Filter device and filter system

Abstract

To provide a filter device that prevents air from accumulating inside. [Solution] The filter device of the embodiment comprises a housing having a first port and a second port; a filter provided inside the housing and having a first through-hole having a first opening and a second opening and extending in a predetermined direction; a support part having a third opening connected to the second port and a fourth opening provided inside the first through-hole and a second through-hole extending in a predetermined direction; and a second part connected to the first part near the third opening and supporting the filter.

Description

Technical Field

[0001] Embodiments of the present invention relate to a filter device and a filter system.

Background Art

[0002] In the manufacturing process of semiconductor devices, various liquids (chemical solutions) are used. The liquids used in the manufacturing process of semiconductor devices contain liquid defects such as bubbles, metal particles, and other particles. The presence of such liquid defects causes defective device shapes in the microfabrication of semiconductor devices. Therefore, the yield of semiconductor devices decreases. Thus, before feeding a liquid to a manufacturing apparatus for semiconductor devices, a filter for the liquid is used to remove liquid defects.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object of the embodiments is to provide a filter device and a filter system in which air is unlikely to stay inside.

Means for Solving the Problems

[0005] The filter device of the embodiment includes a housing having a first port and a second port, a filter provided in the housing and having a first through-hole that has a first opening and a second opening and extends in a predetermined direction, a first portion having a third opening connected to the second port and a fourth opening provided in the first through-hole and having a second through-hole that extends in a predetermined direction, and a support portion having a second portion connected to the first portion near the third opening and supporting the filter.

Brief Description of the Drawings

[0006] [Figure 1] This is a schematic diagram of the filter system according to the embodiment. [Figure 2] This is a schematic diagram of the filter and support part of the embodiment. [Figure 3] This is a schematic diagram showing the usage of the housing, filter, and support part of the embodiment. [Figure 4] This is a schematic diagram showing an example of a multi-housing filter according to an embodiment. [Figure 5] This is a schematic diagram of the evaluation device of the embodiment. [Figure 6] This is an example of liquid evaluation including liquid defects, performed using the defect detection cell of the embodiment. [Figure 7] This is another example of liquid evaluation including liquid defects, performed using the defect detection cell of the embodiment. [Figure 8] This is a flowchart illustrating the method of using the filter system in the first embodiment of the model. [Figure 9] This is a flowchart illustrating the method of using the filter system in a second embodiment of the model. [Figure 10] This is a schematic diagram of the inside of a comparative filter device. [Figure 11] This is a schematic diagram illustrating the operation and effects of the filter device according to the embodiment.

[0007] The embodiments will be described below with reference to the drawings. In the drawings, identical or similar parts are denoted by the same or similar reference numerals.

[0008] In this specification, the upper direction in a drawing is referred to as "up" and the lower direction in a drawing as "down" to indicate the positional relationship of parts, etc. In this specification, the concepts of "up" and "down" do not necessarily refer to a relationship with the direction of gravity.

[0009] In this specification, the X-axis, the Y-axis perpendicular to the X-axis, and the Z-axis perpendicular to both the X-axis and the Y-axis are defined. The Z-axis is in the opposite direction to the vertical.

[0010] (Embodiment) The filter device of the embodiment comprises a housing having a first port and a second port; a filter provided within the housing and having a first through-hole having a first opening and a second opening and extending in a predetermined direction; a support portion having a third opening connected to the second port and a fourth opening provided within the first through-hole and a second through-hole extending in a predetermined direction; and a second portion connected to the first portion near the third opening and supporting the filter.

[0011] Furthermore, the filter device of the embodiment comprises a filter having a first through-hole having a first opening and a second opening and extending in a first direction, a support portion having a first portion having a third opening and a fourth opening and extending in a second direction and a second through-hole, and a second portion connected to the vicinity of the third opening and capable of supporting the filter.

[0012] The filter system of the embodiment comprises a storage tank for storing liquid containing liquid defects, a filter device, a liquid transfer pump connected to the first port of the storage tank and the filter device for transferring liquid from the storage tank to the filter device, and an evaluation device connected to the second port of the filter device and the storage tank for measuring liquid defects.

[0013] Figure 1 is a schematic diagram of the filter system 100 according to the embodiment.

[0014] The filter system 100 comprises a storage tank 60, a first pipe 92, a liquid transfer pump 50, a pump control unit 70, a second pipe 94, a filter device 30, a third pipe 96, a valve 90, an evaluation device (defect detection cell, liquid defect evaluation device) 80, and a fourth pipe 98.

[0015] The filter device 30 includes a housing 2, a filter 10, and a support part 20. The housing 2 has a first port (inlet, primary side port) 4 and a second port (outlet, secondary side port) 6. The filter 10 and the support part 20 will be described later.

[0016] The storage tank 60 is a container for storing the liquid Q filtered by the filter device 30.

[0017] The liquid Q is, for example, a chemical solution used in a semiconductor manufacturing process. The liquid Q is preferably, for example, a chemical solution containing a quaternary amine, a chemical solution containing a quaternary amine and a surfactant, or a chemical solution containing water and a surfactant. However, the type of the liquid Q is not particularly limited to the above.

[0018] Also, the chemical solution containing a quaternary amine is preferably an aqueous solution of tetramethylammonium hydroxide (TMAH) or an aqueous solution of trimethyl-2-hydroxyethylammonium hydroxide.

[0019] The liquid Q contains bubbles B, first particles M containing a metal, and second particles P different from the bubbles B and the first particles M. Here, the first particles M are particles such as silver, gold, iron oxyhydroxide, or chromium oxide. Also, here, the second particles P are, for example, particles of carbon, silica (quartz), or fluororesin.

[0020] In this specification, the bubbles B, the first particles M, and the second particles P are collectively referred to as in-liquid defects.

[0021] The storage tank 60 has an outlet 62 and an inlet 64.

[0022] The first pipe 92 connects the outlet 62 and the liquid feed pump 50. The second pipe 94 connects the liquid feed pump 50 and the first port 4 of the filter device 30. The third pipe 96 connects the second port 6 of the filter device 30 and the evaluation device 80. The fourth pipe 98 connects the evaluation device 80 and the inlet 64.

[0023] Liquid Q is supplied to the filter device 30 from the first port 4 via the outlet 62 through the first pipe 92 and the second pipe 94 using the liquid transfer pump 50. Liquid Q is filtered by the filter device 30. The filtered liquid Q is discharged from the second port 6. The discharged liquid Q is supplied to the evaluation device 80 via the third pipe 96. In the evaluation device 80, liquid Q is evaluated for sublime defects. After evaluation of sublime defects, liquid Q is returned to the storage tank 60 from the inlet 64 via the fourth pipe 98.

[0024] The flow rate in the piping is controlled, for example, by a pump control unit 70 connected to a liquid transfer pump 50 and a valve 90 provided in the third pipe 96.

[0025] Furthermore, other piping may be provided to share the filtered liquid Q with other semiconductor manufacturing equipment, etc.

[0026] The pump control unit 70 is, for example, an electronic circuit. The pump control unit 70 is, for example, a computer composed of a combination of hardware such as an arithmetic circuit and software such as a program.

[0027] Valve 90 is, for example, a needle valve or a ball valve, but is not limited to these.

[0028] Figure 2 is a schematic diagram of the filter 10 and support part 20 of the embodiment. In Figure 2(a), the filter 10 and support part 20 are shown, respectively. In Figures 2(b) and 2(c), the support part 20 is shown housed inside the first through-hole 12 of the filter 10 within the housing 2.

[0029] Figure 3 is a schematic diagram showing the usage of the housing 2, filter 10, and support part 20 of the embodiment.

[0030] The filter 10 is provided within the housing 2. The filter 10 has, for example, a cylindrical shape extending in a predetermined direction. The filter 10 has a first through-hole 12 extending in a predetermined direction. In Figure 2, the predetermined direction is shown as being parallel to the Z direction. In Figure 2, one opening of the first through-hole 12 is the first opening 14. The other opening of the first through-hole 12 is the second opening 16. The material of the filter 10 is, for example, PTFE (polytetrafluoroethylene), PVDF (polyvinylidene fluoride), PES (polyethersulfone), nylon, or ceramics. However, the material of the filter 10 is not limited to these.

[0031] Liquid Q is supplied into the housing 2 from the first opening 4 of the housing 2. Inside the housing 2, liquid Q is filtered from the outside of the filter 10 into the first through-hole 12. The filtered liquid Q enters the second through-hole 22 from the fourth opening 26 of the support part 20. Then, liquid Q is discharged to the outside of the filter device 30 from the second opening 6 connected to the third opening 24. In this embodiment, liquid Q before being filtered by the filter 10 may be referred to as liquid Q1, and liquid Q after being filtered by the filter 10 may be referred to as liquid Q2.

[0032] The support portion 20 has a first portion 27 and a second portion 28.

[0033] The first portion 27 has a tubular shape with a second through-hole 22. One opening of the first portion 27 is the third opening 24. The other opening of the first portion 27 is the fourth opening 26.

[0034] The second part 28 is connected to the vicinity of the third opening 24. For example, the second part 28 is provided with a groove (not shown) for accommodating an O-ring 29. Using the second part 28 and the O-ring 29, the third opening 24 is connected to the second port 6 in a way that prevents leakage of the liquid Q filtered by the filter 10. The first opening 14 of the filter 10 is fixed and supported, for example, by being fitted into the second part 28. Alternatively, the second opening 16 of the filter 10 may also be fixed and supported by the second part 28.

[0035] In this embodiment, an O-ring 29 was used for the explanation, but other sealing materials such as packing can be used instead of the O-ring 29.

[0036] As shown in Figure 2(b), the fourth opening 26 is located within the first through-hole 12 of the filter 10. In Figure 2(b), the third opening 24 is located outside the first through-hole 12 of the filter 10. However, the third opening 24 may also be located inside the first through-hole 12.

[0037] The fourth opening 26 preferably has a flared shape (flare), as shown in Figures 1 to 3. In this case, the inner diameter of the fourth opening 26 is larger than the inner diameter of the third opening 24.

[0038] A partition plate 40 is provided on the side of the second opening 16 of the filter 10. The partition plate 40 is a mechanism to prevent liquid Q from entering the first through-hole 12 from the outside of the filter 10 without being filtered by the filter 10. However, the mechanism to prevent liquid Q from entering the first through-hole 12 from the outside of the filter 10 without being filtered by the filter 10 is not limited to the partition plate 40.

[0039] Preferably, the fourth opening 26 is not in contact with the filter 10.

[0040] The inner diameter t4 of the fourth opening 26 is preferably larger than the inner diameter t3 of the third opening 24.

[0041] The length L2 of the second through-hole 22 is preferably 1 / 2 or more of the length L1 of the first through-hole 12.

[0042] On the other hand, the length L2 of the second through-hole 22 is, for example, less than or equal to the length L1 of the first through-hole 12.

[0043] The inner diameter t1 of the first opening 14 or the inner diameter t2 of the second opening 16 is preferably 1 / 10 or more and 1 / 2 or less of the inner diameter t4 of the third opening 24.

[0044] The inner diameter t1 of the first opening 14 or the inner diameter t2 of the second opening 16 is preferably 1 / 5 or more and 4 / 5 or less of the inner diameter t3 of the fourth opening 26.

[0045] As shown in Figure 3(a), the housing 2 has a base 7 and a lid 8 provided on the base 7. The base 7 is provided with a first opening 4 and a second opening 6. A third opening 9 is provided at the lower part of the base 7, for example. The third opening 9 is used, for example, as a drain for removing liquid Q from inside the housing 2. The lid 8 is connected to the upper part of the base 7 by, for example, a screw mechanism (not shown).

[0046] However, the configuration of housing 2 is not limited to those described above.

[0047] When arranging the filter 10 and support 20 inside the housing 2, remove the lid 8 from the base 7 (Figure 3(b)). Next, place the filter 10 and support 20 on the base 7 so that the fourth opening 26 of the support 20 is connected to the second opening 6. Also, attach the partition plate 40 to the top of the filter 10 (Figure 3(c)). Next, fix the lid 8 to the base 7, for example, by screwing it in (Figure 3(d)).

[0048] Furthermore, the filter system 100 may have multiple filter devices 30. The liquid Q may then be filtered by multiple filter devices 30.

[0049] For example, the filter devices 30 may be connected in series with each other. For example, if the filter system 100 has filter devices 30a and 30b, the second port 6 of filter device 30a and the first port 4 of filter device 30b may be connected, for example, using piping.

[0050] Furthermore, for example, the filter devices 30 may be connected in parallel to one another. Figure 4 is a schematic cross-sectional view of a multi-housing filter 110 in which the filter devices 30 are connected in parallel to one another. The housing 200 has, for example, one first port 4 and a plurality of second ports 6. A plurality of filters 10, a support part 20 and a partition plate 40 are provided inside the housing 200. The liquid Q is filtered by the plurality of filters 10, passes through the support part 20 inside each filter 10, and is discharged from the plurality of second ports 6.

[0051] Here, we will describe the structure of the evaluation device 80. The evaluation device 80 is an inspection device that acquires the particle size (geometric diameter) of liquid defects using, for example, the FPT (Flow Particle Tracking) method.

[0052] Figure 5 is a schematic diagram of a defect detection cell (evaluation unit) 314 used in the evaluation device 80, which acquires the particle size of liquid defects by the FPT method. Figure 5(a) is a schematic diagram of the defect detection cell 314 of the embodiment.

[0053] Column 152 is a transparent container capable of holding a solvent. The solvent flow within column 152 is laminar flow in the Z-axis direction. Column 152 is made of, for example, synthetic quartz or sapphire. The solvent flows from the column inlet 152a to the column outlet 152b.

[0054] The irradiation unit (light source) 156 irradiates the solvent in the column 152 with irradiation light, such as laser light. For example, when the solvent flows in the Z-axis direction, the irradiation unit 156 irradiates the solvent with irradiation light in the X-axis direction. However, the direction of irradiation light is not limited to the X-axis direction.

[0055] The imaging unit 158 ​​has a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor, etc., which are not shown. The imaging unit 158 ​​uses a lens 154, etc., to image the solvent in the column 152. It then acquires a moving image of scattered light emitted from defects in the liquid. Figure 5(b) is an example of a schematic diagram of a moving image of metal particles A acquired by the imaging unit 158. The analysis unit 160 determines the diffusion coefficient D of bubbles B, metal particles A, and particles D that are different from bubbles B and metal particles from this moving image. Here, metal particles A is an example of a first particle. Also, particle D is an example of a second particle. Particle D is, for example, a particle of carbon, silica (quartz), or fluororesin.

[0056] When a defect in a liquid undergoes Brownian motion in the solvent, the diffusion coefficient D of the defect can be determined from a moving image of the scattered light from the defect. The diffusion coefficient D and the defect diameter d of the defect are related by the following equation.

number

[0057] In equation (1), D is the diffusion coefficient of the liquid defect, k B θ is the Boltzmann constant, T is the absolute temperature, η is the viscosity (viscosity coefficient) of the solvent, and d is the defect diameter of the liquid defect. The calculation unit 162 can determine the defect diameter d of the liquid defect from the diffusion coefficient D using equation (1).

[0058] Furthermore, the refractive index of a defect in a liquid can be determined from the following formula.

number

[0059] In equation (2), I is the intensity of scattered light, I0 is the intensity of incident light, c is the number concentration of defects in the liquid, r is the distance from the defects in the liquid to the imaging unit 158, λ is the wavelength of the incident light, d is the particle size of the defects in the liquid, and m is the relative refractive index of the defects in the liquid with respect to the solvent. The relative refractive index m is obtained by dividing the refractive index n of the defects by the refractive index n0 of the solvent (m = n / n0). If the refractive index n0 of the first or second mixture is known, the calculation unit 162 can determine the refractive index n of the defects in the liquid using equation (2).

[0060] The determination unit 164 uses the refractive index n obtained by the calculation unit 162 to determine whether the defect in the liquid is a bubble, a metal particle A, or a particle D. For example, the determination unit 164 is connected to a database 166 that stores the refractive indices of known substances. For example, the determination unit 164 refers to the refractive index of such known substances in the above determination.

[0061] Figure 6 shows an example of evaluating a liquid containing liquid defects using the defect detection cell (evaluation unit) 314 of the embodiment. In the graph shown in Figure 6, the horizontal axis represents the defect diameter d of the liquid defect, and the vertical axis represents the refractive index n of the liquid defect calculated by the calculation unit 162.

[0062] Figure 6 shows similar distributions vertically around the solvent refractive index n0. In other words, the calculation unit 162 obtains two refractive indices n for the same defect diameter d, centered around the solvent refractive index n0. This is because equation (2) is a quadratic equation for the relative refractive index m. Therefore, by comparing the relative refractive index m obtained by equation (2) with known refractive index data, the evaluation method of the embodiment becomes a semi-qualitative method.

[0063] Specifically, when the refractive index of the solvent to be measured is n0, the determination unit 164 preferably determines that the liquid defect is a metal particle when the refractive index n is greater than n0+(n0 - 1) or the refractive index n is less than 1. Further, when the refractive index of the solvent to be measured is n0, the determination unit 164 preferably determines that the liquid defect is a bubble or particle D when the refractive index n is 1 or more or n0+(n0 - 1) or less. In other words, when the refractive index n calculated is within the range of the difference between the refractive index n0 of the solvent and the refractive index 1 of the bubble, centered on the refractive index n0 of the solvent, the liquid defect is determined as particle D or a bubble, and when the refractive index n calculated is outside the range of the difference between the refractive index n0 of the solvent and the refractive index 1 of the bubble, centered on the refractive index n0 of the solvent, the liquid defect is determined as metal particle A. That is, when the refractive index of the solvent to be measured is n0, the determination unit 164 determines that the liquid defect is metal particle A when the refractive index n satisfies "n < 1" or "n0+(n0 - 1) < n", and determines that the liquid defect is particle D or a bubble when the refractive index n satisfies "1 ≤ n ≤ n0+(n0 - 1)". The refractive index n0 of the solvent to be measured is, for example, 1.2 to 1.5, but is not limited thereto.

[0064] Note that the database 166 may not be provided. And the determination unit 164 may simply distinguish between bubbles and metal particles using the above refractive index magnitude relationship.

[0065] The database 166 is, for example, a storage device such as a semiconductor memory or a hard disk. The analysis unit 160, the calculation unit 162, and the determination unit 164 are, for example, electronic circuits. The analysis unit 160, the calculation unit 162, and the determination unit 164 are, for example, computers constituted by a combination of hardware such as arithmetic circuits and software such as programs.

[0066] Figures 6 and 7 are more specific examples of the evaluation of a liquid containing liquid defects.

[0067] When a(1) is the sum of the number of defects detected in the range of refractive index n > n0 + (n0 - 1), and a(2) is the sum of the number of defects detected in the range of refractive index n < 1, the number of metal particles A in the liquid can be expressed by the following formula. (a(1)+a(2)) / 2 = Number of metal particles A (3)

[0068] Furthermore, when a(3) is the sum of the measured values ​​in the range where the refractive index n is n0+(n0-1)≧ n≧1, the number of bubbles B or particles D in the liquid can be expressed by the following formula. a(3) / 2 = number of bubbles B or particles D (4)

[0069] Furthermore, by substituting a(1), a(2), and a(3) for a certain defect diameter d into the above formula, it is possible to determine the number of metal particles A, bubbles B, or particles D for a defect diameter d.

[0070] Both equations divide the sum of the measured values ​​for each defect type by 2 because the refractive index n obtained from equation (2) has two solutions for each detected defect.

[0071] Figures 6 and 7 show the distribution of defects detected from the defect diameter d and refractive index n calculated by the calculation unit 162. Figure 6 shows the distribution of defects in the TMAH after passing through a 50 nm pore diameter filter. Figure 7 shows the distribution of defects in the TMAH after passing through a 50 nm pore diameter filter and then a 10 nm pore diameter filter. The horizontal axis represents the defect diameter d, and the vertical axis represents the refractive index n.

[0072] In Figures 6 and 7, the defect diameter d (horizontal axis) is divided into 2.5 nm intervals within the range of 0 to 100 nm, and the refractive index n (vertical axis) is divided into 0.05 intervals within the range of 0 to 2.6, showing the number of defects detected in each region. Regions in the distribution map where one or more defects were detected are shown with the darkest coloring.

[0073] For example, consider determining the number of metal particles A, or bubbles B and particles D, from Figures 6 and 7. In this case, since the refractive index of TMAH is 1.337, the number of metal particles A is the sum of the number of defects detected in the range n > 1.674 and n < 1, divided by 2. Similarly, the number of bubbles B or particles D is the sum of the number of defects detected in the range 1.674 ≥ n ≥ 1, divided by 2.

[0074] Figure 6 shows that in the case of the 50nm filter, one or more defects are detected in the region where the defect diameter d is 30-50nm. In particular, the number of detected defects is high in the range where the refractive index is n>1.674 and n<1. This indicates that a large number of metal particles, bubbles, and other particles are passing through. On the other hand, Figure 7 shows that in the case of the 10nm filter, the number of detected defects is low in the range where the defect diameter d is 30-50nm and the refractive index is n>1.674 and n<1. This indicates that the number of metal particles is reduced. Thus, it can be seen that the evaluation method of the embodiment allows for a more appropriate evaluation of the filter's removal performance by FPT measurement, which determines the correct geometric diameter from the diffusion coefficient D.

[0075] Figure 8 is a flowchart illustrating the method of using the filter system in the first embodiment of the model.

[0076] First, the liquid Q is transferred from the storage tank 60 to the filter device 30 using the liquid transfer pump 50 (S2). Next, the system waits until the flow rate of liquid Q in the piping reaches a predetermined flow rate (S4). Liquid Q is repeatedly filtered by the filter 10 in the filter device 30. The flow rate of liquid Q in the piping can be measured using, for example, a flow meter installed in the piping (not shown in Figure 1).

[0077] Next, the number of bubbles in the liquid Q is measured using the evaluation device 80 (S6). For example, in a situation where it can be assumed that no non-metallic particles D are present at all, such liquid defects can be identified as bubbles when the refractive index n satisfies "1 ≤ n ≤ n0 + (n0 - 1)".

[0078] Next, the number of bubbles in the measured liquid Q is determined, for example, using the determination unit 164 (S8), to determine whether or not it is equal to or greater than a predetermined first threshold. If the number of bubbles in the liquid Q is equal to or greater than the first threshold, the differential pressure of the filter 10 is increased (S10). Specifically, the differential pressure of the filter 10 can be increased by increasing the flow rate of the liquid Q using the liquid transfer pump 50 and the pump control unit 70. Alternatively, the differential pressure of the filter 10 can be increased by reducing the opening of the valve 90 (operating the valve 90 in the closing direction).

[0079] In this embodiment, the thresholds, including the first threshold, can be stored in a database such as database 166.

[0080] Next, it is determined whether the differential pressure of the filter 10 is equal to or greater than a predetermined differential pressure (S12). This determination can be made by the determination unit 164, etc., using the flow rate value measured by a flow meter installed in the piping, for example. For example, if the flow rate of liquid Q is equal to or greater than a predetermined flow rate, it can be assumed that the differential pressure of the filter 10 is equal to or greater than a predetermined differential pressure. If the differential pressure of the filter 10 is equal to or greater than a predetermined differential pressure, the liquid supply is stopped (S14). If the differential pressure of the filter 10 is less than a predetermined differential pressure, the process returns to S8, and it is determined whether the number of bubbles in the measured liquid Q is equal to or greater than a predetermined first threshold. The predetermined differential pressure can be stored in a database, for example, database 166.

[0081] On the other hand, if the number of bubbles in the measured liquid Q is less than a predetermined first threshold, the liquid is pumped and the filter internal pressure conditions are determined (S16).

[0082] Figure 9 is a flowchart showing how to use the filter system 100 in a second embodiment of the model.

[0083] Here, a filter device 30 without a support portion 20 is prepared (S52).

[0084] Next, similar to the first embodiment, the liquid Q is transferred from the storage tank 60 to the filter device 30 using the liquid transfer pump 50 (S2). Next, wait until the flow rate of liquid Q in the piping reaches a predetermined flow rate (S4). Next, measure the number of bubbles in liquid Q using the evaluation device 80 (S6).

[0085] Next, if the number of bubbles in liquid Q is below the second threshold, the liquid Q is filtered using a filter device 30 that does not have a support part 20 (S60).

[0086] On the other hand, if the number of bubbles in liquid Q is greater than the second threshold, a filter device 30 having a support part 20 is prepared (S62). Then, the number of bubbles is measured by the evaluation device 80 (S64), and the filter device 30 having a support part 20 is used (S66).

[0087] The method of using the filter system 100 in the second embodiment is preferably used to determine whether the liquid Q is a liquid for which the filter device 30 of the embodiment is preferable. In other words, if the liquid Q is a liquid that does not easily foam, the support part 20 may not be used. On the other hand, if the liquid Q is a liquid that easily foams, it is preferable to use the support part 20.

[0088] Next, the effects and benefits of the filter device 30 of the embodiment will be described.

[0089] Figure 10 is a schematic diagram of the inside of a comparative filter device 300. The filter device 300 does not have a support portion 20. In this case, there was a problem in that bubbles B inside the liquid Q filtered by the filter 10 accumulated at the top of the first through hole 12, and bubbles were generated from the gas-liquid interface.

[0090] To remove the bubbles, it is conceivable to provide a vent on the secondary side of the filter that allows for bubble (air) removal. However, there was a problem in that it was not possible to provide a vent depending on the shape of the piping of other equipment. In particular, in the case of multi-housing filters, there was a problem in that it was difficult to discharge the bubbles to the outside of the housing from the first through-hole 12 of each filter 10.

[0091] Figure 11 is a schematic diagram illustrating the operation and effects of the filter device according to the embodiment.

[0092] Within the first through-hole 12, a pressure difference is created between the outside of the support portion 20 and the inside of the support portion 20 (inside the second through-hole 22). Specifically, the pressure inside the support portion 20 (inside the second through-hole 22) is higher than the pressure outside the support portion 20. As a result, a pressure difference is created between the outside and inside of the support portion 20. This pressure difference can be used to discharge the air accumulated at the top of the first through-hole 12 from the fourth opening 26 to the third opening 24. This makes it possible to provide a filter device and filter system in which air is less likely to accumulate inside.

[0093] The inner diameter t4 of the fourth opening 26 is preferably larger than the inner diameter t3 of the third opening 24. This is to allow air to enter the second through-hole 22 more easily.

[0094] It is preferable that the fourth opening 26 does not come into contact with the filter 10. If the fourth opening 26 comes into contact with the filter 10, the movement of air in the first through-hole 12 will be hindered, making it difficult to smoothly discharge the air.

[0095] The length L2 of the second through-hole 22 is preferably at least half the length L1 of the first through-hole 12. If the length L2 of the second through-hole 22 is shorter than half the length L1 of the first through-hole 12, a lot of air will accumulate inside the second through-hole 22.

[0096] In order to properly create an internal pressure difference and effectively discharge air, it is preferable that the inner diameter t1 of the first opening 14 or the inner diameter t2 of the second opening 16 be between 1 / 10 and 1 / 2 of the inner diameter t3 of the third opening 24. Furthermore, it is preferable that the inner diameter t1 of the first opening 14 or the inner diameter t2 of the second opening 16 be between 1 / 5 and 4 / 5 of the inner diameter t4 of the fourth opening 26.

[0097] When liquid Q is a chemical solution containing a quaternary amine, a chemical solution containing a quaternary amine and a surfactant, or a chemical solution containing water and a surfactant, it is prone to foaming, and therefore, air can be preferably discharged using the filter device and filter system of the embodiment.

[0098] Furthermore, when the chemical solution containing a quaternary amine is an aqueous solution of tetramethylammonium hydroxide (TMAH) or an aqueous solution of trimethyl-2-hydroxyethylammonium hydroxide, foaming is particularly likely, so the filter device and filter system of the embodiment can preferably discharge air.

[0099] The filter device and filter system of the embodiment make it possible to provide a filter device and filter system in which air is less likely to accumulate inside.

[0100] While several embodiments and examples of the present invention have been described, these embodiments and examples are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents.

[0101] Furthermore, the above embodiments can be summarized in the following technical proposal. (Technical proposal 1) A housing having a first opening and a second opening, A filter provided within the housing, having a first opening and a second opening, and a first through-hole extending in a predetermined direction, A support portion having a third opening connected to the second port, a fourth opening provided within the first through hole, a first portion having a second through hole extending in the predetermined direction, and a second portion connected to the first portion near the third opening and supporting the filter, A filter device equipped with the following features. (Technical proposal 2) The inner diameter of the fourth opening is larger than the inner diameter of the third opening. A filter device as described in Technical Proposal 1. (Technical proposal 3) The fourth opening does not come into contact with the filter. A filter device as described in Technical Proposal 1. (Technical proposal 4) The length of the second through-hole is at least half the length of the first through-hole. A filter device as described in Technical Proposal 1. (Technical proposal 5) The inner diameter of the first opening or the inner diameter of the second opening is 1 / 10 or more and 1 / 2 or less of the inner diameter of the third opening. A filter device as described in Technical Proposal 1. (Technical proposal 6) The inner diameter of the first opening or the inner diameter of the second opening is 1 / 5 or more and 4 / 5 or less of the inner diameter of the fourth opening. A filter device as described in Technical Proposal 1. (Technical proposal 7) The liquid filtered by the aforementioned filter is a chemical solution containing a quaternary amine, a chemical solution containing a quaternary amine and a surfactant, or a chemical solution containing water and a surfactant. A filter device as described in Technical Proposal 1. (Technical proposal 8) The chemical solution containing the quaternary amine is an aqueous solution of tetramethylammonium hydroxide (TMAH) or an aqueous solution of trimethyl-2-hydroxyethylammonium hydroxide. A filter device as described in Technical Proposal 7. (Technical proposal 9) A filter having a first opening and a second opening, and a first through-hole extending in a first direction, A support portion having a first portion having a second through-hole extending in a second direction and having a third opening and a fourth opening, and a second portion connected to the first portion near the third opening and capable of supporting the filter, A filter device equipped with the following features. (Technical proposal 10) A storage tank for storing liquid containing sublime defects, The filter device described in Technical Proposal 1, A liquid transfer pump connected to the first port of the storage tank and the filter device, which transfers the liquid from the storage tank to the filter device, An evaluation device connected to the second port of the filter device and the storage tank for measuring liquid defects, A filter system equipped with the following features. (Technical proposal 11) The evaluation device is A transparent column capable of containing the aforementioned liquid, An irradiation unit that irradiates the liquid in the column with irradiation light, An imaging unit that captures scattered light emitted from the liquid defects by the aforementioned irradiated light, An analysis unit that determines the diffusion coefficient of the liquid defect from the captured scattered light, A calculation unit that uses the diffusion coefficient to calculate the particle size of the liquid defect and the refractive index of the liquid defect, A determination unit that uses the refractive index to determine the presence of the liquid defect, A filter system according to the technical proposal 10, having the following characteristics. [Explanation of symbols]

[0102] 2: Housing 4: 1st mouth 6: 2nd mouth 10: Filter 12: First through hole 14: First opening 16: Second opening 20: Support part 22: Second through hole 24: Third opening 26: Fourth opening 27 :1st part 28:Second part 30: Filter device 50: Liquid transfer pump 60:Storage tank 62:Exit 64:Entrance 80: Evaluation equipment (defect detection cell, liquid defect evaluation device) 100: Filter System Q:Liquid B: Foam

Claims

1. A housing having a first opening and a second opening, A filter provided within the housing, having a first opening and a second opening, and a first through-hole extending in a predetermined direction, A support portion having a third opening connected to the second port, a fourth opening provided within the first through hole, a first portion having a second through hole extending in the predetermined direction, and a second portion connected to the first portion near the third opening and supporting the filter, A filter device equipped with the following features.

2. The inner diameter of the fourth opening is larger than the inner diameter of the third opening. The filter device according to claim 1.

3. The fourth opening does not come into contact with the filter. The filter device according to claim 1.

4. The length of the second through-hole is at least half the length of the first through-hole. The filter device according to claim 1.

5. The inner diameter of the first opening or the inner diameter of the second opening is 1 / 10 or more and 1 / 2 or less of the inner diameter of the third opening. The filter device according to claim 1.

6. The inner diameter of the first opening or the inner diameter of the second opening is 1 / 5 or more and 4 / 5 or less of the inner diameter of the fourth opening. The filter device according to claim 1.

7. The liquid filtered by the aforementioned filter is a chemical solution containing a quaternary amine, a chemical solution containing a quaternary amine and a surfactant, or a chemical solution containing water and a surfactant. The filter device according to claim 1.

8. The chemical solution containing the quaternary amine is an aqueous solution of tetramethylammonium hydroxide (TMAH) or an aqueous solution of trimethyl-2-hydroxyethylammonium hydroxide. The filter device according to claim 7.

9. A filter having a first opening and a second opening, and a first through-hole extending in a first direction, A support portion having a first portion having a third opening and a fourth opening and a second through hole extending in a second direction, and a second portion connected to the first portion near the third opening and capable of supporting the filter, A filter device equipped with the following features.

10. A storage tank for storing liquid containing sublime defects, The filter device according to claim 1, A liquid transfer pump connected to the first port of the storage tank and the filter device, which transfers the liquid from the storage tank to the filter device, An evaluation device connected to the second port of the filter device and the storage tank for measuring liquid defects, A filter system equipped with the following features.

Images