Fluid flow channel device, and method for manufacturing a fluid flow channel device

Abstract

The present invention provides a fluid flow path device capable of improving the flowability of the fluid to be processed in a reverse-flow channel. [Solution] The fluid flow path device 10 comprises a main body 20 formed by stacking multiple substrates, a pair of lids 30 covering a pair of end faces of the main body 20, and a fluid flow path 40 spanning the main body 20 and the pair of lids 30. The fluid flow path 40 has a first flow path 41 formed between a pair of first substrates 213, a second flow path 42 formed between a pair of first substrates 213, or between a pair of second substrates 214 arranged at different positions from the pair of first substrates 213 in the stacking direction, and a return flow path 43 connecting the two flow paths 41 and 42 so as to return the fluid to be processed flowing out of one of the adjacent first flow paths 41 and second flow paths 42 toward the other flow path. The return flow path 43 consists of an internal flow path formed inside each lid 30 or a concave flow path formed concavely on the surface of each lid 30 facing the main body 20.

Description

Technical Field

[0001] The present invention relates to a fluid flow path device and a method for manufacturing a fluid flow path device.

Background Art

[0002] Conventionally, a fluid flow path device having a fluid flow path through which a fluid to be processed flows is known (see, for example, Patent Document 1).

[0003] This fluid flow path device includes a main body portion composed of a plurality of substrates laminated on each other, and a pair of lid portions detachably attached to the main body portion. The main body portion has a pair of end faces facing opposite sides in a predetermined direction orthogonal to the substrate lamination direction, and the pair of lid portions are arranged to cover the pair of end faces of the main body portion, respectively.

[0004] Inside the main body portion, a fluid flow path through which the fluid to be processed flows is formed. The fluid flow path includes a first flow path that penetrates between the pair of end faces and allows the fluid to be processed to flow from one end face side to the other end face side when viewed from the substrate lamination direction, and a second flow path that penetrates between the pair of end faces and allows the fluid to be processed to flow from the other end face side to the one end face side. The first flow path and the second flow path are alternately arranged in a direction orthogonal to the predetermined direction when viewed from the substrate lamination direction.

[0005] The first flow path and the second flow path are respectively formed between a pair of substrates at different positions in the substrate lamination direction. The end of the first flow path and the second flow path are connected via a third flow path (return flow path) extending in the substrate lamination direction. The third flow path is formed by covering the grooves formed on each end face of the main body portion with the lid portion. The fluid to be processed flows alternately through the first flow path and the second flow path from the upstream side to the downstream side. The fluid to be processed flows through the third flow path in the section between the first flow path and the second flow path. A recess for accommodating a seal member is formed in a portion of the lid portion facing the third flow path.

[0006] In the fluid flow channel device shown in Patent Document 1, the first and second flow channels are formed between a pair of substrates located at different positions in the substrate stacking direction; however, they may also be formed between a pair of substrates located at the same position in the substrate stacking direction. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2018-176034 [Overview of the Initiative] [Problems that the invention aims to solve]

[0008] However, in the conventional fluid flow device shown in Patent Document 1, the sealing member is compressed between the lid and the main body, causing the surface of the sealing member to bulge toward the third flow path side (folded flow path side).

[0009] Figure 22 is a schematic diagram showing the seal member 500 bulging towards the return channel side, and corresponds to an enlarged view of the return channel portion in Figure 12 of Patent Document 1. As shown in this figure, when the seal member 500 bulges towards the return channel 501 side, the flowability of the fluid to be treated decreases and stagnation occurs at the contact point 502 between the seal member 500 and the edge of the return channel 501. In the return channel 501, the flow direction of the fluid to be treated changes abruptly, so the flowability of the fluid to be treated tends to decrease easily. For this reason, if stagnation occurs in the flow at the contact point 502 due to the seal member 500 bulging towards the return channel 501 side, there is a risk that foreign matter may accumulate or solidify to a level that cannot be removed. In addition, the reduced flowability of the fluid to be treated in the return channel 501 may prevent the desired reaction (e.g., a chemical reaction) from occurring sufficiently in the fluid to be treated.

[0010] The present invention was made to solve the above-mentioned problems, and aims to provide a fluid flow path device and a method for manufacturing the same that can improve the flowability of the fluid to be processed in a return flow path. [Means for solving the problem]

[0011] A fluid flow device according to one aspect of the present invention comprises a main body made of a plurality of substrates stacked on top of each other, having a pair of end faces facing opposite directions in a predetermined direction perpendicular to the stacking direction of the plurality of substrates; a pair of lids detachably attached to the main body and covering the pair of end faces; and a fluid flow path formed spanning the inside of the main body and the pair of lids, through which the fluid to be processed flows. The fluid flow path formed within the main body comprises, when viewed from the stacking direction of the plurality of substrates, a first flow path that penetrates between the pair of end faces and allows the fluid to be processed to flow from one end face to the other, and a second flow path that penetrates between the pair of end faces and allows the fluid to be processed to flow from the other end face to the one end face, arranged alternately in a direction perpendicular to the predetermined direction. The device is configured such that the fluid to be processed flows alternately through the first channel and the second channel from the upstream side to the downstream side, the first channel is formed between a pair of first substrates that are in contact in the stacking direction among the plurality of substrates, the second channel is formed between the pair of first substrates, or between a pair of second substrates that are positioned at different locations from the pair of first substrates in the stacking direction and are in contact in the stacking direction, the fluid channel consists of an internal channel formed inside each of the lids or a concave channel formed in a concave shape on the surface of each lid facing the main body, and further includes a return channel that connects the two channels such that the fluid to be processed flowing out of one of the adjacent first channel and second channel is returned towards the other channel.

[0012] With this configuration, by forming a return channel connecting the first channel and the second channel inside the lid or forming a concave shape on the surface of the lid facing the main body, it becomes unnecessary to provide a sealing member facing the return channel. Therefore, it is possible to prevent the seal member from bulging inward in the return channel, which would reduce the flowability of the fluid to be treated within the return channel. In other words, within the return channel, the flow direction of the fluid to be treated changes abruptly, so the flowability of the fluid to be treated tends to decrease easily. For this reason, if the sealing member bulges inward in the return channel, causing stagnation in the flow, there is a risk that foreign matter will accumulate or solidify to a level that cannot be removed. In contrast, with the above configuration, since the return channel is formed concavely inside the lid or on the surface facing the lid, the sealing member does not face the return channel as in the conventional method. Therefore, it is possible to prevent a decrease in the flowability of the fluid to be treated within the return channel and prevent foreign matter from accumulating or solidifying within the return channel. Furthermore, by improving the flowability of the fluid to be treated within the return channel, the desired reaction can be sufficiently generated in the fluid to be treated. Here, an example of a desired reaction is, for example, a chemical reaction between multiple fluids when the fluid flow channel device is used as a microchannel reactor, but is not limited to this.

[0013] The return flow path is the internal flow path and has a first end opening that opens to the opposing surface of each lid and is connected to the first flow path, and a second end opening that opens to the opposing surface and is connected to the second flow path, and further comprises a pair of sheet-like sealing members that are sandwiched between the pair of end faces of the main body and the opposing surfaces of the pair of lids, respectively, wherein each of the pair of sealing members has a first through hole that communicates with the first end opening and allows the flow of the fluid to be processed, and a second through hole that communicates with the second end opening and allows the flow of the fluid to be processed.

[0014] With this configuration, a return channel is formed inside the lid, and a sheet-like sealing member is placed between the lid and the main body. This allows the sealing member to be kept as far away as possible from the point where the flow direction changes in the return channel. Therefore, it is possible to prevent the flowability of the fluid being processed in the return channel from decreasing due to the effect of stagnation of the fluid being processed on the surface of the sealing member affecting the point where the flow direction changes in the return channel.

[0015] Preferably, the reversed flow path consists of the concave flow path and further comprises a pair of sheet-like sealing members sandwiched between the pair of end faces of the main body and the opposing faces of the pair of lids, and each of the pair of sealing members has a flow hole that communicates with the concave flow path constituting the reversed flow path and allows the flow of the fluid to be processed.

[0016] With this configuration, by forming the return channel in a concave shape on the surface of the lid facing the main body, the cleanability of the return channel can be improved compared to when the return channel is formed inside the lid. Furthermore, by placing the sealing member between the lid and the main body, the sealing member is not positioned facing the return channel. Therefore, it is possible to prevent stagnation caused by the surface of the sealing member bulging towards the channel in the return channel, where the flowability of the fluid to be treated tends to decrease. Consequently, the flowability of the fluid to be treated in the return channel can be improved.

[0017] Preferably, the flow hole comprises a third through-hole that allows the fluid to be processed to flow between the first flow path and the concave flow path that constitutes the return flow path, and a fourth through-hole that is formed independently of the third through-hole and allows the fluid to be processed to flow between the second flow path and the concave flow path.

[0018] In this configuration, the flow holes formed in the sealing member are not connected by a single hole, but are instead composed of a first through-hole for the first flow path and a second through-hole for the second flow path. This prevents abrupt changes in the flow path cross-sectional area at the boundary between the first flow path and the flow hole in the sealing member, and at the boundary between the second flow path and the flow hole in the sealing member.

[0019] Preferably, the present invention further comprises retaining plates positioned between the pair of end faces of the main body and the opposing faces of the pair of lids, respectively, for holding each of the sheet-like sealing members, and each of the pair of retaining plates has a fitting hole that fits into the outer edge of each of the sealing members.

[0020] This configuration allows for easier positioning of each sealing member by holding each sealing member in a pair of retaining plates. Furthermore, each sealing member is compressed between a pair of end faces of the main body and a pair of lids, and the amount of compression of each sealing member can be controlled by the thickness of each retaining plate. This suppresses variations in the amount of compression of each sealing member, thereby improving sealing performance. In this configuration, where retaining plates are used to control the amount of compression of the sealing members, it is preferable that the thickness of the sealing member before compression is greater than the thickness of the retaining plates.

[0021] Preferably, the second channel is formed between the pair of second substrates.

[0022] In this configuration, the second channel and the first channel are formed at different positions in the substrate stacking direction. When such a two-stage channel structure is adopted, the flow velocity distribution in the return channel, which is the connection point between the first channel and the second channel, becomes more complex compared to when the second channel and the first channel are formed at the same position in the substrate stacking direction, and foreign matter tends to accumulate in the return channel. Therefore, the configuration of the present invention is particularly useful.

[0023] The return flow path has a first end opening that opens to the facing surface of each lid portion and is connected to the first flow path, and a second end opening that opens to the facing surface and is connected to the second flow path. The first flow path is a linear flow path extending along the predetermined direction, and the second flow path is connected to the second end opening formed in each lid portion and overlaps the first flow path when viewed from the stacking direction. It preferably has an overlapping flow path extending in parallel with the first flow path and an intersecting flow path connected to an end of the overlapping flow path on the side opposite to the second end opening side and extending obliquely to intersect the first flow path when viewed from the stacking direction.

[0024] According to this configuration, since the second flow path does not extend obliquely across the main body portion and the pair of lid portions, the relative alignment of the main body portion, the pair of lid portions, and the pair of holding plates can be easily performed. That is, according to the above configuration, the second flow path has an overlapping flow path that extends in parallel with the first flow path at a position overlapping the first flow path formed in the main body portion when viewed from the stacking direction of the substrate, and the obliquely extending intersecting flow path branches from this overlapping flow path. Therefore, the obliquely extending intersecting flow path is formed only in the main body portion and is not formed across the main body portion, the pair of lid portions, and the pair of holding members. Thus, the relative alignment of the main body portion, the pair of lid portions, and each seal member held by the pair of holding members can be easily and accurately performed without causing the position of the flow path hole or the like.

[0025] The number of the fluid flow paths is plural, the plural fluid flow paths are formed to extend adjacent to and parallel to each other, and the second flow path is preferably formed between the pair of first substrates.

[0026] According to this configuration, in such a planar flow path structure where the second flow path and the first flow path are located at the same position in the substrate stacking direction, when a plurality of fluid flow paths are arranged adjacent to each other and in parallel as in the above configuration, the outer fluid flow path is arranged to make a larger turn than the inner fluid flow path. For this reason, foreign matter tends to accumulate and adhere to the wall surface of the outer fluid flow path due to centrifugal force. Therefore, the configuration of the present invention is particularly useful from the viewpoint of preventing such adhesion of foreign matter.

[0027] It is preferable that the return flow path is formed so as to maintain a circular cross-sectional shape of the flow path throughout the entire flow direction of the fluid to be processed.

[0028] According to this configuration, by maintaining the cross-section of the return flow path in a circular shape, it is possible to suppress the generation of flow stagnation in the return flow path. That is, when the cross-sectional shape of the return flow path has a shape having corners (for example, a rectangular shape), flow stagnation occurs at these corners, but this can be avoided according to this configuration.

[0029] It is preferable that the return flow path is formed so that the cross-sectional area of the flow path is constant throughout the entire flow direction of the fluid to be processed.

[0030] According to this configuration, since the cross-sectional area of the return flow path is constant, it is possible to further suppress the generation of stagnation in the return flow path.

[0031] The number of the fluid flow paths is plural, and it is preferable that the plurality of fluid flow paths are formed so as to extend adjacent to each other and in parallel.

[0032] In this way, in a fluid flow path device including a plurality of fluid flow paths, the time required for cleaning the return flow path becomes longer as the number of fluid flow paths increases. Therefore, it is preferable to adopt a structure in which foreign matter hardly accumulates in the return flow path, and thus the configuration of the present invention is particularly useful.

[0033] Another aspect of the present invention is a method for manufacturing the fluid channel device, comprising: a substrate forming step of forming a substrate having the fluid channel inside and composed of a plurality of substrates stacked together; a cutting step of cutting the substrate along a pair of cutting lines extending in the orthogonal direction at predetermined positions at both ends of the fluid channel in the predetermined direction, as viewed from the stacking direction of the plurality of substrates; a body forming step of forming the main body portion with the portion of the substrate cut in the cutting step between the pair of cutting lines; and a lid forming step of forming the pair of lid portions with the portion of the substrate cut in the cutting step outside the pair of cutting lines.

[0034] According to this method, by cutting both ends of a substrate having fluid channels inside, forming a pair of lids from the portions of the cut substrate located outside the pair of cutting lines, and forming a main body from the portion between the pair of cutting lines, it is possible to suppress misalignment between the folded channels formed in the pair of lids and the first and second channels formed in the main body, compared to when the pair of lids and the main body are formed in different lamination processes. Furthermore, according to this method, the manufacturing process can be simplified and costs reduced by forming the pair of lids and the main body integrally in the same process (the substrate forming process) and then separating them. [Effects of the Invention]

[0035] According to the present invention, a fluid flow path device and a method for manufacturing the same are provided that can improve the flowability of the fluid to be processed in a reverse flow path. [Brief explanation of the drawing]

[0036] [Figure 1] Figure 1 is a plan view showing a fluid flow device according to an embodiment of the present invention. [Figure 2] Figure 2 is a view taken in the direction of arrow II in Figure 1. [Figure 3] Figure 3 is a cross-sectional view taken along line III-III in Figure 1. [Figure 4] Figure 4 is a schematic diagram of the upper and lower temperature control channels as viewed from the substrate stacking direction. [Figure 5] Figure 5 is a cross-sectional view of the VV line in Figure 1. [Figure 6] Figure 6 is a cross-sectional view taken along the line VI-VI in Figure 1. [Figure 7] Figure 7 is a plan view showing mainly the first channel of the reaction flow path. [Figure 8] Figure 8 is a plan view showing mainly the second channel of the reaction flow path. [Figure 9] Figure 9 is an enlarged view showing section IX of Figure 1. [Figure 10] Figure 10 is a schematic diagram illustrating the configuration of the reverse channel, and corresponds to the cross-section along line XX in Figure 1. [Figure 11] Figure 11 is a cross-sectional view taken along line XI of Figure 10. [Figure 12] Figure 12 is a schematic diagram showing the right-side packing being held by the packing retaining plate, and corresponds to the cross-section along line XII-XII in Figure 1. [Figure 13] Figure 13 is a schematic diagram showing the left packing being held by the packing retaining plate, and corresponds to the cross-section along line XIII-XIII in Figure 1. [Figure 14] Figure 14 is a diagram corresponding to Figure 10, showing a modified example of Embodiment 1. [Figure 15] Figure 15 is a diagram corresponding to Figure 10, showing a modified example of Embodiment 1. [Figure 16] Figure 16 is a diagram corresponding to Figure 1, showing Embodiment 2. [Figure 17] Figure 17 is a cross-sectional view taken along the line XVII-XVII in Figure 16. [Figure 18] Figure 18 is a cross-sectional view taken along the line XVIII-XVIII in Figure 17. [Figure 19] Figure 19 is a diagram corresponding to Figure 17, showing a modified example of Embodiment 2. [Figure 20] Figure 20 is a cross-sectional view taken along the line XX-XX in Figure 19. [Figure 21] Figure 21 is a diagram equivalent to Figure 9, showing another embodiment. [Figure 22]Figure 22 is an explanatory diagram illustrating the problems with the conventional technology. [Modes for carrying out the invention]

[0037] Embodiments of the present invention will be described in detail below with reference to the drawings.

[0038] (Embodiment 1) Figure 1 is a plan view showing a fluid flow device 10 according to an embodiment of the present invention, Figure 2 is a view taken in the direction of arrow II in Figure 1, and Figure 3 is a cross-sectional view taken along line III-III in Figure 1. The fluid flow device 10 is used to combine multiple fluids and create interactions. In the following description, the fluid flow device 10 will be described as a microchannel reactor, but it is not limited to this. That is, the fluid flow device 10 can also be used as, for example, a heat exchanger, a reactor for extraction reactions, or a mixing device for emulsion formation. In the following description, the vertical direction in Figure 1 will be considered the front-to-back direction of the fluid flow device 10, the left-to-right direction in Figure 1 will be considered the left-to-right direction (corresponding to a predetermined direction) of the fluid flow device 10, and the direction perpendicular to the plane of the paper in Figure 1 will be considered the vertical direction of the fluid flow device 10. These directions are defined for convenience in explaining the structure of the fluid flow device 10 and do not limit the configuration of the present invention in any way.

[0039] [Overall configuration of the fluid flow channel system] The fluid flow channel device 10 of this embodiment merges the first fluid to be treated and the second fluid to be treated in the reaction channel 40, causing a predetermined chemical reaction (an example of the interaction) to occur in the combined fluid. The reaction channel 40 is an example of a fluid channel, and the first fluid to be treated, the second fluid to be treated, and the combined fluid to be treated correspond to the fluids to be treated flowing in the fluid channel.

[0040] As shown in Figures 1 and 2, the fluid flow device 10 comprises a rectangular parallelepiped body portion 20 that is long in the left-right direction, a pair of flange portions 30 (corresponding to a lid portion) that cover the left end face 20a and the right end face 20b of the body portion 20, two (one example of multiple) reaction flow channels 40 that are adjacent to each other and arranged in parallel, a pair of packings 50 that are sandwiched between the body portion 20 and the pair of flange portions 30, and a pair of packing holding plates 60 that each hold the pair of packings 50.

[0041] The two reaction channels 40 are formed spanning the main body 20 and a pair of flange portions 30. Since the configuration of the two reaction channels 40 is the same, they will not be distinguished in the following description. In a plan view, each reaction channel 40 is formed to extend in a zigzag pattern in the front-to-back direction while reciprocating in the left-to-right direction. Each reaction channel 40 has a plurality of first channels 41, a plurality of second channels 42 arranged at different heights from the plurality of first channels 41, and a plurality of return channels 43 connecting adjacent first channels 41 and second channels 42. Each reaction channel 40 is configured such that the fluid flowing inside it alternately flows from the upstream side to the downstream side through the first channels 41 and the second channels 42.

[0042] Furthermore, the fluid flow device 10 includes a first supply port 11 for supplying a first fluid to be treated to the reaction flow channel 40, a second supply port 12 for supplying a second fluid to be treated to the reaction flow channel 40, a treated fluid discharge port 13 for discharging the treated fluid after it has passed through the reaction flow channel 40 (the fluid after the chemical reaction of the first and second fluids to be treated), a temperature-controlled fluid supply port 14 for supplying temperature-controlled fluid (fluid for adjusting the temperature of the treated fluid) to the temperature-controlled flow channels 71 and 72 (see Figure 5, described later), and a temperature-controlled fluid discharge port 15 for discharging the temperature-controlled fluid after it has passed through the temperature-controlled flow channels 71 and 72.

[0043] The main body 20 has a rectangular parallelepiped shape that is elongated in the left-right direction when viewed as a whole. The main body 20 has a left end face 20a, a right end face 20b, an upper end face 20c, and a lower end face 20d. The left end face 20a and the right end face 20b (an example of a pair of end faces facing opposite directions) are vertical planes extending in the vertical direction, while the upper end face 20c and the lower end face 20d are horizontal planes extending in the left-right direction.

[0044] As shown in Figure 3, the main body 20 has six channel-forming substrates 21 stacked vertically, an upper cover substrate 22 stacked on the upper surface of the uppermost channel-forming substrate 21, and a lower cover substrate 23 stacked on the lower surface of the lowest channel-forming substrate 21. The outer edges of the substrates 21 to 23 coincide when viewed from the direction of substrate stacking. The upper surface of the upper cover substrate 22 constitutes the upper end surface 20c of the main body 20, and the lower surface of the lower cover substrate 23 constitutes the lower end surface 20d of the main body 20. In addition, the left end surface 20a and the right end surface 20b of the main body 20 are formed by the left end surface 21, the upper cover substrate 22, and the lower cover substrate 23, respectively.

[0045] The six channel-forming substrates 21 consist of an uppermost substrate 211 located at the top, a lowermost substrate 212 located at the bottom, a pair of first substrates 213 touching each other in the vertical direction, and a pair of second substrates 214 touching each other in the vertical direction. The pair of first substrates 213 are located at different heights than the pair of second substrates 214. That is, the pair of first substrates 213 are positioned adjacent to the lower side of the uppermost substrate 211 and form a plurality of first channels 41. The pair of second substrates 214 are positioned adjacent to the upper side of the lowermost substrate 212 and form a plurality of second channels 42. Details of the reaction channels 40, including the first channels 41 and the second channels 42, will be described later.

[0046] The uppermost substrate 211 and the upper cover substrate 22 in contact with its upper surface form an upper temperature control channel 71. The upper temperature control channel 71 is located within the uppermost substrate 211 and is formed to be in contact with the upper cover substrate 22. More specifically, the upper temperature control channel 71 is a channel with a semicircular cross-section, formed by closing a groove formed by etching on the upper surface of the uppermost substrate 211 from above with the upper cover substrate 22. Furthermore, the lowermost substrate 212 and the second substrate 214 in contact with its upper surface form a lower temperature control channel 72. The lower temperature control channel 72 is located within the lowermost substrate 212 and is formed to be in contact with the second substrate 214. More specifically, the lower temperature control channel 72 is a channel with a semicircular cross-section, formed by closing a groove formed by etching on the upper surface of the lowermost substrate 212 from above with the second substrate 214.

[0047] Figure 4 is a schematic diagram of the upper temperature control channel 71 and the lower temperature control channel 72 as viewed from the substrate stacking direction. Since the upper temperature control channel 71 and the lower temperature control channel 72 have the same planar shape, they are not specifically distinguished in Figure 4. As shown in this figure, each temperature control channel 71, 72 consists of a plurality of channels 700 arranged parallel to each other. These plurality of channels 700 extend in a zigzag pattern, reciprocating from the rear to the front in the left-right direction. The upstream end of each temperature control channel 71, 72 communicates with the upstream through hole 701. The downstream end of each temperature control channel 71, 72 communicates with the downstream through hole 702. The temperature control fluid supplied from the temperature control fluid supply port 14 is supplied to each temperature control channel 71, 72 via the upstream through hole 701, and then discharged to the outside from the temperature control fluid discharge port 15 via the downstream through hole 702.

[0048] The pair of flange portions 30 consist of a right flange portion 31 and a left flange portion 32. In the following description, the reference numeral 30 is used when there is no need to distinguish between the right flange portion 31 and the left flange portion 32.

[0049] Returning to Figure 1, each of the pair of flange portions 30 consists of a rectangular block body that is elongated in the front-to-back direction. The pair of flange portions 30 are arranged to sandwich the main body portion 20 from both the left and right sides. When viewed from the left and right directions, the pair of flange portions 30 have a plurality of bolt insertion holes 30b arranged along their outer edges. A plurality of bolts 16 are inserted through each of the plurality of bolt insertion holes 30b. The pair of flange portions 30 are fixed to the left and right end faces of the upper cover substrate 22 and the left and right end faces of the lower cover substrate 23 by the plurality of bolts 16. Inside the pair of flange portions 30, a plurality of return channels 43, which are part of the reaction channel 40, are formed.

[0050] The pair of flange portions 30 have a laminated structure similar to that of the main body portion 20. That is, each flange portion 30 has six channel-forming substrates 35 (see Figure 10, etc., described later), an upper cover substrate 33 laminated on the upper surface of the uppermost channel-forming substrate 35, and a lower cover substrate 34 laminated on the lower surface of the lowest channel-forming substrate 35. The upper cover substrate 33, the lower cover substrate 34, and the six channel-forming substrates 35 are connected substantially continuously to the upper cover substrate 22, the lower cover substrate 23, and the six channel-forming substrates 21 of the main body portion 20, respectively, with a packing 50 (see Figure 1) in between. Each folded channel 43 is formed from the second to the fourth layer from the top of the six channel-forming substrates 35. Details of each folded channel 43 will be described later.

[0051] Figure 5 is a cross-sectional view of Figure 1 along line VV, and Figure 6 is a cross-sectional view of Figure 1 along line VI-VI.

[0052] As shown in Figure 5, the right flange portion 31 has openings for the first supply port 11 and the treated fluid discharge port 13. Inside the right flange portion 31, there is a first introduction channel 17 that guides the first treated fluid supplied from the first supply port 11 to the reaction channel 40 (the uppermost of the multiple first channels 41), and an outlet channel 19 that guides the treated fluid after it has passed through the reaction channel 40 to the treated fluid discharge port 13.

[0053] As shown in Figure 6, the second supply port 12 described above is open in the left flange portion 32. Inside the left flange portion 32, a second introduction channel 18 is formed to guide the second fluid to be processed supplied from the second supply port 12 to the reaction channel 40 (the uppermost of the multiple second channels 42).

[0054] In the fluid flow device 10 configured as described above, the first fluid to be treated supplied from the first supply port 11 flows into the upstream end (upstream end) of the first flow path 41, which is located furthest forward, via the first introduction flow path 17. After flowing from right to left within the first flow path 41, it flows into the second flow path 42, which is located furthest forward, via the return flow path 43. On the other hand, the second fluid to be treated supplied from the second supply port 12 flows into the upstream end (upstream end) of the second flow path 42, which is located furthest forward, via the second introduction flow path 18. After merging with the first fluid to be treated, it flows from left to right within the second flow path 42. Subsequently, the mixed fluid of the first and second fluids to be treated flows alternately through the first flow path 41 and the second flow path 42 from upstream to downstream, and is finally discharged to the outside from the downstream end of the second flow path 42, which is located furthest rear, via the outlet flow path 19 and the fluid to be treated discharge port 13.

[0055] [Details of the reaction channel] As described above, the reaction channel 40 has a plurality of first channels 41, a plurality of second channels 42, and a plurality of return channels 43.

[0056] Figure 7 is a plan view mainly showing the first channel 41 of the reaction channel 40, and Figure 8 is a plan view mainly showing the second channel 42 of the reaction channel 40. Figure 9 is an enlarged view showing section IX of Figure 1.

[0057] As shown in Figure 7, each of the multiple first channels 41 penetrates between the left end face 20a and the right end face 20b of the main body 20, allowing the fluid to be processed to flow from the right end face 20b side to the left end face 20a side. Each first channel 41 extends linearly along the left-right direction when viewed from the substrate stacking direction. As shown in Figure 3, each first channel 41 consists of a cylindrical channel with a circular cross-section. Each first channel 41 is formed such that the channel cross-sectional shape and channel cross-sectional area are constant throughout its entire length. The first channels 41 are formed by joining semicircular grooves formed on the opposing surfaces of a pair of first substrates 213. Each groove in each first substrate 213 is formed by etching, for example, but is not limited to this. That is, each groove may be formed by cutting or the like.

[0058] As shown in Figure 8, each of the multiple second channels 42 penetrates between the left end face 20a and the right end face 20b of the main body 20, allowing the fluid to be processed to flow from the left end face 20a towards the right end face 20b. As shown in Figure 3, the second channels 42 consist of cylindrical channels with a circular cross-section. The second channels 42 are formed by joining together semicircular grooves formed on the opposing surfaces of a pair of second substrates 214. Each groove in each second substrate 214 is formed by etching, for example, but is not limited to this. That is, each groove may be formed by cutting or the like.

[0059] As shown in Figure 9, each second channel 42 has an overlapping channel 421 located at its upstream end and a crossing channel 422 connected to the downstream end of the overlapping channel 421. The overlapping channel 421 extends parallel to the first channel 41 at a position where it overlaps with the first channel 41 when viewed from the substrate stacking direction. The crossing channel 422 extends so as to intersect the first channel 41 at an oblique angle when viewed from the substrate stacking direction. In this example, the crossing channel 422 is inclined forward from right to left when viewed from the substrate stacking direction. The multiple first channels 41 and multiple second channels 42 are arranged alternately in the front-to-back direction, except for the portion where the overlapping channel 421 is located (see Figure 1).

[0060] [Details of the return channel] Next, the multiple return channels 43 directed towards the reaction channel 40 will be described. As described above, each of the multiple return channels 43 is formed inside the pair of flange portions 30.

[0061] The return channel 43 connects the two channels 41 and 42 so as to return the fluid to be treated flowing out of one of the two adjacent channels, the first channel 41 and the second channel 42, towards the other channel in the front-rear direction. Specifically, in the right flange portion 31, the return channel 43 connects the downstream end of the second channel 42 to the upstream end of the first channel 41 adjacent to the second channel 42, thereby returning the fluid to be treated flowing out of the second channel 42 towards the first channel 41. On the other hand, in the left flange portion 32, the return channel 43 connects the downstream end of the first channel 41 to the upstream end of the second channel 42 adjacent to the first channel 41, thereby returning the fluid to be treated flowing out of the first channel 41 towards the second channel 42.

[0062] Figure 10 is an explanatory diagram illustrating the configuration of the return channel 43, and corresponds to the cross-section along line XX in Figure 1. Figure 11 is a cross-sectional view taken along line XI-XI in Figure 10. Since all of the multiple return channels 43 have the same configuration, only one of them will be described as a representative example.

[0063] The return channel 43 is an internal channel formed inside each of the pair of flange portions 30. Specifically, as shown in Figure 10, the six channel-forming substrates 35 that make up each flange portion 30 consist of an uppermost substrate 351 located at the top, a lowermost substrate 352 located at the bottom, a pair of third substrates 353 adjacent to and in contact with each other below the uppermost substrate 351, and a pair of fourth substrates 354 adjacent to and in contact with each other above the pair of lowermost substrates 352. The return channel 43 is formed from the pair of third substrates 353 to the pair of fourth substrates 354.

[0064] The return channel 43 is formed in a U-shape that opens to the left when viewed from the front-rear direction. Both ends of the return channel 43 open to the surfaces 30a of each flange portion 30 that face the main body portion 20. The openings at both ends of the return channel 43 consist of a first end opening 43a connected to the first channel 41 and a second end opening 43b connected to the second channel 42.

[0065] The first end opening 43a is connected to the first flow path 41 via a first through hole 50a formed in the packing 50, which will be described later. The second end opening 43b is connected to the second flow path 42 via a second through hole 50b formed in the packing 50.

[0066] The folded channel 43 has a first horizontal channel section 43c connected to the first end opening 43a and extending linearly in the left-right direction, a second horizontal channel section 43d connected to the second end opening 43b and extending linearly in the left-right direction, and a connecting channel section 43e connecting the ends of the first horizontal channel section 43c and the second horizontal channel section 43d on the opposite side from the openings and extending in the up-down direction (substrate stacking direction). The right and upper corners of the folded channel 43 are formed at a right angle when viewed from the front-to-back direction (perpendicular to the plane of the paper in Figure 10). Similarly, the right and lower corners of the folded channel 43 are formed at a right angle when viewed from the front-to-back direction (perpendicular to the plane of the paper in Figure 10).

[0067] The first horizontal flow channel section 43c, the second horizontal flow channel section 43d, and the connecting flow channel section 43e each consist of a straight cylindrical flow channel with a circular cross-section and a constant cross-sectional area.

[0068] The first horizontal channel section 43c is formed by joining together semicircular grooves formed on the opposing surfaces of a pair of third substrates 353. These grooves are formed, for example, by etching, but are not limited to this, and may also be formed by machining, for example.

[0069] The second horizontal channel section 43d is formed by joining together semicircular grooves formed on the opposing surfaces of a pair of fourth substrates 354. These grooves are formed, for example, by etching, but are not limited to this, and may also be formed by machining, for example.

[0070] The connecting channel portion 43e is positioned inside the opposing surface 30a of the flange portion 30 (on the opposite side from the main body portion 20). The connecting channel portion 43e is composed of a semicircular recess formed on the lower surface of the upper third substrate 353, a circular through-hole that penetrates the lower third substrate 353 vertically, a circular through-hole that penetrates the upper fourth substrate 354 vertically, and a semicircular recess formed on the upper surface of the lower fourth substrate 354. These recesses or through-holes are formed, for example, by etching or cutting, but are not limited thereto.

[0071] The solid arrows in Figure 10 indicate the direction of flow of the fluid to be treated within the reverse channel 43. In the example in Figure 10, the direction of flow of the fluid to be treated within the reverse channel 43 in the right flange portion 31 is shown. In the right flange portion 31, the fluid to be treated that flows out from the downstream end of the second channel 42 flows into the second horizontal channel portion 43d through the second end opening 43b, flows from left to right, then flows from bottom to top within the connecting channel portion 43e, and also flows into the first horizontal channel portion 43c, flowing from right to left. The fluid to be treated is then discharged into the first channel 41 from the downstream end of the first horizontal channel portion 43c. The direction of flow in the reverse channel 43 in the left flange portion 32 is simply the reverse of the direction of flow in the reverse channel 43 in the right flange portion 31 described above, and a detailed explanation of this is omitted here.

[0072] [Details of packing and packing retaining plate] Next, with reference to Figures 12 and 13, the configuration of the pair of packings 50 and the packing holding plate 60 that holds each packing 50 will be described. The pair of packings 50 is an example of a sheet-like sealing member, which is compressed and sandwiched between the main body portion 20 and the pair of flange portions 30.

[0073] The pair of packings 50 consists of a right-side packing 51 and a left-side packing 52. In the following description, the reference numeral 50 is used when there is no need to distinguish between the right-side packing 51 and the left-side packing 52.

[0074] Figure 12 is a schematic diagram showing the right packing 51 being held by the packing retaining plate 60, and corresponds to the cross-section along line XII-XII in Figure 1. Figure 13 is a schematic diagram showing the left packing 52 being held by the packing retaining plate 60, and corresponds to the cross-section along line XIII-XIII in Figure 1.

[0075] The right-side packing 51 is compressed and held between the right end face 20b of the main body 20 and the right-side flange 31. The thickness of the right-side packing 51 before compression is greater than the thickness of the packing retaining plate 60.

[0076] As shown in Figure 12, the right-side packing 51 has a plurality of first through holes 50a that communicate with the first end opening 43a of the folded flow channel 43 formed in the right-side flange portion 31, and a plurality of second through holes 50b that communicate with the second end opening 43b of the folded flow channel 43 formed in the right-side flange portion 31.

[0077] Each first through-hole 50a allows the fluid to be processed to flow between each first end opening 43a of the right flange portion 31 and each first flow path 41 of the main body portion 20. Each second through-hole 50b allows the fluid to be processed to flow between each second end opening 43b of the right flange portion 31 and each second flow path 42 of the main body portion 20.

[0078] Furthermore, the right-side packing 51 has a third through-hole 50h that allows the flow of the fluid to be processed between the first inlet channel 17 and the first channel 41 located furthest upstream, and a fourth through-hole 50i that allows the flow of the fluid to be processed between the second channel 42 located furthest downstream and the outlet channel 19.

[0079] The right-side packing 51 is held by the packing retaining plate 60. The packing retaining plate 60 is a rectangular plate that is elongated in the front-rear direction. The packing retaining plate 60 is made of a metal member that has higher rigidity in the thickness direction than the right-side packing 51. The packing retaining plate 60 has a fitting hole 60a that fits into the outer edge of the right-side packing 51. The packing retaining plate 60 is positioned relative to the main body 20 using positioning pins (not shown).

[0080] As shown in Figure 13, the left packing 52 has a plurality of first through holes 50a that communicate with the first end opening 43a of the folded flow path 43 of the left flange portion 32, and a plurality of second through holes 50b that communicate with the second end opening 43b of the folded flow path 43 of the left flange portion 32. The thickness of the left packing 52 before compression is greater than the thickness of the packing retaining plate 60. The configuration of the packing retaining plate 60 that holds the left packing 52 is the same as the configuration of the packing retaining plate 60 that holds the right packing 51, so its description is omitted.

[0081] In the fluid flow device 10 configured as described above, if foreign matter accumulates in the return flow path 43, the pair of flange portions 30 and the pair of packings 50 can be removed, and the inside of the return flow path 43 can be cleaned through the first end opening 43a and the second end opening 43b exposed on the opposing surfaces 30a of each flange portion 30.

[0082] [Explanation of manufacturing method] Next, the manufacturing method of the fluid flow device 10 described above will be explained. When manufacturing the fluid flow device 10, the main body 20 and the pair of flange portions 30 are not formed in separate lamination processes, but are integrally molded in the same lamination process, and then the portions corresponding to the pair of flange portions 30 are cut and separated.

[0083] Specifically, the manufacturing method for the fluid flow channel device 10 includes a base material formation step, a cutting step, a main body formation step, a flange formation step (corresponding to the lid formation step), a packing unit formation step, and an assembly step.

[0084] In the substrate formation process, a substrate having two reaction channels 40 is formed by stacking multiple substrates (a total of eight substrates: six substrates and two substrates on either side of them). When stacking the substrates, grooves for forming the two reaction channels 40 are pre-formed in the substrates. The formation of the substrate is then completed by joining the stacked substrates by diffusion bonding.

[0085] In the cutting process, the substrate formed in the substrate forming process is cut along a pair of cutting lines extending in the front-to-back direction (a direction perpendicular to the left-to-right direction, which is the opposing direction of the pair of flange portions 30) at predetermined positions at both ends of the reaction channel 40 in the left-to-right direction, when viewed from the substrate stacking direction. The cutting can be performed, for example, by wire-cut electrical discharge, but is not limited to this. The positions of the cutting lines are determined in advance based on design dimensions and correspond to the opposing surfaces 30a of the pair of flange portions 30.

[0086] In the main body forming step, the main body 20 is formed from the portion of the base material cut in the cutting step between the pair of cutting lines.

[0087] In the flange portion forming step, a pair of flange portions 30 are formed from the portion of the base material cut in the cutting step that is outside the pair of cutting lines.

[0088] In the packing unit formation process, a pair of packing units are formed by fitting the packings 50 into the fitting holes 60a of the pair of packing holding plates 60.

[0089] In the assembly process, the flange portion 30 is fixed to the left end face 20a of the main body portion 20 with bolts 16, with the packing unit in between, and the flange portion 30 is also fixed to the right end face 20b of the main body portion 20 with bolts 16, with the packing unit in between.

[0090] [Effects and Effects] As explained above, in this embodiment, by forming the return channel 43 connecting the first channel 41 and the second channel 42 inside the flange portion 30, it is no longer necessary to provide a sealing member facing the return channel 43. Therefore, it is possible to prevent the seal member from bulging inward in the return channel 43, which would reduce the flowability of the fluid to be treated within the return channel 43. In other words, within the return channel 43, the flow direction of the fluid to be treated changes abruptly, which tends to reduce the flowability of the fluid to be treated. For this reason, if the sealing member bulges inward in the return channel 43, causing stagnation in the flow, there is a risk that foreign matter may accumulate or solidify to a level that cannot be removed. However, in this embodiment, since the return channel 43 is formed inside the flange portion 30, the sealing member does not face the return channel 43 as in the conventional method. Therefore, it is possible to prevent a decrease in the flowability of the fluid to be treated within the return channel 43 and prevent foreign matter from accumulating or solidifying within the return channel 43. Furthermore, it is possible to avoid insufficient chemical reaction of the fluid being treated due to stagnation in the flow in the return channel 43.

[0091] Furthermore, in this embodiment, the return flow path 43 has a first end opening 43a that opens on the surface 30a of each flange portion 30 facing the main body portion 20 and is connected to the first flow path 41, and a second end opening 43b that opens on the said surface 30a and is connected to the second flow path 42. The fluid flow device 10 further includes a pair of packings 50 (sheet-shaped packings 50) that are sandwiched between the pair of end faces 20a, 20b of the main body portion 20 and the said surface 30a of the pair of flange portions 30. Each pair of packings 50 has a first through hole 50a that communicates with the first end opening 43a and allows the flow of the fluid to be processed, and a second through hole 50b that communicates with the second end opening 43b and allows the flow of the fluid to be processed.

[0092] With this configuration, a return channel 43 is formed inside the flange portion 30, and a sheet-like packing 50 is placed between the flange portion 30 and the main body portion 20. This allows the packing 50 to be kept as far away as possible from the point where the flow direction changes in the return channel 43 (in this embodiment, the point where the connecting channel portion 43e is located). Therefore, it is possible to prevent the flowability of the fluid to be processed in the return channel 43 from decreasing due to the effect of stagnation of the fluid to be processed on the surface of the packing 50 affecting the point where the flow direction changes in the return channel 43.

[0093] In this embodiment, the fluid flow device 10 further includes a pair of packing retaining plates 60. The pair of packing retaining plates 60 are positioned between a pair of end faces 20a, 20b of the main body 20 and the opposing faces 30a of a pair of flange portions 30, respectively, and hold each sheet-like packing 50. Each of the pair of packing retaining plates 60 has a fitting hole 60a that fits onto the outer edge of each packing 50.

[0094] With this configuration, the positioning of each packing 50 can be facilitated by holding each packing 50 on a packing holding plate 60. In addition, each packing 50 is compressed between the left and right end faces 20a, 20b of the main body 20 and the pair of flange portions 30, but the amount of compression of each packing 50 at that time can be regulated by the thickness of each packing holding plate 60. This suppresses variations in the amount of compression of each packing 50 and improves sealing performance.

[0095] Furthermore, in this embodiment, the folded channel 43 has a first end opening 43a that opens to the opposing surface 30a of each flange portion 30 and is connected to the first channel 41, and a second end opening 43b that opens to the opposing surface 30a and is connected to the second channel 42. The first channel 41 is a straight channel extending along a predetermined direction, and the second channel 42 is connected to the second end opening 43b formed in each flange portion 30 and has an overlapping channel 421 that extends parallel to the first channel 41 at a position where it overlaps with the first channel 41 when viewed from the substrate stacking direction, and an intersecting channel 422 (see Figure 9) that is connected to the end of the overlapping channel 421 opposite to the second end opening 43b side and extends so as to intersect the first channel 41 at an angle when viewed from the substrate stacking direction.

[0096] With this configuration, the second flow path 42 does not extend diagonally across the main body 20 and the pair of flange portions 30, thus facilitating the relative alignment of the main body 20, the pair of flange portions 30, and the pair of packings 50. In other words, with this configuration, the second flow path 42 has an overlapping flow path 421 (see Figure 9) that extends parallel to the first flow path 41 formed in the main body 20 at a position where it overlaps with the first flow path 41 when viewed from the substrate stacking direction, and the diagonally extending crossing flow path 422 branches off from this overlapping flow path 421. Therefore, the diagonally extending crossing flow path 422 is formed only within the main body 20 and does not extend across the main body 20, the pair of flange portions 30, and the pair of packings 50. Thus, the relative alignment of the main body 20, the pair of flange portions 30, and the packings 50 can be easily and accurately performed without causing misalignment of the flow path holes, etc.

[0097] In this embodiment, the second channel 42 is formed between a pair of second substrates 214. That is, it is formed at different height positions than the first channel 41 and the second channel 42.

[0098] When such a two-stage flow path structure is adopted, the flow velocity distribution in the return flow path 43, which is the connection point between the first flow path 41 and the second flow path 42, becomes more complex compared to when a planar flow path structure is adopted, and foreign matter tends to accumulate in the return flow path 43. In a fluid flow path device 10 with such a configuration, the configuration of the invention, which can improve the flowability of the fluid to be processed in the return flow path 43 and suppress the accumulation of foreign matter, is particularly useful.

[0099] In this embodiment, there are multiple reaction channels 40, and the multiple reaction channels 40 are formed to extend adjacent to each other and in parallel.

[0100] Thus, in a fluid flow device 10 equipped with multiple reaction channels 40, the time required for cleaning the return channels 43 increases with the number of reaction channels 40. Therefore, it is preferable to adopt a structure that minimizes the accumulation of foreign matter in the return channels 43, and thus the configuration of the present invention is particularly useful.

[0101] In the manufacturing method of the fluid flow device 10 of this embodiment, by cutting both left and right ends of a base material having a reaction flow channel 40 inside, forming a pair of flange portions 30 from the portions of the cut base material located outside the pair of cutting lines, and forming a main body portion 20 from the portion between the pair of cutting lines, it is possible to suppress misalignment between the folded flow channel 43 formed within the pair of flange portions 30 and the first flow channel 41 and second flow channel 42 formed within the main body portion 20, compared to the case in which the pair of flange portions 30 and the main body portion 20 are formed in different lamination processes. Furthermore, by forming the pair of flange portions 30 and the main body portion 20 integrally in the same lamination process (the base material formation process) and then separating them, the manufacturing process can be simplified and costs can be reduced.

[0102] (Modified version of Embodiment 1) Figure 14 is a diagram corresponding to Figure 10, showing a modified example of Embodiment 1. Figure 15 is a cross-sectional view taken along the line XV-XV in Figure 14. In Figures 14 and 15, the same reference numerals are used for components that are the same as in the embodiment, and their descriptions are omitted as appropriate.

[0103] In this modified example, the shape of the return channel 43 (in particular, the shape of the connecting channel portion 43e) differs from that of the above embodiment.

[0104] In other words, in this modified example, the connecting channel section 43e is formed in an arc shape so that the shape and cross-sectional area of ​​the cross section perpendicular to its axial direction are constant over the entire axial direction (the entire flow direction of the fluid to be processed). As a result, the shape and cross-sectional area of ​​the channel cross section perpendicular to its axis are kept constant across the first horizontal channel section 43c, the connecting channel section 43e, and the second horizontal channel section 43d. That is, the return channel 43 constitutes a curved circular channel with a constant diameter over its entire axial direction.

[0105] [Effects and Effects] According to this modified example, the return channel 43 is formed such that the cross-sectional shape of the channel is circular throughout the entire flow direction of the fluid to be processed, thereby suppressing the occurrence of flow stagnation within the return channel 43. In other words, if the cross-sectional shape of the return channel 43 is, for example, a shape with corners (for example, a square shape), flow stagnation will occur at these corners, but this can be avoided with this configuration.

[0106] Furthermore, in this modified example, the return channel 43 is formed such that the cross-sectional area of ​​the channel is constant throughout the entire flow direction of the fluid to be treated.

[0107] With this configuration, since the cross-sectional area of ​​the return channel 43 is constant, the occurrence of stagnation within the return channel 43 can be further suppressed.

[0108] (Embodiment 2) Figure 16 is a diagram corresponding to Figure 1 showing Embodiment 2, and Figure 17 is a cross-sectional view taken along line XVII-XVII in Figure 16. In this embodiment, the shape of each return channel 43 differs from that of Embodiment 1. In the following description, the same reference numerals are used for components that are the same as in the embodiments, and their detailed descriptions are omitted as appropriate.

[0109] In other words, in this embodiment, each return channel 43 consists of a concave channel 43g (see Figure 17) formed in a concave shape on the surface 30a of the pair of flange portions 30 facing the main body portion 20. The concave channel 43g is formed to span the first channel 41 and the second channel 42 when viewed from the right side. The concave channel 43g opens to the opposing surface 30a of the flange portion 30. That is, the concave channel 43g has an opening edge 43h on the opposing surface 30a. The concave channel 43g is formed by etching, for example, but is not limited thereto.

[0110] Figure 18 is a cross-sectional view taken along line XVIII-XVIII in Figure 17. As shown in this figure, the right-side packing 51 has multiple elongated flow holes 50e corresponding to the open end edges 43h of the multiple folded flow channels 43. The multiple flow holes 50e allow the flow of the fluid to be processed between each concave flow channel 43g constituting the multiple folded flow channels 43 and the first flow channel 41 and second flow channel 42 facing each concave flow channel 43g. Although only the right-side packing 51 is shown in Figure 18, the left-side packing 52 also has multiple flow holes 50e similarly formed therein, but its illustration and detailed description are omitted.

[0111] [Effects and Effects] According to this embodiment, the folded flow path 43 consists of a concave flow path 43g and has an opening that opens to the opposing surface 30a of each flange portion 30. The fluid flow device 10 further comprises a pair of sheet-like packings 50 which are sandwiched between a pair of end faces 20a, 20b of the main body portion 20 and the opposing surfaces 30a of the pair of flange portions 30, and each of the pair of packings 50 has a flow hole 50e that communicates with the opening of the folded flow path 43 and allows the flow of the fluid to be processed.

[0112] With this configuration, by forming the return channel 43 in a concave shape on the surface 30a of the flange portion 30 facing the main body portion 20, the cleanability of the return channel 43 can be improved compared to when the return channel 43 is formed inside the flange portion 30. Furthermore, by placing the packing 50 between the flange portion 30 and the main body portion 20, the packing 50 is not positioned facing the return channel 43. Therefore, it is possible to prevent stagnation caused by the surface of the packing 50 bulging inward in the return channel 43, where the flowability of the fluid to be processed tends to decrease. Consequently, the flowability of the fluid to be processed in the return channel 43 can be improved.

[0113] (Modified version of Embodiment 2) Figure 19 is a diagram corresponding to Figure 17 showing a modified example of Embodiment 2. Figure 20 is a cross-sectional view taken along the line XX-XX in Figure 19. In this modified example, the configuration of the packing 50 differs from that of Embodiment 2.

[0114] In other words, in this modified example, the multiple flow holes 50e formed in the packing 50 are each composed of a third through-hole 50h that allows the fluid to be processed to flow between the first flow path 41 and the concave flow path 43g (folded flow path 43), and a fourth through-hole 50i that is formed independently of the third through-hole 50h and allows the fluid to be processed to flow between the second flow path 42 and the concave flow path 43g. In this example, the diameter of the third through-hole 50h is equal to the diameter of the first flow path 41, and the diameter of the fourth through-hole 50i is equal to the diameter of the second flow path 42. Although only the right packing 51 is shown in Figure 20, the left packing 52 also has multiple third through-holes 50h and fourth through-holes 50i formed in the same way, but its illustration and detailed explanation are omitted.

[0115] Furthermore, the concave channel 43g may be an arc-shaped channel as shown in the modified example of Embodiment 1. In that case, the channel diameter of the series of reaction channels 40, from the first channel 41, the third through-hole 50h, the concave channel 43g (folded channel 43), the fourth through-hole 50i, and the second channel 42, may be kept constant.

[0116] [Effects and Effects] According to this embodiment, the flow hole 50e consists of a third through hole 50h that allows the fluid to be processed to flow between the first flow path 41 and the concave flow path 43g that constitutes the return flow path 43, and a fourth through hole 50i that is formed independently of the third through hole 50h and allows the fluid to be processed to flow between the second flow path 42 and the concave flow path 43g.

[0117] According to this configuration, the flow holes 50e formed in the packing 50 are not connected by a single hole, but are instead composed of a third through-hole 50h for the first flow path 41 and a fourth through-hole 50i for the second flow path 42. This prevents the flow path cross-sectional area of ​​the series of reaction flow paths 40, which span the first flow path 41, the concave flow path 43g, and the second flow path 42, from changing abruptly in the flow holes 50e of the packing 50.

[0118] (Other embodiments) Although a fluid flow device 10 according to an embodiment of the present invention has been described above, the present invention is not limited thereto.

[0119] Although the above embodiments and modified examples have configurations with overlapping flow paths, the system is not limited to these configurations. For example, as shown in Figure 21, a configuration without overlapping flow paths 421 is also possible.

[0120] In the embodiments and modifications described above, the number of reaction channels 40 (an example of a fluid channel) is set to two, but this is not limited to this. The number of fluid channels may be one, or three or more.

[0121] In each of the embodiments and modifications described above, the reaction channel 40 (an example of a fluid channel) has a two-stage channel structure in which a first channel 41 and a second channel 42 are arranged at different height positions. However, it is not limited to this, and for example, as shown in Japanese Patent Application Publication No. 2013-56315, the first channel 41 and the second channel 42 may be formed between the same pair of laminated plates. In a fluid channel device 10 having such a channel structure, when a plurality of fluid channels are arranged adjacent to each other and parallel to one another, the outer fluid channels are arranged to make a larger turn than the inner fluid channels. As a result, foreign matter tends to accumulate and adhere to the wall surface of the outer fluid channels due to centrifugal force. Therefore, the configuration of the present invention is particularly useful from the viewpoint of preventing such adhesion of foreign matter.

[0122] In the embodiments and modifications described above, an example was given in which the substrate stacking direction of the main body 20 in the fluid flow device 10 is vertical. However, the invention is not limited to this, and the substrate stacking direction may be, for example, horizontal.

[0123] In each of the embodiments and modifications described above, the fluid flow device 10 has temperature-controlled flow channels 71 and 72, but the temperature-controlled flow channels 71 and 72 are not necessarily required. In other words, the fluid flow device 10 may be configured without temperature-controlled flow channels 71 and 72.

[0124] In each of the embodiments and modifications described above, the fluid flow device 10 is configured to have one process unit including a reaction flow path 40 (an example of a fluid flow path), but it is not limited to this, and for example, as shown in Japanese Patent Application Publication No. 2018-176034, a plurality of process units may be arranged in multiple stages in the substrate stacking direction.

[0125] In each of the embodiments and modifications described above, the thickness (dimension in the left-right direction) of the packing retaining plate 60 is set to be larger than the diameter of the first flow path 41 and the diameter of the second flow path 42, but this is not limited to this. That is, the thickness of the packing retaining plate 60 may be less than or equal to the diameter of the first flow path 41. Also, the thickness of the packing retaining plate 60 may be less than or equal to the diameter of the second flow path 42. In each of the embodiments and modifications described above, the first flow path 41 and the second flow path 42 have the same diameter, but this is not limited to this, and they may have different diameters. [Explanation of Symbols]

[0126] 10: Fluid flow device 20: Main body 20a: Left end face 20b: Right end surface 21: Channel-forming substrate (substrate) 22: Upper cover circuit board (circuit board) 23: Lower cover circuit board (circuit board) 30: Flange section (cover section) 30a: Opposite surface 31: Right-side flange section (cover section) 32: Left flange section (cover section) 40: Reaction channel (fluid channel) 41: First channel 42: Second channel 43: Reversible channel 43a: First end opening 43b: Second end opening 43g: Concave channel 50: Packing (sheet-shaped sealing material) 50a: 1st through hole 50b: 2nd through hole 50h: 3rd through hole 50i: Fourth through hole 50e :Flow hole 51: Right-side packing (sheet-like sealing material) 52: Left side packing (sheet-like sealing material) 60: Packing retaining plate (retaining plate) 60a: Fitting hole 213: First board 214: Second board 421: Overlapping channels 422: Crossing channel

Claims

1. A main body consisting of multiple substrates stacked on top of each other, having a pair of end faces that face opposite each other in a predetermined direction perpendicular to the stacking direction of the multiple substrates, A pair of lids that are detachably attached to the main body and cover the pair of end faces, It is formed spanning the main body and the pair of lids, and includes a fluid channel through which the fluid to be processed flows, The fluid passages formed within the main body are arranged alternately in an orthogonal direction perpendicular to the predetermined direction, with a first passage that penetrates between the pair of end faces and allows the fluid to be processed to flow from one end face to the other, and a second passage that penetrates between the pair of end faces and allows the fluid to be processed to flow from the other end face to the one end face, as viewed from the stacking direction of the plurality of substrates. The fluid to be processed is configured to flow alternately through the first passage and the second passage from the upstream side to the downstream side. The first channel is formed between a pair of first substrates that are in contact in the stacking direction among the plurality of substrates, The second channel is formed between the pair of first substrates, or between a pair of second substrates that are positioned differently from the pair of first substrates in the stacking direction and are in contact in the stacking direction. The fluid flow path consists of an internal flow path formed inside each of the lids or a concave flow path formed in a concave shape on the surface of each lid facing the main body, and further comprises a return flow path that connects the two flow paths such that the fluid to be treated flowing out of one of the adjacent first flow path and second flow path is returned to the other flow path.

2. In the fluid flow device according to claim 1, The aforementioned return channel is the internal channel and has a first end opening that opens to the opposing surface of each lid and is connected to the first channel, and a second end opening that opens to the opposing surface and is connected to the second channel. The system further comprises a pair of sheet-like sealing members, which are sandwiched between the pair of end faces of the main body and the opposing faces of the pair of lids, respectively. A fluid flow device wherein each of the pair of sealing members has a first through-hole that communicates with the first end opening and allows the flow of the fluid to be processed, and a second through-hole that communicates with the second end opening and allows the flow of the fluid to be processed.

3. In the fluid flow device according to claim 1, The aforementioned reverse channel consists of the aforementioned concave channel. The system further comprises a pair of sheet-like sealing members, which are sandwiched between the pair of end faces of the main body and the opposing faces of the pair of lids, respectively. A fluid flow device in which the pair of sealing members each have a flow hole that communicates with a concave flow path constituting the return flow path and allows the flow of the fluid to be processed.

4. In the fluid flow device according to claim 3, The fluid flow device comprises a third through-hole for circulating the fluid to be processed between the first flow path and the concave flow path constituting the return flow path, and a fourth through-hole formed independently of the third through-hole for circulating the fluid to be processed between the second flow path and the concave flow path.

5. In the fluid flow device according to any one of claims 2 to 4, The system further comprises a retaining plate positioned between the pair of end faces of the main body and the opposing faces of the pair of lids, respectively, for holding each of the sealing members, A fluid flow device wherein each of the pair of retaining plates has a fitting hole that fits onto the outer edge of each of the sealing members.

6. In the fluid flow device according to claim 5, The fluid channel device wherein the second channel is formed between the pair of second substrates.

7. In the fluid flow device according to claim 6, The aforementioned folded channel has a first end opening that opens to the opposing surface of each lid portion and is connected to the first channel, and a second end opening that opens to the opposing surface and is connected to the second channel. The first flow path is a straight flow path extending along the predetermined direction, The second channel is, An overlapping channel is connected to the second end opening formed in each of the aforementioned lids, and extends parallel to the first channel at a position that overlaps with the first channel when viewed from the stacking direction, A fluid flow device having a crossing flow path connected to the end of the overlapping flow path opposite to the second end opening side, and extending so as to intersect the first flow path at an angle when viewed from the stacking direction.

8. In the fluid flow device according to any one of claims 1 to 4, The number of fluid channels is multiple, The aforementioned plurality of fluid passages are formed to extend adjacent to each other and parallel to one another. The fluid channel device wherein the second channel is formed between the pair of first substrates.

9. In the fluid flow device according to claim 1, The aforementioned return channel is formed such that the cross-sectional shape of the channel is circular throughout the entire flow direction of the fluid to be processed, in a fluid channel device.

10. In the fluid flow device according to claim 9, The aforementioned return channel is formed such that the cross-sectional area of ​​the channel is constant throughout the entire flow direction of the fluid to be processed, in a fluid channel device.

11. In the fluid flow device according to any one of claims 1 to 4, The number of fluid channels is multiple, A fluid channel device in which the plurality of fluid channels are formed to extend adjacent to each other and parallel to one another.

12. A method for manufacturing a fluid flow device according to claim 1, A substrate forming step of forming a substrate having the fluid channel inside and being constructed by stacking the plurality of substrates, A cutting step of cutting the substrate along a pair of cutting lines extending in the orthogonal direction at predetermined positions at both ends of the fluid channel in the predetermined direction, when viewed from the stacking direction of the plurality of substrates, A body portion forming step in which the body portion is formed by the portion between the pair of cutting lines of the base material cut in the cutting step, A method for manufacturing a fluid flow device, comprising: a lid forming step of forming the pair of lids using the portion of the base material cut in the cutting step that is outside the pair of cutting lines; and a lid forming step of forming the pair of lids using the portion of the base material cut in the cutting step that is outside the pair of cutting lines.

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