Imaging device and substrate processing device

Abstract

To provide a technology that can detect changes in the state of an object in real time and perform detailed observations as needed. [Solution] The imaging device 60 includes a distributor 62, an event-based camera 63, and a high-speed camera 64. The distributor 62 distributes observation light L from an object into a first observation light L1 and a second observation light L2. The event-based camera 63 photographs the object using the first observation light L1. The high-speed camera 64 photographs the object using the second observation light L2. This allows the event-based camera 63 and the high-speed camera 64 to photograph the same area of ​​the object. Therefore, changes in the state of the object can be detected in real time by the event-based camera 63, and detailed observation can be performed using the high-speed camera 64 as needed.

Description

[Technical Field]

[0001] The present invention relates to an imaging device for photographing an object and a substrate processing apparatus including the imaging device. [Background technology]

[0002] In precision and micromachining equipment such as semiconductor manufacturing equipment, even slight differences in operation can lead to a decline in process quality. For this reason, it is necessary to closely observe the operation of the equipment and manage process quality. However, it is difficult to capture in detail the high-speed rotational movement of an object or the high-speed flow of liquid using a general video camera.

[0003] To observe high-speed device operations, for example, it is conceivable to use a high-speed camera with a high frame rate. It has also been proposed to observe high-speed operations using an event-based camera that can output only information on pixels whose luminance values ​​have changed. An observation method using an event-based camera is described, for example, in Patent Document 1. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2023-096643 Summary of the Invention [Problem to be solved by the invention]

[0005] High-speed cameras can capture detailed images of an object's movement at short intervals, but because they output a large amount of data, they are not suitable for real-time inspections while the equipment is running.

[0006] In contrast, event-based cameras can capture images of objects at short time intervals comparable to high-speed cameras while reducing the amount of output data. For this reason, event-based cameras are more suitable than high-speed cameras for real-time inspection applications.

[0007] However, the image data output from an event-based camera consists only of information about the time when the brightness value changed, the pixel where the brightness value changed, and the direction of the change in brightness value. Therefore, the image data output from an event-based camera cannot be used to observe in detail the movement of the object at the point where the brightness value changed.

[0008] As described above, there are advantages and disadvantages to both high-speed camera and event-based camera photography. Therefore, an object of the present invention is to provide a technology that can detect changes in the state of an object in real time and perform detailed observations as needed. [Means for solving the problem]

[0009] A first invention of the present application is an imaging device for photographing an object, comprising: a distributor that distributes observation light from the object into first observation light and second observation light; an event-based camera that photographs the object using the first observation light; and a high-speed camera that photographs the object using the second observation light, wherein the field of view of the event-based camera and the field of view of the high-speed camera include the same range of the object.

[0010] A second aspect of the present invention is the imaging device of the first aspect, wherein the event-based camera and the high-speed camera simultaneously capture images based on a common synchronization signal.

[0011] A third aspect of the present invention is the imaging device of the first or second aspect, wherein the amount of the second observation light is greater than the amount of the first observation light.

[0012] A fourth invention of the present application is an imaging device according to any one of the first to third inventions, wherein the distributor has a first distributor and a second distributor, the first distributor distributes the first observation light of the observation light incident from the object to the event-based camera and distributes the remaining light to the second distributor, and the second distributor distributes the second observation light of the remaining light incident from the first distributor to the high-speed camera.

[0013] A fifth aspect of the present invention is the imaging device of the fourth aspect, wherein the first distributor is plain glass and the second distributor is a half mirror.

[0014] A sixth aspect of the present invention is the imaging device of the fifth aspect, wherein the first distributor is disposed closer to the object than the second distributor.

[0015] The seventh invention of the present application is an imaging device according to any one of the fourth to sixth inventions, further comprising an illumination unit that irradiates light onto the object, and the observation light is light that is irradiated from the illumination unit and reflected by the object.

[0016] An eighth aspect of the present invention is the imaging device of the seventh aspect, wherein the light emitted from the illumination unit passes through the first distributor and the second distributor and is irradiated onto the object.

[0017] A ninth invention of the present application is a substrate processing apparatus comprising an imaging device according to any one of the first to eighth inventions, a substrate holding unit that holds the target object, that is, a substrate, and a processing liquid supply unit that supplies processing liquid to the substrate held by the substrate holding unit, wherein the imaging device photographs the substrate to which the processing liquid is supplied. [Effects of the Invention]

[0018] According to the first to ninth aspects of the present invention, the same area of ​​an object can be photographed by both an event-based camera and a high-speed camera. This allows changes in the state of the object to be detected in real time by the event-based camera, and detailed observation can be performed using the high-speed camera as needed.

[0019] In particular, according to the second aspect of the present invention, the same area of ​​an object can be photographed simultaneously with an event-based camera and a high-speed camera.

[0020] In particular, according to the third aspect of the present invention, it is possible to distribute the appropriate amount of light to the high-speed camera and the event-based camera.

[0021] In particular, according to the fifth aspect of the present invention, it is possible to distribute the appropriate amount of light to the high-speed camera and the event-based camera.

[0022] In particular, according to the sixth aspect of the present invention, the amount of observation light can be used efficiently.

[0023] In particular, according to the ninth aspect of the present invention, the same area of ​​the substrate can be photographed by both the event-based camera and the high-speed camera, allowing changes in the state of the substrate to be detected in real time by the event-based camera and, if necessary, detailed observation can be performed by the high-speed camera. [Brief explanation of the drawings]

[0024] [Figure 1] FIG. 2 is a vertical cross-sectional view of the substrate processing apparatus. [Figure 2] FIG. 2 is a diagram schematically illustrating a liquid supply unit. [Figure 3] FIG. 1 is a diagram illustrating a configuration of an imaging device. [Figure 4] FIG. 2 is a control block diagram of the substrate processing apparatus. [Figure 5] 10 is a flowchart showing the flow of an inspection process using an imaging device. [Figure 6] FIG. 10 is a diagram showing a configuration of an imaging device according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0026] <1. Configuration of the substrate processing apparatus> 1 is a vertical cross-sectional view of a substrate processing apparatus 1 equipped with an imaging device 60 according to one embodiment of the present invention. The substrate processing apparatus 1 is an apparatus for supplying a processing liquid to the surface of a disk-shaped substrate W (silicon wafer) in a semiconductor wafer manufacturing process to clean the surface of the substrate W. As shown in FIG. 1, the substrate processing apparatus 1 includes a chamber 10, a substrate holding unit 20, a rotation mechanism 30, a processing liquid supply unit 40, a cup 50, an imaging device 60, and a control unit 70.

[0027] The chamber 10 is a housing that forms a processing space 11 for processing a substrate W. The chamber 10 has sidewalls 12 that surround the sides of the processing space 11, a top plate 13 that covers an upper portion of the processing space 11, and a bottom plate 14 that covers a lower portion of the processing space 11. A substrate holder 20, a rotation mechanism 30, a processing liquid supply unit 40, a cup 50, and a reflecting mirror 61, which will be described later, are housed inside the chamber 10.

[0028] A loading / unloading port for loading and unloading the substrate W into and from the chamber 10 and a shutter for opening and closing the loading / unloading port are provided in a portion of the side wall 12 (not shown). The chamber 10 also has a window 15 in a portion of the side wall 12. The window 15 is made of a transparent resin such as polyvinyl chloride or glass. The boundary between the side wall 12 and the window 15 is sealed without any gaps.

[0029] The substrate holding unit 20 is a mechanism that holds the substrate W in a horizontal position (a position in which the normal is oriented vertically) inside the chamber 10. As shown in FIG. 1, the substrate holding unit 20 has a disk-shaped spin base 21 and a plurality of chuck pins 22. The plurality of chuck pins 22 are provided at equal angular intervals on the outer periphery of the upper surface of the spin base 21. The substrate W is held by the plurality of chuck pins 22 with the processing surface on which a pattern is to be formed facing upward. Each chuck pin 22 contacts the lower surface and outer periphery of the peripheral edge of the substrate W, and supports the substrate W at a position above the upper surface of the spin base 21 with a small gap therebetween.

[0030] A chuck pin switching mechanism 23 is provided inside the spin base 21 for switching the positions of the plurality of chuck pins 22. The chuck pin switching mechanism 23 switches the plurality of chuck pins 22 between a holding position where the chuck pins 22 hold the substrate W and a release position where the chuck pins 22 release the substrate W from the holding position.

[0031] The rotation mechanism 30 is a mechanism for rotating the substrate holding part 20. The rotation mechanism 30 is housed inside a motor cover 31 provided below the spin base 21. As indicated by the dashed line in FIG. 1 , the rotation mechanism 30 has a motor 32 and a support shaft 33. The support shaft 33 extends vertically, with its lower end connected to the motor 32 and its upper end fixed to the center of the lower surface of the spin base 21. When the motor 32 is driven, the support shaft 33 rotates about its axis 330. Then, together with the support shaft 33, the substrate holding part 20 and the substrate W held by the substrate holding part 20 also rotate about the axis 330.

[0032] The processing liquid supply unit 40 is a mechanism that supplies a processing liquid to the upper surface of the substrate W held by the substrate holding unit 20. The processing liquid supply unit 40 has a nozzle 41. As shown in FIG. 1, the nozzle 41 has a nozzle arm 411 and a nozzle head 412 provided at the tip of the nozzle arm 411. The nozzle arm 411 rotates in the horizontal direction by driving a motor (not shown). This allows the nozzle head 412 to move between a processing position (position in FIG. 1) above the substrate W held by the substrate holding unit 20 and a retracted position outside the cup 50.

[0033] 2 is a diagram schematically showing a liquid supply unit connected to the nozzle head 412. The nozzle head 412 is connected to a liquid supply source 414 that stores a processing liquid via a pipe 415. A pump 416 and a valve 417 are provided on the path of the pipe 415. When the valve 417 is opened and the pump 416 is operated with the nozzle head 412 placed at the processing position, the processing liquid is supplied from the liquid supply source 414 through the pipe 415 to the nozzle head 412. Then, the processing liquid is discharged from the nozzle head 412 toward the upper surface of the substrate W.

[0034] In the substrate processing apparatus 1, while the substrate W is rotated by the rotation mechanism 30, the nozzle head 412 ejects the processing liquid onto the center of the upper surface of the substrate W. The processing liquid spreads from the center to the periphery of the upper surface of the substrate W due to centrifugal force caused by the rotation of the substrate W. As a result, a liquid film of the processing liquid is formed on the upper surface of the substrate W.

[0035] Examples of processing liquids that can be used include DHF cleaning liquid (dilute hydrofluoric acid), SPM cleaning liquid (a mixture of sulfuric acid and hydrogen peroxide), SC-1 cleaning liquid (a mixture of ammonia water, hydrogen peroxide, and pure water), SC-2 cleaning liquid (a mixture of hydrochloric acid, hydrogen peroxide, and pure water), and pure water (deionized water). However, the type of processing liquid is not limited, and processing liquids other than those listed above may also be used.

[0036] It should be noted that one substrate processing apparatus 1 may be provided with a plurality of nozzles 41. Furthermore, the substrate processing apparatus 1 may further include a nozzle that supplies a processing liquid toward the lower surface of the substrate W.

[0037] The cup 50 is a mechanism for collecting the processing liquid after use. As shown in FIG. 1, the cup 50 has an annular guide plate 51 that surrounds the substrate holding unit 20. The cup 50 can be raised and lowered by a lifting mechanism (not shown). When the nozzle 41 discharges the processing liquid, the guide plate 51 is positioned at a height that surrounds the substrate W held by the substrate holding unit 20. The processing liquid discharged from the nozzle 41 is supplied to the upper surface of the substrate W, and then scattered outward by centrifugal force caused by the rotation of the substrate W. The processing liquid scattered from the substrate W is then collected by the guide plate 51. The processing liquid collected by the guide plate 51 is discharged to the outside of the chamber 10 through piping (not shown).

[0038] The imaging device 60 is a device that captures an image of the substrate W to which a processing liquid is supplied. As shown in Figure 1, the imaging device 60 of this embodiment includes a reflecting mirror 61, a distributor 62, an event-based camera 63, a high-speed camera 64, and an illumination unit 65.

[0039] The reflecting mirror 61 is located inside the chamber 10. The reflecting mirror 61 is disposed vertically above the peripheral edge of the substrate W held by the substrate holder 20. The reflecting mirror 61 is also disposed at the same height as the window 15. The reflecting mirror 61 is disposed at an angle of approximately 45° with respect to the vertical and horizontal directions so as to reflect the observation light L traveling vertically upward from the peripheral edge of the substrate W horizontally toward the window 15.

[0040] The distributor 62, event-based camera 63, high-speed camera 64, and illumination unit 65 are located outside the chamber 10. The distributor 62 is disposed in a position close to the outside of the window 15. The reflecting mirror 61, the window 15, the distributor 62, and the illumination unit 65 are aligned in a horizontal line. The distributor 62 distributes the observation light L, which travels from the reflecting mirror 61 through the window 15 to the outside of the chamber 10, into a first observation light L1 and a second observation light L2.

[0041] 3 is a diagram showing the configuration of the imaging device 60. As shown in Fig. 3, the distributor 62 has a first distributor 621 and a second distributor 622. The first distributor 621 and the second distributor 622 are arranged along the optical path of the observation light L.

[0042] The first distributor 621 is an optical component that splits the observation light L into a first observation light L1 and the remaining intermediate light L3. The first distributor 621 distributes the first observation light L1 to the event-based camera 63 and distributes the intermediate light L3 to the second distributor 622. The amount of light of the first observation light L1 is smaller than the amount of light of the intermediate light L3. Specifically, the amount of light of the first observation light L1 is set to, for example, about 1 to 10% of the amount of light of the observation light L.

[0043] The first distributor 621 uses raw glass with no reflective coating on its surface. The raw glass is placed in the optical path of the observation light L. The raw glass is also placed with its reflective surface tilted at 45° with respect to the optical axis of the observation light L. Part of the observation light L is reflected by the surface of the raw glass and becomes first observation light L1. The light that passes through the raw glass then travels to the second distributor 622 as intermediate light L3.

[0044] The second distributor 622 is an optical component that splits the intermediate light L3 into the second observation light L2 and the remaining light. The second distributor 622 splits the second observation light L2 to the high-speed camera 64. The amount of light of the second observation light L2 is greater than the amount of light of the first observation light L1. Specifically, the amount of light of the second observation light L2 is approximately 5 to 20 times the amount of light of the first observation light L1.

[0045] A half mirror is used for the second distributor 622. The half mirror is disposed on the optical path of the intermediate light L3. The half mirror is disposed with its reflective surface tilted at 45° with respect to the optical axis of the intermediate light L3. Approximately half of the intermediate light L3 is reflected by the surface of the half mirror to become the second observation light L2.

[0046] The event-based camera 63 is disposed on the optical path of the first observation light L1. Unlike a general frame-based camera used for capturing video, the event-based camera 63 is a camera that captures only changes in brightness. A frame-based camera outputs capture data in which frame images, each containing information on the brightness values ​​of a large number of pixels, are arranged in chronological order. In contrast, the event-based camera 63 outputs capture data (hereinafter referred to as "first capture data D1") consisting of information only on pixels whose brightness values ​​have changed. Specifically, the first capture data D1 consists only of information on the time at which the brightness value changed, the pixels whose brightness values ​​changed, and the direction of the change in brightness value. For this reason, the amount of information in the first capture data D1 output from the event-based camera 63 is smaller than the amount of information in the capture data output from a frame-based camera.

[0047] Therefore, when the event-based camera 63 is used, the acquisition and transfer of photographed data can be performed at higher speeds than when a frame-based camera is used. Furthermore, the event-based camera 63 can acquire the first photographed data D1 at time intervals equivalent to those of the high-speed camera 64. Therefore, when the event-based camera 63 is used, the high-speed movement of the substrate W and the processing liquid supplied to the substrate W can be photographed.

[0048] The high-speed camera 64 is disposed on the optical path of the second observation light L2. The high-speed camera 64 is a frame-based camera for capturing moving images, with a frame rate higher than that of a typical frame-based camera. While the frame rate of the captured data acquired by a typical frame-based camera is 30 to 60 frames per second, the frame rate of the captured data acquired by the high-speed camera 64 (hereinafter referred to as "second captured data D2") is 1000 frames per second or higher. Therefore, the high-speed camera 64 can capture the high-speed movement of the substrate W and the processing liquid supplied to the substrate W.

[0049] The illumination unit 65 is a device that irradiates illumination light for photographing the substrate W. The illumination unit 65 is arranged further outside the first distributor 621 and second distributor 622, which are arranged outside the window unit 15. The illumination unit 65 is also arranged on the optical path of the observation light L. The illumination unit 65 uses a light source that can emit light with an amount of light equal to or greater than the total amount of light required for photographing by the event-based camera 63 and the high-speed camera 64. The light source of the illumination unit 65 is, for example, an LED (Light Emitting Diode) or a metal halide lamp.

[0050] When the event-based camera 63 and the high-speed camera 64 are capturing images, the light source of the illumination unit 65 emits light. As a result, illumination light is emitted from the illumination unit 65 toward the second distributor 622. The illumination light passes through the half mirror that is the second distributor 622, the plain glass that is the first distributor 621, and the window unit 15, and enters the interior of the chamber 10. Furthermore, inside the chamber 10, the illumination light is reflected by the reflecting mirror 61 and is irradiated onto the upper surface of the substrate W held by the substrate holder 20.

[0051] The illumination light is reflected on the upper surface of the substrate W to become the above-mentioned observation light L. The observation light L is divided into a first observation light L1 and a second observation light L2 by a distributor 62. The event-based camera 63 images the upper surface of the substrate W using the first observation light L1. The high-speed camera 64 images the upper surface of the substrate W using the second observation light L2. The field of view of the event-based camera 63 and the field of view of the high-speed camera 64 include the same range of the upper surface of the substrate W.

[0052] The event-based camera 63 outputs first photographic data D1 obtained by photographing to the control unit 70. The high-speed camera 64 outputs second photographic data D2 obtained by photographing to the control unit 70.

[0053] The control unit 70 is an information processing device that controls the above-mentioned components of the substrate processing apparatus 1. Fig. 4 is a control block diagram of the substrate processing apparatus 1. As conceptually shown in Fig. 4, the control unit 70 is configured by a computer having a processor 71 such as a CPU, a memory 72 such as a RAM, and a storage unit 73 such as a hard disk drive. However, the control unit 70 may also include an electric circuit board other than a computer.

[0054] A control program P1 and an inspection program P2 are stored in the storage unit 73. The control program P1 is a computer program for controlling the operation of each part of the substrate processing apparatus 1 in order to process the substrate W in the substrate processing apparatus 1. The inspection program P2 is a computer program for inspecting the processing state of the substrate W based on the first photographed data D1 and the second photographed data D2 obtained from the imaging device 60.

[0055] 4, the control unit 70 is communicably connected to the above-mentioned chuck pin switching mechanism 23, motor 32, pump 416, valve 417, cup 50, event-based camera 63, high-speed camera 64, and lighting unit 65, respectively, via wire or wirelessly. The control unit 70 is also communicably connected to a display unit 74 such as a liquid crystal display. The control unit 70 controls the operation of each of the above-mentioned units in accordance with a control program P1. This allows the cleaning process of the substrate W in the substrate processing apparatus 1 to proceed. <2. Inspection processing using imaging devices>

[0056] The substrate processing apparatus 1 holds a substrate W on a substrate holder 20, and while rotating the substrate W using a rotation mechanism 30, ejects a processing liquid onto the substrate W from a nozzle 41. The processing liquid spreads from the center to the periphery of the upper surface of the substrate W due to centrifugal force caused by the rotation of the substrate W. At this time, the liquid film formed on the upper surface of the substrate W gradually becomes thinner as it spreads from the center to the periphery of the substrate W. For this reason, the liquid film may break at the periphery of the upper surface of the substrate W, causing the upper surface of the substrate W to be partially exposed. This phenomenon is called a "coverage break." When a coverage break occurs, the upper surface of the substrate W is unevenly processed by the processing liquid.

[0057] Therefore, the control unit 70 checks whether a coverage break has occurred based on the first photographed data D1 and the second photographed data D2 obtained from the imaging device 60. The check process will be described below with reference to the flowchart in FIG.

[0058] The control unit 70 first determines whether or not the nozzle 41 has started discharging the treatment liquid (step S1). If the nozzle 41 has not started discharging the treatment liquid (step S1: No), the control unit 70 continues to wait for the nozzle 41 to start discharging the treatment liquid. Then, when the nozzle 41 starts discharging the treatment liquid (step S1: Yes), the control unit 70 starts capturing images using the event-based camera 63 and the high-speed camera 64 (step S2).

[0059] The control unit 70 outputs a common synchronization signal to the event-based camera 63 and the high-speed camera 64. The event-based camera 63 and the high-speed camera 64 capture images based on the synchronization signal. This allows the event-based camera 63 and the high-speed camera 64 to simultaneously capture images of the substrate W in a synchronized state.

[0060] The event-based camera 63 captures an image of the top surface of the substrate W held by the substrate holder 20 through the first distributor 621, the window 15, and the reflecting mirror 61. The event-based camera 63 outputs first photographed data D1 obtained by photographing to the control unit 70. The control unit 70 acquires the first photographed data D1 sequentially output from the event-based camera 63 (step S3).

[0061] Because the substrate W rotates at high speed, if a coverage break occurs on the top surface of the substrate W, the location of the occurrence also moves at high speed. Furthermore, the coverage break itself may occur for a very short period of time. However, the event-based camera 63 can acquire the first photographed data D1 at short time intervals. Therefore, a coverage break that occurs on the top surface of the substrate W can be appropriately photographed. Furthermore, the first photographed data D1 output from the event-based camera 63 is composed of information only about pixels whose brightness values ​​have changed. Therefore, the control unit 70 can process the first photographed data D1 at high speed while processing the substrate W.

[0062] In parallel with the event-based camera 63, the high-speed camera 64 also photographs the same area of ​​the substrate W. The high-speed camera 64 then outputs second photographed data D2 obtained by photographing to the control unit 70. The control unit 70 acquires the second photographed data D2 sequentially output from the high-speed camera 64. However, since the second photographed data D2 output from the high-speed camera 64 has a large data volume, it may be transferred to the control unit 70 later than the first photographed data D1.

[0063] The control unit 70 checks whether a coverage break has occurred based on the first photographed data D1 acquired from the event-based camera 63 (step S4). Specifically, if there is no part in the first photographed data D1 where the brightness value has changed, or if the part in the first photographed data D1 where the brightness value has changed does not satisfy a predetermined condition, the control unit 70 determines that a coverage break has not occurred. On the other hand, if there is a part in the first photographed data D1 where the brightness value has changed and that part satisfies a predetermined condition, the control unit 70 determines that a coverage break has occurred.

[0064] If the control unit 70 determines that a coverage break has not occurred (step S4: No), it continues to eject the processing liquid from the nozzle 41 while repeating the inspection process of steps S3 to S4.

[0065] On the other hand, if the control unit 70 determines that a coverage break has occurred (step S4: Yes), it outputs an alarm (step S5). The alarm may be output, for example, by displaying a message on the display unit 74, sounding a buzzer, turning on a lamp, etc. Furthermore, if the control unit 70 determines that a coverage break has occurred, it may stop processing the substrate W.

[0066] Thereafter, the control unit 70 identifies the time when the coverage break occurred based on the synchronization signal input to the event-based camera 63 (step S6). Then, the control unit 70 displays the second photographed data D2 output from the high-speed camera 64 on the display unit 74 (step S7). At this time, the control unit 70 may display only a portion of the second photographed data D2 that includes the time identified in step S6 on the display unit 74.

[0067] The user of the substrate processing apparatus 1 checks the second photographed data D2 displayed on the display unit 74. This allows the user to confirm whether or not a coverage break has actually occurred. Furthermore, if a coverage break has occurred, the user can observe in detail the position, size, duration, etc. of the coverage break based on the image captured by the high-speed camera 64.

[0068] As described above, in the substrate processing apparatus 1 of this embodiment, the observation light L from the upper surface of the substrate W is distributed to the event-based camera 63 and the high-speed camera 64. This allows the event-based camera 63 and the high-speed camera 64 to simultaneously capture images of the same area of ​​the substrate W. Therefore, changes in the state of the substrate W can be detected in real time by the event-based camera 63, and detailed observation can be performed by the high-speed camera 64 as necessary.

[0069] Because the exposure time per frame is extremely short, the high-speed camera 64 needs to capture images with a greater amount of light than a normal video camera. In contrast, if the amount of light is too great, the event-based camera 63 finds it difficult to output changes in brightness values ​​due to saturation. In other words, the optimal amount of light during capture differs between the event-based camera 63 and the high-speed camera 64.

[0070] In this regard, the distributor 62 of this embodiment distributes the observation light L so that the intensity of the second observation light L2 is greater than that of the first observation light L1. Specifically, the distributor 62 distributes the observation light L so that the intensity of the second observation light L2 is approximately 5 to 20 times that of the first observation light L1. In this way, the event-based camera 63 can capture images using the first observation light L1 with an intensity that does not cause saturation. Furthermore, the high-speed camera 64 can capture images with a sufficient intensity using the second observation light L2. In other words, the event-based camera 63 and the high-speed camera 64 can capture images with an appropriate intensity of light.

[0071] <3. Modifications> Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. Various modifications will be described below, focusing on the differences from the above embodiment.

[0072] <3-1. About the distribution department> In the above embodiment, plain glass is used for the first distributor 621, and a half mirror is used for the second distributor 622. However, the first distributor 621 and the second distributor 622 may be configured with other optical elements. For example, the first distributor 621 or the second distributor 622 may be configured using a beam splitter in which the amount of reflected light and transmitted light differs, a prism, a pellicle, an ND filter, or the like.

[0073] Furthermore, in the above embodiment, the first distributor 621 was positioned closer to the substrate W, which is the object, than the second distributor 622. However, the second distributor 622 may be positioned closer to the substrate W than the first distributor 621. However, as in the above embodiment, the amount of observation light L can be used more efficiently by positioning the first distributor 621, which has a relatively high transmittance, closer to the substrate W, which is the object, than the second distributor 622, which has a relatively low transmittance.

[0074] <3-2. Lighting> In the above embodiment, the illumination light emitted from the illumination unit 65 is irradiated onto the substrate W through the second distributor 622 and the first distributor 621. That is, the illumination light emitted from the illumination unit 65 is irradiated onto the substrate W through the same optical path as the observation light L. In this way, the illumination light can be irradiated perpendicularly onto the top surface of the substrate W, and the specularly reflected light can be used as the observation light L. This allows the amount of illumination light to be used efficiently as the observation light L.

[0075] However, the illumination unit 65 may be disposed at a position that does not overlap with the optical path of the observation light L. For example, the illumination unit 65 may irradiate the upper surface of the substrate W with light in an oblique direction. In this case, although the amount of observation light L is reduced, it is possible to prevent the illumination unit 65 itself from appearing in the photographed data.

[0076] <3-3. Observation light> In the above embodiment, the observation light L is emitted horizontally from the window 15. In the above embodiment, the first distributor 621 splits the first observation light L1 downward, and the second distributor 622 splits the second observation light L2 upward. However, the directions in which the first distributor 621 and the second distributor 622 split the light can be set arbitrarily. For example, the first distributor 621 may split the first observation light L1 upward or horizontally. Furthermore, the second distributor 622 may split the second observation light L2 downward or horizontally.

[0077] In the above embodiment, the reflection mirror 61 is used to cause the observation light L to be emitted horizontally outward from the window 15. However, the reflection mirror 61 may be omitted, and a window 15 may be provided on the top panel 13 of the chamber 10 so that the observation light L is emitted upward from the window 15. In that case, as shown in FIG. 6 , the imaging device 60 may be arranged so that the first distributor 621 and the second distributor 622 are aligned vertically.

[0078] The imaging device 60 may also be configured to capture an image of the upper surface of the substrate W from obliquely above. In this case, the imaging device 60 may be disposed so that the first distributor 621 and the second distributor 622 are aligned obliquely with respect to the horizontal and vertical directions.

[0079] <3-4. About the target object> In the above embodiment, the substrate W to which the processing liquid is supplied is the object to be photographed. In particular, in the above embodiment, the purpose of photographing is to detect and observe a coverage break that occurs on the upper surface of the substrate W. However, the imaging device 60 may also photograph the substrate W for the purpose of detecting and observing an event other than a coverage break that occurs on the substrate W during processing.

[0080] The imaging device 60 is particularly suitable for capturing an image of an object that moves at high speed, but the object is not limited to the substrate W. The imaging device 60 may also capture an image of an object other than the substrate W. Furthermore, the imaging device 60 may be mounted on industrial manufacturing equipment other than the substrate processing apparatus 1.

[0081] Furthermore, the elements appearing in the above-described embodiments and modifications may be combined in any manner as long as no contradictions arise. [Explanation of symbols]

[0082] 1: Substrate processing equipment 10: Chamber 15: Window section 20: Board holding part 30: Rotation mechanism 40: Processing liquid supply unit 50: Cup 60: Imaging device 61: Reflective mirror 62:Distribution section 63: Event-based camera 64: High-speed camera 65: Lighting Department 70: Control unit 74:Display section 621: 1st distributor 622:Second distributor D1: First shooting data D2: Second shooting data L: Observation light L1: First observation light L2: Second observation light L3: Medium light P1: Control program P2: Inspection Program W: Substrate

Claims

1. An imaging device for photographing an object, a distributor that distributes the observation light from the object into a first observation light and a second observation light; an event-based camera that captures an image of the object using the first observation light; a high-speed camera that captures an image of the object using the second observation light; Equipped with An imaging device, wherein the field of view of the event-based camera and the field of view of the high-speed camera include the same range of the object.

2. 2. The imaging device according to claim 1, The event-based camera and the high-speed camera simultaneously capture images based on a common synchronization signal.

3. 3. The imaging device according to claim 1, an amount of the second observation light is greater than an amount of the first observation light;

4. 3. The imaging device according to claim 1, the distributor includes a first distributor and a second distributor, the first distributor distributes the first observation light of the observation light incident from the object to the event-based camera and distributes the remaining light to the second distributor; The second distributor distributes the second observation light, of the remaining light incident from the first distributor, to the high-speed camera.

5. 5. The imaging device according to claim 4, the first distributor is made of plain glass; The imaging device, wherein the second distributor is a half mirror.

6. 6. The imaging device according to claim 5, an imaging device, wherein the first distributor is disposed closer to the object than the second distributor;

7. 5. The imaging device according to claim 4, an illumination unit that irradiates the object with light; Furthermore, The observation light is light that is irradiated from the illumination unit and reflected by the object.

8. 8. The imaging device according to claim 7, An imaging device, wherein light emitted from the illumination unit passes through the first distributor and the second distributor and is irradiated onto the object.

9. The imaging device according to claim 1 or 2; a substrate holder for holding the substrate, which is the object; a processing liquid supply unit that supplies a processing liquid to the substrate held by the substrate holder; Equipped with The imaging device captures an image of the substrate to which the processing liquid is supplied.

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