Method and system for acquiring electron backscatter diffraction patterns - Patents.com

Abstract

To provide a method and system for acquiring an electron backscattering diffraction pattern.SOLUTION: A first scan is executed by detecting particles that scatter a charged particle beam from a plurality of impact points toward the plurality of impact points in a region of interest (ROI). The signal quality of each impact point of the plurality of impact points is calculated on the basis of the detected particles. The signal quality of ROI is calculated on the basis of the signal quality of each impact point. A second scan of ROI is executed depending on the signal quality of ROI lower than a threshold signal quality. A structure image of a sample can be formed on the basis of the particles detected in both of the first scan and the second scan.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] This description relates generally to methods and systems for acquiring backscattered electrons, and more particularly to data-driven electron backscatter diffraction pattern acquisition. [Background technology]

[0002] Irradiation of a sample with a charged particle beam, such as an electron beam, can result in the generation of various types of emissions from the sample. Among them, backscattered electrons consist of high energy electrons that are reflected or backscattered from the interaction volume of the sample due to elastic scattering interactions between the charged particle beam and the sample atoms. The backscattered electrons are collected by a detector in the form of a two-dimensional electron backscatter diffraction (EBSD) pattern. Structural information, such as crystal orientation, in the interaction volume can be determined through analysis and interpretation of the EBSD pattern. Summary of the Invention

[0003] In one embodiment, a method of imaging a sample includes performing a first scan by directing a charged particle beam to a plurality of impact points in an ROI and detecting particles scattered from each of the plurality of impact points, calculating a signal quality of each of the plurality of impact points based on the detected particles scattered from the impact points, calculating a signal quality of the ROI based on the signal quality of each impact point, where the signal quality of the ROI is lower than a threshold signal quality, performing a second scan by directing a charged particle beam to one or more of the plurality of impact points in the ROI and detecting particles scattered from one or more of the plurality of impact points in the ROI after calculating the signal quality of the ROI, and forming a structural image of the ROI based on the particles detected during the first scan and the second scan. In this manner, the dwell time of the charged particle beam at each impact point can be reduced. Furthermore, the acquisition of the EBSD pattern can be terminated based on the quality of the acquired data, thereby reducing the total data acquisition time and the sample damage caused by the charged particle beam.

[0004] It should be understood that the above Summary is provided to introduce in a simplified form a selection of concepts that are further described in the Detailed Description. It is not intended to identify key or essential features of the claimed subject matter, the scope of which is uniquely defined by the claims that follow the Detailed Description. Moreover, the claimed subject matter is not limited to implementations that solve any disadvantages noted above or in any part of this disclosure. [Brief description of the drawings]

[0005] [Figure 1] 1 illustrates an imaging system for electron backscatter diffraction (EBSD) pattern acquisition in accordance with an example embodiment. [Diagram 2] An example of a procedure for generating a structural image based on an EBSD pattern is shown. [Diagram 3] 1 is a flowchart of a method for forming a structural image based on data-driven EBSD pattern acquisition. [Figure 4A-4F] EBSD patterns of impact points formed over time. [Figure 5A-5B] 3 illustrates different scanning patterns for imaging a region of interest. [Figure 6] 1 shows an exemplary timeline for acquiring an EBSD pattern.

[0006] Like reference numerals refer to corresponding parts throughout the several views of the drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] The following description relates to a system and method for acquiring an electron backscatter diffraction (EBSD) pattern and generating a structural image of a specimen based on the EBSD pattern. The EBSD pattern can be acquired by an imaging system as shown in FIG. 1. In one example, as shown in FIG. 2, the EBSD pattern is generated based on scattered electrons detected in response to a charged particle beam impinging on an impact point of the specimen. Based on the EBSD pattern, structural information such as crystal orientation information at the impact point can be extracted, and the structural information forms pixels of the structural image. By scanning a region of interest (ROI) with the charged particle beam, a structural image of the ROI can be generated.

[0008] Traditionally, EBSD patterns can be detected by planar phosphor or direct electron detectors. For example, after irradiating the impact point for a dwell time, frames of the EBSD pattern are read out from the detector as a two-dimensional matrix (i.e., frames). The dwell time for acquiring each EBSD pattern can range from 0.1 to 100 ms. Longer dwell times increase the signal-to-noise ratio of the EBSD pattern, thereby ensuring the extraction of structural information. However, high-brightness signals may saturate the detector. Longer dwell times also increase the total data acquisition time, which may result in radiation damage to the sample. Even with a frame rate of 5000 fps for EBSD pattern readout, the acquisition of all EBSD patterns in an ROI may take several minutes. In addition, the charged particle beam may drift during the data acquisition process. Compensating for beam drift may be difficult due to the non-uniform pixel-to-pixel shift of the structural image. Furthermore, performing energy dispersive X-ray spectroscopy (EDS) along with EBSD pattern acquisition may saturate the EDS detector due to the long dwell times.

[0009] To address the above issues, Figure 3 shows a method for generating structural images of a sample based on data-driven EBSD pattern acquisition. Instead of a conventional single-frame readout, data associated with each electron is read out in instantaneous response to the electron hitting the detector. The ROI of the sample is repeatedly scanned with short dwell times until the signal quality of the ROI reaches a threshold level. In this way, the dwell time of the charged particle beam at each impact point of the ROI during a single scan can be reduced by more than two orders of magnitude compared to the single-frame readout method. Furthermore, radiation damage to the sample can be further reduced since the total data acquisition time is sample-dependent. Figures 4A-4F show examples of EBSD patterns generated based on particles scattered from a single impact point during repeated scanning of the ROI. The signal quality of the impact point (in this case, the EBSD quality) improves over time. Imaging parameters such as the scan pattern of each single scan of the ROI can be adjusted based on the signal quality of each impact point. Figures 5A and 5B show examples of scan patterns of the ROI for different single scans of the same ROI. Figure 6 shows an example of a timeline for acquiring EBSD patterns.

[0010] With reference to FIG. 1, an exemplary charged particle imaging system 10, such as a scanning electron microscope (SEM), may be used to acquire an EBSD pattern. The imaging system 10 may include an electron beam column 110 mounted on a specimen chamber 120. The electron beam column 110 includes an electron source 102 for generating a beam of energetic electrons along an emission axis 104 and having a selectable energy, for example, between 500 eV and 30 keV. The electron beam may be manipulated by lenses (106, 108, 118), deflectors (112, 114), and a beam aperture (116) to form a finely focused spot on a specimen 126.

[0011] The sample chamber 120 may optionally include an airlock 122 for introducing a sample therein and placing the sample on the sample holder 124. The sample holder 124 may rotate or translate / shift the sample so that an ROI on the sample surface may be illuminated by a finely focused electron beam under a selectable tilt angle. The sample chamber 120 further includes one or more detectors for receiving particles emitted from the sample. The detectors may include an EDS detector 140 for detecting X-rays, an EBSD detector (128 or 138) for detecting backscattered electrons, and an Everhart-Thornley detector 130 for detecting secondary electrons. The EBSD detector may be a position-sensitive detector. For example, in response to the event of a single electron impacting the detector, data regarding the event, such as the time of impact, the relative impact position on the detector, and the energy of the electron, may be transmitted from the detector to the controller 132. In one example, the EBSD detector is a pixelated detector. Both the electron beam column 110 and the sample chamber 120 can be connected to a high vacuum pump to evacuate the enclosed volume.

[0012] The sample may be positioned at different angles relative to the radiation axis 104 to obtain various images of the sample. For example, an SEM image may be obtained via the detector 130 by positioning the surface of the sample 126 facing the incident beam; i.e., the sample axis is aligned with the radiation axis 104. An EBSD pattern may be obtained via the EBSD detector 128 by positioning the sample at an angle of about 70 degrees relative to the radiation axis 104. An EBSD pattern may be obtained via the EBSD detector 138 by positioning the sample at an angle of less than 45 degrees relative to the radiation axis 104. In some embodiments, an SEM image may also be obtained by positioning the sample at an angle relative to the radiation axis.

[0013] In some embodiments, the voltages and / or currents required for the operation of the (magnetic or electrostatic) lenses and electron sources are generated / controlled by the column controller 134, and the controller 132 generates deflection signals for the deflectors and samples the detector signals. The controller 132 may be connected to a display 136 for displaying information such as an image of the sample. The controller 132 may also receive operator input from an input device 141. The input device may be a mouse, keyboard, or touchpad. The controller may translate, shift, or tilt the sample relative to the incident beam by moving the sample holder 124. The controller 132 may scan the sample with the charged particle beam by adjusting the beam via the deflectors 112 and / or 114.

[0014] The controller 132 may include a processor 135 and a non-transitory memory 137 for storing computer readable instructions. By executing the computer readable instructions stored in the non-transitory memory, the controller may perform various methods disclosed herein. For example, the controller 132 may be configured to process signals received from multiple detectors and reconstruct a SEM image, an EBSD pattern, or a crystal orientation image of the sample. The controller 132 may also include a field programmable gate array (FPGA) configured to process signals received from the various detectors.

[0015] Although an SEM system is described as an example, it will be appreciated that the imaging system may be other charged particle microscope systems, such as a transmission electron microscope (TEM), a scanning transmission electron microscope (STEM), a dual beam tool such as a focused ion beam scanning electron microscope (FIB-SEM), etc. The SEM system described herein is only one example of an imaging system suitable for acquiring backscattered electrons.

[0016] FIG. 2 illustrates an exemplary procedure for forming a structural image of a ROI 202 based on an EBSD pattern acquired using the imaging system of FIG. 1. An electron beam 201 irradiates a sample 126 along a radiation axis 104. The electron beam 201 strikes the sample 126 at an impact point 205 within the ROI 202 on the sample surface. The impact point may be a volume of the sample with which the irradiated electrons interact. There are multiple impact points within the ROI. Only the impact point 205 is shown here as an example. The sample 126 is positioned at a fixed angle relative to the radiation axis 104 during EBSD pattern acquisition. For example, the sample axis 210, which is normal to the sample surface, may be positioned at 70 degrees relative to the radiation axis 104, so that the beam strikes the sample surface at a shallow angle of 20 degrees. In another example, the angle between the sample axis and the radiation axis may be less than 45 degrees. While the impact point 205 is being irradiated with the electron beam, backscattered electrons from the impact point are detected by the EBSD detector. A two-dimensional EBSD pattern 203 can be formed based on the backscattered electrons detected from the impact point 205. The EBSD pattern 203 can be analyzed to determine information such as the crystal orientation and crystal phase at the impact point 205. The crystal orientation can be calculated from the Kikuchi bands measured in the EBSD pattern 203. In one example, the crystal orientation is determined by matching a known EBSD pattern (or a simulated version thereof) to the observed EBSD pattern. In another example, the crystal orientation is calculated by comparing the angle measured between the Kikuchi bands to a theoretical interplanar angle determined using standard crystallographic principles. The crystal orientation can be color coded and shown as pixels 209 in the crystal orientation image 207. By scanning multiple impact points within the ROI 206, a 2D crystal orientation image 207 can be generated. Each pixel in the crystal orientation image 207 corresponds to one impact point within the ROI 202, as indicated by the arrows 208.

[0017] FIG. 3 illustrates a method 300 for acquiring an EBSD pattern and generating a structural image of a sample based on the EBSD pattern. The method 300 can be implemented by executing computer-readable instructions stored in a non-transitory memory of a controller of an imaging system, such as the controller 132 of FIG. 1. The EBSD pattern is acquired using a position-sensitive EBSD detector by repeatedly scanning an ROI of the sample with a charged particle beam. After each single scan of the ROI, a signal quality of the ROI is updated based on the signal quality of each impact point in the ROI. Acquisition of the EBSD pattern can be terminated in response to a signal quality of the ROI being higher than a threshold signal quality. Additionally, a drift of the beam can be corrected after each single scan of the ROI. A structural image of the ROI can be constructed based on the EBSD pattern.

[0018] In step 301, imaging parameters are set. The imaging parameters may include a primary beam energy, a current density of the charged particle beam, and a dwell time of the charged particle beam at each impact point within the ROI during a single scan. The dwell time may be predetermined based on the type of sample. For example, if the sample is sensitive to radiation damage, the dwell time may be short. In another example, if the sample is a multiphase material, the dwell time may be long. The dwell time may also be decreased in response to an increase in the current density of the charged particle beam. For example, the dwell time is less than 100 microseconds. In one example, the dwell time is 1 microsecond. The imaging parameters may include a resolution of the structural image, or a scan resolution of the ROI. For example, setting the resolution of the structural image includes determining a step size of the scan, or a distance between adjacent impact points. The imaging parameters may include a threshold signal quality for terminating the acquisition of the EBSD pattern.

[0019] In step 302, a sample image may be optionally acquired. The imaging area of ​​the sample image may be the same as or larger than the ROI. In one embodiment, the sample image may be a SEM image formed based on secondary electrons from the sample. In another embodiment, the sample image may be an optical image of the sample acquired without scanning the sample with a charged particle beam.

[0020] In step 304, the charged particle beam is directed to an impact point located within the ROI of the sample.

[0021] In step 306, while the charged particle beam is stationary relative to the sample, the backscattered particles (e.g., electrons) are detected by a detector, such as an EBSD detector. For example, in response to each particle impacting the detector, the detector outputs one or more of the particle's energy, timestamp, and position information to the controller or an FPGA within the controller. The timestamp is the time the particle impacts the detector. The position information is the relative location on the detector where the particle is detected. In one example, the electron energy is determined based on the duration of the signal output from the detector that is higher than a threshold level. In one example, a single frame of the EBSD pattern can be formed based on the recorded electron energy or timestamp, and the electron's position. The charged particle beam can irradiate one impact point during a dwell time and then irradiate another impact point located at a different location of the ROI.

[0022] In some embodiments, the imaging system may include an EDS detector for acquiring x-rays emitted from an impact point on the sample, the EDS detector irradiating the impact point during a dwell time and then outputting an accumulated x-ray energy spectrum corresponding to the impact point to the controller.

[0023] In step 308, the method 300 determines whether a single scan of the ROI with the charged particle beam is complete. In one embodiment, a single scan of the ROI is complete if all impact points within the ROI have been irradiated or scanned with the charged particle beam since step 304. In another embodiment, a single scan of the ROI is complete if the same impact point is going to be irradiated again with the charged particle beam. Depending on the completion of the single scan of the ROI, the signal quality of the impact point is calculated in step 314. If the single scan of the ROI is not complete, the incident beam is adjusted to irradiate another impact point within the ROI in step 312.

[0024] At step 314, a signal quality of each impact point is calculated. The signal quality of the impact point indicates the quality of the signal obtained from the impact point to extract structural information. In one example, the signal quality of a particular impact point may be calculated based on detected particles scattered from the impact point since the start of the method 300. In another example, the signal quality of a particular impact point may be calculated based on detected particles scattered from the impact point during multiple single scans of the ROI. In yet another example, the signal quality of a particular impact point may be the quality of a diffraction pattern formed based on detected particles scattered from the impact point. If the ROI includes an X-row, Y-column matrix of impact points, the signal quality of each impact point in the ROI may be expressed as SQimpact point(x,y), where (x,y) are the coordinates of the impact point in the ROI, x∈[1,X], y∈[1,Y]. The signal quality of each impact point may be updated during or after each single scan of the ROI. The signal quality of each impact point may improve monotonically during the execution of the method 300.

[0025] In one embodiment, in step 316, a diffraction pattern, such as an EBSD pattern, is formed for each impact point based on all the electrons detected during the repetitive scan. In one example, the diffraction pattern can be formed based on the energy of the detected electrons and their relative positions on the detector. In other words, the energy of a particle scattered from an impact point that strikes a pixelated detector at coordinate (i,j) at time t can be expressed as:

number

number

number

number

[0026] In step 317, the quality of the diffraction pattern is determined. The quality of the diffraction pattern is the signal quality of the corresponding impact point. The quality of the diffraction pattern indicates the quality of the diffraction pattern for extracting structural information such as crystal orientation. In one embodiment, the quality of the diffraction pattern is determined by statistically analyzing pixel values ​​in the diffraction pattern. For example, the quality of the diffraction pattern is the entropy or standard deviation of pixel values ​​in the diffraction pattern. The quality of the diffraction pattern improves with decreasing entropy or decreasing standard deviation. In another example, the quality of the diffraction pattern is determined by statistically analyzing a transformation of the diffraction pattern. The transformation can be, but is not limited to, a Hough transform or a Radon transform. In another embodiment, the quality of the diffraction pattern may be determined based on the quality of the index of the bands in the diffraction pattern. For example, the quality of the index can be determined by comparing the detected bands in the EBSD pattern with the theoretically calculated bands. The detected bands and the theoretical bands can be compared by measuring the average deviation between the detected bands and the theoretical bands. In another embodiment, the diffraction quality may be determined based on the contrast of the bands in the EBSD pattern.

[0027] 4A-4F show exemplary EBSD patterns of one impact point formed during repeated scanning of the ROI. As the time increases from FIG. 4A to FIG. 4F, the number of times the impact point is irradiated by charged particles increases. The total number of detected particles scattered from the impact point or the deposited energy increases with time. Thus, the longer the time, the easier it is to identify bands in the EBSD pattern and the more accurately structural information can be extracted. In other words, the EBSD pattern quality (or the signal quality of the corresponding impact point) improves monotonically with time.

[0028] In some embodiments, the signal quality of the impact point may be calculated during a single ROI scan, for example, the signal quality of the impact point may be calculated immediately after collecting particles scattered from the impact point in step 306. In other words, the signal quality of the impact point is calculated in parallel with the scan before a single scan is completed.

[0029] In step 318, the signal quality of the ROI can be calculated based on the signal quality of each impact point within the ROI. For example, the signal quality SQ ROI may be the minimum signal quality of all impact points, i.e.

number

[0030] In step 320, the signal quality of the ROI is compared to a threshold signal quality. In one embodiment, the threshold signal quality is determined in step 301. For example, the threshold signal quality may be adjusted based on the characteristics of the sample under test. The threshold signal quality may be increased with increasing resistance of the sample to radiation damage. The threshold signal quality may be increased with increasing phase number of the sample. In response to the signal quality of the ROI being higher than the threshold signal quality, a structural image of the ROI is generated in step 328. If the signal quality of the ROI is lower than the threshold signal quality, another single scan of the ROI can be performed after correcting for beam drift. During the next single scan, the signal quality of one or more of the impact points can be updated based on the newly detected particles, and the signal quality of the ROI can be updated based on the signal quality of each of the impact points.

[0031] In step 324, a sample image may be acquired. In one embodiment, acquiring the sample image may include acquiring the same type of sample image as step 302. In another embodiment, acquiring the sample image may include generating the sample image based on particles detected in a previous single scan of the ROI. For example, a pixel value of the sample image may be the total dose received by the detector when a corresponding impact point in the ROI is irradiated with the charged particle beam. In other words, the sample image may be expressed as:

number

[0032] In step 326, the drift of the charged particle beam can be corrected based on the sample image obtained in step 324. For example, the sample image in step 324 is compared to a sample image acquired before the single scan of the ROI. The charged particle beam is then shifted relative to the sample based on the shift between the two sample images. In one example, the charged particle beam is shifted by adjusting a deflector (such as deflectors 112 and 114 in FIG. 1). In another example, the sample position is shifted or moved using a sample holder (such as sample holder 124 in FIG. 1). After correcting for the beam drift, another single scan of the ROI is performed.

[0033] At step 328, one or more imaging parameters may be optionally adjusted for the next single scan of the ROI. For example, imaging parameters including scan pattern and dwell time may be adjusted based on the signal quality of each impact point. In another example, one or more of the multiple impact points having a signal quality below a threshold level may be selected to be scanned / irradiated in the next single scan of the ROI, while the remaining of the multiple impact points are not scanned / irradiated.

[0034] In some embodiments, the scan pattern for each single scan of the ROI is the same. That is, the impact points in the ROI are scanned in the same sequence. For example, the scan pattern may be a raster scan. In another embodiment, the scan patterns for different single scans of the ROI may be different. The scan pattern may be determined based on the signal quality of each impact point. When the signal quality of a particular impact point becomes higher than a threshold level, the illumination of that impact point may be stopped in the next single scan of the ROI. In this way, only a subset of impact points with low signal quality are imaged in the next single scan. By changing the scan pattern, the total imaging time may be reduced while maintaining the quality of the structural image of the ROI. The signal quality of the impact points may be calculated / updated as shown in step 314. For example, the signal quality of the impact points may be determined / updated based on particles scattering from the impact points over time.

[0035] 5A and 5B show examples of scanning patterns of different single scans of ROI 501. ROI 501 includes multiple impact points 502 (locations of impact points shown by circles). As shown in FIG. 5A, the first single scan of ROI may be a raster scan shown by dashed line 503, and the scanning direction is shown by arrows. The dwell time at each impact point is the same. After collecting the energy of backscattered electrons at each impact point, the corresponding signal quality of the impact point can be calculated. In FIG. 5B, the signal quality of the impact points is color-coded according to color bar 504. The darker the impact point, the higher the signal quality of the impact point. As shown in FIG. 5B, in the next scan of ROI, only the impact points whose signal quality is lower than a threshold value 505 are irradiated with the charged particle beam. Based on the signal quality of each impact point, a new scanning pattern 506 is determined.

[0036] In some embodiments, the dwell time of each single scan of the ROI may be adjusted based on the signal quality of the ROI. For example, the dwell time may be shortened in response to a rate of change of the signal quality of the ROI being higher than a threshold rate of change. In another example, the dwell time may be shortened in response to a difference between the signal quality of the ROI and a threshold signal quality being less than the threshold.

[0037] Thus, the acquisition of the EBSD pattern is data-driven; that is, the acquisition is controlled based on the feedback of the quality of the acquired data, such as the signal quality of the ROI. The imaging parameters for the EBSD pattern acquisition can also be adjusted according to the signal quality of each impact point. The dwell time of each impact point within a single scan can be reduced, and so can the cumulative dwell time of the charged particle beam at each impact point. As a result, the total data acquisition time and the radiation damage of the charged particle beam to the sample can be reduced compared to conventional methods. Furthermore, since the duration of each single scan of the ROI is reduced, the drift of the beam can be easily and effectively corrected.

[0038] FIG. 6 shows an example timeline for data-driven EBSD pattern acquisition using the imaging system of FIG. 1. The x-axis of the plot is time. Time increases as indicated by the arrows on the x-axis. Plot 610 shows the start signal for data acquisition. Data acquisition begins when the signal value is 1 and ends when the signal value is 0. Plot 620 shows individual incidences of electrons striking a pixelated detector. Plot 630 shows the data flow from the EBSD detector to the controller or controller's FPGA. Plot 640 shows the signal quality of the ROI. The signal quality of the ROI improves as indicated by the arrows on the y-axis.

[0039] At T4, data acquisition begins. From T4 to T5, the detector continues to detect backscattered electrons while the charged particle beam scans the ROI. In response to each incidence of an electron striking the detector, a data packet is transferred from the detector to the controller. The data packet includes the energy and / or timestamp of the electron, as well as the location of the electron within the pixelated detector. For example, in response to incidence 621 of an electron striking the detector, data packet 631 is transferred to the controller. Data packet 631 includes the energy and / or timestamp of the incident 621 electron, as well as the location within the detector where the electron is received.

[0040] At T5, the first single scan of the ROI is completed. The signal quality of the ROI is calculated based on the particles detected at T4 to T5. The signal quality of the ROI is lower than the threshold signal quality 641.

[0041] From T5 to T6, the charged particle beam scans the ROI a second time. The detector continues to pass data packets to the controller in response to each electron detected by the detector. At T6, the second single scan of the ROI is completed. The signal quality of the ROI is updated based on the particles detected from T4 to T6. The updated signal quality of the ROI is lower than the threshold signal quality 641.

[0042] From T6 to T7, the charged particle beam scans the ROI for a third time. The detector continues to pass data packets to the controller in response to each electron detected by the detector. At T7, the third single scan of the ROI is completed. The signal quality of the ROI is updated based on the particles detected in T4 to T7. In response to the updated signal quality of the ROI being higher than the threshold signal quality 641, data acquisition is terminated at T7. A structural image of the ROI can be constructed based on all the particles detected in T4 to T7.

[0043] In some embodiments, the duration of each ROI scan may be the same, while in other embodiments, the duration of each single ROI scan may decrease with increasing time.

[0044] In this way, the ROI of the sample is repeatedly scanned with the charged particle beam until the signal quality of the ROI is higher than a predefined threshold signal quality level. The detector continues to send particle information to the controller as soon as it detects each particle throughout the entire image processing. Thus, the total data acquisition time is not limited by the frame readout time as in the case of conventional EBSD pattern acquisition.

[0045] The technical effect of calculating the signal quality of the ROI after each single scan of the ROI is that the quality of the acquired data can be evaluated. Furthermore, depending on the quality of the acquired data, the repetitive scans can be terminated to reduce the total data acquisition time. The data acquisition time is therefore data-driven and sample-dependent. The technical effect of repetitively scanning the ROI is that the radiation damage of the sample can be reduced, and the beam drift can be effectively corrected after each ROI scan. Also, the EDS data can be read out after irradiating the impact point with a short dwell time. The technical effect of adjusting the imaging parameters depending on the signal quality of the ROI is that the time of a single scan of the ROI can be reduced while maintaining the quality of the acquired data.

[0046] In one embodiment, a method of imaging a sample includes performing a first scan by directing a charged particle beam to a plurality of impact points in a ROI and detecting particles scattered from each of the plurality of impact points, calculating a signal quality of each of the plurality of impact points based on the detected particles scattered from the impact points, calculating a signal quality of the ROI based on the signal quality of each impact point, where the signal quality of the ROI is lower than a threshold signal quality, performing a second scan by directing the charged particle beam to one or more of the plurality of impact points in the ROI and detecting particles scattered from one or more of the plurality of impact points in the ROI after calculating the signal quality of the ROI, and forming a structural image of the ROI based on the particles detected during the first scan and the second scan. In a first example of the method, the method includes updating the signal quality of one or more of the plurality of impact points based on the detected particles scattered from one or more of the plurality of impact points during the second scan, and updating the signal quality of the ROI based on the signal quality of the one or more of the plurality of impact points, where the updated signal quality of the ROI is higher than a threshold signal quality. A second example of the method optionally includes the first example, and further wherein calculating a signal quality for each of the plurality of impact points based on the detected particles scattered from the impact point includes forming a diffraction pattern for each impact point based on the detected particles scattered from the impact point and calculating a signal quality for each impact point based on the corresponding diffraction pattern. A third example of the method optionally includes one or more of the first and second examples, and further wherein particles scattered from each of the plurality of impact points are detected by a detector, and forming a diffraction pattern for each impact point based on the detected particles scattered from the impact point includes recording a position of each of the detected particles on the detector and forming a diffraction pattern based on the position of each of the detected particles. A fourth example of the method optionally includes one or more of the first through third examples, and further wherein calculating a signal quality for each impact point based on the corresponding diffraction pattern includes calculating a signal quality for each impact point based on a quality of the corresponding diffraction pattern. A fifth example of the method optionally includes one or more of the first through fourth examples, further including each pixel of the structural image corresponding to an impact point of a plurality of impact points within the ROI.A sixth example of the method optionally includes one or more of the first through fifth examples, and further includes forming a structural image of the ROI based on the detected particles during the first scan and the second scan includes forming a diffraction pattern for each impact point based on the detected particles scattered from the impact point during the first scan and the second scan, and determining a pixel value of the structural image corresponding to the particular impact point based on the diffraction pattern of the particular impact point. A seventh example of the method optionally includes one or more of the first through sixth examples, and further includes correcting for drift of the charged particle beam between the first scan and the second scan. An eighth example of the method optionally includes one or more of the first through seventh examples, and further includes detecting particles scattered from each impact point of the plurality of impact points includes recording an energy or a timestamp of the impacted scattered particle and a position of the impacted scattered particle on the detector in response to each scattered particle impacting the detector. A ninth example of the method optionally includes one or more of the first through eighth examples, and further includes selecting one or more of the plurality of impact points based on signal quality of each impact point prior to the second scan.

[0047] In one embodiment, a method for imaging a sample includes repeatedly scanning a region of interest (ROI) of the sample by directing a charged particle beam to a plurality of impact points of the ROI and detecting particles scattered from the plurality of impact points, calculating a signal quality of each of the plurality of impact points during the repeated scanning, updating a signal quality of the ROI based on the signal quality of each impact point after each single scan of the ROI, where the signal quality of a particular impact point is calculated based on the detected particles scattered from the impact point, terminating the repeated scanning when the signal quality of the ROI is higher than a threshold signal quality, and forming a structural image of the ROI based on the particles detected during the repeated scanning. In a first example of the method, each pixel of the structural image corresponds to an impact point of the plurality of impact points, and forming a structural image of the ROI based on the particles detected during the repeated scanning includes forming, for each impact point, a diffraction pattern based on all of the detected particles scattered from the impact point, and determining each pixel value of the structural image of the ROI based on the corresponding diffraction pattern. A second example of the method optionally includes the first example and further includes adjusting a scan pattern of the repeated scan based on a signal quality of each of the plurality of impact points during the repeated scan. A third example of the method optionally includes one or more of the first and second examples and further includes the signal quality of each impact point monotonically increasing during the repeated scan.

[0048] In one embodiment, a system for imaging a sample comprises a charged particle source for generating a charged particle beam toward the sample, a detector for detecting particles scattered from the sample, and a controller having computer readable instructions stored in a non-transitory medium, wherein the controller is configured to perform a first scan by directing the charged particle beam toward a plurality of impact points within a ROI and detecting particles scattered from each of the plurality of impact points, calculate a signal quality of each of the plurality of impact points based on the detected particles scattered from the impact points, calculate a signal quality of the ROI based on the signal quality of each impact point, wherein the signal quality of the ROI is lower than a threshold signal quality, after calculating the signal quality of the ROI, perform a second scan by directing the charged particle beam toward one or more of the plurality of impact points within the ROI and detecting particles scattered from one or more of the plurality of impact points within the ROI, and form a structural image of the ROI based on the particles detected during the first scan and the second scan. In a first example of the system, the system further comprises a detector for imaging a region of the sample including the ROI, and the controller is further configured to acquire a first sample image before the first scan, acquire a second sample image between the first and second scans, and compare the first and second sample images before the second scan to correct for drift of the charged beam. A second example of the system optionally includes the first example, and further includes the controller is further configured to form a first sample image based on particles detected during the first scan, form a second sample image based on particles detected during the second scan, and compare the first and second sample images before the second scan to correct for drift of the charged beam. A third example of the system optionally includes one or more of the first and second examples, and further includes a dwell time of the charged particle beam at each impact point of the multiple impact points during the first scan is less than 100 microseconds. A fourth example of the system optionally includes one or more of the first and third examples, and further wherein the controller is further configured to update a signal quality of each impact point based on detected particles scattered from one or more of the plurality of impact points during the second scan, and update a signal quality of the ROI based on the updated signal quality of each impact point, wherein the updated signal quality of the ROI is higher than a threshold signal quality.A fifth example of the system optionally includes one or more of the first and fourth examples, further comprising: each pixel of the structural image corresponds to an impact point among the plurality of impact points, and calculating a signal quality of each impact point based on detected particles scattered from the impact point includes forming a diffraction pattern corresponding to each impact point based on a relative position of each detected particle on the detector, and calculating a signal quality of each impact point based on a quality of the corresponding diffraction pattern to extract structural information.

Claims

1. 1. A method of imaging a sample, comprising: repetitively scanning a region of interest (ROI) of the sample by directing a charged particle beam to multiple impact points in the ROI and acquiring signals by detecting particles scattered from the multiple impact points; Calculating a signal quality of the signal at each impact point of the plurality of impact points during the repeated scanning, and updating a signal quality of the ROI based on the signal quality of each impact point after each single scan of the ROI, the signal quality of the impact point being indicative of a quality of a signal acquired for extracting structural information from the impact point, and calculated based on the detected particles scattered from the impact point; comparing the signal quality of the ROI with a threshold signal quality, and terminating the repeated scanning according to the signal quality of the ROI if the signal quality of the ROI is higher than the threshold signal quality; forming a structural image of the ROI based on the particles detected during the repeated scans.

2. 2. The method of claim 1 , wherein each pixel of the structural image corresponds to an impact point among the plurality of impact points, and forming the structural image of the ROI based on the particles detected during the repeated scanning includes, for each impact point, forming a diffraction pattern based on all of the detected particles scattered from the impact point during the repeated scanning, and determining each pixel value of the structural image of the ROI based on the corresponding diffraction pattern.

3. The method of claim 1 or 2, further comprising adjusting a scan pattern of the repetitive scan based on the signal quality of each impact point of the plurality of impact points during the repetitive scan.

4. The method according to any of claims 1 to 3, wherein the signal quality of each impact point increases monotonically during the repeated scans.

5. The method of any one of claims 1 to 4, further comprising correcting drift of the charged particle beam after each scan of the repetitive scans.

6. 2. The method of claim 1, wherein detecting particles scattered from the multiple impact points includes, in response to each scattered particle impacting a detector, recording an energy or a timestamp of the impacted scattered particle and a position of the impacted scattered particle on the detector.

7. 1. A system for imaging a sample, comprising: a charged particle source for generating a charged particle beam directed toward the sample; a detector for detecting scattered particles from the sample; and a controller having computer readable instructions stored on a non-transitory medium, the controller comprising: performing a first scan by directing the charged particle beam to a plurality of impact points within the ROI and acquiring a signal by detecting particles scattered from each of the plurality of impact points; determining a signal quality of the signal for each of the plurality of impact points based on the detected particles scattered from the impact points, the signal quality being indicative of a quality of a signal obtained from the impact points to extract structural information; determining a signal quality of the ROI based on the signal quality of each impact point; if the signal quality of the ROI is below a threshold signal quality, performing a second scan by directing the charged particle beam to one or more of the plurality of impact points within the ROI after determining the signal quality of the ROI and detecting particles scattered from the one or more of the plurality of impact points within the ROI; and The system is configured to form a structural image of the ROI based on the particles detected during the first scan and the second scan.

8. 8. The system of claim 7, further comprising a detector for imaging a region of the sample including the ROI, wherein the controller is further configured to acquire a first sample image prior to the first scan, acquire a second sample image between the first scan and the second scan, and compare the first sample image to the second sample image prior to the second scan to correct for drift of the charged beam.

9. 9. The system of claim 7 or 8, wherein the controller is further configured to form a first sample image based on particles detected during the first scan, form a second sample image based on the particles detected during the second scan, and correct for drift of the charged beam prior to the second scan.

10. The system of any of claims 7 to 9, wherein a dwell time of the charged particle beam at each of the plurality of impact points during the first scan is less than 100 microseconds.

11. The system of any of claims 7 to 10, wherein the controller is further configured to update the signal quality of each impact point based on the detected particles scattered from the one or more of the plurality of impact points during the second scan until an updated signal quality of the ROI is higher than the threshold signal quality, and to update the signal quality of the ROI based on the updated signal quality of each impact point.

12. 12. The system of claim 7, wherein each pixel of the structural image corresponds to an impact point among the plurality of impact points, and calculating the signal quality of each impact point based on the detected particles scattered from the impact point comprises forming a diffraction pattern corresponding to each impact point based on a relative position of each detected particle on the detector, and calculating the signal quality of each impact point based on a quality of the corresponding diffraction pattern to extract structural information.

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