nut 43. This is advantageous because the operating jig 50 is not left in a high-voltage environment around the accelerator 13.

[0050] (6) The transformer 21 is disposed vertically above the accelerator 13. With this configuration, the transformer 21, which is a relatively heavy component, needs to be moved vertically upward in order to move the transformer 21 away from the accelerator 13. In this regard, with the configuration including the above-described position variable mechanism 22, the transformer 21 can be raised and lowered by the position variable mechanism 22, and therefore the effect of facilitating maintenance of the accelerator 13 by providing the position variable mechanism 22 can be more significantly obtained.

[0051] (Other embodiments) The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other to the extent that no technical contradiction occurs.

[0052] The configuration of the position variable mechanism 22 is not limited to the above embodiment, and may be changed as appropriate depending on the configuration of the electron beam irradiation device 10. For example, in the jack portion 32, the first bolt 41 may be omitted and the adjustment nut 43 may be rotatably provided on the bracket 35. Alternatively, the second bolt 42 may be omitted and the adjustment nut 43 may be rotatably provided on the support body 31. Even with this configuration, the support body 31 can be raised and lowered by rotating the adjustment nut 43.

[0053] The positions of the jack portion 32 and the guide portion 33 in the position variable mechanism 22 are not limited to those in the above embodiment, but can be changed as appropriate. The number of jack portions 32 in the position variable mechanism 22 is not limited to that in the above embodiment, and may be one or three or more.

[0054] The number of guide portions 33 in the position variable mechanism 22 is not limited to that in the above embodiment and may be two or more. Also, the guide portions 33 may be omitted from the position variable mechanism 22. That is, the guide portions 33 in the above embodiment may be modified to be jack portions 32.

[0055] In the guide portion 33 of the above embodiment, the pillar portion 46 is a bolt and the stopper portion 47 is a nut, but other than this, for example, the pillar portion 46 may not have a thread on the outer periphery, and a flange-shaped stopper portion 47 may be provided on part of the pillar portion 46 in the longitudinal direction.

[0056] In the position variable mechanism 22 of the above embodiment, it is also possible to rotate the adjustment nut 43 using a jig other than the operating jig 50, such as a wrench, without attaching the operating jig 50. In the position variable mechanism 22 of the above embodiment, the jack portion 32 may not include the operating jig 50, that is, the jack portion 32 may be configured to be unable to mount the operating jig 50.

[0057] The position variable mechanism 22 of the above embodiment may be configured to include one gear that meshes with each of the adjustment nuts 43, and by rotating this gear, all of the adjustment nuts 43 can be rotated simultaneously.

[0058] In the above embodiment, the jack portion 32 of the position variable mechanism 22 is a so-called screw jack, but it can also be changed to, for example, an air jack or a hydraulic jack. The configurations of the flange 34 and the bracket 35 are not limited to those in the above embodiment, and may be changed as appropriate depending on the configuration of the accelerator 13.

[0059] In the above embodiment, the accelerator 13 is disposed so that its axis L1 is aligned vertically, but it may alternatively be disposed so that its axis L1 is aligned horizontally, perpendicular to the vertical. In this case, the accelerator 13 and the transformer 21 are disposed side by side in the horizontal direction, and the transformer 21 is moved horizontally by the position-variable mechanism 22.

[0060] In the above embodiment, the electron beam irradiation device 10 is of the scanning irradiation type, but the present invention is not limited to this and can also be applied to electron beam irradiation devices other than the scanning irradiation type, such as an area irradiation type.

[0061] The embodiments and modifications disclosed herein are illustrative in all respects, and the present invention is not limited to these examples. That is, the scope of the present invention is defined by the claims, and it is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0062] 10...Electron beam irradiation device 13...Accelerator 20...Pressure vessel 21...Transformer 22... Variable position mechanism 26...Inspection hatch 31...Support 32...Jack section 35…Bracket 41...First bolt 42...Second bolt 43...Adjustment nut 50...Operating jig Eb…electron beam L1…Axis line

Claims

1. an accelerator for accelerating the electron beam; a transformer disposed on an extension of the axis of the accelerator and electrically connected to the accelerator; a position variable mechanism for changing the position of the transformer in the axial direction of the accelerator, Electron beam irradiation equipment.

2. The position variable mechanism includes a support body that supports the transformer and a jack portion that moves the support body. The electron beam irradiation device according to claim 1 .

3. the electron beam irradiation device includes a pressure vessel that houses the accelerator, the transformer, and the position variable mechanism; the pressure vessel has an inspection hatch on the side of the position variable mechanism, The jack unit is provided at a position closer to the inspection hatch than the axis of the accelerator. The electron beam irradiation device according to claim 2 .

4. The jack portion is a first bolt fixed to a bracket of the accelerator; a second bolt fixed to the support; an adjustment nut connected to each of the first bolt and the second bolt, The jack portion is configured so that the support body moves by rotating the adjustment nut. The electron beam irradiation device according to claim 2 .

5. The jack portion includes an operating jig that is detachably attached to the adjustment nut.

5. The electron beam irradiation device according to claim 4.

6. The transformer is disposed vertically above the accelerator. The electron beam irradiation device according to claim 1 .

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