Vapor deposition apparatus for display devices, electronic device, and vapor deposition method for display devices.

Abstract

One embodiment provides a vapor deposition apparatus for a display device, an electronic device, and a vapor deposition method for a display device that can minimize manufacturing costs, cycle time, and alignment defects. [Solution] According to one embodiment, the invention includes a chamber (100), a vapor deposition source (200) in the chamber, a stage (250) on the vapor deposition source, a mask structure (340) on the stage, a drive mechanism (900) on the mask structure, and a transport track (500) that passes through a first gate (G1) and a second gate (G2) of the chamber and is located inside and outside the chamber, wherein the mask structure includes a frame (300) and a mask (400) on the frame, and a first adsorption region (31) on one side of the frame that is adsorbed by the drive mechanism and a second adsorption region (32) on the other side of the frame that is adsorbed by the stage overlap in at least a portion of the above.

Claims

1. Chamber and, The deposition source in the chamber, The stage on the aforementioned deposition source, The mask structure on the stage, The drive mechanism on the mask structure, Includes a transport truck that passes through the first gate and the second gate of the chamber and is positioned inside and outside the chamber, The mask structure includes a frame and a mask on the frame. A vapor deposition apparatus for a display device, wherein a first adsorption region on one surface of the frame, which is adsorbed by the drive mechanism, and a second adsorption region on the other surface of the frame, which is adsorbed by the stage, overlap in at least a portion of the same area.

2. The vapor deposition apparatus for a display device according to claim 1, wherein the first adsorption region of the frame and the second adsorption region of the frame overlap in the thickness direction of the frame in at least a portion thereof.

3. The aforementioned frame is A first hole defining the first adsorption region, The vapor deposition apparatus for a display device according to claim 2, further comprising a second hole defining the second adsorption region.

4. The first hole is located on one surface of the frame, The vapor deposition apparatus for a display device according to claim 3, wherein the second hole is located on the other side of the frame.

5. The vapor deposition apparatus for a display device according to claim 4, wherein the first hole and the second hole overlap in the thickness direction of the frame in at least a portion of the same area.

6. The vapor deposition apparatus for a display device according to claim 4, wherein the size of the first hole and the size of the second hole are the same.

7. The first hole has a shape that is recessed from one surface of the frame toward the other surface of the frame, The vapor deposition apparatus for a display device according to claim 4, wherein the second hole has a shape that is recessed from the other surface of the frame toward one surface of the frame.

8. The drive mechanism includes a first electromagnet positioned corresponding to the first suction region of the frame, The vapor deposition apparatus for a display device according to claim 1, wherein the stage includes a second electromagnet arranged in correspondence with the second adsorption region of the frame.

9. The vapor deposition apparatus for a display device according to claim 8, wherein the first electromagnet and the second electromagnet each include an electropermanent magnet.

10. The first electromagnet is positioned in accordance with the first hole that defines the first suction region of the frame, The vapor deposition apparatus for a display device according to claim 8, wherein the second electromagnet is arranged in correspondence with a second hole defining the second adsorption region.

11. The first adsorption region is located at the edge of one surface of the frame, The vapor deposition apparatus for a display device according to claim 1, wherein the second adsorption region is arranged on the edge of the other side of the frame.

12. The vapor deposition apparatus for a display device according to claim 1, wherein the frame includes a magnetic material.

13. The aforementioned transport truck Lower track and The vapor deposition apparatus for a display device according to claim 1, comprising an upper track on the lower track.

14. The vapor deposition apparatus for a display device according to claim 13, further comprising a carrier for transporting the mask structure along the transport track between the lower track and the upper track.

15. The aforementioned carrier, The first bar and, A second bar is positioned opposite the first bar, A third bar positioned on the lower track, A fourth bar is positioned below the upper track and opposite the third bar, An opening enclosed by the first bar, the second bar, the third bar and the fourth bar, A first support member extending from the first bar toward the second bar, A second support member extending from the second bar toward the first bar, The vapor deposition apparatus for a display device according to claim 14, further comprising a third support member extending from the third bar toward the fourth bar.

16. The first support member is, An extension portion extending from the first bar, The vapor deposition apparatus for a display device according to claim 15, further comprising a projection rotatably connected to one side of the extension.

17. The third support member is, An extension portion extending from the third bar, A protruding portion located on one side of the extension, The vapor deposition apparatus for a display device according to claim 16, further comprising a projection rotatably disposed on one side of the aforementioned protruding portion.

18. The vapor deposition apparatus for a display device according to claim 15, further comprising a pusher positioned opposite the fourth bar through an opening in the upper track and movable toward the fourth bar.

19. The vapor deposition apparatus for a display device according to claim 15, wherein the mask structure includes the first support member and a detachable member disposed adjacent to the second support member.

20. The deposition apparatus for a display device according to claim 19, wherein the detachable member includes a coupling chip and a separation and retraction portion arranged adjacent to each other.

21. The vapor deposition apparatus for a display device according to claim 20, wherein the coupling chip in the carrier is positioned above the separation and retraction portion.

22. The steps include arranging the deposition source, stage, drive mechanism, pusher, and transport track between the first inner wall of the chamber and the second inner wall of the chamber, The steps include: moving the carrier on which the mask structure, including the mask, is loaded along the transport truck and loading it into the chamber; The first electromagnet of the drive mechanism attracts the first adsorption region of the frame of the mask structure, The steps include separating the mask structure from the carrier, The steps include moving the drive mechanism to which the mask structure is attached toward the stage, The stage includes the step of the second electromagnet adsorbing the second adsorption region of the frame of the mask structure, A vapor deposition method for a display device, wherein the first adsorption region of the frame and the second adsorption region of the frame overlap in at least a portion of the area.

23. The vapor deposition method for a display device according to claim 22, wherein the first adsorption region of the frame and the second adsorption region of the frame overlap in the thickness direction of the frame in at least a portion thereof.

24. The aforementioned frame is A first hole defining the first adsorption region, The vapor deposition method for a display device according to claim 23, comprising a second hole defining the second adsorption region.

25. The first hole is located on one surface of the frame, The vapor deposition method for a display device according to claim 24, wherein the second hole is located on the other side of the frame.

26. The vapor deposition method for a display device according to claim 25, wherein the first hole and the second hole overlap in the thickness direction of the frame in at least a portion of the same area.

27. The vapor deposition method for a display device according to claim 22, further comprising the step of releasing the magnetic force of the first electromagnet of the drive mechanism while the mask structure is attached to the stage.

28. Includes a display device, The substrate of the display device contains an organic substance formed using a vapor deposition apparatus. The aforementioned deposition apparatus is Chamber and, The deposition source in the chamber, The stage on the aforementioned deposition source, The mask structure on the stage, The drive mechanism on the mask structure, Includes a transport truck that passes through the first gate and the second gate of the chamber and is positioned inside and outside the chamber, The mask structure includes a frame and a mask on the frame. An electronic device in which a first adsorption region on one surface of a frame, which is adsorbed by the drive mechanism, and a second adsorption region on the other surface of the frame, which is adsorbed by the stage, overlap in at least a portion of the same area.

29. The electronic device according to claim 28, wherein the electronic device includes a smartphone, tablet, laptop, television, desktop monitor, smart glasses, smartwatch, head-mounted display, and vehicle.

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