Vibration isolation device, lens device, and imaging device

Abstract

To provide a compact vibration isolation device. [Solution] The vibration isolation device (200) is positioned between a first fixed part (202) and a second fixed part (209) and includes a first movable part (203) that moves in a first direction in a plane perpendicular to the optical axis (210), a second movable part (205) that is positioned between the first movable part and the second fixed part and moves in a second direction different from the first direction in a plane perpendicular to the optical axis, a first drive unit (204) that drives the first movable part, and a second drive unit that drives the second movable part. The device has a moving part (206) and biasing means (208, 603) that bias the first movable part and the second movable part with respect to the first fixed part and the second fixed part. Viewed from the optical axis direction, the biasing means is located in a first region (401) on the opposite side of the optical axis from the first drive part and the second drive part, and between a first line (402) extending in a first direction through the optical axis and a second line (403) extending in a second direction through the optical axis.

Description

Technical Field

[0001] The present invention relates to a vibration isolation device, a lens device, and an imaging device.

Background Art

[0002] Patent Document 1 discloses a lens driving device having two movable bodies, an actuator for driving each movable body, a ball for supporting each movable body, and a plurality of biasing portions.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Since the lens driving device disclosed in Patent Document 1 has a plurality of biasing portions to prevent the balls from dropping, it becomes large-sized.

[0005] Therefore, an object of the present invention is to provide a small-sized vibration isolation device.

Means for Solving the Problems

[0006] An imaging device as one aspect of the present invention includes: a first movable part disposed between a first fixed part and a second fixed part and moving in a first direction in a plane perpendicular to the optical axis; a second movable part disposed between the first movable part and the second fixed part and moving in a second direction different from the first direction in a plane perpendicular to the optical axis; a first drive unit for driving the first movable part; a second drive unit for driving the second movable part; and a biasing means for biasing the first movable part and the second movable part with respect to the first fixed part and the second fixed part, respectively, wherein, as viewed from the optical axis direction, the biasing means is located on the opposite side of the optical axis from the first drive unit and the second drive unit, respectively, and is positioned in a first region between a first line passing through the optical axis and extending in the first direction and a second line passing through the optical axis and extending in the second direction.

[0007] Other objects and features of the present invention are described in the following examples. [Effects of the Invention]

[0008] According to the present invention, a compact vibration isolation device can be provided. [Brief explanation of the drawing]

[0009] [Figure 1] These are schematic and block diagrams of the imaging device in Example 1. [Figure 2] This is an exploded perspective view of the vibration isolation means in Example 1. [Figure 3] This is an explanatory diagram of the guide in the optical axis direction of the actuator in Example 1. [Figure 4] This is an explanatory diagram of the position of the biasing mechanism in Example 1. [Figure 5] This is an explanatory diagram of the behavior of the biasing mechanism in Example 1. [Figure 6] This is an exploded perspective view of the vibration isolation means in Example 2. [Figure 7] This is an explanatory diagram of the behavior of the biasing mechanism in Example 2. [Figure 8] These are schematic and block diagrams of the imaging device in Example 3. [Figure 9] This is an explanatory diagram illustrating the positional relationship between the first and second optical vibration isolation means in Example 3. [Modes for carrying out the invention]

[0010] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. [Examples]

[0011] First, the imaging system 100 in Embodiment 1 of the present invention will be described with reference to Figures 1(a) and 1(b). Figure 1(a) is a schematic diagram (central cross-sectional view) of the imaging system 100. Figure 1(b) is a block diagram showing the electrical configuration of the imaging system 100. In this embodiment, the imaging system 100 includes a camera body (imaging device) 1 and a lens device 2 that is detachable from the camera body 1. However, this embodiment is not limited to this and can also be applied to imaging devices in which the camera body and lens device are integrally configured. In this embodiment, the camera body 1 and the lens device 2 each have vibration isolation means, but this is not limited to this. This embodiment can also be applied to imaging systems in which only the camera body 1 has vibration isolation means, or to imaging systems in which only the lens device 2 has vibration isolation means.

[0012] In Figures 1(a) and 1(b), 3 is the camera system control unit, 4 is the image sensor, 5 is the image processing unit, 6 is the memory means, and 7 is the display means. 8 is an operation detection unit that detects signals from operating means, including a shutter release button (not shown). 9 is an electrical contact that communicates between the camera body 1 and the lens device 2.

[0013] 10 is a lens system control unit provided in the lens device 2. 11 is an imaging optical system provided in the lens device 2, having multiple lenses. 12 is the optical axis of the imaging optical system 11, and 11a is a blur correction lens that performs image stabilization (vibration prevention). 13 is a lens blur correction means that drives the blur correction lens 11a in a plane perpendicular to the optical axis 12. 14 is a camera blur correction means that drives the image sensor 4 in a plane perpendicular to the optical axis 12. 15 is a camera blur detection means provided in the camera body 1 that detects the amount of blur of the imaging system 100. 16 is a lens blur detection means provided in the lens device 2 that detects the amount of blur of the imaging system 100.

[0014] The imaging system 100, consisting of a camera body 1 and a lens device 2, includes imaging means, image processing means, recording and playback means, and control means. The imaging means includes an imaging optical system 11 and an image sensor 4. The image processing means includes an image processing unit 5. The recording and playback means includes a memory means 6 and a display means 7. The control means includes a camera system control unit 3, an operation detection unit 8, a camera shake detection means 15, a camera shake correction means 14, a lens system control unit 10, a lens shake detection means 16, and a lens shake correction means 13. The lens system control unit 10 can also drive a focus lens (not shown) and an aperture (aperture diaphragm) in addition to the shake correction lens 11a using a drive means (not shown).

[0015] The camera shake detection means 15 and the lens shake detection means 16 are capable of detecting rotational shake relative to the optical axis 12 applied to the imaging system 100, and this is achieved using, for example, a vibration gyroscope. Based on the amount of rotational shake detected by the camera shake detection means 15 or the lens shake detection means 16, the camera shake correction means 14 drives the image sensor 4, and the lens shake correction means 13 drives the shake correction lens 11a, both on a plane perpendicular to the optical axis 12.

[0016] The camera shake detection means 15 has, for example, an acceleration sensor and can detect translational shake applied to the imaging system 100. Therefore, the camera shake correction means 14 drives the imaging element 4 in a plane perpendicular to the optical axis 12 based on the rotational shake and translational shake detected by the camera shake detection means 15.

[0017] The imaging means described above is an optical processing system that forms an image of light from an object on the imaging surface of the imaging element 4 via the imaging optical system 11. Since a focus evaluation amount / suitable exposure amount can be obtained from the imaging element 4, the imaging optical system 11 is appropriately adjusted based on this signal. Thereby, object light with an appropriate light amount is exposed to the imaging element 4, and a subject image is formed near the imaging element 4.

[0018] The image processing unit 5 has an A / D converter, a white balance adjustment circuit, a gamma correction circuit, an interpolation operation circuit, etc., and can generate an image for recording. The color interpolation processing means is provided in the image processing unit 5 and performs color interpolation (demosaicking) processing on the signal of the Bayer array to generate a color image. Also, the image processing unit 5 compresses images, moving images, sounds, etc. using a predetermined method.

[0019] The memory means 6 has a storage unit such as an EEPROM. The camera system control unit 3 outputs an image etc. to the memory means 6 and displays an image presented to the user on the display means 7.

[0020] The camera system control unit 3 generates and outputs a timing signal etc. during imaging. It controls the imaging system (imaging means), the image processing system (image processing means), and the recording / playback system (recording / playback means) respectively in response to an external operation. For example, when the operation detection unit 8 detects the pressing of a shutter release button (not shown), the camera system control unit 3 controls the driving of the imaging element 4, the operation of the image processing unit 5, the compression processing, etc. Also, the camera system control unit 3 controls the state of each segment of the information display device that performs information display by the display means 7.

[0021] Specifically, the control method involves first detecting camera shake signals (rotational shake and translational shake) detected by the camera shake detection means 15 and lens shake detection means 16, respectively, from the camera system control unit 3 and lens system control unit 10. Based on these results, the camera system control unit 3 and lens system control unit 10 each calculate the amount of drive required for the image sensor 4 and the shake correction lens 11a to correct the image shake. Subsequently, the calculated drive amount is output as a drive command value to the camera shake correction means 14 and lens shake correction means 13, driving the image sensor 4 and the shake correction lens 11a, respectively.

[0022] Furthermore, as described above, the camera system control unit 3 and the lens system control unit 10 control the operation of each part of the camera body 1 and lens device 2 in response to user operations on operating means (not shown) provided on the camera body 1 and lens device 2. This enables the capture of both still images and videos.

[0023] (Configuration of image stabilization mechanism) Next, with reference to Figure 2, the mechanical configuration of the image stabilization means (vibration damping means) in this embodiment will be described. Figure 2 is an exploded perspective view of the lens image stabilization means 13. In this embodiment, the structure will be described using the lens image stabilization means 13 as the vibration damping means, but the camera image stabilization means 14 as the vibration damping means may have a similar structure. Note that, due to the many structural similarities, the description of the camera image stabilization means 14 will be omitted.

[0024] In Figure 2, 200 is a vibration stabilization unit (vibration isolation device). 201 is a vibration stabilization lens (lens), 202 is a first fixed base, 203 is a first movable part that moves (translatively) in the Y-axis direction (first direction) relative to the first fixed part 202, and 204 is a first actuator (first drive unit) that drives the first movable part 203. 205 is a second movable part that moves (translatively) the vibration stabilization lens 201 in the X-axis direction (second direction) relative to the first fixed part 202, and 206 is a second actuator (second drive unit) that drives the second movable part 205.

[0025] 207 (207a, 207b) is a rolling member that restricts the driving direction by grooves provided in the first fixed part 202, the first movable part 203, and the second movable part 205. The rolling member (first rolling member) 207a is a rolling ball provided between the first fixed part 202 and the first movable part 203. The rolling member (second rolling member) 207b is a rolling ball provided between the first movable part 203 and the second movable part 205. 208 is a biasing mechanism (biasing means), 209 is a second fixed part for fixing the biasing mechanism 208, and 210 is the optical axis. In this embodiment, the biasing mechanism 208 has a spring (compression spring). However, this embodiment is not limited to this, and the biasing mechanism 208 may have biasing means other than a compression spring as long as it is a mechanism that can bias the movable part relative to the fixed part.

[0026] The image stabilization unit 200 is a correction means that corrects image blur by driving the image stabilization lens 201 in a plane perpendicular to the optical axis 210. Specifically, it has a layered structure consisting of a first movable part 203 that drives only in the Y-axis direction and a second movable part 205 that drives only in the X-axis direction. When the first movable part 203 is driven in the Y-axis direction, the second movable part 205 is also driven in the Y-axis direction. On the other hand, when the second movable part 205 is driven in the X-axis direction, only the second movable part 205 is driven. Therefore, by holding the image stabilization lens 201 in the second movable part 205, it is possible to drive the image stabilization lens 201 to any position in a plane perpendicular to the optical axis 210.

[0027] In Figure 2, the rolling member 207 is fixed by being sandwiched between the first fixed part 202 or the first movable part 203 and the second movable part 205. Therefore, if the blur correction unit 200 is shaken in the optical axis direction (Z direction), it may easily fall out. Thus, a mechanism to bias in the optical axis direction is necessary. The first actuator 204 elastically holds the first movable part 203, and the second actuator 206 elastically holds the second movable part 205, both in the optical axis direction, using the elasticity of the actuators themselves. Details regarding the guidance of each actuator in the optical axis direction will be described later. Preferably, the first actuator 204 and the second actuator 206 are, for example, small piezoelectric actuators that can be driven at high speed. In other words, since the movement in the optical axis direction is restricted in the region elastically held by the actuators, it is necessary to provide a biasing mechanism 208 in the region where there are no actuators. A detailed explanation of the positional relationship between the actuators and the biasing mechanism will be described later with reference to the figure.

[0028] Next, the guidance of the actuator (first actuator) in the optical axis direction will be explained with reference to Figures 3(a) and (b). Figures 3(a) and (b) are explanatory diagrams of the guidance of the first actuator in the optical axis direction. Figure 3(a) shows a schematic diagram of the area around the first actuator viewed from the Z direction. Figure 3(b) shows a schematic diagram of the area around the first actuator viewed from the Y direction.

[0029] In Figures 3(a) and 3(b), 301 is the first fixed part (corresponding to the first fixed part 202 in Figure 2), 302 is the first movable part (corresponding to the first movable part 203 in Figure 2), and 303 is the first actuator (corresponding to the first actuator 204 in Figure 2). A guide bar extends from the first fixed part 301 and passes through an elongated hole formed in the first movable part 302 that is long in the optical axis direction. With this configuration, the first actuator 303 guides the first movable part 302 along the elongated hole in the optical axis direction. The second actuator has a similar configuration. However, in this embodiment, the guide configuration is not limited to the configuration of a guide bar and an elongated hole, and other configurations are also acceptable as long as guidance in the optical axis direction is possible.

[0030] (Positional relationship between actuator and biasing mechanism) Next, with reference to Figure 4, the positional relationship between the first actuator 204 and the biasing mechanism 208 in the image stabilization unit 200 will be explained. Figure 4 is an explanatory diagram of the position of the biasing mechanism 208, and is shown as viewed from the optical axis direction (Z axis direction). In Figure 4, 401 is the region where the biasing mechanism 208 is located, 402 is the line extending from the first actuator 204 in the Y axis direction (first direction) (first line), and 403 is the line extending from the second actuator 206 in the X axis direction (second direction) (second line).

[0031] As described above, since the movement in the optical axis direction is restricted in the region elastically held by the actuator, it is necessary to place the biasing mechanism 208 in the region where there is no actuator.

[0032] Typically, a biasing mechanism is provided on the opposite side of each actuator. For example, if the first actuator 204 and the second actuator 206 are mounted at a 90° phase from each other, as shown in Figure 4, a biasing mechanism 208 is provided on the opposite side of the optical axis 210, at a 45° position relative to lines 402 and 403. This makes it possible to bias with a single biasing mechanism.

[0033] Furthermore, as shown in Figure 2, by providing a biasing mechanism 208 between the second fixed part 209 and the second movable part 205, it becomes possible to bias the entire movable part without providing a spring attachment point on the movable part and biasing it from the first fixed part 202 with a tension spring. In other words, by providing at least one biasing mechanism 208 in the region (first region) 401 on the opposite side of the optical axis of the first actuator 204 and the second actuator 206, the image stabilization unit 200 can be miniaturized. Also, since the region outside the range of region 401 is elastically held by the actuator, there is no need to provide other biasing mechanisms in the region outside the range of region 401. For this reason, according to this embodiment, the image stabilization unit 200 can be miniaturized.

[0034] Thus, in this embodiment, as viewed from the optical axis direction shown in Figure 4, the biasing mechanism 208 is located in region 401. Region 401 is the region opposite to the first actuator 204 and the second actuator 206 with respect to the optical axis 210. Region 401 is also the region between a line (first line) 402 extending in a first direction (e.g., the Y-axis direction) through the optical axis 210 and a line (second line) 403 extending in a second direction (e.g., the X-axis direction) through the optical axis 210.

[0035] In Figure 4, the first direction is the Y-axis direction and the second direction is the X-axis direction, but this embodiment is not limited to this. The first direction is the direction from the center of the first actuator 204 toward the optical axis 210, and the second direction is the direction from the center of the second actuator 206 toward the optical axis 210. Also, in this embodiment, the angle between the first direction and the second direction is not limited to 90°. If the angle (phase) between the first actuator 204 and the second actuator 206 is not 90°, the angle between the first direction and the second direction is equal to the angle between the two actuators.

[0036] Preferably, viewed from the direction of the optical axis, the biasing mechanism 208 is positioned in a second region of region 401, between line (third line) 404 and line (fourth line) 405, which pass through the optical axis 210 within the range of region 401 (a region formed with lines 404 and 405 as the boundary line). Here, when the angle between line 402 and line 404 (clockwise angle in Figure 4) is α(°) and the angle between line 403 and line 405 (counterclockwise angle in Figure 4) is β(°), preferably α=β=15. More preferably α=β=30. Even more preferably α=β=45 (that is, lines 404 and 405 are the same line that overlaps each other, and the biasing mechanism 208 is positioned on lines 404 and 405 which form an angle of 45° with lines 402 and 403, respectively).

[0037] This configuration makes it possible to provide a more stable and compact vibration isolation device.

[0038] (Behavior of the biasing mechanism) Next, the behavior of the biasing mechanism 208 when the movable part is driven will be explained with reference to Figures 5(a) to (d). Figures 5(a) to (d) are explanatory diagrams of the behavior of the biasing mechanism 208 using a compression spring. Figure 5(a) shows a schematic diagram of the biasing mechanism 208 viewed from the X direction. Figure 5(b) shows a schematic diagram of the biasing mechanism 208 viewed from the Z direction over the second fixed part 209. Figure 5(c) shows the behavior of the biasing mechanism 208 when the second movable part 205 is driven in the Y direction. Figure 5(d) shows the behavior of the biasing mechanism 208 when the second movable part 205 is driven in the X direction.

[0039] In Figure 5(a), 501 is the center line of the compression spring, which functions as the biasing mechanism 208. As shown in Figures 5(a) and (b), the compression spring is held sandwiched between the second movable part 205 and the second fixed part 209. Furthermore, when the image stabilization lens 201 is held centrally around the optical axis 210, the center line 501 of the compression spring is held approximately parallel to the optical axis 210. At this time, in order to prevent the rolling balls from falling out, the compression spring must already be generating a biasing force several times the weight of the movable part.

[0040] As shown in Figure 5(c), when the second movable part 205 is driven in the Y direction, the end face of the compression spring in contact with the second movable part 205 is also pulled in the Y direction, and the end face of the compression spring in contact with the second fixed part 209 is held in the initial position shown in Figure 5(b). The same is true when the second movable part 205 is driven in the X direction, as shown in Figure 5(d). In other words, when the second movable part 205 is driven, the compression spring generates a drag force perpendicular to the optical axis that tries to return to the state shown in Figure 5(b). Here, if the drive of the second movable part 205 is a small stroke of about several tens of micrometers, the drag force perpendicular to the optical axis 210 is also suppressed, making it possible to generate a constant biasing force in the direction of the optical axis. By changing parameters such as the wire diameter, material, and total length of the compression spring, it is possible to set the biasing force in the direction of the optical axis and the drag force perpendicular to the optical axis to arbitrary outputs. In this embodiment, the movable ranges of the first movable part 203 and the second movable part 205 are, for example, 100 μm or less.

[0041] As described above, in the shake correction means that is driven to translate in a plane perpendicular to the optical axis, the biasing mechanism is arranged on the opposite side of the actuator's optical axis (for example, region 401 in Figure 4). As a result, according to this embodiment, it is possible to prevent the rolling balls of the entire movable part from falling off while miniaturizing the shake correction means.

[0042] The image stabilization unit 200 in this embodiment is not limited to being provided on the lens device 2 to drive the image stabilization lens 201, but may also be provided on the camera body 1 to drive the image sensor 4. [Examples]

[0043] Next, the vibration correction means in Embodiment 2 of the present invention will be described. In this embodiment, a rolling member and an elastic member are used as the biasing means (biasing mechanism) of the vibration correction means.

[0044] Figure 6 is an exploded perspective view of the lens shake correction means 13 (13a) in this embodiment. The lens shake correction means 13a has a shake correction unit (vibration mitigation device) 200a. The basic configuration of the lens shake correction means 13a is the same as that of the lens shake correction means 13 described in Embodiment 1 with reference to Figure 2, so only the differences will be described in detail.

[0045] In Figure 6, 601 is the second movable part, 602 is the second fixed part, and 603 is the biasing mechanism (biasing means). The biasing mechanism 603 has rolling balls (rolling members) 603a and a rubber sheet (elastic member) 603b. The rolling balls 603a are used to maintain a constant biasing force with respect to the driving of the second movable part 601, and the rubber sheet 603b is used to generate an arbitrary biasing force. The rubber sheet 603b is fixed to the second fixed part 602, and the biasing mechanism 603 functions by sandwiching the rolling balls 603a between the rubber sheet 603b and the second movable part 601. Furthermore, the generated biasing force can be controlled by changing the thickness or material of the rubber sheet 603b.

[0046] (Behavior of the biasing mechanism) Next, the behavior of the biasing mechanism when the movable part is driven will be explained with reference to Figures 7(a) to (d). Figures 7(a) to (d) are explanatory diagrams of the behavior of the biasing mechanism 603 using rolling members and elastic members. Figure 7(a) shows a schematic diagram of the biasing mechanism 603 viewed from the X direction. Figure 7(b) shows a schematic diagram of the biasing mechanism 603 viewed from the Z direction through the second fixed part 602. Figure 7(c) shows the behavior of the biasing mechanism 603 when the second movable part 601 is driven in the Y direction. Figure 7(d) shows the behavior of the biasing mechanism 603 when the second movable part 601 is driven in the X direction.

[0047] As shown in Figures 7(a) and (b), the rolling ball 603a is held sandwiched between the second movable part 601 and the rubber sheet 603b, and the distance between the second movable part 601 and the rubber sheet 603 is set so that the rubber sheet 603b is always compressed and deformed. This generates an arbitrary biasing force. Also, when the image stabilization lens 201 is held in the center, the rolling ball 603a is held near the center of the rubber sheet 603b. As shown in Figure 7(c), when the second movable part 601 is driven in the Y direction, rolling or sliding occurs between the second movable part 601 and the rolling ball 603a. The same is true when the second movable part 601 is driven in the X direction, as shown in Figure 7(d).

[0048] Compared to the biasing mechanism 208 having a compression spring described in Example 1, the shape of the biasing mechanism 603 does not change in response to the driving of the second movable part 601, so the biasing force can be kept constant and the resistance to the driving can be suppressed. In other words, the biasing mechanism 603 can be biased without interfering with translational driving by applying pressure from the rolling balls 603a to the rubber sheet 603b.

[0049] Furthermore, in the biasing mechanism 208 having a compression spring, it is preferable to increase the overall length in order to reduce resistance in the driving direction and make the biasing force uniform. However, increasing the length may increase the size of the vibration correction unit in the thickness direction, so further miniaturization can be achieved by using a biasing mechanism 603 having rolling balls 603a and rubber sheet 603b.

[0050] As described above, in the image stabilization means that performs translational driving in a plane perpendicular to the optical axis, a biasing mechanism using rolling balls and a rubber sheet is employed. According to this embodiment, it is possible to maintain a constant biasing force while suppressing resistance to the drive, thereby enabling miniaturization of the image stabilization means. [Examples]

[0051] Next, the image stabilization means in Embodiment 3 of the present invention will be described. This embodiment relates to an imaging system equipped with two lens image stabilization means.

[0052] First, the imaging system 100a in this embodiment will be described with reference to Figures 8(a) and 8(b). Figure 8(a) is a schematic diagram (central cross-sectional view) of the imaging system 100a. Figure 8(b) is a block diagram showing the electrical configuration of the imaging system 100a. In this embodiment, the imaging system 100a includes a camera body (imaging device) 1 and a lens device 2a that can be attached to or removed from the camera body 1. However, this embodiment is not limited to this and can also be applied to imaging devices in which the camera body and lens device are integrally configured. The basic configuration of the imaging system 100a is the same as that of the imaging system 100 described in Embodiment 1 with reference to Figures 1(a) and 1(b), so only the differences will be described in detail.

[0053] In Figure 8, 81 is an imaging optical system consisting of multiple lenses provided on the lens device 2a. 81a and 81b are image stabilization lenses that perform image stabilization. 82 is a first lens image stabilization means (first optical image stabilization device) that drives the image stabilization lens (first lens) 81a in a plane perpendicular to the optical axis 12. 83 is a second lens image stabilization means (second optical image stabilization device) that drives the image stabilization lens (second lens) 81b in a plane perpendicular to the optical axis 12. The first lens image stabilization means 82 is, for example, a lens image stabilization means that drives with a large stroke and at a low speed. On the other hand, the second lens image stabilization means 83 is, for example, a lens image stabilization means that drives with a smaller stroke and at a higher speed than the first lens image stabilization means 82.

[0054] (Positional relationship between the two lens image stabilization mechanisms) The first lens shake correction means 82, the second lens shake correction means 83, and the camera shake correction means 14 may all have the structure of a shake correction unit 200 (200a). However, this embodiment is not limited to this, and it is sufficient that at least one of these shake correction means has the structure of a shake correction unit 200 (200a). Under certain conditions, by considering the positional relationship between the first lens shake correction means 82 and the second lens shake correction means 83, it is possible to realize a compact structure in the optical axis direction.

[0055] Figures 9(a) and 9(b) are explanatory diagrams illustrating the positional relationship between the first lens shake correction means 82 and the second lens shake correction means 83. Figure 9(a) is a schematic diagram showing the positional relationship when both the first lens shake correction means 82 and the second lens shake correction means 83 take on the structure of the shake correction unit 200. Figure 9(b) is a schematic diagram showing the positional relationship when only the second lens shake correction means 83 takes on the structure of the shake correction unit 200.

[0056] In Figure 9(a), 901 is the movable part of the first lens shake correction means 82, 902 is the shake correction lens of the first lens shake correction means 82, and 903 is the actuator that drives the movable part 901. 903a is the actuator that drives in the Y direction, and 903b is the actuator that drives in the X direction. 904 is the biasing mechanism (biasing means) of the first lens shake correction means 82. 905 is the movable part of the second lens shake correction means 83, 906 is the shake correction lens of the second lens shake correction means 83, and 907 is the actuator that drives the movable part 905. 907a is the actuator that drives in the Y direction, and 907b is the actuator that drives in the X direction. 908 is the biasing mechanism (biasing means) of the second lens shake correction means 83.

[0057] In Figure 9(b), 910 is a movable part of the first lens shake correction means 82, which has a different structure from the shake correction unit 200, and 911 is an actuator that drives the movable part 910. 910a is an actuator that drives in the Y direction, and 910b is an actuator that drives in the X direction. 910 is an actuator such as a voice coil motor in the actuator section that does not have a guide in the optical axis direction and elastic holding. For this reason, the first lens shake correction means 82 requires multiple biasing members. 912 are three biasing mechanisms provided in the first lens shake correction means 82. 910a is a biasing mechanism opposite to actuator 903a, 910b is a biasing mechanism opposite to actuator 903b, and 910c is a biasing mechanism that biases the actuator section.

[0058] At least one of the actuator or biasing mechanism is elongated in the optical axis direction to achieve stable drive and is dominant in the thickness of the blur correction means. In other words, if two adjacent lens blur correction means are positioned so that the actuators overlap with each other, the actuators overlap with each other, or the biasing mechanisms overlap with each other, the optical system 81 may become larger in the optical axis direction.

[0059] As shown in Figures 9(a) and (b), in this embodiment, at least one of the two lens shake correction means has the structure of a shake correction unit 200. In this case, when viewed from the optical axis direction, the actuator of the first lens shake correction means 82 and the biasing mechanism of the second lens shake correction means 83 are arranged in a phase that does not overlap with each other in the circumferential direction. Also, when viewed from the optical axis direction, the actuator of the first lens shake correction means 82 and the actuator of the second lens shake correction means 83 are arranged in a phase that does not overlap with each other in the circumferential direction. By satisfying at least one of these conditions, the size of the lens device 2a in the optical axis direction can be reduced.

[0060] As described above, in the two lens shake correction means adjacent to each other in the optical axis direction, the actuator of the first lens shake correction means 82 is positioned in a phase that does not overlap with the biasing mechanism and actuator of the second lens shake correction means 83 in the circumferential direction when viewed from the optical axis direction. As a result, according to this embodiment, the optical system can be miniaturized in the optical axis direction.

[0061] Each embodiment disclosed includes the following configuration: (Composition 1) A first movable part is positioned between the first fixed part and the second fixed part and moves in a first direction within a plane perpendicular to the optical axis, A second movable part is positioned between the first movable part and the second fixed part, and moves in a second direction different from the first direction in a plane perpendicular to the optical axis, A first drive unit that drives the first movable part, It comprises a second drive unit for driving the second movable part, and a biasing means for biasing the first movable part and the second movable part relative to the first fixed part and the second fixed part, Vibration isolation device characterized in that, when viewed from the optical axis direction, the biasing means is located on the opposite side of the optical axis from the first drive unit and the second drive unit, and is positioned in a first region between a first line extending in the first direction through the optical axis and a second line extending in the second direction through the optical axis. (Configuration 2) Viewed from the direction of the optical axis, the biasing means is positioned in the second region of the first region, within the range of the first region, between the third and fourth lines passing through the optical axis. The vibration isolation device according to configuration 1, characterized in that when the angle between the first line and the third line is α(°) and the angle between the second line and the fourth line is β(°), α = β = 15. (Composition 3) The vibration isolation device according to configuration 1 or 2, characterized in that the biasing means has a spring. (Composition 4) The vibration isolation device according to configuration 1 or 2, characterized in that the biasing means comprises a rolling member and an elastic member. (Composition 5) The vibration isolation device according to configuration 4, characterized in that the biasing means applies pressure from the rolling member to the elastic member. (Composition 6) A first rolling member disposed between the first fixed portion and the first movable portion, It further comprises a second rolling member disposed between the first movable part and the second movable part, The first drive unit is provided on the first fixed unit, The second drive unit is provided on the first movable unit, The biasing means is positioned between the second fixed portion and the second movable portion, and biases the first movable portion and the second movable portion with respect to the first fixed portion. The first drive unit elastically holds the first movable part while guiding it in the direction of the optical axis, The vibration isolation device according to any one of configurations 1 to 5, characterized in that the second drive unit elastically holds the second movable unit while guiding it in the direction of the optical axis. (Composition 7) The vibration isolation device according to any one of configurations 1 to 6, characterized in that, when viewed from the optical axis direction, no other biasing means are arranged in a region outside the range of the first region. (Composition 8) The vibration isolation device according to any one of configurations 1 to 7, characterized in that the movable range of the first movable part and the second movable part is 100 μm or less. (Composition 9) The vibration isolation device according to any one of configurations 1 to 7, characterized in that the first drive unit and the second drive unit are each piezoelectric actuators. (Composition 10) A lens device characterized by comprising a vibration isolation device according to any one of configurations 1 to 9, and a lens driven by the vibration isolation device. (Composition 11) The first lens, The second lens, A first optical image stabilization device that drives the first lens, The system includes a second optical image stabilization device that drives the second lens, A lens device characterized in that at least one of the first optical vibration isolation device and the second optical vibration isolation device is a vibration isolation device according to any one of configurations 1 to 9. (Composition 12) The lens device according to configuration 11, characterized in that, when viewed from the optical axis direction, the actuator of the first optical vibration isolation device and the biasing means of the second optical vibration isolation device are arranged so as not to overlap each other in the circumferential direction. (Composition 13) The lens apparatus according to configuration 11 or 12, characterized in that, when viewed from the optical axis direction, the actuator of the first optical vibration isolation device and the actuator of the second optical vibration isolation device are arranged so as not to overlap each other in the circumferential direction. (Composition 14) An imaging device characterized by having a vibration isolation device according to any one of configurations 1 to 9, and an image sensor driven by the vibration isolation device.

[0062] Although preferred embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of its essence. [Explanation of Symbols]

[0063] 200, 200a Image stabilization unit (vibration isolation device) 202 1st fixed part 203 1st moving part 204 First actuator (first drive unit) 205 2nd moving part 206 Second actuator (second drive unit) 208, 603 Biasing mechanism (biasing means) 209 Second fixed part 401 area (first area) Line 402 (Line 1) Line 403 (Line 2)

Claims

1. A first movable part is positioned between the first fixed part and the second fixed part and moves in a first direction in a plane perpendicular to the optical axis, A second movable part is positioned between the first movable part and the second fixed part, and moves in a second direction different from the first direction in a plane perpendicular to the optical axis, A first drive unit that drives the first movable part, It comprises a second drive unit for driving the second movable part, and a biasing means for biasing the first movable part and the second movable part with respect to the first fixed part and the second fixed part, Vibration isolation device characterized in that, when viewed from the optical axis direction, the biasing means is located on the opposite side of the optical axis from the first drive unit and the second drive unit, and is positioned in a first region between a first line extending in the first direction through the optical axis and a second line extending in the second direction through the optical axis.

2. Viewed from the direction of the optical axis, the biasing means is arranged in the second region of the first region, within the range of the first region, between the third line and the fourth line passing through the optical axis. The vibration isolation device according to claim 1, characterized in that when the angle between the first line and the third line is α (°) and the angle between the second line and the fourth line is β (°), α = β = 15.

3. The vibration isolation device according to claim 1, characterized in that the biasing means has a spring.

4. The vibration isolation device according to claim 1, characterized in that the biasing means comprises a rolling member and an elastic member.

5. The vibration isolation device according to claim 4, characterized in that the biasing means applies pressure from the rolling member to the elastic member.

6. A first rolling member is disposed between the first fixed portion and the first movable portion, It further comprises a second rolling member disposed between the first movable part and the second movable part, The first drive unit is provided on the first fixed unit, The second drive unit is provided on the first movable unit, The biasing means is positioned between the second fixed portion and the second movable portion, and biases the first movable portion and the second movable portion with respect to the first fixed portion. The first drive unit elastically holds the first movable part while guiding it in the direction of the optical axis, The vibration isolation device according to any one of claims 1 to 5, characterized in that the second drive unit elastically holds the second movable unit while guiding it in the direction of the optical axis.

7. The vibration isolation device according to any one of claims 1 to 5, characterized in that, when viewed from the optical axis direction, no other biasing means are arranged in a region outside the range of the first region.

8. The vibration isolation device according to any one of claims 1 to 5, characterized in that the movable range of the first movable part and the second movable part is 100 μm or less.

9. The vibration isolation device according to any one of claims 1 to 5, characterized in that the first drive unit and the second drive unit are each piezoelectric actuators.

10. A lens device comprising a vibration isolation device according to any one of claims 1 to 5, and a lens driven by the vibration isolation device.

11. The first lens, The second lens, A first optical image stabilization device that drives the first lens, The system includes a second optical vibration damping device that drives the second lens, A lens device characterized in that at least one of the first optical vibration isolation device and the second optical vibration isolation device is a vibration isolation device according to any one of claims 1 to 5.

12. The lens device according to claim 11, characterized in that, when viewed from the optical axis direction, the actuator of the first optical vibration isolation device and the biasing means of the second optical vibration isolation device are arranged so as not to overlap each other in the circumferential direction.

13. The lens device according to claim 11, characterized in that, when viewed from the optical axis direction, the actuator of the first optical vibration isolation device and the actuator of the second optical vibration isolation device are arranged so as not to overlap each other in the circumferential direction.

14. An imaging device comprising a vibration isolation device according to any one of claims 1 to 5, and an image sensor driven by the vibration isolation device.

Images