Actuator coil substrate and actuator

Abstract

To provide a coil substrate for an actuator having a coil which allows molding while suppressing size increase of an armature and increase of the number of components.SOLUTION: A coil substrate for an actuator comprises: a flexible insulation substrate 11 wound around a shaft; and a plurality of coils printed by being arranged in an axial direction on the flexible insulation substrate 11. Each of the plurality of coils comprises a conductor arranged to extend in a circumferential direction of the shaft. In the coils, travel directions become opposite at a part where a first linear part faces a second linear part connected with the first linear part via a folding part when the conductor is tracked to travel in one direction from one end to the other end in a longitudinal direction. The plurality of coils are connected in series or in parallel among the same phases to which a phase of current flowing to the conductor matches. The flexible insulation substrate 11 is cylindrically wound in a long side direction of each of the plurality of coils, or wound so that a cross section orthogonal to the shaft becomes a polygon.SELECTED DRAWING: Figure 13

Description

[Technical field]

[0001] The present disclosure relates to a coil substrate for an actuator and an actuator. [Background technology]

[0002] Parallel actuators are used for chip mounting applications in semiconductor manufacturing equipment. One type of actuator is a shaft-type linear motor that has a shaft-shaped magnet with a higher magnetic flux utilization rate than a flat magnet. In the following, a shaft-type linear motor that has a shaft-shaped magnet will be referred to as a shaft linear. A typical shaft linear armature is constructed by creating multiple coils wound in a cylindrical shape, arranging the multiple coils at predetermined intervals using a holding member or bobbin, and then connecting the ends of the coils (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2007-6637 A Summary of the Invention [Problem to be solved by the invention]

[0004] The coil disclosed in Patent Document 1 uses magnet wire for winding, and is formed by winding the magnet wire into a cylindrical shape. Since the shaft linear is used for the head of a chip mounter, the coil of the shaft linear is often small and small in diameter. Therefore, it is difficult to precisely form the magnet wire into a cylinder, and the winding collapses and the windings cross over each other. The collapse of the winding and the cross over of the windings are factors that cause the coil to become enlarged. When multiple coils are arranged, the axial position deviation is likely to occur, and the thrust pulsation of the actuator increases due to the occurrence of an electrical phase deviation within the same phase. The invention according to claim 6 of Patent Document 1 is provided with a winding member represented by a bobbin, and the invention is capable of suppressing the axial position deviation to some extent by the winding member. However, the invention has problems in that the number of parts increases due to the winding member, the manufacturing cost increases, and the entire armature becomes enlarged. The enlargement of the entire armature affects the enlargement of the entire shaft linear.

[0005] The present disclosure has been made in view of the above, and has an object to provide a coil substrate for an actuator having a coil that can be formed while suppressing an increase in the size of the armature and an increase in the number of parts. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the coil substrate for actuator according to the present disclosure has a flexible insulating substrate wound around an axis, and a plurality of coils printed on the flexible insulating substrate in an axial direction. Each of the plurality of coils has a conductor arranged to extend in the circumferential direction of the axis. When the conductor of the coil is traced in one direction from one end to the other end in the longitudinal direction, the direction of progression is reversed at a portion where a first straight portion and a second straight portion connected to the first straight portion via a folded portion face each other. The plurality of coils are connected in series or in parallel between the same phases of the current flowing through the conductor. The flexible insulating substrate is wound cylindrically in the long side direction of each of the plurality of coils, or is wound so that the cross section perpendicular to the axis is polygonal. Each turn of the coil winding is formed by connecting the conductors printed separately on the front side and the back side of the flexible insulating substrate via inner vias, and the loops of each winding are offset in the axial direction, forming a distributed winding. The flexible insulating substrate has coils printed on both sides, and has an insulating layer between a portion of the conductor printed on the inner surface of the flexible insulating substrate in the wound state and a portion of the conductor printed on the outer surface of the flexible insulating substrate that is located inside the portion of the conductor printed on the outer surface of the flexible insulating substrate in the wound state. Effect of the Invention

[0007] The actuator coil substrate according to the present disclosure has an effect of being able to have a coil that can be molded while suppressing an increase in the size of the armature and an increase in the number of parts. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a perspective view of an actuator coil substrate according to a first embodiment; [Diagram 2] FIG. 1 is a schematic diagram of an actuator coil substrate before a flexible insulating substrate of the actuator coil substrate according to the first embodiment is wound around the substrate; [Diagram 3] FIG. 1 is a schematic diagram of a coil substrate for an actuator in the middle of winding a flexible insulating substrate of the coil substrate for an actuator according to the first embodiment; [Figure 4] FIG. 1 is a perspective view of an actuator coil substrate according to a first embodiment; [Diagram 5]FIG. 5 is a schematic cross-section of the actuator coil substrate according to the first embodiment when the flexible insulating substrate of FIG. 4 is cut along one cross section. [Figure 6] FIG. 13 is a perspective view of an actuator coil substrate according to a second embodiment; [Figure 7] FIG. 13 is a schematic diagram of an actuator coil substrate in the middle of winding a flexible insulating substrate of the actuator coil substrate according to the second embodiment; [Figure 8] 7 is a cross-sectional view of a coil substrate for an actuator according to embodiment 2 when the flexible insulating substrate of FIG. 6 is cut along one cross section. [Figure 9] FIG. 13 is a perspective view of an actuator coil substrate according to a third embodiment; [Figure 10] FIG. 13 is a schematic diagram of an actuator coil substrate according to a third embodiment before a flexible insulating substrate is wound around the actuator coil substrate; [Figure 11] Schematic diagram of an actuator coil substrate according to a fourth embodiment. [Figure 12] Schematic diagram of an actuator coil substrate according to a fourth embodiment. [Figure 13] A diagram showing an example of a coil pattern that is not concentrated winding [Figure 14] A diagram showing an example of a coil pattern that is not concentrated winding [Figure 15] Schematic diagram of an actuator coil substrate according to a fifth embodiment. [Figure 16] Schematic diagram of an actuator coil substrate according to a sixth embodiment. [Figure 17] FIG. 13 is a perspective view of an actuator according to a seventh embodiment; [Figure 18] FIG. 13 is a perspective view of an actuator according to a seventh embodiment; [Figure 19] 13 is a cross-sectional view of one section of the actuator according to the seventh embodiment. [Figure 20] 13 is a cross-sectional view of one section of the actuator according to the seventh embodiment. [Figure 21] FIG. 23 is a perspective view of an actuator according to an eighth embodiment. [Figure 22]FIG. 23 is a perspective view of an actuator according to an eighth embodiment. [Figure 23] 13 is a cross-sectional view of one section of the actuator according to the eighth embodiment. [Figure 24] 13 is a cross-sectional view of one section of the actuator according to the eighth embodiment. [Diagram 25] FIG. 13 is a perspective view of an actuator according to a ninth embodiment. [Figure 26] FIG. 13 is a perspective view of an actuator according to a ninth embodiment. [Figure 27] 13 is a cross-sectional view of one section of the actuator according to the ninth embodiment. [Figure 28] 13 is a cross-sectional view of one section of the actuator according to the ninth embodiment. [Figure 29] FIG. 23 is a perspective view of an actuator according to a tenth embodiment; [Diagram 30] FIG. 23 is a perspective view of an actuator according to a tenth embodiment; [Diagram 31] 13 is a cross-sectional view of one section of the actuator according to the tenth embodiment. [Diagram 32] 13 is a cross-sectional view of one section of the actuator according to the tenth embodiment. [Diagram 33] FIG. 23 is a perspective view of an actuator according to an eleventh embodiment; [Diagram 34] FIG. 23 is a perspective view of an actuator according to an eleventh embodiment; [Diagram 35] 13 is a cross-sectional view of one section of an actuator according to an eleventh embodiment. [Diagram 36] 13 is a cross-sectional view of one section of an actuator according to an eleventh embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a coil substrate for an actuator and an actuator according to an embodiment will be described in detail with reference to the drawings.

[0010] Embodiment 1 FIG. 1 is a perspective view of an actuator coil substrate 1 according to the first embodiment. FIG. 1 shows the actuator coil substrate 1 in a schematic manner. The actuator coil substrate 1 has a flexible insulating substrate 11 wound around a shaft 10, and three coils 21, 22, and 23 printed on the flexible insulating substrate 11. The shaft 10 does not actually exist. The shaft 10 is shown in FIG. 1 to explain the actuator coil substrate 1. The three coils 21, 22, and 23 are arranged side by side in the axial direction. The three coils 21, 22, and 23 are examples of a plurality of coils. Each of the three coils 21, 22, and 23 is made of a conductor 30. The conductor 30 is arranged so that a part of the conductor 30 extends in the direction in which the shaft 10 is wound. The direction in which the shaft 10 is wound is the circumferential direction of a cylinder with the shaft 10 as the central axis.

[0011] Each of the three coils 21, 22, 23 has a shape having a longitudinal direction and a lateral direction. The conductor 30 in the longitudinal direction of each of the three coils 21, 22, 23 is wound around the axis 10. The conductor 30 extending in the longitudinal direction of each of the three coils 21, 22, 23 is located on a plane perpendicular to the axis 10. The flexible insulating substrate 11 is wound in a cylindrical shape in the long side direction of each of the three coils 21, 22, 23. Alternatively, the flexible insulating substrate 11 is wound so that the cross section perpendicular to the axis 10 is polygonal. That is, the flexible insulating substrate 11 becomes cylindrical by being wound around the axis 10. Alternatively, the cross section of the flexible insulating substrate 11 perpendicular to the axis 10 is substantially polygonal. In a cross section perpendicular to the axis 10 of the actuator coil substrate 1, the conductor 30 of each of the three coils 21, 22, 23 may be wound in a spiral shape.

[0012] Each of the three coils 21, 22, and 23 is arranged such that the conductor 30 in the short direction is arranged in the axial direction and the conductor 30 in the long direction is wound around the axis 10. Each of the three coils 21, 22, and 23 may be arranged to wind the axis 10 one or more times. When the conductor 30 of each of the three coils 21, 22, and 23 is viewed in a cross section perpendicular to the axis 10, any half line extending radially from the axis 10 may pass through the conductor 30 multiple times, or a half line extending radially from the axis 10 may pass through the conductor 30 multiple times over the entire circumference. The direction of the half line extending from the axis 10 in the cross section perpendicular to the axis 10 is called the radial direction, and the direction perpendicular to the radial direction and going around the axis 10 is called the circumferential direction. The half line passing through the conductor 30 multiple times means that the conductor 30 overlaps multiple times in the radial direction. The conductors 30 of each of the three coils 21, 22, and 23 are arranged to extend in the circumferential direction of the axis 10.

[0013] The conductor 30 extending in the longitudinal direction of each of the three coils 21, 22, 23 may be arranged in a plane that is not perpendicular to the axis 10. In this case, when the conductor 30 is wound around the flexible insulating substrate 11 one or more times, the extending portion of the conductor 30 has a spiral shape. The conductor 30 may be bent midway in the longitudinal direction and extend in the longitudinal direction while having a step. In this case, the wound conductor 30 is arranged in multiple planes with respect to the axis 10.

[0014] The actuator coil substrate 1 is formed by winding a flexible insulating substrate 11 having three coils 21, 22, 23 printed on one side into a cylindrical shape. FIG. 2 is a schematic diagram of the actuator coil substrate 1 before winding the flexible insulating substrate 11 included in the actuator coil substrate 1 according to the first embodiment. FIG. 2 also shows the three coils 21, 22, 23 printed on one side of the flexible insulating substrate 11. The three coils 21, 22, 23 are arranged in parallel. The straight portion in the longitudinal direction of the conductor 30 of each of the three coils 21, 22, 23 is folded back at the end portion and connected to another straight portion in the longitudinal direction of the same coil via the folded back portion.

[0015] If the conductor 30 of each of the three coils 21, 22, and 23 is traced in one direction in the longitudinal direction from one end to the other, the first straight portion and the second straight portion connected to the first straight portion via a folded portion will proceed in opposite directions at the opposing portions. When the flexible insulating substrate 11 is wound around the axis 10, the proceeding direction of each of the first straight portion and the second straight portion will be the circumferential direction. When a current flows through the conductor 30 of each of the three coils 21, 22, and 23, the direction in which the current flows will be the direction in which the current proceeds through the first straight portion and the second straight portion.

[0016] Although three coils 21, 22, and 23 are shown in Fig. 2, the number of coils printed on the flexible insulating substrate 11 is arbitrary. Each of the three coils 21, 22, and 23 has a long side 20 in a direction perpendicular to the direction in which the three coils 21, 22, and 23 are arranged. In other words, each of the three coils 21, 22, and 23 has a long side 20 in a circumferential direction. Although the long side 20 is shown to extend linearly in Fig. 2, the long side 20 may be bent or curved along the way.

[0017] FIG. 3 is a schematic diagram of the actuator coil substrate 1 in the middle of being wound with the flexible insulating substrate 11 included in the actuator coil substrate 1 according to the first embodiment. In FIG. 3, the flexible insulating substrate 11 is wound in the longitudinal direction of each of the three coils 21, 22, and 23. In FIG. 3, the flexible insulating substrate 11 is wound so that the coil print surface is located on the outside. The coil print surface is one of the two flat surfaces of the flexible insulating substrate 11 on which the three coils 21, 22, and 23 are printed. The flexible insulating substrate 11 may be wound so that the coil print surface is located on the inside. Depending on the radius of the cylindrical shape, the flexible insulating substrate 11 may overlap in the radial direction in some parts, but since the flexible insulating substrate 11 has insulating properties, there is no risk of a short circuit occurring even if the coil print surface comes into contact with one of the two flat surfaces of the flexible insulating substrate 11 that is not the coil print surface.

[0018] Fig. 4 is a perspective view of the actuator coil substrate 1 according to embodiment 1. Fig. 4 typically shows the actuator coil substrate 1 shown in Fig. 1, and also shows cross sections A, B, and C for explaining the actuator coil substrate 1. Fig. 5 typically shows a cross section of the actuator coil substrate 1 according to embodiment 1 when the flexible insulating substrate 11 in Fig. 4 is cut at cross section A.

[0019] When the coils 21, 22, and 23 are printed on the flexible insulating substrate 11 according to the design values ​​and the flexible insulating substrate 11 is wound without any gaps, the conductors 30 constituting each of the three coils 21, 22, and 23 are arranged in the axial direction of the cylindrical flexible insulating substrate 11 at a pitch interval determined by the print pattern and in the radial direction at an interval equal to the thickness of the flexible insulating substrate 11. The number of turns of each of the three coils 21, 22, and 23 is the total number of conductors 30 aligned in a cross section perpendicular to the axis 10, and is the product of the number of turns before winding the flexible insulating substrate 11 and the number of layers of the flexible insulating substrate 11 stacked in the radial direction. In FIG. 5, the number of turns per coil is 4 turns because the number of turns before winding is 2 and the number of layers of the flexible insulating substrate 11 is 2. However, the number of turns is arbitrary.

[0020] Possible factors that cause misalignment of the aligned windings include the etching tolerance of the print pattern, misalignment between layers when the flexible insulating substrate 11 is wound, and the occurrence of gaps due to winding bulge, but the misalignment of the windings is estimated to be less than 0.1 mm in any case. The amount of misalignment of the windings does not depend on the cross-sectional dimensions of the windings. In contrast, the amount of misalignment when a coil is formed from magnet wire and collapses is expected to be anywhere from 1 to an integer multiple of 2 or more times the side length of the winding cross section. The side length is the winding diameter when the cross section is circular. Since the finished outer diameter of a typical winding is 0.1 mm or more, the amount of misalignment of the windings that occurs in the coil structure of embodiment 1 is smaller than the amount of misalignment that occurs in magnet wire coils of almost all winding types.

[0021] Focusing on the amount of misalignment between the coils, in the coil structure of the first embodiment, only the etching tolerance of the print pattern contributes to the misalignment between the coils, and it is estimated that the amount of misalignment is 0.01 mm or less. This is clearly smaller than the amount of misalignment after winding the magnet wire coil. Furthermore, in the coil structure of the first embodiment, since no holding member such as a bobbin is required to position the coil, it is possible to prevent an increase in the number of parts and a decrease in the winding space.

[0022] In the actuator coil substrate 1 according to the first embodiment, the rigidity of the flexible insulating substrate 11 does not change much anywhere in the circumferential direction. For example, the cross-sectional shape does not change at all at cross sections A and B in Fig. 4, and since the flexible insulating substrate 11 has a single layer at cross section C, the rigidity at cross section C is lower than the rigidity at cross sections A and B. However, as the number of turns of the flexible insulating substrate 11 increases, the difference between the rigidity of the flexible insulating substrate 11 at cross sections A and B and the rigidity of the flexible insulating substrate 11 at cross section C becomes smaller.

[0023] In this way, when the number of turns of the flexible insulating substrate 11 is increased, the rigidity of the flexible insulating substrate 11 becomes more uniform in the circumferential direction. Therefore, when the number of turns of the flexible insulating substrate 11 is increased, in addition to improving the workability when winding the flexible insulating substrate 11, the end face in the axial direction after winding is less likely to be distorted, and it is possible to prevent the windings from approaching each other locally in the circumferential direction. As a result, even if the gap between the conductors 30 in the circumferential direction is narrowed, the insulating performance is maintained, and it is possible to improve the conductor space factor of the actuator.

[0024] As described above, the actuator coil substrate 1 according to the first embodiment has a flexible insulating substrate 11 wound around the shaft 10, and three coils 21, 22, 23 printed and aligned in the axial direction on the flexible insulating substrate 11. Each of the three coils 21, 22, 23 has a conductor 30 arranged so as to extend in the circumferential direction of the shaft 10. The flexible insulating substrate 11 is wound cylindrically in the long side direction of each of the three coils 21, 22, 23, or wound so that a cross section perpendicular to the shaft 10 is polygonal.

[0025] Since the conductor 30 is printed on the flexible insulating substrate 11, the intersection of the windings and the positional misalignment between the coils are minimal, and as a result, the actuator coil substrate 1 according to embodiment 1 can suppress the enlargement of the coil and the increase in thrust pulsation. Also, since the winding direction of the flexible insulating substrate 11 coincides with the long side direction of the coil, the rigidity of the flexible insulating substrate 11 is uniform in the same direction, and as a result, the actuator coil substrate 1 has the effect of making it easier to wind the flexible insulating substrate 11 during manufacturing.

[0026] The effect obtained by the coil substrate 1 for actuator according to the first embodiment will be further mentioned. The flexible insulating substrate 11 is easily deformed, and it is possible to wind the flexible insulating substrate 11 together with the printed coil. The insulation between the coils is ensured by the insulating material of the flexible insulating substrate 11 or by providing a separate insulating layer. The interval between the conductors 30 of the coil wound in this way is determined in the axial direction by the printing accuracy at the time of manufacturing the substrate, and in the radial direction by the thickness of the flexible insulating substrate 11 or the thickness of the insulating layer. The interval between the conductors 30 in the axial direction means the interval between the conductors 30 in the vertical direction of the cross section shown in FIG. 5, and the interval between the conductors 30 in the radial direction means the interval between the conductors 30 in the horizontal direction of the cross section shown in FIG. 5. The alignment of the conductors 30 is generally very high compared to the case where magnet wire is wound. Therefore, in the coil substrate 1 for actuator, the winding collapse and the windings are less likely to cross, and the coil substrate 1 for actuator can suppress the enlargement of the coil. The coils printed in the axial direction are not misaligned beyond the printing accuracy, and the increase in thrust pulsation can be suppressed. Furthermore, the actuator coil substrate 1 can have coils that can be molded while suppressing an increase in the size of the armature and an increase in the number of parts.

[0027] Embodiment 2 Fig. 6 is a perspective view of an actuator coil board 1A according to embodiment 2. Fig. 6 shows the actuator coil board 1A in a schematic diagram. The actuator coil board 1A differs from the actuator coil board 1 according to embodiment 1 in that coils are printed on both sides of a flexible insulating substrate 11. The coils printed on both sides of the flexible insulating substrate 11 are connected via vias. The number of turns in the actuator coil board 1A is twice as many as the number of turns when the coil is printed on only one side of the flexible insulating substrate 11.

[0028] Fig. 6 shows three coils 21, 22, 23 printed on the front side of flexible insulating substrate 11, and coil 21 printed on the back side of flexible insulating substrate 11. The front side of flexible insulating substrate 11 is the outer surface of flexible insulating substrate 11 when flexible insulating substrate 11 is wound around shaft 10 to form a cylinder, and the back side of flexible insulating substrate 11 is the inner surface of flexible insulating substrate 11 when flexible insulating substrate 11 is wound around shaft 10 to form a cylinder. Fig. 6 also shows cross section E for explaining actuator coil substrate 1A.

[0029] FIG. 7 is a schematic diagram of the actuator coil substrate 1A in the middle of winding the flexible insulating substrate 11 of the actuator coil substrate 1A according to the second embodiment. In the second embodiment, the coil on one side, or the coil on the back side in FIG. 7, is coated with an insulating layer 28 for ensuring insulation performance. For example, the coating of the insulating layer 28 is performed by applying a solder resist to the surface on which the coil is printed, or by attaching an insulating sheet to the surface on which the coil is printed. By coating the insulating layer 28 on the coil on one side, the coils on both sides are not short-circuited even if the flexible insulating substrate 11 is wound and the inner coil and the outer coil come into contact with each other as shown in FIG. 7. The insulating layer 28 may be provided on both sides of the flexible insulating substrate 11.

[0030] FIG. 8 is a cross-sectional view of the actuator coil board 1A according to the second embodiment when the flexible insulating substrate 11 in FIG. 6 is cut at the cross section E. FIG. 8 shows a schematic cross section of the actuator coil board 1A. The number of turns of the coil when the coil is arranged on both sides of the flexible insulating substrate 11 is twice as many as the number of turns of the coil when the coil is arranged only on one side of the flexible insulating substrate 11. In the actuator coil board 1A according to the second embodiment shown in FIG. 6, the number of turns is 8. Therefore, when forming a coil with the same number of turns, the length of the flexible insulating substrate 11 in the winding direction can be reduced by half in the actuator coil board 1A according to the second embodiment compared to the case where the coil is arranged only on one side of the flexible insulating substrate 11, and the maximum dimension of the flexible insulating substrate 11 during the manufacture of the actuator coil board 1A can be alleviated.

[0031] Embodiment 3 Fig. 9 is a perspective view of an actuator coil substrate 1B according to embodiment 3. Fig. 9 typically illustrates the actuator coil substrate 1B. Fig. 10 is a typical view of the actuator coil substrate 1B according to embodiment 3 before a flexible insulating substrate 11 included in the actuator coil substrate 1B is wound around the actuator coil substrate 1B.

[0032] In the three coils 21, 22, and 23 of the actuator coil substrate 1B, it is the long side portions 20 of the three coils 21, 22, and 23 that generate thrust in the direction of travel of the actuator. The crossover portion 20A at the coil end that axially connects the long side portions 20 of the same phase does not contribute much to the thrust in the direction of travel of the actuator. Hereinafter, the crossover portion 20A is referred to as the "coil end portion 20A." In other words, the greater the proportion of the long side portions 20 in the three coils 21, 22, and 23 facing the magnets, the greater the thrust in the direction of travel of the actuator.

[0033] In the third embodiment, the length of the winding in the long side direction of each of the three coils 21, 22, 23 formed on the flexible insulating substrate 11 is configured to be equal to or greater than the inner circumferential length after the flexible insulating substrate 11 is formed into a cylinder. In other words, when the flexible insulating substrate 11 is wound, there are locations where the long side portions 20 overlap in the radial direction, and the first turn of the winding and the second and subsequent turns of the winding can be regarded as being connected in the circumferential direction for each of the three coils 21, 22, 23, and the proportion of the long side portions 20 can be increased.

[0034] For example, if the longitudinal portion of each of the three coils 21, 22, 23 is completed in one circumferential turn, then if the circumferential coil length is X and the length of the coil end portion 20A is α, the ratio of the long side portion 20 of the coil to the coil end portion 20A is expressed by the following equation (1). Long side portion 20: Coil end portion 20A = X-2α: 2α (1)

[0035] On the other hand, when flexible insulating substrate 11 is wound n times in the circumferential direction, the ratio of long side portion 20 to coil end portion 20A is expressed by the following formula (2). Long side portion 20: Coil end portion 20A =nX-2α:2α=X-2α / n:2α / n (2)

[0036] In the coil substrate 1B for actuator shown in FIG. 9, n>1, so the ratio between the long side portion 20 and the coil end portion 20A is expressed by formula (2). The ratio in formula (2) is greater than the ratio in formula (1). Therefore, in the coil structure of embodiment 3, the thrust in the direction of movement of the actuator is greater than when the longitudinal portions of each of the three coils 21, 22, and 23 are completed in one circumferential turn. Also, as can be seen from formula (2), the greater the number of turns n of the flexible insulating substrate 11, the greater the ratio of the long side portion 20 and the greater the rate of increase in thrust.

[0037] In the actuator coil substrate 1B according to the third embodiment, the length of the long side portion 20 in the winding direction of the flexible insulating substrate 11 in each of the three coils 21, 22, 23 is longer than the inner peripheral length of the cylinder after the flexible insulating substrate 11 is wound around the cylinder. The long side portion 20 that contributes to thrust is wound one or more times, and the proportion of the long side portion 20 per coil length increases, so that the actuator coil substrate 1B contributes to increasing the thrust of an actuator having the actuator coil substrate 1B.

[0038] Embodiment 4 Fig. 11 and Fig. 12 are both schematic diagrams of an actuator coil substrate 1C according to embodiment 4. In Fig. 11 and Fig. 12, the spiral object is a coil. Fig. 11 and Fig. 12 show the actuator coil substrate 1C before the flexible insulating substrate 11 is wound. Fig. 11 shows the actuator coil substrate 1C on the front side of the flexible insulating substrate 11, and Fig. 12 shows the actuator coil substrate 1C when the back side of the flexible insulating substrate 11 is seen through from the front side.

[0039] In the fourth embodiment, the winding direction of the flexible insulating substrate 11 is the up-down direction, and coils are printed on both sides of the flexible insulating substrate 11. The coil pattern is formed so that the axial center positions of each winding coincide. In other words, the coils are so-called concentrated winding coils. In Figs. 11 and 12, the connection portions beyond each coil end are omitted. The coils located at the same positions on the front and back of the axial direction of the flexible insulating substrate 11 are connected to two terminals A1, B1, ..., E1 located at the same positions via inner vias or the like. The axial direction is the left-right direction in Figs. 11 and 12.

[0040] Coils at different axial positions are connected in series or in parallel between the same phases of current. For example, when two coils are connected in series with three-phase current, terminals A2, B2, and C2 are the inflow sources of each phase current, terminal A3 is connected to terminal D2, terminal B3 is connected to terminal E2, terminal C3 is connected to terminal F2, and terminals D3, E3, and F3 are short-circuited.

[0041] Since the axial length of the shaft linear is finite, the flexible insulating substrate 11 also has ends in the axial direction. When the coil is a concentrated winding coil as shown in Figures 11 and 12, it is possible to arrange the coil up to both the left and right ends on both sides of the flexible insulating substrate 11.

[0042] Figures 13 and 14 are figures for comparison with Figures 11 and 12, and show examples of coil patterns that are not concentrated winding. In Figures 13 and 14, the spiral objects are coils. Figures 13 and 14 show the actuator coil substrate before the flexible insulating substrate 11 is wound around it. Figure 13 shows the actuator coil substrate on the front side of the flexible insulating substrate 11, and Figure 14 shows the actuator coil substrate when the back side of the flexible insulating substrate 11 is seen through from the front side.

[0043] Figures 13 and 14 show how the windings are arranged so as to be offset at a fixed interval in the axial direction. In other words, Figures 13 and 14 show so-called distributed winding. In Figures 13 and 14, one turn of the coil winding is formed on the front and back sides of the flexible insulating substrate 11. Two terminals H2,...,H6,I2,...,I6,...,P2,...,P6 at the same positions on both sides of the flexible insulating substrate 11 are connected via inner vias or the like, and each winding loop is offset in the axial direction to form three turns per coil.

[0044] The coils are connected so that current flows in the same phase and in the same direction to the long side on the front side and the long side on the back side of each coil. For example, when three coils are connected in series with three-phase current, terminals H1, I7, and J1 are the sources of current for each phase, terminal H7 is connected to terminal K7, terminal K1 is connected to terminal N1, terminal I1 is connected to terminal L1, terminal L7 is connected to terminal O7, terminal J7 is connected to terminal M7, terminal M1 is connected to terminal P1, and terminals N7, O1, and P7 are short-circuited.

[0045] 13 and 14, it is not possible to print long sides on the right axial direction of the front surface and the left axial direction of the back surface due to the coil ends, or it is necessary to change the length of the long sides or coil ends before printing, either of which leads to a decrease in the thrust of the actuator. In contrast, the pattern of embodiment 4 shown in Figures 11 and 12 allows coils to be placed up to the axial ends on both sides of flexible insulating substrate 11, which can be said to contribute to improving the thrust of the actuator.

[0046] In the actuator coil substrate 1C according to the fourth embodiment, each of the three coils 21, 22, 23 is printed using concentrated winding, which is a winding method in which the axial positions of each winding turn in one coil coincide. This makes it possible to arrange the coils 21, 22, 23 on both sides of the flexible insulating substrate 11 up to the axial ends, increasing the number of turns of each of the three coils 21, 22, 23 and increasing the thrust of an actuator having the actuator coil substrate 1C.

[0047] Embodiment 5. FIG. 15 is a schematic diagram of the actuator coil board 1D according to the fifth embodiment. In FIG. 15, the spiral object is a coil. FIG. 15 shows how each winding is bent at 90 degrees at the coil end of the coil printed by concentrated winding. That is, the end of the long side of each of the multiple coils is bent at 90 degrees inside the flexible insulating substrate 11. This allows the long side that generates thrust to be the longest per the same coil length. As a result, the thrust of the actuator having the actuator coil board 1D is increased. In addition, according to the actuator coil board 1D, the length of the coil end in the winding direction is the shortest, so that the area where the rigidity changes during winding can be minimized. Furthermore, since the windings, which are conductors, are densely distributed up to the end of the flexible insulating substrate 11, the effect of making it easier to wind the actuator coil board 1D is obtained.

[0048] Embodiment 6 FIG. 16 is a schematic diagram of an actuator coil substrate 1E according to a sixth embodiment. FIG. 16 shows the actuator coil substrate 1E before the substrate is wound, and shows the surfaces of the substrates 11A and 11B, which are different from each other on the left and right sides. In FIG. 16, the spiral object is a coil. The substrates 11A and 11B are flexible insulating substrates. In FIG. 16, the substrates 11A and 11B are wound in the left-right direction. The coils printed on the substrates 11A and 11B are not formed inside the left and right substrates 11A and 11B. Each coil is printed so that each coil is formed when the left and right substrates 11A and 11B are connected in the winding direction. A terminal 29 is provided at the end of the winding to be connected in one of the substrates 11A and 11B, and is connected to the terminal 29 at the same position in the axial direction of the other substrate by wiring or the like. The axial direction is the up-down direction.

[0049] As described above, in the sixth embodiment, the flexible insulating substrate is divided in the winding direction. The coils printed on each divided substrate are electrically connected between the divided substrates. In other words, the actuator coil substrate 1E according to the sixth embodiment can eliminate manufacturing limitations on the substrate length in the winding direction, and can be used in cases where the flexible insulating substrate has a very large number of windings or a very large winding diameter.

[0050] Although two boards, 11A and 11B, one on the left and one on the right, are shown in Fig. 16, three or more boards may be connected. In that case, the boards including the coil end portions are the leftmost board and the rightmost board. By configuring the boards in this way, there is no manufacturing limit to the board length in the winding direction of the board, and this configuration can be used in cases where the number of turns on the board is very large or the winding diameter is very large.

[0051] Embodiment 7 Figs. 17 and 18 are perspective views of an actuator 51 according to the seventh embodiment. Figs. 17 and 18 are schematic views of the actuator 51. Fig. 18 shows cross sections F and G for explaining the actuator 51. Fig. 19 is a cross-sectional view of the actuator 51 according to the seventh embodiment at cross section F. Fig. 20 is a cross-sectional view of the actuator 51 according to the seventh embodiment at cross section G. Figs. 19 and 20 are schematic views of the cross section of the actuator 51.

[0052] Actuator 51 has housing 52 whose outer shape is a rectangular parallelepiped, and cylindrical shaft 53 protruding from housing 52. Housing 52 is covered on the outside with brackets 54A, 54B and frame 55, and the inner surface of frame 55 is cylindrical. Core 56 made of a soft magnetic material is inserted along the inner circumferential surface of frame 55, and an actuator coil substrate having flexible insulating substrate 11 wound cylindrically is inserted inside core 56.

[0053] A bearing 57 for reducing axial sliding resistance is provided in the radial center of the brackets 54A and 54B, and the shaft 53 is held by the bearings 57 of the brackets 54A and 54B on both sides. A magnet 58 is attached to the surface of the shaft 53 inside the housing 52, and the magnet 58 faces the flexible insulating substrate 11 with a certain gap between them. The magnet 58 is magnetized in the radial direction, and the magnetization orientation alternates at certain intervals in the axial direction. In FIG. 20, a four-pole magnet 58 and twelve flexible insulating substrates 11 are shown, but the number of poles of the magnet 58 and the number of flexible insulating substrates 11, as well as the arrangement of the magnets 58 and the flexible insulating substrates 11, are not limited to those shown in FIG. 20.

[0054] By passing a current with a certain periodicity through the flexible insulating substrate 11, the flexible insulating substrate 11 becomes an armature, and the housing part 52 or the shaft 53 moves in a translational motion in the axial direction. Therefore, by fixing one of the housing part 52 and the shaft 53 so that it does not move, it is possible to move only the other. Compared to a conventional shaft linear actuator, the actuator 51 according to the seventh embodiment shown in FIG. 17 has fewer holding members around the armature, and the structure is simplified, so that the space occupied by the armature in the housing part 52 increases, and the thrust of the actuator 51 increases.

[0055] Embodiment 8 Figs. 21 and 22 are perspective views of an actuator 51A according to embodiment 8. Figs. 21 and 22 are schematic views of the actuator 51A. Fig. 22 shows cross sections H and I for explaining the actuator 51A. Fig. 23 is a cross-sectional view of the actuator 51A according to embodiment 8 at cross section H. Fig. 24 is a cross-sectional view of the actuator 51A according to embodiment 8 at cross section I. Figs. 23 and 24 are schematic views of the cross section of the actuator 51A.

[0056] Compared with the actuator 51 according to the seventh embodiment shown in FIG. 17, in the actuator 51A according to the eighth embodiment shown in FIG. 21, the magnet 58 is not attached to the surface of the shaft 53 but is located inside the shaft 53. As a method for manufacturing the shaft 53, a cylindrical magnet 58 may be inserted into the cylindrical shaft 53, or the shaft 53 may be molded so as to include the magnet 58. Since the diameter of the shaft 53 is constant throughout the entire section of the actuator 51A, the movable range of the shaft 53 can be made wide in the axial direction. Since it is not necessary to secure a space in the housing 52 to avoid contact with the magnet 58, the actuator 51A can shorten the housing 52 in the axial direction.

[0057] Embodiment 9 Figs. 25 and 26 are perspective views of actuator 51B according to embodiment 9. Figs. 25 and 26 typically show actuator 51B. Fig. 26 shows cross sections J and K for explaining actuator 51B. Fig. 27 is a cross-sectional view of actuator 51B according to embodiment 9 at cross section J. Fig. 28 is a cross-sectional view of actuator 51B according to embodiment 9 at cross section K. Figs. 27 and 28 typically show cross sections of actuator 51B.

[0058] Compared with actuator 51 according to embodiment 7 shown in Fig. 17, in actuator 51B according to embodiment 9 shown in Fig. 25, cross sections of housing 52 and shaft 53 are rectangular with the side facing magnet 58 as the longer side. In accordance with the shape of housing 52, the axial cross sections of core 56 and flexible insulating substrate 11 located inside housing 52 are rectangular. Plate- or block-shaped magnets 58 are attached to the upper and lower surfaces of shaft 53 so as to face flexible insulating substrate 11 over a wide area. The magnetization orientation of magnet 58 is opposite in the radial direction on the upper and lower surfaces, and the upper and lower magnetization orientations are switched at regular intervals in the axial direction.

[0059] In FIG. 25, no magnets are attached to the side surface of shaft 53, but a structure in which additional magnets are attached to one or both sides of shaft 53 to increase the facing surface area between the magnets and the coil is also possible.

[0060] In the structure of the ninth embodiment, the cross section of actuator 51B is rectangular, which allows actuator 51B to be installed in a narrow space. Since rectangular magnet 58 is used, magnet 58 can be easily processed, and the manufacturing cost of actuator 51B is reduced.

[0061] Embodiment 10 Figs. 29 and 30 are perspective views of actuator 51C according to embodiment 10. Figs. 29 and 30 typically show actuator 51C. Fig. 30 shows cross sections L and M for explaining actuator 51C. Fig. 31 is a cross-sectional view of actuator 51C according to embodiment 10 at cross section L. Fig. 32 is a cross-sectional view of actuator 51C according to embodiment 10 at cross section M. Figs. 31 and 32 typically show cross sections of actuator 51C.

[0062] Compared with actuator 51 of embodiment 7 shown in FIG. 17, actuator 51C of embodiment 10 shown in FIG. 29 has the mounting positions of flexible insulating substrate 11 and magnet 58 reversed, with magnet 58 mounted inside core 56 of housing portion 52 and flexible insulating substrate 11 wrapped around the surface of shaft 53.

[0063] For the actuator 51 according to the seventh embodiment in which the flexible insulating substrate 11 is installed on the side of the housing 52, a conceivable manufacturing process for manufacturing the housing 52 is to wind the flexible insulating substrate 11 around a jig that serves as a cylindrical mandrel, and after bonding, remove the jig and attach the flexible insulating substrate 11 to the core 56. In the structure of the actuator 51C according to the tenth embodiment, the flexible insulating substrate 11 can be directly wound around the shaft 53, using the shaft 53 as the mandrel, and therefore the manufacturing process is simplified. In the structure of the actuator 51C, there is no need to remove the jig, and therefore there is no risk of the inner circumferential surface of the flexible insulating substrate 11 being damaged by the sliding of the jig.

[0064] Embodiment 11 Figs. 33 and 34 are perspective views of actuator 51D according to embodiment 11. Figs. 33 and 34 are schematic views of actuator 51D. Fig. 34 shows cross sections N and P for explaining actuator 51D. Fig. 35 is a cross-sectional view of actuator 51D according to embodiment 11 at cross section N. Fig. 36 is a cross-sectional view of actuator 51D according to embodiment 11 at cross section P. Figs. 35 and 36 are schematic views of the cross section of actuator 51D.

[0065] The actuator 51D according to the eleventh embodiment shown in FIG. 33 does not have the shaft 53 that the actuators 51, 51A, 51B, and 51C have. Instead of the shaft 53, the actuator 51D has a support core 61 arranged in the center of the housing unit 52. The support core 61 is connected to the brackets 54A and 54B. The cross-sectional shape of the support core 61 is rectangular, and the sliding parts 62 are attached to each surface of the support core 61, and the flexible insulating substrate 11 is wound around the outside of the sliding parts 62. This allows the flexible insulating substrate 11 to move in parallel with the support core 61 as the center. A support pillar 63 extends from a portion of the sliding part 62 where the flexible insulating substrate 11 is not wound, and the support pillar 63 supports a table 64 located outside the housing unit 52. Therefore, the parallel movement of the flexible insulating substrate 11 is transmitted to the table 64 via the sliding parts 62.

[0066] A core 56 is disposed inside a frame 55 of the housing 52, and a magnet 58 is attached inside the core 56, with the magnet 58 facing the front and back surfaces of the flexible insulating substrate 11. In Fig. 33, the table 64 is attached with a support 63 extended from one side surface of the housing 52, but it is also possible to extend the support 63 from both sides of the housing 52, or to attach the magnet 58 to an empty side surface to increase the facing surface between the magnet 58 and the coil. In the actuator 51D according to the eleventh embodiment, when the armature side is used as the mover, it is possible to make the weight of the mover excluding the table 64 as light as possible, and it is possible to obtain a high thrust density.

[0067] Actuators 51, 51A, 51B, 51C, and 51D according to the seventh to eleventh embodiments each have an actuator coil substrate and a magnet 58 arranged to face the actuator coil substrate. The actuator coil substrate is the actuator coil substrate according to any one of the first to sixth embodiments. Actuators 51, 51A, 51B, 51C, and 51D according to each of the seventh to eleventh embodiments each have a simplified structure because the number of holding members around the coil can be reduced, and the space of the armature occupying the housing part 52 is increased, thereby increasing the thrust of actuators 51, 51A, 51B, 51C, and 51D.

[0068] In actuators 51, 51A, and 51B according to the seventh to ninth embodiments, a mover or a stator including a magnet 58 is disposed inside each of a plurality of coils. In actuators 51, 51A, and 51B, the outer diameter or volume of the magnet can be made smaller than in a configuration in which the magnet is disposed outside the coil, making it possible to reduce the amount of rare earth used and reduce manufacturing costs.

[0069] In the actuators 51C and 51D of the tenth and eleventh embodiments, a mover or a stator including a magnet is disposed outside each of the multiple coils. In the actuators 51C and 51D, the flexible insulating substrate 11 can be directly wound around the shaft 53 or the sliding part 62 as a mandrel, which simplifies the manufacturing process. In addition, since there is no need to remove the jig, there is no risk of the inner circumferential surface of the flexible insulating substrate 11 being damaged by the sliding of the jig, and no play is required for removing the jig, so that the flexible insulating substrate 11 can be wound more densely, and the actuators 51C and 51D contribute to improving the thrust of the motor.

[0070] The configurations shown in the above embodiments are merely examples, and may be combined with other known technologies, or the embodiments may be combined with each other. Also, parts of the configurations may be omitted or modified without departing from the spirit of the invention. [Explanation of symbols]

[0071] 1, 1A, 1B, 1C, 1D, 1E coil substrate for actuator, 10 axis, 11 flexible insulating substrate, 11A, 11B substrate, 20 long side portion, 20A coil end portion, 21, 22, 23 coil, 28 insulating layer, 29 terminal, 30 conductor, 51, 51A, 51B, 51C, 51D actuator, 52 housing portion, 53 shaft, 54A, 54B bracket, 55 frame, 56 core, 57 bearing, 58 magnet, 61 support core, 62 sliding parts, 63 support column, 64 table.

Claims

1. a flexible insulating substrate wound around an axis; a plurality of coils printed on the flexible insulating substrate in an axial direction; Each of the plurality of coils has a conductor arranged to extend in a circumferential direction of the axis, When the coil is traced in one direction along the longitudinal direction of the conductor from one end to the other end, the direction of travel is reversed at a portion where a first straight portion and a second straight portion connected to the first straight portion via a turn-back portion face each other, The plurality of coils are connected in series or in parallel between the same phases of currents flowing through the conductors, the flexible insulating substrate is wound in a cylindrical shape in a direction of a long side of each of the plurality of coils, or wound so that a cross section perpendicular to the axis is polygonal; Each turn of the coil is formed by connecting conductors printed separately on the front and back sides of the flexible insulating substrate via inner vias, and the loops of each winding are offset in the axial direction, so that the coil forms a distributed winding; The flexible insulating substrate has coils printed on both sides thereof, An insulating layer is provided between a portion of the conductor printed on the inner surface of the flexible insulating substrate in a wound state and a portion of the conductor printed on the outer surface of the flexible insulating substrate located inside the portion of the conductor printed on the outer surface of the flexible insulating substrate in a wound state.

2. A coil substrate for an actuator comprising:

2. a flexible insulating substrate wound around an axis; a plurality of coils printed on the flexible insulating substrate in an axial direction; Each of the plurality of coils has a conductor arranged to extend in a circumferential direction of the axis, When the coil is traced in one direction along the longitudinal direction of the conductor from one end to the other end, the direction of travel is reversed at a portion where a first straight portion and a second straight portion connected to the first straight portion via a turn-back portion face each other, The plurality of coils are connected in series or in parallel between the same phases of currents flowing through the conductors, the flexible insulating substrate is wound in a cylindrical shape in a direction of a long side of each of the plurality of coils, or wound so that a cross section perpendicular to the axis is polygonal; The flexible insulating substrate has coils printed on both sides thereof, An insulating layer is provided between a portion of the conductor printed on the inner surface of the flexible insulating substrate in a wound state and a portion of the conductor printed on the outer surface of the flexible insulating substrate located inside the portion of the conductor printed on the outer surface of the flexible insulating substrate in a wound state.

2. A coil substrate for an actuator comprising:

3. The number of coils in the plurality of coils is 3, 6, 9 or 12.

3. The coil substrate for an actuator according to claim 1, wherein the coil substrate is a first insulating layer.

4. The coils are connected to each other so as to be energized in three phases.

3. The coil substrate for an actuator according to claim 1, wherein the coil substrate is a first insulating layer.

5. The length of a long side portion of each of the plurality of coils in a winding direction of the flexible insulating substrate is longer than an inner circumferential length of the cylinder after the flexible insulating substrate is wound around the cylinder.

3. The coil substrate for an actuator according to claim 1, wherein the coil substrate is a first insulating layer.

6. Each of the plurality of coils is printed in a concentrated winding manner in which the axial positions of the winding turns in one coil coincide with each other.

3. The coil substrate for an actuator according to claim 2.

7. Each of the plurality of coils has a long side end bent at 90 degrees inside the flexible insulating substrate.

7. The coil substrate for an actuator according to claim 6.

8. The flexible insulating substrate is divided in a winding direction, The coils printed on each divided board are electrically connected between the divided boards.

3. The coil substrate for an actuator according to claim 1, wherein the coil substrate is a first insulating layer.

9. The coil substrate for an actuator according to claim 1 or 2; a magnet disposed so as to face the actuator coil substrate; An actuator comprising:

10. A mover or a stator including the magnet is disposed inside each of the plurality of coils.

10. The actuator according to claim 9.

11. A mover or a stator including the magnet is disposed outside each of the plurality of coils.

10. The actuator according to claim 9.

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