Colored photosensitive composition and method for producing optical filter

Abstract

Provided is a photosensitive coloring composition that has excellent adhesion to a support and can form pixels with good rectangularity. [Solution] This colored photosensitive composition contains a colorant and a curable compound and is intended for exposure to light having a wavelength of 300 nm or less. When this colored photosensitive composition is used to form a film having a thickness of 0.5 μm after drying, the film has an optical density of 1.6 or more to light having a wavelength of 248 nm. The content of the colorant in the total solid content of the colored photosensitive composition is preferably 50 mass% or more.

Description

[Technical field]

[0001] The present invention relates to a colored photosensitive composition. More specifically, the present invention relates to a colored photosensitive composition that is used by exposure to light having a wavelength of 300 nm or less. The present invention also relates to a method for producing an optical filter using the colored photosensitive composition. [Background technology]

[0002] Solid-state imaging devices such as CCD (charge-coupled device) and CMOS (complementary metal oxide semiconductor) are used in video cameras, digital still cameras, and mobile phones with camera functions. In addition, optical filters having pixels formed using a colored photosensitive composition are used in the solid-state imaging devices. As the colored photosensitive composition, a composition containing a coloring material and a curable compound is used (see Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2012-532334 [Patent Document 2] JP 2010-97172 A Summary of the Invention [Problem to be solved by the invention]

[0004] In recent years, there has been a demand for pixels formed using a colored photosensitive composition to have further improved rectangular shape and adhesion to a support. Therefore, an object of the present invention is to provide a photosensitive coloring composition capable of forming pixels having excellent adhesion to a support and excellent rectangularity. Also, an object of the present invention is to provide a method for producing an optical filter having pixels having excellent adhesion to a support and excellent rectangularity. [Means for solving the problem]

[0005] As a result of intensive research, the present inventors have surprisingly found that when a layer of a colored photosensitive composition having a high optical density for light with a wavelength of 248 nm or a layer of a colored photosensitive composition containing a large amount of coloring material is irradiated with light with a wavelength of 300 nm or less to form pixels, the pixels have good rectangular shape and excellent adhesion to the support, and have completed the present invention. Accordingly, the present invention provides the following. <1> A colored photosensitive composition comprising a colorant and a curable compound, A colored photosensitive composition for exposure to light with a wavelength of 300 nm or less, which, when used to form a film having a thickness of 0.5 μm after drying, has an optical density of 1.6 or more for light with a wavelength of 248 nm. <2> The content of the coloring material in the total solid content of the colored photosensitive composition is 50 mass% or more. <1> 2. The colored photosensitive composition according to claim 1 . <3> A colored photosensitive composition comprising a colorant and a curable compound, A colored photosensitive composition for exposure to light having a wavelength of 300 nm or less, wherein the content of a coloring material in the total solid content of the colored photosensitive composition is 50 mass % or more. <4> A colored photosensitive composition for KrF ray exposure, <1> ~ <3> 2. The colored photosensitive composition according to claim 1 . <5> The curable compound contains a polymerizable monomer, and the polymerizable monomer has a polymerizable group value of 10.5 mmol / g or more. <1> ~ <4> 2. The colored photosensitive composition according to claim 1 . <6> Further, a photopolymerization initiator is included. <5> 2. The colored photosensitive composition according to claim 1 . <7> The photopolymerization initiator is at least one compound selected from an alkylphenone compound, an acylphosphine compound, a benzophenone compound, a thioxanthone compound, a triazine compound, a pinacol compound, and an oxime compound. <6> 2. The colored photosensitive composition according to claim 1 . <8> The coloring material includes a green coloring agent. <1> ~ <7> 2. The colored photosensitive composition according to claim 1 . <9> The content of the green colorant in the total mass of the coloring material is 50% by mass or more. <8> 2. The colored photosensitive composition according to claim 1 . <10> a step of forming a colored photosensitive composition layer having an optical density of 1.6 or more for light having a wavelength of 248 nm on a support using a colored photosensitive composition containing a colorant and a curable compound; a step of patternwise exposing the colored photosensitive composition layer to light having a wavelength of 300 nm or less; and developing and removing the colored photosensitive composition layer in the unexposed areas to form pixels. <11> The exposure process is carried out using a KrF line scanner exposure machine. <10> A method for producing the optical filter according to claim 1. <12> The colored photosensitive composition comprises: <1> ~ <8> The colored photosensitive composition according to any one of claims 1 to 5, <10> or <11> A method for producing the optical filter according to claim 1. Effect of the Invention

[0006] According to the present invention, a photosensitive coloring composition capable of forming pixels having excellent adhesion to a support and excellent rectangularity can be provided. Also, a method for producing an optical filter having pixels having excellent adhesion to a support and excellent rectangularity can be provided. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] The present invention will be described in detail below. In this specification, the symbol "to" is used to mean that the numerical values ​​before and after it are included as the lower limit and upper limit. In the description of groups (atomic groups) in this specification, when there is no indication of substitution or non-substitution, the notation includes both groups (atomic groups) that have no substituents and groups (atomic groups) that have a substituent. For example, an "alkyl group" includes not only an alkyl group that has no substituents (unsubstituted alkyl group) but also an alkyl group that has a substituent (substituted alkyl group). In this specification, unless otherwise specified, "exposure" includes not only exposure using light but also drawing using particle beams such as electron beams and ion beams. Examples of light used for exposure include the bright line spectrum of a mercury lamp, far ultraviolet light represented by an excimer laser, extreme ultraviolet light (EUV light), X-rays, active rays or radiation such as electron beams. In this specification, the (meth)allyl group refers to both or either of allyl and methallyl, "(meth)acrylate" refers to both or either of acrylate and methacrylate, "(meth)acryl" refers to both or either of acryl and methacryl, and "(meth)acryloyl" refers to both or either of acryloyl and methacryloyl. In this specification, the weight average molecular weight and the number average molecular weight are polystyrene equivalent values ​​measured by GPC (gel permeation chromatography). GPC can be performed in accordance with a method using HLC-8120 (manufactured by Tosoh Corporation), TSK gel Multipore HXL-M (manufactured by Tosoh Corporation, 7.8 mm ID (inner diameter) × 30.0 cm) as a column, and THF (tetrahydrofuran) as an eluent. In this specification, infrared light refers to light with a wavelength of 700 to 2500 nm. In this specification, the total solids content refers to the total mass of all components of the composition excluding the solvent. In this specification, the term "process" refers not only to an independent process, but also to a process that cannot be clearly distinguished from other processes, as long as the intended effect of the process is achieved.

[0008] <Colored photosensitive composition> The first colored photosensitive composition of the present invention comprises: A colored photosensitive composition comprising a colorant and a curable compound, The colored photosensitive composition is characterized in that, when a film having a thickness of 0.5 μm after drying is formed using the colored photosensitive composition, the film has an optical density of 1.6 or more for light having a wavelength of 248 nm, and is intended for exposure to light having a wavelength of 300 nm or less.

[0009] The second colored photosensitive composition of the present invention is A colored photosensitive composition comprising a colorant and a curable compound, The colored photosensitive composition is characterized in that the content of the coloring material in the total solid content of the colored photosensitive composition is 50 mass % or more, and the colored photosensitive composition is intended for exposure to light having a wavelength of 300 nm or less.

[0010] According to the present invention, pixels having excellent adhesion to the support and good rectangularity can be formed. The reason for obtaining such an effect is presumed to be due to the following. That is, the above-mentioned first and second colored photosensitive compositions tend to have high absorbency for light having a wavelength of 300 nm or less, and it is presumed that when this colored photosensitive composition is exposed to light having a wavelength of 300 nm or less, the surface layer of the colored photosensitive composition tends to be cured more easily than the inside. For this reason, even if a colored photosensitive composition layer formed on a support by a method such as coating the colored photosensitive composition is irradiated with light having a wavelength of 300 nm or less to cure firmly to the bottom of the colored photosensitive composition layer, line thickening on the support side of the colored photosensitive composition layer can be suppressed, and as a result, it is presumed that pixels having good rectangularity and excellent adhesion to the support can be formed.

[0011] In the first colored photosensitive composition, when a film having a thickness of 0.5 μm is formed after drying using the colored photosensitive composition, the optical density of the film with respect to light having a wavelength of 248 nm is preferably 1.8 or more, more preferably 2.0 or more. There is no particular limit to the upper limit, but it can be 3.5 or less. The optical density is a value that represents the degree of light absorption in logarithm, and is a value defined by the following formula. OD(λ)=Log 10 [T(λ) / I(λ)] λ represents the wavelength, T(λ) represents the amount of transmitted light at wavelength λ, and I(λ) represents the amount of incident light at wavelength λ. When a film having a thickness of 0.5 μm after drying is formed, the optical density of the film at a wavelength of 248 nm can be made to be 1.6 or more by, for example, appropriately adjusting the type and content of the colorant, or adding an appropriate amount of an additive having absorption in short waves (e.g., an ultraviolet absorber, etc.).

[0012] The colored photosensitive composition of the present invention is preferably used as a composition for forming colored pixels, black pixels, light-shielding films, pixels of infrared transmission filter layers, etc. Examples of colored pixels include pixels of hues selected from red, blue, green, cyan, magenta, and yellow. Examples of pixels of infrared transmission filter layers include pixels of filter layers that satisfy the spectral characteristics of a maximum transmittance of 20% or less (preferably 15% or less, more preferably 10% or less) in the wavelength range of 400 to 640 nm and a minimum transmittance of 70% or more (preferably 75% or more, more preferably 80% or more) in the wavelength range of 1100 to 1300 nm. In addition, it is also preferable that the pixels of the infrared transmission filter layer are pixels of filter layers that satisfy any of the following spectral characteristics (1) to (4). (1): A pixel of a filter layer having a maximum transmittance of 20% or less (preferably 15% or less, more preferably 10% or less) in a wavelength range of 400 to 640 nm, and a minimum transmittance of 70% or more (preferably 75% or more, more preferably 80% or more) in a wavelength range of 800 to 1300 nm. (2): A pixel of a filter layer having a maximum transmittance of 20% or less (preferably 15% or less, more preferably 10% or less) in a wavelength range of 400 to 750 nm, and a minimum transmittance of 70% or more (preferably 75% or more, more preferably 80% or more) in a wavelength range of 900 to 1300 nm. (3): A pixel of a filter layer having a maximum transmittance of 20% or less (preferably 15% or less, more preferably 10% or less) in a wavelength range of 400 to 830 nm, and a minimum transmittance of 70% or more (preferably 75% or more, more preferably 80% or more) in a wavelength range of 1000 to 1300 nm. (4): A pixel of a filter layer having a maximum transmittance of 20% or less (preferably 15% or less, more preferably 10% or less) in a wavelength range of 400 to 950 nm, and a minimum transmittance of 70% or more (preferably 75% or more, more preferably 80% or more) in a wavelength range of 1100 to 1300 nm.

[0013] When the colored photosensitive composition of the present invention is used as a composition for forming pixels of an infrared transmission filter layer, the colored photosensitive composition of the present invention preferably satisfies the spectral characteristics that Amin / Bmax, which is the ratio of the minimum absorbance Amin in the wavelength range of 400 to 640 nm to the maximum absorbance Bmax in the wavelength range of 1100 to 1300 nm, is 5 or more. Amin / Bmax is more preferably 7.5 or more, further preferably 15 or more, and particularly preferably 30 or more.

[0014] The absorbance Aλ at a certain wavelength λ is defined by the following equation (1). Aλ = -log(Tλ / 100) (1) Aλ is the absorbance at wavelength λ, and Tλ is the transmittance (%) at wavelength λ. In the present invention, the absorbance value may be a value measured in a solution state, or may be a value of a film formed using the colored photosensitive composition. When measuring the absorbance in a film state, it is preferable to measure the absorbance using a film prepared by applying the colored photosensitive composition to a glass substrate by a method such as spin coating so that the film has a predetermined thickness after drying, and drying the film at 100°C for 120 seconds using a hot plate. The thickness of the film can be measured using a stylus surface profiler (DEKTAK150 manufactured by ULVAC) for the substrate having the film.

[0015] When the colored photosensitive composition of the present invention is used as a composition for forming pixels of an infrared transmission filter layer, the colored photosensitive composition of the present invention more preferably satisfies any one of the following spectral characteristics (11) to (14). (11): Amin1 / Bmax1, which is the ratio of the minimum absorbance Amin1 in the wavelength range of 400 to 640 nm to the maximum absorbance Bmax1 in the wavelength range of 800 to 1300 nm, is 5 or more, preferably 7.5 or more, more preferably 15 or more, and even more preferably 30 or more. According to this embodiment, a film can be formed that blocks light in the wavelength range of 400 to 640 nm and transmits light with a wavelength of 720 nm or more. (12): Amin2 / Bmax2, which is the ratio of the minimum absorbance Amin2 in the wavelength range of 400 to 750 nm to the maximum absorbance Bmax2 in the wavelength range of 900 to 1300 nm, is 5 or more, preferably 7.5 or more, more preferably 15 or more, and even more preferably 30 or more. According to this embodiment, a film can be formed that blocks light in the wavelength range of 400 to 750 nm and transmits light with a wavelength of 850 nm or more. (13): Amin3 / Bmax3, which is the ratio of the minimum absorbance Amin3 in the wavelength range of 400 to 850 nm to the maximum absorbance Bmax3 in the wavelength range of 1000 to 1300 nm, is 5 or more, preferably 7.5 or more, more preferably 15 or more, and even more preferably 30 or more. According to this embodiment, a film can be formed that blocks light in the wavelength range of 400 to 830 nm and transmits light with a wavelength of 940 nm or more. (14): Amin4 / Bmax4, which is the ratio of the minimum absorbance Amin4 in the wavelength range of 400 to 950 nm to the maximum absorbance Bmax4 in the wavelength range of 1100 to 1300 nm, is 5 or more, preferably 7.5 or more, more preferably 15 or more, and even more preferably 30 or more. According to this embodiment, a film can be formed that blocks light in the wavelength range of 400 to 950 nm and transmits light with a wavelength of 1040 nm or more.

[0016] Each component used in the colored photosensitive composition of the present invention will now be described.

[0017] <<Coloring materials>> The colored photosensitive composition of the present invention contains a coloring material. Examples of the coloring material include a chromatic coloring material, a black coloring material, and an infrared absorbing dye. The coloring material used in the colored photosensitive composition of the present invention preferably contains at least a chromatic coloring material, and more preferably contains at least a green coloring material, because this makes it easier to increase the optical density of the film with respect to light having a wavelength of 248 nm.

[0018] (chromatic colorants) Examples of chromatic colorants include red colorants, green colorants, blue colorants, yellow colorants, purple colorants, and orange colorants. The chromatic colorants may be pigments or dyes. Pigments are preferred. The average particle size (r) of the pigment is preferably 20 nm≦r≦300 nm, more preferably 25 nm≦r≦250 nm, and even more preferably 30 nm≦r≦200 nm. The term "average particle size" as used herein means the average particle size of secondary particles formed by aggregation of primary particles of the pigment. In addition, the particle size distribution of the secondary particles of the pigment that can be used (hereinafter also simply referred to as "particle size distribution") is preferably such that secondary particles falling within the range of the average particle size ±100 nm account for 70 mass % or more of the total, and more preferably 80 mass % or more.

[0019] The pigment is preferably an organic pigment. Examples of the organic pigment include the following. Color Index (CI) Pigment Yellow 1, 2, 3, 4, 5, 6, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 24, 31, 32, 34, 35, 35:1, 36, 36:1, 37, 37:1, 40, 42, 43, 53, 55, 60, 61, 62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118, 11 9,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214 etc. (above, yellow pigments), CI Pigment Orange 2, 5, 13, 16, 17:1, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 71, 73, etc. (orange pigments) CIPigment Red 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52 :2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146, 149, 150, 155, 166, 168, 169, 170, 171, 172, 175, 176, 177, 178, 179, 184, 185, 187, 188, 190, 200, 202, 206, 207, 208, 209, 210, 216, 220, 224, 226, 242, 246, 254, 255, 264, 270, 272, 279, etc. (above, red pigments), CI Pigment Green 7, 10, 36, 37, 58, 59, etc. (above, green pigments), CI Pigment Violet 1, 19, 23, 27, 32, 37, 42, etc. (above, purple pigments), CIPigment Blue 1, 2, 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 22, 60, 64, 66, 79, 80, etc. (above, blue pigments), These organic pigments can be used alone or in various combinations.

[0020] The dye is not particularly limited, and known dyes can be used. For example, pyrazole azo, anilino azo, triaryl methane, anthraquinone, anthrapyridone, benzylidene, oxonol, pyrazolotriazole azo, pyridone azo, cyanine, phenothiazine, pyrrolopyrazole azomethine, xanthene, phthalocyanine, benzopyran, indigo, pyrromethene, and other dyes can be used. Polymers of these dyes can also be used. Dyes described in JP-A-2015-028144 and JP-A-2015-34966 can also be used.

[0021] (Black colorant) Examples of black colorants include inorganic black colorants such as carbon black, metal oxynitrides (e.g. titanium black), and metal nitrides (e.g. titanium nitride), and organic black colorants such as bisbenzofuranone compounds, azomethine compounds, perylene compounds, and azo compounds. Examples of organic black colorants include bisbenzofuranone compounds and perylene compounds. Examples of bisbenzofuranone compounds include compounds described in JP-T-2010-534726, JP-T-2012-515233, and JP-T-2012-515234, and are available, for example, as "Irgaphor Black" manufactured by BASF. Examples of perylene compounds include CI Pigment Black 31 and 32. Examples of azomethine compounds include compounds described in JP-A-1-170601 and JP-A-2-34664, and are available, for example, as "Chromofine Black A1103" manufactured by Dainichi Seika Chemicals. The bisbenzofuranone compound is preferably a compound represented by the following formula or a mixture thereof: [ka] In the formula, R 1 and R 2 each independently represents a hydrogen atom or a substituent; R 3 and R 4 each independently represents a substituent; a and b each independently represent an integer of 0 to 4; when a is 2 or more, a plurality of R 3 may be the same or different, and multiple R 3 may be bonded to form a ring, and when b is 2 or more, multiple R 4 may be the same or different, and multiple R 4 may be bonded to form a ring.

[0022] R 1 ~R 4 The substituent represented by is a halogen atom, a cyano group, a nitro group, an alkyl group, an alkenyl group, an alkynyl group, an aralkyl group, an aryl group, a heteroaryl group, -OR 301 , -COR 302 , -COOR 303, -OCOR 304 , -NR 305 R 306 , -NHCOR 307 , -CONR 308 R 309 , -NHCONR 310 R 311 , -NHCOOR 312 , -SR 313 , -SO 2 R 314 , -SO 2 OR 315 , -NHSO 2 R 316 OR -SO 2 NR 317 R 318 R 301 ~R 318 each independently represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, or a heteroaryl group.

[0023] For details of the bisbenzofuranone compound, reference can be made to paragraphs 0014 to 0037 of JP-A-2010-534726, the contents of which are incorporated herein by reference.

[0024] (Infrared absorbing dye) The infrared absorbing dye is preferably a compound having a maximum absorption wavelength in the wavelength range of 700 to 1300 nm, more preferably in the wavelength range of 700 to 1000 nm. The infrared absorbing dye may be a pigment or a dye.

[0025] In the present invention, a compound having a π-conjugated plane containing a monocyclic or condensed aromatic ring can be preferably used as the infrared absorbing dye. The number of atoms other than hydrogen constituting the π-conjugated plane of the infrared absorbing dye is preferably 14 or more, more preferably 20 or more, even more preferably 25 or more, and particularly preferably 30 or more. The upper limit is, for example, preferably 80 or less, and more preferably 50 or less. The π-conjugated plane of the infrared absorbing dye preferably contains two or more monocyclic or condensed aromatic rings, more preferably contains three or more of the above-mentioned aromatic rings, even more preferably contains four or more of the above-mentioned aromatic rings, and particularly preferably contains five or more of the above-mentioned aromatic rings. The upper limit is preferably 100 or less, more preferably 50 or less, and even more preferably 30 or less. Examples of the aromatic ring include a benzene ring, a naphthalene ring, a pentalene ring, an indene ring, an azulene ring, a heptalene ring, an indacene ring, a perylene ring, a pentacene ring, a quaterrylene ring, an acenaphthene ring, a phenanthrene ring, an anthracene ring, a naphthacene ring, a chrysene ring, a triphenylene ring, a fluorene ring, a pyridine ring, a quinoline ring, an isoquinoline ring, an imidazole ring, a benzimidazole ring, a pyrazole ring, a thiazole ring, a benzothiazole ring, a triazole ring, a benzotriazole ring, an oxazole ring, a benzoxazole ring, an imidazoline ring, a pyrazine ring, a quinoxaline ring, a pyrimidine ring, a quinazoline ring, a pyridazine ring, a triazine ring, a pyrrole ring, an indole ring, an isoindole ring, a carbazole ring, and condensed rings having these rings.

[0026] The infrared absorbing dye is preferably at least one selected from pyrrolopyrrole compound, cyanine compound, squarylium compound, phthalocyanine compound, naphthalocyanine compound, quaterrylene compound, merocyanine compound, croconium compound, oxonol compound, diimonium compound, dithiol compound, triarylmethane compound, pyrromethene compound, azomethine compound, anthraquinone compound and dibenzofuranone compound, more preferably at least one selected from pyrrolopyrrole compound, cyanine compound, squarylium compound, phthalocyanine compound, naphthalocyanine compound and diimonium compound, more preferably at least one selected from pyrrolopyrrole compound, cyanine compound and squarylium compound, and particularly preferably pyrrolopyrrole compound.As the diimonium compound, for example, the compound described in JP-T-2008-528706 can be mentioned, the contents of which are incorporated herein. Examples of the phthalocyanine compound include the compounds described in paragraph 0093 of JP-A-2012-77153, the oxytitanium phthalocyanine described in JP-A-2006-343631, and the compounds described in paragraphs 0013-0029 of JP-A-2013-195480, the contents of which are incorporated herein. Examples of the naphthalocyanine compound include the compounds described in paragraph 0093 of JP-A-2012-77153, the contents of which are incorporated herein. In addition, the cyanine compound, the phthalocyanine compound, the naphthalocyanine compound, the diimonium compound, and the squarylium compound may be the compounds described in paragraphs 0010-0081 of JP-A-2010-111750, the contents of which are incorporated herein. For the cyanine compound, see, for example, "Functional Dyes, by Makoto Okawara, Masaru Matsuoka, Teijiro Kitao, and Kosuke Hirashima, published by Kodansha Scientific, the contents of which are incorporated herein by reference. For the infrared absorbing compound, compounds described in JP 2016-146619 A can also be used, the contents of which are incorporated herein by reference.

[0027] Examples of the pyrrolopyrrole compound include the compounds described in JP 2009-263614 A, paragraphs 0016 to 0058, the compounds described in JP 2011-68731 A, paragraphs 0037 to 0052, and the compounds described in WO 2015 / 166873 A, paragraphs 0010 to 0033, the contents of which are incorporated herein by reference.

[0028] Examples of squarylium compounds include compounds described in JP 2011-208101 A, paragraphs 0044 to 0049, compounds described in JP 6065169 A, paragraphs 0060 to 0061, compounds described in WO 2016 / 181987 A, paragraph 0040, compounds described in WO 2013 / 133099 A, compounds described in WO 2014 / 088063 A, compounds described in JP 2014-126642 A, compounds described in JP 2014-126642 A, Examples of the compounds include those described in JP 2016-146619 A, JP 2015-176046 A, JP 2017-25311 A, WO 2016 / 154782 A, JP 5884953 A, JP 6036689 A, JP 5810604 A, and JP 2017-068120 A, the contents of which are incorporated herein by reference.

[0029] Examples of cyanine compounds include compounds described in JP-A-2009-108267, paragraphs 0044 to 0045, compounds described in JP-A-2002-194040, paragraphs 0026 to 0030, compounds described in JP-A-2015-172004, compounds described in JP-A-2015-172102, compounds described in JP-A-2008-88426, and compounds described in JP-A-2017-031394, the contents of which are incorporated herein by reference.

[0030] In the present invention, the infrared absorbing dye may be a commercially available product. For example, SDO-C33 (manufactured by Arimoto Chemical Industry Co., Ltd.), EX Color IR-14, EX Color IR-10A, EX Color TX-EX-801B, EX Color TX-EX-805K (manufactured by Nippon Shokubai Co., Ltd.), Shigenox NIA-8041, Shigenox NIA-8042, Shigenox NIA-814, Shigenox NIA-820, Shigenox NIA-839 (manufactured by Hakko Chemical Co., Ltd.), Epolite V-63, Epolight 3801, Epolight 3036 (manufactured by EPOLIN Co., Ltd.), PRO-JET 825 LDI (manufactured by Fujifilm Co., Ltd.), NK-3027, NK-5060 (manufactured by Hayashibara Co., Ltd.), YKR-3070 (manufactured by Mitsui Chemicals, Inc.) and the like can be mentioned.

[0031] The content of the coloring material in the total solid content of the colored photosensitive composition is preferably 50% by mass or more, more preferably 54% by mass or more, and even more preferably 58% by mass or more. If the content of the coloring material is 50% by mass or more, it is easy to form pixels with excellent adhesion to the support and good rectangularity. Furthermore, it is easy to form a thin film pattern with good spectral characteristics. The upper limit is preferably 80% by mass or less, more preferably 75% by mass or less, and even more preferably 70% by mass or less.

[0032] The coloring material used in the colored photosensitive composition of the present invention preferably contains at least one selected from a chromatic coloring agent and a black coloring agent. The content of the chromatic coloring agent and the black coloring agent in the total mass of the coloring material is preferably 30% by mass or more, more preferably 50% by mass or more, and even more preferably 70% by mass or more. The upper limit can be 100% by mass, or can be 90% by mass or less. The coloring material used in the colored photosensitive composition of the present invention preferably contains at least a green coloring agent. The content of the green coloring agent in the total mass of the coloring material is preferably 30% by mass or more, more preferably 40% by mass or more, and even more preferably 50% by mass or more. The upper limit can be 100% by mass, or can be 75% by mass or less.

[0033] The coloring material used in the colored photosensitive composition of the present invention preferably has a pigment content of 50 mass % or more, more preferably 70 mass % or more, and even more preferably 90 mass % or more, based on the total mass of the coloring material.

[0034] When the colored photosensitive composition of the present invention is used as a composition for forming colored pixels, the content of the chromatic colorant in the total solid content of the colored photosensitive composition is preferably 50% by mass or more, more preferably 54% by mass or more, and even more preferably 58% by mass or more. The content of the chromatic colorant in the total mass of the coloring material is preferably 25% by mass or more, more preferably 45% by mass or more, and even more preferably 65% ​​by mass or more. The upper limit can be 100% by mass, and can also be 75% by mass or less. The coloring material preferably contains at least a green colorant. The content of the green colorant in the total mass of the coloring material is preferably 35% by mass or more, more preferably 45% by mass or more, and even more preferably 55% by mass or more. The upper limit can be 100% by mass, and can also be 80% by mass or less.

[0035] When the colored photosensitive composition of the present invention is used as a composition for forming a black pixel or a light-shielding film, the content of the black colorant (preferably an inorganic black colorant) in the total solid content of the colored photosensitive composition is preferably 50% by mass or more, more preferably 54% by mass or more, and even more preferably 58% by mass or more. The content of the black colorant in the total mass of the coloring material is preferably 30% by mass or more, more preferably 50% by mass or more, and even more preferably 70% by mass or more. The upper limit can be 100% by mass, or can be 90% by mass or less.

[0036] When the colored photosensitive composition of the present invention is used as a composition for forming pixels in an infrared transmission filter layer, the color material used in the present invention preferably satisfies at least one of the following requirements (1) to (3).

[0037] (1): The ink contains two or more kinds of chromatic colorants, and the black color is formed by a combination of two or more kinds of chromatic colorants. It is preferable that the black color is formed by a combination of two or more kinds of colorants selected from a red colorant, a blue colorant, a yellow colorant, a purple colorant, and a green colorant. (2): Contains organic black colorant. (3): The composition according to (1) or (2) above further contains an infrared absorbing dye.

[0038] Preferable combinations of the above aspect (1) include, for example, the following. (1-1) An embodiment containing a red colorant and a blue colorant. (1-2) An embodiment containing a red colorant, a blue colorant, and a yellow colorant. (1-3) An embodiment containing a red colorant, a blue colorant, a yellow colorant, and a purple colorant. (1-4) An embodiment containing a red colorant, a blue colorant, a yellow colorant, a purple colorant, and a green colorant. (1-5) An embodiment containing a red colorant, a blue colorant, a yellow colorant, and a green colorant. (1-6) An embodiment containing a red colorant, a blue colorant, and a green colorant. (1-7) An embodiment containing a yellow colorant and a purple colorant.

[0039] In the above embodiment (2), it is also preferable to further contain a chromatic colorant. By using an organic black colorant and a chromatic colorant in combination, excellent spectral characteristics are easily obtained. Examples of the chromatic colorant used in combination with the organic black colorant include a red colorant, a blue colorant, and a purple colorant, and red colorants and blue colorants are preferred. These may be used alone or in combination of two or more. The mixing ratio of the chromatic colorant and the organic black colorant is preferably 10 to 200 parts by mass, more preferably 15 to 150 parts by mass, of the chromatic colorant relative to 100 parts by mass of the organic black colorant.

[0040] In the above embodiment (3), the content of the infrared absorbing dye in the total mass of the coloring material is preferably 5 to 40 mass %. The upper limit is preferably 30 mass % or less, more preferably 25 mass % or less. The lower limit is preferably 10 mass % or more, more preferably 15 mass % or more.

[0041] <<Curable compound>> The colored photosensitive composition of the present invention contains a curable compound. Examples of the curable compound include a polymerizable monomer, a compound having a cyclic ether group, and a resin. The resin may be a non-polymerizable resin (a resin having no polymerizable group) or a polymerizable resin (a resin having a polymerizable group). Examples of the polymerizable group include an ethylenically unsaturated bond group such as a vinyl group, a (meth)allyl group, or a (meth)acryloyl group.

[0042] (Polymerizable monomer) The polymerizable monomer is preferably a compound having 3 or more polymerizable groups (preferably ethylenically unsaturated bond groups), more preferably a compound having 3 to 15, even more preferably a compound having 3 to 10, and particularly preferably a compound having 3 to 6. Specifically, the polymerizable monomer is preferably a trifunctional or more (meth)acrylate compound, more preferably a trifunctional to 15-functional (meth)acrylate compound, even more preferably a trifunctional to 10-functional (meth)acrylate compound, and particularly preferably a trifunctional to 6-functional (meth)acrylate compound. Specific examples include compounds described in paragraphs 0095 to 0108 of JP2009-288705A, paragraph 0227 of JP2013-29760A, and paragraphs 0254 to 0257 of JP2008-292970A, the contents of which are incorporated herein by reference.

[0043] The molecular weight of the polymerizable monomer is preferably 100 to 3000. The upper limit is preferably 2000 or less, more preferably 1500 or less. The lower limit is preferably 150 or more, more preferably 250 or more.

[0044] The polymerizable group value of the polymerizable monomer is preferably 10.0 mmol / g or more, more preferably 10.5 mmol / g or more, and even more preferably 11.0 mmol / g or more. The upper limit is preferably 15 mmol / g or less. If the polymerizable group value of the polymerizable monomer is 10.0 mmol / g or more, the photocurability of the colored photosensitive composition is good. The polymerizable group value of the polymerizable monomer is calculated by dividing the number of polymerizable groups contained in one molecule of the polymerizable monomer by the molecular weight of the polymerizable monomer.

[0045] In addition, when the polymerizable monomer is a monomer having an ethylenically unsaturated bond group, the ethylenically unsaturated bond group value (hereinafter referred to as C=C value) of the polymerizable monomer is preferably 10.0 mmol / g or more, more preferably 10.5 mmol / g or more, and even more preferably 11.0 mol / g or more. The upper limit is preferably 15 mmol / g or less. The C=C value of the polymerizable monomer was calculated by dividing the number of ethylenically unsaturated bond groups contained in one molecule of the polymerizable monomer by the molecular weight of the polymerizable monomer.

[0046] As the polymerizable monomer, compounds represented by the following formulae (MO-1) to (MO-6) can also be preferably used. In the formulae, when T is an oxyalkylene group, the end on the carbon atom side is bonded to R.

[0047] [ka]

[0048] In the above formula, n is an integer of 0 to 14, and m is an integer of 1 to 8. A plurality of R's and T's present in one molecule may be the same or different. In each of the compounds represented by the above formulae (MO-1) to (MO-6), at least one of the multiple R's is -OC(=O)CH=CH 2 , -OC(=O)C(CH 3 )=CH 2 , -NHC(=O)CH=CH 2 or -NHC(=O)C(CH3 )=CH 2 Represents. Specific examples of the polymerizable compounds represented by the above formulas (MO-1) to (MO-6) include the compounds described in paragraphs 0248 to 0251 of JP-A No. 2007-269779.

[0049] It is also preferable to use a compound having a caprolactone structure as the polymerizable monomer. The compound having a caprolactone structure is preferably a compound represented by the following formula (Z-1).

[0050] [ka]

[0051] In formula (Z-1), all of the six R's are groups represented by formula (Z-2), or 1 to 5 of the six R's are groups represented by formula (Z-2), and the remainder are groups represented by formula (Z-3), acid groups, or hydroxy groups.

[0052] [ka] In formula (Z-2), R 1 represents a hydrogen atom or a methyl group, m represents the number 1 or 2, and "*" represents a bond.

[0053] [ka] In formula (Z-3), R 1 represents a hydrogen atom or a methyl group, and "*" represents a bond.

[0054] As the polymerizable monomer, a compound represented by formula (Z-4) or (Z-5) can also be used.

[0055] [ka]

[0056] In formulae (Z-4) and (Z-5), each E is independently -((CH 2 ) y CH 2 O)- or -((CH 2 ) y CH(CH 3 )O)-, each y independently represents an integer of 0 to 10, and each X independently represents a (meth)acryloyl group, a hydrogen atom, or a carboxyl group. In formula (Z-4), the total number of (meth)acryloyl groups is 3 or 4, each m independently represents an integer of 0 to 10, and the total of each m is an integer of 0 to 40. In formula (Z-5), the total number of (meth)acryloyl groups is 5 or 6, each n independently represents an integer of 0 to 10, and the total of each n is an integer of 0 to 60.

[0057] In formula (Z-4), m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4. The sum of the m's is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and particularly preferably an integer of 4 to 8. In formula (Z-5), n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4. The sum of the n's is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12. In addition, -((CH 2 ) y CH 2 O)- or -((CH 2 ) y CH(CH 3 )O)- is preferably in a form in which the end on the oxygen atom side is bonded to X.

[0058] (Compounds Having Cyclic Ether Groups) The colored photosensitive composition of the present invention may contain a compound having a cyclic ether group as a curable compound. Examples of the cyclic ether group include an epoxy group and an oxetanyl group. The compound having a cyclic ether group is preferably a compound having an epoxy group. Examples of the compound having an epoxy group include a compound having one or more epoxy groups in one molecule, and a compound having two or more epoxy groups is preferable. The number of epoxy groups in one molecule is preferably 1 to 100. The upper limit of the number of epoxy groups can be, for example, 10 or less, or 5 or less. The lower limit of the number of epoxy groups is preferably 2 or more. As the compound having an epoxy group, the compounds described in paragraphs 0034 to 0036 of JP-A-2013-011869, paragraphs 0147 to 0156 of JP-A-2014-043556, and paragraphs 0085 to 0092 of JP-A-2014-089408 can also be used. The contents of these are incorporated herein by reference.

[0059] The compound having an epoxy group may be either a low molecular weight compound (e.g., a molecular weight less than 2000, or even less than 1000) or a high molecular weight compound (macromolecule) (e.g., a molecular weight of 1000 or more, and in the case of a polymer, a weight average molecular weight of 1000 or more). The weight average molecular weight of the compound having an epoxy group is preferably 200 to 100,000, and more preferably 500 to 50,000. The upper limit of the weight average molecular weight is preferably 10,000 or less, more preferably 5,000 or less, and even more preferably 3,000 or less.

[0060] When the compound having an epoxy group is a low molecular weight compound, for example, a compound represented by the following formula (EP1) can be mentioned.

[0061] [ka]

[0062] In formula (EP1), R EP1 ~R EP3Each of R represents a hydrogen atom, a halogen atom, or an alkyl group, and the alkyl group may have a cyclic structure and may have a substituent. EP1 and R EP2 , R EP2 and R EP3 may be bonded to each other to form a ring structure. EP is a single bond or n EP R represents an organic group having a valence of 1. EP1 ~R EP3 Q EP It may also be bonded to form a ring structure. EP represents an integer of 2 or more, preferably 2 to 10, and more preferably 2 to 6. EP If is a single bond, n EP is 2. R EP1 ~R EP3 , Q EP For details, see paragraphs 0087 to 0088 of JP 2014-089408 A, the contents of which are incorporated herein by reference. Specific examples of the compound represented by formula (EP1) include the compound described in paragraph 0090 of JP 2014-089408 A and the compound described in paragraph 0151 of JP 2010-054632 A, the contents of which are incorporated herein by reference.

[0063] Examples of commercially available products include the ADEKA GLYCIROL series manufactured by ADEKA CORPORATION (for example, ADEKA GLYCIROL ED-505, etc.) and the EPOLEAD series manufactured by DAICEL CORPORATION (for example, EPOLEAD GT401, etc.).

[0064] As the compound having an epoxy group, an epoxy resin can be preferably used. Examples of the epoxy resin include an epoxy resin which is a glycidyl ether of a phenolic compound, an epoxy resin which is a glycidyl ether of various novolac resins, an alicyclic epoxy resin, an aliphatic epoxy resin, a heterocyclic epoxy resin, a glycidyl ester epoxy resin, a glycidyl amine epoxy resin, an epoxy resin obtained by glycidylating halogenated phenols, a condensate of a silicon compound having an epoxy group and another silicon compound, a copolymer of a polymerizable unsaturated compound having an epoxy group and another polymerizable unsaturated compound, and the like. The epoxy equivalent of the epoxy resin is preferably 310 to 3300 g / eq, more preferably 310 to 1700 g / eq, and even more preferably 310 to 1000 g / eq.

[0065] The epoxy resin may be a commercially available product, such as EHPE3150 (manufactured by Daicel Corporation), EPICLON N-695 (manufactured by DIC Corporation), Marproof G-0150M, G-0105SA, G-0130SP, G-0250SP, G-1005S, G-1005SA, G-1010S, G-2050M, G-01100, or G-01758 (all manufactured by NOF Corporation, epoxy group-containing polymers).

[0066] (resin) The colored photosensitive composition may contain a resin as a curable compound. The resin is blended, for example, for dispersing pigments in the composition or for use as a binder. A resin used mainly for dispersing pigments is also called a dispersant. However, such uses of the resin are merely examples, and the resin may be used for purposes other than these uses.

[0067] The weight average molecular weight (Mw) of the resin is preferably 2,000 to 2,000,000. The upper limit is preferably 1,000,000 or less, and more preferably 500,000 or less. The lower limit is preferably 3,000 or more, and more preferably 5,000 or more.

[0068] Examples of the resin include (meth)acrylic resin, enethiol resin, polycarbonate resin, polyether resin, polyarylate resin, polysulfone resin, polyethersulfone resin, polyphenylene resin, polyarylene ether phosphine oxide resin, polyimide resin, polyamideimide resin, polyolefin resin, cyclic olefin resin, polyester resin, and styrene resin. One of these resins may be used alone, or two or more may be mixed and used. As the cyclic olefin resin, norbornene resin can be preferably used from the viewpoint of improving heat resistance. Examples of commercially available norbornene resins include the ARTON series (e.g., ARTON F4520) manufactured by JSR Corporation. In addition, the resin described in the examples of International Publication WO2016 / 088645 can also be used as the resin.

[0069] In the present invention, it is preferable to use a resin having an acid group as the resin. According to this embodiment, pixels having excellent rectangularity can be easily formed. Examples of the acid group include a carboxyl group, a phosphoric acid group, a sulfo group, and a phenolic hydroxyl group, and the carboxyl group is preferable. The resin having an acid group can be used as an alkali-soluble resin, for example.

[0070] The resin having an acid group preferably contains a repeating unit having an acid group on a side chain, and more preferably contains 5 to 70 mol % of the repeating units having an acid group on a side chain in all repeating units of the resin. The upper limit of the content of the repeating units having an acid group on a side chain is preferably 50 mol % or less, and more preferably 30 mol % or less. The lower limit of the content of the repeating units having an acid group on a side chain is preferably 10 mol % or more, and more preferably 20 mol % or more.

[0071] As the resin having an acid group, a polymer having a carboxyl group in a side chain is preferable. Specific examples include alkali-soluble phenolic resins such as methacrylic acid copolymers, acrylic acid copolymers, itaconic acid copolymers, crotonic acid copolymers, maleic acid copolymers, partially esterified maleic acid copolymers, novolac resins, acidic cellulose derivatives having a carboxyl group in a side chain, and resins obtained by adding an acid anhydride to a polymer having a hydroxyl group. In particular, a copolymer of (meth)acrylic acid and another monomer copolymerizable therewith is suitable as an alkali-soluble resin. As other monomers copolymerizable with (meth)acrylic acid, alkyl (meth)acrylates, aryl (meth)acrylates, vinyl compounds, etc. can be mentioned. Examples of the alkyl (meth)acrylate and aryl (meth)acrylate include methyl (meth)acrylate, ethyl (meth)acrylate, propyl (meth)acrylate, butyl (meth)acrylate, isobutyl (meth)acrylate, pentyl (meth)acrylate, hexyl (meth)acrylate, octyl (meth)acrylate, phenyl (meth)acrylate, benzyl (meth)acrylate, tolyl (meth)acrylate, naphthyl (meth)acrylate, and cyclohexyl (meth)acrylate. Examples of the vinyl compounds include styrene, α-methylstyrene, vinyl toluene, glycidyl methacrylate, acrylonitrile, vinyl acetate, N-vinylpyrrolidone, tetrahydrofurfuryl methacrylate, polystyrene macromonomer, and polymethyl methacrylate macromonomer. As the other monomer, N-position-substituted maleimide monomers described in JP-A-10-300922, such as N-phenylmaleimide and N-cyclohexylmaleimide, can also be used. The other monomers copolymerizable with these (meth)acrylic acids may be one type or two or more types. For the resin having an acid group, the description in paragraphs 0558-0571 of JP-A-2012-208494 (corresponding to paragraphs 0685-0700 of US Patent Application Publication No. 2012 / 0235099) and the description in paragraphs 0076-0099 of JP-A-2012-198408 can be referred to, and the contents of these are incorporated herein.In addition, a commercially available product such as ACRYBASE FF-426 (manufactured by Fujikura Chemical Industries, Ltd.) can be used as the resin having an acid group.

[0072] The acid value of the resin having an acid group is preferably 30 to 200 mgKOH / g. The lower limit is preferably 50 mgKOH / g or more, more preferably 70 mgKOH / g or more. The upper limit is preferably 150 mgKOH / g or less, more preferably 120 mgKOH / g or less.

[0073] In the present invention, it is preferable to use a resin having a polymerizable group as the resin. According to this embodiment, it is easy to form pixels having better rectangularity and adhesion to the support. In particular, by using a polymerizable monomer and a resin having a polymerizable group in combination as a curable compound, the above-mentioned effect can be obtained significantly. Examples of the polymerizable group include ethylenically unsaturated bond groups such as vinyl groups, (meth)allyl groups, and (meth)acryloyl groups, and (meth)acryloyl groups are preferred.

[0074] The weight average molecular weight of the resin having a polymerizable group is preferably 5,000 to 20,000. The upper limit is preferably 17,000 or less, more preferably 14,000 or less. The lower limit is preferably 7,000 or more, more preferably 9,000 or more. If the weight average molecular weight of the resin having a polymerizable group is within the above range, the effect of simultaneously improving the developability, filterability, and pattern rectangularity can be expected.

[0075] The polymerizable group value of the resin having a polymerizable group is preferably 0.5 to 3 mmol / g. The upper limit is preferably 2.5 mmol / g or less, more preferably 2 mmol / g or less. The lower limit is preferably 0.9 mmol / g or more, more preferably 1.2 mmol / g or more. The polymerizable group value of the resin is a numerical value representing the molar amount of the polymerizable group value per 1 g of solid content of the resin. The C=C value of the resin having a polymerizable group is preferably 0.6 to 2.8 mmol / g. The upper limit is preferably 2.3 mmol / g or less, and more preferably 1.8 mmol / g or less. The lower limit is preferably 1.0 mmol / g or more, and more preferably 1.3 mmol / g or more. The C=C value of the resin is a value representing the molar amount of ethylenically unsaturated bond groups per gram of solid content of the resin. The polymerizable group value of the resin can be calculated by extracting the low molecular weight component (a) of the polymerizable group site from the resin by alkali treatment, measuring its content by high performance liquid chromatography (HPLC), and using the following formula. In addition, when the polymerizable group site cannot be extracted from the resin by alkali treatment, the value measured by the NMR method (nuclear magnetic resonance) is used. The same applies to the C=C value of the resin. Polymerizable group value of resin [mmol / g] = (content of low molecular weight component (a) [ppm] / molecular weight of low molecular weight component (a) [g / mol]) / (weighed value of resin [g] × (solid content of resin [mass%] / 100) × 10)

[0076] The resin having a polymerizable group preferably contains a repeating unit having a polymerizable group (preferably an ethylenically unsaturated bond group) in a side chain, and more preferably contains 5 to 80 mol % of the repeating units having a polymerizable group in a side chain in all repeating units of the resin. The upper limit of the content of the repeating units having a polymerizable group in a side chain is preferably 60 mol % or less, more preferably 40 mol % or less. The lower limit of the content of the repeating units having a polymerizable group in a side chain is preferably 15 mol % or more, more preferably 25 mol % or more.

[0077] It is also preferable that the resin having a polymerizable group further contains a repeating unit having an acid group on a side chain. According to this embodiment, pixels having better rectangularity can be easily formed. The content of the repeating unit having an acid group on a side chain is preferably 10 to 60 mol % of all repeating units of the resin. The upper limit is preferably 40 mol % or less, and more preferably 25 mol % or less. The lower limit is preferably 10 mol % or more, and more preferably 20 mol % or more.

[0078] It is also preferable that the resin used in the present invention contains a repeating unit derived from a monomer component including a compound represented by the following formula (ED1) and / or a compound represented by the following formula (ED2) (hereinafter, these compounds may be referred to as "ether dimers").

[0079] [ka]

[0080] In formula (ED1), R 1 and R 2 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent. [ka] In formula (ED2), R represents a hydrogen atom or an organic group having a carbon number of 1 to 30. For details of formula (ED2), the disclosure of JP-A-2010-168539 can be referred to, the contents of which are incorporated herein by reference.

[0081] For specific examples of ether dimers, see, for example, paragraph 0317 of JP2013-29760A, the contents of which are incorporated herein by reference.

[0082] It is also preferable that the resin used in the present invention contains a repeating unit derived from a compound represented by the following formula (X). [ka] In formula (X), R 1 represents a hydrogen atom or a methyl group, and R 2 represents an alkylene group having 2 to 10 carbon atoms, R 3 represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms which may contain a benzene ring. n represents an integer of 1 to 15.

[0083] Examples of the resin having an acid group and / or a polymerizable group include resins having the following structures: In the following structural formula, Me represents a methyl group. [ka]

[0084] The colored photosensitive composition of the present invention may also contain a resin as a dispersant. Examples of dispersants include acidic dispersants (acidic resins) and basic dispersants (basic resins). Here, the acidic dispersant (acidic resin) refers to a resin in which the amount of acid groups is greater than the amount of basic groups. The acidic dispersant (acidic resin) is preferably a resin in which the amount of acid groups is 70 mol % or more when the total amount of the acid groups and the basic groups is 100 mol %, and more preferably a resin substantially composed of only acid groups. The acid group possessed by the acidic dispersant (acidic resin) is preferably a carboxyl group. The acid value of the acidic dispersant (acidic resin) is preferably 40 to 105 mgKOH / g, more preferably 50 to 105 mgKOH / g, and even more preferably 60 to 105 mgKOH / g. The basic dispersant (basic resin) refers to a resin in which the amount of basic groups is greater than the amount of acid groups. The basic dispersant (basic resin) is preferably a resin having a basic group content of more than 50 mol % when the total amount of the acid group and the basic group is taken as 100 mol %. The basic group possessed by the basic dispersant is preferably an amino group.

[0085] The resin used as the dispersant preferably contains a repeating unit having an acid group. By containing a repeating unit having an acid group in the resin used as the dispersant, it is possible to further reduce residues generated on the base of pixels when the pixels are formed by a photolithography method.

[0086] The resin used as the dispersant is preferably a graft copolymer. The graft copolymer has affinity with the solvent due to the graft chain, and therefore has excellent pigment dispersibility and dispersion stability after aging. For details of the graft copolymer, refer to paragraphs 0025 to 0094 of JP2012-255128A, the contents of which are incorporated herein by reference. Specific examples of the graft copolymer include the following resins. The following resins are also resins having an acid group (alkali-soluble resins). Examples of the graft copolymer include the resins described in paragraphs 0072 to 0094 of JP2012-255128A, the contents of which are incorporated herein by reference. [ka]

[0087] In the present invention, it is also preferable to use an oligoimine-based dispersant containing a nitrogen atom in at least one of the main chain and the side chain as the resin (dispersant). As the oligoimine-based dispersant, a resin having a structural unit having a partial structure X having a functional group with a pKa of 14 or less and a side chain containing a side chain Y having 40 to 10,000 atoms, and having a basic nitrogen atom in at least one of the main chain and the side chain is preferable. There is no particular limitation on the basic nitrogen atom as long as it is a nitrogen atom that exhibits basicity. For oligoimine-based dispersants, the description in paragraphs 0102 to 0166 of JP-A-2012-255128 can be referred to, and the contents of this specification are incorporated herein. As the oligoimine-based dispersant, a resin having the following structure or a resin described in paragraphs 0168 to 0174 of JP-A-2012-255128 can be used. [ka]

[0088] Dispersants are also available as commercially available products, and specific examples thereof include Disperbyk-111, 161 (manufactured by BYK Chemie), etc. In addition, pigment dispersants described in paragraphs 0041 to 0130 of JP 2014-130338 A can also be used, the contents of which are incorporated herein by reference. In addition, the above-mentioned resins having an acid group can also be used as dispersants.

[0089] In the colored photosensitive composition of the present invention, the content of the curable compound is preferably 5 to 30% by mass based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 7% by mass or more, and even more preferably 9% by mass or more. The upper limit is, for example, more preferably 20% by mass or less, and even more preferably 15% by mass or less. The curable compound may be one type or two or more types. In the case of two or more types, the total amount is preferably within the above range.

[0090] The curable compound used in the colored photosensitive composition of the present invention preferably contains at least a polymerizable monomer, more preferably contains at least a resin and a polymerizable monomer. According to this embodiment, it is easy to form a film having excellent rectangularity and adhesion to the support. In addition, the resin preferably contains a resin having an acid group, more preferably contains a resin having a polymerizable group and an acid group.

[0091] The content of the polymerizable monomer is preferably 6 to 28 mass % based on the total solid content of the colored photosensitive composition. For example, the content is more preferably 8% by mass or more, and even more preferably 10% by mass or more. The upper limit is, for example, more preferably 18% by mass or less, and even more preferably 13% by mass or less.

[0092] The content of the resin is preferably 5 to 50% by mass based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 10% by mass or more, and more preferably 15% by mass or more. The upper limit is, for example, more preferably 40% by mass or less, and more preferably 30% by mass or less. The content of the resin having an acid group is preferably 7 to 45% by mass based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 12% by mass or more, and more preferably 17% by mass or more. The upper limit is, for example, more preferably 35% by mass or less, and more preferably 25% by mass or less. The content of the resin having a polymerizable group is preferably 8 to 42% by mass based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 14% by mass or more, and more preferably 19% by mass or more. The upper limit is, for example, more preferably 32% by mass or less, and more preferably 22% by mass or less.

[0093] The total content of the polymerizable monomer and the resin is preferably 20 to 80% by mass based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 25% by mass or more, and even more preferably 30% by mass or more. The upper limit is, for example, more preferably 60% by mass or less, and even more preferably 40% by mass or less. In addition, it is preferable that the polymerizable monomer is contained in an amount of 10 to 500 parts by mass based on 100 parts by mass of the resin. The lower limit is preferably 30 parts by mass or more, and more preferably 50 parts by mass or more. The upper limit is preferably 300 parts by mass or less, and more preferably 100 parts by mass or less. When the above mass ratio is within the above range, pixels having excellent rectangularity can be formed.

[0094] The total content of the polymerizable monomer and the resin having an acid group is preferably 15 to 75% by mass based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 23% by mass or more, and even more preferably 28% by mass or more. The upper limit is, for example, more preferably 55% by mass or less, and even more preferably 35% by mass or less. In addition, it is preferable that the polymerizable monomer is contained in an amount of 5 to 400 parts by mass based on 100 parts by mass of the resin having an acid group. The lower limit is preferably 20 parts by mass or more, and more preferably 40 parts by mass or more. The upper limit is preferably 200 parts by mass or less, and more preferably 80 parts by mass or less. When the above mass ratio is within the above range, pixels having better rectangularity can be formed.

[0095] It is also preferable that the curable compound used in the colored photosensitive composition of the present invention contains a compound having a cyclic ether group. According to this embodiment, a film having excellent adhesion to the support is easily formed. The content of the compound having a cyclic ether group is preferably 0.5 to 10 mass% based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 1 mass% or more, and even more preferably 1.5 mass% or more. The upper limit is, for example, more preferably 5 mass% or less, and even more preferably 3 mass% or less. In addition, it is preferable to contain 5 to 50 mass parts of the compound having a cyclic ether group based on 100 mass parts of the polymerizable monomer. The lower limit is preferably 8 mass parts or more, and more preferably 12 mass parts or more. The upper limit is preferably 30 mass parts or less, and more preferably 20 mass parts or less. When the mass ratio is within the above range, pixels having better rectangularity and adhesion to the support can be formed.

[0096] <<Photopolymerization initiator>> The colored photosensitive composition of the present invention preferably contains a photopolymerization initiator. The photopolymerization initiator is preferably a compound that reacts with light having a wavelength of 300 nm or less to generate radicals.

[0097] The photopolymerization initiator used in the present invention is also preferably a compound having a quantum yield of 15% or more for light with a wavelength of 265 nm. In this specification, the quantum yield of the photopolymerization initiator is a value obtained by dividing the number of decomposed molecules by the number of absorbed photons. The number of absorbed photons was obtained by calculating the number of irradiated photons from the exposure time with a KrF linear approximation light source (wavelength: 265 nm, intensity: 3 mW), converting the average absorbance at 265 nm before and after exposure to a transmittance, and multiplying the number of irradiated photons by (1-transmittance). The number of decomposed molecules was obtained by calculating the decomposition rate of the photopolymerization initiator from the absorbance of the photopolymerization initiator after exposure, and multiplying the decomposition rate by the number of molecules present in the film. Examples of compounds having a quantum yield of 15% or more for light with a wavelength of 265 nm include IRGACURE-OXE01, OXE02, and OXE03 (all manufactured by BASF).

[0098] The photopolymerization initiator used in the present invention preferably contains at least one compound selected from an alkylphenone compound, an acylphosphine compound, a benzophenone compound, a thioxanthone compound, a triazine compound, a pinacol compound, and an oxime compound, and more preferably contains an oxime compound.

[0099] Examples of the alkylphenone compound include a benzyl dimethyl ketal compound, an α-hydroxyalkylphenone compound, and an α-aminoalkylphenone compound.

[0100] Examples of benzyl dimethyl ketal compounds include 2,2-dimethoxy-2-phenylacetophenone, etc. Examples of commercially available products include IRGACURE-651 (manufactured by BASF), etc.

[0101] Examples of the α-hydroxyalkylphenone compound include compounds represented by the following formula (V-1). Formula (V-1) [ka] Rv in the formula 1 represents a substituent, Rv 2 and Rv 3 each independently represents a hydrogen atom or a substituent; Rv 2 and Rv 3 may be bonded to each other to form a ring, and m represents an integer of 0 to 4.

[0102] Rv 1 Examples of the substituent represented by Rv include an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, and an aralkyl group having 7 to 20 carbon atoms. The alkyl group and the alkoxy group are preferably linear or branched, and more preferably linear. 1 The alkyl group, alkoxy group and aralkyl group represented by the formula (I) may be unsubstituted or may have a substituent, such as a hydroxy group.

[0103] Rv 2and Rv 3 Each of Rv independently represents a hydrogen atom or a substituent. The substituent is preferably an alkyl group having 1 to 10 carbon atoms or an aryl group having 6 to 20 carbon atoms. 2 and Rv 3 may be bonded to each other to form a ring (preferably a ring having 4 to 8 carbon atoms, more preferably an aliphatic ring having 4 to 8 carbon atoms). The alkyl group is preferably linear or branched, more preferably linear.

[0104] Specific examples of α-hydroxyalkylphenone compounds include 1-hydroxycyclohexyl-phenyl-ketone, 2-hydroxy-2-methyl-1-phenyl-propan-1-one, 1-[4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propionyl)-benzyl]phenyl}-2-methyl-propan-1-one, etc. Commercially available α-hydroxyalkylphenone compounds include IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, IRGACURE-127 (all manufactured by BASF), etc.

[0105] Examples of the α-aminoalkylphenone compound include compounds represented by the following formula (V-2). [ka]

[0106] In the formula, Ar is -SR 13 or -N(R 7E )(R 8E ), R 13 represents a hydrogen atom or an alkyl group having 1 to 12 carbon atoms.

[0107] R 1D and R 2D R each independently represents an alkyl group having 1 to 8 carbon atoms. 1D and R 2Dmay be bonded to each other to form a ring. R 1D and R 2D The alkyl group represented by may be straight-chain, branched or cyclic, and is preferably straight-chain or branched. R 1D and R 2D The alkyl group represented by may be unsubstituted or may have a substituent. The substituent may be an aryl group, a heterocyclic group, a nitro group, a cyano group, a halogen atom, -OR Y1 , -SR Y1 , -COR Y1 , -COOR Y1 , -OCOR Y1 , -NR Y1 R Y2 , -NHCOR Y1 , -CONR Y1 R Y2 , -NHCONR Y1 R Y2 , -NHCOOR Y1 , -SO 2 R Y1 , -SO 2 OR Y1 , -NHSO 2 R Y1 R Y1 and R Y2 each independently represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R Y1 and R Y2 The number of carbon atoms in the alkyl group represented by is preferably 1 to 20. The alkyl group may be linear, branched, or cyclic, but is preferably linear or branched. Aryl groups and R as substituents Y1 and R Y2 The number of carbon atoms in the aryl group represented by is preferably 6 to 20, more preferably 6 to 15, and further preferably 6 to 10. The aryl group may be a monocyclic ring or a condensed ring. R Y1 and R Y2The heterocyclic group represented by is preferably a 5-membered ring or a 6-membered ring. The heterocyclic group may be a monocyclic ring or a condensed ring. The number of carbon atoms constituting the heterocyclic group is preferably 3 to 30, more preferably 3 to 18, and further preferably 3 to 12. The number of heteroatoms constituting the heterocyclic group is preferably 1 to 3. The heteroatom constituting the heterocyclic group is preferably a nitrogen atom, an oxygen atom, or a sulfur atom.

[0108] R 3D and R 4D R each independently represents a hydrogen atom or an alkyl group having 1 to 12 carbon atoms. 3D and R 4D R may be bonded to each other to form a ring. 3D and R 4D When R is bonded to form a ring, they may be bonded directly to form a ring, or may be bonded via -CO-, -O-, or -NH- to form a ring. For example, R 3D and R 4D Examples of the ring formed via -O- include a morpholine ring.

[0109] R 7E and R 8E R each independently represents a hydrogen atom or an alkyl group having 1 to 12 carbon atoms. 7E and R 8E R may be bonded to each other to form a ring. 7E and R 8E When R is bonded to form a ring, they may be bonded directly to form a ring, or may be bonded via -CO-, -O-, or -NH- to form a ring. For example, R 7E and R 8E Examples of the ring formed via -O- include a morpholine ring.

[0110] Specific examples of the α-aminoalkylphenone compound include 2-methyl-1-(4-methylthiophenyl)-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-1-butanone, 2-dimethylamino-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone, etc. Commercially available α-aminoalkylphenone compounds include IRGACURE-907, IRGACURE-369, and IRGACURE-379 (all manufactured by BASF).

[0111] Examples of the acylphosphine compound include 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, bis(2,4,6-trimethylbenzoyl)-phenylphosphine oxide, etc. Examples of commercially available acylphosphine compounds include IRGACURE-819, IRGACURE-TPO (both manufactured by BASF), etc.

[0112] Benzophenone compounds include benzophenone, o-benzoylmethylbenzoate, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, 3,3',4,4'-tetra(t-butylperoxycarbonyl)benzophenone, and 2,4,6-trimethylbenzophenone.

[0113] Examples of the thioxanthone compound include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, and 1-chloro-4-propoxythioxanthone.

[0114] The triazine compounds include 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-piperonyl-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxystyryl)-1,3,5-triazine, and 2,4-bis(trichloromethyl)-6-[2-( 5-methylfuran-2-yl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(furan-2-yl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(4-diethylamino-2-methylphenyl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxyphenyl)ethenyl]-1,3,5-triazine, and the like.

[0115] The pinacol compound is preferably a benzopinacol compound. Specific examples of the pinacol compound include benzopinacol, 1,2-dimethoxy-1,1,2,2-tetraphenylethane, 1,2-diethoxy-1,1,2,2-tetraphenylethane, 1,2-diphenoxy-1,1,2,2-tetraphenylethane, 1,2-dimethoxy-1,1,2,2-tetra(4-methylphenyl)ethane, 1,2-diphenoxy-1,1,2,2-tetra(4-methoxyphenyl)ethane, 1,2-bis(trimethylsiloxy)-1,1,2,2-tetraphenylethane, and 1,2-bis(trimethylsiloxy)-1,1,2,2-tetraphenylethane. Examples of the pinacol compound include phenylethane, 1,2-bis(triethylsiloxy)-1,1,2,2-tetraphenylethane, 1,2-bis(t-butyldimethylsiloxy)-1,1,2,2-tetraphenylethane, 1-hydroxy-2-trimethylsiloxy-1,1,2,2-tetraphenylethane, 1-hydroxy-2-triethylsiloxy-1,1,2,2-tetraphenylethane, 1-hydroxy-2-t-butyldimethylsiloxy-1,1,2,2-tetraphenylethane, etc. In addition, for the pinacol compound, the descriptions in JP-T-2014-521772, JP-T-2014-523939, and JP-T-2014-521772 can be referred to, and the contents of these are incorporated herein.

[0116] As for the oxime compound, the description in paragraphs 0212 to 0236 of International Publication WO2016 / 190162 can be referred to, the contents of which are incorporated herein by reference. In addition, as the oxime compound, the compounds described in JP-A-2001-233842, the compounds described in JP-A-2000-80068, the compounds described in JP-A-2006-342166, the compounds described in JP-A-2016-21012, and the like can be used. Examples of oxime compounds that can be suitably used in the present invention include 3-benzoyloxyiminobutan-2-one, 3-acetoxyiminobutan-2-one, 3-propionyloxyiminobutan-2-one, 2-acetoxyiminopentan-3-one, 2-acetoxyimino-1-phenylpropan-1-one, 2-benzoyloxyimino-1-phenylpropan-1-one, 3-(4-toluenesulfonyloxy)iminobutan-2-one, and 2-ethoxycarbonyloxyimino-1-phenylpropan-1-one. Further examples include compounds described in J.C.S. Perkin II (1979, pp.1653-1660), J.C.S. Perkin II (1979, pp.156-162), Journal of Photopolymer Science and Technology (1995, pp.202-232), JP-A Nos. 2000-66385, 2000-80068, JP-T No. 2004-534797, and JP-A No. 2006-342166. Commercially available products include IRGACURE-OXE01, IRGACURE-OXE02, IRGACURE-OXE03, and IRGACURE-OXE04 (all manufactured by BASF), TR-PBG-304 (manufactured by Changzhou Strong Electronic New Materials Co., Ltd.), and Adeka Optomer N-1919 (manufactured by ADEKA Corporation, photopolymerization initiator 2 described in JP-A-2012-14052). In addition, as the oxime compound, it is also preferable to use a compound that is not colorable, or a compound that is highly transparent and does not easily discolor other components. Commercially available products include Adeka Arcles NCI-730, NCI-831, and NCI-930 (all manufactured by ADEKA Corporation).

[0117] In the present invention, an oxime compound having a fluorene ring can also be used as a photopolymerization initiator. Specific examples of the oxime compound having a fluorene ring include the compounds described in JP-A-2014-137466, the contents of which are incorporated herein by reference.

[0118] In the present invention, an oxime compound having a fluorine atom can also be used as a photopolymerization initiator.Specific examples of the oxime compound having a fluorine atom include the compounds described in JP-A-2010-262028, compounds 24, 36 to 40 described in JP-T-2014-500852, and compound (C-3) described in JP-A-2013-164471.The contents of these compounds are incorporated herein by reference.

[0119] In the present invention, an oxime compound having a nitro group can be used as a photopolymerization initiator. It is also preferable that the oxime compound having a nitro group is a dimer. Specific examples of the oxime compound having a nitro group include the compounds described in paragraphs 0031 to 0047 of JP 2013-114249 A, paragraphs 0008 to 0012, and 0070 to 0079 of JP 2014-137466 A, the compounds described in paragraphs 0007 to 0025 of Japanese Patent No. 4223071 A, and Adeka Arcles NCI-831 (manufactured by ADEKA Corporation).

[0120] In the present invention, an oxime compound having a benzofuran skeleton can also be used as the photopolymerization initiator. Specific examples include OE-01 to OE-75 described in International Publication WO2015 / 036910.

[0121] Specific examples of oxime compounds that can be preferably used in the present invention are shown below, but the present invention is not limited to these.

[0122] [ka] [ka]

[0123] The content of the photopolymerization initiator is preferably 0.1 to 30% by mass based on the total solid content of the colored photosensitive composition. The lower limit is, for example, more preferably 0.5% by mass or more, and even more preferably 1% by mass or more. The upper limit is, for example, more preferably 25% by mass or less, and even more preferably 20% by mass or less. The photopolymerization initiator may be used alone or in combination of two or more types. When two or more types of photopolymerization initiators are used in combination, the total amount is preferably within the above range.

[0124] <<Silane coupling agents>> The colored photosensitive composition may contain a silane coupling agent. According to this embodiment, the adhesion of the obtained film to the support can be further improved. In the present invention, the silane coupling agent means a silane compound having a hydrolyzable group and a functional group other than the hydrolyzable group. The hydrolyzable group refers to a substituent that is directly bonded to a silicon atom and can generate a siloxane bond by at least one of a hydrolysis reaction and a condensation reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, and an acyloxy group, and an alkoxy group is preferable. That is, the silane coupling agent is preferably a compound having an alkoxysilyl group. Examples of functional groups other than the hydrolyzable group include a vinyl group, a (meth)allyl group, a (meth)acryloyl group, a mercapto group, an epoxy group, an oxetanyl group, an amino group, a ureido group, a sulfide group, an isocyanate group, and a phenyl group, and an amino group, a (meth)acryloyl group, and an epoxy group are preferable. Specific examples of the silane coupling agent include compounds having the following structures. Specific examples of the silane coupling agent include the compounds described in paragraphs 0018 to 0036 of JP-A No. 2009-288703 and the compounds described in paragraphs 0056 to 0066 of JP-A No. 2009-242604, the contents of which are incorporated herein by reference. [ka]

[0125] The content of the silane coupling agent is preferably 0.1 to 5% by mass based on the total solid content of the colored photosensitive composition. The upper limit is preferably 3% by mass or less, more preferably 2% by mass or less. The lower limit is preferably 0.5% by mass or more, more preferably 1% by mass or more. The silane coupling agent may be one type or two or more types. When two or more types are used, the total amount is preferably within the above range.

[0126] <<Pigment derivatives>> The colored photosensitive composition of the present invention may further contain a pigment derivative. Examples of the pigment derivative include a compound having a structure in which a part of a pigment is substituted with an acid group, a basic group, a group having a salt structure, or a phthalimidomethyl group. As the pigment derivative, a compound represented by formula (B1) is preferable.

[0127] [ka] In formula (B1), P represents a dye structure, L represents a single bond or a linking group, X represents an acid group, a basic group, a group having a salt structure, or a phthalimidomethyl group, m represents an integer of 1 or more, n represents an integer of 1 or more, provided that when m is 2 or more, multiple L's and X's may be different from each other, and when n is 2 or more, multiple X's may be different from each other.

[0128] The dye structure represented by P is preferably at least one selected from a pyrrolopyrrole dye structure, a diketopyrrolopyrrole dye structure, a quinacridone dye structure, an anthraquinone dye structure, a dianthraquinone dye structure, a benzoisoindole dye structure, a thiazine indigo dye structure, an azo dye structure, a quinophthalone dye structure, a phthalocyanine dye structure, a naphthalocyanine dye structure, a dioxazine dye structure, a perylene dye structure, a perinone dye structure, a benzimidazolone dye structure, a benzothiazole dye structure, a benzimidazole dye structure, and a benzoxazole dye structure, more preferably at least one selected from a pyrrolopyrrole dye structure, a diketopyrrolopyrrole dye structure, a quinacridone dye structure, and a benzimidazolone dye structure, and particularly preferably a pyrrolopyrrole dye structure.

[0129] The linking group represented by L is a hydrocarbon group, a heterocyclic group, -NR-, -SO 2 The substituents include -, -S-, -O-, -CO-, and combinations thereof. R represents a hydrogen atom, an alkyl group, or an aryl group.

[0130] Examples of the acid group represented by X include a carboxyl group, a sulfo group, a carboxylic acid amide group, a sulfonic acid amide group, and an imide acid group. X1 As the sulfonamide group, a group represented by -NHSO is preferable. 2 R X2 As the imide acid group, a group represented by -SO 2 NHSO 2 R X3 , -CONHSO 2 R X4 , -CONHCOR X5 OR -SO 2 NHCOR X6 R is preferably a group represented by the formula: X1 ~R X6 R each independently represents a hydrocarbon group or a heterocyclic group. X1 ~R X6 The hydrocarbon group and the heterocyclic group represented by may further have a substituent. The further substituent is preferably a halogen atom, more preferably a fluorine atom. The basic group represented by X includes an amino group. The salt structure represented by X includes the salt of the above-mentioned acid group or basic group.

[0131] Examples of the pigment derivative include compounds having the following structure: Also, see JP-A-56-118462, JP-A-63-264674, JP-A-1-217077, JP-A-3-9961, JP-A-3-26767, JP-A-3-153780, JP-A-3-45662, JP-A-4-285669, JP-A-6-145546, JP-A-6-212088, and JP-A-6-240158. Compounds described in JP-A-10-30063, JP-A-10-195326, paragraphs 0086 to 0098 of International Publication WO2011 / 024896, paragraphs 0063 to 0094 of International Publication WO2012 / 102399, paragraph 0082 of International Publication WO2017 / 038252, and the like, the contents of which are incorporated herein by reference, can also be used. [ka]

[0132] The content of the pigment derivative is preferably 1 to 50 parts by mass relative to 100 parts by mass of the pigment. The lower limit is preferably 3 parts by mass or more, and more preferably 5 parts by mass or more. The upper limit is preferably 40 parts by mass or less, and more preferably 30 parts by mass or less. When the content of the pigment derivative is within the above range, the dispersibility of the pigment can be improved, and the aggregation of the pigment can be efficiently suppressed. Only one type of pigment derivative may be used, or two or more types may be used. When two or more types are used, it is preferable that the total amount is within the above range.

[0133] <<Solvent>> The colored photosensitive composition of the present invention may contain a solvent. Examples of the solvent include organic solvents. Basically, the solvent is not particularly limited as long as it satisfies the solubility of each component and the coatability of the composition. Examples of the organic solvent include esters, ethers, ketones, aromatic hydrocarbons, and the like. For details of these, reference can be made to paragraph number 0223 of International Publication WO2015 / 166779, the contents of which are incorporated herein by reference. In addition, ester-based solvents substituted with a cyclic alkyl group and ketone-based solvents substituted with a cyclic alkyl group can also be preferably used. Specific examples of organic solvents include dichloromethane, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, cyclohexyl acetate, cyclopentanone, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether, and propylene glycol monomethyl ether acetate. In the present invention, the organic solvent may be used alone or in combination of two or more. In addition, 3-methoxy-N,N-dimethylpropanamide and 3-butoxy-N,N-dimethylpropanamide are also preferred from the viewpoint of improving solubility. However, it may be better to reduce the amount of aromatic hydrocarbons used as solvents (benzene, toluene, xylene, ethylbenzene, etc.) for environmental reasons (for example, it can be reduced to 50 ppm (parts per million) by mass or less, 10 ppm by mass or less, or 1 ppm by mass or less, relative to the total amount of organic solvents).

[0134] In the present invention, it is preferable to use a solvent with a low metal content, and the metal content of the solvent is preferably 10 mass ppb (parts per billion) or less. If necessary, a solvent with a mass ppt (parts per trillion) level may be used, and such a high purity solvent is provided, for example, by Toyo Gosei Co., Ltd. (The Chemical Daily, November 13, 2015).

[0135] Methods for removing impurities such as metals from a solvent include, for example, distillation (molecular distillation, thin-film distillation, etc.) and filtration using a filter. The filter used for filtration has a filter pore size of preferably 10 μm or less, more preferably 5 μm or less, and even more preferably 3 μm or less. The filter material is preferably polytetrafluoroethylene, polyethylene, or nylon.

[0136] The solvent may contain isomers (compounds having the same number of atoms but different structures). In addition, the solvent may contain only one type of isomer or multiple types of isomers.

[0137] In the present invention, the organic solvent preferably has a peroxide content of 0.8 mmol / L or less, and more preferably contains substantially no peroxide.

[0138] The content of the solvent is preferably 10 to 95% by mass, more preferably 20 to 90% by mass, and even more preferably 30 to 90% by mass, based on the total amount of the colored photosensitive composition. In addition, for environmental reasons, it may be preferable that the colored photosensitive composition does not contain aromatic hydrocarbons (benzene, toluene, xylene, ethylbenzene, etc.) as a solvent.

[0139] <<Polymerization inhibitor>> The colored photosensitive composition of the present invention may contain a polymerization inhibitor. Examples of the polymerization inhibitor include hydroquinone, p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4'-thiobis(3-methyl-6-tert-butylphenol), 2,2'-methylenebis(4-methyl-6-t-butylphenol), and N-nitrosophenylhydroxyamine salts (ammonium salts, cerous salts, etc.). Among these, p-methoxyphenol is preferred. The content of the polymerization inhibitor is preferably 0.001 to 5% by mass based on the total solid content of the colored photosensitive composition.

[0140] <<Surfactants>> The colored photosensitive composition of the present invention preferably contains a surfactant. As the surfactant, various surfactants such as fluorine-based surfactants, nonionic surfactants, cationic surfactants, anionic surfactants, and silicon-based surfactants can be used. For details of the surfactant, refer to paragraphs 0238 to 0245 of International Publication WO2015 / 166779, the contents of which are incorporated herein by reference.

[0141] In the present invention, the surfactant is preferably a fluorosurfactant. By including a fluorosurfactant in the colored photosensitive composition, the liquid properties (particularly, fluidity) can be further improved, and the liquid saving can be further improved. In addition, a film with less unevenness in thickness can be formed.

[0142] The fluorine content in the fluorosurfactant is preferably 3 to 40 mass%, more preferably 5 to 30 mass%, and particularly preferably 7 to 25 mass%. A fluorosurfactant having a fluorine content within this range is effective in terms of uniformity of the coating film thickness and liquid saving properties, and also has good solubility in the composition.

[0143] Specific examples of fluorine-based surfactants include those described in JP2014-41318A, paragraphs 0060 to 0064 (corresponding to WO2014 / 17669A, paragraphs 0060 to 0064) and those described in JP2011-132503A, paragraphs 0117 to 0132, the contents of which are incorporated herein by reference. Commercially available fluorine-based surfactants include, for example, Megafac F171, F172, F173, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780, EXP, and MFS-330 (all manufactured by DIC Corporation), Fluorad FC430, FC431, and FC171 (all manufactured by Sumitomo 3M Limited), Surflon S-382, SC-101, SC-103, SC-104, SC-105, SC-1068, SC-381, SC-383, S-393, and KH-40 (all manufactured by Asahi Glass Co., Ltd.), and PolyFox. Examples include PF636, PF656, PF6320, PF6520, and PF7002 (all manufactured by OMNOVA).

[0144] In addition, the fluorosurfactant may be an acrylic compound that has a molecular structure with a functional group containing a fluorine atom, and when heat is applied, the functional group containing the fluorine atom is cut and the fluorine atom is volatilized. Examples of such fluorosurfactants include the Megafac DS series manufactured by DIC Corporation (The Chemical Daily, February 22, 2016) (The Nikkei Business Daily, February 23, 2016), such as Megafac DS-21.

[0145] In addition, it is also preferable to use a polymer of a fluorine atom-containing vinyl ether compound having a fluorinated alkyl group or a fluorinated alkylene ether group and a hydrophilic vinyl ether compound as the fluorine-based surfactant. For such a fluorine-based surfactant, the description in JP 2016-216602 A can be referred to, and the contents of this specification are incorporated herein.

[0146] The fluorosurfactant may be a block polymer. For example, the compounds described in JP 2011-89090 A may be mentioned. The fluorosurfactant may preferably be a fluorine-containing polymer compound containing a repeating unit derived from a (meth)acrylate compound having a fluorine atom and a repeating unit derived from a (meth)acrylate compound having two or more (preferably five or more) alkyleneoxy groups (preferably ethyleneoxy groups, propyleneoxy groups). The following compounds are also exemplified as the fluorosurfactant used in the present invention. [ka] The weight average molecular weight of the above compound is preferably 3,000 to 50,000, for example, 14,000. In the above compound, % indicating the proportion of repeating units is mol %.

[0147] In addition, the fluorine-based surfactant may be a fluorine-containing polymer having an ethylenically unsaturated bond group in a side chain.Specific examples include compounds described in paragraphs 0050-0090 and 0289-0295 of JP 2010-164965 A, such as Megafac RS-101, RS-102, RS-718K, and RS-72-K manufactured by DIC Corporation.The fluorine-based surfactant may be compounds described in paragraphs 0015-0158 of JP 2015-117327 A.

[0148] Examples of nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane, and their ethoxylates and propoxylates (e.g., glycerol propoxylate, glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, and sorbitan fat. Examples of the fatty acid ester include Pluronic L10, L31, L61, L62, 10R5, 17R2, and 25R2 (manufactured by BASF), Tetronic 304, 701, 704, 901, 904, and 150R1 (manufactured by BASF), Solsperse 20000 (manufactured by Lubrizol Japan Co., Ltd.), NCW-101, NCW-1001, and NCW-1002 (manufactured by Wako Pure Chemical Industries, Ltd.), Paionin D-6112, D-6112-W, and D-6315 (manufactured by Takemoto Oil Co., Ltd.), Olfin E1010, and Surfynol 104, 400, and 440 (manufactured by Nissin Chemical Industry Co., Ltd.).

[0149] Examples of silicone surfactants include Toray Silicone DC3PA, Toray Silicone SH7PA, Toray Silicone DC11PA, Toray Silicone SH21PA, Toray Silicone SH28PA, Toray Silicone SH29PA, Toray Silicone SH30PA, and Toray Silicone SH8400 (all manufactured by Toray Dow Corning Co., Ltd.), TSF-4440, TSF-4300, TSF-4445, TSF-4460, and TSF-4452 (all manufactured by Momentive Performance Materials Co., Ltd.), KP-341, KF-6001, and KF-6002 (all manufactured by Shin-Etsu Silicone Co., Ltd.), BYK307, BYK323, and BYK330 (all manufactured by BYK-Chemie Co., Ltd.), etc. In addition, compounds having the following structure can also be used as silicone surfactants. [ka]

[0150] The content of the surfactant is preferably 0.001% by mass to 5.0% by mass, more preferably 0.005% by mass to 3.0% by mass, based on the total solid content of the colored photosensitive composition. The surfactant may be one type or two or more types. When two or more types are used, the total amount is preferably within the above range.

[0151] <<Ultraviolet absorbing agent>> The colored photosensitive composition of the present invention may contain an ultraviolet absorber. Examples of ultraviolet absorbers that can be used include conjugated diene compounds, aminobutadiene compounds, methyldibenzoyl compounds, coumarin compounds, salicylate compounds, benzophenone compounds, benzotriazole compounds, acrylonitrile compounds, azomethine compounds, indole compounds, and triazine compounds. For details, see paragraphs 0052 to 0072 of JP 2012-208374 A, paragraphs 0317 to 0334 of JP 2013-68814 A, and paragraphs 0061 to 0080 of JP 2016-162946 A, the contents of which are incorporated herein by reference. Commercially available conjugated diene compounds include, for example, UV-503 (manufactured by Daito Chemical Co., Ltd.). Examples of indole compounds include compounds having the following structure. In addition, as the benzotriazole compound, the MYUA series manufactured by Miyoshi Oil & Fat (The Chemical Daily, February 1, 2016) may be used.

[0152] In the present invention, the compounds represented by formulae (UV-1) to (UV-3) can also be preferably used as the ultraviolet absorbent. [ka]

[0153] In formula (UV-1), R 101 and R 102 Each of m1 and m2 independently represents a substituent, and each of m1 and m2 independently represents an integer of 0 to 4. In formula (UV-2), R 201 and R 202 each independently represents a hydrogen atom or an alkyl group; R 203 and R 204Each of R independently represents a substituent. 301 ~R 303 each independently represents a hydrogen atom or an alkyl group; R 304 and R 305 each independently represents a substituent.

[0154] Specific examples of the compounds represented by formulae (UV-1) to (UV-3) include the following compounds. [ka]

[0155] The content of the ultraviolet absorbent is preferably 0.01 to 10% by mass, more preferably 0.01 to 5% by mass, based on the total solid content of the colored photosensitive composition. In the present invention, only one type of ultraviolet absorbent may be used, or two or more types may be used. When two or more types are used, the total amount is preferably within the above range.

[0156] <<Antioxidants>> The colored photosensitive composition may contain an antioxidant. Examples of the antioxidant include phenolic compounds, phosphite compounds, and thioether compounds. As the phenolic compound, any phenolic compound known as a phenolic antioxidant may be used. Examples of preferred phenolic compounds include hindered phenolic compounds. Compounds having a substituent at the site (ortho position) adjacent to the phenolic hydroxy group are preferred. As the aforementioned substituent, a substituted or unsubstituted alkyl group having 1 to 22 carbon atoms is preferred. In addition, as the antioxidant, a compound having a phenolic group and a phosphite group in the same molecule is also preferred. As the antioxidant, a phosphorus-based antioxidant may also be suitably used. Examples of phosphorus-based antioxidants include tris[2-[[2,4,8,10-tetrakis(1,1-dimethylethyl)dibenzo[d,f][1,3,2]dioxaphosphepin-6-yl]oxy]ethyl]amine, tris[2-[(4,6,9,11-tetra-tert-butyldibenzo[d,f][1,3,2]dioxaphosphepin-2-yl)oxy]ethyl]amine, and ethyl bis(2,4-di-tert-butyl-6-methylphenyl)phosphite. Examples of commercially available antioxidants include ADK STAB AO-20, ADK STAB AO-30, ADK STAB AO-40, ADK STAB AO-50, ADK STAB AO-50F, ADK STAB AO-60, ADK STAB AO-60G, ADK STAB AO-80, and ADK STAB AO-330 (all manufactured by ADEKA CORPORATION).

[0157] The content of the antioxidant is preferably 0.01 to 20% by mass, more preferably 0.3 to 15% by mass, based on the total solid content of the colored photosensitive composition. Only one type of antioxidant may be used, or two or more types may be used. When two or more types are used, the total amount is preferably within the above range.

[0158] <<Other ingredients>> The colored photosensitive composition of the present invention may contain, as necessary, a sensitizer, a curing accelerator, a filler, a heat curing accelerator, a plasticizer, and other auxiliaries (for example, conductive particles, a filler, an antifoaming agent, a flame retardant, a leveling agent, a peeling accelerator, a fragrance, a surface tension adjuster, a chain transfer agent, etc.). By appropriately incorporating these components, it is possible to adjust the properties such as film properties. For these components, for example, the description in paragraphs 0183 and after of JP-A-2012-003225 (corresponding to paragraph 0237 of US Patent Application Publication No. 2013 / 0034812) and the description in paragraphs 0101 to 0104, 0107 to 0109, etc. of JP-A-2008-250074 can be referred to, and the contents of these are incorporated herein. In addition, the colored photosensitive composition of the present invention may contain, as necessary, a latent antioxidant. Examples of latent antioxidants include compounds in which the site functioning as an antioxidant is protected by a protecting group, and the protecting group is removed by heating at 100 to 250° C. or at 80 to 200° C. in the presence of an acid / base catalyst, thereby functioning as an antioxidant. Examples of latent antioxidants include compounds described in International Publication WO2014 / 021023, International Publication WO2017 / 030005, and JP2017-008219A. Examples of commercially available products include ADEKA ARCLES GPA-5001 (manufactured by ADEKA Corporation).

[0159] The viscosity (23°C) of the colored photosensitive composition of the present invention is preferably 1 to 100 mPa·s, for example, when the composition is applied to form a film. The lower limit is more preferably 2 mPa·s or more, and even more preferably 3 mPa·s or more. The upper limit is more preferably 50 mPa·s or less, even more preferably 30 mPa·s or less, and particularly preferably 15 mPa·s or less.

[0160] <Containment Container> The container for storing the colored photosensitive composition of the present invention is not particularly limited, and any known container can be used. In addition, it is also preferable to use a multi-layer bottle whose inner wall is made of six types of six-layer resin or a bottle with a seven-layer structure made of six types of resin, in order to prevent impurities from being mixed into the raw materials or the composition. Examples of such containers include the container described in JP-A-2015-123351.

[0161] <Method for preparing colored photosensitive composition> The colored photosensitive composition of the present invention can be prepared by mixing the above-mentioned components. When preparing the colored photosensitive composition, all the components may be dissolved or dispersed in a solvent at the same time to prepare the colored photosensitive composition, or, if necessary, two or more solutions or dispersions in which the components are appropriately mixed may be prepared in advance, and these may be mixed at the time of use (at the time of application) to prepare the colored photosensitive composition.

[0162] In addition, when the colored photosensitive composition of the present invention contains particles such as pigments, it is preferable to include a process for dispersing the particles. In the process for dispersing the particles, the mechanical force used for dispersing the particles includes compression, squeezing, impact, shear, cavitation, etc. Specific examples of these processes include a bead mill, a sand mill, a roll mill, a ball mill, a paint shaker, a microfluidizer, a high-speed impeller, a sand grinder, a flow jet mixer, high-pressure wet atomization, and ultrasonic dispersion. In addition, in the grinding of particles in a sand mill (bead mill), it is preferable to use beads with a small diameter, increase the bead packing rate, etc., and perform the treatment under conditions that increase the grinding efficiency. In addition, it is preferable to remove coarse particles by filtration, centrifugation, etc. after the grinding treatment. In addition, the process and dispersing machine for dispersing particles can be suitably used as described in "Dispersion Technology Encyclopedia, published by Information Technology Co., Ltd., July 15, 2005" or "Dispersion Technology and Industrial Applications Focused on Suspension (Solid / Liquid Dispersion System) Comprehensive Data Collection, published by Management Development Center Publishing Department, October 10, 1978", and JP2015-157893, paragraph number 0022. In the process for dispersing particles, the particles may be refined in a salt milling process. The materials, equipment, processing conditions, etc. used in the salt milling process can be found in, for example, JP2015-194521A and JP2012-046629A.

[0163] In preparing the colored photosensitive composition of the present invention, it is preferable to filter the colored photosensitive composition with a filter for the purpose of removing foreign matter and reducing defects. As the filter, any filter that has been used for filtering purposes can be used without any particular limitation. For example, filters using materials such as fluororesins such as polytetrafluoroethylene (PTFE), polyamide resins such as nylon (e.g., nylon-6, nylon-6,6), and polyolefin resins such as polyethylene and polypropylene (PP) (including high-density and ultra-high-molecular-weight polyolefin resins) can be used. Among these materials, polypropylene (including high-density polypropylene) and nylon are preferred. The pore size of the filter is suitably about 0.01 to 7.0 μm, preferably about 0.01 to 3.0 μm, and more preferably about 0.05 to 0.5 μm. If the pore size of the filter is within the above range, fine foreign matter can be reliably removed. It is also preferable to use a fibrous filter medium. Examples of the fibrous filter medium include polypropylene fiber, nylon fiber, and glass fiber. Specific examples include filter cartridges of the SBP type series (SBP008, etc.), TPR type series (TPR002, TPR005, etc.), and SHPX type series (SHPX003, etc.) manufactured by ROKI TECHNO CO., LTD.

[0164] When using filters, different filters (for example, a first filter and a second filter, etc.) may be combined. In this case, filtration with each filter may be performed only once or two or more times. Filters with different pore sizes may be combined within the above range. The pore sizes here can refer to the nominal values ​​of the filter manufacturers. Commercially available filters can be selected from various filters provided by, for example, Nippon Pall Corporation (DFA4201NXEY, etc.), Advantech Toyo Co., Ltd., Nippon Integris Co., Ltd. (formerly Nippon Microlith Co., Ltd.), Kitz Microfilter Co., Ltd., etc. The second filter may be made of the same material as the first filter. Alternatively, filtration with the first filter may be performed on only the dispersion liquid, and after mixing with other components, filtration with the second filter may be performed.

[0165] <Method of manufacturing optical filters> Next, a method for producing the optical filter of the present invention will be described. The method for producing an optical filter of the present invention comprises the steps of: a step of forming a colored photosensitive composition layer having an optical density of 1.6 or more with respect to light having a wavelength of 248 nm on a support using a colored photosensitive composition containing a color material and a curable compound (a colored photosensitive composition layer forming step); a step of patternwise exposing the colored photosensitive composition layer to light having a wavelength of 300 nm or less (exposure step); and a step of developing and removing the unexposed portions of the colored photosensitive composition layer to form pixels (developing step). Each step will be described below.

[0166] (Colored photosensitive composition layer formation step) A colored photosensitive composition layer having an optical density of 1.6 or more for light with a wavelength of 248 nm is formed on a support using a colored photosensitive composition containing a coloring material and a curable compound.

[0167] The optical density of the colored photosensitive composition layer can be adjusted to be within the above range by appropriately adjusting the type and concentration of the coloring material and the film thickness of the colored photosensitive composition layer. The optical density of the colored photosensitive composition layer is preferably 1.8 or more, more preferably 2.0 or more. The upper limit is not particularly limited, but can be 3.5 or less. As the colored photosensitive composition, it is preferable to use the colored photosensitive composition of the present invention described above. The film thickness of the colored photosensitive composition layer is preferably 300 to 1,000 nm. The lower limit is preferably 400 nm or more, more preferably 500 nm or more. The upper limit is preferably 800 nm or less, more preferably 600 nm or less.

[0168] Examples of the support include substrates made of materials such as silicon, alkali-free glass, soda glass, Pyrex (registered trademark) glass, and quartz glass. It is also preferable to use an InGaAs substrate. A charge-coupled device (CCD), a complementary metal oxide semiconductor (CMOS), a transparent conductive film, and the like may be formed on the support. A black matrix for isolating each pixel may be formed on the support. If necessary, an undercoat layer may be provided on the support to improve adhesion with an upper layer, prevent diffusion of substances, or flatten the substrate surface.

[0169] The colored photosensitive composition can be applied to a support by a known method, such as a dropping method (drop casting), a slit coating method, a spray method, a roll coating method, a rotary coating method (spin coating), a casting coating method, a slit and spin method, a pre-wetting method (for example, a method described in JP-A-2009-145395), various printing methods such as inkjet (for example, on-demand method, piezo method, thermal method), ejection printing such as nozzle jet, flexographic printing, screen printing, gravure printing, reverse offset printing, and metal mask printing, a transfer method using a mold, and a nanoimprint method. The application method by inkjet is not particularly limited, and examples thereof include the method described in "Expanding and Usable Inkjet - Infinite Possibilities Seen in Patents -, published in February 2005, Sumibe Techno Research" (particularly pages 115 to 133), and the methods described in JP 2003-262716 A, JP 2003-185831 A, JP 2003-261827 A, JP 2012-126830 A, JP 2006-169325 A, etc. In addition, for the application method of the resin composition, the descriptions in International Publication WO2017 / 030174 A and International Publication WO2017 / 018419 A can be referred to, and the contents of these publications are incorporated herein by reference.

[0170] After the colored photosensitive composition is applied to the support, drying (prebaking) may be further performed. When prebaking is performed, the prebaking temperature is preferably 150° C. or less, more preferably 120° C. or less, and even more preferably 110° C. or less. The lower limit can be, for example, 50° C. or more, and can also be 80° C. or more. The prebaking time is preferably 10 to 3000 seconds, more preferably 40 to 2500 seconds, and even more preferably 80 to 2200 seconds. Drying can be performed using a hot plate, an oven, or the like.

[0171] (Exposure process) Next, the colored photosensitive composition layer formed on the support as described above is exposed to light having a wavelength of 300 nm or less in a pattern. The colored photosensitive composition layer is exposed to light through a mask having a predetermined mask pattern, so that the colored photosensitive composition layer can be exposed to light in a pattern. This allows the exposed portion of the colored photosensitive composition layer to be cured.

[0172] The light used for exposure may have a wavelength of 300 nm or less, and preferably has a wavelength of 180 to 300 nm. Specific examples include KrF rays (wavelength 248 nm) and ArF rays (wavelength 193 nm), and KrF rays (wavelength 248 nm) are preferred because the bonds of the coloring material and the curable compound contained in the colored photosensitive composition are less likely to be broken. In addition, exposure is preferably performed using a KrF ray scanner exposure machine. According to this embodiment, the alignment accuracy of exposure is good, and fine pixels can be easily formed.

[0173] The exposure dose is, for example, 1 to 2000 mJ / cm 2 The upper limit is 1000 mJ / cm 2 Less than 500 mJ / cm is preferable. 2 More preferably, the lower limit is 5 mJ / cm 2 More than 10 mJ / cm is preferable. 2 More preferably, 20 mJ / cm or more. 2 The above is more preferable.

[0174] The oxygen concentration during exposure can be appropriately selected. In addition to exposure in air, exposure may be performed in a low-oxygen atmosphere with an oxygen concentration of 19 volume% or less (e.g., 15 volume%, 5 volume%, or substantially oxygen-free), or in a high-oxygen atmosphere with an oxygen concentration of more than 21 volume% (e.g., 22 volume%, 30 volume%, or 50 volume%). The exposure illuminance can be appropriately set, and is usually 1000 W / m 2 ~100000W / m 2 (For example, 5000W / m 2 , 15000W / m 2 , 35000W / m 2The oxygen concentration and exposure illuminance may be appropriately combined. For example, the oxygen concentration is 10% by volume and the illuminance is 10,000 W / m 2 , oxygen concentration 35% by volume, illuminance 20000W / m 2 etc.

[0175] (Developing process) Next, the colored photosensitive composition layer in the unexposed portion of the colored photosensitive composition layer after the exposure step is developed and removed to form pixels (patterns). The colored photosensitive composition layer in the unexposed portion can be developed and removed using a developer. As a result, the colored photosensitive composition layer in the unexposed portion is dissolved in the developer, and only the portion photocured in the exposure step remains on the support. The developer is preferably an alkaline developer that does not damage the underlying solid-state imaging element or circuit. The temperature of the developer is preferably, for example, 20 to 30°C. The development time is preferably 20 to 180 seconds. In order to improve the removability of residues, the process of shaking off the developer every 60 seconds and supplying new developer may be repeated several times.

[0176] Examples of the alkaline agent used in the developer include organic alkaline compounds such as ammonia water, ethylamine, diethylamine, dimethylethanolamine, diglycolamine, diethanolamine, hydroxylamine, ethylenediamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, ethyltrimethylammonium hydroxide, benzyltrimethylammonium hydroxide, dimethylbis(2-hydroxyethyl)ammonium hydroxide, choline, pyrrole, piperidine, and 1,8-diazabicyclo[5.4.0]-7-undecene, and inorganic alkaline compounds such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium silicate, and sodium metasilicate. From the viewpoints of environment and safety, compounds with a large molecular weight are preferable as the alkaline agent. The developer is preferably an alkaline aqueous solution obtained by diluting these alkaline agents with pure water. The concentration of the alkaline agent in the alkaline aqueous solution is preferably 0.001 to 10% by mass, more preferably 0.01 to 1% by mass. A surfactant may also be added to the developer. From the viewpoint of convenience of transportation and storage, the developer may be prepared as a concentrated solution and then diluted to a required concentration when used. The dilution ratio is not particularly limited, but can be set in the range of, for example, 1.5 to 100 times. When using a developer made of such an alkaline aqueous solution, it is preferable to wash (rinse) with pure water after development.

[0177] After development and drying, additional exposure treatment or heating treatment (post-baking) can also be performed. Additional exposure treatment and post-baking are post-development treatments for completing the hardening of the film. When additional exposure treatment is performed, the light used for exposure is preferably g-line, h-line, i-line, etc., and more preferably i-line. Also, a combination of a plurality of these may be used. Examples of light sources include ultra-high pressure mercury lamps, metal halide lamps, and laser light sources. The illuminance is 500 to 100,000 W / m 2 The exposure dose is preferably, for example, 500 to 10,000 mJ / cm. 2When post-baking is performed, the post-baking temperature is, for example, preferably 50 to 240° C. From the viewpoint of film hardening, 180 to 230° C. is more preferable.

[0178] The film thickness of the pixel (pattern) to be formed is preferably selected appropriately depending on the type of pixel. For example, it is preferably 2.0 μm or less, more preferably 1.0 μm or less, and further preferably 0.3 to 1.0 μm. The upper limit is preferably 0.8 μm or less, more preferably 0.6 μm or less. The lower limit is preferably 0.4 μm or more.

[0179] The size (line width) of the formed pixel (pattern) is preferably selected appropriately depending on the application and type of pixel. For example, it is preferably 2.0 μm or less. The upper limit is preferably 1.0 μm or less, more preferably 0.9 μm or less. The lower limit is preferably 0.4 μm or more.

[0180] When manufacturing an optical filter having multiple types of pixels, at least one type of pixel may be formed through the above-mentioned process. The second and subsequent types of pixels may be formed through the same process as above. The light used for exposure in forming the second and subsequent types of pixels may be light with a wavelength of 300 nm or less, or may be light with a wavelength of more than 300 nm (e.g., i-line). EXAMPLES

[0181] The present invention will be described in more detail below with reference to examples. The materials, amounts used, ratios, processing contents, processing procedures, etc. shown in the following examples can be changed as appropriate without departing from the spirit of the present invention. Therefore, the scope of the present invention is not limited to the specific examples shown below. Unless otherwise specified, "parts" and "%" are based on mass.

[0182] <Measurement of weight average molecular weight (Mw) of resin) The weight average molecular weight of the resin was measured by gel permeation chromatography (GPC) under the following conditions. Column type: TOSOH TSKgel Super HZM-H, TOSOH TSKgel Super HZ4000, and TOSOH TSKgel Super HZ2000 connected together Developing solvent: Tetrahydrofuran Column temperature: 40℃ Flow rate (sample injection volume): 1.0 μL (sample concentration: 0.1% by mass) Device name: Tosoh HLC-8220GPC Detector: RI (refractive index) detector Calibration curve base resin: polystyrene resin

[0183] <Preparation of Colored Photosensitive Composition> The raw materials shown in the table below were mixed and then filtered through a nylon filter having a pore size of 0.45 μm (manufactured by Nippon Pall Co., Ltd.) to prepare a colored photosensitive composition having a solid content concentration of 20 mass %. The solid content concentration of the colored photosensitive composition was adjusted by the amount of propylene glycol monomethyl ether acetate (PGMEA) added.

[0184] [Table 1]

[0185] The raw materials listed in the above table are as follows: (Pigment dispersion) A1: Pigment dispersion prepared by the following method 10.7 parts by mass of CI Pigment Green 58, 2.7 parts by mass of CI Pigment Yellow 185, 1.3 parts by mass of pigment derivative Y1, 5.3 parts by mass of dispersant D1, and 80 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) were mixed, to which 230 parts by mass of zirconia beads having a diameter of 0.3 mm were added, and the mixture was dispersed for 3 hours using a paint shaker, and the beads were separated by filtration to prepare pigment dispersion A1. This pigment dispersion A1 had a solids concentration of 20% by mass and a pigment content of 13.4% by mass. Pigment derivative Y1: A compound having the following structure. [ka] Dispersant D1: Resin having the following structure (Mw=26,000, the number attached to the main chain is the molar ratio, and the number attached to the side chain is the number of repeating units.) [ka]

[0186] A2: Pigment dispersion prepared by the following method 230 parts by mass of zirconia beads having a diameter of 0.3 mm were added to a mixture of 9 parts by mass of CI Pigment Green 36, 6 parts by mass of CI Pigment Yellow 150, 2.5 parts by mass of pigment derivative Y1, 5 parts by mass of dispersant D1, and 77.5 parts by mass of propylene glycol monomethyl ether acetate (PGMEA), and the mixture was dispersed for 3 hours using a paint shaker. The beads were separated by filtration to prepare pigment dispersion A2. This pigment dispersion A2 had a solids concentration of 22.5% by mass and a colorant content of 15% by mass.

[0187] A3: Pigment dispersion prepared by the following method 230 parts by mass of zirconia beads having a diameter of 0.3 mm were added to a mixture of 9 parts by mass of CI Pigment Green 58, 6 parts by mass of CI Pigment Yellow 138, 2.5 parts by mass of pigment derivative Y1, 5 parts by mass of dispersant D1, and 77.5 parts by mass of propylene glycol monomethyl ether acetate (PGMEA), and the mixture was dispersed for 3 hours using a paint shaker. The beads were separated by filtration to prepare pigment dispersion A3. This pigment dispersion A3 had a solids concentration of 22.5% by mass and a colorant content of 15% by mass.

[0188] A4: Pigment dispersion prepared by the following method 10.5 parts by mass of CI Pigment Red 254, 4.5 parts by mass of CI Pigment Yellow 139, 2.0 parts by mass of pigment derivative Y1, 5.5 parts by mass of dispersant D1, and 77.5 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) were mixed, to which 230 parts by mass of zirconia beads having a diameter of 0.3 mm were added, and the mixture was dispersed for 3 hours using a paint shaker, and the beads were separated by filtration to prepare pigment dispersion A4. This pigment dispersion A4 had a solids concentration of 22.5% by mass and a colorant content of 15% by mass.

[0189] A5: Pigment dispersion prepared by the following method 10.5 parts by mass of CI Pigment Red 177, 4.5 parts by mass of CI Pigment Yellow 139, 2.0 parts by mass of pigment derivative Y2, 5.5 parts by mass of dispersant D2, and 77.5 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) were mixed, and 230 parts by mass of zirconia beads having a diameter of 0.3 mm were added to the mixture, which was dispersed for 3 hours using a paint shaker, and the beads were separated by filtration to prepare pigment dispersion A5. This pigment dispersion A5 had a solids concentration of 22.5% by mass and a colorant content of 15% by mass. Pigment derivative Y2: a compound having the following structure [ka] Dispersant D2: Resin having the following structure [ka]

[0190] A6: Pigment dispersion prepared by the following method 12 parts by mass of CI Pigment Blue 15:6, 3 parts by mass of CI Pigment Violet 23, 2.7 parts by mass of pigment derivative Y1, 4.8 parts by mass of dispersant D1, and 77.5 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) were mixed, and 230 parts by mass of zirconia beads having a diameter of 0.3 mm were added to the mixture, which was dispersed for 3 hours using a paint shaker, and the beads were separated by filtration to prepare pigment dispersion A6. This pigment dispersion A6 had a solids concentration of 22.5% by mass and a colorant content of 15% by mass.

[0191] A7: Pigment dispersion prepared by the following method 12 parts by mass of CI Pigment Blue 15:6, 3 parts by mass of V dye 1 described in paragraph number 0292 of JP 2015-041058 A, 2.7 parts by mass of pigment derivative Y1, 4.8 parts by mass of dispersant D1, and 77.5 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) were mixed, and 230 parts by mass of zirconia beads having a diameter of 0.3 mm were added to the mixture, which was dispersed for 3 hours using a paint shaker, and the beads were separated by filtration to prepare pigment dispersion A7. This pigment dispersion A7 had a solids concentration of 22.5% by mass and a colorant content of 15% by mass.

[0192] (resin) B1: Resin with the following structure (the numbers attached to the main chain are molar ratios. Mw=10,000, acid value=70 mgKOH / g, C=C value=1.4 mmol / g) B2: Resin with the following structure (the numbers attached to the main chain are molar ratios. Mw = 40,000, acid value = 95 mg KOH / g, C = C value = 9.2 mmol / g) B3: Resin with the following structure (the numbers attached to the main chain are molar ratios. Mw = 30,000, acid value = 110 mg KOH / g, C = C value = 0 mmol / g) [ka]

[0193] (Polymerizable monomer) M1: Compound having the following structure (C=C value=11.4 mmol / g) M2: Compound with the following structure (C=C value = 10.4 mmol / g) M3: Compound with the following structure (C=C value=5.4 mmol / g) [ka]

[0194] (Photopolymerization initiator) I1: IRGACURE-OXE01 (BASF, oxime compound) I2: Compound having the following structure (oxime compound) [ka] I3: IRGACURE-184 (BASF, α-hydroxyalkylphenone compound) I4: IRGACURE-TPO (BASF, acylphosphine compound) I5: Compound with the following structure (benzopinacol) [ka]

[0195] (Surfactant) W1: KF-6002 (Shin-Etsu Silicone Co., Ltd.) W2: The following mixture (Mw=14,000): In the following formula, % indicating the proportion of repeating units is mol %. [ka]

[0196] (Additives) T1: EHPE3150 (manufactured by Daicel Corporation, a compound having an epoxy group) T2: Compound having the following structure (silane coupling agent) [ka]

[0197] (solvent) PGMEA: Propylene glycol monomethyl ether acetate

[0198] <Optical density (OD value) measurement> The above colored photosensitive composition was applied onto a glass substrate by spin coating. Then, the substrate was heated at 100°C for 2 minutes using a hot plate to form a film having a thickness of 0.5 μm. Light having a wavelength of 248 nm was incident on the obtained film, and the transmittance was measured using a spectrometer (UV4100, manufactured by Hitachi High-Technologies Corporation) to measure the optical density (OD value) at a wavelength of 248 nm.

[0199] <Manufacturing of optical filters> 1 cm of silicon wafer 2 The above colored photosensitive composition was applied to the four areas by spin coating so that the film thickness after post-baking was 0.5 μm. Then, the composition was post-baked at 100° C. for 2 minutes using a hot plate. Next, a KrF scanner exposure machine (Canon, FPA-6000ES6a) was used to expose the composition to 200 mJ / cm 2 through a mask having a Bayer pattern with a pixel (pattern) size of 1 μm square. 2 The substrate was exposed to KrF radiation at an exposure dose of 1000 nm. Next, paddle development was performed at 23° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH). After that, the substrate was rinsed with a spin shower and further washed with pure water. Next, the substrate was heated at 200° C. for 5 minutes using a hot plate to form pixels (patterns).

[0200] <Evaluation of rectangularity> The cross section of the formed pixel (pattern) was observed using a scanning electron microscope (SEM). The angle between the bottom and the horizontal sides of the pixel a:88~92° b: 80~88° or 92~100° c:Other than the above year, Regarding the angle between the top and bottom edges of a pixel, a':87~93° b': 78~87° or 93~102° c':Other than the above The rectangularity was evaluated according to the following criteria. A: a and a'. B: a and b', or a' and b C: b and b' D: Contains either c or c'

[0201] <Evaluation of Adhesion> The formed pixels (patterns) were observed in plan view using an optical microscope, and the adhesion of the pixels (patterns) was evaluated according to the following criteria. A: 1cm 2 No peeling was observed for the 1 μm square pixels (patterns) formed in the four areas. B: 1cm 2 For a 1 μm square pixel (pattern) formed in the square area, 2 Peeling was observed in the pixels on the outermost periphery of the four areas, but no peeling was observed in the pixels formed inside the aforementioned areas. C:1cm 2 For pixels (patterns) of 1 μm square formed in the four areas, peeling occurred in more than 0% and 10% or less of the pixels formed inside the aforementioned area. D: 1cm 2 With respect to pixels (patterns) of 1 μm square formed in the four areas, peeling occurred in more than 10% of the pixels formed inside the aforementioned area.

[0202] [Table 2]

[0203] As shown in the above table, the embodiment was able to form pixels with better rectangular shape and adhesion than the comparative example.

[0204] Even when CI Pigment Red 254 in Pigment Dispersion A4 is replaced with the same amount of CI Pigment Red 264, the same effect as in Example 17 is obtained. In Examples 1 to 20, even when a squarylium compound is further added as an infrared absorbing dye, the same effects as those of each Example are obtained.

Claims

1. A colored photosensitive composition for forming a colored pixel, comprising a colorant, a curable compound, and a photopolymerization initiator, the coloring material includes a chromatic coloring material including a green coloring material; the content of the chromatic colorant in the total mass of the coloring material is 65% by mass or more, and the content of the green colorant in the total mass of the coloring material is 50% by mass or more, the content of the coloring material is 50% by mass or more and the content of the chromatic colorant is 50% by mass or more in the total solid content of the colored photosensitive composition, The curable compound includes a resin and a polymerizable monomer, The polymerizable monomer has a polymerizable group value of 10.0 mmol / g or more, the resin includes a resin having an acid group, the acid group of the resin being a carboxyl group; the content of the polymerizable monomer is 13% by mass or less based on the total solid content of the colored photosensitive composition, a total content of the polymerizable monomer and the resin is 20 to 40% by mass based on a total solid content of the colored photosensitive composition, the content of the resin having an acid group is 7 to 35% by mass based on the total solid content of the colored photosensitive composition, The polymerizable monomer is contained in an amount of 5 to 80 parts by mass relative to 100 parts by mass of the resin having an acid group, When the colored photosensitive composition is used to form a film having a thickness of 0.5 μm after drying, the film has an optical density of 1.6 or more with respect to light having a wavelength of 248 nm. A colored photosensitive composition for forming colored pixels, which is used for forming colored pixels by a photolithography method by exposure to light having a wavelength of 300 nm or less.

2. 2. The colored photosensitive composition according to claim 1, which is a colored photosensitive composition for exposure to KrF rays.

3. 3. The colored photosensitive composition according to claim 1, wherein the content of the coloring material in the total solid content of the colored photosensitive composition is 54 mass % or more.

4. 4. The colored photosensitive composition according to claim 1, wherein the polymerizable monomer has a polymerizable group value of 10.5 mmol / g or more.

5. 5. The colored photosensitive composition according to claim 1, wherein the polymerizable monomer is a compound having 3 to 6 ethylenically unsaturated bond groups.

6. The colored photosensitive composition according to any one of claims 1 to 5, wherein the photopolymerization initiator is at least one compound selected from the group consisting of an alkylphenone compound, an acylphosphine compound, a benzophenone compound, a thioxanthone compound, a triazine compound, a pinacol compound, and an oxime compound.

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