Information management device, water treatment system, information management method and program

Abstract

To facilitate the management of the products manufactured in water treatment systems. [Solution] The system includes a division unit 120 that divides treated water into predetermined units, a data acquisition unit 130 that acquires a plurality of management data, which are at least one of the operating status data of the water treatment device and measurement data in the water treatment device, in association with time data, a linking unit 140 that links the management data, which are associated with time data included in a time period calculated based on the treatment time of the treated water in the water treatment device, to the units of treated water divided by the division unit 120 as a series of data, and an assignment unit 150 that assigns identification information to each series of data linked by the linking unit 140.

Description

[Technical Field]

[0001] This invention relates to an information management device, a water treatment system, an information management method, and a program. [Background technology]

[0002] Generally, one method of managing products involves assigning an identification number (e.g., lot number) to each raw material or product, and using that identification number to manage the raw materials and products. A system has been disclosed that calculates the amount of liquid raw material per lot in the liquid raw material transferred to the next process based on the amount of liquid raw material per lot and detection signals related to the liquid raw material transferred from the storage tank to the next process (see, for example, Patent Document 1). [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2000-185800 [Overview of the project] [Problems that the invention aims to solve]

[0004] In water treatment systems that produce ultrapure water, there is a problem in that it is difficult to manage the products being manufactured simply by assigning lot numbers, because residence time and delay time occur within the plant from the raw water to the production of ultrapure water.

[0005] The object of the present invention is to provide an information management device, a water treatment system, an information management method, and a program that can easily manage the target of production in a water treatment system. [Means for solving the problem]

[0006] The information management device of the present invention is A dividing unit that divides the treated water into predetermined units, A data acquisition unit acquires multiple management data, which are at least one of the operating status data of the water treatment device and measurement data from the water treatment device, in association with time data. The division unit links the management data, which is associated with the time data included in the time period calculated based on the treatment time of the treated water in the water treatment device, to the divided unit of treated water as a series of data. The aforementioned linking unit has an assigning unit that assigns identification information to each set of linked data.

[0007] The water treatment system of the present invention is It has a water treatment device and an information management device. The aforementioned information management device is A dividing unit that divides the treated water into predetermined units, A data acquisition unit acquires multiple management data, which are at least one of the operating status data of the water treatment device and measurement data from the water treatment device, in association with time data. The division unit links the management data, which is associated with the time data included in the time period calculated based on the treatment time of the treated water in the water treatment device, to the divided unit of treated water as a series of data. The aforementioned linking unit has an assigning unit that assigns identification information to each set of linked data.

[0008] The information management method of the present invention is A process that divides treated water into predetermined units, A process for acquiring multiple management data, which are at least one of the operating status data of the water treatment device and measurement data from the water treatment device, in association with time data, The process involves linking the management data, which is associated with the time data included in the time period calculated based on the treatment time of the treated water in the water treatment apparatus, to each of the divided units of treated water as a series of data. The process involves assigning identification information to each of the linked sets of data.

[0009] The program of the present invention, Cause a computer to perform a procedure for dividing treated water into predetermined units, perform a procedure for acquiring a plurality of management data, which is at least one of the operation state data of the water treatment apparatus and the measurement data in the water treatment apparatus, in association with time data, perform a procedure for associating, as a series of data, the management data associated with the time data included in the time zone calculated based on the treatment time of the treated water in the water treatment apparatus with respect to the divided unit treated water, and perform a procedure for assigning identification information to each of the associated series of data.

Advantages of the Invention

[0010] In the present invention, it is possible to easily manage the production target in the water treatment system.

Brief Description of the Drawings

[0011] [Figure 1] The figure which shows 1st Embodiment of the water treatment system of this invention. [Figure 2] The figure which shows an example of the component which the information management apparatus shown in FIG. 1 comprises. [Figure 3] The figure for demonstrating an example of the process which the association part shown in FIG. 2 performs. [Figure 4] The figure for demonstrating an example of the process which the association part and the assignment part shown in FIG. 2 perform. [Figure 5] The flowchart for demonstrating an example of the information management method in the information management apparatus shown in FIG. 1. [Figure 6] The figure which shows 2nd Embodiment of the water treatment system of this invention. [Figure 7] The figure which shows an example of the component which the information management apparatus shown in FIG. 6 comprises. [Figure 8] The flowchart for demonstrating an example of the information management method in the information management apparatus shown in FIG. 6. [Figure 9] The figure which shows 3rd Embodiment of the water treatment system of this invention. [Figure 10] This figure shows an example of the components of the information management device shown in Figure 9. [Figure 11] Figure 9 is a flowchart illustrating an example of an information management method in the information management device shown. [Figure 12] This figure shows a fourth embodiment of the water treatment system of the present invention. [Figure 13] This figure shows an example of the components of the information management device shown in Figure 12. [Figure 14A] This figure shows a first example of the display unit shown in Figure 13. [Figure 14B] This figure shows a second example of the display unit shown in Figure 13. [Figure 14C] This figure shows a third example of the display unit shown in Figure 13. [Figure 14D] This figure shows a fourth example of the display unit shown in Figure 13. [Figure 14E] This figure shows a fifth example of the display unit shown in Figure 13. [Figure 15] Figure 12 is a flowchart illustrating an example of an information management method in the information management device shown. [Figure 16] This figure shows a fifth embodiment of the water treatment system of the present invention. [Figure 17] This figure shows an example of the components of the information management device shown in Figure 16. [Figure 18] Figure 16 is a flowchart illustrating an example of an information management method in the information management device shown. [Modes for carrying out the invention]

[0012] Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment)

[0013] Figure 1 shows a first embodiment of the water treatment system of the present invention. As shown in Figure 1, the water treatment system in this embodiment comprises a pretreatment system 10, a primary pure water production system 20, a subsystem 30, a flow meter 40, and an information management device 100. The pretreatment system 10, the primary pure water production system 20, and the subsystem 30 are connected in series in this order in the flow direction of the water to be treated, which is tap water produced at a water treatment plant or recycled water recycled at a recycled water plant. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are each connected to the information management device 100 so as to be able to send and receive management data and time data or data indicating the cumulative flow rate value, which will be described later. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are each connected to the information management device 100 via wireless or wired connections. Furthermore, the pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 may be directly connected to each other, or they may be connected via a communication network.

[0014] The pretreatment system 10 is equipped with water treatment equipment such as a raw water tank, a filter, and a filtered water tank. The pretreatment system 10 transmits operating status data, which indicates the operating status of each water treatment equipment, and measurement data, which indicates the measured values ​​taken by each water treatment equipment, to the information management device 100, along with time data, which indicates the time at that time.

[0015] The primary pure water production system 20 is equipped with water treatment equipment such as a cation exchange resin tower, a decarbonation tower, an anion exchange resin tower, a pure water tank, a degassing membrane, and a reverse osmosis (RO) membrane device. The pretreatment system 10 transmits operating status data indicating the operating status of each water treatment equipment and measurement data indicating the measured values ​​measured by each water treatment equipment, along with time data indicating the time at that time, to the information management device 100.

[0016] Subsystem 30 is equipped with water treatment equipment such as a primary pure water tank, a heat exchanger, an ultraviolet (UV) oxidation device, a non-regenerative ion exchange resin device (CP), a membrane degasser, and an ultrafiltration membrane (UF membrane) device. Subsystem 30 produces secondary pure water (ultrapure water) from primary pure water produced by the primary pure water production system 20. The produced ultrapure water is supplied to use points that use the ultrapure water, such as semiconductor manufacturing plants. Subsystem 30 transmits operating status data indicating the operating status of each water treatment equipment and measurement data indicating the measured values ​​measured by each water treatment equipment, along with time data indicating the time at that time, to the information management device 100.

[0017] The operating status data transmitted by the pretreatment system 10, the primary pure water production system 20, and the subsystem 30 to the information management device 100 includes, for example, alarm history issued from each water treatment device equipped in each system, data indicating the operating process of each water treatment device, the circulation rate of treated water when circulation treatment is performed, data on chemicals added to the water to be treated by each water treatment device (type and amount of chemicals added), the maintenance status of each water treatment device, and data on functional materials installed in each water treatment device (type of functional material, start date of use, and years of use), etc., indicating what state each water treatment device was in and what kind of operation (operation) it performed. The pretreatment system 10, the primary pure water production system 20, and the subsystem 30 may not only transmit the operating status data to the information management device 100 when the operating status data changes, but may also periodically transmit the operating status data to the information management device 100 as status information. Furthermore, the measurement data transmitted to the information management device 100 by the pretreatment system 10, the primary pure water production system 20, and the subsystem 30 includes data showing the water quality of the water to be treated (TOC (Total Organic Carbon), pH value, raw water turbidity measured using an SS meter, metal concentration, etc.), temperature, CO2 emissions from each water treatment device, power consumption of each water treatment device, flow rate, conductivity, etc., measured by each water treatment device equipped in each system. The pretreatment system 10, the primary pure water production system 20, and the subsystem 30 may not only transmit these water quality values, etc., as measurement data to the information management device 100 at the time of measurement, but may also periodically transmit the measurement data measured immediately before to the information management device 100. When the pretreatment system 10, the primary pure water production system 20, and the subsystem 30 periodically transmit operating status data and measurement data, it is preferable that the period is shorter than the period in which the splitting unit 120, described later, splits the treated water. Here, the data including at least one of the operating status data and measurement data transmitted from the pretreatment system 10, the primary pure water production system 20, and the subsystem 30 to the information management device 100 is defined as management data.

[0018] The flow meter 40 measures the cumulative flow rate of ultrapure water supplied from subsystem 30. The flow meter 40 transmits data indicating the measured value (cumulative flow rate value) to the information management device 100. The flow meter 40 may be located at the outlet of subsystem 30 or at the destination of the ultrapure water supply.

[0019] The information management device 100 receives management data, time data, and data indicating the cumulative flow rate transmitted from the pre-treatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40. Figure 2 is a diagram showing an example of the components of the information management device 100 shown in Figure 1. As shown in Figure 2, the information management device 100 shown in Figure 1 has a processing time calculation unit 110, a division unit 120, a data acquisition unit 130, a linking unit 140, and an assignment unit 150. Note that Figure 2 shows only the main components of the information management device 100 shown in Figure 1 that are relevant to this embodiment.

[0020] The processing time calculation unit 110 calculates the processing time for treated water in each water treatment device located in the pre-treatment system 10, the primary pure water production system 20, and the subsystem 30, respectively. This processing time is the sum of the residence time of the water to be treated in the target system (each water treatment device), the processing time for the treatment (operation) performed on the water to be treated, and the liquid delivery time. For example, if a water treatment device is equipped with a tank for storing the water to be treated, the processing time calculation unit 110 may calculate the processing time in the water treatment device based on the capacity and flow rate of the tank. Alternatively, the processing time calculation unit 110 may calculate the processing time in the water treatment device based on the time when the peak value of the measurement data in the water treatment device is detected. In this case, the processing time calculation unit 110 may calculate the processing time in the water treatment device based on the timing when the water treatment device detects the peak value and the timing when a water treatment device located downstream of the water treatment device detects the peak value. Furthermore, the processing time calculation unit 110 may calculate the processing time by performing simulations using a multi-stage CSTR (multi-stage continuous tank reactor), a PFR (plug flow reactor), or a model combining these, or by performing simulations using fluid analysis. The processing time calculation unit 110 may also use a fixed value for the processing time, or it may create a model that changes according to the flow rate to calculate the processing time. Additionally, this processing time may be the time required for each water treatment device to perform a predetermined treatment, plus the time required for the liquid to be transported through piping between systems and between water treatment devices.

[0021] The splitting unit 120 divides the treated water that the water treatment device has performed a predetermined treatment (operation) on into predetermined units of treated water. For example, based on the cumulative flow rate value transmitted from the flow meter 40, the splitting unit 120 divides the treated water into predetermined units (for example, 100m). 3 The divided portion is divided into 100m. The divided portion 120 holds date and time information indicating the date and time of division. For example, if the divided portion 120 is divided into 100m 3 When the treated water is divided into sections, the cumulative flow rate value is 0 m³ 3 The time is 12:00, and the cumulative flow rate is 100m3 If the time is 14:00, the date and time information for each unit of treated water will be 12:00 and 14:00, respectively. In other words, the first divided unit of treated water will be from 12:00 to 14:00. The division unit 120 may also divide the treated water at the timing of regenerating the resin tower in the primary pure water production system 20. The division unit 120 may also divide the treated water at the timing of regenerating the activated carbon tower. The division unit 120 may also divide the treated water at the timing of regenerating the sand filter. In addition, the division unit 120 may divide the treated water by valve operation that may cause fluctuations in the water quality of the treated water. Specific examples of division performed by this division unit 120 include, for example, opening and closing the valve that flows into the raw water tank, or opening and closing the circulation lines through which various types of treated water are circulated. The division unit 120 may also divide the water based on the water quality values ​​among the measurement data acquired by the data acquisition unit 130. In this case, the splitting unit 120 may, for example, split when the TOC value, which is a water quality value, crosses a threshold of 0.1 ppb.

[0022] The data acquisition unit 130 acquires multiple management data, which are at least one of the operating status data of each water treatment device provided in the pretreatment system 10, the primary pure water production system 20, and the subsystem 30, and measurement data from each water treatment device, in association with time data.

[0023] The linking unit 140 calculates a time period for each unit of treated water divided by the division unit 120, based on the time information of the unit of treated water and the processing time calculated by the processing time calculation unit 110. The linking unit 140 links the time data included in the calculated time period with the associated management data as a series of data.

[0024] Figure 3 is a diagram illustrating an example of the processing performed by the linking unit 140 shown in Figure 2. Figure 3 shows an example where the processing time in the pre-treatment system 10 is 2.0 hours, the processing time in the primary pure water production system is 1.0 hour, the processing time in subsystem 30 is 1.0 hour, and the time when the splitting unit 120 split the treated water at the end of the system is 12:00 and 14:00. Since the processing time in subsystem 30 is 1.0 hour, if the time period of the unit treated water split by the splitting unit 120 is 12:00 to 14:00, the linking unit 140 obtains management data from subsystem 30 that is associated with the time data included in the time period of 11:00 to 13:00, which is 1.0 hour before 12:00 to 14:00. Furthermore, if the processing time in subsystem 30 is 1.0 hour and the processing time in primary pure water production system 20 is 1.0 hour, and the time period of the unit of treated water divided by the division unit 120 is 12:00 to 14:00, then the linking unit 140 obtains management data from primary pure water production system 20 that is associated with time data included in the time period of 10:00 to 12:00, which is (1.0 + 1.0) = 2.0 hours prior to 12:00 to 14:00. Also, if the processing time in subsystem 30 is 1.0 hour, the processing time in primary pure water production system 20 is 1.0 hour, and the processing time in pre-treatment system 10 is 2.0 hours, and the time period of the unit of treated water divided by the division unit 120 is 12:00 to 14:00, then the linking unit 140 obtains management data from pre-treatment system 10 that is associated with time data included in the time period of 8:00 to 10:00, which is (1.0 + 1.0 + 2.0) = 4.0 hours prior to 12:00 to 14:00. The linking unit 140 then links the acquired management data together to form a series of data.

[0025] Incidentally, for example, among the pretreatment systems 10, the time from when the measurement data is measured until the treated water is discharged from the pretreatment system 10 is different between the measurement data measured near the inlet and the measurement data measured near the outlet. The same applies to the primary pure water production system 20 and the subsystem 30. Therefore, the linking unit 140 may link the respective measurement data based on the processing time for each of the water treatment devices provided in the pretreatment system 10, the primary pure water production system 20, and the subsystem 30.

[0026] The assigning unit 150 assigns identification information to each series of data linked by the linking unit 140. The identification information assigned by the assigning unit 150 may be information treated like a lot number assigned for each predetermined unit in order to manage the manufactured products. Note that the series of data to which the assigning unit 150 has assigned the identification number is stored in the information management device 100 as a list.

[0027] FIG. 4 is a diagram for explaining an example of the processing performed by the linking unit 140 and the assigning unit 150 shown in FIG. 2. Here, the dividing unit 120 divides the treated water every 100 m 3 and the time when the integrated flow rate value is 0 m 3 is 12:00, the time when the integrated flow rate value reaches 100 m 3 is 14:00, the time when the integrated flow rate value reaches 200 m 3 is 16:00, and the time when the integrated flow rate value reaches 300 m 3 is 18:00 will be described as an example.

[0028] The dividing unit 120 divides the treated water when the integrated flow rate value is 0 to 100 m 3The treated water is divided into unit treated water. The linking unit 140 links the time data management data included in the 8-10 time period, which is 4 hours prior to the division time period of 12-14 o'clock divided by the division unit 120 as explained using Figure 3 for the pretreatment system 10, as a series of data. The linking unit 140 also links the time data management data included in the 10-12 time period, which is 2 hours prior to the division time period of 12-14 o'clock divided by the division unit 120 as explained using Figure 3 for the primary pure water production system 20, as a series of data. The linking unit 140 also links the time data management data included in the 11-13 time period, which is 1 hour prior to the division time period of 12-14 o'clock divided by the division unit 120 as explained using Figure 3 for the subsystem 30, as a series of data. Then, the assignment unit 150 assigns the identification information "0001" to the series of data linked by the linking unit 140.

[0029] Similarly, the divided section 120 has an integrated flow rate of 100 to 200 m 3 The treated water is divided into unit treated water. The linking unit 140 links the time data management data included in the 10:00-12:00 time period, which is 4 hours prior to the 14:00-16:00 time period divided by the division unit 120, as explained using Figure 3 for the pretreatment system 10, as a series of data. The linking unit 140 also links the time data management data included in the 12:00-14:00 time period, which is 2 hours prior to the 14:00-16:00 time period divided by the division unit 120, as explained using Figure 3 for the primary pure water production system 20, as a series of data. The linking unit 140 also links the time data management data included in the 13:00-15:00 time period, which is 1 hour prior to the 14:00-16:00 time period divided by the division unit 120, as explained using Figure 3 for the subsystem 30, as a series of data. Then, the assignment unit 150 assigns the identification information "0002" to the series of data linked by the linking unit 140.

[0030] Similarly, the divided section 120 has an integrated flow rate of 200-300 m 3The treated water is divided into unit treated water. The linking unit 140 links the time data management data included in the 12-14 time period, which is 4 hours prior to the 16-18 time period divided by the division unit 120 as explained using Figure 3 for the pretreatment system 10, as a series of data. The linking unit 140 also links the time data management data included in the 14-16 time period, which is 2 hours prior to the 16-18 time period divided by the division unit 120 as explained using Figure 3 for the primary pure water production system 20, as a series of data. The linking unit 140 also links the time data management data included in the 15-17 time period, which is 1 hour prior to the 16-18 time period divided by the division unit 120 as explained using Figure 3 for the subsystem 30, as a series of data. Then, the assignment unit 150 assigns the identification information "0003" to the series of data linked by the linking unit 140.

[0031] As mentioned above, in each of the pretreatment system 10, primary pure water production system 20, and subsystem 30, the time elapsed from when the measurement data is taken until the treated water is discharged from each system differs between the measurement data taken near the inlet and the measurement data taken near the outlet. Therefore, the linking unit 140 may calculate the time lag based on the processing time for each water treatment device provided in each of the pretreatment system 10, primary pure water production system 20, and subsystem 30, and link the respective measurement data.

[0032] The information management method in the information management device 100 shown in Figure 1 will be described below. Figure 5 is a flowchart illustrating an example of the information management method in the information management device 100 shown in Figure 1.

[0033] First, the splitting unit 120 divides the treated water supplied from subsystem 30 into unit treated water based on the cumulative flow rate measured by the flow meter 40 (step S1). Next, the processing time calculation unit 110 calculates the processing time for the treated water in each water treatment device located in the pretreatment system 10, the primary pure water production system 20, and subsystem 30, respectively (step S2). Finally, the data acquisition unit 130 acquires management data and time data transmitted from the pretreatment system 10, the primary pure water production system 20, and subsystem 30, or from each water treatment device located in each system (step S3). Here, the order in which the processes in steps S1 to S3 are performed is not particularly limited.

[0034] Next, the linking unit 140 calculates a time period for each unit of treated water divided by the division unit 120, based on the time information of the unit of treated water and the processing time calculated by the processing time calculation unit 110. Then, the linking unit 140 links the time data included in the calculated time period with the associated management data as a series of data (step S4). Then, the assignment unit 150 assigns identification information to each series of data linked by the linking unit 140 (step S5).

[0035] Alternatively, the division unit 120 may divide the treated water into unit treated water, the assignment unit 150 may assign identification information to each of the divided unit treated waters, and then the linking unit 140 may link management data based on time data.

[0036] In this configuration, treated water is divided into predetermined units of treated water, and for each divided unit of treated water, management data indicating the history of the treated water is linked to each other based on the time data of the management data in the pretreatment system 10, the primary pure water production system 20, and the subsystem 30. At this time, the linking is performed using the processing time of each water treatment device equipped in the pretreatment system 10, the primary pure water production system 20, and the subsystem 30. Therefore, for example, if a semiconductor factory that receives ultrapure water experiences a decline in yield, if the identification information of the ultrapure water can be obtained, the cause of the decline in yield can be easily investigated from the series of data linked to that identification information. As a result, the water treatment system can be managed appropriately and efficiently, and the target of production can be easily managed. (Second Embodiment)

[0037] Figure 6 shows a second embodiment of the water treatment system of the present invention. As shown in Figure 6, the water treatment system in this embodiment comprises a pretreatment system 10, a primary pure water production system 20, a subsystem 30, a flow meter 40, an information management device 101, and a supply device 50. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are the same as those in the first embodiment. The supply device 50, the pretreatment system 10, the primary pure water production system 20, and the subsystem 30 are connected in series in this order in the flow direction of the water to be treated, which is tap water produced at a water treatment plant or recycled water recycled at a recycled water plant. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50 are each connected to the information management device 101 so as to be able to send and receive management data and time data or data indicating the cumulative flow rate value. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50 are each connected to the information management device 101 via wireless or wired connections. Furthermore, the pretreatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50 are each connected to the information management device 101 either directly or via a communication network.

[0038] The supply device 50 supplies tap water supplied from a water treatment plant, etc., to the pretreatment system 10 as raw water. The supply device 50 also supplies recycled water supplied from a recycled water plant, etc., to the pretreatment system 10 as raw water. Based on instructions from the information management device 101 or pre-set timings, the supply device 50 selects the raw water to be supplied to the pretreatment system 10 from tap water supplied from a water treatment plant, etc. and recycled water supplied from a recycled water plant, etc., and supplies it to the pretreatment system 10. In addition, based on instructions from the information management device 101 or pre-set timings, the supply device 50 mixes the raw water to be supplied to the pretreatment system 10 with tap water supplied from a water treatment plant, etc. and recycled water supplied from a recycled water plant, etc., and supplies it to the pretreatment system 10. The mixing ratio at this time may be based on instructions from the information management device 101 or may be predetermined. The supply device 50 may also be an on / off valve or an opening adjustment valve. The supply device 50 transmits to the information management device 101 management data indicating whether tap water or recycled water was supplied from an external source, what selection was made, and in what ratio raw water was it supplied, along with time data indicating the time. The supply device 50 may not only transmit the management data and time data to the information management device 101 when the selection of raw water or the supply ratio changes, but may also periodically transmit the management data to the information management device 101 as status information along with the time data.

[0039] The information management device 101 receives management data, time data, and data indicating the cumulative flow rate transmitted from the pre-treatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50. Figure 7 is a diagram showing an example of the components of the information management device 101 shown in Figure 6. The information management device 101 shown in Figure 5 has a processing time calculation unit 110, a division unit 120, a data acquisition unit 131, a linking unit 141, and an assignment unit 150, as shown in Figure 7. The processing time calculation unit 110, the division unit 120, and the assignment unit 150 are the same as those in the first embodiment. Note that Figure 7 shows only the main components related to this embodiment from the components of the information management device 101 shown in Figure 5.

[0040] In addition to the functions of the data acquisition unit 130 in the first embodiment, the data acquisition unit 131 also has the function of acquiring management data and time data transmitted from the supply device 50 in association with each other.

[0041] In addition to the functions of the linking unit 140 in the first embodiment, the linking unit 141 also has the function of adding the management data from the supply device 50 acquired by the data acquisition unit 131 to the series of data. The method by which the linking unit 141 links the management data from the supply device 50 with other management data is the same as in the first embodiment.

[0042] The information management method in the information management device 101 shown in Figure 5 will be described below. Figure 8 is a flowchart illustrating an example of the information management method in the information management device 101 shown in Figure 5.

[0043] First, the splitting unit 120 divides the treated water supplied from subsystem 30 into unit treated water based on the cumulative flow rate measured by the flow meter 40 (step S11). Next, the processing time calculation unit 110 calculates the processing time for the treated water in each water treatment device located in the pretreatment system 10, the primary pure water production system 20, and subsystem 30, respectively (step S12). Finally, the data acquisition unit 131 acquires management data and time data transmitted from the pretreatment system 10, the primary pure water production system 20, and subsystem 30, or from each water treatment device and supply device 50 located in each system (step S13). Here, the order in which the processes in steps S11 to S13 are performed is not particularly limited.

[0044] Next, the linking unit 141 calculates a time period for each unit of treated water divided by the division unit 120, based on the time information of the unit of treated water and the processing time calculated by the processing time calculation unit 110. Then, the linking unit 141 links the time data included in the calculated time period with the associated management data as a series of data (step S14). Then, the assignment unit 150 assigns identification information to each series of data linked by the linking unit 141 (step S15).

[0045] Alternatively, the division unit 120 may divide the treated water into unit treated water, the assignment unit 150 may assign identification information to each of the divided unit treated waters, and then the linking unit 141 may link management data based on time data.

[0046] Thus, in this embodiment, in addition to the first embodiment, the timing of the supply of raw water supplied to the entire water treatment system is also added to the series of data. In particular, when the raw water supplied to the water treatment system is selected from multiple sources (e.g., tap water and recycled water), or when raw water from multiple sources is mixed with each other, the selection status and the mixing ratio are managed. This allows for more efficient management, for example, if a deterioration in yield is observed at a semiconductor factory that receives ultrapure water. (Third embodiment)

[0047] Figure 9 shows a third embodiment of the water treatment system of the present invention. As shown in Figure 9, the water treatment system in this embodiment comprises a pretreatment system 10, a primary pure water production system 20, a subsystem 30, a flow meter 40, and an information management device 102. The pretreatment system 10, primary pure water production system 20, subsystem 30, and flow meter 40 are the same as those in the first embodiment. The pretreatment system 10, primary pure water production system 20, subsystem 30, and flow meter 40, and the information management device 102 are connected to each other so as to be able to send and receive management data and time data or data indicating integrated flow values. The pretreatment system 10, primary pure water production system 20, subsystem 30, and flow meter 40, and the information management device 102 are connected to each other via wireless or wired connections. Alternatively, the pretreatment system 10, primary pure water production system 20, subsystem 30, and flow meter 40, and the information management device 102 may be directly connected to each other or connected via a communication network.

[0048] The information management device 102 receives management data, time data, and data indicating the cumulative flow rate transmitted from the pre-treatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40. Figure 10 is a diagram showing an example of the components of the information management device 102 shown in Figure 9. As shown in Figure 10, the information management device 102 shown in Figure 9 has a processing time calculation unit 110, a division unit 122, a data acquisition unit 130, a linking unit 142, and an assignment unit 152. The processing time calculation unit 110 and the data acquisition unit 130 are the same as those in the first embodiment. Note that Figure 10 shows only the main components of the information management device 102 shown in Figure 9 that are relevant to this embodiment.

[0049] The splitting unit 122 divides the ultrapure water supplied from subsystem 30 at predetermined time intervals.

[0050] The assignment unit 152 assigns identification information to each of the multiple management data acquired by the data acquisition unit 130. For example, the assignment unit 152 assigns unique identification information to the water quality data acquired from the pretreatment system 10. The identification information assigned by the assignment unit 152 may be information treated as a lot number, similar to the first embodiment.

[0051] The linking unit 142 links the identification information assigned by the assignment unit 152 to each of the management data based on the time data acquired by the data acquisition unit 130 in association with the management data and the processing time calculated by the processing time calculation unit 110. At this time, the linking unit 142 takes into account the time periods divided by the division unit 122. For example, in the case where the processing time in the pretreatment system 10, the primary pure water production system 20, and the subsystem 30 is the processing time explained using Figure 3, and the time periods of the unit treated water divided by the division unit 122 are the time periods explained using Figure 3, if the assignment unit 152 assigns the identification information "A010" to the water quality data acquired by the data acquisition unit 130 from the pretreatment system 10 between 8 and 10, and the assignment unit 152 assigns the identification information "B010" to the water quality data acquired by the data acquisition unit 130 from the primary pure water production system 20 between 10 and 12, the linking unit 142 links "A010" and "B010" to each other. Furthermore, the linking section 142 indicates that the unit treated water for "A010" and "B010" was divided by the dividing section 122 between 12 and 14 o'clock.

[0052] The information management method in the information management device 102 shown in Figure 9 will be described below. Figure 11 is a flowchart illustrating an example of the information management method in the information management device 102 shown in Figure 9.

[0053] First, the processing time calculation unit 110 calculates the processing time for treated water in each water treatment device located in the pre-treatment system 10, the primary pure water production system 20, and the subsystem 30 (step S21). The data acquisition unit 130 then acquires management data and time data transmitted from the pre-treatment system 10, the primary pure water production system 20, and the subsystem 30, or from each water treatment device located in each system (step S22). Note that the order in which step S21 and step S22 are performed does not matter.

[0054] Then, the assignment unit 152 assigns identification information to each of the multiple management data acquired by the data acquisition unit 130 (step S23). The division unit 122 divides the ultrapure water supplied from the subsystem 30 into predetermined time zones (step S24). Subsequently, the linking unit 142 links the time data acquired by the data acquisition unit 130 in step S22 in association with the management data, and the processing time calculated by the processing time calculation unit 110 in step S21, with the identification information that the assignment unit 152 assigned to the management data in step S23 (step S25).

[0055] In this configuration, the pretreatment system 10, the primary pure water production system 20, and the subsystem 30 assign identification information to each piece of management data indicating the history of the treated water. The identification information is then linked to the time data associated with the management data and the processing time. Therefore, when any problem is detected at the ultrapure water supply destination, the management data related to the detected problem can be investigated. This allows for appropriate and efficient management of the water treatment system and easy management of the products being manufactured. (Fourth embodiment)

[0056] Figure 12 shows a fourth embodiment of the water treatment system of the present invention. As shown in Figure 12, the water treatment system in this embodiment comprises a pretreatment system 10, a primary pure water production system 20, a subsystem 30, a flow meter 40, a supply device 50, and an information management device 103. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are the same as those in the first embodiment. The supply device 50 is the same as that in the second embodiment. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50 are each connected to the information management device 103 so as to be able to send and receive management data and time data or data indicating integrated flow rate values. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50 are each connected to the information management device 103 via wireless or wired connections. Furthermore, the pretreatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50 may be directly connected to each other, or they may be connected via a communication network.

[0057] The information management device 103 receives management data, time data, and data indicating the cumulative flow rate transmitted from the pre-treatment system 10, the primary pure water production system 20, the subsystem 30, the flow meter 40, and the supply device 50. Figure 13 is a diagram showing an example of the components of the information management device 103 shown in Figure 12. As shown in Figure 13, the information management device 103 shown in Figure 12 includes a processing time calculation unit 110, a division unit 120, a data acquisition unit 131, a linking unit 140, an assignment unit 150, a classification unit 163, and a display unit 173. The processing time calculation unit 110, the division unit 120, the linking unit 140, and the assignment unit 150 are the same as those in the first embodiment. The data acquisition unit 131 is the same as that in the second embodiment. Note that Figure 13 shows only the main components related to this embodiment from the components of the information management device 103 shown in Figure 12.

[0058] The classification unit 163 classifies the series of data to which the assignment unit 150 has assigned identification information into predetermined categories. The classification performed by the classification unit 163 may be, for example, classification by operating process, classification based on water quality, classification based on power consumption, etc. Classification based on water quality may be based on the water quality level acquired by the data acquisition unit 131, for example, three classifications such as "good," "normal," and "dangerous." Classification based on power consumption may be based on the power consumption level acquired by the data acquisition unit 131, for example, three classifications such as "high," "normal," and "low." The classification unit 163 compares the data with thresholds to classify it into these levels. The classification unit 163 may also classify the series of data using a learning model that has learned the importance (danger level) based on operating state data and measurement data.

[0059] The display unit 173 displays a series of data classified by the classification unit 163 according to category. The display unit 173 may also be a display connected to the outside of the information management device 103. In that case, the information management device 103 sends a display control signal to the externally connected display unit 173 to control the display on the display unit 173. Alternatively, the display unit 173 may display a series of data to which the assignment unit 150 has assigned identification information as a list. Furthermore, the display mode on the display unit 173 is not limited to a list; it may also be a graph or numerical display in a diagram.

[0060] Figure 14A shows a first display example of the display unit 173 shown in Figure 13. As shown in Figure 14A, the display unit 173 may also display a screen for selecting display items. The screen for selecting display items includes, for example, as shown in Figure 14A, icons for displaying all of the series of data to which the assignment unit 150 has assigned identification information, an icon for displaying only the series of data showing the operation process from the series of data to which the assignment unit 150 has assigned identification information, an icon for displaying only the series of data showing water quality information from the series of data to which the assignment unit 150 has assigned identification information, an icon for displaying the series of data to which the assignment unit 150 has assigned identification information and which specifies the lot number that is the identification information, an icon for displaying the series of data to which the assignment unit 150 has assigned identification information and which specifies the date and time of provision of ultrapure water, an icon for displaying the series of data to which the assignment unit 150 has assigned identification information and which is classified by water quality by the classification unit 163, and an icon for displaying the series of data to which the assignment unit 150 has assigned identification information and which is classified by power consumption by the classification unit 163. By selecting any of these icons, the display unit 173 displays the desired screen.

[0061] Figure 14B shows a second display example of the display unit 173 shown in Figure 13. The example shown in Figure 14B is an example of the screen displayed by the display unit 173 when the "Operation Process" display item is selected on the display screen shown in Figure 14A. As shown in Figure 14B, the display unit 173 displays a series of data in which management data indicating the operation process is linked together for each identification number. As shown in Figure 14B, this series of data may also be associated with the date and time on which the ultrapure water was provided.

[0062] Figure 14C shows a third display example of the display unit 173 shown in Figure 13. The example shown in Figure 14C is an example of the screen displayed by the display unit 173 when the "Water Quality" display item is selected on the display screen shown in Figure 14A. As shown in Figure 14C, the display unit 173 displays a series of data in which management data indicating water quality is linked to each other for each identification number. As shown in Figure 14C, this series of data may also be associated with the date and time the ultrapure water was provided.

[0063] Figure 14D shows a fourth display example of the display unit 173 shown in Figure 13. The example shown in Figure 14D is an example of the screen displayed by the display unit 173 when the "Classification (Water Quality)" display item is selected on the display screen shown in Figure 14A. As shown in Figure 14D, the display unit 173 displays a series of data that the classification unit 163 has classified as "dangerous" based on the water quality level acquired by the data acquisition unit 131. As shown in Figure 14D, this series of data may also be associated with the date and time the ultrapure water was provided.

[0064] Figure 14E shows a fifth display example of the display unit 173 shown in Figure 13. The example shown in Figure 14E is an example of the screen displayed by the display unit 173 when the display item "Classification (Power Consumption)" is selected on the display screen shown in Figure 14A. As shown in Figure 14E, the display unit 173 displays a series of data that the classification unit 163 has classified as "high" based on the power consumption level acquired by the data acquisition unit 131. As shown in Figure 14E, this series of data may also be associated with the provision date and time, which indicates the date and time the ultrapure water was provided.

[0065] Furthermore, in the water quality display shown in Figure 14C, the display of text (font, text color, line thickness, etc.) for water quality exceeding a predetermined threshold or water quality classified as "dangerous" by the classification unit 163 may be displayed in a more conspicuous manner than the display of other parts. In addition, the display unit 173 may display a screen that issues a predetermined warning if there is water quality classified as "dangerous" by the classification unit 163 or if there is power consumption classified as "high" by the classification unit 163.

[0066] The information management method in the information management device 103 shown in Figure 12 will be described below. Figure 15 is a flowchart illustrating an example of the information management method in the information management device 103 shown in Figure 12.

[0067] First, the splitting unit 120 divides the treated water supplied from subsystem 30 into unit treated water based on the cumulative flow rate measured by the flow meter 40 (step S31). The processing time calculation unit 110 calculates the processing time for the treated water in each water treatment device located in the pretreatment system 10, the primary pure water production system 20, and subsystem 30, respectively (step S32). The data acquisition unit 131 acquires management data and time data transmitted from the supply device 50, the pretreatment system 10, the primary pure water production system 20, and subsystem 30, or each water treatment device located in each system (step S33). The order in which the processes in steps S31 to S33 are performed is not particularly limited.

[0068] Next, the linking unit 140 calculates a time period for each unit of treated water divided by the division unit 120, based on the time information of the unit of treated water and the processing time calculated by the processing time calculation unit 110. Then, the linking unit 140 links the time data included in the calculated time period with the associated management data as a series of data (step S34). Then, the assignment unit 150 assigns identification information to each series of data linked by the linking unit 140 (step S35).

[0069] Next, the classification unit 163 classifies the series of data to which the assignment unit 150 has assigned identification information into predetermined categories (step S36). Then, the display unit 173 displays the series of data that the classification unit 163 has classified into categories (step S37).

[0070] Alternatively, the division unit 120 may divide the treated water into unit treated water, the assignment unit 150 may assign identification information to each of the divided unit treated waters, and then the linking unit 140 may link management data based on time data.

[0071] Thus, in addition to the first and second embodiments, this embodiment is equipped with a function to display a series of data to which identification information is attached. This allows operators to easily understand the history of each unit of treated water in the process from supplied raw water to the production of ultrapure water. As a result, the water treatment system can be managed appropriately and efficiently, and the target of production can be easily managed. (Fifth embodiment)

[0072] Figure 16 shows a fifth embodiment of the water treatment system of the present invention. In this embodiment, the water treatment system comprises a pretreatment system 10, a primary pure water production system 20, a subsystem 30, a flow meter 40, and an information management device 104, as shown in Figure 1. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are the same as those in the first embodiment. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are each connected to the information management device 104 so as to be able to send and receive management data and time data or data indicating integrated flow values. The pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are each connected to the information management device 104 via wireless or wired connections. Alternatively, the pretreatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40 are each connected to the information management device 104, or they are connected via a communication network.

[0073] The information management device 104 receives management data, time data, and data indicating the cumulative flow rate transmitted from the pre-treatment system 10, the primary pure water production system 20, the subsystem 30, and the flow meter 40. Figure 17 is a diagram showing an example of the components of the information management device 104 shown in Figure 16. As shown in Figure 17, the information management device 104 shown in Figure 16 has a processing time calculation unit 110, a division unit 120, a data acquisition unit 130, a linking unit 140, an assignment unit 150, and a billing unit 184. The processing time calculation unit 110, the division unit 120, the data acquisition unit 130, the linking unit 140, and the assignment unit 150 are the same as those in the first embodiment. Note that Figure 17 shows only the main components of the information management device 104 shown in Figure 16 that are relevant to this embodiment.

[0074] The ultrapure water provided from subsystem 30 is charged to the recipient according to the amount provided. Furthermore, the billing unit 184 determines the amount for each set of data to which the assignment unit 150 has assigned identification information. At this time, the billing unit 184 determines the amount based on the operating status data and measurement data of the set of data, including water quality values, power consumption, chemical usage, maintenance history, etc. For example, the billing unit 184 determines a higher amount for the set of data if the water quality fluctuations are large. Also, for example, the billing unit 184 determines a higher amount for the set of data if the power consumption is high. The billing unit 184 may also set coefficients for each water quality fluctuation rate and power consumption value and determine the amount by multiplying the amount of ultrapure water provided to the recipient by these coefficients. The billing unit 184 may also set a threshold and determine the amount based on whether the water quality fluctuation rate or power consumption value is higher or lower than the threshold. The billing unit 184 stores (accumulates) the determined amounts in a storage medium such as a database and bills each recipient. The billing unit 184 may also transmit the billing results to an external device (for example, a system that bills the provider for the use of ultrapure water).

[0075] The information management method in the information management device 104 shown in Figure 16 will be described below. Figure 18 is a flowchart illustrating an example of the information management method in the information management device 104 shown in Figure 16.

[0076] First, the splitting unit 120 divides the treated water supplied from subsystem 30 into unit treated water based on the cumulative flow rate measured by the flow meter 40 (step S41). Next, the processing time calculation unit 110 calculates the processing time for the treated water in each water treatment device located in the pretreatment system 10, the primary pure water production system 20, and subsystem 30, respectively (step S42). Finally, the data acquisition unit 130 acquires management data and time data transmitted from the pretreatment system 10, the primary pure water production system 20, and subsystem 30, or from each water treatment device located in each system (step S43). Here, the order in which the processes in steps S41 to S43 are performed is not particularly limited.

[0077] Next, the linking unit 140 calculates a time period for each unit of treated water divided by the division unit 120, based on the time information of the unit of treated water and the processing time calculated by the processing time calculation unit 110. Then, the linking unit 140 links the time data included in the calculated time period with the associated management data as a series of data (step S44). Then, the assignment unit 150 assigns identification information to each series of data linked by the linking unit 140 (step S45).

[0078] Alternatively, the division unit 120 may divide the treated water into unit treated water, the assignment unit 150 may assign identification information to each of the divided unit treated waters, and then the linking unit 140 may link management data based on time data.

[0079] Subsequently, the billing unit 184 determines an amount for each of the series of data to which the assignment unit 150 has assigned identification information, and bills the ultrapure water recipients (step S46).

[0080] Thus, in this embodiment, in addition to the first embodiment, usage fees are charged based on operating status data and measurement data for each associated identification information. Therefore, it is possible to charge an amount appropriate to the state of the treated water in a series of data.

[0081] The above explanation describes how each component is assigned a specific function (process), but this assignment is not limited to those described above. Furthermore, the configurations of the components described above are merely examples and are not limited to them. Also, the embodiments described above may be combined in any combination.

[0082] The processing performed by each of the information management devices 100 to 104 described above may be carried out by logic circuits created according to their respective purposes. Alternatively, a computer program (hereinafter referred to as "program") describing the processing content as a procedure may be recorded on a recording medium readable by each of the information management devices 100 to 104, and the program recorded on this recording medium may be read and executed by each of the information management devices 100 to 104. The recording medium readable by each of the information management devices 100 to 104 refers to portable recording media such as floppy disks, magneto-optical disks, DVDs (Digital Versatile Discs), CDs (Compact Discs), Blu-ray Discs, USB (Universal Serial Bus) memory, and SD cards, as well as memory such as ROM (Read Only Memory), RAM (Random Access Memory), and HDDs (Hard Disc Drives) built into each of the information management devices 100 to 104. The programs recorded on this recording medium are read by the CPUs provided in each of the information management devices 100 to 104, and the same processing as described above is performed under the control of the CPUs. Here, the CPUs operate as computers that execute the programs read from the recording medium on which the programs are recorded. [Explanation of Symbols]

[0083] 10 Pre-processing system 20 Primary pure water production system 30 subsystems 40 Flow meter 50 Feeding device 100~104 Information management device 110 Processing time calculation unit 120,122 Division 130,131 Data acquisition unit 140-142 Linking section 150,152 Assignment section 163 Classification Department 173 Display section 184 Billing Section

Claims

1. A dividing unit that divides the treated water into predetermined units, A data acquisition unit acquires multiple management data, which are at least one of the operating status data of the water treatment device and measurement data from the water treatment device, in association with time data. The division unit links the management data, which is associated with the time data included in the time period calculated based on the treatment time of the treated water in the water treatment device, to the divided unit of treated water as a series of data. An information management device having a linking unit that assigns identification information to each series of data linked by the linking unit.

2. In the information management device according to claim 1, The water treatment apparatus has a processing time calculation unit that calculates the processing time of the treated water, The linking unit is an information management device that calculates a time period based on the processing time of the treated water calculated by the processing time calculation unit, and links the time data included in the calculated time period with the management data associated with it as a series of data.

3. In the information management device according to claim 2, The processing time calculation unit is an information management device that calculates the processing time based on the time at which the peak value of the measurement data in the water treatment device is detected.

4. In the information management device according to claim 2, The processing time calculation unit is an information management device that calculates the processing time based on the capacity of the tank provided in the water treatment device and the flow rate of the treated water in the water treatment device.

5. In the information management device according to any one of claims 1 to 4, The data acquisition unit is an information management device that acquires management data indicating that raw water has been supplied to the water treatment device and time data indicating the time when raw water was supplied to the water treatment device, in association with each other.

6. In the information management device according to any one of claims 1 to 4, A classification unit classifies the series of data to which the identification information has been assigned by the assignment unit into predetermined categories, An information management device having a display unit that displays a series of data classified by the classification unit according to the categories.

7. In the information management device according to any one of claims 1 to 4, An information management device having a billing unit that performs billing based on the aforementioned series of data.

8. A data acquisition unit acquires multiple management data, which are at least one of the operating status data of the water treatment device and measurement data from the water treatment device, in association with time data. The data acquisition unit assigns identification information to each of the multiple management data acquired by the data acquisition unit, An information management device having a linking unit that links together identification information assigned to the management data by the assignment unit based on time data acquired by the data acquisition unit in association with the management data and the processing time of the treated water in the water treatment device.

9. It has a water treatment device and an information management device. The aforementioned information management device is A dividing unit that divides the treated water into predetermined units, A data acquisition unit acquires multiple management data, which are at least one of the operating status data of the water treatment device and measurement data from the water treatment device, in association with time data. The division unit links the management data, which is associated with the time data included in the time period calculated based on the treatment time of the treated water in the water treatment device, to the divided unit of treated water as a series of data. A water treatment system comprising a linking unit and a assigning unit that assigns identification information to each series of data linked by the linking unit.

10. A process that divides treated water into predetermined units, A process for acquiring multiple management data, which are at least one of the operating status data of the water treatment device and measurement data from the water treatment device, in association with time data. The process involves linking the management data, which is associated with the time data included in the time period calculated based on the treatment time of the treated water in the water treatment apparatus, to each of the divided units of treated water as a series of data. An information management method that performs the process of assigning identification information to each of the aforementioned linked sets of data.

11. On the computer, Procedure for dividing treated water into predetermined units, A procedure for acquiring multiple management data, which are at least one of the operating status data of a water treatment device and measurement data from the water treatment device, in association with time data, A procedure for linking the management data, which is associated with the time data included in the time period calculated based on the treatment time of the treated water in the water treatment apparatus, to each of the divided units of treated water, as a series of data; A program for executing the procedure of assigning identification information to each of the aforementioned linked sets of data.

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