Substrate holder

Abstract

To provide a substrate support device that improves in-plane temperature uniformity of a substrate.SOLUTION: A substrate support device includes a base, a substrate support layer disposed over the base and formed of an insulating material, and an electrostatic internal electrode layer disposed within the substrate support layer and having a body portion circular in plan view and a plurality of projecting portions radially projecting from the body portion.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to a substrate support. [Background technology]

[0002] 2. Description of the Related Art For example, in a plasma processing system that performs a predetermined process on a substrate such as a wafer, a substrate support that supports the substrate is known.

[0003] Patent Document 1 discloses an electrostatic chuck device including an electrostatic chuck unit having a base having one main surface serving as a mounting surface for mounting a plate-shaped sample and incorporating an internal electrode for electrostatic attraction, and a power supply terminal for applying a DC voltage to the internal electrode for electrostatic attraction, and a metal base unit which is fixed to and integrated with the other main surface of the base of the electrostatic chuck unit and serves as a radio-frequency generating electrode. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2008-42140 A Summary of the Invention [Problem to be solved by the invention]

[0005] In a plasma processing system, heat from the plasma is input to a substrate supported by a substrate support, and therefore it is required to improve the in-plane temperature uniformity of the substrate supported by the substrate support.

[0006] In one aspect, the present disclosure provides a substrate support that improves in-plane temperature uniformity of a substrate. [Means for solving the problem]

[0007] In order to solve the above problems, according to one aspect, there is provided an electrostatic internal electrode layer comprising: a base; a substrate support layer disposed on the base and made of an insulating material; and a substrate support layer disposed within the substrate support layer, the substrate support layer having a main body portion having a circular shape in a plan view and a plurality of protruding portions protruding radially from the main body portion. The electrostatic internal electrode layer has a symmetrical shape in a plan view. A substrate support is provided. Effect of the Invention

[0008] According to one aspect, it is possible to provide a substrate support that improves the in-plane temperature uniformity of a substrate. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a diagram illustrating an example of a plasma processing system. [Diagram 2] FIG. 1 is a diagram showing the configuration of an example of a plasma processing apparatus. [Diagram 3] FIG. 4 is a plan view showing an example of a shape of an electrostatic electrode layer in an electrostatic chuck of a main body of a substrate support; [Figure 4] FIG. 2 is an example of a cross-sectional view taken along line AA of a main body of a substrate support; [Diagram 5] FIG. 13 is an example of a BB cross-sectional view of a main body of a substrate support. [Figure 6] 5A and 5B are diagrams each showing an example of an electrostatic adsorption force between a main body of a substrate support and a substrate. [Figure 7] 13 is an example of a simulation result showing the relationship between the outer peripheral shape of the electrostatic electrode layer and the average electric flux density. [Figure 8] FIG. 2 is a plan view showing an example of a shape of an electrostatic electrode layer in an electrostatic chuck. [Figure 9] FIG. 11 is a plan view showing another example of the shape of the electrostatic electrode layer in the electrostatic chuck. [Figure 10] FIG. 11 is a plan view showing yet another example of the shape of the electrostatic electrode layer in the electrostatic chuck. [Figure 11] FIG. 11 is a plan view showing yet another example of the shape of the electrostatic electrode layer in the electrostatic chuck. [Figure 12] FIG. 11 is a plan view showing yet another example of the shape of the electrostatic electrode layer in the electrostatic chuck. [Figure 13]13 is an example of a simulation result showing the relationship between the outer peripheral shape of the electrostatic electrode layer and the average electric flux density. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Various exemplary embodiments will now be described in detail with reference to the drawings, in which the same or corresponding parts are designated by the same reference numerals.

[0011] The plasma processing system will be described with reference to Fig. 1. Fig. 1 is a configuration diagram of an example of a plasma processing system. Fig. 2 is a configuration diagram of an example of a plasma processing apparatus 1.

[0012] In one embodiment, the plasma processing system includes a plasma processing device 1 and a control unit 2. The plasma processing device 1 includes a plasma processing chamber 10, a substrate support unit 11, and a plasma generation unit 12. The plasma processing chamber 10 has a plasma processing space. The plasma processing chamber 10 also has at least one gas supply port for supplying at least one processing gas to the plasma processing space, and at least one gas exhaust port for exhausting gas from the plasma processing space. The gas supply port is connected to a gas supply unit 20, which will be described later, and the gas exhaust port is connected to an exhaust system 40, which will be described later. The substrate support unit 11 is disposed in the plasma processing space, and has a substrate support surface for supporting a substrate.

[0013] The plasma generating unit 12 is configured to generate plasma from at least one processing gas supplied into the plasma processing space. The plasma formed in the plasma processing space may be a capacitively coupled plasma (CCP), an inductively coupled plasma (ICP), an electron-cyclotron-resonance plasma (ECR plasma), a helicon wave plasma (HWP), a surface wave plasma (SWP), or the like. Also, various types of plasma generating units may be used, including an alternating current (AC) plasma generating unit and a direct current (DC) plasma generating unit. In one embodiment, the AC signal (AC power) used in the AC plasma generating unit has a frequency in the range of 100 kHz to 10 GHz. Thus, the AC signal includes a radio frequency (RF) signal and a microwave signal. In one embodiment, the RF signal has a frequency in the range of 200 kHz to 150 MHz.

[0014] The control unit 2 processes computer-executable instructions that cause the plasma processing apparatus 1 to perform various steps described in the present disclosure. The control unit 2 may be configured to control each element of the plasma processing apparatus 1 to perform various steps described herein. In one embodiment, a part or all of the control unit 2 may be included in the plasma processing apparatus 1. The control unit 2 may include, for example, a computer 2a. The computer 2a may include, for example, a processing unit (CPU: Central Processing Unit) 2a1, a storage unit 2a2, and a communication interface 2a3. The processing unit 2a1 may be configured to perform various control operations based on a program stored in the storage unit 2a2. The storage unit 2a2 may include a random access memory (RAM), a read only memory (ROM), a hard disk drive (HDD), a solid state drive (SSD), or a combination thereof. The communication interface 2a3 may communicate with the plasma processing apparatus 1 via a communication line such as a local area network (LAN).

[0015] A configuration example of a capacitively coupled plasma processing apparatus as an example of the plasma processing apparatus 1 will be described below. The capacitively coupled plasma processing apparatus 1 includes a plasma processing chamber 10, a gas supply unit 20, a power supply 30, and an exhaust system 40. The plasma processing apparatus 1 also includes a substrate support 11 and a gas introduction unit. The gas introduction unit is configured to introduce at least one processing gas into the plasma processing chamber 10. The gas introduction unit includes a shower head 13. The substrate support 11 is disposed in the plasma processing chamber 10. The shower head 13 is disposed above the substrate support 11. In one embodiment, the shower head 13 constitutes at least a part of the ceiling of the plasma processing chamber 10. The plasma processing chamber 10 has a plasma processing space 10s defined by the shower head 13, a sidewall 10a of the plasma processing chamber 10, and the substrate support 11. The sidewall 10a is grounded. The shower head 13 and the substrate support 11 are electrically insulated from the plasma processing chamber 10 housing.

[0016] The substrate support (also referred to as a substrate supporter) 11 includes a main body 111 and a ring assembly 112. The main body 111 has a central region (substrate support surface) 111a for supporting a substrate (wafer) W, and an annular region (ring support surface) 111b for supporting the ring assembly 112. The annular region 111b of the main body 111 surrounds the central region 111a of the main body 111 in a plan view. The substrate W is disposed on the central region 111a of the main body 111, and the ring assembly 112 is disposed on the annular region 111b of the main body 111 so as to surround the substrate W on the central region 111a of the main body 111. In one embodiment, the main body 111 includes a base 50 (described later in FIG. 4) and an electrostatic chuck 60 (described later in FIG. 4). The base 50 includes a conductive member. The conductive member of the base 50 functions as a lower electrode. The electrostatic chuck 60 is disposed on the base 50. The upper surface of the electrostatic chuck 60 has a substrate support surface 111a. The ring assembly 112 includes one or more annular members. At least one of the one or more annular members is an edge ring. Although not shown, the substrate support 11 may include a temperature adjustment module configured to adjust at least one of the electrostatic chuck 60, the ring assembly 112, and the substrate W to a target temperature. The temperature adjustment module may include a heater, a heat transfer medium, a flow path, or a combination thereof. A heat transfer fluid such as brine or gas flows through the flow path. The substrate support 11 may also include a heat transfer gas supply unit configured to supply a heat transfer gas between the back surface of the substrate W and the substrate support surface 111a.

[0017] The shower head 13 is configured to introduce at least one processing gas from the gas supply unit 20 into the plasma processing space 10s. The shower head 13 has at least one gas supply port 13a, at least one gas diffusion chamber 13b, and multiple gas inlets 13c. The processing gas supplied to the gas supply port 13a passes through the gas diffusion chamber 13b and is introduced into the plasma processing space 10s from the multiple gas inlets 13c. The shower head 13 also includes a conductive member. The conductive member of the shower head 13 functions as an upper electrode. In addition to the shower head 13, the gas introduction unit may include one or more side gas injectors (SGIs) attached to one or more openings formed in the side wall 10a.

[0018] The gas supply 20 may include at least one gas source 21 and at least one flow controller 22. In one embodiment, the gas supply 20 is configured to supply at least one process gas from a respective gas source 21 through a respective flow controller 22 to the showerhead 13. Each flow controller 22 may include, for example, a mass flow controller or a pressure-controlled flow controller. Additionally, the gas supply 20 may include at least one flow modulation device to modulate or pulse a flow rate of the at least one process gas.

[0019] The power source 30 includes an RF power source 31 coupled to the plasma processing chamber 10 via at least one impedance matching circuit. The RF power source 31 is configured to supply at least one RF signal (RF power), such as a source RF signal and a bias RF signal, to a conductive member of the substrate support 11 and / or a conductive member of the showerhead 13. This causes a plasma to be formed from at least one processing gas supplied to the plasma processing space 10s. Thus, the RF power source 31 can function as at least a part of the plasma generating unit 12. In addition, by supplying a bias RF signal to the conductive member of the substrate support 11, a bias potential is generated on the substrate W, and ion components in the formed plasma can be attracted to the substrate W.

[0020] In one embodiment, the RF power supply 31 includes a first RF generating unit 31a and a second RF generating unit 31b. The first RF generating unit 31a is coupled to the conductive member of the substrate support 11 and / or the conductive member of the shower head 13 via at least one impedance matching circuit, and is configured to generate a source RF signal (source RF power) for plasma generation. In one embodiment, the source RF signal has a frequency in the range of 13 MHz to 150 MHz. In one embodiment, the first RF generating unit 31a may be configured to generate a plurality of source RF signals having different frequencies. The generated one or more source RF signals are supplied to the conductive member of the substrate support 11 and / or the conductive member of the shower head 13. The second RF generating unit 31b is coupled to the conductive member of the substrate support 11 via at least one impedance matching circuit, and is configured to generate a bias RF signal (bias RF power). In one embodiment, the bias RF signal has a lower frequency than the source RF signal. In one embodiment, the bias RF signal has a frequency in the range of 400 kHz to 13.56 MHz. In one embodiment, the second RF generator 31b may be configured to generate multiple bias RF signals having different frequencies. The generated bias RF signal or signals are provided to the conductive members of the substrate support 11. Also, in various embodiments, at least one of the source RF signal and the bias RF signal may be pulsed.

[0021] The power supply 30 may also include a DC power supply 32 coupled to the plasma processing chamber 10. The DC power supply 32 includes a first DC generator 32a and a second DC generator 32b. In one embodiment, the first DC generator 32a is connected to a conductive member of the substrate support 11 and configured to generate a first DC signal. The generated first DC signal is applied to the conductive member of the substrate support 11. In one embodiment, the first DC signal may be applied to another electrode, such as an electrode in the electrostatic chuck 60. In one embodiment, the second DC generator 32b is connected to a conductive member of the showerhead 13 and configured to generate a second DC signal. The generated second DC signal is applied to the conductive member of the showerhead 13. In various embodiments, the first and second DC signals may be pulsed. The first and second DC generating units 32a, 32b may be provided in addition to the RF power supply 31, or the first DC generating unit 32a may be provided in place of the second RF generating unit 31b.

[0022] The exhaust system 40 may be connected to, for example, a gas exhaust port 10e provided at the bottom of the plasma processing chamber 10. The exhaust system 40 may include a pressure regulating valve and a vacuum pump. The pressure in the plasma processing space 10s is adjusted by the pressure regulating valve. The vacuum pump may include a turbomolecular pump, a dry pump, or a combination thereof.

[0023] Next, the main body 111 of the substrate support 11 will be further described with reference to Fig. 3 to Fig. 5. Fig. 3 is an example of a plan view showing the shape of the electrostatic electrode layer 62 in the electrostatic chuck 60 of the main body 111 of the substrate support 11. Fig. 4 is an example of an AA cross-sectional view of the main body 111 of the substrate support 11. Fig. 5 is an example of a BB cross-sectional view of the main body 111 of the substrate support 11. Fig. 3 is a diagram showing the shape of the electrostatic electrode layer 62 when the electrostatic chuck 60 is viewed in plan from the direction of the mounting surface for the substrate W.

[0024] The main body 111 of the substrate support 11 has a base 50 and an electrostatic chuck 60 disposed on the base 50. The electrostatic chuck 60 also has an insulating material layer (substrate support layer) 60a and an electrostatic electrode layer (electrostatic internal electrode layer) 62 disposed in the insulating material layer 60a.

[0025] The insulating material layer 60a has a lower insulator (lower portion) 61, a middle annular insulator (middle annular portion) 63, and an upper insulator (upper portion) 64. The lower insulator 61 is disposed below the electrostatic electrode layer 62. The upper insulator 64 is disposed above the electrostatic electrode layer 62. The middle annular insulator 63 surrounds the electrostatic electrode layer 62 and is disposed between the upper insulator 64 and the lower insulator 61. Note that the insulating material layer 60a may be formed integrally.

[0026] The insulating layer 60a is made of an insulating material (dielectric) such as a ceramic material. The lower insulator 61, the intermediate annular insulator 63, and the upper insulator 64 may be made of the same material or different materials.

[0027] The electrostatic electrode layer 62 is formed of a conductive material such as a metal. When a voltage is applied from a power source (not shown), the electrostatic electrode layer 62 electrostatically attracts the substrate W (see FIG. 2) placed on the upper surface of the electrostatic chuck 60.

[0028] The upper surface of the electrostatic chuck 60 (the upper surface of the insulating material layer 60a) has a substrate support surface 111a that supports the substrate W. The substrate support surface 111a has an inner peripheral portion 71 and an annular protrusion portion 72. The inner peripheral portion 71 has a recessed portion 71a and a protrusion portion 71b that stands up from the bottom surface of the recessed portion 71a. The annular protrusion portion 72 is formed in a ring shape on the outer circumferential edge portion of the substrate support surface 111a and stands higher than the bottom surface of the recessed portion 71a. Therefore, the insulating material layer 60a has the annular protrusion portion 72 that is disposed around the entire circumference of the annular edge region 90 in a plan view and protrudes upward from the upper surface of the insulating material layer 60a.

[0029] When the main body 111 supports the substrate W, the upper surface of the protrusion 71b abuts against the rear surface of the substrate W to support the substrate W. The upper surface of the annular protrusion 72 abuts against the outer periphery of the rear surface of the substrate W to support the substrate W. A heat transfer gas (e.g., He gas) is supplied from a heat transfer gas supply unit (not shown) to a space formed by the recess 71a between the rear surface of the substrate W and the substrate support surface 111a. The upper surface of the annular protrusion 72 and the outer periphery of the rear surface of the substrate W come into close contact with each other to form an annular seal band that suppresses leakage of the heat transfer gas. The width of the annular protrusion 72 (width of the seal band) is, for example, within a range of 1 to 5 mm.

[0030] 3, the contour shape of the outer circumferential end of the intermediate annular insulator 63 has a circular shape when viewed from a direction perpendicular to the substrate support surface 111a. In contrast, the contour shape of the outer circumferential end of the electrostatic electrode layer 62 has a plurality of bent portions 81, 82 when viewed from a direction perpendicular to the substrate support surface 111a. In other words, the contour shape of the outer circumferential end of the electrostatic electrode layer 62 has a plurality of corners. Moreover, the contour shape of the outer circumferential end of the electrostatic electrode layer 62 is formed so that there is no portion parallel to the contour shape of the outer circumferential end of the intermediate annular insulator 63.

[0031] In the example shown in FIG. 3, the contour shape of the outer peripheral end of the electrostatic electrode layer 62 is formed so as to go back and forth between the outer peripheral circle 91 and the inner peripheral circle 92 in an inner annular portion (annular region) 90a formed by an outer peripheral circle 91 and an inner peripheral circle 92 shown by a two-dot chain line. The contour shape of the outer peripheral end of the electrostatic electrode layer 62 is folded back at the outer peripheral circle 91 to form a bent portion 81 having a mountain shape (convex shape) on the radially outer side. The contour shape of the outer peripheral end of the electrostatic electrode layer 62 is folded back at the inner peripheral circle 92 to form a bent portion 82 having a valley shape (concave shape) on the radially inner side. In the following description, the radial width between the bent portion 81 and the bent portion 82 (the radial width of the inner annular portion 90a) is also referred to as the peak-valley length h. The angle of the bent portion 81 having a mountain shape is also referred to as the tip angle θ.

[0032] Therefore, the contour of the electrostatic electrode layer 62 has a plurality of bent portions 81, 82 around the entire circumference of the annular edge region 90 of the insulating material layer 60a in a plan view. In the example shown in FIG. 3, the annular edge region 90 has an inner annular portion 90a and an outer annular portion 90b. The electrostatic electrode layer 62 has a plurality of approximately triangular protruding portions 62b arranged around the entire circumference of the inner annular portion 90a in a plan view. Each of the plurality of protruding portions 62b has a first vertex on an outer circumferential circle 91 of the inner annular portion 90a, and a second vertex and a third vertex on an inner circumferential circle 92 of the inner annular portion 90a. The contour of the electrostatic electrode layer 62 has one bent portion 81 at the first vertex of each of the plurality of protruding portions 62b in a plan view. Also, the contour of the electrostatic electrode layer 62 has one bent portion 82 at the second vertex or the third vertex of each of the plurality of protruding portions 62b in a plan view.

[0033] In other words, the electrostatic electrode layer 62 has a main body portion 62a having a circular shape in a plan view, and a plurality of protruding portions 62b protruding radially from the main body portion 62a in a plan view. The number of the protruding portions 62b is, for example, on the order of several tens to several tens of thousands. The main body portion 62a has a radial dimension R2. Each protruding portion 62b has a substantially triangular shape having a first vertex on an outer circumferential circle 91 of the inner annular portion 90a, and a second vertex and a third vertex on an inner circumferential circle 92 of the inner annular portion 90a. That is, each of the plurality of protruding portions 62b has a substantially triangular shape having one vertex on the boundary between the inner annular portion 90a and the outer annular portion 90b. Note that the electrostatic electrode layer 62 does not extend to the outer annular portion 90b in a plan view. That is, the outer annular portion 90b does not include the electrostatic electrode layer 62 in a plan view.

[0034] 4, the bent portion 81 is disposed below the annular protrusion 72. As shown in Fig. 5, the bent portion 82 is disposed below the annular protrusion 72. That is, when viewed from a direction perpendicular to the substrate support surface 111a, the inner annular portion 90a is formed so as to overlap with the range of the annular protrusion 72. In other words, when viewed from a direction perpendicular to the substrate support surface 111a, the contour shape of the outer circumferential end of the electrostatic electrode layer 62 is formed so as to overlap with the range of the annular protrusion 72.

[0035] 6 is an example of a diagram showing a schematic representation of the electrostatic attraction force between the main body 111 of the substrate support 11 and the substrate W. Here, the attraction force for attracting the substrate W is shown diagrammatically by a solid black arrow.

[0036] Here, when a voltage is applied to the electrostatic electrode layer 62, electric field concentration occurs at the bent portions 81, 82. This makes it possible to improve the electric field strength per unit area at the outer circumferential edge portion of the electrostatic electrode layer 62. In other words, the electric field strength per unit area in the seal band is improved. This makes it possible to make the chucking force in the seal band stronger than the chucking force in the inner circumferential portion 71 of the substrate W.

[0037] The sealing performance of the seal band formed by the outer peripheral edge of the back surface of the substrate W and the annular protrusion 72 is improved. Also, it is possible to prevent the filled heat transfer gas from leaking out in the outer circumferential direction of the substrate W. This makes it possible to equalize the heat transfer between the substrate W and the electrostatic chuck 60, and improve the in-plane temperature uniformity of the substrate W. This makes it possible to improve, for example, the in-plane uniformity of the film formation rate (in-plane uniformity of the film thickness) and the in-plane uniformity of the etching rate in a process that depends on temperature.

[0038] Here, a description will be given of the relationship between the contour shape of the outer circumferential end of the annular protrusion 72 and the average electric flux density at the outer circumferential edge of the substrate W. Here, a simulation was performed for the substrate support 11 of this embodiment and the substrate support of the reference example. Here, the radius of the substrate W was set to 150 mm, the voltage applied to the electrostatic electrode layer was set to 4000 V, and the potential of the ring assembly 112 and the substrate W was set to GND.

[0039] Here, a simulation was performed using a substrate support having a circular electrostatic electrode layer as a reference substrate support. In the substrate support of the reference substrate, the average electric flux density in the center of the substrate W (region of radius 0 mm to 6 mm) was 4.43×10 -4 [Cm 2 ], and the average electric flux density at the outer periphery of the substrate W (area with a radius of 140 mm or more) is 4.72 × 10 -4 [Cm 2], and the electrostatic energy at the outer periphery of the substrate W (area with a radius of 140 mm or more) is 6.31 × 10 -2 It became [J].

[0040] On the other hand, as an example of the substrate support 11 of this embodiment, a simulation was performed on a substrate support having an electrostatic electrode layer with a diameter of 293 mm on the outer circumferential circle 91, peak-valley lengths h=1.5 mm, 3 mm, 5 mm, and tip angles θ=70 deg, 91 deg, 128 deg. In the substrate support 11 of this embodiment, the average electric flux density in the center of the substrate W (region of radius 0 mm to 6 mm) was 4.43×10 -4 [Cm 2 ], which was confirmed to be similar to that of the substrate support of the reference example. In addition, in the substrate support part 11 of this embodiment, the average electric flux density at the outer peripheral edge of the substrate W (region of radius 140 mm or more) was 7.25×10 -4 [Cm 2 ], and the electrostatic energy at the outer periphery of the substrate W (area with a radius of 140 mm or more) is 7.97 × 10 -2 [J], and it was confirmed that the average electric flux density and electrostatic energy were improved compared to the substrate support of the reference example. In other words, the chucking force at the outer periphery of the substrate W was improved.

[0041] Next, the relationship between the outer peripheral shape of the electrostatic electrode layer 62 and the average electric flux density will be further described with reference to Fig. 7. Fig. 7 is an example of a simulation result showing the relationship between the outer peripheral shape of the electrostatic electrode layer 62 and the average electric flux density.

[0042] Fig. 7(a) is an example of a simulation result showing the relationship between the peak-valley length h and the average electric flux density at the outer periphery of the substrate W. Here, the average electric flux density was calculated while changing the peak-valley length h. As shown in Fig. 7(a), it was confirmed that the smaller the peak-valley length h, the higher the average electric flux density.

[0043] Here, the peak-valley length h is, for example, within a range of 0.1 to 5 mm. That is, the inner annular portion 90a has a width within a range of 0.1 to 5 mm. By setting the peak-valley length h to 5 mm or less, the average electric flux density is improved compared to the substrate support of the reference example. Also, if the peak-valley length h is too small, the electric field concentration decreases.

[0044] Figure 7(b) is an example of a simulation result showing the relationship between the tip angle θ and the average electric flux density at the outer periphery of the substrate W. Here, the average electric flux density was calculated while changing the tip angle θ. As shown in Figure 7(b), it was confirmed that the smaller the tip angle θ, the higher the average electric flux density.

[0045] In one embodiment, the tip angle θ is, for example, 130 degrees or less. That is, each of the multiple protruding portions 62b has an angle θ of 130 degrees or less at an apex on the boundary between the inner annular portion 90a and the outer annular portion 90b. In one embodiment, the tip angle θ is, for example, 90 degrees or less. That is, each of the multiple protruding portions 62b has an angle θ of 90 degrees or less at an apex on the boundary between the inner annular portion 90a and the outer annular portion 90b. By setting the tip angle θ to 90 degrees or less, the average electric flux density is improved compared to the substrate support of the reference example.

[0046] The shape of the electrostatic electrode layer 62 is not limited to that shown in Fig. 3. The shape of the electrostatic electrode layer 62 will be further described with reference to Fig. 8 to Fig. 12. In the following Figs. 8, 9, 11, and 12, the electrostatic electrode layer 62 is illustrated divided by a two-dot chain line to clearly show the shape composed of a plurality of segments (62c, 62d, 62g, 62h), but the electrostatic electrode layer 62 may be formed integrally including a plurality of segments.

[0047] FIG. 8 is an example of a plan view showing the shape of the electrostatic electrode layer 62 in the electrostatic chuck 60. The contour shape of the outer peripheral end of the electrostatic electrode layer 62 shown in FIG. 8 is the same as the contour shape of the outer peripheral end of the electrostatic electrode layer 62 shown in FIG. 3. The electrostatic electrode layer 62 has a shape in which a first segment 62c and a second segment 62d are arranged in a circumferential direction. The first segments 62c and the second segments 62d are integrated. That is, the electrostatic electrode layer 62 has a plurality of first segments 62c and a plurality of second segments 62d that are integrally formed. The first segment 62c has a mountain shape (convex shape) radially outward toward the outer circumferential circle 91 (see FIG. 3). The second segment 62d has a valley shape (concave shape) radially inward toward the inner circumferential circle 92 (see FIG. 3). In addition, the first segment 62c and the second segment 62d have different distances from the outermost circumference of the insulating material layer 60a (intermediate annular insulator 63). 8, the first segments 62c and the second segments 62d are arranged alternately, so that the electrostatic electrode layer 62 is symmetrical with respect to a line passing through the center of the electrostatic chuck 60.

[0048] The first segment 62c has a bent portion 81 that is mountain-shaped (convex) radially outward toward an outer circumferential circle 91 (see FIG. 3). The second segment 62d has a bent portion 82 that is valley-shaped (concave) radially inward toward an inner circumferential circle 92 (see FIG. 3). In the second segment 62d adjacent to the first segment 62c, the contour shape from the bent portion 81 to the bent portion 82 is linear.

[0049] In other words, the contour shape of the outer peripheral end of the electrostatic electrode layer 62 shown in Fig. 8 is formed so as to go back and forth between the outer peripheral circle 91 (see Fig. 3) and the inner peripheral circle 92 (see Fig. 3) in an inner annular portion 90a (see Fig. 3) formed by the outer peripheral circle 91 (see Fig. 3) and the inner peripheral circle 92 (see Fig. 3). Specifically, the contour shape of the outer peripheral end of the electrostatic electrode layer 62 shown in Fig. 8 is formed by repeating a side extending from the outer peripheral circle 91 to the inner peripheral circle 92 (a side extending from the bent portion 81 to the bent portion 82) and a side extending from the inner peripheral circle 92 to the outer peripheral circle 91 (a side extending from the bent portion 82 to the bent portion 81).

[0050] FIG. 9 is another example of a plan view showing the shape of the electrostatic electrode layer 62 in the electrostatic chuck 60. The electrostatic electrode layer 62 has a shape in which a plurality of first segments 62c and a plurality of second segments 62d are arranged in the circumferential direction. The plurality of first segments 62c and the plurality of second segments 62d are integrated. That is, the electrostatic electrode layer 62 has a plurality of first segments 62c and a plurality of second segments 62d that are integrally formed. Moreover, in the electrostatic electrode layer 62 shown in FIG. 9, the first segments 62c and the second segments 62d are irregularly arranged. As a result, the electrostatic electrode layer 62 has an asymmetric shape with respect to a line passing through the center of the electrostatic chuck 60.

[0051] In addition, the first segment 62c is formed with a bent portion 81 that is a mountain shape (convex shape) on the radially outward side toward the outer circumferential circle 91 (see FIG. 3). The second segment 62d is formed with a bent portion 82 that is a valley shape (concave shape) on the radially inward side toward the inner circumferential circle 92 (see FIG. 3). In the second segment 62d adjacent to the first segment 62c, the contour shape from the bent portion 81 to the bent portion 82 is a straight line shape. In the first segment 62c adjacent to the first segment 62c, a bent portion 83 that is a valley shape (concave shape) on the radially inward side is formed. In the second segment 62d adjacent to the second segment 62d, a bent portion 84 that is a mountain shape (convex shape) on the radially outward side is formed. The bent portions 83, 84 are disposed within the inner annular portion 90a.

[0052] FIG. 10 is a plan view showing yet another example of the shape of the electrostatic electrode layer 62 in the electrostatic chuck 60. In FIG.

[0053] The contour shape of the outer peripheral end of the electrostatic electrode layer 62 shown in Fig. 10 is formed so as to go back and forth between the outer peripheral circle 91 (see Fig. 3) and the inner peripheral circle 92 (see Fig. 3) in an inner annular portion 90a (see Fig. 3) formed by the outer peripheral circle 91 (see Fig. 3) and the inner peripheral circle 92 (see Fig. 3). Specifically, the contour shape of the outer peripheral end of the electrostatic electrode layer 62 shown in Fig. 10 is formed by repeating an arc along the outer peripheral circle 91, a radial side extending from the outer peripheral circle 91 to the inner peripheral circle 92 (a side from the bent portion 85 to the bent portion 86), an arc along the inner peripheral circle 92, and a radial side extending from the inner peripheral circle 92 to the outer peripheral circle 91 (a side from the bent portion 86 to the bent portion 85).

[0054] Therefore, the contour of the electrostatic electrode layer 62 has a plurality of bent portions 85, 86 around the entire circumference of the annular edge region 90 of the insulating material layer 60a in a plan view. In the example shown in FIG. 10, the annular edge region 90 has an inner annular portion 90a and an outer annular portion 90b. The electrostatic electrode layer 62 has a so-called gear shape having a plurality of protruding portions 62f of a substantially rectangular shape arranged around the entire circumference of the inner annular portion 90a in a plan view. Each of the plurality of protruding portions 62f has a first vertex and a second vertex on an outer circumferential circle 91 of the inner annular portion 90a, and a third vertex and a fourth vertex on an inner circumferential circle 92 of the inner annular portion 90a. The contour of the electrostatic electrode layer 62 has one bent portion 85 at the first vertex and the second vertex of each of the plurality of protruding portions 62b in a plan view. In addition, the contour of the electrostatic electrode layer 62 has one bent portion 86 at the third vertex or the fourth vertex of each of the plurality of protruding portions 62b in a plan view.

[0055] In other words, the electrostatic electrode layer 62 has a main body portion 62e having a circular shape in a plan view, and a plurality of protruding portions 62f protruding radially from the main body portion 62e in a plan view. The number of the protruding portions 62f is, for example, on the order of several tens to several tens of thousands. The main body portion 62a has a radial dimension R2. Each of the protruding portions 62f has a substantially rectangular shape having two vertices on the outer circumferential circle 91 of the inner annular portion 90a and two vertices on the inner circumferential circle 92 of the inner annular portion 90a. That is, each of the plurality of protruding portions 62f has a substantially rectangular shape having two vertices on the boundary between the inner annular portion 90a and the outer annular portion 90b.

[0056] The contour shape of the outer circumferential end of the electrostatic electrode layer 62 shown in Fig. 10 will be further described with reference to Fig. 11. Fig. 11 is yet another example of a plan view showing the shape of the electrostatic electrode layer 62 in the electrostatic chuck 60. Note that the contour shape of the outer circumferential end of the electrostatic electrode layer 62 shown in Fig. 11 is similar to the contour shape of the outer circumferential end of the electrostatic electrode layer 62 shown in Fig. 10.

[0057] The electrostatic electrode layer 62 has a plurality of first segments 62g and a plurality of second segments 62h that are alternately arranged in the circumferential direction in a plan view. The plurality of first segments 62g and the plurality of second segments 62h are integrated. That is, the electrostatic electrode layer 62 has a so-called gear shape having a plurality of first segments 62g and a plurality of second segments 62h that are integrally formed. The first segment 62g has a first side that is formed along the outer periphery of the inner annular portion 90a in a plan view. The second segment 62h has a second side that is formed along the inner periphery of the inner annular portion 90a in a plan view. The first side and the second side may be straight or curved. Thus, each of the plurality of first segments 62g has a first radial dimension R1 that is the same as or approximately the same as the outer diameter dimension of the inner annular portion 90a, and each of the plurality of second segments 62h has a second radial dimension R2 that is the same as or approximately the same as the inner diameter dimension of the inner annular portion 90a. That is, the second radial dimension R2 is smaller than the first radial dimension R1. The difference between the first radial dimension R1 and the second radial dimension R2 is within a range of 0.1 to 5 mm. The contour of the electrostatic electrode layer 62 has two bent portions 85, 85 in each of the multiple first segments 62g in a plan view. Also, the contour of the electrostatic electrode layer 62 has one bent portion 86 in each joint portion between the first segment 62g and the second segment 62h in a plan view.

[0058] The electrostatic electrode layer 62 has a shape in which a plurality of first segments 62g and second segments 62h are arranged in the circumferential direction. The first segment 62g has a sector shape having an arc along an outer circumferential circle 91 (see FIG. 10). The second segment 62h has a sector shape having an arc along an inner circumferential circle 92 (see FIG. 10). The first segment 62g and the second segment 62h have different distances from the outermost circumference of the insulating material layer 60a (intermediate annular insulator 63). The second segment 62h is formed to have a smaller diameter than the first segment 62g. The electrostatic electrode layer 62 shown in FIG. 11 has the first segments 62g and the second segments 62h arranged alternately. This results in a symmetrical shape with respect to a line passing through the center of the electrostatic chuck 60.

[0059] In addition, in the second segment 62h adjacent to the first segment 62g, a bent portion 85 is formed that is a mountain shape (convex shape) formed by the arc of the first segment 62g and a radial side of the first segment 62g. In addition, in the second segment 62h adjacent to the first segment 62g, a bent portion 86 is formed that is a valley shape (concave shape) formed by the arc of the second segment 62h and a radial side of the first segment 62g. The bent portions 85, 86 are disposed within the inner annular portion 90a.

[0060] FIG. 12 is yet another example of a plan view showing the shape of the electrostatic electrode layer 62 in the electrostatic chuck 60. The electrostatic electrode layer 62 has a shape in which a plurality of first segments 62g and a plurality of second segments 62h are arranged in the circumferential direction. The plurality of first segments 62g and the plurality of second segments 62h are integrated. That is, the electrostatic electrode layer 62 has a plurality of first segments 62g and a plurality of second segments 62h that are integrally formed. Moreover, in the electrostatic electrode layer 62 shown in FIG. 12, the first segments 62g and the second segments 62h are irregularly arranged. As a result, the electrostatic electrode layer 62 has an asymmetric shape with respect to a line passing through the center of the electrostatic chuck 60.

[0061] In addition, in the second segment 62h adjacent to the first segment 62g, a bent portion 85 is formed that is a mountain shape (convex shape) formed by the arc of the first segment 62g and a radial side of the first segment 62g. In addition, in the second segment 62h adjacent to the first segment 62g, a bent portion 86 is formed that is a valley shape (concave shape) formed by the arc of the second segment 62h and a radial side of the first segment 62g. The bent portions 85, 86 are disposed within the inner annular portion 90a.

[0062] Here, a description will be given of the relationship between the outer end shape of the annular protrusion 72 and the average electric flux density at the outer periphery of the substrate W. Here, a simulation was performed for the main body 111 of the substrate support 11 of this embodiment shown in Fig. 11 and the substrate support of the reference example. Here, the radius of the substrate W was set to 150 mm, the voltage applied to the electrostatic electrode layer was set to 4000 V, and the potential of the ring assembly 112 and the substrate W was set to GND.

[0063] 11, a simulation was performed on a substrate support having an electrostatic electrode layer with an outer circumferential circle 91 having a diameter of 293 mm, a peak-valley length (the difference between the diameter of the outer circumferential circle 91 and the diameter of the inner circumferential circle 92) h=1.5 mm, 3 mm, 5 mm, and a number of teeth (the number of first segments 62g)=36, 72, 144. In the main body 111 of the substrate support 11 of this embodiment, the average electric flux density in the center of the substrate W (region of radius 0 mm to 6 mm) was 4.43×10 -4 [Cm 2 11, the average electric flux density at the outer periphery of the substrate W (region with a radius of 140 mm or more) in the main body 111 of the substrate support 11 of this embodiment is 6.05×10 -4 [Cm 2 ], and the electrostatic energy at the outer periphery of the substrate W (area with a radius of 140 mm or more) is 7.97 × 10 -2 [J], and it was confirmed that the average electric flux density and electrostatic energy were improved compared to the substrate support of the reference example. In other words, the chucking force at the outer periphery of the substrate W was improved.

[0064] Next, the relationship between the outer peripheral shape of the electrostatic electrode layer 62 and the average electric flux density will be further described with reference to Fig. 13. Fig. 13 is an example of a simulation result showing the relationship between the outer peripheral shape of the electrostatic electrode layer 62 and the average electric flux density.

[0065] Fig. 13(a) is an example of a simulation result showing the relationship between the peak-valley length h and the average electric flux density at the outer periphery of the substrate W. Here, the average electric flux density was calculated while changing the peak-valley length h. As shown in Fig. 13(a), it was confirmed that the smaller the peak-valley length h, the higher the average electric flux density.

[0066] Here, the peak-valley length h is, for example, within a range of 0.1 to 5 mm. That is, the inner annular portion 90a has a width within a range of 0.1 to 5 mm. By setting the peak-valley length h to 5 mm or less, the average electric flux density is improved compared to the substrate support of the reference example. Also, if the peak-valley length h is too small, the electric field concentration decreases.

[0067] Fig. 13(b) is an example of a simulation result showing the relationship between the number of teeth N and the average electric flux density at the outer periphery of the substrate W. Here, the average electric flux density was calculated while changing the number of teeth N. As shown in Fig. 13(b), it was confirmed that the average electric flux density increases as the number of teeth N increases.

[0068] Here, the number of teeth N is, for example, on the order of several tens to several tens of thousands. As the number of teeth N increases, the average electric flux density is improved compared to the substrate support of the reference example.

[0069] The above describes the main body 111 of the substrate support 11, but the present disclosure is not limited to the above-described embodiments, and various modifications and improvements are possible within the scope of the gist of the present disclosure described in the claims.

[0070] In the main body 111 of the substrate support 11 shown in Fig. 11 and Fig. 12, the first segment 62g and the second segment 62h are described as being sector-shaped, but are not limited thereto. The first segment 62g and the second segment 62h may be triangular with a circular arc as a straight line. For example, the contour shape of the outer peripheral end of the electrostatic electrode layer 62 may be formed by repeating a side (chord) connecting two points on the outer peripheral circle 91, a radial side extending from the outer peripheral circle 91 to the inner peripheral circle 92, a side (chord) connecting two points on the inner peripheral circle 92, and a radial side extending from the inner peripheral circle 92 to the outer peripheral circle 91.

[0071] In addition, the inner annular portion 90a, into which the contour shape of the outer peripheral end of the electrostatic electrode layer 62 fits, has been described as being formed so as to overlap the range of the annular protrusion 72, but this is not limited thereto. For example, the outer circumferential circle 91 may be formed so as to overlap the range of the annular protrusion 72, and the inner circumferential circle 92 may be formed inside the range of the annular protrusion 72. This allows the bent portions 81 and 85, which are mountain-shaped (convex), to be formed so as to overlap the range of the annular protrusion 72, thereby generating electric field concentration in the bent portions 81 and 85, and improving the sealing performance of the seal band. [Explanation of symbols]

[0072] 11 Board support part (board supporter) 50 Bases 60 Electrostatic Chuck 60a Insulating layer (substrate support layer) 61 Lower insulator (lower part) 62 Electrostatic electrode layer (electrostatic internal electrode layer) 63 Intermediate annular insulator (intermediate annular part) 64 Upper insulator (upper part) 71 Inner circumference 71a Horigotome 71b Protrusion 72 Annular protrusion 81~86 Bent part 90 Annular Edge Region 90a Inner annular part 90b Outer annular part 91 Circumference 92 Inner Circle 62a, 62e Main body 62b,62f Projecting part 62c,62g 1st segment 62d,62h Second segment 111 Main body 111a Board support surface

Claims

1. The base and a substrate support layer disposed on the base and made of an insulating material; an electrostatic internal electrode layer disposed in the substrate support layer and having a main body portion having a circular shape in a plan view and a plurality of protruding portions protruding radially from the main body portion; The electrostatic internal electrode layer has a symmetrical shape in a plan view. Board support.

2. The base and a substrate support layer disposed on the base and made of an insulating material; an electrostatic internal electrode layer disposed in the substrate support layer and having a main body portion having a circular shape in a plan view and a plurality of protruding portions protruding radially from the main body portion; the substrate support layer has an annular edge region in a plan view; the annular edge region having an inner annular portion and an outer annular portion; Each of the plurality of protruding portions has a substantially triangular shape having one apex on a boundary between the inner annular portion and the outer annular portion, Each of the plurality of protruding portions has an angle of 90 degrees or less at the apex. Board support.

3. The base and a substrate support layer disposed on the base and made of an insulating material; an electrostatic internal electrode layer disposed in the substrate support layer and having a main body portion having a circular shape in a plan view and a plurality of protruding portions protruding radially from the main body portion; the substrate support layer has an annular edge region in a plan view; the annular edge region having an inner annular portion and an outer annular portion; Each of the plurality of protruding portions has a substantially rectangular shape having two vertices on the boundary between the inner annular portion and the outer annular portion. Board support.

4. The inner annular portion has a width in the range of 0.1 to 5 mm. The substrate support according to claim 2 or 3.

5. The electrostatic internal electrode layer has an asymmetric shape in a plan view. The substrate support according to any one of claims 2 to 4.

6. The substrate support layer comprises: an upper portion disposed over the electrostatic internal electrode layer; a lower portion disposed below the electrostatic internal electrode layer; an intermediate annular portion surrounding the electrostatic inner electrode layer and disposed between the upper portion and the lower portion; The substrate support according to any one of claims 1 to 5.

7. The insulating material includes a ceramic material. The substrate support according to any one of claims 1 to 6.

8. the substrate support layer has an annular protrusion protruding upward from an upper surface of the substrate support layer, The annular protrusion portion overlaps with the plurality of protruding portions in a plan view. The substrate support according to any one of claims 1 to 7.

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