Scribing device

Abstract

To provide a scribe device that can suppress cutter misalignment caused by external forces. [Solution] The scribe device 1 forms a scribe line on a substrate by linearly moving a scribe head 11, which has a cutter 11a at its lower end, in the X-axis direction (first direction). The scribe device 1 includes a support member 20 on which the scribe head 11 is mounted, a plurality of linear motion guides 50 that support the support member 20 so as to be movable in the X-axis direction, and a head drive mechanism 60 that moves the support member 20 in the X-axis direction by a motor 63. The plurality of linear motion guides 50 are spaced apart in the Y-axis direction (second direction) which is perpendicular to the X-axis direction (first direction) and parallel to the substrate. The support member 20 is supported by the plurality of linear motion guides 50 so as to straddle the plurality of linear motion guides 50 in the Y-axis direction and has a cutout hole 21a (gap) that allows the cutter 11a to protrude downward from the support member 20.

Description

Technical Field

[0001] The present invention relates to a scribing device for forming a scribe line on a substrate.

Background Art

[0002] Conventionally, a scribing device for forming a scribe line on a substrate such as glass or a wafer for a display has been known. In this type of scribing device, a cutter for forming a scribe line is held by a scribing head. The scribing head is supported by a pair of linear motion guides so as to be movable in a direction parallel to the substrate. The pair of linear motion guides are arranged side by side in a direction perpendicular to the substrate. The back surface of the scribing head is attached to the front surface of a support member supported by the pair of linear motion guides. The scribing device having the above configuration is described in Patent Document 1 below.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the scribing device described in Patent Document 1 above, the scribing head protrudes forward from the support position of the support member by the pair of linear motion guides. Further, since the cutter is arranged at the lower end of the scribing head, the distance between the cutter and the support position in the direction perpendicular to the substrate becomes relatively large. Therefore, the cutter is separated from the support member by a predetermined distance in a direction parallel to the substrate and is also separated from the support member by a predetermined distance in the direction perpendicular to the substrate.

[0005] On the other hand, the support member can be slightly displaced relative to the linear motion guide. Therefore, if an external force is applied to the support member via the cutter, the support member may rotate slightly, causing the cutter to deviate from its target position. This deviation increases as the two separation distances mentioned above increase.

[0006] In view of these problems, the present invention aims to provide a scribe device capable of suppressing cutter displacement due to external forces. [Means for solving the problem]

[0007] The main aspect of the present invention relates to a scribe device for forming a scribe line on a substrate by linearly moving a scribe head having a cutter at its lower end in a first direction. The scribe device according to this aspect comprises a support member on which the scribe head is mounted, a plurality of linear motion guides that support the support member so as to be movable in the first direction, and a head drive mechanism that moves the support member in the first direction by a motor. The plurality of linear motion guides are spaced apart in a second direction that is perpendicular to the first direction and parallel to the substrate. The support member is supported by the plurality of linear motion guides so as to straddle the plurality of linear motion guides in the second direction and has a gap that allows the cutter to protrude below the support member.

[0008] According to the scribe device of this embodiment, the distance between the center of rotation and the cutter when the support member rotates due to an external force can be reduced. Therefore, the displacement of the cutter relative to the target position when the support member rotates due to an external force can be suppressed.

[0009] In the scribe device according to this embodiment, the support member has a lower plate substantially parallel to the substrate, the scribe head is installed on the upper surface of the lower plate, and the lower plate has a hole for the cutter to protrude downward, and the hole may be configured to form the gap.

[0010] With this configuration, the scribe head can be firmly and stably supported by the bottom plate. Furthermore, by forming a hole in the bottom plate, the cutter of the scribe head, which is mounted on the upper surface of the bottom plate, can be made to protrude downward from the lower surface of the bottom plate through the hole.

[0011] The scribe device according to this embodiment may include a lifting mechanism for raising and lowering the scribe head. In this configuration, the lifting mechanism may be installed on the upper side of the support member, and the scribe head may be installed on the upper side of the support member via the lifting mechanism.

[0012] With this configuration, during the scribe operation, the scribe head can be lowered by the lifting mechanism, allowing the cutter to smoothly contact the upper surface of the substrate.

[0013] The scribe device according to this embodiment may comprise a base member having an opening that is long in the first direction, and a plurality of leg members that support the base member. In this configuration, the plurality of linear motion guides may be arranged on the lower surface of the base member, the support member may be suspended and supported by the plurality of linear motion guides, and the scribe head may be configured to be housed within the opening.

[0014] This configuration results in a structure where the distance from the linear motion guide to the cutter is even shorter compared to the case where the linear motion guide and support member are installed on the upper surface of the base member. Therefore, the displacement of the cutter relative to the target position when the support member rotates due to external force can be further suppressed. [Effects of the Invention]

[0015] As described above, the present invention provides a scribe device that can suppress cutter displacement due to external forces.

[0016] The effects or significance of the present invention will become clearer from the following description of the embodiments. However, the following embodiments are merely examples when implementing the present invention, and the present invention is not limited to what is described in the following embodiments at all.

Brief Description of the Drawings

[0017] [Figure 1] FIG. 1 is a perspective view showing the configuration of a scribing device according to an embodiment. [Figure 2] FIG. 2 is a perspective view showing a configuration for supporting a scribing unit so as to be movable in a transfer direction according to an embodiment. [Figure 3] FIGS. 3(a) and (b) are left side view and right side view respectively showing the configuration of a scribing device according to an embodiment. [Figure 4] FIG. 4 is a bottom view showing the configuration of a scribing device according to an embodiment. [Figure 5] FIG. 5 is a front view showing the configuration of a scribing device according to an embodiment. [Figure 6] FIG. 6 is a perspective view showing the configuration of a scribing device according to a comparative example. [Figure 7] FIGS. 7(a) and (b) are right side view and bottom view respectively showing the main part configuration of a scribing device according to a comparative example. [Figure 8] FIGS. 8(a) and (b) are right side view and bottom view respectively showing the main part configuration of a scribing device according to an embodiment. [Figure 9] FIG. 9(a) is a graph showing the measurement results of scribing processing accuracy when using the scribing device according to an embodiment. FIG. 9(b) is a graph showing the measurement results of scribing processing accuracy when using the scribing device according to a comparative example.

Modes for Carrying Out the Invention

[0018] Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience, X-axis, Y-axis, and Z-axis orthogonal to each other are added to each figure. The positive and negative directions of the Z-axis are the vertical directions of the scribing device, respectively, the positive direction of the X-axis is the right direction of the scribing device, and it is the direction in which the scribing head is transferred during the scribing operation (scribing direction). In the present embodiment, the X-axis direction corresponds to the "first direction" described in the claims, and the Y-axis direction corresponds to the "second direction" described in the claims.

[0019] FIG. 1 is a perspective view showing the configuration of a scribing device 1 according to an embodiment. FIG. 2 is a perspective view showing a configuration for supporting a scribing unit 10 to be movable in the transfer direction according to an embodiment. FIGS. 3(a) and (b) are left side view and right side view showing the configuration of the scribing device 1 according to the embodiment, respectively. FIGS. 4 and 5 are bottom view and front view showing the configuration of the scribing device 1 according to the embodiment, respectively. In FIG. 5, a state where the side plate 22 is removed is shown.

[0020] As shown in FIG. 1, the scribing device 1 includes a scribing unit 10, a support member 20, a base member 30, two leg members 40, a linear motion guide 50, and a head drive mechanism 60.

[0021] The base member 30 and the two leg members 40 are made of a highly rigid metal material such as SUS or iron material. The two leg members 40 are fixed to the lower surface of the base member 30 with screws. The base member 30 is installed on a device stand (not shown) by the two leg members 40. A table on which a substrate 100 (see FIG. 5) is placed is arranged in the space below the base member 30. A recess 32 (see FIG. 4) long in the X-axis direction is formed on the lower surface of the base member 30, and an opening 31 long in the X-axis direction is formed in this recess 32. The scribing unit 10 is supported by the support member 20 in a state of being housed in the opening 31. The scribing unit 10 is movable in the X-axis direction in a state of being housed in the opening 31.

[0022] The scribe unit 10 is placed on the support member 20 from above and attached to the support member 20. The support member 20 comprises a lower plate 21 on which the scribe unit 10 is attached, and two side plates 22 connected to the positive and negative ends of the lower plate 21 along the Y axis, respectively. The lower plate 21 is parallel to the XY plane, and the two side plates 22 are perpendicular to the XY plane. The lower plate 21 and the two side plates 22 are made of a highly rigid metal material.

[0023] As shown in Figures 2 and 3(a) and (b), the lower plate 21 is supported on the base member 30 so as to be movable in the X-axis direction by a pair of linear motion guides 50. Each linear motion guide 50 comprises one guide rail 51 and two connecting members 52. Each connecting member 52 is slidably supported on the corresponding guide rail 51 and is fixed to the upper surface of the lower plate 21 by screws. The pair of linear motion guides 50 are spaced apart in a second direction (Y-axis direction) perpendicular to a first direction (X-axis direction) and parallel to the substrate 100 (see Figure 5). The pair of linear motion guides 50 are fixed to the positive and negative Y-axis ends of the lower surface of the base member 30 by screws.

[0024] Thus, the support member 20 is supported on the base member 30 so as to be movable in the X-axis direction by a pair of linear motion guides 50. As shown in Figures 3(a) and (b), the support member 20 is supported on the lower surface of the base member 30 while suspended by the pair of linear motion guides 50. Therefore, the scribe unit 10 mounted on the lower plate 21 is also supported on the base member 30 so as to be movable in the X-axis direction by a pair of linear motion guides 50.

[0025] As shown in Figure 4, a head drive mechanism 60 is installed on the lower surface of the base member 30. The head drive mechanism 60 comprises a ball screw 61 extending in the X-axis direction, two ball screw holders 62 that rotatably support both ends of the ball screw 61, and a motor 63 whose drive shaft is connected to the ball screw 61. A bearing (not shown) that screws into the ball screw 61 is installed on the upper surface (positive Z-axis side) of the lower plate 21 of the support member 20. Therefore, when the motor 63 is driven and the ball screw 61 rotates, the support member 20 is guided by a pair of linear motion guides 50 and moved in the X-axis direction. As a result, the scribe unit 10 supported by the support member 20 is moved in the X-axis direction together with the support member 20.

[0026] As shown in Figure 2, the scribe unit 10 comprises a scribe head 11, a lifting mechanism 12, two support plates 13, and a back plate 14. The two L-shaped support plates 13 are fixed to the upper surface of the lower plate 21 with screws. The back plate 14 is sandwiched between the two support plates 13 and fixed to these support plates 13 with screws.

[0027] A lifting mechanism 12 is installed on the front surface (the positive Y-axis side) of the back panel 14. The lifting mechanism 12 comprises a pair of linear motion guides 12a, a motor 12b, a ball screw 12c, and a lifting member 12d. The pair of linear motion guides 12a are installed on the front surface of the back panel 14 so as to extend vertically. Each linear motion guide 12a has two connecting members 12a1 arranged vertically. The lifting member 12d is fixed to these connecting members 12a1 with screws.

[0028] A motor 12b is installed on a flange portion extending forward from the upper end of the back plate 14. A ball screw 12c extending vertically is rotatably installed on the front of the back plate 14. The ball screw 12c is connected to the drive shaft of the motor 12b. The ball screw 12c is screwed into a bearing 12d1 installed on the back of the lifting member 12d. Therefore, when the motor 12b is driven, the lifting member 12d moves up and down, guided by the linear motion guide 12a.

[0029] A scribe head 11 is installed on the front surface of the lifting member 12d. The scribe head 11 may have a well-known configuration, such as the one shown in Patent Document 1.

[0030] A cutter 11a (see Figure 5) for forming a scribe line is attached to the lower end of the scribe head 11. Specifically, a holder unit for holding the cutter 11a is attached to the lower end of the scribe head 11. When attached to the scribe head 11, the holder unit can rotate partially or 360° around the Z axis, or it can be fixed without rotating around the Z axis. The holder unit is detachable from the scribe head 11.

[0031] The cutter 11a is, for example, a cutter wheel that can roll relative to the substrate 100. However, it is not limited to this, and the cutter 11a may be a fixed cutter that does not roll relative to the substrate 100.

[0032] The lower plate 21 has a cutout hole 21a for allowing the cutter 11a to protrude downward. In the configuration shown in Figure 2, the cutout hole 21a is wide enough for the scribe head 11 to pass through. When the motor 12b is driven, the lifting member 12d moves up and down, causing the scribe head 11 to move up and down together with the lifting member 12d. At this time, the scribe head 11 moves up and down through the cutout hole 21a.

[0033] During the scribe operation, the scribe head 11 descends, positioning the cutter 11a at the scribe start position on the surface of the substrate 100. Furthermore, air pressure introduced through the tube 11b of the scribe head 11 presses the cutter 11a against the surface of the substrate 100. In this state, the motor 63 shown in Figure 4 is driven. As a result, the scribe head 11 is moved in the positive X-axis direction, as shown in Figure 5, thereby forming a scribe line on the surface of the substrate 100.

[0034] Next, we will describe the scribe device 2, which is a comparative example.

[0035] Figure 6 is a perspective view showing the configuration of the scribe device 2 according to a comparative example.

[0036] As shown in Figure 6, the scribe device 2 comprises a scribe unit 210, a support member 220, a base member 230, two leg members 240, a pair of linear motion guides 250, and a head drive mechanism 260.

[0037] In the comparative example, a pair of linear motion guides 250 are arranged vertically. Similar to the above embodiment, each linear motion guide 250 comprises a guide rail 251 extending in the X-axis direction and two connecting members 252 slidably disposed on the guide rail 251. The support member 220 is a plate-shaped member and is arranged parallel to the XZ plane. The back surface of the support member 220 is fixed to the four connecting members 252.

[0038] A head drive mechanism 260 is installed on the front surface of the base member 230. The head drive mechanism 260 comprises a ball screw 261 extending in the X-axis direction, two ball screw holders 262 that rotatably support both ends of the ball screw 261, and a motor 263 whose drive shaft is connected to the ball screw 261. A bearing (not shown) that screws into the ball screw 261 is installed on the back surface of the support member 220. Therefore, when the motor 263 is driven and the ball screw 261 rotates, the support member 220 is guided by a pair of linear motion guides 250 and moved in the X-axis direction. As a result, the scribe unit 210 supported by the support member 220 is moved in the X-axis direction together with the support member 220.

[0039] A scribe unit 210 is installed on the front of the support member 220. The scribe unit 210 has a scribe head 211 and a lifting mechanism 212 that raises and lowers the scribe head 211. The lifting mechanism 212 is installed on the front of the support member 220. The basic configuration of the lifting mechanism 212 is the same as that of the lifting mechanism 12 in the above embodiment. The lifting member 212a is raised and lowered by the lifting mechanism 212. The scribe head 211 is installed on the front of this lifting member 212a.

[0040] The basic configuration of the scribe head 211 is the same as that of the scribe head 11 in the above embodiment. A cutter 211a is installed at the lower end of the scribe head 211. The configuration of the cutter 211a is also the same as that of the cutter 11a in the above embodiment. The scribe operation using the cutter 211a is also the same as that of the above embodiment.

[0041] In contrast, in the comparative example scribe device 2, the scribe head 211 protrudes forward from the support position of the support member 220 by the pair of linear motion guides 250 (the joint position between the linear motion guides 250 and the support member 220). Furthermore, since the cutter 211a is positioned at the lower end of the scribe head 211, the distance between the cutter 211a and the support position in the direction perpendicular to the substrate 100 (Z-axis direction) becomes relatively large. Consequently, the cutter 211a is separated from the support member 220 by a predetermined distance in the direction parallel to the substrate 100 (Y-axis direction), and also separated from the support member 220 by a predetermined distance in the direction perpendicular to the substrate 100 (Z-axis direction).

[0042] On the other hand, the support member 220 can be slightly displaced relative to the linear motion guide 250. Therefore, when an external force is applied to the support member 220 via the cutter 211a, the support member 220 may rotate slightly, causing the cutter 211a to shift from its target position. This shift increases as the two separation distances mentioned above increase.

[0043] Figures 7(a) and 7(b) are a right side view and a bottom view, respectively, showing the main components of the scribe device 2 in a comparative example.

[0044] As shown in Figure 7(a), when the cutter 211a contacts the surface of the substrate 100 at the start of the scribe operation, an upward reaction force (external force) due to this contact is applied from the substrate 100 to the cutter 211a. This reaction force generates a clockwise torque on the scribe unit 210, centered on the pivot point C21. The pivot point C21 is an axis parallel to the X-axis included in the virtual plane P2 which includes the joint surface between the support member 220 and the pair of linear motion guides 250, and passes through the midpoint between the upper and lower joint surfaces.

[0045] As described above, the support member 220 can be slightly displaced relative to the linear motion guide 250 within the tolerance range, and this torque causes the scribe unit 210 to tilt so as to rotate slightly clockwise around the pivot center C21. As a result, the contact position of the cutter 211a with respect to the substrate 100 shifts from the target position in the positive Y-axis direction. This shift increases as the distance D21 from the virtual plane P2 to the cutter 211a and the distance D22 from the pivot center C21 to the lower end of the cutter 211a increase.

[0046] Furthermore, when an external force parallel to the substrate 100 is applied to the scribe unit 210 via the cutter 211a, a torque is generated in the scribe unit 210 centered on the pivot point C22 shown in Figure 7(b). The pivot point C22 is an axis parallel to the Z-axis included in the virtual plane P2 described above, and passes through an intermediate position between the left and right joining surfaces (between the connecting members 252).

[0047] This torque causes the scribe unit 210 to tilt slightly around the pivot center C22. As a result, the contact position of the cutter 211a with respect to the substrate 100 shifts from the target position in the positive Y-axis direction. This shift increases as the distance D21 from the virtual plane P2 to the cutter 211a and the distance D24 from the pivot center C22 to the cutter 211a increase.

[0048] In the comparative example scribe device 2, the scribe head 211 protrudes forward relative to the virtual plane P2 (support position), resulting in a larger distance D21. Additionally, since the pair of linear motion guides 250 support the back surface of the support member 220, the distance D22 also increases. Therefore, in the comparative example scribe device 2, when an external force is applied to the scribe unit 10 via the cutter 211a, the contact position of the cutter 211a with respect to the substrate 100 may deviate significantly from the target position.

[0049] Figures 8(a) and 8(b) are a right side view and a bottom view, respectively, showing the main components of the scribe device 1 according to the embodiment.

[0050] As shown in Figure 8(a), in the scribe device 1 according to this embodiment, when an upward external force is applied to the scribe unit 10 via the cutter 11a, a clockwise torque is generated in the scribe unit 10 with respect to the pivot center C11. The pivot center C11 is an axis parallel to the X-axis included in the virtual plane P1 which includes the joint surface between the lower plate 21 and the pair of linear motion guides 50, and passes through an intermediate position of the joint surfaces aligned in the front-rear direction (Y-axis direction).

[0051] However, in the scribe device 1 according to this embodiment, since the scribe unit 10 is installed from above on the lower plate 21 which extends parallel to the substrate 100, the distance D11 between the virtual plane P1 and the lower end of the cutter 11a can be significantly reduced, and the distance D12 from the pivot center C11 to the cutter 11a can also be significantly reduced. Therefore, this external force can suppress the shift of the contact position of the cutter 11a with respect to the substrate 100 from the target position.

[0052] Furthermore, as shown in Figure 8(b), in the scribe device 1 according to this embodiment, the distance D14 from the rotation center C12 to the cutter 11a can be significantly reduced. The rotation center C12 is an axis parallel to the Y axis included in the virtual plane P1 described above, and passes through the midpoint of the joining surfaces aligned in the left-right direction (X-axis direction). Therefore, in the scribe device 1 according to this embodiment, even if the scribe unit 10 rotates slightly around the rotation center C12 due to an external force, the amount of displacement of the cutter 11a caused by this can be significantly suppressed.

[0053] Furthermore, in the scribe device 1 according to this embodiment, the distances D12 and D14 can be further reduced by increasing the area of ​​the lower plate 21 and adjusting the installation position of the scribe unit 10. This further suppresses displacement of the cutter 11a due to external forces.

[0054] The inventors conducted an experiment to compare the processing accuracy of the scribe line between a scribe device 1 according to an embodiment and a scribe device 2 according to a comparative example.

[0055] In the embodiment, the dimensions of each part shown in Figures 8(a) and (b) were as follows: Distance D13 is the distance between a pair of linear motion guides 50 in the Y-axis direction, and distance D15 is the distance between adjacent connecting members 52 in the X-axis direction (distance between joining surfaces).

[0056] D11 = 41 mm (33.9% of D21) • D12 = 78mm (63.9% of D22) • D14 = 0.5 mm (2.9% of D22)

[0057] In the comparative example, the dimensions of each part shown in Figures 7(a) and (b) were as follows: Distance D23 is the distance between a pair of linear motion guides 250 in the Z-axis direction, and distance D25 is the distance between adjacent connecting members 252 in the X-axis direction (distance between joining surfaces).

[0058] D21 = 121mm D22 = 119mm D24 = 17.5 mm

[0059] In the experiment, scribing operations were performed on a substrate 100 using scribe apparatus 1 according to the embodiment and scribe apparatus 2 according to the comparative example. Then, for a predetermined period starting immediately after the cutters 11a and 211a made contact with the substrate 100, the amount of deviation of the actual scribe line from the target scribe line was measured as the scribe processing accuracy.

[0060] Figure 9(a) is a graph showing the measurement results of the scribe processing accuracy when using the scribe device 1 according to the embodiment. Figure 9(b) is a graph showing the measurement results of the scribe processing accuracy when using the scribe device 2 according to the comparative example.

[0061] In the graphs in Figures 9(a) and 9(b), the horizontal axis represents the scribe distance from immediately after the cutters 11a and 211a make contact with the substrate 100, and the vertical axis represents the scribe processing accuracy.

[0062] As shown in Figure 9(b), in the comparative example, the cutter 211a shifted significantly from the target position immediately after contacting the substrate 100. This is presumed to be due to the reaction force (external force) when the cutter 211a contacted the substrate 100, which caused the scribe unit 210 to rotate slightly clockwise around the pivot center C21 in Figure 7(a), resulting in a shift in the position of the cutter 211a in the positive Y-axis direction.

[0063] In contrast, in this embodiment, as shown in Figure 9(a), the cutter 11a did not deviate significantly from the target position immediately after contacting the substrate 100. Specifically, in the 5mm section from the start of scribing, the error of the actual scribe line relative to the target scribe line was reduced by approximately 93% compared to the comparative example.

[0064] This is presumed to be because, in the configuration of the embodiment, the distances D11 and D12 shown in Figure 8(a) are significantly small, and therefore the slight rotation of the scribe unit 10 around the rotation center C11 did not have a significant effect on the displacement of the cutter 11a. Based on these experimental results, it was confirmed that the scribe device 1 according to the embodiment can significantly suppress the displacement of the cutter 11a due to external forces compared to the scribe device 2 according to the comparative example.

[0065] <Effects of the Embodiment> According to this embodiment, the following effects are achieved.

[0066] As shown in Figures 1 to 5, the scribe device 1 comprises a support member 20 on which a scribe head 11 is mounted, a plurality of linear motion guides 50 that support the support member 20 so as to be movable in the X-axis direction (first direction), and a head drive mechanism 60 that moves the support member 20 in the X-axis direction (first direction) by a motor 63. The plurality of linear motion guides 50 are spaced apart in the Y-axis direction (second direction) which is perpendicular to the X-axis direction (first direction) and parallel to the substrate 100. The support member 20 (lower plate 21) is supported by the plurality of linear motion guides 50 so as to straddle the plurality of linear motion guides 50 in the Y-axis direction (second direction), and has a cutout hole 21a (gap) that allows the cutter 11a to protrude below the support member 20 (lower plate 21).

[0067] With this configuration, as shown in Figures 8(a) and 8(b), the distances D11, D12, and D14 between the pivot centers C11 and C12 and the cutter 11a when the support member 20 rotates due to an external force can be reduced. As a result, as shown in Figure 9(a), the displacement of the cutter 11a relative to the target position when the support member 20 rotates due to an external force can be suppressed.

[0068] As shown in Figures 1-5, the support member 20 has a lower plate 21 substantially parallel to the substrate 100, the scribe head 11 is mounted on the upper surface of the lower plate 21, and the lower plate 21 has a cutout hole 21a for allowing the cutter 11a to protrude downward.

[0069] With this configuration, the lower plate 21 can firmly and stably support the scribe head 11. Furthermore, by forming a cutout hole 21a in the lower plate 21, the cutter 11a of the scribe head 11, which is installed on the upper surface of the lower plate 21, can be made to protrude downward from the lower surface of the lower plate 21 through the cutout hole 21a.

[0070] As shown in Figures 1 to 5, the scribe device 1 is equipped with a lifting mechanism 12 for raising and lowering the scribe head 11. The lifting mechanism 12 is installed on the upper side of the support member 20 (lower plate 21), and the scribe head 11 is installed on the upper side of the support member 20 (lower plate 21) via the lifting mechanism 12.

[0071] With this configuration, during the scribe operation, the scribe head 11 can be lowered by the lifting mechanism 12, allowing the cutter 11a to smoothly contact the upper surface of the substrate 100.

[0072] As shown in Figures 1 to 5, the scribe device 1 comprises a base member 30 having an opening 31 that is long in the X-axis direction (first direction), and a plurality of leg members 40 that support the base member 30. A plurality of linear motion guides 50 are arranged on the lower surface of the base member 30, and a support member 20 is suspended and supported by the plurality of linear motion guides 50, and the scribe unit 10 is housed in the opening 31.

[0073] With this configuration, the distance from the linear motion guide 50 to the cutter 11a is shorter compared to when the linear motion guide 50 and the support member 20 are installed on the upper surface of the base member 30. Therefore, the displacement of the cutter 11a relative to the target position when the support member 20 is rotated by an external force can be effectively suppressed.

[0074] <Variation> In the above embodiment, the scribe unit 10 was installed on the lower plate 21 of the support member 20, but the member on which the scribe unit 10 is installed does not necessarily have to be a plate-shaped member. For example, the support member 20 may be a frame structure member having multiple beam sections. In this case, the scribe unit 10 is installed on the frame structure support member 20 from above, and the cutter 11a of the scribe head 11 protrudes downward from the gap between adjacent beam sections.

[0075] Furthermore, in the above embodiment, as shown in Figures 3(a) and (b), a pair of linear motion guides 50 are arranged side by side in the Y-axis direction at the same height, but the heights of the pair of linear motion guides 50 may differ from each other. For example, if the heights of the positive and negative Y-axis ends of the lower surface of the base member 30 are different from each other, and accordingly the heights of the positive and negative Y-axis ends of the upper surface of the lower plate 21 are different from each other, the heights of the pair of linear motion guides 50 may differ from each other in accordance with these height differences. The pair of linear motion guides 50 only need to be spaced apart in the Y-axis direction (second direction) and be able to support the support member 20 in the vertical direction.

[0076] Furthermore, in the above embodiment, the support member 20 was supported by a pair of linear motion guides 50, but the support member 20 may be supported by three or more linear motion guides 50. Also, the number of connecting members 52 arranged on one linear motion guide 50 is not limited to two, but may be one or three or more.

[0077] Furthermore, although the support member 20 is composed of a lower plate 21 and two side plates 22, the support member 20 may be composed of only the lower plate 21, or it may be composed of the lower plate 21 and the two side plates 22 combined with other members.

[0078] Furthermore, in the above embodiment, the scribe head 11 is installed on the upper side of the support member 20 via the lifting mechanism 12, but the lifting mechanism 12 may be omitted and the scribe head 11 may be installed directly on the upper side of the support member 20. For example, if the scribe head 11 has a configuration that allows the cutter 11a to be raised and lowered significantly, the scribe head 11 may be installed directly on the upper side of the support member 20.

[0079] Furthermore, in the above embodiment, as shown in Figures 3(a) and (b), the support member 20 was suspended and supported by a pair of linear motion guides 50 installed on the lower surface of the base member 30. However, the pair of linear motion guides 50 may be installed on the upper surface of the base member 30, and the support member 20 may be placed on and supported by these linear motion guides 50. However, in this configuration, the distance from the linear motion guides 50 to the cutter 11a is larger compared to the configuration of the above embodiment. Therefore, in order to further reduce the distance from the linear motion guides 50 to the cutter 11a, it is preferable to use a configuration in which the support member 20 is suspended and supported by a pair of linear motion guides 50 installed on the lower surface of the base member 30, as in the above embodiment.

[0080] In addition, the embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical idea set forth in the claims. [Explanation of Symbols]

[0081] 1. Scribe device 10 Scribe Units 11 Scribehead 11a Cutter 12 Lifting mechanism 20 Support members 21 Lower plate 21a Hole 30 Base member 31 Aperture 40 Leg members 50 Linear Motion Guide 51 Guide rail 52 Connecting Member 60 Head drive mechanism

Claims

1. A scribe apparatus that forms a scribe line on a substrate by linearly moving a scribe head having a cutter at its lower end in a first direction, The support member on which the scribe head is attached, A plurality of linear motion guides that support the support member so as to be movable in the first direction, The system includes a head drive mechanism that moves the support member in the first direction using a motor, The plurality of linear motion guides are arranged spaced apart in a second direction perpendicular to the first direction and parallel to the substrate, The support member is supported by the plurality of linear motion guides so as to straddle the plurality of linear motion guides in the second direction and has a gap that allows the cutter to protrude downward. A scribe device characterized by the following features.

2. In the scribe device according to claim 1, The support member has a lower plate substantially parallel to the substrate, The scribe head is installed on the upper surface of the lower plate, The lower plate has a hole for allowing the cutter to protrude downward, and the hole forms the gap. A scribe device characterized by the following features.

3. In the scribe device according to claim 1, The scribe head is equipped with a lifting mechanism for raising and lowering it, The lifting mechanism is installed on the upper side of the support member, The scribe head is installed on the upper side of the support member via the lifting mechanism. A scribe device characterized by the following features.

4. In the scribe device according to claim 1, A base member having an opening that is long in the first direction, It comprises a plurality of leg members that support the base member, The plurality of linear motion guides are arranged on the lower surface of the base member, The support member is suspended and supported by the plurality of linear motion guides, The scribe head is housed within the opening. A scribe device characterized by the following features.

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