Camera alignment device using laser beam and inspection system including same

Abstract

A laser beam based camera alignment device and an inspection system including the same are disclosed. According to one aspect of the present embodiment, there is provided a camera alignment device that uses a laser beam to simply and accurately align a camera with an object to be photographed, and an inspection system including the same.

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This patent application claims priority under 35 U.S.C. § 119(a) of patent application No. 10-2023-0009209, filed in Korea on January 25, 2023, the entire contents of which are incorporated herein by reference. In addition, if this patent application claims priority from countries other than the United States for the same reasons as above, the entire contents of such countries are incorporated herein by reference.

[0002] The present invention relates to an apparatus for aligning a camera with an object to be photographed using a laser beam, and an inspection system including the same. [Background technology]

[0003] The content described in this section merely provides background information for the present embodiment and does not constitute prior art.

[0004] In industrial settings, systems that use cameras to precisely capture specific targets are used for various purposes, such as monitoring and analysis. If the optical axis of a camera used for monitoring within a system is not precisely aligned with the target, erroneous judgments may occur due to errors.

[0005] In the past, to align the optical axes of a camera and a subject, it was necessary to perform cumbersome image analysis of the image captured by the camera (e.g., correcting distortion or noise in the image, analyzing feature points, etc.), or it was necessary to use multiple cameras to align the optical axes. Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one embodiment of the present invention is to provide a camera alignment device that uses a laser beam to simply and accurately align a camera with an object to be photographed, and an inspection system including the same. [Means for solving the problem]

[0007] According to one aspect of this embodiment, an inspection system for inspecting an object while photographing and monitoring the object includes a camera and a camera alignment device that photograph and monitor a laser beam incident from outside or the object to be photographed, and the camera alignment device includes a light source that irradiates a laser beam, a mounting unit on which a reflecting mirror or the object to be photographed is placed (mounted), a reflecting mirror that is mounted on the mounting unit and reflects the beam incident on it toward the camera, a beam splitter that is positioned so that its reflective surface faces the reflecting mirror and reflects a portion of the laser beam emitted from the light source by the reflecting mirror, a stage that adjusts the position and direction of the camera, and a control unit that controls the operation of the light source and controls the stage to align the center and direction between the camera and the reflecting mirror.

[0008] According to one aspect of this embodiment, there is provided a camera alignment device comprising: a light source that irradiates a laser beam; a mounting unit on which a reflecting mirror or a subject to be photographed is mounted; a camera that photographs and monitors a laser beam incident from outside or a subject to be photographed mounted on the mounting unit; a reflecting mirror that is mounted on the mounting unit and reflects the beam incident on it toward the camera; a beam splitter that is positioned so that its reflective surface faces the reflecting mirror and reflects a portion of the laser beam emitted from the light source by the reflecting mirror; a stage that adjusts the position and direction of the camera; and a control unit that controls the operation of the light source and controls the stage to align the center and direction between the camera and the reflecting mirror.

[0009] According to one aspect of this embodiment, the mounting portion includes a jig that can mount the reflecting mirror or the object to be photographed in one position, or includes a groove that can be coupled with a structure formed on the reflecting mirror or the object to be photographed.

[0010] According to one aspect of this embodiment, the subject to be photographed has the same center and direction as the reflecting mirror.

[0011] According to one aspect of this embodiment, the control unit controls the stage to align the directions between the camera and the reflecting mirror, and controls the stage so that the vertical axis or horizontal axis passing through the center of the camera and the reflecting mirror are horizontal to each other.

[0012] According to one aspect of this embodiment, the stage adjusts the distance between the camera and the reflecting mirror.

[0013] According to one aspect of this embodiment, the stage rotates the camera around an axis perpendicular to an axis formed by the camera and the reflecting mirror.

[0014] According to one aspect of this embodiment, there is provided a camera alignment device comprising: a light source that irradiates a laser beam; a mounting unit on which a reflecting mirror or a subject to be photographed is mounted; a camera that photographs and monitors an externally incident laser beam or a subject to be photographed mounted on the mounting unit; a reflecting mirror mounted on the mounting unit and reflecting the beam incident on it toward the camera; a beam splitter that is arranged so that its reflective surface faces the reflecting mirror and reflects a portion of the laser beam emitted from the light source by the reflecting mirror; a rotation axis connected to one end of the beam splitter and that rotates the beam splitter so that the reflective surface of the beam splitter faces the reflecting mirror or not; a stage that adjusts the position and direction of the camera; and a control unit that controls the operation of the light source and controls the stage to align the center and direction between the camera and the reflecting mirror.

[0015] According to one aspect of this embodiment, the reflecting mirror is arranged such that a reflecting surface faces the beam splitter and the camera.

[0016] According to one aspect of this embodiment, the subject to be photographed has the same center and direction as the reflecting mirror.

[0017] According to one aspect of this embodiment, there is provided a camera alignment device comprising: a light source that irradiates a laser beam; a mounting unit on which a reflecting mirror or a subject to be photographed is mounted; a camera that photographs and monitors a laser beam incident from outside or a subject to be photographed mounted on the mounting unit; a reflecting mirror that is mounted on the mounting unit and reflects the beam incident on it toward the camera; a beam splitter that is positioned so that its reflective surface faces the reflecting mirror and reflects a portion of the laser beam irradiated from the light source with the reflecting mirror; a beam dump that receives and extinguishes the laser beam irradiated from the light source and that has passed through the beam splitter; a stage that adjusts the position and direction of the camera; and a control unit that controls the operation of the light source and controls the stage to align the center and direction between the camera and the reflecting mirror.

[0018] According to one aspect of this embodiment, the beam dump prevents the incident laser beam from being exposed to the outside of the laser alignment device.

[0019] According to one aspect of this embodiment, the mounting portion includes a jig that can mount the reflecting mirror or the object to be photographed in one position, or includes a groove that can be coupled with a structure formed on the reflecting mirror or the object to be photographed.

[0020] According to one aspect of this embodiment, the stage adjusts the distance between the camera and the reflecting mirror. [Effects of the Invention]

[0021] As described above, one embodiment of the present invention has the advantage that a camera can be easily and accurately aligned with an object to be photographed using a laser beam. [Brief explanation of the drawings]

[0022] [Figure 1] 1 is a diagram showing a configuration of an inspection system according to an embodiment of the present invention. [Figure 2] 10A and 10B are diagrams illustrating an example of the operation of the camera alignment device according to the embodiment of the present invention. [Figure 3] 10A and 10B are diagrams illustrating an example of the operation of the camera alignment device according to the embodiment of the present invention. [Figure 4] 10A and 10B are diagrams illustrating an example of the operation of the camera alignment device according to the embodiment of the present invention. [Figure 5] FIG. 1 is a diagram showing the configuration of a beam dump according to an embodiment of the present invention. [Figure 6a-b] 10A and 10B are diagrams illustrating a process of aligning a camera direction by a camera alignment device according to an embodiment of the present invention; [Figure 7] 10A and 10B are diagrams illustrating a process of aligning the center of a camera using a camera alignment device according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0023] Since the present invention can be modified in various ways and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail. However, this is not intended to limit the present invention to the specific embodiments, and it should be understood that the present invention includes all modifications, equivalents, and alternatives within the spirit and technical scope of the present invention. Throughout the drawings, like reference numerals are used to refer to like elements.

[0024] Terms such as "first, second, A, B" may be used to describe various components, but the components are not limited by these terms. These terms are used only to distinguish one component from another. For example, a first component can be termed a second component, and similarly, a second component can be termed a first component, without departing from the scope of the present invention. The term "and / or" includes any combination of multiple associated listed items or multiple associated listed items.

[0025] When a component is said to be "coupled" or "connected" to another component, it should be understood that it can be directly coupled or connected to the other component, but that there can be other components in between. On the other hand, when a component is said to be "directly coupled" or "directly connected" to another component, it should be understood that there are no other components in between.

[0026] The terms used in this application are merely used to describe specific embodiments and are not intended to limit the present invention. A singular expression includes a plural expression unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" and the like should be understood not to preclude the presence or additional possibility of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification.

[0027] Unless defined otherwise, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

[0028] Terms defined in commonly used dictionaries should be construed to have a meaning consistent with the meaning they have in the context of the relevant art, and should not be construed in an idealized or overly formal sense unless expressly defined in this application.

[0029] Furthermore, the configurations, processes, steps, or methods included in the embodiments of the present invention may be shared within the scope of not being technically inconsistent with each other.

[0030] FIG. 1 is a diagram showing the configuration of an inspection system according to an embodiment of the present invention.

[0031] Referring to FIG. 1, an inspection system 100 according to one embodiment of the present invention includes a camera 150 and a camera alignment device, which includes a light source 110, a beam splitter 120, a rotation axis 125, a beam dump 130, a mounting portion 140, a reflecting mirror 145, a stage 160, and a control portion (not shown).

[0032] The inspection system 100 refers to a system that uses a camera 150 to capture and monitor an object 410 (described later with reference to FIG. 4).

[0033] In this case, the camera alignment device aligns the optical axis of a subject (not shown) mounted on the mounting unit 140 with the optical axis of the camera 150, which captures and monitors the subject. The (photography) center of the camera 150 and the center of the subject (not shown) mounted on the mounting unit 140 must coincide, and the vertical or horizontal axes passing through the centers of each object (the subject and the camera) must be parallel and not tilted. Otherwise, errors in monitoring may occur due to misalignment or tilt. Furthermore, in cases where the subject extends in all directions from the center, such as a drill bit, and the entire surface of the subject must be visible, if the centers of the two are not aligned, a problem may occur in which part of the subject is not captured by the camera. The camera alignment device can prevent this problem by simply and perfectly aligning the centers and directions of the subject (not shown) and the camera 150. When the subject (not shown) is mounted on the mounting unit 140 aligned by the camera alignment device, the camera 150 can immediately monitor the subject (not shown) in an aligned state.

[0034] The light source 110 emits a laser beam toward the beam dump 130. The light source 110 may be implemented as a laser beam emitting device, such as a laser diode, and emits the laser beam toward the beam dump 130. The wavelength of the laser beam has a wavelength band that can be observed by the camera 150. For example, if the camera 150 is a device that receives and monitors a beam in the visible light wavelength band, the light source 110 may emit a laser beam having a visible light wavelength band. As another example, if the camera 150 is a device that receives and monitors a beam in the infrared or ultraviolet wavelength band, the light source 110 may emit a laser beam having an infrared or ultraviolet wavelength band. There may be no additional device (air as a medium) on the path between the light source 110 and the beam dump 130, or there may be a device implemented as a medium that does not change the path of the laser beam (including the laser beam split by a beam splitter).

[0035] Beam splitter 120 is disposed between light source 110 and beam dump 130 with its reflective surface facing reflective mirror 145, and reflects a portion of the laser beam emitted from light source 110 by reflective mirror 145. Beam splitter 120 splits the laser beam emitted from light source 110 toward reflective mirror 145 and beam dump 130 at a ratio of 5:5 to 9:1. A portion of the laser beam emitted from light source 110 passes through beam splitter 120, is reflected by reflective mirror 145, and is reflected again by reflective mirror 145 (after passing through beam splitter 120) to enter camera 150.

[0036] One end of the beam splitter 120 is connected to a rotation axis 125 and can rotate. Under the control of a control unit (not shown), the beam splitter 120 rotates around the rotation axis 125, and may or may not be positioned so that its reflective surface faces the reflecting mirror 145 or the mounting unit 140. In the process of adjusting the center and direction between the camera 150 and the reflecting mirror 145, the beam splitter 120 must be positioned so that its reflective surface faces the reflecting mirror 145 or the mounting unit 140. However, after the adjustment process is complete, when the camera 150 photographs and monitors a subject (not shown) mounted on the mounting unit 140, if the camera 150 is positioned as described above, this may cause inconvenience during monitoring. Therefore, one end of the beam splitter 120 is connected to the rotation axis 125 and can rotate, and may or may not be positioned so that its reflective surface faces the reflecting mirror 145 or the mounting unit 140.

[0037] Beam dump 130 receives the laser beam emitted from light source 110 and passing through beam splitter 120. Beam dump 130 receives the laser beam that passes through beam splitter 120 but is not reflected by reflecting mirror 145, preventing the laser beam from being exposed to the outside of the camera alignment device. In addition, beam dump 130 is implemented with the structure shown in Fig. 5, thereby preventing the laser beam incident on it from traveling back in the direction of its incidence (toward the beam splitter).

[0038] FIG. 5 is a diagram showing the configuration of a beam dump according to an embodiment of the present invention.

[0039] Referring to FIG. 5, the beam dump 130 according to the embodiment of the present invention includes a housing 510, a protrusion 520, a convex mirror 530, and beam blocking portions 540 and 545.

[0040] The housing 510 has an inverted "L" or "L" shape, and is embodied so that the laser beam is incident therein and the housing 510 has a space large enough to accommodate the remaining components of the beam dump 130 except for itself.

[0041] An inlet 515 is formed at the end of the housing 510 facing the beam splitter 120, allowing the beam that has passed through the beam splitter 120 to enter the housing 510. The inlet 515 is implemented in the housing 510 to be at least larger than the width of the laser beam emitted from the light source 110, allowing the laser beam that has passed through the beam splitter 120 to enter the housing 510.

[0042] The protrusion 520 protrudes from the end of the housing 510 farthest from the beam splitter 120 toward the inside of the housing 510 and disperses the incident laser beam. The protrusion 520 has a structure that protrudes from the farthest end (of the housing 510) on the path of the laser beam that has entered the housing 510 through the inlet 515. The protrusion 520 protrudes in a cone or polygonal pyramid shape and disperses the laser beam that has entered the housing 510 and passed through the convex mirror 530. The laser beam is dispersed by the protrusion 520, so that it can be more easily extinguished inside the housing.

[0043] The convex mirror 530 is located at a corner of the housing and diverges and reflects the laser beam incident on the inlet 515 toward the protrusion 520. The laser beam is diverged by the convex mirror 530 and reflected toward the protrusion 520, so that the laser beam can be more easily extinguished in the beam dump 130 after passing through the protrusion 520.

[0044] Beam blocking portions 540 and 545 are formed at predetermined intervals on each inner wall of the housing 510. The beam blocking portions 540 are formed on the inner wall of the housing 510 from the inlet 515 to the convex mirror 530, and the beam blocking portions 545 are formed on the inner wall of the housing 510 from the convex mirror 530 to the protrusion 520. Each beam blocking portion 540 protrudes from the inner wall of the housing 510 into the housing 510, with the beam blocking portions 540 protruding at an angle in a direction away from the inlet 515 and the beam blocking portions 545 protruding at an angle in a direction away from the convex mirror 530. As a result, even if a laser beam that has entered through the convex mirror 530 and the protrusion 520 is reflected back toward the inlet 515 without being extinguished, its progression is blocked by the beam blocking portions 540 and 545, and the laser beam can be extinguished.

[0045] The beam dump 130 includes the above-mentioned configuration, and receives and extinguishes the laser beam that has passed through the beam splitter 120, thereby preventing the laser beam that has entered it from traveling back toward the beam splitter 120.

[0046] 1 again, the mounting unit 140 mounts the reflecting mirror 145 and the subject (not shown). The mounting unit 140 may include a jig (not shown) that can mount the reflecting mirror 145 and the subject (not shown) in one position, or may include grooves (not shown) that can be coupled with structures formed on the reflecting mirror 145 and the subject (not shown), thereby mounting and fixing the reflecting mirror 145 and the subject (not shown). When the center and direction of the mounting unit 140 on which the reflecting mirror 145 is mounted are aligned with the center and direction of the camera 150 under the control of the control unit (not shown), even if the subject (not shown) is mounted on the mounting unit 140, the center and direction can be aligned with the camera 150.

[0047] The reflecting mirror 145 is mounted on the mounting unit 140 and reflects the beam incident thereon. The reflecting mirror 145 is disposed with its reflective surface facing the beam splitter 120 and the camera 150, so that it receives the laser beam split and reflected by the beam splitter 120 and reflects it toward the camera 150. The reflecting mirror 145 has the same center and direction as a target object (not shown) that will be mounted on the mounting unit 140 later, so that the camera 150, whose center and direction have been adjusted by the reflecting mirror 145, can later also completely capture the target object (not shown).

[0048] The camera 150 captures and monitors an externally incident laser beam or a target (not shown) placed on the mounting unit 140. The camera 150 captures and monitors the incident laser beam reflected by the reflecting mirror 145, and a control unit (not shown) controls the stage 160 to adjust the position and direction of the camera 150 based on the captured image. After the center and direction of the camera 150 are adjusted, the camera 150 captures and monitors the target (not shown).

[0049] The stage 160 adjusts the position and direction of the camera 150 under the control of a control unit (not shown). The stage 160 moves the camera 150 closer to or farther away from the reflecting mirror 145 (on the z-axis) to adjust the distance between the camera 150 and the reflecting mirror 145. Meanwhile, the stage 160 rotates the camera 150 around an axis (x-axis or y-axis) perpendicular to the axis formed by the camera 150 and the reflecting mirror 145 to adjust the direction between the camera 150 and the reflecting mirror 145. As described above, the vertical or horizontal axis passing through the center of the object to be photographed (not shown) and the camera 160 must be parallel to each other without tilting. In other words, the camera 150 and the reflecting mirror 145 must be positioned so that they are facing the same direction without any misalignment. To adjust this, the stage 160 rotates the camera 150 around the x-axis or the y-axis.

[0050] A control unit (not shown) controls the operation of each component in the camera alignment device.

[0051] A control unit (not shown) operates the light source 110 to align the center and direction between the camera 150 and the reflecting mirror 145, and controls the reflecting surface of the beam splitter 120 to face the reflecting mirror 145. As a result, the beam emitted from the light source 110 passes through the beam splitter 120, is reflected by the reflecting mirror 145, and then enters the camera 150. Typically, the laser beam entering the camera 150 may be incident at a position off-center from the camera 150.

[0052] A control unit (not shown) controls the stage 160 based on the incident position of the laser beam on the camera 150 so that the laser beam is incident on the center of the camera 150 .

[0053] First, the control unit (not shown) aligns the directions (degree of misalignment) of the camera 150 and the reflecting mirror 145. If the centers of the camera 150 and the reflecting mirror 145 are aligned with priority, a problem may occur in which the centers of the already aligned camera 150 and the reflecting mirror 145 are misaligned again during the process of aligning the directions of the camera 150 and the reflecting mirror 145. To prevent this, the control unit (not shown) aligns the directions of the camera 150 and the reflecting mirror 145 with priority. The process of aligning the directions of the camera 150 and the reflecting mirror 145 is shown in FIGS. 2 and 6.

[0054] FIG. 2 is a diagram illustrating an example of the operation of a camera alignment device according to an embodiment of the present invention, and FIG. 6 is a diagram illustrating a process of aligning the camera direction by a camera alignment device according to an embodiment of the present invention.

[0055] 2, a control unit (not shown) rotates camera 150 about the x-axis or y-axis (an axis perpendicular to the axis formed by the camera and the reflecting mirror) and then controls stage 160 to adjust the distance (z-axis) between camera 150 and reflecting mirror 145. As shown in FIG. 6a, when the directions of camera 150 and reflecting mirror 145 do not match, the distance between camera 150 and reflecting mirror 145 becomes closer or farther away, causing the position of the laser beam incident on camera 150 to vary. Conversely, as shown in FIG. 6b, when the directions of camera 150 and reflecting mirror 145 match, the position of the laser beam incident on camera 150 does not vary even when the distance between camera 150 and reflecting mirror 145 becomes closer or farther away. The control unit (not shown) varies the distance (z-axis) between camera 150 and reflecting mirror 145 and rotates camera 150 about the x-axis or y-axis until the position of the laser beam incident on camera 150 does not change.

[0056] When the directions of the camera 150 and the reflecting mirror 145 are aligned in the above process, a control unit (not shown) aligns the centers of the camera 150 and the reflecting mirror 145. The process of aligning the centers of the camera 150 and the reflecting mirror 145 is shown in FIGS.

[0057] FIG. 3 is a diagram illustrating an example of the operation of a camera alignment device according to an embodiment of the present invention, and FIG. 7 is a diagram illustrating a process of aligning the centers of cameras by a camera alignment device according to an embodiment of the present invention.

[0058] 3, when the directions of the camera 150 and the reflecting mirror 145 are aligned under the control of a control unit (not shown), the control unit (not shown) controls the stage 160 to align the centers of the camera 150 and the reflecting mirror 145. The control unit (not shown) moves the camera 150 along the x-axis or y-axis (an axis perpendicular to the axis formed by the camera and the reflecting mirror) and controls the stage 160 so that the laser beam is incident on the center of the camera 150. As shown in FIG. 7, when the centers of the camera 150 and the reflecting mirror 145 are aligned, the laser beam is incident on the center of the camera 150. If the laser beam is not incident on the center of the camera 150 based on the monitoring result of the camera 150, the control unit (not shown) moves the camera 150 along the x-axis or y-axis (an axis perpendicular to the axis formed by the camera and the reflecting mirror) and controls the stage 160 so that the laser beam is incident on the center of the camera 150.

[0059] Through this process, the control unit (not shown) aligns both the center and direction between the camera 150 and the reflecting mirror 145. When both the center and direction are aligned, the camera 150 monitors the subject 410 as shown in FIG.

[0060] FIG. 4 is a diagram showing an example of the operation of the camera alignment device according to one embodiment of the present invention.

[0061] 4, a subject 410 to be photographed is mounted on the mounting unit 140 instead of the reflecting mirror 145. As described above, the reflecting mirror 145 has the same center and direction as the subject 410. If the camera 150 and the reflecting mirror 145 are aligned in center and direction through the above process, the subject 410 and the camera 150 will also be aligned in center and direction even when the subject 410 is mounted on the mounting unit 140. To enable the camera 150 to completely monitor the subject 410, a control unit (not shown) controls the reflecting surface of the beam splitter 120 so that it does not face the mounting unit 140. This allows the camera 150 to completely monitor the subject 410.

[0062] The above description merely exemplifies the technical concept of the present embodiment, and various modifications and variations are possible within the scope of the essential characteristics of the present embodiment, as long as they are not deviated from the essential characteristics of the present embodiment. Therefore, the present embodiment is intended to illustrate, rather than limit, the technical concept of the present embodiment, and the scope of the technical concept of the present embodiment is not limited by such examples. The scope of protection of the present embodiment should be interpreted according to the following claims, and all technical concepts within the scope equivalent thereto should be interpreted as being included in the scope of the present embodiment.

[0063] This patent is the result of research conducted with funding from the Korean government (Ministry of Science and ICT) in fiscal year 2022 and support from the National Research Facility Equipment Promotion Center (Project specific number: 1711174168, detailed project number: PG2022004, project name: Improvement of facilities and equipment at the Intelligent Optical Module Research Center).

Claims

1. a light source that emits a laser beam; a mounting portion on which a reflecting mirror or a photographing subject is placed; a camera that captures and monitors an externally incident laser beam or a target placed on the mounting unit; a reflecting mirror placed on the mounting portion and reflecting the beam incident on the mirror toward the camera; a beam splitter arranged so that a reflection surface faces the reflection mirror and reflects a part of the laser beam emitted from the light source by the reflection mirror; a stage for adjusting the position and direction of the camera; a control unit that controls the operation of the light source and controls the stage to align the center and direction between the camera and the reflecting mirror; 1. A camera alignment device comprising:

2. The mounting portion is 2. The camera alignment device according to claim 1, further comprising a jig for placing the reflecting mirror or the object to be photographed in one position, or a groove for coupling with a structure formed on the reflecting mirror or the object to be photographed.

3. The subject to be photographed is 2. The camera alignment device of claim 1, wherein the camera alignment device has the same center and direction as the reflecting mirror.

4. The control unit 2. The camera alignment device of claim 1, wherein the stage is controlled to align the directions between the camera and the reflecting mirror such that a vertical axis or a horizontal axis passing through the center of the camera and the reflecting mirror are horizontal to each other.

5. The stage is 2. The camera alignment device according to claim 1, wherein the distance between the camera and the reflecting mirror is adjustable.

6. The stage is 2. The camera alignment device according to claim 1, wherein said camera is rotated about an axis perpendicular to an axis formed by said camera and said reflecting mirror.

7. 2. The camera alignment device of claim 1, further comprising a rotation axis connected to one end of the beam splitter and configured to rotate the beam splitter so that the reflective surface of the beam splitter faces the reflective mirror or not.

8. The reflecting mirror is 8. The camera alignment device of claim 7, wherein a reflective surface is positioned toward the beam splitter and the camera.

9. The subject to be photographed is 8. The camera alignment device of claim 7, having the same center and direction as the reflecting mirror.

10. 2. The camera alignment device of claim 1, further comprising a beam dump that receives and extinguishes the laser beam emitted from the light source and passing through the beam splitter.

11. The beam dump 11. The camera alignment device of claim 10, wherein the incident laser beam is prevented from being exposed to the outside of the laser alignment device.

12. In an inspection system that inspects while photographing and monitoring the object, a camera that captures and monitors an externally incident laser beam or a target; A camera alignment device according to any one of claims 1 to 11; An inspection system comprising:

Images