PCB information acquisition device and PCB processing device

Abstract

The device structure is simplified while accurately acquiring information about the shape of the circuit board. [Solution] The light emission unit 63 of the substrate information acquisition device 60 emits light toward the upper surface 91 of the substrate 9, forming a plurality of beam spots S1 aligned linearly in the Y direction on the upper surface 91. The hand movement mechanism scans the plurality of beam spots S1 in the X direction on the upper surface 91 of the substrate 9. The reflected light branching unit 64 branches the reflected light R0 at each beam spot S1 into a first reflected light R1 and a second reflected light R2, which have different optical path lengths. The imaging device 66 captures the first reflected light R1 and the second reflected light R2 of each beam spot S1 together. The information acquisition unit acquires information about the shape of the substrate 9 based on a plurality of captured images acquired by the imaging device 66 in parallel with the scanning of the plurality of beam spots S1 by the scanning mechanism. This makes it possible to acquire information about the shape of the substrate 9 with high accuracy while simplifying the device structure of the substrate information acquisition device 60.

Claims

1. A substrate information acquisition device that acquires information about the shape of a substrate, A substrate holding section that holds the substrate, A light emitting unit that emits light toward the main surface of the substrate and forms a plurality of beam spots aligned linearly in a first direction along the main surface on the main surface, A scanning mechanism that scans the plurality of beam spots on the main surface of the substrate in a second direction that intersects the first direction and is along the main surface, A reflected light branching section that splits the reflected light at each beam spot into a first reflected light and a second reflected light with different optical path lengths, An imaging device that captures the first reflected light and the second reflected light from each of the beam spots together, An information acquisition unit that acquires information about the shape of the substrate based on a plurality of captured images acquired by the imaging device in parallel with the scanning of the plurality of beam spots by the scanning mechanism, A substrate information acquisition device equipped with the following features.

2. A substrate information acquisition device according to claim 1, The aforementioned light emission unit is a substrate information acquisition device that emits multiple beams corresponding to the multiple beam spots in parallel.

3. A substrate information acquisition device according to claim 2, The light-emitting section is, Light source section, A multi-beam device that divides the beam emitted from the light source into a plurality of beams and emits them, Equipped with, The multibeam device is A neutral density filter that transmits some of the incident light and reflects the rest, A mirror positioned opposite the light-reducing filter and reflecting incident light toward the light-reducing filter, Equipped with, The light transmittance of the light-reducing filter gradually increases from one side to the other in the first direction. The beam incident on the multi-beam device from the light source unit is repeatedly reflected between the attenuation filter and the mirror, and travels from one side to the other side in the first direction. A substrate information acquisition device, wherein the plurality of beams are beams that have passed through the light-reducing filter from multiple incident positions of the beams in the light-reducing filter.

4. A substrate information acquisition device according to claim 1, The imaging device is a substrate information acquisition device that captures images of each beam spot formed on a screen by the first reflected light and the second reflected light, respectively.

5. A substrate information acquisition device according to claim 4, The light emitted from the aforementioned light-emitting unit is short-wave infrared light. The aforementioned screen is a fluorescent screen that emits fluorescence when irradiated with short-wave infrared light, in a substrate information acquisition device.

6. A substrate information acquisition device according to claim 1, The substrate holding portion contacts the lower surface of the substrate and supports the substrate. A substrate information acquisition device, wherein the main surface of the substrate to which the light emitted from the light-emitting unit is irradiated is the upper surface of the substrate.

7. A substrate processing apparatus for processing substrates, A substrate information acquisition device according to any one of claims 1 to 6, An indexer block is provided where a first transport robot is positioned to load and unload circuit boards into and out of a storage container capable of accommodating multiple circuit boards, A processing block is provided in which a processing unit for processing substrates and a second transport robot for loading and unloading substrates into and from the processing unit are arranged. A mounting unit is provided at the connection between the processing block and the indexer block, and holds an unprocessed substrate passed from the first transport robot to the second transport robot, and a processed substrate passed from the second transport robot to the first transport robot. Equipped with, The substrate holding unit of the substrate information acquisition device is a transport hand that holds the substrate in the second transport robot, The scanning mechanism of the substrate information acquisition device is a hand movement mechanism that moves the transport hand in the second direction in the second transport robot, A substrate processing apparatus in which, when the substrate is unloaded from the aforementioned storage unit by the second transport robot, information on the shape of the substrate is acquired by the substrate information acquisition device.

8. A substrate processing apparatus for processing substrates, A substrate information acquisition device according to any one of claims 1 to 6, An indexer block is provided where a first transport robot is positioned to load and unload circuit boards into and out of a storage container capable of accommodating multiple circuit boards, A processing block is provided in which a processing unit for processing substrates and a second transport robot for loading and unloading substrates into and from the processing unit are arranged. Equipped with, The substrate holding unit of the substrate information acquisition device is a transport hand that holds the substrate in the first transport robot, The scanning mechanism of the substrate information acquisition device is a hand movement mechanism that moves the transport hand in the second direction in the first transport robot. A substrate processing apparatus wherein, when the substrate is unloaded from the storage container by the first transport robot, information on the shape of the substrate is acquired by the substrate information acquisition device.

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