System and method for synchronized valve operation

Abstract

The valve control module includes a controller that houses a real-time operating system for controlling the operation of the valve control module; at least one command signal input connector that communicates with the controller and is connectable to an external device for receiving command signal pulses from an external device; at least one driver circuit that communicates with the controller and is connectable to at least one pilot valve of at least one valve assembly for transmitting actuation signal pulses generated by the controller to at least one pilot valve; and at least one digital input connector that communicates with the controller and is connectable to a position sensor of the valve assembly for receiving stroke signal pulses from a position sensor and communicating the stroke signal pulses to the controller.

Description

Technical Field

[0001] Cross - Reference to Related Applications This application claims priority and all benefits to U.S. Provisional Patent Application No. 63 / 499,500, filed May 2, 2023, for SYSTEMS AND METHODS FOR SYNCHRONIZED VALVE ACTUATION, the entire disclosure of which is hereby incorporated by reference in its entirety.

Background Art

[0002] Actuators are often used to control the operation of valves and other fluid system components. Actuators can be of any number of different designs, including pneumatic, hydraulic, electric, etc. Fluid - driven actuators use a pressurized fluid, such as air, to move one or more fluid - driven actuator members (e.g., pistons, diaphragms, bellows, etc.) to move valve elements (e.g., rotary valve stems, plugs, diaphragms, and / or bellows) to control (e.g., block, measure, direction - control) the system fluid passing through the valve.

[0003] Conventional actuated valve assemblies use a spring - biased pneumatic actuator for the two - position operation of the valve between an actuated position that responds to pressurization of the actuator inlet port to move the actuator piston and connected valve member against a biasing spring, and a normal or return position that responds to the discharge of the actuator inlet pressure and the spring movement of the actuator piston and valve member.

[0004] Variations in valve cycle flow performance can be caused by many different conditions or variables, including, for example, variations in the stiffness of the actuator spring, the applied actuator pressure, the rate of accumulation of the actuator pressure, and the rate of discharge of the actuator pressure. Such variations in valve cycle time can result in inconsistent or undesirable fluid flow conditions, which can be exacerbated when using a multi - valve configuration to deliver fluid to or from a system. [Overview of the project]

[0005] In exemplary embodiments of the present disclosure, a method is envisioned for controlling the flow rate of fluid in a fluid system, the fluid system comprising an actuated valve assembly including an actuator having an actuator member biased toward a normal position, and an inlet port configured to receive pressurized fluid to move the actuator member toward the actuated position. In the exemplary method, a command signal pulse is received by a valve controller. In response to the receipt of the command signal pulse, after a predetermined opening delay, an actuated signal pulse is transmitted from the valve controller to a pilot valve. In response to the pilot valve receiving the actuated signal pulse, the pilot valve is actuated to direct the pressurized fluid toward the actuator inlet port, thereby moving the actuator member toward the actuated position. In response to the movement of the actuator member toward the actuated position, a stroke signal pulse is transmitted from a position sensor assembled with the valve assembly to the valve controller. In response to the termination of the command signal pulse, after a predetermined closing delay, the transmission of the actuated signal pulse to the pilot valve is terminated. In response to the termination of the actuated signal pulse, the pilot valve is actuated to divert the pressurized fluid away from the actuator inlet port, thereby biasing and moving the actuator member toward the normal position. In response to the actuator member moving to its normal position, the transmission of stroke signal pulses to the valve controller ends. Based on the time between the transmission of the actuation signal pulse and the reception of the stroke signal pulse, a predetermined adjusted opening delay is calculated. Based on the time between the end of the actuation signal pulse and the end of the stroke signal pulse, a predetermined adjusted closing delay is calculated.

[0006] In another exemplary embodiment of the present disclosure, the valve control module includes a controller housing a real-time operating system for controlling the operation of the valve control module; at least one command signal input connector that communicates with the controller and is connectable to an external device for receiving command signal pulses from an external device; at least one driver circuit that communicates with the controller and is connectable to at least one pilot valve of at least one valve assembly for transmitting actuation signal pulses generated by the controller to at least one pilot valve; and at least one digital input connector that communicates with the controller and is connectable to a position sensor of a valve assembly for receiving stroke signal pulses from a position sensor and communicating the stroke signal pulses to the controller.

[0007] In another exemplary embodiment of the present disclosure, the fluid supply system includes at least one actuated valve assembly, a valve control module, and at least one position sensor. The at least one actuated valve assembly includes an actuator having an actuator member that is biased toward a normal position, and a pilot valve connected to the inlet port of the actuator and configured to operate between a first configuration that supplies pressurized fluid to the actuator inlet port to move the actuator member to the actuated position, and a second configuration that diverts pressurized fluid from the actuator inlet port to bias the actuator member toward the normal position. The valve control module includes a valve controller configured to receive a command signal pulse and, after a predetermined opening delay, transmit an actuated signal pulse from the valve controller to the pilot valve in order to actuate the pilot valve to the first configuration and for the corresponding movement of the actuator member toward the actuated position. The at least one position sensor is assembled with the at least one valve assembly and is configured to transmit a stroke signal pulse to the valve controller in response to the movement of the actuator member toward the actuated position. The valve controller is configured to calculate a predetermined adjusted opening delay based on the time between the transmission of the actuated signal pulse and the reception of the stroke signal pulse.

[0008] In another exemplary embodiment of the present disclosure, a method is devised for synchronizing the opening operation of a first valve assembly with the closing operation of a second valve assembly. In the exemplary method, in response to the reception of a first command signal pulse, after a predetermined opening delay, a first actuation signal pulse is transmitted to a first pilot valve to direct pressurized fluid to the first actuator inlet port of the first actuator of the first valve assembly, resulting in the opening operation of the first valve assembly. In response to the termination of the second command signal pulse, which is simultaneous with the reception of the first command signal pulse, the transmission of the second actuation signal pulse to the second pilot valve is terminated, diverting pressurized fluid from the second actuator inlet port of the second actuator of the second valve assembly, resulting in the spring-driven closing operation of the second valve assembly. The predetermined opening delay includes an offset corresponding to at least one of the following: (a) the delay between the transmission of the first activation signal pulse and the opening operation of the first valve assembly, measured in a previous opening operation of the first valve assembly; (b) a nonlinear change in flow rate during the opening operation of the first valve assembly; (c) a flow rate spike due to the choked volume between the valve seat of the first valve assembly and the upstream orifice limit; and (d) a flow delay due to the choked volume between the valve seat of the first valve assembly and the downstream orifice limit. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram of a fluid supply system according to an exemplary embodiment of the present disclosure. [Figure 2] This is a graphical diagram of a signal pulse configuration for controlling the timing of the operation of an actuated valve assembly, according to an exemplary embodiment of the present disclosure. [Figure 2A] This is a flowchart illustrating a process for controlling the flow rate of a fluid in a fluid system according to exemplary embodiments of the present disclosure. [Figure 3] This is a schematic diagram of a fluid supply system according to an exemplary embodiment of the present disclosure. [Figure 3A]This is a top view of an electronic valve control module according to an exemplary embodiment of the present disclosure. [Figure 4] This is a schematic diagram of a plurality of valve switching systems according to an exemplary embodiment of the present disclosure. [Figure 5A] This is a graphical diagram showing the total flow rate of fluid passing through synchronized switching valves. [Figure 5B] This is a graphical diagram of the total fluid flow rate through synchronized switching valves, where an operating delay is applied to the opening valve. [Figure 6] This is a graphical diagram of flow through synchronized switching valves with orifice restrictions, where an operating delay is applied to the opening valve. [Figure 7] This is a graphical diagram of the flow curve of a valve with a choked volume between the upstream orifice limit and the valve seat, superimposed on the flow curve of a valve with opening delay and closing advance applied to the operating sequence. [Figure 8] This is a graphical representation of the flow curve of a valve with a choked volume between the downstream orifice limit and the valve seat, superimposed with the flow curve of a valve with early opening and early closing applied to the operating sequence. [Modes for carrying out the invention]

[0010] Various aspects, concepts, and features of the present invention may be described and illustrated herein as being embodied in combination in exemplary embodiments, but these various aspects, concepts, and features may be used individually or in various combinations and partial combinations in many alternative embodiments. Unless expressly excluded herein, all such combinations and partial combinations are intended to be within the scope of the present invention. Furthermore, various alternative embodiments relating to various aspects, concepts, and features of the present invention, such as alternative materials, structures, configurations, methods, circuits, devices and components, and alternatives relating to formation, fit and function, may be described herein, but such descriptions are not intended to be a complete or exhaustive list of available alternative embodiments, whether currently known or to be developed in the future. Those skilled in the art will readily adopt one or more aspects, concepts, or features of the invention for additional embodiments and uses within the scope of the present invention, even if such embodiments are not expressly disclosed herein. Furthermore, some features, concepts, or aspects of the present invention may be described herein as preferred mechanisms or methods, but such descriptions are not intended to suggest that such features are required or necessary unless expressly stated otherwise. Furthermore, while illustrative or representative values ​​and ranges may be included to aid in understanding this disclosure, such values ​​and ranges should not be interpreted restrictively and are intended to be critical values ​​or ranges only when explicitly stated as such. Parameters identified as “approximately” or “about” the specified value are intended to include the specified value, values ​​within 5% of the specified value, and values ​​within 10% of the specified value, unless otherwise specified. In addition, drawings accompanying this disclosure are understood to be, though not required, to be to scale and therefore should be understood as teaching various ratios and proportions evident in the drawings.Furthermore, various aspects, features, and concepts may be expressly identified herein as inventive or forming part of an invention, but such identification is not intended to be exclusive. Rather, there may be aspects, concepts, and features of the invention fully described herein that are not expressly identified in such way or as part of a particular invention, and instead, the present invention is described in the appended claims. Illustrative descriptions of methods or processes are not limited to including all steps as necessary in all cases, nor is the order in which the steps are presented necessarily or required unless expressly stated otherwise.

[0011] In systems that utilize valves that are frequently cycled to deliver a controlled dose of a fluid (e.g., a chemical dose in atomic layer deposition or ALD processes), deviations or mismatches in the timing of valve opening and / or closing operations can result in undesirable deviations or mismatches in the resulting volume of the dose, regardless of the precision with which the valve flow rate is controlled. In some applications, the desired dose is established based on a known controlled valve flow rate, from which the required valve opening time is determined.

[0012] According to exemplary embodiments of the present disclosure, an actuated valve assembly may include a control system configured to identify deviations in the operating timing of the valve's opening and / or closing, and to adjust the initiation of pressurization and depressurization of the actuator in response to the identified deviations maintaining the time for which the desired valve is open for a consistent and desired volume of fluid dosage.

[0013] In the exemplary system 100, schematically referring to Figure 1, the valve assembly 110 includes a valve body 111, a valve element 114 (e.g., stem, diaphragm), and an actuator 115. The valve body 111 includes a valve seat 112 positioned between an inlet port 113-1 and an outlet port 113-2, and the valve element 114 is assembled to the valve body and is movable relative to the valve seat between a closed position that blocks flow between the inlet and outlet ports and an open position that allows flow between the inlet and outlet ports. The actuator 115 is assembled to the valve body 111 and includes a fluid-driven actuator member 116 (e.g., piston) operatively connected to the valve element so as to move the valve element 114 from a first (e.g., closed) position to a second (e.g., open) position in response to the supply of pressurized working fluid to the actuator's inlet port 117.

[0014] To control the operation of valve 110, the actuator inlet port 117 is connected to a pressurized working fluid source 105 by a pilot valve 120 (e.g., a solenoid), which supplies pressurized working fluid (e.g., air) from the pressurized working fluid source to the actuator inlet port in a powered (e.g., open) configuration to move the actuator member 116 against the biasing element 118 (e.g., a spring) of actuator 115, moving the valve element 114 from a first position to a second position, diverting or discharging the pressurized working fluid from the actuator inlet port, and in a non-powered (e.g., closed) configuration, allowing the actuator member to move by the biasing element, moving the valve element from the second position to the first position. In the illustrated system 100, the operation of pilot valve 120 is initiated by a control module 130 (e.g., a circuit board-based device) configured to transmit an operating signal pulse to the pilot valve to operate the pilot valve between an energized and an unenergized configuration. The control module 130 can be programmed or instructed (for example, by a "recipe") to control the timing of opening and closing the valve assembly 110 so as to provide a time for the desired valve to open corresponding to a desired fluid volume, based on a predetermined flow rate through the valve opening assembly.

[0015] To monitor and control the actual timing and duration of the valve open state, the actuator 115 may include a position sensor 119 configured to generate a stroke signal pulse when the actuator member 116 reaches a position during the operating stroke (e.g., an intermediate stroke position, e.g., the midpoint of the actuator stroke, or a position corresponding to the midpoint of the flow curve), while identifying the operation of the actuator member and valve element 114. Many different types of position sensor arrangements can be utilized, including, for example, a proximity sensor installed in the actuator piston chamber (e.g., via the actuator cap) and configured to detect the actuator piston when it reaches a predetermined stroke position while the actuator piston is operating. The position sensor 119 communicates electronically (e.g., via wired or wireless communication) with the control module 130 and sends a stroke signal pulse to the control module to confirm the operation and indicate the timing of the operation to the control module.

[0016] If there is a timing discrepancy in the opening and / or closing of the valve assembly 110, as identified by the stroke signal pulses delivered to the control module 130, the system 100 may be configured to adjust the timing of the actuation signal pulses to the pilot valve 120 to compensate for these deviations and, for example, maintain a consistent desired dosing timing and volume. In some such systems, the control module can receive command signal pulses from a program or recipe supply device 108 (e.g., an external computer), and the local control module 130 delays the transmission of the actuation signal pulse to the pilot valve 120 by a predetermined opening delay time OD based on the delay measured between the transmitted actuation signal pulse and the received stroke signal pulse in one or more previous cycles. By configuring the local control module 130 to apply these actuation adjustments, the conformity to the pulse timing of the actuation signal is controlled locally in the control module, while allowing it to be maintained without changing the computer-supplied program or recipe. In other configurations, the program or recipe that determines the dosing frequency, volume, and timing is stored in the control module, thereby eliminating communication with an external device.

[0017] The valve control module 130 is configured to control the operation of one or more valve assemblies based on a program or recipe supplied by a connected (e.g., wired or wireless) computer or other device. In the illustrated embodiment, the valve control module 130 includes a main power port 131 for receiving power from a connected power source 103 (e.g., battery, power outlet) and a controller (e.g., microprocessor or MPU) 132 that houses a real-time operating system for controlling the operation of the valve control module 130. The controller 132 has a command signal input connector 133 that is connectable (e.g., wired or wireless) to an external computer 108 to receive command signal pulses and circuit-communicates with a driver circuit 134 that is connectable (e.g., wired or wireless) to a pilot valve 120 of the valve assembly 110 for transmitting pilot valve actuation signal pulses received from the controller 132. The controller 132 receives stroke signal pulses from the position sensor and circuit-communicates with a digital input connector 135 that is connectable (e.g., wired or wireless) to the position sensor 119 of the valve assembly 110 in order to transmit the stroke signal pulses to the controller. As shown, the valve control module 130 circuit-communicates with the controller 132 to transmit valve cycle data from the controller to an external computer 108 or other external device, for example, to monitor valve performance, by including, for example, a communication port 136 such as any suitable wired communication port (e.g., general-purpose synchronous / asynchronous receiver / transmitter, or USART, Ethernet, EtherCAT®, or Modbus®) or any suitable wireless communication port (e.g., Bluetooth®, Wi-Fi, cellular communication, or RFID).

[0018] According to exemplary embodiments of the present disclosure, in an exemplary method for controlling the dosage of fluid supplied by one or more actuated valve assemblies, the computer 108 transmits a command signal pulse C (time t0, Figure 2) to the valve control module 130 (e.g., to the command signal input connector 133) according to a fluid dosing recipe. Upon receiving the command signal pulse C (e.g., communicated from the signal input connector 133 to the controller 132), the controller starts a delay timer configured to delay the transmission of an actuation signal pulse A (at time t1) from the controller 132 to the pilot valve 120 (e.g., via the driver circuit 134) by a predetermined opening delay time OD. Upon receiving the actuation signal pulse A, the pilot valve 120 is operated to supply pressurized working fluid from the fluid pressure source 105 to the actuator inlet port 117 of the actuated valve assembly 110. When the fluid supplied to the actuator inlet port 117 reaches a pressure sufficient to overcome the biasing force of the actuator biasing member 118 and any other force resisting the operation of the valve (e.g., frictional force of the piston and / or valve elements), the actuator member 116 moves toward the open position, activating the position sensor 119 when the actuator member reaches a predetermined stroke position. The position sensor 119 transmits a corresponding stroke signal pulse S (at time t2) to the valve control module 130 (e.g., to the controller 132 via the digital input connector 135), and the controller 132 calculates any delay between the transmission of the actuation signal pulse A to the pilot valve 120 and the reception of the stroke signal pulse S from the position sensor 119.

[0019] Based on the fluid dosing recipe, the computer 108 terminates sending a command signal pulse C to the valve control module 130 after a programmed time (at time t3) determined by the desired volume and expected flow rate through the open valve assembly 110. Once the command signal pulse C has terminated, the controller 132 starts a delay timer configured to delay the termination of the actuation signal pulse A from the valve control module 130 to the pilot valve 120 by a predetermined closing delay time CD (at time t4). Once the actuation signal pulse A has terminated, the pilot valve 120 is operated (e.g., de-energized) to divert the pressurized working fluid from the actuator inlet port 117 of the actuated valve assembly 110. When the pressure applied to the actuator inlet port 117 is reduced sufficiently so that it cannot be overcome by the biasing force of the actuator biasing member 118, the actuator member 116 moves toward the closed position, and when the actuator member moves beyond a predetermined stroke position, the position sensor 119 is deactivated, thereby ending the transmission of stroke signal pulses (via the digital input connector 135) to the controller 132 (at time t5), and the controller calculates the delay between the termination of the actuation signal pulses to the pilot valve 120 and the termination of the stroke signal pulses received from the position sensor 119.

[0020] If there are deviations in factors affecting the valve operation delay (e.g., working fluid pressure, frictional forces between the valve and actuator), the controller 132 may be configured to set a target opening time TOT between the reception of a command signal pulse from the computer 108 and the reception of a stroke signal pulse from the actuator position sensor 119 in order to maintain consistent valve opening stroke timing over repeated cycles of the valve assembly 110. This constant target opening time TOT, when measured by the position sensor 119, may be selected to be greater than any expected operation delay, and as a result, the opening delay OD may be modified to set a substantially constant target opening time TOT when combined with the measured operation delay or measured opening response MOR (i.e., the time between the generation of the operation signal pulse and the reception of the stroke signal pulse).

[0021] In some such systems, the calculation of the opening delay OD for valve cycle n may be based on the measured opening response MOR of the preceding valve cycle (n-1), for example, OD n =TOT-MOR n-1 This method utilizes the assumption that the valve stroke delay for consecutive valve cycles is relatively uniform and its variation is negligible. In other systems, the iteratively determined opening delay OD can be modified using one or more algorithms or other such numerical schemes to optimize flow accuracy, flow consistency, and / or valve / actuator performance. For example, the opening delay OD can be attenuated by an opening delay calculation that incorporates, for example, a damping factor DFO. For example, the opening delay OD for valve cycle n is OD n =TOT-(1-DFO)×OD n-1 -DFO×MOR n-1 The damping coefficient DFO can be calculated as follows, and the damping coefficient DFO can be set to a value α between 0 and 1 to provide the desired degree of damping. In other configurations, the opening delay OD may be based at least in part on the average measured opening response MOR over a certain number (x) of preceding valve cycles, for example, OD n =TOT-(MOR n-x+…+MOR n-1 ) / x. Further, other algorithms or numerical schemes can be utilized to appropriately adjust the opening delay OD.

[0022] When there are deviations in situations that affect the delay of the valve operation (such as operating fluid pressure, frictional forces of the valve and actuator, etc.), in order to maintain a consistent closing stroke timing over repeated cycles of the valve assembly 110, the controller 132 can be configured to provide a target closing time TCT between the end of the command signal pulse from the computer 108 and the end of the stroke signal pulse from the actuator position sensor 119. This constant target closing time TCT can be selected to be greater than any expected operating delay when measured by the position sensor 119, such that when combined with the measured operating delay or the measured closing response MCR (i.e., the time between the end of the operating signal pulse and the end of the stroke signal pulse), the closing delay CD can be changed to provide a substantially constant target closing time TCT.

[0023] In some such systems, the calculation of the closing delay CD for valve cycle n may be well based on the measured closing response MCR of the immediately preceding valve cycle (n - 1), for example, CD n = TCT - MCR n-1 utilizes the assumption that the valve stroke delay for consecutive valve cycles is relatively uniform and the variation is negligible. In other systems, the repeatedly determined closing delay CD is corrected using one or more algorithms or other such numerical schemes to optimize the flow rate accuracy, flow rate consistency, and / or the performance of the valve / actuator. As an example, the closing delay CD can be attenuated, for example, by a closing delay calculation incorporating an attenuation coefficient DFC. As an example, the closing delay CD for valve cycle n is CD n = TCT - (1 - DFC) × CD n-1 - DFC × MCR n-1The damping coefficient DFC can be calculated as follows, and the damping coefficient DFC can be set to a value α between 0 and 1 to provide the desired degree of damping. In further configurations, the closing delay CD may be based at least in part on the average measured closing response MCR over a certain number (x) of preceding valve cycles, for example, CD n =TCT-(MCR n-x +…+MCR n-1 ) / x. Furthermore, other algorithms or numerical schemes can be used to appropriately adjust the closing delay CD.

[0024] In an exemplary process 1000 for controlling the flow rate of fluid in a fluid system using a valve control module (e.g., one of the valve control modules described herein), as shown in the flowchart of Figure 2A, at 1010, the controller of the valve control module polls for a command signal from an external device (e.g., from a command signal input connector). When a command signal is received (at 1020), the controller starts a delay timer and increments the open delay OD (at 1030). The delay timer is polled by the controller (at 1040), and when a predetermined open delay OD time is reached (at 1050), an actuation signal is transmitted from the controller to the pilot valve at 1080 (e.g., via a driver circuit), thereby acting the pilot valve to the actuation (e.g., open) position for pneumatic actuation of the valve assembly. The controller continues polling for command signals (at 1090), and when no more command signals are received (at 1100), the controller starts a delay timer and increments the closing delay CD (at 1110). The delay timer is polled by the controller (at 1120), and when the predetermined closing delay CD is reached (at 1130), the actuation signal terminates (at 1140), and the pilot valve closes to return the valve assembly to its normal (e.g., closed) position.

[0025] In applications requiring continuous controller monitoring and precise control of the transmission of operating signals, controller hardware-based failures or errors can occur in the valve control module, causing loss or delays in signal pulses and potentially leading to unacceptable fluid supply (e.g., in terms of volume / time and / or timing). In some embodiments, the valve control module controller may be configured to initiate a pass-through mode in response to the reception or identification of an error signal corresponding to, for example, failure to receive or recognize the transmission of a pulse or the reception of a significantly delayed pulse transmission. As shown in the illustrated embodiment of Figure 1, the valve control module 130 may include a relay switch 137 connected between a command signal input connector 133 and a driver circuit 134, which may be operated (e.g., activated or deactivated) by the controller 132 in response to the controller receiving an error signal, resulting in subsequent command signal pulses generated by an external computer 108 and transmitted through the command signal input connector 133 bypassing the controller and being sent directly to the driver circuit 134 to transmit the command signal pulses to the pilot valve 120. The resulting operation of the valve assembly continues according to the supplied program or recipe without (potentially incorrect) adjustment by the valve control module. In response to the receipt of an error signal, the controller 132 may be further configured to send a notification signal to the external computer 108 via the communication port 136 to identify the detected error and the resulting entry into pass mode. The return of the valve control module 130 from pass mode to standard operating mode may be configured to require a communication signal from the external computer 108 via the communication port 136, which directs manual user operation of a relay switch 137 and / or a reset of the valve control module.

[0026] In some embodiments, the valve control device may be configured to independently control the operation of multiple valve assemblies. Figure 3 shows an exemplary system 200 including multiple valve assemblies 210a-c (e.g., three, or more or fewer, as shown), which may (but do not necessarily) be similar to (or not necessarily) the valve assembly 110 in Figure 1, and the operation of the corresponding pilot valves 220a-c is initiated by a control module 230 (e.g., a circuit board-based device) configured to transmit actuation signal pulses to the corresponding pilot valves to operate the pilot valves between a powered (e.g., open) configuration and an unpowered (e.g., closed) configuration. The control module 230 may be programmed or instructed (e.g., by a "recipe") to control the opening and closing timing of each of the valve assemblies 210a-c to provide timing and duration for a desired valve to open corresponding to a desired fluid volume, based on a predetermined flow rate through the open valve assembly.

[0027] If there is a timing discrepancy in the opening and / or closing of the selected valve assemblies 210a-c, as identified by the stroke signal pulses delivered to the control module 230, the system 200 may be configured to correct these deviations by adjusting the timing of the actuation signal pulses to the pilot valves 220a-c, thereby maintaining, for example, a consistent desired dosing timing and volume. In some such systems, the control module can receive command signal pulses from a program or recipe supply device 208 (e.g., an external computer), and the local control module 230 delays the transmission of actuation signal pulses to the selected pilot valves 220a-c by a predetermined opening delay time OD based on the delay measured between the transmitted actuation signal pulse and the received stroke signal pulse in one or more previous cycles. By configuring the local control module 230 to apply these actuation adjustments, the conformity to the pulse timing of the actuation signals is controlled locally by the control module, while allowing it to be maintained without changing the computer-supplied program or recipe. In other configurations, the program or recipe that determines the dosing frequency, volume, and timing is stored in the control module, thereby eliminating communication with an external device.

[0028] The valve control module 230 is configured to control the operation of valve assemblies 210a-c based on a program or recipe supplied by a connected (e.g., wired or wireless) computer or other device. In the illustrated embodiment, the valve control module 230 includes a main power port 231 for receiving power from a connected power source 203 (e.g., battery, power outlet) and a controller (e.g., microprocessor or MPU) 232 that houses a real-time operating system for controlling the operation of the valve control module 230. The controller 232 has a plurality of command signal input connectors 233a-c that are connectable (e.g., wired or wireless) to an external computer 208 to receive command signal pulses and circuit-communicates with a plurality of corresponding driver circuits 234a-c that are connectable (e.g., wired or wireless) to the corresponding pilot valves 220a-c of the valve assemblies 210a-c for transmitting pilot valve actuation signal pulses received from the controller 232. The controller 232 circuit communicates with a number of digital input connectors 235a-c that are connectable (e.g., wired or wireless) to the position sensors 219a-c of the corresponding valve assemblies 210a-c in order to receive stroke signal pulses from the position sensors and transmit the stroke signal pulses to the controller. As shown, the valve control module 230 circuit communicates with the controller 232 to transmit valve cycle data from the controller to an external computer 208 or other external device, for example, to monitor valve performance, by including a communication port 236 such as any suitable wired communication port (e.g., general-purpose synchronous / asynchronous receiver / transmitter, or USART, Ethernet, EtherCAT®, or Modbus®) or any suitable wireless communication port (e.g., Bluetooth®, Wi-Fi, cellular communication, or RFID).

[0029] The valve control module 230 may include a number of relay switches 237a-c, which are connected between the corresponding command signal input connectors 233a-c and the corresponding driver circuits 234a-c, and may be operated (e.g., activated or deactivated) by the controller 232 in response to the controller receiving an error signal (such as those described above), and as a result, subsequent command signal pulses generated by the external computer 208 and transmitted through the command signal input connectors 233a-c bypass the controller and are transmitted directly to the driver circuits 234a-c to send the command signal pulses to the pilot valves 220a-c. The resulting operation of the valve assembly continues according to the supplied program or recipe without (potentially incorrect) adjustment by the valve control module. In response to the reception of an error signal, the controller 232 may be further configured to send a notification signal to the external computer 208 via the communication port 236 to identify the detected error and the resulting entry into pass mode. The return of the valve control module 230 from pass-through mode to standard operating mode may be configured to require a communication signal from an external computer 208 via the communication port 236, which directs the reset of the valve control module by manual user operation of relay switches 237a-c and / or operation of the relay switches (e.g., activation or deactivation).

[0030] Figure 3A shows an exemplary embodiment of a circuit board (PCB) based valve control module 230' having six command signal input connectors 233a'~f', six driver circuits 234a'~f', six controller bypass relay switches 237a'~f', and a controller 232' that communicates with six digital input connectors 235a'~f', allowing it to independently control and operate up to six valve assemblies, together with the main power port 231' and communication port 236' as described above. In other embodiments, the valve control device may be configured to independently control any appropriate number of valve assemblies (i.e., fewer or more than six valve assemblies). In some such configurations, the controller 232' may be configured to simultaneously monitor the position of each of the multiple valve assemblies in real time during system operation. This monitoring is used to identify operational inconsistencies between valve assemblies and / or operational inconsistencies over time, to alert the system operator (e.g., via communication with an external computer or other such device), and / or to initiate and / or modify operational adjustments by the controller on one or more valve assemblies, for example, to maintain consistent, synchronized, and / or properly sequenced operation of multiple valve assemblies.

[0031] In some embodiments, a multi-valve fluid system may be configured to deliver fluid from a single source to multiple locations or outlets. As an example, as schematically shown in Figure 4, a multi-valve switching system 300 may utilize two or more valves 310-1, 310-2 downstream from a mass flow controller 301 (MFC) or other substantially constant flow source. In many such applications, it may be desirable to synchronize the operation of the switching valves 310-1, 310-2 so that the total amount of flow through the valves remains substantially constant when at least one valve is operating in the closed position and at least one valve is operating in the open position, in order to maintain a substantially constant flow rate from the flow source (for example, to avoid rapid pulses or downstream flow rate fluctuations that the MFC cannot adequately compensate for). In an exemplary application, a divert system for an atomic layer deposition (ALD) system includes a first operating valve 310-1 that delivers a pulsed fluid flow from the MFC to the ALD process line P, and a second operating valve 310-2 that delivers a pulsed fluid flow from the MFC to a waste or drain line D when the first operating valve is closed, so that no pulses in the fluid flow to the process line occur in the MFC, and a substantially constant fluid flow rate can be maintained.

[0032] Numerous factors influence variations in the total flow rate through synchronized switching valves during operation. For example, different pneumatically operated valves may have different actuator pressures required for operation, different flow rates through the actuator's supply or discharge lines, different valve stroke distances / times, and different actuator stroke times in the return stroke (controlled by spring force and working fluid discharge rate) compared to the forward or positive stroke (controlled by working fluid pressure overcoming spring force). These variations can lead to deviations in valve operating timing, and consequently, simultaneous opening and closing signals that operate pilot valves to supply working fluid through a first (e.g., supply) valve and a second (e.g., discharge) valve may result in mismatches in the valve strokes of the two valves and various total fluid flow rates through the valves (and from the MFC) during these cycle times.

[0033] To address these varying valve stroke response times, the valve control device, configured as described above to adjust valve operation based on the transmission delay of the calculated actuation signal pulse, includes an additional opening delay OD. A and / or closed delay CD A It may be configured to apply adjustments, similar to adjusting the operating timing of the second (discharge) valve relative to the operating timing of the first (supply) valve, in order to maintain more consistent fluid flow requirements from the fluid supply MFC, as described above.

[0034] Another factor affecting the change in total flow rate through the array of switching valves while in operation is the nonlinearity of the change in fluid flow rate through the valves during operation, as shown in Figures 5A and 5B, and consequently, the midpoint of the actuator stroke is the valve flow rate (C V ) does not correspond to the midpoint. In the exemplary embodiment of the operated valve, the flow coefficient C Vが Maximum flow coefficient C Vmax The midpoint of the valve flow rate, which is half of the total flow rate, occurs at an actuator stroke position significantly close to the closed position (e.g., approximately 15% to 30% of the total actuator stroke from the closed position). When the shut-off and open valves operate simultaneously (Figure 5A), and show similar but reversed flow and stroke curves, the open valve reaches the midpoint flow rate before the shut-off valve, resulting in an extended operating period during which a larger total flow rate of fluid passes through the valve.

[0035] To address fluctuations in total flow rate caused by nonlinear changes in fluid flow rate during operation, the operating system may be configured to delay the operation of the opening valve relative to the operation of the closing valve, or to advance the operation of the closing valve relative to the operation of the opening valve (Figure 5B), thereby minimizing the deviation of the total flow rate during operation compared to the total flow rate in a fully operated state (e.g., when one valve is fully open and the other valve is fully closed). In some configurations, the valve opening delay OD B Or early valve closing - CD BThis can be set to approximate the time difference between the Cv midpoint and the stroke time midpoint. For example, in an exemplary configuration using a valve with an operating stroke time of approximately 2.5 ms (i.e., the midpoint of the stroke time of approximately 1.25 ms) and an opening midpoint flow condition or Cv midpoint of approximately 0.75 ms, the controller can be configured to delay the operation of the opening valve or advance the operation of the closing valve by approximately 0.5 ms (i.e., the time difference between the midpoint of the stroke time of 1.25 ms and the midpoint of the opening flow rate of 0.75 ms). Alternatively, an opening operation delay OD can be used. B Or accelerated closing action - CD B This can be set as a portion of the valve stroke time, for example, 15% to 30% or about 20% of the valve stroke time (for example, a delay of 0.50 ms for a valve with an open stroke time of 2.5 ms).

[0036] In some embodiments, such as the application of the ALD supply and relief valve described above, delaying the timing of the opening operation and / or advancing the closing operation timing of the supply valve 310-1 may result in a supply dose that deviates from the desired dose (e.g., a smaller dose). In some such configurations, the adjustment may be limited to the relief valve 310-2, and the volume of its capacity is not critical. For example, in such a configuration, the relief valve 310-2 has a nonlinear flow-based opening delay OD. B and early closure - CD B It may have such a feature, and the supply valve 310-1 does not have a nonlinear flow curve adjustment.

[0037] In some valve configurations, one or more of the valves may include an orifice limiter (e.g., mounted to or integrated with the valve) selected to restrict the valve flow rate to a desired reduced flow rate. In such configurations, the intermediate flow position of the actuator / actuating element deviates more significantly from the position and time of the midpoint of the actuator's stroke, resulting in a maximum flow coefficient C VmaxThis is because the flow is limited by the orifice, causing the valve to reach a reduced "full flow" state that is quite close to the fully closed position. As a result, the valve opening delay OD corresponds to the flow-stroke midpoint deviation of a standard unrestricted valve, as described above. B and / or early valve closure - CD B This is likely insufficient to compensate for the discrepancy in flow rate changes between flow limiting valves.

[0038] According to aspects of this disclosure, in order to address total flow rate fluctuations caused by orifice limitations associated with a valve(s), the operating system calculates a nonlinear flow rate-based opening delay (OD) compared to the total flow rate in a fully operated state (e.g., one valve is fully open and the other is fully closed) to minimize deviations in the total flow rate during operation. B and early closure - CD B (Figure 6) can be adjusted to further delay the valve opening action or further advance the valve closing action. Unlike the valve stroke flow rate characteristics of an unrestricted valve, which can be accurately and broadly estimated based on the type of valve (e.g., using a delay of approximately 20% of the valve stroke time), the size of the orifice limit incorporated by the system designer or end user can vary considerably, potentially resulting in significant variability at the midpoint of the valve stroke flow rate. In an exemplary system, the actuation system can be configured with one or more orifice size values ​​or ranges (e.g., <1mm, 1mm~2mm, 2~3mm) or one or more orifice limit flow coefficients C, with smaller orifice limits corresponding to a proportionally larger delay in valve opening action or advancement of valve closing action, depending on the orifice size specified by the user, e.g., smaller orifice limits corresponding to a proportionally larger delay in valve opening action or advancement of valve closing action. Vor Based on the value or range of values ​​(e.g., <0.04, 0.04~0.18, 0.18~0.42), a nonlinear flow-based release delay OD is calculated. B and closed forward-CD B It may include a controller configured to adjust the flow limiting actuation offset OD. In some applications, the flow limiting actuation offset OD B , -CD B This is an unrestricted open delay OD. B and early closure - CD BReplace it with an unrestricted open delay OD. B and early closure - CD B By adding an adjustment coefficient, it is possible to accommodate the time difference between the midpoint of the valve stroke and the midpoint of the limit Cv.

[0039] In some embodiments, instead of applying an open and / or close operation offset to account for a predetermined or measured timing deviation between the actuator stroke midpoint position and the flow midpoint position, the actuator generates a stroke signal that identifies the flow midpoint position, thereby adjusting the valve operation timing using a nonlinear flow-based operation offset OD. B CD B An actuator position sensor may be provided that is configured to eliminate the need for a stroke signal. In some such configurations, the actuator position sensor may be adjustable, or otherwise configurable, to address any notable or expected changes in the operating flow curve (e.g., due to the use of different orifice limits) by adjusting the stroke position at which the sensor generates and / or terminates the stroke signal to correspond to the flow midpoint position of the actuator member. As an example, an optical position sensor may be used to electronically adjust the operating setpoint to correspond to the flow midpoint position of the actuator member (e.g., by changing the distance between the sensor and the actuator member from which the sensor is triggered).

[0040] In some valve configurations with orifice restrictions, the orifice restriction may be positioned aligned with or adjacent to the valve seat to minimize the volume of choked fluid in the closed valve. In valve configurations with an orifice restriction further upstream from the valve seat, the volume of choked fluid between the upstream orifice restriction and the valve seat may cause a spike or burst in fluid flow when the valve opens. In valve configurations with an orifice restriction further downstream from the valve seat, the volume of choked fluid between the valve seat and the downstream orifice restriction may cause a prolonged delay or attenuation of flow after the valve is closed, and a delay in the supply of fluid flow when the valve opens. While these deviations may not affect the total fluid flow from the flow source, the flow deviations induced by the choked volume affect the width of the pulse in the total dose and / or the resulting volume of dose, which may result in a larger-than-desired fluid dose in a valve with an upstream orifice restriction, or a delayed fluid dose in a valve with a downstream orifice restriction.

[0041] To compensate for the fluid flow burst associated with the upstream orifice restriction, an additional open operation signal delay (OD) is implemented. C This can be applied to the release valve to provide the desired timing for supplying the dose. This burst-based release delay OD of the flow rate. C Therefore, the volume of the dose can be sufficiently adjusted to the desired volume, but in some embodiments, the flow rate burst-based valve shut-off is accelerated - CD Cが This can be applied to more accurately obtain the desired volume (Figure 7).

[0042] To compensate for the fluid flow attenuation associated with downstream orifice restriction, the release operation signal is accelerated based on flow lag - OD. D This may also be applied to open valves, and the flow delay-based closing action signal is accelerated - CD D This can be applied to a shut-off valve to compensate for the delay in flow passing through the valve and the downstream orifice limit, while maintaining the desired timing and volume of fluid flow (Figure 8).

[0043] The choked volume between the valve seat and the orifice limit may vary depending on the type of valve and the type of orifice limit installed / integrated; therefore, in the exemplary system, the actuation system adjusts the actuation signal based on flow bursts. C CD C Alternatively, adjust the operating signal based on the flow delay (OD). D CD D This may include a controller configured to apply based on a valve / orifice limiting type specified by the user, the controller including stored delay / early setting for possible combinations of valve / orifice limiting types, where a larger choked volume corresponds to a proportionally larger delay or early setting of the actuation.

[0044] In a multi-valve switching configuration having flow conditions affected by one or more of the following: (a) changes in valve stroke response time, (b) fluctuations in total flow rate caused by changes in nonlinear fluid flow rate (or flow curve) during operation, with or without orifice restriction, and (c) position of orifice restriction, the timing of the opening operation signal of the first valve is one or more corresponding opening signal timing offsets OD A , OD B , OD C / D The timing of the closing operation signal of the second valve may be adjusted by one or more corresponding closing signal timing offset CD A CD B CD C / D It can be adjusted by [this method].

[0045] In an exemplary system including a first unlimited supply valve v1 and a second unlimited relief valve v2 synchronized to direct a substantially continuous fluid flow (e.g., from a mass flow controller) upon receiving a supply valve command signal from an external computer, the valve controller starts a timer that applies the supply valve opening delay OD1, and then sends a supply valve actuation signal to the supply valve. The opening delay OD1 is calculated (e.g., by the controller) as the valve stroke response-based opening delay OD1, which is the total supply valve opening time TOT1 defined in the recipe minus an adjustment based on the measured opening response MOR1 of the supply valve. 1A It corresponds to.

[0046] Once the supply valve command signal from the external computer has finished, the valve controller starts a timer to apply the supply valve closure delay CD1 before stopping the transmission of the supply valve actuation signal to the supply valve v1. The closure delay CD1 is calculated (e.g., by the controller) as the valve stroke response-based closure delay CD1, which is calculated as the total supply valve closure time TCT1 defined in the recipe minus an adjustment based on the measured closure response MCR1 of the supply valve. 1A It corresponds to.

[0047] When the valve controller receives a relief valve command signal from an external computer (for example, simultaneously with the end of a supply valve command signal), it starts a timer that applies the relief valve opening delay OD2 before sending a relief valve actuation signal to the relief valve v2. The opening delay OD2 is based on the valve stroke response. 2A Furthermore, the release delay OD is based on nonlinear flow rate changes. 2B This corresponds to the addition of the valve stroke response. 2A This is calculated (e.g., by the controller) as the total opening time TOT2 of the relief valve defined by the recipe, minus the adjustment based on the measured opening response MOR2 of the relief valve as described above, and the opening delay OD based on nonlinear flow rate changes. 2BThis is given as a predefined (e.g., by the controller, or as an input supplied to the controller) or calculated (e.g., based on the measured stroke time) offset time, corresponding to the time difference between the stroke midpoint position and the flow midpoint position of the relief valve v2.

[0048] When the escape valve command signal from the external computer ends (for example, simultaneously with the end of the supply valve command signal), the valve controller applies the escape valve closing delay CD2 to start the timer, and then stops sending the operation signal to the escape valve. 2は , Closing delay CD based on valve stroke response 2A Therefore, a closing offset or forward CD based on nonlinear flow rate changes. 2Bを It corresponds to the subtracted value. The closing delay based on the valve stroke response is calculated (e.g., by the controller) as the closing delay based on the nonlinear flow rate change -CD, obtained by subtracting the adjustment based on the measured closing response MCR2 of the relief valve as described above from the total closing time TCT2 of the relief valve defined by the recipe. 2B This is given as a predefined (e.g., by the controller, or as an input supplied to the controller) or calculated (e.g., based on the measured stroke time) offset time, corresponding to the time difference between the stroke midpoint position and the flow midpoint position of the relief valve v2.

[0049] Upon receiving a supply valve command signal from an external computer, in an exemplary system including a first orifice-limiting supply valve v1 and a second relief valve v2 synchronized to direct a substantially continuous fluid flow (e.g., from a mass flow controller), the valve controller starts a timer that applies an opening delay OD1 of the supply valve, and then sends a supply valve actuation signal to the supply valve v1. The opening delay OD1 is based on the valve stroke response. 1A Furthermore, the offset OD is based on flow burst / lag. 1C / D This corresponds to the addition of the valve stroke response-based opening delay (OD). 1AAs described above, this is calculated (e.g., by the controller) as the total opening time TOT1 of the supply valve defined in the recipe minus an adjustment based on the measured opening response MOR1 of the supply valve. If the orifice limit is upstream of the valve seat, the opening offset or delay OD is based on the flow burst. 1C This is provided between the orifice limit and the valve seat as a predefined offset time (e.g., by the controller or as an input supplied to the controller) corresponding to the distance (and the resulting choke volume). If the orifice limit is downstream of the valve seat, an opening offset or early-out offset based on flow lag is provided. 1D This is provided between the orifice limit and the valve seat as a predefined offset time (e.g., by the controller or as an input supplied to the controller) corresponding to the distance (and the resulting choke volume).

[0050] When the supply valve command signal from the external computer ends, the valve controller starts a timer that applies the supply valve closing delay CD1 before ending the transmission of the supply valve actuation signal to the supply valve v1. The closing delay CD1 is based on the valve stroke response. 1A In addition, offset CD based on flow burst / delay 1C / D This corresponds to the addition of the following: Closing delay CD based on valve stroke response. 1A This is calculated (e.g., by the controller) as follows: the total closing time TCT defined in the recipe minus an adjustment based on the measured closing response MCR. If the orifice limit is upstream of the valve seat, an offset or delay CD based on the flow burst is used. 1D This is provided between the orifice limit and the valve seat as a predefined offset time (e.g., by the controller or as an input supplied to the controller) corresponding to the distance (and the resulting choke volume). If the orifice limit is downstream of the valve seat, a closure offset or advancement-CD based on flow lag is provided. 1DThis is provided between the orifice limit and the valve seat as a predefined offset time (e.g., by the controller or as an input supplied to the controller) corresponding to the distance (and the resulting choke volume).

[0051] When the valve controller receives a relief valve command signal from an external computer (for example, simultaneously with the end of a supply valve command signal), it starts a timer that applies the relief valve opening delay OD2 before sending a relief valve actuation signal to the relief valve v2. The opening delay OD2 is based on the valve stroke response. 2A Furthermore, the release delay OD is based on nonlinear flow rate changes. 2B This corresponds to the addition of the valve stroke response-based opening delay (OD). 2A As described above, this is calculated (e.g., by the controller) as the total opening time TOT2 of the relief valve defined in the recipe minus an adjustment based on the measured opening response MOR2 of the relief valve. The opening delay OD based on nonlinear flow rate changes 2B This is given as a predefined (e.g., by the controller or as an input supplied to the controller) or calculated (e.g., based on the measured stroke time) offset time, corresponding to the time difference between the stroke midpoint position and the flow midpoint position of the flow control relief valve. Flow burst / delay offset OD 2C / D This can be applied to the delayed OD2 relief valve opening, but in some configurations, this adjustment may be ignored as the volume of the "dose" discharged may not be considered important.

[0052] When the escape valve command signal from the external computer ends (for example, simultaneously with the end of the supply valve command signal), the valve controller applies the escape valve closing delay CD2 to start the timer, and then stops sending the operation signal to the escape valve v2. 2は , Closing delay CD based on valve stroke response 2A Therefore, a closing offset or forward CD based on nonlinear flow rate changes. 2Bを It corresponds to the subtracted value. Closing delay CD based on valve stroke response. 2AAs described above, this can be calculated (e.g., by the controller) by subtracting the adjustment based on the relief valve closure response MCR2 measured from the total relief valve closure time TCT2 defined in the recipe. Closure acceleration CD based on nonlinear flow rate changes 2B This is given as a predefined (e.g., by the controller or as an input supplied to the controller) or calculated (e.g., based on the measured stroke time) offset time, corresponding to the time difference between the stroke midpoint position and the flow midpoint position of the flow control relief valve. Flow burst / delay offset CD 2C / D This can be applied to CD2 with delayed escape valve closure, but in some configurations, this adjustment may be ignored as the volume of the discharged "dose" may not be considered important.

[0053] A system for monitoring and controlling the performance of pneumatically operated valves may utilize additional or other sensor configurations to monitor and adjust the operation of the valve assembly based on other system parameters, such as actuator pressure, system fluid pressure, temperature, and flow rate. For example, an actuator sensor configuration may be used to detect deviations in actuator pressure during a valve cycle, enabling the diagnosis of valve operation problems (e.g., leakage beyond the fluid-driven actuator member, changes in required operating force) or to modify actuator parameters (e.g., to adjust cycle time, pulse time, closing force, etc.). An exemplary sensor-based system for monitoring and controlling the performance of a pneumatic actuator is described in the shared U.S. Patent No. 11,073,442 ("Patent No. 442"), entitled “SYSTEMS AND METHODS FOR CONTROL AND MONITORING OF ACTUATED VALVES,” the entire disclosure of which is incorporated herein by reference.

[0054] In some embodiments, a multi-valve fluid system may be configured to deliver various fluids from multiple sources to a single location or outlet. For example, different precursor (highly reactive) gases may be continuously supplied to an atomic layer deposition (ALD) reaction chamber for atomic layer growth of a film on a target substrate. In some embodiments, as described in more detail above, each of the multiple fluids may be supplied via a pair of switching valve assemblies that are tunably controlled and synchronized by a valve control module to maintain a substantially constant flow rate of the corresponding fluid from, for example, a fluid supply mass flow controller (MFC). In other embodiments, each of the multiple fluids may be supplied from a corresponding fluid source via a corresponding single valve assembly that is tunably controlled and synchronized by a valve control module for precise timing and dosing of the supplied fluid.

[0055] For example, in some applications such as supplying precursor gases to a reaction chamber for atomic layer deposition, this simultaneous opening condition of multiple valve assemblies can result in undesirable or unacceptable mixing of fluids. In such applications, an externally provided program or recipe for sequentially supplying different fluids to a target location may be configured such that all other valve assemblies close before a selected valve assembly opens. Despite the configuration of these recipes or programs, in embodiments where the valve control module provides timing and / or duration adjustments to the actuation signals, such adjustments to the actuation signals controlling the valves may result in adjustments to the control of valve assemblies that could cause multiple valves to open simultaneously. Additionally or alternatively, other system conditions may delay the opening or closing of one of the valve assemblies; for example, a decrease in pneumatic pressure to an actuator may delay the opening of the valve, or restricted or choked discharge of pneumatic pressure from an actuator may delay the closing of the valve.

[0056] In exemplary embodiments of the present disclosure, a valve control module (e.g., an actuation signal regulating valve control module as described above) controlling communication with a plurality of fluid supply valve assemblies may include a controller configured to audit, or otherwise identify, the state (open or closed) of each valve assembly before sending an actuation signal pulse to one of the selected valve assemblies. If the controller receives an indication (e.g., a stroke signal pulse sent to the controller) that one of the other (unselected) valve assemblies is open, the controller delays or cancels the transmission of the actuation signal pulse, thereby preventing two or more valve assemblies from being open simultaneously.

[0057] When an indication occurs that an open, unselected valve assembly has closed (e.g., termination of a stroke signal pulse), the controller can continue transmitting actuation signal pulses to actuate the selected valve assembly. In some embodiments, the controller may be configured to correct a stored open delay OD (such as the one described above) of the actuation signal based on a delay caused by an existing open valve state. In other embodiments, the controller may be configured, additionally or alternatively, to initiate a pass-through mode (described in more detail above) to eliminate the need for adjustments of actuation signals by the valve control module that could overlap the open conditions of the valve assembly. In yet another embodiment, the controller may be configured, additionally or alternatively, to initiate an emergency stop / alarm mode that stops the operation of the valve assembly, for example, when the valve open state exceeds a maximum allowable threshold.

[0058] Referring back to Figure 2A, the exemplary fluid flow control process 1000 may include, after the opening delay OD time has been reached (at 1050), the controller polling the stroke signal from the valve assembly position sensor (e.g., via a digital input connector) at 1060 to indicate that the valve assembly is already open. The controller may continue polling the stroke signal until the valve assembly is no longer open (at 1070) before sending an actuation signal to the pilot valve (at 1080).

[0059] While the present invention has been disclosed and described in relation to certain exemplary embodiments, certain modifications and alterations may be conceived by those skilled in the art by reading this specification. Any such variations and alterations are within the scope of the invention, notwithstanding the express limitations of the appended claims and their equivalents. Thus, any deviation from such details is possible as long as it does not deviate from the spirit or scope of the applicant's overall inventive concept.

Claims

1. A method for controlling the flow rate of a fluid in a fluid system, the fluid system comprising an actuated valve assembly including an actuator having an actuator member biased toward a normal position, and an inlet port configured to receive pressurized fluid for moving the actuator member toward the actuated position, the method being: The valve controller receives a command signal pulse. In response to receiving the command signal pulse, after a predetermined opening delay, the valve controller transmits an operating signal pulse to the pilot valve. In response to receiving the aforementioned operating signal pulse at the pilot valve, the pilot valve is activated to direct the pressurized fluid towards the actuator inlet port, and the actuator member is moved to the operating position. In response to the movement of the actuator member to the operating position, a stroke signal pulse is transmitted from the position sensor attached to the valve assembly to the valve controller. In response to the termination of the command signal pulse, the transmission of the operation signal pulse to the pilot valve is terminated after a predetermined closing delay. In response to the termination of the aforementioned operating signal pulse, the pilot valve is activated to divert the pressurized fluid away from the actuator inlet port, thereby deflecting the actuator member to the normal position. In response to the movement of the actuator member to the normal position, the transmission of the stroke signal pulse to the valve controller is terminated. Based on the measurement period between the transmission of the activation signal pulse and the reception of the stroke signal pulse, calculate a predetermined adjusted release delay, and The method, comprising calculating a predetermined adjusted closing delay based on a measurement period between the end of the operating signal pulse and the end of the stroke signal pulse.

2. The method according to claim 1, wherein receiving the command signal in the valve controller includes transmitting the command signal from an external computer that communicates with the valve controller.

3. The method according to either claim 1 or 2, wherein the predetermined open delay and the adjusted predetermined open delay are calculated to maintain a substantially constant total open period between the reception of the command signal pulse and the reception of the stroke signal pulse.

4. The method according to any one of claims 1 to 3, wherein the predetermined closing delay and the adjusted predetermined closing delay are calculated to maintain a substantially constant total closing time between the end of the command signal pulse and the end of the stroke signal pulse.

5. The method according to any one of claims 1 to 4, wherein the position sensor is assembled to the actuator.

6. The method according to claim 5, wherein the position sensor is configured to sense the intermediate stroke position of the actuator member.

7. The method according to any one of claims 1 to 6, further comprising transmitting operating timing data from the controller to an external computer.

8. The method according to any one of claims 1 to 7, wherein the valve assembly includes a valve element that is movable between a closed position that blocks flow between the inlet port and the outlet port of the valve assembly and an open position that allows flow between the inlet port and the outlet port.

9. The method according to claim 8, wherein the normal position of the actuator member corresponds to the closed position of the valve element, and the operating position of the actuator member corresponds to the open position of the valve element.

10. The method according to claims 1 to 9, wherein the fluid system further comprises a second valve assembly including a second actuator having a second actuator member biased toward a normal position, and a second inlet port configured to receive pressurized fluid for moving the second actuator member toward an operating position.

11. The valve controller receives a second command signal pulse. In response to receiving the second command signal pulse, a second operating signal pulse is transmitted from the valve controller to the second pilot valve after a second predetermined opening delay. In response to receiving the second operating signal pulse at the second pilot valve, the second pilot valve is activated to direct the pressurized fluid towards the second actuator inlet port, and the second actuator member is moved to the operating position. In response to the movement of the second actuator member to the operating position, a second stroke signal pulse is transmitted from the second position sensor, which is assembled with the second valve assembly, to the valve controller. In response to the termination of the second command signal pulse, after a predetermined second closing delay, the transmission of the second operating signal pulse to the second pilot valve is terminated. In response to the termination of the second operating signal pulse, the second pilot valve is activated to divert the pressurized fluid away from the second actuator inlet port and deflect the second actuator member to the normal position. Based on the measurement period between the transmission of the second activation signal pulse and the reception of the second stroke signal pulse, calculate a predetermined adjusted second release delay, and The method according to claim 10, further comprising calculating a predetermined adjusted second closing delay based on a measurement period between the end of the second operating signal pulse and the end of the second stroke signal pulse.

12. The method according to claim 11, wherein the valve controller receives the second command signal pulse simultaneously with the termination of the command signal pulse in the valve controller.

13. The method according to any one of claims 11 and 12, further comprising delaying the transmission of the operating signal pulse from the valve controller to the pilot valve when the second actuator member is in the operating position.

14. The method according to any one of claims 1 to 13, further comprising the subsequent command signal pulse entering a pass mode that bypasses the valve controller and is transmitted to the pilot valve in response to the reception of an error signal in the valve controller.

15. The method according to claim 14, wherein entering the pass mode includes the operation of a relay switch by the valve controller.

16. A valve control module, A controller that stores a real-time operating system for controlling the operation of the valve control module, At least one command signal input connector that communicates with the controller and is connectable to an external device to receive command signal pulses from the external device, A driver circuit that communicates with the controller and transmits an operating signal pulse generated by the controller to the at least one pilot valve of at least one valve assembly, and The valve control module includes at least one digital input connector that is connectable to the position sensor of the valve assembly for circuit communication with the controller, receiving stroke signal pulses from the position sensor, and communicating the stroke signal pulses to the controller.

17. The valve control module according to claim 16, further comprising a communication port for circuit communication with the controller in order to transmit valve cycle data from the controller to the external device.

18. The valve control module according to any one of claims 16 and 17, further comprising a main power port for receiving power from a connected power source.

19. The valve control module according to any one of claims 16 to 18, wherein the controller, the command signal input connector, the driver circuit, and the digital input connector are supported by a single circuit board.

20. The valve control module according to any one of claims 16 to 19, wherein the controller is configured to deliver an actuation signal pulse to the driver circuit in order to transmit the actuation signal pulse to the pilot valve after a predetermined opening delay from the reception of a command signal pulse, the predetermined opening delay being calculated by the controller.

21. The valve control module according to claim 20, wherein the controller is configured to receive a stroke signal pulse from the digital input connector and to calculate the elapsed time between the transmission of the operating signal pulse and the reception of the stroke signal pulse.

22. The valve control module according to claim 21, wherein the controller is configured to adjust the predetermined opening delay based on the elapsed time between the transmission of the operating signal pulse and the reception of the stroke signal pulse.

23. The valve control module according to either claim 21 or 22, wherein the controller is configured to terminate the transmission of the operation signal pulse after a predetermined closing delay from the end of the command signal pulse, and the predetermined closing delay is calculated by the controller.

24. The valve control module according to claim 23, wherein the controller is configured to calculate the elapsed time between the end of the operating signal pulse and the end of the stroke signal pulse.

25. The valve control module according to claim 24, wherein the controller is configured to adjust the predetermined closing delay based on the elapsed time between the end of the operating signal pulse and the end of the stroke signal pulse.

26. The valve control module according to any one of claims 20 to 25, wherein the controller is configured to adjust at least one of the predetermined opening delay and the predetermined closing delay based on a system identification signal.

27. The valve control module according to claim 26, wherein the system identification signal corresponds to at least one of the nonlinear operating flow curve of the valve assembly, the orifice limiting size of the valve assembly, and the orifice limiting position of the valve assembly.

28. The at least one command signal input connector comprises multiple command signal input connectors for receiving command signal pulses to actuate multiple valve assemblies, The at least one driver circuit comprises multiple driver circuits for transmitting operating signal pulses generated by the controller to multiple pilot valves of the multiple valve assemblies, The valve control module according to any one of claims 16 to 27, wherein the at least one digital input connector includes a plurality of digital signal input connectors for receiving stroke signal pulses from a plurality of position sensors of the plurality of valve assemblies.

29. The valve control module according to claim 28, wherein the controller is configured to delay the transmission of the actuation signal pulse to one of the plurality of driver circuits corresponding to a selected one of the plurality of valve assemblies in response to receiving a stroke signal pulse indicating an open position of another one of the plurality of valve assemblies.

30. The valve control module according to any one of claims 16 to 29, further comprising the at least one relay switch connected between the at least one command signal input connector and the at least one driver circuit, and capable of operating to bypass the controller for transmitting the command signal pulse to the at least one driver circuit.

31. The valve control module according to claim 30, wherein the controller is configured to activate the at least one relay switch in response to receiving an error signal in the controller.

32. A fluid supply system, At least one operated valve assembly, An actuator having an actuator member that is biased toward a normal position, The valve assembly includes a pilot valve connected to the inlet port of the actuator and configured to operate between a first configuration that supplies pressurized fluid to the actuator inlet port in order to move the actuator member to an operating position, and a second configuration that diverts the pressurized fluid from the actuator inlet port in order to bias the actuator member to the normal position. A valve control module, comprising a valve controller configured to receive a command signal pulse for the corresponding movement of the actuator member to the operating position, and to transmit an operating signal pulse from the valve controller to the pilot valve to operate the pilot valve to the first configuration after a predetermined opening delay, stored in the valve controller, and Includes at least one position sensor, which is assembled with the at least one valve assembly and configured to transmit a stroke signal pulse to the valve controller in response to the movement of the actuator member to the operating position, The fluid supply system, wherein the valve controller is configured to calculate a pre-adjusted opening delay based on a measured period between the transmission of the actuation signal pulse and the reception of the stroke signal pulse, and the valve controller is configured to replace the pre-adjusted opening delay with the pre-adjusted opening delay.

33. The fluid supply system according to claim 32, wherein the valve controller is configured to terminate the transmission of the actuation signal pulse to the pilot valve in response to the termination of the command signal pulse after a predetermined closing delay, the pilot valve is activated in response to the termination of the actuation signal pulse to the second configuration, diverting pressurized fluid from the actuator inlet port to bias and move the actuator member to the normal position, and terminating the transmission of the stroke signal pulse to the valve controller.

34. The fluid supply system according to claim 33, wherein the valve controller is configured to calculate a predetermined adjusted closing delay based on a measurement period between the end of the actuation signal pulse and the end of the stroke signal pulse.

35. The fluid supply system according to claim 34, wherein the adjusted predetermined closing delay is calculated to maintain a substantially constant total closing time between the end of the command signal pulse and the end of the stroke signal pulse.

36. The fluid supply system according to any one of claims 32 to 35, further comprising an external device configured to transmit the command signal pulse to the valve controller.

37. The fluid supply system according to any one of claims 32 to 36, wherein the adjusted predetermined opening delay is calculated to maintain a substantially constant total opening time between the reception of the command signal pulse and the reception of the stroke signal pulse.

38. The fluid supply system according to any one of claims 32 to 37, wherein the position sensor is assembled to the actuator.

39. The fluid supply system according to claim 38, wherein the position sensor is configured to sense the intermediate stroke position of the actuator member.

40. The fluid supply system according to any one of claims 32 to 39, wherein the valve controller is configured to transmit operating timing data from the valve controller to an external computer.

41. The fluid supply system according to any one of claims 32 to 40, wherein the valve assembly includes a valve element that is movable between a closed position that blocks the flow between the inlet port and the outlet port of the valve assembly and an open position that allows the flow between the inlet port and the outlet port.

42. The fluid supply system according to claim 41, wherein the normal position of the actuator member corresponds to the closed position of the valve element, and the operating position of the actuator member corresponds to the open position of the valve element.

43. The fluid supply system according to any one of claims 32 to 42, wherein the at least one valve assembly comprises a plurality of valve assemblies.

44. The fluid supply system according to any one of claims 32 to 43, wherein the valve control module includes the valve control module according to any one of claims 16 to 31.

45. A method for synchronizing the opening operation of a first valve assembly with the closing operation of a second valve assembly in a fluid supply system, In response to receiving a first command signal pulse, after a predetermined opening delay, a first actuation signal pulse is transmitted to the first pilot valve to direct the pressurized fluid to the first actuator inlet port of the first actuator of the first valve assembly, thereby causing the first valve assembly to open. The process includes, in response to the termination of the second command signal pulse, which occurs simultaneously with the reception of the first command signal pulse, terminating the transmission of the second actuation signal pulse to the second pilot valve, thereby diverting pressurized fluid from the second actuator inlet port of the second actuator of the second valve assembly, and resulting in a spring-driven closing action of the second valve assembly, The method wherein the predetermined opening delay includes an offset corresponding to at least one of the following: (a) a delay measured in a previous opening operation of the first valve assembly between the transmission of the first activation signal pulse and the opening operation of the first valve assembly; (b) a nonlinear change in flow rate during the opening operation of the first valve assembly; (c) a flow rate spike due to a choked volume between the valve seat of the first valve assembly and the upstream orifice limit; and (d) a flow delay due to a choked volume between the valve seat of the first valve assembly and the downstream orifice limit.

46. The method according to claim 45, further comprising applying a predetermined closing delay between the end of the second command signal pulse and the end of the transmission of the second activation signal pulse, wherein the predetermined opening delay includes an offset corresponding to at least one of: (a) a delay between the end of the first activation signal pulse and the closing operation of the second valve assembly measured in a previous closing operation of the second valve assembly; (b) a nonlinear change in flow rate during the closing operation of the second valve assembly; (c) a spike in flow rate due to a choked volume between the valve seat of the first valve assembly and the upstream orifice limit; and (d) a delay in flow due to a choked volume between the valve seat of the first valve assembly and the downstream orifice limit.

47. The method according to any one of claims 45 and 46, wherein the transmission of the first and second operating signal pulses is performed by a valve control module that communicates with the first and second pilot valves.

48. The method according to claim 47, wherein the valve control module comprises the valve control module described in any one of claims 16 to 31.

49. The method according to any one of claims 45 to 48, wherein the fluid supply system includes the fluid supply system according to any one of claims 32 to 44.

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