Magnetization angle deviation measuring device, magnetic flux detector, and method for manufacturing a magnetic flux detector

Abstract

The present invention provides a magnetization angle deviation measuring device capable of measuring the magnetization angle of a permanent magnet, a magnetic flux detector, and a method for manufacturing a magnetic flux detector. [Solution] The magnetization angle deviation measuring device 10 comprises a first Helmholtz coil 301 for measuring magnetic flux in the direction of a first axis, a second Helmholtz coil 302 for measuring magnetic flux in the direction of a second axis intersecting the direction of the first axis, a third Helmholtz coil 303 for measuring magnetic flux in the direction of a third axis intersecting the direction of the first axis and the second axis, a bobbin 350 having a holding groove formed around its entire outer circumference for holding the windings of the first to third Helmholtz coils 301, 302, and 303 respectively, and a extraction part 60 for extracting the permanent magnet to be measured from the center of the first Helmholtz coil 301 along the direction of the first axis.

Description

Technical Field

[0001] The present invention relates to a magnetization angle deviation measuring device, a magnetic flux detector, and a method for manufacturing a magnetic flux detector.

Background Art

[0002] Patent Document 1 discloses a magnetic field measuring device. This magnetic field measuring device includes a magnetic sensor array including a first magnetic sensor and a second magnetic sensor, a magnetic field generating unit, and an arithmetic unit that calculates the relative position of the magnetic sensor array with respect to the magnetic field generating unit to eliminate the difference in magnetic outputs between the first magnetic sensor and the second magnetic sensor when the magnetic field generating unit generates a magnetic field. The magnetic field generating unit includes a Helmholtz coil.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Here, in recent years, permanent magnets whose magnetization angles do not fall within a predetermined range have been circulating in the market. When such permanent magnets are incorporated into products, it may affect the performance and reliability of the products. Therefore, it may be necessary to measure the magnetization angle in advance. An object of the present invention is to provide a magnetization angle deviation measuring device, a magnetic flux detector, and a method for manufacturing a magnetic flux detector that can measure the magnetization angle of a permanent magnet.

Means for Solving the Problems

[0005] The invention described in claim 1 is a magnetization angle deviation measuring device comprising: a first Helmholtz coil for measuring magnetic flux in the direction of a first axis; a second Helmholtz coil for measuring magnetic flux in the direction of a second axis intersecting the direction of the first axis; a third Helmholtz coil for measuring magnetic flux in the direction of a third axis intersecting the direction of the first axis and the direction of the second axis; a bobbin having a holding groove for holding the first to third Helmholtz coils formed around its entire outer circumference; and a extraction part for extracting a permanent magnet to be measured from the center of the first Helmholtz coil along the direction of the first axis.

[0006] The invention described in claim 2 is a magnetization angle deviation measuring device according to claim 1, wherein the bobbin has first to third insertion holes formed therein, each passing through the center of the first to third Helmholtz coils.

[0007] The invention described in claim 3 is a magnetization angle deviation measuring device according to claim 2, wherein the outer shape of the bobbin is a rectangular parallelepiped.

[0008] The invention described in claim 4 is a magnetization angle deviation measuring device according to claim 3, wherein the pair of coils constituting the first to third Helmholtz coils are wound so that their outer shape is rectangular.

[0009] The invention described in claim 5 is a magnetization angle deviation measuring device according to claim 4, wherein the holding groove portion is a pair of coil holding grooves that each hold one and the other of the pair of coils, and the pair of coil holding grooves are formed in the same direction with a predetermined interval between them.

[0010] The invention described in claim 6 is a magnetization angle deviation measuring device according to claim 4, wherein the holding groove portion comprises a first coil holding groove formed at predetermined intervals surrounding the first shaft and holding a pair of first coils constituting the first Helmholtz coil, a second coil holding groove formed at predetermined intervals surrounding the second shaft and holding a pair of second coils constituting the second Helmholtz coil, and a third coil holding groove formed at predetermined intervals surrounding the third shaft and holding a pair of third coils constituting the third Helmholtz coil.

[0011] The invention described in claim 7 is a magnetization angle deviation measuring device according to claim 6, further comprising: a second Helmholtz coil connecting wire housing groove extending from one of the second coil holding grooves to the other second coil holding groove and housing a connecting wire extending from one of the second coils to the other second coil; and a third Helmholtz coil connecting wire housing groove extending from one of the third coil holding grooves to the other third coil holding groove and housing a connecting wire extending from one of the third coils to the other third coil.

[0012] The invention described in claim 8 is a magnetization angle deviation measuring device according to claim 7, further comprising a sample holder that holds the object to be measured and is inserted into the first insertion hole, wherein the extraction part extracts the sample holder from the first insertion hole.

[0013] The invention described in claim 9 is a magnetization angle deviation measuring device according to claim 8, further comprising a base portion for fixing the bobbin, the base portion having a protruding portion that fits into the first insertion hole, a positioning portion that contacts the bobbin and positions the rotational position about the central axis of the first insertion hole, and a pressing portion that applies force to bring the bobbin into contact with the positioning portion.

[0014] The invention described in claim 10 comprises: a first Helmholtz coil having a pair of first coils connected to each other via a first connecting wire for measuring magnetic flux in the direction of a first axis; a second Helmholtz coil having a pair of second coils connected to each other via a second connecting wire for measuring magnetic flux in the direction of a second axis intersecting the direction of the first axis; a third Helmholtz coil having a pair of third coils connected to each other via a third connecting wire for measuring magnetic flux in the direction of the first axis and in the direction of a third axis intersecting the direction of the second axis; and a bobbin formed in a cubic shape for holding the first to third Helmholtz coils, wherein the bobbin has This magnetic flux detector has the following features: a pair of first coil holding grooves formed to surround a first shaft and hold the first coil; a pair of second coil holding grooves formed to surround a second shaft and hold the second coil; a pair of third coil holding grooves formed to surround a third shaft and hold the third coil; a second Helmholtz coil connection wire housing groove extending from one of the second coil holding grooves to the other and housing the second connection wire; and a third Helmholtz coil connection wire housing groove extending from one of the third coil holding grooves to the other and housing the third connection wire.

[0015] The invention described in claim 11 is a method for manufacturing a magnetic flux detector as described in claim 10, comprising: a first step of winding the second coil in the second coil holding groove and placing the second connecting wire in the second Helmholtz coil connecting wire housing groove; a second step of winding the third coil in the third coil holding groove and placing the third connecting wire in the third Helmholtz coil connecting wire housing groove after performing the first step; and a third step of winding the first coil in the first coil holding groove after performing the second step. [Effects of the Invention]

[0016] According to the present invention, a magnetization angle deviation measuring device capable of measuring the magnetization angle of a permanent magnet, a magnetic flux detector, and a method for manufacturing a magnetic flux detector can be provided.

Brief Description of the Drawings

[0017] [Figure 1] It is an external view of a magnetization angle deviation measuring device according to an embodiment of the present invention. [Figure 2] It is an external view of the magnetization angle deviation measuring device viewed from the side. [Figure 3] It is an explanatory diagram of the magnetization angle deviation measured by the magnetization angle deviation measuring device. [Figure 4] It is an explanatory diagram showing a magnetic dipole moment and components obtained by decomposing it along each axis. [Figure 5] It is an explanatory diagram showing an overview of the configuration of the magnetization angle deviation measuring device. [Figure 6] It is an exploded view showing a bobbin placed on an upper base plate. [Figure 7] It is an external view of the bobbin included in the magnetization angle deviation measuring device. [Figure 8A] It is a plan view of the bobbin included in the magnetization angle deviation measuring device. [Figure 8B] It is a front view of the bobbin included in the magnetization angle deviation measuring device. [Figure 8C] It is a side view of the bobbin included in the magnetization angle deviation measuring device. [Figure 9A] It is an explanatory diagram schematically showing a first Helmholtz coil included in the magnetization angle deviation measuring device. [Figure 9B] It is an explanatory diagram schematically showing a second Helmholtz coil included in the magnetization angle deviation measuring device. [Figure 9C] It is an explanatory diagram schematically showing a third Helmholtz coil included in the magnetization angle deviation measuring device. [Figure 10A] It is an explanatory diagram (Part 1) showing the movement when fixing the bobbin. [Figure 10B] It is an explanatory diagram (Part 2) showing the movement when fixing the bobbin. [Figure 10C] It is an explanatory diagram (Part 3) showing the movement when fixing the bobbin. <This is an explanatory diagram of the sample holder included in the magnetization angle deviation measuring device. [Figure 12] This is an exploded view of the sample holder equipped with the magnetization angle deviation measuring device. [Modes for carrying out the invention]

[0018] Next, embodiments of the present invention will be described with reference to the attached drawings to facilitate understanding of the invention. Note that parts not relevant to the description may be omitted from the illustrations.

[0019] A magnetization angle deviation measuring device 10 according to one embodiment of the present invention (see Figures 1 and 2) can measure the magnetization angle deviation of a permanent magnet. Here, the magnetization angle deviation γ is the angular difference between the actual magnetic dipole moment j and the ideal magnetic dipole moment jz, as shown in Figure 3. The magnetization angle deviation γ can be determined by the following equations (1) to (3) by decomposing the magnetic dipole moment j into components in the X, Y, and Z axes, which are mutually orthogonal to each other, as shown in Figure 4, and measuring them as magnetic dipole moment components jx, jy, and jz, respectively.

[0020]

number

[0021] Therefore, as shown in Figure 5, three Helmholtz coils HC are prepared, each with a central axis extending in the X, Y, and Z directions, respectively, and sharing a common center position. The magnetization angle deviation γ is determined by pulling the permanent magnet to be measured out from the center position in the Z direction and measuring the magnetic flux of each axis. The magnetic flux of each axis is measured using a fluxmeter 70.

[0022] In the following explanation, we will introduce an XYZ Cartesian coordinate system consisting of mutually orthogonal X-axis, Y-axis, and Z-axis extending in the vertical direction, as shown in Figure 1, and will explain based on this XYZ Cartesian coordinate system. It should be noted that the term "orthogonal" used here does not refer to orthogonality in the strict sense. Rather, "orthogonal" here means that design and manufacturing tolerances are acceptable, and the lines are "effectively orthogonal" (the same applies below).

[0023] As shown in Figures 1 and 2, the magnetization angle deviation measuring device 10 comprises a base unit 20, a detection unit 30, a sample holder 50, a extraction unit 60, and a fluxmeter 70 (see Figure 5).

[0024] As shown in Figure 2, the base portion 20 includes a lower base plate 202, an upper base plate 204, a positioning pin 206, and a clamp 210 (see Figure 1), and can fix the detection unit 30. The lower base plate 202 is a plate-shaped member and constitutes the upper surface of the frame 220. The upper base plate 204 is a plate-shaped member on which the detection unit 30 rests, and is fixed on top of the lower base plate 202. A through hole is formed in the upper base plate 204, and a cylindrical positioning member 230 is inserted into this through hole, as shown in Figure 6. The positioning member 230 has an insertion portion 230a, which is formed with a diameter slightly smaller than the through hole and is inserted into the through hole, and a protruding portion 230b, which is formed above the insertion portion 230a and has a larger diameter than the insertion portion 230a, and this protruding portion 230b protrudes from the upper surface of the upper base plate 204.

[0025] The positioning pin (an example of a positioning part) 206 is a pin that protrudes upward from the upper base plate 204. The positioning pin 206 contacts the lower part near the corner of the detection unit 30. As shown in Figure 1, the clamp (an example of a pressing part) 210 has a lever 212 and a rod 214, and when the lever 212 is operated, the rod 214 moves forward and backward. The tip of the extended rod 214 contacts the detection part 30. The part that the rod 214 contacts is the lower part near the diagonal corner of the corner near the part that the positioning pin 206 contacts when viewed from above.

[0026] The detection unit (an example of a magnetic flux detector) 30 is fixed to the base unit 20 and can detect the magnetic flux of the sample M (see Figure 11), which is a permanent magnet to be measured. The detection unit 30 includes a first Helmholtz coil 301, a second Helmholtz coil 302, a third Helmholtz coil 303, and a bobbin 350 as shown in Figures 7 and 8A to 8C, and can detect magnetic flux with each of the Helmholtz coils 301 to 303.

[0027] The first Helmholtz coil 301 is a pair of coils for measuring magnetic flux in the Z-axis direction (an example of the direction of the first axis), and as shown in Figure 9A, it is composed of a pair of first coils 301a and 301b of the same size. Note that "identical" here does not mean "identical" in the strict sense. That is, "identical" here means that design and manufacturing errors are allowed and they are "substantially identical" (the same applies below). A first connecting wire 301c extends from the first coil 301a to the first coil 301b, and the first coils 301a and 301b are electrically connected to each other. Each of the first coils 301a and 301b is wound so that its outer shape is rectangular, for example, with an outer dimension Wz1 of 210 mm and an inner dimension Wz2 of 200 mm.

[0028] The second Helmholtz coil 302 is a pair of coils for measuring magnetic flux in the X-axis direction (an example of the direction of the second axis), and consists of a pair of second coils 302a and 302b of the same size, as shown in Figure 9B. A second connecting wire 302c extends from the second coil 302a to the second coil 302b, and the second coils 302a and 302b are electrically connected to each other. Each of the second coils 302a and 302b is wound so that its outer shape is rectangular, for example, with an outer dimension Wx1 of 170 mm and an inner dimension Wx2 of 160 mm.

[0029] The third Helmholtz coil 303 is a pair of coils for measuring magnetic flux in the Y-axis direction (an example of the direction of the third axis), and as shown in Figure 9C, it consists of a pair of third coils 303a and 303b of the same size. A third connecting wire 303c extends from the third coil 303a to the third coil 303b, and the third coils 303a and 303b are electrically connected to each other. Each of the third coils 303a and 303b is wound so that its outer shape is rectangular, for example, with an outer dimension Wy1 of 190 mm and an inner dimension Wy2 of 180 mm.

[0030] Because the first coils 301a, 301b, the second coils 302a, 302b, and the third coils 303a, 303b are wound to have a rectangular shape, the size difference between each coil is reduced compared to when they are wound to have a circular shape, and the detection unit 30 is made smaller. Furthermore, the number of turns of the first coil 301a, 301b, the second coil 302a, 302b, and the third coil 303a, 303b is preferably, for example, at least 1,000 turns each, in order to improve detection accuracy.

[0031] The bobbin 350 (see Figures 7 and 8A-8C) can hold the first Helmholtz coil 301, the second Helmholtz coil 302, and the third Helmholtz coil 303, i.e., the first coils 301a and 301b, the second coils 302a and 302b, and the third coils 303a and 303b. The bobbin 350 has a cubic shape and is composed of surfaces having normals extending in the X, Y, and Z axes. The bobbin 350 is not limited to a cubic shape and may also have a rectangular parallelepiped shape including a cubic shape. The bobbin 350 is made of, for example, non-magnetic aluminum and is formed as a single piece by NC machining. The width, height, and depth of the bobbin 350 are, for example, 220 mm each.

[0032] The bobbin 350 has three insertion holes formed in its center: a first insertion hole H301, a second insertion hole H302, and a third insertion hole H303, which extend perpendicularly to each other. The diameters of the first insertion hole H301, the second insertion hole H302, and the third insertion hole H303 are set to be slightly larger than the diameter of the protrusion 230b (see Figures 2 and 6) by a predetermined amount.

[0033] The first insertion hole H301 is a hole through which the holder 50 (see Figure 11) is inserted, with the direction of its central axis being the Z-axis direction in Figures 1 and 2, and is formed to pass through the center of the first Helmholtz coil 301. The second insertion hole H302 is formed to penetrate the second Helmholtz coil 302 so that its central axis is oriented in the direction of the X-axis in Figures 1 and 2. The third insertion hole H303 is formed to penetrate the third Helmholtz coil 303 so that its central axis is oriented in the Y-axis direction, as shown in Figures 1 and 2. The first insertion hole H301, the second insertion hole H302, and the third insertion hole H303 are each substantially the same diameter, and when the bobbin 350 is rotated so that the central axis of each of the first to third insertion holes H301 to H303 extends in the Z-axis direction and viewed from above, all of the first to third insertion holes H301 to H303 are formed to be in the same position (center of the bobbin 350).

[0034] Furthermore, the bobbin 350 has a first retaining groove 351, a second retaining groove 352, and a third retaining groove 353, each formed over the entire outer circumference. The first retaining groove portion 351 is a pair of first coil retaining grooves 351a and 351b formed in the same direction at a predetermined interval, surrounding the Z axis. One and the other of the pair of first coils 301a and 301b that constitute the first Helmholtz coil 301 are held in the first coil retaining grooves 351a and 351b, respectively. The second retaining groove 352 is a pair of second coil retaining grooves 352a and 352b formed in the same direction at a predetermined interval, surrounding the X-axis. One and the other of the pair of second coils 302a and 302b that constitute the second Helmholtz coil 302 are held in the second coil retaining grooves 352a and 352b, respectively. The third retaining groove 353 is a pair of third coil retaining grooves 353a and 353b formed in the same direction at a predetermined interval, surrounding the Y axis. One and the other of the pair of third coils 303a and 303b that constitute the third Helmholtz coil 303 are held in the third coil retaining grooves 353a and 353b, respectively.

[0035] The first coils 301a and 301b, the second coils 302a and 302b, and the third coils 303a and 303b are wound so that they fit inside the first coil retaining grooves 351a and 351b, the second coil retaining grooves 352a and 352b, and the third coil retaining grooves 353a and 353b, respectively, without protruding outwards.

[0036] The bobbin 350 is further provided with a second connection wire accommodating groove 362 and a third connection wire accommodating groove 363. The second connection wire housing groove (an example of a second Helmholtz coil connection wire housing groove) 362 is a groove that extends from the second coil holding groove 352a to the second coil holding groove 352b, and houses the second connection wire 302c. The third connecting wire housing groove (an example of a connecting wire housing groove for the third Helmholtz coil) 363 is a groove that extends from the third coil holding groove 353a to the third coil holding groove 353b, and houses the third connecting wire 303c. Furthermore, no housing groove is formed for accommodating the first connecting wire 301c; the first connecting wire 301c is routed inside the second coil holding grooves 352a, 352b or the third coil holding grooves 353a, 353b.

[0037] Here, the procedure for positioning the detection unit 30 on the base unit 20 will be explained based on Figures 6 and 10A to 10C. Note that the Helmholtz coils 301 to 303 are not shown in Figures 6 and 10A to 10C. First, the first insertion hole H301, the second insertion hole H302, or the third insertion hole H303 of the detection unit 30 is inserted into the protruding portion 230b of the base unit 20 (see Figure 6), and placed on the upper base plate 204. This positions the detection unit 30 not only in the Z-axis direction but also in the X-axis and Y-axis directions (see Figure 10A). Next, the rotational position of the detection unit 30 around the Z-axis (around the central axis of the first insertion hole H301, the second insertion hole H302, or the third insertion hole H303) is adjusted so that its side surface contacts the positioning pin 206 (see Figure 10B). Finally, when the lever 212 of the clamp 210 is pushed down, the rod 214 extends and pushes against the side, generating a moment around the central axis of the protrusion 230b. This applies a force that causes the bobbin 350 to abut against the positioning pin 206, thereby positioning the angular position of the detection unit 30 around the Z axis (see Figure 10C).

[0038] As shown in Figures 11 and 12, the sample holder 50 can hold the sample M at its tip. A recess 502 is formed on the tip surface of the sample holder 50, into which the sample M is attached. The sample M is secured by a fixing plate 504 using screws to prevent it from falling out.

[0039] The outer diameter of the sample holder 50 is set to be slightly smaller than the diameter of the first insertion hole H301 by a predetermined amount, and it is inserted into the first insertion hole H301 from above. However, the upper end of the sample holder 50 has a flange portion 506 that protrudes radially and is larger in diameter than the first insertion hole H301. When the sample holder 50 is inserted into the first insertion hole H301, the flange portion 506 rests on and contacts the surface on which the first insertion hole H301 is formed, thereby positioning the sample holder 50 in the initial position in the Z-axis direction. Once the sample holder 50 is positioned in the initial position, the sample M is located at the center of the first Helmholtz coil 301, the second Helmholtz coil 302, and the third Helmholtz coil 303.

[0040] The extraction section 60 can extract the sample holder 50, which is inserted into the first insertion hole H301 and positioned in the Z-axis direction. The extraction section 60 includes a support column 601a, a guide 601b, a holder support member 602, and a motor 604.

[0041] The support column 601a is a member that extends upward from the lower base plate 202. Guide 601b is a pair of round rod-shaped members extending in the Z-axis direction. Guide 601b is supported by column 601a. The holder support member 602 is a member that supports the sample holder 50 and can move up and down along the guide 601b that extends in the vertical direction. The central axis of the sample holder 50 supported by the holder support member 602 is set to coincide with the central axis of the protrusion 230b. The motor 604 can raise and lower the holder support member 602 via the belt 608. The motor 604 is controlled by a motor control device (not shown) to rotate at a constant speed, and stops when the rising holder support member 602 reaches a predetermined height position. The predetermined height position is detected by an optical sensor (not shown) that functions as a limit switch. Therefore, the withdrawal section 60 can repeatedly and stably raise the sample M in the Z-axis direction at substantially the same speed and substantially the same distance with high reproducibility.

[0042] The fluxmeter 70 (see Figure 5) can measure the magnitude of magnetic flux based on the voltages output by the first Helmholtz coil 301, the second Helmholtz coil 302, and the third Helmholtz coil 303, respectively. The flux meter 70 is connected to the AC power supply via a noise-cutting transformer (not shown) to suppress the effects of noise from the AC power line.

[0043] Next, the operation of the magnetization angle deviation measuring device 10 (method for measuring magnetization angle deviation) will be explained. First, the tester performing the measurement carries out a calibration procedure as preparation. The calibration procedure is performed primarily to correct for differences in the output voltages of the first Helmholtz coil 301, the second Helmholtz coil 302, and the third Helmholtz coil 303, which are mainly due to differences in size. Specifically, the same sample M is withdrawn from the first insertion hole H301, the second insertion hole H302, and the third insertion hole H303, and the magnitude of the magnetic flux from the first Helmholtz coil 301, the second Helmholtz coil 302, and the third Helmholtz coil 303 is measured, and a correction factor is calculated based on these measured values.

[0044] Furthermore, when measuring the second Helmholtz coil 302 and the third Helmholtz coil 303, the orientation of the detection unit 30 is changed so that the second insertion hole H302 and the third insertion hole H303 are in the vertical direction, respectively.

[0045] Next, the tester fixes the bobbin 350 so that the central axis of the first insertion hole H301 faces the Z-axis direction, and inserts the sample holder 50 into the first insertion hole H301. Once inserted into the insertion hole H301, the sample holder 50 is positioned in its initial position by the flange portion 506 resting on the detection unit 30. With the sample holder 50 positioned in its initial position, the sample M is located at the center of the first Helmholtz coil 301, the second Helmholtz coil 302, and the third Helmholtz coil 303. Note that the term "center" here does not refer to the exact center. Rather, "center" here means the "effective center" where design and manufacturing errors are permissible.

[0046] Next, when the sample holder 50, which is in its initial position, is pulled upward by the extraction unit 60, the magnitude of the magnetic flux in each axial direction is determined by the fluxmeter 70 (see Figure 5) based on the voltages generated in the first Helmholtz coil 301, the second Helmholtz coil 302, and the third Helmholtz coil 303.

[0047] Subsequently, the tester corrects the output voltages of the second Helmholtz coil 302 and the third Helmholtz coil 303 using the correction coefficient obtained during the calibration process, and the magnetization angle deviation is determined based on the aforementioned equations (1) to (3).

[0048] Next, the manufacturing method of the detection unit 30 will be described. The detection unit 30 is manufactured by sequentially forming it from the Helmholtz coil located deep inside the bobbin 350, as shown in the following first to third steps.

[0049] (First step) The workers performing the manufacturing work wind the second coils 302a and 302b into the second coil holding grooves 352a and 352b, respectively, and place the second connecting wire 302c into the second connecting wire housing groove 362. As a result of this first process, a second Helmholtz coil 302 is formed in the deepest part of the bobbin 350.

[0050] (Second step) The worker winds the third coils 303a and 303b into the third coil holding grooves 353a and 353b, respectively, and places the third connecting wire 303c into the third connecting wire housing groove 363. In this second step, since the second connecting wire 302c is housed in the second connecting wire housing groove 362 in the first step, the third Helmholtz coil 303 is formed without interference with the second connecting wire 302c.

[0051] (Third step) The worker winds the first coils 301a and 301b into the first coil holding grooves 351a and 351b, respectively, and places the first connecting wire 301c inside the second coil holding grooves 352a and 352b or the third coil holding grooves 353a and 353b. In this third step, since the second connecting wire 302c is housed in the second connecting wire housing groove 362 in the first step and the third connecting wire 303c is housed in the third connecting wire housing groove 363 in the second step, the first Helmholtz coil 301 is formed without interference between the second connecting wire 302c and the third connecting wire 303c.

[0052] As explained above, the magnetization angle deviation measuring device 10 can measure the magnetization angle of a permanent magnet.

[0053] Although embodiments of the present invention have been described above, the present invention is not limited to the above-described forms, and any changes to conditions that do not depart from the gist of the invention are all within the scope of application. [Explanation of Symbols]

[0054] 10 Magnetization angle deviation measuring device 20 Base section 30 Detection unit 50 Sample holders 60 Pull-out section 70 Fluxmeter 202 Lower base plate 204 Upper base plate 206 positioning pins 210 Clamp 212 Lever 214 Rod 220 mounting bases 230 Positioning member 230a Insertion section 230b Protrusion 301 The first Helmholtz coil 301a, 301b First coil 301c First connection line 302 Second Helmholtz Coil 302a, 302b Second coil 302c Second connection line 303 The third Helmholtz coil 303a, 303b Third coil 303c Third connecting line 350 bobbins 351 First retaining groove 351a, 351b First coil retaining groove 352 Second retaining groove 352a, 352b Second coil retaining groove 353 Third retaining groove 353a, 353b Third coil retaining groove 362 Second connection wire housing groove 363 Third connecting wire housing groove 502 Indentation 504 Fixed plate 506 Flange section 601a Post 601b Guide 602 Holder support member 604 Motor 608 Belt H301 First insertion hole H302 Second insertion hole H303 Third insertion hole HC 3-axis Helmholtz coil M sample

Claims

1. A first Helmholtz coil for measuring magnetic flux in the direction of the first axis, A second Helmholtz coil for measuring the magnetic flux in the direction of a second axis intersecting the direction of the first axis, A third Helmholtz coil for measuring magnetic flux in the direction of the first axis and in the direction of the third axis intersecting the direction of the second axis, Each bobbin has a retaining groove formed around its entire outer circumference for holding the first to third Helmholtz coils, A magnetization angle deviation measuring device comprising: an extraction section for extracting a permanent magnet to be measured from the center of the first Helmholtz coil along the direction of the first axis.

2. The magnetization angle deviation measuring device according to claim 1, wherein the bobbin has first to third insertion holes that pass through the centers of the first to third Helmholtz coils, respectively.

3. The magnetization angle deviation measuring device according to claim 2, wherein the outer shape of the bobbin is a rectangular parallelepiped.

4. The magnetization angle deviation measuring device according to claim 3, wherein each pair of coils constituting the first to third Helmholtz coils is wound so that its outer shape is rectangular.

5. The retaining groove portion is a pair of coil retaining grooves that each hold one and the other of the pair of coils, The magnetization angle deviation measuring device according to claim 4, wherein the pair of coil holding grooves are formed in the same direction at a predetermined interval.

6. The magnetization angle deviation measuring device according to claim 4, wherein the retaining grooves are formed at predetermined intervals surrounding the first shaft and hold a pair of first coils constituting the first Helmholtz coil, a first coil retaining groove formed at predetermined intervals surrounding the second shaft and hold a pair of second coils constituting the second Helmholtz coil, and a third coil retaining groove formed at predetermined intervals surrounding the third shaft and hold a pair of third coils constituting the third Helmholtz coil.

7. The bobbin includes a second Helmholtz coil connecting wire housing groove that extends from one of the second coil holding grooves to the other second coil holding groove and houses connecting wires that extend from one of the second coils to the other second coil, The magnetization angle deviation measuring device according to claim 6, further comprising a third Helmholtz coil connection wire housing groove that extends from one of the third coil holding grooves to the other third coil holding groove and houses a connection wire extending from one of the third coils to the other third coil.

8. The system further comprises a sample holder that holds the object to be measured and is inserted into the first insertion hole, The magnetization angle deviation measuring device according to claim 7, wherein the withdrawal portion withdraws the sample holder from the first insertion hole.

9. The bobbin is further provided with a base portion for fixing the bobbin, The base portion has a protruding portion that fits into the first insertion hole, A positioning unit that contacts the bobbin and positions the rotational position of the first insertion hole around the central axis, The magnetization angle deviation measuring device according to claim 8, further comprising a pressing part that applies force to bring the bobbin into contact with the positioning part.

10. A first Helmholtz coil for measuring magnetic flux in the direction of a first axis, having a pair of first coils connected to each other via a first connecting wire, A second Helmholtz coil for measuring magnetic flux in the direction of the second axis intersecting the direction of the first axis, having a pair of second coils connected to each other via a second connecting wire, A third Helmholtz coil having a pair of third coils connected to each other via a third connecting wire, for measuring magnetic flux in the direction of the first axis and in the direction of the third axis intersecting the direction of the second axis, It comprises a bobbin formed in a cubic shape and holding the first to third Helmholtz coils, The bobbin is provided with a pair of first coil-holding grooves formed to surround the first shaft and to hold the first coil, A pair of second coil retaining grooves are formed to surround the second shaft and hold the second coil, A pair of third coil retaining grooves are formed to surround the third shaft and to hold the third coil, A second Helmholtz coil connecting wire housing groove extends from one of the second coil holding grooves to the other of the second coil holding grooves and houses the second connecting wire, A magnetic flux detector having a third Helmholtz coil connection wire housing groove that extends from one of the third coil holding grooves to the other third coil holding groove and houses the third connection wire.

11. A method for manufacturing a magnetic flux detector according to claim 10, The first step involves winding the second coil into the second coil holding groove and placing the second connecting wire into the second Helmholtz coil connecting wire housing groove, After performing the first step, the second step involves winding the third coil into the third coil holding groove and placing the third connecting wire into the third Helmholtz coil connecting wire housing groove, A method for manufacturing a magnetic flux detector, comprising: a third step of winding the first coil into the first coil holding groove after performing the second step.

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