Ultrasonic coupling device

Abstract

This invention provides an ultrasonic bonding apparatus that can improve the quality of bonding multiple workpieces by reducing the probability of slippage between chips and workpieces, and between workpieces. [Solution] The amplitude Q is the initial amplitude Q int An amplitude instruction Q that maintains this value. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the pressure P is set to the initial pressure P int From final pressure P end The translational motion of the ultrasonic bonding tip 40 is controlled to intermittently or continuously decrease the amplitude Q to the initial amplitude Q. int An amplitude instruction Q that reduces the value from to 0. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the pressure P is set to the final pressure P end The translational movement of the ultrasonic bonding tip 40 is controlled to decrease from 0 to 0.

Description

[Technical Field]

[0001] This invention relates to an ultrasonic bonding technology for joining multiple workpieces made of various materials such as metals using ultrasonic vibrations. [Background technology]

[0002] The present applicant has proposed a technique for joining multiple workpieces using ultrasonic composite vibration (see, for example, Patent Document 1). When the static pressure acting from the tip on the multiple workpieces is increased, the amplitude of the tip tends to decrease, and when the static pressure is decreased, the amplitude of the tip tends to increase. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Patent No. 7219495 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] However, if the static pressure is reduced to maintain the tip amplitude required for joining, slippage may occur between the tip and the workpiece and / or between the workpieces, potentially preventing proper joining of the multiple workpieces. On the other hand, if the static pressure is increased to prevent such slippage, the tip amplitude required for joining the multiple workpieces may not be maintained, potentially preventing proper joining of the multiple workpieces. When the tip is screwed to the horn, a suitable length is required to tighten the screw with the appropriate torque, and therefore the tip must be manufactured to be correspondingly longer. When high static pressure is applied to multiple workpieces from a long tip, the tip flexes, reducing the tip amplitude. When low static pressure is applied to multiple workpieces from a long tip, the tip flexes less, and the effect of the reduction in tip amplitude is smaller.

[0005] However, the frictional force between the workpieces may be reduced, and the workpieces may slide or displace relative to each other. Further, if protrusions are formed at the tip of the chip and the protrusions do not sufficiently penetrate into the workpiece, the chip and the workpiece may slide or displace relative to each other when the chip is vibrated.

[0006] Therefore, an object of the present invention is to provide an ultrasonic bonding apparatus capable of improving the quality of bonding of a plurality of workpieces by reducing the probability of occurrence of slippage between the chip and the workpiece and slippage between the workpieces.

Means for Solving the Problems

[0007] The ultrasonic bonding apparatus of the present invention comprises an ultrasonic vibration element, and a control device for controlling the excitation operation and the translational operation of the ultrasonic vibration element, which is an ultrasonic bonding apparatus for bonding a plurality of workpieces by transmitting ultrasonic vibrations generated by the excitation operation of the ultrasonic vibration element to the plurality of workpieces via an ultrasonic bonding chip, wherein the control device controls the translational operation of the ultrasonic bonding chip so as to increase the pressure P applied from the ultrasonic bonding chip to the plurality of workpieces to an initial pressure P int and controls the excitation operation of the ultrasonic vibration element according to an amplitude instruction Q int so as to increase the amplitude Q of the ultrasonic bonding chip to an initial amplitude Q cmd , controls the translational operation of the ultrasonic bonding chip so as to intermittently or continuously decrease the pressure P from the initial pressure P int to a final pressure P end , and alternatively or additionally, controls the excitation operation of the ultrasonic vibration element according to an amplitude instruction Q int so as to intermittently or continuously decrease the amplitude Q from the initial amplitude Q end to a final amplitude Q cmd , and controls the excitation operation of the ultrasonic vibration element according to an amplitude instruction Q intor the final amplitude Q end An amplitude instruction Q that reduces the value from to 0. cmd When controlling the excitation operation of the ultrasonic vibration element accordingly, the pressure P is set to the initial pressure P int or the final pressure P end Reduce it from to 0. [Brief explanation of the drawing]

[0008] [Figure 1] Diagram illustrating the configuration of an ultrasonic bonding apparatus according to one embodiment of the present invention. [Figure 2] An explanatory diagram relating to a first control mode of pressure and amplitude. [Figure 3] An explanatory diagram relating to a modified example of the first control mode of pressure and amplitude. [Figure 4] An explanatory diagram relating to a second control mode for pressure and amplitude. [Figure 5] An explanatory diagram relating to a third control mode for pressure and amplitude. [Modes for carrying out the invention]

[0009] (composition) The ultrasonic bonding apparatus 1 shown in Figure 1, as one embodiment of the present invention, comprises an ultrasonic composite vibration element 10, a horn tip 40 (ultrasonic bonding tip), an anvil 18, an operating device 20, a control device 22, a rotary drive device 220, a high-frequency power supply device 221, a translational drive device 222, and a state sensor 224. The anvil 18 may be omitted.

[0010] The ultrasonic composite vibration element 10 comprises a substantially cylindrical first ultrasonic vibration element 110, a substantially cylindrical, substantially cylindrical, or substantially bottomed cylindrical intermediate ultrasonic vibration element 100, and a substantially cylindrical or substantially bottomed cylindrical second ultrasonic vibration element 120.

[0011] The first ultrasonic vibration element 110 and the intermediate ultrasonic vibration element 100 are coaxially connected by a mechanical coupling mechanism (such as a bolt and / or clamp mechanism) in the middle or intermediate part of the ultrasonic composite vibration element 10. The intermediate ultrasonic vibration element 100 and the second ultrasonic vibration element 120 are coaxially connected by a mechanical coupling mechanism in the middle part of the ultrasonic composite vibration element 10. The first ultrasonic vibration element 110, the intermediate ultrasonic vibration element 100, and the second ultrasonic vibration element 120 may be integrally formed rather than mechanically connected.

[0012] The intermediate ultrasonic vibration element 100 may be a component of the first ultrasonic vibration element 110. That is, the first ultrasonic vibration element 110 may be composed of two ultrasonic vibration elements. In this case, the first ultrasonic vibration element 110 and the intermediate ultrasonic vibration element 100 may be integrally constructed rather than being mechanically connected. The intermediate ultrasonic vibration element 100 may be a component of the second ultrasonic vibration element 120. That is, the second ultrasonic vibration element 120 may be composed of two ultrasonic vibration elements. In this case, the second ultrasonic vibration element 120 and the intermediate ultrasonic vibration element 100 may be integrally constructed rather than being mechanically connected.

[0013] As shown in Figure 1, the first ultrasonic vibration element 110 is provided with a piezoelectric body 112 whose axial direction (a direction parallel to the first axis) is the direction of piezoelectric polarization.

[0014] As shown in Figure 1, the intermediate ultrasonic vibration element 100 has a substantially annular plate-shaped intermediate flange 102 that extends radially around its entire circumference at an intermediate position in its axial direction. The intermediate ultrasonic vibration element 100 is configured to be clamped or supported around its entire circumference by a clamping mechanism (not shown) at least at the intermediate flange 102. The intermediate flange 102 may be omitted if it is ensured that the intermediate ultrasonic vibration element 100 is supported by a mechanical support mechanism. As shown in Figure 1, the intermediate ultrasonic vibration element 100 is substantially cylindrical with an outer diameter that is substantially constant in the axial direction behind the intermediate flange 102 (to the left in Figure 1). As shown in Figure 1, the intermediate ultrasonic vibration element 100 is substantially cylindrical (a substantially frustoconical shape and a substantially cylindrical shape coaxially connected) with an outer diameter that is continuously reduced towards the tip partway through the intermediate flange 102 (to the right in Figure 1).

[0015] As shown in Figure 1, the second ultrasonic vibration element 120 is provided with a frequency adjustment element 122, which is a roughly regular octagonal plate shape with rounded corners, extending radially around its entire circumference at an intermediate position in its axial direction. The frequency adjustment element 122 adjusts the resonant frequencies of the longitudinal and torsional vibration components of the ultrasonic vibration. The external shape of the frequency adjustment element 122 may be a roughly circular, roughly elliptical, or roughly regular n-sided plate shape (e.g., n=4,6,8,12,16...) that shares a central axis with the second ultrasonic vibration element 120, or it may be a columnar or figurine shape, or any combination thereof.

[0016] As shown in Figure 1, the second ultrasonic vibration element 120 has a plurality of slits 124 formed on its outer surface behind the frequency adjustment element 122. The plurality of slits 124 may also be formed on the outer surface of the second ultrasonic vibration element 120 in front of the frequency adjustment element 122. The slits 124 extend diagonally when viewed from the side of the second ultrasonic vibration element 120, or extend axially while being displaced circumferentially in phase. The N (N=2, 3, ...) slits 124 may be arranged to have N rotational symmetry (e.g., N=8, 12, or 16) about the central axis of the second ultrasonic vibration element 120.

[0017] As shown in Figure 1, the second ultrasonic vibrating element 12 is provided with a roughly regular octagonal tip portion 126 with rounded corners that extends radially around its entire circumference at its axial tip position. The tip portion 126 has multiple holes 128 (or through holes) formed at each of the circumferentially spaced locations. The M (N=2, 3, ...) holes 128 may be arranged to have M rotational symmetry (e.g., M=4) around the central axis of the second ultrasonic vibrating element 12. Internal threads are provided on the inner surfaces of the holes 128.

[0018] The horn tip 40 has a base portion that is roughly frustoconical in shape and a tip portion that contacts the uppermost of the two workpieces W1, the first workpiece W1 and the second workpiece W2. The male thread provided at the base end of the horn tip 40 is screwed into the female thread provided in the hole 128 of the tip portion 126 of the second ultrasonic vibration element 12, thereby detachably fixing the horn tip 40 to the second ultrasonic vibration element 12. By preparing horn tips 40 of various shapes, the horn tip 40 can be appropriately replaced depending on the type of metal to be joined.

[0019] The male thread of the balancer, which adjusts the phase difference between longitudinal and torsional vibrations at the tip 126 of the second ultrasonic vibrating element 12 and, consequently, at the horn tip 40, may be screwed into the female thread of the hole 128, thereby allowing the balancer to be detachably fixed to the tip 126 of the second ultrasonic vibrating element 12.

[0020] The anvil 18 is positioned perpendicular to the tip of the horn tip 40. Multiple workpieces, such as a first workpiece W1 and a second workpiece W2, are placed on the upper surface of the anvil 18. These workpieces are, for example, metal plates and / or metal foils. The anvil 18 may be configured to be passively or actively displaced up and down in response to the pressure on the horn tip 40 received through the first workpiece W1 and the second workpiece W2.

[0021] The operating device 20 is comprised of, for example, a display that displays or outputs the displacement amount and / or pressure of the pressurizing block in response to the output signal of the state sensor 224. The display may be a touch panel display and may be configured to accept setting operations that allow the user to directly or indirectly specify parameters, such as one of several bonding modes that define the time-series pattern of the target pressure.

[0022] The control device 22 is composed of a microcomputer, and by extension, a processing unit (CPU, microprocessor, processor core, etc.) and a memory device (ROM, RAM, etc.). The control device 22 is configured to control the displacement operation of the pressure block by the translation drive device 222 based on the time series of pressure acting from the pressure block of the translation drive device 222 to the intermediate ultrasonic vibration element 100 (~pressure applied by the horn tip 40 to the first workpiece W1 and the second workpiece W2), which is represented by the output signal of the pressure sensor that constitutes the state sensor 224. The control device 22 is configured to control the displacement operation of the pressure block by the translation drive device 222 based on the amplitude Q of the ultrasonic composite vibration element 10. comThe power supplied to the piezoelectric element 112 is configured to be controlled by feedback control so as to be controlled accordingly.

[0023] The high-frequency power supply unit 221 is configured to excite the first ultrasonic vibration element 110 in the axial direction by applying a high-frequency AC voltage to the piezoelectric body 112 of the first ultrasonic vibration element 110 in accordance with the power supplied from the commercial power supply (not shown).

[0024] The translational drive device 222 is equipped with a pressure block and is configured to apply pressure from the horn tip 40 to the first workpiece W1 and the second workpiece W2 by displacing a support mechanism such as a clamp mechanism that supports the intermediate ultrasonic vibration element 100 with the pressure block.

[0025] The state sensor 224 is composed of a pressure sensor that outputs a signal corresponding to the pressure acting on the intermediate ultrasonic vibration element 100 from the pressurizing block of the translational drive unit 222 (~pressure applied by the horn tip 40 to the first workpiece W1 and the second workpiece W2). The state sensor 224 includes an optical or non-contact amplitude sensor that outputs a signal corresponding to the amplitude Q of the horn tip 40 or its tip. Based on the output signal of the pressure sensor, the control device 22 controls the time series of the pressure to be constant or controlled in a specified manner.

[0026] (Ultrasonic bonding method (first embodiment)) The procedure for the ultrasonic bonding method as the first embodiment of the present invention using the ultrasonic bonding apparatus 1 will be explained with reference to Figure 2.

[0027] Before time t=t0, with the tip of the horn tip 40 in contact with the first workpiece W1, the pressure P acting from the horn tip 40 on the first workpiece W1 and the second workpiece W2 is the initial pressure P int The vertical position H of the translation drive unit 222, and consequently the vertical position of the tip of the horn tip 40, are controlled to remain constant so that it is maintained at =P0 (the 0th designated pressure) (see Figure 2 / dotted line).

[0028] Immediately after time t = t0, the amplitude Q of the tip of the horn tip 40 increases from 0 to the initial amplitude Q int and then is maintained at the initial amplitude Q int such that the amplitude instruction Q cmd is followed (refer to the two-dot chain line in FIG. 2), and the excitation operation of the ultrasonic composite vibration element 10 is started and continued. Further, the vertical position H of the translation drive device 222 is feedback-controlled so that the pressure P is maintained at the initial pressure P int = P0 (refer to the one-dot chain line in FIG. 2). As a result, the vertical position H of the translation drive device 222 gradually decreases from immediately after time t = t0 (refer to the solid line in FIG. 2). At this time, the actually measured amplitude Q mes gradually increases from t = t0, shows a maximum value Q max0 and then gradually decreases (refer to the broken line in FIG. 2). This is because as the surfaces of the first workpiece W1 and the second workpiece W2 rub against each other, the surfaces become rough and the frictional resistance increases, so the frictional force gradually increases, and this frictional force acts to attenuate the amplitude. This attenuation becomes significant when the horn tip 40 has an elongated shape. The power corresponding to the amplitude maximum value Q max0 is, for example, insufficient power to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0029] Next, immediately after time t = t1, the pressure P decreases from the initial pressure P int = P0 to an intermediate pressure P1 (<P0) (the first specified pressure), and then the vertical position H of the translation drive device 222 is feedback-controlled so that it is maintained at the intermediate pressure P (refer to the one-dot chain line in FIG. 2). As a result, the vertical position H of the translation drive device 222 slightly increases immediately after time t = t1 and then gradually decreases (refer to the solid line in FIG. 2). During this period, the amplitude Q of the tip of the horn tip 40 is controlled according to the amplitude instruction Q int such that it is continuously maintained at the initial amplitude Q cmd (refer to the two-dot chain line in FIG. 2), and the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the actually measured amplitude Q mes gradually increases from time t = t1, shows a maximum value Q max1 (Q max0 < Qmax1 ) gradually decreases after being shown (see the broken line in FIG. 2). This is because although the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases as the pressure P decreases, the solid-phase bonding of the base materials of the first workpiece W1 and the second workpiece W2 progresses. The amplitude maximum value Q max1 The power corresponding to is, for example, sufficient power to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0030] Subsequently, immediately after time t = t2, the pressure P decreases from the intermediate pressure P1 to the final pressure Pend = P2 (<P1) (the second specified pressure), and then the final pressure P end = P2 is maintained (see the dashed-dotted line in FIG. 2), and the vertical position H of the translational driving device 222 is feedback-controlled. As a result, the vertical position H of the translational driving device 222 gradually decreases after slightly rising immediately after time t = t2 (see the solid line in FIG. 2). During this period, the amplitude Q of the tip of the horn tip 40 is maintained continuously at the amplitude instruction Q int so as to be maintained at the initial amplitude Q (see the double-dashed line in FIG. 2), and the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the actually measured amplitude Q cmd gradually increases from immediately after time t = t2 and shows a maximum value Q mes (Q max2 (Q max1 < Q max2 ) and then gradually decreases (see the broken line in FIG. 2). This is because although the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases as the pressure P decreases, the solid-phase bonding of the base materials of the first workpiece W1 and the second workpiece W2 further progresses. The power corresponding to the amplitude maximum value Q max2 is, for example, sufficient power to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0031] And at immediately after time t = t3, the pressure P is the final pressure P endThe vertical position H of the translation drive unit 222 is feedback-controlled so that it decreases from =P2 to 0 (see Figure 2 / dotted line). As a result, the vertical position H of the translation drive unit 222 rises slightly immediately after time t=t3 and is maintained at that position thereafter (see Figure 2 / solid line). Furthermore, immediately after time t=t3, the amplitude Q of the tip of the horn tip 40 is equal to the initial amplitude Q int An amplitude instruction Q that decreases from to 0. cmd Accordingly (see Figure 2 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is stopped. At this time, the measured amplitude Q mes However, immediately after t=t3, it decreases further and reaches 0 (see Figure 2 / dashed line).

[0032] In the first embodiment, the amplitude Q is set to an initial amplitude Q int An amplitude instruction Q that maintains this value. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled, and the pressure P is the initial pressure P int From final pressure P end The translational motion of the ultrasonic composite vibration element 10 and the ultrasonic bonding tip 40 is controlled to intermittently decrease until (see the dashed and double dashed lines in Figure 2 / t=t1~t3). The amplitude instruction Q is such that the amplitude Q is maintained at the initial amplitude Qint. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled (see the dashed line in Figure 2 / t=t1~t3). At this time, the pressure P is the initial pressure P int From the initial designated pressure P0 to the final pressure P end The nth designated pressure P n Until n=2, the pressure P is set to the i-th designated pressure P i The translational movement of the ultrasonic bonding tip 40 is controlled to maintain (0≦i≦n) and then decrease it (see the dashed line in Figure 2 / t=t1~t3). n can be 2, 3, 4, or any value greater than 3.

[0033] Then, the amplitude Q is the initial amplitude Q int An amplitude instruction Q that reduces the value from to 0. cmdAccordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled (see the dashed line immediately after t=t3 in Figure 2). At this time, the pressure P is set to the final pressure P end The translational motion of the ultrasonic bonding tip 40 is controlled to decrease from to 0 (see the dashed line immediately after t=t3 in Figure 2).

[0034] Pressure P is specified pressure P i The i-th pressure maintenance period T is maintained at this level. Pi For pressure P, i+1 specified pressure P i+1 The i+1th pressure maintenance period T is maintained at this level. Pi+1 The ratio (T Pi+1 / T Pi ) may be included in the range of 0.6 to 0.8.

[0035] Initial pressure P int Final pressure P end The ratio (P end / P int ) may be included in the range of 0.3 to 0.5.

[0036] (effect) The ultrasonic bonding apparatus with the above configuration improves the bonding quality of the first workpiece W1 and the second workpiece W2 by reducing the probability of slippage between the horn tip 40 and the first workpiece W1, and between the first workpiece W1 and the second workpiece W2 (between multiple workpieces).

[0037] (Ultrasonic bonding method (modified version of the first embodiment)) The procedure for an ultrasonic bonding method as a modified example of the first embodiment of the present invention using an ultrasonic bonding apparatus 1 will be explained with reference to Figure 3.

[0038] Before time t=t0, with the tip of the horn tip 40 in contact with the first workpiece W1, the pressure P acting from the horn tip 40 on the first workpiece W1 and the second workpiece W2 is the initial pressure P int The vertical position H of the translation drive unit 222, and consequently the vertical position of the tip of the horn tip 40, are controlled to remain constant (see Figure 3 / dotted line) in order to maintain this position (see Figure 3 / solid line).

[0039] Immediately after time t=t0, the amplitude Q of the tip of the horn tip 40 changes from 0 to the initial amplitude Q. int It is increased to the initial amplitude Q, and thereafter the initial amplitude Q is increased. int Amplitude instruction Q that is maintained cmd Accordingly (see Figure 3 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. Furthermore, the pressure P is the initial pressure P int The vertical position H of the translation drive unit 222 is feedback-controlled so that it is maintained at (see Figure 3 / dotted line). As a result, the vertical position H of the translation drive unit 222 gradually decreases from time t=t0 (see Figure 3 / solid line). At this time, the measured amplitude Q mes However, it gradually increases from time t=t0, reaching a local maximum value Q max0 The amplitude gradually decreases after showing the above (see Figure 3 / dashed line). This is because the frictional force gradually increases from the state where the surfaces of the first workpiece W1 and the second workpiece W2 are rubbing against each other. The amplitude maximum value Q max0 The power provided is, for example, insufficient to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0040] Next, immediately after time t=t1, the pressure P is equal to the initial pressure P int From final pressure P end The vertical position H of the translation drive unit 222 is feedback-controlled so that it decreases continuously or linearly until (see Figure 3 / dotted line). As a result, the vertical position H of the translation drive unit 222 rises slightly immediately after time t=t1, and then gradually decreases (see Figure 3 / solid line). During this time, the amplitude Q of the tip of the horn tip 40 decreases from the initial amplitude Q int An amplitude instruction Q that is continuously maintained cmd Accordingly (see Figure 3 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the measured amplitude Q mes However, it gradually increases from t=t1, reaching a local maximum value Q max1 (Q max0 max1 ​After showing ([0]), it gradually decreases (see the broken line in FIG. 3). This is because although the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases as the pressure P decreases, the mutual diffusion of the atoms of the base materials of the first workpiece W1 and the second workpiece W2 progresses. The maximum amplitude value Q of the amplitude max1 The power corresponding to [] is, for example, sufficient power to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0041] And immediately after the time t = t2, the vertical position H of the translational drive device 222 is feedback-controlled so that the pressure P decreases from the final pressure P end to 0 (see the dashed-dotted line in FIG. 3). As a result, the vertical position H of the translational drive device 222 slightly rises immediately after the time t = t2 and is then maintained at that position (see the solid line in FIG. 3). Further, immediately after the time t = t2, the amplitude instruction Q is such that the amplitude Q of the tip of the horn tip 40 decreases from the initial amplitude Q int to 0 (see the double-dashed line in FIG. 3), and the excitation operation of the ultrasonic composite vibration element 10 is stopped. At this time, the actually measured amplitude Q cmd decreases further from t = t3 and reaches 0 (see the broken line in FIG. 3). mes

[0042] In a modification of the first embodiment, while controlling the excitation operation of the ultrasonic composite vibration element 10 according to the amplitude instruction Q that maintains the amplitude Q at the initial amplitude Q int , the translational operations of the ultrasonic composite vibration element 10 and the ultrasonic bonding tip 40 are controlled so that the pressure P continuously decreases from the initial pressure P cmd to the final pressure Pend (see the dashed-dotted line and the double-dashed line in the period of t = t1 to t2 in FIG. 3). int

[0043] And when controlling the excitation operation of the ultrasonic composite vibration element 10 according to the amplitude instruction Q that decreases the amplitude Q from the initial amplitude Q int to 0, the pressure P is the final pressure P cmd end ​​​The translational movement of the ultrasonic bonding chip 40 is controlled so as to decrease from 0 to 0 (refer to the one-dot chain line and two-dot chain line in FIG. 3 / t = t2 and thereafter).

[0044] (Effect) According to the ultrasonic bonding apparatus having the above-described configuration, by reducing the probability of occurrence of slippage between the horn chip 40 and the first workpiece W1 and slippage between the first workpiece W1 and the second workpiece W2, the quality of bonding of the first workpiece W1 and the second workpiece W2 can be improved.

[0045] (Ultrasonic bonding method (second embodiment)) The procedure of the ultrasonic bonding method as the second embodiment of the present invention by the ultrasonic bonding apparatus 1 will be described with reference to FIG. 4.

[0046] Before the time t = t0, with the tip of the horn chip 40 in contact with the first workpiece W1, the pressure P acting on the first workpiece W1 and the second workpiece W2 from the horn chip 40 is maintained at the initial pressure P int = P0 (the first specified pressure) (refer to the one-dot chain line in FIG. 4), and the vertical position H of the translational drive device 222, and thus the vertical position of the tip of the horn chip 40 is controlled to be constant (refer to the solid line in FIG. 4).

[0047] Immediately after the time t = t0, the amplitude Q of the tip of the horn chip 40 is increased from 0 to the initial amplitude Q int = Q0 (the first), and thereafter, the excitation operation of the ultrasonic composite vibration element 10 is controlled according to the amplitude instruction Q int so as to be maintained at the initial amplitude Q cmd (refer to the two-dot chain line in FIG. 4). Further, the vertical position H of the translational drive device 222 is feedback-controlled so that the pressure P is maintained at the initial pressure P int (refer to the one-dot chain line in FIG. 4). As a result, the vertical position H of the translational drive device 222 gradually decreases from the time t = t0 (refer to the solid line in FIG. 4). At this time, from the time t = t0, the actually measured amplitude Q mes gradually increases, and the maximum value Q max0The amplitude gradually decreases after showing the peak (see Figure 4 / dashed line). This is because the friction between the surfaces of the first workpiece W1 and the second workpiece W2 causes each surface to become rougher and the frictional resistance to increase, which gradually increases the frictional force, and this frictional force acts to dampen the amplitude. This damping is more pronounced when the horn tip 40 has an elongated shape. The amplitude maximum value Q max0 The power provided is, for example, insufficient to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0048] Next, immediately after time t=t1, the pressure P is the initial pressure P int The vertical position H of the translation drive unit 222 is feedback-controlled so that it is continuously maintained (see Figure 4 / dotted line). As a result, the vertical position H of the translation drive unit 222 gradually continues to descend immediately after time t=t1 (see Figure 4 / solid line). Furthermore, immediately after time t=t1, the amplitude Q of the tip of the horn tip 40 is reduced to the initial amplitude Q int An amplitude instruction Q that increases from =Q0 to an intermediate amplitude Q1 (first specified amplitude) and is maintained at that intermediate amplitude Q1. cmd Accordingly (see Figure 4 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the measured amplitude Q mes However, it gradually increases from t=t1, reaching a local maximum value Q max1 (Q max0 max1 The amplitude maximal value Q is shown above and then gradually decreases (see Figure 4 / dashed line). This is because, as the pressure P decreases, the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases, but the solid-state bonding of the base materials of the first workpiece W1 and the second workpiece W2 progresses. max1 The power provided is, for example, insufficient to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0049] Next, immediately after time t=t2, the pressure P is the initial pressure P int ​The vertical position H of the translation drive unit 222 is feedback-controlled so that it is continuously maintained (see Figure 4 / dotted line). As a result, the vertical position H of the translation drive unit 222 gradually continues to descend immediately after time t=t2 (see Figure 4 / solid line). Furthermore, immediately after time t=t2, the amplitude Q of the tip of the horn tip 40 changes from the intermediate amplitude Q1 to the final amplitude Q end = Q2 (second specified amplitude) increases, and the final amplitude Q end Amplitude instruction Q that is maintained cmd Accordingly (see Figure 4 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the measured amplitude Q mes However, it gradually increases from t=t2, reaching a local maximum value Q max2 (Q max1 max2 The amplitude maximal value Q is shown above and then gradually decreases (see Figure 4 / dashed line). This is because, as the pressure P decreases, the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases, but the solid-state bonding of the base materials of the first workpiece W1 and the second workpiece W2 progresses. max1 The corresponding power is sufficient, for example, to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0050] Then, immediately after time t=t3, the pressure P is the final pressure P end The vertical position H of the translation drive unit 222 is feedback-controlled so that it decreases from =P2 to 0 (see Figure 4 / dotted line). As a result, the vertical position H of the translation drive unit 222 continues to gradually decrease immediately after time t=t3 (see Figure 4 / solid line). Furthermore, immediately after time t=t3, the amplitude Q of the tip of the horn tip 40 decreases from the initial amplitude Q int An amplitude instruction Q that decreases from to 0. cmd Accordingly (see Figure 4 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is stopped. At this time, the measured amplitude Q mes However, it decreases further from t=t3 to 0 (see Figure 4 / dashed line).

[0051] In the second embodiment, the pressure P is set to the initial pressure P int ​The translational motion of the ultrasonic bonding tip 40 is controlled to maintain the amplitude Q at the initial amplitude Q. int From the final amplitude Q end An amplitude instruction Q that intermittently or continuously decreases up to a certain point. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled (see the dashed and double-dotted lines in Figure 4 / t=t0~t3). The pressure P is the initial pressure P int The translational motion of the ultrasonic bonding tip 40 is controlled to maintain the amplitude Q (see the dashed line in Figure 4 / t=t0~t3). int From the initial designated amplitude Q0 to the final amplitude Q end The mth specified amplitude Q as m Until (m=2), the amplitude Q is the j-th specified amplitude Q j An amplitude instruction Q that maintains (0 ≤ j ≤ m) and then decreases. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled (see the dashed line in Figure 4 / t=t0~t3). "m" can be 2, or multiple values ​​of 3 or more, such as 3 or 4.

[0052] Then, the amplitude Q is the final amplitude Q end An amplitude instruction Q that reduces the value from to 0. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled (see the dashed line immediately after t=t3 in Figure 4). At this time, the pressure P is set to the initial pressure P int The translational motion of the ultrasonic bonding tip 40 is controlled to decrease from to 0 (see the dashed line immediately after t=t3 in Figure 4).

[0053] Amplitude Q is specified as j Amplitude Q j The duration of the jth amplitude that is maintained is T Qj For the amplitude Q, the amplitude Q is specified as j+1. j+1 The duration of the j+1 amplitude T is maintained. Qj+1 The ratio (T Qj+1 / T Qj ) may be included in the range of 0.6 to 0.8.

[0054] initial amplitude Q int Final amplitude Q end The ratio (Q end / Q int ) may be included in the range of 0.3 to 0.5.

[0055] (effect) The ultrasonic bonding apparatus with the above configuration improves the bonding quality of the first workpiece W1 and the second workpiece W2 by reducing the probability of slippage between the horn tip 40 and the first workpiece W1, and between the first workpiece W1 and the second workpiece W2.

[0056] (Ultrasonic bonding method (third embodiment)) The procedure for the ultrasonic bonding method as a third embodiment of the present invention using the ultrasonic bonding apparatus 1 will be explained with reference to Figure 5.

[0057] Before time t=t0, with the tip of the horn tip 40 in contact with the first workpiece W1, the pressure P acting from the horn tip 40 on the first workpiece W1 and the second workpiece W2 is the initial pressure P int The vertical position H of the translation drive unit 222, and consequently the vertical position of the tip of the horn tip 40, are controlled to remain constant so that it is maintained at =P0 (the 0th designated pressure) (see Figure 5 / dotted line).

[0058] Immediately after time t=t0, the amplitude Q of the tip of the horn tip 40 changes from 0 to the initial amplitude Q. int The amplitude is increased to Q0 (the 0th specified amplitude), and then the initial amplitude Q is increased. int Amplitude instruction Q that is maintained cmd Accordingly (see Figure 5 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. Furthermore, the pressure P is the initial pressure P int The vertical position H of the translation drive unit 222 is feedback-controlled so that it is maintained at =P0. As a result, the vertical position H of the translation drive unit 222 gradually decreases from immediately after time t=t0 (see Figure 5 / solid line). At this time, the measured amplitude Q mes However, it gradually increases from t=t0, reaching a local maximum value Q max0The amplitude gradually decreases after showing the peak (see Figure 5 / dashed line). This is because the frictional force gradually increases as the surfaces of the first workpiece W1 and the second workpiece W2 rub against each other, causing each surface to become rougher and increasing frictional resistance. This frictional force acts to dampen the amplitude. This damping is more pronounced when the horn tip 40 has an elongated shape. The amplitude maximum value Q max0 The power provided is, for example, insufficient to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0059] Next, immediately after time t=t1, the pressure P is the initial pressure P int The vertical position H of the translation drive unit 222 is feedback-controlled so that it is continuously maintained (see Figure 5 / dotted line). As a result, the vertical position H of the translation drive unit 222 continuously decreases from time t=t1 (see Figure 5 / solid line). Furthermore, immediately after time t=t1, the amplitude Q of the tip of the horn tip 40 is lowered to the initial amplitude Q int An amplitude instruction Q that increases from =Q0 to the first specified amplitude Q1, and then is maintained at the first specified amplitude Q1. cmd Accordingly (see Figure 5 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the measured amplitude Q mes However, it gradually increases from t=t1, reaching a local maximum value Q max1 (Q max0 max1 The amplitude maximal value Q is shown above and then gradually decreases (see Figure 5 / dashed line). This is because, as the pressure P decreases, the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases, but the solid-state bonding of the base materials of the first workpiece W1 and the second workpiece W2 progresses. max1 The power provided is, for example, insufficient to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0060] Next, immediately after time t=t2, the pressure P is the initial pressure P int ​so as to be continuously maintained (refer to FIG. 5 / dashed-dotted line), the vertical position H of the translational drive device 222 is feedback-controlled. As a result, the vertical position H of the translational drive device 222 continuously decreases from immediately after time t = t2 (refer to FIG. 5 / solid line). Further, immediately after time t = t2, the amplitude Q of the tip of the horn tip 40 increases from the intermediate amplitude Q1 to the second specified amplitude Q2, and an amplitude instruction Q such that the amplitude is maintained at the second specified amplitude Q2 cmd in accordance with (refer to FIG. 5 / double-dashed line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the actually measured amplitude Q mes gradually increases from t = t2, and the maximum value Q max2 (Q max1 < Q max2 ) and then gradually decreases (refer to FIG. 5 / dotted line). This is because although the frictional force between the surfaces of the first work W1 and the second work W2 decreases as the pressure P decreases, the solid-phase bonding of the base materials of the first work W1 and the second work W2 progresses. The power corresponding to the amplitude maximum value Q max2 is, for example, insufficient power to complete the solid-phase bonding of the first work W1 and the second work W2.

[0061] Next, immediately after time t = t3, the pressure P decreases from the initial pressure P int = P0 to an intermediate pressure P1 (<P0) (the first specified pressure), and then the vertical position H of the translational drive device 222 is feedback-controlled so as to be maintained at the intermediate pressure P1 (refer to FIG. 5 / dashed-dotted line). As a result, the vertical position H of the translational drive device 222 slightly increases immediately after time t = t3 and then gradually decreases (refer to FIG. 5 / solid line). Further, immediately after time t = t3, the amplitude Q of the tip of the horn tip 40 increases from the second specified amplitude Q2 to the third specified amplitude Q3, and an amplitude instruction Q such that the amplitude is maintained at the third specified amplitude Q3 cmd in accordance with (refer to FIG. 5 / double-dashed line), the excitation operation of the ultrasonic composite vibration element 10 is controlled. At this time, the actually measured amplitude Q mes gradually increases from immediately after t = t3, and the maximum value Q max3 (Q max2 < Q max3decreases gradually after showing (refer to the dashed line in Fig. 5). This is because although the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases as the pressure P decreases, the solid-phase bonding of the base materials of the first workpiece W1 and the second workpiece W2 progresses. The amplitude maximum value Q max3 The power corresponding to is, for example, sufficient power to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0062] Subsequently, immediately after time t = t4, the pressure P decreases from the intermediate pressure P1 to the final pressure P end = P2 (< P1) (the second specified pressure), and then the vertical position H of the translational drive device 222 is feedback-controlled so as to be maintained at the final pressure P end (refer to the one-dot chain line in Fig. 5). As a result, the vertical position H of the translational drive device 222 slightly increases immediately after time t = t4, and then gradually decreases (refer to the solid line in Fig. 5). Further, immediately after time t = t4, the amplitude Q of the tip of the horn tip 40 increases from the third specified amplitude Q2 to the final amplitude Q end = Q4 (the fourth specified amplitude), and the excitation operation of the ultrasonic composite vibration element 10 is controlled according to the amplitude instruction Q end so as to be maintained at the final amplitude Q cmd (refer to the two-dot chain line in Fig. 5). At this time, the measured amplitude Q mes gradually increases from time t = t4, shows a maximum value Q max4 (Q max3 < Q max4 ) and then decreases gradually (refer to the dashed line in Fig. 5). This is because although the frictional force between the surfaces of the first workpiece W1 and the second workpiece W2 decreases as the pressure P decreases, the solid-phase bonding of the base materials of the first workpiece W1 and the second workpiece W2 progresses. The power corresponding to the amplitude maximum value Q max4 is, for example, sufficient power to complete the solid-phase bonding of the first workpiece W1 and the second workpiece W2.

[0063] And immediately after time t = t5, the pressure P is at the final pressure P endThe vertical position H of the translation drive unit 222 is feedback-controlled so that it decreases from =P4 to 0 (see Figure 5 / dotted line). As a result, the vertical position H of the translation drive unit 222 rises slightly immediately after time t=t5 and is then maintained at that position (see Figure 5 / solid line). During this time, the amplitude Q of the tip of the horn tip 40 is the final amplitude Q end An amplitude instruction Q that decreases from to 0. cmd Accordingly (see Figure 5 / dotted line), the excitation operation of the ultrasonic composite vibration element 10 is stopped. At this time, the measured amplitude Q mes However, it decreases further from t=t3 to 0 (see Figure 5 / dashed line).

[0064] In the third embodiment, similar to the first embodiment, the pressure P is set to the initial pressure P int From final pressure P end The translational motion of the ultrasonic bonding tip 4 is controlled to intermittently or continuously decrease the amplitude Q to an initial amplitude Q, and, similar to the second embodiment, the amplitude Q is reduced to an initial amplitude Q. int From the final amplitude Q end An amplitude instruction Q that intermittently or continuously decreases up to a certain point. cmd Accordingly, the excitation operation of the ultrasonic composite vibration element 10 is controlled (see the dashed and double-dotted lines in Figure 5 / t=t0~t5). The pressure P is the initial pressure P int From the initial designated pressure P0 to the final pressure P end The nth designated pressure P n Until n=2, the pressure P is set to the i-th designated pressure P i The translational movement of the ultrasonic bonding tip 40 is controlled to maintain and then decrease the amplitude between (0 ≤ i ≤ n) (see the dashed line in Figure 5 / t=t0~t5). "n" can be 2 or more. Furthermore, the amplitude Q is the initial amplitude Q int From the initial designated amplitude Q0 to the final amplitude Q end The mth specified amplitude Q as m Until (m=4), the amplitude Q is the j-th specified amplitude Q j An amplitude instruction Q that maintains (0 ≤ j ≤ m) and then decreases. cmdThe excitation operation of the ultrasonic composite vibration element 10 is controlled accordingly (see the dashed line in Figure 5 / t=t0~t5). "m" can be 4, 2, 3, or 5 or more. <mであるほか、n=mまたはm<nであってもよい。

[0065] Then, the amplitude Q is the initial amplitude Q int An amplitude instruction Q that reduces the value from to 0. cmd When the excitation operation of the ultrasonic composite vibration element is controlled accordingly, the pressure P is set to the final pressure P end The translational motion of the ultrasonic bonding tip 40 is controlled to decrease from to 0 (see the dashed and double-dotted lines immediately after t=t5 in Figure 5).

[0066] Pressure P is specified pressure P i The i-th pressure maintenance period T is maintained at this level. Pi The number of times the amplitude Q decreases is equal to the pressure P being i+1 specified pressure P i+1 The i+1th pressure maintenance period T is maintained at this level. Pi+1 The number of times the amplitude Q decreases may be greater than or equal to the number of times the amplitude Q decreases.

[0067] The timing of at least one decrease in pressure P coincides with the timing of at least one increase in amplitude Q (see Figure 5 / t=t4 and t5). The timing of the decrease in pressure P and the timing of one increase in amplitude Q do not necessarily coincide.

[0068] Pressure P is specified pressure P i The i-th pressure maintenance period T is maintained at this level. Pi The pressure P is the prei+1 specified pressure P i+1 The i+1th pressure maintenance period T is maintained at this level. Pi+1 The ratio (T Pi+1 / T Pi ) may be included in the range of 0.6 to 0.8.

[0069] Initial pressure P int Final pressure P end The ratio (P end / P int ) may be included in the range of 0.3 to 0.5.

[0070] Amplitude Q is specified as j Amplitude Q j The duration of the jth amplitude that is maintained is T Qj For the amplitude Q, the amplitude Q is specified as j+1. j+1 The duration of the j+1 amplitude T is maintained. Qj+1 The ratio (T Qj+1 / T Qj ) may be included in the range of 0.6 to 0.8.

[0071] initial amplitude Q int Final amplitude Q end The ratio (Q end / Q int ) may be included in the range of 0.3 to 0.5.

[0072] (effect) The ultrasonic bonding apparatus with the above configuration improves the bonding quality of the first workpiece W1 and the second workpiece W2 by reducing the probability of slippage between the horn tip 40 and the first workpiece W1, and between the first workpiece W1 and the second workpiece W2.

[0073] (Other embodiments of the present invention) In the above embodiment, the ultrasonic bonding apparatus was of the ultrasonic composite vibration type, but in other embodiments, it may be an ultrasonic bonding apparatus of the ultrasonic simple harmonic vibration type. In such other embodiments, for example, the plurality of slits 124 may be omitted in the second ultrasonic vibration element 120, and the axial ultrasonic vibration (ultrasonic simple harmonic vibration) generated by the excitation of the first ultrasonic vibration element 110 in the axial direction may be transmitted to the horn tip 40. [Explanation of symbols]

[0074] 10. Ultrasonic combined vibration device 100...Intermediate ultrasonic vibration element 102...Intermediate flange 110...First ultrasonic vibration element 112. Piezoelectric material 120...Second ultrasonic vibration element 122...Frequency adjustment element 124... Slit 126‥Tip 128... Hole 18... Anvil 20‥Operation device 22. Control device 221‥High frequency power supply equipment 222... Translational drive device 224... State sensor 40. Horn tip (tip for ultrasonic bonding) W1...Work 1 W2... Second work.

Claims

1. Ultrasonic vibration element, The system includes a control device that controls the excitation and translational movements of the ultrasonic vibration element, An ultrasonic bonding apparatus that bonds multiple workpieces by transmitting ultrasonic vibrations generated by the excitation operation of the ultrasonic vibration element to multiple workpieces via an ultrasonic bonding tip, The control device, The pressure P applied from the ultrasonic bonding tip to the plurality of workpieces is the initial pressure P int The translational motion of the ultrasonic bonding tip is controlled to raise it to an initial amplitude Q, and the amplitude Q of the ultrasonic bonding tip is set to an initial amplitude Q. int An amplitude instruction Q that raises the amplitude to a certain level. cmd Accordingly, the excitation operation of the ultrasonic vibration element is controlled, The aforementioned pressure P is the initial pressure P int From final pressure P end The translational motion of the ultrasonic bonding tip is controlled to intermittently or continuously decrease the amplitude Q to the initial amplitude Q, and alternatively or additionally, the amplitude Q is controlled to decrease Q to the initial amplitude Q. int From final pressure Q end An amplitude instruction Q that intermittently or continuously decreases up to a certain point. cmd Accordingly, the excitation operation of the ultrasonic vibration element is controlled, The amplitude Q is set to the initial amplitude Q int or the final amplitude Q end When controlling the excitation operation of the ultrasonic vibration element according to the amplitude instruction Q that decreases from the above to 0 cmd the pressure P is decreased from the initial pressure P int or the final pressure P end to 0 Ultrasonic bonding equipment.

2. The control device, The amplitude Q is the initial amplitude Q int An amplitude instruction Q that maintains this value. cmd Accordingly, while controlling the excitation operation of the ultrasonic vibration element, the pressure P is set to the initial pressure P int From final pressure P end The translational motion of the ultrasonic bonding tip is controlled to decrease intermittently or continuously until it reaches a certain value. The amplitude Q is the initial amplitude Q int An amplitude instruction Q that reduces from to 0. cmd When controlling the excitation operation of the ultrasonic vibration element accordingly, the pressure P is set to the final pressure P end Control the translational motion of the ultrasonic bonding tip to decrease it from to 0. Ultrasonic bonding equipment.

3. In the ultrasonic bonding apparatus according to claim 2, The control device, The amplitude Q is the initial amplitude Q int An amplitude instruction Q that maintains this value. cmd Accordingly, while controlling the excitation operation of the ultrasonic vibration element, the pressure P is set to the initial pressure P int Designated pressure P as the 0th specified pressure 0 From the aforementioned final pressure P end The nth designated pressure P n Until (2 ≤ n), the pressure P is set to the i-th designated pressure P i The translational motion of the ultrasonic bonding tip is controlled to maintain (0 ≤ i ≤ n) and then decrease it. Ultrasonic bonding equipment.

4. In the ultrasonic bonding apparatus according to claim 3, The aforementioned pressure P is the specified pressure P i The i-th pressure maintenance period T is maintained at this level. Pi The pressure P is the i+1 specified pressure P i+1 The i+1th pressure maintenance period T is maintained at this level. Pi+1 The ratio (T Pi+1 / T Pi ) is included in the range of 0.6 to 0.8 Ultrasonic bonding equipment.

5. In the ultrasonic bonding apparatus according to claim 2, The initial pressure P int The final pressure P end The ratio (P end / P int ) is included in the range of 0.3 to 0.5 Ultrasonic bonding equipment.

6. The control device, The aforementioned pressure P is the initial pressure P int While controlling the translational motion of the ultrasonic bonding tip to maintain the amplitude Q at the initial amplitude Q, int From the final amplitude Q end An amplitude instruction Q that intermittently or continuously decreases up to a certain point. cmd Accordingly, the excitation operation of the ultrasonic vibration element is controlled, The amplitude Q is the final amplitude Q end An amplitude instruction Q that reduces from to 0. cmd When controlling the excitation operation of the ultrasonic vibration element accordingly, the pressure P is set to the initial pressure P int Control the translational motion of the ultrasonic bonding tip to decrease it from to 0. Ultrasonic bonding equipment.

7. In the ultrasonic bonding apparatus according to claim 6, The control device, The aforementioned pressure P is the initial pressure P int While controlling the translational motion of the ultrasonic bonding tip so that the amplitude Q is maintained at the initial amplitude Q int The 0th designated amplitude Q 0 From the aforementioned final amplitude Q end The mth specified amplitude Q m Until (2 ≤ m), the amplitude Q is set to the j-th designated amplitude Q j An amplitude instruction Q that maintains (0 ≤ j ≤ m) and then decreases. cmd Controlling the excitation operation of the ultrasonic vibration element accordingly Ultrasonic bonding equipment.

8. In the ultrasonic bonding apparatus according to claim 7, The amplitude Q is the specified amplitude Q j The duration of the jth amplitude that is maintained is T Qj The amplitude Q is the specified amplitude Q of j+1. j+1 The duration T of the j+1 amplitude that is maintained Qj+1 The ratio (T Qj+1 / T Qj ) is included in the range of 0.6 to 0.8 Ultrasonic bonding equipment.

9. In the ultrasonic bonding apparatus according to claim 6, The initial amplitude Q int The final amplitude Q for the above end The ratio (Q) end / Q int ) is included in the range of 0.3 to 0.5 Ultrasonic bonding equipment.

10. The control device, The aforementioned pressure P is the initial pressure P int From final pressure P end The translational motion of the ultrasonic bonding tip is controlled to intermittently or continuously decrease the amplitude Q to the initial amplitude Q. int From the final amplitude Q end An amplitude instruction Q that intermittently or continuously decreases up to a certain point. cmd Accordingly, the excitation operation of the ultrasonic vibration element is controlled, The amplitude Q is the initial amplitude Q int An amplitude instruction Q that reduces from to 0. cmd When controlling the excitation operation of the ultrasonic vibration element accordingly, the pressure P is set to the final pressure P end Control the translational motion of the ultrasonic bonding tip to decrease it from to 0. Ultrasonic bonding equipment.

11. In the ultrasonic bonding apparatus according to claim 10, The control device, The pressure P is the initial pressure P int Designated pressure P as the 0th specified pressure 0 From the aforementioned final pressure P end The nth designated pressure P n Until (2 ≤ n), the pressure P is set to the i-th designated pressure P i The translational movement of the ultrasonic bonding tip is controlled to maintain and then decrease the pressure P, and the pressure P is the initial pressure P int While controlling the translational motion of the ultrasonic bonding tip so that the amplitude Q is maintained at the initial amplitude Q int The 0th designated amplitude Q 0 From the aforementioned final amplitude Q end The mth specified amplitude Q m Until (2 ≤ m), the amplitude Q is set to the j-th designated amplitude Q j An amplitude instruction Q that maintains (0 ≤ j ≤ m) and then decreases. cmd Controlling the excitation operation of the ultrasonic vibration element accordingly Ultrasonic bonding equipment.

12. In the ultrasonic bonding apparatus according to claim 11, n < m Ultrasonic bonding equipment.

13. In the ultrasonic bonding apparatus according to claim 12, The aforementioned pressure P is the specified pressure P i The i-th pressure maintenance period T is maintained at this level. Pi The number of times the amplitude Q decreases in the above is equal to the pressure P being the i+1 specified pressure P i+1 The i+1th pressure maintenance period T is maintained at this level. Pi+1 The number of times the amplitude Q decreases is greater than or equal to the number of times the amplitude Q decreases in the above case. Ultrasonic bonding equipment.

14. In the ultrasonic bonding apparatus according to claim 11, The control device synchronizes the timing of at least one decrease in the pressure P with the timing of at least one increase in the amplitude Q. Ultrasonic bonding equipment.

15. In the ultrasonic bonding apparatus according to claim 10, The ratio of the i-th pressure maintenance period T i during which the pressure P is maintained at the i-th specified pressure P Pi to the (i + 1)-th pressure maintenance period T i+1 during which the pressure P is maintained at the (i + 1)-th specified pressure P Pi+1 is within the range of 0.6 to 0.8 (T Pi+1 / T Pi ) Ultrasonic bonding equipment.

16. In the ultrasonic bonding apparatus according to claim 10, The initial pressure P int The final pressure P end The ratio (P end / P int ) is included in the range of 0.3 to 0.5 Ultrasonic bonding equipment.

17. In the ultrasonic bonding apparatus according to claim 10, The amplitude Q is maintained at the j-specified amplitude Q j during the j-th amplitude maintenance period T Qj with respect to the amplitude Q being maintained at the (j + 1)-specified amplitude Q j+1 during the (j + 1)-th amplitude maintenance period T Qj+1 The ratio (T Qj+1 / T Qj ) is included in the range of 0.6 to 0.8 Ultrasonic bonding equipment.

18. In the ultrasonic bonding apparatus according to claim 10, The initial amplitude Q int The final amplitude Q for the above end The ratio (Q) end / Q int ) is included in the range of 0.3 to 0.5 Ultrasonic bonding equipment.

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