Adjustment device, adjustment method, detection system, and processing system

Abstract

Conventional adjustment devices required the combination of multiple devices to achieve six degrees of freedom of adjustment. [Solution] The adjustment device includes a base 1, a Z-axis adjustment unit 2, an X-axis adjustment unit 3, a Y-axis adjustment unit 4, and a multi-dimensional adjustment unit 5 stacked from bottom to top, the incident end of the lens barrel assembly being rotatably connected to the multi-dimensional adjustment unit, the X-axis adjustment unit being movably connected to the Z-axis adjustment unit, the X-axis adjustment unit being configured to adjust the position of the lens barrel assembly in the X-axis direction, the Y-axis adjustment unit being configured to adjust the position in the Y-axis direction, the Z-axis adjustment unit being movably connected to the base, the Z-axis adjustment unit being configured to adjust the position of the lens barrel assembly in the Z-axis direction, and the multi-dimensional adjustment unit being configured to rotate the lens barrel assembly around the X-axis and / or the Y-axis, and / or adjust the position of the lens barrel assembly in the Z-axis direction.

Claims

[Claim 1] A control device, Used to align the lens barrel assembly with the optical path in a detection system or machining system. The adjustment device includes a base stacked from bottom to top along the Z-axis, a Z-direction adjustment unit, an X-direction adjustment unit, a Y-direction adjustment unit, and a multi-dimensional adjustment unit. The lens barrel assembly passes through the multidimensional adjustment unit, the Y-direction adjustment unit, the X-direction adjustment unit, the Z-direction adjustment unit, and the base in that order, the exit end of the lens barrel assembly extends to the outside of the base, and the input end of the lens barrel assembly is rotatably connected to the multidimensional adjustment unit. The X-direction adjustment unit is movably connected to the Z-direction adjustment unit, and the X-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the X-axis direction. The Y-direction adjustment unit is movably connected to the X-direction adjustment unit, and the Y-direction adjustment unit is configured to adjust the position of the lens barrel assembly in the Y-axis direction. The Z-axis adjustment unit is movably connected to the base, and the Z-axis adjustment unit is configured to adjust the position of the lens barrel assembly in the Z-axis direction. The multidimensional adjustment unit is movably connected to the Y-axis adjustment unit, and the multidimensional adjustment unit is configured to rotate the lens barrel assembly about the X-axis and / or the Y-axis, and / or adjust the position of the lens barrel assembly in the Z-axis direction. A control device characterized by the following features. [Claim 2] The base has a sliding groove on the side facing the Z-direction adjustment unit. The Z-direction adjustment unit is fitted into the slide groove and is movable along the slide groove. The adjustment device according to feature 1. [Claim 3] Multiple first bumps are provided on the two sides of the base parallel to the slide groove for positioning and locking the Z-direction adjustment unit. The adjustment device according to feature 2. [Claim 4] The Z-direction adjustment unit includes a first differential screw, a propulsion structure, and a moving structure. The propulsion structure is located between the base and the moving structure, the propulsion structure is slidably connected to the slide groove, and the moving structure is movably connected to the base. The first differential screw is connected to the propulsion structure, and the propulsion structure is driven by the rotation of the first differential screw to move along the slide groove. The moving structure moves along the Z-axis direction in response to the action of the propulsion structure. The adjustment device according to feature 2. [Claim 5] The propulsion structure includes a first part and a second part, the second part being located on both sides of the first part parallel to the slide groove, and the second part being wedge-shaped. On the surface of the moving structure facing the propulsion structure, a wedge-shaped projection corresponding to the second portion is provided. The second portion abuts against the wedge-shaped projection, and the second portion and the wedge-shaped projection have the same angle of inclination and opposite directions of inclination. The adjustment device according to feature 4. [Claim 6] The wedge-shaped projection is sandwiched between the first portion and the slide groove to restrict the position of the moving structure. Multiple second bumps are provided on the two sides of the moving structure parallel to the slide groove for positioning and locking the X-direction adjustment unit. The adjustment device according to feature 5. [Claim 7] The adjustment accuracy of the Z-direction adjustment unit is a = b × tan²θ, Here, a is the adjustment accuracy of the Z-direction adjustment unit, b is the distance traveled by the propulsion structure when the first differential screw rotates once, and θ is the inclination angle of the wedge-shaped projection. The adjustment device according to feature 5. [Claim 8] The X-direction adjustment unit includes a second differential screw, and the second differential screw is connected to the X-direction adjustment unit. The X-direction adjustment unit is driven by the rotation of the second differential screw and moves along the X-axis direction. The adjustment device according to feature 1. [Claim 9] Multiple third bumps are provided on the two sides of the X-direction adjustment unit perpendicular to the X-axis direction for positioning and locking the Y-direction adjustment unit. The adjustment device according to feature 1. [Claim 10] The adjustment accuracy of the X-direction adjustment unit is c = d × α / 360. Here, c is the adjustment accuracy of the X-direction adjustment unit, d is the distance traveled along the X-axis direction of the X-direction adjustment unit when the second differential screw rotates once, and α is the angle of one rotation of the second differential screw. The adjustment device according to feature 8. [Claim 11] The Y-direction adjustment unit includes a third differential screw, and the third differential screw is connected to the Y-direction adjustment unit. The Y-direction adjustment unit is driven by the rotation of the third differential screw and moves along the Y-axis direction. The adjustment device according to feature 1. [Claim 12] The Y-direction adjustment unit has at least three spherical recesses on its surface near the multidimensional adjustment unit, and a screw hole is provided at the center of each spherical recess. The adjustment device according to feature 11. [Claim 13] The adjustment accuracy of the Y-direction adjustment unit is l = k × β / 360. Here, l is the adjustment accuracy of the Y-direction adjustment unit, k is the distance traveled along the Y-axis direction of the Y-direction adjustment unit when the third differential screw rotates once, and β is the angle of one rotation of the third differential screw. The adjustment device according to feature 11. [Claim 14] The multidimensional adjustment unit includes a base and a knob assembly installed corresponding to the spherical recess. The knob assembly penetrates the base and connects to the corresponding spherical recess. A gap exists between the base and the Y-direction adjustment unit. The adjustment device according to feature 12. [Claim 15] The knob assembly includes an adjustment knob and a locking bolt, the adjustment knob being fitted to the outside of the locking bolt, The end of the adjustment knob connected to the spherical recess is spherical in shape, corresponding to the spherical recess. The locking bolt is connected to the screw hole and locks the adjustment knob. The adjustment device according to feature 14. [Claim 16] When there are three knob assemblies, the adjustment accuracy of the multidimensional adjustment unit is h = i × δ / 360, Φ = arctan(h / sin60° × √3 × R), Here, h is the adjustment accuracy of the multidimensional adjustment unit in the Z-axis direction, i is the distance traveled along the Z-axis direction of the base when the adjustment knob rotates once, δ is the angle of one rotation of the adjustment knob, Φ is the adjustment accuracy of the multidimensional adjustment unit when it rotates around the X-axis or Y-axis, and R is the radius of the circle formed by the uniform distribution of the three knob assemblies. The adjustment device according to feature 14. [Claim 17] The lens barrel assembly includes a lens barrel, an adjustment structure, and a preload structure. A flange is installed at the inlet end of the lens barrel, and the lens barrel is rotatably connected to the multidimensional adjustment unit via the flange. A toggle structure is provided on the outer circumferential surface of the flange, and the adjustment structure is connected to the preload structure by passing through the toggle structure so that the lens barrel assembly rotates around the Z axis. The adjustment device according to feature 1. [Claim 18] The adjustment structure includes a fourth differential screw, and the preload structure includes a fixed stopper and an elastic member. The fourth differential screw passes through the toggle structure and is connected to the elastic member and the fixed stopper. The elastic member is located between the fixed stopper and the toggle structure. The adjustment device according to feature 17. [Claim 19] The adjustment accuracy of the adjustment structure is φ = arcsin(u / s), Here, φ is the adjustment precision of the adjustment structure when it rotates around the Z-axis, u is the distance the fourth differential screw moves relative to the toggle structure when it rotates one full turn, and s is the distance between the central axis of the telescope tube and the center of the toggle structure. The adjustment device according to feature 18. [Claim 20] Through holes for passing the lens barrel are provided at the center positions of the base, the Z-direction adjustment unit, the X-direction adjustment unit, the Y-direction adjustment unit, and the multi-dimensional adjustment unit. An edge is provided in the through hole that protrudes toward the inlet end of the lens barrel, and an annular groove is provided in the through hole installed in the Z-direction adjustment unit, the X-direction adjustment unit, the Y-direction adjustment unit, and the multi-dimensional adjustment unit, on the side facing the outlet end of the lens barrel, to form a clearance space relative to the edge. The adjustment device according to feature 17. [Claim 21] A groove corresponding to the edge is provided on the side of the flange closest to the multidimensional adjustment unit. The adjustment device according to claim 20. [Claim 22] A method of adjustment based on the adjustment device described in any one of claims 1 to 21, The steps include assembling the lens barrel assembly and the adjustment device, and pre-pressuring the X-direction adjustment unit, Y-direction adjustment unit, Z-direction adjustment unit, multi-dimensional adjustment unit, and lens barrel assembly, The steps include: rotating the lens barrel around the X and Y axes using the multidimensional adjustment unit so that the rotation angle reaches a predetermined value, and performing an initial adjustment to the position of the lens barrel assembly in the Z axis direction using the multidimensional adjustment unit; The steps include adjusting the position of the lens barrel assembly in the X-axis and Y-axis directions using the X-axis adjustment unit and the Y-axis adjustment unit, respectively, and locking the X-axis adjustment unit and the Y-axis adjustment unit when the lens barrel assembly reaches a predetermined position, The steps include: rotating the lens barrel assembly around the Z-axis using an adjustment structure and a preload structure, and locking the lens barrel assembly when the imaging effect within the lens barrel is optimized; The Z-axis adjustment unit readjusts the position of the lens barrel assembly in the Z-axis direction until the lens barrel assembly reaches a predetermined position in the Z-axis direction, and then locks the Z-axis adjustment unit. A method for adjusting the temperature, characterized by the features described above. [Claim 23] A detection system, Detection objective lens and Includes an adjustment device according to any one of claims 1 to 21, The adjustment device adjusts the detection objective lens to align the detection objective lens with the optical path in the detection system. A detection system characterized by the following: [Claim 24] A processing system, Lithography objective lens, Includes an adjustment device according to any one of claims 1 to 21, The adjustment device adjusts the lithography objective lens to align the lithography objective lens with the optical path in the processing system. A processing system characterized by the following features.

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