Fluid component body with leak test passage

Abstract

The present invention provides a fluid component body having a leak test passage. [Solution] To test for leaks passing through each valve body seal of the manifold valve assembly 610, in an exemplary manner, the manifold assembly is installed in a fluid system under vacuum and connected to a leak detection device (e.g., a mass spectrometer), and a test fluid (e.g., a tracer gas such as helium or hydrogen) is sequentially supplied to each of the leak test ports 663a, 663b, and the leak detection device is used to measure the ingress of the test fluid into the valve cavities 612a, 612b that have passed through the body seal (e.g., due to discontinuities or contaminants in the bead section or outer seal surfaces 625a, 625b) to identify leaks in the body seal.

Description

Technical Field

[0001] Cross - reference to Related Applications This application claims priority and all benefits of U.S. Provisional Patent Application No. 62 / 951,527, filed on December 20, 2019, entitled Fluid Component Body with Leak Test Passage, the entire disclosure of which is incorporated herein by reference.

Background Art

[0002] Fluid systems often include a plurality of valves configured for mixing, switching, purging, and other such controls of one or more types of fluids, for example, for gas distribution used in the manufacture of semiconductor wafers. Such a fluid control system can be constructed by welding or otherwise connecting individual valves into a desired configuration, but such a configuration may be undesirable due to construction time and cost, potential leak points at numerous connections, the overall size of the assembly, and other such factors.

[0003] To address one or more of these problems, multiple valve manifolds are often used by providing a single body block machined to a desired flow path configuration with multiple valve assemblies installed at multiple points within a multiport manifold body block. However, the manifold body block itself can be expensive and difficult to machine, and the shape and orientation of the internal ports that can be provided may be limited. Additionally, the requirements for the polished surface finish of the flow paths of the manifold body can be difficult to meet when the flow paths are expanded and / or complex (not straight).

Summary of the Invention

[0004] In exemplary embodiments of the present disclosure, the manifold body includes at least a first valve body segment and a second valve body segment, each having an upper outer wall portion defining a valve cavity and a lower base portion defining one or more flow ports; an integrated leak test port; a first branch leak test passage extending radially outward from the outer sealing surface of the valve cavity from the integrated leak test port to the outer periphery of the valve cavity of the first valve body segment; and a second branch leak test passage extending radially outward from the outer sealing surface of the valve cavity from the integrated leak test port to the outer periphery of the valve cavity of the second valve body segment.

[0005] In another exemplary embodiment of the present disclosure, the valve body includes an upper outer wall portion defining a valve cavity and a lower base portion defining one or more flow ports, and a leak test passage formed in the upper outer wall portion of the valve body, wherein a first portion of the leak test passage extends axially through the upper outer wall portion to a leak test port exposed on the end face of the upper outer wall portion radially outward from the outer sealing surface of the valve cavity, and a second portion of the leak test passage extends laterally or radially through the lower end of the upper outer wall portion to the valve cavity and intersects with the outer periphery of the valve cavity.

[0006] In another exemplary embodiment of the present disclosure, the manifold assembly includes a manifold body having at least a first valve body segment and a second valve body segment, wherein the first valve subassembly is assembled with the first valve body segment and the second valve subassembly is assembled with the second valve body segment. Each of the first valve body segment and the second valve body segment includes: an upper outer wall portion defining a valve cavity and a lower base portion defining a central flow port and an offset flow port; an integrated leak test port; a first branch leak test passage extending radially outward from the outer sealing surface of the valve cavity from the integrated leak test port to the outer periphery of the valve cavity of the first valve body segment; and a second branch leak test passage extending radially outward from the outer sealing surface of the valve cavity from the integrated leak test port to the outer periphery of the valve cavity of the second valve body segment. Each of the first and second valve subassemblies includes a flexible diaphragm, an annular seat carrier which is received in the valve cavity and includes a lower sealing portion that seals against the concave surface around the central flow port and an upper sealing portion that seals against the diaphragm when the diaphragm is moved to the closed position, and a threaded bonnet nut which is installed in the valve cavity to clamp the seat carrier against the outer sealing surface of the valve cavity to form a main seal.

[0007] In another exemplary embodiment of the present disclosure, the valve assembly includes a valve body and a valve subassembly. The valve body includes an upper outer wall portion defining a valve cavity and a lower base portion defining one or more flow ports, and a leak test passage formed in the upper outer wall portion of the valve body, radially outward from the outer sealing surface of the valve cavity, a first portion of the leak test passage extends axially through the upper outer wall portion to a leak test port exposed on the end face of the upper outer wall portion, and a second portion of the leak test passage extends laterally or radially through the lower end of the upper outer wall portion to the valve cavity and intersects with the outer periphery of the valve cavity. The valve subassembly includes a flexible diaphragm, an annular seat carrier which is received in the valve cavity and includes a lower sealing portion that seals against the concave surface around the central flow port and an upper sealing portion that seals against the diaphragm when the diaphragm is moved to the closed position, and a threaded bonnet nut installed in the valve cavity to clamp the seat carrier against the outer sealing surface of the valve cavity to form a main seal.

[0008] In another exemplary embodiment of the present disclosure, a method for leak testing a first valve and a second valve installed in a first valve cavity and a second valve cavity of a multi-valve manifold body is considered. In the exemplary method, the manifold assembly is provided in a fluid system under vacuum, and the manifold assembly is connected to a leak detection device. A test fluid is supplied to an integrated leak test port of the manifold body, so that the test fluid is delivered to the outer periphery of the first valve cavity and the second valve cavity through a first branch leak test passage and a second branch leak test passage. The leak detection device is used to measure the ingress of the test fluid through the first body seal and the second body seal between the first valve and the first valve cavity and between the second valve and the second valve cavity. In response to the detection of leaks passing through the first and second body seals, test fluid is sequentially supplied to the first and second valve leak test ports, so that the test fluid is sequentially delivered to the outer periphery of the first and second valve cavities through the first and second valve leak test passages. A leak detection device is used to measure the ingress of test fluid that has passed through the first body seal and the ingress of test fluid that has passed through the second body seal.

[0009] Further advantages and benefits will become apparent to those skilled in the art who have examined the following specification and the attached claims together with the attached drawings. [Brief explanation of the drawing]

[0010] [Figure 1] This is a perspective view of an exemplary diaphragm valve manifold assembly. [Figure 1A] Figure 1 is a perspective view of the manifold block body of the manifold assembly. [Figure 2] This is a side cross-sectional view of the manifold assembly in Figure 1, as seen from line 2-2. [Figure 3]This is a cross-sectional view of a valve assembly including a bonnet nut with a leak test passage. [Figure 4A] Figure 3 is a top perspective view of the bonnet nut of the valve assembly. [Figure 4B] Figure 4A is a perspective view of the lower part of the bonnet nut. [Figure 5] This is a cross-sectional view of a valve assembly including a body with a leak test passage. [Figure 6] Figure 5 is a perspective view of the main body of the valve assembly. [Figure 7] This is a top perspective view of a two-valve manifold assembly having a manifold body with an integrated leak test port, according to an exemplary embodiment of the present disclosure. [Figure 8] Figure 7 is another top perspective view of the manifold assembly. [Figure 9] Figure 7 is a front cross-sectional view of the manifold assembly. [Figure 10] Figure 7 is a top perspective view of the manifold body of the manifold assembly. [Figure 11] Figure 7 is a plan view of the manifold body of the manifold assembly, partially shown to illustrate further features of the manifold body. [Figure 12] This is a schematic diagram of a multi-valve manifold assembly that includes an integrated leak test port for collectively testing leaks that have passed through the body seals of multiple valves in the manifold assembly, and individual leak test ports for independently testing leaks that have passed through the body seals of each valve in the manifold assembly. [Modes for carrying out the invention]

[0011] The embodiments for carrying out the invention are merely illustrative and not intended to limit the claims in any way. In fact, the claimed invention is broader than and not limited by the illustrative embodiments, and the terms used in the claims have their full, ordinary meanings. For example, the specific exemplary embodiments of this application describe multiple diaphragm valve manifolds, but one or more of the features described herein may be applied additionally or alternatively to other types of multiple valve manifolds (e.g., bellows valves, needle valves, etc.), single valve assemblies, and other fluid system components (e.g., pressure regulators, filters, etc.). Additionally, many of the shapes and configurations of the manifold body features described herein are such that their production is facilitated by additive manufacturing such as 3D printing, but other manufacturing methods such as laminated plate bodies, machining, welding, brazing, and casting (e.g., investment casting, sand casting, lost wax casting) may be used independently or in combination to manufacture body components having one or more of the features described herein.

[0012] Various inventive aspects, concepts, and features of the invention may be described and illustrated herein to be embodied in combination in exemplary embodiments, but these various aspects, concepts, and features may be used independently or in various combinations and subcombinations in numerous alternative embodiments. Unless expressly excluded herein, all such combinations and subcombinations are intended to be within the scope of the invention. Furthermore, various alternative embodiments relating to various aspects, concepts, and features of the invention—for example, alternative materials, structures, configurations, methods, circuits, devices and components, software, hardware, control circuits, shapes, fit, and functions—may be described herein, but such descriptions are not intended to be a complete or comprehensive list of available alternative embodiments, whether currently known or to be developed later. Those skilled in the art will readily be able to use one or more inventive aspects, concepts, or features in additional embodiments, and will use such embodiments within the scope of the invention even if they are not expressly disclosed herein. In addition, even if certain features, concepts, or aspects of the invention are described herein as preferred configurations or methods, such descriptions are not intended to imply that such features are necessary or essential unless otherwise specified. Furthermore, exemplary or representative values ​​and ranges may be included to aid in understanding this disclosure, but such values ​​and ranges are not intended to be constrained and are intended to be critical values ​​or ranges only where specified. Parameters identified as “approximately” or “about” a given value are intended to include the given value, values ​​within 5% of the given value, and values ​​within 10% of the given value, unless otherwise specified. Furthermore, it will be understood that the drawings attached to this application may but are not required to be to scale, and therefore may be understood as teaching various ratios and proportions evident in the drawings.Furthermore, various aspects, features, and concepts may be expressly identified herein as inventive or forming parts of the invention; however, such identification is not intended to be exclusionary. Rather, there may be inventive aspects, concepts, and features that are not expressly identified as such, i.e., as part of a specific invention, but are described entirely herein, and the invention is instead described in the appended claims. The description of an exemplary method or process is not intended to limit the inclusion of every step as necessary in every case, nor is the order in which the steps are presented intended or required unless expressly stated.

[0013] In this disclosure, the term “vertical” is used to describe a direction substantially perpendicular to the base (or bottom) surface of the fluid component body, and the term “horizontal” is used to describe a direction substantially parallel to the base surface of the fluid component body. It will be understood that the fluid component body may be installed or positioned in any suitable orientation (for example, with the base surface of the fluid component body extending substantially vertically or at some other angle).

[0014] Figure 1 shows an exemplary conventional 3-valve manifold 10 having a manifold body block 20 and diaphragm valves 30 installed in corresponding valve cavities 21 machined into the body block 20. Each valve cavity 21 includes a concave or trepan 22 and a bore wall 23 (Figure 1A), with at least a first port 24 and a second port 26 provided in the concave 22.

[0015] Referring to the cross-sectional view in Figure 2, each valve 30 includes a valve subassembly 40 and an actuator 50. Each exemplary valve subassembly 40 includes a flexible diaphragm 41 and an annular seat carrier 42 which is received in the valve cavity 21 and includes a lower sealing portion 44 that seals against the concave surface 22 around the first port 24 and an upper sealing portion 45 that seals against the diaphragm 41 when the diaphragm is moved to the closed position. A threaded retainer or bonnet nut 46 is installed in the valve cavity 21, and the seat carrier 42 and diaphragm 41 are clamped against the concave surface 22 with the outer male thread of the retainer 46 engaging with the inner female thread of the bore wall 23. The male threaded bonnet portion 51 of the actuator 50 is screwed into the female threaded portion of the retainer 46, connecting the actuator 50 to the valve sub-assembly 40 and positioning the actuator stem 52 to operably engage with the diaphragm 41 (for example, using an intermediate button 54). A similar actuated valve assembly is shown and described in the shared U.S. Patent No. 9,863,542 ("'542 Patent"), the full disclosure of which is incorporated herein by reference.

[0016] According to aspects of this disclosure, a multi-valve manifold body may be formed as a plurality of separate valve body segments and conduit segments incorporated into a single-piece monolithic configuration, with reduced size, weight, and material usage compared to the corresponding manifold body block. An exemplary multi-valve manifold body including the incorporated valve body segments and conduit segments is shown and described in concurrently pending U.S. Patent Application Publication No. 2020 / 0003318 ("Application 318"), the entire disclosure of which is incorporated herein by reference.

[0017] For example, many valves such as the valve configurations shown in FIG. 2 of the '542 patent and the '318 application incorporated by reference above and herein include a body seal 43 (e.g., gasket, packing, annular seal bead) that provides a leak - stopping seal between an internal valve cavity and the external atmosphere around the valve. In the embodiment of FIG. 2, the seat carrier 42 is provided with a lower circumferential bead 43 that seals against the outer periphery of the valve cavity 21 when the screw - type retainer 46 is tightened against the seat carrier 42. To detect a leak passing through the body seal 43, a leak - test passage extending from an external opening or leak - test port to the valve cavity can be provided in the valve at a position radially outward of the body seal. To detect a leak, a test fluid (e.g., a tracer gas such as helium or hydrogen) can be supplied to the leak - test port, the valve can be installed in a fluid system under vacuum, and the valve can be connected to a leak - detection device (e.g., a mass spectrometer) configured to detect the intrusion of the test fluid into the valve cavity through the body seal. Alternatively, the valve can be installed in a fluid system under positive pressure, and the leak test can be performed at a leak - detection port (e.g., using a sensor or a bubbling leak - detection fluid) to detect a leak of the positive - pressure system fluid passing through the body seal.

[0018] Many different types of leak test passages can be provided. As an example, as shown in Figure 3, a valve 400 (similar to valve 10 in Figure 2) having a bonnet nut 446 that is screw-mounted to a valve cavity 412 and clamps the outer bead portion of a seat carrier 442 or the body seal 443 against the outer sealing surface 425 of the valve cavity 412 is provided with an axially extending outer groove 447 (see Figure 4) of the bonnet nut 446 that defines a leak test passage extending radially outward from the outer sealing surface 425 to the outer circumference of the valve cavity 412. The upper or outer end of the groove 447 defines a leak test port 448, allowing a test fluid (e.g., a tracer gas such as helium or hydrogen) supplied to the leak test port 448 to flow to the outer circumference of the valve cavity 412. When the valve 400 is installed in a fluid system under vacuum and connected to a leak detection device (e.g., a mass spectrometer), the ingress of test fluid into the valve cavity through the body seal 443 (e.g., due to discontinuities or contaminants in the bead portion 443 or the outer seal surface 425) can be detected, thereby identifying a leak in the body seal.

[0019] The bonnet nut 446, which is shown in further detail in FIGS. 4A and 4B, may be provided with a plurality of outer peripheral grooves 447 that facilitate the convenient positioning of leak test ports regardless of the rotational orientation of the bonnet nut 446 relative to the valve body 410. Additionally, the bonnet nut 446 may include one or more test holes or axially extending internal test passages 449 that extend through the bonnet nut 446 at a radially inner side of the body seal and above the diaphragm 441 to intersect the valve cavity for testing for leaks (e.g., due to a crack in the diaphragm) through the diaphragm 441, for example, during the same vacuum leak test procedure as described above. The circumferential alignment of the grooves 447 and the holes 449 may facilitate a simultaneous leak test of the diaphragm 441 and the body seal 443. In another embodiment, instead of the test holes 449, the bonnet nut 446 may be provided with one or more radially extending test passages that allow a test fluid to flow between the outer peripheral portion of the valve cavity 412 and a portion of the valve cavity at a radially inner side of the body seal and above the diaphragm 441. Although many different types of radially extending test passages may be utilized, in an exemplary embodiment, as shown partially in FIG. 3, one or more notches 439 that define the radially extending test passages may be provided in the lower diaphragm engaging beads 435 of the bonnet nut 446 (see FIG. 4B).

[0020] According to an aspect of the present disclosure, in another exemplary embodiment, a valve body may be provided with an integrated leak test passage that extends from an outer surface of the valve body to an outer peripheral portion of the valve cavity at a radially outer side of the body seal surface. Such a configuration may provide a consistent arrangement of leak test ports on the valve (e.g., as compared to leak test ports defined by a bonnet nut).

[0021] While many different leak test passage configurations can be incorporated into valve bodies, in one exemplary embodiment, the leak test passage may be located in the upper outer wall portion of the valve body defining the valve cavity. In such a configuration, as shown in Figure 5, the valve 500 includes a valve body 510 having an upper outer wall portion 511 defining the valve cavity 512 and a lower base portion 514 defining the central flow port 516 and the offset flow port 517 (see Figure 6). The leak test passage 560 is formed in the upper outer wall portion 511 of the valve body 510, radially outward from the outer sealing surface 525 of the valve cavity 512. A first portion 561 of the leak test passage extends vertically or axially through the upper outer wall portion 511 to a leak test port 563 exposed on the end face 513 of the upper outer wall portion, while a second portion 562 of the leak test passage 560 extends laterally or radially through the base or lower part of the upper outer wall portion to the valve cavity, intersecting the outer periphery of the valve cavity 512.

[0022] Similar to the valve 30 in Figure 2, the valve 500 in Figure 5 includes a valve subassembly 540 and an actuator 550. An exemplary valve subassembly 540 includes a flexible diaphragm 541 and an annular seat carrier 542 which is received in the valve cavity 512 and includes a lower sealing portion 544 that seals against the concave surface 528 around the central flow port 516 and an upper sealing portion 545 that seals against the diaphragm 541 when the diaphragm is moved to the closed position. A threaded retainer or bonnet nut 546 is installed in the valve cavity 512 and clamps the outer bead portion or body seal 543 of the seat carrier 542 against the outer sealing surface 525 of the valve cavity 512, with the outer male thread portion of the retainer 546 engaged with the inner female thread portion of the upper outer wall portion 511. The male threaded bonnet portion 551 of the actuator 550 is screwed into the female threaded portion of the bonnet nut 546, thereby connecting the actuator 550 to the valve sub-assembly 540 and positioning the actuator stem 552 (for example, using the intermediate button 554) to operably engage with the diaphragm 541.

[0023] When the valve 500 is installed in a fluid system under vacuum and connected to a leak detection device (e.g., a mass spectrometer), and a test fluid (e.g., a tracer gas such as helium or hydrogen) is supplied to the leak test port 563, the ingress of the test fluid into the valve cavity (e.g., due to a discontinuity or contaminant in the bead portion 543 or the outer seal surface 525) through the body seal 543 can be detected, thereby identifying a leak in the body seal. Additionally, the bonnet nut may be provided with one or more internal or radial test passages (as shown in the embodiment of Figure 3) for simultaneously testing leaks through the diaphragm (e.g., due to cracking of the diaphragm).

[0024] The incorporated leak test passages may be provided in the valve body of a single valve assembly or in multiple valve body segments of a valve manifold, for example, in the multi-valve manifold body of the '542 patent and '318 application' cited above. Figures 7–9 illustrate an exemplary 2-valve manifold assembly 600 having a manifold body 610 (see Figures 10–11) which includes first valve body segments 610a and second valve body segments 610b assembled with corresponding first valves 630a and second valves 630b, each including valve subassemblies 640a, 640b and actuators 650a, 650b. As shown, the valve subassemblies 640a, 640b may be similar to the valve subassembly 540 in Figure 5, as further described above, with their components numbered accordingly.

[0025] Each of the first valve body segment 610a and the second valve body segment 610b has upper outer wall portions 611a, 611b defining valve cavities 612a, 612b and lower base portions 614a, 614b defining central flow ports 616a, 616b and offset flow ports 617a, 617b, 618b. The adjacent outer wall portions 611a, 611b of adjacent valve body segments 610a, 610b may be joined or fused together, for example, to facilitate manufacturing, reduce the overall size of the manifold body 610, and / or to strengthen or reinforce these walls. Open mounting bosses 601 may be provided, for example, fused with adjacent portions of the upper outer wall of one of the first and second valve segments, to facilitate mounting of the manifold within a system (e.g., to a plate or other such base component of the fluid system).

[0026] While many different flow porting configurations can be used, in the exemplary embodiment, the first valve body segment 610a and the second valve body segment 610b are connected to the first flow conduit segment 620a, the second flow conduit segment 620b, the third flow conduit segment 620c, and the fourth flow conduit segment 620d, as shown in Figure 11. The first flow conduit segment 620a includes a first flow passage 621a extending between the first end port 623a and the central flow port 616a of the first valve body segment 610a. The second flow conduit segment 620b includes a second flow passage 621b extending between the second end port 623b and the central flow port 616b of the second valve body segment 610b. The third flow conduit segment 620c includes a third flow passage 621c extending between the third end port 623c and the second offset port 618b of the second valve body segment 610b. The fourth flow conduit segment 620d includes a fourth flow passage 621d extending between the offset port 617a of the first valve body segment 610a and the first offset port 617b of the second valve body segment 610b.

[0027] While many different types of end ports may be used, in the illustrated embodiment, the end ports 623a, 623b, 623c include tubular portions 622a, 622b, 622c that extend upward or vertically away from the outer wall portions 611a, 611b of the valve body segment to modular mounting surfaces 627a, 627b, 627c, which include seal counterbores 631a, 631b, 631c and fastener bores 632a, 632b, 632c for accommodating the modular C-seal connection.

[0028] The bases 614a, 614b of the valve body segments 610a, 610b may be tapered (for example, having a smaller outer diameter than the outer diameter of the outer walls 611a, 611b), for example, to reduce material utilization and / or to provide spacing to one or more of the flow conduit segments 620a, 620b, 620c, 620d, so that the horizontal flow channels 624a, 624b, 624c of the flow conduit segments are at least partially aligned laterally with at least one valve cavity of the valve body segment.

[0029] Leak test passages 660a, 660b are formed in the upper outer wall portions 611a, 611b of each valve body segment 610a, 610b, and radially outward from the outer sealing surfaces 625a, 625b, the first portions 661a, 661b of the leak test passages extend vertically or axially through the upper outer wall portions 611a, 611b to leak test ports 663a, 663b exposed on the end faces 613a, 613 of the upper outer wall portions, and the second portions 662a, 662b of the leak test passages 660a, 660b extend laterally or radially through the base or lower end of the upper outer wall portions to the valve cavity 612a, 612b and intersect with the outer periphery of the valve cavity.

[0030] To test for leaks through each valve body seal of a manifold valve assembly, in an exemplary manner, the manifold assembly 600 is installed in a fluid system under vacuum and connected to a leak detection device (e.g., a mass spectrometer), and a test fluid (e.g., a tracer gas such as helium or hydrogen) is sequentially supplied to each of the leak test ports 663a, 663b, and the leak detection device is used to measure the ingress of the test fluid into the valve cavity through the body seals 643a, 643b (e.g., due to discontinuities or contaminants in the bead sections 643a, 643b or the outer seal surfaces 625a, 625b) to identify leaks in the body seals. Additionally, the bonnet nuts 646a, 646b may be provided with one or more internal or radial test passages (as shown in the embodiment of Figure 3) for simultaneously testing for leaks through the diaphragm (e.g., due to cracks in the diaphragm).

[0031] If leak tests are performed sequentially on each valve body seal of a multi-valve manifold assembly, the execution of these tests can be relatively time-consuming. According to another aspect of the present disclosure, the multi-valve manifold body may be provided with an integrated leak test port having branched leak test passages that intersect with multiple valve cavities of the manifold body for simultaneously testing the valve body seals of two or more manifold valves. In such a configuration, by adding a test fluid to the integrated leak test port, confirmation of a leak passing through at least one of the body seals of multiple valve body segments can be obtained. During such confirmation, individual leak test ports and passages (e.g., in the bonnet nuts and / or manifold body, as described and shown in the embodiments of Figures 3-5) may be used to identify which of the valve body segments is showing a body seal leak.

[0032] Figure 12 schematically shows a multi-valve manifold assembly 700, which includes an integrated leak test port 773 connected to the valve cavities 712a, 712b, 712c of multiple valve body segments 710a, 710b, 710c by branched leak test passages 770a, 770b, 770c for collectively testing leaks that have passed through the body seals 743a, 743b, 743c of multiple valves 730a, 730b, 730c of the manifold assembly, and individual leak test ports 763a, 763b, 763c connected to the valve cavities by leak test passages 760a, 760b, 760c for independently testing leaks that have passed through the body seals of each valve of the manifold assembly. The manifold assembly 700 in Figure 12 includes three valve assemblies, but in other embodiments, manifold assemblies having a different number of valves (e.g., two or four or more) may be provided with integrated leak test ports and individual leak test ports. Additionally, the integrated leak test ports may be connected to fewer valves than the total number of valves in the multi-valve manifold assembly. For example, the manifold assembly may include a first integrated leak test port for testing leaks that have passed through the body seals of a first group of valves in the manifold assembly, and a second integrated leak test port for testing leaks that have passed through the body seals of a second group of valves in the manifold assembly.

[0033] In an exemplary method for leak testing a manifold assembly 700, the manifold assembly is installed in a fluid system S under vacuum and connected to a leak detection device D (e.g., a mass spectrometer). A test fluid (e.g., a tracer gas such as helium or hydrogen) is supplied to an integrated leak test port 773 and delivered through branched leak test passages 770a, 770b, and 770c to the outer periphery of valve cavities 712a, 712b, and 712c. The leak detection device D measures the ingress of the test fluid into the valve cavities through the body seals 743a, 743b, and 743c to identify leaks in the body seals. If the leak detection device D does not detect a leak (e.g., enough detectable helium to indicate a leak), no further leak testing is required. If a leak is detected by the leak detection device, test fluid is sequentially supplied to each of the individual leak test ports 763a, 763b, and 763c. The leak detection device D measures the ingress of the test fluid that has passed through each body seal 743a, 743b, and 743c to determine which valve body seal is leaking.

[0034] In the embodiments shown in Figures 7-11, the manifold body 610 includes an integrated leak test port 673 connected to the valve cavities 612a, 612b of the valve body segments 610a, 610b by leak test passages 670a, 670b branching from the leak test port, with the first end of each leak test passage intersecting the leak test port, and the second end of each leak test passage intersecting the outer periphery of the valve cavities 612a, 612b radially outward from the outer sealing surfaces 625a, 625b. In the illustrated embodiments, the leak test port 673 and the leak test passages 670a, 660b are defined by vent conduit segments 674, 671a, 671b integrally formed with the manifold body 610. In other embodiments (not shown), leak test ports and leak test passages may be defined by conduits attached to or assembled together with the manifold body (e.g., by welding, brazing, or fitting connections), or by passages formed in the manifold block body (e.g., by drilling, machining, etc.). As shown, the leak test port 673 is centrally located between two valve body segments 610a and 610b to facilitate, for example, uniform flow of a supply test fluid (e.g., helium) to the two leak test passages 670a and 670b. The internal bore of the leak test port 673 may be contoured (e.g., conical) to receive the test fluid supply pipe in close proximity, for example, to more efficiently transport the test fluid to the leak test passages.

[0035] In an exemplary method for leak testing the manifold assembly 600, the manifold assembly is installed in a fluid system under vacuum and connected to a leak detection device (e.g., a mass spectrometer). A test fluid (e.g., a tracer gas such as helium or hydrogen) is supplied to an integrated leak test port 673 and delivered through branched leak test passages 670a, 670b to the outer periphery of the valve cavities 612a, 612b. The leak detection device is used to measure the ingress of the test fluid into the valve cavity through the body seal (e.g., due to discontinuities or contaminants in the bead sections 643a, 643b or the outer seal surfaces 625a, 625b) to identify leaks in the body seal. Additionally, the bonnet nuts 646a, 646b may be provided with one or more internal or radial test passages (as shown in the embodiment of Figure 3) for simultaneously testing leaks through the diaphragm (e.g., due to cracks in the diaphragm).

[0036] If the leak detection device does not detect a leak (e.g., sufficient helium to indicate a leak), no further leak testing is necessary. If the leak detection device detects a leak, the test fluid is sequentially supplied to each of the individual leak test ports 663a and 663b, and the leak detection device is used to measure the ingress of the test fluid through each body seal (and optionally through each diaphragm) to determine which valve body seal (and / or diaphragm) is leaking.

[0037] Due to the overall shape and internal flow path configuration of fluid component bodies (e.g., manifold bodies), it may be difficult to manufacture the bodies using conventional machining, molding, or casting techniques. According to aspects of this disclosure, fluid component bodies, such as the manifold bodies of the '542 patent and '318 application' invoked above, and manifold bodies expressly described and shown herein, may be manufactured using additive manufacturing to produce a monolithic body having separate but partially coupled or fused valve body segments and conduit segments. Examples of additive manufacturing techniques that may be used include, for example, laser powder bed fusion (direct metal laser sintering i. "DMLS", selective laser sintering / melting i. "SLS / SLM", or additive manufacturing i. "LAM"), electron beam powder bed fusion (electron beam melting i. "EBM"), ultrasonic additive manufacturing ("UAM"), or directed energy deposition (laser powder deposition i. "LPD", laser wire deposition i. "LWD", laser direct deposition i. "LENS", electron beam wire deposition). By designing the manifold body as a single monolithic component, assembly costs can be reduced, component wear can be minimized, adverse effects from thermal cycling can be mitigated, corrosion behavior (galvanic effect, crevice, stress corrosion cracking) can be improved, and lead times to manufacturing can be shortened. Furthermore, manufacturing using additive manufacturing can reduce the amount of raw materials used, and the size and weight of the finished body can be reduced.

[0038] The inventive aspects have been described with reference to exemplary embodiments. Those who read and understand this specification will be able to conceive of modifications and variations. All such modifications and variations are intended to be included, insofar as they fall within the scope of the appended claims or their equivalents.

Claims

1. The valve body, An upper outer wall portion defining a valve cavity for receiving a valve subassembly, and a lower base portion defining one or more first and second flow ports, A leak test passage formed in the upper outer wall of the valve body, having a first portion that extends axially through the upper outer wall to a leak test port exposed on the end face of the upper outer wall, radially outward from the annular outer sealing surface of the valve cavity, and a second portion that extends laterally or radially through the lower end of the upper outer wall to the valve cavity and intersects with the outer circumference of the valve cavity, wherein the annular outer sealing surface surrounds the first and second flow ports, and is configured to seal the outer body seal of the seat carrier when the seat carrier is installed inside the valve body, A valve body equipped with the above features.

2. The valve body according to claim 1, further comprising at least one flow pipeline segment extending from one of the one or more flow ports to an end port.

3. The valve body according to claim 2, wherein the at least one flow pipeline segment includes a vertically extending portion that extends to the end port.

4. The valve body according to claim 3, wherein the vertically extending portion defines a tubular portion that is separated from the rest of the valve body.

5. The valve body according to any one of claims 2 to 4, wherein the end port includes a modular mounting surface having a seal counterbore and a fastener bore for accommodating a modular C-seal connection.

6. The valve body according to any one of claims 2 to 5, wherein the at least one flow channel segment includes a horizontally extending flow channel that is at least partially aligned laterally with the valve cavity.

7. The valve body according to any one of claims 1 to 6, wherein the lower base of at least one of the first valve body segment and the second valve body segment has an outer diameter smaller than the outer diameter of its corresponding upper outer wall portion.

8. The valve body according to any one of claims 1 to 7, further comprising at least one open mounting boss fused with an adjacent portion of the upper outer wall.

9. The valve body according to any one of claims 1 to 8, wherein the upper outer wall portion and the lower base portion form a first valve body segment, and the valve body further comprises a second valve body segment including a second upper outer wall portion defining a second valve cavity and a second lower base portion defining one or more flow ports.

10. The valve body according to any one of claims 1 to 9, wherein the valve body is a monolithic component.

11. The valve body according to any one of claims 1 to 10, wherein at least a portion of the valve body is produced using additive manufacturing technology.

12. A valve assembly, A valve body comprising an upper outer wall portion defining a valve cavity and a lower base portion defining a central flow port and an offset flow port, and a leak test passage formed in the upper outer wall portion of the valve body, the leak test passage having a first portion extending axially through the upper outer wall portion to the leak test port exposed on the end face of the upper outer wall portion radially outward from the outer sealing surface of the valve cavity and a second portion extending laterally or radially through the lower end of the upper outer wall portion to the valve cavity and intersecting the outer circumference of the valve cavity, wherein the outer sealing surface surrounds the central flow port and the offset flow port, A valve subassembly to be received in the valve cavity, wherein the valve subassembly is A flexible diaphragm, An annular seat carrier including a lower sealing portion that is received by the valve cavity and seals against the concave surface around the central flow port, and an upper sealing portion that seals against the diaphragm when the diaphragm is moved to the closed position, A screw-type bonnet nut is installed in the valve cavity so as to clamp the outer body seal of the seat carrier to the outer sealing surface of the valve cavity to form a body seal, A valve sub-assembly comprising, A valve assembly comprising the above features.

13. The valve assembly according to claim 12, wherein the valve body further comprises at least one flow conduit segment extending from one of the one or more flow ports to an end port.

14. The valve assembly according to claim 13, wherein the at least one flow pipeline segment includes a vertical extension that extends to the end port.

15. The valve assembly according to claim 14, wherein the vertically extending portion defines a tubular portion that is spaced apart from the rest of the valve body.

16. The valve assembly according to any one of claims 13 to 15, wherein the end port includes a modular mounting surface having a seal counterbore and a fastener bore for accommodating a modular C-seal connection.

17. The valve assembly according to any one of claims 13 to 16, wherein the at least one flow channel segment includes a horizontally extending flow channel that is at least partially aligned laterally with the valve cavity.

18. The valve assembly according to any one of claims 12 to 17, wherein the lower base of at least one of the first valve body segment and the second valve body segment has an outer diameter smaller than the outer diameter of its corresponding upper outer wall portion.

19. The valve assembly according to any one of claims 12 to 18, further comprising at least one open mounting boss fused with an adjacent portion of the upper outer wall.

20. The valve assembly according to any one of claims 12 to 19, wherein the upper outer wall portion and the lower base portion form a first valve body segment, and the valve body further comprises a second valve body segment including a second upper outer wall portion defining a second valve cavity and a second lower base portion defining one or more flow ports.

21. The valve assembly according to any one of claims 12 to 20, wherein the valve body is a monolithic component.

22. The valve assembly according to any one of claims 12 to 21, wherein at least a portion of the valve body is produced using additive manufacturing technology.

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