Optical amplifier and apparatus therefor
By using a vortex inducer to create a helical fluid flow matching the electrode pitch within the optical amplifier chamber, the apparatus minimizes Poynting errors, ensuring precise laser beam alignment and reducing startup misalignment issues in optical amplifiers for lithography systems.
JP2026517774APending Publication Date: 2026-06-02ASML NETHERLANDS BV +1
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- ASML NETHERLANDS BV
- Filing Date
- 2024-04-11
- Publication Date
- 2026-06-02
Smart Images
Figure 2026517774000001_ABST
Abstract
An apparatus for an optical amplifier configured to amplify a laser beam comprises an amplification chamber, a vortex inducer, and a pair of electrodes. The amplification chamber is generally in the form of a tube. The vortex inducer is positioned to induce vortices in the fluid when the fluid is introduced into the amplification chamber, in order to induce a generally helical fluid flow through the amplification chamber. The pair of electrodes are positioned to apply a voltage within the amplification chamber. Each of the pair of electrodes is generally helical. The vortex inducer and the pair of electrodes are configured such that the pitch of the generally helical fluid flow through the amplification chamber generally matches the pitch of the pair of electrodes along the amplification chamber.
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