Method for adjusting the position of an ultrasound examination device and lens.

Abstract

This invention provides an ultrasound inspection device that combines probe lens protection with ease of distance adjustment using shims. [Solution] The ultrasonic inspection apparatus comprises a probe 1 that transmits or receives ultrasonic waves to an object to be inspected, which is the object to be inspected using ultrasonic waves; a scanning measuring device that scans the probe 1 in the xy plane; and a control device that controls the driving of the probe 1. The probe 1 comprises a probe body 10 on the side of the object to be inspected, which has a lens 11 through which the ultrasonic waves pass; and an attachment 20 that surrounds the lens 11 and is attached to the probe body 10, which has a plurality of protrusions 22 that extend further toward the object to be inspected than the lens 11.

Description

Technical Field

[0001] The present disclosure relates to an ultrasonic inspection device and a method for adjusting the position of a lens.

Background Art

[0002] Patent Document 1 describes "a probe holding member that holds an ultrasonic probe so as to form a gap between the surface of a test object and the ultrasonic probe during measurement, a waterproof pad made of an annular elastic material that surrounds the lower end of the probe held by the holding member and adheres to the surface of the test object to seal the gap, a cylindrical housing disposed so as to open into the gap from inside the waterproof pad, and a water supply passage for introducing water from the outside of the probe holding member into the inside of the waterproof pad."

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Before ultrasonic inspection, the distance between the lens through which ultrasonic waves pass and the inspection object may be adjusted using a shim. The shim is placed on a member such as a pedestal used during adjustment and is, for example, a flat jig for adjusting the distance. However, in the technique described in Patent Document 1, the waterproof pad is arranged over the entire periphery of the lens. Therefore, the space between the shim placed on the pedestal and the lens cannot be visually confirmed, and it is impossible to check what the distance is. For this reason, it is difficult to adjust the distance. Also, because it cannot be visually confirmed, the lens may collide with a member such as a pedestal during distance adjustment. The problem to be solved by the present disclosure is to provide an ultrasonic inspection device and a method for adjusting the lens position that can achieve both lens protection of the probe and ease of distance adjustment using a shim. [Means for solving the problem]

[0005] The ultrasonic inspection apparatus of this disclosure comprises a probe that transmits or receives at least one of the ultrasonic waves to an object to be inspected using ultrasound, a scanning measuring device that scans the probe in the xy plane, and a control device that controls the driving of the probe, wherein the probe comprises a probe body having a lens through which the ultrasonic waves pass, on the side facing the object to be inspected, and an attachment that surrounds the lens and is attached to the probe body, and has a convex portion that extends further toward the object to be inspected than the lens. Other solutions will be described later in the embodiments for carrying out the invention. [Effects of the Invention]

[0006] This disclosure provides an ultrasonic inspection apparatus and a method for adjusting the lens position that can achieve both lens protection for the probe and ease of distance adjustment using shims. [Brief explanation of the drawing]

[0007] [Figure 1] This is a schematic diagram of the ultrasound examination apparatus disclosed herein. [Figure 2] This is a block diagram showing the specific hardware configuration of the control device. [Figure 3] This is a cross-sectional view of the probe in this disclosure. [Figure 4] This is a view of section A in Figure 3, seen from an oblique angle above. [Figure 5A] This diagram illustrates the scanning direction of the probe during ultrasound examination. [Figure 5B] This diagram illustrates the positional relationship between the scanning direction of the probe during ultrasound examination and the position of the probe's protrusion. [Figure 6A] This diagram illustrates a method for adjusting the distance between a lens and a shim using a spacer. [Figure 6B] This diagram illustrates a method for adjusting the distance between a lens and a shim using a spacer. [Figure 7A]In another embodiment, this figure illustrates a method for adjusting the distance between a lens and a shim using a spacer. [Figure 7B] In another embodiment, this figure illustrates a method for adjusting the distance between a lens and a shim using a spacer. [Figure 8] This flowchart shows the method for adjusting the lens position according to this disclosure. [Figure 9] In another embodiment, the method for adjusting the lens position of the present disclosure is shown in the flowchart. [Modes for carrying out the invention]

[0008] The following describes embodiments for implementing this disclosure, with reference to the drawings. The following is merely an example of how to implement the invention related to this disclosure, and this disclosure is not limited to the following example. Within the description of one embodiment below, other embodiments applicable to that embodiment will also be described as appropriate. This disclosure is not limited to the following embodiment, and different embodiments can be combined or modified as appropriate without significantly impairing the effects of this disclosure. In addition, the same reference numerals will be used for the same components, and redundant explanations will be omitted. Furthermore, components having the same function will be given the same name. The illustrations are schematic, and for illustrative purposes, the actual configuration may be changed or some components may be omitted or modified between drawings without significantly impairing the effects of this disclosure. Also, the same embodiment does not necessarily need to have all the components.

[0009] Figure 1 is a schematic diagram of the ultrasonic inspection apparatus 100 of this disclosure. The ultrasonic inspection apparatus 100 is a device that performs ultrasonic inspection on an object to be inspected 103 (e.g., a semiconductor wafer) which is the target of inspection using ultrasound U. By ultrasonic inspection, defects, for example, inside the object to be inspected 103 can be detected.

[0010] The ultrasonic inspection device 100 uses ultrasound U to inspect objects 1 and 103 in water W, with the probe 1 and the object to be inspected 103 submerged. Performing the ultrasonic inspection in water W improves the accuracy of detecting defects present inside the object to be inspected 103.

[0011] The ultrasound examination apparatus 100 comprises a probe 1 equipped with a lens 11, a scanning and measuring device 101, and a control device 102. For convenience, the scanning and measuring device 101 and the control device 102 will be described first.

[0012] The scanning measurement device 101 is a device that scans the probe 1 in the xy plane. The scanning measurement device 101 includes, for example, an actuator. The control device 102 is a device that controls the driving of the probe 1. The control device 102 controls, for example, at least one of the following: the transmission of ultrasonic waves U from the probe 1, or the reception of ultrasonic waves at the probe 1. The control device 102 also controls the driving of the scanning measurement device 101.

[0013] Figure 2 is a block diagram showing the specific hardware configuration of the control device 102. The control device 102 is configured with, for example, a CPU (Central Processing Unit) 1001, RAM (Random Access Memory) 1002, ROM (Read Only Memory) 1003, I / F (Interface) 1004, bus 1005, etc. The CPU 1001, RAM 1002, ROM 1003, and I / F 1004 are connected, for example, via bus 1005. The control device 102 is realized when a predetermined control program (for example, the ultrasonic inspection method of this disclosure) stored in ROM 1003 is loaded into RAM 1002 and executed by CPU 1001. The exchange of signals and information between the control device 102 and various devices (servers, etc.), external networks, etc., is performed in hardware terms through I / F 1004.

[0014] Returning to FIG. 1, probe 1 is a structure that performs transmission and reception, which is at least one of transmission or reception of ultrasonic wave U, with respect to inspection object 103. When probe 1 is a probe that performs only either transmission or reception of ultrasonic wave U, on the opposite side of probe 1 through inspection object 103, another probe (not shown) that performs only either reception or transmission of ultrasonic wave U is arranged.

[0015] FIG. 3 is a cross-sectional view of probe 1 of the present disclosure. In the example of the present disclosure, the distance d (FIG. 6A) between lens 11 through which ultrasonic wave U passes and inspection object 103 (FIG. 1) is adjusted using shim 40. Shim 40 is also called a shim plate or the like, and is, for example, a thin metal plate used to perform position adjustment, height adjustment, etc. by sandwiching it between predetermined components. Shim 40 has a predetermined thickness. The thickness of shim 40 can be determined, for example, by the focal length of lens 11 or the like. Although details will be described later, the adjustment of distance d is performed by adjusting the vertical position (height position, the distance between end 21 and lower end 111) of lower end 111 of lens 11 with respect to end 21 of convex portion 22 constituting attachment 20. And the adjustment of distance d is performed using shim 40 placed on member 30 such as a pedestal before ultrasonic inspection. Therefore, FIG. 3 shows a state when adjusting distance d.

[0016] The adjustment of distance d is synonymous with the adjustment of the position of lens 11. Hereinafter, since the method of adjusting distance d will be mainly described, in the following drawings, member 30 is shown instead of inspection object 103. However, the form of the arrangement of each member with respect to probe 1 is the same whether it is inspection object 103 or member 30. That is, both inspection object 103 and member 30 are arranged so as to face convex portion 22 of attachment 20, for example. Therefore, in the following description, the description of member 30 may be replaced with inspection object 103.

[0017] Probe 1 comprises a probe body 10, an attachment 20, a spacer 50, and a support member 60. Hereafter, the z-direction refers to the height direction of the probe 1, and the x and y-directions refer to the scanning direction of the probe 1. Furthermore, the vertical direction is conceived in accordance with the description in Figure 3, etc. Therefore, in the illustrated example, the shim 40 is placed below the probe body 10, but although not shown, the shim 40 may also be placed above the probe body 10. In the latter configuration, the "vertical direction" is reversed from the description below.

[0018] The probe body 10 is a device that transmits or receives ultrasonic waves U to or from the object to be inspected 103 (Figure 1; in Figure 3, the member 30 is shown as described above). The probe body 10 is a probe used in a general ultrasound inspection apparatus. The probe body 10 has a substantially cylindrical shape. The probe body 10 is connected to the scanning measurement device 101 and the control device 102 above the probe body 10 (on the opposite side from the object to be inspected 103). On the other hand, the probe body 10 is equipped with a lens 11 through which ultrasonic waves U pass, for example, at the lower end of the probe body 10 (on the side of the member 30 and the object to be inspected 103). The lens 11 faces the shim 40 and the object to be inspected 103. The probe body 10 transmits ultrasonic waves U that have passed through the lens 11 to the object to be inspected 103, or receives ultrasonic waves U reflected by the object to be inspected 103 via the lens 11.

[0019] The housing that forms the outer casing of the probe body 10 is made of metal, such as stainless steel. The probe body 10 is fixed to the support member 60 by a screw or other fastener 61.

[0020] The lens 11 has a shape that tapers toward the object to be inspected 103 (Figure 1) and the member 30. The lower end 111 of the lens 11 faces the upper surface 41 (top surface) of the shim 40. If the shim 40 is not provided, the lower end 111 faces the surface 31 of the member 30.

[0021] The attachment 20 is a component that protects the lens 11. The attachment 20 has a cylindrical shape, for example, with an inner diameter slightly smaller than the outer diameter of the probe body 10. The attachment 20 surrounds the lens 11 and is attached to the probe body 10. Attachment can be performed, for example, by fitting (screwing) the probe body 10 into the attachment 20.

[0022] The attachment 20 is positioned opposite the object to be inspected 103 (Figure 1) and the member 30. Specifically, the end portion 21 of the attachment 20 directly faces, for example, the surface of the object to be inspected 103. However, there is a gap of, for example, several millimeters between the surface and the end portion 21. In addition, the attachment 20 is made of a hard material. Being made of a hard material prevents the transmission of impact to the lens 11, which is positioned inside the protrusion 22, even if the protrusion 22, which is part of the attachment 20, collides with a foreign object. The attachment 20 is made of a resin (for example, a hard resin) such as polyetheretherketone.

[0023] The attachment 20 is detachable. This allows for changing the height (vertical length) of the spacer 50 between the attachment 20 and the support member 60 by removing the attachment 20 once it has been installed and then installing a new spacer 50.

[0024] Figure 4 is a view of part A in Figure 3 from an oblique upward direction. As shown in Figures 3 and 4, the attachment 20 is provided with a protrusion 22 that extends further toward the object to be inspected 103 (Figure 1; in the example of Figure 4, the member 30 is shown as described above) than the lens 11. This prevents the lens 11, which is located further away from the object to be inspected 103 and the member 30 (lower position, recessed position) than the protrusion 22, from coming into contact with the object to be inspected 103 and the member 30. In addition, unintended protrusions, obstacles, etc. may exist on the scanning surface of the object to be inspected 103. However, by providing the protrusion 22, as described above, the protrusion 22 can be made to collide with such protrusions, etc. when scanning with the probe body 10, thereby preventing damage to the lens 11 which is positioned inside the protrusion 22.

[0025] The protrusion 22 is a portion of the lower end surface of the attachment 20 that extends (projects) locally toward the object to be inspected 103. Therefore, the lower end surface of the attachment 20 is not composed solely of surfaces of the same height, but of multiple surfaces of different heights. By providing such a protrusion 22, when adjusting the position of the lens 11, for example in the z direction, the lens 11 and the shim 40 can be visually inspected, and collision between the lens 11 and the member 30 can be suppressed. This protects the lens 11. Furthermore, because these can be visually inspected, the distance d can be easily measured and adjusted.

[0026] Figure 5A illustrates the scanning direction of probe 1 during ultrasound examination. As shown in Figure 5A, probe 1 scans the object to be examined 103 from one end to the other, for example in the y-direction, while irradiating the object to be examined 103 with ultrasound U (Figure 1). When probe 1 reaches the other end of the object to be examined 103, it shifts slightly in a direction perpendicular to the scanning direction (for example in the x-direction) and scans from the other end to the first end of the object to be examined 103, again for example in the y-direction. By repeating these steps, the object to be examined 103 is inspected.

[0027] Figure 5B is a diagram illustrating the positional relationship between the scanning direction of the probe 1 during ultrasound examination and the position of the protrusions 22 on the probe 1. Figure 5B is also a view of the probe 1 from above in Figure 5A. The protrusions 22 (projections) provided on the attachment 20 are arranged in multiples, for example, at equal intervals along the outer circumference of a columnar attachment 20. In the illustrated example, there are two protrusions 22. However, there may be only one protrusion 22, and they do not have to be arranged at equal intervals.

[0028] The protrusions 22 are formed in the scanning direction of the probe 1. This prevents the lens 11 from coming into contact with foreign objects, such as foreign matter, present on the object 103 being inspected. In the illustrated example, the protrusions 22 have a width (length in the x-direction) in the x-direction, including the y-direction, which is the scanning direction of the probe 1. The larger the width, the more effectively collisions with the lens 11 can be suppressed. On the other hand, the smaller the width, the more effectively air bubbles near the protrusions 22 can be suppressed during scanning. Therefore, it is preferable to determine the width taking these factors into consideration. In addition, multiple protrusions 22 may be provided parallel to the scanning direction (for example, in the y-direction). In this case, by providing multiple protrusions so as to sandwich the lens 11, it is possible to suppress foreign objects, such as foreign matter, that are larger than the distance between adjacent (including opposing) protrusions 22 (circumferential distance of the attachment 20) from colliding with the lens 11.

[0029] The shape of the protrusion 22 is not limited; for example, it may be a flat plate as shown in Figure 5B, or it may be a curved plate (bent plate), a projection, a rod, or any other shape.

[0030] Returning to Figures 3 and 4, the attachment 20 further includes a gap 23 (air gap). The gap 23 is provided between adjacent protrusions 22. The gap 23 is also formed between the lower end surface of the attachment 20 other than the protrusions 22 (the part other than the end 21) and the member 30. Note that there is no gap between the end 21, which is the lower end surface of the protrusion 22, and the member 30. By providing the gap 23, the lens 11 and shim 40 can be seen through the gap 23, making it easier to measure the distance d. This makes it easy to adjust the distance d.

[0031] Preferably, the gap 23 is large enough to allow at least the lens 11 and the shim 40 to be visible from outside the attachment 20. The shim 40 is a structure (e.g., a flat plate) positioned opposite the lens 11 and having a predetermined thickness as described above. Having such a size makes it easier to measure the distance d (Figure 6A) between the lens 11 and the shim 40 from outside the attachment 20, and makes it easier to determine what height spacer 50 should be changed to. Note that it is not necessary to be able to see the entire lens 11 and the entire shim 40 through the gap 23; the size of the gap 23 should be such that at least a part of the lens 11 and at least a part of the shim 40 can be seen to the extent that the distance d can be measured (understood).

[0032] The shim 40 is placed on the surface 31 of the component 30. The surface 41 of the shim 40 (the side opposite to the object to be inspected 103) and the lower end 111 of the lens 11 (the end on the side of the object to be inspected 103) face each other. When adjusting the height position of the lens 11 using the shim 40, the height position of the lens 11 is adjusted so that the lower end 111 does not come into contact with the surface 41, and the lower end 111 comes as close to the surface 41 as possible.

[0033] The shim 40 is preferably made of a material that does not easily expand with heat, specifically a metal such as stainless steel. The thickness of the shim 40 is determined mainly from two perspectives, for example, the focal length of the probe body 10 and safety to avoid collision between the lower end 111 of the lens 11 and the object to be inspected 103.

[0034] The size of the gap 23 is preferably determined by the size (dimensions) of the shim 40. That is, it is preferable that the gap 23 be large enough to allow the shim 40 to be inserted. This makes it easier to position the shim 40 through the gap 23 from outside the attachment 20. Also, the larger the gap 23, the smaller the protrusion 22 becomes. Therefore, it is preferable to form the gap 23 so that it is not excessively large.

[0035] In the example of this disclosure, for example, the gap 23 and the protrusion 22 can be formed by cutting out a portion corresponding to the gap 23 at one end of a resin cylinder.

[0036] As described above, the probe 1 further comprises a support member 60 and a spacer 50. The support member 60 is a member that supports the probe body 10 on the side opposite to the object to be inspected 103 (Figure 1; Figure 3 shows member 30) when viewed from the attachment 20. The support member 60 is also called a probe adapter. As the scanning measuring device 101 moves the support member 60, the probe 1 moves together with the support member 60.

[0037] As described above, the probe body 10 is fixed to the support member 60 by a screw or other fastener 61. The support member 60 is hollow, and the probe body 10 is inserted into the hollow part of the support member 60. As a result, the inner diameter of the hollow part is slightly shorter than the outer diameter of the probe body 10, and this insertion supports (fixes) the probe body 10 to the support member 60.

[0038] The spacer 50 is provided between the attachment 20 and the support member 60 in the vertical direction. The spacer 50 has a predetermined height. By changing the height of the spacer 50, the distance between the end 21 of the protrusion 22 and the lower end 111 of the lens 11 can be adjusted. This also allows the distance d between the lower end 111 of the lens 11 and the surface 41 of the shim 40 to be adjusted, thereby adjusting the height position of the lens 11.

[0039] The upper end of the spacer 50 contacts the lower end of the support member 60, and the lower end of the spacer 50 contacts the upper end of the attachment 20. The spacer 50 is, for example, ring-shaped and made of metal such as SUS. The outer diameter of the attachment 20 and the outer diameter of the spacer 50 are, for example, the same, and the outer surface of the attachment 20 and the outer surface of the spacer 50 are, for example, flush.

[0040] The spacer 50 is replaceable with another spacer 50 having a different predetermined height. For example, three spacers 50 with heights H1, H2, and H3 (where H1 > H2 > H3) are prepared in advance. If the spacer 50 currently fitted to the probe body 10 is at height H1, and it is desired to bring the lens 11 closer to the member 30, then by replacing it with a spacer 50 of height H2, for example, the distance between the end 21 of the protrusion 22 and the lower end 111 of the lens 11 can be shortened, bringing the lens 11 closer to the member 30.

[0041] One way to replace the spacer 50 is, for example, to first remove the attachment 20 from the probe body 10, then remove the spacer 50 from the probe body 10. Then, another spacer 50 of the desired height is fitted onto the probe body 10, and then the attachment 20 is fitted back on, thereby replacing the spacer 50.

[0042] Figures 6A and 6B illustrate a method for adjusting the distance d between the lens 11 and the shim 40 using a spacer 50. Figure 6A shows the distance d before adjustment, and Figure 6B shows the distance d after adjustment. In Figure 6B, the adjusted distance d is approximately 0, and the height positions of the lens 11 and the shim 40 are approximately the same. However, the lens 11 and the shim 40 are not in contact.

[0043] As shown in Figure 6A, before adjusting the distance d, the lens 11 and the shim 40 are separated by a certain distance. At this time, the height (length in the height direction) of the spacer 50 is H1. Therefore, in order to bring the lens 11 and the shim 40 as close as possible and make the distance d 0, the height of the spacer 50 should be changed to a length H2, which is H1 minus the distance d. Thus, as described above, after the attachment 20 and spacer 50 are removed, a spacer 50 with a height of H2 (= H1-d) is attached as shown in Figure 6B, and finally the attachment 20 is attached. In this way, the lens 11 and the shim 40 can be brought as close as possible.

[0044] Figures 7A and 7B illustrate a method for adjusting the distance d using a spacer 50 in another embodiment. In the embodiment shown in Figures 7A and 7B, the support member 60 has, for example, a hollow or cylindrical shape and has an inner surface 63 facing the outer surface 12 of the probe body 10. The support member 60 has irregularities 62 on its inner surface 63. The irregularities 62 are at least one of projections or grooves formed spirally on the inner surface 63. The irregularities 62 are formed so that the attachment 20 and the spacer 50 can move, for example, vertically, along the extending direction of the central axis L of the probe body 10 relative to the support member 60. The central axis L usually coincides with the central axes of the spacer 50, the support member 60, and the attachment 20 (none of which are shown).

[0045] The spacer 50 has grooves 52 on its surface 51 that interlock with the grooves 62. The surface 51 is the outer surface of the spacer 50. The grooves 52 are also at least one of projections or grooves formed spirally on the surface 51 with respect to the central axis L. The spacer 50 is rotatably interlocked with, for example, the spiral grooves 62 of the support member 60 by the spiral grooves 52. As a result, the spacer 50 can move, for example, vertically along the central axis L of the probe body 10. The support member 60 and the probe body 10 are fixed together with the screw fasteners 61 (screws, etc.) as described above. Therefore, the relative positional relationship between the support member 60 and the probe body 10 does not change. The spacer 50 is fitted into the probe body 10 together with the attachment 20.

[0046] If the support member 60 is fixed in place so as not to rotate, and the spacer 50 is rotated around its central axis L, the spacer 50 will move vertically, which is the direction in which the central axis L extends, while rotating. As a result, the probe body 10 fixed to the support member 60 will move (slide, for example) vertically along the central axis L inside the spacer 50 and attachment 20. In other words, the attachment 20 in contact with the spacer 50 will also move vertically. This allows the height position of the lens 11 located at the lower end of the probe body 10 to be adjusted.

[0047] For example, similar to the examples shown in Figures 6A and 6B above, the lens 11 is brought closer to the shim 40 by the distance d before adjustment. Specifically, for example, by rotating the spacer 50 around its central axis L, the spacer 50 and the attachment 20 in contact with the spacer 50 move vertically upward (towards the support member 60). As a result, the end 21 of the protrusion 22 provided on the attachment 20 moves towards the shim 40 (towards the member 30). Then, as shown in Figure 7B, by changing the degree of rotation, the distance d can be brought closer to 0.

[0048] Figure 8 is a flowchart of the method for adjusting the position of the lens 11 of this disclosure (hereinafter referred to as the adjustment method of this disclosure). The flow shown in Figure 8 can be performed using the probe 1 shown in Figures 6A and 6B above. The adjustment method of this disclosure includes steps S1 to S8.

[0049] First, a shim 40 is placed on the member 30 (step S1). That is, step S1 is a placement step in which a shim 40 having a predetermined thickness is placed between the lens 11, which will be installed later, and the surface 31 (part of the member 30) that the lens 11 faces. Next, the probe body 10 is inserted into the support member 60, and the probe body 10 is screwed to the support member 60 (an example of fixing using a screw fastener 61) (step S2). Next, a spacer 50 is inserted into the probe body 10 (step S3), and then an attachment 20 is inserted into the probe body 10 (step S4).

[0050] Step S4 is an attachment process in which the attachment 20 is attached to the probe body 10. As described above, the probe body 10 is a structure that transmits or receives ultrasonic waves U to the object to be inspected 103, which is the object to be inspected using ultrasonic waves U, and has a lens 11 through which the ultrasonic waves U pass on the side of the object to be inspected 103 (which is also the side of the member 30). The attachment 20 is a structure that surrounds the lens 11 and is attached to the probe body 10, and has a protrusion 22 that extends further than the lens 11 towards the object to be inspected 103 (which is also the side of the member 30).

[0051] The attachment 20 is placed on the member 30 such that the attachment 20 covers the shim 40. This causes the protrusion 22 (especially the end portion 21) of the attachment 20 to contact the member 30 (step S5). As described above, a gap 23 is provided at the bottom of the attachment 20. Therefore, it is checked whether the distance d is the desired distance through the gap 23, which is positioned alongside the protrusion 22 (step S6). The desired distance here is, for example, a state where the distance d is approximately 0, but the lens 11 is not in contact with the shim 40. Step S6 is a confirmation step to check whether the distance d between the lens 11 and the shim 40 is the desired distance.

[0052] In step S6, if distance d is the desired distance (Yes), the flow of the adjustment method of this disclosure ends. On the other hand, if distance d is not the desired distance (No), step S7 is performed. In step S7, the attachment 20 and spacer 50 are removed from the probe body 10. Then, spacer 50 is replaced with another spacer 50 having a different height (vertical length) (step S8). However, the height of the replacement spacer 50 is such that the lens 11 and shim 40 do not come into contact. Therefore, steps S7 and S8 are adjustment steps to adjust the position of the lens 11 in the height direction of the probe body 10 when distance d is not the desired distance in step S6, within a range in which the lens 11 does not come into contact with the shim 40.

[0053] Steps S7 and S8 are performed by replacing a spacer 50 having a predetermined height, which is provided between the attachment 20 and the support member 60 that supports the probe body 10 on the opposite side from the object to be inspected 103 (which is also the component 30) as viewed from the attachment 20.

[0054] Thus, in steps S7 and S8 (adjustment steps), the position of the lens 11 in the height direction of the probe body 10 is adjusted by adjusting the distance between the end 21 of the attachment 20 on the side of the object to be inspected 103 and the lower end 111 (end) of the lens 11 on the side of the object to be inspected 103. However, since the attachment 20 is in contact with the member 30, the height position of the end 21 of the attachment 20 on the side of the object to be inspected 103 coincides with the height position of the surface 31 of the member 30. Therefore, by changing the height of the spacer 50, the distance between the end 21 and the lower end 111 can be changed, and thereby the distance d between the lower end 111 and the shim 40 can be changed.

[0055] After step S8, steps S3 and onward described above are performed.

[0056] Figure 9 is a flowchart showing a method for adjusting the position of the lens 11 of the present disclosure in another embodiment. The flow shown in Figure 9 can be performed using the probe 1 shown in Figures 7A and 7B.

[0057] The adjustment method of this disclosure shown in Figure 9 includes step S9 instead of steps S7 and S8 described above. Step S9 (adjustment step) corresponds to the adjustment steps S7 and S8 described above. However, in the example of Figure 9, step S9 is performed by changing the relative position of the spacer 50 and attachment 20 with respect to the support member 60, for example, in the vertical direction. The support member 60 is a structure that supports the probe body 10 on the side opposite to the object to be inspected 103 as viewed from the attachment 20. In step S9, with the support member 60 fixed, for example, the spacer 50 is rotated around its central axis L. As a result, the spacer 50 and the attachment 20 in contact with the spacer 50 move in the vertical direction, which is the direction of extension of the central axis L. In this way, the height position of the lens 11 located at the lower end of the probe body 10 can be adjusted. After step S9, step S6 is performed again. [Explanation of Symbols]

[0058] 1 probe 10 Probe body 100 Ultrasound examination equipment 101 Scanning Measurement Device 102 Control device 103 Items to be inspected 11 lenses 111 Bottom end 12 Exterior 20 Attachments 21 End 22 Convex part 23 gaps 30 components 31 Surface 40 Sims 41 Surface 50 Spacers 51 Surface 52 Unevenness 60 Support member 61 Screw fasteners 62 Unevenness 63 Inner self L center axis U Ultrasonic

Claims

1. The system comprises a probe that transmits or receives ultrasound waves to an object to be inspected, at least one of which is the transmission or reception of ultrasound waves; a scanning measuring device that scans the probe in the xy plane; and a control device that controls the driving of the probe. The aforementioned probe On the side of the object to be inspected, there is a probe body equipped with a lens through which the ultrasound waves pass, An attachment that surrounds the lens and is attached to the probe body, and has a protrusion that extends further toward the object to be inspected than the lens, Equipped with An ultrasonic examination apparatus characterized by the following features.

2. An ultrasonic inspection apparatus according to claim 1, The aforementioned probe further, A support member that supports the probe body on the side opposite to the object to be inspected when viewed from the attachment, A spacer having a predetermined height is provided between the attachment and the support member, Equipped with An ultrasonic examination apparatus characterized by the following features.

3. An ultrasonic inspection apparatus according to claim 2, The aforementioned spacer is replaceable with another spacer having a different predetermined height. An ultrasonic examination apparatus characterized by the following features.

4. An ultrasonic inspection apparatus according to claim 1, Furthermore, A support member is provided which the probe body is supported on the side opposite to the object to be inspected when viewed from the attachment, and which has an inner surface facing the outer surface of the probe body, and which has irregularities on the inner surface, A spacer is provided between the attachment and the support member, and has a surface with protrusions that interlock with the protrusions so as to be movable along the central axis of the probe body, Equipped with An ultrasonic examination apparatus characterized by the following features.

5. An ultrasonic inspection apparatus according to claim 1, The aforementioned protrusion is formed in the scanning direction of the probe. An ultrasonic examination apparatus characterized by the following features.

6. An ultrasonic inspection apparatus according to claim 1, The aforementioned attachment is detachable. An ultrasonic examination apparatus characterized by the following features.

7. An ultrasonic inspection apparatus according to claim 1, The attachment is positioned opposite the object to be inspected and is made of a hard material. An ultrasonic examination apparatus characterized by the following features.

8. An ultrasonic inspection apparatus according to claim 1, The attachment has a cylindrical shape, and the probe body is fitted into the attachment. An ultrasonic examination apparatus characterized by the following features.

9. An ultrasonic inspection apparatus according to claim 1, Multiple protrusions are provided, and gaps are formed between adjacent protrusions. The gap is large enough to allow at least the lens and a shim having a predetermined thickness, positioned opposite the lens, to be visible from outside the attachment. An ultrasonic examination apparatus characterized by the following features.

10. An ultrasonic inspection apparatus according to claim 9, Multiple protrusions are provided, and gaps are formed between adjacent protrusions. The gap is of a size that allows the shim to be inserted. An ultrasonic examination apparatus characterized by the following features.

11. An ultrasonic inspection apparatus according to claim 1, The ultrasound inspection apparatus uses ultrasound to perform inspections in water with the probe and the object to be inspected submerged in the water. An ultrasonic examination apparatus characterized by the following features.

12. The process involves attaching an attachment to a probe body, which is equipped with a lens through which the ultrasound passes, to an object to be inspected that is the subject of an ultrasound inspection. The attachment is attached to the probe body, surrounding the lens, and has a protrusion that extends further toward the object to be inspected than the lens. A placement step of placing a shim having a predetermined thickness between the lens and the surface of the lens facing it, The process includes a verification step of confirming whether the distance between the lens and the shim is the desired distance. A method for adjusting the position of a lens, characterized by the following:

13. A method for adjusting the lens position according to claim 12, If the distance in the verification step is not the desired distance, the adjustment step further includes adjusting the position of the lens in the height direction of the probe body within a range in which the lens does not come into contact with the shim. The adjustment process is carried out by replacing a spacer of a predetermined height, which is provided between the attachment and the support member that supports the probe body on the opposite side of the attachment from the object to be inspected. A method for adjusting the position of a lens, characterized by the following:

14. A method for adjusting the lens position according to claim 12, If the distance in the verification step is not the desired distance, the adjustment step further includes adjusting the position of the lens in the height direction of the probe body within a range in which the lens does not come into contact with the shim. The adjustment process is performed by changing the relative position of the attachment in the vertical direction with respect to the support member that supports the probe body on the opposite side of the attachment from the object to be inspected. A method for adjusting the position of a lens, characterized by the following:

15. A method for adjusting the lens position according to claim 12, If the distance in the verification step is not the desired distance, the adjustment step further includes adjusting the position of the lens in the height direction of the probe body within a range in which the lens does not come into contact with the shim. In the adjustment step, the position of the lens in the height direction of the probe body is adjusted by adjusting the distance between the end of the attachment on the object to be inspected side and the end of the lens on the object to be inspected side. A method for adjusting the position of a lens, characterized by the following:

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