Measurement Unit

Abstract

To provide a measurement unit capable of suppressing noises.SOLUTION: A measurement unit according to the present invention includes: a ground part that forms a part of a line that conducts the potential for grounding, and where the surface of one end is flat; a signal part that forms a part of a line that conducts a signal for measurement, the end of which is exposed on the same plane as the plane of the ground part; an insulating dielectric part provided between the ground part and the signal part; a first contact probe that is conductive and stretches / contracts along the longitudinal axis and is in contact with the signal part; and a second contact probe that is conductive and stretches / contracts along the longitudinal axis and is in contact with the ground part.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a measurement unit. [Background technology]

[0002] Conventionally, when inspecting the continuity or operating characteristics of an object to be inspected, such as a semiconductor integrated circuit or a liquid crystal panel, a cable connected to an inspection device and a connection member connected to the end of the cable opposite the inspection device side are used (see, for example, Patent Document 1). The cable has a signal conductor in the center, a dielectric covering the signal conductor, and a ground conductor covering the dielectric. The connection member has a center contactor that connects to the signal conductor and a side contactor that contacts the ground conductor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4678993 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the configuration described in Patent Document 1, the end of the cable is cut at an angle and connected to a connection member. At this connection, the transmission line is changed from a coaxial line to a so-called coplanar line, and the change in line makes it easier for noise to be picked up.

[0005] The present invention has been made in view of the above, and has an object to provide a measurement unit capable of suppressing noise. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the measurement unit of the present invention is characterized in comprising a ground section forming part of a line that conducts an earth potential and having a flat surface on one end side, a signal section forming part of a line that conducts a measurement signal and having an end that is exposed on the same plane as the flat surface of the ground section, an insulating dielectric section provided between the ground section and the signal section, a first conductive contact probe that is stretchable along the longitudinal axis and contacts the signal section, and a second conductive contact probe that is stretchable along the longitudinal axis and contacts the ground section.

[0007] Moreover, the measurement unit of the present invention, in the above invention, comprises a ground plate and a coaxial cable connected to the ground plate, the coaxial cable having a signal conductor forming a part of the line of the signal section, a dielectric provided on the outer periphery of the signal conductor, and a ground conductor provided on the outer periphery of the dielectric, the signal conductor constituting the signal section, the dielectric constituting the dielectric section, and the ground conductor and the ground plate constituting the ground section.

[0008] In addition, in the measurement unit according to the present invention, in the above invention, the ground plate is formed with a through hole through which the ground conductor is inserted.

[0009] In addition, in the measurement unit of the present invention, in the above invention, the ground plate has a through hole through which the dielectric is inserted, and the ground conductor is electrically connected to a surface of the ground plate.

[0010] Moreover, in the above-mentioned invention, the measuring unit according to the present invention comprises a ground plate and a coaxial cable connected to the ground plate, the ground plate having a signal relay section forming a part of the line of the signal section and a ground plate side dielectric covering an outer periphery of the signal relay section, the coaxial cable having a signal conductor forming a part of the line of the signal section and electrically connected to the signal relay section, a cable side dielectric provided on the outer periphery of the signal conductor, and a ground conductor provided on the outer periphery of the cable side dielectric and electrically connected to a position of the ground plate different from the signal relay section and the ground plate side dielectric, the signal relay section and the signal conductor constituting the signal section, the ground plate side dielectric and the cable side dielectric constituting the dielectric section, and the ground conductor and the ground plate constituting the ground section.

[0011] In addition, in the measurement unit according to the present invention, a plurality of the coaxial cables are connected to the ground plate.

[0012] In addition, the measurement unit of the present invention, in the above invention, comprises a coaxial cable including a signal conductor forming the line of the signal section, a dielectric provided on the outer periphery of the signal conductor and constituting the dielectric section, and a ground conductor provided on the outer periphery of the dielectric and constituting the ground section, wherein the ground conductor has a tubular portion extending along the signal conductor and the dielectric, and a flat portion provided at one end of the tubular portion and having a flat shape, and end faces of the signal conductor and the dielectric are located on the same plane as a surface of the flat portion.

[0013] In addition, the measuring unit according to the present invention is characterized in that, in the above invention, the measuring unit has a plurality of sets of the signal conductor, the dielectric body, and the cylindrical portion.

[0014] In addition, the measurement unit of the present invention, in the above invention, comprises a first connection portion having the ground portion, the signal portion and the dielectric portion, and a second connection portion having the ground portion, the signal portion and the dielectric portion, the second connection portion being provided opposite the first connection portion, and one end of the first and second contact probes contacts the first connection portion and the other end contacts the second connection portion. Effect of the Invention

[0015] The present invention provides an effect of suppressing noise. [Brief description of the drawings]

[0016] [Figure 1] FIG. 1 is a diagram showing a configuration of a measurement system according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a diagram for explaining the configuration of a portion of the measurement system shown in FIG. [Diagram 3] FIG. 3 is a diagram showing a detailed configuration of a probe accommodated in the probe holder. [Figure 4] FIG. 4 is a diagram for explaining a connection mode between the probe and the ground plate. [Diagram 5] FIG. 5 is an enlarged view of a portion of FIG. [Figure 6] FIG. 6 is a diagram for explaining the configuration of the ground plate and the coaxial cable. [Figure 7] FIG. 7 is a diagram for explaining the configuration of the ground plate and the coaxial cable according to the first modification. [Figure 8] FIG. 8 is a diagram for explaining the configuration of the ground plate and the coaxial cable according to the second modification. [Figure 9] FIG. 9 is a diagram for explaining the configuration of a coaxial cable according to the third modification. [Figure 10] FIG. 10 is a diagram for explaining the configuration of a coaxial cable according to the fourth modification. [Figure 11]FIG. 11 is a perspective view showing an example of a contact state between a coaxial cable and a probe according to the fourth modification. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, an embodiment of the present invention (hereinafter, referred to as "embodiment") will be described with reference to the attached drawings. Note that the drawings are schematic, and the relationship between the thickness and width of each part, the thickness ratio of each part, etc. may differ from the actual ones, and the drawings may include parts with different dimensional relationships and ratios.

[0018] (Embodiment) Fig. 1 is a diagram showing the configuration of a measurement system according to an embodiment of the present invention. Fig. 2 is a diagram for explaining the configuration of a portion of the measurement system shown in Fig. 1. Fig. 2 shows the configuration of a measurement unit 1 excluding a probe holder 3, which will be described later. The measurement system includes the measurement unit 1, a measurement device 100 that inputs and outputs signals to and from a measurement target, and connection cables 110 and 120 that connect the measurement unit 1 and the measurement device 100.

[0019] The measurement unit 1 includes a contact probe 2 (hereinafter simply referred to as “probe 2”), a probe holder 3 that houses the probe 2, a first ground plate 4, a second ground plate 5, a first coaxial line portion 6, and a second coaxial line portion 7.

[0020] 3 is a diagram showing a detailed configuration of the probe housed in the probe holder. The probe 2 is conductive and is connected to a first ground plate 4 and a second ground plate 5 at both ends in the longitudinal direction. The probe 2 is formed using a conductive material and includes a first plunger 21 in contact with the first ground plate 4, a second plunger 22 in contact with the second ground plate 5, and a coil spring 23 provided between the first plunger 21 and the second plunger 22 to connect the probe 2 in a freely expandable and contractible manner. The first plunger 21, the second plunger 22, and the coil spring 23 constituting the probe 2 have the same axis.

[0021] The probe holder 3 is formed using an insulating material such as resin, machinable ceramic, or silicon, and is formed by laminating a first member 31 located on the upper surface side of Fig. 3 and a second member 32 located on the lower surface side. The first member 31 and the second member 32 are each formed with the same number of holder holes 33 and 34 for accommodating a plurality of probes 2, and the holder holes 33 and 34 for accommodating the probes 2 are formed so that their axes coincide with each other. The positions at which the holder holes 33 and 34 are formed are determined according to the arrangement pattern of the probes 2.

[0022] When the probe holder 3 is disposed between the first ground plate 4 and the second ground plate 5, the coil spring 23 is compressed along the longitudinal direction due to the contact load from the ground plates.

[0023] Next, the connection between the probe 2 and the first and second ground plates 4 and 5 will be described. FIG. 4 is a diagram for explaining the connection between the probe and the ground plate. FIG. 5 is a partially enlarged view of FIG. 4. FIG. 6 is a diagram for explaining the configuration of the ground plate and the coaxial cable. FIG. 6(a) shows a cross-sectional view of the configuration in which the second ground plate 5 and the coaxial cable 71 are connected. FIG. 6(b) shows a plan view of the second ground plate 5 as viewed from the side opposite to the side to which the coaxial cable 71 is connected. Note that FIG. 6 illustrates the connection between the second ground plate 5 and the coaxial cable 71, but the connection between the first ground plate 4 and the coaxial cable 61 has a similar configuration.

[0024] The first ground plate 4 is made of a conductive material and has a plate shape. A through hole 4a is formed in the first ground plate 4, penetrating in the plate thickness direction (see FIG. 2). The through hole 4a is a hole that extends with a diameter substantially equal to the diameter of the outer periphery of a coaxial cable 61, which will be described later. Note that substantially equal includes both the same and a slight difference due to manufacturing errors.

[0025] The second ground plate 5 is made of a conductive material and has a plate shape. A through hole 5a is formed in the second ground plate 5 in the plate thickness direction. The through hole 5a is a hole that extends with a diameter substantially equal to the diameter of the outer periphery of a coaxial cable 71 described later.

[0026] The first ground plate 4 and the second ground plate 5 are made of, for example, copper, nickel, stainless steel, etc. The first ground plate 4 and the second ground plate 5 may be made of the same material as ground conductors 64, 74, which will be described later.

[0027] The first coaxial line portion 6 includes a coaxial cable 61. The coaxial cable 61 is held by a cable holding member 60. An end of the coaxial cable 61 opposite to the end connected to the connection cable 110 is inserted into the through hole 4a of the first ground plate 4. The coaxial cable 61 may be press-fitted into the through hole 4a, or may be fixed by soldering or the like, or may be fixed by a combination of these.

[0028] The coaxial cable 61 has a signal conductor 62 that transmits a signal from the measuring device 100, an insulating dielectric 63 provided around the signal conductor 62, and a ground conductor 64 provided around the dielectric 63 (see FIG. 2). The signal conductor 62, the dielectric 63, and the ground conductor 64 form a coaxial structure. The dielectric 63 and the ground conductor 64 each have a cylindrical shape. The ground conductor 64 is made of copper, nickel, stainless steel, or the like. Therefore, the coaxial cable 61 has the same structure as a so-called semi-rigid cable. In this embodiment, the signal conductor forms a signal portion, and the dielectric forms a dielectric portion.

[0029] The end of the coaxial cable 61 on the first ground plate 4 side is exposed from the through hole 4a on the surface of the first ground plate 4. In this case, the end face of the coaxial cable 61 and the surface of the first ground plate 4 on which the end face of the coaxial cable 61 is exposed are located on the same plane. The first ground plate 4 forms a ground section by being electrically connected to the ground conductor 64. The ground section forms a part of a line that conducts an earth potential.

[0030] The second coaxial line portion 7 includes a coaxial cable 71. The coaxial cable 71 is held by a cable holding member 70. An end of the coaxial cable 71 opposite to the end connected to the connection cable 120 is inserted into the through hole 5a of the second ground plate 5. The coaxial cable 71 may be press-fitted into the through hole 5a, or may be fixed by soldering or the like, or may be fixed by a combination of these.

[0031] The coaxial cable 71 has a signal conductor 72 that transmits a signal from the measuring device 100, a dielectric 73 provided on the outer periphery of the signal conductor 72, and a ground conductor 74 provided on the outer periphery of the dielectric 73. The signal conductor 72, the dielectric 73, and the ground conductor 74 form a coaxial structure. The dielectric 73 and the ground conductor 74 each have a cylindrical shape. The ground conductor 74 is made of copper, nickel, stainless steel, or the like. Therefore, the coaxial cable 71 has the same configuration as a so-called semi-rigid cable.

[0032] The end of the coaxial cable 71 on the second ground plate 5 side is exposed from the through hole 5a on the surface of the second ground plate 5. In this case, the end face of the coaxial cable 71 and the surface of the second ground plate 5 on which the end face of the coaxial cable 71 is exposed are located on the same plane. In addition, the second ground plate 5 forms the above-mentioned ground portion by being electrically connected to the ground conductor 74.

[0033] In this embodiment, the coaxial cables 61 and 71 each contact three probes 2. Here, the first ground plate 4 and the coaxial cable 61 form a first connection section, and the second ground plate 5 and the coaxial cable 71 form a second connection section. Note that the measurement system only needs to include at least one of the first and second connection sections, and the other may adopt a known connection mode.

[0034] One end of each probe 2 (first plunger 21 in this case) contacts either the signal conductor 62 or the ground conductor 64 at the end of the coaxial cable 61 exposed at the first ground plate 4. In Figs. 4 and 5, one probe 2 contacts the signal conductor 62, and the other two probes 2 contact the ground conductor 64. Similarly, for the coaxial cable 71, the probe 2 in contact with the signal conductor 62 contacts the signal conductor 72 and the other two probes 2 in contact with the ground conductor 64 contact the ground conductor 74. In this case, the longitudinal direction of the coaxial cables 61 and 71 and the longitudinal direction of the probe 2 extend in parallel or with the same central axis. In the figure, the probe 2 (first contact probe) that contacts the signal conductors 62, 72 is referred to as probe 2S, and the probe 2 (second contact probe) that contacts the ground conductors 64, 74 is referred to as probe 2G. Note that the probe 2G may contact not only the ground conductors 64, 74, but also the surface of the first ground plate 4 or the surface of the second ground plate 5.

[0035] Here, the minimum pitch between the probes 2 is the radius of the inner circumference of the ground conductor. For example, when the probes 2 are brought into contact with the center of the ground conductor at the end face of a coaxial cable, the pitch between the probes 2 is calculated by (outer diameter of the ground conductor + inner diameter)÷2÷2.

[0036] In the embodiment of the present invention described above, the signal conductor of the coaxial cable and the end face of the ground section formed by the ground conductor and the ground plate are located on the same plane, and multiple probes are brought into contact with the signal conductor and the ground section to establish electrical continuity between the signal line and the ground line. According to this embodiment, the coaxial line can be maintained, so there is no change in the shape of the line as in the conventional case, and as a result, noise can be suppressed.

[0037] In the above embodiment, since the multiple probes 2 are individually provided to be connected to the coaxial cable, the pitch of the probes 2 and the number and arrangement of the probes 2G to be connected to the ground can be freely set. Therefore, the measurement unit 1 can be used for various types of measurements without being limited to a connection form.

[0038] In the above-described embodiment, a configuration using one coaxial cable has been described. However, it is possible to provide a plurality of through holes in the ground plate so that the ground plate can hold a plurality of coaxial cables.

[0039] (Variation 1) FIG. 7 is a diagram for explaining the configuration of a ground plate and a coaxial cable according to the first modification. (a) of FIG. 7 shows a cross-sectional view of a configuration in which a second ground plate and a coaxial cable are connected. (b) of FIG. 7 shows a plan view of the second ground plate viewed from the opposite side to the side to which the coaxial cable is connected. In the measurement unit according to the first modification, a second ground plate 5A is provided instead of the second ground plate 5 described above, and a coaxial cable 71A is provided instead of the coaxial cable 71 described above. Hereinafter, a description of the same configuration as in the above-mentioned embodiment will be omitted.

[0040] Coaxial cable 71A has a signal conductor 72, a dielectric 73, and a ground conductor 74A provided on the outer periphery of dielectric 73. Signal conductor 72, dielectric 73, and ground conductor 74A form a coaxial structure. Ground conductor 74A is made of copper, nickel, stainless steel, or the like. Therefore, coaxial cable 71A has the same configuration as a so-called semi-rigid cable.

[0041] The ground conductor 74A has a length, at its end connected to the second ground plate 5A, shorter by the thickness of the second ground plate 5A than the signal conductor 72 and the dielectric 73. Therefore, the outer periphery of the dielectric 73 is exposed at the end connected to the second ground plate 5A.

[0042] The second ground plate 5A is made of a conductive material and has a plate shape. The second ground plate 5A has a through hole 5b that penetrates in the plate thickness direction. The through hole 5b is a hole that extends with a diameter substantially equal to the diameter of the outer periphery of the dielectric 73.

[0043] The coaxial cable 71A is connected to the second ground plate 5A by inserting the dielectric 73 into the through hole 5b. The coaxial cable 71A may be fixed by press-fitting the dielectric 73 into the through hole 5b, or by fixing the dielectric 73 to the second ground plate 5A by soldering or the like, or by combining these. At this time, the ground conductor 74A abuts against the surface of the second ground plate 5A. This electrically connects the second ground plate 5A and the ground conductor 74A. The ground conductor 74A and the second ground plate 5A may also be fixed to each other by soldering or the like to electrically connect the two.

[0044] In the coaxial cable 71A, ends of the signal conductor 72 and the dielectric 73 are exposed from the through hole 5b on the surface of the second ground plate 5A. In this case, the end faces of the signal conductor 72 and the dielectric 73 and the surface of the second ground plate 5A on the side where the end face of the coaxial cable 71A is exposed are located on the same plane.

[0045] The probe 2S comes into contact with the signal conductor 72 exposed from the through hole 5b. On the other hand, the probe 2G comes into contact with the surface of the second ground plate 5A.

[0046] In the above-described first modification, the signal conductor of the coaxial cable and the end face of the ground section formed by the ground conductor and the ground plate are located on the same plane, and multiple probes are brought into contact with the signal conductor and the ground section to conduct the signal line and the ground line. According to the first modification, the coaxial line can be maintained, so there is no change in the shape of the line as in the conventional method, and as a result, noise can be suppressed. Also, in the first modification, as in the embodiment, the probe 2 can be positioned with a high degree of freedom, making it possible to accommodate various measurements.

[0047] (Variation 2) Fig. 8 is a diagram for explaining the configuration of a ground plate and a coaxial cable according to Modification 2. Fig. 8(a) shows a cross-sectional view of a configuration in which a second ground plate and a coaxial cable are connected. Fig. 8(b) shows a plan view of the second ground plate viewed from the opposite side to the side to which the coaxial cable is connected. In the measurement unit according to Modification 1, a second ground plate 5B is provided instead of the above-mentioned second ground plate 5, and a coaxial cable 71B is provided instead of the coaxial cable 71. Below, a description of the same configuration as in the above-mentioned embodiment will be omitted.

[0048] Coaxial cable 71B has a first signal conductor 72A (signal conductor) that transmits a signal from measuring device 100, a first dielectric 73A (cable side dielectric) provided on the outer periphery of first signal conductor 72A, and a ground conductor 74A provided on the outer periphery of first dielectric 73A. First signal conductor 72A, first dielectric 73A, and ground conductor 74A have a coaxial structure, and the end faces connected to second ground plate 5B are located on the same plane.

[0049] The second ground plate 5B is formed of a conductive material and has a plate shape. The second ground plate 5B has a second signal conductor 51 (signal relay section) and a second dielectric 52 (ground plate side dielectric) covering the outer periphery of the second signal conductor 51. In the present modified example 2, the first signal conductor 72A and the second signal conductor 51 form a signal section, and the first dielectric 73A and the second dielectric 52 form a dielectric section. The second ground plate 5B has a through hole 5b formed therethrough in the plate thickness direction. The through hole 5b is a hole extending with a diameter substantially equal to the diameter of the outer periphery of the second dielectric 52. The second signal conductor 51 and the second dielectric 52 are fixed in the through hole 5b. At this time, the end faces of the second signal conductor 51 and the second dielectric 52 are located on the same plane as the surface of the main body of the second ground plate 5B. The second signal conductor 51 and the first signal conductor 72A preferably have the same diameter. The second dielectric 52 and the first dielectric 73A preferably have the same diameter. The first dielectric 73A and the second dielectric 52 may be made of the same material or may be made of different materials.

[0050] The coaxial cable 71B is connected to the second ground plate 5B by fixing the first signal conductor 72A in contact with the second signal conductor 51. At this time, the ground conductor 74A contacts the surface of the second ground plate 5B. This electrically connects the second ground plate 5B and the ground conductor 74A. The first signal conductor 72A and the second signal conductor 51 may be fixed by soldering or the like to electrically connect the two. The second ground plate 5B and the ground conductor 74A may be fixed by soldering or the like to electrically connect the two.

[0051] The probe 2S abuts and electrically connects to the side of the second signal conductor 51 opposite to the side with which the first signal conductor 72A abuts. The probe 2G abuts and electrically connects to the surface of the second ground plate 5B opposite to the side with which the ground conductor 74A abuts.

[0052] In the second modification described above, the signal conductor of the coaxial cable and the end face of the ground section formed by the ground conductor and the ground plate are also located on the same plane, and multiple probes are brought into contact with the signal conductor and the ground section to conduct the signal line and the ground line. According to the second modification, the coaxial line can be maintained, so there is no change in the shape of the line as in the conventional method, and as a result, noise can be suppressed. Also, in the second modification, as in the embodiment, the probe 2 can be positioned with a high degree of freedom, making it possible to accommodate various measurements.

[0053] (Variation 3) Fig. 9 is a diagram for explaining the configuration of a coaxial cable according to Modification 3. Fig. 9(a) shows a cross-sectional view of the coaxial cable. Fig. 9(b) shows a plan view of the coaxial cable. The measurement unit according to Modification 3 does not have the second ground plate 5 described above, and a coaxial cable 71C is provided instead of the coaxial cable 71. Below, descriptions of the same configuration as in the above-mentioned embodiment will be omitted.

[0054] The coaxial cable 71C includes the signal conductor 72 and the dielectric 73 described above, and a ground conductor 74B that covers the outer periphery of the dielectric 73. The signal conductor 72, the dielectric 73, and the ground conductor 74B form a coaxial structure.

[0055] The ground conductor 74B has a cylindrical portion 741 extending along the longitudinal direction of the coaxial cable 71C (dielectric 73), and a flat portion 742 provided at one end of the cylindrical portion 741 and having a flat plate shape. In this case, of the end faces of the signal conductor 72 and the dielectric 73, the end face on the side exposed on the surface of the flat portion 742 and the surface of the flat portion 742 are located on the same plane. In this third modification, the ground conductor 74B forms a ground portion.

[0056] The probe 2S comes into contact with the signal conductor 72 exposed from the flat plate portion 742. On the other hand, the probe 2G comes into contact with the surface of the flat plate portion 742.

[0057] In the third modification described above, the end face of the signal conductor of the coaxial cable and the surface of the ground conductor (flat portion) are located on the same plane, and multiple probes are brought into contact with the signal conductor and the ground conductor to establish electrical continuity between the signal line and the ground line. According to the third modification, the coaxial line can be maintained, so there is no change in the shape of the line as in the conventional method, and as a result, noise can be suppressed. Also, in the third modification, as in the embodiment, the probe 2 can be positioned with a high degree of freedom, making it possible to accommodate various measurements.

[0058] (Variation 4) Fig. 10 is a diagram for explaining the configuration of a coaxial cable according to Modification 4. Fig. 10(a) shows a cross-sectional view of the coaxial cable. Fig. 10(b) shows a plan view of the coaxial cable. The measurement unit according to Modification 4 does not have the second ground plate 5 described above, and a coaxial cable 71D is provided instead of the coaxial cable 71. Below, a description of the same configuration as in the above-mentioned embodiment will be omitted.

[0059] The coaxial cable 71D includes the signal conductor 72 and the dielectric 73 described above, and a ground conductor 74C that covers the outer periphery of the dielectric 73.

[0060] The ground conductor 74C has a first cylindrical portion 743 covering the dielectric 73, a second cylindrical portion 744 covering a dielectric 73 different from the dielectric 73 covered by the first cylindrical portion 743, and a flat plate portion 745 provided at one end of the first cylindrical portion 743 and the second cylindrical portion 744 and having a flat plate shape. In this case, among the end faces of the signal conductor 72 and the dielectric 73, the end face exposed on the surface of the flat plate portion 745 and the surface of the flat plate portion 745 are located on the same plane.

[0061] In this fourth modification, two probes 2S and three probes 2G are provided. Fig. 11 is a perspective view showing an example of a contact mode between the coaxial cable and the probes according to the fourth modification. One of the probes 2S contacts one of the signal conductors 72 exposed from the flat plate portion 745. The other probe 2S contacts the other of the signal conductors 72 exposed from the flat plate portion 745. One of the probes 2G is located between the probes 2S (inside) and contacts the surface of the flat plate portion 745. The remaining two probes 2G are located outside the two probes 2S and contact the surface of the flat plate portion 745. The arrangement and number of the probes 2G are not limited to those shown in Fig. 11, and various modifications are possible. For example, the probe 2G provided between the two probes 2S may not be provided.

[0062] In the fourth modification described above, the end face of the signal conductor of the coaxial cable and the surface of the ground conductor (flat portion) are located on the same plane, and multiple probes are brought into contact with the signal conductor and the ground conductor to establish electrical continuity between the signal line and the ground line. According to the fourth modification, the coaxial line can be maintained, so there is no change in the shape of the line as in the conventional method, and as a result, noise can be suppressed. Also, in the third modification, as in the embodiment, the probe 2 can be positioned with a high degree of freedom, making it possible to accommodate various measurements.

[0063] In the above-mentioned modified examples 1 to 4, the configurations of the second ground plate and the coaxial cable connected to the second ground plate, and the configuration without the second ground plate have been described, but the configurations can also be applied to the first ground plate and the coaxial cable connected to the first ground plate, and the mode in which the probe 2 is connected to the coaxial cable can adopt any of the above-mentioned configurations. In this case, the same configurations may be combined, or different configurations may be combined.

[0064] Although the embodiments of the present invention have been described above, the present invention should not be limited to the above-described embodiments. For example, the ground plate may have a part that is insulating as long as it can provide electrical continuity between the probe 2G and the ground plate.

[0065] The contact probe configuration described here is merely an example, and various types of conventionally known probes can be applied. For example, the probe is not limited to the above-mentioned probe configured with a plunger and a coil spring, but may be a probe including a pipe member, a pogo pin, a solid conductive member, a conductive pipe, a wire, or a connection terminal (connector) that connects electrical contacts, or these probes may be combined as appropriate.

[0066] In this manner, the present invention may include various embodiments not described here, and various design modifications may be made without departing from the technical idea defined by the claims.

[0067] As described above, the measurement unit according to the present invention is suitable for suppressing noise. [Explanation of symbols]

[0068] 1 Measurement unit 2 Contact probe (probe) 3 Probe holder 4. First ground plate 5 Second ground plate 6 1st coaxial line section 7 2nd coaxial line section 21 First plunger 22 Second plunger 23 Coil spring 31 First member 32 Second member 51 Second signal conductor 52 Second Dielectric 61, 71, 71A~71D Coaxial cable 62, 72 Signal conductor 63, 73 Dielectrics 64, 74, 74A~74C Ground conductor 72A First Signal Conductor 73A First Dielectric

Claims

1. a first ground portion forming a part of a line conducting an earth potential and having a flat surface on one end side; a first signal portion forming a part of a line conducting a measurement signal and having an end exposed on the same plane as the flat surface of the first ground portion; and a first connection portion provided between the first ground portion and the first signal portion and having an insulating first dielectric portion having an end exposed on the same plane as the flat surfaces of the first ground portion and the first signal portion; a second ground portion forming a part of a line conducting an earth potential and having a flat surface on one end side; a second signal portion forming a part of a line conducting a measurement signal and having an end exposed on the same plane as the flat surface of the second ground portion; and a second connection portion provided between the second ground portion and the second signal portion and having an insulating second dielectric portion having an end exposed on the same plane as the flat surfaces of the second ground portion and the second signal portion; a first conductive contact probe that is extendable along a longitudinal axis, the first contact probe having one end that contacts the first signal portion at the plane of the first connection portion and the other end that contacts the second signal portion at the plane of the second connection portion; a second conductive contact probe that is extendable along a longitudinal axis, the second contact probe having one end that contacts the first ground portion at the flat surface of the first connection portion and the other end that contacts the second ground portion at the flat surface of the second connection portion; A measuring unit comprising:

2. A first ground plate; a first coaxial cable connected to the first ground plate; A second ground plate; a second coaxial cable connected to the second ground plate; Equipped with The first coaxial cable comprises: a first signal conductor forming a part of the line of the first signal portion; a first dielectric body provided around the outer periphery of the first signal conductor; a first ground conductor provided on an outer periphery of the first dielectric; having The second coaxial cable comprises: a second signal conductor forming a part of the line of the second signal portion; a second dielectric body provided around the second signal conductor; a second ground conductor provided on an outer periphery of the second dielectric; and having the first signal conductor constitutes the first signal portion; the first dielectric constitutes the first dielectric portion, the first ground conductor and the first ground plate constitute the first ground portion, the second signal conductor constitutes the second signal portion; the second dielectric constitutes the second dielectric portion, the second ground conductor and the second ground plate constitute the second ground portion; 2. The measuring unit according to claim 1 .

3. the first ground plate is formed with a first through hole through which the first ground conductor is inserted; the second ground plate is formed with a second through hole through which the second ground conductor is inserted; 3. The measuring unit according to claim 2.

4. the first ground plate is formed with a first through hole through which the first dielectric is inserted; the first ground conductor is electrically connected to a surface of the first ground plate; the second ground plate is formed with a second through hole through which the second dielectric is inserted; the second ground conductor is electrically connected to a surface of the second ground plate; 3. The measuring unit according to claim 2.

5. A first ground plate; a first coaxial cable connected to the first ground plate; A second ground plate; a second coaxial cable connected to the second ground plate; Equipped with The first ground plate comprises: a first signal relay section forming a part of the line of the first signal section; a first ground plate side dielectric covering an outer periphery of the first signal relay unit; having The second ground plate comprises: a second signal relay section forming a part of the line of the second signal section; a second ground plate side dielectric covering an outer periphery of the second signal relay unit; having The first coaxial cable comprises: a first signal conductor forming a part of the line of the first signal section and electrically connecting to the first signal relay section; a first cable side dielectric provided around the outer periphery of the first signal conductor; a first ground conductor provided on an outer periphery of the first cable-side dielectric and electrically connected to the first signal relay portion of the first ground plate and the first ground-plate-side dielectric at a position different from the first ground conductor; having The second coaxial cable comprises: a second signal conductor that forms a part of the line of the second signal section and is electrically connected to the second signal relay section; a second cable-side dielectric provided around the second signal conductor; a second ground conductor provided on an outer periphery of the second cable-side dielectric and electrically connected to the second signal relay portion of the second ground plate and the second ground plate-side dielectric at a position different from the second signal relay portion of the second ground plate; having the first signal relay section and the first signal conductor constitute the first signal section, the first ground plate side dielectric and the first cable side dielectric constitute the first dielectric portion, the first ground conductor and the first ground plate constitute the first ground portion, the second signal relay section and the second signal conductor constitute the second signal section, the second ground plate side dielectric and the second cable side dielectric constitute the second dielectric portion, the second ground conductor and the second ground plate constitute the second ground portion; 2. The measuring unit according to claim 1 .

6. a plurality of the first coaxial cables are connected to the first ground plate; A plurality of the second coaxial cables are connected to the second ground plate. A measuring unit according to any one of claims 2 to 5.

7. a first coaxial cable including: a first signal conductor forming the line of the first signal section; a first dielectric provided on an outer periphery of the first signal conductor and constituting the first dielectric section; and a first ground conductor provided on an outer periphery of the first dielectric and constituting the first ground section; a second coaxial cable including: a second signal conductor forming the line of the second signal section; a second dielectric provided on an outer periphery of the second signal conductor and constituting the second dielectric section; and a second ground conductor provided on an outer periphery of the second dielectric and constituting the second ground section; Equipped with The first ground conductor is a first tubular portion extending along the first signal conductor and the first dielectric; a first flat plate portion provided at one end of the first cylindrical portion and having a flat plate shape; having end faces of the first signal conductor and the first dielectric body are located on the same plane as a surface of the first plate portion; The second ground conductor is a second tubular portion extending along the second signal conductor and the second dielectric; a second flat plate portion provided at one end of the second cylindrical portion and having a flat plate shape; having end faces of the second signal conductor and the second dielectric body are located on the same plane as a surface of the second plate portion; 2. The measuring unit according to claim 1 .

8. a first signal conductor, a first dielectric material, and a first cylindrical portion; the second signal conductor, the second dielectric body, and the second cylindrical portion are provided in a plurality of sets; 8. The measuring unit according to claim 7.

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