Tool and slide and pivot assembly for a process module biasing assembly of a substrate processing system

Abstract

To provide a sliding and pivoting assembly that allows access to the interior of a process module and a processing chamber of a substrate processing system.SOLUTION: The sliding and pivoting assembly 806 includes a sliding torsion plate 808, one or more rails and bearings, a bias mounting plate 812, and a hinge assembly 810. The one or more rails and bearings are attached to the sliding torsion plate or processing chamber 802. A hinge assembly is attached to the sliding torsion plate and the bias mounting plate. The sliding torsion plate, the bias mounting plate and the hinge assembly slide laterally relative to the processing chamber via one or more rails and bearings. The bias mounting plate is allowed to pivot relative to the sliding torsion plate while the sliding and pivoting assembly is at least partially extended.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS: This application claims the benefit of U.S. Provisional Application No. 63 / 005,688, filed April 6, 2020. The entire disclosures of the above-referenced applications are incorporated herein by reference.

[0002] The present disclosure relates to a slide-and-pivot assembly that provides access to the interior of a process module and a processing chamber of a substrate processing system. [Background technology]

[0003] The background art description provided herein is intended to provide a general context for the present disclosure. Work by the presently named inventors, to the extent described in this background art section, as well as aspects of the description that may not qualify as prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] Substrate processing systems may be used to process substrates, such as semiconductor wafers. Examples of processes that may be performed on the substrate include, but are not limited to, chemical vapor deposition (CVD), atomic layer deposition (ALD), conductor etching, and / or other etching, deposition, or cleaning processes. The substrate may be placed on a substrate support, such as a pedestal or electrostatic chuck (ESC), in a processing chamber of the substrate processing system. During etching, a gas mixture including one or more precursors may be introduced into the processing chamber, and a plasma may be used to initiate a chemical reaction. Summary of the Invention

[0005] A sliding and pivoting assembly for a process module bias assembly of a substrate processing system is provided. The sliding and pivoting assembly includes a sliding torsion plate, one or more rails and bearings configured to mount to the sliding torsion plate or a processing chamber, a bias mounting plate configured to hold a portion of the process module for processing a substrate, and a hinge assembly attached to the sliding torsion plate and the bias mounting plate. The sliding torsion plate, bias mounting plate, and hinge assembly are configured to slide laterally relative to the processing chamber via the one or more rails and bearings. The bias mounting plate is configured to pivot relative to the sliding torsion plate while the sliding and pivoting assembly is at least partially extended.

[0006] In other features, the hinge assembly includes a first hinge member attached to the sliding torsion plate and a second hinge member attached to the bias mounting plate and pivotally connected to the first hinge member, wherein the bias mounting plate and the second hinge member are configured to pivot relative to the sliding torsion plate and the first hinge member while the sliding and pivoting assembly is in a fully extended position.

[0007] In other features, the sliding and pivoting assembly further includes a pin attached to the sliding torsion plate. The first hinge member is configured to rotate relative to the pin to compensate for sagging of the bias mounting plate. In other features, the hinge assembly includes one or more adjustment screws for adjusting the tilt angle of the first hinge member relative to the sliding torsion plate.

[0008] In other features, the sliding and pivoting assembly further includes an operational interlock mechanism attached to the sliding torsion plate, the operational interlock mechanism configured to hold the sliding torsion plate, the hinge assembly, and the bias mounting plate in an extended position relative to the processing chamber and to allow the sliding torsion plate, the hinge assembly, and the bias mounting plate to slide from the extended position to the retracted position when a predetermined amount of lateral force is applied to the bias mounting plate.

[0009] In other features, the operational interlock mechanism is configured to prevent the second hinge member and bias mounting plate from pivoting relative to the first hinge member and sliding torsion plate when in an engaged state, and to allow the second hinge member and bias mounting plate to pivot relative to the first hinge member and sliding torsion plate when in a disengaged state.

[0010] In other features, the operational interlock mechanism includes an attachment bar attached to the sliding torsion plate, a latch bar, and a spring configured to rotate the latch bar relative to the attachment bar to a disengaged position when the sliding torsion plate is in the extended position.

[0011] In other features, the motion interlock mechanism further includes a catch bracket attached to the second hinge member and a latch bar configured to engage the catch bracket when the bias mounting plate is in a fully non-rotating state and the sliding torsion plate is pushed in from its fully extended position, and to disengage from the catch bracket when the sliding torsion plate is extended to its fully extended position.

[0012] In other features, the operation interlock mechanism further includes a toggle stop bracket and a spring. The latch bar includes a stop flange or pin. The spring slides the toggle stop bracket into contact with the latch bar, thereby preventing rotation of the latch bar from the slide-locked position and preventing engagement of the latch bar with the catch bracket when the second hinge member is pivoted away from the closed position. When the second hinge member transitions to the closed position, it presses against the toggle stop bracket, thereby compressing the spring and moving the toggle stop bracket to allow rotation of the latch bar from the slide-locked position and engagement of the latch bar with the catch bracket.

[0013] In other features, the one or more rails include two rails mounted on the sliding torsion plate and configured to ride on bearing blocks mounted on the processing chamber. In other features, the hinge assembly includes a pivot lock assembly for locking the hinge assembly in a plurality of positions, including a closed position and an open position.

[0014] In other features, the sliding and pivoting assembly further includes a sliding locking assembly for locking the sliding torsion plate relative to the processing chamber in a plurality of positions including a pushed-in position and an extended position. In other features, the sliding locking assembly includes a plunger and a roller that extends into a notch in the sliding torsion plate. In other features, the bias mounting plate closes the open side of the processing chamber.

[0015] In other features, the slide and pivot assembly further includes a jackscrew assembly attached to the bias mounting plate and configured to remove the bias mounting plate from the processing chamber. In other features, the jackscrew assembly includes a jackscrew block attached to the bias mounting plate and a jackscrew extending into the jackscrew block and through the bias mounting plate and coupled to the processing chamber.

[0016] In other features, the jackscrew block has two positions relative to the jackscrew, including a first position associated with mounting the bias mounting plate to the processing chamber and a second position associated with jacking the bias mounting plate out of the processing chamber.

[0017] In other features, the slide-and-pivot assembly further includes an alignment pin and a bushing configured to receive the alignment pin, and the jackscrew is configured, when turned, to (i) pull or push the alignment pin into the bushing to align the bias mounting plate with respect to the processing chamber, and (ii) release the alignment pin from the bushing when the processing chamber is opened.

[0018] In other features, the slide-and-pivot assembly further includes one or more alignment pins attached to the processing chamber or the bias mounting plate, and one or more bushings that respectively receive the one or more alignment pins, which when received in the one or more bushings, align the bias mounting plate with respect to the processing chamber.

[0019] In other features, the hinge assembly includes one or more bearing assemblies.In other features, a substrate processing system is provided that includes a slide-and-pivot assembly, a processing chamber, and a substrate support attached to the bias mounting plate and configured to hold a substrate.

[0020] In other features, the sliding and pivoting assembly further includes a cam follower configured to be attached to the processing chamber and a bracket configured to be attached to the processing chamber. The one or more rails are attached to or integrally formed as part of the sliding torsion plate and include two intermediate members extending laterally along the upper and lower ends of the sliding torsion plate. The bracket forms a channel with the sidewall of the processing chamber and is configured to hold the sliding torsion plate from moving away from the processing chamber. The cam follower is disposed within the channel. The sliding torsion plate and the intermediate member slide relative to the processing chamber and the bracket via the cam follower.

[0021] The sliding and pivoting assembly further includes a track roller configured to be attached to the processing chamber and including a V-shaped groove, and a bracket configured to be attached to the processing chamber and forming a channel with a sidewall of the processing chamber. The bracket holds the sliding torsion plate from moving away from the processing chamber. One or more rails are attached to or integrally formed as part of the sliding torsion plate and slide within the V-shaped groove. The sliding torsion plate slides relative to the processing chamber via the one or more rails and track roller.

[0022] In other features, the slide-and-pivot assembly further includes a roller block. The roller block includes a first set of rollers and a second set of rollers cross-connected to the first set of rollers. The one or more rails are attached to a sliding torsion plate. The sliding torsion plate slides relative to the roller block via the first set of rollers and the second set of rollers.

[0023] In other features, the one or more rails include two rails disposed at upper and lower ends of the sliding torsion plate. Each of the two rails includes a V-shaped groove. A first set of rollers rolls along a first side of the V-shaped groove. A second set of rollers rolls along a second side of the V-shaped groove.

[0024] In other features, the one or more rails are attached to the sliding torsion plate via fasteners. In other features, the one or more rails are integrally formed as part of the sliding torsion plate.

[0025] In other features, the sliding and pivoting assembly further includes an end plate and a bearing block configured to mount on the processing chamber. The sliding torsion plate is C-shaped and attached to the end plate. The bearing block includes a bearing. The one or more rails include two rails mounted on the sliding torsion plate and configured to ride on the bearings of the bearing block.

[0026] In other features, the slide-and-pivot assembly further includes a slide configured to be attached to the processing chamber. The one or more rails are telescopic rails attached to the sliding torsion plate. A bearing is disposed between the one or more rails and the slide to enable the sliding torsion plate to slide relative to the slide and the processing chamber.

[0027] In other features, the sliding and pivoting assembly further includes a slide attached to the sliding torsion plate. The one or more rails are telescopic rails configured to be attached to the processing chamber. A bearing is disposed between the one or more rails and the slide to enable the sliding torsion plate to slide relative to the telescopic rails and the processing chamber.

[0028] In other features, the sliding and pivoting assembly further includes a slide assembly having V-grooved track rollers. The one or more rails are integrally formed as part of the sliding torsion plate. The slide assembly is configured to be mounted to a processing chamber. The one or more rails slide against the V-grooved track rollers.

[0029] In other features, one of the slide assemblies includes a sliding lock assembly configured to prevent sliding of the sliding torsion plate relative to the processing chamber. In other features, at least one of the slide assemblies includes a block having a groove in which one of the one or more rails slides. The block serves as a support for holding the sliding torsion plate.

[0030] In another feature, a slide-and-pivot assembly for a process module bias assembly of a substrate processing system is provided. The slide-and-pivot assembly includes a bearing block, a rail, a bias mounting plate, and a hinge assembly. The bearing block is configured to be mounted to a processing chamber and includes a bearing. The rail is configured to slide relative to the bearing block via the bearing. The bias mounting plate is configured to hold a portion of the process module for processing a substrate. The hinge assembly is mounted to the rail and the bias mounting plate. The bias mounting plate and the hinge assembly are configured to slide laterally relative to the processing chamber via the rail and the bearing. The bias mounting plate is configured to pivot relative to the rail while the slide-and-pivot assembly is in an at least partially extended state.

[0031] In other features, the rails include a first rail, a second rail, and a third rail. The second rail is disposed below the first rail. The third rail is disposed below the second rail. In other features, the rails are cylindrical rails. In other features, the rails include web rails. Each of the web rails extends along the longitudinal member and includes cylindrical upper and lower ends attached to the longitudinal member.

[0032] In other features, a tool is provided that includes a wafer transfer module, a first row of stations on a first side of the wafer transfer module, and a second row of stations on a second side of the wafer transfer module. The wafer transfer module is configured to load and unload substrates from the first row of stations and the second row of stations. Each station in the first row of stations and the second row of stations includes a processing chamber, a slide-and-pivot assembly attached to the processing chamber, and a bias assembly attached to the slide-and-pivot assembly and a substrate support and configured to pivot to retract and away from the processing chamber via the slide-and-pivot assembly.

[0033] In other features, each of the slide-and-pivot assemblies is configured to transition from a closed state to a withdrawn, pivoted state to remove a corresponding one of the substrate supports from a corresponding one of the processing chambers and pivot the corresponding one of the substrate supports away from the corresponding one of the processing chambers.

[0034] In other features, the wafer transport module includes a robot for transferring substrates to and from the first row of stations and portions of the second row of stations. In other features, the wafer transport module is attached to the equipment front end module and the load lock and transfers substrates from the equipment front end module and the load lock to the first row of stations and the second row of stations.

[0035] In other features, the robot is configured to transfer substrates between the buffer and portions of the first and second rows of stations. In other features, each of the first and second rows of stations includes a vertical arrangement of a radio frequency generator and a gas box, a top plate assembly, a corresponding one of the processing chambers, and a vacuum pump.

[0036] In other features, each of the sliding and pivot assemblies includes a sliding torsion plate, one or more rails and bearings configured to mount to the sliding torsion plate or a corresponding one of the processing chambers, a bias mounting plate configured to hold a portion of a process module for processing one of the substrates, and a hinge assembly attached to the sliding torsion plate and the bias mounting plate. The sliding torsion plate, bias mounting plate, and hinge assembly are configured to slide laterally relative to the corresponding one of the processing chambers via the one or more rails and bearings. The bias mounting plate is configured to pivot relative to the sliding torsion plate while the sliding and pivot assembly is in an at least partially extended state.

[0037] In other features, each hinge assembly of the slide-and-pivot assembly includes a first hinge member attached to a corresponding one of the sliding torsion plates and a second hinge member attached to a corresponding one of the bias mounting plates and pivotally connected to the first hinge member, wherein the corresponding one of the bias mounting plates and the second hinge member are configured to pivot relative to the corresponding one of the sliding torsion plates and the first hinge member while the slide-and-pivot assembly is in an at least partially extended state.

[0038] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief explanation of the drawings]

[0039] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein:

[0040] [Figure 1] FIG. 1 is a perspective view of two tool portions including an example slide-pivot assembly according to the present disclosure.

[0041] [Figure 2] FIG. 2 is a top view of a portion of one of the tools of FIG.

[0042] [Figure 3] FIG. 3 is a side view of a portion of one of the tools of FIG.

[0043] [Figure 4] FIG. 4 is a top view of a substrate processing station including a slide-and-pivot assembly according to the present disclosure.

[0044] [Figure 5] FIG. 5 is a perspective view of a substrate processing system illustrating a fully docked slide-and-pivot assembly according to the present disclosure.

[0045] [Figure 6] FIG. 6 is a perspective view of the substrate processing system of FIG. 5 illustrating a slide-and-pivot assembly in a fully undocked (or fully rotated) position according to the present disclosure.

[0046] [Figure 7] FIG. 7 is a top view of a process module bias assembly illustrating a fully extended, non-rotating (or non-pivoting) state in accordance with the present disclosure.

[0047] [Figure 8] FIG. 8 is a top view of the process module bias assembly of FIG. 7 illustrating the pivot angles of rotation associated with a fully undocked state according to the present disclosure.

[0048] [Figure 9] FIG. 9 is a top view of the processing chamber and process module bias assembly illustrating an intermediate pivot state.

[0049] [Figure 10] 10 is a perspective view of a portion of the processing chamber and process module bias assembly of FIG. 9 illustrating the sliding lock locked for a fully docked state according to the present disclosure.

[0050] [Figure 11] 11 is a perspective view of a portion of the processing chamber and process module bias assembly of FIG. 9 illustrating the sliding lock locked to a fully extended position according to the present disclosure.

[0051] [Figure 12] FIG. 12 is a side perspective view of the slide-and-pivot assembly of FIG. 9 in accordance with the present disclosure.

[0052] [Figure 13] 13 is a side perspective view of a sliding torsion plate and adjustable hinge assembly for the slide-and-pivot assembly of FIG. 9;

[0053] [Figure 14] 14 is a side perspective view of a portion of the slide and pivot assembly of FIG. 9 including the sliding torsion plate, guide rail, bearing block, pivot lock assembly, and slide lock assembly.

[0054] [Figure 15] FIG. 15 is a cross-sectional front view of the sliding torsion plate, bearing block, and pivot lock assembly of FIGS.

[0055] [Figure 16] FIG. 16 is a side view of a sliding lock assembly according to the present disclosure.

[0056] [Figure 17]FIG. 17 is a top cross-sectional view of a pivot lock assembly in accordance with the present disclosure.

[0057] [Figure 18] FIG. 18 is a perspective view of a jackscrew assembly in accordance with the present disclosure.

[0058] [Figure 19] 19 is a side cross-sectional view of the jackscrew assembly of FIG. 18. FIG.

[0059] [Figure 20] 20 is a perspective view of a portion of the slide-and-pivot assembly of FIG. 9 including a sliding torsion plate, a hinge assembly, and a slide-and-pivot interlock mechanism according to the present disclosure.

[0060] [Figure 21] 21 is a bottom view of the slide-pivot interlock mechanism of FIG. 20. FIG.

[0061] [Figure 22] 22 is an interior view of a portion of the slide-and-pivot assembly of FIG. 20 illustrating the adjustable catch member while the corresponding hinge assembly is in a non-rotating state.

[0062] [Figure 23] 23 is an interior perspective view of a portion of the slide-and-pivot assembly of FIG. 9 illustrating a toggle stop bracket while the corresponding hinge assembly is in a rotated position.

[0063] [Figure 24] FIG. 24 is a cross-sectional view of a bearing assembly for a hinge assembly according to the present disclosure.

[0064] [Figure 25] 25 is a cross-sectional perspective view of the bearing assembly of FIG. 24 illustrating the tapered roller bearing with locking nut and washer and the thrust bearing between the hinge halves.

[0065] [Figure 26] FIG. 26 is a front view of a slide and pivot assembly illustrating an example of a sag angle due to the weight of a corresponding process module bias assembly.

[0066] [Figure 27] FIG. 27 is a side cross-sectional view of an alignment pin and receiving bushing in accordance with the present disclosure.

[0067] [Figure 28] FIG. 28 is a front perspective view of the processing chamber of FIG. 9 including alignment pins according to the present disclosure.

[0068] [Figure 29] FIG. 29 is a perspective view of another hinge assembly in accordance with the present disclosure.

[0069] [Figure 30] 30 is a front view of the hinge assembly of FIG. 29. FIG.

[0070] [Figure 31] FIG. 31 is a perspective view of a portion of another slide-and-pivot assembly in accordance with the present disclosure.

[0071] [Figure 32] 32 is a perspective view of a portion of the slide and pivot assembly of FIG. 31 illustrating disengagement of the latch bar and adjustable catch in accordance with the present disclosure.

[0072] [Figure 33] 33 is a perspective view of a portion of the slide and pivot assembly of FIG. 31 illustrating engagement of a latch bar with an adjustable catch according to the present disclosure.

[0073] [Figure 34] 34 is a side view of a portion of the slide and pivot assembly of FIG. 31 illustrating a torsion spring according to the present disclosure.

[0074] [Figure 35] 35 is a bottom view of a portion of the slide and pivot assembly of FIG. 31 illustrating the latch bar in an engaged state according to the present disclosure.

[0075] [Figure 36] 36 is a perspective view of a portion of the hinge assembly of the slide-and-pivot assembly of FIG. 31 illustrating a latch bar in an engaged, non-rotating state in accordance with the present disclosure.

[0076] [Figure 37] 37 is a perspective view of a portion of the hinge assembly of the slide-and-pivot assembly of FIG. 31 illustrating a disengaged pivoted state of the latch bar in accordance with the present disclosure.

[0077] [Figure 38] 38 is a top view of a portion of the hinge assembly of the slide-and-pivot assembly of FIG. 31 showing a latch bar in an engaged, non-rotated state in accordance with the present disclosure.

[0078] [Figure 39] 39 is a top view of a portion of the hinge assembly of the slide-and-pivot assembly of FIG. 31 illustrating a disengaged pivoted state of the latch bar in accordance with the present disclosure.

[0079] [Figure 40] FIG. 40 is a side cross-sectional view of another jackscrew assembly illustrating the jackscrew block in the ON (IN) position and the jackscrew in a locked state in accordance with the present disclosure.

[0080] [Figure 41] FIG. 41 is a side cross-sectional view of the jackscrew assembly of FIG. 40 illustrating the jackscrew block in the OFF (OUT) position.

[0081] [Figure 42] FIG. 42 is a side cross-sectional view of the jackscrew assembly of FIG. 40 illustrating the jackscrew block in the ON position and the jackscrew extended.

[0082] [Figure 43] FIG. 43 is a perspective view of the jackscrew and corresponding components of FIG. 40.

[0083] [Figure 44] FIG. 44 is a front perspective view of a jackscrew block including a jackscrew wear component according to the present disclosure.

[0084] [Figure 45] 45 is a rear perspective view of the jackscrew block of FIG. 44; FIG.

[0085] [Figure 46] FIG. 46 is a side cross-sectional view of a jackscrew assembly including the jackscrew block of FIG. 44 in accordance with the present disclosure.

[0086] [Figure 47] FIG. 47 is a front perspective view of a processing chamber including a portion of another slide-and-pivot assembly including a cam follower in accordance with the present disclosure.

[0087] [Figure 48] 48 is an end view of a portion of the slide and pivot assembly of FIG. 47. FIG.

[0088] [Figure 49] FIG. 49 is a side perspective view of a processing chamber including a portion of another slide-and-pivot assembly including a torsion plate having tracks for V-grooved cam followers in accordance with the present disclosure.

[0089] [Figure 50] 50 is an end view of a portion of the slide and pivot assembly of FIG.

[0090] [Figure 51] FIG. 51 is a perspective view of a processing chamber including a slide-and-pivot assembly illustrating the direction of torsional and normal stiffness of a torsion plate according to the present disclosure.

[0091] [Figure 52] FIG. 52 is an end view of a portion of the slide and pivot assembly of FIG. 51 illustrating space constraints according to the present disclosure.

[0092] [Figure 53] FIG. 53 is a side perspective view of a processing chamber including another slide-and-pivot assembly having cylindrical rails and corresponding rail guides in accordance with the present disclosure.

[0093] [Figure 54] FIG. 54 is a perspective view of a portion of another slide and pivot assembly including a web rail and corresponding rail guide in accordance with the present disclosure.

[0094] [Figure 55] FIG. 55 is a perspective view of a portion of another slide and pivot assembly including a torsion plate with upper and lower edge roller guides and corresponding roller blocks in accordance with the present disclosure.

[0095] [Figure 56] 56 is another perspective view of one of the edge roller guides and corresponding roller block of FIG. 55. FIG.

[0096] [Figure 57] 57 is a side view of the edge roller guide and roller block of FIG. 56. FIG.

[0097] [Figure 58] FIG. 58 is a side view of a torsion plate having integrally formed edge roller guides and roller blocks in accordance with the present disclosure.

[0098] [Figure 59] FIG. 59 is a perspective view of a processing chamber including another slide-and-pivot assembly including a C-shaped torsion plate with end caps and support rails that slide against open bearing blocks in accordance with the present disclosure.

[0099] [Figure 60] 60 is a side perspective view of the support rail and open bearing block of FIG. 59. FIG.

[0100] [Figure 61] FIG. 61 is an interior perspective view of a portion of another slide and pivot assembly including a telescopic rail and slide in accordance with the present disclosure.

[0101] [Figure 62] 62 is a side view of a portion of the slide and pivot assembly of FIG. 61. FIG.

[0102] [Figure 63] FIG. 63 is a side perspective view of a portion of another slide and pivot assembly including a torsion plate with upper and lower edge rails for a slide assembly with V-grooved track rollers.

[0103] In the drawings, reference numbers may be reused to identify similar and / or identical elements. DETAILED DESCRIPTION OF THE INVENTION

[0104] A semiconductor fabrication (fab) room may include multiple tools, each containing numerous substrate processing stations (hereinafter referred to as "stations"). Each station may be configured to perform, for example, a conductor etch process, a dielectric etch process, or other substrate processing. Space within a fab room is limited, and therefore the space available for accessing each tool, for example, to service and / or maintain the station, is limited. The tool's stations may be arranged in a star pattern or a linear pattern. In a star pattern, the stations are arranged around a centrally located wafer transport module that includes a robot that moves substrates from a load lock chamber to and from each substrate processing station. This station arrangement provides some access space between stations, but the station density is lower than that of a linear pattern. In a linear pattern, the stations are arranged side-by-side, forming two rows of stations, one on each side of the wafer transport module, and may operate in atmosphere or vacuum. While a linear arrangement allows for more stations to be placed within a dedicated space, it also limits access to the sides of the stations.

[0105] 1 and 2 show portions of two tools 100, 102 (one shown as 100 in solid lines and the other as 102 in dashed lines) arranged side by side in a fab room. Each of the tools includes two rows of stations (one row shown for each tool). The stations are located adjacent to a wafer transfer module (not shown in FIG. 1 for clarity). There is limited space between tools 100 and 102. By way of example, the width W of the passage between tools 100 and 102 may be small. This provides a minimum space between tools 100 and 102 to open the processing chambers of the stations and gain access to the interior of the process modules and corresponding processing chambers.

[0106] An example described herein includes a slide-and-pivot assembly for a station that allows the station's process module bias assembly to be retracted and pivoted from a corresponding processing chamber, allowing service or maintenance to be performed in the aisle. The slide-and-pivot assembly is configured to repeatedly retract the process module bias assembly from a fully docked state to a fully undocked state and return it to the exact same fully docked position it was previously docked in. In one example, the slide-and-pivot assembly can return the process module bias assembly to within ±25 micrometers (μm, referred to as microns) of its last fully docked state. The slide-and-pivot assembly is configured to handle and compensate for heavy loads on the process module bias assembly. An example total weight of the process module bias assembly and corresponding slide-and-pivot assembly is 300 kilograms (kg). The slide-and-pivot assembly provides ease of use and assembly.

[0107] The tools 100, 102 include a station having a FOUP (front opening unified pod) 104, an EFEM (equipment front end module) and load lock 106, a radio frequency generator 107 and a gas box 108, and a power lockout and tagout system 110. The station further includes a process module bias assembly 112 including respective slide and pivot assemblies, examples and corresponding parts of which are shown in Figures 4-30.

[0108] Each of the stations, either alone or in combination, may be referred to as a substrate processing system. Each of the stations may be used to etch substrates using, for example, radio frequency (RF) plasma. Each station includes a processing chamber, such as an inductively coupled plasma (ICP) chamber or a conductively coupled plasma (CCP) chamber. The stations may perform, for example, conductive etching or dielectric etching processes.

[0109] FIG. 2 illustrates a portion of one of the tools 100, 102 of FIG. 1. The tool includes a FOUP 104, an EFEM and load lock 106, a station 109, and a power lockout and tagout system 110. The tool has an overall footprint 220. The tool further includes a wafer transport module 222 for loading and unloading substrates into and from the station 109. The wafer transport module 222 may include robots 224, 226 and a buffer 228 for temporary storage of wafers. The robots 224, 226 transport wafers between the station 109 and the buffer 228. While FIG. 2 shows the buffer 228 located between the robots 224 and 226, it may be located anywhere in the wafer transport module 222. In other embodiments, the buffer 228 may be located outside the wafer transport module 222 (e.g., coupled to the station 109 or the load lock 106).

[0110] FIG. 3 shows a portion of one of the tools 100, 102 of FIG. 1. The tool includes a FOUP 104, an EFEM and load lock 106, a station 109, and a power lockout and tagout system 110. The station includes an RF generator and gas box (collectively shown as 300) and a process module bias assembly 112 having a slide-and-pivot assembly. The RF generator may provide RF power to electrodes in the station's substrate support. The gas box supplies gas to the station's processing chamber. Also shown is a wafer transport module 222.

[0111] Substrates to be loaded and processed are stored in FOUP 104. Substrates are transferred from FOUP 104 through EFEM and load lock 106 to station 109 via respective loading ports 302. An RF generator and gas box 300 is located above station 109 and provides RF power and process gases to the process modules of station 109.

[0112] 4 illustrates a substrate processing station 400 (including a slide-and-pivot assembly 402), which is an example of station 109 in FIGS. 2-3 . The slide-and-pivot assembly 402 is connected to a processing chamber 404 and a process module bias assembly 406. The slide-and-pivot assembly 402 allows the process module bias assembly 406 to be extended away from the processing chamber 404 and pivoted to a predetermined angle relative to the front surface of the processing chamber 404. The process module bias assembly 406 includes a housing 408 and a portion 410 of a process module that includes a process bias bowl 412. In addition to the process bias bowl 412, the process module may also include an electrostatic chuck and / or other substrate support, as well as a top plate assembly, an example of which is shown in FIG. 6 .

[0113] An example width W of the aisle between station 400 and the opposing station is shown, illustrating that the process module bias assembly 406 can be extended and pivoted into the aisle. This provides an open space 414 to the right of the slide-and-pivot assembly 402 for technicians to access the interior of the process bias bowl 412 and processing chamber 404 for service and maintenance purposes, including wet cleaning. The interior of the process bias bowl 412 and processing chamber 404 are accessed unobstructed from the right side of the process module bias assembly 406. For example, slides, rails, and / or other components are not in the open space 414 and / or do not obstruct technicians from accessing the interior of the processing chamber 404. Although the process module and bias assembly 406 is shown pivoting to the left, the slide-and-pivot assembly may be configured and mounted to the right side of the processing chamber such that the process module and bias assembly can be extended and pivoted to the right relative to the processing chamber.

[0114] 5 and 6 show a substrate processing system 500 illustrating a slide-and-pivot assembly 502 in a fully docked position 504 and a fully undocked position 506. The substrate processing system 500 includes a vertical arrangement of an RF generator and gas box 508, a top plate assembly 509, a processing chamber 512, and a turbo pump 513 for evacuating the processing chamber 512. The processing chamber 512 rests on a stand 510 and includes a process module bias assembly 514. The process module bias assembly 514 includes a housing 516 and a process module bias bowl 518 that are attached to a bias mounting plate 520 of the slide-and-pivot assembly 502. A portion 521 of a substrate support, such as an electrostatic chuck (ESC), is shown coupled to the process bias bowl 518. The top plate assembly 509 is shown above the processing chamber 512. The process module bias assembly 514 includes circuitry for supplying RF and / or bias power to electrodes of the substrate support and / or power to heating elements of the substrate support, and may include coolant channels for supplying coolant to cool the substrate support. In operation, a substrate is received from the backside of the processing chamber 512 through the access port 522 and positioned on the substrate support.

[0115] The slide-and-pivot assembly 502 is mounted to the wall of the processing chamber 512 and is configured to withstand the weight of the process module bias assembly 514, including the weight of the slide-and-pivot assembly, for a total assembly mass of, for example, 300 kg. The slide-and-pivot assembly 502 is configured to handle more than a predetermined minimum number of undocking, redocking, and open / close cycles per year (e.g., 100 cycles per year) for a predetermined minimum number of years (e.g., 10 years). The slide-and-pivot assembly is configured to provide a repeatable closed, fully docked position. The slide-and-pivot assembly is configured to be within, for example, 25 μm of the initial closed, fully docked position each time the corresponding processing chamber is opened and then returned to a closed state. This allows repeated undocking and redocking without the need to recalibrate parameters related to the substrate support position.

[0116] 7 and 8 show the process module bias assembly 600 and illustrate the rotational pivot angles associated with a fully extended, unrotated state 602 and a fully undocked state 604. The fully extended, unrotated state 602 is an intermediate state between the fully docked and fully undocked states. The fully undocked state 604 refers to when the process module bias assembly 600 has fully rotated, resulting in the housing 606 and process module bias bowl 608 being fully pivoted away from the processing chamber 610. While in the fully undocked state, a technician 708 can access the interior of the processing chamber 610 while standing and / or kneeling, as shown. The process module bias assembly 600 can have a predetermined maximum sliding force F1, which may have units of measure in pounds-force (lbf), and a predetermined maximum pivot (or rotation) force F2, which may also be measured in units of measure in lbf.

[0117] FIG. 9 illustrates a portion 800 of a processing chamber 802, including a process module bias assembly 805 (shown in FIG. 10) with a slide-and-pivot assembly 806. The processing chamber 802 and slide-and-pivot assembly 800 may be mounted in any of the stations described above and may have similar configurations to any of the processing chambers and slide-and-pivot assemblies described above. The slide-and-pivot assembly 806 includes a sliding torsion plate 808, a hinge assembly 810, and a bias mounting plate 812. A pivot lock assembly 814 is shown attached to the hinge assembly 810. The pivot lock assembly 814, described further below, locks the bias mounting plate 812 in both the non-pivoted and fully pivoted positions. The bias mounting plate 812 provides a bias bowl mounting function.

[0118] The sliding and pivoting assembly 806 is shown in an intermediate pivot position between the non-pivoted and fully pivoted positions. The sliding and pivoting assembly 806 is shown at an 80° pivot angle relative to the front wall 902 of the processing chamber 802. This would be a worse case bearing load position for the bearings in the bearing blocks of the sliding and pivoting assembly 806. The bearing blocks are shown in FIG. 14. The sliding torsion plate 808 accommodates offset loads and provides internal torsion support. The sliding torsion plate 808 provides stiffness to support the cantilever load of the bias assembly weight, limiting both vertical and torsional deflection. The resulting structure is more space-efficient than designs using larger rails without torsion plates, thereby allowing for shorter spacing between processing chambers and resulting in a smaller system footprint.

[0119] FIG. 10 illustrates a portion 1000 of a processing chamber 802 and corresponding process module bias assembly 805, including the slide-and-pivot assembly 806 of FIG. 9 . The process module bias assembly 805 includes a housing 1002. A pivot lock actuator 1004, along with a bias mounting plate 812, secures the housing 1002 to the processing chamber 802 or allows it to pivot away from the processing chamber 802. The bias mounting plate 812 is attached to the underside of the housing 1002. The pivot lock actuator 1004 may be a “pull tab” that pulls a cable in a cable assembly (shown in FIG. 12 ) to release a pivot lock plunger in the pivot lock assembly 814. The slide-and-pivot assembly 806 includes a slide lock assembly 1001 having a slide lock 1003, which is shown in a locked state while the slide-and-pivot assembly 806 is in a fully docked state. The slide lock actuator 1006 allows the housing 1002, along with the bias mounting plate 812, to slide horizontally linearly away from the process chamber 802. The slide lock actuator 1006 may be a "pull knob" that pulls a cable in a cable assembly 1008 to release the slide lock plunger of the slide lock assembly 1001. Alternatively, the slide lock plunger may be actuated by electrical or pneumatic control. The pivot lock plunger of the pivot lock assembly 814 may also alternatively be actuated by electrical or pneumatic control.

[0120] FIG. 11 shows a portion 1100 of the processing chamber 802 and corresponding process module bias assembly 805, including the slide-and-pivot assembly 806, illustrating the slide lock 1003 locked in a fully extended position. The slide-and-pivot assembly 806 includes a slide torsion plate 808 and a hinge assembly 810. The slide lock 1003 includes a plunger 1102 and a wheel 1104 that presses into notches (one notch 1106 is shown) in the slide torsion plate 808 for different slide lock states of the slide-and-pivot assembly 806. The wheel 1104 rotates on a pin 1107. Process module bias assembly devices and components 1110 are disposed within the housing 1002 and may include an RF source, a bias voltage source, a power supply, power cables, conductive lines, coolant lines, gas lines, etc. It may include a pull handle 1112 for extending the process module bias assembly 805.

[0121] 12 shows slide and pivot assembly 806, including sliding torsion plate 808, hinge assembly 810, and bias mounting plate 812, but not housing 1002. Hinge assembly 810 is released from a locked state by pivot lock actuator 1004 of pivot lock assembly 814. Pivot lock actuator 1004 is connected to pivot lock plunger 1210 via a cable of cable assembly 1212.

[0122] The bias mounting plate 812 is secured to the front of the processing chamber 802 via one or more closure fasteners (e.g., bolts or screws) 1216 (shown in FIG. 26 ) that extend through one or more slots or holes 1218 in the bias mounting plate 812. The closure fasteners 1216 are installed after the slide-and-pivot assembly 806 is returned to its closed, fully retracted (or fully docked) state.

[0123] The slide and pivot assembly 806 may include a jackscrew assembly 1220 including a jackscrew block 1222, a block fastener 1224, and a jackscrew 1226. Elements of the jackscrew assembly 1220 are also shown in FIGS. 18-19. The jackscrew block 1222 includes a slot 1223 and slides on the block fastener 1224 between an IN position and an OUT position. In some embodiments, the IN position is the default position. The jackscrew block 1222 is shown in the IN position in FIG. 18. The block fastener 1224 is a shoulder screw and may not tighten the jackscrew block 1222. In one embodiment, the jackscrew block 1222 is always free to fall under its own weight due to the weight of the jackscrew block 1222. The jackscrew 1226 extends through the bias mounting plate 812 and is secured to the front wall 1225 of the processing chamber 802. While the jackscrew block 1222 is in the IN position, the jackscrew 1226 can be secured (or threaded) to the wall 1225 of the processing chamber 802. While in the OUT position, the jackscrew 1226 can be rotated CCW (or partially unscrewed) and moved away from the front wall 1225, applying pressure to the jackscrew block 1222 to disengage one or more alignment pins, such as alignment pin 1244.

[0124] Pivot lock assembly 814 includes a block 1230 attached to hinge assembly 810, a plunger 1210, a bracket 1232, and a spring 1234. Bracket 1232 holds a cable assembly 1212 for plunger 1210 in place relative to block 1230. A portion of pivot lock assembly 814 is shown in FIG.

[0125] The bias mounting plate 812 may include one or more holes for alignment pins. Two holes 1240, 1246 and alignment pins 1242, 1244 are shown. An example of alignment pins is shown in FIG. 27 . The alignment pins 1242, 1244 are used to align the bias mounting plate 812 with respect to the processing chamber 802 when docking the slide-and-pivot assembly 806. The alignment pins 1242, 1244 may be mounted on the processing chamber 802, and corresponding bushings may be mounted on the bias mounting plate 812. In one embodiment, the alignment pins 1242, 1244 are mounted on the bias mounting plate 812, and corresponding bushings are mounted on the processing chamber 802. A jackscrew 1226 may be used to move the bias mounting plate 812 on and off the alignment pins 1242, 1244. The jackscrew 1226 may, for example, be tightened to insert the ends of the alignment pins 1242, 1244 into corresponding bushings in the bias mounting plate 812. The jackscrews may not be torqued down, but rather may be used simply to engage the alignment pins into their corresponding bushings. The closure fasteners described above are used to close the gap between the bias mounting plate 812 and the processing chamber 802 after the alignment pins are at least partially inserted into their bushings via the jackscrew 1226. Operation of the jackscrew assembly 1220 is further described below with respect to Figures 18-19.

[0126] Figure 13 shows a sliding torsion plate 808 and adjustable hinge assembly 810 for the slide-and-pivot assembly 806 of Figure 9. The slide-and-pivot assembly 806 includes a sliding torsion plate 808 and a hinge assembly 810. A slide lock actuator 1006 actuates a slide lock plunger 1102. A pivot lock actuator 1004 releases a plunger 1210 of a pivot lock assembly 814.

[0127] Hinge assembly 810 includes sliding torsion plate member 1300 and bias mounting plate member 1302. Members 1300, 1302 (also referred to as hinge members) are "U-shaped." Sliding torsion plate member 1300 is connected to the front end of sliding torsion plate 808 via fasteners (e.g., bolts or screws) 1304 and pivots about alignment pins fixed to the torsion plate. Bias mounting plate member 1302 is attached to one end of bias mounting plate 812 (shown in FIG. 12) via fasteners (e.g., bolts or screws) 1306 (one of which is not shown). Bias mounting plate member 1302 is attached to and pivots relative to sliding torsion plate member 1300 via a central pivot member and / or fasteners, such as fastener 1308. Other central pivot members are shown in FIGS. 24-25. The tilt angle of the hinge assembly 810 relative to the sliding torsion plate 808 may be adjusted via fasteners (e.g., bolts or screws) 1310 (sometimes referred to as hinge adjustment fasteners). The tilt angle may be adjusted to compensate for sag due to the weight of the process module biasing assembly and the slide-and-pivot assembly 806. An example of a sag angle is shown in FIG. 26. When the bias mounting plate 812 is pulled away from the processing chamber 802, it may rotate clockwise due to the weight of the process module biasing assembly and the slide-and-pivot assembly 806, causing the sliding torsion plate 808 to twist. The fasteners 1310 may be turned inward or outward to rotate the bias mounting plate 812 in a CCW manner about the pivot point (represented in FIG. 26 by the pivot point 1312 and CCW rotation arrow 1314) to compensate for the clockwise sag.

[0128] 12 and 14, there is shown a portion 1400 of the sliding torsion plate 808, a guide rail system including a guide rail 1402 and a bearing block 1404, the sliding and pivot assembly 806, the pivot lock assembly 814, and the sliding lock assembly 1001. The guide rail 1402 is attached to the inside of the sliding torsion plate 808. In one embodiment, the guide rail 1402 is implemented as a profile ball rail. The pivot lock assembly 814 includes a pivot plunger 1210, a cable assembly 1212, and a pivot lock actuator 1004. The sliding lock assembly 1001 includes a sliding plunger 1102, a cable assembly 1008, and a sliding lock actuator 1006. The bearing block 1404 includes a bearing (e.g., a ball bearing) that rides in a groove 1406 in the guide rail 1402. The grooves are on both the top and bottom of the guide rail 1402. Bearing block 1404 is secured to the sidewall of a processing chamber (e.g., processing chamber 802 of FIG. 9) via fasteners that extend through holes in bearing block 1404. When actuated, sliding torsion plate 808 and guide rails 1402 are moved relative to bearing block 1404.

[0129] The guide rail system has a high load capacity, low friction, and can accommodate large weights. The load range of the guide rail system is the same for both extending and retracting the sliding torsion plate 808. Although the rail 1402 is shown mounted on the sliding torsion plate 808 and the bearing block 1404 is shown mounted to the process chamber wall, the sliding torsion plate 808 can also be mounted to the process chamber wall and the bearing block 1404 can be mounted on the sliding torsion plate 808. Mounting the bearing block 1404 to the process chamber wall is done to reduce sag because the distance from the bearing block 1404 to the load center of mass decreases when the sliding and pivot assembly is pushed closed, resulting in a shorter lever arm and reducing the sag effect.

[0130] The sliding stop block 1420 may be attached to a sidewall of the processing chamber 802 and limit the movement of the sliding torsion plate 808 along the guide rail 1402. A corresponding stop member 1422 may be fixed to the sliding torsion plate 808 and may face the sliding stop block 1420 depending on the state of the sliding-pivot assembly 806. The sliding stop block 1420 may be in contact with the stop member 1422, for example, when in the fully extended (or open) state. Additional sliding stop blocks and additional stop members may be provided for the fully docked (or closed) state. The sliding stop block 1420 and stop member 1422 may include a damper. An example of a damper is shown in FIG. 13 as a round disk 1425. Other dampers may also be utilized.

[0131] 15 shows the sliding torsion plate 808, guide rail 1402, bearing block 1404, and sliding lock assembly 1001 of FIGS. 9-14. Guide rail 1402 is attached to the inside of sliding torsion plate 808. Bearing block 1404 rides on guide rail 1402. Sliding lock assembly 1001 includes plunger 1210, bracket 1232, and plunger housing 1500.

[0132] 16 shows a sliding lock assembly 1600, an example of the sliding lock assembly 1001 of FIG. 11, installed in a processing chamber 802. The sliding lock assembly 1600 includes a sliding lock housing 1601, a plunger 1102, and a wheel 1104 that extends into a notch in the sliding torsion plate 808. A bracket 1602 is attached to the housing 1601 and holds the cable assembly 1008 relative to the housing 1601.

[0133] 17 shows a pivot lock assembly 814 attached to a bias mounting plate member 1302 of a hinge assembly 810. The hinge assembly 810 also includes a sliding torsion plate member 1300 attached to a sliding torsion plate 808. The hinge assembly 810 includes a fastener 1308 or other central pivot member, such as a pivot shaft or pin. Two locking positions for the plunger 1210 are shown, represented by channels 1700, 1702 in a pivot block 1704 attached to the sliding torsion plate member 1300. The plunger 1210 is shown in channel 1700, which is associated with a non-rotated state. The plunger 1210 may be withdrawn from channel 1700, the bias mounting plate member 1302 may be rotated clockwise (CW) about the fastener 1308, and the plunger 1210 may then extend into channel 1702. The channel 1702 is associated with an open position (or fully rotated position). The biased mounting plate member 1302 pivots to a fully open position, referred to as the service position, where the pivoting locking plunger 1210 engages the channel 1702. The pivoting locking plunger may be actuated by a pull cable (as shown in FIG. 13) or by an electrical or pneumatic control.

[0134] 18-19 show a screw jack assembly 1220 including a screw jack block 1222, a block fastener 1224, and a screw jack 1226. The screw jack block 1222 includes a slot 1223 and slides on the block fastener 1224 between an IN position and an OUT position. The IN and OUT positions correspond, respectively, to (i) the screw jack 1226 extending through the bias mounting plate 812 and being secured to the processing chamber 802, and (ii) the screw jack 1226 being used as a jack to release the bias mounting plate 812 from the processing chamber 802. While in the IN position, the head of the screw jack 1226 can extend further into the screw jack block 1222 than when in the OUT position. The screw jack 1226 includes a screw head 1800, a stem 1801, a screw head wear cap 1802, and a washer 1804. The jack screw block 1222 includes a stop 1810 for the OUT position. The screw head wear cap 1802 presses against the stop 1810 when the jack screw block 1222 is in the OUT position and the jack screw 1226 is used to release the alignment pin from its corresponding bushing as described above. The stop 1810 is a rigid, integral part of the jack screw block 1222 that prevents the head 1800 of the jack screw 1226 from moving into the jack screw block 1222. The stem 1801 may be threaded and may be threaded into a threaded bushing 1812 inserted into the process chamber wall 1814. Another example of a jack screw assembly is further shown in FIGS. 44-46. In an alternative embodiment, the screw head wear cap 1802 is not included, and instead a wear element is inserted in the BLOCK OUT position covering the screw head contact area (i.e., stop area) of the screw jack block 1222. In yet another alternative embodiment, the screw head wear cap 1802 is not included, and the screw jack block 1222 is formed from a low friction, low wear material. A similar example is shown in Figures 40-43. This embodiment utilizes a self-retaining wear cap with a stepped washer of both a low friction and low wear material.

[0135] 20-23 show a portion 2000 of the slide-and-pivot assembly 806, including the sliding torsion plate 808, the hinge assembly 810, and the slide-and-pivot interlock mechanism 2002. The slide-and-pivot interlock mechanism 2002 is used to hold the slide-and-pivot assembly in a fully extended position. The slide-and-pivot interlock mechanism 2002 prevents accidental damage to the corresponding process module bias assembly and / or processing chamber, for example, if a user attempts to dock the bias assembly when the corresponding bias mounting plate is not in the fully non-rotated position. The slide-and-pivot interlock mechanism 2002 also prevents pivoting to the fully non-rotated position, for example, unless the slide is in the fully extended, extended / open position.

[0136] The slide-pivot interlock mechanism 2002 includes an attachment bar 2003, a latch bar 2004, a spring (an example of a torsion spring is shown in FIGS. 34-35), a stop strip 2008, an adjustable catch bracket 2010, and a toggle stop bracket 2012. The spring may be a torsion spring or another type of spring, and may be located away from the center of rotation of the latch bar. When in the fully extended position, a bearing roller 2014 on the latch bar 2004 moves relative to and past the stop strip 2008, allowing the spring to rotate the latch bar 2004 and release the hooked end 2016 of the latch bar 2004 from the adjustable catch bracket 2010. In an alternative embodiment, the function of the attachment bar 2003 is an integral part of the torsion plate 808, and the torsion plate function can be achieved using a tension or compression spring.

[0137] A torsion spring is disposed between the attachment bar 2003 and the latch bar 2004 and is coiled around a torsion pin 2018. The latch bar 2004 includes two slots 2020 that correspond to a pair of pins 2022. The rotation limits of the latch bar 2004 are defined by the movement of the pins 2022 within the slots 2020. The ends 2024 of the stop strips 2008 are angled to allow the bearing rollers 2014 to roll along the ends 2024. The ends 2024 may be angled so that the slide-and-pivot assembly 806 remains in the fully extended position and as long as a predetermined amount of lateral force is not applied on the process module bias assembly to push the slide-and-pivot assembly 806 into the fully retracted position. When a predetermined amount of force is applied, the bearing roller 2014 rotates, rotating the latch bar 2004 against the force of the torsion spring and hooking the hooked end 2016 onto the adjustable catch bracket 2010. A pull cable or other actuator may be used to pivot the latch bar 2004 to the closed state, or the latch bar may be pivoted to the closed state by direct manual pressure, which causes the ends of the stop strips to be at a right angle or reverse angle for a more positive sliding lock in the open position.

[0138] The adjustable catch bracket 2010 has screws 2030, 2032 for adjusting the position of the catch bracket 2010 in each direction relative to the bias mounting plate member 1302. The latch bar 2004 includes a latch bar stop element 2034, which is used to prevent rotation of the latch bar 2004 while the bias mounting plate member 1302 is rotated away from the fully closed (or 90°) position relative to the sliding torsion plate member 1300, as shown in FIG. 23 . The latch bar stop element 2034 may be implemented as a pin, flange, cut semicircular pin, or other part, or other stop element. The toggle stop bracket 2012 mounted on the sliding torsion plate member 1300 contacts the latch bar stop element 2034 and prevents the latch bar 2004 from rotating to the closed position unless the hinge is in the fully unrotated position.

[0139] The toggle stop bracket 2012 has multiple "L-shaped" sections that allow it to slide relative to the sliding torsion plate hinge member 1300 along notches 2040 in a spring retaining block 2042 and guide the pins in the hinge member 1300. The spring retaining block 2042 holds a spring 2044 that urges the toggle stop bracket 2012 to slide toward the bias mounting plate member 1302. When the bias mounting plate member 1302 pivots open and away from the sliding torsion plate member 1300, the toggle stop bracket 2012 slides to the position shown in FIG. 23 and stops the rotation of the latch bar 2004. As the bias mounting plate member 1302 pivots closed toward the sliding torsion plate member 1300, the toggle stop bracket 2012 slides in the opposite direction so that it no longer contacts the latch bar stop element 2034, allowing the hooked end 2016 to engage the hooked end 2050 of the adjustable catch bracket 2010. An alternative embodiment is shown in Figures 36-39.

[0140] 24-25 show an example of a bearing assembly 2500 for a hinge assembly such as hinge assembly 810 of FIG. 9. While a particular bearing assembly is shown, other bearing assemblies may be used. Two of the bearing assemblies 2500 may be used at either end of the hinge assembly 810. Hinge assembly 810 includes members 1300 and 1302. Bearing assembly 2500 includes a pin 2502 extending through holes 2504 and 2506 in members 1300 and 1302, a thrust bearing 2508, a tapered roller bearing assembly 2510, a washer 2512, and a locknut 2514. Roller bearing assembly 2510 includes an outer cup 2516 containing a tapered roller hinge pivot bearing 2518 and an inner cone 2520. Roller bearing assembly 1510 fits into a pocket 2530 in bias mounting plate member 1302.

[0141] The tapered roller bearing assembly 2510 improves bias alignment and repeatability compared to a simple sleeve bearing assembly. The tapered bearing eliminates clearance between the hinge member 1302 and the pivot shaft 2502. Bearing clearance contributes to positional error during and after the hinge tilt adjustment procedure to compensate for the bias mounting plate deflection angle (FIG. 26). One of the alignment pins disclosed above (e.g., pin 2904 in FIG. 28), sometimes referred to as a clocking alignment pin, serves to properly adjust the bias mounting plate angle. If the positional error associated with bearing clearance is small and negligible, the requirement for the clocking pin may be eliminated. Eliminating the clocking pin facilitates docking and securing of the bias mounting plate 812 to the processing chamber 802 of FIG. 9.

[0142] As an alternative to the bearing assembly of Figures 24-25, a sleeve or needle bearing assembly may be used. The alternative bearing assembly may include a fastener, such as a pin, extending through a nut, a thrust bearing, a thrust washer, a sleeve bushing, and a hole in members 1300, 1302. The sleeve bushing may include a washer-shaped end extending from the hole, shown at 2060 in Figures 20 and 21. By way of example, the sleeve bushing may be a steel-backed and / or polytetrafluoroethylene (PTFE) sleeve bushing.

[0143] FIG. 26 shows a slide-and-pivot assembly 806 including a hinge assembly 810 and a bias mounting plate 812. Due to the weight of the corresponding process module bias assembly and slide-and-pivot assembly 806, sag can occur and is illustrated as an example of a sag angle. An alignment pin 2710 is shown in an opening 2712 in the bias mounting plate 812. FIG. 30 shows how the hinge adjustment fastener 1310 of FIG. 13 can be used to adjust the hinge assembly 810 to account for this sag angle.

[0144] FIG. 27 shows an alignment pin 2800 and a receiving bushing 2802. The alignment pin 2800 is shown within the chamber wall 1814. The receiving bushing 2802 is shown within the bias mounting plate 812. The alignment pin 2800 has a tapered end 2804, allowing for easy alignment and insertion of the alignment pin 2800 within the hole 2806 of the bushing 2802. The bushing 2802 has a rounded end 2807 to facilitate sliding the alignment pin 2800 into the bushing 2802. This aligns the bias mounting plate 812 with respect to the processing chamber 802 of FIG. 9 before tightening a closure fastener, such as the fastener (e.g., bolt or screw) 1216 of FIG. 26. In one embodiment, four closure fasteners are used to secure the bias mounting plate 812 to the processing chamber 802. As an example, the bushing 2802 provides a pin clearance of up to 30 microns for the bushing 2802. In one embodiment, the alignment pin 2800 is on the bias mounting plate 812 and the bushing 2802 is on the chamber wall 1814.

[0145] FIG. 28 shows a portion 2900 of the processing chamber 802 of FIG. 9 including a bias plate having alignment pins 2902, 2904. In FIG. 28, the bias mounting plate member 1302 of the hinge assembly 810 is not shown attached to the bias mounting plate 812 and has been rotated away from the processing chamber 802. The alignment pins 2904 are sometimes referred to as clocking alignment pins. In one embodiment, the clocking alignment pins 2904 are not included to facilitate attachment of the bias mounting plate 812 of FIG. 9 to the processing chamber 802 and to facilitate the hinge tilt adjustment procedure used to align the bushings and pins.

[0146] 29 and 30 show a hinge assembly 3000 similar to hinge assembly 810 of FIG. 9. Hinge assembly 3000 includes members 1300, 1302 attached to plates 808, 812. Hinge assembly 3000 includes a tilt adjustment screw 3001, a tilt lock screw 3002, or in an alternative embodiment, an eccentric tilt adjustment bushing 3004. Sliding torsion plate member 1300 is rotatable about a rotation pin 3006 attached to sliding torsion plate 808. Hinge assembly 810 is shown with a different hinge pivot fastener 3010 than in the previous figures associated with the embodiment of FIG. 9.

[0147] The tilt adjustment screw 3001 and / or tilt lock screw 3002 may be turned to tilt the bias mounting plate CCW to compensate for sag and counteract twisting of the sliding plate. This may be done while under load. Arrow 3012 represents the CCW rotation of the sliding torsion plate member 1300 about pin 3006 and the corresponding CCW movement of the hinge assembly 3000 and bias mounting plate 812. A hinge fastener (e.g., bolt or screw) 3020 is included and is tightened after the tilt adjustment screw 3001 is adjusted.

[0148] 31-33 show a portion 3200 of another slide and pivot assembly including a sliding torsion plate 3202, a hinge assembly 3204, an attachment bar 3208, and a latch bar 3210. The hinge assembly 3204 includes a sliding torsion plate member 3212 and a bias mounting plate member 3214 that is attached to a bias mounting plate. The latch bar 3210 operates similarly to the latch bar 2004 of FIG. 20 and is held in its fully extended position by a stop strip 3216. The latch bar 3210 includes a hooked end 3218 that, when engaged, at least partially fits into a slot 3219 in a catch bracket 3220 that is attached to the bias mounting plate member 3214.

[0149] 34-35 show a portion 3500 of the sliding hinge assembly 3204 of FIG. 31 , illustrating a torsion spring 3502 that surrounds the pivot pin 3504 and has its ends pressed against the retaining pins 3506, 3508 attached to the latch bar 3210 and attachment bar 3208. The torsion spring 3502 rotates the latch bar CCW when the bearing roller 3520 releases the stop strip 3216. In an alternative embodiment, an extension spring or other type of spring is utilized to apply a rotational force at a distance from the latch bar pivot point. Alternatively, the latch bar 3210 can be moved manually without the use of a spring.

[0150] Figures 36-39 show portions 3700, 3800, 3900, 4000 of the hinge assembly 3204 of the slide-and-pivot assembly of Figure 31. Figure 36 illustrates the slide-and-pivot assembly in a non-rotating state with the latch bar 3210 engaged. Figure 37 illustrates the pivoted state with the latch bar 3210 disengaged. Figure 38 illustrates the non-rotating state with the latch bar 3210 engaged. Figure 39 illustrates the pivoted state with the latch bar disengaged.

[0151] The hinge assembly 3204 includes members 3212, 3214, a latch bar 3210, a catch bracket 3220, and a toggle stop bracket 3702 that is retained by and slides relative to a retention block 3704 and is moved by a spring 3706. The latch bar 3210 includes an "L-shaped" adjustable second toggle stop bracket 3707 that includes an end 3709 that abuts against a tab 3711 on the toggle stop bracket 3702 when the bias mounting plate member 3214 is in the open position as shown in FIGS. 37 and 39, and that aligns with the tab 3711 when the bias mounting plate member 3214 is in the fully non-rotated position as shown in FIGS. 36 and 38. The position of the toggle stop bracket 3707 is adjusted relative to the latch bar 3210 via fasteners 3713.

[0152] 40-43 show a jackscrew assembly 4200, illustrating a jackscrew block 4202 in the ON (IN) and OFF (OUT) positions and a jackscrew 4204 in a locked and extended position. The jackscrew assembly 4200 is constructed and functions similarly to the jackscrew assembly of FIGS. 18-19. The jackscrew block 4202 is attached to a bias mounting plate 4218 via a fastener, such as fastener 1224 of FIG. 19. The fastener 1224 retains the jackscrew block 4202 and allows adequate clearance for the jackscrew block 4202 to slide due to its weight. The jackscrew block 4202 includes an upper cup-shaped region 4208 for receiving the head 4210 of the jackscrew 4204 when in the extended position. The jackscrew block 4202 also includes a rigid region 4212 below the upper cup-shaped region 4208 which does not receive the head 4210 of the jackscrew 4204 but rather is used to jack the bias mounting plate 4218 off the process chamber wall 4220.

[0153] The head 4210 may be covered by a head screw cap 4230 having hooked fingers 4232 that prevent the head screw cap from being removed from the head 4210. The jackscrew 4204 may include a stepped washer 4234 and a flat washer 4236. The stepped washer 4234 includes a protruding ring-shaped portion 4238 that is inserted into an opening in the head screw cap 4230 when on the head 4210 and functions to direct the clamping force towards the head 4210 and away from the hooked fingers 4232.

[0154] 44-46 show a jackscrew assembly 4400, illustrating a jackscrew block 4402 and a jackscrew 4404 in a fixed position. The jackscrew assembly 4400 is constructed and functions similarly to other jackscrew assemblies disclosed herein. The jackscrew block 4402 is attached to a bias mounting plate 4406 via fasteners, such as fastener 1224 of FIG. 19 . The jackscrew block 4402 includes an upper cup-shaped region 4408 for receiving the head 4410 of the jackscrew 4404 when in the extended position. The jackscrew block 4402 also includes a hollow recessed region 4412 below the upper cup-shaped region 4408, which does not receive the head 4410 of the jackscrew 4404, but rather is used to jack the bias mounting plate 4406 off the process chamber wall 4413. The hollow recessed area 4412 is configured to hold a wear component 4414. By way of example, the wear component 4414 may be a plastic bushing. Pressure is applied to the backside of the wear component 4414 when the jackscrew 4404 is rotated CCW to jack up the bias mounting plate 4406 from the process chamber wall 4413. The wear component 4414 may be replaced similarly to the head screw cap 4230 of FIG. 43.

[0155] The following Figures 47-50 and Figures 53-63 illustrate examples of alternative embodiments that may replace any of the slide-and-pivot assemblies and / or portions thereof described above.

[0156] 47-48 show a processing chamber 4700, including a portion 4701 of another sliding and pivoting assembly, including a cam follower 4702. The cam follower (or roller) 4702 is mounted within a channel 4704 formed by a mounting bracket 4706 and a sidewall 4710 of the processing chamber 4700. A fastener 4708 may extend through the mounting bracket 4706 and through the cam follower 4702 and is threaded into the sidewall 4710 of the processing chamber 4700. The fastener 4708 attaches the cam follower 4702 to the sidewall 4710. Additional fasteners may be included to attach the mounting bracket 4706 to the sidewall 4710. The cam follower 4702 may include a bearing. An intermediate spacer (or rail) 4712 may be attached to the sliding torsion plate 4720 or may be integrally formed as part of the sliding torsion plate 4720. The intermediate spacer 4712 is disposed between the upper end 4714 and the lower end 4716 of the torsion plate 4720. The bracket 4706 may be “L” shaped and may hold a portion of the torsion plate 4720 between the cam followers 4702.

[0157] The torsion plate 4720 has a "T" shaped cross section and includes a first portion positioned between the middle spacers 4712 and a second portion positioned between the mounting brackets 4706. The middle spacers 4712 may be integrally formed as part of the torsion plate 4720 or may be attached to the torsion plate 4720. The torsion plate 4720 and the middle spacers 4712 slide between the cam followers 4702. The brackets 4706 and the middle spacers 4712 may be formed of steel. The torsion plate 4720 may be formed of aluminum.

[0158] 49-50 show a processing chamber 4900 including a portion 4901 of another slide-and-pivot assembly including a torsion plate 4902 having tracks 4904 for V-grooved cam followers (or track rollers) 4906. The torsion plate 4902 slides on the track rollers 4906. The track rollers 4906 are mounted within channels 4908 formed by a mounting bracket 4910 and a sidewall 4912 of the processing chamber 4900. Fasteners 4914 may extend through the mounting bracket 4910 and the track rollers 4906 and are threaded into the sidewall 4912. The fasteners 4914 attach the track rollers 4906 to the sidewall 4912. Additional fasteners may be included to attach the mounting bracket 4910 to the sidewall 4912. The track rollers 4906 may include bearings. The bracket 4910 may be "L" shaped to help hold the track 4904 within the V-shaped grooves of the track rollers 4906, which in turn helps hold the torsion plate 4902 between the track rollers 4906.

[0159] The slide and pivot assembly may include a center bar 4919 positioned between the track rollers 4906 that are attached to one of the lower mounting brackets 4910. The center bar 4919 may guide the torsion plate 4902 to slide onto the back track rollers (shown at 4921). The slide and pivot assembly includes a stop 4920 attached to the rear end of the torsion plate 4902. When the torsion plate 4902 is slid to its fully out position, the stop 4920 contacts one of the upper brackets 4910, limiting and preventing the torsion plate 4902 from sliding further.

[0160] 51 illustrates the slide-and-pivot assembly 5100 and indicates the direction of torsional and vertical stiffness of the torsion plate 5102. The bias assembly 5104 is attached to the slide-and-pivot assembly 5100, which is attached to the processing chamber 5106. During the sliding movement of the torsion plate 5102, the torsion plate 5102 may experience torsional and vertical forces due primarily to the weight of the bias assembly 5104 and its movement relative to the processing chamber 5106. The torsion plate 5102 provides both torsional and vertical stiffness to support the offset weight of the bias assembly 5104.

[0161] Figure 52 shows a portion 5200 of the slide-and-pivot assembly of Figure 51 and illustrates horizontal and vertical space constraints. The horizontal space constraint may refer to the distance from the outer side 5202 of the processing chamber 5106 to the outer side 5204 of the torsion plate 5102. The outer side 5204 of the torsion plate 5102 may be at least a predetermined distance from another processing chamber disposed adjacent to the processing chamber 5106. The vertical space constraint may refer to (i) the lowest point (or height) to which the torsion plate can extend, and (ii) the highest point (or height) to which the torsion plate can extend.

[0162] In FIG. 52, bearing block 5210 is shown positioned within a recessed region of sidewall 5212. Bearing block 5210 includes hidden portion 5213 and non-hidden portion 5214. Portions 5213 are hidden in FIG. 52 because they reside within recessed region 5211 of sidewall 5212 and do not extend completely across sidewall 5212. Recessed region 5211, including hidden portion 5213, is visible from the opposite (or front) end of sidewall 5212. Another recessed region 5215 is shown, extending from rear end 5217 of sidewall 5212 to recessed region 5211 in which bearing block 5210 is positioned. Bearing block 5210 is attached to sidewall 5212. Bearing block 5210 is similar to, and may operate similarly to, the bearing blocks shown in FIGS. 59-60. The rail 5216 is attached to a recessed region of the inner surface 5222 of the torsion plate 5102. The rail 5216 engages and slides with a portion of the bearing block 5210, allowing the torsion plate 5102 to slide relative to the side wall 5212 between a fully retracted and fully extended position. The engagement between the rail 5216 and the bearing block 5210 prevents the rail from being pulled away from the bearing block 5210 in a direction perpendicular to the direction in which the rail 5216 slides, for example, by the torsion plate 5102.

[0163] FIG. 53 shows a processing chamber 5300 including another slide and pivot assembly 5302 having a cylindrical rail 5304 and a corresponding rail guide 5306. The rail guide 5306 is attached to a sidewall 5308 of the processing chamber 5300. The rail 5304 slides within the rail guide 5306 and is attached at its front end to a hinge assembly 5310, which is attached to a bias plate 5312. The front end of the rail 5304 may slide into a cylindrical slot 5311 in a sliding rail member 5312 of the hinge assembly 5310. The front end of the rail 5304 may be fixed and / or otherwise connected to the sliding rail member 5312. The rail guide 5306 may include bushings and / or bearings for sliding the rail 5304. The dimensions of the rail 5304 and rail guide 5306 are selected to minimize and / or prevent twisting of the rail. For increased rigidity, the rail 5304 and rail guide 5306 may be replaced with a web rail 5400 and corresponding rail guide 5402 shown in FIG.

[0164] FIG. 54 shows a portion 5406 of another slide-and-pivot assembly including a web rail 5400 and corresponding rail guide 5402. The web rail 5400 may be attached to a hinge assembly (a portion 5410 of which is shown in FIG. 54). The rail guide 5402 is a block that may be attached to a sidewall of a processing chamber via fasteners. Each of the web rails 5400 includes cylindrically shaped longitudinal ends 5422, 5424 with a longitudinal member 5426 extending therebetween. The rail guide 5402 may include bushings and / or bearings for sliding the rail 5400.

[0165] 55-56 show a portion 5500 of another slide-and-pivot assembly including a torsion plate 5502 having upper and lower edge roller guides 5504 and corresponding roller blocks 5506. The roller blocks 5506 may be attached to a sidewall of a processing chamber. Each of the roller guides 5504 includes a recessed, V-shaped track 5510 along which cross-connected rollers 5512, 5514 roll. The rollers 5512, 5514 may include bearings and fasteners for attachment to the roller guide 5504. A first roller 5512 rolls on a first side 5516 of the track 5510, and a second roller 5514 rolls on a second side 5518 of the track 5510. The second roller 5514 and / or corresponding fastener may be positioned perpendicular to the first roller 5512 and / or corresponding fastener. Cross-connected rollers 5512, 5514 maintain the torsion plate 5502 in the same lateral position relative to the sidewall of the processing chamber. The torsion plate 5502 can be moved relative to the roller block 5506 between a fully extended position and a fully retracted position in a manner similar to the other torsion plates mentioned herein.

[0166] FIG. 57 shows an edge roller guide 5504 and a roller block 5506 that includes one of the rollers 5512. The edge roller guide 5504 is attached to the top or bottom end of the torsion plate 5502. Alternatively, the edge roller guide 5504 may be integrally formed as part of the torsion plate 5502. FIG. 58 shows an example of this, including a torsion plate 5800 with an integrally formed edge roller guide portion 5802 that has a track 5804 for the roller 5512. The roller 5512 is attached to the roller block 5506.

[0167] 59-60 show a processing chamber 5900 including another slide-and-pivot assembly 5902 that includes a C-shaped torsion plate 5904 having an end cap 5906 and a support rail 5908 that slides against an open bearing block 5910. The bearing block 5910 is attached to a side wall 5912 of the processing chamber 5900. The bearing block 5910 includes an open bearing for allowing the support rail 5908 to slide against the side wall 5912. The torsion plate 5904 and end cap 5906 may be formed of steel. A hinge assembly 5920 may be attached to the end cap 5906 and a bias plate 5922.

[0168] Each of the support rails 5908 includes a flat surface 5930 and a curved portion 5932. The curved opposing sides contact the bearing blocks 5910. The flat surfaces 5930 face outward from the side walls 5912 and are visible through rectangular openings in the corresponding ones of the bearing blocks 5910. In one embodiment, the bearing blocks 5910 of each of the support rails 5908 combine to provide a single bearing block that is longer than that shown in FIGS. 59-60 . For example, in the current example, four bearing blocks are shown (two for each support rail). Two longer bearing blocks may be provided to replace the four bearing blocks.

[0169] FIG. 61 shows a portion 6100 of another slide-and-pivot assembly including a telescopic rail 6102 and a slide 6104. The telescopic rail 6102 is attached to an inner surface 6106 of a torsion plate 6108. The slide 6104 has a C-shaped cross section and slides on the telescopic rail 6102 via bearings 6110. The bearings 6110 may (i) be disposed between the upper and lower sides 6112 and 6114 of the telescopic rail 6102 and the upper and lower inner sides of the slide 6104, (ii) be held in place by the telescopic rail 6102, and / or (iii) be held in place by the slide 6104. The slide 6104 is attached to a side wall 6120 of the processing chamber. The telescopic rail 6102 and / or the bearings 6110 may be greased (or otherwise oiled). Sliding the torsion plate 6108 from a fully retracted position to a fully extended position involves sliding the telescopic rail 6102 relative to the slide 6104. In another embodiment, the telescopic rail is attached to the side wall 6120 and the slide 6104 is attached to the torsion plate 6108. The sliding lock assembly 6200 may be located below the torsion plate 6108 and attached to the side wall 6120 and is used to lock and prevent sliding movement of the torsion plate 6108. The sliding lock assembly 6200 is configured and operates similarly to the sliding lock assembly 1101 of FIG. 12 .

[0170] Figure 63 shows a portion 6300 of another slide and pivot assembly including a torsion plate 6302 with upper and lower edge rails (the upper one is shown as 6304) for roller assemblies 6308, 6310 having V-grooved track rollers 6312, 6314. The edge rails ride on the V-grooves of the track rollers 6312, 6314. The V-grooves help maintain the lateral position of the torsion plate 6302 relative to the sidewall of the processing chamber.

[0171] The roller assemblies 6308, 6310 may be attached to the side walls of the processing chamber via (i) fasteners 6320, 6322 that extend through the housings 6322, 6324 of the slide assemblies 6308, 6310 and track rollers 6312, 6314 and threadably engage the side walls, and / or (ii) other fasteners (not shown) that extend through the housings 6322, 6324, central block 6330, and sliding lock assembly 6332. The central block 6330 is disposed between the track rollers 6312 and may include a V-shaped groove 6331 in which the upper edge rail 6304 slides. The sliding lock assembly 6332 is disposed between the track rollers 6314 and is used to lock and prevent sliding movement of the torsion plate 6302. The sliding lock assembly 6332 is configured and operates similarly to the sliding lock assembly 1101 of FIG. 12 . Block 6334 of slide lock assembly 6332 may include a V-shaped groove for the lower edge rail, similar to the V-shaped groove in center block 6330. Blocks 6330 and 6334 act as extra support to retain torsion plate 6302 in the event of a V-wheel bearing failure.

[0172] 26, 59, and 63 show a hinge assembly having a "lift-off" design for lifting off the bias plate and corresponding bias mounting plate member of the hinge assembly from the sliding torsion plate member of the hinge assembly. Referring to FIG. 63, a hinge assembly 6340 is shown including a sliding torsion plate member 6342 and a bias mounting plate member 6344 attached to a torsion plate 6302. Members 6342, 6344 are each "U" shaped, with fingers 6346 of bias mounting plate member 6344 resting on respective fingers 6348 of sliding torsion plate member 6342. In the illustrated example, a shaft 6350 extends through fingers 6346, 6348 and is held in place relative to members 6342, 6344 by nuts 6352, 6354 on the threaded end of shaft 6350. The shaft 6350 passes through a circular member 6351 of a pivot block (similar to pivot block 1704 in FIG. 17 ) that is secured to the sliding torsion plate member 6342 via a plate 6353 between one of the fingers 6348 and one of the fingers 6346. The circular member 6351 is attached to the plate 6353. A pivot lock assembly 6355 engages the circular retaining member 6351, similar to pivot lock assembly 814 in FIG. 17 . The shaft 6350 extends through the circular member 6351. A corresponding bias plate (not shown in FIG. 63 ) attached to the bias mounting plate member 6344 can be removed along with the bias mounting plate member 6344 from the sliding torsion plate member 6342 by simply removing the nuts 6352, 6354, and the shaft 6350. Although a shaft 6350 is shown, the shaft may be replaced with upper and lower pins similar to pin 2502 shown in Figures 24-25.

[0173] Although specific fasteners are mentioned above, various additional fasteners (e.g., screws, nuts, pins, bolts, etc.) may be included in the above examples, some of which are shown in the figures.

[0174] The foregoing description is merely exemplary in nature and is in no way intended to limit the disclosure, its application, or uses. The broad teachings of the present disclosure can be embodied in a variety of forms. Accordingly, while the present disclosure includes specific examples, the true scope of the present disclosure should not be limited to such specific examples, as other variations will become apparent from a study of the drawings, the specification, and the following claims. It should be understood that one or more steps within a method may be performed in a different order (or simultaneously) without altering the principles of the present disclosure. Furthermore, although each of the embodiments is described above as having particular features, any one or more of those features described with respect to any embodiment of the present disclosure can be implemented with and / or combined with features of any of the other embodiments, even if that combination is not explicitly described. In other words, the described embodiments are not mutually exclusive, and substituting one or more embodiments for one another remains within the scope of the present disclosure.

[0175] Spatial and functional relationships between elements (e.g., between modules, circuit elements, semiconductor layers, etc.) are described with various terms, such as "connected," "engaged," "coupled," "adjacent," "next to," "on," "above," "below," "disposed," etc. Unless expressly stated as "direct," when a relationship between a first and second element is described in the above disclosure, the relationship may be a direct relationship where no other intervening elements exist between the first and second elements, or an indirect relationship where one or more intervening elements (spatially or functionally) exist between the first and second elements. As used herein, the phrase "at least one of A, B, and C" should be interpreted to mean a non-exclusive logical OR (A or B or C), and not to mean "at least one of A, at least one of B, and at least one of C."

Claims

1. 1. A slide and pivot assembly for a process module bias assembly of a substrate processing system, comprising: a sliding torsion plate; one or more rails configured to be attached to or integrally formed as part of the sliding torsion plate or the processing chamber; a bearing disposed adjacent the one or more rails; a bias mounting plate configured to hold a portion of a process module for processing a substrate; a hinge assembly attached to the sliding torsion plate and the bias mounting plate; Including, the sliding torsion plate, the bias mounting plate, and the hinge assembly are configured to slide laterally relative to the processing chamber via the one or more rails and the bearings; and the bias mounting plate is configured to pivot relative to the sliding torsion plate while the slide-and-pivot assembly is in an at least partially extended position. Sliding and pivoting assembly.

2. 10. The slide-pivot assembly of claim 1, The hinge assembly comprises: a first hinge member attached to the sliding torsion plate; a second hinge member attached to the bias mounting plate and pivotally connected to the first hinge member; and the bias mounting plate and the second hinge member are configured to pivot relative to the sliding torsion plate and the first hinge member while the slide-and-pivot assembly is in a fully extended position; Sliding and pivoting assembly.

3. 3. The slide-pivot assembly of claim 2, further comprising a pin attached to said sliding torsion plate; the first hinge member is configured to rotate relative to the pin to compensate for sagging of the bias mounting plate; Sliding and pivoting assembly.

4. 4. The slide-pivot assembly of claim 3, A sliding and pivoting assembly, wherein the hinge assembly includes one or more adjustment screws for adjusting the tilt angle of the first hinge member relative to the sliding torsion plate.

5. 3. The slide-pivot assembly of claim 2, further comprising an operational interlock mechanism attached to the sliding torsion plate, the operational interlock mechanism comprising: maintaining the sliding torsion plate, the hinge assembly, and the bias mounting plate in an extended position relative to the processing chamber; and allowing the sliding torsion plate, the hinge assembly, and the bias mounting plate to slide from an extended position to a retracted position when a predetermined amount of lateral force is applied to the bias mounting plate; The sliding and pivoting assembly is configured as follows:

6. 6. The slide-pivot assembly of claim 5, The operational interlock mechanism is preventing the second hinge member and the bias mounting plate from pivoting relative to the first hinge member and the sliding torsion plate when in an engaged state; and When in a disengaged state, the second hinge member and the bias mounting plate are allowed to pivot relative to the first hinge member and the sliding torsion plate. The sliding and pivoting assembly is configured as follows:

7. 6. The slide-pivot assembly of claim 5, The operational interlock mechanism is an attachment bar attached to the sliding torsion plate; a latch bar that is rotatable relative to the attachment bar to a disengaged position when the sliding torsion plate is in the pulled-out state; A sliding and pivoting assembly comprising:

8. 8. The slide-pivot assembly of claim 7, the motion interlock mechanism further includes a catch bracket attached to the second hinge member; and The latch bar the bias mounting plate engages the catch bracket when the bias mounting plate is in a fully non-rotating state and the sliding torsion plate is pushed in from its fully extended position; and When the sliding torsion plate is pulled out to the fully pulled position, it disengages from the catch bracket. The sliding and pivoting assembly is configured as follows:

9. 9. The slide-pivot assembly of claim 8, the motion interlock mechanism further includes a toggle stop bracket and a spring; the latch bar includes a stop flange or pin; the spring causes the toggle stop bracket to slide into contact with the latch bar, thereby preventing rotation of the latch bar from a slide-locked position and preventing engagement of the latch bar with the catch bracket when the second hinge member is pivoted away from a closed position; and when the second hinge member moves to the closed position, it pushes against the toggle stop bracket, thereby compressing the spring and moving the toggle stop bracket to allow rotation of the latch bar from the slide-lock position and engagement of the latch bar with the catch bracket. Sliding and pivoting assembly.

10. 10. The slide-pivot assembly of claim 1, A slide and pivot assembly, wherein the one or more rails include two rails mounted on the sliding torsion plate and configured to ride on bearing blocks mounted on the processing chamber.

11. 10. The slide-pivot assembly of claim 1, A sliding and pivoting assembly, wherein the hinge assembly includes a pivot locking assembly for locking the hinge assembly in a plurality of positions including a closed position and an open position.

12. 10. The slide-pivot assembly of claim 1, The slide and pivot assembly further includes a slide lock assembly for locking the sliding torsion plate relative to the processing chamber in a plurality of positions, including a pushed-in position and an extended position.

13. 13. The slide-pivot assembly of claim 12, A slide and pivot assembly, wherein the slide lock assembly includes a plunger and a roller that extends into a notch in the sliding torsion plate.

14. 10. The slide-pivot assembly of claim 1, A slide and pivot assembly, wherein the biased mounting plate closes an open side of the processing chamber.

15. 10. The slide-pivot assembly of claim 1, The slide and pivot assembly further includes a jackscrew assembly attached to the bias mounting plate and configured to remove the bias mounting plate from the processing chamber.

16. 16. The slide-pivot assembly of claim 15, The jackscrew assembly comprises: a screw jack block attached to the bias mounting plate; a jackscrew extending into the jackscrew block and through the bias mounting plate, the jackscrew extending into the jackscrew block and extending through the bias mounting plate and coupled to the processing chamber; A sliding and pivoting assembly comprising:

17. 17. The slide-pivot assembly of claim 16, a slide and pivot assembly, wherein the jackscrew block has two positions relative to the jackscrew, including a first position associated with mounting the bias mounting plate to the processing chamber and a second position associated with jacking the bias mounting plate out of the processing chamber.

18. 17. The slide-pivot assembly of claim 16, Alignment pins and a bushing configured to receive the alignment pin; further comprising When the jackscrew is turned, retracting or pushing the alignment pins into the bushings to align the bias mounting plate with respect to the processing chamber; and When the processing chamber is opened, the alignment pin is released from the bushing. The sliding and pivoting assembly is configured as follows:

19. 10. The slide-pivot assembly of claim 1, one or more alignment pins attached to the processing chamber or the bias mounting plate; one or more bushings for respectively receiving the one or more alignment pins; further comprising aligning the bias mounting plate with respect to the processing chamber when the one or more alignment pins are received in the one or more bushings; Sliding and pivoting assembly.

20. 10. The slide-pivot assembly of claim 1, A sliding and pivoting assembly, wherein the hinge assembly includes one or more bearing assemblies.

21. 10. The slide-pivot assembly of claim 1, a cam follower configured to be attached to the processing chamber; a plurality of brackets configured to be attached to the processing chamber; further comprising the one or more rails include two intermediate members attached to or integrally formed as part of the sliding torsion plate and extending laterally along upper and lower edges of the sliding torsion plate; the plurality of brackets are configured to form a channel with a sidewall of the processing chamber and to hold the sliding torsion plate from moving away from the processing chamber; the cam follower is disposed within the channel; and the sliding torsion plate and the intermediate member slide relative to the processing chamber and the plurality of brackets via the cam follower; Sliding and pivoting assembly.

22. 10. The slide-pivot assembly of claim 1, a plurality of track rollers configured to be attached to the processing chamber and including V-shaped grooves; a plurality of brackets configured to be attached to the processing chamber and forming a channel with a sidewall of the processing chamber, the plurality of brackets holding the sliding torsion plate from moving away from the processing chamber; further comprising the one or more rails are attached to or integrally formed as part of the sliding torsion plate and slide within the V-shaped groove; and the sliding torsion plate slides relative to the processing chamber via the one or more rails and the plurality of track rollers; Sliding and pivoting assembly.

23. 10. The slide-pivot assembly of claim 1, further comprising a plurality of roller blocks; The plurality of roller blocks a first set of rollers; a second set of rollers cross-connected to the first set of rollers; Including, the one or more rails are attached to the sliding torsion plate; and the sliding torsion plate sliding against the plurality of roller blocks via the first set of rollers and the second set of rollers; Sliding and pivoting assembly.

24. 24. The slide-pivot assembly of claim 23, the one or more rails include two rails located at upper and lower ends of the sliding torsion plate; each of the two rails includes a V-shaped groove; the first set of rollers roll along a first surface of the V-shaped groove; and the second set of rollers rolls along a second surface of the V-shaped groove; Sliding and pivoting assembly.

25. 25. The slide-pivot assembly of claim 24, A slide and pivot assembly, wherein the one or more rails are attached to the sliding torsion plate via fasteners.

26. 25. The slide and pivot assembly of claim 24, wherein the one or more rails are integrally formed as part of the sliding torsion plate.

27. 10. The slide-pivot assembly of claim 1, An end plate and a plurality of bearing blocks configured to be mounted on the processing chamber; further comprising the sliding torsion plate is C-shaped and attached to the end plate; the bearing block contains the bearing; and the one or more rails include two rails mounted on the sliding torsion plate and configured to ride on the bearings of the bearing blocks. Sliding and pivoting assembly.

28. 10. The slide-pivot assembly of claim 1, further comprising a slide configured to be attached to the processing chamber; the one or more rails are telescopic rails attached to the sliding torsion plate; and the bearings are disposed between the one or more telescopic rails and the slide to allow the sliding torsion plate to slide relative to the slide and the processing chamber; Sliding and pivoting assembly.

29. 10. The slide-pivot assembly of claim 1, further comprising a slide attached to the sliding torsion plate; the one or more rails are telescopic rails configured to be attached to the processing chamber; and the bearings are disposed between the one or more rails and the slide to allow the sliding torsion plate to slide relative to the telescopic rails and the processing chamber. Sliding and pivoting assembly.

30. 10. The slide-pivot assembly of claim 1, further comprising a roller assembly having a V-grooved track roller; the one or more rails are integrally formed as part of the sliding torsion plate; the slide assembly is configured to be mounted in the processing chamber; and the one or more rails sliding against the V-grooved track rollers; Sliding and pivoting assembly.

31. 31. The slide-pivot assembly of claim 30, A slide and pivot assembly, wherein one of the roller assemblies includes a slide lock assembly configured to prevent sliding of the sliding torsion plate relative to the processing chamber.

32. 31. The slide-pivot assembly of claim 30, at least one of the roller assemblies includes a block having a groove in which one of the one or more rails slides; and The block functions as a support for holding the sliding torsion plate. Sliding and pivoting assembly.

33. A slide-pivot assembly according to claim 1; the processing chamber; a substrate support attached to the bias mounting plate and configured to hold the substrate; A substrate processing system comprising:

34. 1. A slide and pivot assembly for a process module bias assembly of a substrate processing system, comprising: a plurality of bearing blocks configured to be mounted to the processing chamber and including bearings; a plurality of rails configured to slide relative to the plurality of bearing blocks via the bearings; a bias mounting plate configured to hold a portion of a process module for processing a substrate; a hinge assembly attached to the plurality of rails and the bias mounting plate; Including, the bias mounting plate and the hinge assembly are configured to slide laterally relative to the processing chamber via the rails and bearings; and the bias mounting plate is configured to pivot relative to the plurality of rails while the slide-and-pivot assembly is in an at least partially extended position. Sliding and pivoting assembly.

35. 35. The slide-pivot assembly of claim 34, The plurality of rails are: a first rail; a second rail disposed below the first rail; a third rail disposed below the second rail; and A sliding and pivoting assembly comprising:

36. 35. The slide-pivot assembly of claim 34, A slide-pivot assembly, wherein the plurality of rails are cylindrical rails.

37. 35. The slide-pivot assembly of claim 34, the plurality of rails includes a web rail; and each of the web rails extending along a longitudinal member and including cylindrical upper and lower ends attached to the longitudinal member; Sliding and pivoting assembly.

38. a wafer transfer module; a first row of stations on a first side of the wafer transport module; a second row of stations on a second side of the wafer transport module; and Including, the wafer transport module is configured to transfer substrates to and from the first and second rows of stations; and each station in the first series of stations and the second series of stations a processing chamber; a slide and pivot assembly attached to the processing chamber; a bias assembly attached to the slide-and-pivot assembly and a substrate support and configured to be pulled out and pivoted away from the processing chamber via the slide-and-pivot assembly; Including, tool.

39. 39. The tool of claim 38, wherein each of the sliding and pivoting assemblies is configured to transition from a closed state to a withdrawn, pivoted state to remove a corresponding one of the substrate supports from a corresponding one of the processing chambers and pivot the corresponding one of the substrate supports away from the corresponding one of the processing chambers.

40. 39. The tool of claim 38, The tool, wherein the wafer transport module includes a robot for transferring the substrate to and from the first row of stations and portions of the second row of stations.

41. 41. The tool of claim 40, The tool, wherein the wafer transport module is attached to a machine front end module and a load lock and transports the substrates from the machine front end module and load lock to the first row of stations and the second row of stations.

42. 41. The tool of claim 40, The tool, wherein the robot is configured to transfer the substrate between a buffer and the first row of stations and a portion of the second row of stations.

43. 39. The tool of claim 38, The tool, wherein each of the first row of stations and the second row of stations includes a vertical arrangement of a radio frequency generator and a gas box, a top plate assembly, a corresponding one of the processing chambers, and a vacuum pump.

44. 39. The tool of claim 38, Each of the slide-pivot assemblies a sliding torsion plate; one or more rails and bearings configured to be attached to a corresponding one of the sliding torsion plate or the processing chamber; a bias mounting plate configured to hold a portion of a process module for processing one of the substrates; a hinge assembly attached to the sliding torsion plate and the bias mounting plate; Including, the sliding torsion plate, the bias mounting plate, and the hinge assembly are configured to slide laterally relative to the corresponding one of the processing chambers via the one or more rails and bearings; and the bias mounting plate is configured to pivot relative to the sliding torsion plate while the slide-and-pivot assembly is in an at least partially extended position. tool.

45. 45. The slide-pivot assembly of claim 44, The hinge assembly of each of the sliding and pivoting assemblies comprises: a first hinge member attached to a corresponding one of the sliding torsion plates; a second hinge member mounted to a corresponding one of the bias mounting plates and pivotally connected to the first hinge member; and the corresponding one of the bias mounting plates and the second hinge member are configured to pivot relative to the corresponding one of the sliding torsion plates and the first hinge member while the slide-and-pivot assembly is in an at least partially extended position. Sliding and pivoting assembly.

Images