Linkage mechanism

Abstract

To provide a connection mechanism for connecting a valve rod to a closing member of a vacuum valve.SOLUTION: A connection mechanism for connecting a valve rod (4) to a closing member of a vacuum valve includes a connection member (12) provided between a first connection element (10) and a second connection element (11). The connection member (12) is provided in a gap between a pair of first arm projections (24), (25) of the first connection element (10), and provided in a gap between a pair of second arm projections (26), (27) of the second connection element (11). Facing contact surfaces (31) of the arm projections (24),(25),(26),(27) come into contact with contact surfaces (14), (15) of the connection member (12). The arm projections (24),(25),(26),(27) of the connection elements (10), (11) are adjacent to each other at a free end thereof toward the free end.SELECTED DRAWING: Figure 11

Description

[Technical field]

[0001] The present invention relates to a coupling mechanism for connecting a valve rod to a closure member of a vacuum valve, the coupling mechanism comprising: a first connecting element connectable to or connected to, or integrally formed with, the valve rod; a second connecting element connectable to or connected to, or integrally formed with, the occlusion member; a connecting member disposed between the first connecting element and the second connecting element.

[0002] The present invention also provides a valve valve including a closing member supported by a valve rod and displaceable between an open position for opening a valve opening and a closed position for closing the valve opening, The vacuum valve further comprises a connecting mechanism for connecting the closure member to the valve rod.

[0003] In order to connect the closure member, which is usually formed in a plate shape, to the valve rod, a method is known in which the closure member and the valve rod are connected by means of a screw. [Background technology]

[0004] In order to realize uniform pressing of the elastic sealing member arranged between the closure member and the valve seat in the closed state of the vacuum valve regardless of the existing tolerance in the closed state of the vacuum valve, it is known that the elastic sealing member is generally attached to the closure member, and the closure member is movable with respect to the valve rod. For example, a coupling mechanism between the valve rod and a plate-shaped closure member having an elastic block in which a force transmission member is arranged has been proposed (see, for example, Patent Document 1). When the closure member is pressed against the valve seat, the closure member can rotate to a certain extent with respect to the valve rod.

[0005] Further coupling mechanisms between the obstruction member and the valve rod have been proposed that allow the obstruction member to move relative to the valve rod (see, for example, US Pat. Nos. 5,393,313 and 5,393,625).

[0006] A coupling mechanism between a valve rod and a blocking member, which includes a twistable cross beam member, has been proposed (see, for example, Patent Document 4). By twisting the cross beam member, a specific rotation of the blocking member with respect to the valve rod is possible. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] U.S. Patent Publication US2002 / 0130288A1 [Patent Document 2] U.S. Patent Publication US7134642B2 [Patent Document 3] U.S. Patent Publication US3837617 [Patent Document 4] U.S. Patent Publication US2011 / 0108750A1 Summary of the Invention [Problem to be solved by the invention]

[0008] It is an object of the present invention to provide an advantageous coupling mechanism for connecting a valve rod to a closure member of a vacuum valve, such that the position of the closure member can be adjusted relative to the valve rod about two mutually perpendicular axes. [Means for solving the problem]

[0009] According to the invention, this object is achieved by a connecting mechanism having the features of claim 1. A vacuum valve according to the invention has the features of claim 10. The connecting mechanism according to the present invention comprises a connecting member having the basic shape of a masonry tool as a member formed by two cylinders, and thus has a primary contact surface formed by a part of a cylindrical surface surrounding a first axis, and a secondary contact surface formed by a part of a cylindrical surface surrounding a second axis perpendicular to the first axis.

[0010] The connecting member is disposed in a gap between the first arm protrusion of the first connecting element and the second arm protrusion of the second connecting element. The first arm protrusion of the first connecting element has a primary counter contact surface defined by a portion of a cylindrical surface surrounding the first axis, and the second arm protrusion of the second connecting element has a secondary counter contact surface defined by a portion of a cylindrical surface surrounding the second axis. The primary counter contact surface contacts the primary contact surface of the connecting member, and the secondary counter contact surface contacts the secondary contact surface of the connecting member.

[0011] The first arm projection of the first connecting element has a portion that is continuous with or adjacent to the free end of the first arm projection and approaches each other toward the free end. The second arm projection of the second connecting element has a portion that is continuous with or adjacent to the free end of the second arm projection and approaches each other toward the free end. The connecting member is reliably prevented from being pulled away from the first connecting element in the axial direction of the first connecting element, and is reliably prevented from being pulled away from the second connecting element in the axial direction of the second connecting element.

[0012] According to an embodiment of the invention, the second connecting element is constituted by a part of the stone mason's tool and can be displaced relative to the first connecting element about two mutually perpendicular axes corresponding to the axes of the two cylinders, thus allowing adjustment of the position of the obturator relative to the valve rod about said two mutually perpendicular axes.

[0013] In an advantageous embodiment of the invention, the connecting member has a primary groove in a plane perpendicular to the first axis and a secondary groove in a plane perpendicular to the second axis, a first fastening element fixed to the first connecting element projects into the primary groove and a second fastening element fixed to the second connecting element projects into the secondary groove.

[0014] The first fastening element engages with the primary groove to provide a conformable connection between the connecting member and the first connecting element and prevents the first connecting element from pulling away from the connecting member in a direction parallel to the first axis, and the second fastening element engages with the second groove to provide a conformable connection between the connecting member and the second connecting element and prevents the second connecting element from pulling away from the connecting member in a direction parallel to the second axis.

[0015] The first and second fastening elements are preferably configured in the form of pins and are arranged in bores of the connecting member, where the fastening elements protrude into the respective grooves in their central parts in the direction of their longitudinal axes and over at least a part of their circumference. The first bore in which the first fastening element is arranged preferably extends perpendicular to the first axis, and the second bore in which the second fastening element is arranged preferably extends perpendicular to the second axis.

[0016] The connecting element is preferably fastened between the first and second fastening elements. In this way, a suitable so-called heavy walking or friction lock is achieved. The first connecting element is moved relative to the second connecting element only by applying a force that exceeds the locking or friction force acting between the first and second connecting elements. This ensures that when the vacuum valve is closed for the first time by applying a force that exceeds the locking force, the closing element is correspondingly displaced and maintained in a new position. Thus, during the subsequent closing process, there is no further displacement of the first connecting element relative to the second connecting element, as a result of which the generation of undesirable particles in the vacuum is avoided.

[0017] Further advantages and details of the invention are explained below with reference to the accompanying drawings. [Brief description of the drawings]

[0018] [Figure 1] 1 is a perspective view of a vacuum valve having a coupling mechanism according to the invention between the valve rod and the closure member, the closure member being in an open position; [Diagram 2] 2 is a perspective view corresponding to FIG. 1 with the closure member in a closed position; [Diagram 3] Side view of a vacuum valve. [Figure 4] Front view of the vacuum valve. [Diagram 5] 5 is a cross-sectional view taken along the section line AA in FIG. 4 (only the base body 3 and the connecting member 4 are cut). [Figure 6] FIG. 2 is a side view of a portion of a vacuum valve including a coupling mechanism, a valve rod, a bellows surrounding the valve rod, and a flange attached to the bellows, viewed from a direction perpendicular to the valve rod. [Figure 7] FIG. 7 is a cross-sectional view taken along section line BB in FIG. 6 . [Figure 8] 7 is a side view of a portion of the vacuum valve shown in FIG. 6 rotated 90° about the longitudinal axis of the valve rod. [Figure 9] 9 is a cross-sectional view taken along section line CC in FIG. 8 . [Figure 10] FIG. 7 is a perspective view of a portion of the vacuum valve shown in FIG. 6; [Figure 11] 7 is an exploded view of a portion of the vacuum valve shown in FIG. 6 exposing the coupling mechanism viewed from a first direction. [Figure 12] 7 is an exploded view of a portion of the vacuum valve shown in FIG. 6 exposing the coupling mechanism viewed from a second direction. [Figure 13] 7 is an exploded view of a portion of the vacuum valve shown in FIG. 6 exposing the coupling mechanism viewed from a third direction. [Figure 14] 7 is an exploded view of a portion of the vacuum valve shown in FIG. 6 exposing the coupling mechanism viewed from a fourth direction. [Figure 15]7 is a view corresponding to FIG. 6 in which the second connecting element is in a pivoted state relative to the first connecting element. [Figure 16] 9 is a view corresponding to FIG. 8, but showing the second connecting element in a pivoted state relative to the first connecting element; [Figure 17] FIG. 5 is an explanatory diagram of a second embodiment of the invention, shown on a different scale and partially simplified; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] A first embodiment of a vacuum valve equipped with a connection mechanism according to the present invention will be described below with reference to FIGS. 1 to 16. FIG.

[0020] The vacuum valve has a flat closure member 1, also called a valve plate or valve disc. The closure member 1 is displaceable between an open position (see FIG. 1) and a closed position (see FIG. 2). In the open position of the closure member 1, a valve opening 2 is opened, and in the closed position, the valve opening 2 is closed by the closure member 1. The valve opening 2 is arranged in a base body 3.

[0021] The obturator 1 is supported by a valve rod 4. In this embodiment, the obturator 1 is adjusted between the open and closed positions by axial displacement of the valve rod 4. In other embodiments of the invention, the obturator 1 may be adjusted between the open and closed positions along an L-shaped or J-shaped trajectory, for example by axial displacement of the valve rod followed by tilting of the valve rod or displacement of the valve rod perpendicular to its longitudinal axis, as is known.

[0022] In this embodiment, in order to adjust the position of the blocking member 1 between the open and closed positions, a drive mechanism 5 formed by a pneumatic piston-cylinder unit is used to drive the valve rod 4. The valve rod 4 is connected to the piston rod of the piston-cylinder unit or is formed integrally with the piston rod.

[0023] The valve rod 4 is sealed off from the vacuum region in which the obturator 1 is located. In the present embodiment, a bellows 6 is used for this purpose. One end of the bellows 6 is connected to a first connecting element 10 (described later) and the other end of the bellows 6 is connected to a flange 7 which can be connected to the base body 3 in a vacuum-tight manner.

[0024] An annular sealing member 8 made of an elastomeric material is used to provide a seal between the closure member 1 and the base 3 in the closed state of the vacuum valve. In this embodiment, the sealing member 8 is attached to the closure member 1. The valve opening 2 is surrounded by a sealing surface, with which the sealing member 8 forms a sealing seat in the closed position of the closure member 1. The opposite arrangement (seal ring on the base 3 and sealing surface on the closure member 1) is also possible.

[0025] The base 3 may be a vacuum chamber, which is only partially shown in each of Figures 1 to 5. A connecting member 9 is attached (by screws, not shown) to the vacuum chamber in the region of the opening, and a sealing member 8 arranged for a vacuum-tight connection between the vacuum chamber and the connecting member 9 surrounds the opening of the vacuum chamber. The drive mechanism 5 is fixed to the outside of the connecting member 9, the valve rod 4 passes through a channel in the connecting member 9 and the flange 7 is fixed to the inside of the connecting member (with a seal ring interposed therebetween). An air hole communicates with the channel and a guide bushing (not shown) for guiding the valve rod 4 is arranged inside the channel.

[0026] In another embodiment, the base 3 may be a valve housing, only a portion of which is shown, having further openings for forming through channels through the valve housing in the open position of the obturator 1. Such a valve housing may, for example, be connected between two vacuum chambers.

[0027] The base 3 may be designed in the form of a valve body that is inserted as an insert into the vacuum chamber, such that the valve opening 2 communicates with an opening in the wall of the vacuum chamber (a seal ring surrounding the valve opening 2 is arranged between the wall of the chamber and the base 3).

[0028] A coupling mechanism is used to couple the valve rod 4 to the closure member 1. The coupling mechanism comprises a first coupling element 10 coupled to the valve rod 4, a second coupling element 11 coupled to the closure member 1 and a coupling member 12.

[0029] The first connecting element 10 is rigidly connected to the valve rod 4, for example by screwing or welding. It may also be arranged that the first connecting element 10 and the valve rod 4 are integrally moulded and made of the same material.

[0030] In this embodiment, the second connecting element 11 is firmly connected to the closure member 1 by screwing. The second connecting element 11 may be welded to the closure member 1 or may be configured such that the second connecting element 11 is integrally molded with the closure member 1 and made of the same material.

[0031] The connecting member 12 has the basic shape of a stonemason's tool (a square-cutting chisel (Steinmetz-Körper)) that is formed by portions of two cylinders ("bicylinders"). The connecting member 12 has a pair of primary contact surfaces 13 and 14 that are formed by portions of a cylindrical surface that surrounds a first axis 17, and a pair of secondary contact surfaces 15 and 16 that are formed by portions of a cylindrical surface that surrounds a second axis 18 that extends perpendicular to the first axis 17.

[0032] A primary groove 19 and a secondary groove 20 are arranged on the primary contact surfaces 13, 14 and the secondary contact surfaces 15, 16. The primary groove 19 penetrates the primary contact surfaces 13, 14 and extends along a first apex 22 of the connecting member 12 facing the first connecting element 10 in a plane perpendicular to the first axis 17. The secondary groove 20 penetrates the secondary contact surfaces 15, 16 and extends along a second apex 23 of the connecting member 12 facing the second connecting element 11 in a plane perpendicular to the second axis 18. In this embodiment, each of the primary groove 19 and the secondary groove 20 extends over the entire circumference of the connecting member 12. Each of the primary groove 19 and the secondary groove 20 may extend only in the region of each of the contact surfaces 13-16 that is continuous with or adjacent to the first apex 22 and the second apex 23, respectively.

[0033] In this embodiment, the connecting member 12 has a through hole 21 extending through the connecting member 12, for example parallel to the second axis. The through hole 21 may be omitted.

[0034] The first connecting element 10 has a pair of first arm projections 24, 25 that define a gap in which the connecting member 12 is disposed. The second connecting element 11 has a pair of second arm projections 26, 27 that define a gap in which the connecting member 12 is disposed. The first arm projections 24, 25 of the first connecting element 18 have primary counter contact surfaces 28, 29 that are formed by a portion of a cylindrical surface that surrounds the first axis 17. The second arm projections 26, 27 of the second connecting element 11 have secondary counter contact surfaces 30, 31 that are formed by a portion of a cylindrical surface that surrounds the second axis 18. The primary counter contact surfaces 28, 29 contact the primary contact surfaces 13, 14 of the connecting member 12, and the secondary counter contact surfaces 30, 31 contact the secondary contact surfaces 15, 16 of the connecting member 12.

[0035] The portions of the pair of first arm protrusions 24, 25 continuing to the free ends of each of the pair of first arm protrusions 24, 25 gradually approach each other toward the free ends of the pair of first arm protrusions 24, 25. That is, the gap between the pair of first arm protrusions 24, 25 narrows toward the free ends of the first arm protrusions 24, 25. The same applies to the second arm protrusions 26, 27 of the second connecting element 11. This prevents the first connecting element 10 from being pulled away from the connecting member 12 and the valve rod 4 (extending perpendicularly to the first axis 17) in the direction of the first longitudinal axis 32 of the first connecting element 10. Also, the second connecting element 11 is prevented from being pulled away from the connecting member 12 in the direction of the second longitudinal axis 33 of the second connecting element 11 (extending perpendicularly to the second axis 18).

[0036] The pin-shaped first fastening element 34 serves to prevent the first connecting element 10 from being pulled away from the connecting member 12 in a direction parallel to the first axis 17. The first fastening element 34 is arranged or housed in a first bore 36 of the first connecting element 10, which extends perpendicular to the first axis 17. The first bore 36 is open to the connecting member 12 at its central portion in the longitudinal direction over a portion of its circumference. The first fastening element 34 protrudes into the primary groove 19 of the connecting member 12 over a portion of its circumference at its central portion in the longitudinal direction.

[0037] The pin-shaped second fastening element 35 serves to prevent the second connecting element 11 from being pulled away from the connecting member 12 in a direction parallel to the second axis 18. The second fastening element 35 is arranged or housed in a second bore 37 of the second connecting element 11, which extends perpendicular to the second axis 18. The second bore 37 is open to the connecting member 12 at its central portion in the longitudinal direction over a portion of its circumference. The second fastening element 35 protrudes into the secondary groove 20 at its central portion in the longitudinal direction over a portion of its circumference.

[0038] The central portions of the first fastening element 34 and the second fastening element 35 are eccentric or offset with respect to both ends. Therefore, after each fastening element 34, 35 is inserted into each of the perforations 36, 37, each fastening element 34, 35 is rotated to be fastened to the connecting member 12. The connecting member 12 is fastened between the first fastening element 34 and the second fastening element 35 in an assembled state.

[0039] To assemble the coupling mechanism, the coupling member 12 is inserted parallel to the first axis 17 into the gap between the pair of first arm projections 24, 25 of the first coupling element 10, the first fastening element 34 is inserted into the first bore 36, and the first fastening element 34 is rotated to be fixed in the gap. As a result, the coupling member 12 attached to the first coupling element 10 is inserted parallel to the second axis 18 into the gap between the pair of second arm projections 26, 27 of the second coupling element 11, the second fastening element 35 is inserted into the second bore 37, and the second fastening element 35 is rotated to be fastened to the coupling member 12. The reverse assembly procedure (first the coupling member 12 is coupled to the second coupling element 11 and then to the first coupling element 10) is also possible.

[0040] When the obturator 1 is driven into the closed position for the first time after the coupling mechanism is assembled, the obturator 1 can accommodate an angular misalignment with the valve seat to compensate for the relatively large tolerances. This allows the first coupling element 10 to pivot about a first axis 17 relative to the coupling element 12, regardless of the frictional forces acting between the first coupling element 10 and the coupling element 12. Additionally or alternatively, the coupling element 12 can pivot about a second axis 18 relative to the second coupling element 11, regardless of the frictional forces acting between the second coupling element 11 and the coupling element 12. As a result, the position of the second coupling element 11 relative to the first coupling element 10 is maintained or held by the friction that holds the coupling element 12 in its current position.

[0041] In Figure 15, the second connecting element 11 is shown pivoted relative to the first connecting element 10 by a first angle 38 about the first axis 17. In Figure 16, the second connecting element 11 is shown pivoted relative to the first connecting element 10 by a second angle 39 about the second axis 18. Here, the pivot angle is shown exaggerated.

[0042] The second embodiment of the present invention is shown in Fig. 17. The difference from the first embodiment is that a helical pin (also called a strong fastening pin) is adopted as the first fastening element 34 and the second fastening element 35. The helical pin is sheath-shaped and has an axial slit extending over its entire longitudinal axis. After the fastening elements 34, 35 are pressed into the perforations 36, 37, the connecting member 12 is fastened between the fastening elements 34, 35 without the need to rotate the fastening elements 34, 35 around their axis.

[0043] The embodiments of the present invention may be modified without departing from the scope of the technical idea of ​​the present invention. For example, the first fastening element 34 and the second fastening element 35 may be formed in a shape other than pin-like. The connection with the first connecting element 10 or the second connecting element 11 may be in a different form. For example, a spherical fastening element may be arranged in the recess of the first connecting element 10 or the second connecting element 11 and pressed against the bottom of the respective groove 19, 20 by the respective spring elements.

[0044] If the connecting member 12 and the first connecting element 10 and the second connecting element 11 are stably engaged by friction even without the first fastening element 34 and / or the second fastening element 35, the first fastening element 34 and / or the second fastening element 35 may be omitted. [Explanation of symbols]

[0045] 1. Connection mechanism, 2. Valve opening, 3. Base, 4. Valve rod, 5. Drive mechanism, 6. Bellows, 7. Flange, 8. Sealing member, 9. Connector member, 10. First connection element, 11. Second connection element, 12. Connection member, 13. Primary contact surface, 14. Primary contact surface, 15. Secondary contact surface, 16. Secondary contact surface, 17. First axis, 18. Second axis, 19. Primary groove, 20. Secondary groove, 21. Through hole, 22. First Top, 23...second top, 24...first arm protrusion, 25...first arm protrusion, 26...second arm protrusion, 27...second arm protrusion, 28...primary opposing contact surface, 29...primary opposing contact surface, 30...secondary opposing contact surface, 31...secondary opposing contact surface, 32...first vertical axis, 33...second vertical axis, 34...first fastening element, 35...second fastening element, 36...first perforation portion, 37...second perforation portion, 38...first angle, 39...second angle.

Claims

1. A coupling mechanism for coupling a valve rod (4) to a closure member (1) of a vacuum valve, comprising: a first connecting element (10) connectable or connected to said valve rod (4) or integrally formed therewith; a second connecting element (11) connectable or connected to said closure member (1) or integrally formed therewith; a connecting member (12) disposed between the first connecting element (10) and the second connecting element (11); The connecting member (12) has a basic shape forming a part of a stone masonry tool formed of two cylinders, and has primary contact surfaces (13) (14) formed by a part of a cylindrical surface surrounding a first axis (17), and secondary contact surfaces (15) (16) formed by a part of a cylindrical surface surrounding a second axis (18) extending perpendicular to the first axis (17), The first connecting element (10) has first arm projections (24) (25) arranged at a gap in which the connecting member (12) is arranged, The second connecting element (11) has second arm projections (26) (27) arranged at a gap in which the connecting member (12) is arranged, the first arm projections (24) (25) of the first connecting element (10) are formed by a part of a cylindrical surface surrounding the first axis (17) and have primary opposing contact surfaces (28) (29) that come into contact with the primary contact surfaces (13) (14) of the connecting member (12); the second arm projections (26) (27) of the second connecting element (11) are formed by a part of a cylindrical surface surrounding the second axis (18) and have secondary opposing contact surfaces (30) (31) that come into contact with the secondary contact surfaces (15) (16) of the connecting member (12); The first arm projections (24) (25) of the first connecting element (10) are adjacent to each other toward the free end at the portions continuing to the free end, The second arm projections (26) (27) of the second connecting element (11) are adjacent to each other toward the free ends at the portions continuing to the free ends, the connecting member (12) has a primary groove (19) extending in a plane perpendicular to the first axis (17), a first fastening element (34) fixed to the first connecting element (10) projects into the primary groove (19), the connecting member (12) has a secondary groove (20) extending in a plane perpendicular to the second axis (18), a second fastening element (35) fixed to the second connecting element (11) projects into the secondary groove (20); The connecting member (12) is fastened between the first fastening element (34) and the second fastening element (35). Connection mechanism.

2. 2. The coupling mechanism according to claim 1, The first fastening element (34) formed in a pin shape is arranged in a first bore portion (36) of the first connecting element (10), and the second fastening element (35) formed in a pin shape is arranged in a second bore portion (37) of the second connecting element (37). Connection mechanism.

3. 3. The coupling mechanism according to claim 2, The first fastening element (34) projects into the primary groove (19) at a central portion in the longitudinal axis direction over at least a portion of its entire circumference, The second fastening element (35) protrudes into the secondary groove (20) over at least a portion of its entire circumference at a central portion in the longitudinal axis direction. Connection mechanism.

4. The coupling mechanism according to claim 2 or 3, the first perforation (36) of the first connecting element (10) extends perpendicular to the first axis (17); The second perforation (37) of the second connecting element (11) extends perpendicular to the second axis (18). Connection mechanism.

5. 2. The coupling mechanism according to claim 1, the primary groove (19) extends along a first apex (22) of the connecting member (12) facing the first connecting element (10) and at least in a region of the primary contact surface (14) that continues on the opposite side of the first apex (22) of the connecting member (12); The secondary groove (20) extends along a second apex (23) of the connecting member (12) facing the second connecting element (11) and extends at least in the region of the secondary contact surfaces (15) (16) continuing on the opposite side of the second apex (23) of the connecting member (12). Connection mechanism.

6. The coupling mechanism according to any one of claims 1 to 5, The central portions of the first fastening element (34) and the second fastening element (35) are offset from both ends of the first fastening element (34) and the second fastening element (35). Connection mechanism.

7. The coupling mechanism according to any one of claims 1 to 5, Each of the first fastening element (34) and the second fastening element (35) is configured as a helical pin. Connection mechanism.

8. a closing member (1) supported by a valve rod (4) and displaceable between an open position for opening a valve opening (2) and a closed position for closing the valve opening (2); The blocking member (1) is connected to the valve rod (4) by a connecting mechanism, The connecting mechanism is configured by the connecting mechanism according to any one of claims 1 to 7. Vacuum valve.

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