Valve, valve abnormality diagnosis method, and computer program

Abstract

To accurately and easily diagnose valve operation abnormalities. [Solution] A valve (V1) capable of detecting operational abnormalities has a magnet (M1) attached near a retaining adapter (52) of a stem (53) that slides in response to the opening and closing of the valve (V1), and a magnetic sensor (M2) attached to the inside of the retaining adapter (52) that presses the periphery of the diaphragm (51) on the surface facing the stem (53) to detect changes in the distance from the magnet (M1). Furthermore, an abnormality determination means compares the change in distance between the magnet (M1) and the magnetic sensor (M2) detected by the magnetic sensor (M2) when an abnormality is diagnosed with a change in distance between the magnet (M1) and the magnetic sensor (M2) measured in advance under normal conditions to determine whether an abnormality exists. [Selected Figure] Figure 5

Description

[Technical field]

[0001] The present invention relates to a valve capable of being diagnosed for an abnormality and a method for diagnosing an abnormality in a valve. [Background technology]

[0002] 2. Description of the Related Art Fluid control devices such as automatic valves are used in fluid supply lines that supply process fluids used in semiconductor manufacturing processes. In recent years, semiconductor manufacturing processes such as ALD (Atomic Layer Deposition) have become more sophisticated and complex, and the number of fluid control devices installed in gas units is increasing. In addition, the sophistication of fluid control devices has led to more complex wiring around the devices, such as electrical wiring and air tubes that supply driving pressure.

[0003] In this regard, Patent Document 1 discloses a valve including a body in which a first flow path and a second flow path are formed, and a valve body that communicates or blocks between the first flow path and the second flow path, in which the body has a base portion having a first surface located on the valve body side and a second surface located on the opposite side to the first surface, a first connecting portion having a third surface that forms a step portion with the second surface, and a second connecting portion having a fourth surface that forms a step portion with the first surface, and the first flow path has a 1-1 flow path and a 1-2 flow path, and the 1-1 port of the 1-1 flow path is The proposed valve has a first port that opens onto the third surface, a 1-3 port of the 1-2 flow path that is connected to the 1-2 port of the 1-1 flow path and opens towards the valve body, and a 1-4 port of the 1-2 flow path that opens onto the fourth surface, the first flow path and the second flow path can communicate via the 1-3 port, and the first connecting part is connected to a part of the body of another valve that corresponds to the second connecting part, and the 1-1 flow path communicates with a flow path in the body of the other valve that corresponds to the 1-2 flow path.

[0004] Furthermore, as a technology for diagnosing valve abnormalities, Patent Document 2 proposes a method for detecting clogged orifices in a pressure-type flow control device, which comprises a control valve, an orifice, a pressure detector that detects the upstream pressure between them, and a flow setting circuit, and which maintains the upstream pressure at more than twice the downstream pressure to calculate the downstream flow rate and controls the opening and closing of the control valve using a difference signal between this calculated flow rate and the set flow rate. The method comprises a first step of maintaining the set flow rate at a high setting of 100% flow rate, a second step of switching this high setting to a low setting of 0% flow rate and maintaining it thereat, measuring the upstream pressure, and obtaining pressure decay data, a third step of comparing the pressure decay data with standard pressure decay data measured when the orifice is not clogged under the same conditions, and a fourth step of notifying of clogging when the pressure decay data a predetermined time after switching to the low setting flow rate is open to a predetermined degree or more compared to the standard pressure decay data. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2016-223533 A [Patent Document 2] Patent No. 3546153 Summary of the Invention [Problem to be solved by the invention]

[0006] As the semiconductor manufacturing process becomes more sophisticated and complex, the burden on the valves installed in the fluid supply lines becomes heavier, and the maintenance frequency and product life cycles become shorter. Therefore, there is a demand for a method to accurately and easily determine valve operation abnormalities. Furthermore, the complexity of electrical wiring and air tubing can lead to malfunctions due to bending or twisting, and the wiring connections can become confusing, making maintenance inconvenient, etc. Furthermore, there is a demand to ensure electromagnetic performance by simplifying the wiring, reduce noise, and prevent response delays, so it is better for the functions and structure for determining valve operational abnormalities to take such realities into consideration and not lead to complex electrical wiring and air tubing.

[0007] SUMMARY OF THE PRESENT EMBODIMENTS Accordingly, an object of the present invention is to make it possible to accurately and easily diagnose valve operation abnormalities. [Means for solving the problem]

[0008] In order to achieve the above-mentioned object, a valve according to one aspect of the present invention is a valve capable of detecting operational abnormalities and comprises a stem that slides in response to the opening and closing operation of the valve, a pressure adapter that presses the circumference of a diaphragm, a position sensor attached to the pressure adapter and detects a change in distance between a predetermined point on the stem, and an abnormality determination means that compares the change in distance between the predetermined point and the position sensor when an abnormality is diagnosed, detected by the position sensor, with a previously measured change in distance between the predetermined point and the magnetic sensor when normal, to determine the presence or absence of an abnormality.

[0009] The device may further include a magnet attached at a predetermined location near the pressure adapter, and the position sensor may consist of a magnetic sensor attached inside the pressure adapter on a surface facing the stem and detecting a change in distance to the magnet, and the abnormality determination means may determine the presence or absence of an abnormality by comparing the change in distance between the magnet and the magnetic sensor when an abnormality is diagnosed, detected by the magnetic sensor, with a previously measured change in distance between the magnet and the magnetic sensor under normal conditions.

[0010] The abnormality determination means may determine the presence or absence of an abnormality based on whether or not the position of the upper or lower surface of the stem during abnormality diagnosis is the same as the position of the upper or lower surface during normal operation.

[0011] The abnormality determination means may determine the presence or absence of an abnormality based on whether or not a stroke of the stem during abnormality diagnosis coincides with a stroke during normal operation.

[0012] The abnormality determination means may determine the presence or absence of an abnormality based on whether or not the operating speed of the stem during abnormality diagnosis coincides with the operating speed during normal operation.

[0013] The position detection accuracy of the position sensor may be within the range of ±0.01 mm to ±0.001 mm.

[0014] Furthermore, a method for diagnosing an abnormality in a valve according to another aspect of the present invention is a method for diagnosing an abnormality in a valve comprising a stem that slides in response to the opening and closing operation of the valve, a presser adapter that presses the periphery of a diaphragm, and a position sensor attached to the presser adapter and detects a change in distance between the stem and a predetermined point on the stem, the method comprising the step of comparing the change in distance between the predetermined point and the position sensor during abnormality diagnosis, detected by the position sensor, with a previously measured change in distance between the predetermined point and the position sensor during normal operation, to determine the presence or absence of an abnormality.

[0015] Furthermore, a computer program according to another aspect of the present invention is a computer program for diagnosing abnormalities in a valve having a stem that slides in response to the opening and closing operation of the valve, a pressure adapter that presses the circumference of a diaphragm, and a position sensor attached to the pressure adapter and detects a change in distance from a predetermined point on the stem, and causes a computer to execute a process of comparing the change in distance between the predetermined point and the position sensor when an abnormality is diagnosed, detected by the position sensor, with a change in distance between the predetermined point and the position sensor when normal, which has been measured in advance, to determine the presence or absence of an abnormality. The computer program can be provided by being recorded on various computer-readable recording media. Effect of the Invention

[0016] According to the present invention, it is possible to accurately and easily diagnose an operational abnormality of a valve, and the fluid supply line does not become complicated. [Brief description of the drawings]

[0017] [Figure 1] FIG. 2 is a schematic diagram showing an internal structure of a valve according to an embodiment of the present invention. [Diagram 2] 1 is an external perspective view showing a gas unit formed of a fluid supply line equipped with a valve according to an embodiment of the present invention; [Diagram 3] FIG. 2 is a plan view showing a gas unit formed by a fluid supply line equipped with a valve according to the present embodiment. [Figure 4] FIG. 2 is a side view showing a gas unit constituted by a fluid supply line equipped with a valve according to the present embodiment. [Diagram 5] 1A and 1B are cross-sectional views showing the internal structure of a valve according to the present embodiment, where (a) is an overall view and (b) is a partially enlarged view. [Figure 6] FIG. 4 is a functional diagram showing an example of a functional configuration of a valve according to the present embodiment. [Figure 7] 1 is a schematic diagram showing a cable wiring structure in a gas unit constituted by a fluid supply line equipped with a valve according to the present embodiment. FIG. [Figure 8] 1 is a schematic diagram showing a connection structure of a driving pressure supply path in a gas unit constituted by a fluid supply line equipped with a valve according to the present embodiment. FIG. [Figure 9] 13 is a schematic diagram showing a connection structure of a driving pressure supply path in a gas unit constituted by a fluid supply line according to a modified example of the present embodiment. FIG. [Figure 10] FIG. 11 is an external perspective view showing a gas unit formed by a fluid supply line according to another embodiment of the present invention. [Figure 11] 13 is a schematic diagram showing a cable wiring structure in a gas unit constituted by a fluid supply line according to another embodiment of the present invention. FIG. [Figure 12]13 is a schematic diagram showing a connection structure of a driving pressure supply path in a gas unit constituted by a fluid supply line according to another embodiment of the present invention. FIG. [Figure 13] 1A is an external perspective view of a valve according to another embodiment of the present invention, and FIG. [Figure 14] 5A and 5B are cross-sectional views taken along the line A-A illustrating the internal structure of a valve according to another embodiment of the present invention, in which (a) shows the valve in a closed state and (b) shows the valve in an open state. [Figure 15] 5A and 5B are cross-sectional views showing the internal structure of a valve according to another embodiment of the present invention, in which (a) shows a valve closed state and (b) shows a valve open state. [Figure 16] FIG. 11 is an exploded perspective view showing a fluid control device constituting a fluid control device according to another embodiment of the present invention. [Figure 17] FIG. 11 is an exploded perspective view showing a fluid control device constituting a fluid control device according to another embodiment of the present invention. [Figure 18] FIG. 11 is an exploded perspective view showing a fluid control device constituting a fluid control device according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] ● Valve V1 A valve and an abnormality diagnosis method for the valve according to an embodiment of the present invention will be described below. As shown in FIG. 1, a valve V1 according to this embodiment includes a valve body 3 and a drive pressure control device 4 connected to the valve body 3.

[0019] The valve body 3 is a valve used in a gas line of a fluid control device, such as a diaphragm valve, and is provided with at least a driving pressure inlet 3a for introducing driving pressure supplied from the outside into the interior.

[0020] The driving pressure control device 4 is connected to the driving pressure inlet 3 a of the valve body 3 , and supplies the driving pressure supplied from the driving pressure supply source G to the valve body 3 . The driving pressure control device 4 is provided with driving pressure introduction passages 431, 432, 433 as introduction passages for introducing driving pressure from a driving pressure supply source G outside the line to the valve body 3. The driving pressure introduction passage 431 is connected to the driving pressure supply source G outside the line. The driving pressure introduction passage 432 connects the driving pressure introduction passage 431 and the driving pressure introduction passage 433 via automatic valves 411 and 412. The driving pressure introduction passage 433 is connected to the driving pressure introduction port 3a of the valve body 3.

[0021] The driving pressure control device 4 is also provided with an NC (normally closed) automatic valve 411 which opens and closes the driving pressure introduction passage 431, and an NO (normally open) automatic valve 412 which opens and closes the driving pressure introduction passage 433 in conjunction with the automatic valve 411, and also opens and closes the exhaust passage 44 which exhausts the driving pressure from the driving pressure introduction passage 433 to the outside A of the device.

[0022] The automatic valves 411, 412 are opened and closed by valve driving units 421, 422, respectively. The valve driving units 421, 422 receive power supply and instruction signals instructing operation from a power supply source E and an instruction signal source Q via a wire 45, and perform operation based on the instruction signals. Both of the automatic valves 411 and 412 can be constructed from various types of valves, such as normal solenoid valves, air-operated solenoid valves, or electric valves.

[0023] This driving pressure control device 4 has automatic valves 411, 412, valve driving sections 421, 422, driving pressure introduction paths 431, 432, 433, etc. covered in a hollow cap-shaped casing 40, and is integrated with the valve body 3 by covering the casing 40. The valve body 3 and the casing 40 can be integrated together as appropriate by means of screws, adhesive, or the like.

[0024] In the driving pressure control device 4 having such a configuration, the driving pressure supplied from the driving pressure supply source G outside the line is always supplied to the automatic valve 411 via the driving pressure introduction path 431, regardless of the open / closed state of the automatic valves 411, 412.

[0025] To explain the opening and closing operation of the driving pressure control device 4, first, when the automatic valve 411 is opened by the valve driving unit 421, the driving pressure that has been supplied to the automatic valve 411 is led to the automatic valve 412 via a driving pressure introduction path 432. In addition, the automatic valve 412 is linked to the automatic valve 411, and closes as the automatic valve 411 opens, closing the exhaust passage 44, and driving pressure is supplied to the valve body 3 via a driving pressure introduction path 433.

[0026] On the other hand, when the automatic valve 411 is closed by the valve driving unit 421, the driving pressure supplied from the driving pressure supply source G is blocked by the automatic valve 411. In addition, the automatic valve 412 linked to the automatic valve 411 opens, the exhaust passage 44 is opened, and the driving pressure in the valve body 3 is exhausted.

[0027] According to the valve V1 of this embodiment, the driving pressure control device 4 and the valve body 3 are integrally connected, so that the wiring connected to the valve V1 can be simplified. In addition, the driving pressure is always supplied up to the automatic valve 411 of the driving pressure control device 4 that is integrally connected to the valve body 3, and the driving pressure is maintained at a constant pressure close to the driving pressure inlet 3a of the valve body 3. As a result, the valve body 3 is less susceptible to pressure changes in the driving pressure when opening and closing, and the opening and closing speed can be kept constant, which in turn improves the accuracy of control of the material gas.

[0028] The above-mentioned valve V1 has a structure in which the driving pressure control device 4 is connected to the valve body 3, but this is not limited to the above. It is also possible to provide a space for incorporating the driving pressure control device 4 within the valve body 3 and incorporate the driving pressure control device 4 in this space.

[0029] Next, the fluid supply line constituted by the above-mentioned valve V1 will be described. As shown in FIGS. 2 to 4, the gas unit 1 includes three fluid supply lines L1, L2, and L3 according to this embodiment. Here, the "fluid supply line (L1, L2, L3)" is one of the constituent elements of the gas unit (1), and is composed of a path through which the process fluid flows and a group of fluid control devices arranged on the path, and is the smallest constituent element capable of controlling the process fluid and independently processing the object to be processed. The gas unit is usually composed of a plurality of the fluid supply lines arranged in parallel. In addition, "outside the line" referred to in the following description refers to a part or mechanism that does not constitute the fluid supply line, and the mechanism outside the line includes a power supply source that supplies the power required to drive the fluid supply line, a driving pressure supply source that supplies the driving pressure, a device configured to be able to communicate with the fluid supply line, etc.

[0030] Each of the fluid supply lines L1, L2, and L3 fluidly connects a plurality of fluid control devices, and the fluid control devices are constituted by the valves (V11-V14, V21-V24, V31-V34) including the valve V1 described above, and flow control devices (F1-F3). In the following description, the valves (V11-V14, V21-V24, V31-V34) may be collectively referred to as the valve V1, and the flow control devices (F1-F3) may be collectively referred to as the flow control device F.

[0031] The flow rate control device F is a device that controls the flow rate of the fluid in each of the fluid supply lines L1, L2, and L3. This flow control device F can be configured, for example, by a variable flow range type flow control device. A variable flow range type flow control device is a device that can automatically switch and select a flow control range by operating a switching valve. This variable flow range type flow control device has, for example, fluid passages for small flow rates and large flow rates as fluid passages to the flow rate detection unit of the flow control device. The small flow rate range fluid is circulated to the flow rate detection unit through the small flow rate fluid passage, and the detection level of the flow control unit is switched to a detection level suitable for detection of the small flow rate range, and the large flow rate range fluid is circulated to the flow rate detection unit through the large flow rate fluid passage, and the detection level of the flow control unit is switched to a detection level suitable for detection of the flow rate in the large flow rate range, thereby switching between the large flow rate range and the small flow rate range fluid to control the flow rates.

[0032] In addition, such a variable flow rate range type flow control device uses the orifice upstream pressure P1 and / or the orifice downstream pressure P2 to calculate the flow rate of the fluid flowing through the orifice as Qc=KP1 (K is a proportionality constant) or Qc=KP2. m (P1-P2) n (K is a proportional constant, m and n are constants), and the fluid passage between the downstream side of the control valve of the pressure type flow controller and the fluid supply pipe may be made into at least two or more parallel fluid passages, and an orifice with a different fluid flow characteristic may be interposed in each of the parallel fluid passages. In this case, to control the flow rate of a fluid in a small flow rate range, a fluid in a small flow rate range is circulated through one orifice, and to control the flow rate of a fluid in a large flow rate range, a fluid in a large flow rate range is circulated through at least the other orifice. The flow rate range can also be set to three stages. In this case, three types of orifices are provided: a large flow rate orifice, a medium flow rate orifice, and a first switching valve, a second switching valve, and a large flow rate orifice are interposed in series in one fluid passage, and a small flow rate orifice and a medium flow rate orifice are interposed in the other fluid passage, and further a passage communicating between both switching valves is connected to a passage communicating between the small flow rate orifice and the medium flow rate orifice. According to this variable flow range type flow control device, it is possible to maintain high control accuracy while expanding the flow control range.

[0033] In another example, the flow control device F can be configured by a differential pressure control type flow control device. A differential pressure control type flow control device is a device that uses a flow calculation formula derived from Bernoulli's theorem as a basis and calculates and controls the fluid flow rate by adding various corrections to this. This differential pressure type flow control device has a control valve section equipped with a valve drive section, an orifice provided downstream of the control valve, a detector for fluid pressure P1 upstream of the orifice, a detector for fluid pressure P2 downstream of the orifice, and a detector for fluid temperature T upstream of the orifice.The built-in control and calculation circuit calculates the fluid flow rate Q using the detected pressures and temperatures from each detector as Q=C1·P1 / √T·((P2 / P1)m-(P2 / P1)n). 1 / 2 (where C1 is a proportional constant, and m and n are constants) and the difference between the calculated flow rate and the set flow rate is calculated. A differential pressure type flow control device can be used in-line without being restricted by the mounting position, and furthermore, the controlled flow rate is hardly affected by pressure fluctuations, so that highly accurate flow measurement or flow control can be performed in real time.

[0034] Such a flow control device F is equipped with an operation information acquisition mechanism that acquires operation information of the flow control device F, and an information processing module that aggregates operation information of the valves V1 that form the same line, monitors the valves V1, and can control each valve V1. The operation information acquisition mechanism can be configured, for example, by various sensors and a calculation device that performs flow control built into the flow control device F, and an information processing module that processes information from these sensors, calculation devices, etc. In particular, for the valve V1 constituting the same fluid supply lines L1, L2, and L3, by supplying driving pressure from a mechanism outside the line via the flow control device F and enabling communication, the operation information of each valve V1 can be consolidated in the flow control device F. As a result, the operation information of the entire line is composed of the operation information of each valve V1 and the operation information of the flow control device F.

[0035] In addition to having the above-described configuration as an operating mechanism, the valve V1 also has a built-in operation information acquisition mechanism that acquires operation information of the valve V1 and an information processing module that processes the data detected by the operation information acquisition mechanism, as functions or mechanisms capable of detecting abnormalities in its own operation.

[0036] FIG. 5 shows an example of a specific configuration of such a valve V1. This valve V1 has a magnetic sensor M2 and a magnet M1 as an operation information acquisition mechanism. The magnetic sensor M2 is attached to the inner side of a pressing adapter 52 that presses the periphery of a diaphragm 51, on the surface facing a stem 53. In addition, the magnet M1 is attached near the pressing adapter 52 of the stem 53 that slides in response to the opening and closing operation of the valve V1. The magnetic sensor M2 can measure not only the open / closed state of the valve V1 but also the opening degree thereof by sensing the change in distance between the magnetic sensor M2 and a magnet M1 attached at a predetermined position.

[0037] While the magnetic sensor M2 may be connected to a cable or the like for transmitting and receiving measured data, the magnet M1 does not require such a wired connection. Therefore, by attaching the magnet M1 to the stem 53 that moves up and down and attaching the magnetic sensor M2 to the retaining adapter 52 whose position is fixed inside the valve V1, it is possible to prevent the cable connected to the magnetic sensor M2 from moving as the valve V1 moves, which could cause a malfunction.

[0038] The magnetic sensor M2 has a planar coil, an oscillator circuit, and an integrator circuit, and the oscillation frequency changes according to the change in the distance to the opposing magnet M1. The integrator circuit converts this frequency to obtain an integrated value, making it possible to measure not only the open / closed state of the valve V1, but also the opening degree when the valve is open. 6, the information processing module built into the valve V1 has an abnormality determination unit as a functional unit that determines the presence or absence of an abnormality in the valve V1 based on data acquired by the magnetic sensor M2. This abnormality determination unit compares the change in distance between the magnet M1 and the magnetic sensor M2 detected by the magnetic sensor M2 with the change in distance between the magnet M1 and the magnetic sensor M2 measured in advance under normal conditions to determine the presence or absence of an abnormality.

[0039] ●Abnormality determination section Here, the processes that can be executed by the abnormality determination unit will be described. First, the abnormality determination unit can determine the presence or absence of an abnormality based on whether the position of the upper or lower surface of the stem 53 at the time of abnormality diagnosis is the same as the normal upper or lower surface position. That is, the upper and lower surface positions of the stem 53 at the time of operation are measured based on the change in distance between the magnetic sensor M2 and the magnet M1. It is determined whether or not these upper and lower surface positions match the upper and lower surface positions at the normal time measured in advance, and if they match, it can be determined that there is no abnormality, and if they do not match, it can be determined that there is an abnormality.

[0040] The abnormality determination unit can determine the presence or absence of an abnormality based on whether the stroke of the stem 53 during abnormality diagnosis matches the stroke during normal operation. That is, the movement distance (stroke) from the upper surface position to the lower surface position during operation of the stem 53 is measured based on the change in distance between the magnetic sensor M2 and the magnet M1. It is determined whether this stroke matches the normal stroke measured in advance, and if they match, it can be determined that there is no abnormality, and if they do not match, it can be determined that there is an abnormality.

[0041] The abnormality determination unit can determine the presence or absence of an abnormality based on whether the operating speed of the stem 53 during abnormality diagnosis matches the operating speed during normal operation. That is, the operating speed of the stem 53 during operation is measured based on the change in distance between the magnetic sensor M2 and the magnet M1. It is determined whether this operating speed matches the operating speed during normal operation measured in advance, and if they match, it can be determined that there is no abnormality, and if they do not match, it can be determined that there is an abnormality.

[0042] According to such a configuration of the valve V1 and the method for diagnosing the abnormality thereof, it is possible to accurately and easily diagnose the operation abnormality of the valve V1. In addition, since the mechanism for diagnosing the abnormality is concentrated in the valve V1, the gas unit 1 is not complicated. As a result, the electrical wiring and air tubes are not complicated, which may lead to malfunctions caused by bending or twisting, and requirements such as ensuring electromagnetic performance, reducing noise, and preventing response delays are also satisfied.

[0043] In the above example, the valve V1 is equipped with an information processing module that constitutes the abnormality determination unit, but this is not limiting, and the functions of the information processing module may be provided in a server or the like provided outside the valve V1 or outside the fluid supply lines L1, L2, and L3. In this case, the multiple valves V1 that constitute the fluid supply lines L1, L2, and L3 can be centrally monitored while checking for operational abnormalities of each valve V1.

[0044] In addition to the above-mentioned magnetic sensor M2, a pressure sensor, a temperature sensor, a limit switch, etc. may be attached to a predetermined location as an operation information acquisition mechanism. The pressure sensor is, for example, composed of a pressure-sensitive element that detects pressure changes in a predetermined space, or a piezoelectric element that converts the detection value of the pressure detected by the pressure-sensitive element into an electric signal, and detects pressure changes in a sealed internal space. Furthermore, the temperature sensor is, for example, a sensor that measures the temperature of a fluid, and by installing it near the flow path and measuring the temperature at that location, the temperature at that location can be considered to be the temperature of the fluid flowing through the flow path. In addition, the limit switch is fixed near the piston, for example, and is switched according to the up and down movement of the piston, thereby making it possible to detect the number of times the valve V1 is opened and closed, the frequency of opening and closing, the opening and closing speed, etc.

[0045] Such information acquired by the operation information acquisition mechanism in the valve V1 and information processed by the information processing module can also be collected in the flow control device F that constitutes the same fluid supply lines L1, L2, and L3.

[0046] The gas unit 1 is connected to an off-line mechanism that includes a driving pressure supply source that supplies driving pressure, a power supply source that supplies power, a communication device that performs communication, and the like. Here, the fluid control devices constituting the gas unit 1 are connected by a first connection means that directly connects a mechanism outside the line to a predetermined fluid control device, and a second connection means that branches off from the first connection means or connects a mechanism outside the line to another fluid control device via a fluid control device connected to the first connection means. Specifically, in the case of the fluid supply line L1, in FIG. 7 described in detail later, the main cable 10 and the extension cable 11 constitute the first connection means for power supply from outside the line and communication with the outside of the line, and the sub-cables 111, 112, 113, and 114 constitute the second connection means. Also, in FIG. 8 described in detail later, in the supply of driving pressure from outside the line, the main tube 20, the extension tube 21, and the sub-tube 214 constitute the first connection means, and the extension tubes 211, 212, 213, and the sub-tubes 215, 216, 217, and 218 constitute the second connection means.

[0047] Power supply and off-line communication are made possible by a main cable 10 connecting the off-line mechanisms to the gas unit 1, as shown in FIG. The main cable 10 branches into an extension cable 11 and a branch cable 101 by a branch connector C1 provided near the gas unit, the branch cable 101 branches into an extension cable 12 and a branch cable 102 by a branch connector C2, and the branch cable 102 is connected to an extension cable 13 via a branch connector C3.

[0048] Looking at the fluid supply lines L1, L2, and L3, in the fluid supply line L1, the extension cable 11 is connected to the flow control device F1. Sub-cables 111 and 112 are led out from the flow control device F1 to which the extension cable 11 is connected, and the sub-cable 111 is connected to the valve V11, and the sub-cable 112 is connected to the valve V12. Further, a sub-cable 113 is led out from the valve V12 to which the sub-cable 112 is connected, and the sub-cable 113 is connected to the valve V13. Further, a sub-cable 114 is led out from the valve V13 to which the sub-cable 113 is connected, and the sub-cable 114 is connected to the valve V14.

[0049] The fluid supply line L2 is also connected to a mechanism outside the line by a configuration similar to that of the fluid supply line L1. That is, the extension cable 12 is connected to the flow control device F2. Sub-cables 121 and 122 are led out from the flow control device F2 to which the extension cable 12 is connected, the sub-cable 121 is connected to the valve V21, and the sub-cable 122 is connected to the valve V22. Further, a sub-cable 123 is led out from the valve V22 to which the sub-cable 122 is connected, and the sub-cable 123 is connected to the valve V23. Further, a sub-cable 124 is led out from the valve V23 to which the sub-cable 123 is connected, and the sub-cable 124 is connected to the valve V24.

[0050] The fluid supply line L3 is also connected to a mechanism outside the line by a configuration similar to that of the fluid supply line L1. That is, the extension cable 13 is connected to the flow control device F3. Sub-cables 131 and 132 are led out from the flow control device F3 to which the extension cable 13 is connected, the sub-cable 131 is connected to the valve V31, and the sub-cable 132 is connected to the valve V32. Further, a sub-cable 133 is led out from the valve V32 to which the sub-cable 132 is connected, and the sub-cable 133 is connected to the valve V33. Further, a sub-cable 134 is led out from the valve V33 to which the sub-cable 133 is connected, and the sub-cable 134 is connected to the valve V34.

[0051] Here, for the fluid supply line L1, the extension cable 11 is connected to the flow control device F1, and sub-cables 111 and 112 are led out from the flow control device F1, but the extension cable and the sub-cables 111 and 112 are connected within the flow control device F1. The connection may be via a division processing module provided within the flow control device F1, or may be made by branching the extension cable 11. Also, in the valves V12 and V13, the sub-cable 112 is connected to the sub-cable 113, and the sub-cable 113 is connected to the sub-cable 114. The connections of the sub-cables 112, 113, and 114 may also be made via information processing modules provided in the valves V12 and V13, or the sub-cables 112 and 113 may be branched. In any case, it is sufficient that the mechanism outside the line and the valves V11, V12, V13, and V14 are connected to be able to communicate with each other via the flow control device F1 and that power is supplied thereto.

[0052] The other fluid supply lines L2 and L3 are connected in a similar manner, and the valves V21, V22, V23, and V24 are connected to mechanisms outside the lines via the flow control device F2 by the main cable 10, the extension cable 12, and the sub-cables 121, 122, 123, and 124. The valves V31, V32, V33, and V34 are connected to mechanisms outside the lines via the flow control device F3 by the main cable 10, the extension cable 13, and the sub-cables 131, 132, 133, and 134.

[0053] Driving pressure is supplied from an off-line mechanism to the gas unit by a main tube 20, as shown in FIG. The main tube 20 branches into extension tubes 21, 22, and 23 for supplying driving pressure to the fluid supply lines L1, L2, and L3, respectively, by a branch joint J1 provided near the gas unit.

[0054] Looking at the fluid supply lines L1, L2, and L3, in the fluid supply line L1, the extension tube 21 branches into an extension tube 211 and a sub-tube 214 by a joint J11. The sub-tube 214 is connected to the flow control device F1, thereby supplying a driving pressure to the flow control device F1. The extension tube 211 is further branched by a joint J111 into an extension tube 212 and a sub-tube 215. The sub-tube 215 is connected to a valve V11, thereby supplying a driving pressure to the valve V11. Similarly, the extension tube 212 is further branched by a joint J112 into an extension tube 213 and a sub-tube 216. The sub-tube 216 is connected to the valve V12, thereby supplying a driving pressure to the valve V12. The extension tube 213 further branches into subtubes 217 and 218 by a joint J113. The subtube 217 is connected to the valve V13, thereby supplying the driving pressure to the valve V13. The subtube 218 is connected to the valve V14, thereby supplying the driving pressure to the valve V14.

[0055] The driving pressure is also supplied to the fluid supply line L2 by a configuration similar to that of the fluid supply line L1. That is, the extension tube 22 branches into an extension tube 221 and a sub-tube 224 by a joint J12. The sub-tube 224 is connected to the flow control device F2, and thus a driving pressure is supplied to the flow control device F2. The extension tube 221 is further branched by a joint J121 into an extension tube 222 and a sub-tube 225. The sub-tube 225 is connected to the valve V21, thereby supplying a driving pressure to the valve V21. Similarly, the extension tube 222 is further branched by a joint J122 into an extension tube 223 and a sub-tube 226. The sub-tube 226 is connected to the valve V22, thereby supplying a driving pressure to the valve V22. The extension tube 223 further branches into subtubes 227 and 228 by a joint J123. The subtube 227 is connected to the valve V23, thereby supplying the driving pressure to the valve V23. The subtube 228 is connected to the valve V24, thereby supplying the driving pressure to the valve V24.

[0056] The driving pressure is also supplied to the fluid supply line L3 by a configuration similar to that of the fluid supply line L1. That is, the extension tube 23 branches by a joint J13 into an extension tube 231 and a sub-tube 234. The sub-tube 234 is connected to the flow control device F3, and thereby a driving pressure is supplied to the flow control device F3.

[0057] The extension tube 231 is further branched by a joint J131 into an extension tube 232 and a sub-tube 235. The sub-tube 235 is connected to the valve V31, thereby supplying a driving pressure to the valve V31. Similarly, the extension tube 232 is further branched by a joint J132 into an extension tube 233 and a sub-tube 236. The sub-tube 236 is connected to the valve V32, thereby supplying a driving pressure to the valve V32. The extension tube 233 further branches into subtubes 237 and 238 by a joint J133. The subtube 237 is connected to the valve V33, thereby supplying the driving pressure to the valve V33. The subtube 238 is connected to the valve V34, thereby supplying the driving pressure to the valve V34.

[0058] Here, in the fluid supply line L1, the flow control device F1 and the valves V11, V12, V13, and V14 are all connected to the extension tube 21 and the main tube 20 via the joints J11, J111, J112, and J113, the extension tubes 211, 212, and 213, and the subtubes 214, 215, 216, 217, and 218, but this is not limited thereto, and the extension tube 21 and the flow control device F1 can be connected and the driving pressure can be supplied from the flow control device F1 to each of the valves V11, V12, V13, and V14 as shown in Fig. 9. In this case, a mechanism for distributing the driving pressure supplied from the main tube 20 to each of the valves V11, V12, V13, and V14 may be provided in the flow control device F1, or the main tube drawn into the flow control device F1 may be branched within the flow control device F1. The fluid supply lines L2 and L3 can be similarly configured.

[0059] According to such a configuration of the fluid supply lines L1, L2, and L3, the cables for power supply and communication can be simplified, noise can be reduced, and delays in the transmission speed of instruction signals can be suppressed. In addition, since the internal volume of the tube supplying the driving pressure can be reduced, the opening and closing speeds of each fluid control device such as the valve V1 and the flow control device F can be maintained and errors in the opening and closing speeds of each fluid control device can be prevented. As a result, the variation in the operation of each fluid control device can be suppressed, and the control accuracy of the fluid supply lines L1, L2, and L3 can be improved.

[0060] In this case, if each valve V1 is connected to the flow control device F so as to be able to communicate with it, and the flow control device F is able to identify and control each valve V1, it is possible to individually identify each valve V1 that constitutes the same line and diagnose whether there is an abnormality, or to analyze the operation of each valve V1 from the perspective of the entire line. The operation information of each fluid supply line L1, L2, L3 collected in the flow control devices F1, F2, F3 can be transmitted to an external information processing device via the main cable 10, and the information processing device can diagnose the presence or absence of an abnormality and analyze the operation. The external information processing device may be a part of a mechanism outside the line, or may be a device connected to a mechanism outside the line so as to be able to communicate with the mechanism. The external information processing device may be configured by a so-called server computer or the like.

[0061] The above-mentioned fluid supply lines L1, L2, and L3 can also constitute the gas unit 2 shown in FIGS. Unlike the gas unit 1, the fluid supply lines L1, L2, and L3 constituting the gas unit 2 are each separately connected to a mechanism outside the line.

[0062] That is, power supply to the gas unit 2 and communication with outside the line are made possible by main cable 10a connecting the off-line mechanism to fluid supply line L1, main cable 10b connecting the off-line mechanism to fluid supply line L2, and main cable 10c connecting the off-line mechanism to fluid supply line L3, as shown in Figure 11. In each of the fluid supply lines L1, L2, and L3, the connection from the flow rate control device F to the valve V1 is the same as in the gas unit 1.

[0063] As shown in FIG. 12, the driving pressure is supplied from an outside mechanism to the gas unit 2 through main tubes 20a, 20b, and 20c for each of the fluid supply lines L1, L2, and L3. In each of the fluid supply lines L1, L2, and L3, the connections from the joints J11, J12, and J13 to the flow control device F and the valve V1 are the same as those in the gas unit 1.

[0064] In the above-described embodiment, each of the gas units 1 and 2 is configured with three fluid supply lines L1, L2, and L3, but the application of the present invention is not limited by the number of lines. Furthermore, the embodiments of the present invention are not limited to the above-described embodiments, and a person skilled in the art can make various changes or additions to the configuration, means, or functions without departing from the scope of the present invention.

[0065] Further, although the present embodiment uses a magnetic sensor M2, this is not limited to this, and other types of sensors, such as optical position sensors, can also be used as long as they are position sensors that can measure the positional relationship between the stem 53 and the pressure adapter 52, or the distance between specific points of these components. Furthermore, regardless of which position sensor is used, it is desirable to select one with a position detection accuracy of ±0.01 mm to ±0.001 mm. This is because, while fine opening control of about ±0.01 mm is necessary to achieve fine fluid control for the valve intended for the semiconductor manufacturing process, using a detection accuracy exceeding ±0.001 mm will result in detection of vibrations generated by the vacuum pump or the like near valve V1, resulting in noise.

[0066] ● Valve V2 A valve V2 according to another embodiment, which has a different structure from the valve V1 in the above-described embodiment, will be described with reference to FIGS. The valve V2 shown in FIG. 13 is an air-operated direct diaphragm valve, and includes a valve body 6, a bonnet portion 7, a cover portion 8, and an actuator portion 9, as shown in FIGS.

[0067] As shown in FIGS. 14 to 16, the valve body 6 is composed of a base portion 61 in which a flow path is formed, and a cylindrical portion 62 provided on the base portion 61 and having a substantially cylindrical shape. The base portion 61 has a rectangular shape in a plan view, and is a portion that is installed on a substrate or a manifold block when the gas unit 1 (2) described above is configured with a plurality of valves V2.

[0068] The cylindrical portion 62 has a hollow shape with an open end face on the side where the bonnet portion 7 is disposed, and the hollow interior forms a recess 62a in which the bonnet portion 7 is housed. The cylindrical portion 62 has a length in the axial direction, is open at one end on the side where the bonnet portion 7 is disposed and opposite the base portion 61, and is provided with a slit 62b penetrating from the outside to the recessed portion 62a side. A flexible cable 76 extending from the bonnet wall 75 is led out from the inside to the outside through the slit 62b.

[0069] An inflow passage 611 through which the fluid flows in, an outflow passage 613 through which the fluid flows out, and a valve chamber 712 communicating with the inflow passage 611 and the outflow passage 613 are formed below the recess 62a and within the base portion 61. The inflow passage 611, the outflow passage 613, and the valve chamber 712 integrally form a flow passage through which the fluid flows.

[0070] 14 to 17, the bonnet portion 7 is disposed in a state of being housed in the recess 62a of the valve body 6. The bonnet portion 7 includes a seat 71, a diaphragm 72, a diaphragm holder 73, a bonnet 74, and a bonnet wall 75. In this example, the bonnet 74, together with a bonnet wall 75 disposed within the bonnet 74, is a member that presses the periphery of the diaphragm 72 from above, and is a member that corresponds to the pressing adapter 52 in the valve V1 described above. Also, what is referred to as a diaphragm presser 73 in this example serves the function of pressing the diaphragm 72, similar to the stem 53 in the valve V1.

[0071] The annular sheet 71 is provided on the periphery of the opening of the inflow passage 611 in the valve chamber 712. By bringing a diaphragm 72 into and out of contact with the sheet 71, it is possible to allow or block the flow of fluid from the inflow passage 611 to the outflow passage 613.

[0072] The diaphragm 72 is made of a metal such as stainless steel or a Ni-Co alloy, and is a spherical shell-shaped member with a convex bulge at the center, separating the flow path from the space in which the actuator unit 9 operates. When the diaphragm 72 is not pressed by the diaphragm holder 73, it is separated from the sheet 71 as shown in Fig. 14(b) and Fig. 15(b), and the inflow path 611 and the outflow path 613 are in communication. On the other hand, when it is pressed by the diaphragm holder 73, the center of the diaphragm 72 is deformed and comes into contact with the sheet 71 as shown in Fig. 14(a) and Fig. 15(a), and the inflow path 611 and the outflow path 613 are blocked.

[0073] The diaphragm retainer 73 is provided above the diaphragm 72 and presses the center of the diaphragm 72 in conjunction with the up and down movement of the piston 93 . The diaphragm retainer 73 is made up of a substantially cylindrical base portion 731 and an expanded diameter portion 732 whose diameter is expanded at one end side on the side that comes into contact with the diaphragm 72 .

[0074] The base portion 731 is formed with a bottomed groove 731a that has a length in the axial direction and is open at one end opposite the enlarged diameter portion 732. A shaft portion of a screw 75d that is screwed into a screw hole 75c of the bonnet wall 75 is slidably fitted into this groove 731a. The groove 731a and the screw 75d constitute a rotation restricting means that restricts the rotation of the diaphragm holder 73 in the circumferential direction, so that the diaphragm holder 73 moves up and down in conjunction with the piston 93 while being restricted from rotating in the circumferential direction.

[0075] Also, a magnet M3 is attached to the base part 731. In this embodiment, this magnet M3 is attached to the opposite side of the groove 731a of the base part 731, but it can also be attached to another position on the base part 731 as long as there is no impediment to the magnetic sensor M4 detecting the magnetic force of the magnet M3 and no impediment to the operation of the valve V2.

[0076] The bonnet 74 has a substantially cylindrical shape and is accommodated in the recess 62 a of the valve body 6 . The diaphragm 72 is sandwiched between the lower end of the bonnet 74 and the valve body 6, and a seal is formed between the diaphragm 72 and the valve body 6 at this portion. Inside the bonnet 74, there is provided a substantially disk-shaped partition portion 741 having a through hole 741a formed in the center thereof, through which the diaphragm holder 73 is inserted. A bonnet wall 75 is housed in a recess 74a formed above the partition part 741 or on the side where the actuator part 9 is disposed. The partition part 741 and the bonnet wall 75 are provided with a screw hole 741b and a through hole 75e at corresponding positions, respectively, and the bonnet wall 75 is screwed to the bonnet 74 by a bolt 75f.

[0077] The partition 741 of the bonnet 74 has a constant thickness, and an O-ring O7 is interposed between the inner peripheral surface of a through-hole 741a formed in the partition 741 and the diaphragm holder 73. This ensures airtightness of the closed space S2 defined by the partition 741, the diaphragm 72, and the diaphragm holder 73. Further, the partition 741 of the bonnet 74 is provided with a communication hole 741d that communicates with a pressure sensor P attached to the bonnet wall 75. By providing the pressure sensor P via the communication hole 741d, it is possible to measure the pressure in the closed space S2 defined by the partition 741, the diaphragm 72, and the diaphragm presser.

[0078] Further, a through hole 741c is provided on the side surface of the bonnet 74 for leading out the flexible cable 76 led out from the bonnet wall 75 housed inside to the outside.

[0079] The bonnet wall 75 is a member disposed inside the bonnet 74. The bonnet wall 75 is formed by hollowing out a thick, approximately disk-shaped member into an approximately C-shape in plan view. A through hole 75a is provided in the center of the bonnet wall 75, through which the base portion 731 of the diaphragm holder 73 is inserted. In addition, an opening 75b is provided to open the through hole 75a toward the radially outward direction of the bonnet wall 75.

[0080] A screw hole 75c is formed at a predetermined location in the thickness portion of the bonnet wall 75, the screw hole 75c being threaded radially outward from the through hole 75a. A screw 75d is screwed into this screw hole 75c from the outside, and the axial center portion of the screwed screw 75d slips out toward the through hole 75a and slidably fits into the groove 731a of the diaphragm retainer 73 inserted into the through hole 75a.

[0081] The bonnet wall 75 has a through hole 75e at a position corresponding to the screw hole 741b of the bonnet 74. A bolt 75f is screwed into the screw hole 741b and the through hole 75e in a state in which the bonnet wall 75 is disposed on the partition portion 741 of the bonnet 74, thereby fixing the bonnet wall 75 to the bonnet 74.

[0082] A flat magnetic sensor M4 is attached to the outer circumferential surface of the bonnet wall 75 near the opening 75b so as to span the opening 75b and close it. This magnetic sensor M4 can measure not only the open / closed state of the valve V2 but also the opening degree by sensing the change in distance between the magnet M3 attached to the diaphragm holder 73. The magnetic sensor M4 attached to the bonnet wall 75 is fixed in a predetermined position and is not affected by the up and down movement of the piston 93 and the diaphragm holder 73 accompanying the opening and closing operation of the valve V2.

[0083] As shown in Figures 13 and 18, the cover portion 8 clamps and holds the actuator body 91 and the valve body 6 together, and also serves as a fixing means for fixing the circuit board 77 and the connector 78 provided on the circuit board 77 to the valve V2. The cover portion 8 includes a cover 81 and flat plates 82 and 83 .

[0084] The cover 81 is substantially U-shaped, and the actuator body 91 and the end of the valve body 6 are fitted inside the cover 81. Screw holes 31a are provided on both side surfaces of the cover 81 at positions corresponding to the positions where the actuator body 91 is fitted. With this, when the valve body 6 is fitted inside and a screw 81b is screwed into the screw hole 31a and the tip of the screw 81b is pressed against the valve body 6, the valve body 6 can be clamped inside the cover 81.

[0085] Further, a screw hole 81c is provided in a thickness portion of the cover 81. The plates 82 and 83 are attached to the cover 81 by screwing a screw 81d into the screw hole 81c via through holes 82b and 83b of the plates 82 and 83.

[0086] The plates 82, 83 are screwed to the cover 81 with the ends of the actuator body 91 and the valve body 6 fitted inside the cover 81, and in the fixed state, the actuator body 91 and the valve body 6 are clamped and held between the plates 82, 83 and the cover 81. A tongue-shaped cutout portion 82a is formed in the lower portion of the plate 82, and the flexible cable 76 is led out through this cutout portion 82a to a circuit board 77 on which a connector 78 is provided.

[0087] The plate 83 is fixed to the plate 82 and the cover 81 by screws with the circuit board 77 interposed between the plate 83 and the plate 82, and the circuit board 77 is clamped and held between the plate 83 and the plate 82. The plate 83 has a substantially rectangular through hole 83a in the center, and the connector 78 provided on the circuit board 77 extends to the outside through the through hole 83a.

[0088] Here, the base part 61 has a rectangular shape in a plan view, and the cover part 8 fixes the connector 78 to the valve V2 in a diagonal direction of the rectangular base part 61 as shown in FIG. 13(b). The reason for fixing the connector 78 in such a direction is as follows. That is, when the gas unit 1 (2) is configured with a plurality of valves V2, it is preferable to align the directions of the adjacent rectangular base parts 61 to eliminate gaps as much as possible and arrange the valves V2 on a board or manifold block in order to achieve integration. On the other hand, when the valves are arranged and integrated in this manner, it becomes difficult to connect terminals, etc. to the connector 78. Therefore, by orienting the connector 78 in a diagonal direction of the base part 61, a larger space can be secured for connection compared to the case where the connector 78 is oriented toward the valve V2 arranged directly to the side. As a result, it is easy to connect terminals, etc. to the connector 78, and it is possible to prevent problems such as breakage due to bending or twisting of terminals, and to prevent problems such as the terminals hitting the valve V2 and causing abnormal operation of the valve V2.

[0089] The actuator portion 9 is disposed on the bonnet portion 7 . 14 and 15, the actuator unit 9 includes an actuator body 91, an actuator cap 92, a piston 93, and a spring 94. Note that, although the internal structure of the actuator unit 9 is omitted in Fig. 16, the internal structure is as shown in Figs.

[0090] The actuator body 91 is interposed between the piston 93 and the bonnet 74 . 16, the actuator body 91 has a generally cylindrical shape and is provided at the center with a through hole 91a extending in the longitudinal direction, through which the piston 93 and diaphragm holder 73 are inserted. As shown in Figures 13 and 14, the piston 93 and the diaphragm holder 73 abut against each other within the through hole 91a, and the diaphragm holder 73 moves up and down in conjunction with the up and down movement of the piston 93.

[0091] A peripheral wall 911 consisting of an annular protrusion is formed on the upper end surface on the side where the piston 93 is arranged, and a driving pressure introducing chamber S1 into which driving pressure is introduced is formed between the inner flat horizontal surface of the peripheral wall 911 and the lower end surface of the enlarged diameter portion 931 of the piston 93.

[0092] In addition, a male thread is cut on the outer peripheral surface of the actuator body 91 on the side where the piston 93 is arranged, and the actuator body 91 is attached to one end of the actuator cap 92 by screwing it into a female thread cut on the inner peripheral surface of the actuator cap 92.

[0093] The center portion in the longitudinal direction of the actuator body 91 is formed into a generally hexagonal shape in cross section, and the hexagonal portion in cross section and the upper end portion of the valve body 6 are clamped together by the cover 81.

[0094] The actuator cap 92 is a cap-shaped member with an open lower end, and houses a piston 93 and a spring 94 inside. An opening 92 a communicating with a driving pressure introduction passage 932 of the piston 93 is provided on the upper end surface of the actuator cap 92 . The lower end of the actuator cap 92 is closed by being screwed onto the upper part of the actuator body 91 .

[0095] The piston 93 moves up and down in response to the supply and stop of the driving pressure, and causes the diaphragm 72 to contact and separate from the seat 71 via the diaphragm holder 73 . The piston 93 has a disk-like expanded diameter at approximately the center in the axial direction, and this portion constitutes an expanded diameter portion 931. The piston 93 receives the biasing force of a spring 94 on the upper surface side of the expanded diameter portion 931. In addition, a driving pressure introducing chamber S1 to which driving pressure is supplied is formed on the lower end side of the expanded diameter portion 931.

[0096] Further, inside the piston 93, a driving pressure introduction passage 932 is provided for communicating an opening 93a formed in the upper end surface with the driving pressure introduction chamber S1 formed on the lower end side of the enlarged diameter portion 931. The opening 93a of the piston 93 is connected to an opening 92a of the actuator cap 92, and an introduction pipe for introducing driving pressure from the outside is connected to the opening 92a, thereby supplying driving pressure to the driving pressure introduction chamber S1.

[0097] An O-ring O91 is attached to the outer peripheral surface of the expanded diameter portion 931 of the piston 93, and this O-ring O91 provides a seal between the outer peripheral surface of the expanded diameter portion 931 of the piston 93 and the peripheral wall 911 of the actuator body 91. In addition, an O-ring O92 is attached to the lower end side of the piston 93, and this O-ring O92 provides a seal between the outer peripheral surface of the piston 93 and the inner peripheral surface of the through-hole 91a of the actuator body 91. These O-rings O91 and O92 form a driving pressure introducing chamber S1 that communicates with the driving pressure introducing passage 932 in the piston 93, and ensure the airtightness of this driving pressure introducing chamber S1.

[0098] The spring 94 is wound around the outer circumferential surface of the piston 93 and abuts against the upper surface of the enlarged diameter portion 931 of the piston 93 to bias the piston 93 downward, that is, in the direction of pressing down the diaphragm 72 .

[0099] Here, the opening and closing operation of the valve accompanying the supply and stop of driving pressure will be described. When air is supplied from an introduction pipe (not shown) connected to the opening 92a, the air is introduced into the driving pressure introduction chamber S1 via the driving pressure introduction passage 932 in the piston 93. In response, the piston 93 is pushed upward against the biasing force of the spring 94. As a result, the diaphragm 72 moves away from the seat 71, opening the valve and allowing fluid to flow. On the other hand, when air is no longer introduced into the driving pressure introducing chamber S1, the piston 93 is pushed downward by the biasing force of the spring 94. As a result, the diaphragm 72 comes into contact with the seat 71, closing the valve and blocking the flow of fluid.

[0100] The valve V2 includes a pressure sensor P and a magnetic sensor M4 as an operation information acquisition mechanism for acquiring operation information within the device. 15, the pressure sensor P is attached to the lower surface or the flow path side of the bonnet wall 75, and communicates with the closed space S2 defined by the diaphragm 72, the partition portion 741 of the bonnet 74, and the diaphragm retainer 73 via the communication hole 741d. The pressure sensor P is composed of a pressure-sensitive element that detects pressure changes, a conversion element that converts the detection value of the pressure detected by the pressure-sensitive element into an electric signal, etc. Thus, the pressure sensor P can detect the pressure in the closed space S2 defined by the diaphragm 72, the partition portion 741 of the bonnet 74, and the diaphragm retainer 73. In addition, a packing 26 is interposed at the location where the pressure sensor P communicates with the communication hole 741d to ensure an airtight state. The pressure sensor P may be one that detects either gauge pressure or atmospheric pressure.

[0101] The magnetic sensor M4 senses the change in distance between itself and a magnet M3 attached to a diaphragm holder 73, thereby measuring not only the open / closed state of the valve V2 but also the opening degree. This magnetic sensor M4 can detect the opening and closing operation of the valve as follows: That is, while the magnet M3 moves up and down in response to the up and down movement of the diaphragm holder 73, the magnetic sensor M4 is fixed inside the valve body 6 together with the bonnet wall 75 and the bonnet 74. As a result, the operation of the diaphragm holder 73, and therefore the opening and closing operation of the valve, can be detected based on the change in the magnetic field generated between the magnet M3, which moves up and down in response to the up and down movement of the diaphragm holder 73, and the magnetic sensor M4, which is in a fixed position.

[0102] Various types of magnetic sensor M4 can be used, but one example of the magnetic sensor M4 has a planar coil, an oscillation circuit, and an integrating circuit, and the oscillation frequency changes according to the change in the distance to the opposing magnet M3. Then, by converting this frequency in the integrating circuit to obtain an integrated value, it is possible to measure not only the open / closed state of the valve V2, but also the opening degree when the valve is open.

[0103] Although the magnetic sensor M4 is used in this embodiment, this is not limited to this, and other types of sensors, such as optical position sensors, can also be used as long as they are position sensors that can measure the positional relationship between the diaphragm retainer 73 and the bonnet 74, or the distance between specified points of these components, similar to the magnetic sensor M2 described above. Also, in the valve V2 according to this embodiment, it is preferable to select a position sensor including the magnetic sensor M4 with a position detection accuracy of ±0.01 mm to ±0.001 mm. This is because, while fine opening control of about ±0.01 mm is necessary to realize fine fluid control for the valve intended for the semiconductor manufacturing process, a detection accuracy exceeding ±0.001 mm would result in detection of vibrations generated by a vacuum pump or the like near the valve, resulting in noise.

[0104] One end of a flexible cable 76 for communication having flexibility is connected to each of the pressure sensor P and the magnetic sensor M4, and the other end of the flexible cable 76 is connected to a circuit board 77 provided on the outside of the valve V2. In this example, the circuit board 77 is configured with a processing module that executes transmission and reception of information, and thus, operation information obtained from the pressure sensor P and the magnetic sensor M4 can be transmitted to an external terminal 6 connected to a connector 78.

[0105] In the valve V2, a flexible printed circuit (FPC) is used for the flexible cable 76 and the circuit board 77, and the flexible cable 76, the circuit board 77, and the connector 78 are integrally configured. By using a flexible board for the flexible cable 76 and the circuit board 77, it becomes possible to use the gap between the members as a wiring path, and as a result, the valve V2 itself can be made smaller than when a covered wire is used. In addition, the processing module may be housed in the valve V2 separately from the circuit board 77, or may be configured as a part of the pressure sensor P or the magnetic sensor M4. Furthermore, the type and shape of the connector 78 can be designed appropriately according to various standards.

[0106] In addition, the operational information acquisition mechanism realized by the pressure sensor P and magnetic sensor M4 described above can also be realized using a driving pressure sensor that detects the driving pressure, a temperature sensor that measures the temperature in the flow path, a limit switch that detects the behavior of the piston 93 or diaphragm retainer 73, etc.

[0107] In the above valve V2, the piston 93 and the diaphragm retainer 73 are configured as separate bodies, but the magnet M3 is attached to the diaphragm retainer 73. This makes it possible to determine whether the diaphragm retainer 73 is malfunctioning. That is, normally, the diaphragm retainer 73 rises following the piston 93 when the valve is opened, but when the valve is closed, the pressure in the valve chamber 712 is reduced to near vacuum, and the diaphragm 72 is attracted to the sheet 71. This may cause the diaphragm retainer 73 to remain in contact with the diaphragm 72, rather than following the piston 93, even though the piston 93 has risen. As a result, the diaphragm 72 may remain blocking the flow path. However, even in such a case, since the magnet M3 is linked to the diaphragm retainer 73 in the valve V2, the operation of the diaphragm retainer 73 can be determined from the detection value of the magnetic sensor M4, and thus the malfunction of the diaphragm retainer 73 can be determined. Incidentally, such malfunction of the diaphragm retainer 73 can be detected because the magnetic sensor M4 is attached to the diaphragm retainer 73, which does not move up and down like the piston 93 or diaphragm retainer 73 in response to the opening and closing operation of the valve V2, and can identify the relative movement of the diaphragm retainer 73. Therefore, in terms of being able to identify the movement of the diaphragm retainer 73 and detect malfunction, the member to which the magnetic sensor M4 should be attached may be one that is fixed in a predetermined position regardless of the opening and closing operation of the valve V2.

[0108] As a specific method of determining whether or not the change in distance between the magnet M3 and the magnetic sensor M4 corresponding to the valve opening operation matches the normal distance change based on the detection value of the magnetic sensor M4, and if they match, it is determined that there is no abnormality, and if they do not match, it is determined that there is an abnormality. In particular, if there is no change in distance, it is understood that the diaphragm holder 73 is still pressing the diaphragm 72. In this manner, in the valve V2, even if the piston 93 and the diaphragm holder 73 are configured as separate bodies, it is possible to determine whether the diaphragm holder 73 is malfunctioning. [Explanation of symbols]

[0109] 1, 2 Gas unit 10, 10a, 10b, 10c main cable 101, 102 branch cable 11, 12, 13 Extension cable 111, 112, 113, 114 Sub-cables 121, 122, 123, 124 Sub-cables 131, 132, 133, 134 Sub-cable 20, 20a, 20b, 20c main tube 21, 22, 23 Extension tube 211, 212, 213 Extension tube 214, 215, 216, 217, 218 Subtubes 221, 222, 223 Extension tube 224, 225, 226, 227, 228 Subtubes 231, 232, 233 Extension tube 234, 235, 236, 327, 238 Subtube 3 Valve body 3a Driving pressure inlet 4. Driving pressure control device 40 Casing 411, 412 Automatic valve 421, 422 Valve drive unit 431, 432, 433 Driving pressure introduction path 44 Exhaust passage 45 Wiring 51 Diaphragm 52 Presser adapter 53 Stem 6 Valve body 61 Base 62 Cylindrical part 7 Bonnet 71 sheets 72 Diaphragm 73 Diaphragm holder 74 Bonnet 75 Bonnet Wall 76 Flexible Cable 77 Circuit Board 78 Connectors 8 Cover 81 Cover 82 Plate 83 Plate 9 Actuator section 91 Actuator body 92 Actuator Cap 93 Piston 94 Spring L1, L2, L3 Fluid supply lines C1, C2, C3 branch connector F(F1, F2, F3) Flow control device J1 Branch joint J11, J111, J112, J113 fittings J12, J121, J122, J123 Fittings J13, J131, J132, J133 Fittings M1, M3 magnets M2, M4 magnetic sensors V1 (V11~V14, V21~24, V31~34), V2 valve P Pressure Sensor S1 Driving pressure introduction chamber S2 Closed space

Claims

1. A valve for use in a semiconductor manufacturing process capable of detecting an operational abnormality, a stem that slides and presses against the diaphragm in response to the opening and closing of the valve; a magnet attached to the stem; a position sensor including a magnetic sensor attached to a pressing adapter that presses the periphery of the diaphragm facing the stem inside the valve and detects a change in distance between the magnetic sensor and the magnet; an abnormality determination means for determining the presence or absence of an abnormality by comparing a change in distance between the magnet and the position sensor when an abnormality is diagnosed, detected by the position sensor, with a change in distance between the magnet and the position sensor when normal, which has been measured in advance; having The position detection accuracy of the position sensor is ±0.01 mm to ±0.001 mm. valve.

2. the abnormality determination means determines the presence or absence of an abnormality based on whether or not a position of an upper surface or a lower surface of the stem at the time of abnormality diagnosis is the same as a position of an upper surface or a lower surface at the time of normal diagnosis.

2. The valve of claim 1.

3. the abnormality determination means determines the presence or absence of an abnormality based on whether or not a stroke of the stem at the time of abnormality diagnosis coincides with a stroke at a normal time.

2. The valve of claim 1.

4. A temperature sensor is provided near the flow path to measure the temperature of the fluid flowing through the flow path.

2. The valve of claim 1.

5. A stem that slides and presses against a diaphragm in response to the opening and closing of the valve; a magnet attached to the stem; a position sensor including a magnetic sensor attached to a pressing adapter that presses the periphery of the diaphragm facing the stem inside the valve and detects a change in distance between the magnetic sensor and the magnet; Equipped with The position detection accuracy of the position sensor is ±0.01 mm to ±0.001 mm. A method for diagnosing an abnormality in a valve used in a semiconductor manufacturing process, comprising: a step of comparing a change in distance between the magnet and the position sensor during an abnormality diagnosis detected by the position sensor with a change in distance between the magnet and the position sensor during a normal state measured in advance, thereby determining whether or not an abnormality exists; How to diagnose valve abnormalities.

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