Manufacturing plants for mobile devices, safety management systems, and circuit board processing equipment; safety management methods and safety management programs.

Abstract

Strengthen safety management for workers. [Solution] A mobile body equipped with an imaging device, a control device, and a notification device, wherein the control device includes a movement control unit that controls the body to move within the factory based on a patrol route for patrolling the work area within the factory, a detection unit that processes motion image data captured by the imaging device after the start of the patrol to detect events that increase the risk of occupational accidents for workers, and a notification instruction unit that, when an event that increases the risk of occupational accidents for workers is detected, provides notification via the notification device to encourage the reduction of the risk of occupational accidents.

Description

Technical Field

[0006] , , , , ,

[0001] The present disclosure relates to a moving body, a safety management system, a manufacturing factory of a substrate processing apparatus, a safety management method, and a safety management program.

Background Art

[0002] In order to reduce the risk of industrial accidents at the manufacturing site, efforts have been made to strengthen the safety management of workers. As an example, a system has been proposed for monitoring whether workers are correctly wearing predetermined protective equipment at the manufacturing site.

[0003] In the case of such a system, although it is possible to monitor workers in the work area, it is not possible to monitor workers while they are moving. Therefore, for example, when a worker removes the protective equipment and moves inside the factory, the risk of industrial accident for the worker increases.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The present disclosure aims to strengthen the safety management of workers.

Means for Solving the Problems

[0006] The moving body according to one aspect of the present disclosure has, for example, the following configuration. That is, a moving body equipped with an imaging device, a control device, and a notification device, the control device a movement control unit that controls the movement inside the factory based on a patrol route for patrolling the work area inside the factory, A detection unit processes video data captured by the imaging device after the start of the patrol to detect events that increase the risk of occupational accidents for workers, The system includes a notification instruction unit that, when an event that increases the risk of occupational accidents for workers is detected, provides notification via the notification device to encourage the reduction of occupational accident risks. [Effects of the Invention]

[0007] According to this disclosure, it is possible to strengthen worker safety management. [Brief explanation of the drawing]

[0008] [Figure 1] This figure shows an example of the system configuration of a safety management system. [Figure 2] This figure shows an example of the external configuration of a patrol robot. [Figure 3] This figure shows an example of a system configuration for a patrol robot. [Figure 4] This figure shows an example of the hardware configuration of a control device installed on a patrol robot. [Figure 5] This figure shows an example of the functional configuration of a control device installed on a patrol robot. [Figure 6] This is a diagram showing an example of a manufacturing site layout. [Figure 7] This figure shows a specific example of processing performed by the movement control unit and the position information calculation unit. [Figure 8] This figure shows a specific example of the processing during the learning phase of the detection unit. [Figure 9] This figure shows a specific example of processing during the detection phase of the detection unit. [Figure 10] This figure shows a specific example of processing by the notification instruction unit. [Figure 11] This is an example flowchart illustrating the flow of patrol and cleaning processes performed by a patrol robot. [Figure 12] This figure shows an example of the hardware configuration of the management device. [Figure 13] This figure shows an example of the functional configuration of the control device. [Figure 14] It is a diagram showing a specific example of the processing by the display control unit. [Figure 15] It is a diagram showing a specific example of the processing by the notification information generation unit and the information providing unit. [Figure 16] It is a diagram showing a specific example of particle information. [Figure 17] It is an example of a flowchart showing the flow of robot management processing by the management device. [Figure 18] It is a sequence diagram showing the flow of safety management processing by the safety management system. [Embodiments for Carrying Out the Invention]

[0009] Hereinafter, each embodiment will be described with reference to the accompanying drawings. In this specification and the drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant descriptions are omitted.

[0010] [First Embodiment] <System Configuration of the Safety Management System> First, the system configuration of the safety management system according to the first embodiment will be described. FIG. 1 is a diagram showing an example of the system configuration of the safety management system. [[ID=�1]]

[0011] As shown in FIG. 1, the safety management system 100 includes a management device 110, a patrol robot 120, an administrator terminal 130, a particle management device 140, and particle sensors 150_1 to 150_4. In the safety management system 100, the management device 110, the administrator terminal 130, and the particle management device 140 are installed, for example, in a management room within a manufacturing factory of a substrate processing device. In the safety management system 100, the management device 110, the patrol robot 120, the administrator terminal 130, and the particle management device 140 are communicably connected via a network 160. Also, in the safety management system 100, the particle management device 140 and the particle sensors 150_1 to 150_4 are communicably connected via a network 160.

[0012] The patrol robot 120 is an example of a mobile device. The patrol robot 120 patrols the manufacturing site within the substrate processing equipment factory according to a predetermined patrol schedule and predetermined patrol route (or according to the updated patrol schedule and patrol route if update information is transmitted from the management device 110).

[0013] The patrol robot 120 is equipped with an imaging device and a patrol light (registered trademark), and based on video data captured after the start of the patrol, it detects events that increase the risk of occupational accidents for each worker (for example, worker 121) in the manufacturing site. Details of events that increase the risk of occupational accidents for workers will be described later, but one example is improper wearing of protective equipment by workers. When the patrol robot 120 detects an event that increases the risk of occupational accidents for workers, for example, • The Patlite® light will illuminate to encourage workers to reduce their risk of workplace accidents (for example, to encourage the wearing of protective equipment). The video data (video data taken after the start of the patrol, including the frame in which an event that increases the risk of occupational accidents for workers is detected, and the frames before and after it) and the detection results are transmitted to the management device 110.

[0014] Furthermore, the patrol robot 120 is equipped with a cleaning device and cleans the floor surface after starting its patrol. This ensures that the floor surface is cleaned during the patrol, thereby reducing particles in the manufacturing area within the circuit board processing equipment manufacturing plant.

[0015] When the management device 110 receives video data and detection results from the patrol robot 120, it stores the video data and detection results and displays them to the safety manager 111. The management device 110 also identifies the manager 131 of the worker in whom an event increasing the risk of occupational accidents has been detected in the video data, and generates email data to be sent to the manager's terminal 130. The management device 110 sends the generated email data to the manager's terminal 130 via email to notify the manager 131 of the detection.

[0016] Furthermore, when the management device 110 receives a request from the administrator terminal 130 to display a list of detection history, it provides the administrator terminal 130 with the list of detection history.

[0017] Furthermore, the control device 110 receives particle information from the particle control device 140. The particle information includes sensor data measured by particle sensors 150_1 to 150_4 installed in the manufacturing area of ​​the substrate processing plant, and standard values ​​for the cleanliness of each area of ​​the manufacturing area. Based on the received particle information, the control device 110 generates update information and transmits it to the patrol robot 120.

[0018] The update information refers to information that updates the patrol information that the patrol robot 120 refers to when patrolling the manufacturing site. The patrol information includes the patrol route, patrol schedule, and cleaning intensity. By updating the patrol route, patrol schedule, cleaning intensity, or any one or all of these, the cleanliness of each area of ​​the manufacturing site can be improved to fall below the standard value.

[0019] Furthermore, the inspection information is derived from the layout of the manufacturing site. • The area where each worker is located (work area), • Areas where unsafe conditions may occur, Restricted areas, The patrol route (the route for patrolling these areas), patrol schedule, and cleaning intensity determined based on the above are stored as default information. The default patrol route, patrol schedule, and cleaning intensity may be updated each time update information is generated based on the particle information. Alternatively, the default patrol route, patrol schedule, and cleaning intensity may be temporarily updated each time update information is generated based on the particle information, and then reverted to their original state after a certain period of time.

[0020] The administrator terminal 130 is a terminal operated by administrator 131. As described above, administrator 131 receives detection notifications via the administrator terminal 130. Administrator 131 also inputs a request to display a list of detection history to the management device 110 via the administrator terminal 130, and views the list of detection history provided by the management device 110 via the administrator terminal 130.

[0021] The particle management device 140 receives sensor data transmitted from particle sensors 150_1 to 150_4 installed in each area of ​​the manufacturing site within the substrate processing plant. The particle management device 140 transmits particle information, including the received sensor data and the cleanliness reference values ​​for each area of ​​the manufacturing site, to the management device 110.

[0022] <External structure of the patrol robot> Next, the external configuration of the patrol robot 120 will be described. Figure 2 shows an example of the external configuration of the patrol robot. In Figure 2, reference numeral 210 indicates the imaging device, reference numeral 220 indicates the battery device, reference numeral 230 indicates the housing of the drive mechanism, reference numeral 240 indicates the housing of the cleaning mechanism, and reference numeral 250 indicates the control device.

[0023] Furthermore, the imaging device is located at least a predetermined distance away. • The worker's entire body, • The whole body of a worker at height • Floor surface, The system is configured to capture the image as color video data. The cleaning mechanism is configured to suck up particles from the floor surface. Furthermore, the cleaning mechanism may also be equipped with a floor wiping function.

[0024] <System configuration of the patrol robot> Next, the system configuration of the patrol robot 120 will be described. Figure 3 shows an example of the system configuration of the patrol robot. As shown in Figure 3, the patrol robot 120 is equipped with a control device 310, an imaging device 320, a notification device 330, a sensor device 340, a battery device 350, a drive control device 360, a drive mechanism 361, a cleaning control device 370, a cleaning mechanism 371, and a communication device 380. In the patrol robot 120, the control device 310, imaging device 320, notification device 330, sensor device 340, battery device 350, drive control device 360, cleaning control device 370, and communication device 380 are connected to communicate via a PoE switch 390. A PoE switch refers to a switching hub that supports the function of supplying power via an Ethernet cable.

[0025] The control device 310 controls the entire patrol robot 120. The imaging device 320 has the appearance shown by reference numeral 210 in Figure 2. The imaging device 320 generates color video data by taking images and notifies the control device 310. The notification device 330 includes the aforementioned Patlite® and lights up when it detects an event that increases the risk of occupational accidents for workers. In addition to the aforementioned Patlite®, the notification device 330 may also include an audio output device. The sensor device 340 includes sensors necessary for the patrol robot 120 to perform patrols and cleaning (excluding the imaging device 320 for detecting events that increase the risk of occupational accidents for workers).

[0026] The battery unit 350 supplies power to each device of the patrol robot 120. The battery unit 350 has the appearance shown by reference numeral 220 in Figure 2. The drive control device 360 ​​controls the drive mechanism 361 to move the patrol robot 120 according to the movement information output from the control device 310. The drive mechanism 361 operates based on control signals from the drive control device 360. The cleaning control device 370 controls the cleaning mechanism 371 based on instructions (start, end, cleaning intensity) from the control device 310. The cleaning mechanism 371 operates based on control signals from the cleaning control device 370. The communication device 380 communicates with the management device 110 via the network 160.

[0027] <Control device hardware configuration> Next, the hardware configuration of the control device 310 mounted on the patrol robot 120 will be described. Figure 4 shows an example of the hardware configuration of the control device mounted on the patrol robot. As shown in Figure 4, the control device 310 has a processor 401, memory 402, auxiliary storage device 403, and connection device 404. Each piece of hardware included in the control device 310 is interconnected via a bus 405.

[0028] The processor 401 has various computing devices such as a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor 401 reads various programs (for example, safety management programs, etc.) into memory 402 and executes them.

[0029] Memory 402 has main memory devices such as ROM (Read Only Memory) and RAM (Random Access Memory). The processor 401 and memory 402 form a so-called computer, and the computer realizes various functions by having the processor 401 execute various programs read from memory 402.

[0030] The auxiliary storage device 403 stores various programs and various information used when these programs are executed by the processor 401.

[0031] The connection device 404 is connected to the PoE switch 390. This enables the control device 310 to communicate with the imaging device 320, notification device 330, sensor device 340, drive control device 360, cleaning control device 370, and communication device 380 within the patrol robot 120, as well as to supply power from the battery device 350.

[0032] <Functional Configuration of Control Device> Next, the functional configuration of the control device 310 mounted on the patrol robot 120 will be described. Figure 5 shows an example of the functional configuration of the control device mounted on the patrol robot. As mentioned above, a safety management program is installed on the control device 310 mounted on the patrol robot 120. When the safety management program is executed, the control device 310 functions as a general control unit 500, a movement control unit 501, a position information calculation unit 502, a cleaning instruction unit 503, a detection unit 504, a notification instruction unit 505, a transmission unit 506, and a reception unit 507.

[0033] The central control unit 500 controls the mobile control units 501 to the receiving units 507 to operate the patrol robot 120 according to the patrol schedule included in the patrol information. For example, the central control unit 500 provides notifications for the start of patrol, completion of patrol, start of cleaning, stop of cleaning, etc.

[0034] When the movement control unit 501 receives notification from the general control unit 500 to start a patrol, it reads the patrol route from the patrol information storage unit 510 and generates movement information based on the current position information of the patrol robot 120 notified by the position information calculation unit 502. The movement information includes the details of the patrol robot 120's movement actions (forward, backward, rotation, stop), the amount of movement, the speed of movement, etc. The movement control unit 501 generates movement information and outputs it to the drive control device 360 ​​until it determines that the patrol by the patrol robot 120 based on the patrol route is complete. As a result, the movement control unit 501 controls the patrol robot 120 to move around the manufacturing site based on the patrol route until it determines that the patrol is complete. When the movement control unit 501 determines that the patrol is complete, it notifies the general control unit 500 of the completion of the patrol.

[0035] The "forward" movement information may refer to either the patrol robot 120 moving in a straight line or moving in a meandering pattern. When moving in a meandering pattern, the imaging device 320 mounted on the patrol robot 120 can take pictures while surveying both the right and left sides of the direction of movement. In addition, the wiping function of the cleaning mechanism 371 mounted on the patrol robot 120 can wipe a wide area of ​​the floor on both the right and left sides of the direction of movement while moving.

[0036] When the position information calculation unit 502 receives notification from the general control unit 500 that patrols have begun, it starts acquiring patrol sensor data from the sensor data measured by the sensor device 340. Based on the acquired patrol sensor data, the position information calculation unit 502 calculates the current position information of the patrol robot 120 and notifies the movement control unit 501. The position information calculation unit 502 continues to calculate the position information until it receives notification from the general control unit 500 that patrols have been completed.

[0037] When the cleaning instruction unit 503 receives a notification from the general control unit 500 to start cleaning, it reads the cleaning intensity from the patrol information storage unit 510 and sends a cleaning start instruction along with the cleaning intensity to the cleaning control device 370. When the cleaning instruction unit 503 receives a notification from the general control unit 500 to stop cleaning, it sends a cleaning stop instruction to the cleaning control device 370.

[0038] When the detection unit 504 receives notification from the control unit 500 that a patrol has started, it begins acquiring video data captured by the imaging device 320. The detection unit 504 processes the acquired video data frame by frame and detects events that increase the risk of work-related accidents for workers in the frame being processed. If the detection unit 504 detects an event that increases the risk of work-related accidents for workers in the frame being processed, it notifies the transmission unit 506 of the detection result and the video data including the corresponding frame and the frames before and after the corresponding frame. In addition, if the detection unit 504 detects an event that increases the risk of work-related accidents for workers in the frame being processed, it notifies the notification instruction unit 505 of the detection result. When the detection unit 504 receives notification from the control unit 500 that the patrol has been completed, it stops acquiring video data and terminates detection.

[0039] The notification instruction unit 505 transmits notification information to the notification device 330 each time it receives a detection result from the detection unit 504. If the notification device 330 is a Patlite®, the notification information is, for example, a lighting instruction to light up the Patlite® for a predetermined time, and if the notification device 330 is an audio output device, the notification information is, for example, a message encouraging workers to reduce their risk of occupational accidents.

[0040] Each time the transmission unit 506 receives motion image data and detection results from the detection unit 504, it notifies the communication device 380 of the motion image data and detection results and instructs it to transmit them to the management device 110.

[0041] When the receiving unit 507 receives update information from the management device 110 via the communication device 380, it updates the patrol information stored in the patrol information storage unit 510.

[0042] <Specific examples of manufacturing site layouts> Next, we will describe a specific example of a manufacturing site layout within a substrate processing equipment manufacturing plant. Figure 6 is a diagram showing an example of a manufacturing site layout. The specific example of a manufacturing site shown in Figure 6 is a specific example of the layout of a manufacturing site 600 within a substrate processing equipment manufacturing plant where multiple types of substrate processing equipment are arranged.

[0043] In Figure 6, reference numerals 610, 620, 630, and 640 indicate different types of substrate processing devices, which are located in the shaded areas.

[0044] In Figure 6, reference numerals 611, 621, 631, 632, and 641 indicate the areas (work areas) where operators are located to operate the corresponding substrate processing equipment.

[0045] In Figure 6, reference numeral 650 indicates an area where temporary work at height occurs in the manufacturing area 600 within the substrate processing equipment manufacturing plant (an area where workers are located (work area)). Also in Figure 6, reference numeral 660 indicates an area in the manufacturing area 600 within the substrate processing equipment manufacturing plant where the floor surface is open and a grating is installed (an area where unsafe conditions may occur).

[0046] Although not shown in Figure 6, the manufacturing area 600 within the substrate processing equipment manufacturing plant may include restricted areas where workers are prohibited from entering. Restricted areas for workers refer to areas where hazardous materials are stored, for example.

[0047] <Specific examples of processing performed by each part of the control device> Next, we will explain specific examples of processing performed by each part of the control device 310 (in this case, the movement control unit 501, the position information calculation unit 502, the detection unit 504, and the notification instruction unit 505).

[0048] (1) Specific example of processing by the movement control unit 501 and the position information calculation unit 502 First, a specific example of processing by the movement control unit 501 and the position information calculation unit 502 will be described. Figure 7 is a diagram showing a specific example of processing by the movement control unit and the position information calculation unit.

[0049] As described above, the position information calculation unit 502 calculates the current position information of the patrol robot 120 based on the patrol sensor data. In Figure 7, reference numeral 710 indicates that the current position information of the patrol robot 120 calculated by the position information calculation unit 502 is plotted on the layout of the manufacturing site 600 within the manufacturing plant for the substrate processing apparatus.

[0050] As described above, the movement control unit 501 reads the patrol route from the patrol information storage unit 510. In Figure 7, reference numeral 720 indicates an example of a patrol route read by the movement control unit 501 from the patrol information storage unit 510. As shown by reference numeral 720, the patrol route is derived from the layout of the manufacturing site 600 within the manufacturing plant of the substrate processing apparatus. • The work area where each worker is located (reference numerals 611, 621, 631, 632, 641, 650 in Figure 6) • Areas where unsafe conditions may occur (reference numeral 650 in Figure 6), • Restricted areas (not shown in Figure 6) It is determined based on the following factors.

[0051] As described above, the movement control unit 501 generates movement information based on the patrol route and the current position information of the patrol robot 120. In Figure 7, reference numeral 730 indicates movement information instructing the patrol robot 120 to move from its current position in the direction of the arrow for a distance corresponding to the length of the arrow, at a speed of ** km / h.

[0052] (2) Specific example of processing in the learning phase of the detection unit 504 Next, a specific example of the processing in the learning phase of the detection unit 504 will be described. Figure 8 is a diagram showing a specific example of the processing in the learning phase of the detection unit. As shown in Figure 8, the detection unit 504 functions as a learning data generation unit 810 and a learning unit 820 in the learning phase.

[0053] The learning data generation unit 810 reads out the video data from the start of the patrol in the learning phase, which was captured by the imaging device 320 and sequentially stored in the video data storage unit 840 until the completion of the patrol. From each frame contained in the read video data, the learning data generation unit 810 adds annotation data input by the analyst to the frames (video data) in which events that increase the risk of occupational accidents for workers have occurred, which have been extracted by the analyst. As a result, the learning data generation unit 810 generates learning data 851 and stores it in the learning data storage unit 850.

[0054] As shown in training data 851, events that increase the risk of occupational accidents for workers can be classified into four types of events ("safety patrols", "unsafe behavior", "unsafe conditions", and "other").

[0055] Incidents classified as "safety inspections" include, for example, workers not properly wearing protective equipment (such as safety glasses) and workers not wearing their clothing correctly.

[0056] Examples of events classified as "unsafe behaviors" include: • The worker is in an abnormal condition (for example, the worker has collapsed), • The worker is not wearing protective equipment for working at heights (for example, a hard helmet for heights of 1.5m or more, or a full harness for heights of 2.0m or more). • The worker has entered a restricted area. This includes, etc.

[0057] Events classified as "unsafe conditions" include, for example, • There is a possibility that workers may accidentally fall, such as when ladders or tools are lying in the passageway. • There is a possibility that a worker could accidentally fall in, such as when the grating is open. This includes, etc.

[0058] The events categorized as "other" include, for example, an intruder entering the manufacturing area 600 within a circuit board processing plant.

[0059] The learning unit 820 has a learning model 830. The learning unit 820 reads the learning data 851 stored in the learning data storage unit 850 and inputs the image data contained in the learning data 851 into the learning model 830. The learning unit 820 also updates the model parameters of the learning model 830 so that the output from the learning model 830 approaches the annotation data contained in the learning data 851.

[0060] The learning unit 820 stores the trained model generated by training the learning model 830 using the training data 851 in the trained model storage unit 860.

[0061] (3) Specific example of processing in the detection phase of the detection unit 504 Next, a specific example of the processing in the detection phase of the detection unit 504 will be described. Figure 9 is a diagram showing a specific example of the processing in the detection phase of the detection unit. As shown in Figure 9, the detection unit 504 functions as an execution unit 910 in the detection phase.

[0062] The execution unit 910 has a trained model 920 read from the trained model storage unit 860. After the start of patrol in the detection phase, the execution unit 910 acquires video data captured by the imaging device 320 and inputs it to the trained model 920. The trained model 920 processes the input video data frame by frame (video data unit) during patrol to detect events that increase the risk of occupational accidents for workers. When an event that increases the risk of occupational accidents for workers is detected, the detection result and video data including the corresponding frame and the frames before and after the corresponding frame are notified to the transmission unit 506. In addition, when the execution unit 910 detects an event that increases the risk of occupational accidents for workers, it notifies the notification instruction unit 505 of the detection result.

[0063] (4) Specific example of processing by the notification instruction unit 505 Next, a specific example of processing by the notification instruction unit 505 will be described. Figure 10 is a diagram showing a specific example of processing by the notification instruction unit. As shown in Figure 10, the notification instruction unit 505 functions as a notification information acquisition unit 1010.

[0064] The notification instruction unit 505 has a notification information storage unit 1020 in which a correspondence table 1030 is stored in advance. As shown in Figure 10, the correspondence table 1030 stores the detection result and notification information in correspondence. In the correspondence table 1030, "Message" stores the message to be sent to the voice output device if the notification device 330 is a voice output device. Also, in the correspondence table 1030, "Patlite" (registered trademark) stores the lighting color and lighting method of the Patlite (registered trademark) if the notification device 330 is a Patlite (registered trademark).

[0065] When the notification information acquisition unit 1010 receives a detection result from the detection unit 504, it refers to the correspondence table 1030, acquires notification information corresponding to the detection result, and transmits it to the notification device 330.

[0066] <Patrol and Cleaning Procedure> Next, we will explain the flow of patrol and cleaning by the patrol robot 120. Figure 11 is an example of a flowchart showing the flow of patrol and cleaning by the patrol robot.

[0067] In step 1101, the patrol robot 120 determines whether or not update information has been sent from the management device 110. If it is determined in step S1101 that update information has been sent (if the answer in step S1101 is YES), the process proceeds to step S1102.

[0068] In step S1102, the patrol robot 120 updates its patrol information based on the transmitted update information and proceeds to step S1103.

[0069] On the other hand, if it is determined in step S1102 that no update information was sent (i.e., the answer in step S1101 is NO), the process proceeds directly to step S1103.

[0070] In step S1103, the patrol robot 120 determines whether or not it is time to patrol and clean. If it determines in step S1103 that it is not time to patrol and clean (i.e., the answer in step S1103 is NO), the process proceeds to step S1107.

[0071] On the other hand, if it is determined in step S1103 that it is time for patrolling and cleaning (if the answer in step S1103 is YES), the process proceeds to step S1104.

[0072] In step S1104, the patrol robot 120 begins patrolling and cleaning.

[0073] In step S1105, the patrol robot 120 determines whether or not it has detected an event that increases the risk of occupational accidents for workers. If it has detected an event that increases the risk of occupational accidents for workers in step S1105 (i.e., the answer is YES in step S1105), the process proceeds to step S1106.

[0074] In step S1106, the patrol robot 120 transmits the motion image data and detection results to the management device 110, and then proceeds to step S1107.

[0075] On the other hand, if it is determined in step S1105 that no event has been detected that increases the risk of occupational accidents for workers (i.e., the answer in step S1105 is NO), the process proceeds directly to step S1107.

[0076] In step S1107, the patrol robot 120 determines whether the patrol and cleaning are complete. If it determines in step S1107 that the patrol and cleaning are not complete (if the answer is NO in step S1107), it returns to step S1105. On the other hand, if it determines in step S1107 that the patrol and cleaning are complete (if the answer is YES in step S1107), it terminates the patrol and cleaning process.

[0077] <Hardware configuration of the management device> Next, the hardware configuration of the management device 110 will be described. Figure 12 shows an example of the hardware configuration of the management device. As shown in Figure 12, the management device 110 includes a processor 1201, memory 1202, auxiliary storage device 1203, connection device 1204, communication device 1205, and drive device 1206. Each piece of hardware included in the management device 110 is interconnected via a bus 1207.

[0078] The processor 1201 has various computing devices such as a CPU and a GPU. The processor 1201 reads various programs (for example, a robot management program) into the memory 1202 and executes them.

[0079] Memory 1202 has main memory devices such as ROM and RAM. The processor 1201 and memory 1202 form a so-called computer, and the computer realizes various functions by having the processor 1201 execute various programs read into memory 1202.

[0080] The auxiliary storage device 1203 stores various programs and various information used when those programs are executed by the processor 1201.

[0081] The connection device 1204 connects the operating device 1211 and the display device 1212 to the management device 110. The operating device 1211 is a device in which the safety manager 111 inputs various instructions, and the display device 1212 is a device that displays various screens generated by the management device 110 to the safety manager 111.

[0082] The communication device 1205 communicates with the patrol robot 120, the administrator terminal 130, and the particle management device 140 via the network 160.

[0083] The drive device 1206 is a device for setting the recording medium 1213. The recording medium 1213 here includes media that record information optically, electrically, or magnetically, such as CD-ROMs, flexible disks, and magneto-optical disks. The recording medium 1213 may also include semiconductor memory that records information electrically, such as ROMs and flash memory.

[0084] The various programs to be installed on the auxiliary storage device 1203 are installed, for example, when the distributed recording medium 1213 is set in the drive device 1206 and the various programs are read by the drive device 1206. Alternatively, the various programs to be installed on the auxiliary storage device 1203 may be installed by downloading them from the network 160 via the communication device 1205.

[0085] <Functional Configuration of the Management Device> Next, the functional configuration of the management device 110 will be described. Figure 13 shows an example of the functional configuration of the management device. As mentioned above, the robot management program is installed on the management device 110. When the robot management program is executed, the management device 110 functions as a display control unit 1301, a notification information generation unit 1302, a notification control unit 1303, an information provision unit 1304, and a patrol information update unit 1305.

[0086] The display control unit 1301 displays various screens to the safety manager 111 via the display device 1212. For example, the display control unit 1301 generates and displays a "safety management screen" for displaying motion image data and detection results transmitted from the patrol robot 120 and stored in the history information storage unit 1310.

[0087] The display control unit 1301 generates and displays an "email screen" for the management device 110 to send an email to the administrator terminal 130 when the patrol robot 120 detects an event that increases the risk of occupational accidents for workers. If the display control unit 1301 receives an instruction to send an email from the safety manager 111 in response to displaying the "email screen," it notifies the notification information generation unit 1302 of the instruction to send the email.

[0088] The display control unit 1301 generates and displays a "detection history list screen" for displaying a list of detection history, which is a history of events detected by the patrol robot 120 that increase the risk of occupational accidents for workers.

[0089] The display control unit 1301 generates and displays a "particle information screen" for displaying particle information transmitted from the particle management device 140 and stored in the particle information storage unit 1320.

[0090] When the notification information generation unit 1302 stores motion image data and detection results in the history information storage unit 1310, it identifies the manager 131 of the worker for whom an event increasing the risk of occupational accidents has been detected, and generates email data to be sent to the manager terminal 130 of the manager 131. The notification information generation unit 1302 notifies the display control unit 1301 of the generated email data. As a result, as described above, the "email screen" is displayed on the display control unit 1301. Furthermore, when the safety manager 111 inputs a transmission instruction in response to the display of the "email screen," the display control unit 1301 notifies the safety manager 111 of the transmission instruction.

[0091] When the notification information generation unit 1302 receives a transmission instruction from the display control unit 1301, it notifies the notification control unit 1303 of the email data.

[0092] When the notification control unit 1303 receives email data from the notification information generation unit 1302, it sends an email to the administrator terminal 130 to provide a detection notification.

[0093] When the information provision unit 1304 receives a request from the administrator terminal 130 to display a list of detection history, it reads the list of detection history from the history information storage unit 1310. The information provision unit 1304 generates a "detection history list screen" to display the read list of detection history and provides it to the administrator terminal 130.

[0094] Although not shown in Figure 13, if the administrator 131 selects any of the detection histories after a list of detection histories has been provided, the information provision unit 1304 will provide the administrator terminal 130 with the video data and detection results corresponding to the selected detection histories.

[0095] When particle information transmitted from the particle management device 140 is stored in the particle information storage unit 1320, the patrol information update unit 1305 determines whether or not it is necessary to update the current patrol information based on the stored particle information. For example, if the stored particle information indicates that the cleanliness of a specific area has deteriorated, the patrol information update unit 1305 determines that it is necessary to temporarily update or partially update the current patrol information. Also, for example, if the stored particle information indicates that the cleanliness of a predetermined number of areas or more has deteriorated, the patrol information update unit 1305 determines that it is necessary to completely update the current patrol information. The patrol information update unit 1305 will appropriately decide which of the patrol route, patrol schedule, and cleaning intensity included in the patrol information to update, and how to update them, according to the degree of deterioration in cleanliness.

[0096] <Specific examples of processing performed by each part of the control device> Next, we will explain specific examples of processing performed by each part of the management device 110 (in this case, the display control unit 1301, the notification information generation unit 1302, and the information provision unit 1304).

[0097] (1) Specific example of processing by the display control unit 1301 First, as a concrete example of processing by the display control unit 1301, we will describe a concrete example of the process of displaying the safety management screen. Figure 14 is the first diagram showing a concrete example of processing by the display control unit.

[0098] As described above, the display control unit 1301 generates and displays a safety management screen 1400 for displaying the video data and detection results transmitted from the patrol robot 120 and stored in the history information storage unit 1310.

[0099] As shown in Figure 14, the safety management screen 1400 includes an attribute area 1410 for displaying attribute information, a video area 1420 for displaying video data and detection results, and an operation area 1430 for inputting display operations when displaying video data.

[0100] The attribute area 1410 includes a field 1411 for displaying the detection date and time, a field 1412 for displaying the detection area, and a field 1413 for displaying the detected patrol robot. The field 1411 for displaying the detection date and time shows the date and time when the patrol robot 120 detected an event that increased the risk of occupational accidents to workers. The field 1412 for displaying the detection area shows the area of ​​the manufacturing site 600 within the circuit board processing equipment manufacturing plant where the patrol robot 120 detected an event that increased the risk of occupational accidents to workers. The field 1413 for displaying the detected patrol robot shows the identification information of the patrol robot 120 that detected the event that increased the risk of occupational accidents to workers.

[0101] The video area 1420 displays the video data and detection results. The operation area 1430 includes a seek bar for the currently displayed video data, as well as a play command button, a rewind button, and a fast forward button.

[0102] Although not explicitly shown in Figure 14, when displaying video data in the video area 1420, frames in which an event that increases the risk of occupational accidents for workers is detected may be displayed in a different manner from other frames (for example, by adding a red border).

[0103] (2) Specific examples of processing by the notification information generation unit 1302 and the information provision unit 1304 Next, we will describe specific examples of processing performed by the notification information generation unit 1302 and the information provision unit 1304. Figure 15 is a diagram showing specific examples of processing performed by the notification information generation unit and the information provision unit.

[0104] As described above, when the video data and detection results are stored in the history information storage unit 1310, the notification information generation unit 1302 identifies the manager 131 of the worker for whom an event increasing the risk of an occupational accident has been detected. The notification information generation unit 1302 also generates email data to be sent to the manager terminal 130 of the identified manager 131.

[0105] The email screen 1500 in Figure 15(a) shows how the generated email data is displayed on the display control unit 1301. As shown in Figure 15(a), the "Security Management" folder in the outbox of the email screen 1500 displays a list of emails that the management device 110 sends as detection notifications (see reference numeral 1501).

[0106] The example in Figure 15(a) shows how the notification information generation unit 1302 generates email data with the administrator terminal 130 of administrator 131 as the recipient. Also, in the example in Figure 15(a), the notification information generation unit 1302 includes the following in the email body (reference numeral 1502): • Insert the email message shown in symbol 1502_1, and, • Image data (code 1502_2) was inserted from each frame contained in the video data, capturing frames in which events that increase the risk of occupational accidents for workers were detected. This shows how the email data was generated.

[0107] Furthermore, as described above, when the information provision unit 1304 receives a request from the administrator terminal 130 to display a list of detection history, it reads the list of detection history from the history information storage unit 1310 and generates a detection history list screen, thereby providing the administrator terminal 130 with the list of detection history.

[0108] The detection history list screen 1510 in Figure 15(b) shows the detection history list screen provided by the information provision unit 1304. As shown in Figure 15(b), the detection history list screen 1510 includes information items such as "detection date and time", "detection area", "detection details", and "worker's affiliation".

[0109] As described above, when any detection history is selected on the detection history list screen 1510, the detection history list screen 1510 displays a screen similar to the safety management screen 1400 shown in Figure 14, for example, and the video data and detection results are displayed to the administrator 131.

[0110] The detection history list screen 1510 in Figure 15(b) was described as being provided to the administrator terminal 130 when the management device 110 receives a request from the administrator terminal 130 to display the detection history list. However, the detection history list screen 1510 in Figure 15(b) may be displayed on the management device 110, for example, rather than being provided to the administrator terminal 130. In other words, when the display control unit 1301 of the management device 110 displays the detection history list screen to the safety manager 111, it may display a detection history list screen similar to the detection history list screen 1510.

[0111] (3) Specific example of processing by the display control unit 1301 2 Next, as another specific example of processing by the display control unit 1301, a specific example of the process of displaying a particle information screen will be described. Figure 16 is a second diagram showing a specific example of processing by the display control unit.

[0112] As described above, the display control unit 1301 generates and displays a particle information screen for displaying particle information transmitted from the particle management device 140 and stored in the particle information storage unit 1320.

[0113] As shown in Figure 16, the particle information screen 1600 includes a measurement location display area 1601 on the layout of the manufacturing site 600 within the substrate processing apparatus manufacturing plant, where the locations where particle sensors 150_1 to 150_4 are installed are indicated as stars.

[0114] Furthermore, as shown in Figure 16, the particle information screen 1600 includes a sensor data display area 1602 that displays sensor data measured by particle sensors 150_1 to 150_4 and standard cleanliness values ​​for each area of ​​the manufacturing site 600 within the substrate processing apparatus manufacturing plant.

[0115] In the example shown in Figure 16, the sensor data display area 1602 includes humidity and temperature data from the manufacturing site 600 within the substrate processing equipment manufacturing plant.

[0116] <Robot management process flow by the control device> Next, we will explain the flow of robot management processing by the control device 110. Figure 17 is an example of a flowchart showing the flow of robot management processing by the control device.

[0117] In step S1701, the management device 110 determines whether or not an event that increases the risk of occupational accidents for workers has been detected by the patrol robot 120. If motion image data and detection results are transmitted from the patrol robot 120, the management device 110 determines in step S1701 that detection has occurred (determines YES in step S1701) and proceeds to step S1702.

[0118] In step S1702, the management device 110 displays the video data and detection results to the safety manager 111.

[0119] In step S1703, the management device 110 identifies the manager 131 of the worker for whom an event increasing the risk of occupational accidents has been detected, and generates email data to be sent to the manager terminal 130 of the manager 131.

[0120] In step S1704, the management device 110 sends email data to the identified recipient, notifying the administrator 131 of the detection, and proceeds to step S1705.

[0121] On the other hand, if no video data or detection results are transmitted from the patrol robot 120 in step S1701, the management device 110 determines that no detection occurred (determining NO in step S1701) and proceeds directly to step S1705.

[0122] In step S1705, the management device 110 determines whether or not it has received a request from the administrator terminal 130 to display a list of detection history. If it determines in step S1705 that it has not received a request (if the answer is NO in step S1705), it proceeds to step S1709. On the other hand, if it determines in step S1705 that it has received a request (if the answer is YES in step S1705), it proceeds to step S1706.

[0123] In step S1706, the management device 110 generates a detection history list screen 1510 for displaying a list of detection history and provides it to the administrator terminal 130.

[0124] In step S1707, the management device 110 determines whether the administrator 131 has selected any detection history from the list of detection history. If it is determined in step S1707 that no detection history was selected (i.e., the answer is NO in step S1707), the process proceeds to step S1709.

[0125] On the other hand, if it is determined in step S1707 that any detection history has been selected (i.e., the answer is YES in step S1707), the process proceeds to step S1708.

[0126] In step S1708, the management device 110 provides the administrator terminal 130 with video data and detection results corresponding to the selected detection history.

[0127] In step S1709, the management device 110 determines whether or not it has received particle information from the particle management device 140. If it determines in step S1709 that it has not received particle information (i.e., the answer in step S1709 is NO), the process proceeds to step S1712.

[0128] On the other hand, if it is determined in step S1709 that particle information has been received (if the answer in step S1709 is YES), the process proceeds to step S1710.

[0129] In step S1710, the management device 110 determines whether or not it is necessary to update the patrol information. If it is determined in step S1710 that it is not necessary to update the patrol information (i.e., the answer is NO in step S1710), the process proceeds to step S1712.

[0130] On the other hand, if it is determined in step S1710 that an update to the patrol information is necessary (if the answer is YES in step S1710), the process proceeds to step S1711.

[0131] In step S1711, the management device 110 generates update information for updating the patrol information and transmits it to the patrol robot 120.

[0132] In step S1712, the management device 110 determines whether to continue the robot management process. If it determines in step S1712 to continue the robot management process (if the answer is YES in step S1712), it returns to step S1701. On the other hand, if it determines in step S1712 not to continue the robot management process (if the answer is NO in step S1712), it terminates the robot management process.

[0133] <Flow of safety management processes using the safety management system> Next, we will explain the overall flow of safety management processes using the safety management system 100. Figure 18 is a sequence diagram showing the flow of safety management processes using the safety management system.

[0134] In step S1801, the particle management device 140 acquires particle information and transmits it to the management device 110.

[0135] In step S1810, the management device 110 performs robot management processing. As a result, update information is transmitted to the patrol robot 120.

[0136] In step S1820, the patrol robot 120 performs patrol and cleaning. As a result, the patrol robot 120 updates the patrol information using the update information and starts patrolling and cleaning when it determines that it is time to patrol and clean. When the patrol robot 120 detects an event that increases the risk of occupational accidents for workers, it transmits video data and the detection result to the management device 110. The management device 110 then sends a detection notification to the administrator terminal 130.

[0137] In step S1831, the administrator terminal 130 displays a detection notification to the administrator 131.

[0138] In step S1832, the administrator terminal 130 receives an input from administrator 131 requesting the display of a list of detection history and sends the request to the management device 110. As a result, the management device 110 provides the administrator terminal 130 with the detection history list screen 1510.

[0139] In step S1833, the administrator terminal 130 displays the provided detection history list screen 1510.

[0140] In step S1834, the administrator terminal 130 receives a selection of detection history from the administrator 131 and transmits the selected detection history to the management device 110. As a result, the management device 110 provides the administrator terminal 130 with video data and detection results corresponding to the selected detection history.

[0141] In step S1835, the administrator terminal 130 displays video data and detection results corresponding to the selected detection history.

[0142] From this point onward, the safety management system 100 repeatedly executes the above process.

[0143] <Summary> As is clear from the above description, the patrol robot 120 according to the first embodiment is equipped with an imaging device 320, a control device 310, and a notification device 330, and the control device 310 is The mobile control unit 501 controls the mobile robot 120 to move within the manufacturing area 600 of the substrate processing equipment factory based on a mobile route for patrolling the work area 600 within the manufacturing area 600 of the substrate processing equipment factory. The system includes a detection unit 504 that processes video data captured by the imaging device 320 after the start of the patrol to detect events that increase the risk of occupational accidents for workers. • The system includes a notification instruction unit 505 that, when an event that increases the risk of occupational accidents for workers is detected, provides notification via a notification device 330 to encourage the reduction of occupational accident risks.

[0144] Thus, the patrol robot 120 according to the first embodiment monitors for events that increase the risk of occupational accidents for workers while patrolling the manufacturing site 600 within the substrate processing equipment manufacturing plant. As a result, the patrol robot 120 according to the first embodiment provides a more efficient monitoring system compared to, for example, a configuration in which an imaging device is installed at a predetermined location for monitoring. • It can monitor workers not only when they are working in their designated workspace, but also in various other scenarios. Even if the layout of the 600 manufacturing sites within the circuit board processing equipment manufacturing plant is changed, workers can still be monitored in the same way as before by changing the patrol route.

[0145] As a result, the patrol robot 120 according to the first embodiment can enhance worker safety management.

[0146] [Second Embodiment] In the first embodiment described above, it was assumed that patrolling and cleaning are performed in parallel, and that the patrolling robot 120 has one patrol route. However, the patrol robot 120 may have separate patrol routes for patrolling and patrol routes for cleaning.

[0147] Furthermore, in the first embodiment described above, the control device 310 of the patrol robot 120 has a detection unit 504 that detects events that increase the risk of occupational accidents for workers, but the detection unit 504 may be provided by the management device 110.

[0148] Furthermore, in the first embodiment described above, the details of the training method were not mentioned in the generation of a trained model for detecting events that increase the risk of occupational accidents for workers. However, the trained model may be generated, for example, by training it using machine learning or sparse modeling with image data that includes events that increase the risk of occupational accidents for workers.

[0149] Furthermore, in the first embodiment described above, the particle management device 140 was described as transmitting the acquired particle information to the management device 110. However, the particle management device 140 may be configured to transmit the acquired particle information to the patrol robot 120. This allows the patrol robot 120 to confirm the effectiveness of cleaning based, for example, on the particle information acquired immediately before patrolling and cleaning, and the particle information acquired immediately after patrolling and cleaning. The patrol robot 120 can also change the cleaning intensity based on the confirmed effect.

[0150] Furthermore, in the first embodiment described above, the patrol robot 120 was described as an integrated robot. However, the patrol robot 120 may also have components such as a sensor device 340, a battery device 350, a drive control device 360, a drive mechanism 361, and a communication device 380, which are separate from the imaging device 320, notification device 330, control device 310, etc. In other words, the patrol robot 120 may be realized by mounting an imaging device 320, a notification device 330, a control device 310, etc., for detecting events that increase the risk of occupational accidents for workers onto a general autonomous transport robot.

[0151] It should be noted that the present invention is not limited to the configurations shown in the above embodiments, including combinations with other elements. These aspects can be modified without departing from the spirit of the present invention and can be appropriately determined according to their application. [Explanation of Symbols]

[0152] 100: Safety Management System 120: Patrol robot 130: Administrator terminal 140: Particle Management Device 150_1~150_4: Particle Sensor 310: Control device 320: Imaging device 330: Notification device 340: Sensor device 350: Battery device 360: Drive control device 361: Drive mechanism 370: Cleaning control device 371: Cleaning mechanism 380: Communication equipment 500: General Control Unit 501: Movement Control Unit 502: Location information calculation unit 503:Cleaning instruction section 504: Detection unit 505: Information and Instruction Department 506: Transmitter 507: Receiving Unit 810: Training data generation unit 820: Learning Department 830: Learning Model 851: Training data 910: Execution Department 920: Pre-trained model 1010: Information Acquisition Department 1030: Correspondence Table 1301: Display Control Unit 1302: Notification information generation unit 1303: Notification Control Unit 1304: Information provision department 1305: Patrol information update department 1400: Safety management screen 1500: Email screen 1510: Detection History List Screen 1600: Particle Information Screen

Claims

1. A mobile body equipped with an imaging device, a control device, and a notification device, The control device is A movement control unit that controls movement within the factory based on a patrol route for patrolling the work areas within the factory, A detection unit processes video data captured by the imaging device after the start of the patrol to detect events that increase the risk of occupational accidents for workers, When an event that increases the risk of occupational accidents for workers is detected, the notification instruction unit, via the notification device, issues a notification to encourage the reduction of occupational accident risks. A mobile body having

2. The system further includes a transmission unit that, when an event that increases the risk of occupational accidents for workers is detected, transmits the detection result to a management device in association with the aforementioned video data. The mobile body according to claim 1.

3. Detecting events that increase the risk of occupational accidents for the aforementioned workers includes detecting deficiencies in the wearing of protective equipment by workers. The mobile body according to claim 1.

4. Detecting events that increase the risk of occupational accidents for the aforementioned workers further includes detecting unsafe behavior by workers or unsafe conditions within the factory. The mobile body according to claim 3.

5. The aforementioned detection unit further detects suspicious persons. The mobile body according to claim 1.

6. The detection unit processes the video data by inputting the video data captured by the imaging device frame by frame into a trained model, which has been trained by machine learning or sparse modeling using image data that includes events that increase the risk of occupational accidents for workers. The mobile body according to claim 1.

7. It will also be equipped with a cleaning device that cleans the floor surface while patrolling. The mobile body according to claim 1.

8. The system further includes a storage unit for storing the aforementioned patrol route, patrol schedule, and cleaning intensity. The patrol route, patrol schedule, and cleaning intensity stored in the storage unit are updated based on particle information within the factory. The mobile body according to claim 7.

9. The mobile body according to claim 2, The management device communicates with the aforementioned mobile body, A safety management system having, The aforementioned control device is When displaying the aforementioned video data, a display control unit displays, in a different display manner from the other frames, the frame in which an event that increases the risk of occupational accidents for workers is detected among the frames included in the video data. A notification control unit notifies the administrator of the frames in the aforementioned video data in which an event that increases the risk of occupational accidents for workers has been detected, along with the detection result. A safety management system.

10. The aforementioned control device is In response to a request from the aforementioned administrator, a list of detection history is provided. The safety management system according to claim 9.

11. A manufacturing plant for a substrate processing apparatus, wherein the control device of the safety management system described in claim 9 is installed, and the mobile body patrols the work area.

12. In a mobile body equipped with an imaging device, a control device, and a notification device, the control device is A process for controlling movement within the factory based on a patrol route for circulating work areas within the factory, The process involves processing video data captured by the imaging device after the start of the patrol to detect events that increase the risk of occupational accidents for workers, The process involves, when an event that increases the risk of occupational accidents for workers is detected, issuing a notification via the notification device to encourage the reduction of occupational accident risks. A safety management method to implement.

13. In a mobile body equipped with an imaging device, a control device, and a notification device, the control device is configured as follows: A process for controlling movement within the factory based on a patrol route for circulating work areas within the factory, The process involves processing video data captured by the imaging device after the start of the patrol to detect events that increase the risk of occupational accidents for workers, The process involves, when an event that increases the risk of occupational accidents for workers is detected, issuing a notification via the notification device to encourage the reduction of occupational accident risks. A safety management program to implement this.

Images