Plasma processing method and plasma processing apparatus

Abstract

To provide a technique capable of controlling a dimension of an aperture.SOLUTION: A plasma processing method includes (a) a step of providing a substrate having an etching target film, and a mask film which is formed on a top surface of the etching target film, and has a side surface defining at least one opening on the top surface of the etching target film, and an extending portion extending from the side surface to at least a part of the top surface of the etching target film, (b) a step of forming a deposited film on at least the side surface of the mask film, and (c) a step of etching at least a part of the deposited film using a plasma generated from a first processing gas to reduce a thickness of the deposited film. The first processing gas contains a gas for etching the etching target film, and (c) is executed until a part of the etching target film is etched in a depth direction such that the extending portion is removed.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] SUMMARY Exemplary embodiments of the present disclosure relate to a plasma processing method and a plasma processing apparatus. [Background technology]

[0002] Patent Document 1 describes a technique for improving the shape of an opening in a mask pattern. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2016 / 0379824 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides techniques that allow control of aperture size. [Means for solving the problem]

[0005] In one exemplary embodiment of the present disclosure, there is provided a plasma processing method including: (a) providing a substrate including a film to be etched; and a mask film formed on an upper surface of the film to be etched, the mask film having a side surface defining at least one opening on the upper surface of the film to be etched and an extension portion extending from the side surface to at least a portion of the upper surface of the film to be etched; (b) forming a deposition film on at least the side surface of the mask film; and (c) etching at least a portion of the deposition film using plasma generated from a first process gas to reduce a thickness of the deposition film, wherein the first process gas includes a gas for etching the film to be etched, and (c) is performed until a portion of the film to be etched is etched in the depth direction so that the extension portion is removed. Effect of the Invention

[0006] According to one exemplary embodiment of the present disclosure, a technique can be provided that allows the size of the opening to be controlled. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a diagram illustrating a schematic configuration of a plasma processing apparatus 1. [Diagram 2] 4 is a timing chart showing an example of high frequency power HF and an electric bias. [Diagram 3] FIG. 2 is a diagram illustrating a substrate processing system PS. [Figure 4A] 2 is a diagram illustrating an example of a substrate W. FIG. [Figure 4B] 2 is a diagram illustrating an example of a substrate W. FIG. [Diagram 5] 4 is a flowchart illustrating an example of the present processing method. [Figure 6A] 1 is a diagram illustrating an example of a cross-sectional structure of a substrate W after being processed in step ST1. FIG. [Figure 6B] 10 is a diagram illustrating an example of a cross-sectional structure of the substrate W after being processed in step ST2. FIG. [Figure 6C] 10 is a diagram illustrating an example of a cross-sectional structure of the substrate W after being processed in step ST3. FIG. [Figure 6D] 11 is a diagram illustrating an example of a cross-sectional structure of the substrate W after being processed in step ST4. FIG. [Figure 7] 11 is a diagram illustrating another example of the cross-sectional structure of the substrate W after being processed in step ST2. FIG. [Figure 8] 10 is a flowchart illustrating another example of the present processing method. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Each embodiment of the present disclosure will be described below.

[0009] In one exemplary embodiment, a plasma processing method is provided that includes the steps of: (a) providing a substrate including a film to be etched; and a mask film formed on an upper surface of the film to be etched, the mask film having a side surface defining at least one opening on the upper surface of the film to be etched and an extension portion extending from the side surface to at least a portion of the upper surface of the film to be etched; (b) forming a deposition film on at least the side surface of the mask film; and (c) etching at least a portion of the deposition film using plasma generated from a first processing gas to reduce a thickness of the deposition film, wherein the first processing gas includes a gas for etching the film to be etched, and (c) is performed until the portion of the film to be etched is etched in the depth direction so that the extension portion is removed.

[0010] In one exemplary embodiment, the film to be etched is a silicon-containing film, the deposited film is an organic film, and the first process gas includes a halogen-containing gas and a gas including at least one of oxygen, hydrogen, and nitrogen.

[0011] In one exemplary embodiment, the film to be etched is an organic film, the deposited film is a silicon-containing film, and the first process gas includes a halogen-containing gas and a gas including at least one of oxygen, hydrogen, and nitrogen.

[0012] In one exemplary embodiment, the film to be etched is a silicon-containing film, the deposited film is a silicon-containing film, and the first process gas includes a halogen-containing gas.

[0013] In one exemplary embodiment, the film to be etched is an organic film, the deposited film is an organic film, and the first process gas includes a gas containing at least one element of oxygen, hydrogen, and nitrogen.

[0014] In one exemplary embodiment, the halogen-containing gas is a fluorine-containing gas.

[0015] In one exemplary embodiment, the fluorine-containing gas is NF 3 Gas, SF6 Gas, HF gas and C t H u F v The gas is at least one selected from the group consisting of system gases (t and v are positive integers, and u is an integer of 0 or more).

[0016] In one exemplary embodiment, the gas containing at least one of oxygen, hydrogen, and nitrogen is O 2 Gas, O 3 Gas, CO gas, CO 2 Gas, H 2 Gas, H 2 O gas, H 2 O 2 Gas, NH 3 At least one gas selected from the group consisting of NO gas and NO gas.

[0017] In one exemplary embodiment, the first process gas is a mixture of HBr gas, HCl gas, Br 2 Gas, Cl 2 The gas contains at least one selected from the group consisting of HCl gas and HI gas.

[0018] In one exemplary embodiment, (b) and (c) are alternately repeated multiple times.

[0019] In one exemplary embodiment, the method further includes the step of (d) etching the film to be etched using plasma generated from the second process gas, using the mask film and the deposited film as a mask.

[0020] In one exemplary embodiment, the first process gas and the second process gas comprise the same gas.

[0021] In one exemplary embodiment, a plasma processing method is provided, comprising: (a) providing a substrate on a substrate support, the substrate comprising a film to be etched and a mask film formed on an upper surface of the film to be etched, the mask film having a side surface defining at least one opening on the upper surface of the film to be etched; (b) forming a deposited film having a first portion on the side surface of the mask film and a second portion on the upper surface of the mask film; (c) applying an electric bias to the substrate support and anisotropically etching at least a portion of the deposited film using plasma generated from a first process gas to reduce a thickness of the deposited film; and (d) etching the film to be etched using plasma generated from a second process gas, using the mask film and the deposited film as a mask, wherein in (c), an etching amount of the first portion is smaller than an etching amount of the second portion, the first process gas includes a gas for etching the film to be etched, and (c) is performed until a portion of the film to be etched is etched in a depth direction.

[0022] In one exemplary embodiment, a plasma processing apparatus is provided that includes a plasma processing chamber, a gas supply unit that supplies a processing gas to the plasma processing chamber, a power supply that supplies power to generate plasma in the plasma processing chamber, and a control unit, wherein the control unit performs the following control: (a) providing a substrate including a film to be etched and a mask film formed on an upper surface of the film to be etched, the mask film having a side surface that defines at least one opening on the upper surface of the film to be etched and an extension portion that extends from the side surface to at least a portion of the upper surface of the film to be etched; (b) forming a deposition film on at least the side surface of the mask film; and (c) etching at least a portion of the deposition film using plasma generated from a first processing gas to reduce a thickness of the deposition film, wherein in (c), the first processing gas includes a gas for etching the film to be etched, and (c) is performed until the portion of the film to be etched is etched in the depth direction so that the extension portion is removed.

[0023] Hereinafter, each embodiment of the present disclosure will be described in detail with reference to the drawings. In each drawing, the same or similar elements are given the same reference numerals, and duplicated explanations will be omitted. Unless otherwise specified, the positional relationship such as up, down, left, right, etc. will be described based on the positional relationship shown in the drawing. The dimensional ratio of the drawings does not indicate the actual ratio, and the actual ratio is not limited to the illustrated ratio.

[0024] <Configuration of Plasma Processing Apparatus 1> 1 is a diagram illustrating a schematic configuration of a plasma processing apparatus 1 according to an exemplary embodiment. A substrate processing method according to an exemplary embodiment (hereinafter, referred to as “the processing method”) may be performed using the plasma processing apparatus 1.

[0025] The plasma processing apparatus 1 shown in FIG. 1 includes a chamber 10. The chamber 10 provides an internal space 10s therein. The chamber 10 includes a chamber body 12. The chamber body 12 has a substantially cylindrical shape. The chamber body 12 is formed of, for example, aluminum. A corrosion-resistant film is provided on the inner wall surface of the chamber body 12. The corrosion-resistant film may be formed of a ceramic such as aluminum oxide or yttrium oxide.

[0026] A passage 12p is formed in a sidewall of the chamber body 12. The substrate W is transferred between the internal space 10s and the outside of the chamber 10 through the passage 12p. The passage 12p is opened and closed by a gate valve 12g. The gate valve 12g is provided along the sidewall of the chamber body 12.

[0027] A support 13 is provided on the bottom of the chamber body 12. The support 13 is made of an insulating material. The support 13 has a generally cylindrical shape. The support 13 extends upward from the bottom of the chamber body 12 in the internal space 10s. The support 13 supports a substrate support 14. The substrate support 14 is configured to support a substrate W in the internal space 10s.

[0028] The substrate support 14 has a lower electrode 18 and an electrostatic chuck 20. The substrate support 14 may further have an electrode plate 16. The electrode plate 16 is made of a conductor such as aluminum and has a substantially disk-like shape. The lower electrode 18 is provided on the electrode plate 16. The lower electrode 18 is made of a conductor such as aluminum and has a substantially disk-like shape. The lower electrode 18 is electrically connected to the electrode plate 16.

[0029] The electrostatic chuck 20 is provided on the lower electrode 18. The substrate W is placed on the upper surface of the electrostatic chuck 20. The electrostatic chuck 20 has a body and an electrode. The body of the electrostatic chuck 20 has a substantially disk shape and is formed from a dielectric material. The electrode of the electrostatic chuck 20 is a film-like electrode and is provided in the body of the electrostatic chuck 20. The electrode of the electrostatic chuck 20 is connected to a DC power supply 20p via a switch 20s. When a voltage from the DC power supply 20p is applied to the electrode of the electrostatic chuck 20, an electrostatic attractive force is generated between the electrostatic chuck 20 and the substrate W. The substrate W is attracted to the electrostatic chuck 20 by the electrostatic attractive force and is held by the electrostatic chuck 20.

[0030] An edge ring 25 is disposed on the substrate support 14. The edge ring 25 is a ring-shaped member. The edge ring 25 may be made of silicon, silicon carbide, quartz, or the like. The substrate W is disposed on the electrostatic chuck 20 and within a region surrounded by the edge ring 25.

[0031] A flow path 18f is provided inside the lower electrode 18. A heat exchange medium (e.g., a coolant) is supplied to the flow path 18f from a chiller unit provided outside the chamber 10 via a pipe 22a. The heat exchange medium supplied to the flow path 18f is returned to the chiller unit via a pipe 22b. In the plasma processing apparatus 1, the temperature of the substrate W placed on the electrostatic chuck 20 is adjusted by heat exchange between the heat exchange medium and the lower electrode 18.

[0032] The plasma processing apparatus 1 is provided with a gas supply line 24. The gas supply line 24 supplies a heat transfer gas (for example, He gas) from a heat transfer gas supply mechanism to the gap between the upper surface of the electrostatic chuck 20 and the back surface of the substrate W.

[0033] The plasma processing apparatus 1 further includes an upper electrode 30. The upper electrode 30 is provided above the substrate support 14. The upper electrode 30 is supported on the upper part of the chamber body 12 via a member 32. The member 32 is made of an insulating material. The upper electrode 30 and the member 32 close the upper opening of the chamber body 12.

[0034] The upper electrode 30 may include a top plate 34 and a support 36. The bottom surface of the top plate 34 is the bottom surface on the side of the internal space 10s and defines the internal space 10s. The top plate 34 may be formed of a low-resistance conductor or semiconductor that generates little Joule heat. The top plate 34 has a plurality of gas discharge holes 34a penetrating the top plate 34 in its plate thickness direction.

[0035] The support 36 detachably supports the top plate 34. The support 36 is made of a conductive material such as aluminum. A gas diffusion chamber 36a is provided inside the support 36. The support 36 has a plurality of gas holes 36b extending downward from the gas diffusion chamber 36a. The plurality of gas holes 36b are connected to the plurality of gas discharge holes 34a, respectively. A gas inlet 36c is formed in the support 36. The gas inlet 36c is connected to the gas diffusion chamber 36a. A gas supply pipe 38 is connected to the gas inlet 36c.

[0036] A gas source group 40 is connected to the gas supply pipe 38 via a flow rate controller group 41 and a valve group 42. The flow rate controller group 41 and the valve group 42 configure a gas supply unit. The gas supply unit may further include a gas source group 40. The gas source group 40 includes a plurality of gas sources. The plurality of gas sources include sources of processing gases used in the present processing method. The flow rate controller group 41 includes a plurality of flow rate controllers. Each of the plurality of flow rate controllers in the flow rate controller group 41 is a mass flow controller or a pressure-controlled flow rate controller. The valve group 42 includes a plurality of opening and closing valves. Each of the plurality of gas sources in the gas source group 40 is connected to the gas supply pipe 38 via a corresponding flow rate controller in the flow rate controller group 41 and a corresponding opening and closing valve in the valve group 42.

[0037] In the plasma processing apparatus 1, a shield 46 is detachably provided along the inner wall surface of the chamber body 12 and the outer periphery of the support part 13. The shield 46 prevents reaction by-products from adhering to the chamber body 12. The shield 46 is formed by forming a corrosion-resistant film on the surface of a base material made of, for example, aluminum. The corrosion-resistant film may be made of a ceramic such as yttrium oxide.

[0038] A baffle plate 48 is provided between the support 13 and the side wall of the chamber body 12. The baffle plate 48 is formed, for example, by forming a corrosion-resistant film (a film of yttrium oxide or the like) on the surface of a member made of aluminum. A plurality of through holes are formed in the baffle plate 48. An exhaust port 12e is provided below the baffle plate 48 and at the bottom of the chamber body 12. An exhaust device 50 is connected to the exhaust port 12e via an exhaust pipe 52. The exhaust device 50 includes a pressure regulating valve and a vacuum pump such as a turbo molecular pump.

[0039] The plasma processing apparatus 1 includes a high-frequency power supply 62 and a bias power supply 64. The high-frequency power supply 62 is a power supply that generates high-frequency power HF. The high-frequency power HF has a first frequency suitable for generating plasma. The first frequency is, for example, a frequency within a range of 27 MHz to 100 MHz. The high-frequency power supply 62 is connected to the lower electrode 18 via a matching device 66 and the electrode plate 16. The matching device 66 has a circuit for matching the impedance of the load side (lower electrode 18 side) of the high-frequency power supply 62 to the output impedance of the high-frequency power supply 62. The high-frequency power supply 62 may be connected to the upper electrode 30 via the matching device 66. The high-frequency power supply 62 constitutes an example of a plasma generating unit.

[0040] The bias power supply 64 is a power supply that generates an electric bias. The bias power supply 64 is electrically connected to the lower electrode 18. The electric bias has a second frequency. The second frequency is lower than the first frequency. The second frequency is, for example, a frequency within a range of 400 kHz to 13.56 MHz. When the electric bias is used together with the high frequency power HF, it is applied to the substrate support 14 to attract ions to the substrate W. In one example, the electric bias is applied to the lower electrode 18. When the electric bias is applied to the lower electrode 18, the potential of the substrate W placed on the substrate support 14 fluctuates within a period defined by the second frequency. The electric bias may be applied to a bias electrode provided in the electrostatic chuck 20.

[0041] In one embodiment, the electric bias may be a high frequency power LF having a second frequency. When the high frequency power LF is used together with the high frequency power HF, it is used as a high frequency bias power for attracting ions to the substrate W. A bias power supply 64 configured to generate the high frequency power LF is connected to the lower electrode 18 via a matching box 68 and the electrode plate 16. The matching box 68 has a circuit for matching the impedance of the load side (lower electrode 18 side) of the bias power supply 64 to the output impedance of the bias power supply 64.

[0042] It is also possible to generate plasma using high frequency power LF without using high frequency power HF, that is, using only a single high frequency power. In this case, the frequency of the high frequency power LF may be a frequency higher than 13.56 MHz, for example, 40 MHz. In this case, the plasma processing apparatus 1 does not need to include the high frequency power supply 62 and the matching box 66. In this case, the bias power supply 64 constitutes an example of a plasma generating unit.

[0043] In another embodiment, the electrical bias may be a pulsed voltage. In this case, the bias power supply may be a DC power supply. The bias power supply may be configured to provide a pulsed voltage itself or may be configured to include a device for pulsing the voltage downstream of the bias power supply. In one example, the pulsed voltage is applied to the lower electrode 18 so as to generate a negative potential on the substrate W. The pulsed voltage may be a square wave, a triangular wave, an impulse, or may have other waveforms.

[0044] The period of the pulse voltage is determined by the second frequency. The period of the pulse voltage includes two periods. The pulse voltage in one of the two periods is a negative voltage. The level (i.e., absolute value) of the voltage in one of the two periods is higher than the level (i.e., absolute value) of the voltage in the other of the two periods. The voltage in the other period may be either negative or positive. The level of the negative voltage in the other period may be greater than zero or may be zero. In this embodiment, the bias power supply 64 is connected to the lower electrode 18 via the low-pass filter and the electrode plate 16. The bias power supply 64 may be connected to a bias electrode provided in the electrostatic chuck 20 instead of the lower electrode 18.

[0045] In one embodiment, the bias power supply 64 may provide a continuous wave of electrical bias to the lower electrode 18. That is, the bias power supply 64 may provide an electrical bias to the lower electrode 18 continuously.

[0046] In another embodiment, the bias power supply 64 may apply a pulse wave of an electric bias to the lower electrode 18. The pulse wave of the electric bias may be applied periodically to the lower electrode 18. The period of the pulse wave of the electric bias is defined by a third frequency. The third frequency is lower than the second frequency. The third frequency is, for example, 1 Hz or more and 200 kHz or less. In another example, the third frequency may be 5 Hz or more and 100 kHz or less.

[0047] The period of the pulse wave of the electric bias includes two periods, namely, an H period and an L period. The level of the electric bias in the H period (i.e., the level of the pulse of the electric bias) is higher than the level of the electric bias in the L period. That is, the pulse wave of the electric bias may be applied to the lower electrode 18 by increasing or decreasing the level of the electric bias. The level of the electric bias in the L period may be greater than zero. Alternatively, the level of the electric bias in the L period may be zero. That is, the pulse wave of the electric bias may be applied to the lower electrode 18 by alternately switching between supplying and stopping the supply of the electric bias to the lower electrode 18. Here, when the electric bias is a high frequency power LF, the level of the electric bias is the power level of the high frequency power LF. When the electric bias is a pulse wave of a negative polarity DC voltage, the level of the electric bias is the effective value of the absolute value of the negative polarity DC voltage. The duty ratio of the pulse wave of the electric bias, that is, the proportion of the H period in the period of the pulse wave of the electric bias, is, for example, 1% or more and 80% or less. In another example, the duty ratio of the pulse wave of the electric bias may be 5% or more and 50% or less. Alternatively, the duty ratio of the pulse wave of the electric bias may be 50% or more and 99% or less. In addition, during the period in which the electric bias is supplied, the L period corresponds to the above-mentioned first period, and the H period corresponds to the above-mentioned second period. In addition, the level of the electric bias in the L period corresponds to the above-mentioned 0 or first level, and the level of the electric bias in the H period corresponds to the above-mentioned second level.

[0048] In one embodiment, the high frequency power source 62 may supply a continuous wave of high frequency power HF, i.e., the high frequency power source 62 may supply the high frequency power HF continuously.

[0049] In another embodiment, the high frequency power supply 62 may supply a pulse wave of high frequency power HF. The pulse wave of high frequency power HF may be supplied periodically. The period of the pulse wave of high frequency power HF is defined by a fourth frequency. The fourth frequency is lower than the second frequency. In one embodiment, the fourth frequency is the same as the third frequency. The period of the pulse wave of high frequency power HF includes two periods, namely, an H period and an L period. The power level of the high frequency power HF in the H period is higher than the power level of the high frequency power HF in the L period of the two periods. The power level of the high frequency power HF in the L period may be greater than zero or may be zero. Note that, among the periods during which the high frequency power HF is supplied, the L period corresponds to the third period described above, and the H period corresponds to the fourth period described above. Also, the level of the high frequency power HF in the L period corresponds to the 0 or third level described above, and the level of the electrical bias in the H period corresponds to the fourth level described above.

[0050] The period of the pulse wave of the high frequency power HF may be synchronized with the period of the pulse wave of the electric bias. The H period in the period of the pulse wave of the high frequency power HF may be synchronized with the H period in the period of the pulse wave of the electric bias. Alternatively, the H period in the period of the pulse wave of the high frequency power HF may not be synchronized with the H period in the period of the pulse wave of the electric bias. The time length of the H period in the period of the pulse wave of the high frequency power HF may be the same as or different from the time length of the H period in the period of the pulse wave of the electric bias. A part or the whole of the H period in the period of the pulse wave of the high frequency power HF may overlap with the H period in the period of the pulse wave of the electric bias.

[0051] FIG. 2 is a timing chart showing an example of the high frequency power HF and the electric bias. FIG. 2 shows an example in which pulse waves are used as both the high frequency power HF and the electric bias. In FIG. 2, the horizontal axis shows time. In FIG. 2, the vertical axis shows the power levels of the high frequency power HF and the electric bias. "L1" of the high frequency power HF indicates that the high frequency power HF is not supplied or is lower than the power level indicated by "H1". "L2" of the electric bias indicates that the electric bias is not supplied or is lower than the power level indicated by "H2". When the electric bias is a pulse wave of a negative polarity DC voltage, the level of the electric bias is the effective value of the absolute value of the negative polarity DC voltage. Note that the magnitude of the power levels of the high frequency power HF and the electric bias in FIG. 2 does not indicate a relative relationship between the two, and may be set arbitrarily. FIG. 2 shows an example in which the period of the high frequency power HF pulse wave is synchronized with the period of the electrical bias pulse wave, and the time lengths of the H and L periods of the high frequency power HF pulse wave are the same as the time lengths of the H and L periods of the electrical bias pulse wave.

[0052] Returning to FIG. 1, the description will be continued. The plasma processing apparatus 1 further includes a power supply 70. The power supply 70 is connected to the upper electrode 30. In one example, the power supply 70 may be configured to supply a DC voltage or low-frequency power to the upper electrode 30 during plasma processing. For example, the power supply 70 may supply a negative DC voltage to the upper electrode 30, or may periodically supply low-frequency power. The DC voltage or low-frequency power may be supplied as a pulse wave or a continuous wave. In this embodiment, positive ions present in the plasma processing space 10s are attracted to the upper electrode 30 and collide with it. As a result, secondary electrons are emitted from the upper electrode 30. The emitted secondary electrons modify the mask film MK and improve the etching resistance of the mask film MK. In addition, the secondary electrons contribute to improving the plasma density. In addition, the charged state of the substrate W is neutralized by irradiation of the secondary electrons, so that the linearity of the ions into the structure (etched shape) formed by etching is improved. Furthermore, when the upper electrode 30 is made of a silicon-containing material, the collision of the positive ions causes silicon to be emitted together with secondary electrons. The emitted silicon combines with oxygen in the plasma to form a silicon oxide compound that is deposited on the mask and functions as a protective film. Supplying a DC voltage or low-frequency power to the upper electrode 30 not only improves the selectivity, but also suppresses shape abnormalities in the structure formed by etching and improves the etching rate.

[0053] When plasma processing is performed in the plasma processing apparatus 1, a gas is supplied from a gas supply unit to the internal space 10s. In addition, a high-frequency electric field is generated between the upper electrode 30 and the lower electrode 18 by supplying high-frequency power HF and / or an electric bias. The generated high-frequency electric field generates plasma from the gas in the internal space 10s.

[0054] The plasma processing apparatus 1 may further include a control unit 80. The control unit 80 may be a computer including a processor, a storage unit such as a memory, an input device, a display device, an input / output interface for signals, and the like. The control unit 80 controls each unit of the plasma processing apparatus 1. In the control unit 80, an operator can use the input device to input commands and the like to manage the plasma processing apparatus 1. In addition, the control unit 80 can visualize and display the operating status of the plasma processing apparatus 1 using the display device. Furthermore, the storage unit stores a control program and recipe data. The control program is executed by the processor to execute various processes in the plasma processing apparatus 1. The processor executes the control program and controls each unit of the plasma processing apparatus 1 according to the recipe data. In one exemplary embodiment, a part or all of the control unit 80 may be provided as a part of the configuration of an external device of the plasma processing apparatus 1.

[0055] <Configuration of the Substrate Processing System PS> 3 is a schematic diagram of a substrate processing system PS according to an exemplary embodiment, the processing method may be performed using the substrate processing system PS.

[0056] The substrate processing system PS has substrate processing chambers PM1 to PM6 (hereinafter collectively referred to as "substrate processing modules PM"), a transfer module TM, load lock modules LLM1 and LLM2 (hereinafter collectively referred to as "load lock modules LLM"), a loader module LM, and load ports LP1 to LP3 (hereinafter collectively referred to as "load ports LP"). A controller CT controls each component of the substrate processing system PS to perform a given process on a substrate W.

[0057] The substrate processing module PM performs processes such as etching, trimming, film formation, annealing, doping, lithography, cleaning, and ashing on the substrate W. A part of the substrate processing module PM may be a measurement module, which may measure the thickness of a film formed on the substrate W or the dimensions of a pattern formed on the substrate W, for example, by optical techniques. The plasma processing apparatus 1 shown in FIG. 1 is an example of the substrate processing module PM.

[0058] The transfer module TM has a transfer device for transferring a substrate W, and transfers the substrate W between the substrate processing modules PM or between the substrate processing module PM and the load lock module LLM. The substrate processing module PM and the load lock module LLM are disposed adjacent to the transfer module TM. The transfer module TM, the substrate processing module PM, and the load lock module LLM are spatially isolated from or connected to each other by an openable and closable gate valve.

[0059] The load lock modules LLM1 and LLM2 are provided between the transfer module TM and the loader module LM. The load lock module LLM can switch its internal pressure between atmospheric pressure and vacuum. The load lock module LLM transfers the substrate W from the loader module LM, which is at atmospheric pressure, to the transfer module TM, which is at vacuum, and also transfers the substrate W from the transfer module TM, which is at vacuum, to the loader module LM, which is at atmospheric pressure.

[0060] The loader module LM has a transport device for transporting the substrate W, and transports the substrate W between the load lock module LLM and the load board LP. Inside the load port LP, for example, a FOUP (Front Opening Unified Pod) capable of storing 25 substrates W or an empty FOUP can be placed. The loader module LM takes out the substrate W from the FOUP in the load port LP and transports it to the load lock module LLM. The loader module LM also takes out the substrate W from the load lock module LLM and transports it to the FOUP in the load board LP.

[0061] The controller CT controls each component of the substrate processing system PS to perform a given process on the substrate W. The controller CT stores a recipe in which a process procedure, process conditions, transport conditions, etc. are set, and controls each component of the substrate processing system PS to perform a given process on the substrate W in accordance with the recipe. The controller CT may also have some or all of the functions of the controller 80 of the plasma processing apparatus 1 shown in FIG.

[0062] <An example of the substrate W> 4A and 4B are diagrams illustrating an example of a substrate W. Fig. 4A is a plan view of the substrate W. Fig. 4B is a cross-sectional view of the substrate W taken along line AA'. The substrate W has a structure in which an undercoat film UF, an etching target film EF, and a mask film MF are laminated in this order. The substrate W is an example of a substrate to which the present processing method can be applied.

[0063] The undercoat film UF may be, for example, a silicon wafer or an organic film, a dielectric film, a metal film, a semiconductor film, or the like formed on a silicon wafer. The undercoat film UF may be configured by stacking a plurality of films. For example, the undercoat film UF may be configured by alternately stacking a silicon oxide film and a polycrystalline silicon film or a silicon oxide film and a silicon nitride film.

[0064] The film to be etched EF is a film different from the undercoat film UF. The film to be etched EF may be, for example, a silicon-containing film or an organic film. The silicon-containing film is, for example, a silicon oxide film, a silicon nitride film, a silicon oxynitride film (SiON film), or a silicon-containing antireflective film (SiARC). The organic film is, for example, a spin-on carbon (SOC) film, an amorphous carbon film, or an organic antireflective film (BARC).

[0065] The mask film MF is formed on the film to be etched EF. The mask film MF has an upper surface TS, a side surface SS continuing from the upper surface TS, and a lower surface in contact with the film to be etched EF. The mask film MF has at least one opening OP. The opening OP is defined by the side surface SS of the mask film MF. The opening OP is a space on the film to be etched EF surrounded by the side surface SS. That is, in FIG. 4B, the upper surface of the film to be etched EF has a portion covered by the mask film MF and a portion exposed at the bottom surface BS of the opening OP.

[0066] The openings OP may have any shape in a plan view of the substrate W (when the substrate W is viewed from top to bottom in FIG. 4B). The shape may be, for example, a circle, an ellipse, a rectangle, a line, or a combination of one or more of these. The mask film MF may have a plurality of openings OP. As shown in FIG. 4A, the plurality of openings OP may each have a hole shape and form an array pattern arranged at regular intervals. Also, the plurality of openings OP may each have a line shape and be arranged at regular intervals to form a line and space pattern.

[0067] The side surface SS of the mask film MF may have an extension portion SC extending from the side surface SS to the opening OP. The extension portion SC is, for example, a portion extending from the side surface SS of the mask film MF to at least a part of the upper surface of the etching target film EF. The extension portion SC may be, for example, a residue (scum) of the mask film MF present on the outer edge of the bottom surface BS of the opening OP. The residue may be, for example, a resist residue that was not completely removed in a process (for example, a development process) of forming the opening OP in the mask film MF. The extension portion SC may be a protrusion protruding from the side surface SS toward the opening OP in a region of the side surface SS that is away from the bottom surface BS upward. The protrusion is a portion of the side surface SS that protrudes into the opening OP more than its surroundings or periphery. The protrusion may be a residue of the mask film MF. The side surface SS may have a recess such as a dent or a crack (including a break in a pattern such as a line pattern). The residues of the mask film MF include those constituting the above-mentioned extension portion SC, as well as residues isolated on the bottom surface BS of the opening OP without being connected to the side surface SS, residues extending across the opening OP or bridging between the side surfaces SS, etc. These residues may be, for example, resist residues that were not completely removed in the process of forming the opening OP in the mask film MF (for example, the development process).

[0068] The mask film MF is a film different from the film EF to be etched. The mask film MF may be, for example, a silicon-containing film or an organic film. The silicon-containing film is, for example, a silicon oxide film, a silicon nitride film, a silicon oxynitride film (SiON film), or a silicon-containing anti-reflective film (SiARC). The organic film is, for example, a spin-on carbon (SOC) film, an amorphous carbon film, or a photoresist film.

[0069] Each of the films constituting the substrate W (undercoat film UF, etching target film EF, mask film MF) may be formed by a CVD method, an ALD method, a spin coating method, or the like. Each of the above films may be a flat film, or may have irregularities. The opening OP may be formed by etching the mask film MF, or may be formed by lithography. Note that a laminate of two or more of the mask film MF, etching target film EF, and undercoat film UF may function as a multilayer mask. For example, the substrate W may further have another film under the undercoat film UF, and the other film may be etched using the laminate of the mask film MF, etching target film EF, and undercoat film UF as a multilayer mask.

[0070] <An example of this processing method> Fig. 5 is a flow chart showing an example of the present processing method. As shown in Fig. 5, the present processing method includes a substrate providing step (step ST1), a deposition film forming step (step ST2), and a trimming step (step ST3). The present processing method may further include an etching step (step ST4).

[0071] 6A to 6D are diagrams showing an example of the cross-sectional structure of the substrate W in each step of the present processing method. FIG. 6A is an example of the cross-sectional structure of the substrate W after processing in step ST1. FIG. 6B is an example of the cross-sectional structure of the substrate W after processing in step ST2. FIG. 6C is an example of the cross-sectional structure of the substrate W after processing in step ST3. FIG. 6D is an example of the cross-sectional structure of the substrate W after processing in step ST4. Also, FIG. 7 is a diagram showing another example of the cross-sectional structure of the substrate W after processing in step ST2.

[0072] Each process may be performed in the substrate processing apparatus 1 shown in Fig. 1. In the following, an example will be described in which a control unit 80 shown in Fig. 1 controls each unit of the substrate processing apparatus 1 to perform the present processing method on a substrate W. Each process may be performed in any substrate processing module PM in the substrate processing system PS shown in Fig. 3. For example, the deposition film forming process, trimming process, and etching process may be performed in different substrate processing modules PM, or may be performed consecutively in one substrate processing module PM.

[0073] (Process ST1: Substrate provision process) In step ST1, the substrate W is provided in the internal space 10s of the chamber 10. The substrate W is placed on the upper surface of the substrate support 14 and held by the electrostatic chuck 20. The substrate W has an etching target film EF and a mask film MF formed in this order on the undercoat film UF (see FIG. 6A). At least a part of the process for forming each film on the substrate W may be performed in the internal space 10s. Alternatively, after all or a part of each film on the substrate W is formed in an apparatus or chamber external to the substrate processing apparatus 1 (for example, a substrate processing module PM in the substrate processing system PS), the substrate W may be carried into the internal space 10s and placed on the upper surface of the substrate support 14.

[0074] (Step ST2: Deposition film formation step) In step ST2, a deposition film TD is formed (see FIG. 6B). The deposition film TD is formed to have a first portion TD1 on at least the side surface SS of the mask film MF. The film thickness of the first portion TD1 may be uniform along the depth direction (the direction from top to bottom in FIG. 6B). The film thickness of the first portion TD1 may increase or decrease along the depth direction, for example, the film thickness of the first portion TD1 may decrease along the depth direction. The surface of the first portion TD1 may have a smaller surface roughness (including the number and size of irregularities) than the side surface SS of the mask film MF. When the side surface SS of the mask film MF has a recess or a crack (including a break in a pattern such as a line pattern), the first portion TD1 may be formed by being embedded in the recess or crack. This can reduce the surface roughness of the side surface SS that defines the opening OP of the mask film MF.

[0075] The deposited film TD may be formed to have a second portion TD2 on the upper surface TS of the mask film MF. The deposited film TD may be formed to have a third portion TD3 on the etching target film EF exposed at the bottom surface BS of the opening OP, or may be formed without the third portion TD3. When the deposited film TD has the second portion TD3, the first portion TD1 and the third portion TD3 may be curved or flat. The film thickness of the second portion TD2 may be thicker than the film thickness of the first portion TD1 and the third portion TD3. The second portion TD2 may have a portion (overhang) that protrudes from the upper surface TS to the opening OP in a planar view of the substrate W. The overhang may be formed to overlap, for example, a part or all of the extension portion SC in a planar view of the substrate W. The surface of the portion may be curved or flat.

[0076] The deposited film TD may be, for example, an organic film. In this case, the deposited film TD may be, for example, a hydrocarbon (C x H y The deposition gas may be formed by PECVD using plasma generated from a deposition gas containing a C t H u F v The deposition gas may be a gas of the system (t and v are positive integers, and u is an integer equal to or greater than 0). 4 Gas, C. 2 H 2 Gas, C. 2 H 4 Gas, C. 3 H 6 Gas, CH 3 F gas and / or C 4 F 6 The processing gas may be Ar, He, or N 2 Inert gas such as H and / or 2The mask film MF may further include a gas. When the mask film MF includes a silicon-containing film, if a gas containing fluorine is used as the deposition gas, the mask film MF may be etched by the plasma generated from the deposition gas containing fluorine. For this reason, when the mask film MF includes a silicon-containing film, conditions in which deposition is more dominant than etching should be selected, or CH 2 O 4 should be used as the deposition gas. 4 Gas, C. 2 H 2 Gas, C. 2 H 4 Gas or C 3 H 6 It is preferable to use a hydrocarbon gas such as gas.

[0077] The deposited film TD may be formed by thermal CVD, ALD, or subconformal ALD in addition to PECVD. Among these, ALD includes the following steps. First, in the first step, a precursor gas is supplied to the substrate W, and the precursor gas is adsorbed on the surface of the substrate W, specifically, on the surface of the mask film MF and the surface of the etching target film EF exposed at the bottom surface BS of the opening OP. At this time, plasma may be generated from the precursor gas. Next, in the second step, a reactive gas is supplied to the substrate W. The reactive gas is a gas that reacts with the precursor gas adsorbed on the surface of the substrate W. As a result, the precursor gas reacts with the reactive gas to form the deposited film TD. At this time, plasma may be generated from the reactive gas. Also, after the first step and before the second step and / or after the second step, an inert gas or the like may be supplied to the substrate W to purge excess precursor gas and reactive gas (purge step). In ALD, a predetermined material is self-controlled to adsorb and react with a substance present on the surface of the substrate W to form the deposited film TD. For this reason, ALD can usually form a conformal deposited film TD by providing a sufficient processing time.

[0078] In contrast, subconformal ALD is a technique for setting processing conditions so as not to complete self-limiting adsorption or reaction on the surface of the substrate W. There are at least the following two processing modes in subconformal ALD. (i) After adsorbing the precursor gas on the entire surface of the substrate W, the reaction gas is controlled so as not to cover the entire surface of the precursor gas adsorbed on the substrate W. (ii) After adsorbing the precursor gas only on a part of the surface of the substrate W, the reaction gas is reacted only with the precursor adsorbed on the surface of the substrate W. According to such sub-conformal ALD, a film with a film thickness decreasing along the depth direction of the mask film MF can be formed.

[0079] The deposited film TD may be, for example, a Si-containing film. In this case, the deposited film TD may be formed by PECVD using plasma generated from a processing gas containing, for example, a Si-containing gas. As an example, the processing gas is SiCl 4 gas, Si 2 Cl 6 gas, SiF 4 gas and / or an aminosilane-based gas. Further, the processing gas may further contain an inert gas such as Ar or He. Note that the deposited film TD may be formed by thermal CVD, ALD, or sub-conformal ALD.

[0080] The film formation conditions of the deposited film TD may be adjusted so as to obtain a loading effect (that is, so that the film thickness of the deposited film TD varies according to the opening width of the opening OP). For example, as shown in FIG. 7, by adjusting the film formation conditions, the film thickness of the deposited film TD of the opening OP1 with a width d1 may be formed to be thicker than the film thickness of the deposited film TD of the opening OP2 with a width d2 (d2 <d1). Thereby, the variation in the opening width of the opening OP can be adjusted.

[0081] (Step ST3: Trimming step) In step ST3, a part of the deposition film TD is trimmed by plasma etching using a first processing gas (see FIG. 6C). Here, trimming is a step of etching a part of the deposition film TD by plasma generated from the first processing gas to reduce the thickness of the deposition film TD. In this processing method, the first processing gas contains one or more gases for etching the deposition film TD and the etching target film EF. That is, the etching target film EF is etched in addition to the deposition film TD by the plasma generated from the first processing gas. In this processing method, trimming is performed until the part TD3 of the deposition film TD is removed and further, a part of the etching target film EF (a part located below the opening OP) is etched in the depth direction. The surface of the etching target film EF exposed to the opening OP after trimming may be a flat surface or a curved surface. The curved surface can be, for example, a shape corresponding to the extension part SC of the mask film MF (a shape in which the extension part SC of the mask film MF is pressed down in the depth direction of the etching target film EF) as shown in FIG. 6C.

[0082] By trimming, in addition to the deposition film TD, a part of the mask film MF may be removed. For example, an extension portion SC extending from a side surface SS of the mask film MF may be removed. Also, after trimming, a part of the deposition film TD (for example, parts TD1 and TD2) may remain without being removed. The part TD1 of the deposition film TD that remains without being removed may contribute to improving the variation in the opening width of the opening OP of the mask film MF and the surface roughness (including the number and size of irregularities) of the side surface SS of the mask film MF. Also, the part TD2 of the deposition film TD that remains without being removed may provide protection for the mask film MF in step ST4 (etching).

[0083] The first process gas may be selected according to the materials constituting the deposited film TD and the etching target film MF. For example, when the etching target film EF is a silicon-containing film and the deposited film TD is an organic film, the first process gas may include a halogen-containing gas and a gas containing at least one element of oxygen, hydrogen, and nitrogen. When the etching target film EF is an organic film and the deposited film TD is a silicon-containing film, the first process gas may include a halogen-containing gas and a gas containing at least one element of oxygen, hydrogen, and nitrogen. When the etching target film EF and the deposited film TD are silicon-containing films, the first process gas may include a halogen-containing gas. When the etching target film EF and the deposited film TD are organic films, the first process gas may include a gas containing at least one element of oxygen, hydrogen, and nitrogen.

[0084] The halogen-containing gas contained in the first process gas contributes to adjusting the shape of the deposited film TD and the mask film MF made of a silicon-containing film during trimming. For example, the halogen-containing gas can remove an overhang formed in the portion TD2 of the deposited film TD made of a silicon-containing film and the portion TD3 of the deposited film TD. The halogen-containing gas can also remove the extension portion SC extending from the side surface SS of the mask film MF made of a silicon-containing film, thereby reducing the surface roughness of the side surface SS of the mask film MF. The halogen-containing gas also contributes to etching the etching target film EF made of a silicon-containing film in the depth direction during trimming.

[0085] The halogen-containing gas may be, for example, a fluorine-containing gas. The fluorine-containing gas may be, for example, NF 3 Gas, SF 6 Gas, HF gas and C t H u F v The gas may be at least one selected from the group consisting of gases of the system (t and v are positive integers, and u is an integer equal to or greater than 0). t H u F v The gas used is CF 4 Gas and / or CHF 3 It's gas.

[0086] The gas containing at least one of oxygen, hydrogen, and nitrogen contained in the first process gas contributes to adjusting the shape of the deposited film TD and the mask film MF made of an organic film during trimming. The gas can remove an overhang formed in the portion TD2 of the deposited film TD made of an organic film and the portion TD3 of the deposited film TD. The gas can also remove the extension portion SC extending from the side surface SS of the mask film MF made of an organic film, thereby reducing the surface roughness of the side surface SS of the mask film MF. The gas can also contribute to etching the etching target film EF made of an organic film in the depth direction during trimming.

[0087] The gas containing at least one of oxygen, hydrogen, and nitrogen is, for example, O 2 Gas, O 3 Gas, CO gas, CO 2 Gas, NO gas, H 2 O, H 2 O 2 Gas, H 2 Gas, N 2 and N.H. 3 The gas may be at least one selected from the group consisting of gases.

[0088] The first process gas may further include a halogen-containing gas other than fluorine. Such a halogen-containing gas other than fluorine may be, for example, HBr gas, HCl gas, Br 2 Gas, Cl 2 The first process gas may be at least one selected from the group consisting of a nitrogen gas and a hydrogen gas. The first process gas may further include an inert gas such as Ar or He.

[0089] The trimming may be performed by anisotropic etching. That is, the amount of etching (amount of reduction in film thickness) of the portion TD1 of the deposition film TD during trimming may be set to be smaller than the amount of etching (amount of reduction in film thickness) of the portion TD2 or portion TD3 of the deposition film TD. Similarly, the amount of etching of the side surface SS of the mask film MF may be set to be smaller than the amount of etching of the upper surface TS of the mask film MF. The anisotropic etching may be performed by applying an electric bias to the substrate support 14 that supports the substrate W, or by selecting a first process gas. For example, when the deposition film TD made of an organic film is trimmed with a gas containing at least one element of oxygen, hydrogen, and nitrogen, the anisotropic etching may be performed by applying an electric bias to the substrate support 14. Also, for example, when the deposition film TD made of a silicon-containing film is trimmed, NF may be used as the first process gas. 3 Anisotropic etching may be performed using a fluorine-containing gas such as a gas.

[0090] (Process ST4: Etching process) In step ST4, the etching target film EF is etched using plasma generated from the second processing gas (see FIG. 6D). The etching target film EF is anisotropically etched using the mask film MF and the deposition film TD1 as a mask. That is, the etching target film EF is anisotropically etched in the depth direction of the opening OP from the portion exposed at the bottom surface BS of the opening OP.

[0091] The second process gas may be selected so that the film to be etched EF is selectively etched with respect to the first film TD1 and the mask film MF. When the film to be etched EF is a silicon-containing film, the second process gas may include a halogen-containing gas. The halogen-containing gas may be, for example, a fluorine-containing gas. The fluorine-containing gas may be, for example, NF 3 Gas, SF 6 Gas, HF gas and C t H u F v The gas may be at least one selected from the group consisting of gases of the system (t and v are positive integers, and u is an integer equal to or greater than 0). t Hu F v The gas used is CF 4 Gas and / or CHF 3 The halogen-containing gas contained in the second process gas may be the same as or different from the halogen-containing gas contained in the first process gas. The second process gas may be Ar, He, or N 2 Inert gas such as H and / or 2 It may further comprise a gas.

[0092] When the etching target film EF is an organic film, the second process gas may include a gas containing at least one element of oxygen, hydrogen, and nitrogen. 2 Gas, O 3 Gas, CO gas, CO 2 Gas, NO gas, H 2 O, H 2 O 2 Gas, H 2 Gas, N 2 and N.H. 3 The second process gas may be at least one selected from the group consisting of oxygen, hydrogen, and nitrogen. The gas containing at least one of oxygen, hydrogen, and nitrogen contained in the second process gas may be the same as or different from the gas containing at least one of oxygen, hydrogen, and nitrogen contained in the first process gas. The second process gas may further contain an inert gas such as Ar or He.

[0093] In this processing method, trimming in step ST3 is performed until a portion of the etching target film EF is removed. Since a portion of the etching target film EF is removed, the extension portion SC extending into the opening OP of the mask film MF is easily removed. This makes it possible to appropriately control the size or shape of the opening OP without repeating the deposition step and the trimming step alternately multiple times, or while suppressing the number of times the steps are repeated (i.e., while suppressing an increase in throughput). In this processing method, the etching target film EF is etched using the mask film MF as a mask, so that the size or shape of the opening formed in the etching target film EF can be appropriately controlled.

[0094] <Example> Next, examples and reference examples of the present processing method will be described. The present disclosure is not limited to the following examples.

[0095] The substrate W in the embodiment has a laminated structure of a spin-on carbon film (undercoat film UF), a silicon-containing anti-reflective film (etching target film EF), and a photoresist film (mask film MF) (see FIG. 6A). The opening pattern of the photoresist film is the hole pattern shown in FIG. 4A. In the embodiment, an organic film (deposition film TD) was deposited on the substrate W by PECVD using a mixed gas of a hydrocarbon gas and an inert gas (see FIG. 6B). Then, a part of the organic film and a part of the photoresist film were trimmed by plasma etching using a mixed gas (first processing gas) of a halogen-containing gas, an oxygen-containing gas, and an inert gas. At this time, the trimming was performed until a part of the silicon-containing anti-reflective film was etched in the depth direction so that the extension portion SC extending from the side wall SS to a part of the upper surface of the etching target film EF was removed (see FIG. 6C).

[0096] In the reference example, a substrate W having the same structure and hole pattern as the substrate W in the example was used. In the reference example, a process of depositing an organic film on the substrate W by PECVD using a mixed gas of a hydrocarbon gas and an inert gas for a photoresist film, and a process of trimming a part of the organic film and a part of the photoresist film by plasma etching using a mixed gas of an oxygen-containing gas and an inert gas were alternately repeated multiple times. In the reference example, the silicon-containing anti-reflective film was hardly etched in the depth direction.

[0097] Table 1 shows the measurement results of the CD (Critical Dimension) and LCDU (Local Critical Dimension Uniformity: 3σ of CD) of the opening OP in the photoresist film of the substrate W after the above processing in the examples and reference examples. In Table 1, the CD and LCDU values ​​are the measured values ​​of the CD and LCDU of the opening OP after the above processing divided by the measured values ​​of the CD and LCDU before the above processing. The measured CD values ​​are average values. Furthermore, T / P (throughput) is the time (seconds) required for the above processing.

[0098] [Table 1]

[0099] As shown in Table 1, the measurement results in the Examples were better than those in the Reference Example. First, the LCDU of the openings in the photoresist film in the Examples was improved compared to the LCDU of the openings in the photoresist film in the Reference Example. In addition, in the Examples, the above-mentioned improvement effect was obtained by one deposition step and one trimming step, and the throughput was significantly improved compared to the Reference Example in which deposition and trimming were alternately repeated multiple times. That is, the Examples were able to further improve the CD uniformity of the openings in the photoresist film in a shorter time than the Reference Example.

[0100] <Other examples of this processing method> Fig. 8 is a flow chart showing another example of the present processing method. In this example, when proceeding from step ST3 (trimming step) to step ST4 (etching step), step ST31 is further included to determine whether a given condition is satisfied. Then, step ST2 (deposition film forming step) and step ST3 (trimming step) are repeated until it is determined that the given condition is satisfied. In this respect, this example differs from the example shown in Fig. 5.

[0101] The given condition in step ST31 may be appropriately determined. For example, the given condition may be the number of repetitions of step ST2 (deposition film forming step) and step ST3 (trimming step). That is, it may be determined whether the number of repetitions reaches a preset number, and steps ST2 and ST3 may be repeated until the number of repetitions reaches the preset number. For example, the given condition may be whether the dimensional data of the opening OP in the mask film MF after processing after step ST3 (trimming step) is within a desired range. That is, after step ST (trimming step), the CD and LCDU of the opening OP in the mask film MF may be measured, and steps ST2 and ST3 may be repeated until the measured values ​​fall within the desired range.

[0102] The size of the opening OP may be measured by an optical measuring device. The measuring device may be one of the substrate processing modules PM shown in FIG. 3. As an example, when the present processing method processes a plurality of substrates W (e.g., 25 substrates) as one unit (hereinafter also referred to as a "lot"), the size of the opening OP may be measured for each substrate included in the lot. Also, the size of the opening OP may be measured for a specific substrate included in one lot, and the measured value may be the size of the opening in the specific substrate and other substrates included in the one lot. Of the substrates included in one lot, the substrate to be measured may be (a) the first substrate to be subjected to the present processing method, (b) the last substrate to be subjected to the present processing method, or (c) a substrate to be subjected to the present processing method other than the first and last substrates in the lot.

[0103] According to this example, the etching step (step ST4) is not performed until a given condition is satisfied, so that the size or shape of the opening formed in the etching target film EF can be more appropriately controlled.

[0104] This processing method may be modified in various ways without departing from the scope and spirit of this disclosure. For example, this processing method may be performed using a substrate processing apparatus using any plasma source, such as an inductively coupled plasma or microwave plasma, other than the capacitively coupled substrate processing apparatus 1. The deposition process, trimming process, and etching process of this processing method may be performed consecutively in the same chamber, or in different chambers. [Explanation of symbols]

[0105] 1: plasma processing apparatus, 10: chamber, 10s: internal space, 14: substrate support, 16: electrode plate, 18: lower electrode, 20: electrostatic chuck, 30: upper electrode, 50: exhaust device, 62: high frequency power supply, 64: bias power supply, 80: control unit, CT: control unit, EF: film to be etched, MF: mask film, OP: opening, SC: extension, SS: side, TD: deposited film, TS: upper surface, UF: base film, W: substrate

Claims

1. (a) providing a substrate including a film to be etched; and a mask film formed on an upper surface of the film to be etched, the mask film having a side surface defining at least one opening on the upper surface of the film to be etched and an extension portion extending from the side surface to at least a portion of the upper surface of the film to be etched; (b) forming a deposition film on at least the side surface of the mask film; (c) etching at least a portion of the deposited film using a plasma generated from a first process gas to reduce a thickness of the deposited film; Including, the first process gas includes a gas for etching the etching target film, (c) is performed until a part of the etching target film is etched in a depth direction so that the extension portion is removed. Plasma treatment method.

2. 2. The plasma processing method according to claim 1, wherein in (b), a deposition film having a first portion on the side surface of the mask film and a second portion on an upper surface of the mask film is formed.

3. 3. The plasma processing method according to claim 2, wherein in (c), an etching amount of the first portion is smaller than an etching amount of the second portion.

4. 4. The plasma processing method according to claim 1, wherein in (c), an electric bias is applied to a substrate support that supports the substrate.

5. 5. The plasma processing method according to claim 1, wherein the etching target film is a silicon-containing film, the deposited film is an organic film, and the first process gas contains a halogen-containing gas and a gas containing at least one element of oxygen, hydrogen, and nitrogen.

6. 5. The plasma processing method according to claim 1, wherein the etching target film is an organic film, the deposited film is a silicon-containing film, and the first process gas contains a halogen-containing gas and a gas containing at least one element of oxygen, hydrogen, and nitrogen.

7. 5. The plasma processing method according to claim 1, wherein the etching target film is a silicon-containing film, the deposited film is a silicon-containing film, and the first process gas contains a halogen-containing gas.

8. 5. The plasma processing method according to claim 1, wherein the etching target film is an organic film, the deposited film is an organic film, and the first process gas includes a gas containing at least one element of oxygen, hydrogen, and nitrogen.

9. 8. The plasma processing method according to claim 5, wherein the halogen-containing gas is a fluorine-containing gas.

10. The fluorine-containing gas is NF 3 Gas, SF 6 Gas, HF gas and C t H u F v 10. The plasma processing method according to claim 9, wherein the gas is at least one selected from the group consisting of system (t and v are positive integers, and u is an integer of 0 or more) gases.

11. The gas containing at least one element of oxygen, hydrogen, and nitrogen is O 2 Gas, O 3 Gas, CO gas, CO 2 Gas, H 2 Gas, H 2 O gas, H 2 O 2 Gas, NH 3 9. The plasma processing method according to claim 5, wherein the gas is at least one selected from the group consisting of a NO gas and an H2O gas.

12. The first process gas is HBr gas, HCl gas, Br 2 Gas, Cl 2 12. The plasma processing method according to claim 1, further comprising at least one gas selected from the group consisting of a gas and a HI gas.

13. 13. The plasma processing method according to claim 1, wherein the mask film is an organic film or a silicon-containing film.

14. The plasma processing method according to claim 1 , wherein the side surface of the mask film has a recessed portion.

15. 15. The plasma processing method according to claim 1, wherein the steps (b) and (c) are alternately repeated a plurality of times.

16. 16. The plasma processing method according to claim 1, further comprising: (d) a step of etching the film to be etched using plasma generated from a second processing gas, with the mask film and the deposition film as a mask.

17. 17. The plasma processing method of claim 16, wherein the first process gas and the second process gas include the same type of gas.

18. (a) providing a substrate on a substrate support, the substrate comprising a film to be etched and a mask film formed on an upper surface of the film to be etched and having a side surface defining at least one opening on the upper surface of the film to be etched; (b) forming a deposition film having a first portion on the side surface of the mask film and a second portion on a top surface of the mask film; (c) providing an electrical bias to the substrate support and anisotropically etching at least a portion of the deposited film using a plasma generated from a first process gas to reduce a thickness of the deposited film; (d) etching the etching target film using plasma generated from a second process gas and using the mask film and the deposition film as a mask; In the step (c), an etching amount of the first portion is smaller than an etching amount of the second portion, the first process gas contains a gas for etching the etching target film, and the step (c) is performed until a part of the etching target film is etched in a depth direction. Plasma treatment method.

19. A plasma processing apparatus comprising: a plasma processing chamber; a gas supply unit that supplies a processing gas to the plasma processing chamber; a power supply that supplies power to generate plasma in the plasma processing chamber; and a control unit; The control unit is (a) providing a substrate including a film to be etched; and a mask film formed on an upper surface of the film to be etched, the mask film having a side surface defining at least one opening on the upper surface of the film to be etched and an extension portion extending from the side surface to at least a portion of the upper surface of the film to be etched; (b) forming a deposition film on at least the side surface of the mask film; (c) etching at least a portion of the deposited film using a plasma generated from a first process gas to reduce a thickness of the deposited film; In the step (c), the first process gas contains a gas for etching the etching target film, and the step (c) is performed until a part of the etching target film is etched in a depth direction so as to remove the extension portion. Plasma processing equipment.

Images