Smoke detection device, smoke detection method, and program

Abstract

It detects smoke emission with high accuracy. [Solution] The smoke detection device 1 includes an inspection substrate 2, a plurality of sockets 3, a plurality of graphene sheets 4, and a smoke detector 5. The plurality of sockets 3 are mounted on the inspection substrate 2, and each holds a semiconductor device 8. The plurality of graphene sheets 4 are each placed near the plurality of sockets 3. The smoke detector 5 detects smoke based on the change in the resistance values ​​of the plurality of graphene sheets 4.

Description

Technical Field

[0001] The present invention relates to a smoke detection device, a smoke detection method, and a program.

Background Art

[0002] Patent Document 1 discloses a combustible gas detector. The combustible gas detector has a graphene oxide composite film, a detection electrode, a reference electrode, and a potentiometer. The detection electrode is formed on one surface of the graphene oxide composite film. The reference electrode is formed on the other surface of the graphene oxide composite film. The potentiometer measures the potential difference between the detection electrode and the reference electrode. By measuring the potential difference between the detection electrode and the reference electrode, the combustible gas component contained in the test gas is detected. The electromotive force generated by the potential difference is proportional to the concentration of the combustible gas. Specific examples of the combustible gas include hydrogen gas, carbon monoxide gas, methane gas, and ethanol.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the configuration of Patent Document 1 above, since the potential difference between the detection electrode and the reference electrode of the graphene oxide composite film is minute, it is difficult to remove noise from the measurement result by the potentiometer. Therefore, there remains room for improving the detection accuracy of the combustible gas.

[0005] Other problems and novel features will become apparent from the description of this specification and the attached drawings.

Means for Solving the Problems

[0006] A smoke detection device is provided, which includes at least one graphene sheet positioned near at least one socket mounted on an inspection substrate and holding a semiconductor device, and a smoke detector that detects smoke emission based on a change in the resistance value of the at least one graphene sheet. [Effects of the Invention]

[0007] According to this disclosure, smoke emission is detected based on changes in the resistance value of the graphene sheet, thus enabling highly accurate detection of smoke. [Brief explanation of the drawing]

[0008] [Figure 1] A perspective view of a smoke detection device. (First Embodiment) [Figure 2] This is a cross-sectional view taken along line II-II in Figure 1. (First Embodiment) [Figure 3] This is a block diagram of a smoke detection device. (First Embodiment) [Figure 4] This graph shows the drain current of a graphene FET. (First Embodiment) [Figure 5] This is the control flow for a smoke detection device. (First Embodiment) [Figure 6] This is a perspective view of a smoke detection device. (Second Embodiment) [Figure 7] This is a cross-sectional view of the socket. (Third embodiment) [Modes for carrying out the invention]

[0009] The present invention will be described below through embodiments of the invention, but the invention claimed is not limited to the following embodiments. Furthermore, not all of the configurations described in the embodiments are necessarily essential as means of solving the problem. For clarity of explanation, the following descriptions and drawings have been omitted and simplified as appropriate. In each drawing, the same elements are denoted by the same reference numerals, and redundant explanations have been omitted where necessary.

[0010] In the following embodiments, the description will be divided into multiple sections or embodiments where necessary for convenience. Unless otherwise specified, these are not unrelated, and one may be a modification, application, detailed explanation, or supplementary explanation of part or all of the other. Furthermore, in the following embodiments, when referring to the number of elements (including number, numerical value, quantity, and range), unless otherwise specified or clearly limited to a specific number in principle, it is not limited to that specific number, and may be greater than or less than that number.

[0011] Furthermore, in the following embodiments, the components (including operation steps, etc.) are not necessarily essential unless specifically stated or considered to be fundamentally essential. Similarly, in the following embodiments, when referring to the shape or positional relationship of components, etc., it shall include those substantially similar to or resembling their shape, etc., unless specifically stated or considered to be fundamentally different. The same applies to the numbers, etc. (including number, numerical value, quantity, and range) mentioned above.

[0012] (First Embodiment) A first embodiment of this disclosure will be described below with reference to Figures 1 to 5. Figure 1 shows a perspective view of the smoke detection device 1. The smoke detection device 1 is typically applied to semiconductor testing equipment. Semiconductor testing equipment is applied to, for example, burn-in equipment, ATE (Automated Test Equipment) equipment, and SLT (System Level Test) equipment. The smoke detection device 1 is installed within the equipment of the semiconductor testing equipment.

[0013] As shown in Figure 1, the smoke detection device 1 includes an inspection substrate 2, multiple sockets 3, multiple graphene sheets 4, a smoke detector 5, and an alarm 6.

[0014] The inspection substrate 2 is a rigid substrate, typically a paper phenolic substrate, a paper epoxy substrate, a glass epoxy substrate, or a glass composite substrate.

[0015] Each socket 3 holds the semiconductor device 8 (Figure 2) to be inspected and electrically connects the semiconductor device 8 to the circuit on the inspection board 2. As shown in Figure 1, the multiple sockets 3 are mounted on the socket mounting surface 2a of the inspection board 2. Specifically, the multiple sockets 3 are arranged to form multiple socket rows 7 that extend parallel to each other. In other words, the multiple sockets 3 are arranged in a grid.

[0016] Figure 2 shows a cross-sectional view taken along line II-II in Figure 1. As shown in Figure 2, each socket 3 consists of a fixed socket 3a that is soldered to the socket mounting surface 2a of the inspection board 2, and a movable socket 3b that can be opened and closed relative to the fixed socket 3a. To hold the semiconductor device 8 in the socket 3, the movable socket 3b is switched from the closed state to the open state shown in Figure 2, the semiconductor device 8 is fitted into the semiconductor housing space 9 of the fixed socket 3a, and then the movable socket 3b is returned from the open state to the closed state. As a result, the terminals of the semiconductor device 8 are electrically connected to the socket mounting surface 2a of the inspection board 2 via the fixed socket 3a.

[0017] Returning to FIG. 1, each of the plurality of sockets 3 is provided with a plurality of graphene sheets 4. Specifically, as shown in FIG. 2, each graphene sheet 4 is disposed within each socket 3. Each graphene sheet 4 is disposed within the internal space 3Q of each socket 3. Each graphene sheet 4 is disposed above the semiconductor device 8 within the socket 3. Each graphene sheet 4 is typically held by the movable socket 3b. Each graphene sheet 4 is, as an example, held by the movable socket 3b such that, in the closed state of the socket 3, it contacts the upper surface 8a of the semiconductor device 8 fitted into the fixed socket 3a. Alternatively, each graphene sheet 4 may be held by the movable socket 3b such that a gap is formed between the upper surface 8a of the semiconductor device 8 fitted into the fixed socket 3a and the graphene sheet 4 in the closed state of the socket 3. Each graphene sheet 4 typically has a thickness of from 10 micrometers to 50 micrometers. However, in FIG. 2, the thickness of the graphene sheet 4 is exaggeratedly drawn.

[0018] The smoke detector 5 detects smoke based on fluctuations in the resistance values of the plurality of graphene sheets 4. FIG. 3 shows a block diagram of the smoke detection device 1. As shown in FIG. 3, the smoke detector 5 has a processor 5a and a memory 5b. The smoke detector 5 may be constituted by a single device or may be realized by distributed processing by a plurality of devices. The processor 5a is accessible to the memory 5b. The processor 5a reads and executes a program stored in the memory 5b. Thereby, the processor 5a causes hardware such as the processor 5a to function as a voltage application unit 10, a current value measurement unit 11, a smoke detection unit 12, and an alarm unit 13.

[0019] Memory 5b further stores various data used for information processing by processor 5a. Note that processor 5a may be an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), or a CPLD (Complex Programmable Logic Device).

[0020] The smoke detector 5 is electrically connected to a plurality of graphene sheets 4. Specifically, as shown in FIG. 2, a pair of electric wires 15 are connected to the upper surface 4a of each graphene sheet 4. Thereby, the smoke detector 5 can apply a predetermined voltage to each graphene sheet 4. Note that instead of being connected to the upper surface 4a of each graphene sheet 4, the pair of electric wires 15 may be connected to the lower surface 4b of each graphene sheet 4, or one may be connected to the upper surface 4a and the other to the lower surface 4b. Also, when connecting the pair of electric wires 15 to the upper surface 4a of each graphene sheet 4, the two connection positions where the pair of electric wires 15 are connected to the upper surface 4a may be arranged close to each other in a plan view, or may be arranged as far apart from each other as possible in a plan view. The same applies when connecting the pair of electric wires 15 to the lower surface 4b of each graphene sheet 4 or when connecting one to the upper surface 4a and the other to the lower surface 4b.

[0021] The voltage application unit 10 applies a predetermined voltage to each graphene sheet 4 using the pair of electric wires 15. The predetermined voltage is typically, but not limited to, from 1 volt to 10 volts.

[0022] The current value measurement unit 11 measures the current value of the current flowing through each graphene sheet 4 using the pair of electric wires 15.

[0023] The smoke detection unit 12 detects smoke based on fluctuations in the resistance values ​​of multiple graphene sheets 4. Specifically, the smoke detection unit 12 detects smoke based on the current value measured by the current value measuring unit 11. Detecting smoke typically means detecting the generation of nitrogen dioxide or ammonia. Detecting smoke may also mean detecting the generation of flammable gases such as hydrogen gas, carbon monoxide gas, methane gas, or ethanol.

[0024] Please refer to Figure 4. Figure 4 shows the response of a graphene FET (Field-Effect Transistor) to ammonia (NH3). Figure 4 is from "Electrical Biosensing at Physiological Ionic Strength Using Graphene Field-Effect Transistor in Femtoliter Microdroplet" by Takao Ono, Yasushi Kanai, Koichi Inoue, Yohei Watanabe, Shin-ichi Nakakita, Toshio Kawahara, Yasuo Suzuki, and Kazuhiko Matsumoto, published in Nano Letters, 2019. The horizontal axis of Figure 4 represents time, and the vertical axis shows the drain current value of the graphene FET. It can be seen that when ammonia (NH3) is introduced at the time indicated by the black arrow in Figure 4, the drain current decreases.

[0025] Therefore, the smoke detection unit 12 determines whether the current value of each graphene sheet 4 has fallen below a threshold. When the current value of a graphene sheet 4 falls below the threshold, it means that the resistance of that graphene sheet 4 has increased. The smoke detection unit 12 then detects smoke emission in response to the fact that the current value of at least one of the multiple graphene sheets 4 has fallen below the threshold.

[0026] The alarm unit 13 outputs an alarm signal to the alarm device 6 in response to the smoke detection unit 12 detecting smoke. In response, the alarm device 6 issues an alarm. An alarm can be, for example, a visual alarm, an auditory alarm, or any other type of alarm.

[0027] Next, the operation of the smoke detection device 1 will be explained with reference to Figure 5.

[0028] First, the voltage application unit 10 applies a predetermined voltage to each of the multiple graphene sheets 4 (S100). Next, the current value measurement unit 11 measures the current value in each of the multiple graphene sheets 4 (S110). Next, the smoke detection unit 12 determines whether the current value in at least one of the multiple graphene sheets 4 has fallen below a threshold (S120). If it is determined that the current value in all of the multiple graphene sheets 4 has not fallen below the threshold (S120: NO), the smoke detection unit 12 returns to step S110. On the other hand, if it is determined that the current value in at least one of the multiple graphene sheets 4 has fallen below the threshold (S120: YES), the smoke detection unit 12 detects smoke (S130). Then, the alarm unit 13 outputs an alarm signal to the alarm device 6 (S140), and the process ends.

[0029] The first embodiment of this disclosure has been described above. The first embodiment has the following features.

[0030] The smoke detection device 1 includes an inspection substrate 2, a plurality of sockets 3, a plurality of graphene sheets 4, and a smoke detector 5. The plurality of sockets 3 are mounted on the inspection substrate 2, and each holds a semiconductor device 8. The plurality of graphene sheets 4 are each placed near the plurality of sockets 3. The smoke detector 5 detects smoke based on fluctuations in the resistance values ​​of the plurality of graphene sheets 4. With this configuration, since smoke is detected based on fluctuations in the resistance values ​​of the graphene sheets 4, smoke can be detected with high accuracy.

[0031] In the first embodiment described above, the smoke detection device 1 includes a plurality of sockets 3 and a plurality of graphene sheets 4. However, the number of sockets 3 may be just one, and the number of graphene sheets 4 may also be just one. Furthermore, the graphene sheets 4 may not be arranged correspondingly in all of the plurality of sockets 3, but rather in some of the plurality of sockets 3.

[0032] Furthermore, each graphene sheet 4 is placed within each socket 3. With this configuration, each graphene sheet 4 can be placed very close to the semiconductor device 8 held in each socket 3.

[0033] Furthermore, each graphene sheet 4 is positioned above the semiconductor device 8 within each socket 3. With this configuration, the fitting of the semiconductor device 8 to the socket 3 is not hindered by the graphene sheet 4.

[0034] Furthermore, the smoke detector 5 applies a predetermined voltage to each of the multiple graphene sheets 4, individually measures the current flowing through the multiple graphene sheets 4, and detects smoke based on the measured current values. With this configuration, fluctuations in the resistance values ​​of the multiple graphene sheets 4 can be easily measured.

[0035] Furthermore, the smoke detection device 1 further includes an alarm 6 that emits an alarm in response to the smoke detector 5 detecting smoke. With this configuration, the operator of the semiconductor inspection equipment can respond quickly to smoke.

[0036] (Second Embodiment) Next, a second embodiment of the present disclosure will be described with reference to Figure 6. The following description will focus on the differences between this embodiment and the first embodiment, omitting any redundant explanations. Figure 6 shows a perspective view of the smoke detection device 1.

[0037] In this embodiment, the multiple graphene sheets 4 extend along the longitudinal direction of each socket row 7 and are arranged adjacent to each socket row 7 in a direction perpendicular to the longitudinal direction. Specifically, each graphene sheet 4 is positioned between two adjacent socket rows 7. Typically, each graphene sheet 4 is attached to the socket mounting surface 2a of the inspection substrate 2 by adhesive. With this configuration, the smoke detection device 1 can be realized in a simpler form compared to the first embodiment in which multiple graphene sheets 4 are arranged in each of the multiple sockets 3.

[0038] (Third embodiment) Next, a third embodiment of the present disclosure will be described with reference to Figure 7. The following description will focus on the differences between this embodiment and the first embodiment, omitting any redundant explanations. Figure 7 shows a cross-sectional view of the socket 3.

[0039] As shown in Figure 7, in this embodiment, an interposer 20 is provided between the socket mounting surface 2a of the inspection substrate 2 and the fixed-side socket 3a of each socket 3. Each interposer 20 electrically connects each socket 3 to the socket mounting surface 2a of the inspection substrate 2. Each graphene sheet 4 is provided on each interposer 20. Specifically, each graphene sheet 4 is provided on the upper surface 20a of each interposer 20. In other words, each graphene sheet 4 is provided in the gap between the fixed-side socket 3a of each socket 3 and each interposer 20. As a result, it can be said that each graphene sheet 4 is provided below each socket 3. In this way, each graphene sheet 4 is provided on each interposer 20, so that the fitting of the semiconductor device 8 to the socket 3 is not hindered by the graphene sheet 4.

[0040] In the above example, the program can be stored and supplied to the computer using various types of non-transitory computer-readable medium. Non-transitory computer-readable medium includes various types of tangible storage medium. Examples of non-transitory computer-readable medium include magnetic storage media (e.g., flexible disks, magnetic tapes, hard disk drives) and magneto-optical storage media (e.g., magneto-optical disks). Examples of non-transitory computer-readable medium further include CD-ROM (Read Only Memory), CD-R, CD-R / W, and semiconductor memory (e.g., mask ROM; examples of non-transitory computer-readable medium further include PROM (Programmable ROM), EPROM (Erasable PROM), flash ROM, and RAM (random access memory)). Alternatively, the program may be supplied to the computer by various types of transient computer-readable medium. Examples of transient computer-readable medium include electrical signals, optical signals, and electromagnetic waves. Temporary computer-readable media can supply programs to a computer via wired communication channels such as electric wires and optical fibers, or via wireless communication channels.

[0041] The present invention has been described in detail above based on embodiments, but it goes without saying that the present invention is not limited to the embodiments already described, and various modifications are possible without departing from the spirit of the invention. [Explanation of Symbols]

[0042] 1. Smoke detection device 2. Test board 2a Socket mounting surface 3 sockets 3a Fixed socket 3b Movable socket 3Q interior space 4 Graphene Sheets 4a Top side 4b Bottom side 5. Smoke detector 5a processor 5b Memory 6 alarm 7 Socket rows 8 Semiconductor Equipment 8a Top 9. Semiconductor housing space 10 Voltage application section 11 Current value measurement section 12 Smoke detection unit 13 Alarm section 15 Electric wire 20 Interposers 20a top surface

Claims

1. Test board and The inspection board is equipped with at least one socket for holding a semiconductor device, At least one graphene sheet positioned near the at least one socket, A smoke detector that detects smoke emission based on the change in the resistance value of at least one graphene sheet, including, Smoke detection device.

2. The at least one graphene sheet is placed in the at least one socket. The smoke detection device according to claim 1.

3. The at least one graphene sheet is positioned above the semiconductor device within the at least one socket. The smoke detection device according to claim 2.

4. The at least one socket includes a plurality of sockets arranged in a row, The at least one graphene sheet extends along the longitudinal direction of the row and is arranged adjacent to the row. The smoke detection device according to claim 1.

5. The at least one socket includes a plurality of sockets arranged in a plurality of rows extending parallel to each other, The at least one graphene sheet extends along the longitudinal direction of the row and is positioned between two adjacent rows. The smoke detection device according to claim 1.

6. The system further includes at least one interposer provided between the inspection board and the at least one socket, The at least one graphene sheet is provided in the at least one interposer. The smoke detection device according to claim 1.

7. The aforementioned at least one graphene sheet includes a plurality of graphene sheets, The smoke detector detects the smoke based on the change in the resistance values ​​of the plurality of graphene sheets. The smoke detection device according to claim 1.

8. The smoke detector applies a predetermined voltage to at least one graphene sheet, measures the current flowing through the at least one graphene sheet, and detects the smoke based on the current value. The smoke detection device according to claim 1.

9. The smoke detector further includes an alarm that emits an alarm in response to the detection of smoke. The smoke detection device according to claim 1.

10. The resistance variation of at least one graphene sheet located near at least one socket that holds a semiconductor device mounted on a test board is measured. Smoke emission is detected based on the measurement results. Smoke detection method.

11. The aforementioned at least one graphene sheet includes a plurality of graphene sheets, The variation in the resistance values ​​of the plurality of graphene sheets is measured, Based on the measurement results, the smoke emission is detected. The smoke detection method according to claim 10.

12. A predetermined voltage is applied to at least one of the graphene sheets. The current value flowing through the at least one graphene sheet is measured, Based on the current value, the smoke emission is detected. The smoke detection method according to claim 10.

13. Furthermore, an alarm is issued in response to the detection of the aforementioned smoke. The smoke detection method according to claim 10.

14. On the computer, The resistance variation of at least one graphene sheet located near at least one socket that holds a semiconductor device mounted on a test board is measured. Smoke emission is detected based on the measurement results. A program that executes a smoke detection method.

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