cleanroom

Abstract

This provides a cleanroom that maximizes the area of ​​the manufacturing room, thereby enabling efficient use of the interior space. [Solution] The cleanroom 10 includes a manufacturing room 12 in which a downflow F1 is formed in which air is pressurized and sent from the ceiling space 18 and descends to the underfloor space 22, and a storage room 14 provided adjacent to the manufacturing room 12 in which an upflow F2 is formed in which air is returned from the underfloor space 22 to the ceiling space 18.

Description

Technical Field

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[0001] The present invention relates to a clean room.

Background Art

[0002] The following Patent Document 1 discloses a configuration of a clean room that includes a fan filter unit above a clean stocker (storage shelf portion) to maintain the inside of the clean stocker clean. In this configuration, a return space, which is a return path of the clean air blown into the clean stocker, is formed using the space inside the casing of the clean stocker.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object of the present invention is to provide a clean room that can effectively utilize the interior of the room by maximizing the area of the manufacturing room.

Means for Solving the Problems

[0005] The clean room according to the first aspect includes a manufacturing room in which a downflow is formed in which air is pumped from the ceiling space and descends to the floor space, and a stocker room provided adjacent to the manufacturing room in which an upflow is formed in which air returns from the floor space to the ceiling space.

[0006] In the cleanroom described in the first embodiment, a downflow is formed in the manufacturing room where air is pressurized from the ceiling space and descends into the underfloor space. In the storage room adjacent to the manufacturing room, an upflow is formed where air is returned from the underfloor space to the ceiling space. As a result, in the cleanroom, the return shaft section, which is a dedicated return air path for returning air that has been pressurized from the ceiling space to the manufacturing room and descended into the underfloor space back into the ceiling space, can be eliminated, and the area of ​​the manufacturing room can be increased. Therefore, by maximizing the area of ​​the manufacturing room, the interior can be used effectively.

[0007] The cleanroom described in the second embodiment comprises a manufacturing room in which a downflow is formed in which air is pressurized and sent from the ceiling space and descends to the underfloor space, and a storage room provided adjacent to the manufacturing room in which air is returned from the underfloor space to the ceiling space, wherein at least a first upflow is formed in which air flows from the underfloor space toward the ceiling surface, a downflow is formed in which the air that hits the ceiling surface flows between the storage shelves, and a second upflow is formed in which the air that hits the floor surface flows into the ceiling space.

[0008] In the cleanroom described in the second embodiment, a downflow is formed in the manufacturing room where air is pressurized from the ceiling space and descends into the underfloor space. In the storage room adjacent to the manufacturing room, at least a first upflow is formed where air flows from the underfloor space towards the ceiling surface, a downflow is formed where the air that hits the ceiling surface flows between the storage shelves, and a second upflow is formed where the air that hits the floor surface flows into the ceiling space. As a result, air is returned from the underfloor space to the ceiling space by forming an airflow within the storage room. Therefore, in the cleanroom, the return shaft section, which is a dedicated return air path for returning air that has been pressurized from the ceiling space to the manufacturing room and descended into the underfloor space back into the ceiling space, can be eliminated, and the area of ​​the manufacturing room can be increased. Thus, the area of ​​the manufacturing room can be maximized, allowing for effective use of the interior space.

[0009] The cleanroom described in the third embodiment is the cleanroom described in the first or second embodiment, wherein the storage room is extended to the underfloor space.

[0010] According to the cleanroom described in the third embodiment, the storage room is extended to the space under the floor, so the storage space in the storage room can be increased vertically.

[0011] The cleanroom described in the fourth embodiment is a cleanroom described in the first or second embodiment, in which a fan and a filter are provided at the air inlet that flows from the underfloor space into the storage room.

[0012] According to the cleanroom described in the fourth aspect, a fan and a filter are provided at the air inlet that flows from the underfloor space into the storage room, so that clean air can be introduced into the storage room.

[0013] The cleanroom described in the fifth embodiment is the cleanroom described in the first embodiment, wherein a suspended crane is provided in the storage room.

[0014] According to the cleanroom described in the fifth embodiment, the storage room is equipped with a suspended crane, which makes it possible to suppress dust generation inside the storage room when the crane is in operation. [Effects of the Invention]

[0015] According to the cleanroom described herein, the interior space can be effectively utilized by maximizing the area of ​​the manufacturing room. [Brief explanation of the drawing]

[0016] [Figure 1] This is an elevation view showing the cleanroom of the first embodiment. [Figure 2] This is a side view showing the storage shelves in the stocker room of the cleanroom according to the first embodiment. [Figure 3]It is a schematic plan view showing a stocker room in the clean room of the first embodiment. [Figure 4] It is a schematic plan view showing an example of the internal layout of the clean room of the first embodiment. [Figure 5] It is an elevation view showing the clean room of the second embodiment. [Figure 6] It is an elevation view showing the clean room of the third embodiment. [Figure 7] It is an elevation view showing the clean room of the comparative example.

Mode for Carrying Out the Invention

[0017] Embodiments of the present invention will be described in detail based on the drawings. In each drawing, those having low relevance to the present invention are omitted from illustration.

[0018] 〔First Embodiment〕 The clean room of the first embodiment will be described with reference to FIGS. 1 to 4. In FIG. 1, the clean room 10 of the first embodiment is shown in an elevation view.

[0019] <Overall Configuration of Clean Room> As shown in FIG. 1, a clean room 10 is provided inside the building 1. The clean room 10 includes a manufacturing room 12 and a stocker room 14. Further, the clean room 10 includes a ceiling space 18 arranged above the system ceiling 16 of the manufacturing room 12 and the stocker room 14, and a subfloor space 22 arranged below the floor 20 of the manufacturing room 12 and the stocker room 14.

[0020] The cleanroom 10 is enclosed by a floor slab 24 located below the underfloor space 22, a ceiling slab 26 located above the ceiling space 18, and walls 28 and 30 located between the floor slab 24 and the ceiling slab 26. The floor slab 24 and the ceiling slab 26 are made of reinforced concrete (RC) and are structural elements that support the loads of the floor and ceiling of building 1. The walls 28 and 30 are made of panels, for example, with their lower ends joined to the floor slab 24 and their upper ends joined to the ceiling slab 26.

[0021] (Manufacturing room configuration) As shown in Figure 1, the manufacturing room 12 is a space for manufacturing products. The manufacturing room 12 is a space partitioned off at least partially within the cleanroom 10, and a stocker room 14 is located adjacent to the manufacturing room 12. In Figure 1, the manufacturing room 12 comprises a first manufacturing room 12A located to the right of the stocker room 14, and a second manufacturing room 12B located to the left of the stocker room 14. For example, the first manufacturing room 12A and the second manufacturing room 12B may be connected around the stocker room 14.

[0022] A fan filter unit (FFU) 34 is installed above the system ceiling 16 of the manufacturing room 12. Although not shown in the diagram, the fan filter unit 34 includes a fan that pressurizes and pumps air into the manufacturing room 12, and a filter that purifies the air by removing dust and other particles. The floor 20 of the manufacturing room 12 is made up of perforated floor panels. The system ceiling 16 is made up of blank panels (without holes). Although not shown in the diagram, the fan filter unit 34 is positioned on the upper frame of the manufacturing room 12, and blank panels are provided where there is no fan filter unit 34. The fan filter unit 34 creates a downflow F1 in the manufacturing room 12, where air is pressurized and pumped from the ceiling space 18 down to the underfloor space 22. The cleanliness of the air in the manufacturing room 12 is maintained by the air purified by the fan filter unit 34 being pumped into the manufacturing room 12.

[0023] The products manufactured in manufacturing room 12 are not particularly limited, but products that need to be manufactured in a clean environment are preferred. For example, semiconductor silicon wafers that need to be manufactured in a clean environment may be manufactured there.

[0024] (Storage room configuration) As shown in Figure 1, the storage room 14 is a space for storing products manufactured in the manufacturing room 12 (including, for example, intermediate products). The storage room 14 is a space separated from the manufacturing room 12 inside the cleanroom 10. The storage room 14 is used as a buffer to eliminate capacity variations between production processes and is configured to ensure the required product storage quantity.

[0025] A storage wall 32 is provided between the storage room 14 and the manufacturing room 12. In Figure 1, storage walls 32 are provided between the storage room 14 and the first manufacturing room 12A, and between the storage room 14 and the second manufacturing room 12B. For example, the storage room 14 is a space enclosed on its sides by storage walls 32. The storage walls 32 may be provided in part between the storage room 14 and the manufacturing room 12, but it is basically preferable that they surround the perimeter of the storage room 14. For example, in plan view, the storage room 14 is rectangular, and a pair of storage walls 32 are arranged along the longitudinal direction of the storage room 14, and a pair of storage walls 32 are also provided at both ends of the longitudinal direction of the storage room 14 (in a direction perpendicular to the longitudinal direction) (see Figure 3).

[0026] An air inlet 40 is provided at the lower end of the storage wall 32 in the storage room 14, through which air flows from the underfloor space 22 into the storage room 14. A fan filter unit (FFU) 42 is installed in the air inlet 40. Although not shown in the figures, the fan filter unit 42 comprises a fan that pressurizes and pumps air into the storage room 14, and a filter that purifies the air by removing dust and other particles from it.

[0027] The fan filter unit 42 causes air from below the manufacturing room 12 to flow towards the storage room 14 in the underfloor space 22, and in the storage room 14, an upflow F2 is formed in which air returns from the underfloor space 22 to the ceiling space 18. The fan filter unit 42 pressurizes the purified air and sends it to the storage room 14, thereby maintaining the cleanliness of the air in the storage room 14.

[0028] As a result, in the cleanroom 10, air is pumped from the ceiling space 18 to the manufacturing room 12, and the air that flows from the manufacturing room 12 to the underfloor space 22 returns to the ceiling space 18 through the storage room 14, forming an air circulation path.

[0029] As an example, a pair of storage shelves 44 are arranged at intervals inside the storage room 14. The pair of storage shelves 44 are positioned close to a pair of storage walls 32 and along the storage walls 32. A crane 46 for transporting products is provided between the pair of storage shelves 44. In this example, the crane 46 is suspended from the upper structure 45 of the storage room 14 (for example, a slab or suspension steel).

[0030] Figure 2 shows a side view of the storage shelves 44 in the storage room 14, and Figure 3 shows a top view of the storage room 14.

[0031] As shown in Figures 1 to 3, the storage rack 44 is rectangular in plan view. Specifically, the storage rack 44 comprises a plurality of vertical members 44A arranged at intervals and a plurality of shelf sections 44B arranged horizontally and attached to the plurality of vertical members 44A (see Figure 2). The plurality of shelf sections 44B are arranged at intervals in the vertical direction. The crane 46 is configured to travel along a pair of storage racks 44 and to move vertically between the pair of storage racks 44. As an example, products manufactured in the manufacturing room 12 are transported to the entrance 14A of the stocker room 14, and the products are handed over to the crane 46. The products handed over to the crane 46 are transported to a predetermined position on the storage rack 44 by the crane 46 traveling along the storage rack 44 and moving vertically, and are placed on the shelf section 44B by a gripping device (not shown). In this way, the products are stored on the storage rack 44.

[0032] (An example of the internal layout of a cleanroom) Figure 4 shows an example of the internal layout of the cleanroom 10 located inside building 1, in a floor plan.

[0033] As shown in Figure 4, the cleanroom 10 includes an entrance 50, an anteroom 52 located inside the entrance 50, and a manufacturing room 12 separated from the anteroom 52. The entrance 50 is provided with an opening / closing door 51. An AS door (not shown) is provided between the anteroom 52 and the manufacturing room 12. The AS door is a door that opens and closes in high-pressure air. In the example shown in Figure 4, the manufacturing room 12 is a large space, and multiple columns 54 are provided inside the manufacturing room 12. Inside the cleanroom 10, multiple storage rooms 14 are provided adjacent to the manufacturing room 12. For example, the multiple storage rooms 14 are rectangular in plan view, and the area of ​​each of the multiple storage rooms 14 can be changed as needed.

[0034] Each storage room 14 is provided with a storage wall 32 that separates it from the manufacturing room 12 along its longitudinal direction. Furthermore, each storage room 14 is provided with storage walls 32 that separate it from the manufacturing room 12 at both ends along its longitudinal direction. Inside each storage room 14, a pair of storage shelves 44 are provided along the storage walls 32. The crane 46 of the storage room 14 is not shown in the illustration.

[0035] In the cleanroom 10, products manufactured in the manufacturing room 12 can be stored in one of several storage rooms 14.

[0036] (Construction of the cleanroom in the comparative example) Here, we will describe the configuration of the comparative example cleanroom. Figure 7 shows an elevation view of the comparative example cleanroom 500.

[0037] As shown in Figure 7, the cleanroom 500 comprises a manufacturing room 502, a storage room 504, and a retrieval shaft 506 as an example of a return air path. For example, the manufacturing room 502 is connected to the storage room 504 on both sides in the longitudinal direction. For example, the retrieval shaft 506 is provided on both sides of the manufacturing room 502, which is located on both sides of the storage room 504.

[0038] Furthermore, the cleanroom 500 includes a ceiling space 18 located above the system ceiling 508 of the manufacturing room 502 and the storage room 504, and above the urethane shaft 506. In addition, the cleanroom 500 includes an underfloor space 22 located below the floor 510 of the manufacturing room 502 and the storage room 504, and below the urethane shaft 506.

[0039] A storage wall 32 is provided between the manufacturing room 502 and the storage room 504. Additionally, a wall 514 is provided between the urethane shaft 506 and the manufacturing room 502. The storage room 504 is equipped with a crane 526 that travels on the floor 510.

[0040] A fan filter unit (FFU) 520 is installed above the system ceiling 508 of the manufacturing room 502 and the storage room 504. The fan filter unit 520 includes a fan and a filter. The floor 510 of the manufacturing room 502 and the storage room 504 is made of perforated floor panels. In the manufacturing room 502 and the storage room 504, the fan filter unit 520 pressurizes air from the ceiling space 18 and creates a downflow F3 that descends into the underfloor space 22.

[0041] The urethane shaft 506 on the right side of the manufacturing room 502 shown in Figure 7 is rectangular and cylindrical, enclosed by walls 514 forming three sides and wall 28 forming one side. Similarly, the urethane shaft 506 on the left side of the manufacturing room 502 shown in Figure 7 is also rectangular and cylindrical, enclosed by walls 514 forming three sides and wall 30 forming one side. Openings are formed at the top and bottom of the urethane shaft 506. An upflow F4 is formed in the urethane shaft 506, where air returns from the underfloor space 22 to the ceiling space 18.

[0042] As a result, in the cleanroom 500, air is pumped from the ceiling space 18 to the manufacturing room 12 and the storage room 504, and the air that flows from the manufacturing room 12 and the storage room 504 to the underfloor space 22 returns to the ceiling space 18 through the left and right retrieval shafts 506, forming an air circulation path.

[0043] In such a cleanroom 500, dedicated retrieval shafts 506 are provided on both sides of the manufacturing rooms 502, which are located on either side of the storage room 504, to recirculate air from the underfloor space 22. As a result, in the cleanroom 500, there is a problem that the area of ​​the manufacturing rooms 502 is reduced because the area required for the retrieval shafts 506 is necessary.

[0044] <Mechanism and Effects> Next, the operation and effects of the first embodiment will be described.

[0045] The cleanroom 10 comprises a manufacturing room 12 and a storage room 14 adjacent to the manufacturing room 12. In the manufacturing room 12, a downflow F1 is formed when air is pressurized and sent from the ceiling space 18 down to the underfloor space 22. In the storage room 14, an upflow F2 is formed when air is returned from the underfloor space 22 to the ceiling space 18.

[0046] Therefore, in the cleanroom 10, the return air shaft section, which is a dedicated return air path for returning air that has been pressurized from the ceiling space 18 to the manufacturing room 12 and descended into the underfloor space 22 back to the ceiling space 18, can be eliminated, and the area of ​​the manufacturing room 12 can be increased. Consequently, in the cleanroom 10, the interior can be used effectively by maximizing the area of ​​the manufacturing room 12.

[0047] Furthermore, a fan filter unit 42, which includes a fan and a filter, is provided at the air inlet 40 that flows from the underfloor space 22 into the storage room 14.

[0048] Therefore, in the cleanroom 10, clean air can be introduced into the storage room 14 by the fan filter unit 42.

[0049] Furthermore, in the cleanroom 10, the crane 46 is suspended from the upper structure 45 of the storage room 14.

[0050] For example, in a configuration where the crane travels along the floor of the storage room 14, there is a concern about dust generation during crane operation. Here, dust generation refers to the generation of dust when the crane is subjected to impact or friction. In contrast, in this embodiment, by suspending the crane 46 from the upper structure 45 of the storage room 14, dust generation during the operation of the crane 46 is suppressed, and the generated dust can be removed by the fan filter unit 42 without being dispersed into the storage room 14.

[0051] [Second Embodiment] Next, the cleanroom of the second embodiment will be described. Note that components identical to those of the first embodiment described above will be given the same numbers and their descriptions will be omitted.

[0052] Figure 5 shows an elevation view of the cleanroom 100 according to the second embodiment. As shown in Figure 5, the cleanroom 100 comprises a manufacturing room 12 and a storage room 104. The storage room 104 is adjacent to the manufacturing room 12. The cleanroom 10 comprises an overhead space 18 located above the manufacturing room 12 and the storage room 104, and an underfloor space 22 located below the manufacturing room 12. The storage room 104 extends into the underfloor space 22.

[0053] The storage room 104 includes a wall 106 that extends from the storage wall 32 to the underfloor space 22. The lower end of the wall 106 is joined to the floor slab 24. The wall 106 is provided with an air inlet 107 that allows air to flow from the underfloor space 22 into the storage room 14, and a fan filter unit (FFU) 108 is installed in the air inlet 107. Although not shown in the figures, the fan filter unit 108 includes a fan that pressurizes and pumps air into the storage room 104 and a filter that purifies the air by removing dust and other particles from the air.

[0054] In the manufacturing room 12, a downflow F1 is formed by the fan filter unit 34, which pressurizes air from the ceiling space 18 and sends it down to the underfloor space 22. In the storage room 104, an upflow F2 is formed by the fan filter unit 108, which sends air back from the underfloor space 22 to the ceiling space 18. The cleanliness of the air in the storage room 104 is maintained by the fan filter unit 108 pressurizing the purified air that is sent to the storage room 104.

[0055] A pair of storage shelves 112 are provided on the floor slab 24 of the storage room 104. The upper ends of the pair of storage shelves 112 extend close to the upper end of the storage room 104, and the vertical length of the storage shelves 112 is longer than the vertical length of the storage shelf 44 (see Figure 1) in the first embodiment. Therefore, the product storage capacity of the storage shelves 112 is greater than that of the storage shelf 44 (see Figure 1) in the first embodiment. The other configurations of the cleanroom 100 are the same as those of the cleanroom 10 in the first embodiment.

[0056] In addition to the functions and effects of the cleanroom 10 in the first embodiment, the cleanroom 100 can obtain the following functions and effects.

[0057] The storage room 104 extends to the underfloor space 22. Therefore, in the cleanroom 100, the storage space of the storage room 104 can be increased vertically. Consequently, the number of products that can be stored per unit area in the storage room 104 can be increased.

[0058] [Third Embodiment] Next, the cleanroom of the third embodiment will be described. Note that components identical to those of the first and second embodiments described above will be given the same numbers and their descriptions will be omitted.

[0059] Figure 6 shows an elevation view of the cleanroom 200 according to the third embodiment. As shown in Figure 6, the cleanroom 200 comprises a manufacturing room 12, a stocker room 204 adjacent to the manufacturing room 12, and a urethane shaft 206 located on the opposite side of the stocker room 204, with the manufacturing room 12 in between. The manufacturing room 12 comprises a first manufacturing room 12A and a second manufacturing room 12B. For example, the first manufacturing room 12A and the second manufacturing room 12B are connected around the stocker room 204.

[0060] The cleanroom 200 comprises a ceiling space 18 located above the manufacturing room 12, the storage room 204, and the urethane shaft 206, and an underfloor space 22 located below the manufacturing room 12 and the urethane shaft 206. The storage room 204 extends into the underfloor space 22.

[0061] In the manufacturing room 12, a fan filter unit 34 pressurizes air from the ceiling space 18 and creates a downflow F1 that descends into the underfloor space 22.

[0062] The width of the storage room 204 in the direction perpendicular to its longitudinal direction is wider than the width of the storage room 104 in the direction perpendicular to its longitudinal direction in the second embodiment. A storage wall 32 is provided between the storage room 204 and the first manufacturing room 12A, and between the storage room 204 and the second manufacturing room 12B. The storage room 204 includes a wall 210 that extends to the underfloor space 22, continuous with the storage wall 32 on the first manufacturing room 12A side, and a wall 212 that extends to the underfloor space 22, continuous with the storage wall 32 on the second manufacturing room 12B side. The lower ends of walls 210 and 212 are joined to the floor slab 24.

[0063] The wall 210 on the side of the first manufacturing room 12A is provided with an air inlet 211 that allows air to flow from the underfloor space 22 into the storage room 14, and a fan filter unit (FFU) 108 is installed in the air inlet 211.

[0064] A pair of storage shelves 112 are provided on the floor slab 24 of the storage room 204. Each of the storage shelves 112 is spaced apart from the storage wall 32. A crane 226 that travels on the floor slab 24 is provided between the pair of storage shelves 112 in the storage room 204. The crane 226 is configured to travel along the pair of storage shelves 112 and to move vertically between the pair of storage shelves 112. A side wall 220 is provided on the side of the storage shelf 112 on the fan filter unit 108 side (i.e., the first manufacturing room 12A side) that faces the storage wall 32. The side wall 220 extends from the position where it contacts the floor slab 24 to the upper end of the storage shelf 112.

[0065] Furthermore, a side wall 222 is provided on the side of the storage rack 112 on the second manufacturing room 12B side that faces the stocker wall 32. The stocker room 204 is provided with a ceiling panel 224 that extends from the top of the pair of storage racks 112 to the system ceiling 16 of the first manufacturing room 12A, and the ceiling panel 224 is joined to the stocker wall 32 on the first manufacturing room 12A side. The ceiling panel 224 is an example of a ceiling surface. The side wall 222 extends from the lower part of the floor 20 to the ceiling panel 224. The lower end of the side wall 222 is spaced apart from the floor slab 24, and an opening is provided between the lower end of the side wall 222 and the floor slab 24. The floor slab 24 is an example of a floor surface. In addition, the ceiling panel 224 is not provided between the upper end of the side wall 222 and the stocker wall 32 on the second manufacturing room 12B side. In other words, an opening is provided between the upper end of the side wall 222 and the stocker wall 32 on the second manufacturing room 12B side.

[0066] In the storage room 204, air is introduced from the underfloor space 22 by the fan filter unit 108. The air introduced into the storage room 204 forms a first upflow F5 that flows between the wall 210 and the storage wall 32 and the side wall 220 toward the ceiling panel 224. The air that hits the ceiling panel 224 then forms a downflow F6 that flows between the pair of storage shelves 112 located between the side wall 220 and the side wall 222. Furthermore, the air that hits the floor slab 24 forms a second upflow F7 that flows between the side wall 222 and the storage wall 32 toward the ceiling space 18. In this way, the storage room 204 returns air from the underfloor space 22 to the ceiling space 18.

[0067] The wastewater shaft 206 is located adjacent to the second manufacturing room 12B. A wall 230 is provided between the wastewater shaft 206 and the second manufacturing room 12B. For example, the wastewater shaft 206 is rectangular and cylindrical, surrounded by walls 230 forming three sides and wall 30 forming one side. Openings are formed at the top and bottom of the wastewater shaft 206. In the wastewater shaft 206, an upflow F8 is formed in which air returns from the underfloor space 22 to the ceiling space 18.

[0068] In the cleanroom 200, if a sufficient amount of air is returned from the underfloor space 22 to the ceiling space 18 by the storage room 204, the return shaft 206 may not be provided. The other configurations of the cleanroom 200 are the same as those of the cleanroom 100 in the second embodiment.

[0069] In addition to the functions and effects of the cleanroom 200 having the same configuration as the cleanroom 10 of the first embodiment and the cleanroom 100 of the second embodiment, the cleanroom 200 can obtain the following functions and effects.

[0070] In the manufacturing rooms 12 (first manufacturing room 12A and second manufacturing room 12B), a downflow F1 is formed where air is pressurized from the ceiling space 18 and descends to the underfloor space 22. In this embodiment, since the first manufacturing room 12A and the second manufacturing room 12B are connected around the storage room 204, the air that has descended in the first manufacturing room 12A and the second manufacturing room 12B respectively merges in the underfloor space 22. In the storage room 204, which is provided adjacent to the manufacturing rooms 12, a first upflow F5 is formed where air flows from the underfloor space 22 towards the ceiling panel 224, and a downflow F6 is formed where the air that hits the ceiling panel 224 flows between the storage shelves 112. Furthermore, a second upflow F7 is formed where the air that hits the floor slab 24 flows into the ceiling space 18. As a result, the airflow within the storage room 204 is formed, and air is returned from the underfloor space 22 to the ceiling space 18.

[0071] Therefore, in the cleanroom 200, the return air shaft section, which is a dedicated return air path for returning air that has been pressurized from the ceiling space 18 to the manufacturing room 12 and descended into the underfloor space 22 back to the ceiling space 18, can be eliminated, and the area of ​​the manufacturing room 12 can be increased. Consequently, in the cleanroom 200, the area of ​​the manufacturing room 12 can be maximized, allowing for more effective use of the interior space.

[0072] 〔others〕 In the first and second embodiments, the crane 46 is suspended from the upper structure of the storage room, but the disclosure is not limited to this configuration. For example, the crane may travel on the floor of the storage room.

[0073] Furthermore, in the third embodiment, the crane 226 travels on the floor of the storage room, but the disclosure is not limited to this configuration. For example, the crane may be suspended from the upper structure of the storage room.

[0074] Furthermore, in the third embodiment, the storage room 204 has a first upflow F5, a downflow F6, and a second upflow F7, but the disclosure is not limited to this configuration. For example, the airflow in the storage room 204 can be changed as long as it is configured to return air from the underfloor space 22 to the ceiling space 18. For example, the total number of upflows, downflows, and upflows may be increased or decreased from three.

[0075] Although the present invention has been described in detail with respect to specific embodiments, it will be apparent to those skilled in the art that the present invention is not limited to these embodiments, and that various other embodiments are possible within the scope of the present invention. [Explanation of Symbols]

[0076] 10 Cleanroom 12 Manufacturing room 12A 1st manufacturing room 12B 2nd manufacturing room 14. Storage Room 18. Attic space 22 Underfloor space 24. Floor slab (an example of a floor surface) 40 Air intake 36. Fan filter unit (an example of a filter) 44 Storage shelves 46 Cranes 100 Cleanrooms 104 Storage Room 107 Air intake 108 Fan filter unit (example of a filter) 112 Storage shelves 200 Cleanrooms 204 Storage Room 206 Retaining Shaft 211 Air intake 224 Ceiling panel (an example of a ceiling surface) F1 Downflow F2 Upflow F5 First Upflow F6 Downflow F7 2nd Upflow

Claims

1. A manufacturing room where air is pressurized and sent from the ceiling space and descends into the space under the floor, forming a downflow, A storage room is provided adjacent to the manufacturing room, and an upflow is formed in which air returns from the underfloor space to the ceiling space, A cleanroom equipped with [a specific feature / ability].

2. A manufacturing room where air is pressurized and sent from the ceiling space and descends into the space under the floor, forming a downflow, A storage room is provided adjacent to the manufacturing room, which returns air from the underfloor space to the ceiling space, Equipped with, In the storage room, a first upflow is formed in which air flows from the underfloor space towards the ceiling surface, a downflow is formed in which the air that hits the ceiling surface flows between the storage shelves, and a second upflow is formed in which the air that hits the floor surface flows into the space above the ceiling.

3. The cleanroom according to claim 1 or claim 2, wherein the storage room extends to the underfloor space.

4. The cleanroom according to claim 1 or claim 2, wherein a fan and a filter are provided at the air inlet that flows from the underfloor space into the storage room.

5. The cleanroom according to claim 1, wherein the storage room is provided with a suspended crane.

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