Systems and methods for automatically loading and testing AFM probes

Abstract

An apparatus (2) is disclosed for automatically unloading AFM probes (10) from a probe package (1) and loading the probes into a probe cassette (3) for use by an AFM device after they have been individually characterized. The apparatus includes a cantilever characterization station (21) for characterizing the cantilevers of the individual probes, a tip characterization station (22) for characterizing the tips of the individual probes, and a probe manipulator (23) for transferring the AFM probes from the probe package (1) to the probe cassette (3).

Description

[Technical Field]

[0001] This application relates to an apparatus for automatically loading and testing AFM probes.

[0002] This application relates to a method for automatically loading and testing AFM probes. [Background technology]

[0003] AFM probes are purchased from probe suppliers and are typically supplied in a source probe carrier, e.g., in a gel pack, or on a wafer. Each wafer or gel pack contains multiple probes (e.g., from about 10 in a gel pack to hundreds, e.g., 400, in a wafer). To be used with an AFM imaging device, the AFM probes must be transferred to a destination probe carrier or directly installed in the AFM imaging device, and certain probe characteristics (e.g., calibration data) must be known for each individual probe. Traditionally, these steps are performed manually, which is time-consuming, requiring, e.g., an hour of manual labor for each probe. For this reason, the calibration step is often omitted. To keep up with the expected demand for calibrated AFM probes, automated equipment to perform both operations is needed.

[0004] See background information below.

[0005] US5705814 discloses a scanning probe microscope with automatic probe exchange and alignment. This scanning probe microscope and corresponding method provide automated exchange and precise alignment of probes, where one or more additional stored probes for installation on a probe mount are stored in a storage cassette or wafer. The selected probe is aligned with a detection system, and the aligned probe is then clamped to the probe mount. Clamping is performed using a clamp that is disabled when removing the replacement probe from the storage cassette, enabled when installing the probe on the probe mount, and disabled when later releasing the probe for subsequent probe replacement. Probe alignment is automated using signals from a probe detection system or by forming an optical image of the probe using a camera or similar technology and determining the probe's position using pattern recognition processing of the probe image, allowing probe removal and replacement without operator intervention. Error checking techniques are employed to ensure proper probe installation and operation.

[0006] CN108856127 discloses an integrated atomic force microscope probe for storing, transporting, and cleaning the device. The integrated device consists of a probe mounting unit, a final assembly box, and a cleaning module. The probe is mounted and fixed in a slot in a gel fixing block. The probe mounting unit can be placed in the center of the cleaning module, and the probe is cleaned ultrasonically. A protective slot is formed in the gel fixing block to protect the probe cantilever, thereby improving cleaning quality and ensuring safety.

[0007] EP1662246 discloses a probe exchange method for a scanning probe microscope for measuring the surface of a sample. The scanning probe microscope has a cantilever equipped with a probe and a measurement unit for measuring physical quantities between the probe and the sample. The scanning probe microscope includes a cantilever mount, a cantilever cassette, an XY stage and a Z stage for moving the cantilever cassette, and an optical microscope. The method includes a first step for performing alignment between the cantilever mount and the cantilever cassette, selecting a cantilever from the cantilever cassette, and mounting the selected cantilever on the cantilever mount. A second step for moving the optical microscope and setting the mounted cantilever at a predetermined position within the field of view after the cantilever is mounted in the scanning probe microscope is also provided in the second step. The second step includes a step for moving the side of the optical microscope or the side of the cantilever to perform alignment.

[0008] US2010 / 037360A1 discloses an automatic probe exchange system for a scanning probe microscope (SPM) that exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic forces. When the magnetic force on the side of the SPM is larger, the probe is attached to the probe mount on the SPM. When the magnetic force on the side of the probe tray is larger, the probe is attached to the probe mount on the probe tray. The magnetic force on the side of the probe tray is changed by moving the magnet that generates the magnetic force on the side of the probe tray closer to or farther away from the probe. Summary of the Invention

[0009] It is an object to address the above needs. In accordance with that object, according to a first aspect of the present disclosure, there is provided a system for automatically unloading AFM probes from a source probe carrier, such as a probe cassette, gel box, tabbed wafer, etc., and loading the probes into a destination probe carrier for use by an AFM device after being individually characterized, or for directly installing the probes into an AFM device. The disclosed system comprises: a cantilever characterization station for characterizing the cantilevers of the individual probes; a tip characterization station for characterizing the tips of the individual probes; A probe manipulator for transferring the AFM probe from the probe carrier to a destination probe carrier or for directly placing the probe in an AFM device.

[0010] Additionally, the disclosed system may include additional system components such as a cleaning station for cleaning the probe, e.g., a chemical cleaning station or a plasma cleaning station. Alternatively or additionally, the disclosed system may include a cleanliness and integrity verification station. In one example, the system is configured to have the cleanliness and integrity verification station verify the cleanliness of the probe and selectively have the cleaning station perform a cleaning operation if this cleanliness is necessary to meet quality requirements.

[0011] The components of the system may be integrated within a single system housing, or two or more of the components may have separate housings.

[0012] The above components do not necessarily have to perform their functions in the same order as the order in which they are presented.

[0013] For example, in some embodiments, the probe manipulator first removes the probes one by one from the source probe carrier before the cantilever characterization station and tip characterization station perform the characterization steps, before the probe manipulator transfers the probes to the destination probe carrier, or before directly placing the probes.

[0014] The probe manipulator is configured to automatically remove the probe from the source probe carrier, for example, by one or more of the following processes: laser cutting, mechanical yielding, twisting, etching, and / or vacuum manipulation. According to another option, the probe is removed from the probe carrier in a dicing step, whereby, for example, a wafer is adhered to a UV-activated membrane film, then diced by a diamond cutting wheel, and subsequently picked from the membrane.

[0015] The cantilever characterization station is configured to characterize the AFM probe cantilever based on one or more of the following properties, for example, natural frequency, stiffness, shape, etc. Suitable methods for such characterization include (scanning) laser Doppler vibrometry, AFM, electrostatic force balance, etc.

[0016] The tip characterization station is configured to characterize the AFM probe tip based on one or more of the following characteristics: tip shape, stiffness, radius, length, adhesion, conductivity, transparency, aspect ratio, etc. Suitable methods for tip characterization include, for example, laser Doppler vibrometry, SEM, CD-SEM, AFM, etc. In one example, the tip characterization station is configured to perform measurements to confirm that the tip whisker profile (also expressed as the tip whisker slenderness) meets the requirement that the tip width be less than a predetermined threshold for a predetermined length. Alternatively or additionally, the tip characterization station is configured to characterize the actual tip shape in terms of its radius and overall profile along its length.

[0017] In some embodiments, the apparatus is configured to characterize the AFM probe body using optical methods. Exemplary attributes for characterization by optical methods are cleanliness, marking / ID recognition, shape, defects, etc.

[0018] In some embodiments, the apparatus is configured to perform functional characterization, for example, by performance measurements or by rendering sample AFM images of a reference sample.

[0019] It should be noted that it is not necessary for the probe to be removed from the source probe carrier before characterization can be performed. For example, in some embodiments, cantilever characterization or probe tip characterization may be performed while the probe is still in the source probe carrier. Laser Doppler vibrometry is one example of a method that allows rendering and characterizing the cantilever or probe tip while in the probe package. In an alternative approach, this methodology is used with the probe placed on a measurement pedestal, and the reflective base of the cantilever vibrometer is the subject of measurement. Optical methods are also suitable for use as a characterization tool while the probe is still in the source probe carrier.

[0020] As another example, characterization of the cantilever or characterization of the tip of the probe may be performed after the probe is positioned in the probe cassette, however, this approach is less preferred as the characterization may result in the probe already in the probe cassette not complying with certain requirements.

[0021] In one embodiment, the system comprises a probe characteristic memory and a controller configured to store, for each probe, data characterizing the probe in the probe characteristic memory, such as the location of the probe and measurements of cantilever stiffness and tip characteristics.

[0022] Alternatively or additionally, embodiments of the system are configured to provide information for use by an AFM device indicating the location of the probe within the destination probe carrier and data characterizing the probe, such as a measurement of the cantilever stiffness CL and tip properties, etc. This information is accessible to the AFM device using the probe, for example in that the information is encoded in a QR code provided on the surface of the destination probe carrier and / or written to a data carrier embedded in the destination probe carrier and / or stored in a database accessible to the AFM imaging device via communication / networking technologies (the Internet).

[0023] According to a second aspect, there is provided a method for automated unloading of AFM probes from a source probe carrier and loading the probes into a probe cassette for use by an AFM device after they have been individually characterized, the method comprising: receiving a source probe carrier; characterizing the cantilevers of individual probes received within the source probe carrier; characterizing the tips of individual probes received in the source probe carrier; Transferring the characterized AFM probe to a destination probe carrier or directly placing the characterized probe into an AFM imaging device.

[0024] As mentioned above, the source probe carrier in which the probes are provided may be one of several variations such as a probe cassette, a gel box, a tabbed wafer package, or the like.

[0025] There are also various options for the destination probe carrier. According to one option, the characterized probes are transferred to a gel pack, for example, for long-term storage or for a yield related to one or more properties for which the probes are characterized. According to another option, the destination probe carrier is a probe cassette, for example, a cassette received from a customer to be returned, a pre-filled cassette from a probe supplier, or another cassette received as a source probe carrier that is returned as a destination probe carrier after its contents have been reconstituted. The source probe carrier and the destination probe carrier do not have to be of the same type.

[0026] These and other aspects of the present disclosure will be described in further detail with reference to the drawings, in which: [Brief explanation of the drawings]

[0027] [Figure 1] 1 illustrates a schematic representation of an embodiment of a method according to the present disclosure. [Figure 2] 1 illustrates schematically an exemplary probe carrier, as well as sections thereof in more detail. [Figure 2A] A portion of the probe is shown. [Figure 3] 1 illustrates a schematic diagram of an embodiment of a system according to the present disclosure. [Figure 4A] 4A and 4B show the components of the system of FIG. 3 in first and second stages of operation, respectively. [Figure 4B] 4A and 4B show the components of the system of FIG. 3 in first and second stages of operation, respectively. [Figure 5] 1 shows an exemplary probe cassette. [Figure 5A] A section of the probe cassette is shown in more detail. [Figure 6A] 1A and 1B show top and front views, respectively, of another embodiment of a system according to the present disclosure. [Figure 6B] 1A and 1B show top and front views, respectively, of another embodiment of a system according to the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0028] The terminology used to describe particular embodiments is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. The term "and / or" includes any and all combinations of one or more of the associated listed items. It will be understood that the terms "comprises" and / or "comprising" specify the presence of the stated features but do not exclude the presence or addition of one or more other features. Unless otherwise specified, it will be further understood that when a particular step of a method is referred to as following another step, it may follow the other step directly, or that one or more intermediate steps may be performed prior to performing the particular step. Similarly, when a connection between structures or components is described, it will be understood that this connection may be established directly or through intermediate structures or components, unless otherwise specified.

[0029] The present invention is described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown. In the drawings, absolute and relative sizes of systems, components, layers, and regions may be exaggerated for clarity. Embodiments may be described with reference to schematic illustrations and / or cross-sectional views of possibly idealized embodiments and intermediate structures of the invention. In the specification and drawings, like numerals refer to like elements throughout. Relative terms, and derivatives thereof, should be construed to refer to an orientation as described below or as shown in the drawings under discussion. These relative terms are for convenience of description and do not require that the system be constructed or operated in a particular orientation, unless specifically specified.

[0030] Detailed Description of the Invention FIG. 1 shows a schematic diagram of the steps of a method for automatically unloading AFM probes from a probe package and loading the probes into a probe cassette for use by an AFM device after they have been individually characterized. In step S1, a probe package is received. The probe package as received from the probe supplier may be, for example, a gel pack or wafer. Each wafer or gel pack may contain, for example, several hundred probes. By way of example, FIG. 2 shows a 4-inch wafer 1 with approximately 400 probes 10, 10a. Each probe 10 comprises a cantilever 11 with a tip 12 and is fixed within the wafer 1 with a support arm 13. A detailed view of an individual probe is shown in FIG. 2A.

[0031] In some examples, step S1 involves removing individual probes from the probe package before further steps are performed. In alternative examples, characterization of the probes is performed partially or completely while the probes are still in the probe package. The alignment step can be performed in step S1 to properly align the probe package (1) within the characterization station for characterization of the particular probe (10) within the probe package (1). In some examples, step S1 includes the substep of providing each probe with a unique identification number (ID) that associates its characteristics.

[0032] In step S2, the cantilevers of the individual probes are characterized. In this example, the cantilever characterization of the individual probes is a stiffness measurement, e.g., Z stiffness and / or Rx stiffness. Alternatively or additionally, other mechanical properties such as higher mode shapes and natural frequencies are evaluated in this step.

[0033] In step S3, the tips of the individual probes are characterized. In this case, step S3 is tip shape measurement. In one example, the tip shape is determined by AFM measurement. In another example, the tip is used to render a test image from a test sample having predetermined properties, and the test image is analyzed to characterize the tip. In one example, the test sample has a structure where the response observed in the test image depends on how it is interrogated by the probe and on the particular properties of the probe. In one example, the test sample includes a cavity of a predetermined size, and the response observed in the test image depends on whether the tip fits snugly into that cavity. In step S4, the probes are loaded into a probe cassette. Further, step S4 may include loading the cassette and / or Automatic cleaning of the probe may be involved.

[0034] Step S5 represents the act of displacing a probe or collection of probes. In some embodiments, step S5 involves displacing the source probe carrier along various characterization stations that can characterize individual probes while still within the source probe carrier. Examples of such characterization stations are laser Doppler vibrometry stations and optical inspection stations. In other embodiments, step S5 involves displacing a particular probe. Step S5 can, for example, place an individual probe in an AFM device to image a reference sample.

[0035] FIG. 1 shows an additional step S1A in which an optical inspection is performed. In it, the top and / or bottom surfaces of the probes are subjected to optical inspection. The optical inspection step S1A may further serve to provide input for performing navigation for picking, placing, and aligning the probes in the measurement station and carrier. The optical inspection S1A may be applied to an individual probe or a set of probes while the probes are in the probe package or after they have been loaded into a probe cassette. In one example, step S1A verifies whether the assigned probe ID is clearly readable. In another example, it verifies that the probes are free of particles and / or debris.

[0036] FIG. 3 schematically illustrates an apparatus 2 for automatically unloading AFM probes from a probe package 1 and loading the probes into a probe cassette 3 for use by an AFM device after they have been individually characterized. As shown in FIG. 3, the apparatus 2 includes a cantilever characterization station 21 for characterizing the cantilevers of individual probes. In the illustrated embodiment, the cantilever characterization station 21 includes a laser Doppler vibrometer 211. The laser Doppler vibrometer 211 is configured to measure the cantilever spring constant for each cantilever of the probe while it is still packaged in the probe package 1. Upon completion of the measurement, it submits the measured value CL(i) for each probe i in the package 1 to the controller 20. The controller 20 issues, for example, a control signal C21 to control the positioning table 213 of the probe package carrier 212 to position the probe package 1 and enable the laser vibrometer 211 to measure subsequent probes in the package 1. An advantage of the embodiment as shown in FIG. 3 is that cantilever characterization can be performed while the probe is still in the package 1.

[0037] The apparatus 2 further includes a tip characterization station 22 for characterizing the tips of individual probes. In the illustrated example, a probe manipulator 23, controlled by a control signal C23, is configured to automatically remove probes from the probe package by one or more of the following processes: laser cutting, mechanical yielding, twisting, and etching. The probe manipulator 23 has a probe manipulation head 231 that temporarily holds the probe for transport to the tip characterization station 22 and subsequent manipulation. The probe manipulator 23 is mounted on a pick-and-place unit 24 that controllably positions and orients the probe manipulator 23 according to a control signal C24 from the controller 20. In this example, the probe manipulator 23 can be controllably positioned in three orthogonal directions x, y, and z and can rotate about the z-axis (Rz). In other examples, the pick-and-place unit 24 can provide more or less degrees of freedom of movement for the probe manipulator 23. Note that, alternatively, the probe manipulation head can be used to remove individual probes from the source probe carrier. The tip characterization station 22 is shown in more detail in Figures 4A and 4B. As shown in Figures 4A and 4B, the tip characterization station 22 includes, among other things, a scan head 221 and a vacuum holder 222 for temporarily holding an individual probe 10 to be characterized after it has been loaded thereon by the probe manipulator (23). Note that, alternatively or additionally, one or more tip characterization steps may be performed while the probe is held by the probe manipulator 23. The scan head 221 is shown in more detail in Figure 4B. The scan head 221 includes a light beam generator 2211, such as a laser, that generates and directs a light beam B toward the side of the cantilever of the probe 10 opposite its tip. The scan head 221 further includes a light detector 2212 for detecting reflection of the light beam B at the cantilever.An XY scanning stage 224 is provided to hold the test sample and provide relative movement of the test sample with respect to the probe tips in the XY plane to scan the surface of the test sample with the tips. In an alternative embodiment, the scan head 221 is scanned in the X and Y directions while the test sample remains stationary. The output signal of the optical detector 2212 is used to determine the tip characteristics TP(i) of the probes loaded on the vacuum holder 222. The controller sends a control signal C23 to control the probe manipulator 23 to load each probe onto the vacuum holder 222 and sends a control signal C22 to control the tip characterization station 22 to perform characterization. After performing characterization, the controller 20 sends a further control signal C23 to the probe manipulator 23 to load each probe 10 from the tip characterization station 22 into its respective position within a destination probe carrier, such as the probe cassette 3. For each probe, the controller 20 stores in memory 201 the location of the probe 10 and data characterizing the probe, such as measurements of the cantilever stiffness CL(i) and tip properties TP(i). Alternatively, the probe manipulator 23 directly places the probe in the AFM device.

[0038] In the illustrated embodiment, the controller 20 reads instructions from a computer program in an instruction memory 202. The instructions specify how the controller 20 is to control the components of the device. The instruction memory 202 is, for example, a non-volatile record carrier such as a ROM. Alternatively, the instruction memory is a rewritable memory that allows for reprogramming and upgrading of the device. In some other embodiments, the controller is provided as dedicated hardware, in which case an instruction memory is not required.

[0039] An exemplary probe cassette 3 is shown in more detail in FIG. 5 , with FIG. 5A showing a portion of the probe cassette 3. Further details are also disclosed in PCT Application WO 2022 / 114956. The probe cassette shown in FIG. 5 comprises a body 33 including a support surface 34 for supporting a probe. The support surface is provided with a plurality of physical confinement elements 35. The physical confinement elements provide a plurality of engagement surfaces 38 arranged along the periphery of predefined retention positions to define pockets 39 for retaining the probes, the pockets being dimensioned to limit lateral shift of the probes in any direction along the support surface. In some embodiments, for example, as shown, at least a portion of the physical confinement elements 35 can be formed with protrusions, e.g., ridges, extending away from, and typically transverse to, the support surface 34. In this manner, the engagement surfaces 38 arranged along the periphery of the physical confinement elements in the predetermined retention positions can be understood to be formed by sidewall portions of the protrusions 35.

[0040] FIG. 5A shows a portion of a probe cassette 3 holding a single probe 10 in place. The probe 10 includes a body 10-b and a cantilever 10-c extending from a central region 10-d having a flat surface. As can be seen, in this particular configuration, the edges of the probe body 10-b are damaged due to prior handling with tweezers, yet the probe is confined between the sidewalls, engagement surfaces 38, and ridges of the three physical confinement elements 35. At the bottom, the probe is confined by the support surface. Typically, the cassette is used in an upright position, probing the remainder of the support surface under gravity. The pocket is open from the top, at least for picking or placing operations, so that the probe can be conveniently placed into or lifted from the pocket by a pick-and-place tool, such as a pick-and-place tool with a vacuum nozzle positioned to engage the probe, e.g., the flat top surface of the probe body 10-b. Because engagement surfaces 38 are provided around the perimeter of the predefined holding location, i.e., around the probe, the probe is laterally confined within the pocket. Confining the probe between physical confinement elements restricts lateral movement along the support surface. Furthermore, the confinement restricts rotation of the probe along the support surface. Because the probe is constrained by the support surface surface on which it rests as its base, translation and rotation toward the support surface 34 are similarly restricted. Alternatively or additionally, the pick-and-place unit, e.g., unit 24 of FIG. 3, may include, in addition to the XYZ stage, a rotation stage RZ for rotating the probe as needed to properly align the probe within the target probe carrier and to compensate for any rotational variations that occur during processing or are introduced by the source probe carrier.

[0041] 6A and 6B show top and front views, respectively, of another embodiment of a system 2 according to the present disclosure. In FIG. 6B, the viewing direction of FIG. 6B is indicated by VIB. In FIG. 6B, the viewing direction of FIG. 6A is indicated by VIA.

[0042] The top view of Figure 6A shows an exemplary source / destination probe carrier, including a probe wafer 1a, a probe cassette 1b, and a probe gel box 1c, as shown in Figures 5 and 5A. Figures 6A and 6B show additional components 24x, 24y of the pick-and-place unit 24 for controllably translating the probe characterization components and end-effector Z+Rz stages 24z, 24z in the x and y directions. The end-effectors 24z, 24z provide controllable z-positioning and rotation about the z-axis of the probe manipulator 23. The probe characterization components include a laser Doppler vibrometer 211 and a downward-facing camera 214d. An upward-facing camera 214u is also provided. The cameras 214u, 214d form an optical inspection station for performing optical inspection of the probes on opposite sides of each other. Figure 6B shows one of the probe cassettes 1b positioned within the scan head 221 of the AFM sample measurement station. Another of the probe cassettes 1 b is supported by a cassette dock 25 .

[0043] When interpreting the appended claims, it should be understood that the word "comprising" does not exclude the presence of other elements or acts than those recited in a given claim, and the word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. Any reference signs in the claims do not limit their scope. Several "means" may be represented by the same or different items or implemented structures or functions, and the disclosed devices or portions thereof may be combined together or separated into further parts unless otherwise specified. When one claim refers to another claim, this may indicate synergistic advantages achieved by the combination of their respective features. However, the mere fact that certain criteria are recited in mutually different claims does not indicate that a combination of these criteria cannot also be advantageously used. Thus, the present embodiments may include all functional combinations of the claims, and each claim may in principle refer to any preceding claim unless clearly excluded by the context.

Claims

1. 1. A system (2) for automatically unloading AFM probes (10) from a source probe carrier (1) and loading the probes, after being individually characterized, into a destination probe carrier (3) for use by an AFM device or directly into an AFM device, wherein each probe (10) of the AFM probes comprises a cantilever (11) and a tip (12), the system comprising: a cantilever characterization station (21) for characterizing the cantilevers of the individual probes; a tip characterization station (22) for characterizing the tips of the individual probes; a probe manipulator (23) for transferring an AFM probe to said destination probe carrier (3) or directly to said AFM device.

2. The system (2) of claim 1, further comprising a cleaning station for cleaning the cassette and / or individual probes by one or more of ultrasonic immersion, plasma cleaning, or chemical cleaning processes.

3. 3. The system (2) of claim 1 or 2, wherein the probe manipulator (23) is configured to separate individual probes (10) from a source probe carrier (1) having multiple probes.

4. The system (2) according to any one of claims 1 to 3, wherein the cantilever characterization station (21) is configured to characterize cantilevers of individual probes housed in the source probe carrier (1).

5. 5. The system (2) of claim 4, characterized in that the cantilever characterization station (21) comprises a laser Doppler vibrometer (211) for determining dynamic and / or mechanical properties for each probe cantilever in the source probe carrier.

6. 10. A system (2) according to any one of the preceding claims, characterized in that the tip characterization station (22) is configured to characterize the tips of individual probes contained in the source probe carrier (1).

7. 7. The system (2) according to claim 6, characterized in that the tip characterization station (22) comprises a laser Doppler vibrometer for characterizing the tip.

8. 10. The system (2) of any one of the preceding claims, wherein the probe manipulator is configured to automatically remove probes from the source probe carrier by one or more of the following processes: dicing, laser cutting, mechanical yielding, twisting, etching, and / or vacuum manipulation.

9. 10. The system (2) according to any one of the preceding claims, wherein the cantilever characterization station is configured to characterize AFM probe cantilevers based on one or more of the following properties: natural frequency, stiffness, shape, etc.

10. 10. The system (2) of any one of the preceding claims, wherein the tip characterization station is configured to characterize AFM probe tips based on one or more of the following properties: tip shape, stiffness, radius, length, adhesion, conductivity, transparency, aspect ratio, etc.

11. 10. The system (2) according to any one of the preceding claims, further comprising an optical inspection station for performing an optical inspection of one or more sides of the probe.

12. 12. The system (2) of claim 11, wherein the optical inspection station is configured to perform feature assessments related to cleanliness, markings / ID, shape, defect recognition, etc., and / or provide navigation information indicative of the position and / or orientation of the probe.

13. 10. The system (2) according to any one of the preceding claims, further configured to perform functional characterization, for example by performance measurements or by rendering a sample AFM image of a reference sample.

14. 10. A system (2) according to any one of the preceding claims, comprising a controller (20) and a probe characteristic memory (201), wherein the controller 20 is configured to store, for each probe (10), in the probe characteristic memory (201) data characterizing the probe, such as the location of the probe (10) and the measured value CL(i) of the stiffness of the cantilever and the tip characteristic TP(i).

15. 10. A system (2) according to any one of the preceding claims, configured to provide information for use by an AFM device indicative of the location of the probe (10) within the destination probe carrier and the data characterising the probe, such as the measured value CL(i) of the cantilever stiffness and the tip properties TP(i).

16. 16. A system (2) according to claim 15, wherein the information is accessible to an AFM device using the probe in that the information is encoded in a QR code provided on a surface of the destination probe carrier and / or written to a data carrier embedded in the destination probe carrier and / or stored in a database accessible to the AFM imaging device via communication / networking technologies (Internet).

17. 1. A method for automatically unloading AFM probes from a source probe carrier and loading the probes into a destination probe carrier for use by an AFM device after being individually characterized, or loading the probes directly into an AFM device, wherein each probe (10) of the AFM probes comprises a cantilever (11) and a tip (12), the method comprising: receiving a source probe carrier; characterizing the cantilevers of individual probes received in the source probe carrier; characterizing the tips of individual probes received in the source probe carrier; transferring the AFM probe to a destination probe carrier or directly loading the probe into an AFM device.

18. A record carrier (202) containing a program with instructions for causing a programmable device to carry out the steps according to claim 17.

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