Heat recovery type outdoor air micro-pollutant adsorption and removal system

Abstract

This invention provides a heat recovery type outside air micro-contaminant adsorption filtration system that has the effect of recovering and utilizing the heat from exhaust gases, as well as significantly reducing the amount of micro-contaminants entering a cleanroom. [Solution] The heat recovery type outside air micro-contaminant adsorption filtration system of this invention is composed of a combination of outside air 1, a zeolite rotor adsorption device 2, an outside air air conditioner 3 (MAU), a clean room 4, a heat exchanger 5, a volatile organic compound treatment device 6, and a chimney 7. Combustion exhaust gas (off-gas) is output from the outlet 631 of the combustion furnace 63 of the volatile organic compound treatment device, heat exchange is performed by the heat exchanger, and then it is transported to the heater 11 where it is heated. After that, it is transported to the desorption section of the zeolite rotor adsorption device and used. As a result, the zeolite rotor of the zeolite rotor adsorption device filters micro-contaminants from the outside air and supplies them to the clean room via the outside air air conditioner (MAU).

Description

Technical Field

[0001] The invention relates to a heat recovery type external air micro-pollutant adsorption and removal system, and in particular, has the function of heat recovery and utilization of exhaust gas and has the effect of significantly reducing micro-pollutants entering a clean room, and relates to a system applicable to related places or factories such as the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc.

Background Art

[0002] Wafer manufacturing needs to be carried out in a clean room. With the progress of the process, its line width has already reached the nanometer level. Therefore, in the clean room of a semiconductor advanced wafer manufacturing factory, not only particulate contaminants need to be removed, but also the concentration of extremely fine gaseous molecular contaminants (Airborne Molecular Contamination, AMC) has attracted attention. Gaseous molecular contaminants (AMC) include four types of substances: organic volatile compounds (VOC), acids, bases, and dopants (DOPANTs), and removal of these gaseous molecular contaminants (AMC) is also required. Therefore, in a clean room, chemical filters are used to remove this type of gaseous molecular contaminant (AMC). However, the sources of gaseous molecular contaminants (AMC) are extremely extensive, and how to effectively control them has become a very important issue.

[0003] Furthermore, in addition to the aforementioned gaseous molecular contaminants (AMCs), there are other sources of minute contaminants within cleanrooms. This is the outside air, or the surrounding atmospheric environment. The concentration of volatile organic compounds (VOCs) in the outside air is extremely low, generally less than 1000 ppb, and the total volatile organic compound (TVOC) concentration is also approximately less than 1000 ppb. These include gaseous contaminants such as isopropyl alcohol (IPA), acetone, and toluene. Because the total volatile organic compound (TVOC) concentration is relatively low, it does not exceed the hazardous or permissible limits set by the World Health Organization (WHO) and occupational safety and health organizations, and the health damage to humans is small. However, in advanced wafer manufacturing processes, it affects the yield of products manufactured in cleanrooms, especially in processes of 7 nanometers or less, such as the yield of 3-nanometer or 2-nanometer wafer processes.

[0004] The objective is to propose a heat recovery type ambient air micro-pollutant adsorption and removal system that has the effect of recovering and utilizing the heat from exhaust gases and is easy for users to operate and assemble. The inventors, motivated by the desire to provide convenience to users, have diligently conducted research, design, and prototyping, resulting in the completion of this invention. [Overview of the Initiative] [Means for solving the problem]

[0005] The main objective of this invention is to provide a heat recovery type outside air micro-contaminant adsorption and removal system. This system consists of a combination design of outside air, a zeolite rotor adsorption device, an outside air air conditioner (MAU), a clean room, a heat exchanger, a volatile organic compound (VOC) treatment equipment, and a chimney. The exhaust gas after combustion, output from the outlet of the combustion furnace of the VOC treatment equipment, undergoes heat exchange via the heat exchanger, is transported to a heater for heating, and then transported to the desorption section of the zeolite rotor adsorption device for use. As a result, the zeolite rotor of the zeolite rotor adsorption device filters micro-contaminants from the outside air, which are then supplied to the clean room via the outside air air conditioner (MAU). This provides the benefit of heat recovery and utilization of the exhaust gas, significantly reduces the amount of micro-contaminants entering the clean room, and improves the overall practicality.

[0006] Another object of the present invention is to provide a heat recovery type ambient air micro-pollutant adsorption and removal system. The heat exchanger has a cold-side channel and a hot-side channel, and the heat exchanger is provided with a cold-side transport pipe, a hot-side transport pipe, and a hot-side discharge pipe. One end of the cold-side channel is connected to the other end of the cooling gas transport pipe of the zeolite rotor adsorption device, and the other end of the cold-side channel is connected to the cold-side transport pipe and also to the heater via the cold-side transport pipe. Furthermore, one end of the hot-side channel of the heat exchanger is connected to one end of the hot-side transport pipe, and the other end of the hot-side transport pipe is connected to the outlet of the combustion furnace of the volatile organic compound treatment equipment (VOC treatment equipment). As a result, the cooling gas transported from the cooling gas transport pipe of the zeolite rotor adsorption device can be heated up before entering the heater through heat exchange between the cold-side channel and the hot-side channel of the heat exchanger. Therefore, it has the effect of reducing or decreasing the use (energy consumption) of the heater, and can improve overall operability.

[0007] A further object of the present invention is to provide a heat recovery type ambient air minute pollutant adsorption and removal system. In the first embodiment of the zeolite rotor adsorption device, the zeolite rotor is provided with a zeolite rotor controller, which can be set to either continuous operation or timer operation (scheduled operation). Specifically, the zeolite rotor can be operated continuously for 24 hours to perform adsorption and desorption, or adsorption and desorption can be performed by timer operation. Because the concentration of the target gas to be treated in the airflow being treated, i.e., the total volatile organic compounds (TVOCs) in the ambient air, is very low, the rotation speed of the zeolite rotor is set to one within the range of 0.1 RPH to 2 RPH per hour in order to obtain better adsorption efficiency. Furthermore, in the second embodiment of the zeolite rotor adsorption device, the zeolite rotor is provided with a zeolite rotor desorption section controller, which can be set to either continuous desorption or timer desorption. For example, if the operating speed of the zeolite rotor is 1 RPH (1 rotation per hour), after 1 hour of heating and desorption using the heater, the zeolite rotor can be used for 40.9 hours. If the safety factor is set to SF = 3.4, then 40.9 / 3.4 = 12 hours, meaning that desorption only needs to be performed once every 12 hours. This significantly reduces the energy used for desorption, saves on electricity costs associated with operation, achieves economic benefits through effective energy saving, and improves overall operability. [Brief explanation of the drawing]

[0008] [Figure 1] This is a system diagram showing the main components of the present invention. [Figure 2] This is a schematic diagram showing a configuration in which a fan is provided in the heat transport piping of the present invention. [Figure 3] This is a schematic diagram showing a configuration in which a fan is provided in the hot-side exhaust piping of the present invention. [Modes for carrying out the invention]

[0009] To understand the features, characteristics, and technical details of this invention in more detail, please refer to the following detailed description and drawings relating to this invention. However, the attached drawings are for reference and explanation purposes only and do not limit this invention.

[0010] Please refer to Figures 1 to 3. These are schematic diagrams illustrating embodiments of the present invention. The best embodiment of the heat recovery type ambient air micro-contaminant adsorption and removal system of the present invention is applicable to relevant locations or factories in the semiconductor field, electronics technology field, biotechnology field, food processing field, precision equipment manufacturing field, etc. The system primarily has the effect of recovering and utilizing the heat from exhaust gases, and also has the effect of significantly reducing micro-contaminants entering clean rooms.

[0011] The heat recovery type outside air fine pollutant adsorption and removal system according to this invention consists of a combination design of outside air 1, a zeolite rotor adsorption device 2, an outside air air conditioner (MAU) 3, a clean room 4, a heat exchanger 5, volatile organic compound treatment equipment (VOC treatment equipment) 6, and a chimney 7, as shown in Figures 1 to 3. The outside air 1 contains at least one type of gas or a combination thereof, and is mainly a mixture consisting of 78.1% nitrogen, 21% oxygen, and 0.9% argon and other impurities. The outside air 1 is also commonly referred to as "air".

[0012] The volatile organic compound (VOC) treatment equipment 6 is primarily used in organic waste gas treatment systems for the semiconductor industry, optoelectronics industry, or chemical-related industries, and has the effect of improving the efficiency of organic waste gas treatment, saving energy, and reducing emissions. The volatile organic compound treatment equipment 6 comprises either a single-rotor treatment system (not shown) or a dual-rotor treatment system 60 (see Figures 1 to 3). The single-rotor treatment system includes one adsorption rotor (not shown) and performs adsorption and desorption treatment of organic waste gas (VOC) via this adsorption rotor. The gas after adsorption (adsorbed gas) is transported to a chimney 7 and discharged. The dual-rotor treatment system 60, as shown in Figures 1 to 3, includes a first adsorption rotor 61 and a second adsorption rotor 62, and performs adsorption and desorption treatment of organic waste gas (VOC) via these first and second adsorption rotors 61 and 62. The adsorbed gas generated after organic waste gas (VOCs) has been adsorbed by the first adsorption rotor 61 and the second adsorption rotor 62 is transported to the chimney 7 and discharged.

[0013] Furthermore, the volatile organic compound treatment equipment (VOC treatment equipment) 6, whether configured as a single-rotor treatment system (not shown) or a dual-rotor treatment system 60, includes a combustion furnace 63 (see Figures 1 to 3). The combustion furnace 63 is selected from one of the following: a direct-to-energy combustion furnace (TO), a catalytic combustion furnace, or a regenerative-to-energy combustion furnace (RTO). Although shown as a direct-to-energy combustion furnace (TO) in the drawings, the present invention is not limited to this. The combustion furnace 63 burns the desorbed gas transported from the single-rotor treatment system (not shown) or the dual-rotor treatment system 60 to produce exhaust gas after combustion. The combustion furnace 63 is also provided with an outlet 631, from which the exhaust gas after combustion is output.

[0014] As shown in Figures 1 to 3, the zeolite rotor adsorption device 2 comprises a zeolite rotor 10, a heater 11, an air supply pipe 12, a purified gas transport pipe 13, a cooling gas supply pipe 14, a cooling gas transport pipe 15, a hot air transport pipe 16, and a desorption gas discharge pipe 17. The zeolite rotor 10 is provided with an adsorption section 101, a cooling section 102, and a desorption section 103. Here, the zeolite rotor 10 is a concentration rotor formed using zeolite (zeolite).

[0015] One end of the air supply pipe 12 is for allowing outside air 1 to enter (see Figures 1 to 3), and the other end of the air supply pipe 12 is connected to one side of the adsorption section 101 of the zeolite rotor 10. This allows the air supply pipe 12 to transport outside air 1 to one side of the adsorption section 101 of the zeolite rotor 10. The air supply pipe 12 is equipped with a fan 121 (see Figures 1 to 3), which blows or draws outside air 1 into the adsorption section 101 of the zeolite rotor 10. One end of the purified gas transport pipe 13 is connected to the other side of the adsorption section 101 of the zeolite rotor 10, and the other end of the purified gas transport pipe 13 is connected to the outdoor air conditioner (MAU) 3. As a result, the outside air 1 passes through the adsorption section 101 of the zeolite rotor 10 and is subjected to adsorption treatment, and then is transported into the outside air air conditioner (MAU) 3 by the purified gas transport piping 13. The purified gas transport piping 13 is also equipped with a fan 131 (see Figures 1 to 3), which blows or sucks the adsorbed gas from the zeolite rotor 10 into the outside air air conditioner (MAU) 3.

[0016] Furthermore, one end of the cooling gas supply pipe 14 is connected to one side of the cooling section 102 of the zeolite rotor 10, and gas is introduced into the cooling section 102 of the zeolite rotor 10 to perform cooling. Two embodiments are provided for the cooling section 102 of the zeolite rotor 10. In the first embodiment, outside air (fresh air) enters from the cooling gas supply pipe 14 connected to one side of the cooling section 102 of the zeolite rotor 10 (see Figures 2 and 3), and the cooling section 102 of the zeolite rotor 10 is cooled by this outside air. In the second embodiment, an air supply communication pipe 122 is provided in the supply pipe 12 (see Figure 1). The other end of the air supply pipe 122 is connected to the cooling gas supply pipe 14, and outside air 1 from the supply pipe 12 can be transported to the cooling section 102 of the zeolite rotor 10 via the air supply pipe 122 for cooling. In addition, an air supply control valve 1221 is provided in the air supply pipe 122 (see Figure 1) to control the airflow of the air supply pipe 122.

[0017] Furthermore, one end of the desorption gas discharge pipe 17 is connected to one side of the desorption section 103 of the zeolite rotor 10, and the other end of the desorption gas discharge pipe 17 is directly connected to the outside air 1 (see Figures 1 to 3). That is, the gas after desorption is discharged directly to the outside via the desorption gas discharge pipe 17 and mixed with the outside air 1. In addition, a fan 171 is provided in the desorption gas discharge pipe 17 (see Figures 1 to 3), and this fan 171 blows or sucks the gas after desorption to the outside.

[0018] One end of the hot air transport pipe 16 is connected to the other side of the detachable section 103 of the zeolite rotor 10, and the other end of the hot air transport pipe 16 is connected to the heater 11 (see Figures 1 to 3). This allows the high-temperature hot air heated by the heater 11 to be transported to the detachable section 103 of the zeolite rotor 10 via the hot air transport pipe 16 for high-temperature detachment. Here, the heater 11 is selected from one of the following: an electric heater, a sheathed heater (electric tube heater), a planar heater (electric piece heater), a gas fuel heater, a liquid fuel heater, or a heat exchanger.

[0019] Furthermore, the heat exchanger 5 has a cold-side flow path 501 and a hot-side flow path 502, and is provided with a cold-side transport pipe 51, a hot-side transport pipe 52, and a hot-side discharge pipe 53 (see Figures 1 to 3). One end of the cooling gas transport pipe 15 is connected to the other side of the cooling section 102 of the zeolite rotor 10. The other end of the cooling gas transport pipe 15 of the zeolite rotor adsorption device 2 is connected to one end of the cold-side flow path 501, and the other end of the cold-side flow path 501 is connected to one end of the cold-side transport pipe 51. Furthermore, the heater 11 is connected via the other end of the cold-side transport pipe 51.

[0020] Furthermore, one end of the heat-side flow path 502 of the heat exchanger 5 is connected to one end of the heat-side transport pipe 52, and the other end of the heat-side transport pipe 52 is connected to the outlet 631 of the combustion furnace 63 of the volatile organic compound treatment equipment (VOC treatment equipments) 6 (see Figures 1 to 3). In addition, the other end of the heat-side flow path 502 of the heat exchanger 5 is connected to one end of the heat-side discharge pipe 53, and the other end of the heat-side discharge pipe 53 is connected to the chimney 7. A fan 54 is provided in either the heat-side transport pipe 52 or the heat-side discharge pipe 53. The fan 54 may be provided on the heat-side transport pipe 52 (see Figure 2) or on the heat-side discharge pipe 53 (see Figure 3). This allows the gas in the heat-side transport pipe 52 to be blown or drawn into the heat-side flow path 502, or the gas in the heat-side discharge pipe 53 to be blown or drawn into the chimney 7. This allows the cooling gas transported from the cooling gas transport piping 15 of the zeolite rotor adsorption device 2 to be heated before entering the heater 11 via heat exchange between the cold-side flow path 501 and the hot-side flow path 502 of the heat exchanger 5. Therefore, it has the effect of reducing or decreasing the usage (energy consumption) of the heater 11.

[0021] Furthermore, the outside air unit (MAU) 3 is provided with an inlet 401 and an outlet 402 (see Figures 1 to 3). The inlet 401 of the outside air unit (MAU) 3 is connected to the other end of the purified gas transport piping 13 of the zeolite rotor adsorption device 2. The cleanroom 4 is connected to the outlet 402 of the outside air unit (MAU) 3 (see Figures 1 to 3). As a result, outside air 1 can be filtered (removed) of minute contaminants from the outside air 1 by the zeolite rotor 10 of the zeolite rotor adsorption device 2, then sent into the outside air unit (MAU) 3, and further supplied to the cleanroom 4 via the outside air unit (MAU) 3 for use.

[0022] The outdoor air conditioning unit (MAU) 3 is equipped with a casing 40. Inside the casing 40 are a first filter device 41, a first temperature control device 42, a water washing device 43, a second temperature control device 44, and a second filter device 45 (see Figures 1 to 3). A fan 46 is also provided inside the casing 40 of the outdoor air conditioning unit (MAU) 3. The fan 46 is installed upstream of the second filter device 45 and mainly provides airflow power. This ensures that the adsorbed gas transported from the purified gas transport piping 13 of the zeolite rotor adsorption device 2 passes sequentially through the first filter device 41, the first temperature control device 42, the water washing device 43, the second temperature control device 44, and the second filter device 45 for processing, thereby ensuring highly efficient operation of the outdoor air conditioning unit (MAU) 3. The first filter device 41 is either a pre-filter or a medium-efficiency filter, or a combination thereof. Most of the pre-filters are panel-type (plate-shaped) and are suitable for primary filtration, mainly for filtering dust particles of 5 μm or larger. The main materials for these are nonwoven fabric, nylon mesh, activated carbon filter material, or metal mesh. Most of the medium-efficiency filters are bag-type (bag-shaped) and are widely applied to intermediate filtration, mainly used for filtering dust particles of 1 to 5 μm or larger. The main materials for these are synthetic fibers and nonwoven fabric.

[0023] Further, the first temperature control device 42 is either one of the precooling coil 421 and the preheating coil 422, or a combination thereof (see Fig. 1). Either cooling water or ice water flows into the precooling coil 421, and effectively cools down the adsorbed gas transported from the purification gas transport pipe 13 of the zeolite rotor adsorption device 2. Also, either hot water or steam flows into the preheating coil 422, and transfers thermal energy to the adsorbed gas transported from the purification gas transport pipe 13 to raise its temperature. Furthermore, the first temperature control device 42 may be either one of the precooler 423 and the preheater 424, or a combination thereof (see Figs. 2 and 3). The precooler 423 is selected from any one of a shell and tube cooler, a fin tube cooler, or a plate heat exchange cooler. The preheater 424 is selected from any one of an electric heater, a gas heater, a heat medium oil heater, or a hot water heater.

[0024] Also, the water washing device 43 is a washing humidifier (see Figs. 1 to 3). The washing humidifier is mainly composed of at least one pressurizing pump, at least one nozzle, at least one water replenishing valve, at least one drain valve, and at least one pipe (not shown). When the adsorbed gas transported from the purification gas transport pipe 13 of the zeolite rotor adsorption device 2 passes through the washing humidifier, water molecules sufficiently absorb the heat in the adsorbed gas and vaporize and evaporate. Thereby, the humidity of the adsorbed gas transported from the purification gas transport pipe 13 of the zeolite rotor adsorption device 2 is increased to form a moist gas.

[0025] Furthermore, the second temperature control device 44 is either one of the recooling coil 441 and the reheating coil 442, or a combination thereof (see Figure 1). Either cooling water or ice water flows into the recooling coil 441, which effectively cools down the adsorbed gas transported from the purified gas transport pipe 13 of the zeolite rotor adsorption device 2. Also, either warm water or steam flows into the reheating coil 442, which transfers thermal energy to the adsorbed gas transported from the purified gas transport pipe 13 to raise its temperature. Further, the second temperature control device 44 may be either one of the recooler 443 and the reheater 444, or a combination thereof (see Figures 2 and 3). The recooler 443 is selected from any one of a shell-and-tube cooler, a fin-tube cooler, or a plate-type heat exchange cooler. The reheater 444 is selected from any one of an electric heater, a gas heater, a heat medium oil heater, or a warm water heater.

[0026] The second filter device 45 is either one of a HEPA filter (High Efficiency Particulate Air Filter) or an ULPA filter (Ultra Low Penetration Air Filter), or a combination thereof (see Figures 1 to 3). The HEPA filter is applied to terminal filtration (final filtering), achieving an efficiency of 99.998% for particles of 0.1μm and 0.3μm, and a removal efficiency of 99.7% or more for particles with a diameter of 0.3μm or more (one two-hundredth of the diameter of a hair). This is the most effective filtering medium for contaminants such as smoke, dust, and bacteria, and its material is mainly extremely fine glass fiber paper or composite filter paper. Also, the ULPA filter is mainly used to remove particles of 0.12μm (120 nanometers) or more, and its filtering efficiency is about 99.995% or more of DOP. Its material is mainly special extremely fine glass fiber paper.

[0027] Furthermore, the concentration of gaseous volatile organic pollutants in the outside air is extremely low, generally less than 1000 ppb, and the actual IPA concentration in the outside air is about several tens of ppb. Compared to situations where conventional VOC exhaust treatment systems for air pollution prevention are used, for example, where the VOC gas exhaust concentration in semiconductor electronics factories is typically 100-800 ppm, the inventors' analysis revealed a significant difference between this and the outside air treatment targeted by this invention. Specifically, the concentration difference between the two is at least 100 to 1000 times or more. Therefore, this invention makes it possible to directly and pre-filter (remove) minute pollutants contained in the outside air 1 by installing the zeolite rotor adsorption device 2 upstream of the outside air air conditioner (MAU) 3. In addition, by performing adsorption and desorption via the zeolite rotor 10, the zeolite rotor 10 can be circulated and reused. As a result, no consumables are generated, the service life is long, and maintenance costs are kept low, thus having the excellent effect of saving time and reducing consumables.

[0028] Furthermore, the zeolite rotor adsorption device 2 is provided with two embodiments. In the first embodiment, the zeolite rotor 10 is equipped with a zeolite rotor controller (not shown), and the zeolite rotor controller can be set to either continuous operation or scheduled operation (timer operation). Specifically, the zeolite rotor 10 may be operated continuously for 24 hours to perform the adsorption and desorption process, or the adsorption and desorption process may be performed by setting it to scheduled operation. Because the total volatile organic compound (TVOC) concentration in the airflow to be processed (outside air 1) is extremely low, the rotation speed of the zeolite rotor 10 is set to one between 0.1 RPH and 2 RPH per hour. This allows the zeolite rotor 10 to obtain better adsorption efficiency. The zeolite rotor controller is connected to the heater 11. When the zeolite rotor controller is set to continuous operation or scheduled operation, the heater 11 is simultaneously started to heat and output a heat source into the desorption section 103. In the case of scheduled operation, the zeolite rotor 10 stops for a certain period of time based on the set time, then resumes operation to perform adsorption and desorption operations. The zeolite rotor controller can also stop (turn off) the heater 11. In this case, the cooling gas transported from the cooling gas transport pipe 15 passes directly through the heater 11 without being heated by the heater 11 and is transported into the desorption section 103.

[0029] Furthermore, in the second embodiment of the zeolite rotor adsorption device 2, the zeolite rotor 10 is provided with a zeolite rotor detachment section controller (not shown). The zeolite rotor detachment section controller is set to either continuous detachment or scheduled detachment (timer detachment). Specifically, in the detachment section 103 of the zeolite rotor 10, detachment may be performed continuously for 24 hours, or detachment may be performed according to the scheduled detachment setting. The zeolite rotor detachment section controller is connected to the heater 11, and when set to continuous detachment or scheduled detachment, it simultaneously starts the heater 11 to heat and outputs a heat source into the detachment section 103. In addition, the zeolite rotor detachment section controller can also stop (turn off) the heater 11. In this case, the cooling gas transported from the cooling gas transport piping 15 passes directly through the heater 11 without being heated and is transported into the detachment section 103. When the detachable section 103 of the zeolite rotor 10 performs scheduled detachment, the heater 11 is stopped for a certain period of time based on a set time, and then heating is resumed, thereby outputting a heat source into the detachable section 103 to perform detachment.

[0030] In particular, the experiment revealed the following: Using a module of zeolite blocks equal in thickness to the zeolite rotor 10 (e.g., 400 mm), after 1 hour of desorption, an experiment was conducted to measure the saturated adsorption capacity. The results showed that adsorption for 3.5 hours was possible under conditions where the adsorption efficiency decreased from 100% to 80%.

[0031] Specifically, when the intake air conditions during testing were set to an IPA concentration of 11.69 ppm, experimental results showed that adsorption was possible for 210 minutes (=3.5 hours) at an inlet IPA concentration of 11.69 ppm after desorption. However, in actual operation, the IPA concentration in the ambient air is approximately 20-60 ppb, and the total volatile organic compounds (TVOCs) are less than 1000 ppb. IPA in the ambient air is less easily adsorbed compared to other common pollutants such as toluene.

[0032] From the above, the expected adsorption time a after regeneration can be equivalently inferred by the following equation. a=(11.69ppm*1000ppb / ppm)*3.5 hours / 1000ppb=40.9 hours

[0033] Therefore, when using thermal desorption by heated airflow (hereinafter abbreviated as thermal desorption), this invention adopts an intermittent thermal desorption design. For example, after 1 hour of desorption, 12 hours of adsorption operation is performed. According to this calculation, continuous 24-hour desorption per day is unnecessary, and operation is possible by performing 1 hour of desorption every 12 hours. This operating mode can significantly reduce the energy required for desorption.

[0034] A detailed explanation is as follows: Based on the design described above, the zeolite block module (e.g., 400 mm) is replaced with a honeycomb zeolite rotor. When the rotation speed of the honeycomb zeolite rotor is set to 1 RPH, that is, it takes 1 hour for the honeycomb zeolite rotor to complete one rotation. After 1 hour of thermal desorption (hereinafter abbreviated as thermal desorption) using a heated airflow on the entire honeycomb zeolite rotor, it becomes possible to use it for 40.9 hours. Here, if the safety factor is set to SF = 3.4, the calculation result is 40.9 / 3.4 = 12 hours. Therefore, this invention is designed for intermittent thermal desorption, allowing the honeycomb zeolite rotor to be used (adsorption operation) for 12 hours after 1 hour of thermal desorption. Since a day has 24 hours, 24 hours of continuous thermal desorption is unnecessary. This invention's unique "intermittent heating and detachment design" offers the significant advantage of saving on electricity costs (energy expenses) required for heating.

[0035] As a specific example, let's consider a honeycomb-shaped zeolite rotor with a diameter of 4250 mm, where an airflow of 8000 NCMH is required for attachment and detachment. The cooling section outlet temperature is set to 150°C, the target heating temperature to 220°C, and the electricity rate is based on NTD 3.5 yuan / kWh. First, calculating the power consumption for 24 hours of continuous heating and detachment, we get 209 kW * 24 hr = 5020 kW-hr. Assuming 360 days of operation per year, the annual electricity cost for operation would reach 5020 * 360 * 3.5 = 6,325,200 yuan / year. In contrast, if the intermittent heating and detachment honeycomb-shaped zeolite rotor, which is a unique design of this invention, is adopted, it is possible to use the rotor for 12 hours after 1 hour of heating and detachment, thus eliminating the need for 24 hours of continuous attachment and detachment. Under similar conditions (diameter 4250mm, airflow 8000 NCMH, heating from 150℃ to 220℃, electricity rate 3.5 yuan / kWh), the power consumption per 24 hours is 209 kW * (1 / 12) * 24hr = 418 kW-hr. Calculating for 360 days of operation per year, the annual electricity cost is 418 * 360 * 3.5 = 526,680 yuan / year. There is a significant difference in power consumption between the two, resulting in an annual difference in electricity costs of NTD 5,798,520. Clearly, this invention offers significant economic benefits in terms of annual operating costs and possesses excellent practical economic effects.

[0036] As described above, the present invention is primarily characterized by a design (see Figures 1 to 3) that combines outside air 1, a zeolite rotor adsorption device 2, an outdoor air conditioner (MAU) 3, a cleanroom 4, a heat exchanger 5, a volatile organic compound (VOC) treatment equipment 6, and a chimney 7. Specifically, the exhaust gas after combustion discharged from the outlet 631 of the combustion furnace 63 of the volatile organic compound treatment equipment 6 is subjected to heat exchange via the heat exchanger 5, then transported to the heater 11 for heating, and further transported to the desorption section 103 of the zeolite rotor adsorption device 2 for use. This allows the zeolite rotor 10 of the zeolite rotor adsorption device 2 to filter (remove) minute contaminants contained in the outside air 1 and supply it to the cleanroom 4 via the outdoor air conditioner (MAU) 3. Therefore, according to this invention, excellent energy utilization efficiency is achieved through heat recovery from exhaust gas, and the remarkable effect of significantly reducing minute contaminants entering the dust-free chamber 4 is obtained, resulting in a dramatic improvement in overall practicality.

[0037] Based on the above detailed explanation, it should be clear that a person with ordinary skill in the relevant art can reliably achieve the purpose of this invention, and since this invention conforms to the provisions of the Utility Model Act, we hereby file a utility model registration application.

[0038] However, the above-described content is merely a preferred embodiment of the present invention and does not limit the scope of implementation of the present invention. Therefore, all simple equivalent changes and modifications made based on the claims and description of the present invention shall be included within the scope of registration of the present invention. [Explanation of Symbols]

[0039] 1. Outside Air 2. Zeolite rotor adsorption device 3. Outdoor Air Conditioner (MAU) 4. Cleanroom 5, heat exchanger 6. The VOC treatment equipment 7. Chimney 10... Zeolite Rotor 101, Adsorption section 102. Cooling section 103, Detachable section 11. Heater 12. Air intake piping 121, Fan 122. Air forward communication piping 1221, Air forward communication control valve 13. Purified gas transport piping 131, Fan 14. Cooling gas intake piping 15. Cooling gas transport piping 16. Hot air transport piping 17. Detachable gas discharge piping 171, Fan 40. Casing (box) 401, entrance 402, exit 41. First filter device 42, 1st temperature control device 421, Pre-cooling coil 422, Preheating coil 423, Precooler 424, Preheater 43. Water washing device 44, 2nd temperature control device 441, recooling coil 442, reheat coil 443, recooler 444, reheater 45. Second filter device 46, Fan 501, cold side channel 502, hot side flow path 51. Cold-side transport piping 52. Heat transport piping 53. Heat side exhaust piping 54, Fan 60. Double rotor processing system 61. First suction rotor 62. Second suction rotor 63. Combustion furnace 631, Exit

Claims

1. Outside air containing at least one gas or a combination thereof, A zeolite rotor adsorption device comprising a zeolite rotor having an adsorption section, a cooling section, and a desorption section, a heater, an air advance pipe, a purified gas transport pipe, a cooling gas advance pipe, a cooling gas transport pipe, a hot air transport pipe, and a desorption gas discharge pipe, An outdoor air conditioning unit equipped with an inlet and an outlet, A dust-free room connected to the outlet of the aforementioned outdoor air conditioner, A heat exchanger having a cold side flow path and a hot side flow path, comprising a cold side transport pipe, a hot side transport pipe, and a hot side discharge pipe, A volatile organic compound treatment apparatus equipped with a combustion furnace and having an outlet provided in the combustion furnace, Chimney and, A heat recovery type ambient air micro-pollution adsorption and removal system comprising, One end of the air intake pipe introduces the outside air, and the other end is connected to one side of the adsorption section of the zeolite rotor. One end of the purifying gas transport piping is connected to the other side of the adsorption section, and the other end is connected to the inlet of the outdoor air conditioner. One end of the cooling gas intake pipe is connected to one side of the cooling section. One end of the cooling gas transport piping is connected to the other side of the cooling section, and the other end is connected to one end of the cold side flow path of the heat exchanger. One end of the hot air transport piping is connected to the other side of the detachable section, and the other end is connected to the heater. One end of the detachable gas discharge pipe is connected to one side of the detachable section. One end of the heat-side transport pipe is connected to one end of the heat-side flow path, and the other end is connected to the outlet of the combustion furnace. One end of the heat-side exhaust pipe is connected to the other end of the heat-side flow path, and the other end is connected to the chimney. A heat recovery type ambient air micro-contamination adsorption and removal system characterized by the following:

2. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 1, characterized in that the combustion furnace is one of a direct combustion type combustion furnace, a catalytic combustion furnace, or a regenerative combustion furnace.

3. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 1, characterized in that the volatile organic compound treatment apparatus further comprises either a single-rotor treatment system or a double-rotor treatment system.

4. The heat recovery type outside air micro-contamination adsorption and removal system according to claim 1, characterized in that fans are further provided in the heat-side transport piping and the heat-side discharge piping of the heat exchanger.

5. The heat recovery type outdoor air micro-contamination adsorption and removal system according to claim 1, characterized in that the outdoor air conditioner comprises a casing, and a first filter device, a first temperature control device, a water washing device, a second temperature control device, and a second filter device are incorporated inside the casing.

6. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 5, characterized in that the first temperature control device is one of a pre-cooling coil, a pre-cooler, a pre-heating coil, or a pre-heater, or a combination thereof.

7. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 5, characterized in that the second temperature control device is one of a recooling coil, a recooler, a reheating coil, or a reheater, or a combination thereof.

8. The heat recovery type outside air micro-contamination adsorption and removal system according to claim 5, characterized in that a fan is further provided inside the casing.

9. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 1, characterized in that the heater is one of the following: an electric heater, an electric tube heater, an electric sheet heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger.

10. The heat recovery type outside air micro-contamination adsorption and removal system according to claim 1, characterized in that a fan is further provided in the air advance piping of the zeolite rotor.

11. The heat recovery type outside air micro-contamination adsorption and removal system according to claim 1, characterized in that the air advance piping is further provided with an air advance communication piping, the air advance communication piping is connected to the cooling gas air advance piping, and an air advance communication control valve for controlling the airflow is provided.

12. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 1, characterized in that the other end of the desorption gas discharge pipe is connected to the outside air side.

13. The heat recovery type outside air micro-contamination adsorption and removal system according to claim 1, characterized in that a fan is further provided in the desorption gas discharge piping.

14. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 1, characterized in that the zeolite rotor is set to either continuous operation or scheduled operation.

15. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 14, characterized in that the rotational speed of the zeolite rotor is set to any of the ranges from 0.1 RPH to 2 RPH per hour.

16. The heat recovery type ambient air micro-contamination adsorption and removal system according to claim 1, characterized in that the detachment section of the zeolite rotor is set to either continuous detachment or scheduled detachment.

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