Bellows fitting, process discharge treatment method, and treatment apparatus.

Abstract

This disclosure relates to bellows joint fittings, a method for treating process discharges, and a treatment apparatus. [Solution] The bellows fitting has an upstream end for receiving process effluent and a downstream end for discharging process effluent. The bellows fitting is provided with one or more fluid inlets for introducing diluent fluid which is discharged through the downstream end along with the process effluent.

Description

Technical Field

[0001] The present disclosure generally relates to joints or fittings for pipes. In particular, the present disclosure relates to joints with corrugated bellows and their use in maintaining effective functioning of fluid discharge equipment, for example, in the field of semiconductor manufacturing.

Background Art

[0002] There is a wide interest in improving safety measures in the semiconductor industry, particularly with respect to handling corrosive and toxic materials. The impact of these materials on equipment and operators has attracted much attention due to the potential health risks and operational disruptions they pose.

[0003] Process pumps in semiconductor manufacturing are generally recognized as requiring flexible connections to address alignment issues and reduce vibration noise. Despite the importance of maintaining a safe working environment, conventional solutions for managing exhaust gases have limitations. The thin-wall bellows structure in conventional adjustable pipe joints is prone to corrosion and damage, which may result in dangerous leaks. In view of the above, it may be desirable to develop a new solution to improve the durability and safety of adjustable pipe joints.

[0004] Any discussion, including discussion of problems and solutions described in this section, is included in this disclosure only for the purpose of providing context for the present disclosure. Such discussion should not be construed as an admission that any or all of the above information was known or constituted prior art at the time the present invention was made.

Summary of the Invention

[0005] [[ID=(26)]] This summary of the invention is provided to present a simplified selection of concepts. These concepts are described in more detail below in the detailed description of the exemplary embodiments of the present disclosure. This summary is not intended to identify any major or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0006] According to a first embodiment, a bellows fitting is provided. The bellows fitting has an upstream end for receiving process discharges and a downstream end for discharging process discharges. The bellows fitting comprises a bellows tube and one or more fluid inlets for introducing a diluent fluid to be discharged through the downstream end together with the process discharges.

[0007] A second embodiment provides a method for treating process effluent. The method includes providing a bellows fitting according to the first embodiment, receiving process effluent into the bellows fitting through its upstream end, introducing a diluent fluid into the bellows fitting through one or more fluid inlets, and discharging the process effluent and diluent fluid from the bellows fitting through its downstream end.

[0008] According to a third embodiment, a processing device is provided. The processing device comprises a bellows joint fitting according to the first embodiment.

[0009] In some embodiments, the bellows joint fitting includes an inner tube connected to and surrounded by the bellows tube to shield the bellows tube from process discharges.

[0010] In some embodiments, the bellows tube has a first bellows tube end, and the bellows joint fitting comprises an annular body connecting the first bellows tube end to an inner tube, with at least a portion of one or more fluid inlets extending into the annular body.

[0011] In some embodiments, the annular intermediate space enclosed by the bellows tube surrounds the inner tube and includes one or more first fluid inlets configured to introduce a diluting fluid into the intermediate space.

[0012] In some embodiments, the fluid channel enclosed by the inner tube extends from an upstream end to a downstream end, and one or more fluid inlets include one or more second fluid inlets configured to introduce a diluting fluid into the fluid channel.

[0013] In some embodiments, receiving process emissions includes receiving process emissions from the processing equipment.

[0014] In some embodiments, the method includes supplying process effluent and dilution fluid to a removal unit.

[0015] In some embodiments, the method includes measuring fluid conductance through at least a portion of one or more fluid inlets to form a measurement result, and issuing an alarm and / or triggering an automatic corrective procedure if the fluid conductance represented by the measurement result exceeds a predetermined fluid conductance threshold.

[0016] In some embodiments, the process effluent received by the bellows joint fitting includes one or more inorganic acids in gaseous form.

[0017] In some embodiments, the diluent fluid includes nitrogen gas.

[0018] In some embodiments, the processing apparatus includes a dilution fluid source for supplying a dilution fluid to a bellows joint fitting through one or more fluid inlets.

[0019] In some embodiments, the processing apparatus includes a mass flow controller for controlling the flow of dilution fluid to a bellows joint fitting via one or more fluid inlets.

[0020] In some embodiments, the processing apparatus comprises one or more process units and an upstream discharge network that fluidly couples the one or more process units to a bellows joint fitting for transporting process effluent from the one or more process units into the bellows joint fitting.

[0021] In some embodiments, the one or more process units include one or more chemical vapor deposition units, such as one or more atomic layer deposition units, and / or one or more dry etching units, and / or one or more diffusion furnace units.

[0022] In some embodiments, the processing apparatus comprises a vacuum pump upstream of the bellows joint fitting for flushing process effluent through the bellows joint fitting.

[0023] In some embodiments, the processing apparatus comprises a removal unit and a downstream discharge network that fluidly couples the bellows joint fitting to the removal unit for transporting process effluent from the bellows joint fitting to the removal unit.

[0024] In some embodiments, the processing apparatus comprises a control unit configured to operate the processing apparatus to execute a method according to a second aspect. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] A more complete understanding of embodiments of the present disclosure may be obtained by reference to the detailed description and claims when considered in connection with the following exemplary drawings.

[0026] [Figure 1] FIG. 1 shows a bellows joint fitting. [Figure 2] FIG. 2 shows a method for processing process effluent. [Figure 3] FIG. 3 shows a processing apparatus.

[0027] The elements in the figures are illustrated for simplicity and clarity and are not necessarily drawn to scale. For example, some dimensions of the elements in the figures may be exaggerated relative to other elements to assist in the understanding of the exemplary embodiments of the present disclosure.

[0028] The examples presented in this specification do not represent the actual form of any particular material, structure, or device, but are merely idealized representations used to describe embodiments of the present disclosure.

[0029] For clarity and simplicity, consistent reference numerals may be used throughout the figures for corresponding, similar, and / or identical elements.

Mode for Carrying Out the Invention

[0030] Although certain embodiments and examples are disclosed below, it will be understood by those skilled in the art that the present invention extends beyond the specifically disclosed embodiments and / or uses of the present invention, as well as their obvious modifications and equivalents. Therefore, it is intended that the scope of the disclosed invention should not be limited by the specific disclosed embodiments described below.

[0031] The specific implementations illustrated and described are examples of the present invention and its best mode and are not intended to limit the scope of the aspects and implementations in any way. In fact, for the sake of brevity, conventional manufacturing, related, preparation, and other functional aspects of the system may not be described in detail or may be omitted entirely. Additionally, the connecting lines shown in the various figures are intended to represent examples of the functional relationships and / or physical connections between the various elements. Many alternative or additional functional relationships or physical connections may exist in the actual system and / or may not exist in some embodiments.

[0032] The configurations and / or approaches described herein are essentially examples, and it should be understood that these particular embodiments or examples should not be considered limiting, as numerous variations are possible. The specific routines or methods described herein may represent one or more of any number of processing strategies. Therefore, the various operations illustrated may be performed in the order illustrated, in other orders, or, in some cases, omitted.

[0033] The subject matter of this disclosure includes all novel and non-obvious combinations and partial combinations of the various processes, systems, and configurations disclosed herein, as well as any and all equivalents thereof, and other features, functions, operations, and / or characteristics.

[0034] In this specification, “bellows tube” may refer to a generally accordion-like and / or corrugated structure configured to expand and / or contract. Additionally or alternatively, a bellows tube may refer to a structure configured to absorb vibrations in a piping system and / or accommodate misalignment. In some embodiments, a bellows tube may consist of, substantially be, or include, a material that is resistant to corrosion and / or can withstand high temperatures and / or pressure differences. In some embodiments, a bellows tube may consist of, substantially be, or include, one or more stainless steels such as 304 stainless steel, 321 stainless steel, 316L stainless steel, 317L stainless steel, or 904L stainless steel. Furthermore, “fitting” may refer to a component configured to connect sections of pipes or tubes in a fluid system, e.g., a liquid, steam, and / or gas system, and / or to provide flexibility to the connected components and / or to reduce stress. In some embodiments, a fitting may include one or more types of connectors, such as couplings, elbows, tees, and / or adapters. Additionally or alternatively, a bellows fitting may refer to a component configured to provide a secure and / or leak-free connection between components. In some embodiments, the bellows fitting may have enhanced durability and / or safety through features such as corrosion-resistant material and / or reinforcing structure. As a result, “bellows fitting” may refer to a fitting comprising a bellows pipe. Additionally or alternatively, a bellows fitting may refer to a fitting configured to connect sections of pipe or tube while providing flexibility to the connected components and / or reducing stress. In some embodiments, a bellows fitting may have an upstream end for receiving process discharges and a downstream end for discharging process discharges.

[0035] Throughout this disclosure, the term “end” may refer to the terminal location, boundary, or section of a component, section, or system. In some embodiments, an “end” may be configured to connect to other components, enabling the transport and / or containment of a substance. Furthermore, the term “upstream” may refer to a location or direction closer to the source or origin of a flow of fluid, e.g., liquid, vapor, and / or gas, and / or one or more other substances in the system. Additionally or alternatively, upstream may indicate a direction opposite to the fluid flow toward the final destination or discharge point. Consequently, the term “upstream end” may refer to an end that is suitable to be configured to be closer to and / or closest to the source or origin of a flow of fluid, e.g., liquid, vapor, and / or gas, and / or one or more other substances. Additionally or alternatively, an upstream end may refer to an end into which a substance enters and / or is introduced into a component.

[0036] In this specification, the term “downstream” may refer to a location or direction further along the flow path of a fluid, e.g., liquid, vapor, and / or gas, and / or one or more other substances in the system. Additionally or alternatively, “downstream” may indicate the direction in which substances are transported away from their source or origin. Consequently, the term “downstream end” may refer to an end that is suitable for, or configured to be located, further along the flow path of a fluid, e.g., liquid, vapor, and / or gas, and / or one or more other substances. Additionally or alternatively, a downstream end may refer to the end of a component from which substances exit and / or are discharged.

[0037] In this disclosure, the term “process” may refer to a series or group of actions or steps taken in a manufacturing or processing system or method to achieve a particular final result. In some embodiments, “process” may include one or more chemical, physical, and / or mechanical actions or steps. Furthermore, the term “emissions and spills” may refer to waste fluids, e.g., waste liquids, waste vapors, and / or waste gases discharged from an engine, machine, or industrial process. Additionally or alternatively, it may refer to spilled waste from a process or system, such as waste fluids, e.g., waste liquids, waste vapors, and / or waste gases. In some embodiments, “emissions and spills” may include by-products of chemical reactions and / or other industrial activities. Consequently, the term “process emissions and spills” may refer to emissions and spills discharged from a process or system. Additionally or alternatively, process emissions and spills may refer to by-products of chemical reactions and / or other industrial activities discharged from a system. In some embodiments, process effluents may include, for example, one or more inorganic acids in gaseous form, such as hydrochloric acid (HCl), hydrofluoric acid (HF), sulfuric acid (H2SO4), and / or nitric acid (HNO3), as vapor and / or gas, and / or one or more other chemical compounds in any preferred form, for example, as liquid, gas, and / or vapor.

[0038] Throughout this disclosure, “control unit” may refer to a device or system having at least one designated function associated with determining and / or influencing operating conditions, states, and / or parameters related to another device, unit, or component. Additionally or alternatively, a control unit may refer to a device or system that receives one or more input signals from one or more sensors and / or generates one or more output signals to control one or more actuators. Additionally or alternatively, a control unit may refer to a device or system that executes one or more control algorithms to maintain desired process conditions for a processing device. Additionally or alternatively, a control unit may refer to a device or system that is suitable for, or configured to, control parameters of a processing device such as temperature, pressure, gas flow rate, plasma power, and / or similar. Additionally or alternatively, a control unit may refer to a device or system that interacts with an operator to enable manual adjustment of process parameters. In some embodiments, a control unit may be implemented as an electronic device. In some embodiments, a control unit may comprise hardware and / or software components. In some embodiments, a control unit may include a programmable logic controller (PLC) or a computer-based control system. In some embodiments, the control unit may be integrated with a data acquisition system to monitor and record process data. In some embodiments, the control unit may include safety interlocks to prevent dangerous operating conditions. In some embodiments, the control unit may form an integral part of a multifunctional control system.

[0039] Furthermore, the phrase “control unit configured to execute a process” may refer to a control unit capable of executing a process, appropriate for executing a process, and / or adapted for executing a process. Additionally or alternatively, a control unit being configured to execute a process may mean that any functionally described attribute of the control unit is executed, at least in part, by one or more hardware logic components. In some embodiments, the control unit may comprise at least one processor and at least one memory connected to the processor. In some such embodiments, the memory may store program code instructions that, when executed on the processor, prompt the processor to perform the process that the control unit is configured to execute. In some embodiments, the control unit may include one or more hardware logic components. In some such embodiments, one or more hardware logic components may include, for example, a field-programmable gate array (FPGA), an application-specific integrated circuit (ASIC), an application-specific standard product (ASSP), a system-on-a-chip (SoC), a composite programmable logic device (CPLD), and the like. The control unit may generally function according to any suitable principle and via any suitable circuitry and / or signals recognized in the art.

[0040] In some embodiments, the methods, devices, and apparatus described herein may be useful for pipe fittings and / or joints. In some embodiments, the methods, devices, and apparatus described herein may be useful for fittings having corrugated bellows. In some embodiments, the methods, devices, and apparatus described herein may be useful in the fields of micro-electromechanical systems, microsystems, photonics, solar power generation, display devices, and / or semiconductor manufacturing technology. In some embodiments, the methods, devices, and apparatus described herein may be useful for maintaining the effective function of fluid discharge equipment. In some embodiments, they may be applied to form fluid-sealed joints in removal units such as scrubbers and forelines. In some embodiments, they may contribute to sustainable manufacturing practices in semiconductor production. In some embodiments, the methods, devices, and apparatus described herein may be useful for extending the operational life of pipe fittings by adding a diluent fluid to process discharges to facilitate their removal.

[0041] Figure 1 shows a schematic cross-sectional view of a bellows joint fitting 1 according to one embodiment. Unless otherwise explicitly stated, the bellows joint fitting 1 of the embodiment in Figure 1 may include or exclude any of the features disclosed herein, with modifications where appropriate. Other embodiments may be identical or different to the embodiment in Figure 1.

[0042] The bellows fitting 1 in the embodiment of Figure 1 has an upstream end 2 for receiving process effluent 6 and a downstream end 3 for discharging the process effluent 6. The bellows fitting 1 comprises a bellows tube 4 and one or more fluid inlets 7 for introducing a diluent fluid 10 into the bellows fitting 1. The diluent fluid 10 introduced into the bellows fitting 1 is discharged through the downstream end 3 together with the process effluent 6. In some embodiments, such bellows fittings may exhibit a long operating life. Additionally or alternatively, in some embodiments, such bellows fittings may reduce the likelihood of process effluent leakage. Additionally or alternatively, in some embodiments, such bellows fittings may facilitate early detection of leakage and / or timely maintenance of the processing apparatus equipped with the bellows fitting. Additionally or alternatively, in some embodiments, such bellows fittings may reduce the need for a large safety enclosure for detecting and / or recovering leaked process effluent. Additionally or alternatively, in some embodiments, such bellows fittings may extend the operational life of downstream devices and / or components. Additionally or alternatively, in some embodiments, such bellows fittings may facilitate the removal of process effluents, for example, through their dilution.

[0043] In the embodiment of Figure 1, each of the upstream end 2 and downstream end 3 may be configured to be fastened using Klein Flansche (KF) clamps in accordance with ISO 2861:2020. In other embodiments, the upstream and / or downstream ends of the bellows joint fitting may be fastened using any suitable means, for example, using KF clamps in accordance with ISO 2861:2020, for example, using ISO-K claw clamps, ISO-F bolts, or half clamps in accordance with ISO 1609:2020, using metal Conflat (CF) seals, or similar. In some embodiments, the upstream and / or downstream ends may be configured to be sealed fluid-tight, e.g., liquid-tight and / or air-tight and / or vacuum-tight.

[0044] The bellows tube 4 in the embodiment of Figure 1 may have a bellows wall thickness of about 0.2 mm or about 0.3 mm. In other embodiments, the bellows tube may have any preferred bellows wall thickness, for example, 0.1 mm or more, or 0.2 mm or more, and / or 0.4 mm or less, or 0.5 mm or less.

[0045] In the embodiment of Figure 1, the bellows tube 4 may be substantially made of 304 stainless steel. In other embodiments, the bellows tube may be made of, substantially made of, or include any suitable material(s), such as one or more stainless steels, including 304 stainless steel, 321 stainless steel, 316L stainless steel, 317L stainless steel, or 904L stainless steel.

[0046] In the embodiment shown in Figure 1, the bellows joint fitting 1 includes an inner tube 11 connected to and surrounded by the bellows tube 4 to shield the bellows tube 4 from process discharge 6. In some embodiments, a bellows joint fitting including such an inner tube may exhibit a long operating life. In other embodiments, the bellows joint fitting may or may not include such an inner tube.

[0047] In the embodiment of Figure 1, the inner tube 11 may have an inner tube wall thickness of approximately 5 mm or approximately 0.7 mm. In other embodiments, the inner tube may have any suitable inner tube wall thickness, for example, 1 mm or more or 2 mm or more and / or 1 cm or less or 2 cm or less. In some embodiments where the bellows tube has a bellows wall thickness, the inner tube may have an inner tube wall thickness greater than the bellows wall thickness.

[0048] In the embodiment of Figure 1, the inner tube 11 may be substantially made of 316L stainless steel. In other embodiments, the inner tube may be made of, substantially made of, or include any suitable material(s), such as one or more stainless steels, including 304 stainless steel, 321 stainless steel, 316L stainless steel, 317L stainless steel, or 904L stainless steel. In some embodiments in which the bellows tube is made of, substantially made of, or includes bellows tube material, the inner tube may be made of, substantially made of, or include inner tube material different from, the bellows tube material. In some such embodiments, the bellows tube material may have a first corrosion resistance, and the inner tube material may have a second corrosion resistance that is higher than the first corrosion resistance.

[0049] In the embodiment shown in Figure 1, the bellows tube 4 has a first bellows tube end, and the bellows joint fitting 1 comprises an annular body 13 connecting the first bellows tube end to the inner tube 11, with one or more fluid inlets 7 extending into the annular body 13. In some embodiments in which the bellows joint fitting comprises an annular body connecting the first bellows tube end to the inner tube, at least a portion of the one or more fluid inlets extending into the annular body can facilitate the introduction of a diluent fluid into the bellows joint fitting. In other embodiments in which the bellows joint fitting comprises an annular body connecting the first bellows tube end to the inner tube, one or more fluid inlets, for example, one or more first fluid inlets and / or one or more second fluid inlets, may or may not extend into the annular body. For example, in some embodiments, the bellows fitting may comprise a perforated bellows tube having one or more through holes that act as one or more fluid inlets, and the bellows fitting may be located inside a pressure chamber that holds the diluent fluid in order to push the diluent fluid into the bellows fitting.

[0050] In the embodiment shown in Figure 1, the annular body 13 is positioned relative to the upstream end 2 from the bellows pipe 4. In other embodiments, where the bellows pipe has a first bellows pipe end and the bellows joint fitting comprises an annular body connecting the first bellows pipe end to the inner pipe, the annular body may be positioned relative to the bellows pipe in any suitable manner, for example, relative to the upstream end from the bellows pipe, relative to the downstream end from the bellows pipe, or in other ways.

[0051] In the embodiment of Figure 1, the annular intermediate space 15 surrounds the inner pipe 11, and the bellows pipe 4 surrounds the annular intermediate space 15. Therefore, the annular intermediate space 15 is located between the inner pipe 11 and the bellows pipe 4. One or more fluid inlets 7 in the embodiment of Figure 1 include one or more first fluid inlets 8 configured to introduce a diluent fluid 10 into the intermediate space 15. In some embodiments, one or more fluid inlets, including one or more first fluid inlets configured to introduce a diluent fluid into the intermediate space surrounding the inner pipe, can significantly extend the operating life of the bellows joint fitting. Additionally or alternatively, one or more fluid inlets, including one or more first fluid inlets configured to introduce a diluent fluid into the intermediate space surrounding the inner pipe, may delay the mixing between the process effluent and the diluent fluid, which may then facilitate the extension of the operating life of downstream devices and / or components. In other embodiments, the annular intermediate space surrounded by the bellows pipe may or may not surround the inner pipe. In embodiments in which an annular intermediate space enclosed by a bellows tube surrounds an inner tube, one or more fluid inlets may or may not include one or more first fluid inlets configured to introduce a diluent fluid into the intermediate space.

[0052] In the embodiment of Figure 1, one or more first fluid inlets 8 may include, for example, a total of 4, 6, 8, 10, or 12 first fluid inlets. The individual first fluid inlets of one or more first fluid inlets 8 may be distributed radially along the range of the annular body 13, for example, evenly distributed radially. In other embodiments, one or more first fluid inlets may include any suitable total number of individual first fluid inlets, for example, 2 or more, or 3 or more, or 4 or more, and / or 6 or fewer, or 8 or fewer, or 10 or fewer, or 12 or fewer individual first fluid inlets. In other embodiments, the individual first fluid inlets of one or more first fluid inlets may be arranged in any suitable manner relative to one another, for example, along a closed path, for example, a circular, elliptical, rectangular, or square path, with optionally uniform spacing, radially along the range of the annular body, with optionally uniform radial distribution, or otherwise distributed.

[0053] In the embodiment of Figure 1, the fluid channel 12 enclosed by the inner tube 11 extends from the upstream end 2 to the downstream end 3. One or more fluid inlets 7 in the embodiment of Figure 1 include one or more second fluid inlets 9 configured to introduce the diluent fluid 10 into the fluid channel 12. In some embodiments, one or more fluid inlets including one or more second fluid inlets configured to introduce the diluent fluid into such fluid channels may reduce deposit formation on the inner tube, which in turn may extend the operational life of the bellows joint fitting. In other embodiments, the fluid channel enclosed by the inner tube may or may not extend from the upstream end to the downstream end. In embodiments in which the fluid channel enclosed by the inner tube extends from the upstream end to the downstream end, one or more fluid inlets may or may not include one or more second fluid inlets configured to introduce the diluent fluid into the fluid channel.

[0054] In the embodiment of Figure 1, one or more second fluid inlets 9 may include, for example, a total of 4, 6, 8, 10, or 12 second fluid inlets. Each of the individual second fluid inlets of one or more second fluid inlets 9 may be distributed radially along the extent of the annular body 13, for example, evenly distributed radially. In other embodiments, one or more second fluid inlets may include any suitable total number of individual second fluid inlets, for example, 2 or more, or 3 or more, or 4 or more, and / or 6 or fewer, or 8 or fewer, or 10 or fewer, or 12 or fewer individual second fluid inlets. In other embodiments, each of the individual second fluid inlets of one or more second fluid inlets may be arranged in any suitable manner relative to one another, for example, along a closed path, for example, a circular, elliptical, rectangular, or square path, with optionally uniform spacing, radially along the extent of the annular body, with optionally uniform radial distribution, or otherwise distributed.

[0055] Figure 2 schematically shows a method 16 for treating process effluent according to one embodiment. Unless otherwise explicitly stated, the method 16 of the embodiment in Figure 2 may be modified to include or exclude any of the features disclosed herein. Other embodiments may be identical or similar to the embodiment in Figure 2.

[0056] Method 16 in the embodiment of Figure 2 includes providing a bellows fitting according to a first embodiment (17), receiving process effluent into the bellows fitting through its upstream end (19), introducing diluent fluid into the bellows fitting through one or more fluid inlets (20), and discharging process effluent and diluent fluid from the bellows fitting through its downstream end (21).

[0057] As shown in Figure 2 using dashed lines, the process (19) for receiving process emissions in the embodiment of Figure 2 may include receiving process emissions from the processing apparatus (18). In other embodiments, the process for receiving process emissions may or may not include receiving process emissions from the processing apparatus.

[0058] As shown again in Figure 2 using dashed lines, method 16 in the embodiment of Figure 2 may include supplying process effluent and diluent fluid to a removal unit (22). In other embodiments, the process effluent treatment method may or may not include supplying process effluent and diluent fluid into a removal unit.

[0059] Similarly, Method 16 in the embodiment of Figure 2 may include measuring fluid conductance through at least a portion of one or more fluid inlets, for example, through one or more first fluid inlets and / or through one or more second fluid inlets (23) to form a measurement result. If the fluid conductance represented by the measurement result exceeds a predetermined fluid conductance threshold, Method 16 may further include issuing an alarm (24) and / or triggering an automated corrective procedure (25), for example, an automated bellows joint fitting replacement procedure and / or an automated cleaning procedure (such as an automated dry cleaning procedure using one or more gaseous cleaning agents). In other embodiments, a process discharge treatment method may or may not include measuring fluid conductance through at least a portion of one or more fluid inlets, for example, through one or more first fluid inlets and / or through one or more second fluid inlets to form a measurement result. In embodiments of a process discharge treatment method that includes measuring fluid conductance through at least one portion of fluid inlets, if the fluid conductance represented by the measurement results exceeds a predetermined fluid conductance threshold, the method may further include, or may not include, issuing an alarm and / or triggering an automatic corrective procedure, including an automatic bellows fitting replacement procedure and / or an automatic cleaning procedure (such as an automatic dry cleaning procedure using one or more gaseous cleaning agents). Generally, the process of measuring fluid conductance can be carried out using any suitable method and / or means. For example, in some embodiments, measuring fluid conductance may include measuring fluid flow rate at a predetermined pressure drop or pressure difference and / or measuring pressure drop or difference at a predetermined fluid flow rate.

[0060] In the embodiment shown in Figure 2, the process (23) for measuring fluid conductance may be performed when predetermined measurement conditions are met. The measurement conditions may include one or more subconditions, for example, one or more of these subconditions, each of which may need to be met to trigger the process (23) for measuring fluid conductance. For example, one or more subconditions may include one or more necessary and / or beneficial subconditions for measuring fluid conductance, for example, a first subcondition for verifying that all devices are operational, and / or a second subcondition for verifying that the process (19) that receives process discharges is not operating during the process (23) for measuring fluid conductance, and / or a third subcondition for verifying whether an operator has triggered the process (23) for measuring fluid conductance. In other embodiments, the process for measuring fluid conductance may or may not be performed when predetermined measurement conditions are met. For example, in some embodiments, the process for measuring fluid conductance may be performed repeatedly, continuously, or whenever possible. Generally, the process of measuring fluid conductance may or may not be performed concurrently with any other process(s), such as receiving process effluent, introducing diluent fluid, and / or discharging process effluent and diluent fluid. In embodiments in which the process of measuring fluid conductance is performed when certain measurement conditions are met, the measurement conditions may or may not include one or more subconditions, one or more of which may need to be met to trigger the process of measuring fluid conductance.These one or more subconditions may generally include one or more appropriate subconditions necessary and / or beneficial for measuring fluid conductance, such as a first subcondition to verify that all devices are operational, and / or a second subcondition to verify that the process receiving process emissions is not operating during the process of measuring fluid conductance, and / or a third subcondition to verify that the operator triggered the process of measuring fluid conductance.

[0061] In the embodiment shown in Figure 2, the process effluent received in the bellows fitting may include hydrochloric acid (HCl) and / or hydrogen fluoride (HF) in gaseous form. In other embodiments, the process effluent received in the bellows fitting may include one or more suitable compounds, such as one or more inorganic acids, e.g., HCl, HF, sulfuric acid (H2SO4), and / or nitric acid (HNO3), in any suitable form, e.g., as a liquid, as a gas, and / or as a vapor. For example, in some embodiments, the process effluent received in the bellows fitting may include one or more inorganic acids in gaseous form, e.g., as a gas and / or as a vapor.

[0062] In the embodiment shown in Figure 2, the diluent fluid may contain nitrogen gas (N2). In other embodiments, the diluent fluid may or may not contain nitrogen gas. For example, in some embodiments, the diluent fluid may contain, in addition to or as a substitute for, argon (Ar), helium (He), carbon dioxide (CO2), hydrogen (H2), and / or oxygen (O2).

[0063] Figure 3 schematically depicts a processing apparatus 26 according to one embodiment. The processing apparatus 26 of the embodiment in Figure 3 includes a bellows joint fitting 1 according to the first aspect. Unless otherwise explicitly stated, the processing apparatus 26 of the embodiment in Figure 3 may or may not include any of the features disclosed herein, with modifications where appropriate. Other embodiments may or may not be identical to the embodiment in Figure 3.

[0064] The apparatus 26 in the embodiment shown in Figure 3 includes a dilution fluid source 27 for supplying a dilution fluid 10 into the bellows fitting 1 via one or more fluid inlets of the bellows fitting 1. For clarity, one or more fluid inlets are omitted from Figure 3. In other embodiments, the apparatus may or may not include a dilution fluid source for supplying a dilution fluid into the bellows fitting via one or more fluid inlets.

[0065] In the embodiment shown in Figure 3, the processing apparatus 26 includes a mass flow controller 28 for controlling the flow of dilution fluid into the bellows fitting 1 via one or more fluid inlets of the bellows fitting 1. In some embodiments, a processing apparatus with such a mass flow controller can facilitate the reduction of dilution fluid consumption while extending the operating life of the bellows fitting. Additionally or alternatively, a processing apparatus with such a mass flow controller can facilitate the measurement of fluid conductance via at least one of the fluid inlets. In other embodiments, the processing apparatus may or may not include a mass flow controller for controlling the flow of dilution fluid into the bellows fitting via one or more fluid inlets. In some embodiments, in addition to, or alternatively to, a mass flow controller for controlling the flow of dilution fluid into the bellows fitting via one or more fluid inlets, the processing apparatus may include one or more fluid flow control valves, such as one or more needle valves, one or more globe valves, and / or one or more diaphragm valves.

[0066] In the embodiment shown in Figure 3, the processing apparatus 26 comprises one or more process units 30 and an upstream discharge network 29 that fluidly connects one or more process units 30 to the bellows joint fitting 1 for transporting process discharge 6 from one or more process units 30 to the bellows joint fitting 1. In Figure 3, one or more process units 30 are shown as comprising a single process unit drawn with a solid line, but one or more process units 30 may optionally comprise additional process units, as illustrated using dashed lines in Figure 3. The matters described herein in relation to one or more process units 30 may be applied to any or all of them, for example, a single process unit shown with a solid line and additional process units shown with dashed lines, with modifications as necessary. In other embodiments, the processing apparatus may or may not comprise one or more process units and an upstream discharge network that fluidly connects one or more process units to the bellows joint fitting for transporting process discharge 6 from one or more process units to the bellows joint fitting.

[0067] In the embodiment of Figure 3, one or more process units 30 may include one or more chemical vapor deposition units 31, at least a portion of which may or may not be implemented as atomic layer deposition units, and may also include one or more dry etching units 32, some of which may or may not be implemented as pre-cleaning units. In other embodiments, one or more process units may include any preferred type(s) of process units, for example, one or more chemical vapor deposition units, for example, one or more atomic layer deposition units, and / or one or more dry etching units, and / or one or more diffusion furnace units.

[0068] In the embodiment of Figure 3, one or more process units 30 may be implemented as single-substrate process units. In other embodiments in which the processing apparatus comprises one or more process units, one or more process units may be implemented as any suitable type(s) of process units, such as single-substrate process units and / or multi-substrate process units (such as batch furnaces).

[0069] In the embodiment shown in Figure 3, the processing apparatus 26 includes a vacuum pump 35 upstream of the bellows fitting 1 to flush the process effluent 6 through the bellows fitting 1. In other embodiments, the processing apparatus may or may not include a vacuum pump upstream of the bellows fitting to flush the process effluent through the bellows fitting. In embodiments in which the processing apparatus includes a bellows fitting and a vacuum pump, the vacuum pump may be positioned relative to the bellows fitting in any suitable manner. For example, in some embodiments in which the processing apparatus includes a bellows fitting and a vacuum pump, the bellows fitting may be positioned upstream of the vacuum pump. In some such embodiments, the processing apparatus may further include a second bellows fitting downstream of the vacuum pump.

[0070] The processing apparatus 26 in the embodiment of Figure 3 comprises a removal unit 33 and a downstream discharge network 34 that fluidly connects the bellows joint fitting 1 and the removal unit 33 for transporting process discharge 6 from the bellows joint fitting 1 to the removal unit 33. The removal unit 33 is disposed downstream of the bellows joint fitting 1. In other embodiments, the processing apparatus may or may not include a removal unit. In embodiments in which the processing apparatus includes a removal unit, the processing apparatus may or may not include a downstream discharge network that fluidly connects the bellows joint fitting and the removal unit. In other embodiments in which the processing apparatus includes a removal unit, the removal unit may be disposed in any suitable manner relative to the bellows joint fitting, for example, upstream or downstream of the bellows joint fitting, or in other ways.

[0071] In the embodiment shown in Figure 3, the processing apparatus 26 further comprises a control unit 36 ​​configured to operate the processing apparatus 26 to perform the method according to the second embodiment. For this purpose, as schematically shown in Figure 3 using dotted arrows, the control unit 36 ​​is operably connected to at least a portion of one or more process units 30, a mass flow controller 28, and a vacuum pump 35 to control the transport of process discharge 6 from one or more process units 30 to the bellows fitting 1 and to regulate the flow of dilution fluid to the bellows fitting 1 through its one or more fluid inlets. In other embodiments, the processing apparatus may or may not comprise a control unit configured to operate the processing apparatus to perform the method according to the second embodiment. In embodiments in which the processing apparatus comprises a control unit configured to operate the processing apparatus to perform the method according to the second embodiment, the control unit may be operably connected to any device(s) and / or unit(s) necessary or beneficial for operating the processing apparatus 26 to perform the method according to the second embodiment. In some of these embodiments, the control unit is operably connected to at least a portion of one or more process units, a mass flow controller, and / or a vacuum pump, and can, for example, control the transport of process effluent from one or more process units into a bellows fitting and / or regulate the flow of dilution fluid into the bellows fitting via one or more fluid inlets.

[0072] In the embodiment shown in Figure 3, the processing apparatus 26 may be implemented as a semiconductor processing apparatus. In other embodiments, the processing apparatus may or may not be implemented as a semiconductor manufacturing apparatus. For example, in some embodiments, the processing apparatus may be implemented as an apparatus for depositing protective coatings, such as moisture-proof barrier coatings, gas diffusion barrier coatings, and / or wear-resistant coatings, as an apparatus for metal refining, as a waste processing apparatus, or as a chemical manufacturing apparatus.

[0073] As shown in Figure 3 using dashed arrows, the processing apparatus 26 of the embodiment of Figure 3 may further comprise a wafer transport chamber 37 connected to one or more process units 30 and which may or may not include a backend wafer transport robot 38, an equipment front-end module (EFEM) 39 which may or may not include a frontend wafer transport robot 40 and / or one or more wafer load ports 41, and / or a load lock module 42 which connects the equipment front-end module (EFEM) 39 and the wafer transport chamber 37 to enable wafer transport between them.

[0074] The exemplary embodiments of this disclosure described above are merely examples of embodiments of the invention as defined by the appended claims and their legal equivalents, and do not limit the scope of the invention. Any equivalent embodiment is intended to fall within the scope of the invention. In fact, various modifications of this disclosure, in addition to those shown and described herein, such as alternative useful combinations of the described elements, may become apparent to those skilled in the art from the description. Such modifications and embodiments are also intended to fall within the scope of the appended claims. [Explanation of symbols]

[0075] 1. Bellows joint fitting 2 Upstream end 3 Downstream end 4 bellows tube 7 Fluid inlet

Claims

1. A bellows fitting having an upstream end for receiving process discharges and a downstream end for discharging the process discharges, comprising a bellows tube and one or more fluid inlets for introducing a diluent fluid to be discharged through the downstream end together with the process discharges.

2. The bellows joint fitting according to claim 1, wherein the bellows joint fitting includes an inner tube connected to and surrounded by the bellows tube in order to shield the bellows tube from process discharges.

3. The bellows fitting according to claim 2, wherein the bellows tube has a first bellows tube end, and the bellows fitting comprises an annular body connecting the first bellows tube end to the inner tube, and at least a portion of one or more fluid inlets extends into the annular body.

4. The bellows fitting according to claim 2 or 3, wherein the annular intermediate space surrounded by the bellows tube surrounds the inner tube, and the one or more fluid inlets include one or more first fluid inlets configured to introduce the diluting fluid into the annular intermediate space.

5. The bellows fitting according to any one of claims 2 to 4, wherein the fluid passage enclosed by the inner pipe extends from the upstream end to the downstream end, and the one or more fluid inlets include one or more second fluid inlets configured to introduce the diluting fluid into the fluid passage.

6. A method for treating process emissions, To provide a bellows joint fitting according to any one of claims 1 to 5, The process discharge is received into the bellows joint fitting via its upstream end, Introducing a diluting fluid into the bellows joint fitting through one or more fluid inlets, The process discharge and the dilution fluid are discharged from the bellows joint fitting via its downstream end, Methods that include...

7. The method according to claim 6, wherein receiving the process discharge includes receiving the process discharge from the processing apparatus.

8. The method according to claim 6 or 7, wherein the method comprises supplying the process discharge and the dilution fluid into a removal unit.

9. The method according to any one of claims 6 to 8, wherein the method comprises measuring fluid conductance through at least a portion of the one or more fluid inlets to form a measurement result, and issuing an alarm and / or triggering an automatic corrective procedure if the fluid conductance represented by the measurement result exceeds a predetermined fluid conductance threshold.

10. The method according to any one of claims 6 to 9, wherein the process discharge received in the bellows joint fitting comprises one or more inorganic acids in gaseous form.

11. The method according to any one of claims 6 to 10, wherein the diluting fluid contains nitrogen gas.

12. A processing apparatus comprising a bellows joint fitting according to any one of claims 1 to 5.

13. The apparatus according to claim 12, wherein the apparatus comprises a dilution fluid source for supplying the dilution fluid into the bellows joint fitting through one or more fluid inlets.

14. The apparatus according to claim 12 or 13, wherein the apparatus comprises a mass flow controller for controlling the flow of diluted fluid into the bellows joint fitting through one or more of the fluid inlets.

15. The apparatus according to any one of claims 12 to 14, wherein the apparatus comprises one or more process units and an upstream discharge network that fluidly connects one or more process units and the bellows joint fitting for transporting process discharges from one or more process units into the bellows joint fitting.

16. The apparatus according to claim 15, wherein the one or more process units include one or more chemical vapor deposition units, for example, one or more atomic layer deposition units, and / or one or more dry etching units, and / or one or more diffusion furnace units.

17. The apparatus according to any one of claims 12 to 16, wherein the apparatus comprises a vacuum pump upstream of the bellows fitting to push the process discharge through the bellows fitting.

18. The apparatus according to any one of claims 12 to 17, wherein the apparatus comprises a removal unit and a downstream discharge network that fluidly connects the bellows joint fitting and the removal unit for transporting the process discharge from the bellows joint fitting to the removal unit.

19. The apparatus according to any one of claims 12 to 18, wherein the apparatus comprises a control unit configured to operate the apparatus in order to perform the method described in any one of claims 6 to 11.

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