Seismic isolation device

Abstract

We provide a seismic isolation device suitable for installation below equipment in a cleanroom. [Solution] The seismic isolation device 100 includes an adapter plate 110, a base 120, a rolling part 130, and an adjustment assembly 140. The adapter plate has a first through hole and two opposing sides, a first side S1 and a second side S2, the first side being suitable for connection below the bottom plate 210 of the equipment. The base is located on the second side and has a second through hole. The rolling part is located on the base. The adjustment assembly connects the adapter plate and the base and is positioned to adjust the distance between the adapter plate and the base. The adjustment assembly includes a nut 141 located between the adapter plate and the base and a screw 142 that passes through the second through hole and extends to the first through hole.

Description

Technical Field

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[0001] The present invention relates to a seismic isolation device, and more particularly to a seismic isolation device suitable for installation below equipment in a clean room.

Background Art

[0002] Science and technology are advancing by leaps and bounds. For today's high-tech industries and research institutions, the problems caused by vibration to equipment can no longer be ignored. When the vibration energy exceeds the limit of the equipment, it will have a great impact on the operation of the equipment and the yield of the products.

[0003] Therefore, how to improve the seismic resistance of clean room equipment during an earthquake has become one of the goals to be solved in this field.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present invention provides a seismic isolation device suitable for installation below equipment in a clean room, which can improve seismic resistance and avoid affecting the air quality of the clean room during the installation process.

Means for Solving the Problems

[0005] The seismic isolation device of the present invention is suitable for installation below equipment in a clean room. The seismic isolation device includes an adapter plate, a base, a rolling part and an adjustment assembly. The adapter plate has a first through hole and a first side and a second side facing each other, and the first side is suitable for connecting below the bottom plate of the equipment. The base is arranged on the second side and has a second through hole. The rolling part is arranged on the base. The adjustment assembly connects the adapter plate and the base and is arranged to adjust the distance between the adapter plate and the base.

[0006] In one embodiment of the present invention, the adjustment assembly includes a nut and a screw. The nut is positioned between the adapter plate and the base. The screw passes through a second through hole and extends to a first through hole, and the nut is locked onto the screw and contacts the upper surface of the base facing the adapter plate.

[0007] In one embodiment of the present invention, the length of the screw is greater than the thickness of the base and nut in the direction normal to the surface of the adapter plate.

[0008] In one embodiment of the present invention, there is a gap between the nut and the adapter plate.

[0009] In one embodiment of the present invention, the second through-hole has a threaded portion.

[0010] In one embodiment of the present invention, the adapter plate is parallel to the base.

[0011] In one embodiment of the present invention, the rolling portion includes a plurality of universal wheels, and the universal wheels surround the second through hole.

[0012] In one embodiment of the present invention, the seismic isolation device further includes a plurality of fixing members arranged to fix a universal wheel to a base.

[0013] In one embodiment of the present invention, the seismic isolation device further includes a plurality of locking members. The adapter plate has a plurality of holes, the holes surrounding the first through-hole, and the locking members pass through the holes and are suitable for locking to the bottom plate of the equipment.

[0014] In one embodiment of the present invention, each of the locking members passes from the second side to the first side and protrudes from the first side.

[0015] In one embodiment of the present invention, the length of the threads of each locking member in the direction normal to the surface of the adapter plate is greater than the thickness of the adapter plate. [Effects of the Invention]

[0016] Based on the above, the seismic isolation device of this invention reduces the horizontal seismic force transmitted to the superstructure by the rolling of the rolling parts, thereby reducing damage to the equipment. Furthermore, the seismic isolation device can be adjusted to an appropriate height using the adjustment assembly, ensuring sufficient weight for the mounted equipment.

[0017] In order to make the above-mentioned features and advantages of the present invention clearer and easier to understand, the following embodiments will be specifically referenced and described in detail with reference to the attached drawings. [Brief explanation of the drawing]

[0018] [Figure 1] This is a schematic three-dimensional view of a seismic isolation device applied to equipment according to one embodiment of the present invention. [Figure 2] This is a schematic side view of a seismic isolation device according to one embodiment of the present invention. [Figure 3A] This is a schematic side view of a seismic isolation device applied to equipment according to one embodiment of the present invention. [Figure 3B] Figure 3A is a schematic cross-sectional view of the seismic isolation device applied to the equipment shown in Figure 3A. [Figure 4A] Figure 3A is a schematic diagram of the exploded view of the seismic isolation device applied to the equipment shown in Figure 3A. [Figure 4B] Figure 4A is a partially enlarged exploded schematic diagram of the seismic isolation device applied to the equipment shown. [Figure 5] This is a three-dimensional schematic diagram showing the seismic isolation device applied to the equipment in Figure 3A from a different perspective. [Modes for carrying out the invention]

[0019] FIG. 1 is a perspective schematic view of a seismic isolation device applied to a device according to an embodiment of the present invention. FIG. 2 is a side schematic view of the seismic isolation device according to an embodiment of the present invention. FIG. 3A is a side schematic view of a seismic isolation device applied to a device according to an embodiment of the present invention. FIG. 3B is a cross-sectional schematic view of the seismic isolation device applied to the device of FIG. 3A. FIG. 4A is an exploded schematic view of the seismic isolation device applied to the device of FIG. 3A. FIG. 4B is a partially enlarged exploded schematic view of the seismic isolation device applied to the device of FIG. 4A. FIG. 5 is a perspective schematic view of the seismic isolation device applied to the device of FIG. 3A shown from another perspective.

[0020] First, refer to FIG. 1. The seismic isolation device 100 of the present embodiment is suitable for installation between the bottom plate 210 and the flat plate 300 below the device 200 in the clean room. The flat plate 300 may be a base plate, but in other embodiments, the flat plate 300 may be a floor plate, and the present application is not limited thereto.

[0021] In the present embodiment, the device 200 is, for example, a turbo molecular pump, but the present invention is not limited thereto. For example, the turbo molecular pump can be used in combination with an etching device (e.g., Vigus) used in the semiconductor industry, etc., but the present invention is not limited thereto. The seismic isolation device 100 generates repeated relative motion in any horizontal direction between the flat plate 300 during operation, reduces the horizontal seismic force transmitted to the upper device 200, and thereby reduces the damage to the device 200 caused by the horizontal seismic force.

[0022] Generally, the structure of a conventional turbo molecular pump uses only a toothed rod and a steel plate at the bottom base, but the toothed rod has insufficient strength. When an earthquake occurs and the seismic force is transmitted to the device, the weak base becomes in a state like a cantilever beam, the seismic force is amplified, and the damage to the device during an earthquake becomes serious. In order to improve the acceleration amplification effect caused by the existing base becoming in a state like a cantilever beam, the seismic isolation device of the present application solves the above problems.

[0023] For details, please refer to Figures 2 to 5. The seismic isolation device 100 of this embodiment includes an adapter plate 110, a base 120, a rolling part 130, and an adjustment assembly 140. The adapter plate 110 is parallel to the base 120. The adapter plate 110 has a first through hole 111 and a first side S1 and a second side S2 facing each other. The first side S1 is suitable for connection to the bottom plate 210 of the equipment 200.

[0024] Refer to Figure 3B. The base 120 is located on the second side S2 and has a second through hole 121. The rolling part 130 is located on the base 120. The adjustment assembly 140 connects the adapter plate 110 and the base 120 and is positioned to adjust the distance D1 between the adapter plate 110 and the base 120.

[0025] Refer to Figure 4A. In this embodiment, the seismic isolation device 100 further includes a plurality of locking members 160. The locking members 160 are, for example, screws, but the present invention is not limited thereto. The adapter plate 110 has a plurality of holes H1, which surround the first through hole 111. The plurality of locking members 160 pass through the plurality of holes H1 and are suitable for locking to the bottom plate 210 of the equipment 200.

[0026] Please refer to Figure 2. In the direction N1 normal to the surface of the adapter plate 110, the length of the threads of each locking member 160 is greater than the thickness of the adapter plate 110. In this way, each locking member 160 passes from the second side S2 to the first side S1 of the adapter plate 110 and protrudes from the first side S1. The protruding threaded portion can be used to lock to the bottom plate 210 of the device 200. In one embodiment, the threads of each locking member 160 protrude upward from the bottom plate 210 of the device 200, but the present invention is not limited thereto.

[0027] With the above configuration, the seismic isolation device 100 can replace the original base of the equipment 200. By utilizing the base fixing holes originally provided in the bottom plate 210 of the equipment 200 and using the locking member 160, the adapter plate 110 of the seismic isolation device 100 can be locked and fixed to the bottom plate 210. In this way, the base of the equipment 200 can be replaced without moving the equipment, drilling holes, welding, etc., and the requirements of a cleanroom can be met.

[0028] Refer to Figure 3B. In this embodiment, the adjustment assembly 140 includes a nut 141 and a screw 142. The nut 141 is positioned between the adapter plate 110 and the base 120. The screw 142 passes through the second through hole 121 and extends to the first through hole 111. The nut 141 is locked onto the screw 142 and abuts against the upper surface T1 of the base 120 facing the adapter plate 110.

[0029] Furthermore, in the direction N1 normal to the surface of the adapter plate 110, the length of the screw 142 is greater than the thickness of the base 120 and the nut 141. Therefore, there is a gap between the nut 141 and the adapter plate 110. In this embodiment, the second through hole 121 has a threaded portion. That is, the second through hole 121 is a threaded hole and the screw 142 is suitable for engaging with the second through hole 121, but the present invention is not limited thereto.

[0030] Here, nut 141 is a height adjustment nut, and screw 142 is a height adjustment screw. By rotating nut 141, the seismic isolation device 100 can be adjusted to an appropriate height, ensuring sufficient weight for the mounted equipment (e.g., equipment 200).

[0031] In this embodiment, the rolling section 130 includes a plurality of universal wheels 131, which roll during an earthquake to reduce the horizontal seismic force transmitted to the superstructure, thereby mitigating damage to the equipment 200. In this embodiment, the rolling section 130 penetrates the upper and lower surfaces of the base 120, but the present invention is not limited thereto.

[0032] As shown in Figure 5, the number of universal wheels 131 is schematically shown as four, but the present invention is not limited to this. Multiple universal wheels 131 surround the second through hole 121 (Figure 3B), which significantly improves load-bearing capacity and the operational stability of the equipment, making it less likely to tip over.

[0033] Furthermore, in this embodiment, the seismic isolation device 100 further includes a plurality of fixing members 150 for fixing a plurality of universal wheels 131 to the base 120. The fixing members 150 are, for example, screws, but the present invention is not limited thereto.

[0034] In summary, the seismic isolation device of this invention allows for the replacement of the existing base of the equipment without moving the equipment, drilling holes, or welding, and by installing the seismic isolation device below the equipment, damage caused by earthquakes can be reduced. When the seismic isolation device is in operation, it generates repeated relative motion with the flat plate in any horizontal direction, reducing the horizontal seismic force transmitted to the upper device, thereby reducing damage to the device caused by the horizontal seismic force and improving seismic resistance.

[0035] The present invention has been disclosed based on the embodiments described above, but this does not limit the present invention. A person with ordinary skill in the art may make appropriate changes and modifications without departing from the spirit and scope of the present invention. Accordingly, the scope of protection of the present invention shall be determined by the attached utility model claims. [Industrial applicability]

[0036] The seismic isolation device of this invention can be applied to equipment in clean rooms. [Explanation of Symbols]

[0037] 100: Seismic isolation device 110: Adapter Plate 111: First through hole 120: Bass 121: Second through hole 130: Rolling part 131: Universal Wheel 140: Adjustment Assembly 141: Nut 142: Screw 150: Fixing member 160: Locking component 200:Equipment 210: Bottom plate 300: Flat plate D1: Distance S1: First side S2: 2nd side T1:Top surface N1: Normal direction

Claims

1. A seismic isolation device suitable for installation below equipment in a cleanroom, An adapter plate having a first through hole and a first side and a second side facing each other, the first side being suitable for connection to the bottom of the bottom plate of the equipment, A base arranged on the second side and having a second through hole, A rolling part arranged on the base, An adjustment assembly is provided to connect the adapter plate and the base, and to adjust the distance between the adapter plate and the base. Seismic isolation devices, including those mentioned above.

2. The adjustment assembly is A nut positioned between the adapter plate and the base, A screw that passes through the second through hole and extends to the first through hole, wherein the nut is locked to the screw and abuts against the upper surface of the base facing the adapter plate, The seismic isolation device according to claim 1, including the above.

3. In the direction normal to the surface of the adapter plate, the length of the screw is greater than the thickness of the base and the nut. The seismic isolation device according to claim 2.

4. There is a gap between the nut and the adapter plate. The seismic isolation device according to claim 2.

5. The second through hole has a threaded portion. The seismic isolation device according to claim 1.

6. The adapter plate is parallel to the base. The seismic isolation device according to claim 1.

7. The rolling portion includes a plurality of universal wheels, and the rings of the plurality of universal wheels surround the periphery of the second through hole. The seismic isolation device according to claim 1.

8. The further includes a plurality of fixing members arranged to secure the plurality of universal wheels to the base, The seismic isolation device according to claim 7.

9. The adapter plate further includes a plurality of locking members, the adapter plate having a plurality of holes, the plurality of holes surrounding the first through hole, and the plurality of locking members passing through the plurality of holes, suitable for locking to the bottom plate of the device. The seismic isolation device according to claim 1.

10. Each of the locking members passes from the second side to the first side and protrudes from the first side. The seismic isolation device according to claim 9.

11. In the direction normal to the surface of the adapter plate, the length of the threads of each locking member is greater than the thickness of the adapter plate. The seismic isolation device according to claim 9.

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