Light-emitting module and method for manufacturing the same

Abstract

This invention provides a light-emitting module that allows adjustment of the direction of the laser beam emitted from a laser light source. [Solution] The light-emitting module comprises a support base having a first mounting surface and a plurality of second mounting surfaces, the plurality of second mounting surfaces being aligned in a first direction and positioned in a second direction with respect to the first mounting surface when viewed from above, with the height of the plurality of second mounting surfaces decreasing along the first direction; a plurality of laser light sources, each positioned on the first mounting surface and emitting a laser beam in a second direction when viewed from above; a plurality of mirror members, each positioned on the corresponding second mounting surface and reflecting the laser beam emitted from the corresponding laser light source in a first direction; a plurality of light deflection members, each positioned on the first mounting surface and directing the laser beam emitted from the corresponding laser light source towards the corresponding mirror member; and a focusing lens, each combining the plurality of laser beams reflected in the first direction.

Description

Technical Field

[0001] The present disclosure relates to a light-emitting module and a method for manufacturing the same.

Background Art

[0002] In recent years, with the increase in the output power of semiconductor laser devices, a technique has been developed to use a semiconductor laser device not as an excitation light source but as a light source for laser light that processes materials. Such a technique is called direct diode laser (DDL) technology.

[0003] In DDL technology, a light-emitting module including a plurality of semiconductor laser devices is used. The light-emitting module combines a plurality of laser beams emitted from the plurality of semiconductor laser devices and emits a high-output combined beam. Patent Document 1 discloses an example of a light-emitting module used in DDL technology.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] To provide a light-emitting module capable of adjusting the traveling direction of a laser beam emitted from a laser light source and a method for manufacturing the same.

Means for Solving the Problems

[0006] In one embodiment, the light-emitting module of the present disclosure comprises: a support base having a first mounting surface and a plurality of second mounting surfaces, wherein the plurality of second mounting surfaces are aligned in a first direction and located in a second direction intersecting the first direction with respect to the first mounting surface in a top view, and the height of the plurality of second mounting surfaces from a reference plane parallel to the first direction decreases along the first direction; a plurality of laser light sources disposed on the first mounting surface, each emitting a laser beam in the second direction in a top view; a plurality of mirror members, each reflecting the laser beam emitted from the corresponding laser light source in a first direction, wherein a mirror member corresponding to each of the plurality of second mounting surfaces is disposed on the plurality of mirror members; a plurality of optical deflection members disposed on the first mounting surface, each directing the laser beam emitted from the corresponding laser light source towards the corresponding mirror member; and a focusing lens for merging a plurality of laser beams, including the laser beam emitted from each of the plurality of laser light sources and reflected in the first direction by the corresponding mirror member.

[0007] A method for manufacturing a light-emitting module of the present disclosure, in one embodiment, includes the steps of: preparing a support base having a first mounting surface and a plurality of second mounting surfaces, wherein the plurality of second mounting surfaces are aligned in a first direction, located in a second direction intersecting the first direction with respect to the first mounting surface when viewed from above, and the height of the plurality of second mounting surfaces from a reference plane parallel to the first direction decreases along the first direction; arranging the plurality of laser light sources on the first mounting surface such that each of the plurality of laser light sources emits a laser beam in the second direction when viewed from above; arranging mirror members corresponding to each of the plurality of second mounting surfaces; and arranging the plurality of light deflection members on the first mounting surface, the steps of adjusting the direction of propagation of the laser beams so that the laser beams are incident on the corresponding mirror members by adjusting the position of each light deflection member. [Effects of the Invention]

[0008] According to embodiments of this disclosure, it is possible to realize a light-emitting module and a method for manufacturing the same, in which the direction of propagation of a laser beam emitted from a laser light source can be adjusted. [Brief explanation of the drawing]

[0009] [Figure 1A] Figure 1A is a schematic perspective view showing the configuration of a light-emitting module according to an exemplary embodiment of the present disclosure. [Figure 1B] Figure 1B is a top view of the light-emitting module shown in Figure 1A. [Figure 1C] Figure 1C is a side view of the light-emitting module shown in Figure 1A, viewed from the +Z direction. [Figure 1D] Figure 1D is a side view of the light-emitting module shown in Figure 1A, viewed from the -X direction. [Figure 2A] Figure 2A is a schematic top view showing the configuration of Modification 1 of the light-emitting module. [Figure 2B] Figure 2B is a schematic side view from the +Z direction showing the configuration of Modification 1 of the light-emitting module. [Figure 3A] Figure 3A is a schematic top view showing the configuration of a modified example 2 of the light-emitting module. [Figure 3B] Figure 3B is a schematic side view from the +Z direction showing the configuration of Modification 2 of the light-emitting module. [Figure 4] Figure 4 is a schematic top view showing the configuration of modification 3 of the light-emitting module. [Figure 5] Figure 5 is a schematic diagram showing the configuration of a DDL device according to an exemplary embodiment of the present disclosure. [Figure 6A] Figure 6A is an exploded perspective view of a laser light source. [Figure 6B] Figure 6B is a cross-sectional view of the laser light source parallel to the XY plane. [Modes for carrying out the invention]

[0010] Hereinafter, while referring to the drawings, a light emitting module according to an embodiment of the present disclosure and a method for manufacturing the same will be described. Parts denoted by the same reference numerals in the plurality of drawings indicate the same or equivalent parts.

[0011] Furthermore, the embodiments described below are examples for embodying the technical idea of the present invention, and do not limit the present invention thereto. In addition, descriptions of the size, material, shape, relative arrangement, etc. of the components are not intended to limit the scope of the present invention thereto, but are intended to be illustrative. The size and positional relationship of the members shown in each drawing may be exaggerated for ease of understanding.

[0012] In this specification or claims, with respect to polygons such as triangles or quadrilaterals, shapes obtained by performing processing such as rounding, chamfering, corner cutting, or round cutting at the corners of the polygon are also included in the term "polygon". Also, not limited to the corners (ends of the sides), shapes obtained by performing processing on the middle part of the sides are similarly referred to as polygons. That is, shapes obtained by performing partial processing while leaving the polygon as a base are included in the interpretation of "polygon" described in this specification and claims.

[0013] (Embodiment) [Light Emitting Module] First, referring to FIGS. 1A to 1D, a configuration example of a light emitting module according to an embodiment of the present disclosure will be described. The light emitting module can be used, for example, for laser processing of a processing target such as a metal part. Examples of laser processing include cutting, drilling, welding, and the like.

[0014] FIG. 1A is a perspective view schematically showing the configuration of a light emitting module according to an exemplary embodiment of the present disclosure. The light emitting module 100 shown in FIG. 1A includes a support substrate 10, a plurality of laser light sources 20, a plurality of slow-axis collimating lenses 30, a plurality of wedges 40, a plurality of mirror members 50, a condenser lens 60, and an optical fiber 70. The light emitting module 100 further includes a support member 72 that supports the optical fiber 70.

[0015] In the attached drawings, for reference purposes, the X-axis, Y-axis, and Z-axis that are orthogonal to each other are schematically shown. The direction of the arrow of the X-axis is referred to as the +X direction, and the opposite direction is referred to as the -X direction. When the ±X directions are not distinguished, it is simply referred to as the X direction. The same applies to the Y direction and the Z direction. In this specification, for the sake of clarity of explanation, the +Y direction is referred to as "upward" and the -Y direction is referred to as "downward". This does not limit the orientation during the use of the light-emitting module, and the orientation of the light-emitting module is arbitrary.

[0016] FIG. 1B is a top view of the light-emitting module 100 shown in FIG. 1A. FIGS. 1C and 1D are side views of the light-emitting module 100 shown in FIG. 1A as viewed from the +Z direction and the -X direction, respectively. However, in FIG. 1C, the condenser lens 60, the optical fiber 70, and the support member 72 are omitted. In FIG. 1D, the plurality of laser light sources 20, the plurality of slow-axis collimating lenses 30, and the plurality of wedges 40 are omitted.

[0017] In the example shown in FIGS. 1A to 1D, the number of laser light sources 20 is 3, but it is not limited to this example. The number of laser light sources 20 may be 2 or 4 or more. The number of slow-axis collimating lenses 30 is the same as the number of laser light sources 20. The same applies to the number of wedges 40 and the number of mirror members 50.

[0018] The support base 10 is positioned on a reference plane Ref, as shown in Figures 1C and 1D. The reference plane Ref is parallel to the Z direction, and more specifically, parallel to the XZ plane. The support base 10 has a first mounting surface 12a, a plurality of second mounting surfaces 12b, and a third mounting surface 12c, as shown in Figures 1A and 1B. The plurality of second mounting surfaces 12b are arranged in a stepped manner in the +Z direction, as shown in Figure 1A. In a top view taken from a direction perpendicular to the first mounting surface 12a, as shown in Figure 1B, the plurality of second mounting surfaces 12b are positioned in the +X direction with respect to the first mounting surface 12a. The height of the plurality of second mounting surfaces 12b from the reference plane Ref decreases along the +Z direction, as shown in Figure 1D. The third mounting surface 12c is positioned in the +Z direction with respect to the plurality of second mounting surfaces 12b in a top view, as shown in Figure 1B. In this specification, "height" means the height from the reference plane Ref.

[0019] Multiple laser light sources 20, multiple slow-axis collimating lenses 30, and multiple wedges 40 are arranged on the first mounting surface 12a. A corresponding mirror member 50 is arranged on each second mounting surface 12b. A focusing lens 60 is arranged on the third mounting surface 12c, and an optical fiber 70 is arranged via a support member 72.

[0020] As will be explained in more detail later, the light-emitting module 100 according to this embodiment emits a high-power coupled beam in the following manner.

[0021] As shown in Figure 1B, each laser light source 20 emits a laser beam L in the +X direction through a corresponding slow-axis collimating lens 30 in a top view. Each wedge 40 directs the laser beam L emitted from the corresponding laser light source 20 to the corresponding mirror member 50, as shown in Figure 1C. Each mirror member 50 reflects the laser beam L emitted from the corresponding laser light source 20 in the +Z direction, as shown in Figure 1D. The focusing lens 60 combines the multiple laser beams L, including those emitted from each of the multiple laser light sources 20 and reflected in the +Z direction by the corresponding mirror member 50, and directs them into the optical fiber 70. The optical fiber 70 emits a combined beam, which is the combined laser beam L. The output of the combined beam is approximately equal to the output of the laser beam L emitted from each laser light source 20 multiplied by the number of laser light sources 20. Therefore, increasing the number of laser light sources 20 can increase the output of the combined beam.

[0022] The laser beam L shown in Figure 1B is represented by a thick line with three arrows, while the laser beam L shown in Figures 1C and 1D is represented by a thick line with one arrow. This is to emphasize that the spread of the laser beam L in the XZ plane is greater than the spread of the laser beam L in the XY plane.

[0023] In the light-emitting module 100 according to this embodiment, each wedge 40 directs the laser beam L emitted from the corresponding laser light source 20 towards the corresponding mirror member 50. Each wedge 40 can adjust the direction of travel of the laser beam L emitted from the corresponding laser light source 20.

[0024] Therefore, in the support base 10, it is not necessary to vary the height of the first mounting surface 12a according to the laser light source 20. This makes it possible to support multiple laser light sources 20 without using a complex structure such as a stepped shape.

[0025] In this specification, the direction in which multiple second mounting surfaces 12b are aligned is also referred to as the "first direction," and the direction in which each laser light source 20 emits the laser beam L when viewed from above is also referred to as the "second direction." In the example shown in Figures 1A to 1D, the second direction (+X direction) is perpendicular to the first direction (+Z direction), but this is not the only example. The second direction does not need to be perpendicular to the first direction as long as it intersects with the first direction.

[0026] The components of the light-emitting module 100 are described in detail below.

[0027] <Support base 10> The support base 10 supports multiple laser light sources 20, multiple slow-axis collimating lenses 30, multiple wedges 40, multiple mirror members 50, and a focusing lens 60, and supports the optical fiber 70 via a support member 72. With respect to the support base 10, the side where the first mounting surface 12a, multiple second mounting surfaces 12b, and third mounting surface 12c are located is "upper," and the opposite side is "lower." The components arranged on the first mounting surface 12a, multiple second mounting surfaces 12b, and third mounting surface 12c are as described above.

[0028] In this specification, "second mounting surface 12b" means a surface on which a mirror member 50 is placed, corresponding to one or more laser light sources 20. In the example shown in Figures 1A to 1D, each of the three surfaces arranged in a step-like manner corresponds to one laser light source 20, and a corresponding mirror member 50 is placed on each of the three surfaces, so these three surfaces correspond to the second mounting surface 12b. However, if at least one of the three or more surfaces arranged in a step-like manner, other than the two ends, does not correspond to any of the laser light sources 20, then there is no need to place a mirror member 50 on this surface, and therefore this surface does not correspond to the second mounting surface 12b. Consequently, the remaining surfaces corresponding to the second mounting surface 12b are arranged discontinuously in part and are not arranged in a step-like manner. However, the height of the second mounting surface 12b decreases along the first direction (+Z direction).

[0029] The support base 10 comprises a first portion 10-1 having a first mounting surface 12a and a third mounting surface 12c, and a second portion 10-2 having a plurality of second mounting surfaces 12b. The second portion 10-2 is supported by the first portion 10-1. The first portion 10-1 may be, for example, a flat plate extending along the XZ plane. In the example shown in Figure 1B, the shape of the first portion 10-1 in top view is rectangular, but it is not limited to this example. The shape of the first portion 10-1 in top view may be, for example, circular or elliptical. The same applies to the shape of the second portion 10-2 in top view. Of the first portion 10-1, parts other than the portion having the first mounting surface 12a and the third mounting surface 12c and the portion supporting the second portion 10-2 may be removed.

[0030] The support substrate 10 may be formed from a ceramic selected from the group consisting of AlN, SiN, SiC, and alumina, for example. Alternatively, the support substrate 10 may be formed from at least one metallic material selected from the group consisting of Cu, Al, and Ag, for example. The support substrate 10 may be formed from a metal matrix composite material in which diamond particles are dispersed in at least one metallic material selected from the group consisting of Cu, Al, and Ag, for example. The support substrate 10 may be formed from at least one alloy material selected from the group consisting of CuW and CuMo. The support substrate 10 may be formed from a composite material that partially uses graphite.

[0031] The support base 10 may be formed as a single unit or as an assembly of multiple parts. The multiple parts may be formed from the same material or from different materials. For example, the first part 10-1 and the second part 10-2 may be formed as a single unit or independently of each other.

[0032] The support base 10 is preferably formed from a metallic material selected from the group consisting of Cu, Al, and Ag, and is made of a single component. Metallic materials have better heat dissipation than ceramics and are also softer, making them easier to process.

[0033] The support base 10 functions as a support platform on which multiple laser light sources 20 are placed. The support base 10 can also function as a heat sink to transfer heat emitted from the laser light sources 20 to the outside, thereby reducing excessive temperature rise of the laser light sources 20. In this case, one or more channels for liquid cooling may be provided inside the support base 10 as a cooling structure. The liquid for liquid cooling may be, for example, water. Alternatively, a fin structure for air cooling may be provided on the surface of the support base 10 as a cooling structure. Or, if the support base 10 is placed on a separately prepared heat sink, the support base 10 can also function as a heat spreader to transfer heat emitted from the multiple laser light sources 20 to the heat sink.

[0034] The first mounting surface 12a may have a first region on which each of the multiple laser light sources 20 is positioned, and a second region other than the first region. When the support base 10 functions as a heat sink, if the first regions are on the same plane parallel to the XZ plane and at the same height, a simple cooling structure such as a single channel extending in the Z direction can make the shortest distance from each laser light source 20 to the cooling structure approximately the same. As a result, the heat emitted from each laser light source 20 can be transferred to the cooling structure with little variation. When the support base 10 functions as a heat spreader, if the first regions are at the same height, the heat emitted from each laser light source 20 can be transferred to the reference plane Ref with little variation.

[0035] If the first region lies on the same plane parallel to the XZ plane, the normal direction of the first region is the +Y direction. In this specification, the normal direction of a face is the direction perpendicular to the face and means the direction away from the object having the face.

[0036] On the first mounting surface 12a, the second region may or may not be located at the same height as the first region. The third mounting surface 12c may or may not be located at the same height as the first mounting surface 12a. However, the structure of the first part 10-1 can be simplified if the first and second regions are located at the same height on the first mounting surface 12a, and the first mounting surface 12a and the third mounting surface 12c are located at the same height.

[0037] In the example shown in Figures 1A to 1D, the lowest of the multiple second mounting surfaces 12b is located higher than the first mounting surface 12a and the third mounting surface 12c, but the example is not limited to this. The lowest second mounting surface 12b may be located at the same height as the first mounting surface 12a and the third mounting surface 12c. In that case, the first part 10-1 has the lowest second mounting surface 12b in addition to the first mounting surface 12a and the third mounting surface 12c. The second part 10-2 has the remaining second mounting surfaces 12b.

[0038] As described above, since the height of the first mounting surface 12a does not need to be varied according to the laser light source 20 in the support base 10, the structure of the support base 10 can be simplified. In the fabrication of such a support base 10, the number of machining steps can be reduced, or a mass-production method such as die casting can be used. In die casting, molten metal material is formed by a mold. Furthermore, the cooling structure of the support base 10 can be simplified.

[0039] <Laser light source 20> As shown in Figure 1B, the laser light source 20 emits a laser beam L in the +X direction when viewed from above. In the example shown in Figure 1C, the direction of emission of the laser beam L from the laser light source 20 is in the +X direction, but this is not the only example. When the orientation of the laser light source 20 is shifted vertically when it is placed on the first mounting surface 12a, the direction of emission of the laser beam L from the laser light source 20 is parallel to the XY plane but shifted from the +X direction.

[0040] As shown in Figure 1B, the emission directions of the multiple laser beams L from the multiple laser light sources 20 are parallel to each other in a top view. However, even if these emission directions are not strictly parallel in a top view, it is acceptable as long as the angle between any two emission directions in a top view is 5° or less.

[0041] The laser light source 20 is a so-called chip-on-submount type semiconductor laser light source. As shown in the enlarged view of Figure 1A, the laser light source 20 comprises a submount 21, an end-face emission type semiconductor laser element 22 supported by the submount 21, a lens support member 23, and a velocity-axis collimating lens 24. The semiconductor laser element 22 is positioned on the first mounting surface 12a of the support base 10 via the submount 21. The lens support member 23 has a shape that straddles the semiconductor laser element 22. The lens support member 23 supports the velocity-axis collimating lens 24 by its end face. The focal point of the velocity-axis collimating lens 24 is located at the emission surface of the semiconductor laser element 22. The components of the laser light source 20 may also be treated as components of the light-emitting module 100.

[0042] The semiconductor laser element 22 emits laser light from its rectangular end face. When the end face extends in the Z direction and is a plane parallel to the YZ plane, the laser light emitted from the semiconductor laser element 22 in the +X direction spreads relatively quickly in the XY plane and relatively slowly in the XZ plane. The speed axis direction of the laser light is parallel to the Y direction, and the slow axis direction is parallel to the Z direction.

[0043] The laser light source 20 emits laser light from a semiconductor laser element 22, which passes through a velocity-axis collimating lens 24 and is emitted as a laser beam L. The laser beam L emitted from the laser light source 20 is collimated in the XY plane but not in the XZ plane. In this specification, "collimating" means not only making the laser light parallel but also reducing the beam spread of the laser light. The specific configuration of the laser light source 20 will be described later.

[0044] An actual laser beam L is a light beam that has an intensity distribution in a plane perpendicular to the direction of propagation. This intensity distribution can be approximated by a distribution function, such as a Gaussian distribution, in a plane perpendicular to the direction of propagation of the light beam. The diameter of the light beam, i.e., the beam diameter, is, for example, 1 / e of the intensity at the beam center. 2It is defined by the size of the cross-sectional area having more than double the strength. e is the base of the natural logarithm. The beam diameter can be, for example, between 0.1 mm and 1.0 mm.

[0045] Instead of the edge-emitting semiconductor laser element 22, a surface-emitting semiconductor laser element such as a VCSEL (Vertical-Cavity Surface-Emitting Laser) element may be used. The surface-emitting semiconductor laser element is arranged so that the laser light emitted from the semiconductor laser element travels in the +X direction.

[0046] Of the laser light source 20, the submount 21, lens support member 23, and speed-axis collimating lens 24, other than the semiconductor laser element 22, are not essential components. If there is no need to raise the semiconductor laser element 22, the submount 21 is not necessarily required. If the laser light emitted from the semiconductor laser element 22 is already collimated, the lens support member 23 and speed-axis collimating lens 24 are not necessarily required.

[0047] Multiple laser light sources 20 may have the same structure, including, for example, shape, material, and dimensions. Such multiple laser light sources 20 have the advantage of being easy to prepare.

[0048] The peak wavelength of the laser beam L may, for example, fall within the wavelength range where the material being processed has a high light absorption rate. When processing metal parts made of copper, brass, or aluminum, the peak wavelength of the laser beam L may be in the range of, for example, 350 nm to 550 nm.

[0049] The peak wavelengths of the multiple laser beams L emitted from multiple laser light sources 20 may all be the same, for example. In that case, since no difference due to wavelength dependence occurs, multiple slow-axis collimating lenses 30 can be formed from the same material. For similar reasons, multiple wedges 40 can be formed from the same material, and multiple mirror members 50 can also be formed from the same material. Furthermore, in a common focusing lens 60 into which multiple laser beams L having the same peak wavelength are incident, no difference due to wavelength dependence occurs. However, even if the peak wavelengths of the multiple laser beams L are not exactly the same, it is acceptable if some or all of the peak wavelengths of the multiple laser beams L are different, as long as the above-mentioned difference due to wavelength dependence can be ignored.

[0050] The polarization directions of the multiple laser beams L emitted from the multiple laser light sources 20 may all be in the same direction, for example. Alternatively, the polarization directions of some of the multiple laser beams L may differ from those of the rest. The polarization directions may be parallel to the Y direction or the Z direction, for example.

[0051] In the support base 10, the aforementioned first region on the first mounting surface 12a where each of the multiple laser light sources 20 is placed can be positioned at the same height, making it easy to provide a power supply structure such as a wire to each of the multiple laser light sources 20.

[0052] <Slow-axis collimating lens 30> Each retarded collimating lens 30 collimates the laser beam L emitted from the corresponding laser light source 20 in the XZ plane, as shown in Figure 1B. The focal point of each retarded collimating lens 30 is located at the emission surface of the semiconductor laser element 22 included in the corresponding laser light source 20, as shown in Figure 1A. The retarded collimating lens 30 may be, for example, a cylindrical lens having a uniform cross-sectional shape in the Y direction. The optical axis of the retarded collimating lens 30 is parallel to the X direction.

[0053] Multiple slow-axis collimating lenses 30 may have the same structure, including, for example, shape, material, and dimensions. Such multiple slow-axis collimating lenses 30 have the advantage of being readily available.

[0054] The slow-axis collimating lens 30 may be formed from at least one translucent material selected from the group consisting of, for example, glass, silicon, quartz, synthetic quartz, sapphire, transparent ceramics, silicone resin, and plastic.

[0055] Furthermore, if the laser beam L emitted from the laser light source 20 is collimated not only in the XY plane but also in the XZ plane, then there is no need to place the retarded-axis collimating lens 30.

[0056] <Wedge 40> As shown in Figure 1C, each wedge 40 directs the laser beam L emitted from the corresponding laser light source 20 towards the corresponding mirror member 50. As a result, the laser beam L is incident on a predetermined position P of the mirror member 50. The predetermined position P of the mirror member 50 is a position on the mirror member 50 whose position and orientation are appropriately adjusted so that the laser beam L can be reflected in the +Z direction without hitting other mirror members 50.

[0057] The wedge 40 has an incident surface 42 into which the laser beam L is incident and an exit surface 44 from which the laser beam L is emitted. Since the incident surface 42 and the exit surface 44 are nonparallel to each other, the direction of travel of the laser beam L emitted from the exit surface 44 is different from the direction of travel of the laser beam L incident on the incident surface 42.

[0058] When the emission surface 44 is tilted to approach the first mounting surface 12a, the direction of travel of the laser beam L emitted from the emission surface 44 is upward compared to the direction of travel of the laser beam L incident on the incident surface 42. When the emission surface 44 is tilted to move away from the first mounting surface 12a, the direction of travel of the laser beam L emitted from the emission surface 44 is downward compared to the direction of travel of the laser beam L incident on the incident surface 42.

[0059] In this specification, "the exit surface 44 is inclined to approach the first mounting surface 12a" means that the normal direction of the exit surface 44 is directed downward from a plane that is perpendicular to the incident surface 42 and parallel to the Z direction. "The exit surface 44 is inclined to move away from the first mounting surface 12a" means that the normal direction of the exit surface 44 is directed upward from this plane.

[0060] In the example shown in Figure 1C, the incident surface 42 is perpendicular to the first mounting surface 12a, but this is not the only example. The incident surface 42 does not have to be perpendicular to the first mounting surface 12a.

[0061] As shown in Figure 1C, if the optical axis direction of the laser beam L immediately after it is emitted from the laser light source 20 is directed downward from a predetermined position P on the mirror member 50, the laser beam L can be directed towards the mirror member 50 by tilting the emission surface 44 so that it approaches the first mounting surface 12a.

[0062] In contrast, if the optical axis direction of the laser beam L immediately after it is emitted from the laser light source 20 is above the predetermined position P on the mirror member 50, the laser beam L can be directed towards the mirror member 50 by tilting the emission surface 44 away from the first mounting surface 12a.

[0063] In either of the two cases described above, the shortest distance between the line extending the optical axis of the laser beam L immediately after it is emitted from the laser light source 20 and the predetermined position P on the mirror member 50 can be, for example, -10 mm or more and +10 mm or less. The sign "-" indicates that the line extending the optical axis of the laser beam L is located below the predetermined position P, and the sign "+" indicates that the line extending the optical axis of the laser beam L is located above the predetermined position P.

[0064] A resin layer 46 is provided between the wedge 40 and the first mounting surface 12a. The resin layer 46 is formed by curing the resin while the bottom surface of the wedge 40 is in contact with the first mounting surface 12a via the uncured resin. The resin may be, for example, a thermosetting resin that hardens by heating, or a photocurable resin that hardens by irradiation with ultraviolet or visible light. Before the resin hardens, the following active alignment is performed. That is, with the laser beam L emitted from the laser light source 20, the wedge 40 is appropriately moved in the X direction so that the laser beam L is precisely directed towards the mirror member 50. As a result, the laser beam L is incident near a predetermined position P of the mirror member 50. The reason why it is written as "near a predetermined position P of the mirror member 50" rather than "a predetermined position P of the mirror member 50" is that, as will be described later, the position and orientation of the mirror member 50 will also be adjusted afterward.

[0065] When the emission surface 44 is tilted to approach the first mounting surface 12a, moving the wedge 40 in the +X direction shifts the laser beam L in the -Y direction, and moving the wedge 40 in the -X direction shifts the laser beam L in the +Y direction. When the emission surface 44 is tilted to move away from the first mounting surface 12a, moving the wedge 40 in the +X direction shifts the laser beam L in the +Y direction, and moving the wedge 40 in the -X direction shifts the laser beam L in the -Y direction.

[0066] To accurately direct the laser beam L near a predetermined position P on the mirror member 50, it is necessary to precisely adjust (align) the direction of travel of the laser beam L. When the deflection angle of the laser beam L due to the wedge 40 is small, for example, between 0.1° and 1°, the rate of change in the amount of shift of the laser beam L due to the movement of the wedge 40 can be reduced. The deflection angle of the laser beam L is the angle between the direction of travel of the laser beam L incident on the incident surface 42 and the direction of travel of the laser beam L emitted from the exit surface 44. As an example, with a deflection angle of 0.5°, moving the wedge 40 by 1 mm causes the laser beam L to shift by 8.7 μm. In this way, the amount of shift of the laser beam L can be adjusted in micron units, so the laser beam L can be accurately directed near a predetermined position P on the mirror member 50.

[0067] The inclination of the exit surface 44 of each wedge 40 is appropriately determined according to the optical axis direction of the laser beam L immediately after it is emitted from the corresponding laser light source 20. In multiple wedges 40, the inclination of the exit surface 44 may all be the same, some may be the same, or all may be different.

[0068] The bottom surface of each wedge 40 has a shape that allows each wedge 40 to move at least in the X direction. More specifically, the portion of the bottom surface of each wedge 40 that contacts the first mounting surface 12a via the resin may be, for example, planar. In this case, each wedge 40 can slide and move. The portion that contacts the first mounting surface 12a may be a part of the bottom surface of each wedge 40 or all of it. If the portion that contacts the first mounting surface 12a is a part of the bottom surface of each wedge 40, the bottom surface of each wedge 40 may have, for example, one or more recesses. Alternatively, the bottom surface of each wedge 40 may have, for example, one or more grooves extending in the X direction and / or Y direction. The recesses or grooves help to increase the area in contact with the resin and improve the adhesive strength between each wedge 40 and the first mounting surface 12a.

[0069] The first mounting surface 12a has a shape in which each wedge 40 is positioned so as to be movable at least in the X direction. The area on the first mounting surface 12a in which each wedge 40 is positioned may be, for example, entirely planar. If this area is planar, the first part 10-1 having the first mounting surface 12a is easy to manufacture. If this area is planar, each wedge 40 can also be moved by sliding. Alternatively, the area on the first mounting surface 12a in which each wedge 40 is positioned may have, for example, one or more narrow grooves extending in the X direction. If the dimension of the narrow groove in the Z direction is smaller than the dimension of the wedge 40 in the Z direction, each wedge 40 can be moved in the X direction. The narrow grooves help to increase the area in contact with the resin and improve the adhesive strength between each wedge 40 and the first mounting surface 12a.

[0070] In this specification, "planar" means that the flatness is 10 μm or less. According to JIS B 0621 "Definition and indication of geometric deviation," flatness is defined as "the magnitude of the deviation of a planar feature from a geometrically correct plane (geometric plane)." Specifically, flatness corresponds to the distance between two hypothetical planes that are perfectly flat and sandwich the surface in question from above and below.

[0071] Since there is only one wedge 40 corresponding to each laser light source 20, the number of parts can be reduced. However, by combining other wedges with the wedge 40, the laser beam L emitted from one laser light source 20 may be directed towards the mirror member 50.

[0072] The wedge 40 may be formed from at least one translucent material selected from the group consisting of, for example, glass, silicon, quartz, synthetic quartz, sapphire, transparent ceramics, silicone resin, and plastic.

[0073] Furthermore, if the direction of propagation of the laser beam L can be changed, a diffraction grating may be used instead of the wedge 40, for example. In this specification, an optical element capable of changing the direction of propagation of the laser beam L is referred to as an "optical deflection element." The wedge 40 and the diffraction grating are examples of optical deflection elements.

[0074] <Mirror component 50> As shown in Figure 1D, each mirror member 50 reflects the laser beam L emitted from the corresponding laser light source 20 and incident at a predetermined position P in the +Z direction. As a result, multiple laser beams L with different optical axis heights are incident on the focusing lens 60.

[0075] Among the multiple second mounting surfaces 12b arranged in a step-like fashion in the +Z direction, the step difference between two adjacent second mounting surfaces 12b can be, for example, greater than the beam diameter of the laser beam L, and less than or equal to twice the beam diameter. If the step difference between two adjacent second mounting surfaces 12b is greater than the beam diameter, the laser beam L reflected at a predetermined position P on the mirror member 50 located on the higher second mounting surface 12b can travel in the +Z direction without hitting the mirror member 50 located on the lower second mounting surface 12b. However, the multiple mirror members 50 have the same dimensions in the Y direction. If the step difference between two adjacent second mounting surfaces 12b is less than or equal to twice the beam diameter of the laser beam L, the mounting density of the multiple mirror members 50 can be increased.

[0076] A resin layer 52 is provided between the mirror member 50 and the second mounting surface 12b. The resin layer 52 is formed by curing the resin while the bottom surface of the mirror member 50 is in contact with the second mounting surface 12b via the uncured resin. The resin is as described above. Before curing the resin, the following active alignment is performed. That is, with the laser beam L emitted from the laser light source 20, the position and orientation of the mirror member 50 are appropriately adjusted so that the laser beam L is accurately reflected in the +Z direction. At this time, if the mirror member 50 is rotated in a horizontal direction parallel to the XZ plane, the direction of travel of the reflected laser beam L rotates in the horizontal direction, and if the mirror member 50 is rotated in an up-and-down direction parallel to the Y direction, the reflected laser beam L rotates in the up-and-down direction. Through the above adjustment, the laser beam L is incident on a predetermined position P of the mirror member 50.

[0077] Multiple mirror members 50 may have the same structure, including, for example, shape, material, and dimensions. Such multiple mirror members 50 are advantageous in that they are easy to prepare. The mirror members 50 may be formed from, for example, a dielectric multilayer film with low optical loss. If optical loss is not a concern, the mirror members 50 may be formed from, for example, a metal film. For example, the mirror members 50 may be formed by coating a dielectric multilayer film or a metal film on the surface of glass. The entire mirror member 50 may be formed from a metal material.

[0078] <Concentrating lens 60> As shown in Figure 1D, the focusing lens 60 combines multiple laser beams L, including laser beams L emitted from each laser light source 20 and reflected in the +Z direction by the corresponding mirror members 50.

[0079] The focusing lens 60 includes, for example, a fast-axis focusing lens 62 and a slow-axis focusing lens 64. The fast-axis focusing lens 62 may be, for example, a cylindrical lens having a uniform cross-sectional shape in the X direction. The slow-axis focusing lens 64 may be, for example, a cylindrical lens having a uniform cross-sectional shape in the Y direction. The optical axes of the fast-axis focusing lens 62 and the slow-axis focusing lens 64 are parallel to the Z direction.

[0080] The fast-axis focusing lens 62 and the slow-axis focusing lens 64 are positioned so that their focal points approximately coincide with the incident end face of the optical fiber 70. The focal length of the fast-axis focusing lens 62 is longer than that of the slow-axis focusing lens 64. As shown in Figure 1D, the fast-axis focusing lens 62 focuses multiple laser beams L, each with different optical axis heights in the YZ plane, onto the incident end face of the optical fiber 70. As shown in Figure 1B, the slow-axis focusing lens 64 focuses each broadened laser beam L onto the incident end of the optical fiber 70 in the XZ plane. In this way, the focusing lens 60 directs a combined beam, formed by combining multiple laser beams L, onto the incident end face of the optical fiber 70. Increasing the number of laser light sources 20 can increase the output of the combined beam. Having 10 or more laser light sources 20 is advantageous in that it allows for obtaining a high-power combined beam.

[0081] The focusing lens 60 may be formed from at least one translucent material selected from the group consisting of, for example, glass, silicon, quartz, synthetic quartz, sapphire, transparent ceramics, silicone resin, and plastic.

[0082] <Optical Fiber 70> The optical fiber 70 emits the coupled beam, which is incident on its input end face, from its output end face. The polarization state of the coupled beam can change as it passes through the optical fiber 70. Therefore, even if the coupled beam is polarized in a specific direction at the input end face, it may be, for example, unpolarized at the output end face. Since the optical fiber 70 has any length and can be bent, the coupled beam can be emitted from the output end face of the optical fiber 70 in any direction, making it possible to extract the coupled beam to the outside of the light-emitting module 100.

[0083] Furthermore, if the combined beam can be extracted to the outside of the light-emitting module 100, optical components other than the optical fiber 70 may be used.

[0084] As described above, in the light-emitting module 100 according to this embodiment, each wedge 40 directs the laser beam L emitted from the corresponding laser light source 20 towards the corresponding mirror member 50. Each wedge 40 can adjust the direction of travel of the laser beam L emitted from the corresponding laser light source 20.

[0085] Therefore, in the support base 10, it is not necessary to vary the height of the first mounting surface 12a according to the laser light source 20. As a result, it becomes possible to support multiple laser light sources 20 without using a complex structure such as a stepped shape.

[0086] In the fabrication of the support base 10 described above, the number of machining steps can be reduced, and a mass-production-suitable manufacturing method such as die casting can be used. Furthermore, the cooling structure and power supply structure can be simplified in the support base 10 described above.

[0087] Furthermore, in the light-emitting module 100 according to this embodiment, the laser beam L can be accurately directed towards the mirror member 50 by active alignment using the wedge 40, which has a small deflection angle of the laser beam L. Subsequently, the laser beam L can be accurately reflected in the +Z direction by active alignment using the mirror member 50.

[0088] Unlike the light-emitting module 100 according to this embodiment, a configuration is also conceivable in which the first mounting surface 12a is connected to a plurality of second mounting surfaces 12b, and the height of the first mounting surface 12a varies in a stepped manner according to the laser light source 20, similar to the height of the plurality of second mounting surfaces 12b. In such a configuration, each wedge 40 directs the laser beam L emitted from the corresponding laser light source 20 to the corresponding mirror member 50. Therefore, in such a configuration, even if the optical axis direction of the laser beam L emitted from the laser light source 20 deviates from the desired direction, the direction of propagation of the laser beam L emitted from the laser light source 20 can be adjusted.

[0089] Next, an example of a method for manufacturing the light-emitting module 100 according to this embodiment will be described. The method for manufacturing the light-emitting module 100 may include, for example, at least the following steps A to D. In step A, a support base 10, a plurality of laser light sources 20, a plurality of wedges 40, and a plurality of mirror members 50 are prepared. In step B, the plurality of laser light sources 20 are arranged on the first mounting surface 12a of the support base 10 such that each laser light source 20 emits a laser beam L in the +X direction when viewed from above. In step C, the corresponding mirror members 50 are arranged on each second mounting surface 12b of the support base 10. In step D, when arranging the plurality of light deflection members on the first mounting surface 12a, the direction of propagation of the laser beam L is adjusted by adjusting the position of each wedge 40 so that the laser beam L is incident on the corresponding mirror member 50.

[0090] By processes A to D, a light-emitting module 100 can be manufactured that allows adjustment of the direction of the laser beam L emitted from the laser light source 20.

[0091] The method for manufacturing the light-emitting module 100 may further include the following step E. In step E, the position and orientation of each mirror member 50 are adjusted so that the direction of propagation of the laser beam L reflected by each mirror member 50 is in the +Z direction.

[0092] By step E, multiple laser beams L can be obtained, including laser beams L emitted from each of the multiple laser light sources 20 and reflected in the +Z direction by the corresponding mirror members 50. The multiple laser beams L can be combined, for example, by a focusing lens 60.

[0093] To explain step D in more detail from the above steps A to E, a resin is placed between each wedge 40 and the first mounting surface 12a, and with a laser beam L emitted from the corresponding laser light source 20, each wedge 40 is moved in the X direction, and then the resin is cured to form a resin layer 46. This active alignment by the wedges 40 allows the laser beam L to be accurately directed towards the mirror member 50.

[0094] To explain step E in more detail from the above steps A to E, a resin is provided between each mirror member 50 and the corresponding second mounting surface 12b, and with a laser beam L emitted from the corresponding laser light source 20, the position and orientation of each mirror member 50 are adjusted, and then the resin is cured to form a resin layer 52. Through this active alignment by the mirror members 50, the laser beam L can be accurately reflected in the +Z direction.

[0095] [Examples of light-emitting modules] Below, with reference to Figures 2A to 4, three modified examples of the light-emitting module 100 will be described.

[0096] <Example 1> Figures 2A and 2B are schematic top view and side view from the +Z direction, respectively, showing the configuration of Modification 1 of the light-emitting module 100. However, in Figure 2B, the focusing lens 60, optical fiber 70, and support member 72 are omitted.

[0097] The light-emitting module 110 shown in Figures 2A and 2B differs from the light-emitting module 100 shown in Figures 1A to 1D in the following two respects. The first is the optical axis direction of the laser beam L immediately after it is emitted from the foremost laser light source 20 of the three laser light sources 20, with the +Z direction being forward. The second is the orientation of the emission surface 44 of the wedge 40 corresponding to the foremost laser light source 20.

[0098] When the laser light source 20 is positioned on the first mounting surface 12a, if the orientation of the laser light source 20 is shifted upward, the optical axis direction of the laser beam L immediately after it is emitted from the laser light source 20 may be directed upward above the predetermined position P of the mirror member 50, as shown in Figure 2B. Even in that case, as shown in Figures 2A and 2B, if the emission surface 44 of the wedge 40 is tilted away from the first mounting surface 12a, the laser beam L can be incident on the predetermined position P of the mirror member 50.

[0099] In the examples shown in Figures 2A and 2B, the direction of the foremost laser light source 20 of the three laser light sources 20 is shifted upward, but this is not the only example. The direction of the central or rearmost laser light source 20 may also be shifted upward as described above. Alternatively, the direction of any two or all of the three laser light sources 20 may be shifted upward as described above.

[0100] In the light-emitting module 110, similar to the light-emitting module 100, each wedge 40 directs the laser beam L emitted from the corresponding laser light source 20 towards the corresponding mirror member 50. Each wedge 40 can adjust the direction of travel of the laser beam L emitted from the corresponding laser light source 20.

[0101] Therefore, it is not necessary to vary the height of the first mounting surface 12a according to the laser light source 20. As a result, even with the above differences, multiple laser light sources 20 can be supported without using a complex structure such as a stepped shape, similar to the light-emitting module 100.

[0102] <Modification 2> Figures 3A and 3B are schematic top view and side view from the +Z direction, respectively, showing the configuration of Modification 2 of the light-emitting module 100. However, in Figure 3B, the focusing lens 60, optical fiber 70, and support member 72 are omitted.

[0103] The light-emitting module 120 shown in Figures 3A and 3B differs from the light-emitting module 100 shown in Figures 1A to 1D in the following two respects. The first is that multiple laser light sources 20 and multiple slow-axis collimating lenses 30 are housed in the same package 80. The dashed lines shown in Figures 3A and 3B represent the components within the package 80. The second is that, with the +Z direction being forward, there is no wedge 40 corresponding to the foremost laser light source 20.

[0104] In the support base 10, it is not necessary to vary the height of the first mounting surface 12a according to the laser light source 20. Therefore, as shown in Figures 3A and 3B, it is easy to place a package 80 containing multiple laser light sources 20 and multiple slow-axis collimating lenses 30 on the first mounting surface 12a.

[0105] As shown in Figure 3B, the package 80 comprises a substrate 82 having a mounting surface, a frame 84 located at the periphery of the mounting surface, a light-transmitting window 86 attached to the frame 84, and a lid 88 supported by the upper surface of the frame 84. Multiple laser light sources 20 and multiple slow-axis collimating lenses 30 are arranged on the mounting surface. The light-transmitting window 86 transmits the laser beam L emitted from each laser light source 20 through the corresponding slow-axis collimating lens 30. The lid 88 seals the multiple laser light sources 20 together with the substrate 82 and the frame 84. The same package 80 facilitates the sealing of multiple laser light sources 20.

[0106] It is preferable that the multiple laser light sources 20 are hermetically sealed by a package 80. The effect of hermetically sealing increases as the wavelength of the laser beam L decreases. In a configuration where the laser light sources 20 are not hermetically sealed and the emission surfaces of the semiconductor laser elements 22 shown in Figure 1A are in contact with the outside air, the shorter the wavelength of the laser beam L, the higher the likelihood that the emission surfaces will deteriorate during operation due to dust collection.

[0107] In package 80, multiple laser light sources 20 are elevated by the substrate 82. As a result, the laser beam L emitted from the foremost laser light source 20 enters the predetermined position P of the mirror member 50 without passing through the wedge 40. Thus, the number of wedges 40 may be less than the number of laser light sources 20. The remaining laser light sources 20 have corresponding wedges 40, but because the remaining laser light sources 20 are elevated, the deflection angle of the laser beam L caused by the wedges 40 can be reduced.

[0108] In the light-emitting module 120, similar to the light-emitting module 100, each wedge 40 directs the laser beam L emitted from the corresponding laser light source 20 towards the corresponding mirror member 50. Each wedge 40 can adjust the direction of travel of the laser beam L emitted from the corresponding laser light source 20.

[0109] Therefore, it is not necessary to vary the height of the first mounting surface 12a according to the laser light source 20. As a result, even with the above differences, multiple laser light sources 20 can be supported without using a complex structure such as a stepped shape, similar to the light-emitting module 100.

[0110] <Variation 3> Figure 4 is a schematic top view showing the configuration of modification 3 of the light-emitting module 100. The light-emitting module 130 shown in Figure 4 differs from the light-emitting module 100 shown in Figures 1A to 1D in the following three respects. First, the light-emitting module 130 includes, in addition to the multiple laser light sources 20a, multiple slow-axis collimating lenses 30a, multiple wedges 40a, and multiple mirror members 50a, multiple laser light sources 20b, multiple slow-axis collimating lenses 30b, multiple wedges 40b, and multiple mirror members 50b. Second, the light-emitting module 130 further includes a mirror member 92, a half-wave plate 94, and a polarizing beam splitter 96. Third, the shape of the support base 10.

[0111] The support base 10 has a first mounting surface 12a, a plurality of second mounting surfaces 12b, a third mounting surface 12c, and a fourth mounting surface 12d. The plurality of second mounting surfaces 12b are arranged in a stepped manner in the +Z direction. Furthermore, in a top view, the plurality of second mounting surfaces 12b are located in the +X direction with respect to the first mounting surface 12a and in the -X direction with respect to the fourth mounting surface 12d. Therefore, the plurality of second mounting surfaces 12b are located between the first mounting surface 12a and the fourth mounting surface 12d. The height of the plurality of second mounting surfaces 12b decreases along the +Z direction. The third mounting surface 12c is located in the +Z direction with respect to the plurality of second mounting surfaces 12b in a top view.

[0112] Multiple laser light sources 20a, multiple slow-axis collimating lenses 30a, and multiple wedges 40a are arranged on the first mounting surface 12a. The height of the first mounting surface 12a does not need to be different depending on the laser light sources 20a. Multiple laser light sources 20b, multiple slow-axis collimating lenses 30b, and multiple wedges 40b are arranged on the fourth mounting surface 12d. The height of the fourth mounting surface 12d does not need to be different depending on the laser light sources 20b. Corresponding mirror members 50a and 50b are arranged on each second mounting surface 12b. A mirror member 92, a half-wave plate 94, a polarizing beam splitter 96, and a focusing lens 60 are arranged on the third mounting surface 12c, and an optical fiber 70 is arranged via a support member 72.

[0113] The support base 10 comprises a first portion 10-1 having a first mounting surface 12a, a third mounting surface 12c, and a fourth mounting surface 12d, and a second portion 10-2 having a plurality of second mounting surfaces 12b. The second portion 10-2 is supported by the first portion 10-1. The first portion 10-1 and the second portion 10-2 may be formed integrally or independently of each other.

[0114] The laser light source 20a, the retard-axis collimating lens 30a, the wedge 40a, and the mirror member 50a each have the same structure as the laser light source 20, retard-axis collimating lens 30, wedge 40, and mirror member 50 shown in Figure 1B. The same applies to the laser light source 20b, retard-axis collimating lens 30b, wedge 40b, and mirror member 50b. The laser light source 20a, retard-axis collimating lens 30a, wedge 40a, and mirror member 50a are arranged in this order along the +X direction, and the laser light source 20b, retard-axis collimating lens 30b, wedge 40b, and mirror member 50b are arranged in this order along the -X direction. The arrangement of the laser light sources 20a and 20b is inversely related to each other in the X direction. The same applies to the arrangement of the retard-axis collimating lenses 30a and 30b, the arrangement of the wedges 40a and 40b, and the arrangement of the mirror members 50a and 50b.

[0115] Each laser light source 20a emits a laser beam La in the +X direction, and each laser light source 20b emits a laser beam Lb in the -X direction. Here, the polarization directions of the laser beams La and Lb are designed to be parallel to the Z direction. Each lagging collimating lens 30a collimates the laser beam La emitted from the corresponding laser light source 20a in the +X direction in the XZ plane. Each lagging collimating lens 30b collimates the laser beam Lb emitted from the corresponding laser light source 20b in the XZ plane. Each wedge 40a directs the laser beam La emitted from the corresponding laser light source 20a to the corresponding mirror member 50a. Each wedge 40b directs the laser beam Lb emitted from the corresponding laser light source 20b to the corresponding mirror member 50b. Each mirror member 50a reflects the laser beam La in the +Z direction. Each mirror member 50b reflects the laser beam Lb in the +Z direction. In this way, multiple laser beams La, whose optical axes are at different heights, propagate in the +Z direction. Similarly, multiple laser beams Lb, whose optical axes are at different heights, propagate in the +Z direction.

[0116] The mirror member 92 reflects multiple laser beams Lb traveling in the +Z direction in the -X direction. The half-wave plate 94 changes the polarization direction of multiple laser beams Lb traveling in the -X direction from the Z direction to the Y direction. The polarizing beam splitter 96 transmits multiple laser beams La traveling in the +Z direction with a polarization direction in the X direction in the +Z direction, and reflects multiple laser beams Lb traveling in the -X direction with a polarization direction in the Y direction in the +Z direction. The multiple laser beams La that have passed through the polarizing beam splitter 96 are focused to the incident end face of the optical fiber 70 by the focusing lens 60. Similarly, the multiple laser beams Lb reflected by the polarizing beam splitter 96 are focused to the incident end face of the optical fiber 70 by the focusing lens 60.

[0117] As a result, the light-emitting module 130 emits a combined beam from the exit end face of the optical fiber 70, in which multiple laser beams La and multiple laser beams Lb are coupled. In the light-emitting module 130 shown in Figure 4, the total number of laser light sources 20a and 20b is twice the number of laser light sources 20 compared to the light-emitting module 100 shown in Figures 1A to 1D. Therefore, the output of the combined beam can be further increased.

[0118] In the light-emitting module 130, each wedge 40a directs the laser beam La emitted from the corresponding laser light source 20a towards the corresponding mirror member 50a, and each wedge 40b directs the laser beam Lb emitted from the corresponding laser light source 20b towards the corresponding mirror member 50b. Each wedge 40a can adjust the direction of travel of the laser beam La emitted from the corresponding laser light source 20a, and each wedge 40b can adjust the direction of travel of the laser beam Lb emitted from the corresponding laser light source 20b.

[0119] Therefore, it is not necessary to vary the height of the first mounting surface 12a according to the laser light source 20a, nor is it necessary to vary the height of the fourth mounting surface 12d according to the laser light source 20b. As a result, even with the above differences, multiple laser light sources 20 can be supported without using a complex structure such as a stepped shape, similar to the light-emitting module 100.

[0120] [DDL device] Next, an example of the configuration of a DDL apparatus according to an embodiment of the present disclosure will be described with reference to Figure 5. Figure 5 is a schematic diagram showing the configuration of a DDL apparatus according to an exemplary embodiment of the present disclosure. The DDL apparatus 1000 shown in Figure 5 comprises a plurality of light-emitting modules 100, a processing head 300, and optical transmission fibers 250 connecting the plurality of light-emitting modules 100 to the processing head 300. Instead of the light-emitting modules 100 according to this embodiment, any of the light-emitting modules 110, 120, and 130, which are variations of the light-emitting module 100, may be used.

[0121] In the example shown in Figure 5, there are four light-emitting modules 100, but the number is not limited to this. There may be one light-emitting module 100, two, three, or five or more.

[0122] The number of laser light sources 20 included in each light-emitting module 100 is determined according to the required optical output or irradiance. The peak wavelength of the laser beam L emitted from the laser light sources 20 can also be selected according to the material to be processed. As mentioned above, when processing metal parts formed from copper, brass, or aluminum, the peak wavelength of the laser beam L may be in the range of 350 nm to 550 nm, for example. The peak wavelengths of the coupled beams emitted from each light-emitting module 100 do not need to be the same, and coupled beams with different peak wavelengths may be superimposed. Furthermore, it is possible to obtain the effects of the present invention even when using coupled beams with peak wavelengths outside the range of 350 nm to 550 nm.

[0123] In the example shown in Figure 5, multiple optical fibers 70 extending from multiple light-emitting modules 100 are coupled to an optical transmission fiber 250 by an optical multiplexer 230. The optical multiplexer 230 may be, for example, a TFB (Tapered Fiber Bundle). The processing head 300 focuses the laser beam emitted from the exit end face of the optical fiber 70 onto the object 400. If one DDL device 1000 has M light-emitting modules 100, and each light-emitting module 100 has N laser light sources 20, then if the optical output of one laser light source 20 is P watts, a laser beam with a maximum optical output of P × N × M watts can be focused onto the object 400. Here, N is an integer greater than or equal to 2, and M is a positive integer. For example, if P = 20 watts, N = 22, and M = 12, an optical output of more than 5 kilowatts can be achieved.

[0124] [Configuration of the laser light source 20] Next, with reference to Figures 6A and 6B, an example of the configuration of the laser light source 20 shown in Figure 1A will be described. Figure 6A is an exploded perspective view of the laser light source 20. Figure 6B is a cross-sectional view of the laser light source 20 parallel to the XY plane. The components of the laser light source 20 will be described below.

[0125] As shown in Figure 6A, the submount 21 has an upper surface 21us and a lower surface 21Ls that are parallel to the XZ plane. A metal film is provided on each of the upper surface 21us and the lower surface 21Ls. The metal film on the upper surface 21us improves the bonding strength when the semiconductor laser element 22 and the lens support member 23 are bonded to the submount 21 with an inorganic bonding member. The metal film on the upper surface 21us may also be used to supply power to the semiconductor laser element 22. The metal film on the lower surface 21Ls improves the bonding strength when the support base 10 and the laser light source 20 shown in Figure 1A are bonded via an inorganic bonding member. The metal films on each of the upper surface 21us and the lower surface 21Ls also help to transfer the heat generated by the semiconductor laser element 22 during operation to the support base 10 via the submount 21. The submount 21 can be formed from, for example, the aforementioned ceramics, metal material, or metal matrix composite material, similar to the support base 10.

[0126] The semiconductor laser element 22 is supported by the upper surface 21us of the submount 21, as shown in Figure 6A. The semiconductor laser element 22 has an emission surface 22e on one of two end faces that intersect in the X direction, and emits laser light in the +X direction from the emission surface 22e. The laser light spreads relatively fast in the XY plane and relatively slowly in the XZ plane. When not collimated, the laser spot is far-field and has an elliptical shape in the YZ plane, with the Y direction being the major axis and the Z direction being the minor axis.

[0127] The semiconductor laser element 22 can emit violet, blue, green, or red laser light in the visible region, or infrared or ultraviolet laser light in the invisible region. The peak wavelength of violet light is preferably in the range of 400 nm to 420 nm, and more preferably in the range of 400 nm to 415 nm. The peak wavelength of blue light is preferably greater than 420 nm and within the range of 495 nm, and more preferably in the range of 440 nm to 475 nm. The peak wavelength of green light is preferably greater than 495 nm and within the range of 570 nm, and more preferably in the range of 510 nm to 550 nm. The peak wavelength of red light is preferably in the range of 605 nm to 750 nm, and more preferably in the range of 610 nm to 700 nm.

[0128] Examples of semiconductor laser elements 22 that emit purple, blue, and green laser light include laser diodes containing nitride semiconductor materials. Examples of nitride semiconductor materials that can be used include GaN, InGaN, and AlGaN. Examples of semiconductor laser elements 22 that emit red laser light include laser diodes containing InAlGaP, GaInP, GaAs, and AlGaAs semiconductor materials.

[0129] As shown in Figure 6A, the lens support member 23 is supported by the upper surface 21us of the submount 21. The lens support member 23 has two columnar portions 23a and a connecting portion 23b located between the two columnar portions 23a and connecting them. The two columnar portions 23a are located on both sides of the semiconductor laser element 22, and the connecting portion 23b is located above the emission surface 22e side of the semiconductor laser element 22. The lens support member 23 supports the velocity collimating lens 24 by the end faces 23as of the two columnar portions 23a. The lens support member 23 is positioned to straddle the semiconductor laser element 22 and does not obstruct the laser light emitted from the semiconductor laser element 22 from entering the velocity collimating lens 24.

[0130] The lens support member 23 may be formed from the aforementioned ceramics, for example, similar to the support base 10 shown in Figure 1A. The lens support member 23 may be formed from the aforementioned translucent material, for example, similar to the slow-axis collimating lens 30, wedge 40, and focusing lens 60 shown in Figure 1A. The lens support member 23 may be formed from, for example, at least one alloy selected from the group consisting of Kovar and CuW. The lens support member 23 may be formed from, for example, Si.

[0131] The velocity-axis collimating lens 24 may be a cylindrical lens having a uniform cross-sectional shape in the Z direction, as shown in Figure 6A. The velocity-axis collimating lens 24 has a flat surface on the light incidence side and a convex surface on the light emission side. The convex surface has curvature in the XY plane. The focal point of the velocity-axis collimating lens 24 approximately coincides with the center of the light emission point on the emission surface 22e of the semiconductor laser element 22. As shown in Figure 6B, the velocity-axis collimating lens 24 collimates the laser light emitted in the +X direction from the emission surface 22e of the semiconductor laser element 22 in the XY plane. As a result, a collimated laser beam L in the XY plane is emitted from the laser light source 20. The region enclosed by the dashed line in Figure 6B is where the intensity of the laser beam L is 1 / e of its peak intensity. 2 This represents a region where the ratio is more than double. The fast-axis collimating lens 24 can be formed from the aforementioned translucent material, for example, the slow-axis collimating lens 30, wedge 40, and focusing lens 60 shown in Figure 1A.

[0132] The velocity-axis collimating lens 24, supported by the lens support member 23, is located near the emission surface 22e of the semiconductor laser element 22. Therefore, the velocity-axis collimating lens 24 can collide the laser beam before it spreads significantly. This helps to miniaturize the velocity-axis collimating lens 24.

[0133] Instead of the fast-axis collimating lens 24, a collimating lens that collimates the laser light emitted from the semiconductor laser element 22 not only in the XY plane but also in the XZ plane may be used. In that case, it is not necessary to provide the slow-axis collimating lens 30 in the light-emitting module 100 shown in Figures 1A to 1D.

[0134] This disclosure includes light-emitting modules and methods for manufacturing the same as described in the following items.

[0135] [Item 1] A support base having a first mounting surface and a plurality of second mounting surfaces, wherein the plurality of second mounting surfaces are aligned in a first direction, are located in a second direction intersecting the first direction with respect to the first mounting surface when viewed from above, and the height of the plurality of second mounting surfaces from a reference plane parallel to the first direction decreases along the first direction, A plurality of laser light sources arranged on the first mounting surface, each emitting a laser beam in the second direction when viewed from above, A plurality of mirror members, each reflecting the laser beam emitted from a corresponding laser light source in the first direction, wherein a mirror member corresponding to each of the plurality of second mounting surfaces is arranged, A plurality of optical deflection members arranged on the first mounting surface, each of which directs the laser beam emitted from a corresponding laser light source toward a corresponding mirror member, A focusing lens that combines a plurality of laser beams, including the laser beam emitted from each of the plurality of laser light sources and reflected in the first direction by the corresponding mirror member, A light-emitting module equipped with the following features.

[0136] [Item 2] The light-emitting module described in item 1, wherein the region on the first mounting surface in which each of the plurality of laser light sources is arranged is located at the same height from the reference plane.

[0137] [Item 3] The light-emitting module according to item 1 or 2, wherein the first mounting surface has a shape in which each of the plurality of light deflecting members is arranged to be movable in at least the second direction.

[0138] [Item 4] The light-emitting module according to any one of items 1 to 3, wherein the bottom surface of each of the plurality of light-deflecting members has a shape that allows each of the plurality of light-deflecting members to move in at least the second direction.

[0139] [Item 5] The region on the first mounting surface in which each of the plurality of light deflecting members is arranged is planar, The light-emitting module according to any one of items 1 to 4, wherein the portion of the bottom surface of each of the plurality of light deflecting members that is in contact with the region of the first mounting surface is planar.

[0140] [Item 6] The light-emitting module according to any one of items 1 to 5, wherein the number of the plurality of light deflection members is less than the number of the plurality of laser light sources.

[0141] [Item 7] A light-emitting module according to any one of items 1 to 6, wherein a resin layer is provided between each of the plurality of light deflecting members and the first mounting surface.

[0142] [Item 8] The light-emitting module according to any one of items 1 to 7, wherein another resin layer is provided between each of the plurality of mirror members and the corresponding second mounting surface.

[0143] [Item 9] Each of the plurality of optical deflection members is a wedge having an incident surface into which the laser beam is incident and an exit surface from which the laser beam is emitted. The light-emitting module according to any one of items 1 to 8, wherein the incident surface and the exit surface are non-parallel to each other.

[0144] [Item 10] The plurality of second mounting surfaces are arranged in a stepped manner in the first direction, The light-emitting module according to any one of items 1 to 9, wherein the step difference between two adjacent second mounting surfaces among the plurality of second mounting surfaces is greater than the beam diameter of the laser beam and less than or equal to twice the beam diameter.

[0145] [Item 11] The light-emitting module according to any one of items 1 to 10, wherein the plurality of laser light sources are housed in the same package.

[0146] [Item 12] A support base having a first mounting surface and a plurality of second mounting surfaces, wherein the plurality of second mounting surfaces are aligned in a first direction, are located in a second direction intersecting the first direction with respect to the first mounting surface when viewed from above, and the height of the plurality of second mounting surfaces from a reference plane parallel to the first direction decreases along the first direction, a step of preparing a support base, a plurality of laser light sources, a plurality of mirror members, and a plurality of light deflection members, The steps include arranging the plurality of laser light sources on the first mounting surface such that each of the plurality of laser light sources emits a laser beam in the second direction when viewed from above, A step of arranging mirror members corresponding to each of the plurality of second mounting surfaces, A step of arranging the plurality of optical deflection members on the first mounting surface, wherein the direction of propagation of the laser beam is adjusted by adjusting the position of each optical deflection member so that the laser beam is incident on the corresponding mirror member, A method for manufacturing a light-emitting module, including the method described above.

[0147] [Item 13] The step of adjusting the direction of the laser beam is: A resin is provided between each of the plurality of optical deflection members and the first mounting surface, and each of the plurality of optical deflection members is moved in the second direction while the laser beam is emitted from the corresponding laser light source. After moving each of the plurality of light deflecting members, the resin is cured to form a resin layer. A method for manufacturing a light-emitting module as described in item 12, further comprising: [Industrial applicability]

[0148] The light-emitting module of this disclosure can be used in particular to combine multiple laser beams to achieve a high-power combined beam. Furthermore, the light-emitting module of this disclosure can be used in industrial fields where a high-power laser light source is required, such as cutting, drilling, localized heat treatment, surface treatment, metal welding, and 3D printing of various materials. [Explanation of Symbols]

[0149] 10: Support base 10-1: First part 10-2: Second part 12a: First mounting surface 12b: Second mounting surface 12c: Third mounting surface 12d: Fourth mounting surface 20, 20a, 20b: Laser light source 21: Submount 21Ls: Bottom surface 21us: Top surface 22: Semiconductor laser element 22e: Emission surface 23: Lens support member 23a: Columnar part 23as: End surface 23b: Connecting part 24: Fast axis collimating lens 30, 30a, 30b: Slow axis collimating lens 40, 40a, 40b: Wedge 42: Incident surface 44: Emission surface 46: Resin layer 50, 50a, 50b: Mirror member 52: Resin layer 60: Focusing lens 62: Fast axis focusing lens 64: Delayed-axis focusing lens 70: Optical fiber 72: Support member 80: Package 82: Substrate 84: Frame 86: Translucent window 88: Cover 92: Mirror member 94: Half-wave plate 96: Polarizing beam splitter 100, 110, 120, 130: Light-emitting module 230: Optical multiplexer 250: Optical transmission fiber 300: Processing head 400: Object 1000: DDL device L, La, Lb: Laser beam P: Designated position Ref: Reference plane

Claims

1. A support base having a first mounting surface and a plurality of second mounting surfaces, wherein the plurality of second mounting surfaces are aligned in a first direction, are located in a second direction intersecting the first direction with respect to the first mounting surface when viewed from above, and the height of the plurality of second mounting surfaces from a reference plane parallel to the first direction decreases along the first direction, A plurality of laser light sources arranged on the first mounting surface, each emitting a laser beam in the second direction when viewed from above, A plurality of mirror members, each reflecting the laser beam emitted from a corresponding laser light source in the first direction, wherein a mirror member corresponding to each of the plurality of second mounting surfaces is arranged, A plurality of optical deflection members arranged on the first mounting surface, each of which directs the laser beam emitted from a corresponding laser light source toward a corresponding mirror member, A focusing lens that combines a plurality of laser beams, including the laser beam emitted from each of the plurality of laser light sources and reflected in the first direction by the corresponding mirror member, A light-emitting module equipped with the following features.

2. The light-emitting module according to claim 1, wherein the region on the first mounting surface in which each of the plurality of laser light sources is arranged is located at the same height from the reference plane.

3. The light-emitting module according to claim 1 or 2, wherein the first mounting surface has a shape in which each of the plurality of light deflecting members is arranged to be movable in at least the second direction.

4. The light-emitting module according to claim 1 or 2, wherein the bottom surface of each of the plurality of light-deflecting members has a shape that allows each of the plurality of light-deflecting members to move in at least the second direction.

5. The region on the first mounting surface in which each of the plurality of light deflecting members is arranged is planar, The light-emitting module according to claim 1 or 2, wherein the portion of the bottom surface of each of the plurality of light deflecting members that is in contact with the region of the first mounting surface is planar.

6. The light-emitting module according to claim 1 or 2, wherein the number of the plurality of light deflection members is less than the number of the plurality of laser light sources.

7. The light-emitting module according to claim 1 or 2, wherein a resin layer is provided between each of the plurality of light deflecting members and the first mounting surface.

8. The light-emitting module according to claim 1 or 2, wherein another resin layer is provided between each of the plurality of mirror members and the corresponding second mounting surface.

9. Each of the plurality of optical deflection members is a wedge having an incident surface into which the laser beam is incident and an exit surface from which the laser beam is emitted. The light-emitting module according to claim 1 or 2, wherein the incident surface and the exit surface are non-parallel to each other.

10. The plurality of second mounting surfaces are arranged in a stepped manner in the first direction, The light-emitting module according to claim 1 or 2, wherein, among the plurality of second mounting surfaces, the step difference between two adjacent second mounting surfaces is greater than the beam diameter of the laser beam and less than or equal to twice the beam diameter.

11. The light-emitting module according to claim 1 or 2, wherein the plurality of laser light sources are housed in the same package.

12. A support base having a first mounting surface and a plurality of second mounting surfaces, wherein the plurality of second mounting surfaces are aligned in a first direction, are located in a second direction intersecting the first direction with respect to the first mounting surface when viewed from above, and the height of the plurality of second mounting surfaces from a reference plane parallel to the first direction decreases along the first direction, a step of preparing a support base, a plurality of laser light sources, a plurality of mirror members, and a plurality of light deflection members, The steps include arranging the plurality of laser light sources on the first mounting surface such that each of the plurality of laser light sources emits a laser beam in the second direction when viewed from above, A step of arranging mirror members corresponding to each of the plurality of second mounting surfaces, A step of arranging the plurality of optical deflection members on the first mounting surface, wherein the direction of propagation of the laser beam is adjusted by adjusting the position of each optical deflection member so that the laser beam is incident on the corresponding mirror member, A method for manufacturing a light-emitting module, including the method described above.

13. The step of adjusting the direction of the laser beam is: A resin is provided between each of the plurality of optical deflection members and the first mounting surface, and each of the plurality of optical deflection members is moved in the second direction while the laser beam is emitted from the corresponding laser light source. After moving each of the plurality of light deflecting members, the resin is cured to form a resin layer. A method for manufacturing a light-emitting module according to claim 12, further comprising:

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