Drive device, positioning device, processing device, device manufacturing method

Abstract

The present invention provides a drive device that can appropriately handle the load applied by a linear motor while improving responsiveness when driving a driven object with a linear motor. [Solution] The stage device 1 includes a first drive shaft 100 that drives a driven body in the X-axis direction, and a second drive shaft 200 that drives the driven body and the first drive shaft 100 in the Y-axis direction. The second drive shaft 200 includes a Y guide 210 extending in the Y-axis direction and a Y slider 150 that is movable along the Y guide 210. The end of the first drive shaft 100 is provided facing one side of the Y slider 150, and the second magnet portion 240 of the linear motor is provided facing the other side. A connecting member 51 is provided that connects the end of the first drive shaft 100 and the second magnet portion 240 above the Y slider 150, and a load receiving portion 52 that receives the load from the connecting member 51 is provided between the upper surface of the Y slider 150 and the connecting member 51.

Claims

1. A drive device comprising: a first drive shaft for driving a driven object in a first direction; and a second drive shaft for driving the driven object and the first drive shaft in a second direction intersecting the first direction, The second drive shaft comprises a guide extending in the second direction and a slider movable along the guide, The end of the first drive shaft is provided facing one side of the slider, and the movable element of a linear motor that applies a driving force in the second direction to the slider is provided facing the other side. A connecting member is provided that connects the end of the first drive shaft and the movable element of the linear motor above the slider. A load-receiving portion is provided between the upper surface of the slider and the connecting member to receive the load from the connecting member. Drive unit.

2. The drive device according to claim 1, wherein the load-receiving portion is a sphere that can rotate in at least one of the first and second directions on the upper surface of the slider.

3. The drive device according to claim 1 or 2, wherein the one side of the slider and the end of the first drive shaft are attached to each other by a first mounting fixture that is deformable in a direction that relieves the load.

4. The drive device according to claim 1 or 2, wherein the other side of the slider and the side of the movable element of the linear motor are attached to each other by a second mounting fixture that is deformable in a direction that relieves the load.

5. The drive device according to claim 1 or 2, wherein the connecting member is connected to the upper surface of the movable element of the linear motor.

6. The drive device according to claim 1 or 2, further comprising a gas levitation section that uses gas to levitate the slider away from the guide.

7. A positioning device for positioning the driven object by the drive device described in claim 1 or 2.

8. A processing apparatus for performing a predetermined process on an object to be processed, which is positioned on the driven body positioned by the positioning device described in claim 7.

9. A device manufacturing method for manufacturing a device through the processing performed by the processing apparatus described in claim 8.

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