Welded piping structure

Abstract

To facilitate adjustment of depth of a through-hole into which piping is inserted, in structure in which the piping is connected to a flow channel formed in a plate by welding.SOLUTION: Piping-welded structure is provided, comprising: a flow channel plate (40) in which flow channels (51, 53, 55) for fluid are formed; a plurality of through-hole plates (10A, 10B) which are laminated on the flow channel plate and in which through-holes (11A, 11B, 13) are formed; and piping (95A, 95B, 98) in which piping flow channels are formed, and which are inserted into the through-holes of the plurality of through-hole plates, and in which the piping flow channels are connected to the flow channels and which are welded to the through-hole plate farthest from the flow channel plate.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a structure in which piping is connected to a flow passage formed in a plate by welding. [Background technology]

[0002] Conventionally, in a structure for connecting a capillary tube to a passage groove engraved into the bottom of a plate-shaped housing of a micromixer, there is a structure in which the capillary tube is inserted into a through hole that penetrates the top of the plate-shaped housing and extends to the passage groove, and then welded (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2001-520113 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, the flow area of ​​the passage groove of the micromixer and the flow area of ​​the capillary tube (thickness of the capillary tube) are changed depending on the application of the micromixer and the type of fluid to be mixed. In this case, the depth of the through hole into which the capillary tube is inserted must also be adjusted. In the structure described in Patent Document 1, in order to adjust the depth of the through hole, it is necessary to adjust the thickness of the upper part of the housing (plate). However, the thickness of a general-purpose plate material is determined by standards, and in the structure described in Patent Document 1, it is difficult to freely adjust the thickness of the upper part of the housing.

[0005] The present invention has been made to solve the above-mentioned problems, and its main object is to make it easier to adjust the depth of the through hole through which the piping is inserted in a structure in which the piping is connected to a flow path formed in a plate by welding. [Means for solving the problem]

[0006] A first means for solving the above problem is a piping welded structure, a flow path plate in which a flow path for a fluid is formed; a plurality of through-hole plates, each having through-holes formed therein, disposed on the flow path plate; a pipe having a piping flow passage formed therein, the pipe being inserted into the through holes of the plurality of through-hole plates, the piping flow passage being connected to the flow passage, and the pipe being welded to the through-hole plate farthest from the flow passage plate; Equipped with.

[0007] According to the above configuration, a flow path for a fluid is formed in the flow path plate. The plurality of through-hole plates are arranged on top of the flow path plate. Therefore, the plurality of through-hole plates directly or indirectly cover the flow path plate, i.e., the flow path, and the flow path is partitioned.

[0008] Here, through holes are formed in the multiple through-hole plates. A piping flow path is formed inside the piping, and the piping flow path is connected to the flow path. The piping is inserted into the through holes of the multiple through-hole plates. For this reason, the through-hole plates are formed from a general-purpose thin plate material that complies with the standard, and the depth of the through hole into which the piping is inserted can be adjusted by adjusting the number of through-hole plates. Therefore, it becomes easy to adjust the depth of the through hole into which the piping is inserted.

[0009] The piping is welded to the through-hole plate farthest from the flow path plate (hereinafter referred to as the "outermost through-hole plate"). Therefore, after the piping is inserted into the through holes of the multiple through-hole plates, the piping can be easily welded to the through-hole plate from the insertion direction. Note that the configuration in which the piping is welded to the outermost through-hole plate includes a configuration in which the piping is welded not only to the outermost through-hole plate but also to a through-hole plate on the flow path plate side of the outermost through-hole plate, and a configuration in which the piping is welded to the flow path plate.

[0010] The thinner the pipe, the narrower the area to which heat must be applied during welding. In that case, the position to which heat is applied must be precisely aligned, making welding more difficult.

[0011] In this respect, in the second means, a groove is formed around the welded portion, which is the portion welded to the pipe, in the plurality of through-hole plates. According to this configuration, the groove of the through-hole plate can suppress the diffusion of heat around the position where heat is applied when welding the through-hole plate and the pipe. Therefore, it becomes easier to melt the welded portion between the through-hole plate and the pipe, and the difficulty of welding can be reduced. The groove may be a through groove that penetrates the through-hole plate, or a non-through groove that does not penetrate the through-hole plate.

[0012] The third means includes a relay flow path plate that is disposed between the flow path plate and the through hole plate and has a relay flow path that connects the flow path and the piping flow path, and a groove is formed around the portion of the relay flow path plate that faces the welded portion.

[0013] According to the above configuration, the relay flow path plate is disposed between the flow path plate and the through-hole plate. The relay flow path plate is formed with a relay flow path that connects the flow path and the piping flow path. Therefore, a fluid can flow between the flow path and the piping flow path via the relay flow path.

[0014] Furthermore, a groove is formed around the periphery of the intermediate flow passage plate, which faces the welded portion between the through-hole plate and the piping. Therefore, the groove of the intermediate flow passage plate can suppress the diffusion of heat around the position where heat is applied when welding the through-hole plate and the piping. Therefore, it becomes easier to melt the welded portion between the through-hole plate and the piping, and the difficulty of welding can be reduced.

[0015] In a multiple through hole plate, when multiple through grooves are formed around a welded portion, there is a problem in that the periphery of the welded portion is cut by the through grooves.

[0016] In this regard, in the fourth aspect, a plurality of through grooves are formed around the welded portion in the plurality of through hole plates, and a connection portion is provided between the plurality of through grooves, which is a portion where the through grooves are not formed. With this configuration, by providing the connection portion, which is a portion where the through grooves are not formed in the through hole plate, it is possible to prevent the entire periphery of the welded portion from being cut by the through grooves.

[0017] When welding the through-hole plate and the pipe, the diffusion of heat is suppressed in the through groove, but is easily diffused in the connection part, which may cause a difference in the degree of melting between the part close to the through groove and the part close to the connection part in the welded part.

[0018] In this regard, in the fifth aspect, the positions of the connection parts of the plurality of through hole plates are offset from each other when projected in the direction in which the through holes extend. With this configuration, it is possible to prevent the positions of the through grooves and the connection parts from being offset in the circumferential direction of the through holes. Therefore, it is possible to prevent differences in the degree of melting of the welded parts in the circumferential direction of the through holes.

[0019] A sixth aspect of the present invention is a method for manufacturing the welded piping structure according to any one of the first to fifth aspects, a placement step of placing the plurality of through-hole plates on the flow path plate; an insertion step of inserting the pipes into the through holes of the plurality of through-hole plates; a welding step of welding the piping to the through-hole plate which is the furthest from the flow path plate; Includes.

[0020] According to the above-mentioned arrangement process, a plurality of through-hole plates are arranged on the flow path plate by stacking them. Therefore, the through-hole plates are formed from a general-purpose thin plate material that conforms to the standard, and the depth of the through-hole into which the piping is inserted can be adjusted by adjusting the number of the through-hole plates. Therefore, it becomes easy to adjust the depth of the through-hole into which the piping is inserted.

[0021] In the insertion process, the pipes are inserted into the through holes of the through-hole plates. Then, in the welding process, the pipes are welded to the through-hole plate that is farthest from the flow path plate. Therefore, after the pipes are inserted into the through holes of the through-hole plates, the pipes can be easily welded to the through-hole plate from the insertion direction.

[0022] A seventh aspect of the present invention includes a forming step of forming the through holes in the through hole plate by etching. This step generally reduces processing costs compared to forming the through holes by machining.

[0023] An eighth aspect is a method for producing the welded piping structure according to any one of the second to fifth aspects, comprising a forming step of simultaneously forming the through holes and the grooves in the through hole plate by etching.

[0024] According to the above-mentioned forming process, the through holes and the grooves are simultaneously formed in the through hole plate by etching. Therefore, the alignment between the through holes and the grooves can be performed with high accuracy compared to the case where the through holes and the grooves are formed in separate processes. Therefore, it is possible to adopt thinner piping.

[0025] The ninth means is a method for manufacturing a piping welding structure described in the fourth or fifth means, and includes a forming step of simultaneously forming the through hole and the through groove in the through hole plate by etching, and forming the connection portion as a portion of the through hole plate that is not etched at the same time as forming the through groove.

[0026] According to the above-mentioned forming process, the through holes and the through grooves are simultaneously formed in the through hole plate by etching, and the connection parts are formed as the non-etched parts of the through hole plate at the same time as the through grooves are formed. Therefore, there is no need to perform a process of forming the connection parts separately from the process of forming the through holes and the through grooves. [Brief description of the drawings]

[0027] [Figure 1] FIG. [Diagram 2] FIG. [Diagram 3] FIG. 4 is a top view showing the front side surface of the first flow path plate. [Figure 4] FIG. 4 is a bottom view showing the rear side surface of the first flow path plate. [Diagram 5] FIG. 4 is an enlarged perspective view showing a first flow path and a first divided flow path. [Figure 6] FIG. 4 is an enlarged perspective view showing a first junction channel. [Figure 7] FIG. 4 is a cross-sectional perspective view showing a first divided channel, a first communicating channel, a first merging channel, and a second merging channel. [Figure 8] 4 is a cross-sectional perspective view showing a second divided channel, a second communicating channel, a first merging channel, and a second merging channel. FIG. [Figure 9] FIG. [Figure 10] FIG. 4 is an enlarged perspective view showing a second merging groove. [Figure 11] FIG. 4 is a cross-sectional perspective view showing through holes of a through-hole plate and a through hole of a relay flow path plate. [Figure 12] FIG. 4 is a cross-sectional perspective view showing a welded portion between the through hole plate and the first inlet pipe. [Figure 13] FIG. 13 is a perspective view showing a modified example of the through-hole plate. [Figure 14] FIG. 13 is a perspective view showing another modified example of the through-hole plate. [Figure 15] FIG. 13 is a perspective view showing another modified example of the through-hole plate. [Figure 16] 13 is a cross-sectional perspective view showing a modified example of the through-hole plate and the relay plate. FIG. [Figure 17] FIG. 13 is an exploded top perspective view of a modified micromixer. [Figure 18] FIG. 13 is an exploded bottom perspective view of a modified example of the micromixer. [Figure 19] FIG. 13 is an exploded top perspective view of another modified example of the micromixer. [Figure 20] FIG. 13 is an exploded bottom perspective view of another modified example of the micromixer. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] Hereinafter, an embodiment of a micromixer having channels formed in a plate will be described with reference to the drawings. Fig. 1 is an exploded top perspective view of the micromixer 100 as viewed obliquely from above. Fig. 2 is an exploded bottom perspective view of the micromixer 100 as viewed obliquely from below. As shown in Figs. 1 and 2, the micromixer 100 includes, from the top, through-hole plates 10A and 10B, a relay channel plate 20, a first inflow channel plate 30, a first channel plate 40, a second channel plate 60, a second inflow channel plate 80, and support plates 90A, 90B, and 90C, and further includes a first inflow pipe 95A, a second inflow pipe 95B, and an outflow pipe 98.

[0029] The plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C are formed in a rectangular plate shape, for example, from stainless steel. The longitudinal length (horizontal width) and the lateral length (vertical width) of the plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C are equal to each other. The thickness of the first flow path plate 40 and the second flow path plate 60 is 0.05 [mm]. The thickness of the other plates is 0.15 [mm], that is, three times the thickness of the first flow path plate 40 and the second flow path plate 60. The plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C are all formed from a general-purpose stainless steel rolled material (plate material) defined by standards such as JIS.

[0030] The through-hole plates 10A and 10B are the same plate. The through-hole plates 10A and 10B are formed with a through-hole 11A into which the first inlet pipe 95A can be inserted, a through-hole 11B into which the second inlet pipe 95B can be inserted, and a through-hole 13 into which the outlet pipe 98 can be inserted. The first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98 are formed in a cylindrical shape from, for example, stainless steel. The through-hole plates 10A and 10B are formed with bolt holes 14 to 17.

[0031] The through holes 11A, 11B are formed at a position close to the first end (one end) in the longitudinal direction of the through hole plates 10A, 10B. The through hole 13 is formed at a position close to the second end (other end) opposite to the first end in the longitudinal direction of the through hole plates 10A, 10B. The cross-sectional shape of the through holes 11A, 11B, 13 is circular. The cross-sectional outer shape (cross-sectional shape) of the first inflow pipe 95A, the second inflow pipe 95B, and the outflow pipe 98 is circular. The inner diameters of the through holes 11A, 11B, 13 are slightly larger than the outer diameters of the first inflow pipe 95A, the second inflow pipe 95B, and the outflow pipe 98, respectively. The outer diameters of the first inflow pipe 95A, the second inflow pipe 95B, and the outflow pipe 98 may be the same or different. The cross-sectional areas of the flow paths (piping flow paths) of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98 may be the same or different.

[0032] The relay flow path plate 20 has through holes 21A, 21B, 23 (relay flow paths). The through holes 21A, 21B are formed at positions (positions corresponding to the through holes 11A, 11B, 13) that correspond to the centers of the through holes 11A, 11B, 13, respectively, when projected in a direction perpendicular to the front side surface (top surface in Figs. 1 and 2) of the relay flow path plate 20 (through hole plates 10A, 10B). The cross-sectional shape of the through holes 21A, 21B, 23 is circular. The inner diameters of the through holes 21A, 21B, 23 are smaller than the outer diameters of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98, respectively, and are equal to the inner diameters of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98, respectively. The inner diameters of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98 may be the same or different. The relay flow path plate 20 has bolt holes 24 to 27 formed at positions corresponding to the bolt holes 14 to 17.

[0033] The first inflow flow passage plate 30 is formed with through holes 31A, 31B, 33 (relay flow passages) and a non-through groove 32 (first inflow flow passage, flow passage). The through holes 31A, 31B are formed at positions (positions corresponding to the through holes 11A, 11B, 13) that correspond to the centers of the through holes 11A, 11B, 13, respectively, when projected in a direction perpendicular to the front side surface of the first inflow flow passage plate 30 (through hole plates 10A, 10B). That is, the through hole plates 10A, 10B are arranged on top of the first inflow flow passage plate 30, and the through hole 11A is formed at a position facing the non-through groove 32 (first inflow flow passage, flow passage). As a result, the flow passage (piping flow passage) of the first inflow pipe 95A is connected to the non-through groove 32 through the through holes 21A, 31A (relay flow passage). The cross-sectional shape of the through holes 31A, 31B, 33 is circular. The inner diameters of the through holes 31A, 31B, 33 are smaller than the outer diameters of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98, respectively, and are equal to the inner diameters of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98, respectively.

[0034] The non-through groove 32 (see FIG. 2) is formed on the back side surface (lower surface in FIGS. 1 and 2) of the first inflow flow path plate 30, and is a groove that does not penetrate the first inflow flow path plate 30. The non-through groove 32 communicates with the through hole 31A and extends toward the through hole 31B to the center of the first inflow flow path plate 30 in the short direction. The width of the non-through groove 32 is larger than the inner diameter of the through hole 31A, the depth of the non-through groove 32 is smaller than the inner diameter of the through hole 31A, and the cross-sectional area of ​​the non-through groove 32 is approximately equal to the cross-sectional area of ​​the through hole 31A. The first inflow flow path plate 30 has bolt holes 34 to 37 formed at positions corresponding to the bolt holes 14 to 17.

[0035] The first flow path plate 40 (flow path plate) is formed with through holes 41A, 41B, 43 (relay flow paths), a first flow path 51, first divided flow paths 53, 55, and a first merging flow path 57. The through holes 41A, 41B are formed at positions (positions corresponding to the through holes 11A, 11B, 13) that correspond to the centers of the through holes 11A, 11B, 13, respectively, when projected in a direction perpendicular to the front side surface of the first flow path plate 40 (through hole plate 10A, 10B). The cross-sectional shape of the through holes 41A, 41B, 43 is circular. The inner diameters of the through holes 41A, 41B, 43 are smaller than the outer diameters of the first inflow pipe 95A, the second inflow pipe 95B, and the outflow pipe 98, respectively, and are equal to the inner diameters of the first inflow pipe 95A, the second inflow pipe 95B, and the outflow pipe 98, respectively.

[0036] The first flow passage 51 and the first divided flow passages 53, 55 are formed by non-through grooves (grooves that do not penetrate the plate) on the front side surface of the first flow passage plate 40. The end of the first flow passage 51 on the through holes 41A, 41B side (opposite the through hole 43) in the longitudinal direction of the first flow passage plate 40 communicates with the non-through groove 32 (see FIG. 2) of the first inflow flow passage plate 30. The first merging flow passage 57 (see FIG. 2) is formed by a non-through groove on the back side surface of the first flow passage plate 40. The first flow passage 51, the first divided flow passages 53, 55, and the first merging flow passage 57 will be described in detail later. The first flow passage plate 40 has bolt holes 44-47 formed at positions corresponding to the bolt holes 14-17.

[0037] The through-hole plates 10A and 10B, the relay flow path plate 20, and the first inflow flow path plate 30 correspond to a first cover plate that covers the front side surface of the first flow path plate 40.

[0038] The second flow path plate 60 (flow path plate) is formed with through holes 61A, 61B, 63 (relay flow paths), the second flow path 71, the second divided flow paths 73, 75, and the second merging flow path 77. The through holes 61A, 61B are formed at positions (positions corresponding to the through holes 11A, 11B, 13) that correspond to the centers of the through holes 11A, 11B, 13, respectively, when projected in a direction perpendicular to the front side surface of the second flow path plate 60 (through hole plate 10A, 10B). The cross-sectional shape of the through holes 61A, 61B, 63 is circular. The inner diameters of the through holes 61A, 61B, 63 are smaller than the outer diameters of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98, respectively, and are equal to the inner diameters of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98, respectively.

[0039] The second flow passage 71 and the second divided flow passages 73, 75 (see FIG. 2) are formed by non-penetrating grooves (grooves that do not penetrate the plate) on the back side surface of the second flow passage plate 60. The second merging flow passage 77 (see FIG. 1) is formed by a non-penetrating groove on the front side surface of the second flow passage plate 60. Details of the second flow passage 71, the second divided flow passages 73, 75, and the second merging flow passage 77 will be described later. The second flow passage plate 60 has bolt holes 64 to 67 formed at positions corresponding to the bolt holes 14 to 17. The second flow passage plate 60 is the same plate as the first flow passage plate 40, and is disposed upside down relative to the first flow passage plate 40.

[0040] The second inflow flow passage plate 80 is formed with a non-through groove 82 (second inflow flow passage, flow passage). The non-through groove 82 is formed on the front side surface of the second inflow flow passage plate 80, and is a groove that does not penetrate the second inflow flow passage plate 80. The non-through groove 82 communicates with the through hole 61B of the second flow passage plate 60, and extends to the center of the second inflow flow passage plate 80 in the short-side direction in the direction of the through hole 61A. That is, the through hole plates 10A and 10B are arranged on the second inflow flow passage plate 80 in a stacked manner, and a through hole 11B is formed at a position facing the non-through groove 82 (second inflow flow passage, flow passage). As a result, the flow passage (piping flow passage) of the second inflow piping 95B is connected to the non-through groove 82 through the through holes 21B, 31B, 41B, and 61B (relay flow passage). The non-through groove 82 communicates with the second flow passage 71 of the second flow passage plate 60. That is, the end of second flow path 71 on the through holes 61A, 61B side (opposite to through hole 63) in the longitudinal direction of second flow path plate 60 communicates with non-through groove 82 of second inflow flow path plate 80. The width of non-through groove 82 is larger than the inner diameter of through hole 61B, the depth of non-through groove 82 is smaller than the inner diameter of through hole 61B, and the cross-sectional area of ​​non-through groove 82 is approximately equal to the cross-sectional area of ​​through hole 61B. Bolt holes 84-87 are formed in second inflow flow path plate 80 at positions corresponding to bolt holes 14-17.

[0041] The support plates 90A, 90B, and 90C are the same plate. The support plates 90A, 90B, and 90C have bolt holes 94 to 97 formed at positions corresponding to the bolt holes 14 to 17.

[0042] The second inflow flow path plate 80 and the support plates 90A, 90B, and 90C correspond to a second cover plate that covers the rear side surface of the second flow path plate 60.

[0043] These plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C are stacked and adjacent plates are diffusion bonded (joined) to manufacture the micromixer 100. During diffusion bonding, bolts are inserted into the bolt holes 14-17, 24-27, 34-37, 44-47, 64-67, 84-87, and 94-97, and the plates are fastened with nuts to apply pressure to the plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C. In addition, a first inlet pipe 95A, a second inlet pipe 95B, and an outlet pipe 98 are inserted into the through holes 11A, 11B, and 13 of the through hole plates 10A and 10B, respectively, and the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98 are welded to the through hole plate 10A (the through hole plate farthest from the first inlet flow path plate 30 and the second inlet flow path plate 80).

[0044] Next, the first flow path plate 40 will be described in detail with reference to Figures 3 to 10. Note that the second flow path plate 60 is the same plate as the first flow path plate 40, and is disposed upside down compared to the first flow path plate 40, so a description thereof will be omitted.

[0045] FIG. 3 is a top view showing the front side surface of the first flow path plate 40, and FIG. 4 is a bottom view showing the back side surface of the first flow path plate 40. As shown in FIG.

[0046] In the substantially right half (the substantially half on the through-holes 41A, 41B side) of the front side surface of the first flow path plate 40, a first flow path 51, a first divided flow path 53, and a first divided flow path 55 are formed in this order from the right side (the through-holes 41A, 41B side). The first flow path 51 and the first divided flow paths 53, 55 (flow paths) are formed by non-through grooves. The first flow path 51 and the first divided flow paths 53, 55 have the same depth. The first flow path 51 is divided (branched) into two (multiple) first divided flow paths 53 (first stage flow paths). The first divided flow path 53 is divided (branched) into a large number (multiple) first divided flow paths 55 (second stage flow paths). The cross-sectional area at the outlet of the first flow path 51, the sum of the cross-sectional areas at the outlets of the two first divided flow paths 53, and the sum of the cross-sectional areas at the outlets of the large number of first divided flow paths 55 are substantially equal (1 to 3 times the flow path area of ​​the first inlet pipe 95A). The end of the first divided channel 55 (second stage channel) opposite to the first divided channel 53 is connected to the first junction channel 57 via a first communication channel 56 (see FIG. 7).

[0047] A first merging flow passage 57 is formed in approximately the left half (approximately the half on the bolt hole 46, 47 side) of the back side surface of the first flow passage plate 40. The first merging flow passage 57 is formed by a non-through groove. The depth of the first merging flow passage 57 is half (approximately half) of the depth of the first flow passage 51 and the first divided flow passages 53, 55. The cross-sectional area at the inlet of the first merging flow passage 57 is approximately equal to the total cross-sectional area at the outlet of the multiple first divided flow passages 55 (1 to 3 times the flow passage area of ​​the first inlet pipe 95A). The width of the first merging flow passage 57 in the short-side direction (vertical width direction) of the first flow passage plate 40 gradually narrows from the width including the entire multiple first divided flow passages 55 to the inner diameter of the through hole 43 as it approaches the bolt holes 46, 47 (as it moves away from the through holes 41A, 41B).

[0048] 5 is an enlarged perspective view showing the first flow path 51 and the first divided flow paths 53, 55. As shown in the figure, the first flow path 51 includes a plurality of bosses 51a. The plurality of bosses 51a (first divided remaining portion) are portions of the first flow path 51 where no non-through grooves are formed. The plurality of bosses 51a are formed in a disk shape (cylindrical, island shape). The first divided flow path 53 includes a plurality of bosses 53a. The plurality of bosses 53a are portions of the first divided flow path 53 where no non-through grooves are formed. The plurality of bosses 53a are formed in a disk shape (cylindrical, island shape).

[0049] 6 is an enlarged perspective view showing the first junction flow passage 57. As shown in the figure, the first junction flow passage 57 includes a plurality of bosses 57a. The plurality of bosses 57a (first junction remaining portion) are portions of the first junction flow passage 57 where no non-through grooves are formed. The plurality of bosses 57a are formed in a disk shape (cylindrical, island shape). The end portion of the first junction flow passage 57 on the first flow passage 51 side (opposite the through hole 43) is connected to the first divided flow passage 55 by the first communication flow passage 56.

[0050] The second flow path plate 60 is the same plate as the first flow path plate 40. Therefore, the second flow path plate 60 has a second flow path 71, a second divided flow path 73 (first stage flow path), a second divided flow path 75 (second stage flow path), and a second junction flow path 77, which are respectively equivalent to the first flow path 51, the first divided flow path 53, the first divided flow path 55, and the first junction flow path 57. The second flow path plate 60 has a plurality of bosses 71a (second division remainder), a plurality of bosses 73a, and a plurality of bosses 77a (second junction remainder), which are respectively equivalent to the plurality of bosses 51a, the plurality of bosses 53a, and the plurality of bosses 57a. The second flow path plate 60 is arranged so that the first junction flow path 57 and the second junction flow path 77 face each other and communicate with each other. At this time, the second flow path plate 60 is disposed so that the multiple bosses 51a and the multiple bosses 71a overlap, and the multiple bosses 53a and the multiple bosses 73a overlap, when projected in a direction perpendicular to the front side surface.

[0051] The plurality of bosses 57a of the first flow path plate 40 and the plurality of bosses 77a of the second flow path plate 60 are diffusion bonded (joined) to each other. The plurality of bosses 51a and the plurality of bosses 53a are diffusion bonded (joined) to the first inflow flow path plate 30. The plurality of bosses 71a and the plurality of bosses 73a are diffusion bonded (joined) to the second inflow flow path plate 80.

[0052] FIG. 7 is a cross-sectional perspective view showing the first divided flow passage 55, the first communicating flow passage 56, the first merging flow passage 57, and the second merging flow passage 77. The figure shows a cross section of the first divided flow passage 55 cut at the center in the short side direction of the first flow passage plate 40. The second divided flow passage 75 is disposed between the adjacent first divided flow passages 55 and the first divided flow passages 55 in the short side direction of the first flow passage plate 40 (second flow passage plate 60). That is, the first divided flow passages 55 and the second divided flow passages 75 are disposed alternately in the short side direction (projected in the direction perpendicular to the front side surface) of the first flow passage plate 40. The first communicating flow passage 56 communicates the first divided flow passage 55 and the first merging flow passage 57. The first merging flow passage 57 of the first flow passage plate 40 and the second merging flow passage 77 of the second flow passage plate 60 communicate with each other while facing each other.

[0053] FIG. 8 is a cross-sectional perspective view showing the second divided flow passage 75, the second communicating flow passage 76, the first merging flow passage 57, and the second merging flow passage 77. This figure shows a cross section of the second divided flow passage 75 cut at the center in the short side direction of the first flow passage plate 40. The first divided flow passage 55 is disposed between the adjacent second divided flow passages 75 and the second divided flow passages 75 in the short side direction of the second flow passage plate 60 (first flow passage plate 40). That is, the first divided flow passages 55 and the second divided flow passages 75 are disposed alternately in the short side direction of the second flow passage plate 60. The second communicating flow passage 76 communicates the second divided flow passage 75 and the second merging flow passage 77. The first merging flow passage 57 of the first flow passage plate 40 and the second merging flow passage 77 of the second flow passage plate 60 communicate with each other while facing each other.

[0054] As shown in FIG. 3, the first dividing grooves 58A and 58B are formed in the outer edge of the front side of the first flow path plate 40 as non-penetrating grooves (grooves) having a depth equal to that of the first flow path 51 and the first divided flow paths 53 and 55. The first dividing groove 58A is formed at one end of the first flow path plate 40 in the short side direction, and the first dividing groove 58B is formed at the other end of the first flow path plate 40 in the short side direction. That is, the first dividing grooves 58A and 58B are visible from the side even after the first inflow flow path plate 30 and the second flow path plate 60 are joined to the top and bottom of the first flow path plate 40, respectively. In the longitudinal direction of the first flow path plate 40, the position of the first dividing groove 58A and the position of the first dividing groove 58B are shifted. FIG. 9 is an enlarged perspective view showing the first dividing groove 58A.

[0055] As shown in FIG. 4, the first merging grooves 59A and 59B are formed in the outer edge of the back side surface of the first flow path plate 40 as non-through grooves (grooves) having a depth equal to that of the first merging flow path 57. The depth of the first merging grooves 59A and 59B is half (approximately half) of the depth of the first dividing grooves 58A and 58B. That is, the depth of the first merging grooves 59A and 59B is different from the depth of the first dividing grooves 58A and 58B. The first merging groove 59A is formed at one end of the first flow path plate 40 in the short side direction, and the first merging groove 59B is formed at the other end of the first flow path plate 40 in the short side direction. That is, the first merging grooves 59A and 59B are visible from the side even after the first inflow flow path plate 30 and the second flow path plate 60 are joined to the top and bottom of the first flow path plate 40, respectively. The positions of the first dividing groove 58A, the first dividing groove 58B, the first merging groove 59A, and the first merging groove 59B are offset from each other in the longitudinal direction of the first flow path plate 40. Fig. 10 is an enlarged perspective view showing the first merging groove 59A.

[0056] The second flow path plate 60 is formed with second dividing grooves 78A, 78B and second merging grooves 79A, 79B, which are equivalent to the first dividing grooves 58A, 58B and the first merging grooves 59A, 59B, respectively. The second dividing grooves 78A, 78B are visible from the side even after the first flow path plate 40 and the second inflow flow path plate 80 are joined to the top and bottom of the second flow path plate 60, respectively. The second merging grooves 79A, 79B are visible from the side even after the first flow path plate 40 and the second inflow flow path plate 80 are joined to the top and bottom of the second flow path plate 60, respectively.

[0057] Further, the through-hole plates 10A, 10B, the relay flow path plate 20, and the first inflow flow path plate 30 are respectively formed with the through-holes 11A, 11B (first lid through-holes), the through-holes 21A, 21B (first lid through-holes), and the non-through groove 32 (first lid flow path). The through-hole plates 10A, 10B, the relay flow path plate 20, and the first inflow flow path plate 30 are respectively formed at their outer edges with the first lid grooves, which are grooves having the same depth as the through-holes 11A, 11B, the through-holes 21A, 21B, and the non-through groove 32.

[0058] Similarly, non-through grooves 82 (second lid flow paths) and bolt holes 94-97 (second lid through holes) are formed in second inflow flow path plate 80 and support plates 90A, 90B, 90C, respectively. Second lid grooves, which are grooves having depths equal to those of non-through groove 82 and bolt holes 94-97, are formed in the outer edges of second inflow flow path plate 80 and support plates 90A, 90B, 90C, respectively.

[0059] When projected in a direction perpendicular to the front side surface, the positions of the first lid groove, the first dividing grooves 58A, 58B, the first merging grooves 59A, 59B, the second merging grooves 79A, 79B, the second dividing grooves 78A, 78B, and the second lid groove are misaligned.

[0060] Next, a method for manufacturing the micromixer 100 will be described.

[0061] The through holes and grooves of each plate are formed by wet etching (etching). In the etching of each plate, all the through holes and grooves to be formed in each plate are formed simultaneously. Therefore, for example, the first flow path 51, the first divided flow paths 53, 55, and the first divided grooves 58A, 58B formed on the front side surface of the first flow path plate 40 all have the same depth.

[0062] Furthermore, while the first flow path 51, the first divided flow paths 53, 55, and the first dividing grooves 58A, 58B are formed on the front side surface of the first flow path plate 40, the first merging flow path 57 and the first merging grooves 59A, 59B are formed on the back side surface of the first flow path plate 40. At this time, the etching speed of the front side surface of the first flow path plate 40 is adjusted to be twice (approximately twice) the etching speed of the back side surface of the first flow path plate 40.

[0063] Similarly, the second merging flow path 77 and the second merging grooves 79A, 79B are formed on the front side surface of the second flow path plate 60, and at the same time, the second flow path 71, the second divided flow paths 73, 75, and the second divided grooves 78A, 78B are formed on the back side surface of the second flow path plate 60. At this time, the etching speed of the back side surface of the second flow path plate 60 is adjusted to be twice (approximately twice) the etching speed of the front side surface of the second flow path plate 60.

[0064] Here, when the first junction flow path 57 is formed, a plurality of bosses 57a are formed as portions of the first junction flow path 57 that are not to be etched. When the first flow path 51 is formed, a plurality of bosses 51a are formed as portions of the first flow path 51 that are not to be etched. When the first divided flow path 53 is formed, a plurality of bosses 53a are formed as portions of the first divided flow path 53 that are not to be etched.

[0065] Similarly, when the second junction flow path 77 is formed, a plurality of bosses 77a are formed as portions of the second junction flow path 77 that are not to be etched. When the second flow path 71 is formed, a plurality of bosses 71a are formed as portions of the second flow path 71 that are not to be etched. When the second divided flow path 73 is formed, a plurality of bosses 73a are formed as portions of the second divided flow path 73 that are not to be etched.

[0066] After that, plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C are stacked, and bolts are inserted into the bolt holes of each plate and fastened with nuts. While fastening with the bolts and nuts or while pressurizing the plates with a pressurizer, heat is applied to the plates to diffusion bond them together. Here, since the plates are made of rolled stainless steel, the smoothness of the surfaces can be ensured, and diffusion bonding can be performed smoothly.

[0067] The procedure for welding the first inlet pipe 95A to the through-hole plate 10A by an operator or a production machine such as a robot is as follows. The procedure for welding the second inlet pipe 95B and the outlet pipe 98 to the through-hole plate 10A is similar.

[0068] 11 is a cross-sectional perspective view showing the through hole 11A of the through hole plates 10A and 10B and the through hole 21A of the relay flow path plate 20. The first inlet pipe 95A is inserted into each of the through holes 11A of the through hole plates 10A and 10B. Here, the inner diameter of the through hole 21A of the relay flow path plate 20 is smaller than the outer diameter of the first inlet pipe 95A and is the same as the inner diameter of the flow path 95b of the first inlet pipe 95A. Therefore, the first inlet pipe 95A can be abutted against the peripheral portion of the through hole 21A in the relay flow path plate 20.

[0069] FIG. 12 is a cross-sectional perspective view showing a welded portion W between the through-hole plates 10A, 10B and the first inlet pipe 95A. After inserting the first inlet pipe 95A into each through hole 11A of the through-hole plates 10A, 10B as shown in FIG. 11, an operator or a production machine such as a robot welds the first inlet pipe 95A to the through-hole plate 10A by laser welding. In detail, a laser is irradiated to a boundary portion between the through hole 11A and the first inlet pipe 95A on the front side surface of the through-hole plate 10A. Then, the laser irradiation position is relatively rotated in the circumferential direction of the through hole 11A. As a result, the through-hole plate 10A and the first inlet pipe 95A are melted to form a welded portion W.

[0070] As shown in Fig. 1, in the micromixer 100 having the above configuration, a first fluid flows in through a first inlet pipe 95A, and a second fluid flows in through a second inlet pipe 95B. At this time, the first fluid and the second fluid may be pressurized with a pressure of 100 MPa or more. For example, the first fluid is a first chemical liquid (liquid), and the second fluid is a second chemical liquid (liquid) different from the first chemical liquid.

[0071] The first fluid flows into the first junction flow path 57 through the through holes 21A and 31A, the non-through groove 32, the first flow path 51, the first divided flow paths 53 and 55, and the first communication flow path 56 in this order. The second fluid flows into the second junction flow path 77 through the through holes 21B, 31B, 41B, and 61B, the non-through groove 82, the second flow path 71, the second divided flow paths 73 and 75, and the second communication flow path 76 in this order. The first junction flow path 57 and the second junction flow path 77 are connected to each other, and the first and second fluids alternately flow into the first junction flow path 57 and the second junction flow path 77 and are mixed. The first and second fluids flow through the first junction flow path 57 and the second junction flow path 77, which are gradually narrower in width, and are further mixed. The mixed first and second fluids pass through the through holes 63, 43, 33, and 23 in this order and flow out from the outflow pipe 98.

[0072] The present embodiment described above in detail has the following advantages.

[0073] Since the multiple first divided flow paths 53, 55 are formed by non-through grooves, the periphery of the portions between the first divided flow paths 53, 55 is not cut by the first divided flow paths 53, 55. Therefore, even if each of the first divided flow paths 53, 55 and the portions between the first divided flow paths 53, 55 are narrowed, the strength of the portions between the first divided flow paths 53, 55 can be ensured.

[0074] A first merging flow passage 57 is formed by a non-through groove on the back side surface of the first flow passage plate 40. A first communication flow passage 56 that communicates the first divided flow passages 53, 55 and the first merging flow passage 57 is formed in the first flow passage plate 40. Therefore, by flowing the first fluid through the first flow passage 51, the first fluid can be diverted into the first divided flow passages 53, 55 and then merged into the first merging flow passage 57 via the first communication flow passage 56.

[0075] Similarly, even if each of the second divided channels 73, 75 is narrowed, the strength of the portion between the second divided channels 73, 75 can be ensured. In addition, by flowing the second fluid through the second channel 71, the second fluid can be divided into the second divided channels 73, 75 and then merged into the second merging channel 77 through the second communicating channel 76. The second channel plate 60 is arranged so that the first merging channel 57 and the second merging channel 77 face each other and communicate with each other. Therefore, the first fluid merging into the first merging channel 57 from the first divided channels 55 and the second fluid merging into the second merging channel 77 from the second divided channels 75 can be mixed in the first merging channel 57 and the second merging channel 77 that communicate with each other, and mixing of the first fluid and the second fluid can be promoted.

[0076] The first junction flow path 57 is formed on the back side of the first flow path plate 40, and the second junction flow path 77 is formed on the front side of the second flow path plate 60. Therefore, it is not necessary to prepare a plate for forming the junction flow paths (for example, the mixing plate of Patent Document 1) separately from the first flow path plate 40 and the second flow path plate 60. Therefore, the flow paths of the micromixer 100 can be formed with a smaller number of plates.

[0077] In the first flow path plate 40, the first divided flow paths 53, 55 include a plurality of first divided flow paths 53 obtained by dividing the first flow path 51, and a plurality of first divided flow paths 55 obtained by dividing the first divided flow path 53. Therefore, the flow rate distribution of the first fluid in the first divided flow path 53 can be made smaller than the flow rate distribution of the first fluid in the first flow path 51 in a configuration in which the first flow path 51 continues for a long time. Therefore, it is possible to suppress the occurrence of a difference in the flow rate of the first fluid flowing through each of the first divided flow paths 55. Similarly, it is possible to suppress the occurrence of a difference in the flow rate of the second fluid flowing through each of the second divided flow paths 75 in the second flow path plate 60.

[0078] The first communication flow path 56 communicates the first divided flow paths 55 (second stage flow paths) in the first divided flow paths 53, 55 with the first junction flow path 57. The second communication flow path 76 communicates the second divided flow paths 75 (second stage flow paths) in the second divided flow paths 73, 75 with the second junction flow path 77. Therefore, the first fluid merging from the first divided flow paths 55 to the first junction flow path 57 in the first flow path plate 40 and the second fluid merging from the second divided flow paths 75 to the second junction flow path 77 in the second flow path plate 60 can be mixed more evenly, and the mixing of the first fluid and the second fluid can be further promoted. As a result, the micromixer 100 can be made small and low-capacity, and when applied to liquid chromatography, the responsiveness when changing the mixing ratio of the first fluid and the second fluid can be improved.

[0079] The first merging flow passage 57 includes a plurality of bosses 57a that are portions where no non-through grooves are formed. Therefore, the flow direction of the fluid flowing through the first merging flow passage 57 can be changed by the plurality of bosses 57a, and thus the mixing of the first fluid and the second fluid can be further promoted. Similarly, the flow direction of the fluid flowing through the second merging flow passage 77 can be changed by the plurality of bosses 77a, and thus the mixing of the first fluid and the second fluid can be further promoted.

[0080] Since the bosses 57a and the bosses 77a are joined together, the strength of the micromixer 100 can be improved. Therefore, even if pressure acts on the micromixer 100 from a direction perpendicular to the front side surface, the shapes of the first junction channel 57 and the second junction channel 77 can be easily maintained. Furthermore, the micromixer 100 can be made to withstand high pressure, and even if the first fluid and the second fluid are pressurized at a pressure of 100 MPa or more, damage to the micromixer 100 can be suppressed.

[0081] The first flow passage 51 includes a plurality of bosses 51a that are portions where no non-through grooves are formed. Therefore, the flow direction of the fluid flowing through the first flow passage 51 can be changed by the plurality of bosses 51a. Therefore, the flow of the first fluid merging from the first divided flow passage 55 to the first merging flow passage 57 can be made complex, and thus the mixing of the first fluid and the second fluid can be further promoted. Similarly, the flow of the second fluid merging from the second divided flow passage 75 to the second merging flow passage 77 can be made complex, and thus the mixing of the first fluid and the second fluid can be further promoted.

[0082] Since the bosses 51a are joined to the first inflow flow path plate 30, the strength of the micromixer 100 can be improved. Therefore, even if pressure acts on the micromixer 100 from a direction perpendicular to the front side surface, the shape of the first flow path 51 is easily maintained. Similarly, even if pressure acts on the micromixer 100 from a direction perpendicular to the front side surface, the shape of the second flow path 71 is easily maintained.

[0083] The second flow path plate 60 is arranged so that the bosses 51a and the bosses 71a overlap when projected in a direction perpendicular to the front side surface. With this configuration, even if pressure acts on the micromixer 100 from a direction perpendicular to the front side surface, the bosses 51a and the bosses 71a can indirectly support each other. Therefore, even if pressure acts on the micromixer 100 from a direction perpendicular to the front side surface, the shapes of the first flow path 51 and the second flow path 71 are easily maintained. Furthermore, in the diffusion bonding, the dispersion of pressure can be suppressed, and the bonding strength can be improved.

[0084] In the state where the first inflow flow path plate 30, the first flow path plate 40, the second flow path plate 60, and the second inflow flow path plate 80 are stacked to assemble the micromixer 100, it is difficult to check the depth of the flow paths of each plate 30, 40, 60, 80 and the right and wrong sides of each plate 30, 40, 60, 80. In this regard, the first dividing grooves 58A and 58B, which are grooves having a depth equal to the depths of the first flow path 51 and the first divided flow paths 53 and 55, are formed on the outer edge of the first flow path plate 40. Therefore, even in the state where the micromixer 100 is assembled, it is possible to check the first dividing grooves 58A and 58B, and by checking the depths of the first dividing grooves 58A and 58B, it is possible to check the depths of the first flow path 51 and the first divided flow paths 53 and 55. Similarly, even when the micromixer 100 is assembled, the first merging grooves 59A, 59B can be confirmed, and by confirming the depth of the first merging grooves 59A, 59B, the depth of the first merging flow path 57 can be confirmed.

[0085] Since the depth of the first dividing grooves 58A, 58B and the depth of the first merging grooves 59A, 59B are different, if the front and back of the first flow path plate 40 are assembled incorrectly, it can be determined that the assembly was incorrect from the relationship between the front and back of the first flow path plate 40, the depth of the first dividing grooves 58A, 58B, and the depth of the first merging grooves 59A, 59B.

[0086] Even when the micromixer 100 is in an assembled state, the second merging grooves 79A, 79B can be confirmed, and by confirming the depths of the second merging grooves 79A, 79B, the depth of the second merging flow path 77 can be confirmed. Furthermore, even when the micromixer 100 is in an assembled state, the second dividing grooves 78A, 78B can be confirmed, and by confirming the depths of the second dividing grooves 78A, 78B, the depth of the second flow path 71 and the depths of the second divided flow paths 73, 75 can be confirmed.

[0087] Since the depth of the second merging grooves 79A, 79B and the depth of the second dividing grooves 78A, 78B are different, if the front and back of the second flow path plate 60 is assembled incorrectly, it can be determined that the assembly was incorrect from the relationship between the front and back of the second flow path plate 60, the depth of the second merging grooves 79A, 79B, and the depth of the second dividing grooves 78A, 78B.

[0088] The outer edge of each plate has grooves formed thereon that correspond to the through holes or flow paths formed in the plate. When projected in a direction perpendicular to the front surface, the positions of the grooves are offset from each other. Therefore, if there are grooves in different types of plates that are aligned with each other when projected in a direction perpendicular to the front surface, it is possible to determine whether the plate types, front and back, or left and right sides of the plates have been assembled incorrectly.

[0089] When projected in a direction perpendicular to the front side surface, the first divided channels 55 and the second divided channels 75 are arranged alternately. With this configuration, the first fluid and the second fluid can be alternately flowed from the multiple first divided channels 55 and the multiple second divided channels 75 into the first junction channel 57 and the second junction channel 77 that are connected to each other, thereby further promoting mixing of the first fluid and the second fluid.

[0090] The first flow path 51, the multiple first divided flow paths 53, 55, and the first merging flow path 57 are simultaneously formed in the first flow path plate 40 by etching. Therefore, the multiple first divided flow paths 53, 55 and the first merging flow path 57 can be aligned with high accuracy compared to the case where the multiple first divided flow paths 53, 55 and the first merging flow path 57 are formed in separate processes. This allows the first divided flow paths 53, 55 to be made thinner. Similarly, the second divided flow paths 73, 75 can be made thinner.

[0091] The first flow path 51, the multiple first divided flow paths 53, 55, and the first merging flow path 57 are simultaneously formed in the first flow path plate 40 by etching, and multiple bosses 57a are formed as portions of the first merging flow path 57 that are not etched at the same time as forming the first merging flow path 57. Therefore, there is no need to perform a step of forming the multiple bosses 57a separately from the step of forming the first merging flow path 57. Similarly, there is no need to perform a step of forming the multiple bosses 77a separately from the step of forming the second merging flow path 77.

[0092] If the first merging flow passage 57 is formed by a through groove, it is not possible to form an island-shaped boss 57a. In contrast, since the first merging flow passage 57 is formed by a non-through groove, it is possible to form an island-shaped boss 57a. Similarly, since the second merging flow passage 77 is formed by a non-through groove, it is possible to form an island-shaped boss 77a.

[0093] The first flow path 51, the multiple first divided flow paths 53, 55, and the first merging flow path 57 are simultaneously formed in the first flow path plate 40 by etching, and multiple bosses 51a are formed as portions of the first flow path 51 that are not to be etched at the same time as forming the first flow path 51. Therefore, there is no need to perform a step of forming the multiple bosses 51a separately from the step of forming the first flow path 51. Similarly, there is no need to perform a step of forming the multiple bosses 71a separately from the step of forming the second flow path 71.

[0094] If the first flow passage 51 is formed by a through groove, it is not possible to form an island-shaped boss 51a. In contrast, since the first flow passage 51 is formed by a non-through groove, it is possible to form an island-shaped boss 51a. Similarly, since the second flow passage 71 is formed by a non-through groove, it is possible to form an island-shaped boss 71a.

[0095] The through-holes 11A are formed in the plurality of through-hole plates 10A and 10B at positions facing the non-through grooves 32. A flow path 95b is formed inside the first inflow pipe 95A, and the flow path 95b is connected to the non-through grooves 32. The first inflow pipe 95A is inserted into the through-holes 11A of the plurality of through-hole plates 10A and 10B. Therefore, the through-hole plates 10A and 10B are formed from a general-purpose thin plate material that conforms to the standard, and the depth of the through-hole into which the first inflow pipe 95A is inserted can be adjusted by adjusting the number of the through-hole plates 10A and 10B. Therefore, it becomes easier to adjust the depth of the through-hole into which the first inflow pipe 95A is inserted.

[0096] The first inflow piping 95A is welded to the through-hole plate 10A (hereinafter referred to as the "outermost through-hole plate 10A") that is farthest from the first inflow flow path plate 30 (first flow path plate 40). Therefore, after the first inflow piping 95A is inserted into the through holes 11A of the multiple through-hole plates 10A, 10B, the first inflow piping 95A can be easily welded to the through-hole plate 10A from the insertion direction.

[0097] The relay flow path plate 20 is disposed between the first flow path plate 40 and the through-hole plates 10A and 10B. The relay flow path plate 20 is formed with through holes 21A that communicate the non-through grooves 32 with the flow paths 95b of the first inlet pipe 95A. Therefore, the first fluid can flow between the non-through grooves 32 and the flow paths 95b of the first inlet pipe 95A via the through holes 21A.

[0098] In the insertion process, the first inflow piping 95A is inserted into the through holes 11A of the multiple through-hole plates 10A, 10B. Then, in the welding process, the first inflow piping 95A is welded to the through-hole plate 10A that is farthest from the first inflow flow path plate 30. Therefore, after the first inflow piping 95A is inserted into the through holes 11A of the multiple through-hole plates 10A, 10B, the first inflow piping 95A can be easily welded to the through-hole plate 10A from the insertion direction.

[0099] In the forming step, the through holes 11A are formed in the through hole plates 10A and 10B by etching. This process generally reduces the processing cost compared to the case where the through holes 11A are formed by machining.

[0100] The above embodiment can be modified as follows: The same parts as those in the above embodiment are denoted by the same reference numerals and the description thereof will be omitted.

[0101] In projection in a direction perpendicular to the front side surface, at least two of the first lid groove, first dividing grooves 58A, 58B, first merging grooves 59A, 59B, second dividing grooves 78A, 78B, second merging grooves 79A, 79B, and second lid groove may be positioned the same. Also, at least one of the first lid groove, first dividing grooves 58A, 58B, first merging grooves 59A, 59B, second dividing grooves 78A, 78B, second merging grooves 79A, 79B, and second lid groove may be omitted.

[0102] When projected in a direction perpendicular to the front side surface, the position of the boss 51a may be shifted from the position of the boss 71a, and the position of the boss 53a may be shifted from the position of the boss 73a. Also, at least one of the bosses 51a, 53a, 71a, and 73a may be omitted.

[0103] When projected in a direction perpendicular to the front side surface, the positions of the bosses 57a and 77a may be misaligned. Also, at least one of the bosses 57a and 77a may be omitted.

[0104] In the first flow path plate 40, the first divided flow path 53 can be omitted, and the first flow path 51 can be divided (branched) into the first divided flow path 55. Similarly, in the second flow path plate 60, the second divided flow path 73 can be omitted, and the second flow path 71 can be divided (branched) into the second divided flow path 75. Also, the first flow path 51 can be divided (branched) into three or more stages of first divided flow paths. Similarly, the second flow path 71 can be divided (branched) into three or more stages of second divided flow paths.

[0105] The plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C may be made of any material that can be welded to metal piping, and may be made of metals other than stainless steel, such as copper, aluminum, nickel-plated copper, etc. If the plates 10A, 10B, 20, 30, 40, 60, 80, 90A, 90B, and 90C are made of copper, the thermal conductivity can be improved.

[0106] The thinner the wall thickness of the first inflow pipe 95A is, the narrower the range to which heat is applied during welding is required. In that case, the position to which heat is applied needs to be adjusted to the desired position with high accuracy, and the difficulty of welding increases. In this regard, as shown in FIG. 13, the micromixer 100 includes three through-hole plates. Each through-hole plate has a through-hole 11A. In each through-hole plate, three (n pieces, which is a plurality) arc-shaped through-grooves 12A (grooves) are formed around each through-hole 11A. The central angle of the arc of the through-groove 12A is a predetermined angle smaller than 120° (360° / n). Between the through-grooves 12A, a bridge 12C (connection portion) is formed, which is a portion where the through-groove 12A is not formed. Then, after welding, three arc-shaped through-grooves 12A are formed around the welded portion in each through-hole plate.

[0107] According to the above configuration, the grooves of the through-hole plates 10A, 10B can suppress the diffusion of heat around the position where heat is applied when welding the through-hole plates 10A, 10B to the first inflow pipe 95A, the second inflow pipe 95B, and the outflow pipe 98. Therefore, it becomes easier to melt the welded parts W between the through-hole plates 10A, 10B and the first inflow pipe 95A, the second inflow pipe 95B, and the outflow pipe 98, and the difficulty of welding can be reduced.

[0108] In the case where a plurality of through hole plates 10A, 10B have a plurality of through grooves 12A formed around the welded portion W, there is a problem that the periphery of the welded portion W is cut by the through grooves 12A. In this regard, in the plurality of through hole plates 10A, 10B, a plurality of through grooves 12A are formed around the welded portion W, and bridges 12C, which are portions where the through grooves 12A are not formed, are provided between the plurality of through grooves 12A. With this configuration, by providing bridges 12C, which are portions where the through grooves are not formed in the through hole plates 10A, 10B, it is possible to prevent the entire periphery of the welded portion W from being cut by the through grooves 12A.

[0109] Here, the through holes and through grooves are formed in the following procedure. That is, the through holes 11A and the through grooves 12A are simultaneously formed in the through hole plates 10A and 10B by etching. Therefore, compared with the case where the through holes 11A and the through grooves 12A are formed in separate steps, the alignment between the through holes 11A and the through grooves 12A can be performed with high accuracy. Therefore, it becomes possible to adopt thinner first inlet pipes 95A, second inlet pipes 95B, and outlet pipes 98. Furthermore, the through holes 11A and the through grooves 12A are simultaneously formed in the through hole plates 10A and 10B by etching, and at the same time as forming the through grooves 12A, a bridge 12C is formed as a portion of the through hole plates 10A and 10B that is not etched. Therefore, there is no need to perform a process of forming the bridge 12C separately from the process of forming the through holes 11A and the through grooves 12A.

[0110] It should be noted that, instead of the through grooves that penetrate the through-hole plates 10A, 10B, non-through grooves that do not penetrate the through-hole plates 10A, 10B may be formed.

[0111] When the through-hole plates 10A, 10B are welded to the first inlet pipe 95A, the diffusion of heat is suppressed in the through groove 12A, but is easily diffused in the bridge 12C. Therefore, in the welded portion W, there is a risk of a difference in the degree of melting between the portion close to the through groove 12A and the portion close to the bridge 12C.

[0112] 14, the positions of the bridges 12C of the multiple through hole plates 10A, 10B are offset from each other when projected in the direction in which the through hole 11A extends. With this configuration, it is possible to prevent the positions of the through grooves 12A and the bridges 12C from being offset in the circumferential direction of the through hole 11A. Therefore, it is possible to prevent differences in the degree of melting of the welded portion W from occurring in the circumferential direction of the through hole 11A.

[0113] 15, the micromixer 100 may include a through-hole plate 10C instead of the relay flow path plate 20. In addition, in the through-hole plates 10A to 10C, a substantially annular through groove 12B may be formed around the through hole 11A, i.e., around the welded portion.

[0114] 16, a substantially annular through groove 12B can be formed around the through hole 21A, i.e., around the portion facing the welded portion, in the relay flow path plate 20. With this configuration, the through groove 12B of the relay flow path plate 20 can suppress the diffusion of heat around the position where heat is applied when welding the through hole plate 10A and the first inlet pipe 95A. Therefore, the welded portion between the through hole plate 10A and the first inlet pipe 95A can be easily melted, and the difficulty of welding can be reduced.

[0115] As shown in Figures 17 and 18, the through-hole plate 10B and the support plates 90B and 90C can be omitted in the micromixer 100 of Figure 1. With this configuration, the number of plates required for the micromixer 100 can be reduced.

[0116] In the first flow path plate 40, the first flow path 51 and the first divided flow paths 53, 55, and the first merging flow path 57 can also be formed in separate steps. Similarly, in the second flow path plate 60, the second flow path 71 and the second divided flow paths 73, 75, and the second merging flow path 77 can also be formed in separate steps.

[0117] In the through hole plate, the through hole 11A and the through grooves 12A, 12B can be formed in separate steps.

[0118] 19 and 20, the function of the first flow path plate 40 can be realized by a first flow path plate 40A and a first flow path plate 40B. Also, the function of the second flow path plate 60 can be realized by a second flow path plate 60A and a second flow path plate 60B.

[0119] That is, the first flow path 51 and the first divided flow paths 53, 55 are formed on the front side surface of the first flow path plate 40A, and the first merging flow path 57 is formed on the back side surface of the first flow path plate 40B. Then, the first divided flow path 55 and the first merging flow path 57 are communicated by the first communicating flow path 56 formed in the first flow path plate 40A and the first communicating flow path 56 formed in the first flow path plate 40B. Similarly, the second merging flow path 77 is formed on the front side surface of the second flow path plate 60A, and the second flow path 71 and the second divided flow paths 73, 75 are formed on the back side surface of the second flow path plate 60B. Then, the second divided flow path 75 and the second merging flow path 77 are communicated by the second communicating flow path 76 formed in the second flow path plate 60A and the second communicating flow path 76 formed in the second flow path plate 60B. With such a configuration, the same effects as those of the above embodiment can be achieved.

[0120] Instead of the configuration in which the first divided flow paths 55 and the second divided flow paths 75 are alternately arranged when projected in a direction perpendicular to the front side surface, a configuration in which the first divided flow paths 55 and the second divided flow paths 75 overlap each other can be adopted. That is, the first divided flow paths 55 and the second divided flow paths 75 can be opposed to each other so that the first fluid flowing from the first divided flow path 55 to the first junction flow path 57 and the second fluid flowing from the second divided flow path 75 to the second junction flow path 77 collide head-on.

[0121] Instead of etching, cutting or pressing can be used to form the through holes and grooves in each plate.

[0122] The outer shapes and cross-sectional shapes of the flow paths of the first inlet pipe 95A, the second inlet pipe 95B, and the outlet pipe 98 are not limited to being circular and can be arbitrarily changed. The second inlet pipe 95B can also be provided on the back side (lower surface) of the micromixer 100. In that case, the non-penetrating grooves 32, 82 can be omitted, and the first inlet pipe 95A and the second inlet pipe 95B can be arranged so as to overlap when projected in a direction perpendicular to the front side surface.

[0123] The outer shape of each plate is not limited to a rectangle and can be changed as desired.

[0124] Instead of welding (fusion welding) the first inflow pipe 95A to the through-hole plate 10A, the first inflow pipe 95A can be brazed (soldered) to the through-hole plate 10A.

[0125] The fluid to be mixed by the micromixer 100 is not limited to liquid, but may be gas.

[0126] The structure in which the first inlet pipe 95A is welded or brazed to the through-hole plate 10A is not limited to the micromixer 100, but can be applied to other fluid control devices. [Explanation of symbols]

[0127] Reference Signs List 10A... through hole plate, 10B... through hole plate, 10C... through hole plate, 11A... through hole, 11B... through hole, 12A... through groove (groove), 12B... through groove (groove), 12C... bridge (connection portion), 13... through hole, 20... relay flow path plate, 21A... through hole (relay flow path), 21B... through hole (relay flow path), 23... through hole, 30... first inlet flow path plate, 31A... through hole, 31B... through hole, 32... non-through groove (flow path), 33... through hole, 40... first flow path plate, 41A... through hole, 41B... through hole, 43... through hole, 51... first flow path, 53... first division flow path (first stage flow path), 55... first division flow path (first second-stage flow path), 56...first communicating flow path, 57...first merging flow path, 60...second flow path plate, 60A...second flow path plate, 60B...second flow path plate, 61A...through hole, 61B...through hole, 63...through hole, 71...second flow path, 73...second divided flow path (first-stage flow path), 75...second divided flow path (second-stage flow path), 76...second communicating flow path, 77...second merging flow path, 80...second inflow flow path plate, 82...non-through groove (flow path), 90A...support plate, 90B...support plate, 90C...support plate, 95A...first inflow piping (piping), 95B...second inflow piping (piping), 98...outflow piping (piping), 100...micromixer.

Claims

1. a flow path plate in which a flow path for a fluid is formed; a plurality of through-hole plates, each having through-holes formed therein, disposed on the flow path plate; a pipe having a piping flow passage formed therein, the pipe being inserted into the through holes of the plurality of through-hole plates, the piping flow passage being connected to the flow passage, and the pipe being welded to the through-hole plate farthest from the flow passage plate; Equipped with A piping welding structure, wherein a groove is formed around a welded portion of each of the plurality of through hole plates that is welded to the piping.

2. a relay flow path plate disposed between the flow path plate and the through-hole plate, the relay flow path being formed to connect the flow path and the piping flow path; The piping welding structure according to claim 1 , wherein a groove is formed around a periphery of the intermediate flow passage plate in a portion facing the welded portion.

3. The piping welding structure according to claim 1 or 2, wherein a plurality of through grooves are formed around the welded portion in the plurality of through hole plates, and a connection portion is provided between the plurality of through grooves, which is a portion where the through groove is not formed.

4. The piping welding structure according to claim 3 , wherein the connection portions of the plurality of through hole plates are offset from one another when projected in a direction in which the through holes extend.

5. A method for manufacturing the piping welded structure according to any one of claims 1 to 4, comprising the steps of: A method for manufacturing a piping welded structure, comprising a forming step of simultaneously forming the through hole and the groove in the through hole plate by etching.

6. A method for manufacturing the piping welded structure according to claim 3 or 4, comprising the steps of: A manufacturing method for a piping welding structure, comprising a forming process in which the through hole and the through groove are simultaneously formed in the through hole plate by etching, and the connection portion is formed as a portion of the through hole plate that is not etched at the same time as forming the through groove.

Images