Observation support device

Abstract

The present invention provides an observation support device that can prevent the user from losing track of the position of the observation position display image, even if the current magnification of the observation position display unit differs significantly from the magnification of the observation position display image. [Solution] The sample observation support device includes an observation position display unit that displays the positions of multiple captured images of a sample taken by a charged particle beam device in correspondence with an image display unit, a display processing unit that controls the observation position display unit, and a representative image selection processing unit that selects a representative image based on the multiple captured images. The display processing unit controls the representative image to a size that is easy to see and displays it on the observation position display unit in response to a change in the magnification of the image display unit.

Description

Technical Field

[0001] The present invention relates to an observation support device, and particularly to a device for supporting observation by a charged particle beam device.

Background Art

[0002] A charged particle beam device is a device that operates on the surface of a sample with a thin and focused charged particle beam in a vacuum, detects signals coming out of the sample, and creates a two-dimensional profile image of the sample surface. Since observation is performed in a vacuum, the observation sample cannot be visually confirmed. In order to specify the observation position on the sample, an observation assistance function is known that displays an image taken at a magnification lower than the observation magnification and presents the observation position on the taken low-magnification image.

[0003] As a conventional technique in this technical field, there is Patent Document 1. Patent Document 1 describes that "by overlapping and displaying a plurality of observation position display images with different magnifications on an observation position display unit based on the magnification and coordinates when an observation image is acquired, the observation position can be presented even if there is a large difference between the magnification of the observation image being currently observed (the magnification of the observation image) and the magnification of the image displaying the observation position."

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the device of Patent Document 1, in order to be able to present the observation position even if there is a large difference between the magnification currently being observed (the magnification of the observation image) and the magnification of the image displaying the observation position, a plurality of observation position display images with different magnifications are overlapped and displayed on the observation position display unit based on the magnification and coordinates when the observation image is acquired.

[0006] However, in the method described in Patent Document 1, if the magnification of the observation position display unit differs significantly from the magnification of the displayed image, it is easy to lose sight of the displayed image, making it difficult to identify the observation position of the image.

[0007] This invention was made to solve these problems, and aims to provide an observation support device that can prevent the loss of the position of the observation position display image even when the current magnification of the observation position display unit differs significantly from the magnification of the observation position display image. [Means for solving the problem]

[0008] An example of a sample observation support device according to the present invention is: A device for assisting in the observation of a sample, An observation position display unit that displays the positions of multiple images of a sample captured by a charged particle beam device, corresponding to the image display unit, A display processing unit that controls the observation position display unit, A representative image selection processing unit that selects a representative image based on the aforementioned plurality of captured images, Equipped with, The display processing unit controls the representative image to a size that is easy to view and displays it on the observation position display unit in response to a change in the magnification of the image display unit.

[0009] An example of a sample observation support device according to the present invention is: An observation position display unit that displays the positions of multiple images of a sample captured by a charged particle beam device, corresponding to the image display unit, A display processing unit that controls the observation position display unit, A representative image selection processing unit that selects a representative image based on the aforementioned plurality of captured images, Equipped with, The observation support device extracts a predetermined region and groups the captured images based on the predetermined region. [Effects of the Invention]

[0010] According to the present invention, even if the current magnification of the observation position display unit is significantly different from the magnification of the observation position display image, it is possible to prevent the loss of the position of the observation position display image.

[0011] Furthermore, additional features related to the present invention will become apparent from the description in this specification and the accompanying drawings. Also, problems, configurations, and effects other than those described above will be clarified by the description of the following embodiments.

Brief Description of the Drawings

[0012] [Figure 1] It is an example of a schematic diagram of a charged particle beam apparatus according to Embodiment 1 of the present invention. [Figure 2A] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 1 of the present invention. [Figure 2B] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 1 of the present invention. [Figure 2C] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 1 of the present invention. [Figure 2D] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 1 of the present invention. [Figure 2E] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 1 of the present invention. [Figure 2F] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 1 of the present invention. [Figure 3A] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 2 of the present invention. [Figure 3B] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 2 of the present invention. [Figure 3C] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 2 of the present invention. [Figure 3D] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 2 of the present invention. [Figure 3E] It is an example of an observation position display screen of a charged particle beam apparatus according to Embodiment 2 of the present invention. [Figure 3F] An example of an observation position display screen of a charged particle beam apparatus according to Example 2 of the present invention. [Figure 3G] An example of an observation position display screen of a charged particle beam apparatus according to Example 2 of the present invention. [Figure 3H] An example of an observation position display screen of a charged particle beam apparatus according to Example 2 of the present invention. [Figure 4A] An example of an observation position display screen of a charged particle beam apparatus according to Example 3 of the present invention. [Figure 4B] An example of an observation position display screen of a charged particle beam apparatus according to Example 3 of the present invention. [Figure 4C] An example of an observation position display screen of a charged particle beam apparatus according to Example 3 of the present invention. [Figure 4D] An example of an observation position display screen of a charged particle beam apparatus according to Example 3 of the present invention. [Figure 4E] An example of an observation position display screen of a charged particle beam apparatus according to Example 3 of the present invention. [Figure 4F] An example of an observation position display screen of a charged particle beam apparatus according to Example 3 of the present invention. [Figure 4G] An example of an observation position display screen of a charged particle beam apparatus according to Example 3 of the present invention. [Figure 5A] An example of an observation position display screen of a charged particle beam apparatus according to Example 4 of the present invention. [Figure 5B] An example of an observation position display screen of a charged particle beam apparatus according to Example 4 of the present invention. [Figure 6] It is a setting screen for grouping conditions of captured images and selection conditions of representative images. [Figure 7] It is a setting screen for grouping conditions of attention images, which are analysis results of captured images, and selection conditions of representative images.

Mode for Carrying Out the Invention

[0013] Embodiments of the present invention will be described below with reference to the attached drawings. In the attached drawings, functionally identical elements may be indicated by the same or corresponding numbers. The attached drawings show embodiments and implementation examples in accordance with the principles of this disclosure, but these are for the purpose of understanding this disclosure and are not to be used in any way to restrict the interpretation of this disclosure. The descriptions in this specification are merely typical examples and do not limit the claims or applications of this disclosure in any way.

[0014] While this specification provides a description in sufficient detail for those skilled in the art to implement the disclosure, it is important to understand that other implementations and forms are possible, and that the configuration and structure can be modified and various elements replaced without departing from the scope and spirit of the technical idea of ​​this disclosure. Therefore, the following description should not be construed as limiting to this.

[0015] A charged particle beam apparatus is a device that accelerates charged particles, such as electrons and positive ions, using an electric field and irradiates a sample with them. Charged particle beam apparatuses utilize the interaction between the sample and the charged particles to perform observation, analysis, and processing of the sample. The examples described below are applicable to various types of charged particle beam apparatuses (electron microscopes, electron beam lithography systems, ion processing systems, ion microscopes, and observation / inspection devices that utilize these technologies, etc.).

[0016] [Example 1] Referring to Figure 1, the overall configuration of the charged particle beam apparatus 100 according to Embodiment 1 of the present invention will be described. This charged particle beam apparatus 100 includes, as an example, a sample chamber 101, a charged particle beam optical system 102, a sample stage 103, a stage 104, a detector 105, a vacuum pump 107, a charged particle beam imaging device 110, a calculation control unit 120, a stage control device 130, an optical imaging device 150, and a vacuum control device 140.

[0017] The sample chamber 101 has a function to maintain a vacuum inside to prevent the scattering of charged particle beams, and is configured to accommodate a sample. The vacuuming operation of the sample chamber 101 can be performed by the vacuum control device 140 controlling the vacuum pump 107. The vacuum control device 140 may be equipped with a memory 141 for storing various parameters related to vacuuming control.

[0018] The charged particle beam optical system 102 includes a charged particle source 161 that generates an electron beam, a condenser lens 162 that narrows the electron beam emitted from the charged particle source 161, a deflector 163 that deflects the electron beam, an objective lens 164 that focuses the electron beam, and the like.

[0019] The optical system control device 170 is equipped with a memory 171 for storing various parameters related to the control of the charged particle beam optical system 102, and has the function of generating an electron beam from the charged particle source 161, focusing the electron beam with the condenser lens 162, deflecting and focusing it with the deflector 163 and objective lens 164, and irradiating the sample 108 mounted on the sample stage 103.

[0020] The configuration shown in Figure 1 is just one example; the charged particle beam optical system 102 may include other lenses and electrodes in addition to the elements shown, and some of the elements may be replaced with other similar elements. The details of the configuration are not limited to those shown.

[0021] The sample stage 103 is mounted on the stage 104. The stage 104 can move the sample stage 103 within the sample chamber 101 in the XY directions (for example, vertical and horizontal directions). The sample stage 103 is rotatable about a rotation axis (for example, parallel to the Z axis). The sample stage 103 holds the sample in a tiltable position with the X or Y direction as the tilt axis. The control of the stage 104 is performed by the stage control device 130 according to the calculation results of the calculation control unit 120, etc.

[0022] Detector 105 has the function of detecting backscattered electrons, secondary electrons, backscattered electrons (such as those due to EBSD: Electron Back Scattered Diffraction Pattern), inelastic scattered electrons (such as those related to EELS: Electron Energy Loss Spectroscopy), Auger electrons, cathodoluminescence (CL), X-rays (such as those related to EDS: Energy Dispersive X-ray Spectroscopy or WDS: Wavelength Dispersive X-ray Spectroscopy), etc., emitted from sample 108.

[0023] Although only one detector 105 is shown in Figure 1, the number and position of the detectors 105 are not limited to any particular configuration. By moving the stage 104 relative to the imaging range (field of view) of the optical camera 106, an overall image of the sample 108 for navigation purposes is acquired.

[0024] The charged particle beam imaging device 110 has the function of converting the signal detected by the detector 105 into an image, and has an internal memory 111 for storing the signal information. The optical imaging device 150 has the function of capturing an optical image of the sample 108 in the sample chamber 101 with an optical camera 106, and converting the imaging signal into an optical image. The optical imaging device 150 has an internal memory 151 for storing the optical image.

[0025] The arithmetic control unit 120 controls various components of the charged particle beam apparatus 100 and controls the display of observation results according to observation conditions and other inputs from the user. The arithmetic control unit 120 is composed of an information processing device such as a computer. For example, the arithmetic control unit 120 may include a CPU 121 (processor), a main memory device 122 such as memory, and a secondary memory device 123 such as a hard disk drive (HDD) or solid state drive (SSD).

[0026] Furthermore, the calculation control unit 120 includes an input unit 124 such as a keyboard, mouse, and touch monitor, a display unit 125 such as a liquid crystal display (an observation image display unit 1251 and an observation position display unit 1252), and a communication unit (not shown) that communicates with each component of the charged particle beam apparatus 100.

[0027] The calculation control unit 120 and the display unit 125 constitute the sample observation support device according to this embodiment, and support the observation of images of the sample captured by the charged particle beam device 100. In this embodiment, the observation support device is configured as part of the charged particle beam device 100, but the observation support device of the present invention may be configured independently of the charged particle beam device 100, in which case, for example, it may acquire images output from the charged particle beam device 100 and support the observation of those images.

[0028] The main memory 122 stores a computer program that controls the operation of the entire charged particle beam apparatus 100. The computer program is executed by the CPU 121 and provides functional blocks such as an information processing unit 1221, an image grouping processing unit 1222, a representative image selection processing unit 1223, and a display processing unit 1224.

[0029] The information processing unit 1221 is a processing unit that processes information acquired from the optical system control device 170, such as acceleration voltage, emission current, magnification, beam spot, and working distance; information acquired from the charged particle beam imaging device 110, such as signal, image name, image resolution, field of view, imaging time, and time required for imaging; information acquired from the optical imaging device 150, such as optical image name, optical image resolution, field of view, imaging time, and time required for imaging; information acquired from the stage control device 130, such as stage coordinates; and information acquired from the vacuum control device 140, such as vacuum level, and outputs this information as image attribute information.

[0030] The image grouping processing unit 1222 is a control unit for grouping the optical images or images converted from signals (observation images) of the acquired sample 108. The representative image selection processing unit 1223 is a processing unit for selecting one or more representative images from the grouped image set.

[0031] The display processing unit 1224 is a processing unit that performs display processing on the optical image or image converted from the signal of the acquired sample 108 (observation image) based on information such as stage coordinates, stage rotation angle, magnification, and raster rotation (attribute information at the time of imaging). Furthermore, the display processing unit 1224 controls the observation position display unit 1252. For example, even if the magnification of the representative image and the magnification of the observation position display unit 1252 differ significantly, the display processing unit 1224 always displays the representative image at a size that is easy to view.

[0032] In this embodiment, the representative image is an image from the group of images captured by the observation position display unit 1252 that satisfies certain predetermined conditions, and whose display magnification or display size is constantly controlled so that the image is easily visible and its display position is not lost. However, this interpretation should not be limited to this definition.

[0033] The stage control device 130 comprises a coordinate storage unit 131, a control unit 132, and a drive unit 133. The coordinate storage unit 131 stores the coordinates of the stage 104. The control unit 132 controls the operation of the entire stage control device 130. The drive unit 133 generates drive signals to drive the stage 104. The control unit 132 acquires stage coordinate information from the coordinate storage unit 131 and transmits it to the calculation control unit 120. This allows the calculation control unit 120 to know the coordinate position of the captured image. Note that the stage coordinates may be stored in the stage control device 130 or in the calculation control unit 120.

[0034] Figures 2A to 2F show examples of observation position display screens for the charged particle beam apparatus 100 according to Embodiment 1. Figure 2A is an example of a screen shown on the observation position display unit 1252. Such a screen can be realized as an observation position display screen 200 displayed on the observation position display unit 1252.

[0035] The observation position display screen 200 includes an image name list display unit 2A02, an image display unit 2A03, and an operation unit 2A20. The image name list display unit 2A02 is a display unit that lists the names of the acquired image group in a tree structure. In the example in Figure 2A, the image name list display switching unit 2A01 makes it possible to switch the display of image names between a list display and a group display by tag name.

[0036] The image display unit 2A03 is a display unit that displays the captured image based on information such as the imaging magnification, stage coordinates, and raster rotation (image attribute information at the time of image acquisition). This image display unit 2A03 can be configured, for example, as a virtual drawing canvas. The operation unit 2A20 is an operation unit that performs operations such as image acquisition (image acquisition button 2A10) and representative image registration (representative image registration button 2A11).

[0037] The image display unit 2A03 serves as a position reference and displays an image of the sample captured by the charged particle beam apparatus 100. The displayed image includes a background image and an captured image that indicates the position relative to the image display unit 2A03.

[0038] The image display unit 2A03 is aligned (associated) with the stage coordinates of the charged particle beam apparatus 100, and the position of each part of the sample within the image display unit 2A03 corresponding to that part can be appropriately determined. As a more specific example, when the stage coordinates are represented as (Xs, Ys) and the coordinates of the image display unit 2A03 (pixel coordinates) are represented as (Xp, Yp), a function is specified for determining Xp and Yp based on Xs and Ys.

[0039] A method for performing such alignment can be appropriately designed by a person skilled in the art based on prior art, etc. For example, a three-point alignment process may be used, or a dedicated sample holder may be used.

[0040] The background image displayed in the image display unit 2A03 is, for example, an image of a sample captured by the charged particle beam apparatus 100, but is not limited to this. The background image is, for example, an image displayed in the image display unit 2A03 to match the screen size. It is also possible not to display a background image (in which case the background displayed in the image display unit 2A03 may be blank, or other predetermined display may be shown).

[0041] The captured image is an image of the sample captured by the charged particle beam apparatus 100, for example, display image 2A04. The observation position display unit 1252 displays the positions of multiple display images 2A04 as multiple captured images, corresponding to the image display unit 2A03. For example, an image captured by the charged particle beam apparatus 100 is displayed on the image display unit 2A03, which has been aligned with the stage coordinates of the charged particle beam apparatus 100.

[0042] The image display unit 2A03 has a variable magnification (i.e., an inverse proportion to the field of view). The magnification of the image display unit 2A03 can be calculated based on the alignment of the charged particle beam apparatus 100 with respect to the stage coordinates, etc. For example, since the background image and the captured images such as the display image 2A04 each have their own magnification at the time of acquisition, increasing the magnification of the image display unit 2A03 will zoom in on a portion of the background image and the captured image (i.e., the number of pixels on one side during display is variable).

[0043] The observation position display unit 1252 can display the image display unit 2A03 (or the background image displayed on the image display unit 2A03) and the captured image in a size ratio corresponding to their respective magnifications. For example, if the magnification of the image display unit 2A03 is 5000x, the magnification of the captured image is 20000x, and the number of pixels in the image display unit 2A03 and the number of pixels in the captured image at the time of capture are the same, the captured image will be reduced in size and displayed so that the size of the captured image on the screen is 1 / 4 of the size of the image display unit 2A03.

[0044] The following provides a more detailed explanation using an example. Let's assume that the image display unit 2A03 has a resolution of 1280 x 960 pixels and an initial magnification of 20,000x. Also, let's assume that the captured image has a resolution of 1280 x 960 pixels and an initial magnification of 20,000x. In this case, the size of the captured image matches the size of the image display unit 2A03, and initially, the captured image is displayed at its original 1280 x 960 pixel size. If the resolution at the time of capture is different, the initial size of the captured image will be determined accordingly.

[0045] When the magnification of the image display unit 2A03 is reduced (i.e., the field of view is widened), the size of the captured image must be reduced according to the reduced magnification. For example, if the magnification of the image display unit 2A03 is set to 10,000 times, which is half of the original magnification, the size of the captured image will also be set to 640 x 480 pixels, which is half of the original size (at the time of capture). Also, if the magnification of the image display unit 2A03 is set to 5,000 times, which is one-quarter of the original magnification, the size of the captured image will also be set to 320 x 240 pixels, which is one-quarter of the original size (at the time of capture).

[0046] Conversely, if the magnification of the image display unit 2A03 is increased (i.e., the field of view is narrowed), the size of the captured image must be enlarged according to the increased magnification. For example, if the magnification of the image display unit 2A03 is set to 40,000 times, which is twice the original size, the size of the captured image must also be doubled to 2,560 x 1,920 pixels.

[0047] In the above example, the size S1 of the captured image is changed so that the size S1 after the change is obtained by multiplying the initial size S0 of the captured image by the ratio (X1 / X0) of the changed magnification X1 of the image display unit 2A03 to the initial magnification X0 of the image display unit 2A03, i.e., S1 = S0 × X1 / X0.

[0048] Furthermore, a person skilled in the art can design a method for determining the display content when the size of the captured image is changed, based on known technology. For example, when reducing the size, some pixels may be downsampled, and when increasing the size, some pixels may be generated by interpolation.

[0049] Next, we will explain the case where the magnification of the image display unit 2A03 is extremely low compared to the magnification of the captured image (for example, the displayed image 2A04). For example, if the magnification of the image display unit 2A03 is 5000x and an image with a magnification higher than 5000x is captured, the image will be displayed as shown in Figure 2A.

[0050] The observation position display unit 1252 displays the magnification increase button 2A05, the magnification decrease button 2A06, the magnification reset button 2A07, and the magnification display unit 2A08.

[0051] Here, let's assume that among the captured images, there is a condition-fulfilling image 2A09 that satisfies predetermined conditions (these conditions can be input, for example, via the GUI shown in Figures 6 and 7 below). Also, let's assume that the display magnification of the image display unit 2A03 is reduced by using the magnification reduction button 2A06 or mouse operation, or that the display magnification of the image display unit 2A03 is reset to the minimum magnification by using the magnification reset button 2A07, so that the magnification of the image display unit 2A03 becomes extremely low compared to the magnification of the condition-fulfilling image 2A09 (for example, switched to 30x).

[0052] Even in this case, according to this embodiment, as shown in the example in Figure 2B, the condition-fulfilling image 2A09 is always controlled to a size that is easy to see, and is surrounded by a speech bubble frame and displayed as the representative image 2B01. In this way, the display processing unit 1224 controls the representative image 2B01 to a size that is easy to see and displays it on the observation position display unit 1252 in response to the change in magnification of the image display unit 2A03.

[0053] The representative image selection processing unit 1223 selects a representative image 2B01 based on multiple captured images. The specific selection process can be designed as appropriate, but for example, all of the condition-fulfilling images 2A09 may be designated as representative image 2B01, or representative image 2B01 may be selected from among the condition-fulfilling images 2A09 based on a specific rule, or an image corresponding to a part of the condition-fulfilling images 2A09 may be designated as representative image 2B01.

[0054] Furthermore, the base of the speech bubble frame is displayed to point to the coordinates at the time of observation or acquisition of the representative image 2B01 in the currently displayed sample map 2B02. In the example in Figure 2B, the sample map is displayed, but it is not necessary to display the sample map, or something other than the sample map may be displayed. Also, although a speech bubble frame is used to indicate the representative image 2B01, a frame of a different shape may be used, or no frame may be used at all.

[0055] In this embodiment, the base of the speech bubble frame is used to indicate the coordinates of the representative image 2B01, but other shapes such as arrows may be used, or the image may be cropped and displayed without using arrows or other shapes.

[0056] When a representative image is placed and displayed at the observation position, it is not necessary to indicate it with arrows or other symbols. However, if the position of the representative image is changed by dragging it with the mouse, etc., it is acceptable to indicate the original position of the image with arrows or other symbols.

[0057] In this embodiment, the size of an image refers to its size when displayed on the screen (for example, expressed in units of pixels), and does not necessarily correspond to the amount of data in the image (for example, the number of pixels at the time of capture). In other words, the same image can be displayed in various sizes by enlarging or reducing it.

[0058] Furthermore, in this embodiment, "controlling the representative image 2B01 to a size that is easy to view" includes, for example, controlling the representative image 2B01 to a specific size. "Specific size" may be, for example, a fixed size regardless of the magnification of the image display unit 2A03.

[0059] The specific process for achieving such size changes can be appropriately designed by those skilled in the art based on prior art, etc., but an example is shown below. For example, if the virtual size (field of view) corresponding to the image display unit 2A03 is 254 mm and the virtual size (field of view) of the representative image 2B01 is 127 mm, then the representative image 2B01 will be displayed at half the size of the image display unit 2A03.

[0060] Now, let's assume the magnification of the image display unit 2A03 is reduced to half of its original size. In this case, the field of view of the image display unit 2A03 becomes twice the original size, or 508 mm. If the field of view of the representative image 2B01 remains unchanged at 127 mm, the field of view of the representative image 2B01 becomes 1 / 4 of the field of view of the image display unit 2A03. Therefore, the size of the representative image 2B01 also becomes 1 / 4 of the size of the image display unit 2A03. Thus, the size of the representative image 2B01 changes and does not remain fixed.

[0061] In this embodiment, in order to fix the size of the representative image 2B01, the field of view of the representative image 2B01 is changed according to the field of view of the image display unit 2A03. For example, if the field of view of the image display unit 2A03 becomes twice the original size, 508 mm, the field of view of the representative image 2B01 can also be changed to twice the original size, 254 mm, thereby fixing the size of the representative image 2B01. Similarly, if the field of view of the image display unit 2A03 becomes four times the original size, 1016 mm, the field of view of the representative image 2B01 can also be changed to four times the original size, 508 mm.

[0062] The specific processing described above can also be implemented as control using display layers. The virtual size of the display layer corresponding to the image display unit 2A03 can be set as the field of view of the image display unit 2A03, and the virtual size of the display layer containing the representative image 2B01 can be set as the field of view of the representative image 2B01.

[0063] Alternatively, the "specific size" mentioned above may be a size that changes according to the magnification of the image display unit 2A03, provided that it is not simply proportional to the magnification of the image display unit 2A03 (for example, the size of the captured image after modification is calculated as a different size from S1 mentioned above. That is, it is calculated as a different size from the size S1 obtained by multiplying the initial size S0 of the captured image by the ratio (X1 / X0) of the modified magnification X1 of the image display unit 2A03 to the initial magnification X0 of the image display unit 2A03, i.e., S1 = S0 × X1 / X0). For example, as the magnification of the image display unit 2A03 decreases, it is also possible to make the size of the representative image 2B01 gradually decrease at a slower pace than the rate of decrease in magnification.

[0064] This type of control allows the representative image 2B01 to be displayed in a more easily viewable size.

[0065] In the example shown in Figure 2B, the user can manually register a representative image. That is, the representative image selection processing unit 1223 may select an image from among the captured images as the representative image as instructed by manual input. For example, if one or more captured images are selected in the image display unit 2A03, or if one or more image names are selected in the image name list display unit 2A02, clicking the representative image registration button 2A11 will register the selected images as the representative image 2B01.

[0066] On the other hand, by selecting an image already registered as a representative image and clicking the representative image cancellation button 2A12, it is possible to cancel the registration status of the representative image 2B01. When multiple representative images are registered in close proximity to each other, if the magnification of the image display unit 2A03 is set to an extremely low value compared to the magnification of the captured image, the multiple representative images 2C01 will be spaced apart from each other, as shown in Figure 2C, and the bases of their respective speech bubble frames will be set to be close to each other.

[0067] The representative image display toggle button 2A14 allows the display of the representative image 2B01 on the image display unit 2A03 to be switched on and off (when hidden, all representative images 2B01 will not be displayed). This switching of display and hide may be performed regardless of the magnification of the image display unit 2A03.

[0068] Next, we will explain the case where the display magnification of the image display unit 2A03 becomes extremely high compared to the magnification of the currently displayed image. In the example in Figure 2D, when the magnification of the image display unit 2A03 is increased to 10,000 times, with the condition-fulfilling image 2A09 in Figure 2A as the center, the condition-fulfilling image 2A09 is displayed as a representative image 2D01 (representative image 2) at a size that is easy to see, so as not to lose sight of the condition-fulfilling image 2A09.

[0069] Furthermore, to identify the location of the representative image 2D01, the base of the speech bubble frame or an arrow may be used to specify a feature, or it may not be necessary to specify it, and it is not limited to the examples shown.

[0070] The representative image 2D01 can be moved by dragging it with the mouse, and its display size can be enlarged or reduced, allowing for various operations. Alternatively, as shown in the example in Figure 2E, an auxiliary display unit 2E01 may be displayed in the lower right corner of the image display unit 2A03 to prevent the condition-fulfilling image 2A09 from being lost sight of, and the condition-fulfilling image 2A09 may be displayed on the auxiliary display unit 2E01 as the representative image 2D01 at a size that is easy to see. In other words, controlling the representative image 2D01 to a size that is easy to see includes controlling the representative image 2D01 to the size of the auxiliary display unit 2E01 and displaying it on the auxiliary display unit 2E01.

[0071] Here, "controlling the representative image 2D01 to the size of the auxiliary display 2E01" means, for example, changing the size of the representative image 2D01 to the largest size that allows the entire representative image 2D01 to be displayed in a predetermined area (which may be the entirety) of the auxiliary display 2E01, as shown in Figure 2E. (i.e., the largest size that does not cause the representative image 2D01 to extend beyond that area.)

[0072] With this type of control, the representative image 2D01 is always displayed in a fixed position, making it easier to see.

[0073] Furthermore, to make it easier to identify the current observation position, a position indicator marker 2D02 is displayed on the representative image 2D01. In the examples of Figures 2D and 2E, the position indicator marker 2D02 is shown as a cross marker, but other shapes may be displayed, or the display area may be indicated with a frame, and it is not limited to the examples shown.

[0074] Furthermore, in Figure 2F, when the magnification of the image display unit 2A03 is increased to, for example, 13,000 times, the displayed representative image switches, centering on representative image 2E02 (representative image 3). For example, the image displayed on the auxiliary display unit 2E01, or representative image 2D01 as shown in Figure 2D, switches to representative image 2E02. The switching of representative images may be performed manually, or it may switch automatically according to the magnification of the image display unit 2A03 and the current observation position, and is not limited to those shown.

[0075] Furthermore, if there are multiple representative images located close to each other, the multiple representative images may be displayed on the auxiliary display unit 2E01 in a size that is easy to see, or they may be grouped together and displayed as a single representative image in a size that is easy to see.

[0076] Furthermore, it may be possible to change the size or magnification of the representative image displayed on the auxiliary display unit 2E01, change the display of the representative image by dragging the auxiliary display unit 2E01 with the mouse, or change the magnification, and this embodiment is not limited to this example. In this embodiment, the representative image selection process is performed manually or according to pre-set conditions, but the representative image selection process may be performed randomly, and this embodiment is not limited to this example.

[0077] When the magnification of the image display unit 2A03 differs significantly from the magnification of the representative image 2B01, controlling the representative image 2B01 to a size that is easy to view, or displaying it at a size that is easy to view on the auxiliary display unit 2E01, makes it easier to identify the observation position without losing sight of the representative image 2B01.

[0078] [Example 2] The following describes Example 2 of the present invention. Parts common to Example 1 may be omitted from the explanation.

[0079] The captured images may or may not be grouped. To perform the grouping process, select one or more captured images in the image display unit 2A03, or select one or more image names in the image name list display unit 2A02, and then click the group button 2A13 on the operation unit 2A20 to perform the grouping process for the selected images.

[0080] Conversely, grouping is released by selecting one or more images that have undergone grouping processing from the image display unit 2A03, or by selecting one or more image names in the image name list display unit 2A02, and then clicking the ungroup button 2A16 on the operation unit 2A20.

[0081] Figures 3A to 3H show examples of the observation position display screen of the charged particle beam apparatus 100 according to Example 2. In this example, it is assumed that image analysis is performed at the time the image is acquired. Figure 3A shows the image analysis result display screen 300. This screen is displayed on the display unit 125 in Figure 1.

[0082] The image analysis results display screen 300 includes an image name list display unit 2A02, a target image display unit 3A01, an image analysis information display unit 3A05, and a particle analysis information display unit 3A06. The image name list display unit 2A02 displays the image names of the acquired images (imaging images) in a list. When any image name is selected from the image name list display unit 2A02, the selected image is displayed in the target image display unit 3A01.

[0083] The analysis information for the target image 3A02 is displayed on the image analysis information display unit 3A05. Furthermore, by selecting a result within the image analysis information display unit 3A05, the detailed analysis information of the selected target result and the featured image 3A07 (ROI image) are displayed on the particle analysis information display unit 3A06. By clicking the left scroll button 3A03 or the right scroll button 3A04 on the target image display unit 3A01, it is possible to switch between the target image 3A02 and its analysis information.

[0084] As described above, if both the captured image and the target image 3A07 (ROI image), which is the result of the analysis of the captured image, contain analysis information, it is possible to perform image grouping and representative image selection based on this analysis information.

[0085] First, we will explain the grouping process for each captured image and the selection process for a representative image. By calling the setting screen 600 (Figure 6) from the image acquisition setting unit 2A15 and selecting the image setting tab 601, you can set the grouping process for the acquired captured images and the selection process for a representative image.

[0086] First, add a group page using the Add Group Page button 605. If you select the Grouping Condition Setting radio button 607, you can easily set the grouping conditions. For example, you can set an image or the analysis target within an image from the Analysis Target Setting Unit 608, and then set the grouping processing conditions based on the corresponding image attribute information or image analysis information in the Condition Setting Unit 609.

[0087] Subsequently, conditions are set in the relationship setting unit 610 and the threshold setting unit 611. If multiple features are set, the relationships between the conditions can be set in the inter-condition relationship setting unit 612.

[0088] When selecting one or more representative images 2B01 from a group of captured images belonging to the same group, the representative image selection condition setting unit 613 can be used to set selection conditions, and the images can be selected based on the set conditions. In the example in Figure 6, the condition that the image was captured most recently is set.

[0089] The representative image selection processing unit 1223 may select a representative image according to the representative image selection conditions based on the image analysis information or image attribute information of each captured image. Here, the image attribute information in this embodiment refers to unique information associated with the image, such as the image name at the time of image acquisition, the time taken to capture, the magnification, signal and resolution. The image analysis information in this embodiment refers to feature quantities (including the type of object to be analyzed in the image, the number of counts, area, average area, distribution, classification, elemental information, crystal orientation information, etc., obtained by image processing, artificial intelligence (AI) processing, machine learning processing, EDS analysis processing, crystal orientation analysis processing, etc.) and information representing the relationship between images (including the distance between images (for example, distance in color space), classification, and similarity between images).

[0090] This type of control allows for the automatic selection of appropriate representative images.

[0091] The image grouping processing unit 1222 groups the captured images. For example, the image grouping processing unit 1222 groups the captured images that have been manually specified into the same group.

[0092] Alternatively, the image grouping processing unit 1222 groups the captured images based on the image analysis information or image attribute information of each captured image. This type of control allows multiple images with common features to be processed together, making it easier to view a large number of images more efficiently.

[0093] The conditions for grouping may include image attribute information such as the acquisition time of the captured image, and image analysis information of the captured image, or other information besides image attribute information and image analysis information may be used as conditions.

[0094] The settings for the analysis target setting unit 608, the condition setting unit 609, and the representative image selection condition setting unit 613 may be set from the analysis information displayed in the image analysis information display unit 3A05 in Figure 3A, or other information (for example, image attribute information) may be set, and are not limited to those shown.

[0095] On the other hand, if the analysis file setting radio button 614 is selected, the analysis file path can be entered into the file path input section 615, or opened using the file selection button 616. Depending on the contents of the analysis file, if grouping conditions and representative image selection conditions are described, the grouping process and representative image selection process will be performed according to those conditions.

[0096] To delete a grouped page, select the page from the grouped page selection section 604 and click the grouped page delete button 606. The selected page will then be deleted.

[0097] In this embodiment, the grouping process and the selection of a representative image are described as being performed manually or according to pre-set conditions. However, the image grouping process and the selection of a representative image may also be performed randomly, and the embodiment is not limited to this example.

[0098] Figure 3B shows the display behavior of the image 2A09 (representative image) that meets the conditions, and images other than the representative image, when the display magnification of the image display unit 2A03 is changed.

[0099] As shown in Figure 3B(a), the display magnification of the image display unit 2A03 is 5000x, and the condition-fulfilling image 2A09 and the other images are displayed at different sizes based on their respective image magnifications. Here, if the display magnification of the image display unit 2A03 is reduced to 1500x as shown in Figure 3B(b), the condition-fulfilling image 2A09 is displayed at a size that is easy to see. In contrast, the display size of each captured image other than the condition-fulfilling image 2A09 may be gradually reduced according to the display magnification of the image display unit 2A03 (reduced image 3B01), or the display of the image may be omitted according to a predetermined condition such as a certain fixed magnification threshold (hidden image 3B02. For the sake of explanation, the fact that this image is not displayed is indicated by a dashed line in Figure 3B(b)). In other words, the observation support device according to this embodiment controls the size of captured images other than the representative image to a size corresponding to the magnification of the image display unit 2A03 (for example, a size simply proportional to the magnification of the image display unit 2A03; that is, a size obtained by multiplying the initial size S0 of the captured image by the ratio of the modified magnification X1 of the image display unit 2A03 to the initial magnification X0 of the image display unit 2A03 (X1 / X0), i.e., a size where S1 = S0 × X1 / X0), or omits the display of captured images other than the representative image according to the magnification of the image display unit 2A03.

[0100] With this type of control, the size of images other than the representative image changes according to the magnification of the image display unit 2A03, making it easier to understand the relationships between each image on the entire screen.

[0101] Alternatively, regardless of the magnification of the image display unit 2A03, the display or hiding of either the displayed condition-fulfilling image 2A09 or any other captured image can be toggled using a right-click menu (not shown) while the selected image is selected with the mouse pointer (example of a position input pointer; other position input pointers may also be used; the same applies hereinafter). In this embodiment, the use of a mouse pointer is described, but touch operation or other methods may also be used.

[0102] Furthermore, in addition to the right-click menu for toggling the display or hiding of images, a checkbox for toggling the display or hiding of an image may be provided next to each image name in the image name tree view displayed in the image name list display section 2A02, for example, and this should not be interpreted restrictively.

[0103] Next, the grouping process for the target image 3A07 (ROI image), which is the result of the analysis of the captured images, and the selection of a representative image can be configured from the target image setting tab 602 on the settings screen 600 (Figure 7). Target image 3A07 can be used as a representative image.

[0104] The settings for grouping the analysis result image 3A07 (ROI image) and selecting a representative image are similar to those for the captured image described above, but the setting of the analysis target is not required. Furthermore, the settings for the condition setting unit 609 and the representative image selection condition setting unit 613 may be set from the detailed analysis information displayed on the particle analysis information display unit 3A06 in Figure 3A, or other information (for example, image attribute information) may be set, and are not limited to those shown.

[0105] The "detailed analysis information" in this embodiment refers to the feature quantities of each target image 3A07 (ROI image) (obtained through image processing, artificial intelligence (AI) processing, machine learning processing, EDS analysis processing, crystal orientation analysis processing, etc., including, for example, the type, area, circularity, classification, elemental information, crystal orientation information, etc. of the object to be analyzed within each target image 3A07 (ROI image)) and information representing the relationship between images (including the distance between target images 3A07 (ROI images) (for example, distance in color space), classification, similarity between images, etc.).

[0106] As shown in Figure 3C, if the representative image selection conditions (for example, the conditions set in the representative image selection condition setting unit 613 in Figures 6 and 7) are met from the group of focus images which are the analysis results of each captured image, then the focus image 3C03 (ROI image) of the target of focus 3C02 that meets the conditions is selected as the representative image from the display image 3C01 (captured image) which contains a mixture of multiple types of particles or foreign matter, and the focus image 3C03 is displayed as the representative image when the magnification of the image display unit 2A03 becomes extremely low compared to the magnification of the captured image.

[0107] Thus, in Embodiment 1, the representative image selection processing unit 1223 selected any of the captured images as the representative image, but in this embodiment, it selects a particular image that occupies a predetermined area within any of the captured images as the representative image. With this control, particularly noteworthy objects are displayed at a size that is easier to see.

[0108] When the mouse pointer 3C04 is used to hover over the target image 3C03 ("mouse over" means, for example, placing the mouse pointer 3C04 over the target image 3C03), the original image, display image 3C01 which contains a mixture of multiple types of particles or foreign matter, may be displayed on the image display unit 2A03 as shown in Figure 3C, or on the auxiliary display unit 2E01 in a size that is easily visible as shown in Figure 3D, and is not limited to the illustrated examples.

[0109] In this embodiment, setting the target for analysis for the area of ​​interest (ROI image) is not required, but setting the target for analysis may be done, and is not limited to the illustrated example. Also, in this embodiment, the area of ​​interest (ROI image) of the analysis results of each captured image is created in advance, but it may be created when the analysis results satisfy the representative image selection conditions, and is not limited to the illustrated example.

[0110] The representative image selection processing unit 1223 may select the image specified by the mouse pointer from among the grouped captured images as the representative image. Furthermore, if grouping has been performed on the acquired group of captured images, as shown in Figure 3E, hovering the mouse pointer 3C04 over the representative image will enlarge the representative image. In other words, controlling the representative image to a size that is easy to view includes enlarging the representative image in response to the mouse pointer's selection.

[0111] This type of control makes the representative image even easier to see.

[0112] Furthermore, the observation position display unit 1252 enlarges one of the representative images and displays a slider bar for the group images in relation to the enlarged representative image. In the example in Figure 3E, the slider bar 3E01 is displayed above the enlarged representative image 3E02.

[0113] If the slider bar 3E01 is displayed for a certain period of time, the enlarged representative image displayed at the position of the enlarged representative image 3E02 will sequentially switch (slideshow) from within the same group at regular time intervals, and the position of the slider on the slider bar will also change accordingly. The switching of representative images is not limited to switching at regular time intervals; it may also be performed by moving the mouse wheel up and down or manually moving the slider on the slider bar.

[0114] Furthermore, the representative image may be changed at this time. For example, the representative image selection processing unit 1223 may select a representative image from the grouped captured images while switching between them at predetermined intervals. In other words, the representative image will change as time progresses.

[0115] This type of control allows for efficient viewing of multiple captured images.

[0116] Clicking the slideshow button 2A18 on the control unit 2A20 starts a slideshow for all representative images currently displayed on the image display unit 2A03. However, in this case, the representative images may or may not be enlarged, and are not limited to those shown in the illustration. Also, the slider bar may or may not be displayed, and something other than the slider bar may be displayed, and are not limited to those shown in the illustration.

[0117] As shown in Figure 3F, you can select the representative image 2B01 on the image display unit 2A03 and display the group image list display unit 3F01 from a right-click menu (not shown). The group image list display unit 3F01 displays a list of captured images that belong to the same group as the selected representative image 2B01.

[0118] This type of control makes it easier to understand images on a group basis.

[0119] Furthermore, as shown in Figure 3G, when the mouse pointer 3C04 hovers over the displayed image 2A04 (captured image) on the group image list display unit 3F01, a pop-up window 3G01 for displaying image information, such as attribute information and analysis information for the displayed image 2A04, is displayed. In other words, the observation position display unit 1252, in response to any of the captured images in the list being selected by the mouse pointer 3C04, displays at least one of the image attribute information and image analysis information for the selected captured image in a pop-up window.

[0120] This type of control allows for more efficient viewing of information related to each captured image.

[0121] The observation position display unit 1252 may change the magnification of the image display unit 2A03 based on the magnification of the captured image when one of the displayed captured images is selected by the mouse pointer 3C04. For example, when the displayed image 2A04 is double-clicked, the stage coordinates and magnification, which are unique information of the captured image 2A04, are reflected in the display settings of the image display unit 2A03, and the magnification and coordinates of the image display unit 2A03 are switched to display the image 2A04 appropriately.

[0122] As a specific example, the magnification of the image display unit 2A03 is changed so that the captured image is displayed at a predetermined size. The display after the change will be as shown in Figure 2A, for example. As a specific example, suppose the field of view of the captured image is F1, the predetermined size at which the captured image should be displayed is S1, and the size of the image display unit 2A03 is S2. In this case, the magnification of the image display unit 2A03 is changed so that the field of view F2 of the image display unit 2A03 becomes F2 = F1 × S2 / S1.

[0123] With this type of control, the magnification of the image display unit 2A03 is changed based on the size of the captured image, making it easier to understand the relationships between these images.

[0124] In order to accurately display the background image and captured image acquired by the charged particle beam apparatus 100 on the image display unit 2A03, it is necessary to associate the stage coordinates of the charged particle beam apparatus 100 with the display coordinates of the image display unit 2A03 (perform alignment).

[0125] This association method can be appropriately designed by a person skilled in the art based on publicly known technology, but one example is the use of the trigonometric addition formula. If the coordinates of the image are (coordinate X, coordinate Y, rotation angle R), and the stage rotation direction of the charged particle beam apparatus 100 is counterclockwise (clockwise is positive), then the display coordinates of the image in the image display unit 2A03 (coordinate X', coordinate Y', rotation R') can be determined by the following formula.

[0126] X'=X·cos(-R)-Y·sin(-R) … (Formula 1) Y'=X·sin(-R)+Y·cos(-R) … (Formula 2) R'=-R...(Formula 3)

[0127] When the display position of the image display unit 2A03 is switched to the above (coordinate X', coordinate Y', rotation R'), the position where the image was captured is displayed. Next, in order to display the image at an appropriate magnification (for example, a 1:1 ratio), it is necessary to match the resolution per pixel of the image, Reso, to the resolution per pixel of the image display unit 2A03, Reso'.

[0128] Reso = Reso' … (Equation 4)

[0129] Here, if we let W' and FOV' be the number of pixels and field of view of the image display unit 2A03, and W and FOV be the number of pixels and field of view, which are attribute information of the image, then the following equation can be obtained from Equation 4.

[0130] FOV / W = FOV' / W' … (Equation 5)

[0131] To make the above equation hold true (displaying the image at a 1:1 ratio), it is necessary to change the resolution (Reso) per pixel of the image. However, since the image's field of view (FOV) is inherent information at the time of acquisition and is usually not changed, the information that is changed is the number of pixels (W). By performing image resizing processing, such as scaling and interpolation, the number of pixels (W) of the image can be changed, and as a result, the image is resized in the image display unit 2A03, making it possible to display the image at an appropriate display magnification (1:1 ratio). Here, an example of displaying an image at a 1:1 ratio is given, but other ratios are also acceptable.

[0132] Figure 3H shows an example screen when the image name list display switching unit 2A01 is switched to displaying tag names ("Tag"). When grouping is performed on the captured display images manually or based on grouping conditions, the group name 603 set in the grouping page selection unit 604 of the settings screen 600 is associated with the tag name 3H02. In this way, the observation support device stores the group name of the captured images in association with the tag name of the captured image. The image names 3H01 of the images captured by the image display unit 2A03 are displayed in a tree structure for each tag name 3H02.

[0133] This configuration makes it easier to manage captured images on a group basis.

[0134] The association of tag name 3H02 with group name 603 can be done either by using the group name as the tag name (as shown in Figures 6 and 3H), or by assigning a different name to the tag.

[0135] Next to each tag name (3H02), there is a button (3H03) that displays the representative image for that tag group. Clicking this button will show or hide the representative image for that group.

[0136] Furthermore, you can create a folder for each tag name 3H02 and save all captured images with the same tag name in the same folder (i.e., you can create separate albums).

[0137] In this embodiment, the image name 3H01 is the name of the image captured by the image display unit 2A03, and is information assigned when the image was acquired. In this embodiment, the tag name 3H02 is additional information or keywords other than the image name that are assigned to the image, and is usually information related to the content or characteristics of the image, such as the name of the group to which the image belongs. In this embodiment, the group name 603 is a name that can be set in the grouping page selection unit 604 of the setting screen 600, and is a general term for a group of images that have been grouped into the same group based on the grouping conditions.

[0138] [Main effects of this embodiment] Grouping captured images allows for the aggregation of similar images, simplifying information organization. When a representative image is selected from the group, the display magnification of the image display unit 2A03 is changed to control the size of the representative image for easy viewing, while other images are reduced in size or omitted. This simplifies the image display unit 2A03, allowing for quick identification of the observation position and analysis information of the target image, the representative image. Furthermore, a slideshow of group images makes it easy to review images within the same group, facilitating the identification of the observation position or image information of the target displayed image.

[0139] [Example 3] The following describes Example 3 of the present invention. Parts common to Example 1 or 2 may be omitted from the description.

[0140] Figures 4A to 4G show examples of the observation position display screen of the charged particle beam apparatus 100 according to Embodiment 3 of the present invention. When a series of images 4A01 of a target region 4A02 of a specified continuous sample are captured by the charged particle beam apparatus 100 and stored in the image display unit 2A03, the resulting display example is shown in Figure 4A. The target region 4A02 refers to, for example, a region of the sample that has a specific structure and can be distinguished from other regions in the image, but is not limited to this.

[0141] Here, by using the analysis file settings on setting screen 600 and loading an analysis file for extracting the target region 4A02, image processing including binarization and target region search processing is performed on the continuous image group 4A01, and the segmentation region (a predetermined region) is determined. In this way, the observation support device can extract the target region 4A02 as the segmentation region.

[0142] This makes it possible to save the extracted target area 4A02 as a separate display layer from the image display unit 2A03. In this embodiment, a "display layer" is a virtual transparent sheet on which an image or map can be displayed in the image display unit 2A03. Any number of display layers can be superimposed in the image display unit 2A03, image processing is possible for each display layer, and operations such as image editing are possible for each display layer.

[0143] Alternatively, working distance information, which is attribute information of a series of continuously acquired images, can be obtained, and the areas corresponding to the target region 4A02 can be visualized using color intensity or other methods to create a pseudo-height map of the target region 4A02 as a separate display layer.

[0144] In the example shown in Figure 4A, the extraction of the target region 4A02 from a series of continuously acquired images 4A01 is demonstrated, but the target region may also be centered on a single image, and is not limited to the example shown. A specific process for extracting a particular target region as a segmentation region based on one or more images can be appropriately designed by a person skilled in the art based on prior art, etc.

[0145] Each display layer allows the display layer of the continuous image group 4A01 to be switched on and off in the image display unit 2A03 by using an image display toggle button or checkbox.

[0146] As shown in Figure 4B, clicking the display layer setting button 2A19 on the operation unit 2A20 displays the display layer setting window 4B02. By checking the segmentation map checkbox in the display layer setting window 4B02, the segmentation map 4B01 of the target area 4A02 is displayed on the image display unit 2A03. The segmentation map 4B01 can be configured, for example, as a display layer that shows in binary whether or not each pixel is included in the segmentation area.

[0147] As shown in Figure 4C, if the height map checkbox is further checked, a composite display layer 4C01 of the segmentation map 4B01 and height map of the target area 4A02 will be displayed on the image display unit 2A03. In addition to the segmentation map and height map, an imaging time map created from the imaging time, a signal map created from signal information, etc., may also be displayed.

[0148] Furthermore, the output results from other systems (e.g., white light interference microscope, atomic force microscope or focused ion beam device, optical microscope, fluorescence microscope, image processing software, etc.) may be displayed as a display layer. In this way, the observation support device saves sample information output from devices other than the charged particle beam device 100 as a display layer.

[0149] In the example shown in Figure 4G, the selection and grouping processes of representative images are demonstrated by utilizing the display layers of the image display unit 2A03. For example, when a resin section stained with a dye suitable for the observation target 4G02 is observed using an optical microscope, an optical microscope image of the stained observation target 4G01 (background image) can be output.

[0150] As shown in Figure 4G(a), the optical microscope image 4G01 is captured by the image display unit 2A03 and displayed as a display layer. Furthermore, alignment processing is performed to match the observation position information of the optical microscope with the stage position information of the charged particle beam apparatus. By performing external control of the stage, high-resolution structural observation of the same location becomes possible using the charged particle beam apparatus 100.

[0151] As shown in Figure 4G(b), the charged particle beam apparatus 100 continuously captures multiple fields of view of the region containing the target to be stained in the optical microscope image at a higher magnification, and displays the acquired continuous image group 4G03 (continuous image group 2) on the image display unit 2A03. Here, alignment processing is given as an example to match the observation position information of the optical microscope with the stage position information of the charged particle beam apparatus, but a sample holder that does not require alignment processing may be used, and this embodiment is not limited to this example.

[0152] Here, the position of the stained object can be determined from the optical microscope image 4G01 (display layer) by performing image processing including binarization and target search processing. Since the observation position information of the optical microscope image 4G01 (display layer) is synchronized with the stage coordinates of the charged particle beam apparatus 100, the image of the charged particle beam apparatus 100 (captured image) taken at the same position as the stained object can be used as the condition-fulfilling image 4G04.

[0153] As shown in Figure 4G(c), when the display magnification of the image display unit 2A03 is reduced to a low magnification, for example 30x, it becomes possible to display the condition-fulfilling image 4G04 as the representative image 4G05 (representative image 4) in a size that is easy to see.

[0154] Furthermore, similar to the selection of representative images, it is possible to group multiple captured images by utilizing image processing and display layers. For example, consider the case where the target area in the display layer is continuously imaged at high magnification and over a wider area than the target area using the charged particle beam apparatus 100.

[0155] The observation support device determines the extent of the target region (segmentation region) through image processing including binarization and target search processing on the display layer, thereby enabling the grouping of captured images contained within the target region (segmentation region). For example, when imaging a specific region under specific imaging conditions (e.g., high magnification), if the imaging field of view is small for that specific region, it is necessary to image that specific region with multiple imaging fields of view. Therefore, for example, the specific region (e.g., a rectangular region including the entire segmentation region) is divided into multiple sub-sections (e.g., rectangular sections arranged in a grid), and an image is acquired for each sub-section. Then, the captured images that include the segmentation region are grouped into the same group.

[0156] In this way, the observation support device extracts segmentation regions and groups the captured images based on these regions. This control method allows for the automatic grouping of captured images related to specific segmentation regions, enabling more efficient viewing of those regions.

[0157] The representative image selection processing unit 1223 may select one image as the representative image from a group of captured images grouped into the same group, based on pre-set representative image selection conditions (for example, extracting the most recent image), or randomly. In other words, the representative image selection processing unit 1223 selects an captured image taken at a position corresponding to the target area (for example, a position including at least a part of the target area) as the representative image, based on the result of image processing for a specific target area of ​​the display layer.

[0158] With this type of control, the captured image of the target region can be automatically designated as a representative image, allowing for efficient observation of the target region.

[0159] Alternatively, the display magnification of the image display unit 2A03 can be optimized to display the size of the target area, and then multiple images can be snapshotted to use the snapshot image as the representative image. This is not limited to this embodiment.

[0160] In this embodiment, an optical microscope image is shown as an example of a background image, but output results from a white light interference microscope, atomic force microscope, focused ion beam apparatus, optical microscope, image processing software, etc., may also be used as a background image, and are not limited to those shown.

[0161] When the image display unit 2A03 is in the display state shown in Figure 4C, clicking the snapshot button 2A17 on the operation unit 2A20 saves the display state of the image display unit 2A03 as a snapshot image. The snapshot image can then be displayed on the image display unit 2A03.

[0162] In other words, the display processing unit 1224 saves the display state of the observation position display unit 1252 as a snapshot image by taking a snapshot of it, and displays this snapshot image on the observation position display unit 1252 as a representative image (for example, in a reduced state as snapshot image 4D01 in Figure 4D). The method of displaying the snapshot image (size control, etc.) can be the same as that of the captured image. In this case, the magnification and field of view of the snapshot image at the time of acquisition can be set to values ​​equal to the magnification and field of view of the image display unit 2A03 at the time the snapshot image was acquired.

[0163] As shown in Figure 4D, by registering snapshot image 4D01 as a representative image, even when the magnification of the image display unit 2A03 is set to an extremely low level, information can be easily confirmed and the location identified from snapshot image 4D01, which displays the composite layer of the target area.

[0164] The number of representative images for the target area may be one or multiple. Furthermore, the representative image for the target area may be a representative image 4E01 selected from the images included in the continuous image group, as shown in Figures 4E and 4F, respectively, or it may be a representative image 4F01 displaying a stitched image created by arranging the continuous image group according to the imaging position. Similarly, even when the magnification of the image display unit 2A03 is set to an extremely high value, a snapshot image can be displayed on the auxiliary display unit 2E01.

[0165] [Main effects of this embodiment] By performing image processing to extract the target area of ​​the sample, and then creating various layers using image attribute information and analysis information, the information of the target area is visualized, making it easy to understand its state. Furthermore, by performing image processing on the target area layer, it becomes possible to automatically perform grouping of the image group captured by the charged particle beam apparatus 100 and the selection of a representative image. In addition, by registering a snapshot image as a representative image, even if the magnification of the image display unit differs significantly from the magnification of the target area, it is possible to check the information and state of the target area at a glance by looking at the representative image.

[0166] [Example 4] The following describes Embodiment 4 of the present invention. Parts common to Embodiments 1, 2, or 3 may be omitted from the description.

[0167] Figures 5A and 5B show examples of the observation position display screen of a charged particle beam apparatus according to Embodiment 4 of the present invention. In the example of Figure 5A, when new imaging conditions, such as different magnifications, are set for the target region 4A02 of the sample 108, it is possible to automatically set a new series of candidate images 5A01 that conform to the shape of the target region 4A02 by utilizing the segmentation map 4B01 of the target region 4A02.

[0168] A segmentation map is created by separating a designated area (target area) from the background and visualizing only the target area by binarizing each pixel based on whether or not it is included in the target area. The observation support device saves the segmented area (or segmentation map) as a display layer.

[0169] This type of control allows the segmentation map to be displayed overlaid with other information (such as the arrangement of sub-partitions), making it easier to understand the relationship between the target area and other structures (such as sub-partitions).

[0170] In this embodiment, as shown in Figure 5B, when an image processing such as binarization is applied to the segmentation map 4B01 of the target region 4A02 (see Figure 4A), the segmentation map 4B01 becomes a binarized pixel map 5B03 of 0 (white and light gray) and 1 (dark gray). The portion containing part of the target region 4A02 is assumed to be 1 (dark gray).

[0171] Here, the imaging field mesh 5B01 can be automatically set based on new imaging conditions, such as magnification, the overlap rate of the image field to be captured, and the imaging range. When the imaging field mesh 5B01 is superimposed on the segmentation map 4B01, it becomes as shown in the enlarged image of the area of ​​interest 5B02 in Figure 5B.

[0172] If any of the sub-sections of the imaging field-of-view mesh 5B01 overlap with the dark gray area (representing the target area 4A02) of the binarized pixel map 5B03 of the target area 4A02 (for example, if it contains at least one pixel of the dark gray area), then that sub-section is set as the imaging field-of-view 5B04, and imaging processing is performed for that sub-section. On the other hand, if the sub-section does not overlap with the dark gray area of ​​the binarized pixel map 5B03 (if it does not contain any dark gray area at all), then that sub-section is set as the non-imaging field-of-view 5B05 of the imaging field-of-view mesh 5B01.

[0173] In this way, the observation support device determines the group of imaging regions corresponding to the target region (segmentation region) based on the results of image processing on the target region (segmentation region) and the results of overlap detection between the imaging field mesh formed according to the imaging conditions.

[0174] In this way, by utilizing the imaging field mesh 5B01 set by the new imaging conditions and the segmentation map 4B01, it becomes possible to automatically set a new series of candidate images 5A01 that conforms to the shape of the target region 4A02.

[0175] In this embodiment, a new series of candidate images 5A01 is automatically set along the shape of the target region 4A02. However, it is not necessary to follow the shape of the target region, and automatic setting of a single image instead of a series of images is also possible, and the embodiment is not limited to the one shown.

[0176] [Main effects of this embodiment] By automatically setting a new group of candidate continuous imaging images 5A01 for the target region 4A02, it becomes possible to efficiently re-imaging the target region with high resolution. [Explanation of Symbols]

[0177] 100... Charged particle beam device 101... Sample Room 102... Charged particle beam optics 103... Sample stage 104… Stage 105... Detector 106…Optical camera 107... Vacuum pump 108... Sample 110... Charged particle beam imaging device 111…Memory 120...Calculation control unit (observation support device) 121…CPU 122…Main memory 123…Secondary storage device 124...Input section 125...Display unit (observation support device) 130... Stage control device 131... Coordinate memory unit 132... Control Unit 133... Drive unit 140… Vacuum control device 141…Memory 150…Optical imaging device 151…Memory 161... Charged particle source 162...Condenser lens 163...deflector 164…Objective lens 170... Optical System Control Device 171…Memory 200... Observation position display screen 300…Image analysis result display screen 600... Settings screen 601...Image settings tab 602...Featured Image Settings Tab 603... Group name 604...Grouping page selection section 605... Add group page button 606... Delete group page button 607... Grouping condition setting radio button 608...Analysis target setting section 609...Condition setting section 610...Relationship settings section 611...Threshold setting section 612... Conditional relationship setting section 613... Representative Image Selection Criteria Setting Section 614...Analysis file settings radio button 615... File path input section 616... File selection button 1221... Information Processing Unit 1222...Image grouping processing unit 1223...Representative Image Selection Processing Unit 1224...Display Processing Unit 1251... Observation image display unit 1252... Observation position display unit 2A01...Image name list display switching section 2A02...Image name list display section 2A03...Image display section 2A04…Displayed image (imaging image) 2A05...Magnification button 2A06... Magnification Reduction Button 2A07...Magnification Reset Button 2A08…Magnification display section 2A09…Image showing fulfillment of the conditions (representative image) 2A10...Image Import Button 2A11... Representative image registration button 2A12...Remove Representative Image Button 2A13...Group button 2A14...Representative image display toggle button 2A15...Image capture setting section 2A16...Ungroup button 2A17...Snapshot button 2A18... Slideshow button 2A19... Display Layer Settings Button 2A20…Operation unit 2B01…Representative image 2B02...Currently displayed sample map 2C01…Representative image 2D01…Representative image 2D02... Position marker 2E01…Auxiliary display 2E02…Representative image 3A01...Target image display unit 3A02…Target image 3A03... Left feed button 3A04... Right feed button 3A05…Image analysis information display section 3A06…Particle analysis information display section 3A07…Featured Image (Representative Image) 3B01...Reduced image 3B02...Hidden image 3C01…Displayed image (imported image) 3C02…Condition met, target of attention 3C03…Featured Image (Representative Image) 3C04... Mouse pointer (position input pointer) 3E01...Slider bar 3E02…Enlarged representative image 3F01...Group image list display section 3G01... Pop-up window for displaying image information 3H01…Image name 3H02…Tag name 3H03...Representative image display button 4A01...Sequentially acquired image group 4A02...Target area (predetermined area) 4B01... Segmentation Map 4B02...Display Layer Settings Window 4C01... Composite display layer 4D01…Snapshot image (representative image) 4E01…Representative image 4F01…Representative image 4G01…Optical microscope image 4G02…Subject of observation 4G03...Continuous image acquisition group 4G04... Image that meets the conditions (imported image) 4G05…Representative image 5A01... New series of candidate images 5B01…Imaging field of view mesh 5B02…Points of interest 5B03...Binarized Pixel Map 5B04... Field of view 5B05...Non-imaging field of view

Claims

1. A device for assisting in the observation of a sample, An observation position display unit that displays the positions of multiple images of a sample captured by a charged particle beam device, corresponding to the image display unit, A display processing unit that controls the observation position display unit, A representative image selection processing unit that selects a representative image based on the aforementioned plurality of captured images, Equipped with, The observation support device extracts a predetermined region and groups the captured images based on the predetermined region. An observation support device characterized by the following features.

2. In the observation support device according to claim 1, The observation support device saves the predetermined area as a display layer. An observation support device characterized by the following features.

3. In the observation support device according to claim 1, The observation support device is, The sample information output from a device other than the charged particle beam apparatus is saved as a display layer. The representative image selection processing unit selects the captured image captured at a position corresponding to the target area as the representative image, based on the results of image processing for a specific target area of ​​the display layer. An observation support device characterized by the following features.

4. In the observation support device according to claim 3, The observation support device further includes an image grouping processing unit that groups the captured images that are included within the range of the target area, The representative image selection processing unit selects a representative image from among the captured images grouped into the same group, based on the representative image selection conditions. An observation support device characterized by the following features.

5. In the observation support device according to claim 3, The observation support device is, The result of image processing on the aforementioned target region, The imaging field mesh formed according to the imaging conditions, Based on the overlap determination result, the group of imaging regions corresponding to the target region is determined. An observation support device characterized by the following features.

Images