Bonding device and bonding method

Abstract

To provide a joining apparatus and joining method capable of preventing joining failure.SOLUTION: A joining apparatus comprises: a measuring part 23 that measures a height near a joined part to be a portion where joining is performed to be formed by a first metallic member 1 and a second metallic member 2 that are arranged in a positional relation in which joining is performed after confronted or laminated with each other, and obtains a measured value; a setting part that sets a height position of a rotary tool F on the basis of the measured value obtained by the measuring part 23; and a friction stirring body 22 that relatively moves the rotary tool F that rotates along the joined part on the basis of the height position.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a joining device and a joining method. [Background technology]

[0002] For example, Patent Document 1 discloses a technique in which a first metal member and a second metal member are butted together to form an butt joint, and a rotating tool is moved along the butt joint to perform friction stir welding. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-65164 A Summary of the Invention [Problem to be solved by the invention]

[0004] The height positions of the first metal member and the second metal member vary due to deformation such as warping and twisting of each metal member, dimensional tolerances, etc. In addition, there is a risk that foreign matter may be caught between the jig of the stand and the first metal member and the second metal member, or that the jig may not hold the member sufficiently or may not hold the member properly. If the height positions of the first metal member and the second metal member exceed the allowable range, there is a high risk of poor joining no matter how the rotary tool is controlled.

[0005] From this viewpoint, an object of the present invention is to provide a bonding method capable of preventing bonding defects. [Means for solving the problem]

[0006] In order to solve the above problems, the present invention provides A joining device that joins a joining portion that is a portion where a joining is performed and is formed at a portion where a second metal member is overlapped with a first metal member that is arranged on a stand, A fixing portion for fixing the first metal member to the stand, and a fixing portion for fixing the first metal member to the stand , heavy The first metal parts are arranged in a positional relationship for bonding by being joined together. Material This is formed The aboveThe friction stir welding apparatus is characterized by comprising a measuring unit that measures the height to the surface of the first metal component near the joint where the rotating tool is inserted to obtain a measured value, a setting unit that sets the height position of the rotating tool based on the measured value obtained by the measuring unit, and a friction stir welding main body that relatively moves the rotating tool that rotates along the joint based on the height position.

[0007] The present invention also provides a method for producing a semiconductor device comprising the steps of: A joining method for joining a joining portion that is a portion where a joining is performed and is formed at a portion where a second metal member is overlapped with a first metal member that is arranged on a frame, comprising: A fixing step of fixing the first metal member to a stand; , heavy The first metal parts are arranged in a positional relationship for bonding by being joined together. Material This is formed The above The method comprises a measuring process for measuring the height to the surface of the first metal component near the joint where a rotating tool is inserted to obtain a measured value, a setting process for setting a height position of the rotating tool based on the measured value obtained in the measuring process, and a friction stirring process for relatively moving the rotating tool rotating along the joint based on the height position set in the setting process.

[0008] Also ,before It is preferable that the measurement unit obtains the measurement value by measuring the first metal member in a state where it is fixed to the frame. Also ,before In the measuring step, it is preferable that the first metal member be measured in a state where it is fixed to the stand in the fixing step to obtain the measured value.

[0009] It is also preferable that the method further includes a fixing portion for fixing the first metal member and the second metal member to a stand, the fixing portion fixing the first metal member and the second metal member to the stand in a positional relationship in which the first metal member and the second metal member are butted or overlapped to form the joint, and the measuring portion measuring at least one of the first metal member and the second metal member fixed to the stand to obtain the measurement value. Moreover, it is preferable that the method further includes a fixing step of fixing the first metal member and the second metal member to a frame, in which the first metal member and the second metal member are butted or overlapped to be joined in a positional relationship to form the joint and the first metal member and the second metal member are fixed to the frame in the fixing step, and the measurement step measures at least one of the first metal member and the second metal member fixed to the frame in the fixing step to obtain the measurement value.

[0010] In addition, it is preferable that the measuring unit is provided in the vicinity of a portion that holds the rotary tool.

[0011] In addition, it is preferable that the setting unit sets the measurement value at the height position.

[0012] In addition, it is preferable that the rotating tool has a connecting portion that is connected to the rotating shaft of the friction stir main body and a stirring pin that hangs down from the connecting portion, and the friction stir main body moves the rotating tool relatively while keeping the connecting portion away from the joint.

[0013] In addition, it is preferable that the setting unit sets the minimum value of the measurement values ​​to the height position.

[0014] In addition, it is preferable that the rotating tool has a shoulder portion connected to the rotating shaft of the friction stir main body portion and a stirring pin hanging down from the shoulder portion, and the friction stir main body portion moves the rotating tool relatively while bringing the shoulder portion and the stirring pin into contact with the joint.

[0015] In addition, it is preferable that the setting unit sets an average value of the measurement values ​​at the height position.

[0016] In addition, it is preferable that the rotating tool has a connecting portion that is connected to the rotating shaft of the friction stir main body and a stirring pin that hangs down from the connecting portion, and the friction stir main body moves the rotating tool relatively while keeping the connecting portion away from the joint.

[0017] In addition, if the measured value is not within a preset allowable range, it is preferable to reset the first metal member and the second metal member.

[0018] In addition, if the measured value is not within a preset tolerance range, it is preferable to identify the first metal component and the second metal component as being outside the tolerance range. The method preferably further includes a first positioning step of positioning the first metal member on the stand, and a second positioning step of positioning the first metal member and the second metal member in a positional relationship for joining, in which the first metal member positioned in the first positioning step is fixed, and in the second positioning step, the first metal member fixed in the fixing step and the second metal member are positioned in a positional relationship for joining. Effect of the Invention

[0019] According to the joining device and joining method of the present invention, it becomes easier to prevent joining defects. [Brief description of the drawings]

[0020] [Figure 1] FIG. 2 is a perspective view showing a first metal member, a second metal member, and a friction stir main body according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a block diagram showing a joining device according to the present embodiment. [Diagram 3] 11 is a table showing an example of measurement values ​​and height positions according to the present embodiment. [Figure 4] 4 is a cross-sectional view showing a first arrangement step of the present embodiment. FIG. [Diagram 5] FIG. 4 is a cross-sectional view showing a second arrangement step of the present embodiment. [Figure 6] FIG. 2 is a perspective view showing a friction stir process of the present embodiment. [Figure 7] FIG. 2 is a cross-sectional view showing a friction stir process of the present embodiment. [Figure 8] FIG. 4 is a cross-sectional view showing a joint formed by overlapping. [Figure 9] FIG. 11 is a cross-sectional view showing a friction stir process according to a first modified example of the present embodiment. [Figure 10] FIG. 11 is a cross-sectional view showing a friction stir process according to a second modified example of the present embodiment. [Figure 11] FIG. 11 is a cross-sectional view showing a friction stir process according to a third modified example of the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] The following describes an embodiment of the present invention with reference to the accompanying drawings. The present invention is not limited to the following embodiment. In addition, the components in the embodiment and the modified example can be combined in part or in whole as appropriate.

[0022] [1. Embodiment] [1-1.Joining device] As shown in FIG. 1, a welding apparatus 100 according to an embodiment of the present invention is an apparatus for friction stir welding a first metal member 1 and a second metal member 2 together using a rotary tool F.

[0023] The first metal member 1 has an opening 10 formed in the center, and a step portion 11 formed along the periphery of the opening 10. The step portion 11 has a step bottom surface 11a and step side surfaces 11b rising from the step bottom surface 11a. The opening 10 has a generally rectangular shape in a plan view. The four corners of the opening 10 are rounded and chamfered. The first metal member 1 is made of a metal capable of being friction stir welded, such as aluminum, an aluminum alloy, magnesium, a magnesium alloy, titanium, or a titanium alloy. In this embodiment, the first metal member 1 is made of an aluminum alloy casting material formed by die casting.

[0024] The second metal member 2 has a generally rectangular plate shape in a plan view. The second metal member 2 is shaped to be disposed in the step portion 11 with almost no gaps. The plate thickness of the second metal member 2 is the same as or greater than the height dimension of the step side surface 11b. By setting the plate thickness dimension of the second metal member 2 to be greater than the step side surface 11b, it is possible to prevent a shortage of metal at the joint J1 (see FIG. 5). The second metal member 2 may be made of any metal that can be friction stir welded, but in this embodiment it is made of an aluminum alloy wrought material.

[0025] As shown in FIG. 1 and FIG. 2, the joining device 100 is a machining center in this embodiment, and includes fixing parts 21a and 21b, a friction stirring main body 22, a measuring part 23, and a control device 24 (see FIG. 2). The fixing part 21a is a member (jig) that fixes the first metal member 1 to a stand K. A plurality of fixing parts 21a are installed on the stand K so that the periphery of the first metal member 1 can be restrained at a plurality of points. The fixing part 21b (see FIGS. 2 and 6) is a member (jig) that fixes the second metal member 2 to the stand K. A plurality of fixing parts 21b are installed on the stand K so that the periphery of the second metal member 2 can be restrained at a plurality of points. The fixing parts 21a and 21b are electrically connected to the control device 24, and fix or release each metal member based on a control signal from the control device 24. In the following, when the fixing part 21a and the fixing part 21b are not particularly distinguished from each other, they will be collectively referred to as the fixing part 21.

[0026] The friction stir main body 22 is a portion that houses a rotating shaft to which the rotating tool F is attached. The friction stir main body 22 is movable relative to the stand K. The friction stir main body 22 moves the rotating tool F relatively based on the X position (horizontal position), Y position (vertical position), and Z position (height position) of the rotating tool F that are set in a setting unit, which will be described later.

[0027] The measurement unit 23 is provided in the friction stir main body 22. That is, the measurement unit 23 is provided in the vicinity of a portion that holds the rotating tool F. The measurement unit 23 can be, for example, a height measuring instrument such as a laser displacement meter.

[0028] The control device 24 includes a calculation unit 25 (CPU (Central Processing Unit)), an input unit 27 such as a keyboard or a touch panel, a display unit 28 such as a monitor or a display, and a storage unit 29 such as a RAM (Random Access Memory) or a ROM (Read only memory).

[0029] The calculation unit 25 has a setting unit 26 as a functional element. The setting unit 26 is a part that sets an instruction position (teaching position) for moving the rotation tool F. The instruction position specifies the trajectory along which the rotation tool F passes by using a coordinate position. In other words, the instruction position is configured so that the X position (horizontal position), Y position (vertical position), and Z position (height position) of the rotation tool F can be set using the X, Y, and Z coordinate axes.

[0030] In the present embodiment, the setting unit 26 is configured such that the X and Y positions of the designated positions are set in advance, and the Z position (height position) is set based on the measurement value obtained by the measurement unit 23 and the setting program. In the setting program of this embodiment, as shown in FIG. 3, the measurement value obtained by the measurement unit 23 is set as the Z position (height position) of the rotary tool F. Note that setting the measurement value to the height position of the rotary tool F means setting the measurement value and the height position in a one-to-one correspondence relationship. For example, as in this embodiment, the measurement value of a certain position may be set as the height position of the position without being changed. Also, for example, a calculation may be performed to shift the measurement value of a certain position by a predetermined numerical value, and the result may be set as the height position of the position. More specifically, for example, the measurement value of a certain position may be added or subtracted by a numerical value of a desired width according to the relationship between the obtained measurement value and the height position of the rotary tool F, and the result may be set as the height position of the position.

[0031] For example, the calculation unit 25 can function as the setting unit 26 by reading the setting program from the ROM, expanding it in the RAM, and executing it. The setting program may be recorded and distributed on a recording medium such as an optical disk, such as a CD-ROM (Compact Disc Read only memory) or a DVD-ROM (Digital Versatile Disc Read only memory), a USB (Universal Serial Bus) memory, or a flash memory, such as an SD memory, or may be distributed through a communication network, such as the Internet or an intranet. The control device 24 can acquire and execute the setting program by reading the setting program from the recording medium or receiving the setting program through the communication network.

[0032] In this embodiment, a machining center is exemplified as the welding device 100, but the present invention is not limited to this. For example, the friction stir main body 22 may be attached to the tip of a robot arm.

[0033] [1-2.Joining method] In the welding method according to this embodiment, a first positioning step, a first fixing step, a measuring step, a second positioning step, a second fixing step, a setting step, and a friction stir step are performed using the welding apparatus 100. The first arrangement step is a step of arranging the first metal member 1 on the stand K.

[0034] 4, the first fixing step is a step of clamping the first metal member 1 to a surface Ka of a mount K. For example, a plurality of fixing portions 21a provided on the mount K restrain the first metal member 1 from moving relative to the mount K.

[0035] The measurement step is a step of measuring the height of the surface 1b of the first metal member 1 by a measuring unit 23, as shown in FIG. 1. In the measurement step, the height from a reference point (for example, the surface Ka of the stand K) to the measurement point is measured. In the measurement step, the height is measured in the vicinity of a joint J1 (see FIG. 5), which is a site where the first metal member 1 and the second metal member 2 are joined. Specifically, as shown in FIG. 1, the heights of measurement points P1 to P8 set at predetermined intervals around the outside of the opening edge 1e on the surface 1b of the first metal member 1 are measured. In this embodiment, eight measurement points are set, but the number is not limited thereto, and one or more measurement points may be set.

[0036] In the measurement step, the friction stir welding main body 22 (measurement part 23) is rotated around the opening edge 1e while the rotating tool F and the weld J1 are spaced apart, and the heights of the measurement points P1 to P8 are continuously measured. The measured values ​​are stored in the memory part 29 of the control device 24 in association with each measurement point.

[0037] As shown in FIG. 5, the second arrangement step is a step of arranging the first metal member 1 and the second metal member 2 in a positional relationship for joining. The first metal member 1 and the second metal member 2 may be arranged in a positional relationship for joining by butting against each other, may be arranged in a positional relationship for joining by overlapping, or may be arranged in a positional relationship for joining by butting against and overlapping. In this embodiment, the step side surface 11b of the first metal member 1 and the side surface 2a of the second metal member 2 are butted against each other, and the step bottom surface 11a and the back surface 2c of the second metal member 2 are overlapped to form a joint J1. That is, in the second arrangement step, the second metal member 2 is arranged on the step portion 11 of the first metal member 1 to form a joint (butt portion) J1 where the first metal member 1 and the second metal member 2 are butted against each other. The joint J1 is a portion to be friction stir welded by a rotary tool F in a friction stir step described later.

[0038] 6, the second fixing step is a step of clamping the second metal member 2 to the surface Ka of the mount K. For example, a plurality of fixing portions 21b provided on the mount K restrain the second metal member 2 from moving relative to the mount K.

[0039] The setting step is a step of setting the height position of the rotating tool F based on the measurement value obtained in the measuring step and a setting program, as shown in Fig. 3. In this embodiment, the X position and Y position of the rotating tool F are set in advance as described above. The Z position (height position) is set directly to the obtained measurement value, as shown in Fig. 3.

[0040] As shown in Figs. 6 and 7, the friction stir welding process is a process of performing friction stir welding by relatively moving the rotary tool F along the joint J1 based on the set value set in the setting process. The rotary tool F has a connecting part F1 and a stirring pin F2. The connecting part F1 is a part attached to a rotating shaft built into the friction stir main body 22 and has a cylindrical shape. The stirring pin F2 protrudes (hangs down) from the tip surface (lower end surface) of the connecting part F1 to the tip side and is tapered. A flat surface F3 perpendicular to the rotation center axis C is formed at the tip of the stirring pin F2. The connecting part F1 is not limited to a cylindrical shape, and may be a truncated cone shape whose diameter decreases toward the tip side. In this case, the diameter of the tip of the connecting part F1 and the diameter of the base end of the stirring pin F2 are the same. In the friction stir welding process, the friction stir welding main body 22 inserts only the rotating stirring pin F2 into the welded joint J1 in a state in which the connecting portion F1 is separated from the welded joint J1, and moves the rotating tool F relatively.

[0041] As shown in Fig. 7, a stirring pin reference point F4 is set at a predetermined height from the flat surface F3 on the central axis C of the stirring pin F2, which is the center of rotation. In this embodiment, for example, the insertion depth is set to 2.5 mm, so the predetermined height is set to 2.5 mm. The insertion depth is the distance from the surface 1b of the first metal member 1 to the flat surface F3 of the stirring pin F2. The distance from the flat surface F3 to the stirring pin reference point F4 can be set appropriately based on the insertion depth, the measured value obtained in the measurement process, etc.

[0042] A spiral groove is engraved on the outer circumferential surface of the stirring pin F2. When the rotating tool F is rotated clockwise, the spiral groove is formed counterclockwise from the base end to the tip end, and when the rotating tool F is rotated clockwise, the spiral groove is formed counterclockwise from the base end to the tip end. In this way, the plastic flow material is guided to the tip end of the stirring pin F2, thereby suppressing the generation of burrs.

[0043] In the friction stir process, as shown in FIG. 6, the stirring pin F2 is inserted into the start position SP1 set on the weld J1, and the rotating tool F rotated along the weld J1 is moved clockwise relative to the second metal member 2. The fixing part 21b is configured to stand up just before the rotating tool F passes, based on a control signal from the control device 24, and to fix the second metal member 2 again after the passing. This makes it possible to prevent interference between the fixing part 21b and the rotating tool F. A plasticized region W is formed on the moving trajectory of the rotating tool F. At this time, the position of the rotating tool F is controlled so that the height position of the stirring pin reference point F4 of the rotating tool F is the set value (X position, Y position, Z position) set in the setting process. In particular, in this embodiment, the position of the rotating tool F is moved up and down so that the Z direction is the height position shown in FIG. 3. That is, at the position corresponding to the measurement point P1 in the weld J1, the stirring pin reference point F4 is controlled to be located at a position 4.8 mm in the height direction from the surface Ka of the stand K.

[0044] Furthermore, at a position of the joint J1 corresponding to the measurement point P2, the stirring pin reference point F4 is controlled to be located at a position 5.0 mm in the height direction from the surface Ka of the stand K. At this time, the height position of the rotating tool F is controlled so that the height position of the stirring pin reference point F4 gradually rises by 0.2 mm from the measurement point P1 to the measurement point P2.

[0045] Furthermore, at a position of the joint J1 corresponding to the measurement point P3, the stirring pin reference point F4 is controlled to be located at a position 5.4 mm in the height direction from the surface Ka of the stand K. At this time, the height position of the rotating tool F is controlled so that the height position of the stirring pin reference point F4 gradually rises by 0.4 mm from the measurement point P2 to the measurement point P3.

[0046] Furthermore, at a position of the joint J1 corresponding to the measurement point P4, the stirring pin reference point F4 is controlled to be located at a position 5.7 mm in the height direction from the surface Ka of the stand K. At this time, the height position of the rotating tool F is controlled so that the height position of the stirring pin reference point F5 gradually rises by 0.3 mm from the measurement point P3 to the measurement point P4.

[0047] Furthermore, at a position of the joint J1 corresponding to the measurement point P5, the stirring pin reference point F4 is controlled to be located at a position 5.5 mm in the height direction from the surface Ka of the stand K. At this time, the height position of the rotating tool F is controlled so that the height position of the stirring pin reference point F4 gradually decreases by 0.2 mm from the measurement point P4 to the measurement point P5.

[0048] The height position of the rotating tool F is raised and lowered in a similar manner, and when the rotating tool F reaches the end position EP1 set at the joint J1, the rotating tool F is removed from the joint J1. In the friction stir welding process, it is preferable to make the start and end of the plasticized region W overlap in this manner. This can improve watertightness and airtightness. Through the above process, the first metal member 1 and the second metal member 2 can be friction stir welded.

[0049] [1-3. Actions and Effects] According to the joining method and joining device described above, the height of the vicinity of the weld J1 in the set state before joining is measured, and the height position (insertion depth) of the rotary tool F is controlled based on the measurement result. This makes it possible to change the height position of the rotary tool F according to the height of the weld J1 in the set state, and to perform pseudo load control. Therefore, even if the height of the weld J1 changes, the insertion depth of the rotary tool F can be kept constant, making it easier to prevent poor joining.

[0050] Particularly, in this embodiment, the measured value is set as the height position of the rotating tool F, and the height position of the rotating tool F is raised and lowered based on the set value. This makes it possible to make the depth of the plasticized region W (insertion depth of the stirring pin F2) constant even if the heights of the measurement points P1 to P8 are not the same. By making the depth of the plasticized region W constant, the joint strength of the joint J1 can be made roughly constant in the circumferential direction. Furthermore, since the measured value can be set as the height position as is, the height position (set value) can be easily set.

[0051] In addition, the type (shape) of the rotating tool F may be any, but in this joining method, the connecting portion F1 and the joint J1 are separated, and only the stirring pin F2 is inserted into the joint J1 to perform friction stir welding. This makes it possible to reduce the width of the plasticized region and the pressing force of the rotating tool compared to when the shoulder portion of the rotating tool is pushed in. Also, it is possible to reduce the load on the friction stir device compared to when the shoulder portion of the rotating tool is pushed in. Also, it is possible to join a deep position of the butt portion without applying a large load to the friction stir device. Furthermore, in this embodiment, since only the stirring pin F2 comes into contact with the joint J1, even if the height of the joint J1 changes slightly, only the contact depth of the stirring pin F2 changes slightly, and the tolerance for the change in height of the joint J1 is relatively high compared to when the shoulder portion of the rotating tool is pushed in. Therefore, according to this joining method, when the measured value is set as the height position of the rotating tool F and the height position of the rotating tool F is raised and lowered based on the set value to perform joining, poor joining is unlikely to occur even if the position of the first metal member 1 or the second metal member 2 is displaced from the position in the measurement process, or the position of the stirring pin F2 is displaced from the height position set in the setting process.

[0052] Furthermore, the present joining device and joining method include a fixing portion 21a that fixes the first metal member 1 to the stand K, and a measurement process is performed to measure the first metal member 1 in a state where it is fixed to the stand K. This allows the height of the first metal member 1, whose height position is to be measured, to be accurately measured in a state close to that at the time of joining, making it easier to prevent poor joining.

[0053] If the measuring unit 23 were provided at a position away from the rotating tool F, a positional shift would occur between the measuring position and the welding position, and the height measurement would also be likely to be shifted. However, according to this embodiment, the measuring unit 23 is provided near the part where the rotating tool F is held, so that the height position can be measured in a state close to the welding state. In other words, in this embodiment, the measuring unit 23 is provided at the front of the friction stir main body 22 in the traveling direction, so that the height position can be measured in a state close to the welding state.

[0054] [1-4.Other] Here, for example, in the above-mentioned embodiment, the first arrangement step, the first fixing step, the measurement step, the second arrangement step, and the second fixing step are performed in this order, and the measurement step is performed after only the first metal member 1 is fixed to the stand K. The first arrangement step and the first fixing step, and the second arrangement step and the second fixing step may be performed, and the measurement step may be performed after both the first metal member 1 and the second metal member 2 are fixed to the stand K. In this case, in the measurement step, the height of the surface near the joint J1 of at least one of the first metal member 1 and the second metal member 2 in a state fixed to the stand K may be measured. Even in this way, the height can be accurately measured in a state close to the time of joining, making it easier to prevent poor joining.

[0055] In the above-described embodiment, the heights of measurement points P1 to P8 set around the outside of the opening edge 1e on the surface 1b of the first metal member 1 as the vicinity of the joint J1 are measured. The positions of the measurement points may be set appropriately according to the order of arrangement and fixing of the first metal member 1 and the second metal member 2, the relative arrangement of the first metal member 1 and the second metal member 2, and the position of the joint J1 between the first metal member 1 and the second metal member 2. In particular, it is preferable to set the positions of the measurement points at places that have a large effect on the joint. The order of the arrangement step, the fixing step, and the measurement step may be changed appropriately according to the positions of the measurement points.

[0056] For example, as in the above-described embodiment, the step side surface 11b of the first metal member 1 and the side surface 2a of the second metal member 2 are butted together, and the step bottom surface 11a and the back surface 2c of the second metal member 2 are overlapped to form a joint J1 at a portion where the step side surface 11b of the first metal member 1 and the side surface 2a of the second metal member 2 are butted together. In this case, the peripheral portion 2d (see FIG. 5) on the surface 2b of the second metal member 2 may be the measurement point. When the peripheral portion 2d on the surface 2b of the second metal member 2 is the measurement point, it is preferable to perform the first arrangement step, the first fixing step, the second arrangement step, the second fixing step, and the measurement step in this order, and to fix the first metal member 1 and the second metal member 2 to the stand K before performing the measurement step. In other words, it is preferable to fix the portion where the height position is to be measured before performing the measurement step.

[0057] 8, when the step side surface 11b of the first metal member 1 and the side surface 2a of the second metal member 2 are butted against each other and the step bottom surface 11a and the back surface 2c of the second metal member 2 are overlapped to form a joint J2 at the portion where the step bottom surface 11a and the back surface 2c of the second metal member 2 are overlapped, the step bottom surface 11a of the first metal member 1, which is in the vicinity of the joint J2, may be set as the measurement point P0. In this case, it is necessary to perform the first arrangement step, first fixing step, measurement step, second arrangement step, and second fixing step in this order and then fix only the first metal member 1 to the stand K before performing the measurement step.

[0058] [2. First modified example] Next, a first modified example of the above-described embodiment will be described. The first modified example differs from the above-described embodiment in that a rotating tool G is used, as shown in Fig. 9. The first modified example will be described focusing on the differences from the above-described embodiment.

[0059] The rotating tool G has a shoulder portion G1 and a stirring pin G2. The shoulder portion G1 is a portion whose base end is attached to the rotating shaft of the friction stir main body 22, and presses the workpieces with the bottom surface G1a in contact with the workpieces. The shoulder portion G1 is formed in a cylindrical shape expanding in diameter from the base end of the stirring pin G2, and has a planar and ring-shaped tip surface. That is, the tip of the stirring pin G2 protrudes from the tip surface of the shoulder portion G1 toward the tip side. In other words, the stirring pin G2 hangs down from the bottom surface G1a of the shoulder portion G1. The shape of the shoulder portion G1 is not limited to a cylindrical shape, and may have a frustum-shaped and mortar-shaped tip surface.

[0060] The stirring pin G2 is inserted into the workpieces while rotating to perform friction stirring on the workpieces. The stirring pin G2 hangs down from the bottom surface G1a of the shoulder portion G1 and has a truncated cone shape. The tip of the stirring pin G2 tapers toward the tip. The tip of the tip of the stirring pin G2 is a flat surface G3 that is perpendicular to the axial direction. The base end of the stirring pin G2 is integrally formed with the shoulder portion G1. A spiral groove is engraved on the outer circumferential surface of the stirring pin G2. When the rotating tool G is rotated clockwise, the spiral groove is formed counterclockwise from the base end side to the tip side, and when the rotating tool G is rotated clockwise, the spiral groove is formed counterclockwise from the base end side to the tip side. In this way, the plastic flow material is guided to the tip side of the stirring pin G2, making it easier to suppress the occurrence of burrs.

[0061] In this welding apparatus, the friction stir main body 22 relatively moves the rotary tool G with the shoulder G1 and the stirring pin G2 in contact with the welding part J1. 9, a stirring pin reference point G4 is set at a predetermined height from the flat surface G3 of the stirring pin G2 on the rotation central axis C, which is the center of rotation. In this embodiment, for example, the insertion depth is set to 2.5 mm, so the predetermined height is set to 2.5 mm. The insertion depth is the distance from the surface 1b of the first metal member 1 to the flat surface G3 of the stirring pin G2. The distance from the flat surface G3 to the stirring pin reference point G4 can be set appropriately based on the insertion depth, the measured value obtained in the measurement process, etc.

[0062] In the friction stir welding process, friction stir welding is performed along the joint J1 in the same manner as in the embodiment described above. At this time, the position of the rotating tool G is controlled so that the height position of the stirring pin reference point G4 of the rotating tool G becomes the set value (X position, Y position, Z position) set in the setting process. In particular, in this embodiment, the position of the rotating tool G is moved up and down so that the Z direction becomes the height position shown in FIG. 3. That is, at the position corresponding to the measurement point P1 in the joint J1, the rotating tool G is moved relatively along the joint J1 so that the stirring pin reference point G4 is located at a position 4.8 mm in the height direction from the surface Ka of the stand K. At this time, the bottom surface G1a of the shoulder portion G1 contacts the surfaces 1b, 2b of the first metal member 1 and the second metal member 2.

[0063] In this manner, the friction stir process may use a rotary tool G equipped with a shoulder portion G1 and a stirring pin G2. The rotary tool G can hold down the plastic flow material with the bottom surface G1a of the shoulder portion G1, which makes it easier to suppress the generation of burrs.

[0064] [3. Second Modification] Next, a second modified example of the above-described embodiment will be described. The second modified example differs from the above-described embodiment in that a first metal member 1 and a second metal member 2 are overlapped, as shown in Fig. 10. The second modified example will be described mainly with respect to the differences from the above-described embodiment.

[0065] The joining method according to the second modified example includes a first arrangement step, a first fixing step, a measuring step, a second arrangement step, a second fixing step, a setting step, and a friction stir step. As shown in Fig. 10, in the second arrangement step according to the second modified example, a surface 1b of the first metal member 1 and a back surface 2c of the second metal member 2 are overlapped to form a joint (overlapped portion) J3.

[0066] In the measurement step, the measuring unit 23 is caused to travel along a position corresponding to the joint J3 to measure the height of the surface 1b of the first metal member 1 before the second metal member is disposed. The measurement position is preferably in the vicinity of the joint J3. Therefore, in this modification, it is preferable to measure the height of the surface 1b of the first metal member 1 at or near the planned travel position S1 along which the rotating tool F travels in the friction stir process.

[0067] In the second fixing step, the overlapping first metal member 1 and second metal member 2 are fixed to a frame K via fixing portions 21.

[0068] In the setting step, the height position of the rotating tool F is set based on the measurement value obtained in the measuring step. In the present second modified example, the measurement value is directly set as the height position of the rotating tool F.

[0069] In the friction stir welding process, for example, a stirring pin F2 is inserted vertically from the surface 2b of the second metal member 2 to the surface 2b of the second metal member 2 using a rotating tool F to weld a welded portion (overlapped portion) J3. The height position of the rotating tool F in the friction stir welding process is controlled in the same manner as in the above-described embodiment. The insertion depth of the stirring pin F2 of the rotating tool F may be set appropriately, but is preferably set so that it reaches the surface 1b of the first metal member 1. Note that in the second modified example, instead of the rotating tool F, a rotating tool G may be used to friction stir weld the welded portion J3.

[0070] As described above, in this joining apparatus and joining method, the height of the surface 1b of the first metal component 1, which corresponds to the position of the overlapping portion of the first metal component 1 and the second metal component 2 that will be the joining portion, is measured. In this manner, the height of the portion that is the target position for inserting the rotating tool and that will affect the joining state is measured, and the height position (insertion depth) of the rotating tool F is controlled based on the measurement result. As a result, the rotating tool F is inserted so as to reach the surface 1b of the first metal component 1, and the overlapping portion is joined, making it easier to prevent poor joining.

[0071] [4.Third Modification] Next, a third modified example of the above-described embodiment will be described. The third modified example differs from the above-described embodiment in that a first metal member 1 and a second metal member 2 are overlapped, as shown in Fig. 11. The third modified example will be described mainly with respect to the differences from the above-described embodiment.

[0072] The joining method according to the third modified example includes a first arrangement step, a second arrangement step, a fixing step, a measuring step, a setting step, and a friction stir step. As shown in Fig. 11, in the second arrangement step according to the third modified example, a joint (recessed corner) J4 is formed between a surface 1b of the first metal member 1 and a side surface 2a of the second metal member 2.

[0073] In the fixing step, the overlapping first metal member 1 and second metal member 2 are fixed to a stand K via fixing portions 21, as shown in FIG.

[0074] In the measurement step, the measuring unit 23 is caused to travel along the joint J4 to measure the height of the surface 1b of the first metal member 1. The measurement position is preferably in the vicinity of the joint J4. Therefore, in this modified example, it is preferable to measure the height at or near the intended travel position S2, which is located in the recessed corner formed by the surface 1b of the first metal member 1 and the side surface 2a of the second metal member 2, where the rotating tool F travels in the friction stir process.

[0075] In the setting step, the height position of the rotating tool F is set based on the measurement value obtained in the measuring step. In the present second modified example, the measurement value is directly set as the height position of the rotating tool F.

[0076] In the friction stir welding process, as shown in Fig. 11, a rotating tool F is inserted obliquely from the welded portion (recessed corner portion) J4 to friction stir weld the welded portion J4. The height position of the rotating tool F in the friction stir welding process is controlled in the same manner as in the above-described embodiment.

[0077] As described above, in this joining apparatus and this joining method, the height of the surface 1b of the first metal member 1 is measured, which corresponds to the position of the inside corner between the first metal member 1 and the second metal member 2 that will become the joint J4. In this way, the height of the part that is the target position for inserting the rotating tool F and that affects the joining state is measured, and the height position (insertion depth) of the rotating tool F is controlled based on the measurement result. In this way, the rotating tool F is inserted so as to reach the inside corner between the first metal member 1 and the second metal member 2, and the inside corner is joined, which makes it easier to prevent poor joining.

[0078] [5. Fourth Variation] Next, a fourth modified example of this embodiment will be described. In the fourth modified example, the setting step is different from the above-described embodiment. In the setting step according to the fourth modified example, for example, when the measured values ​​in FIG. 3 are obtained, the minimum value of the measured values ​​may be set as the height position of the rotating tools F, G. In the case of FIG. 3, since the minimum value is 4.8 mm, the rotating tools F, G are moved relatively so that the stirring pin reference points F4, G4 of the rotating tools F, G are at a height of 4.8 mm from the surface Ka of the stand K. That is, in this case, after the height positions of the rotating tools F, G are set, the rotating tools F, G are moved relatively at a constant height without being raised or lowered.

[0079] According to the setting process of this modified example, the height positions of the rotating tools F and G can be easily set. In addition, by setting the lowest value among the measured values ​​as the height position, the rotating tools F and G are inserted according to the depth of the lowest point of the joint. As a result, even if the height of the joint changes, friction stir welding can be performed including the joint at the lowest position, making it easier to prevent poor welding.

[0080] At this time, either rotating tool may be used, but it is preferable to use rotating tool G. Since the height position of the rotating tool is set to the minimum measured value, the plastic flow material can be constantly held down by shoulder portion G1, which makes it easier to prevent the generation of a large amount of burrs.

[0081] On the other hand, in the setting step according to the fourth modified example, when the measured values ​​in Fig. 3 are obtained, for example, the average value of the measured values ​​may be set as the height positions of the rotating tools F and G. In the case of Fig. 3, since the average value is about 5.3 mm, the rotating tools F and G are moved relatively so that the stirring pin reference points F4 and G4 of the rotating tools F and G are at a height of 5.3 mm from the surface Ka of the stand K. In other words, in this case as well, once the height positions of the rotating tools F and G are set, the rotating tools F and G are moved relatively at a constant height without being raised or lowered.

[0082] According to the setting step of this modified example, the height positions of the rotary tools F and G can be easily set.

[0083] At this time, either of the rotating tools may be used, but it is preferable to use the rotating tool F. When the rotating tool F is used, only the stirring pin F2 comes into contact with the joint, so there is a relatively high tolerance for changes in the height of the joint compared to when the rotating tool G is used. When the height position of the rotating tool F is set to the average value of the measured values ​​and the height position of the rotating tool F is raised and lowered based on the set value to perform joining, poor joining is unlikely to occur even if there is a large variation in each measured value, the position of the first metal member 1 or the second metal member 2 is displaced from the position in the measuring process, or the position of the stirring pin F2 is displaced from the height position set in the setting process.

[0084] [6. Fifth Modification] Next, a fifth modified example of the embodiment described above will be described. The fifth modified example differs from the other modified examples in that an allowable range is set based on a measurement value. In this modified example, an allowable range is set for the height measurement value. For example, for the measurement value in FIG. 3, the allowable range is set to 4.8 to 5.5 mm. The control device 24 includes a determination unit (not shown) that determines whether or not the measurement value obtained by the measurement unit 23 is within a preset allowable range.

[0085] For example, in the case of the embodiment described above, if the control device 24 determines that the measurement value obtained in the measurement process is within a preset tolerance range (determination process), the process proceeds directly to the second placement process. On the other hand, if the control device determines that the measurement value obtained in the measurement process is outside the preset tolerance range, the control device outputs a reset signal to temporarily remove the first metal member 1 (the first metal member 1 and the second metal member 2) from the gantry K. After the first metal member 1 (the first metal member 1 and the second metal member 2) is reset to the gantry K, the measurement process and determination process are performed again.

[0086] In friction stir welding, the heights of the first metal member 1 and the second metal member 2 are important factors, and if the heights exceed the allowable range due to insufficient pressing of the jig, for example, there is a high risk of poor welding no matter how the rotating tools F and G are controlled. However, according to this modification, by setting an allowable range for the heights of the first metal member 1 and the second metal member 2, poor welding can be more easily prevented.

[0087] On the other hand, when the control device 24 determines that the measurement value obtained in the measurement process is outside the preset allowable range (determination process), it may identify the first metal component 1 (the first metal component 1 and the second metal component 2) as an item outside the allowable range, and store this in the memory unit 29. According to the present invention, it is easier to prevent poor bonding and quality control can be easily performed. [Explanation of symbols]

[0088] 1. First metal member 2. Second metal member 21a,21b Fixed part 22 Friction stir main body 23 Measuring part P1~P8 measurement points F Rotate tool F1 connection part F2 Stirring pin G Rotate tool G1 Shoulder G2 Stirring pin

Claims

1. A joining device for joining a joining portion that is formed at a portion where a second metal member is superimposed on a first metal member arranged on a frame, comprising: A fixing portion that fixes the first metal member to a stand; a measuring unit that measures a height from a surface of the stand to a surface of the first metal member on a side where a rotary tool is inserted, in the vicinity of the joint formed by the first metal members that are arranged in a positional relationship for overlapping and joining, to obtain a measurement value; a setting unit that sets a height position of the rotary tool based on the measurement value obtained by the measurement unit; and a friction stir main body that relatively moves the rotating tool that rotates along the joint based on the height position. A joining device characterized by:

2. the measurement unit measures the first metal member in a state where it is fixed to the stand to obtain the measurement value. The joining device according to claim 1 .

3. A fixing portion that fixes the first metal member and the second metal member to a stand is further provided, the fixing portion fixes the first metal member and the second metal member to a stand in a state in which the first metal member and the second metal member are butted against or overlapped with each other to form the joint, the measurement unit measures at least one of the first metal member and the second metal member in a state fixed to the frame to obtain the measurement value. The joining device according to claim 1 .

4. The measuring unit is provided in the vicinity of a portion that holds the rotary tool. The joining device according to any one of claims 1 to 3.

5. The setting unit sets the measurement value at the height position. The joining device according to any one of claims 1 to 4.

6. The rotating tool has a connecting part that is connected to a rotating shaft of the friction stir main body and a stirring pin that hangs down from the connecting part, The friction stir main body inserts only the stirring pin into the welded portion while the connecting portion is separated from the welded portion, and moves the rotating tool relatively. The joining device according to claim 5 .

7. The setting unit sets a minimum value of the measurement values ​​to the height position. The joining device according to any one of claims 1 to 4.

8. The rotating tool has a shoulder portion connected to a rotation shaft of the friction stir main body and a stirring pin hanging down from the shoulder portion, The friction stir main body moves the rotary tool relatively with the shoulder portion and the stirring pin in contact with the joint. The joining device according to claim 7.

9. The setting unit sets the average value of the measurement values ​​to the height position. The joining device according to any one of claims 1 to 4.

10. The rotating tool has a connecting part that is connected to a rotating shaft of the friction stir main body and a stirring pin that hangs down from the connecting part, The friction stir main body inserts only the stirring pin into the welded portion while the connecting portion is separated from the welded portion, and moves the rotating tool relatively. The joining device according to claim 9.

11. The joining device according to any one of claims 1 to 10, characterized in that, when the measured value is not within a preset allowable range, the first metal member and the second metal member are reset.

12. The joining apparatus according to any one of claims 1 to 10, characterized in that if the measurement value is not within a preset tolerance range, the first metal component and the second metal component are identified as being outside the tolerance range.

13. A joining method for joining a joining portion that is formed at a portion where a second metal member is superimposed on a first metal member arranged on a frame, comprising: a fixing step of fixing the first metal member to a stand; a measuring step of measuring a height from a surface of the stand to a surface of the first metal member on a side where a rotary tool is inserted in the vicinity of the joint formed by the first metal members arranged in a positional relationship for overlapping and joining to obtain a measurement value; a setting step of setting a height position of the rotary tool based on the measurement value obtained in the measuring step; and a friction stirring process of relatively moving the rotating tool rotating along the joint based on the height position set in the setting process. A bonding method comprising the steps of:

14. In the measuring step, the first metal member in a state fixed to the frame in the fixing step is measured to obtain the measurement value. The bonding method according to claim 13.

15. The first metal member and the second metal member are fixed to a mount. In the fixing step, the first metal member and the second metal member are arranged in a positional relationship in which they are butted against or overlapped to be joined, and the first metal member and the second metal member in a state in which the joint is formed are fixed to a stand, In the measuring step, at least one of the first metal member and the second metal member fixed to the frame in the fixing step is measured to obtain the measurement value. The bonding method according to claim 13.

16. a first placement step of placing the first metal member on the stand; a second arrangement step of arranging the first metal member and the second metal member in a positional relationship for joining, In the fixing step, the first metal member arranged in the first arrangement step is fixed, In a second positioning step, the first metal member fixed in the fixing step and the second metal member are arranged in a positional relationship for joining. The bonding method according to claim 13.

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