Coated and cutting tools

Abstract

This coated tool is provided with a substrate and at least one coating layer positioned on the substrate. The coating layer contains a cubic crystal comprising at least one element selected from groups 4a, 5a and 6a in the periodic table, Al and Si, and at least one element selected from C and N. In the measurement range 0°-90° in the X-ray intensity distribution on the α axis of a direct pole figure for the (111) crystal face of the cubic crystal, the coating layer has a maximum value (I1max) of X-ray intensity, and the angle region (θ1F) at which the I1max is greater than or equal to at least 85% takes up at least 90% of the region between 30° and 90°.

Description

[Technical field]

[0001] The present disclosure relates to coated tools and cutting tools. [Background technology]

[0002] 2. Description of the Related Art As tools used in cutting processes such as turning and milling, coated tools are known in which the surface of a base material such as cemented carbide, cermet, ceramics, etc. is coated with a coating layer to improve wear resistance and the like. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 146710 [Patent Document 2] International Publication No. 2011 / 016488 [Patent Document 3] International Publication No. 2010 / 007958 Summary of the Invention

[0004] A coated tool according to one embodiment of the present disclosure includes a substrate and at least one coating layer located on the substrate. The coating layer contains cubic crystals made of at least one element selected from the group consisting of elements from groups 4a, 5a, and 6a of the periodic table, Al, and Si, and at least one element selected from the group consisting of C and N. The coating layer has a maximum value of X-ray intensity (I 1max ) and I 1max The angle region where the X-ray intensity is 85% or more of the 1F ) accounts for more than 90% of the area between 30° and 90°. [Brief description of the drawings]

[0005] [Figure 1] FIG. 1 is a perspective view showing an example of a coated tool according to an embodiment. [Diagram 2] FIG. 2 is a side cross-sectional view showing an example of a coated tool according to an embodiment. [Diagram 3] FIG. 3 is a cross-sectional view showing an example of a coating layer according to the embodiment. [Figure 4] FIG. 4 is a schematic enlarged view of a portion H shown in FIG. [Diagram 5] FIG. 5 is a graph showing the X-ray intensity distribution of a pole figure for the (111) plane of a cubic crystal contained in the coating layer according to the embodiment. [Figure 6] FIG. 6 is a graph showing the X-ray intensity distribution of a pole figure for the (200) plane of a cubic crystal contained in the coating layer according to the embodiment. [Figure 7] FIG. 7 is a front view showing an example of a cutting tool according to an embodiment. [Figure 8] FIG. 8 is a table summarizing various values ​​in the X-ray intensity distribution of the pole figures for the (111) plane of the cubic crystals contained in the coating layer for Samples No. 1 to No. 8. [Figure 9] FIG. 9 is a table summarizing various values ​​in the X-ray intensity distribution of the pole figures for the (200) plane of the cubic crystals contained in the coating layer for Samples No. 1 to No. 6. [Figure 10] FIG. 10 is a table summarizing the results of the cutting tests carried out on Samples No. 1 to No. 8. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0006] Hereinafter, a detailed description will be given of a form for carrying out a coated tool and a cutting tool according to the present disclosure (hereinafter, referred to as an "embodiment") with reference to the drawings. Note that the coated tool and the cutting tool according to the present disclosure are not limited to the embodiment. Moreover, each embodiment can be appropriately combined as long as the processing contents are not contradictory. Moreover, the same parts in each of the following embodiments are given the same reference numerals, and duplicated explanations will be omitted.

[0007] In addition, in the embodiments described below, expressions such as "constant", "orthogonal", "vertical" and "parallel" may be used, but these expressions do not necessarily mean "constant", "orthogonal", "vertical" and "parallel" strictly. In other words, each of the above expressions allows for deviations due to, for example, manufacturing accuracy and installation accuracy.

[0008] The above-mentioned conventional techniques have room for further improvement in terms of improving impact resistance.

[0009] <Coated tools> Fig. 1 is a perspective view showing an example of a coated tool according to an embodiment. Fig. 2 is a side cross-sectional view showing an example of a coated tool 1 according to an embodiment. As shown in Fig. 1, the coated tool 1 according to the embodiment has a tip body 2.

[0010] (Chip body 2) Chip body 2 has, for example, a hexahedral shape in which the upper and lower surfaces (surfaces intersecting with the Z-axis shown in FIG. 1) are parallelogram-shaped.

[0011] One corner of the tip body 2 functions as a cutting edge portion. The cutting edge portion has a first surface (e.g., an upper surface) and a second surface (e.g., a side surface) connected to the first surface. In the embodiment, the first surface functions as a "scooping surface" that scoops up chips generated by cutting, and the second surface functions as a "flank surface." A cutting edge is located at least in a part of the ridge where the first surface and the second surface intersect, and the coated tool 1 cuts the workpiece by applying the cutting edge to the workpiece.

[0012] A through hole 5 that vertically passes through the tip body 2 is located in the center of the tip body 2. A screw 75 for attaching the coated tool 1 to a holder 70 (described later) is inserted into the through hole 5 (see FIG. 7).

[0013] As shown in FIG. 2, the chip body 2 has a base 10 and a covering layer 20.

[0014] (Base 10) The substrate 10 is formed of, for example, a cemented carbide. The cemented carbide contains W (tungsten), specifically, WC (tungsten carbide). The cemented carbide may also contain Ni (nickel) or Co (cobalt). For example, the substrate 10 is made of a WC-based cemented carbide having hard particles made of WC as a hard phase component and Co as a main component of a binder phase.

[0015] The substrate 10 may be made of a cermet. The cermet contains, for example, Ti (titanium), specifically, TiC (titanium carbide) or TiN (titanium nitride). The cermet may also contain Ni or Co.

[0016] The substrate 10 may be formed of a cubic boron nitride sintered body containing cubic boron nitride (cBN) particles. The substrate 10 is not limited to cubic boron nitride (cBN) particles, and may contain particles of hexagonal boron nitride (hBN), rhombohedral boron nitride (rBN), wurtzite boron nitride (wBN), or the like.

[0017] (Coating layer 20) The coating layer 20 is applied to the substrate 10 for the purpose of improving the wear resistance, heat resistance, etc. of the substrate 10. In the example of FIG. 2, the coating layer 20 covers the entire substrate 10. The coating layer 20 needs to be located at least on the substrate 10. When the coating layer 20 is located on the first surface (here, the upper surface) of the substrate 10, the wear resistance and heat resistance of the first surface are high. When the coating layer 20 is located on the second surface (here, the side surface) of the substrate 10, the wear resistance and heat resistance of the second surface are high.

[0018] Here, a specific configuration of the covering layer 20 will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view showing an example of the covering layer 20 according to the embodiment.

[0019] 3, the coating layer 20 is a layer having superior wear resistance compared to the intermediate layer 22 described below. The coating layer 20 has one or more metal nitride layers. The coating layer 20 may also have a first coating layer 23 in which a plurality of metal nitride layers are laminated, and a second coating layer 24 located on the first coating layer 23.

[0020] The coating layer 20 contains cubic crystals composed of at least one element selected from among elements of Groups 4a, 5a, and 6a of the periodic table, Al, and Si, and at least one element selected from among C and N. The elements of Group 4a are Ti, Zr, Hf, and Rf, the elements of Group 5a are V, Nb, Ta, and Db, and the elements of Group 6a are Cr, Mo, W, and Sg. The configuration of the coating layer 20 will be described later.

[0021] (Middle layer 22) An intermediate layer 22 may be located between the substrate 10 and the coating layer 20. Specifically, the intermediate layer 22 contacts the upper surface of the substrate 10 on one side (here, the lower surface) and contacts the lower surface of the coating layer 20 (first coating layer 23) on the other side (here, the upper surface).

[0022] The intermediate layer 22 has higher adhesion to the substrate 10 than the coating layer 20. Examples of metal elements having such properties include Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, and Ti. The intermediate layer 22 contains at least one of the above metal elements. For example, the intermediate layer 22 may contain Ti. Note that Si is a metalloid element, but in this specification, metalloid elements are also included in the metal elements.

[0023] When the intermediate layer 22 contains Ti, the Ti content in the intermediate layer 22 may be 1.5 atomic % or more. For example, the Ti content in the intermediate layer 22 may be 2.0 atomic % or more.

[0024] Intermediate layer 22 may contain components other than the above metal elements (Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, Ti). However, from the viewpoint of adhesion to substrate 10, intermediate layer 22 may contain the above metal elements in a total amount of at least 95 atomic % or more. More preferably, intermediate layer 22 may contain the above metal elements in a total amount of 98 atomic % or more. The proportion of the metal components in intermediate layer 22 can be identified by, for example, analysis using an EDS (energy dispersive X-ray spectrometer) attached to a STEM (scanning transmission electron microscope).

[0025] In this way, in the coated tool 1 according to the embodiment, the intermediate layer 22, which has higher wettability with the substrate 10 than the coating layer 20, is provided between the substrate 10 and the coating layer 20, thereby improving the adhesion between the substrate 10 and the coating layer 20. Since the intermediate layer 22 also has high adhesion with the coating layer 20, peeling of the coating layer 20 from the intermediate layer 22 is unlikely to occur.

[0026] The intermediate layer 22 may be formed by using an arc ion plating method (AIP method). The AIP method is a method of forming a metal nitride film by evaporating a target metal using an arc discharge in a vacuum atmosphere and combining it with N2 gas. At this time, a bias voltage applied to the substrate 10, which is the object to be coated, may be 400 V or more. The coating layer 20 may also be formed by the AIP method.

[0027] The thickness of the intermediate layer 22 may be, for example, not less than 0.1 nm and less than 20.0 nm.

[0028] (First coating layer 23 and second coating layer 24) Next, the configurations of the first covering layer 23 and the second covering layer 24 will be described with reference to Fig. 4. Fig. 4 is a schematic enlarged view of a portion H shown in Fig. 3.

[0029] As shown in FIG. 4, the coating layer 20 has a first coating layer 23 located on the intermediate layer 22 and a second coating layer 24 located on the first coating layer 23.

[0030] The first covering layer 23 has a plurality of first layers 23a and a plurality of second layers 23b. The first covering layer 23 has a striped configuration in which the first layers 23a and the second layers 23b are alternately laminated in the thickness direction.

[0031] The thickness of each of the first layer 23a and the second layer 23b may be 50 nm or less. The first layer 23a and the second layer 23b formed thinly have small residual stress and are less likely to peel off or crack, so that the durability of the coating layer 20 is increased.

[0032] The first layer 23a is a layer in contact with the intermediate layer 22, and the second layer 23b is formed on the first layer 23a.

[0033] The first coating layer 23, specifically the first layer 23a and the second layer 23b, may be composed of at least one element selected from the group consisting of Al, Cr, Si, Group 5 elements, Group 6 elements, and Group 4 elements excluding Ti, and at least one element selected from the group consisting of C and N. Specifically, the first layer 23a and the second layer 23b may have at least one element selected from the group consisting of Al, Group 5 elements, Group 6 elements, and Group 4 elements excluding Ti, at least one element selected from the group consisting of C and N, Si, and Cr.

[0034] More specifically, the first layer 23a and the second layer 23b may have Al, Cr, Si, and N. That is, the first layer 23a and the second layer 23b may be an AlCrSiN layer containing AlCrSiN, which is a nitride of Al, Cr, and Si. Note that the expression "AlCrSiN" means that Al, Cr, Si, and N are present in any ratio, and does not necessarily mean that Al, Cr, Si, and N are present in a 1:1:1:1:1 ratio.

[0035] In this manner, by positioning the first layer 23a containing the metal (for example, Si) contained in the intermediate layer 22 on the intermediate layer 22, the adhesion between the intermediate layer 22 and the coating layer 20 is high. This makes it difficult for the coating layer 20 to peel off from the intermediate layer 22, and therefore the durability of the coating layer 20 is high.

[0036] The first layer 23a and the second layer 23b may each contain Al, Cr, Si, and N. Here, the Al content in the first layer 23a is referred to as the first Al content, the Cr content in the first layer 23a is referred to as the first Cr content, and the Si content in the first layer 23a is referred to as the first Si content. Also, the Al content in the second layer 23b is referred to as the second Al content, the Cr content in the second layer 23b is referred to as the second Cr content, and the Si content in the second layer 23b is referred to as the second Si content.

[0037] In this case, the first Al content may be greater than the second Al content, the first Cr content may be less than the second Cr content, and the first Si content may be greater than the second Si content. The total of Al, Cr, and Si in the metal elements contained in the first coating layer 23 may be 98 atomic % or more.

[0038] The second coating layer 24 may contain Ti, Si, and N. That is, the second coating layer 24 may be a nitride layer (TiSiN layer) containing Ti and Si. Note that the expression "TiSiN layer" means that Ti, Si, and N are present in any ratio, and does not necessarily mean that Ti, Si, and N are present in a 1:1:1 ratio.

[0039] As a result, for example, when the friction coefficient of the second coating layer 24 is low, the adhesion resistance of the coated tool 1 can be improved. Also, for example, when the hardness of the second coating layer 24 is high, the wear resistance of the coated tool 1 can be improved. Also, for example, when the oxidation onset temperature of the second coating layer 24 is high, the oxidation resistance of the coated tool 1 can be improved.

[0040] The second coating layer 24 may have a striped structure in which at least two layers are located in the thickness direction. Each layer in the striped structure of the second coating layer 24 may contain, for example, Ti, Si, and N. In this case, the Ti content (hereinafter referred to as the "Ti content"), the Si content (hereinafter referred to as the "Si content"), and the N content (hereinafter referred to as the "N content") of the second coating layer 24 may each repeatedly increase and decrease along the thickness direction of the second coating layer 24. Of the metal elements contained in the second coating layer 24, the total of Ti and Si may be 98 atomic % or more. The second coating layer 24 may also have a third layer and a fourth layer alternately located in the thickness direction.

[0041] <X-ray intensity distribution of pole figures for the (111) surface> Fig. 5 is a graph showing the X-ray intensity distribution of a pole figure for the (111) plane of a cubic crystal contained in the coating layer 20 according to the embodiment. The horizontal axis of the pole figure shown in Fig. 5 indicates the angle of the α-axis (tilt axis), and the vertical axis indicates the X-ray intensity in the tilt direction.

[0042] The orientation of the (111) plane in a cubic crystal can be evaluated by the X-ray intensity distribution of a pole figure for the (111) plane. For example, when there is a peak at 45° in the X-ray intensity distribution of a pole figure for the (111) plane, this means that there are many cubic crystals whose (111) planes are inclined at 45° to the surface of the substrate 10.

[0043] As shown in FIG. 5, the coating layer 20 according to the embodiment has a maximum X-ray intensity I 1max has.

[0044] Here, I 1max The angle region of the α axis where the strength is 85% or more of 1F In the covering layer 20 according to the embodiment, θ 1FThe angle of the α-axis may be in the range of 30° to 90° inclusive in 90% or more. With this configuration, the crystal orientation is aligned to a certain extent, thereby reducing sudden defects. Therefore, the coated tool 1 having the coating layer 20 with this configuration has high impact resistance.

[0045] In addition, in the pole figure for the (111) plane shown in FIG. 1max The angle θ of the α axis 1max The first region is the higher angle region, and θ 1max The lower angle region is designated as the second region. The minimum value of the X-ray intensity in the first region is designated as I 11min The minimum value of the X-ray intensity in the second region is I 12min Let us assume that.

[0046] In this case, the coating layer 20 is I 1max and I 11min Difference (I 1max -I 11min ), but I 1max and I 12min Difference (I 1max -I 12min ) is smaller than I 11min I 1max The ratio may be 85% or more.

[0047] When the coating layer 20 has such an orientation, there is a region with high crystal orientation in the coating layer 20. This allows the coated tool 1 having such a coating layer 20 to withstand impacts from various directions. Therefore, the coated tool 1 according to the embodiment has high impact resistance.

[0048] In addition, in the pole figure for the (111) plane shown in FIG. 5, the coating layer 20 is I 12min I 1max The range may be 5% or more and 20% or less.

[0049] When the coating layer 20 has such an orientation, it is possible to reduce the orientation in the direction in which the coating layer 20 receives a weak impact. This allows many orientations to be aligned in the direction in which the impact is strong. Therefore, the coated tool 1 having the coating layer 20 with such a configuration has high impact resistance.

[0050] In addition, in the pole figure for the (111) plane shown in FIG. 1max may be greater than or equal to 35° and less than or equal to 55°.

[0051] θ 1max is in this range, the coating layer 20 is resistant to impacts from both the horizontal and vertical directions. Therefore, the coated tool 1 having the coating layer 20 of this configuration has high impact resistance.

[0052] In addition, in the pole figure for the (111) plane shown in FIG. 5, the coating layer 20 may have at least one inflection point in the first region.

[0053] When the coating layer 20 has such an orientation, the region with high orientation can be enlarged, and therefore the coated tool 1 having the coating layer 20 with such an orientation has high impact resistance.

[0054] <X-ray intensity distribution of pole figures for the (200) plane> Fig. 6 is a graph showing the X-ray intensity distribution of a pole figure for the (200) plane of a cubic crystal contained in the coating layer 20 according to the embodiment. The horizontal axis of the pole figure shown in Fig. 6 indicates the angle of the α-axis (tilt axis), and the vertical axis indicates the X-ray intensity in the tilt direction.

[0055] As shown in FIG. 6, the coating layer 20 according to the embodiment has a maximum X-ray intensity I 2max where I 2max The angle of the α axis is θ 2max Then, θ 2max The higher angle region is designated as the third region, and θ 2max The lower angle region is called the fourth region. The minimum value of the X-ray intensity in the third region is called I 23min The minimum value of the X-ray intensity in the fourth region is I 24min Let us assume that.

[0056] In the pole figure for the (200) plane shown in FIG. 2max and I 23min Difference (I 2max -I 23min ), but I 2max and I 24min Difference with (I 2max -I 24min ) is smaller than I 23min I 2max The ratio may be 95% or more.

[0057] When the coating layer 20 is configured in this manner, the coating layer 20 has a structure similar to that of I 2max Therefore, the coated tool 1 having the coating layer 20 with such a configuration has high impact resistance.

[0058] In addition, in the pole figure for the (200) plane shown in FIG. 6, the coating layer 20 is I 24min I 2max The range may be 2% or more and 35% or less.

[0059] When the coating layer 20 has such an orientation, it is possible to reduce the orientation in the direction in which the coating layer 20 receives a weak impact. This allows many orientations to be aligned in the direction in which the impact is strong. Therefore, the coated tool 1 having the coating layer 20 with such a configuration has high impact resistance.

[0060] In addition, in the pole figure for the (200) plane shown in FIG. 6, the coating layer 20 according to the embodiment has a θ 2max may be 70° or more and 85° or less.

[0061] θ 2max is in this range, the coating layer 20 is resistant to impacts from both the horizontal and vertical directions. Therefore, the coated tool 1 having the coating layer 20 of this configuration has high impact resistance.

[0062] The coating layer 20 can be positioned on the substrate 10 by using, for example, a physical vapor deposition (PVD) method. For example, when the coating layer 20 is formed by utilizing the above-mentioned vapor deposition method while the substrate 10 is held on the inner peripheral surface of the through-hole 5, the coating layer 20 can be positioned so as to cover the entire surface of the substrate 10 except for the inner peripheral surface of the through-hole 5.

[0063] <Cutting tools> Next, the configuration of a cutting tool including the above-mentioned coated tool 1 will be described with reference to Fig. 7. Fig. 7 is a front view showing an example of a cutting tool according to an embodiment.

[0064] As shown in FIG. 7, a cutting tool 100 according to the embodiment includes a coated tool 1 and a holder 70 for fixing the coated tool 1.

[0065] The holder 70 is a rod-shaped member extending from a first end (the upper end in FIG. 7) to a second end (the lower end in FIG. 7). The holder 70 is made of, for example, steel or cast iron. Of these materials, it is particularly preferable to use steel, which has high toughness.

[0066] The holder 70 has a pocket 73 at the end on the first end side. The pocket 73 is a portion where the coated tool 1 is attached, and has a seating surface that intersects with the rotation direction of the workpiece and a constraint side surface that is inclined relative to the seating surface. The seating surface is provided with a screw hole into which a screw 75, which will be described later, is screwed.

[0067] The coated tool 1 is positioned in a pocket 73 of the holder 70, and is attached to the holder 70 by a screw 75. That is, the screw 75 is inserted into the through hole 5 of the coated tool 1, and the tip of the screw 75 is inserted into a screw hole formed in the seating surface of the pocket 73 to screw the threaded portions together. In this way, the coated tool 1 is attached to the holder 70 such that the cutting edge portion protrudes outward from the holder 70.

[0068] In the embodiment, a cutting tool used in so-called turning is exemplified. Examples of turning include inner diameter machining, outer diameter machining, and grooving. The cutting tool is not limited to that used in turning. For example, the coated tool 1 may be used as a cutting tool used in turning. Examples of cutting tools used in turning include milling cutters such as flat milling cutters, face milling cutters, side milling cutters, and groove milling cutters, and end mills such as single-blade end mills, multiple-blade end mills, tapered-blade end mills, and ball end mills.

[0069] (Manufacturing method) Next, an example of a method for producing the coated tool 1 according to this embodiment will be described. Note that the method for producing the coated tool of this embodiment is not limited to the following method.

[0070] The coating layer may be formed by, for example, a physical vapor deposition method. Examples of the physical vapor deposition method include an ion plating method and a sputtering method. As an example, when the coating layer is formed by an ion plating method, the coating layer can be formed by the following method.

[0071] First, an example of a method for manufacturing the intermediate layer is shown. -3 ~1×10 -4 The substrate is heated in a reduced pressure environment of 100 Pa to a surface temperature of 500 to 600°C. Then, argon gas is introduced as the atmospheric gas, and the pressure is maintained at 3.0 Pa. Next, the bias voltage is set to -400V, and argon bombardment is performed for 11 minutes. Next, the pressure is reduced to 0.1 Pa, and an arc current of 130 to 160A is applied to the Ti metal evaporation source, and the treatment is performed for 0.3 minutes, forming a Ti-containing intermediate layer as an intermediate layer on the surface of the substrate. The argon bombardment and Ti-containing intermediate layer formation treatment may be repeated to produce an intermediate layer of a desired thickness. However, in the second and subsequent argon bombardment treatments, the bias voltage is set to -200V.

[0072] Next, an example of a method for producing the first coating layer by an ion plating method will be described. First, for example, metal targets of Cr, Si and Al, or composite alloy targets, or sintered compact targets are prepared.

[0073] Next, the above target, which is the metal source, is evaporated and ionized by arc discharge or glow discharge. The ionized metal is reacted with nitrogen (N2) gas, which is the nitrogen source, and is evaporated onto the surface of the substrate. The above procedure makes it possible to form an AlCrSiN layer.

[0074] In the above procedure, the temperature of the substrate may be set to 500 to 600° C., the nitrogen gas pressure may be set to 1.0 to 6.0 Pa, a DC bias voltage of −50 to −200 V may be applied to the substrate, and the arc discharge current may be set to 100 to 200 A.

[0075] The composition of the first coating layer can be adjusted by independently controlling the voltage and current values ​​during arc discharge and glow discharge applied to the aluminum metal target, the chromium metal target, the aluminum-silicon composite alloy target, and the chromium-silicon composite alloy target for each target. The composition of the coating layer can also be adjusted by controlling the coating time and the atmospheric gas pressure. In one embodiment, the amount of ionization of the target metal can be changed by changing the voltage and current values ​​during arc discharge and glow discharge. The amount of ionization of the target metal can be changed periodically by periodically changing the current value during arc discharge and glow discharge for each target. The amount of ionization of the target metal can be changed periodically by periodically changing the current value during arc discharge and glow discharge of the target at intervals of 0.01 to 0.5 min. This allows the coating layer to have a configuration in which the content ratio of each metal element changes in each period in the thickness direction.

[0076] When carrying out the above procedure, it is possible to produce a first coating layer having a first layer and a second layer by changing the composition of Al, Si, and Cr so that the amounts of Al and Si are smaller and the amount of Cr is larger, and then changing the composition of Al, Si, and Cr so that the amounts of Al and Si are larger and the amount of Cr is smaller.

[0077] Next, an example of a method for producing the second coating layer, which is a TiSiN layer, will be described.

[0078] Like the first coating layer, the second coating layer may also be formed by physical vapor deposition. As an example, a Ti metal target and a Ti-Si composite alloy target are first prepared. Then, the voltage and current values ​​during arc discharge and glow discharge applied to each prepared target are independently controlled for each target, thereby producing a second coating layer having a striped structure.

[0079] In the above procedure, the temperature of the substrate may be set to 500 to 600° C., the nitrogen gas pressure may be set to 1.0 to 6.0 Pa, a DC bias voltage of −50 to −200 V may be applied to the substrate, the arc discharge current may be set to 100 to 200 A, and the change period of the arc current may be set to 0.01 to 0.5 min. EXAMPLES

[0080] Examples of the present disclosure will be specifically described below. Note that the present disclosure is not limited to the examples shown below.

[0081] A coated tool having a substrate made of WC, an intermediate layer made of a Ti-containing layer, a first coating layer made of an AlCrSiN layer, and a second coating layer made of a TiSiN layer was designated as Sample No. 1. Sample No. 1 corresponds to an example of the present disclosure.

[0082] 1×10 -3The substrate was heated in a reduced-pressure environment of Pa to a surface temperature of 550 °C. Next, argon gas was introduced as the atmospheric gas, and the pressure was maintained at 3.0 Pa. Next, with a bias voltage of -400 V, argon bombardment treatment was performed for 11 minutes. Next, the pressure was reduced to 0.1 Pa, an arc current of 150 A was applied to the Ti metal evaporation source, and the treatment was performed for 0.3 minutes to form a Ti-containing layer on the surface of the substrate. By repeating the argon bombardment treatment and the Ti-containing layer formation treatment a total of 3 times, an intermediate layer with a layer thickness of 8 nm was formed. However, in the second and third argon bombardment treatments, the bias voltage was set to -200 V.

[0083] <Processing conditions for argon bombardment treatment> (1) Bias voltage: -400 V (2) Pressure: 3 Pa (3) Processing time: 11 minutes

[0084] <Film formation conditions for Ti-containing layer> (1) Arc current: 150 A (2) Bias voltage: -400 V (3) Pressure: 0.1 Pa (4) Processing time: 0.3 minutes

[0085] <Processing conditions for argon bombardment treatment from the second time onwards> (1) Bias voltage: -200 V (2) Pressure: 3 Pa (3) Processing time: 1 minute

[0086] The intermediate layer may contain other metal elements due to diffusion. For example, when the intermediate layer contains Ti, it may contain 50 to 98 atomic% of metal elements other than Ti.

[0087] Next, a first coating layer was formed. Nitrogen gas was introduced as the atmospheric gas and the N source into the chamber containing the substrate, and the pressure inside the chamber was maintained at 3 Pa. Next, Al metal, Cr metal, and Al 50 Si 50A bias voltage of -130 V and an arc current of 135 to 150 A, 120 to 150 A, and 110 to 120 A were applied to the alloy evaporation source for 15 min, and each arc current was repeatedly applied at a cycle of 0.04 min to form the first coating layer of Al with an average thickness of 1.8 μm. 50 Cr 39 S 11 The N layer was formed.

[0088] Next, a second coating layer was formed. 50 S 50 A bias voltage of -100 V and an arc current of 100 to 200 A and 100 to 200 A were applied to the alloy evaporation source, respectively, for 10 min, repeatedly at a cycle of 0.04 min. The second coating layer of Ti with an average thickness of 1.2 μm was formed. 86 S 14 The N layer was formed.

[0089] The measurement conditions for the X-ray intensity distribution for sample No. 1 were as follows. When the normal to the sample surface is on the plane determined by the incident ray and the diffracted ray, the α angle is set to 90°. When the α angle is 90°, it is the center point on the pole figure. (1) Flat collimator (2) Scanning method: concentric circles (3) β scanning range: 0° to 360° / 2.5° pitch (4) θ fixed angle: Ti 86 S 14 The diffraction angle of the (111) plane of the N crystal is set to the angle at which the diffraction intensity is highest between 36.0° and 38.0°. 86 S 14 The diffraction angle of the (200) plane of the N crystal is set to be the angle at which the diffraction intensity is highest between 42.0° and 44.0°. (5) α scanning range: 0° to 90° / 2.5° step (6) Target: CuKα, voltage: 45 kV, current: 40 mA

[0090] A cutting test was conducted using a coated ball end mill of the shape 2KMBL0200-0800-S4 on which a coating layer was formed. In the cutting test, the cutting edge flank was observed every 1 m of cutting length, and the presence or absence of chipping was observed under a microscope, and the number of impacts was calculated from the cutting length at which chipping occurred. The test conditions are shown below. In addition, similar tests were conducted on conventional products (samples No. 2 to No. 8) as comparative examples.

[0091] <Cutting test conditions> (1) Work material: SKD11H (2) Rotational speed: 16,900 min -1 (3) Table feed: 1320 mm / min (4) Depth of cut (ap x ae): 0.08 mm x 0.2 mm (5) Cutting condition: Wet (6) Coolant: Oil mist

[0092] <X-ray intensity distribution of pole figures for the (111) surface> FIG. 8 is a table summarizing various values ​​in the X-ray intensity distribution of the pole figures for the (111) plane of the cubic crystals contained in the coating layer for Samples No. 1 to No. 8.

[0093] As shown in Fig. 8, in sample No. 1, the maximum X-ray intensity was I 1max The angle region where the X-ray intensity is 85% or more of the 1F ) was 56.8°. In addition, in the angle range of 30° to 90°, 1F The ratio of θ 1F / (90°-30°) was 94.6%.

[0094] In contrast, the θ 1F / (90°-30°) are 50.0%, 42.5%, 55.8%, 61.7%, 48.3%, 31.7% and 25.0%, respectively. That is, in all of the samples No. 2 to No. 8, the θ 1FThe proportion of these is less than 90%.

[0095] In addition, in sample No. 1, the maximum X-ray intensity, I 1max and the minimum value of the X-ray intensity in the first region, I 11min Difference with (I 1max -I 11min ) is 375, and the maximum X-ray intensity, I 1max and the minimum value of the X-ray intensity in the second region, I 12min The difference between the two was 2663. In sample No. 1, I 1max I 11min The ratio of I 11min / I 1max The rate was 86.8%.

[0096] Thus, in sample No. 1, I 1max and I 11min Difference with (I 1max -I 11min ) is I 1max and I 12min is smaller than the difference between 11min I 1max In contrast, samples No. 2 to No. 8 were all 85% or more of I 11min I 1max Less than 85% of

[0097] In addition, in sample No. 1, I 1max I 12min The ratio of I 12min / I 1max In this way, in sample No. 1, I 12min I 1max In contrast, samples No. 2 to No. 4, No. 7, and No. 8 are 12min I 1max The results are less than 5% of the I 12min I 1max This was over 20%.

[0098] In addition, in sample No. 1, θ 1maxIn this way, in sample No. 1, θ 1max In contrast, the θ of samples No. 2 to No. 8 was 35° or more and 55° or less. 1max were 60°, 32.5°, 32.5°, 60°, 40°, 80°, and 60°, respectively.

[0099] Also, sample No. 1 has an inflection point at 60°. That is, sample No. 1 has one inflection point in the first region. In contrast, sample No. 2 has an inflection point at 85° in the first region, sample No. 3 has inflection points at 47.5° and 80° in the first region, and sample No. 4 has inflection points at 47.5°, 60°, and 82.5° in the first region. Also, sample No. 5 does not have an inflection point, sample No. 6 has an inflection point at 85° in the first region, sample No. 7 does not have an inflection point, and sample No. 8 has an inflection point at 75° in the first region.

[0100] <X-ray intensity distribution of pole figures for the (200) plane> FIG. 9 is a table summarizing various values ​​in the X-ray intensity distribution of the pole figures for the (200) plane of the cubic crystals contained in the coating layer for Samples No. 1 to No. 6.

[0101] As shown in Fig. 9, in sample No. 1, the maximum X-ray intensity was I 2max and the minimum value of the X-ray intensity in the third region, I 23min Difference with (I 2max -I 23min ) is 61, and I 2max and the minimum value of the X-ray intensity in the fourth region, I 24min Difference with (I 2max -I 24min ) was 4912. In sample No. 1, I 2max I 23min The ratio of I 23min / I 2max The I 2max and I 23min Difference with (I2max -I 23min ), but I 2max and I 24min Difference with (I 2max -I 24min ) is smaller than I 23min I 2max More than 95% of cases are

[0102] In contrast, samples No. 2 to No. 6 were I 2max I 23min The ratio of I 23min / I 2max However, the rates were 58.4%, 49.9%, 37.8%, 90.5%, and 56.9%, respectively, all of which were below 95%.

[0103] In addition, in sample No. 1, I 2max I 24min The ratio of I was 2.4%. 24min I 2max In contrast, samples No. 2 to No. 4 are 2% to 35% of I 24min I 2max The results are less than 2% of the I 24min I 2max This is over 35%.

[0104] In addition, in sample No. 1, θ 2max The angle of the sample No. 1 was 82.5°. 2max In contrast, the θ of samples No. 2 to No. 6 is 70° or more and 85° or less. 2max were 67.5°, 65°, 20°, 70°, 70°, and 75°, respectively.

[0105] <Cutting test results> Fig. 10 is a table summarizing the results of the cutting tests carried out on samples No. 1 to No. 8. As shown in Fig. 10, sample No. 1, which corresponds to an example of the present disclosure, did not experience chipping even after 128,000 impacts. In contrast, samples No. 2 to No. 8, which are comparative examples, experienced chipping after 30,000 to 50,000 impacts.

[0106] Thus, sample No. 1, which corresponds to an example of the present disclosure, required a greater number of impacts before chipping occurred, compared with samples Nos. 2 to 8, which are comparative examples. This result shows that the coated tool according to the present disclosure has high impact resistance.

[0107] As described above, the coated tool according to the embodiment (coated tool 1, for example) includes a substrate (substrate 10, for example) and at least one coating layer (coating layer 20, for example) located on the substrate. The coating layer contains cubic crystals made of at least one element selected from among elements of groups 4a, 5a, and 6a of the periodic table, Al, and Si, and at least one element selected from among C and N. The coating layer also has a maximum X-ray intensity (I 1max ) and I 1max The angle region where the X-ray intensity is 85% or more of the 1F ) accounts for more than 90% of the area between 30° and 90°.

[0108] Therefore, according to the coated tool according to the embodiment, it is possible to improve the impact resistance.

[0109] 1 is merely an example and does not limit the shape of the coated tool according to the present disclosure. The coated tool according to the present disclosure may have, for example, a rod-shaped main body having a rotation axis and extending from a first end to a second end, a cutting edge located at the first end of the main body, and a groove extending spirally from the cutting edge toward the second end of the main body.

[0110] Further advantages and modifications may readily occur to those skilled in the art. Thus, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and equivalents thereof. [Explanation of symbols]

[0111] 1. Coated tools 2 Chip body 5 Through hole 10 Base 20 Covering layer 22 Middle Class 23 First coating layer 24 Second coating layer 70 Holder 73 Pocket 75 Screw 100 cutting tools

Claims

1. A substrate and at least one coating layer disposed on the substrate, the coating layer contains cubic crystals composed of at least one element selected from among elements in Groups 4a, 5a, and 6a of the Periodic Table, Al, and Si, and at least one element selected from among C and N, The coating layer has a maximum X-ray intensity (I １ｍａｘ ) and said I １ｍａｘ The angular region (θ １Ｆ ) occupies 90% or more of an area of ​​30° or more and 90° or less.

2. In the pole figure for the (111) plane, the coating layer is １ｍａｘ The angle of the α axis (θ １ｍａｘ The minimum value of the X-ray intensity in the first region, which is the region on the higher angle side than １１ｍｉｎ ) and the above I １ｍａｘ Difference with (I １ｍａｘ -I １１ｍｉｎ ) is the θ １ｍａｘ The minimum value of the X-ray intensity in the second region, which is the lower angle region (I １２ｍｉｎ ) and the above I １ｍａｘ Difference with (I １ｍａｘ -I １２ｍｉｎ ) is smaller than I １１ｍｉｎ The above I １ｍａｘ The coated tool according to claim 1 , wherein the thickness of the coated tool is 85% or more.

3. The coated tool according to claim 2 , wherein in a pole figure for the (111) plane, the coating layer has at least one inflection point in the first region.

4. In the pole figure for the (111) plane, the coating layer is １２ｍｉｎ The above I １ｍａｘ The coated tool according to claim 2 or 3, wherein the thickness of the coated tool is 5% or more and 20% or less.

5. In the pole figure for the (111) plane, the coating layer is １ｍａｘ The angle of the α axis (θ １ｍａｘ 2. The coated tool according to claim 1, wherein the angle .theta.

6. The coating layer has a maximum value of X-ray intensity (I2max) in a measurement range in which the angle of the α-axis in the X-ray intensity distribution of the α-axis of a pole figure for the (200) face of the cubic crystal is 0° or more and 90° or less, 2. The coated tool according to claim 1, wherein a difference (I 2max -I 23min ) between the minimum value (I 23min ) of X-ray intensity in a third region, which is a region on the higher angle side of the α-axis angle (θ 2max ) indicating the I 2max , and the I 2max is smaller than a difference (I 2max -I 24min ) between the minimum value (I 24min ) of X-ray intensity in a fourth region, which is a region on the lower angle side of the θ 2max , and the I 2max is 95% or more of the I 2max .

7. The coated tool according to claim 6, wherein in a pole figure for the (200) plane, the coating layer has I 24min which is 2% or more and 35% or less of I 2max .

8. The coated tool according to claim 6, wherein in a pole figure for the (200) plane, the coating layer has θ 2max of 70° or more and 85° or less.

9. a rod-shaped holder having a pocket at one end; The coated tool of claim 1 located within the pocket; A cutting tool having

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